Pressure sensor and manufacturing method thereof

Abstract

The pressure sensor includes a top cover component, an upper base (120), and a movable membrane (200), the top and bottom of which are formed with openings, the top cover component sealing the top opening of the upper base (120), and the movable membrane (200) sealing the bottom opening of the upper base (120). The top cover component, the upper base (120), and the movable membrane (200) together form a pressure reference chamber (100), and the pressure sensor is adapted to detect the pressure of the top cover component of the movable membrane (200) based on the state of the movable membrane (200). The pressure sensor detects the gas pressure on the side remote from the pressure reference chamber (100), the top cover component is formed with at least one air passage (510) and is used to communicate the pressure reference chamber (100) with the outside, the top cover component includes at least one closure member (521) and is used to seal the air passage (510), the closure member (521) melts at least partially when heated to a temperature higher than a predetermined melting temperature and solidifies after cooling to seal the air passage (510). A method for manufacturing the pressure sensor is further provided. The pressure sensor has high manufacturing efficiency, a robust structure, and high pressure detection accuracy.

Description

[Technical Field]

[0001] The present invention relates to the field of semiconductor processing equipment, and more particularly to pressure sensors and methods for manufacturing pressure sensors. [Background technology]

[0002] In the semiconductor industry, when producing chips using methods such as etching, it is usually necessary to precisely control the gas pressure, flow rate, etc., and to precisely monitor the pressure of the process gas in order to produce high-quality products.

[0003] However, the manufacturing process of conventional pressure sensors is complicated, the manufacturing efficiency is low, and the problem of accuracy decreasing during use often occurs. Therefore, how to provide a pressure sensor structure that is highly stable and easy to manufacture has become a technical problem that needs to be solved urgently in this field. Summary of the Invention [Means for solving the problem]

[0004] An object of the present invention is to provide a pressure sensor and a method for manufacturing the pressure sensor, which when used has high manufacturing efficiency, a robust structure, and high pressure detection accuracy.

[0005] In order to achieve the above object, one aspect of the present invention provides a pressure sensor comprising a top cover component, an upper base, and a movable membrane, wherein openings are formed on both the top and bottom of the upper base, the top cover component seals the top opening of the upper base, the movable membrane seals the bottom opening of the upper base, the top cover component, the upper base, and the movable membrane together form a pressure reference chamber, and the pressure sensor is used to detect gas pressure on the side of the movable membrane remote from the top cover component based on the state of the movable membrane, wherein at least one air conduction passage is formed in the top cover component, and the air conduction passage is used to connect the pressure reference chamber to the outside, and the top cover component includes at least one blocking member, which is used to block the air conduction passage, and the blocking member at least partially melts when heated to a temperature higher than a predetermined melting temperature and solidifies after cooling, thereby sealing the air conduction passage.

[0006] Optionally, the top cover component includes a top cover body that seals the upper opening of the upper base, the top cover body having the air passage penetrating through its thickness, and the blocking member before melting is provided on the top cover body corresponding to the air passage.

[0007] Optionally, the cross-sectional dimension at any position of the air passage is equal to or smaller than the cross-sectional dimension of the air passage on the side remote from the movable membrane.

[0008] Optionally, the air passage includes a receiving hole formed on the upper surface of the top cover body and a through hole extending from the bottom end of the receiving hole to the bottom surface of the top cover body, the diameter of the receiving hole being larger than the diameter of the through hole, and the blocking member before melting extends along a direction surrounding the axis of the through hole and is provided within the receiving hole.

[0009] Optionally, the air guide passage further includes a diameter-changing hole connected between the receiving hole and the through hole, and the diameter of the diameter-changing hole gradually increases in a direction away from the movable membrane.

[0010] Optionally, the hole diameter of the air introducing passage gradually increases in a direction away from the movable membrane, and the blocking member is disposed within the air introducing passage before melting.

[0011] Optionally, the top cover component further includes a flow guide member disposed within the air guide passage, and the blocking member is disposed on the flow guide member before being melted, and after being melted and cooled and solidified to form the blocking member, it seals the air guide passage together with the flow guide member, and the flow guide member is formed with at least one flow guide hole for communicating the pressure reference chamber with the outside.

[0012] Optionally, the top cover component includes a top cover body and an intake component provided on the top cover body, the intake component includes a pump cover and a getter agent provided in the pump cover, the top cover body is formed with a communication passage that communicates the pump cover with the pressure reference chamber, and a bottom end of the pump cover is provided within the communication passage; the air introducing passage includes the communication passage and a communication hole penetrating the bottom end side wall of the pump cover, the pressure reference chamber communicates with the outside via the communication passage and the communication hole in turn, the blocking member before melting is provided on the top cover body corresponding to the communication hole, and the communication hole is located lower than the upper surface of the top cover body, and / or The air-conducting passage includes a communication passage and a gap between the bottom end of the pump cover and the head cover body, the pressure reference chamber communicates with the outside via the communication passage and the gap in turn, and the blocking member before melting is fitted onto the outside of the pump cover and disposed on the head cover body.

[0013] Optionally, the material of the blocking member includes at least one of tin, aluminum, and silver, and a bonding material layer is provided on the surface of the flow guide member and / or on the inner wall of the air guide passage, and the material of the bonding material layer includes at least one of copper and nickel.

[0014] As a second aspect of the present invention, there is provided a method for manufacturing the pressure sensor described above, comprising the steps of: disposing the blocking member before melting at a position corresponding to the air introducing passage; disposing at least one unobstructed pressure sensor within the process chamber; evacuating the process chamber to reduce the gas pressure in the process chamber to below a predetermined pressure; heating the process chamber so that the temperature inside the process chamber does not fall below the predetermined melting temperature; and lowering the temperature of the process chamber so that the blocking member melts and then solidifies to form the blocking member and close the air introduction passage. A method for manufacturing a pressure sensor is provided.

[0015] Optionally, while evacuating the process chamber and reducing the gas pressure in the process chamber to less than a predetermined pressure, the manufacturing method further includes heating the process chamber to a first predetermined temperature, the first predetermined temperature being less than the predetermined melting temperature.

[0016] In a pressure sensor according to an embodiment of the present invention, the top cover component, the upper base, and the movable membrane form a pressure reference chamber, the top cover component defines an air passageway that connects the interior and exterior of the pressure reference chamber, and the blocking member at least partially melts when heated to a temperature higher than a predetermined melting temperature and solidifies after cooling, thereby sealing the air passageway. Therefore, by simply evacuating the pressure reference chamber before attaching the blocking member, and then heating and lowering the temperature of the pressure sensor after attaching the blocking member, the air passageway can be blocked by the blocking member that melts and solidifies after cooling, isolating the interior of the pressure reference chamber from the external environment and providing a pressure sensor that can be used for pressure detection. This eliminates the need for assembling structures such as a vacuum pump and copper tube during the manufacturing process of the pressure sensor, thereby improving the manufacturing efficiency of the pressure sensor. Furthermore, compared to a copper tube blocking structure that is exposed to the outside, the structure of the present invention, in which the blocking member at least partially melts and solidifies after cooling to seal the air passageway, is more robust, improving the structural stability of the pressure sensor as a whole, effectively preventing gas leakage from the pressure reference chamber, and ensuring the pressure detection accuracy of the pressure sensor.

[0017] In addition, the pressure reference chamber sealing process can be performed simultaneously for multiple pressure sensors according to the present invention, which further improves the manufacturing efficiency of the pressure sensors. [Brief explanation of the drawings]

[0018] The drawings are intended to provide a further understanding of the present invention, constitute a part of the specification, and are used to interpret the present invention together with the following specific embodiments, but are not intended to limit the present invention. [Figure 1] FIG. 1 is a structural schematic diagram of a conventional pressure sensor. [Figure 2] FIG. 2 is a cross-sectional view of the pressure sensor in FIG. [Figure 3] FIG. 2 is a schematic diagram of the pressure sensor in FIG. 1 after the copper pipe is cut off. [Figure 4]1 is a structural schematic diagram of a pressure sensor according to an embodiment of the present invention; [Figure 5] FIG. 5 is a cross-sectional view of the pressure sensor of FIG. 4. [Figure 6] 1A to 1C are schematic diagrams illustrating the principle of a method for manufacturing a pressure sensor according to an embodiment of the present invention; [Figure 7] 2 is a structural schematic diagram of a top cover portion of a pressure sensor according to an embodiment of the present invention; [Figure 8] FIG. 8 is a partially enlarged schematic diagram of region I in FIG. [Figure 9] 2 is a structural schematic diagram of a top cover portion of a pressure sensor according to an embodiment of the present invention; [Figure 10] FIG. 10 is a partially enlarged schematic view of region II in FIG. [Figure 11] FIG. 2 is a partial structural schematic diagram of a pressure sensor according to another embodiment of the present invention. [Figure 12] 12 is a schematic diagram showing the principle of how the molten material in FIG. 11 blocks the air introducing passage after it has melted and solidified. [Figure 13] FIG. 2 is a partial structural schematic diagram of a pressure sensor according to another embodiment of the present invention. [Figure 14] 14 is a schematic diagram showing the principle of how the molten material in FIG. 13 blocks the air introducing passage after it has melted and solidified. [Figure 15] FIG. 2 is a partial structural schematic diagram of a pressure sensor according to another embodiment of the present invention. [Figure 16] 16 is a schematic diagram showing the principle of how the molten material in FIG. 15 blocks the air introducing passage after it has melted and solidified. [Figure 17] 1 is a structural schematic diagram of an intake component in a pressure sensor according to an embodiment of the present invention; [Figure 18] FIG. 2 is a partial structural schematic diagram of a pressure sensor according to another embodiment of the present invention. [Figure 19] FIG. 2 is a partial structural schematic diagram of a pressure sensor according to another embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0019] Specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described here are used only to explain and interpret the present invention, and are not intended to limit the present invention.

[0020] 1 and 2 are schematic diagrams of the structure of a conventional pressure sensor, which includes a pressure reference chamber 100, a guide pin 300, an internal electrode 410, and a copper tube 50. The bottom opening of the pressure reference chamber 100 is sealed by a movable membrane 200, and the top is sealed by a top cover body 110. The internal electrode 410 is fixedly installed within the pressure reference chamber 100 and is parallel to and spaced apart from the movable membrane 200. One end of the guide pin 300 is connected to the internal electrode 410, and the other end penetrates to the outside of the pressure reference chamber 100. The copper tube 50 is fixedly connected to the top cover body 110 of the pressure reference chamber 100, with one end of the copper tube 50 communicating with the interior of the pressure reference chamber 100 and the other end communicating with the outside.

[0021] Before the pressure sensor can be used, the gas inside the pressure reference chamber 100 must first be extracted through the copper tube 50 to create a low-pressure environment inside the pressure reference chamber 100, and then the copper tube 50 must be shut off. As shown in Figure 3, at this time, the pressure reference chamber 100 is completely isolated from the external environment, so the low pressure inside the pressure reference chamber 100 can be maintained, and a usable pressure sensor can be obtained.

[0022] When the pressure sensor is placed in a measurement environment, the movable membrane 200 is deformed by the pressure difference between the internal and external air pressures of the pressure reference chamber 100, which changes the distance between the movable membrane 200 and the internal electrode 410. As the external air pressure increases, the distance between the movable membrane 200 and the internal electrode 410 decreases, and as the external air pressure decreases, the distance between the movable membrane 200 and the internal electrode 410 increases, which in turn changes the capacitance value of the capacitive structure consisting of the movable membrane 200 and the internal electrode 410. At this time, the detection circuit is electrically connected to the internal electrode 410 via the guide pin 300, and in response to the change in capacitance between the movable membrane 200 and the internal electrode 410, it can determine the gas pressure in the environment where the pressure sensor is placed, thereby realizing a pressure detection function.

[0023] However, during research, the inventors of the present invention discovered that the copper tube 50 in the pressure sensor used has an exposed, thin tube wall, posing a risk of gas leakage. Furthermore, the copper tube 50 only functions during the evacuation process, resulting in material waste. Furthermore, the manufacturing process for this structure is complicated, requiring steps such as first drilling a through-hole in the top cover body 110 and welding the copper tube 50 to the top cover body 110, then heating the pressure sensor to several hundred degrees Celsius, connecting the end of the copper tube 50 to a vacuum pump, and then evacuating the pressure reference chamber 100 with the vacuum pump. This allows the pressure reference chamber 100 to quickly reach a low pressure value, and then sealing the copper tube 50. Furthermore, in prior art, the vacuum pump connection, evacuation, and sealing processes must be performed sequentially for each pressure sensor, which means that only one product can be manufactured at a time, consuming a significant amount of production time. Furthermore, if the copper tube 50 fails to seal, secondary repairs are difficult, increasing the manufacturing costs of the pressure sensor.

[0024] In order to solve the above technical problems, a pressure sensor is provided as one aspect of the present invention. As shown in Figures 4 and 5, the pressure sensor includes a top cover component (including a top cover main body 110 and a substructure disposed thereon), an upper base 120, and a movable membrane 200, of which the top and bottom are formed with openings, the top cover component seals the top opening of the upper base 120, and the movable membrane 200 seals the bottom opening of the upper base 120. The top cover component, the upper base 120, and the movable membrane 200 together form a pressure reference chamber 100, and the pressure sensor is used to detect the gas pressure on the side of the movable membrane 200 away from the top cover component based on the state of the movable membrane 200. Specifically, the greater the external pressure of the pressure reference chamber 100, the more the movable membrane 200 recesses inward, and the smaller the external pressure of the pressure reference chamber 100, the less the movable membrane 200 recesses inward. Therefore, the pressure sensor can detect the gas pressure on the side of the movable membrane 200 away from the top cover component based on the changing state of the movable membrane 200.

[0025] As shown in FIG. 9, the top cover component has at least one air passage 510 formed therein, which connects the pressure reference chamber 100 to the outside, and the top cover component includes at least one closure member 521, which is used to seal the air passage 510, and as shown in FIGS. 7 to 10, the closure member 521 at least partially melts when heated to a temperature higher than a predetermined melting temperature and solidifies after cooling, thereby sealing the air passage 510.

[0026] In the pressure sensor according to the present invention, the top cover component is formed with an air passage 510 that can communicate between the inside and outside of the pressure reference chamber 100, and the molten member 520 is melted (or partially melted) at a high temperature and then cooled and solidified to form a blocking member 521, which seals the air passage 510. Therefore, by simply evacuating the pressure reference chamber 100 before the blocking member 521 is formed, and heating and lowering the temperature of the pressure sensor, the molten member 520 is melted, cooled, and solidified to form the blocking member 521, thereby sealing the air passage 510 and isolating the inside of the pressure reference chamber 100 from the external environment, thereby obtaining a pressure sensor that can be used for pressure detection. In the manufacturing process of the pressure sensor according to the present invention, there is no need to assemble structures such as a vacuum pump or copper pipe, improving the manufacturing efficiency of the pressure sensor. Furthermore, compared with a copper pipe blocking structure exposed to the outside, the structure of the present invention in which the air conduction passage 510 is sealed with the blocking member 521 formed by melting the molten member 520 and then cooling and solidifying it is stronger, improving the stability of the entire pressure sensor structure, and furthermore, it can effectively prevent gas leakage from the pressure reference chamber 100, ensuring the pressure detection accuracy of the pressure sensor.

[0027] In addition, the sealing process of the pressure reference chambers 100 of multiple pressure sensors according to the present invention can be carried out simultaneously (i.e., the manufacturing can be completed at the same time). Specifically, as shown in FIG. 6, multiple pressure sensors according to the present invention (where the melting element 520 has not yet melted) are placed in the same process chamber, the process chamber is evacuated, the gas pressure in the process chamber is reduced to a predetermined pressure, the process chamber is heated, and after the temperature inside the process chamber reaches the predetermined melting temperature, the process chamber is simply cooled down, so that the melting elements 520 in the multiple pressure sensors can be solidified to form blocking elements 521, thereby blocking the corresponding air guide passages 510. This enables the manufacturing of multiple pressure sensors according to the present invention in the same process, and further improves the manufacturing efficiency of the pressure sensors significantly.

[0028] As an optional embodiment of the present invention, the pressure sensor can detect the change in the movable membrane 200 based on an equivalent capacitance structure. Specifically, as shown in Figures 4 and 5, the pressure sensor further includes a guide pin 300 and an internal electrode 410, one end of the guide pin 300 is connected to the internal electrode 410, and the other end penetrates to the outside of the pressure reference chamber 100 and is used to connect to a detection circuit (not shown), so that the detection circuit can determine the gas pressure in the environment where the pressure sensor is placed in response to the change in capacitance between the movable membrane 200 and the internal electrode 410. That is, the position of the internal electrode 410 does not change, and the greater the pressure outside the pressure reference chamber 100, the smaller the distance between the movable membrane 200 and the internal electrode 410, and the corresponding increase in capacitance between them; conversely, the smaller the pressure outside the pressure reference chamber 100, the larger the distance between the movable membrane 200 and the internal electrode 410, and the corresponding decrease in capacitance between them. Therefore, the detection circuit can determine the magnitude of the gas pressure on the side of the movable membrane 200 away from the top cover component based on the magnitude of the capacitance value.

[0029] In a preferred embodiment of the present invention, as shown in Figures 4 and 5, the pressure sensor further includes a lower base 700, the top of which is sealed against the bottom of the upper base 120, a gas uniformity groove corresponding to the position of the movable membrane 200 is formed on the top of the lower base 700, a connecting pipe is provided on the bottom of the lower base 700, and a through-hole that passes through the connecting pipe is formed on the bottom of the gas uniformity groove, so that the pressure sensor can be remotely connected to the gas environment to be measured via the connecting pipe, and there is no need to install the pressure sensor in the gas environment to be measured.

[0030] For example, the process chamber of the gas pressure to be measured may be connected to the connecting pipe of the lower base 700 via a pipe line, so that the gas pressure on the side of the movable membrane 200 away from the top cover component matches the gas pressure in the process chamber to be measured, and further, the gas pressure of the gas environment to be measured is remotely detected via a pressure sensor, reducing the difficulty of wiring the pressure sensor, reducing the contact area between the pressure sensor and the gas environment to be measured, and extending the service life of the pressure sensor.

[0031] As an optional embodiment of the present invention, as shown in Figures 4 and 5, the top cover component includes a top cover body 110, which seals the top opening of the upper base 120, and the top cover body 110 has an air passage 510 formed therethrough along its thickness, and a pre-melting blocking member 521 (i.e., melting member 520) is provided on the top cover body 110 corresponding to the air passage 510.

[0032] In an alternative embodiment of the present invention, the top cover body 110 is welded to the upper base 120 to ensure the pressure reference chamber 100 is airtight.

[0033] In order to ensure the structural strength of the pressure reference chamber 100, in a preferred embodiment of the present invention, the materials of the top cover body 110, the upper base 120 and the movable membrane 200 are all metallic materials.

[0034] It should be noted that the number of air passages 510 may be multiple to improve the efficiency of suction during vacuum suction, but the number of openings in the top cover body 110 should be minimized to ensure the sealing of the pressure reference chamber 100. For example, as shown in FIG. 4, it is preferred that the top cover component has only one air passage 510.

[0035] In a preferred embodiment of the present invention, as shown in FIGS. 4 and 5, the top cover component further includes an intake component 600 mounted on the top cover body 110. As shown in FIG. 18, the intake component 600 includes a pump cover 610 and a getter material 620 mounted within the pump cover 610. The top cover body 110 has a communication passage connecting the pump cover 610 to the pressure reference chamber 100, and the bottom end of the pump cover 610 is located within the communication passage and communicates with the interior of the pressure reference chamber 100. The getter material 620 can continuously absorb gas within the pressure reference chamber 100, maintaining a low pressure state within the pressure reference chamber 100. In an optional embodiment of the present invention, as shown in FIG. 18, a horizontal filter 630 is mounted within the pump cover 610 to prevent the getter material from falling into the pressure reference chamber 100.

[0036] In an optional embodiment of the present invention, as shown in FIG. 5 , the pressure reference chamber 100 is provided with a mounting member 400, which is made of an insulating material and has an outwardly protruding annular boss around its periphery, and the inner wall of the upper base 120 has an inwardly protruding annular boss surrounding the mounting member 400, the annular boss of the mounting member 400 being attached to the annular boss of the upper base 120, and an internal electrode 410 is provided on the bottom surface of the mounting member 400, which may be, for example, a metal plating layer formed on the bottom surface of the mounting member 400.

[0037] Optionally, a conductive through hole is formed in the mounting member 400 in the height direction, and a metal layer is formed on the upper surface of the mounting member 400 and on the inner wall of the conductive through hole, and the metal layer on the upper surface of the mounting member 400 is electrically connected to the internal electrode 410 via the metal layer on the inner wall of the conductive through hole, and the guide pin 300 is electrically connected to the metal layer on the upper surface of the mounting member 400.

[0038] To ensure that the melting element 520 can seal the air passage 510 after melting, in a preferred embodiment of the present invention, the air passage 510 is a non-linear hole, and the cross-sectional dimension at any position of the air passage 510 is equal to or smaller than the cross-sectional dimension at the side farther from the movable membrane 200. That is, at any position in the air passage 510, the cross-sectional dimension at that position is equal to or smaller than the cross-sectional dimension at any other position above that position. That is, the diameter of the air passage 510 decreases from top to bottom, which ensures that the melting element 520 flows downward along the air passage 510 after melting, preventing the melting element 520 from diffusing into the top cover body 110 and ensuring that the melting element 520 seals the air passage 510. In addition, the hole diameter of the air guide passage 510 is reduced at the bottom, which effectively improves the surface tension of the liquid surface at the bottom when the molten material 520 flows downward after melting. This effectively prevents the molten material 520 from passing through the air guide passage 510 and falling into the pressure reference chamber 100 after melting, and further ensures the sealing effect of closing the air guide passage 510 after the molten material 520 has melted.

[0039] In a preferred embodiment of the present invention, the minimum hole diameter of the air guide passage 510 is less than 2 mm, which ensures that the surface tension of the bottom liquid surface is sufficiently large when the melting element 520 flows to that position, so that the melting element 520 in a liquid state can be positioned within the air guide passage 510.

[0040] In some embodiments of the present invention, the melting member 520 may be directly disposed in the top cover body 110 at a position corresponding to the air passage 510 .

[0041] 11 and 12, in order to ensure the stability of the position of melting element 520, in a preferred embodiment of the present invention, air guide passage 510 includes receiving hole 511 formed in the upper surface of top cover body 110 and through-hole 512 penetrating from the bottom end of receiving hole 511 to the bottom surface of top cover body 110, the diameter of receiving hole 511 being larger than the diameter of through-hole 512. Blocking element 521 before melting (i.e., melting element 520) extends in a direction surrounding the axis of through-hole 512 and is disposed within receiving hole 511. For example, receiving hole 511 and through-hole 512 communicate in sequence from the upper surface to the bottom surface of top cover body 110, i.e., one end of receiving hole 511 is located on the upper surface of top cover body 110 and the other end is connected to one end of through-hole 512, the other end of through-hole 512 being located on the bottom surface of top cover body 110.

[0042] In the embodiment of the present invention, melting element 520 is provided in receiving hole 511 with the largest hole diameter, which prevents the position of melting element 520 from shifting, improving the stability of the position of melting element 520. Furthermore, melting element 520 extends in a curved manner along a direction surrounding the axis of through hole 512, so that when airflow is blown out of through hole 512 during the evacuation process, the position of melting element 520 is changed and the flow of melting element 520 into through hole 512 is not affected. In this case, melting element 520 can be positioned to avoid through hole 512 with the smallest hole diameter in an orthogonal projection of a radial cross section of through hole 512.

[0043] In some embodiments of the present invention, the melting element 520 may be a sheet-like element, or may be a strip-like element extending in a curved shape, for example, curved in a "C" shape around the axis of the through-hole 512. In order to improve the circumferential uniformity of the force received between the melting element 520 and the air guide passage 510 and ensure the positional stability of the melting element 520, in a preferred embodiment of the present invention, the shape of the blocking element 521 (i.e., the melting element 520) before melting is annular.

[0044] In order to improve the smoothness with which the molten material 520 flows downward along the air guideway 510 after melting, in a preferred embodiment of the present invention, as shown in Figures 7, 8 and 10, the air guideway 510 further includes a diameter-changing hole 513 connected between the accommodating hole 511 and the through-hole 512, and the diameter of the diameter-changing hole 513 gradually increases in the direction away from the movable membrane 200, thereby making the transition between the accommodating hole 511 and the through-hole 512 smoother, improving the smoothness with which the molten material 520 flows along the path of the accommodating hole 511, the diameter-changing hole 513 and the through-hole 512 after melting. This also ensures a sealing effect that closes the air guideway 510 after the molten material 520 has melted.

[0045] In another preferred embodiment of the present invention, as shown in Figures 13 to 16, the hole diameter of the air guide passage 510 gradually increases in the direction away from the movable membrane 200, and the blocking member 521 before melting (i.e., the molten member 520) is located inside the air guide passage 510, that is, the hole diameter of the air guide passage 510 gradually changes along the height direction, thereby reducing the ridge and step structure on the inner wall of the air guide passage 510, and further improving the fluidity of the molten member 520 flowing downward along the air guide passage 510 after melting, and ensuring the sealing effect of closing the air guide passage 510 after melting the molten member 520.

[0046] In some embodiments of the present invention, as shown in Figures 13 and 14, the hole diameter of the air conduction passage 510 does not change with the rate of change in height (the amount of change in hole diameter corresponding to each fixed change in height), i.e., the air conduction passage 510 is formed as a tapered hole.

[0047] Alternatively, in some embodiments of the present invention, the rate at which the diameter of the air passage 510 changes with height may vary along the height direction, for example, as shown in Figures 15 and 16, the rate at which the diameter of the air passage 510 changes with height may decrease and then increase, thereby forming a variable diameter hole with an "S"-shaped cross-sectional profile.

[0048] In order to improve the connection strength between the fusible element 520 and the inner wall of the air guideway 510 and ensure the sealing effect of the fusible element 520 on the pressure reference chamber 100, in a preferred embodiment of the present invention, the inner surface of the air guideway 510 can be treated to increase its surface area. For example, the inner wall of the air guideway 510 can be formed with an internal thread or a structure similar to a thread, or the inner wall of the air guideway 510 can be subjected to a frost treatment, surface etching treatment, etc., to increase the surface area of ​​the inner wall of the air guideway 510 and further increase the contact area between the inner wall of the air guideway 510 and the fusible element 520, thereby improving the connection strength between the fusible element 520 and the top cover body 110 and ensuring the sealing effect of the fusible element 520 on the pressure reference chamber 100.

[0049] In order to further ensure the sealing effect of closing the air guideway 510 after the melting element 520 is melted, in a preferred embodiment of the present invention, as shown in FIG. 17 , the top cover component further includes a flow guide member 530 disposed within the air guideway 510, and the blocking element 521 (i.e., the melting element 520) before melting is disposed within the flow guide member 530, and after melting, cooling and solidifying to form the blocking element 521, it seals the air guideway 510 together with the flow guide member 530, and the flow guide member 530 has at least one flow guide hole formed therein to connect the pressure reference chamber 100 to the outside.

[0050] In this embodiment of the present invention, the top cover body 110 of the pressure reference chamber 100 is further provided with a flow-guiding member 530, which guides the melted molten member 520 after it has melted, and at the same time, the melted member 520 melts and seals the air-conduction passage 510 together with the flow-guiding member 530. Therefore, the flow-guiding member 530 can improve the coupling performance and connection strength between the melted member 520 and the air-conduction passage 510, and can also ensure the sealing effect of the melted member 520 closing the air-conduction passage 510 after it has melted.

[0051] In addition, to prevent the melting element 520 from completely blocking the air passage 510 and preventing the gas in the pressure reference chamber 100 from flowing out smoothly, the flow guide element 530 can play a supporting role for the blocking element 521 (i.e., the melting element 520) before melting.

[0052] In a preferred embodiment of the present invention, the flow guide member 530 has a plurality of flow guide holes formed therein. For example, the flow guide member 530 may be formed as a porous part such as a mesh or a porous part, which ensures smooth outflow of gas from the pressure reference chamber 100 and prevents the molten member 520 from falling into the pressure reference chamber 100. After the molten member 520 melts, the porous flow guide member 530 provides greater surface tension, preventing the molten member 520 in a liquid state from flowing downward into the pressure reference chamber 100. In addition, the porous flow guide member 530 forms a stronger bond with the molten member 520 after it solidifies, thereby improving product reliability.

[0053] In order to improve the flexibility of the manufacturing process of the pressure sensor, in a preferred embodiment of the present invention, the flow guide member 530 is fixedly connected to the top cover body 110 before the melting member 520 is melted, or the flow guide member 530 is fixedly connected to the melting member 520 in advance.

[0054] For example, the flow guide member 530 may first be joined to the air guide passage 510 (for example, by welding the air guide passage 510 and the flow guide member 530 together by brazing), and then the molten member 520 may melt, cool, and solidify to form the blocking member 521, and then be joined to the flow guide member 530 and the air guide passage 510.

[0055] Alternatively, the flow guide member 530 may first be bonded to the melting member 520 (for example, by first melting and solidifying a small portion of the blocking member 521 and then welding it to the flow guide member 530), and then the melting member 520 may be re-melted before being bonded to the flow guide member 530 and the air guide passage 510.

[0056] Furthermore, since the pressure sensor needs to undergo high-temperature degassing (i.e., vacuum exhaust operation), the predetermined melting temperature of the melting element 520 must not be too low, and generally must be higher than 200°C (°F); on the other hand, the melting temperature of the melting element 520 must not be too high, otherwise it will not only increase the manufacturing cost of the pressure sensor (it will be necessary to replace auxiliary equipment such as temperature measuring parts that can withstand higher temperatures), but will also be likely to cause damage to other parts in the product; therefore, it must generally be lower than 800°C.

[0057] For example, as an optional embodiment of the present invention, the material of the blocking member 521 (i.e., the melting member 520) before melting may include at least one of low-melting-point metal materials such as tin, aluminum, silver, etc. Alternatively, it may include a non-metallic material such as low-melting-point glass.

[0058] To further ensure the sealing effect of melting element 520 in closing air passage 510 after melting, in a preferred embodiment of the present invention, a material film layer having good weldability and sealing properties with the melting element may be provided on the surface of flow guide member 530 or the inner wall of air passage 510, thereby ensuring the sealing effect of melting element 520 in air passage 510 and expanding the range of material options for melting element 520. Specifically, a bonding material layer is provided on the surface of flow guide member 530 and / or the inner wall of air passage 510, and the material of the bonding material layer includes at least one of copper and nickel.

[0059] In an alternative embodiment of the present invention, the bonding material layer can be applied to the surface of the flow guide member 530 and / or the inner walls of the air guide passages 510 by electrolytic plating.

[0060] In order to save material costs and improve the sealing performance of the pressure reference chamber 100, in a preferred embodiment of the present invention, the air guide passage 510 corresponding to the melting element 520 may be a through-hole structure of another element in the top cover body 110 corresponding to the top cover body 110, or a through-hole structure of another element attached to the top cover body 110.

[0061] For example, as shown in FIG. 19, the air-conducting passage includes a communication passage and a gap between the bottom end of the pump cover 610 and the top cover body 110, and the pressure reference chamber 100 can communicate with the outside through the communication passage and the gap in sequence, and the blocking member 521 before melting (i.e., the melting member 520) is fitted to the outside of the pump cover 610 and disposed in the top cover body 110.

[0062] In this embodiment of the present invention, the intake component 600 and the interior of the pressure reference chamber 100 communicate with each other through the gap between the bottom end of the pump cover 610 and the top cover body 110. During the evacuation process, gas is drawn out through the gap between the bottom end of the pump cover 610 and the top cover body 110, and the molten element 520 melts and solidifies to form the blocking element 521, which then blocks the gap between the bottom end of the pump cover 610 and the side wall of the air passage 510, thereby sealing the pressure reference chamber 100.

[0063] In order to improve the flow of gas during the evacuation process, in a preferred embodiment of the present invention, as shown in FIG. 19 , the gas passage 510 further includes a communication hole 611 penetrating the side wall of the pump cover 610 and adjacent to the bottom end of the pump cover 610, and the communication hole 611 is formed in the side wall of the pump cover 610 along the thickness direction thereof, and the pressure reference chamber 100 communicates with the outside through the communication hole and the communication hole 611, and also through the communication hole and the gap between the bottom end of the pump cover 610 and the top cover body 110, and a blocking member 521 before melting (i.e., melting member 520) is provided on the top cover body 110 corresponding to the communication hole, and the communication hole is located lower than the top surface of the top cover body.

[0064] Alternatively, the bottom end of the pump cover 610 may be fixedly connected (e.g., welded) to the top cover body 110 in advance, i.e., there is no gap between the bottom end of the pump cover 610 and the top cover body 110, the air guide passage 510 only includes a connecting passage and a connecting hole 611 that penetrates the side wall of the pump cover 610 and is close to the bottom end of the pump cover 610, the pressure reference chamber 100 communicates with the outside sequentially through the connecting passage and the connecting hole 611, the pre-melting blocking member 521 (i.e., the melting member 520) is provided on the top cover body 110 corresponding to the connecting hole, and the position of the connecting hole is lower than the upper surface of the top cover body.

[0065] In a second aspect of the present invention, there is provided a method for manufacturing a pressure sensor, the method comprising the steps of:

[0066] Step S1: The closing member 521 before melting (ie, the melting member 520) is placed at a position corresponding to the air introducing passage 510.

[0067] Step S2: Place at least one pressure sensor according to the present invention in the process chamber.

[0068] Step S3: The process chamber is evacuated to a vacuum, and the gas pressure in the process chamber is reduced to a predetermined pressure.

[0069] Step S4: The process chamber is heated so that the temperature inside the process chamber does not fall below a predetermined melting temperature.

[0070] Step S5: The temperature of the process chamber is lowered so that the melting member 520 melts and then solidifies to form the blocking member 521, which blocks the corresponding air passage.

[0071] In the method for manufacturing a pressure sensor according to the present invention, a top cover component of the pressure sensor is formed with an air passage 510 that connects the inside and outside of the pressure reference chamber 100. A molten element 520 corresponding to the position of the air passage 510 is heated to at least partially melt, and the at least partially melted molten element 520 is cooled and solidified to seal the air passage 510. Therefore, by simply evacuating the pressure reference chamber 100 before the formation of the blocking element 521, and then heating and cooling the pressure sensor, the molten element 520 is melted and the blocking element 521 is solidified, sealing the air passage 510 and isolating the inside of the pressure reference chamber 100 from the external environment, thereby obtaining a pressure sensor that can be used for pressure detection. The manufacturing process for the pressure sensor provided by the present invention does not require the assembly of structures such as a vacuum pump and copper pipe, improving the manufacturing efficiency of the pressure sensor. Furthermore, compared with a copper pipe blocking structure exposed to the outside, the structure of the present invention in which the air conduction passage 510 is sealed with the blocking member 521 formed by melting the molten member 520 and then cooling and solidifying it is stronger, improving the stability of the entire pressure sensor structure, and furthermore, it can effectively prevent gas leakage from the pressure reference chamber 100, ensuring the pressure detection accuracy of the pressure sensor.

[0072] Furthermore, in the manufacturing method of the pressure sensor provided in the present invention, the sealing process of the pressure reference chamber 100 can be performed simultaneously for multiple pressure sensors, so that multiple pressure sensors can be manufactured in the same process, and the manufacturing efficiency of the pressure sensor is greatly improved.

[0073] Optionally, while evacuating the process chamber and reducing the gas pressure in the process chamber below a predetermined pressure, the manufacturing method further includes heating the process chamber to a first predetermined temperature, which is lower than the predetermined melting temperature, i.e., preheating the pressure sensor but ensuring that the melting element 520 does not start to melt, so as to prevent the air guide passage 510 from being prematurely blocked. Optionally, the first predetermined temperature may be 200°C to 300°C.

[0074] Optionally, as shown in FIG. 6, the process chamber includes a chamber 10, a heater 20, and a vacuum pump 30, where the heater 20 is provided in the chamber 10 to heat a pressure sensor in the chamber 10 (for example, the pressure sensor can be heated by infrared light irradiation), and the vacuum pump 30 is provided in an exhaust pipe of the chamber 10 to evacuate the process chamber (i.e., extract gases in the chamber 10).

[0075] As a third aspect of the present invention, there is provided a semiconductor processing apparatus, the semiconductor processing apparatus including a detection circuit and a pressure sensor provided in the present invention, the detection circuit being connected to a guide pin of the pressure sensor and responding to a change in capacitance between the movable membrane 200 and the internal electrode 410 of the pressure sensor to determine the gas pressure in the environment in which the pressure sensor is placed.

[0076] In the semiconductor processing equipment provided by the present invention, top cover body 110 of pressure reference chamber 100 of the pressure sensor has an air passage 510 formed therein, penetrating top cover body 110 in the thickness direction, and molten member 520 melts and re-solidifies to form blocking member 521 in air passage 510, which blocks air passage 510, improving the stability of the entire pressure sensor structure, effectively preventing gas leakage from pressure reference chamber 100, and ensuring the pressure detection accuracy of the pressure sensor. In addition, multiple pressure sensors can be manufactured simultaneously, improving the manufacturing efficiency of pressure sensors.

[0077] It should be understood that the above-described embodiments are merely exemplary embodiments adopted to explain the principles of the present application, and the present application is not limited thereto. Those skilled in the art can make various modifications and improvements without departing from the spirit and substance of the present application, and these modifications and improvements are also considered to fall within the scope of the claims of the present application. [Explanation of symbols]

[0078] 100: Pressure reference chamber, 110: Top cover body, 120: Upper base, 200: Movable membrane, 300: Guide pin, 400: Mounting member, 410: Internal electrode, 510: Air conduction passage, 511: Receiving hole, 512: Through hole, 513: Diameter-changing hole, 520: Melting member, 521: Closing member, 530: Flow guide member, 600: Intake component, 610: Pump cover, 611: Communication hole, 620: Getter material, 630: Filter, 700: Lower base The following is a summary of the claims as originally filed: [1] A pressure sensor comprising a top cover component, an upper base, and a movable membrane, wherein openings are formed on both the top and bottom of the upper base, the top cover component sealing the top opening of the upper base, the movable membrane sealing the bottom opening of the upper base, the top cover component, the upper base, and the movable membrane forming a pressure reference chamber together, the pressure sensor being used to detect gas pressure on the side of the movable membrane remote from the top cover component based on the state of the movable membrane, wherein the top cover component has at least one air conduction passage formed therein, the air conduction passage being used to connect the pressure reference chamber to the outside, the top cover component comprising at least one blocking member, the blocking member being used to block the air conduction passage, the blocking member at least partially melting when heated to a temperature higher than a predetermined melting temperature and solidifying after cooling, thereby blocking the air conduction passage. Pressure sensor. [2] The top cover component includes a top cover body, the top cover body seals the upper opening of the upper base, the top cover body has the air passage penetrating in the thickness direction thereof, and the blocking member before melting is provided on the top cover body in correspondence with the air passage. [1] The pressure sensor according to [1]. [3] The cross-sectional dimension at any position of the air guide passage is equal to or smaller than the cross-sectional dimension on the side farther from the movable membrane. [2] The pressure sensor according to [2]. [4] The air guide passage includes a receiving hole formed on the upper surface of the top cover body and a through hole penetrating from the bottom end of the receiving hole to the bottom surface of the top cover body, the diameter of the receiving hole being larger than the diameter of the through hole, and the blocking member before melting extends along a direction surrounding the axis of the through hole and is provided within the receiving hole. [3] The pressure sensor according to [3]. [5] The air guide passage further includes a diameter-changing hole connected between the accommodation hole and the through hole, and the diameter of the diameter-changing hole gradually increases in a direction away from the movable membrane. [4] The pressure sensor according to [4]. [6] The hole diameter of the air introducing passage gradually increases in a direction away from the movable membrane, and the blocking member before melting is provided in the air introducing passage. [3] The pressure sensor according to [3]. [7] The top cover component further includes a flow guide member provided in the air guide passage, the blocking member being provided on the flow guide member before melting, and after melting, cooling and solidifying to form the blocking member, sealing the air guide passage together with the flow guide member, and the flow guide member having at least one flow guide hole for communicating the pressure reference chamber with the outside. [3] The pressure sensor according to [3]. [8] The top cover component includes a top cover body and an intake component provided in the top cover body, the intake component includes a pump cover and a getter agent provided in the pump cover, the top cover body has a communication passage formed therein that communicates the pump cover with the pressure reference chamber, and a bottom end of the pump cover is provided within the communication passage; the air introducing passage includes the communication passage and a communication hole penetrating the bottom end side wall of the pump cover, the pressure reference chamber communicates with the outside via the communication passage and the communication hole in turn, the blocking member before melting is provided on the top cover body corresponding to the communication hole, and the communication hole is located lower than the upper surface of the top cover body, and / or The air introduction passage includes a communication passage and a gap between the bottom end of the pump cover and the top cover body, the pressure reference chamber communicates with the outside via the communication passage and the gap in this order, and the closing member before melting is fitted to the outside of the pump cover and disposed on the top cover body. [1] The pressure sensor according to [1]. [9] The material of the blocking member includes at least one of tin, aluminum, and silver, and a bonding material layer is provided on the surface of the flow guide member and / or on the inner wall of the air guide passage, and the material of the bonding material layer includes at least one of copper and nickel. [7] The pressure sensor according to [7].

[10] A method for manufacturing the pressure sensor according to any one of [1] to [9], disposing the blocking member before melting at a position corresponding to the air introducing passage; disposing at least one unobstructed pressure sensor within the process chamber; evacuating the process chamber to reduce the gas pressure in the process chamber to below a predetermined pressure; heating the process chamber so that the temperature inside the process chamber does not fall below the predetermined melting temperature; and lowering the temperature of the process chamber so that the blocking member melts and then solidifies to form the blocking member and close the air introduction passage. A method for manufacturing a pressure sensor.

[11] The method further includes simultaneously evacuating the process chamber and reducing the gas pressure in the process chamber to below a predetermined pressure, and heating the process chamber to a first predetermined temperature, the first predetermined temperature being lower than the predetermined melting temperature.

[10] The manufacturing method described in

[10] .

Claims

1. a pressure sensor comprising a top cover component, an upper base, and a movable membrane, the top and bottom of the top base having openings formed therein, the top cover component sealing the top opening of the top base, the movable membrane sealing the bottom opening of the top base, the top cover component, the upper base, and the movable membrane forming a pressure reference chamber together; the pressure sensor being used to detect a gas pressure on a side of the movable membrane remote from the top cover component based on a state of the movable membrane; the top cover component having at least one air passage formed therein, the air passage communicating the pressure reference chamber with the outside; the top cover component having at least one blocking member used to block the air passage, the blocking member being disposed within the air passage before melting; the blocking member at least partially melting when heated to a temperature higher than a predetermined melting temperature and solidifying after cooling to block the air passage; the top cover component includes a top cover body, the top cover body sealing the top opening of the upper base, the top cover body having the air passage penetrating in its thickness direction, and the blocking member before melting is provided on the top cover body corresponding to the air passage; the top cover component further includes a flow guide member disposed within the air guide passage, the blocking member being disposed on the flow guide member before being melted, and sealing the air guide passage together with the flow guide member after being melted, cooled, and solidified to form the blocking member, and the flow guide member having at least one flow guide hole formed therein for communicating the pressure reference chamber with the outside.

2. 2. The pressure sensor according to claim 1, wherein the cross-sectional dimension at any position of said air conduction path is equal to or smaller than the cross-sectional dimension of the side remote from said movable membrane.

3. 3. The pressure sensor of claim 2, wherein the air passage includes a receiving hole formed in the upper surface of the top cover body and a through hole extending from the bottom end of the receiving hole to the bottom surface of the top cover body, the diameter of the receiving hole being larger than the diameter of the through hole, and the blocking member before melting extends along a direction surrounding the axis of the through hole and is disposed within the receiving hole.

4. 4. The pressure sensor according to claim 3, wherein the air passage further includes a diameter-changing hole connected between the accommodating hole and the through hole, and the diameter of the diameter-changing hole gradually increases in a direction away from the movable membrane.

5. 3. The pressure sensor according to claim 2, wherein the hole diameter of the air introducing passage gradually increases in a direction away from the movable membrane, and the blocking member before melting is provided inside the air introducing passage.

6. the top cover component includes a top cover body and an intake component provided on the top cover body, the intake component includes a pump cover and a getter agent provided within the pump cover, the top cover body is formed with a communication passage that communicates the pump cover with the pressure reference chamber, and the bottom end of the pump cover is provided within the communication passage; the air introducing passage includes the communication passage and a communication hole penetrating the bottom end side wall of the pump cover, the pressure reference chamber communicates with the outside via the communication passage and the communication hole in turn, the blocking member before melting is provided on the top cover body corresponding to the communication hole, and the communication hole is located below the upper surface of the top cover body, and / or The air introduction passage includes a communication passage and a gap between the bottom end of the pump cover and the top cover body, the pressure reference chamber communicates with the outside via the communication passage and the gap in this order, and the closing member before melting is fitted to the outside of the pump cover and disposed on the top cover body. The pressure sensor of claim 1 .

7. 2. The pressure sensor of claim 1, wherein the material of the blocking member includes at least one of tin, aluminum, and silver, and the pressure sensor has a bonding material layer on the surface of the flow guide member and / or on the inner wall of the air guide passage, and the material of the bonding material layer includes at least one of copper and nickel.

8. A method for manufacturing the pressure sensor according to any one of claims 1 to 7, comprising the steps of: disposing the blocking member before melting at a position corresponding to the air introducing passage; disposing at least one unobstructed pressure sensor within the process chamber; evacuating the process chamber to reduce the gas pressure in the process chamber to below a predetermined pressure; heating the process chamber so that the temperature inside the process chamber does not fall below the predetermined melting temperature; and lowering the temperature of the process chamber so that the blocking member melts and then solidifies to form the blocking member and close the air introduction passage. A method for manufacturing a pressure sensor.

9. 9. The manufacturing method of claim 8, wherein the manufacturing method further comprises, simultaneously with evacuating the process chamber and reducing the gas pressure in the process chamber to a predetermined pressure, heating the process chamber to a first predetermined temperature, the first predetermined temperature being lower than the predetermined melting temperature.

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