Film forming device and scaffolding unit

Abstract

To improve work efficiency during maintenance.SOLUTION: An in-line type deposition apparatus for depositing onto a substrate, while transporting the substrate, includes a conveyance unit for conveying the substrate, and a deposition source unit containing a deposition source, and movable to a first position under the conveyance unit, and to a second position displaced in the lateral direction to the first position. The deposition apparatus further includes a scaffolding unit developing a scaffolding under the conveyance unit in linkage with movement of the deposition source unit from the first position to the second position.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] The present invention relates to a film forming apparatus and a scaffolding unit. [Background technology]

[0002] Conventionally, in-line type apparatuses that process substrates while transporting them are known. Patent Document 1 discloses an in-line type substrate processing apparatus in which a plurality of processing units are arranged vertically. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2018-93087 Summary of the Invention [Problem to be solved by the invention]

[0004] In the above-described conventional technology, maintenance of processing units other than the processing unit at the bottom level requires the use of a step stool or the like, which takes time to prepare and remove the step stool, and can reduce work efficiency during maintenance.

[0005] The present invention provides a technique for improving work efficiency during maintenance. [Means for solving the problem]

[0006] According to one aspect of the present invention, a transport unit for transporting the substrate; a film formation source unit including a film formation source and movable between a first position below the transport unit and a second position displaced laterally from the first position; An in-line type film forming apparatus that forms a film on a substrate while transporting the substrate, a scaffold unit that deploys a scaffold below the transport unit in conjunction with the film formation source unit moving from the first position to the second position; A film forming apparatus characterized by the above features is provided. [Effects of the Invention]

[0007] According to the present invention, it is possible to improve the efficiency of maintenance work. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a front view schematically showing a film forming apparatus according to an embodiment. [Figure 2] FIG. 2 is a side view of the film forming apparatus of FIG. 1. [Figure 3] FIG. 2 is a diagram schematically illustrating the internal structure of the film forming apparatus of FIG. [Figure 4] FIG. 2 is a perspective view showing the configuration of the scaffolding unit. [Figure 5] FIG. 1 is a front view of the scaffolding unit of the deposition apparatus. [Figure 6] 10A to 10C are diagrams illustrating the movement of the deposition source unit and the deployment operation of the scaffold unit. [Figure 7] (A) is a view of the scaffolding unit before deployment as seen from the front of the film deposition device. (B) is a view of the scaffolding unit during deployment as seen from the front of the film deposition device. [Figure 8] FIG. 4 is a plan view schematically showing the positional relationship between the transport unit and the scaffolding unit. [Figure 9] FIG. 1 is a front view of the scaffolding unit of the deposition apparatus. [Figure 10] FIG. 2 is a side view of a film forming apparatus according to an embodiment. [Figure 11] FIG. 1 is a front view schematically showing a film forming apparatus according to an embodiment. [Figure 12] FIG. 12 is a plan view of the film forming apparatus of FIG. [Figure 13] FIG. 1 is a front view schematically showing a film forming apparatus according to an embodiment. [Figure 14] FIG. 1 is a perspective view showing an outline of a scaffolding unit. [Figure 15]A diagram showing the configuration of the scaffolding unit, showing multiple placement sections, lifting sections, and their surrounding configuration. [Figure 16] FIG. 10 is a diagram showing the configuration of the floorboard member, and is a perspective view of the floorboard member 81 as seen from the back side. [Figure 17] FIG. 4 is a perspective view showing the configuration of a rail member. [Figure 18] 10A and 10B are explanatory diagrams illustrating the operation of transferring the floor plate member from the placement portion to the rail member. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, the embodiments will be described in detail with reference to the accompanying drawings. Note that the following embodiments do not limit the scope of the invention as claimed, and not all combinations of features described in the embodiments are necessarily essential to the invention. Two or more of the features described in the embodiments may be arbitrarily combined. Furthermore, the same reference numerals are used for the same or similar components, and redundant explanations will be omitted.

[0010] In each figure, the X direction indicates the substrate transport direction, the Y direction indicates the width direction intersecting the substrate transport direction, and the Z direction indicates the up-down direction.

[0011] First Embodiment <Overview of the film deposition equipment> Fig. 1 is a front view schematically showing a film formation apparatus 1 according to one embodiment. Fig. 2 is a side view of the film formation apparatus 1 of Fig. 1. Fig. 3 is a diagram schematically showing the internal structure of the film formation apparatus 1 of Fig. 1.

[0012] The film forming apparatus 1 is an in-line type film forming apparatus that forms a film on a substrate while transporting the substrate. The film forming apparatus 1 is used, for example, in the manufacture of display panels for organic EL display devices for smartphones, and a production line can be configured by arranging multiple units side by side.

[0013] In this embodiment, substrates held on a substrate holding tray 100 are sequentially transported to the film forming apparatus 1, and the film forming apparatus 1 performs deposition of an organic electroluminescent (EL) film on the transported substrates. For example, the substrates are superimposed on a mask in an upstream process before being transported to the film forming apparatus 1 and held on the substrate holding tray 100. Therefore, in the film forming apparatus 1, a thin film of a deposition material having a predetermined pattern is formed on the substrate using the mask. The substrate material on which deposition is performed in the film forming apparatus 1 can be appropriately selected from glass, resin, metal, etc., and a substrate in which a resin layer such as polyimide is formed on glass is preferably used. The deposition material may be an organic material or an inorganic material (metal, metal oxide, etc.). The film forming apparatus 1 can be used as a manufacturing apparatus for manufacturing electronic devices such as display devices (e.g., flat panel displays), thin-film solar cells, and organic photoelectric conversion devices (organic thin-film imaging devices), as well as optical components, and is particularly suitable for manufacturing organic EL panels. In the following description, an example will be described in which the film forming apparatus 1 forms a film on a substrate by vacuum deposition, but the film forming method is not limited to this, and various film forming methods such as sputtering and CVD can be applied.

[0014] The film forming apparatus 1 includes a transfer unit 2, a deposition source unit 3, an adhesion prevention plate 6, a moving unit 7, and a frame portion 101.

[0015] The frame portion 101 is provided so as to be able to support components such as the transfer unit 2 of the film forming apparatus 1. In the example of Fig. 1, the frame portion 101 includes pillars and beams, and supports the transfer unit 2 and the vacuum pump 102. The frame portion 101 may also be provided with a work crane, a passageway for workers to perform maintenance, and the like.

[0016] The transport unit 2 transports the substrate. In this embodiment, the transport unit 2 transports the substrate by transporting the substrate holding tray 100 holding the substrate. The transport unit 2 includes a transport chamber 21 and transport rollers 22.

[0017] The transfer chamber 21 is a box-shaped chamber capable of maintaining a vacuum inside. The internal space 210 of the transfer chamber 21 is maintained in a vacuum atmosphere or an inert gas atmosphere such as nitrogen gas. In this embodiment, the transfer chamber 21 is connected to a vacuum pump 102. In this specification, the term "vacuum" refers to a state filled with gas at a pressure lower than atmospheric pressure, in other words, a reduced pressure state.

[0018] The transfer chamber 21 is formed with an inlet opening 211 through which the substrate holding tray 100 is loaded and an outlet opening 212 through which the substrate holding tray 100 is unloaded. A communication opening 213 is formed in the lower part of the transfer chamber 21 to communicate the internal space 210 with the internal space 310 of the deposition source chamber 31. The inlet opening 211 and the outlet opening 212 may be provided with a gate valve (not shown) or the like to maintain the internal space 210 at a vacuum.

[0019] The transport rollers 22 transport the substrate holding trays 100 holding substrates. The transport rollers 22 are provided in the internal space 210 of the transport chamber 21. The transport rollers 22 are rotatably supported cylindrical members made of, for example, a metal material. The transport rollers 22 are driven by, for example, an electric motor (not shown) provided outside the transport chamber 21.

[0020] In this embodiment, a reinforcing rib 23 is provided at the bottom of the transport unit 2.

[0021] The deposition source unit 3 is a unit (film formation unit) having a deposition source 32 (film formation source) that emits a deposition material onto the substrate. In this embodiment, three deposition source units 3 are arranged side by side in the substrate transport direction (X direction) for one transport unit 2. However, the number of deposition source units 3 can be set appropriately, and may be two or less or four or more. Furthermore, the deposition source unit 3 is located below the transport unit 2 and connected to the lower part of the transport unit 2 during the deposition process. The deposition source unit 3 includes a deposition source chamber 31 and a deposition source 32.

[0022] The deposition source chamber 31 is a box-shaped chamber capable of maintaining a vacuum inside. An internal space 310 of the deposition source chamber 31 can communicate with the internal space 210 of the transfer chamber 21 through a communication opening 311 provided in the upper part of the transfer chamber 21. During operation, the internal space 310 is maintained in a vacuum atmosphere or an inert gas atmosphere such as nitrogen gas, similar to the internal space 210.

[0023] The deposition source 32 emits a deposition material for forming a film on the substrate transported by the transport unit 2. For example, the deposition source 32 includes a plurality of nozzles (not shown) arranged in the Y direction, and the deposition material is emitted from each nozzle. For example, the deposition source 32 also includes a storage section that stores the deposition material and a heater (neither of which is shown) that heats the deposition material stored in the storage section. The deposition material stored in the storage section is heated by the heater and vaporized, causing the deposition material to be emitted from the deposition source 32.

[0024] The deposition source unit 3 may also include a shutter that shields the deposition source 32 when the deposition source 32 is not in use, an evaporation rate monitor that monitors the amount of evaporation of the deposition material by the deposition source 32, or the like (neither of which is shown).

[0025] The adhesion prevention plate 6 prevents the deposition material emitted from the deposition source 32 from adhering to the inner walls of the deposition source chamber 31 or the transfer chamber 21, for example. For example, the adhesion prevention plate 6 is supported by the deposition source chamber 31. In this embodiment, the adhesion prevention plate 6 is positioned across the internal space 310 and the internal space 210 so as to cover the deposition source 32, and has an opening formed at the top. With this configuration, part of the deposition material adheres to the substrate through the opening, while the remaining deposition material adheres to the adhesion prevention plate 6. In this way, the adhesion prevention plate 6 prevents the deposition material from adhering to the inner walls of the deposition source chamber 31 or the transfer chamber 21, for example, while allowing the deposition material to adhere to the substrate.

[0026] In this embodiment, the deposition prevention plate 6 is provided so as to be vertically movable relative to the deposition source chamber 31. More specifically, the deposition prevention plate 6 includes an upper portion 61 and a lower portion 62, and the upper portion 61 is provided so as to be vertically movable relative to the deposition source chamber 31. This reduces the amount of descent of the deposition source unit 3 required to avoid interference between the transport unit 2 and the deposition prevention plate 6 when the deposition source unit 3 is moved laterally by the moving unit 7.

[0027] The transfer chamber 21 or the deposition source chamber 31 may be provided with an adhesion prevention plate other than the adhesion prevention plate 6. For example, the adhesion prevention plate may be provided on the ceiling or side surface inside the transfer chamber 21.

[0028] The moving unit 7 is a unit that moves the deposition source unit 3. In this embodiment, the moving unit 7 is provided below the deposition source unit 3 and moves the deposition source unit 3 in the vertical direction (Z direction) or the horizontal direction (Y direction) while supporting the deposition source unit 3. The moving unit 7 includes a horizontal moving part 71 and an elevating part 72.

[0029] The lateral movement unit 71 moves the deposition source unit 3 in the lateral direction (Y direction). In this embodiment, the lateral movement unit 71 moves the deposition source unit 3 in the width direction (Y direction) of the substrate, which intersects with the substrate transport direction (X direction). The lateral movement unit 71 includes a guide unit 711 provided on the floor surface and a drive unit 712 for moving the deposition source unit 3 along the guide unit 711. Well-known technology can be appropriately adopted as the drive unit 712. For example, a drive wheel that can run on a rail as the guide unit 711 may be rotated by a motor or the like.

[0030] The lifting unit 72 lifts and lowers the deposition source unit 3. In this embodiment, the lifting unit 72 lifts and lowers the deposition source unit 3 in the vertical direction (Z direction). The lifting unit 72 includes a deposition source unit support 721 that supports the deposition source unit 3, and a driving unit 722 that lifts and lowers the deposition source unit support 721. Well-known technology can be used for the driving unit 722, and the deposition source unit support 721 may be lifted and lowered by, for example, an electric cylinder or the like.

[0031] In this embodiment, when performing maintenance on the transfer unit 2, the moving unit 7 moves the deposition source unit 3 laterally from a position below the transfer unit 2, allowing an operator to access the inside of the transfer chamber 21 from below. At this time, the moving unit 7 moves the deposition source unit 3 downward using the lifting unit 72, and then moves the deposition source unit 3 laterally using the lateral movement unit 71. This operation will be described later together with the operation of the scaffold unit 4 (FIG. 6).

[0032] In this embodiment, a moving unit 7 is provided for each of the multiple deposition source units 3. Therefore, the film formation apparatus 1 of this embodiment can move each of the multiple deposition source units 3 independently. The multiple moving units 7 may be synchronized to move the multiple deposition source units 3 collectively. Alternatively, the number of moving units 7 may be fewer than the number of deposition source units 3, and one moving unit 7 may move the multiple deposition source units 3.

[0033] Although not described here, the film forming apparatus 1 may include a control device that controls the operations of the transfer unit 2, the deposition source unit 3, the moving unit 7, and the like.

[0034] <Scaffolding unit configuration> FIG. 4 is a perspective view showing the configuration of the scaffolding unit 4, showing the scaffolding 41 in an unfolded state. FIG. 5 is a view of the scaffolding unit 4 as seen from the front of the film forming apparatus 1, showing the scaffolding 41 in an unfolded state. The scaffolding unit 4 includes the scaffolding 41, a lifting section 42, a handrail section 43, a connecting section 44, and a fixing section 45. Note that the lifting section 42 and the handrail section 43 are omitted from FIG. 5.

[0035] The scaffolding 41 is used for maintenance of the transport unit 2, and may also be called a platform or step. The scaffolding 41 includes a pillar portion 411, a beam portion 412, and a floorboard portion 413.

[0036] The pillar portions 411 support the beam portions 412. One pillar portion 411 includes two pillar members 4111 and a connecting portion 4112 that rotatably connects the two pillar members 4111 and is in contact with the floor surface. In this embodiment, a total of four pillar portions 411 are provided. Furthermore, the pillar member 4111 is rotatably connected to a beam member 4121 or a beam member 4122 of the beam portion 412 at an end opposite to the end connected to the connecting portion 4112.

[0037] The beam portion 412 supports the floorboard portion 413. The beam portion 412 includes beam members 4121 and 4122 of different lengths, and a connecting member 4123 that connects the beam members together. The beam portion 412 is composed of two portions spaced apart in the X direction, and each portion is connected to each other by two beam members 4121, two beam members 4122, and three connecting members 4123 and is provided to extend in the Y direction. In addition, the connecting member 4123 rotatably supports the beam members 4121 and 4122. In this way, the beam portion 412 is foldable because multiple beam members are provided rotatably.

[0038] The floor plate portion 413 forms an area where an operator can move during maintenance of the transfer unit 2, etc. The floor plate portion 413 is disposed at a predetermined height from the plane on which the film forming apparatus 1 is installed, to facilitate the operator's access to the transfer unit 2. The floor plate portion 413 includes a plurality of plate-like members 4131 to 4135 arranged side by side in the Y direction. The plate-like members 4131 to 4135 are supported at both ends in the X direction by the beam member 4121, the beam member 4122, or the connecting member 4123, respectively. Therefore, the floor plate portion 413 is folded when the beam portion 412 is folded.

[0039] The lifting section 42 is used by a worker to ascend and descend to the floorboard section 413 of the deployed scaffolding 41. In this embodiment, the lifting section 42 is a ladder. However, the lifting section 42 may also be a staircase, steps, or the like. The lifting section 42 is rotatably supported on the beam section 412, for example.

[0040] The handrail section 43 includes a plurality of handrails 431 to 433 that stand upright relative to the floorboard section 413 of the unfolded scaffolding 41. The handrail 431 is rotatably provided on a plate-shaped member 4131, the handrail 432 is rotatably provided on a plate-shaped member 4133, and the handrail 433 is rotatably provided on a plate-shaped member 4135. When the scaffolding 41 is folded, the handrails 431 to 433 are folded down onto the floorboard section 413 and are folded together with the floorboard section 413.

[0041] In this embodiment, the connecting portion 44 connects the beam portion 412 to the moving unit 7, thereby connecting the scaffolding 41 to the deposition source unit 3 via the moving unit 7. Note that the connecting portion 44 may also directly connect the scaffolding 41 to the deposition source unit 3.

[0042] The fixing portion 45 fixedly supports the scaffold 41 at a predetermined position. In this embodiment, the fixing portion 45 supports the end portion of the beam member 4121 that is located farthest from the deposition source unit 3 in the Y direction, on the side farthest from the deposition source unit 3. The fixing portion 45 may be supported by a component that does not move with the movement of the deposition source unit 3, such as the frame unit 101 or the transport unit 2. Note that although the fixing portion 45 itself is fixedly provided here, the fixing portion 45 may also support the beam member 4121 so that it can rotate or slide.

[0043] In this embodiment, a scaffold unit 4 is provided for each of the three deposition source units 3. That is, the film formation apparatus 1 includes three scaffold units 4.

[0044] In this embodiment, when performing maintenance inside the transfer chamber 21 of the transfer unit 2, an operator can move the deposition source unit 3 laterally and access the internal space 210 through the exposed communication opening 213. However, because the transfer unit 2 is provided above the deposition source unit 3, an operator may not be able to perform maintenance on the transfer unit 2 while standing on the floor. In such cases, if the operator needs time to prepare and remove a step stool or the like, the efficiency of maintenance work may decrease. Therefore, in this embodiment, as described below, a platform is deployed below the transfer unit 2 in conjunction with the lateral movement of the deposition source unit 3.

[0045] <Explanation of the operation of the scaffolding unit> Fig. 6 is a diagram illustrating the operation of the deposition source unit 3 and the scaffolding unit 4. Fig. 7(A) is a diagram of the scaffolding unit 4 before the unfolding operation as seen from the front of the film forming apparatus 1, showing the scaffolding unit 4 in states ST1 and ST2 of Fig. 6. Fig. 7(B) is a diagram of the scaffolding unit 4 during the unfolding operation as seen from the front of the film forming apparatus 1, showing the scaffolding unit 4 in state ST3 of Fig. 6. Note that the lifting section 42 and the handrail section 43 are omitted in Figs. 7(A) and 7(B).

[0046] In state ST1, the deposition source unit 3 is located at a connection position POS1 where it is connected to the transport unit 2. State ST1 is a state in which the film formation apparatus 1 performs deposition on a substrate. In state ST1, the deposition source unit 3 is located below the transport unit 2, and the lower part of the transport unit 2 is connected to the upper part of the deposition source unit 3.

[0047] In state ST2, the deposition source unit 3 is moved from the connected position POS1 to the disconnected position POS2 below it. The deposition source unit 3 is moved in the −Z direction from the connected position POS1 to the disconnected position POS2 by the lifting part 72 of the moving unit 7.

[0048] In state ST1 or state ST2, the scaffolding unit 4 is in a folded state. In these states, the column members 4111, the beam members 4121, and the beam members 4122 extend in the Z direction, and the connecting members 4123 are arranged to extend in the Y direction. In addition, the floorboard portion 413 is folded along the beam portion 412. This allows the scaffolding unit 4 to be configured compactly in the Y direction as a whole.

[0049] State ST3 is a state in which the deposition source unit 3 is in the middle of moving to the maintenance position. One end of the scaffold 41 of the scaffold unit 4 is supported at a predetermined position by the fixing part 45, and the other end connected to the connecting part 44 moves laterally (to the right in the drawing, in the −Y direction) in conjunction with the movement of the deposition source unit 3, thereby unfolding from the folded state.

[0050] State ST4 is a state in which the lateral movement of the deposition source unit 3 is completed. In state ST4, the deposition source unit 3 is located at a maintenance position POS3 where maintenance of the transfer unit 2 or the deposition source unit 3 is performed. When the deposition source unit 3 is located at the maintenance position POS3, the scaffold 41 is deployed below the transfer unit 2.

[0051] FIG. 8 is a plan view schematically illustrating the positional relationship between the transport unit 2 and the scaffold unit 4. In this embodiment, when the deposition source unit 3 is located at the maintenance position POS3 (see the deposition source unit 3 at the center of FIG. 8 ), the deployed scaffold 41 is deployed so as to be located below the communication opening 213 of the transport unit 2. In other words, the deployed scaffold 41 is disposed below the transport unit 2 so as to face the communication opening 213. Furthermore, when the deposition source unit 3 is located at the maintenance position POS3, the scaffold 41 is disposed so as to overlap the communication opening 213 of the transport unit 2 in the vertical direction (Z direction) in a plan view. By disposing the scaffold 41 below the communication opening 213, a worker can more easily access the internal space 210 while standing on the scaffold. Furthermore, when the deposition source unit 3 is located at the maintenance position POS3, the scaffold 41 may be disposed so as to overlap the communication opening 213 over the entire Y-direction of the communication opening 213 in a plan view. This allows workers to more easily access almost the entire interior space 210.

[0052] As described above, according to the present embodiment, the scaffolding unit 4 deploys the scaffolding 41 below the transport unit 2 in conjunction with the movement of the deposition source unit 3 from the disconnection position POS2 to the maintenance position POS3. This facilitates access to the transport unit 2 when performing maintenance on the transport unit 2, and eliminates the need to prepare and remove a step stool or the like, thereby improving work efficiency during maintenance.

[0053] Second Embodiment 9 is a view of the scaffolding unit 9 according to the second embodiment as seen from the front of the film forming apparatus 1, showing the state in which the scaffolding 91 is deployed. In the second embodiment, the configuration of the beams and floorboards differs from that of the first embodiment. Hereinafter, the same components as those in the first embodiment will be assigned the same reference numerals, and the description thereof may be omitted.

[0054] In this embodiment, the scaffolding 91 includes a column portion 411, a beam portion 912, and a floor plate portion 913. The beam portion 912 supporting the floor plate portion 913 includes a beam member 9121, a beam member 9122, and a connecting member 9123. Here, when the scaffolding 91 is unfolded, the beam members 9121 and 9122 are provided obliquely with respect to the Y direction, which is the movement direction of the deposition source unit 3. More specifically, when viewed from the X direction, the extension direction of the beam members 9121 and 9122 includes a Y direction component and a Z direction component.

[0055] With this configuration, at the maintenance position POS3, the axial directions of the beam members 9121 and 9122 are inclined with respect to the movement direction of the deposition source unit 3, which makes it easier for the beam members 9121 and 9122 to rotate when the deposition source unit 3 moves laterally. Therefore, according to this embodiment, the deployed platform 91 can be easily folded.

[0056] Furthermore, in this embodiment, the plate-like members 9131 to 9135 have a shape that makes the floor surface of the floorboard portion 913 approximately horizontal. More specifically, the plate-like members 9131, 9133, and 9135 that are supported by the beam members 9121 or 9122 that extend obliquely with respect to the Y direction are formed so that the surfaces that form the floor surface of the floorboard portion 913 are horizontal. At the same time, the plate-like members 9131, 9133, and 9135 are formed so that the surfaces that are supported by the beam members 9121 or 9122 are inclined surfaces that correspond to the extension direction of the beam members 9121 or 9122. This allows the scaffolding 91 to be easily folded while maintaining the floor surface of the scaffolding 91 horizontal.

[0057] <Other embodiments> In the first embodiment, the handrail portion 43 is provided on the scaffolding unit 4, but a handrail may also be provided at the bottom of the transport unit 2. Fig. 10 is a side view of the film forming apparatus 1 in one embodiment. In this example, a handrail 931 is provided so as to extend downward from the rib 23 of the transport unit 2. Such a handrail 931 may also be provided across the bottom of the transport unit 2 in the Y direction.

[0058] Furthermore, the positions at which handrails are installed and the number of handrails can be changed as appropriate. For example, in the example of Fig. 4, the handrail section 43 is provided only on one side in the X direction of the floorboard section 413, but it may be provided on both sides in the X direction of the floorboard section 413. Alternatively, when a plurality of scaffoldings 41 are provided side by side in the X direction, the handrail sections 43 may be provided only on both outer ends of the scaffoldings 41 on both outer sides in the X direction.

[0059] Furthermore, the connection portion 44 may be provided so that the connection between the scaffold 41 and the deposition source unit 3 can be released. This allows the scaffold 41 to be deployed only when it is needed.

[0060] In addition, the configuration of the scaffolding 41 can be changed as appropriate. In the above embodiment, the two pillar members 4111 are connected by the connecting portion 4112, but the pillar members 4111 may each independently contact the floor surface and support the beam portion 412.

[0061] The film formation apparatus 1 may also include a sensor that detects a value related to the tilt of the deposition source unit 3. When the value related to the tilt of the deposition source unit 3 detected by the sensor does not satisfy a predetermined condition, the film formation apparatus 1 may stop the lifting and lowering operation of the deposition source unit 3, i.e., the movement operation between the connection position POS1 and the disconnection position POS2.

[0062] For example, the sensor may be a pendulum-type or float-type tilt sensor that directly detects the tilt of the deposition source unit 3, or an acceleration sensor that indirectly detects the tilt. Furthermore, for example, the sensor may be a sensor that detects a value that can determine whether the deposition source unit 3 is tilted, such as a value related to the drive load of the drive units 722 on both sides (e.g., drive current value) or the load of the deposition source unit 3 acting on the deposition source unit support units 721 on both sides.

[0063] For example, the film formation apparatus 1 may stop the lifting / lowering operation of the deposition source unit 3 when the tilt of the deposition source unit 3 detected by the sensor is equal to or greater than a threshold. Alternatively, the film formation apparatus 1 may stop the lifting / lowering operation of the deposition source unit 3 when the difference in the drive current values ​​of the drive units 722 on both sides or the load of the deposition source unit 3 applied to the deposition source unit support unit 721 is equal to or greater than a threshold.

[0064] Third Embodiment Fig. 11 is a front view schematically illustrating a film formation apparatus 13 according to a third embodiment. Fig. 12 is a plan view of the film formation apparatus 13 of Fig. 11, illustrating a state in which the central deposition source unit 3 is positioned at a maintenance position POS3. This embodiment differs from the first embodiment in that the film formation apparatus 13 includes a take-out unit 5. Hereinafter, the same components as those in the first embodiment will be denoted by the same reference numerals, and their description may be omitted.

[0065] The removal unit 5 removes a predetermined component from above the deposition source unit 3 located at the maintenance position POS3. Examples of the predetermined component include the deposition source chamber 31 and the adhesion prevention plate 6 housed in the deposition source chamber 31 of the deposition source unit 3. The removal unit 5 is supported by a frame 101 so as to be movable above the deposition source unit 3. The removal unit 5 includes a holder 51, a vertical movement unit 52, and a horizontal movement unit 53.

[0066] The holding unit 51 holds a predetermined component. For example, the holding unit 51 may grip a predetermined component by moving its tip in a predetermined direction, such as horizontally. Alternatively, the holding unit 51 may be provided with a hook for catching a sling wire, and the predetermined component may be held by hanging it from the wire. The holding unit 51 may be configured to be foldable so that it can accommodate components of different sizes.

[0067] The vertical movement unit 52 moves the holding unit 51 in the vertical direction. Any known technology can be appropriately adopted as the vertical movement unit 52, but for example, an electric cylinder having a ball screw mechanism or a pneumatic balance cylinder may also be used.

[0068] The horizontal movement unit 53 moves the holding unit 51 in the horizontal direction. More specifically, the horizontal movement unit 53 moves the vertical movement unit 52 in the horizontal direction, thereby moving the holding unit 51 in the horizontal direction. For example, the horizontal movement unit 53 includes an X-direction movement unit 531 that moves the vertical movement unit 52 in the X direction, and a Y-direction movement unit 532 that moves the vertical movement unit 52 in the Y direction. In this embodiment, the Y-direction movement unit 532 moves the vertical movement unit 52 in the Y direction, and the X-direction movement unit 531 moves the Y-direction movement unit 532 in the X direction. The X-direction movement unit 531 and the Y-direction movement unit 532 can be formed using known techniques as appropriate. For example, they may be configured to include a rack-and-pinion mechanism and an electric motor that rotates the pinion. Alternatively, a pulley-type mechanism may be used, and movement in at least one of the X and Y directions may be performed manually by an operator without a drive source.

[0069] For example, when the removal unit 5 removes a predetermined part from the deposition source unit 3 located at the maintenance position POS3, the removal unit 5 places the removed part on a maintenance table or the like (not shown). This makes it easier for an operator to perform maintenance than when the part to be maintained is inside the deposition source chamber 31.

[0070] It is also possible to employ a configuration in which a plurality of removal units 5 are provided. In this case, when both outer deposition source units 3 are pulled out to the maintenance position POS3, components can be removed in parallel from each deposition source unit 3. Furthermore, when a plurality of removal units 5 are provided, for example, a rail portion of the X-direction moving part 531 may be shared.

[0071] <Fourth embodiment> FIG. 13 is a front view showing a film forming apparatus 14 according to a fourth embodiment. In this embodiment, the configuration of the scaffolding unit is different from that of the first embodiment. Hereinafter, the same components as those in the first embodiment will be given the same reference numerals, and the description thereof may be omitted. Furthermore, when multiple similar components are provided, the reference numerals of some of the components may be omitted in consideration of the ease of viewing the drawings.

[0072] Fig. 14 is a perspective view showing an outline of the scaffolding unit 8. Fig. 15 is a diagram showing the configuration of the scaffolding unit 8, showing a plurality of mounting sections 82, a lifting section 84, and their peripheral configuration. The scaffolding unit 8 includes a plurality of floorboard members 81 as a scaffold, a plurality of mounting sections 82, a pair of rail members 83, the lifting section 84, and a connection section 85.

[0073] The plurality of floor plate members 81a to 81h (hereinafter collectively referred to as floor plate members 81) are arranged vertically side by side when the deposition source unit 3 is at the connection position POS1 or the connection release position POS2 (see FIGS. 13 and 15). The plurality of floor plate members 81 are arranged horizontally side by side when the deposition source unit 3 is at the maintenance position POS3 (see FIG. 14).

[0074] FIG. 16 is a diagram showing the configuration of the floorboard member 81, and is a perspective view of the floorboard member 81 as seen from the back side. Each of the multiple floorboard members 81 includes a top wall 811, a side wall 812, a positioning portion 813, a positioning portion 814, and an extension portion 815. The top wall 811 forms a foothold for a worker. The side wall 812 forms the side surface of the floorboard member 81 in the X direction. The side wall 812 includes a wall portion 812a that is provided on the inside in the X direction relative to the other portions. The positioning portion 813 performs positioning with respect to the multiple placement portions 82. The positioning portion 814 performs positioning with respect to the pair of rail members 83. In this embodiment, the positioning portion 813 is a protrusion that protrudes inward in the X direction from the wall portion 812a, and the positioning portion 814 is a protrusion that protrudes outward in the X direction from the wall portion 812a.

[0075] The plurality of placement sections 82a to 82h (hereinafter collectively referred to as placement sections 82) are configured to be able to place the plurality of floor plate members 81a to 81h thereon, respectively. The plurality of placement sections 82 each include a plate member 821 on which the floor plate member 81 is placed, and a positioning section 822 (see FIG. 18 ) provided at a position corresponding to the positioning section 813 of the floor plate member 81. In this embodiment, the positioning section 822 is configured by forming a recess that receives the positioning section 813 in a block provided on the plate member 821. In this embodiment, two positioning sections 822 are provided on each placement section 82 and spaced apart in the X direction so as to correspond to the positions of the positioning sections 813 when the floor plate member 81 is placed on it. Note that for each placement section 82, a plurality of plate members 821 may be provided spaced apart in the X direction, or each placement section 82 may be configured with a single plate member 821.

[0076] The pair of rail members 83 supports a plurality of floor plate members 81 arranged side by side in the horizontal direction. In this embodiment, the pair of rail members 83 are supported via connection portions 831 on the ribs 23, frame portion 101, or the like of the film forming apparatus 14. In another embodiment, the pair of rail members 83 may be supported directly on the ribs 23 or frame portion 101, or may be supported by a support portion or the like arranged on the floor surface. FIG. 17 is a perspective view showing the configuration of the rail members 83. The pair of rail members 83 are provided with positioning portions 833 that position the floor plate members 81. The positioning portions 833 are provided at a predetermined interval on each of the pair of rail members 83. The positioning portions 833 are configured by forming recesses in blocks provided on the rail members 83 that receive the positioning portions 814 of the floor plate members 81. In addition, a rail-side rack 845, which will be described later, is provided below the pair of rail members 83.

[0077] Referring again to Figure 15, the lifting unit 84 lifts and lowers the plurality of mounting units 82. The lifting unit 84 includes a support unit 841, a gear 842, a gear 843, a gear 844, a rail-side rack 845, and a support unit-side rack 846. The support unit 841 extends in the lifting direction (the vertical direction in this embodiment) and supports the plurality of mounting units 82.

[0078] When the deposition source unit 3 moves between the disconnection position POS2 and the maintenance position POS3, the gear 842 rotates by meshing its teeth 842a with teeth 845a (see FIG. 18) of the rail-side rack 845. That is, when the deposition source unit 3 moves laterally, the gear 842 moves laterally relative to the rail-side rack 845, and therefore the gear 842 rotates.

[0079] Gear 843 transmits the rotation of gear 842 to gear 844. In this embodiment, gears 842 and 843 form a Geneva mechanism. That is, when convex portion 842b provided on gear 842 fits into groove portion 843a of gear 843, the rotation of gear 842 is transmitted to gear 843, and otherwise the rotation is not transmitted. This allows the rotation of gear 842 to be intermittently transmitted to gear 843. Furthermore, the rotation of gear 843 is transmitted to gear 844 by its teeth 843b meshing with teeth 844a of gear 844. In other words, the rotation of gear 842 is transmitted to gear 844 via gear 843.

[0080] Furthermore, the gear 844 transmits a rotational driving force to the support unit-side rack 846 by having its teeth 844a mesh with teeth 846a of the support unit-side rack 846. The support unit-side rack 846 converts the rotation of the gear 844 into linear motion. The support unit-side rack 846 moves in the vertical direction due to the rotation of the gear 844, thereby raising and lowering the support unit 841 on which the support unit-side rack 846 is provided. Then, the plurality of placement units 82 supported by the support unit 841 rise and fall.

[0081] The connection part 85 is a connection part of the scaffold unit 8 with the moving unit 7. When the scaffold unit 8 is connected to the moving unit 7 by the connection part 85, the multiple mounting parts 82 and the like of the scaffold unit 8 move laterally in accordance with the lateral movement of the deposition source unit 3.

[0082] 18 is an explanatory diagram illustrating the operation of transferring the floor plate member 81 from the placement section 82 to the rail member 83. In consideration of the ease of viewing the drawing, the rail member 83 and the rail-side rack 845 arranged on the front side of the drawing in the X direction are shown by dashed lines.

[0083] In this embodiment, the plurality of floor plate members 81 are arranged vertically with the deposition source unit 3 positioned at the connection position POS1 or the disconnection position POS2. The plurality of floor plate members 81 are deployed so as to be arranged horizontally in response to the movement of the deposition source unit 3 from the disconnection position POS2 to the maintenance position POS3. Specifically, the plurality of floor plate members 81 are sequentially transferred from the plurality of placement units 82 to the pair of rail members 83 in response to the movement of the deposition source unit 3 from the disconnection position POS2 to the maintenance position POS3, so that the plurality of floor plate members 81 are arranged horizontally. FIG. 18 illustrates the operation when the floor plate member 81a placed on the topmost placement unit 82a of the plurality of placement units 82 is transferred to the pair of rail members 83. However, the other placement units 82b to 82h perform the same operation when transferring the floor plate members 81b to 81h to the pair of rail members 83.

[0084] State ST101 is a state in which the deposition source unit 3 moves laterally a predetermined distance after the floor plate member 81b is transferred from the second topmost placement unit 82b to the pair of rail members 83. In state ST101, the placement units 82 move laterally in conjunction with the movement of the deposition source unit 3 due to the engagement of the teeth 842a of the gear 842 with the teeth 845a of the rail-side rack 845. On the other hand, in state ST101, the convex portions 842b are not inserted into the grooves 843a, and therefore the lifting unit 84 does not perform any lifting operation. That is, the placement units 82 move horizontally.

[0085] State ST102 is a state in which the deposition source unit 3 has moved laterally relative to the rail member 83 by a predetermined distance from state ST101. In state ST102, the plurality of mounting units 82 are moved downward by the lifting unit 84 while moving laterally in accordance with the movement of the deposition source unit 3. That is, the convex portion 842b fits into the groove portion 843a, and the rotation of the gear 842 is transmitted to the support unit-side rack 846 via the gears 843 and 844, thereby moving the mounting units 82 downward. For example, the rotation of the gear 842 is transmitted intermittently so that the mounting units 82 start to move downward when the mounting units 82 have moved horizontally to an extent that contact between the floor plate member 81b and the floor plate member 81a can be avoided.

[0086] State ST103 is a state after the floor plate member 81a has been transferred from the mounting portion 82a to the pair of rail members 83. In state ST103, the multiple mounting portions 82 move laterally in accordance with the movement of the deposition source unit 3. During the transition from state ST102 to state ST103, the mounting portions 82a move laterally and downward. Then, when the mounting surface of the mounting portion 82a on which the floor plate member 81a is placed moves from above to below the support surfaces of the floor plate member 81a of the pair of rail members 83, the floor plate member 81a is transferred to the rail members 83. That is, the mounting portion 82a transfers the floor plate member 81a it has placed onto the rail members 83 when moving from above to below the pair of rail members 83.

[0087] As described above, in this embodiment, the platform is deployed below the transport unit 2 in conjunction with the movement of the deposition source unit 3 from the disconnection position POS2 to the maintenance position POS3.

[0088] The scaffolding unit 8 may have a lifting section such as a ladder, staircase, or step that can ascend and descend to the floorboard member 81 as the scaffolding in the unfolded state.

[0089] The invention is not limited to the above-described embodiment, and various modifications and variations are possible within the scope of the gist of the invention. [Explanation of symbols]

[0090] 1 film forming device, 2 transport unit, 3 deposition source unit, 4 scaffolding unit, 41 scaffolding

Claims

1. a transport unit for transporting the substrate; a film formation source unit including a film formation source and movable between a first position below the transport unit and a second position displaced laterally from the first position; An in-line type film forming apparatus that forms a film on a substrate while transporting the substrate, a scaffold unit that deploys a scaffold below the transport unit in association with the film formation source unit moving from the first position to the second position; A film forming apparatus characterized by:

2. The scaffolding unit includes a foldable floorboard portion as the scaffolding, The folded floor plate portion is unfolded in conjunction with the film formation source unit moving from the first position to the second position.

2. The film forming apparatus according to claim 1.

3. The scaffolding unit comprises: A beam serving as the scaffolding for supporting the floorboard portion; a connection portion that connects the beam and the film formation source unit, 3. The film forming apparatus according to claim 2.

4. 4. The film formation apparatus according to claim 3, wherein the beam is provided obliquely with respect to a moving direction of the film formation source unit when the scaffold is deployed.

5. 5. The film deposition apparatus according to claim 1, wherein the scaffolding unit includes a lifting section for a worker to ascend and descend to the deployed scaffolding.

6. 6. The film deposition apparatus according to claim 1, wherein the scaffolding unit includes a handrail that stands upright relative to the deployed scaffolding.

7. 6. The film deposition apparatus according to claim 1, further comprising a handrail extending downward from a lower portion of the transport unit.

8. a plurality of the film formation source units are arranged side by side in a substrate transport direction so as to be independently movable, the scaffolding units are provided for the plurality of film formation source units, respectively; 8. The film forming apparatus according to claim 1, wherein the film forming apparatus is a film forming apparatus.

9. the transport unit includes a communication opening for communicating an internal space of the transport unit with an internal space of the film formation source unit, The deployed scaffold is disposed below the transport unit so as to face the communication opening.

9. The film forming apparatus according to claim 1, wherein the film forming apparatus is a film forming apparatus.

10. A scaffolding unit used in an in-line film forming apparatus that forms a film on a substrate while transporting the substrate, comprising: The film forming apparatus includes: a transport unit for transporting the substrate; a film-forming source unit including a film-forming source that emits a film-forming substance and that is movable between a first position below the transport unit and a second position that is displaced laterally relative to the first position; The scaffolding unit comprises: deploying a scaffold below the transport unit in conjunction with the film formation source unit moving from the first position to the second position; A scaffolding unit characterized by:

11. a transport unit for transporting the substrate; a film formation source unit including a film formation source and movable between a first position below the transport unit and a second position displaced laterally from the first position; An in-line type film forming apparatus that forms a film on a substrate while transporting the substrate, a scaffold unit that deploys a scaffold below the transport unit in conjunction with the film formation source unit moving from the first position to the second position; The scaffolding unit includes a plurality of floorboard members, In conjunction with the movement of the film formation source unit from the first position to the second position, the plurality of floor plate members that were aligned in the vertical direction at the first position are aligned in the horizontal direction, a removal unit configured to remove a predetermined component from above the film formation source unit located at the second position; A film forming apparatus characterized by:

12. The take-out unit comprises: a holding portion for holding the predetermined component; a vertical movement unit that moves the holding unit in a vertical direction; a horizontal movement unit that moves the holding unit in a horizontal direction; Including, 12. The film forming apparatus according to claim 11.

13. a transport unit for transporting the substrate; a film formation source unit including a film formation source and movable between a first position below the transport unit and a second position displaced laterally from the first position; An in-line type film forming apparatus that forms a film on a substrate while transporting the substrate, a scaffold unit that deploys a scaffold below the transport unit in conjunction with the film formation source unit moving from the first position to the second position; The scaffolding unit includes a plurality of floorboard members as the scaffolding, The plurality of floorboard members are the film formation source units are arranged vertically side by side in the first position, The film formation source units are deployed so as to be aligned in a horizontal direction in conjunction with the movement of the film formation source units from the first position to the second position. A film forming apparatus characterized by:

14. The scaffolding unit comprises: a plurality of placement sections arranged side by side in the vertical direction and capable of placing the plurality of floorboard members thereon; a pair of rail members supporting the plurality of floorboard members arranged side by side in the horizontal direction, In conjunction with the movement of the film formation source unit from the first position to the second position, the plurality of floor plate members are sequentially transferred from the plurality of mounting portions to the pair of rail members, thereby arranging the plurality of floor plate members in a horizontal direction.

14. The film forming apparatus according to claim 13.

15. The scaffolding unit comprises: a plurality of placement sections arranged side by side in the vertical direction and capable of placing the plurality of floorboard members thereon; a pair of rail members supporting the plurality of floorboard members arranged side by side in the horizontal direction; The scaffolding unit includes a lifting unit that lifts and lowers the plurality of mounting units, when the film formation source unit moves from the first position to the second position, the plurality of mounting units move laterally together with the film formation source unit and also move downward by the lifting unit; Each of the plurality of placement sections transfers each of the plurality of floor panel members placed thereon to the rail members when moving from the upper side to the lower side of the pair of rail members.

14. The film forming apparatus according to claim 13.

16. the lifting unit intermittently lowers the plurality of floor plate members when the film formation source unit moves from the first position to the second position.

16. The film forming apparatus according to claim 15.

17. The lifting unit is a first rack provided on the pair of rail members; a first gear that rotates in mesh with the first rack when the film formation source unit moves from the first position to the second position; a second gear to which rotation of the first gear is transmitted; a support portion extending in the lifting direction and supporting the plurality of placement portions; a second rack provided on the support portion and meshing with the second gear to move the support portion in an up-and-down direction, 17. The film forming apparatus according to claim 15, wherein the film forming apparatus is a film forming apparatus.

18. the lifting unit intermittently transmits rotation of the first gear to the second gear by a Geneva mechanism; 18. The film forming apparatus according to claim 17.

19. Each of the plurality of floor plate members includes a first positioning portion for positioning with respect to the plurality of placement portions and a second positioning portion for positioning with respect to the pair of rail members. The film forming apparatus according to any one of claims 14 to 18.

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