Coated and cutting tools

Abstract

This coated tool comprises a substrate and a coating layer disposed on the surface of the substrate. The coating layer contains a cubic crystal comprising: at least one element selected from among Group 4a, 5a, and 6a elements in the periodic table, Al, Si, B, Y, and Mn; and at least one element selected from among C and N. In the X-ray intensity distribution along the α axis of the positive pole figure for the (111) plane of the coating layer as measured in the range of 0-90°, the difference between the maximum value and the minimum value of the X-ray intensity in the α-axis angle range of 30-90° is 10% or less of the maximum value.

Description

[Technical Field]

[0001] The present disclosure relates to coated tools and cutting tools. [Background technology]

[0002] BACKGROUND ART Coated tools are known as tools used in cutting processes such as turning and milling, and have improved wear resistance and the like by coating the surface of a substrate made of cemented carbide, cermet, ceramics, or the like with a coating layer. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2019 / 146710 [Patent Document 2] International Publication No. 2011 / 016488 [Patent Document 3] International Publication No. 2010 / 007958 Summary of the Invention

[0004] A coated tool according to one embodiment of the present disclosure includes a substrate and a coating layer located on the surface of the substrate. The coating layer contains cubic crystals composed of at least one element selected from the group 4a, 5a, and 6a elements of the periodic table, Al, Si, B, Y, and Mn, and at least one element selected from C and N. In the X-ray intensity distribution of the α-axis of a pole figure for the (111) plane of the coating layer, within a measurement range of 0° to 90° inclusive, the difference between the maximum and minimum values ​​of the X-ray intensity in the α-axis angle range of 30° to 90° inclusive is 10% or less of the maximum value. [Brief explanation of the drawings]

[0005] [Figure 1] FIG. 1 is a perspective view showing an example of a coated tool according to an embodiment. [Figure 2] FIG. 2 is a side cross-sectional view showing an example of a coated tool according to an embodiment. [Figure 3] FIG. 3 is a schematic enlarged view of a corner portion of a chip body according to a reference example. [Figure 4] FIG. 4 is a cross-sectional view showing an example of a coating layer according to an embodiment. [Figure 5] FIG. 5 is a front view showing an example of a cutting tool according to an embodiment. [Figure 6] FIG. 6 is a graph showing the X-ray intensity distribution of a pole figure for the (111) plane of a cubic crystal contained in the coating layer. [Figure 7] FIG. 7 is a graph showing the X-ray intensity distribution of a pole figure for the (200) plane of a cubic crystal contained in the coating layer. [Figure 8] FIG. 8 is a graph showing the correlation between the crystallite size on the (200) plane of the wear-resistant layer and the primary boundary wear amount. [Figure 9] FIG. 9 is a graph showing the correlation between the Vickers hardness of the wear-resistant layer and the amount of secondary boundary wear. [Figure 10] FIG. 10 is a graph showing the correlation between the Ti ratio (a) of the wear-resistant layer and the primary boundary wear amount. [Figure 11] FIG. 11 is a graph showing the correlation between the Al ratio (b) of the wear-resistant layer and the primary boundary wear amount. [Figure 12] FIG. 12 is a graph showing the correlation between the Cr ratio (c) of the wear-resistant layer and the primary boundary wear amount. [Figure 13] FIG. 13 is a graph showing the correlation between the peeling load and the amount of secondary boundary wear. [Figure 14] FIG. 14 is a graph showing the correlation between the Ti ratio (x) of the adhesive layer and the peel load. [Figure 15] FIG. 15 is a graph showing the correlation between the Al ratio (y) of the adhesive layer and the peel load. [Figure 16] FIG. 16 is a graph showing the correlation between the Ti ratio (x) of the adhesive layer and the amount of secondary boundary wear. [Figure 17] FIG. 17 is a graph showing the correlation between the Al ratio (y) of the adhesive layer and the amount of secondary boundary wear. [Figure 18]FIG. 18 is a graph showing the correlation between the Ti ratio (e) of the intermediate layer and the crater wear depth. [Figure 19] FIG. 19 is a graph showing the correlation between the Al ratio (f) of the intermediate layer and the crater wear depth. [Figure 20] FIG. 20 shows images showing the cutting edge condition of three coated tools with different film structures after cutting tests. [Figure 21] FIG. 21 shows images showing the cutting edge condition after cutting tests of eight coated tools with different adhesion layer compositions. [Figure 22] FIG. 22 shows images showing the cutting edge condition after cutting tests of seven coated tools with different wear-resistant layer compositions. [Figure 23] FIG. 23 is a graph showing the relationship between the film thickness of the wear-resistant layer and the amount of abrasive wear. [Figure 24] FIG. 24 is a graph showing the relationship between the film formation time of the adhesion layer and various amounts of wear. [Figure 25] FIG. 25 is a graph showing the relationship between the film formation time of the adhesion layer and the number of impacts until the adhesion layer is broken. [Figure 26] FIG. 26 shows an image of the cutting edge condition of a sample having an intermediate layer after a cutting test, taken from a direction perpendicular to the rake face. [Figure 27] FIG. 27 shows an image of the cutting edge condition of a sample without an intermediate layer after a cutting test, taken from a direction perpendicular to the rake face. [Figure 28] FIG. 28 is a table summarizing the thicknesses of the intermediate layer and the wear-resistant layer of five samples with different thickness ratios between the intermediate layer and the wear-resistant layer, and images showing the cutting edge condition after the cutting test. DETAILED DESCRIPTION OF THE INVENTION

[0006] Hereinafter, modes for carrying out a coated tool and a cutting tool according to the present disclosure (hereinafter referred to as "embodiments") will be described in detail with reference to the drawings. Note that the coated tool and the cutting tool according to the present disclosure are not limited to these embodiments. Furthermore, the respective embodiments can be appropriately combined within the scope of not causing any contradiction in the processing content. Furthermore, the same components in the following embodiments will be given the same reference numerals, and redundant explanations will be omitted.

[0007] The above-mentioned conventional techniques have room for further improvement in terms of suppressing abnormal wear, and therefore, there is a need to provide a coated tool and a cutting tool that can suppress abnormal wear.

[0008] Fig. 1 is a perspective view showing an example of a coated tool according to an embodiment. Fig. 2 is a side cross-sectional view showing an example of a coated tool according to an embodiment. As shown in Fig. 1, a coated tool 1 according to an embodiment has a tip body 2.

[0009] (Chip body 2) The chip body 2 has, for example, a hexahedral shape in which the upper and lower surfaces (surfaces intersecting with the Z axis shown in FIG. 1) are parallelogram-shaped.

[0010] One corner portion 201 of the insert body 2 functions as a cutting edge portion. The cutting edge portion has a first surface (for example, an upper surface) and a second surface (for example, a side surface) that is connected to the first surface. In the embodiment, the first surface functions as a "rake surface" that scoops up chips generated by cutting, and the second surface functions as a "flank surface." A cutting edge is located on at least a portion of the ridge where the first surface and the second surface intersect, and the coated tool 1 cuts the workpiece by bringing this cutting edge into contact with the workpiece.

[0011] A through-hole 5 that passes through the tip body 2 from top to bottom is located in the center of the tip body 2. A screw 75 is inserted into the through-hole 5 to attach the coated tool 1 to a holder 70 (described later) (see FIG. 5).

[0012] As shown in FIG. 2, the chip body 2 has a base 10 and a coating layer 20.

[0013] (Base 10) The substrate 10 is made of a cemented carbide. Specifically, the substrate 10 contains a hard phase containing at least tungsten carbide (WC) and a metallic binder phase containing an iron group element such as nickel (Ni) or cobalt (Co). As an example, the substrate 10 is made of a WC-based cemented carbide alloy in which the hard phase component is hard particles made of WC and the binder phase is mainly composed of Co.

[0014] (Coating layer 20) The coating layer 20 is applied to the substrate 10 for the purpose of improving the abrasion resistance, heat resistance, etc. of the substrate 10. In the example of FIG. 2, the coating layer 20 covers the entire substrate 10. This example is not limiting, and the coating layer 20 may be located at least on the substrate 10. When the coating layer 20 is located on the first surface (here, the top surface) of the substrate 10, the abrasion resistance and heat resistance of the first surface are high. When the coating layer 20 is located on the second surface (here, the side surface) of the substrate 10, the abrasion resistance and heat resistance of the second surface are high.

[0015] (About pole figures) The coating layer 20 according to the embodiment may contain cubic crystals composed of at least one element selected from the group 4a, 5a, and 6a elements of the periodic table, Al, Si, B, Y, and Mn, and at least one element selected from the group consisting of C, N, and O. For example, the coating layer 20 may contain cubic crystals composed of TiAlN. In this case, the coating layer 20 according to the embodiment may have an X-ray intensity distribution of the α-axis of a pole figure for the (111) plane of the cubic crystal, in a measurement range of 0° to 90°, in which the angle of the α-axis is 30° to 90°, with the difference between the maximum value (Imax) and the minimum value (Imin) of the X-ray intensity being 10% or less of the maximum value (Imax). The coating layer 20 having such a configuration has a homogeneous structure with aligned crystal orientation, and therefore can suppress abnormal wear such as chipping.

[0016] Furthermore, the coating layer 20 according to the embodiment may have a maximum value (Ilmax) and a minimum value (Ilmin) of X-ray intensity in the α-axis angle range of 0° to 50° in the measurement range of 0° to 90° in the X-ray intensity distribution of the α-axis of a pole figure for the (200) plane of a cubic crystal. In this case, the difference between the maximum value (Ilmax) and the minimum value (Ilmin) may be 10% or less of the maximum value (Ilmax). The coating layer 20 having such a configuration has a homogeneous structure with aligned crystal orientation, and therefore can suppress abnormal wear such as chipping.

[0017] (Damage to the tip body) Here, the form of damage that occurs to the chip body will be described with reference to Fig. 3. Fig. 3 is a schematic enlarged view of corner portion 201X of chip body 2X according to a reference example.

[0018] As shown in Figure 3, the insert body 2X may suffer from, for example, primary boundary wear D1, secondary boundary wear D2, abrasive wear D3, and crater wear D4. The primary boundary wear D1, secondary boundary wear D2, and abrasive wear D3 are wear that occurs on the flank face. The crater wear D4 is wear that occurs on the rake face.

[0019] Abrasive wear D3 is wear in which the surface of the tip body 2X is scraped away by foreign matter interposed between the tip body 2X and the workpiece, and may cause an increase in cutting resistance and cutting heat.

[0020] Primary boundary wear D1 and secondary boundary wear D2 are wear that occurs at both ends of abrasive wear D3, i.e., at the cutting boundary. The primary boundary is the boundary that contacts the cutting surface of the workpiece. The secondary boundary is the boundary that contacts the finished surface of the workpiece. Primary boundary wear D1 may cause burrs to form on the workpiece. Secondary boundary wear D2 may deteriorate the finished surface of the workpiece or change the dimensions of the workpiece.

[0021] Crater wear D4 occurs when the insert body 2X becomes hot and its surface is oxidized, producing relatively soft oxides. Crater wear D4 may worsen chip disposal.

[0022] The coated tool 1 according to the embodiment can effectively suppress these damage modes by devising the configuration of the coating layer 20 that coats the tip body 2.

[0023] Here, an example of the configuration of the coating layer 20 according to the embodiment will be described with reference to Fig. 4. Fig. 4 is a cross-sectional view showing an example of the coating layer 20 according to the embodiment.

[0024] As shown in Fig. 4, the coating layer 20 has an adhesion layer 21, an intermediate layer 22, and an abrasion-resistant layer 23. The adhesion layer 21 is a layer that comes into contact with the substrate 10. The intermediate layer 22 is located on the surface of the adhesion layer 21. The abrasion-resistant layer 23 is located on the surface of the intermediate layer 22. That is, the adhesion layer 21, the intermediate layer 22, and the abrasion-resistant layer 23 are stacked in this order from the layer closest to the surface of the substrate 10.

[0025] The adhesion layer 21 is made of Ti x Al y M z The adhesion layer 21 is an alloy layer containing M. M is at least one metal selected from Groups 4a, 5a, and 6a of the periodic table and Si. x and y are both atomic ratios, 40≦x≦80, 0≦y≦55, and x+y+z=100. As an example, the adhesion layer 21 may be TiAlWNbSi. Furthermore, z may be 0. That is, the adhesion layer 21 does not necessarily need to contain M. In this case, the adhesion layer 21 may be, for example, TiAl.

[0026] The wear-resistant layer 23 is made of Ti a Al b Cr c M dand at least one nonmetal selected from carbon, nitrogen, and oxygen. M is at least one metal selected from Groups 4a, 5a, and 6a of the periodic table (excluding Cr) and Si. a to c are atomic ratios of 15≦a≦40, 55≦b≦75, 10≦c≦20, and 0≦d≦15, where a+b+c+d=100. As an example, the wear-resistant layer 23 may be TiAlCrWNbSiN. d may also be 0. That is, the wear-resistant layer 23 does not necessarily need to contain M. In this case, the wear-resistant layer 23 may be, for example, TiAlCrN.

[0027] The coated tool 1 according to the embodiment has the adhesion layer 21 and the wear-resistant layer 23 with the above compositions, and therefore can suitably suppress notch wear.

[0028] Factors that contribute to the suppression of boundary damage include film adhesion and film plastic deformation resistance. The adhesion layer 21 according to the embodiment has high affinity with the substrate 10, which is a cemented carbide, so the coating layer 20 having the adhesion layer 21 at the interface with the substrate 10 has high adhesion to the substrate 10. In addition, the wear-resistant layer 23 having the above composition has a small crystallite diameter, so the coating layer 20 having such a wear-resistant layer 23 has high plastic deformation resistance.

[0029] Therefore, the coating layer 20 having such an adhesion layer 21 and a wear-resistant layer 23 can effectively suppress boundary wear. In particular, the adhesion layer 21 according to the embodiment is effective in suppressing secondary boundary wear D2, and the wear-resistant layer 23 according to the embodiment is effective in suppressing primary boundary wear D1.

[0030] The intermediate layer 22 is made of Ti e Al f M gand at least one nonmetal selected from carbon, nitrogen, and oxygen. M is at least one metal selected from Groups 4a, 5a, and 6a of the periodic table (excluding Cr) and Si. e and f satisfy the following conditions: 0≦e≦55, 40≦f≦80, and e+f+g=100. Such an intermediate layer 22 has high oxidation resistance. Therefore, a coated tool 1 having such an intermediate layer 22 can effectively suppress crater wear D4. As an example, the intermediate layer 22 may be TiAlWNbSiN. Note that the intermediate layer 22 does not necessarily need to contain M. In this case, the intermediate layer 22 may be, for example, TiAlN.

[0031] The proportion of the metal component in the intermediate layer 22 can be determined by, for example, analysis using an EDS (energy dispersive X-ray spectroscope) attached to a STEM (scanning transmission electron microscope). The proportions of the metal components in the adhesion layer 21 and the abrasion-resistant layer 23 may also be determined by EDS analysis.

[0032] The intermediate layer 22 may be formed by arc ion plating (AIP). The AIP method is a method of forming a metal nitride film by vaporizing a target metal using arc discharge in a vacuum atmosphere and combining it with N2 gas. At this time, the bias voltage applied to the substrate 10, which is the object to be coated, may be −30 V or less. The wear-resistant layer 23 may also be formed by AIP.

[0033] Although the example shown here shows the case where the coating layer 20 is composed of the adhesion layer 21, the intermediate layer 22, and the wear-resistant layer 23, the coating layer 20 does not necessarily need to include the intermediate layer 22. For example, when a workpiece material that is less susceptible to crater wear D4 is being cut, the coated tool 1 may have a coating layer 20 composed of the adhesion layer 21 located on the surface of the substrate 10 and the wear-resistant layer 23 located on the surface of the adhesion layer 21.

[0034] The thickness of the coating layer 20 may be 2.5 μm or more and 10 μm or less. When the thickness of the coating layer 20 is 2.5 μm or more, wear resistance (resistance to abrasive wear) is ensured. Furthermore, when the thickness of the coating layer 20 is 10 μm or less, chipping of the coating layer 20 is unlikely to occur. Therefore, a coated tool 1 having a coating layer 20 with a film thickness of 2.5 μm or more and 10 μm or less has excellent wear resistance and chipping resistance.

[0035] The thickness of the adhesion layer 21 may be 2 nm or more and 8 nm or less. When the thickness of the adhesion layer 21 is 2 nm or more, it is easy to obtain the effect of improving film adhesion by the adhesion layer 21. Furthermore, since uneven film formation is less likely to occur, abnormal damage is less likely to occur. On the other hand, when the thickness of the adhesion layer 21 is 8 nm or less, the relatively soft adhesion layer 21 has less effect on the plastic deformation of the coating layer 20, making it less likely that the coating layer 20 will be broken. Therefore, a coated tool 1 having a coating layer 20 including an adhesion layer 21 with a film thickness of 2 nm or more and 8 nm or less can further suppress boundary damage.

[0036] The crystallite diameter of the wear-resistant layer 23 may be 200 Å or less. With this configuration, the plastic deformation resistance of the coating layer 20 is improved, making the coating layer 20 less susceptible to fracture, thereby further suppressing boundary damage.

[0037] The crystallite diameter of the abrasion-resistant layer 23 can be controlled by the composition of the abrasion-resistant layer 23. The crystallite diameter of the abrasion-resistant layer 23 can also be controlled by the film-forming conditions of the abrasion-resistant layer 23 (such as the bias voltage in the physical vapor deposition method).

[0038] The Vickers hardness of the wear-resistant layer 23 may be 28 GPa or more. Secondary boundary wear D2 occurs, for example, when a work-hardened portion is cut with an extremely small depth of cut. Therefore, by setting the hardness of the coating layer 20 to 28 GPa or more, secondary boundary wear D2 can be suitably suppressed even when cutting a workpiece that is prone to work hardening.

[0039] The thickness of the intermediate layer 22 may be smaller than the thickness of the wear-resistant layer 23. If the intermediate layer 22 is thinner than the wear-resistant layer 23, the effect of the wear-resistant layer 23 in suppressing boundary damage is less likely to be weakened. Therefore, by making the thickness of the intermediate layer 22 smaller than the thickness of the wear-resistant layer 23, boundary damage can be suitably suppressed.

[0040] The coating layer 20 can be positioned on the substrate 10 by using, for example, a physical vapor deposition (PVD) method. For example, when the coating layer 20 is formed using the vapor deposition method described above while the substrate 10 is held on the inner circumferential surface of the through-hole 5, the coating layer 20 can be positioned so as to cover the entire surface of the substrate 10 except for the inner circumferential surface of the through-hole 5.

[0041] Next, the configuration of a cutting tool including the above-described coated tool 1 will be described with reference to Fig. 5. Fig. 5 is a front view showing an example of a cutting tool according to an embodiment.

[0042] As shown in FIG. 5, a cutting tool 100 according to the embodiment includes a coated tool 1 and a holder 70 for fixing the coated tool 1.

[0043] The holder 70 is a rod-shaped member extending from a first end (the upper end in FIG. 5) to a second end (the lower end in FIG. 5). The holder 70 is made of, for example, steel or cast iron. In particular, when steel is used among these members, the holder 70 has high toughness.

[0044] The holder 70 has a pocket 73 at the end on the first end side. The pocket 73 is a portion where the coated tool 1 is attached, and has a seating surface that intersects with the rotation direction of the workpiece and a constraint side surface that is inclined relative to the seating surface. The seating surface is provided with a screw hole into which a screw 75, which will be described later, is threaded.

[0045] The coated tool 1 is positioned in a pocket 73 of the holder 70 and attached to the holder 70 by a screw 75. That is, the screw 75 is inserted into the through hole 5 of the coated tool 1, and the tip of the screw 75 is inserted into a threaded hole formed in the seating surface of the pocket 73 to screw the threaded portions together. In this way, the coated tool 1 is attached to the holder 70 so that the cutting edge portion protrudes outward from the holder 70.

[0046] In the embodiment, a cutting tool used for so-called turning is exemplified. Examples of turning include internal diameter machining, external diameter machining, and grooving. The cutting tool is not limited to that used for turning. For example, the coated tool 1 may be used as a cutting tool used for milling. Examples of cutting tools used for milling include milling cutters such as flat milling cutters, face milling cutters, side milling cutters, and groove milling cutters, and end mills such as single-blade end mills, multi-blade end mills, tapered-blade end mills, and ball end mills.

[0047] (Method of manufacturing the coating layer) Next, an example of a method for producing the coating layer 20 according to this embodiment will be described. Note that the method for producing the coated tool of this embodiment is not limited to the following method.

[0048] The coating layer may be formed by, for example, a physical vapor deposition method. Examples of physical vapor deposition methods include an ion plating method and a sputtering method. For example, when the coating layer is formed by an ion plating method, the coating layer can be formed by the following method.

[0049] First, an example of a method for manufacturing an adhesion layer will be described. As an example, a metal target of Ti, Al, or M (where M is at least one metal selected from Groups 4a, 5a, and 6a of the periodic table, and Si), or a composite alloy target, or a sintered target is prepared.

[0050] Next, the target, which is the metal source, is evaporated and ionized by arc discharge or glow discharge, and the ionized metal is vapor-deposited onto the surface of the substrate. By the above procedure, an adhesive layer can be formed.

[0051] The composition of the adhesion layer can be adjusted by independently controlling the voltage and current values ​​applied to each metal target during arc discharge and glow discharge. The composition of the adhesion layer can also be adjusted by controlling the composition of the metal target, the coating time, and the atmospheric gas pressure. The thickness of the adhesion layer can be adjusted, for example, by controlling the coating time.

[0052] Next, a method for manufacturing the wear-resistant layer will be described. As an example, a metal target of Ti, Al, Cr, or M (where M is at least one metal selected from Groups 4a, 5a, and 6a of the periodic table (excluding Cr) and Si), or a composite alloy target or a sintered target is prepared.

[0053] Next, the target, which is the metal source, is evaporated and ionized by arc discharge or glow discharge. The ionized metal is reacted with nitrogen (N2) gas and deposited on the surface of the substrate. This procedure allows the formation of an abrasion-resistant layer.

[0054] The composition of the wear-resistant layer can be adjusted by independently controlling the voltage and current values ​​during arc discharge and glow discharge applied to each metal target. The composition of the wear-resistant layer can also be adjusted by controlling the composition of the metal target, the coating time, and the atmospheric gas pressure. The thickness of the wear-resistant layer can be adjusted, for example, by controlling the coating time.

[0055] Next, an example of a method for manufacturing the intermediate layer will be described. As an example, a metal target of Ti, Al, or M (where M is at least one metal selected from Groups 4a, 5a, and 6a of the periodic table (excluding Cr) and Si), or a composite alloy target, or a sintered target is prepared.

[0056] Next, the target, which is the metal source, is evaporated and ionized by arc discharge or glow discharge. The ionized metal is reacted with nitrogen (N2) gas and deposited on the surface of the substrate. The intermediate layer can be formed by the above procedure.

[0057] The composition of the intermediate layer can be adjusted by independently controlling the voltage and current values ​​applied to each metal target during arc discharge and glow discharge. The composition of the intermediate layer can also be adjusted by controlling the composition of the metal target, the coating time, and the atmospheric gas pressure. The thickness of the intermediate layer can be adjusted, for example, by controlling the coating time. [Example]

[0058] Examples of the present disclosure will be specifically described below, but the present disclosure is not limited to the examples shown below.

[0059] (X-ray intensity distribution of pole figure for the (111) plane of the coating layer) TiAlNbWSi, specifically Al 49 Ti 46 An adhesive layer made of W2Nb2Si1 and TiAlWNbSiN, specifically, Al 49 Ti 46 An intermediate layer made of W2Nb2Si1N and TiAlCrWNbSiN, specifically, Al 59.5 Ti 23 Cr 15 W1Nb1Si 0.5For a coated tool having a wear-resistant layer composed of N, the X-ray intensity distribution was measured. The measurement conditions are as follows. When the sample surface normal is on the plane determined by the incident ray and the diffracted ray, the angle of the α-axis is set to 90°. When the angle of the α-axis is 90°, it becomes the central point on the pole figure.

[0060] <Measurement Conditions of X-ray Intensity Distribution> (1) Flat collimator (2) Scanning method: Concentric circles (3) β-scanning range: 0° or more and 360° or less / 2.5° pitch (4) θ fixed angle: The diffraction angle of the (111) plane of the TiAlN crystal contained in the coating layer (wear-resistant layer) is set to the angle at which the diffraction intensity is the highest between 37° and 39°. The diffraction angle of the (200) plane of the TiAlN crystal contained in the coating layer (wear-resistant layer) is set to the angle at which the diffraction intensity is the highest between 43° and 45°. (5) α-scanning range: 0° or more and 90° or less / 2.5° step (6) Target: CuKα, voltage: 45 kV, current: 40 mA

[0061] Figure 6 is a graph showing the X-ray intensity distribution of the pole figure regarding the (111) plane of the cubic crystal contained in the coating layer. The horizontal axis of the pole figure shown in Figure 6 indicates the angle of the α-axis (tilt axis), and the vertical axis indicates the X-ray intensity in the tilt direction.

[0062] The orientation of the (111) plane in the cubic crystal can be evaluated by the X-ray intensity distribution of the pole figure regarding the (111) plane. For example, an X-ray intensity distribution with a peak at the 35° position in the X-ray intensity distribution of the pole figure regarding the (111) plane indicates that there are many cubic crystals in which the (111) plane is tilted 35° with respect to the surface of the substrate.

[0063] As shown in Figure 6, the X-ray intensity distribution of the α-axis of the pole figure for the (111) plane of the cubic crystal contained in the coating layer (wear-resistant layer) is flat in the α-axis angle range of 30° to 90°. Specifically, the maximum value (Imax) of the X-axis intensity in the α-axis angle range of 30° to 90° was 1064 (α-axis angle = 70°), and the minimum value (Imin) was 990 (α-axis angle = 30°). The difference between the maximum value (Imax) and the minimum value (Imin) was 74, which was less than 10% of the maximum value (Imax) of 1064. Specifically, the difference between the maximum value (Imax) and the minimum value (Imin) was less than 7% of the maximum value (Imax).

[0064] Thus, in the X-ray intensity distribution of the α-axis of the pole figure for the (111) plane of the cubic crystal in the measurement range of 0° to 90° inclusive, the difference between the maximum (Imax) and minimum (Imin) values ​​of the X-ray intensity in the α-axis angle range of 30° to 90° inclusive was 10% or less of the maximum (Imax). This result indicates that the coating layer according to the example has a homogeneous structure with a certain degree of alignment of the crystal orientation. As a result, the coating layer according to the example can suppress abnormal wear such as chipping.

[0065] (X-ray intensity distribution of pole figure for the (200) plane of the coating layer) Fig. 7 is a graph showing the X-ray intensity distribution of a pole figure for the (200) plane of a cubic crystal contained in the coating layer. The horizontal axis of the pole figure shown in Fig. 7 represents the angle of the α axis (tilt axis), and the vertical axis represents the X-ray intensity in the tilt direction.

[0066] 7, the coating layer according to the example has maximum and minimum X-ray intensity values ​​in the α-axis angle range of 0° to 50° in the measurement range of 0° to 90° in the X-ray intensity distribution of the α-axis in the pole figure for the (200) plane of the cubic crystal. Specifically, the coating layer according to the example had a maximum value (Ilmax) at a position where the α-axis was 25°, and the value was 939. The coating layer according to the example also had a minimum value (Ilmin) at a position where the α-axis was 40°, and the value was 849. The difference between the maximum value (Ilmax) and the minimum value (Ilmin) was 90, which was less than 10% of the maximum value (Ilmax) of 930.

[0067] Thus, the coating layer according to the example has maximum and minimum X-ray intensity values ​​in the α-axis angle range of 0° to 50° in the measurement range of 0° to 90° in the X-ray intensity distribution of the α-axis of the pole figure for the (200) plane of the cubic crystal. Furthermore, the difference between the maximum and minimum values ​​of the coating layer according to the example was 10% or less of the maximum value. This result indicates that the coating layer according to the example has a homogeneous structure with a certain degree of alignment of the crystal orientation. This allows the coating layer according to the example to suppress abnormal wear, such as chipping.

[0068] (Composition of wear-resistant layer) Ti a Al b Cr c M d and a wear-resistant layer having a composition of Ti x Al y M z and an adhesion layer having a composition of Ti e Al f M g A number of samples (samples No. 1 to No. 15) were prepared with different composition ratios (a to d) of the wear-resistant layer for the coating layer having an intermediate layer with the composition of the above. The composition ratios (a to d) of the wear-resistant layer and the composition of M in samples No. 1 to No. 15 are shown in Table 1. The composition of the adhesion layer in samples No. 1 to No. 15 was Al. 49 Ti 46 M5, specifically, Al 49Ti 46 The composition of the intermediate layer in samples No. 1 to No. 15 is Al. 49 Ti 46 M5N, specifically Al 49 Ti 46 The thickness of the wear-resistant layer, adhesive layer, and intermediate layer in samples No. 1 to No. 15 was 4.5 μm, 5 nm, and 2 μm, respectively.

[0069] For the prepared samples No. 1 to No. 15, the crystallite size of the (200) plane, the hardness of the wear-resistant layer, the primary boundary wear volume, and the secondary boundary wear volume were measured. The crystallite size of the (200) plane was measured using XRD. The hardness (Vickers hardness) of the wear-resistant layer was measured for each sample using a microindentation hardness tester "ENT-1100b / a" (manufactured by Elionix Co., Ltd.) from the surface of the wear-resistant layer (i.e., the surface of the coating layer) to a depth of 20% of the thickness of the wear-resistant layer, with an indenter indentation load of 30 N. The primary boundary wear volume and secondary boundary wear volume were measured from images of the primary and secondary boundaries of each sample after cutting tests under the following conditions.

[0070] <Cutting test conditions> Work material: Inconel (registered trademark) 718 Cutting speed (Vc): 30m / min Feed (f): 0.1 mm / rev Cutting depth (ap): 0.5 mm Cutting condition: Wet Tool used: CNMG120408SG Cutting time: 7.4 min

[0071] [Table 1]

[0072] Fig. 8 is a graph showing the correlation between the crystallite diameter on the (200) plane of the wear-resistant layer and the primary boundary wear amount. The horizontal axis of the graph shown in Fig. 8 is the crystallite diameter (Å) on the (200) plane, and the vertical axis is the secondary boundary wear amount (mm).

[0073] As shown in Figure 8, the smaller the crystallite diameter of the (200) plane in the wear-resistant layer, the smaller the primary boundary wear amount tended to be. This result shows that a smaller crystallite diameter of the wear-resistant layer is preferable. Specifically, the crystallite diameter of the wear-resistant layer is preferably 200 Å or less. In other words, among Samples No. 1 to No. 15, Samples No. 1 to No. 7 and No. 13, which have a crystallite diameter of the (200) plane of 200 Å or less, are effective in suppressing primary boundary damage.

[0074] Fig. 9 is a graph showing the correlation between the Vickers hardness of the wear-resistant layer and the amount of secondary boundary wear. The horizontal axis of the graph shown in Fig. 9 represents the Vickers hardness (GPa) of the wear-resistant layer, and the vertical axis represents the amount of secondary boundary wear (mm).

[0075] As shown in Figure 9, the amount of secondary boundary wear tended to increase as the Vickers hardness of the wear-resistant layer increased. It can be seen that the amount of secondary boundary wear can be effectively suppressed when the Vickers hardness of the wear-resistant layer is 28 GPa or higher. In other words, among samples No. 1 to No. 15, samples No. 1, No. 3, and No. 5 to No. 9, which have a Vickers hardness of 28 GPa or higher, are effective in suppressing secondary boundary damage.

[0076] Fig. 10 is a graph showing the correlation between the Ti ratio (a) of the wear-resistant layer and the primary boundary wear amount. The horizontal axis of the graph shown in Fig. 10 is the Ti ratio of the wear-resistant layer, and the vertical axis is the primary boundary wear amount (mm).

[0077] 10, it can be seen that samples with a Ti ratio (a) of 15≦a≦40, specifically, samples No. 1 to No. 9 and No. 11 to No. 13, are effective in suppressing primary boundary damage. Also, samples with a Ti ratio (a) of 20≦a≦30, specifically, samples No. 1 to No. 6, No. 8, No. 9, No. 11 to No. 13, are particularly effective in suppressing primary boundary damage.

[0078] Fig. 11 is a graph showing the correlation between the Al ratio (b) of the wear-resistant layer and the primary boundary wear amount. The horizontal axis of the graph shown in Fig. 11 is the Al ratio of the wear-resistant layer, and the vertical axis is the primary boundary wear amount (mm).

[0079] The results shown in Fig. 11 show that samples with an Al ratio (b) of 55 ≤ b ≤ 75, specifically, samples No. 1, 3 to 13, are effective in suppressing primary boundary damage. Also, samples with an Al ratio (b) of 55 ≤ b ≤ 70, specifically, samples No. 1, 3 to 8, and 10 to 12, are particularly effective in suppressing primary boundary damage.

[0080] Fig. 12 is a graph showing the correlation between the Cr ratio (c) of the wear-resistant layer and the primary boundary wear amount. The horizontal axis of the graph shown in Fig. 12 is the Cr ratio of the wear-resistant layer, and the vertical axis is the primary boundary wear amount (mm).

[0081] 12, it can be seen that samples with a Cr ratio (c) of 5≦c≦20, specifically, samples No. 1 to No. 12, are effective in suppressing primary boundary damage. Also, samples with a Cr ratio (c) of 10≦c≦20, specifically, samples No. 1 to No. 7 and No. 9, are particularly effective in suppressing primary boundary damage.

[0082] In order to effectively suppress not only primary boundary damage but also secondary boundary damage, Ti a Al b Cr c M dThe composition ratios (a to d) of the abrasion-resistant layer having the above composition preferably fall within the ranges of 15≦a≦40, 55≦b≦75, 10≦c≦20, and 0≦d≦15 (where a+b+c+d=100). More specifically, the composition ratios (a to d) of the abrasion-resistant layer preferably fall within the ranges of 20≦a≦30, 55≦b≦70, 15≦c≦20, and 2.5≦d≦15.

[0083] (Composition of Adhesion Layer) Ti a Al b Cr c M d and a wear-resistant layer having a composition of Ti x Al y M z and an adhesion layer having a composition of Ti e Al f M g A number of samples (samples No. 21 to No. 38) were prepared with different composition ratios (x to z) of the adhesive layer for the coating layer having an intermediate layer with the composition of Al. The composition ratios (x to z) of the adhesive layer and the composition of M for samples No. 21 to No. 38 are shown in Table 2. The composition of the wear-resistant layer for samples No. 21 to No. 38 was Al. 59.5 Ti 23 Cr 15 W1Nb1Si 0.5 The composition of the intermediate layer in samples No. 21 to No. 38 is Al. 49 Ti 46 M5N, specifically Al 49 Ti 46 The thickness of the wear-resistant layer, adhesive layer, and intermediate layer in samples No. 21 to No. 38 was 4.5 μm, 5 nm, and 2 μm, respectively.

[0084] The thickness of the adhesion layer, peel load, primary boundary wear, and secondary boundary wear were measured for the prepared samples No. 21 to No. 38. The thickness of the adhesion layer was measured from images obtained by observing the adhesion layer using a transmission electron microscope (TEM). Specifically, the average value of the measurement results for a total of nine points, three points per three fields of view, was used to determine the thickness of the adhesion layer. The peel load was measured by a scratch test. The scratch test was conducted using a diamond indenter with a tip shape of 200 μm radius of curvature at a scratch speed of 10 mm / min and a load application rate of 100 N / min. In the scratch test, the load at which peeling occurred (peel load) was evaluated as the adhesion strength. In the scratch test, a higher critical load indicates a lower tendency to peel, i.e., a higher adhesion strength. The primary boundary wear and secondary boundary wear measurements were performed in the same manner as for samples No. 1 to No. 15 described above. The measurement results are also shown in Table 2.

[0085] [Table 2]

[0086] Fig. 13 is a graph showing the correlation between the peeling load and the amount of secondary boundary wear. The horizontal axis of the graph shown in Fig. 13 is the peeling load (N), and the vertical axis is the amount of secondary boundary wear (mm).

[0087] As shown in FIG. 13, it can be seen that the higher the peel load, that is, the higher the adhesion force, the smaller the amount of secondary boundary wear, that is, the more the secondary boundary damage is suppressed.

[0088] Fig. 14 is a graph showing the correlation between the Ti ratio (x) of the adhesion layer and the peeling load. Fig. 15 is a graph showing the correlation between the Al ratio (y) of the adhesion layer and the peeling load. Fig. 16 is a graph showing the correlation between the Ti ratio (x) of the adhesion layer and the amount of secondary boundary wear. Fig. 17 is a graph showing the correlation between the Al ratio (y) of the adhesion layer and the amount of secondary boundary wear.

[0089] 13 and 14 to 17, it is preferable that the Ti ratio in the adhesion layer is relatively high and the Al ratio is relatively low in order to effectively suppress secondary boundary damage. Specifically, the composition ratios (x to z) of the adhesion layer are preferably within the ranges of 40≦x≦80, 0≦y≦55 (where x+y+z=100).

[0090] (Composition of the intermediate layer) Ti a Al b Cr c M d and a wear-resistant layer having a composition of Ti x Al y M z and an adhesion layer having a composition of Ti e Al f M g A number of samples (samples No. 41 to No. 49) were prepared with different intermediate layer composition ratios (e to g) for the coating layer having an intermediate layer with the composition shown in Table 3. The intermediate layer composition ratios (e to g) and the composition of M for samples No. 41 to No. 49 are as shown in Table 3. The composition of the wear-resistant layer was Al 59.5 Ti 23 Cr 15 W1Nb1Si 0.5 The composition of the adhesive layer is Al 49 Ti 46 M5, specifically, Al 49 Ti 46 The thickness of the wear-resistant layer, adhesive layer, and intermediate layer in samples No. 41 to No. 49 was 2.5 μm, 5 nm, and 2 μm, respectively.

[0091] Additionally, the crater wear depth was measured for the prepared samples No. 41 to No. 49. The crater wear depth was measured from images taken of the rake face of each sample after a cutting test under the same conditions as for the measurement of the primary and secondary boundary wear amounts in the wear-resistant and adhesive layers. The measurement results are also shown in Table 3.

[0092] [Table 3]

[0093] Fig. 18 is a graph showing the correlation between the Ti ratio (e) of the intermediate layer and the crater wear depth. The horizontal axis of the graph shown in Fig. 18 is the Ti ratio of the intermediate layer, and the vertical axis is the crater wear depth (mm). Fig. 19 is a graph showing the correlation between the Al ratio (f) of the intermediate layer and the crater wear depth. The horizontal axis of the graph shown in Fig. 19 is the Al ratio of the intermediate layer, and the vertical axis is the crater wear depth (mm).

[0094] From the results shown in Figures 18 and 19, in order to effectively suppress crater wear, it is preferable that the composition ratios (e to g) of the intermediate layer are within the ranges of 0≦e≦55, 40≦f≦80 (where e+f+g=100).

[0095] (Comparison of boundary wear due to differences in film composition) Coated tools were fabricated that had a coating layer consisting of an adhesion layer and a single wear-resistant layer on the surface of the substrate (the above-mentioned samples No. 3, No. 24, and No. 43. Note that samples No. 3, No. 24, and No. 43 are the same sample), a coated tool that had a coating layer consisting of only a single wear-resistant layer on the surface of the substrate, and a coated tool that had a wear-resistant layer consisting of two layers with different compositions laminated alternately on the surface of the substrate. The substrate contained a hard phase containing WC and a metallic bonding phase containing iron-group elements. The adhesion layer had a composition of Al 49 Ti 46 The composition of the single wear-resistant layer is Al 59.5 Ti 23 Cr 15 W1Nb1Si 0.5 The composition of each layer in the wear-resistant layer, which is made up of two alternately stacked layers, is AlCrN and AlTiWNbSiN, respectively.

[0096] The three samples were subjected to cutting tests under the following conditions:

[0097] <Cutting test conditions> Work material: Inconel (registered trademark) 718 Cutting speed (Vc): 30m / min Feed (f): 0.1 mm / rev Cutting depth (ap): 0.5 mm Cutting condition: Wet Tool used: CNMG120408SG

[0098] The cutting edge condition after 14.8 minutes of cutting under the above cutting conditions is shown in Figure 20. Figure 20 is an image showing the cutting edge condition after a cutting test of three coated tools with different film structures.

[0099] As shown in Fig. 20, the coated tool with the film configuration of "adhesion layer and single-layer wear-resistant layer" showed reduced primary and secondary boundary wear compared to the coated tool with the film configuration of "single-layer wear-resistant layer only" and the coated tool with the film configuration of "wear-resistant layer consisting of two layers laminated alternately." This result shows that the film configuration of "adhesion layer and single-layer wear-resistant layer" is effective in suppressing boundary wear.

[0100] Furthermore, coated tools with a film configuration of "adhesion layer and single-layer wear-resistant layer" also showed reduced abrasive wear compared to coated tools with a film configuration of "single-layer wear-resistant layer only" and coated tools with a film configuration of "wear-resistant layer consisting of two layers laminated alternately." These results demonstrate that a film configuration of "adhesion layer and single-layer wear-resistant layer" is also effective in suppressing abrasive wear.

[0101] (Composition of Adhesion Layer) For coated tools with a film structure of "an adhesive layer and a single wear-resistant layer," several samples were prepared with different adhesive layer compositions. The adhesive layer compositions were Ti, Cr, Al, TiCr, AlCr, TiAl, TiAlCr, and TiAlNbWSi. Specifically, TiAlNbWSi is Al 49 Ti 46 The composition of the wear-resistant layer was TiAlNbWSiN, specifically, Al. 59.5 Ti 23 Cr 15 W1Nb1Si 0.5 It's N.

[0102] The cutting edge condition after 7.4 minutes of cutting under the above cutting conditions is shown in Figure 21. Figure 21 is an image showing the cutting edge condition after cutting tests of eight coated tools with different adhesion layer compositions.

[0103] As shown in Fig. 21, the wear state changed depending on the composition of the adhesion layer. Specifically, it was found that the coated tools with adhesion layers made of TiAl and those with adhesion layers made of TiAlNbWSi exhibited reduced primary boundary wear, secondary boundary wear, and abrasive wear compared to coated tools with adhesion layers of other compositions.

[0104] (Composition of wear-resistant layer) For coated tools with a film structure of "an adhesive layer and a single wear-resistant layer," several samples were prepared with different compositions of the wear-resistant layer. The compositions of the wear-resistant layers were TiAlN, TiAlSiN, TiAlNbN, TiAlWN, TiAlCrN, TiAlWNbSiN, and TiAlCrWNbSiN. Specifically, TiAlCrWNbSiN is Al 59.5 Ti 23 Cr 15 W1Nb1Si 0.5 Then, cutting tests were carried out on the prepared samples under the same conditions as above. The composition of the adhesion layer was TiAlNbWSi for all samples, specifically, Al 49 Ti 46 W2Nb2Si1.

[0105] The cutting edge condition after cutting for 7.4 minutes under the above cutting conditions is shown in Figure 22. Figure 22 is an image showing the cutting edge condition after cutting tests of seven coated tools with different wear-resistant layer compositions.

[0106] As shown in Fig. 22, the wear state changed depending on the composition of the wear-resistant layer. Specifically, it was found that coated tools with a wear-resistant layer made of TiAlCrWNbSiN exhibited reduced primary boundary wear, secondary boundary wear, and abrasive wear compared to coated tools with wear-resistant layers of other compositions.

[0107] (Film thickness of abrasion-resistant layer) TiAlNbWSi, specifically Al 49 Ti 46 An adhesive layer made of W2Nb2Si1 and TiAlCrWNbSiN, specifically, Al 59.5 Ti 23 Cr 15 W1Nb1Si 0.5 For coated tools with a wear-resistant layer made of N, several samples with different wear-resistant layer thicknesses were prepared. The coating layer thicknesses for each sample were 1.7 μm, 3.1 μm, 3.4 μm, 4.1 μm, 4.7 μm, 5.3 μm, and 5.8 μm, respectively. The adhesion layer thickness was the same for all samples. Therefore, the thicker the coating layer thickness, the thicker the wear-resistant layer. The adhesion layer thickness was 5 nm on average.

[0108] The prepared samples were subjected to cutting tests under the same conditions as above. Then, using images showing the cutting edge condition of each sample after the test, the length of abrasive wear in the thickness direction of the coating layer of each sample (hereinafter referred to as "abrasive wear amount") was measured. The cutting time in the cutting test was 15 minutes.

[0109] Fig. 23 is a graph showing the relationship between the film thickness of the wear-resistant layer and the amount of abrasive wear. The horizontal axis of the graph shown in Fig. 23 represents the total film thickness of the coating layer, i.e., the sum of the film thickness of the adhesion layer and the film thickness of the wear-resistant layer. The vertical axis of the graph shown in Fig. 23 represents the amount of abrasive wear.

[0110] A cutting test was conducted using a commercially available coated tool with a coating layer thickness of 5 μm under the same cutting conditions as above, and the abrasive wear amount was then measured. The results are shown by the black circles in Figure 23.

[0111] As shown in Figure 23, the thicker the wear-resistant layer, the smaller the abrasive wear amount. For example, to keep the abrasive wear amount below 1 mm, the thickness of the coating layer is preferably 2.5 μm or more. Furthermore, by setting the total coating layer thickness to about 3 μm, the abrasive wear amount is equivalent to that of commercially available products. Furthermore, the results of Figure 23 show that to minimize the abrasive wear amount, the total coating layer thickness is preferably 4.1 μm or more. On the other hand, if the coating layer thickness is greater than 10 μm, it becomes difficult to form the film. Therefore, the thickness of the coating layer is preferably 2.5 μm or more and 10 μm or less, more preferably 4.1 μm or more and 10 μm or less.

[0112] (Adhesion layer thickness) TiAlNbWSi, specifically Al 49 Ti 46 An adhesive layer made of W2Nb2Si1 and TiAlCrWNbSiN, specifically, Al 59.5 Ti 23 Cr 15 W1Nb1Si 0.5 For coated tools with a wear-resistant layer made of N, several samples with different adhesion layer thicknesses were prepared. The adhesion layer thickness can be controlled by adjusting the deposition time of the adhesion layer; the longer the deposition time, the thicker the adhesion layer becomes. The deposition times for the adhesion layer of each sample were 0 min, 0.7 min, 1.5 min, and 3 min, respectively. The adhesion layer thicknesses of each sample were 0 nm, 1 nm, 5 nm, and 10 nm.

[0113] A cutting test was performed on the prepared samples under the same conditions as above. Images showing the cutting edge condition of each sample after the test were used to measure the length of primary boundary wear (hereinafter referred to as "primary boundary wear amount"), the length of secondary boundary wear (hereinafter referred to as "secondary boundary wear amount"), and the length of abrasive wear (hereinafter referred to as "abrasive wear amount") in the thickness direction of the coating layer of each sample. The cutting time in the cutting test was 7.4 minutes.

[0114] Figure 24 is a graph showing the relationship between the deposition time of the adhesion layer and various wear amounts. As shown in Figure 24, the longer the deposition time of the adhesion layer, i.e., the thicker the adhesion layer, the more the wear amounts tended to decrease. This tendency was particularly noticeable in secondary boundary wear. From the results shown in Figure 24, in order to suppress all of primary boundary wear, secondary boundary wear, and flank wear, it is preferable that the thickness of the adhesion layer be 2 nm or more and 8 nm or less.

[0115] 24, that is, samples in which the adhesion layer was formed for 0, 0.7, 1.5, and 3 minutes, were subjected to a chipping resistance test under the following conditions.

[0116] <Fracture resistance test> Work material: SUS304 Cutting speed: 150m / min Feed: 0.2mm / rev Cutting depth: 1mm Cutting condition: Wet Tool used: CNMG120408SG Evaluation method: Number of impacts until fracture

[0117] Fig. 25 is a graph showing the relationship between the deposition time of the adhesion layer and the number of impacts until fracture. As shown in Fig. 25, when the deposition time exceeds 1.5 minutes, the fracture resistance decreases. Therefore, from the results shown in Figs. 24 and 25, it is preferable that the thickness of the adhesion layer is 2 nm or more and 8 nm or less. The thickness of the adhesion layer can be derived from the deposition time.

[0118] (middle class) TiAlNbWSi, specifically Al 49 Ti 46 An adhesive layer made of W2Nb2Si1 and TiAlCrWNbSiN, specifically, Al 59.5 Ti 23 Cr 15 W1Nb1Si 0.5For coated tools with a wear-resistant layer made of N, samples with and without an intermediate layer between the adhesion layer and the wear-resistant layer were prepared. The composition of the intermediate layer was TiAlWNbSiN, specifically, Al 49 Ti 46 The specimens were then subjected to cutting tests under the following conditions.

[0119] <Cutting test conditions> Work material: SUS304 Cutting speed: 150m / min Feed: 0.2mm / rev Cutting depth: 1mm Cutting condition: Wet Tool used: CNMG120408SG

[0120] The cutting edge condition after 39 minutes of cutting under the above cutting conditions is shown in Figures 26 and 27. Figure 26 is an image of the cutting edge condition of a sample with an intermediate layer taken from a direction perpendicular to the rake face after the cutting test. Figure 27 is an image of the cutting edge condition of a sample without an intermediate layer taken from a direction perpendicular to the rake face after the cutting test.

[0121] As is clear from the images shown in FIGS. 26 and 27, it can be seen that the crater wear occurring on the rake face is suitably suppressed by interposing an intermediate layer between the adhesion layer and the wear-resistant layer.

[0122] (ratio of thickness of intermediate layer and abrasion-resistant layer) TiAlNbWSi, specifically Al 49 Ti 46 Adhesion layer made of W2Nb2Si1, TiAlWNbSiN, specifically Al 49 Ti 46 An intermediate layer made of W2Nb2Si1N and TiAlCrWNbSiN, specifically, Al 59.5 Ti 23 Cr 15 W1Nb1Si 0.5For coated tools with a wear-resistant layer made of N, several samples were prepared with different film thickness ratios between the intermediate layer and the wear-resistant layer. Coated tools without an intermediate layer and coated tools without a wear-resistant layer were also prepared. Each of the prepared samples was then subjected to a cutting test under the following conditions, and the cutting edge condition after the test was observed. The cutting time was 14.8 minutes.

[0123] <Cutting test conditions> Work material: Inconel (registered trademark) 718 Cutting speed (Vc): 30m / min Feed (f): 0.1 mm / rev Cutting depth (ap): 0.5 mm Cutting condition: Wet Tool used: CNMG120408SG

[0124] FIG. 28 is a table summarizing the thicknesses of the intermediate layer and the wear-resistant layer of five samples with different thickness ratios between the intermediate layer and the wear-resistant layer, and images showing the cutting edge condition after the cutting test.

[0125] As shown in Figure 28, sample No. 51 is a sample without an intermediate layer. Specifically, sample No. 51 has an abrasion-resistant layer with a thickness of 4 μm and an intermediate layer with a thickness of 0 μm. Sample No. 52 has an abrasion-resistant layer with a thickness of 2.5 μm and an intermediate layer with a thickness of 1.5 μm. Sample No. 53 has an abrasion-resistant layer and an intermediate layer with a thickness of 2 μm. Sample No. 54 has an abrasion-resistant layer with a thickness of 1.5 μm and an intermediate layer with a thickness of 2.5 μm. Sample No. 55 is a sample without an abrasion-resistant layer. Specifically, sample No. 55 has an abrasion-resistant layer with a thickness of 0 μm and an intermediate layer with a thickness of 4 μm.

[0126] 28, Samples No. 54 and No. 55, in which the intermediate layer is thicker than the wear-resistant layer, show greater boundary damage than Samples No. 51 to No. 53, in which the intermediate layer is thinner than the wear-resistant layer. From this result, it is preferable that the thickness of the intermediate layer is equal to or less than the thickness of the wear-resistant layer.

[0127] 1 is merely an example and does not limit the shape of the coated tool according to the present disclosure. The coated tool according to the present disclosure may have, for example, a rod-shaped main body having a rotation axis and extending from a first end to a second end, a cutting edge located at the first end of the main body, and a groove extending spirally from the cutting edge toward the second end of the main body.

[0128] Further advantages and modifications will readily occur to those skilled in the art. Therefore, the invention in its broader aspects is not limited to the specific details and representative embodiments shown and described above. Accordingly, various modifications may be made without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalents. [Explanation of symbols]

[0129] 1 Coated tools 2 Chip body 4a periodic table 5 through holes 10 Base 20 Covering layer 21 Adhesion layer 22 Middle Class 23 Wear-resistant layer 100 cutting tools 201 Corner section D1 Primary boundary wear D2 Secondary boundary wear D3 Abrasive wear D4 Crater wear

Claims

1. A method for manufacturing a semiconductor device, comprising: a substrate; and a coating layer disposed on a surface of the substrate; the coating layer contains cubic crystals, the coating layer includes an adhesive layer in contact with the substrate, an intermediate layer in contact with the adhesive layer, and an abrasion-resistant layer in contact with the intermediate layer, the adhesion layer contains Ti x Al y M z (M is at least one metal selected from Groups 4a, 5a, and 6a of the periodic table and Si, and x, y, and z satisfy the relationships 40≦x≦80, 0≦y≦55, and x+y+z=100), the intermediate layer contains Ti e Al f M g (M is at least one metal selected from Groups 4a, 5a, and 6a of the periodic table (excluding Cr) and Si, and e, f, and g satisfy the relationships 0≦e≦55, 40≦f≦80, and e+f+g=100), and nitrogen; the wear-resistant layer comprises Ti a Al b Cr c M d (M is at least one metal selected from Groups 4a, 5a, and 6a of the periodic table (excluding Cr) and Si, and a, b, c, and d satisfy the relationships 20≦a≦30, 55≦b≦70, 15≦c≦20, 2.5≦d≦15, and a+b+c+d=100), and nitrogen; in a measurement range of 0° to 90° in an X-ray intensity distribution of an α-axis in a pole figure for a (111) plane of a cubic crystal of the coating layer, the difference between the maximum and minimum values ​​of the X-ray intensity in a range of an α-axis angle of 30° to 90° is 10% or less of the maximum value, In the measurement range of 0° to 90° in the X-ray intensity distribution of the α-axis of a pole figure for the (200) plane of the cubic crystal of the coating layer, the X-ray intensity has a maximum value and a minimum value in the range of the α-axis angle of 0° to 50°, and the difference between the maximum value and the minimum value is 10% or less of the maximum value. Coated tools.

2. 2. The coated tool according to claim 1, wherein the coating layer has a thickness of 2.5 μm or more and 10 μm or less.

3. 2. The coated tool according to claim 1, wherein the coating layer has a crystallite diameter of 200 Å or less.

4. A coated tool as described in claim 1, wherein the Vickers hardness of the wear-resistant layer is 28 GPa or more.

5. A coated tool as described in claim 1, wherein the thickness of the adhesion layer is 2 nm or more and 8 nm or less.

6. a rod-shaped holder having a pocket at an end; The coated tool according to any one of claims 1 to 5, which is located in the pocket. A cutting tool having

Images