Electronic component and method for manufacturing electronic component

Abstract

To provide an electronic component capable of establishing electric connection of an external electrode and a plurality of internal electrodes, and improving a connection intensity of an element body and the external electrode.SOLUTION: An electronic component comprises: an element body 3 including an end surface 3a in which a groove 11 is formed; a plurality of internal electrodes 7 arranged in the element body 3 so as to be opposite each other; and an external electrode arranged at the end surface 3a and electrically connected to the plurality of internal electrodes 7. In the case where the groove 11 and the plurality of internal electrodes 7 are viewed from a direction orthogonal to the end surface 3a, the groove 11 is formed in a wave form so as to be crossed to the plurality of internal electrodes 7. Each of the plurality of internal electrodes 7 is physically connected to the external electrode and exposed from the end surface 3a, at a position crossed to the groove 11.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to an electronic component and a method for manufacturing an electronic component. [Background technology]

[0002] A known electronic component includes an element body having an end face, a plurality of internal electrodes disposed within the element body, and an external electrode disposed on the end face (see, for example, Patent Document 1). The external electrode is electrically connected to the plurality of internal electrodes. Each of the plurality of internal electrodes is exposed from the end face. A groove is formed linearly on the end face so as to intersect with the exposed plurality of internal electrodes. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2000-277381 Summary of the Invention [Problem to be solved by the invention]

[0004] The ends of the internal electrodes may not be exposed from the surface of the element body. In this case, it is difficult to establish an electrical connection between the internal electrodes and the external electrodes. Forming grooves in the element body can expose the ends of the internal electrodes from the element body. A configuration in which the grooves are formed linearly can expose the ends of the internal electrodes from the element body. A configuration in which the grooves are formed linearly tends to shorten the length of the grooves, and since a configuration in which the grooves are short makes it difficult to increase the connection area between the surface of the element body and the external electrodes, such a configuration makes it difficult to contribute to improving the connection strength between the element body and the external electrodes.

[0005] In a structure in which the ends of the internal electrodes are not exposed from the surface of the element body, the embedding depth of the ends of the internal electrodes from the surface is generally not uniform. Depending on the conditions used to produce the element body, the distribution of the embedding depth differs between the inner layer portion where the internal electrodes are located and the outer layer portion located outside the inner layer portion. In such cases, in order to expose the internal electrodes uniformly and efficiently, it is necessary to vary the processing depth and area ratio depending on the location.

[0006] An object of one aspect of the present invention is to provide an electronic component that establishes electrical connections between an external electrode and multiple internal electrodes and that can improve the connection strength between the element body and the external electrodes.An object of another aspect of the present invention is to provide an efficient method for manufacturing an electronic component that establishes electrical connections between an external electrode and multiple internal electrodes and that can improve the connection strength between the element body and the external electrodes. [Means for solving the problem]

[0007] An electronic component according to one aspect includes an element body having an end face on which a groove is formed, a plurality of internal electrodes arranged within the element body so as to face each other, and an external electrode arranged on the end face. The external electrode is electrically connected to the plurality of internal electrodes. When the groove and the plurality of internal electrodes are viewed from a direction perpendicular to the end face, the groove is formed in a wave shape so as to intersect with the plurality of internal electrodes. Each of the plurality of internal electrodes is exposed from the end face at a position where it intersects with the groove and is physically connected to the external electrode.

[0008] In one aspect, each of the plurality of internal electrodes is physically connected to the external electrode at a position where the internal electrodes intersect with the wave-shaped groove, thereby establishing electrical connection between the external electrode and the plurality of internal electrodes. A configuration in which the grooves are formed in a wavy shape allows the grooves to be longer than a configuration in which the grooves are formed in a straight line. Therefore, the above-mentioned one aspect makes it easy to increase the connection area between the surface of the element body and the external electrodes. The above-mentioned one aspect can improve the connection strength between the element body and the external electrodes.

[0009] According to another aspect, the method for manufacturing an electronic component is the method for manufacturing an electronic component according to the aspect described above. This aspect includes the steps of forming grooves on the end face by irradiating the end face with laser light and arranging external electrodes on the end face. The forming step includes forming the grooves in a wave-like shape so that the grooves intersect with the internal electrodes when viewed from a direction perpendicular to the end face, thereby exposing each of the internal electrodes from the end face at a position where the grooves intersect. The arranging step includes forming the external electrodes on the end face so that each of the internal electrodes is physically connected to the external electrode at a position where the grooves intersect.

[0010] In the electronic component obtained by the above-described another aspect, each of the plurality of internal electrodes is physically connected to the external electrode at a position where the internal electrodes intersect with the wavy groove, thereby reliably obtaining an electronic component in which electrical connections are established between the external electrode and the plurality of internal electrodes. In another aspect of the present invention, irradiating the end face with laser light forms a wavy groove on the end face. The process of forming the wavy groove can make the groove longer than the process of forming the linear groove. Therefore, the electronic component obtained by this another aspect can improve the connection strength between the element body and the external electrodes. [Effects of the Invention]

[0011] One aspect of the present invention provides an electronic component that establishes electrical connections between an external electrode and multiple internal electrodes and that can improve the connection strength between the element body and the external electrodes. Another aspect of the present invention provides an efficient method for manufacturing an electronic component that establishes electrical connections between an external electrode and multiple internal electrodes and that can improve the connection strength between the element body and the external electrodes. [Brief explanation of the drawings]

[0012] [Figure 1] FIG. 1 is a perspective view showing an electronic component according to one embodiment. [Figure 2] FIG. 2 is a diagram showing a cross-sectional configuration of the electronic component according to this embodiment. [Figure 3] FIG. 3 is a diagram showing a plurality of internal electrodes and grooves. [Figure 4] FIG. 4 is a diagram showing a cross-sectional configuration taken along line IV-IV in FIG. [Figure 5] FIG. 5 is a diagram showing a plurality of internal electrodes and grooves. [Figure 6] FIG. 6 is a flowchart showing a method for manufacturing an electronic component according to this embodiment. [Figure 7] FIG. 7 is a diagram showing an element body and a plurality of internal electrodes. DETAILED DESCRIPTION OF THE INVENTION

[0013] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the description, the same elements or elements having the same functions will be denoted by the same reference numerals, and redundant description will be omitted.

[0014] The configuration of the electronic component according to this embodiment will be described with reference to Figs. 1 to 4. Fig. 1 is a perspective view showing the electronic component according to this embodiment. Fig. 2 is a diagram showing a cross-sectional configuration of the electronic component according to this embodiment. Fig. 3 is a diagram showing a plurality of internal electrodes and grooves. Fig. 4 is a diagram showing a cross-sectional configuration taken along line IV-IV in Fig. 3. Note that external electrodes are not shown in Fig. 4.

[0015] 1 and 2, the electronic component 1 includes an element body 3, an external electrode 5, a plurality of internal electrodes 7, and a plurality of internal electrodes 9. In this embodiment, the electronic component 1 includes a pair of external electrodes 5. In this embodiment, the electronic component 1 is a multilayer ceramic capacitor.

[0016] The element body 3 has a rectangular parallelepiped shape. Examples of rectangular parallelepiped shapes include a rectangular parallelepiped shape with chamfered corners and ridges, and a rectangular parallelepiped shape with rounded corners and ridges. The element body 3 has a pair of end faces 3a, a pair of side faces 3c, and a pair of side faces 3e. In this embodiment, the pair of end faces 3a face each other in a first direction D1, the pair of side faces 3c face each other in a second direction D2, and the pair of side faces 3e face each other in a third direction D3. The pair of end faces 3a, the pair of side faces 3c, and the pair of side faces 3e form the surface of the element body 3. The pair of side faces 3c and the pair of side faces 3e are adjacent to the pair of end faces 3a, respectively, and extend in the first direction D1 to connect the pair of end faces 3a. For example, when one side face 3e of the pair of side faces 3e forms a first surface, the other side face 3e forms a second surface.

[0017] The first direction D1 is the length direction of the element body 3, the second direction D2 is the width direction of the element body 3, and the third direction D3 is the height direction of the element body 3. The length of the element body 3 is 0.4 mm or more and 7.5 mm or less. The width of the element body 3 is 0.2 mm or more and 6.3 mm or less. The height of the element body 3 is 0.2 mm or more and 2.8 mm or less. In this embodiment, the length of the element body 3 is 5.7 mm, the width of the element body 3 is 5.0 mm, and the height of the element body 3 is 2.6 mm.

[0018] The element body 3 is configured by stacking multiple dielectric layers. The dielectric layers are stacked in a third direction D3. The element body 3 includes multiple stacked dielectric layers. Each dielectric layer is configured, for example, from a sintered ceramic green sheet containing a dielectric material. The dielectric material is, for example, a BaTiO3-based, Ba(Ti,Zr)O3-based, (Ba,Ca)TiO3-based, CaZrO3-based, or (Ca,Sr)ZrO3-based dielectric ceramic. The dielectric layers are integrated to the extent that the boundaries between the dielectric layers are not visible.

[0019] As shown in FIG. 2 , the internal electrodes 7 and 9 are arranged at different positions in the third direction D3. The internal electrodes 7 and 9 are alternately arranged in the element body 3 so as to face each other at an interval in the third direction D3. The internal electrodes 7 and 9 face each other in the third direction D3. The internal electrodes 7 and 9 have opposite polarities. The internal electrode 7 has one end 7a exposed at one of the pair of end faces 3a. The internal electrode 9 has one end 9a exposed at the other of the pair of end faces 3a. The one end 7a of the internal electrode 7 is exposed at one of the pair of end faces 3a. The one end 9a of the internal electrode 9 is exposed at the other of the pair of end faces 3a. The internal electrodes 7 and 9 contain a conductive material. The conductive material includes, for example, Cu, Ni, or Pt. The internal electrodes 7 and 9 are configured as a sintered body of a conductive paste containing the conductive material.

[0020] As shown in FIGS. 1 and 2, a pair of external electrodes 5 are arranged on the surface of the element body 3. The pair of external electrodes 5 are spaced apart from each other in the first direction D1. The external electrodes 5 are arranged on the end face 3a. In this embodiment, the external electrodes 5 are also arranged on a portion of each of the pair of side faces 3c and the pair of side faces 3e. The external electrodes 5 may be arranged only on the end face 3a. The external electrodes 5 may be arranged on the end face 3a and at least one of the pair of side faces 3c and the pair of side faces 3e. The portions of the external electrodes 5 arranged on the end face 3a are arranged so as to cover one ends 7a, 9a of the corresponding internal electrodes 7, 9 that are exposed on the end face 3a. The external electrodes 5 are electrically connected to the corresponding internal electrodes 7, 9.

[0021] As shown in FIG. 2, the external electrode 5 has an electrode layer E. The electrode layer E includes a sintered metal layer. The sintered metal layer is formed by drying and baking a conductive paste applied to the surface of the element body 3. In this embodiment, the sintered metal layer is made of Cu. The sintered metal layer may also be made of Ag. The conductive paste contains, for example, metal powder made of Cu or Ag, glass, resin, and an organic solvent. The electrode layer E may also include a plating layer formed on the sintered metal layer. The electrode layer E may also include a conductive resin layer formed on the sintered metal layer, and a plating layer formed on the conductive resin layer.

[0022] As shown in FIG. 3, each end face 3a includes a region R1, a region R2, and a region R3. The region R1 is located closer to one of the pair of side faces 3e in the third direction D3. The region R2 is located closer to the other of the pair of side faces 3e in the third direction D3. The region R3 is located between the regions R1 and R2 in the third direction D3. The regions R1, R3, and R2 are arranged in this order in the direction from one side face 3e to the other side face 3e in the third direction D3. In this embodiment, each end face 3a includes the region R1, the region R2, and the region R3. The end face 3a may include regions other than the regions R1, R2, and R3. For example, when the region R1 constitutes the first region, the region R2 constitutes the second region, and the region R3 constitutes the third region.

[0023] A groove 11 is formed on each end face 3a. In this embodiment, the groove 11 consists of one groove portion 11a. The groove portion 11a includes a plurality of groove regions 12, a plurality of groove regions 13, and a plurality of groove regions 14. The groove regions 12 and 13 extend in different directions. The groove region 14 is located between the groove regions 12 and 13 in the second direction D2. The groove region 14 connects the groove regions 12 and 13. In this embodiment, the groove region 14 is curved when viewed from the first direction D1. The groove region 14 may include a plurality of groove regions that each extend substantially linearly. The plurality of groove regions included in the groove region 14 intersect with each other. For example, the groove region 14 may be substantially V-shaped. The number of groove regions included in the groove region 14 may be three or more.

[0024] When the end face 3a is viewed from the first direction D1, each groove region 12, 13 extends, for example, in a direction from one side face 3e to the other side face 3e. The direction from one side face 3e to the other side face 3e does not have to coincide with the third direction D3. When the end face 3a is viewed from the first direction D1, the extending direction of each groove region 12, 13 may intersect with the third direction D3 at an angle other than an angle perpendicular to the second direction D2. In this embodiment, when the end face 3a is viewed from the first direction D1, the extending direction of each groove region 12, 13 intersects, for example, the third direction D3 and is not perpendicular to the second direction D2. The distance in the second direction D2 between adjacent groove regions 12 and 13 in the second direction D2 monotonically increases or monotonically decreases in the third direction D3. "Monotonically increasing" means that there is no decreasing trend, and refers to a monotonically increasing in a broad sense. "Monotonically decreasing" means that there is no increasing trend, and refers to a monotonically decreasing in a broad sense.

[0025] The groove portion 11a is formed in a wavy shape, with groove regions 12 and 13 connected by groove region 14. The wavy shape includes a shape in which the wave amplitude and period are repeated regularly, and a shape in which the wave amplitude and period are repeated irregularly. The wavy shape includes a sinusoidal wave shape or a triangular wave shape. The groove portion 11a extends in the second direction D2 as a whole while exhibiting a sine wave shape. As described above, the groove 11 is composed of one groove portion 11a, and therefore the groove 11 is formed in a wavy shape on the end face 3a. In this embodiment, the groove 11 extends in the second direction D2 as a whole while exhibiting a sine wave shape corresponding to the groove portion 11a.

[0026] 3, when the groove regions 12, 13, and 14 and the multiple internal electrodes 7 are viewed from the first direction D1, each groove region 12, 13, and 14 is formed so as to intersect with a corresponding internal electrode 7 among the multiple internal electrodes 7. Only the groove region 12 and the groove region 13 may be formed so as to intersect with the multiple internal electrodes 7 when viewed from the first direction D1. When the groove portion 11a and the multiple internal electrodes 7 are viewed from the first direction D1, the groove portion 11a is formed in regions R1, R2, and R3 so as to intersect with the multiple internal electrodes 7. In this embodiment, the groove 11 consists of one groove portion 11a, and therefore, when the groove 11 and the multiple internal electrodes 7 are viewed from the first direction D1, the groove 11 is formed so as to intersect with the multiple internal electrodes 7.

[0027] Although not shown in the drawings, when the groove regions 12, 13, and 14 and the multiple internal electrodes 9 are viewed from the first direction D1, each groove region 12, 13, and 14 is formed so as to intersect with a corresponding internal electrode 9 among the multiple internal electrodes 9. Only the groove region 12 and the groove region 13 may be formed so as to intersect with the multiple internal electrodes 9 when viewed from the first direction D1. When the groove portion 11a and the multiple internal electrodes 9 are viewed from the first direction D1, the groove portion 11a is formed in regions R1, R2, and R3 so as to intersect with the multiple internal electrodes 9. In this embodiment, the groove 11 consists of one groove portion 11a, and therefore, when the groove 11 and the multiple internal electrodes 9 are viewed from the first direction D1, the groove 11 is formed so as to intersect with the multiple internal electrodes 9.

[0028] The depth d1 of groove portion 11a in region R1 and the depth d3 of groove portion 11a in region R3 are different from each other. The depth d2 of groove portion 11a in region R2 and the depth d3 of groove portion 11a in region R3 are different from each other. Depths d1 and d2 are greater than depth d3. Depths d1 and d2 may be the same or different.

[0029] 4, the depth of groove portion 11a increases from region R3 toward region R1 in third direction D3. The depth of groove portion 11a increases from region R3 toward region R2 in third direction D3. The depth d1 is, for example, not less than 0.1 μm and not more than 6 μm. The depth d2 is, for example, not less than 0.1 μm and not more than 6 μm. The depth d3 is, for example, not less than 0 μm and not more than 3 μm. In this embodiment, the depth d1 is 3 μm, the depth d2 is 3 μm, and the depth d3 is 1.5 μm. The width of the groove portion 11a is, for example, not less than 10 μm and not more than 500 μm. In this embodiment, the width of the groove portion 11a is 30 μm.

[0030] As shown in FIG. 3 , each of the multiple internal electrodes 7 is exposed from one end face 3a at a position where it intersects with the groove 11. One end 7a of each internal electrode 7 is exposed from one end face 3a at a position where it intersects with the groove 11. Of the multiple internal electrodes 7, one ends 7a of two internal electrodes 7 located closest to the side surface 3e in the third direction D3 are each exposed from one end face 3a at a position where it intersects with the groove region 14. One ends 7a of the remaining internal electrodes 7, excluding the two internal electrodes 7, are exposed from one end face 3a at positions where they intersect with the groove regions 12 and 13. In this embodiment, the one end 7a includes a portion that is exposed from the end face 3a and a portion that is not exposed from the end face 3a. The one end 7a may include a portion that is exposed from the end face 3a regardless of the formation of the groove 11. Each internal electrode 7 is directly connected to the corresponding external electrode 5 at a portion that is included in the one end 7a and that is exposed from the one end face 3a. Each internal electrode 7 is physically connected to a corresponding external electrode 5 at a location where it intersects with a groove 11 .

[0031] Although not shown, each of the multiple internal electrodes 9 is exposed from the other end face 3a at a position where it intersects with the groove 11. One end 9a of each internal electrode 9 is exposed from the other end face 3a at a position where it intersects with the groove 11. Of the multiple internal electrodes 9, one end 9a of each of the two internal electrodes 9 located closest to the side surface 3e in the third direction D3 is exposed from the other end face 3a at a position where it intersects with the groove region 14. One ends 9a of the remaining internal electrodes 9, excluding the two internal electrodes 9, are exposed from the other end face 3a at positions where they intersect with the groove regions 12 and 13. In this embodiment, the one end 9a includes a portion exposed from the end face 3a and a portion not exposed from the end face 3a. The one end 9a may include a portion exposed from the end face 3a regardless of the formation of the groove 11. Each internal electrode 9 is directly connected to the corresponding external electrode 5 at a portion that is included in the one end 9a and that is exposed from the other end face 3a. Each internal electrode 9 is physically connected to a corresponding external electrode 5 at a location where it intersects with a groove 11 .

[0032] As described above, in electronic component 1, each of the multiple internal electrodes 7, 9 is physically connected to external electrode 5 at a position where it intersects with wave-shaped groove 11. Therefore, electronic component 1 establishes electrical connection between external electrode 5 and the multiple internal electrodes 7, 9. In electronic component 1, grooves 11 can be made longer than in a configuration in which the grooves are formed linearly. Therefore, electronic component 1 can easily increase the connection area between the surface of element body 3 and external electrodes 5. Electronic component 1 can improve the connection strength between element body 3 and external electrodes 5.

[0033] In the electronic component 1, the depth d1 and the depth d2 are greater than the depth d3. In the electronic component 1, each of the multiple internal electrodes 7, 9 and the external electrode 5 are securely physically connected at the positions where they intersect with the grooves 11. As a result, the electronic component 1 reliably establishes electrical connections between the multiple internal electrodes 7, 9 and the external electrode 5. Compared to electronic components in which the groove depth is only d3, electronic component 1 can more reliably increase the contact area between the surface of element body 3 and external electrodes 5. As a result, electronic component 1 can reliably improve the connection strength between element body 3 and external electrodes 5.

[0034] In electronic component 1, the depth of groove portion 11a increases in the third direction D3 from region R3 toward region R1. The depth of groove portion 11a increases in the third direction D3 from region R3 toward region R2. In electronic component 1, each of the multiple internal electrodes 7, 9 and external electrode 5 are more reliably physically connected at the positions where they intersect with groove 11. Therefore, electronic component 1 more reliably establishes electrical connection between the multiple internal electrodes 7, 9 and external electrode 5.

[0035] Next, the configuration of a modified example of the electronic component 1 according to this embodiment will be described with reference to Fig. 5. Fig. 5 is a diagram showing a plurality of internal electrodes and grooves. This modified example differs from the present embodiment described above in terms of the configuration of the groove 11. Below, the differences between this modified example and the present embodiment described above will be mainly described.

[0036] The groove 11 includes a plurality of groove portions 11a1, 11a2, and 11a3. Each of the groove portions 11a1, 11a2, and 11a3 is obtained by expanding or contracting the groove portion 11a in the amplitude direction and the periodic direction. 1、Groove portion 11a2 and groove portion 11a3 are wavy and extend in the second direction D2 as a whole. Groove portion 11a1 is located closest to one side surface 3e in the third direction D3. Groove portion 11a2 is located closest to the other side surface 3e in the third direction D3. Groove portion 11a3 is located between groove portion 11a1 and groove portion 11a2 in the third direction D3. Groove portion 11a1, groove portion 11a3, and groove portion 11a2 are aligned in this order in the direction from one side surface 3e to the other side surface 3e in the third direction D3. Groove portions 11a1, 11a2, and 11a3 are spaced apart from one another. In this modification, groove portions 11a1, 11a2, and 11a3 are parallel to one another. Here, "groove portions 11a1, 11a2, and 11a3 are parallel to one another" means that the directions in which groove portions 11a1, 11a2, and 11a3 extend as a whole are parallel to one another. In this modification, groove 11 includes one groove portion 11a3. Groove 11 may also include multiple groove portions 11a3. For example, when groove portion 11a1 constitutes a first groove portion, groove portion 11a2 constitutes a second groove portion, and groove portion 11a3 constitutes a third groove portion.

[0037] As shown in FIG. 5 , when the groove portions 11a1, 11a2, and 11a3 and the internal electrodes 7 are viewed from the first direction D1, each of the groove portions 11a1, 11a2, and 11a3 is formed to intersect with a different one of the internal electrodes 7. When viewed from the first direction D1, the groove portion 11a1 intersects with a plurality of the internal electrodes 7, including the internal electrode 7 located closest to one side surface 3e. When viewed from the first direction D1, the groove portion 11a2 intersects with a plurality of the internal electrodes 7, including the internal electrode 7 located closest to the other side surface 3e. When viewed from the first direction D1, the groove portion 11a3 intersects with a plurality of the internal electrodes 7 that do not intersect with either the groove portion 11a1 or the groove portion 11a2. In this modification, each of the groove portions 11a1, 11a2, and 11a3 obliquely intersects with a corresponding one of the plurality of internal electrodes 7 when viewed from the first direction D1.

[0038] Although not shown in the drawings, when the multiple groove portions 11a1, 11a2, and 11a3 and the multiple internal electrodes 9 are viewed from the first direction D1, each of the multiple groove portions 11a1, 11a2, and 11a3 is formed to intersect with different multiple internal electrodes 9 among the multiple internal electrodes 9. When viewed from the first direction D1, the groove portion 11a1 intersects with multiple internal electrodes 9, including the internal electrode 9 located closest to one side surface 3e among the multiple internal electrodes 9. When viewed from the first direction D1, the groove portion 11a2 intersects with multiple internal electrodes 9, including the internal electrode 9 located closest to the other side surface 3e among the multiple internal electrodes 9. When viewed from the first direction D1, the groove portion 11a3 intersects with multiple internal electrodes 9 that do not intersect with either the groove portion 11a1 or the groove portion 11a2 among the multiple internal electrodes 9. In this modification, each of the groove portions 11a1, 11a2, and 11a3 obliquely intersects with a corresponding one of the plurality of internal electrodes 9 when viewed from the first direction D1.

[0039] The groove portion 11a1 has a wave shape with a period T1. The groove portion 11a2 has a wave shape with a period T2. The groove portion 11a3 has a wave shape with a period T3. The periods T1 and T2 are different from the period T3. In this modification, the periods T1 and T2 are shorter than the period T3. The periods T1 and T2 may be the same or different. The period T1 is, for example, 30 μm or more and 500 μm or less. The period T2 is, for example, 30 μm or more and 500 μm or less. The period T3 is, for example, 60 μm or more and 1000 μm or less. In this modification, the period T1 is 60 μm, the period T2 is 60 μm, and the period T3 is 120 μm.

[0040] As shown in FIG. 5 , each of the multiple internal electrodes 7 is exposed from one end face 3a at a position where it intersects with a corresponding one of the multiple groove portions 11a1, 11a2, and 11a3. Of the multiple internal electrodes 7, each of the multiple internal electrodes 7, including the internal electrode 7 located closest to one side face 3e, is exposed from one end face 3a at a position where it intersects with the groove portion 11a1. Of the multiple internal electrodes 7, each of the multiple internal electrodes 7, including the internal electrode 7 located closest to the other side face 3e, is exposed from one end face 3a at a position where it intersects with the groove portion 11a2. Of the multiple internal electrodes 7, each of the multiple internal electrodes 7 that do not intersect with either the groove portion 11a1 or the groove portion 11a2 is exposed from one end face 3a at a position where it intersects with the groove portion 11a3. One end 7a of each internal electrode 7 is exposed from one end face 3a at a position where it intersects with the corresponding groove portion 11a1, 11a2, 11a3. Each internal electrode 7 is physically connected to a corresponding external electrode 5 at a position where it intersects with the corresponding groove portion 11a1, 11a2, 11a3.

[0041] Although not shown, each of the multiple internal electrodes 9 is exposed from the other end face 3a at a position where it intersects with a corresponding one of the multiple groove portions 11a1, 11a2, and 11a3. Of the multiple internal electrodes 9, each of the multiple internal electrodes 9, including the internal electrode 9 located closest to one side face 3e, is exposed from the other end face 3a at a position where it intersects with groove portion 11a1. Of the multiple internal electrodes 9, each of the multiple internal electrodes 9, including the internal electrode 9 located closest to the other side face 3e, is exposed from the other end face 3a at a position where it intersects with groove portion 11a2. Of the multiple internal electrodes 9, each of the multiple internal electrodes 9 that do not intersect with either groove portion 11a1 or groove portion 11a2 is exposed from the other end face 3a at a position where it intersects with groove portion 11a3. One end 9a of each internal electrode 9 is exposed from the other end face 3a at a position where it intersects with the corresponding groove portion 11a1, 11a2, or 11a3. Each internal electrode 9 is physically connected to a corresponding external electrode 5 at a position where it intersects with the corresponding groove portion 11a1, 11a2, or 11a3.

[0042] In this modification, in which the periods T1 and T2 are shorter than the period T3, each of the internal electrodes 7 and 9 is reliably physically connected to the external electrode 5 at a position where it intersects with the corresponding one of the groove portions 11a1, 11a2, and 11a3. As a result, in this modification, electrical connection between the internal electrodes 7 and 9 and the external electrode 5 is reliably established. Furthermore, compared to a configuration in which each of the groove portions has a wave shape with a period T3, this modified example makes it easier to reliably increase the contact area between the surface of the element body 3 and the external electrode 5. As a result, this modified example can reliably improve the connection strength between the element body 3 and the external electrode 5.

[0043] Next, a method for manufacturing the electronic component 1 according to this embodiment will be described with reference to Figures 6 and 7. Figure 6 is a flowchart showing the method for manufacturing the electronic component according to this embodiment. Figure 7 is a diagram showing an element body and a plurality of internal electrodes.

[0044] In step S1, an element body 3 is prepared in which a plurality of internal electrodes 7, 9 are arranged. The element body 3 prepared in step S1 does not have grooves 11 formed on the end faces 3a. The element body 3 may be newly prepared in step S1 through the process described below, or an element body 3 that has already been prepared through the process described below may be prepared. First, a ceramic green sheet is prepared. In this manufacturing method, for example, a ceramic paste for forming a dielectric layer is applied in sheet form onto a carrier sheet, and then the sheet-like ceramic paste is dried. This results in a ceramic green sheet. The carrier sheet is made of, for example, PET (Polyethylene terephthalate). The ceramic paste is applied, for example, by a doctor blade method. Next, a conductive paste for forming the plurality of internal electrodes 7, 9 is used to form a plurality of internal electrode patterns on the ceramic green sheets. In this manufacturing method, for example, the conductive paste is patterned and applied to the ceramic green sheets, and then the conductive paste is dried. This results in a plurality of internal electrode patterns. The conductive paste is applied, for example, by screen printing. Next, a laminate is formed from the ceramic green sheets on which the internal electrode patterns are formed. In this manufacturing method, multiple ceramic green sheets are stacked. Then, the stacked ceramic green sheets are pressed, for example, in a third direction D3 to obtain the laminate. Next, the element body 3 is obtained from the laminate. In this manufacturing method, the laminate is cut into chips of a predetermined size, thereby obtaining a plurality of chips. The cut chips are then fired to obtain the element body 3.

[0045] The ceramic paste contains, for example, the raw material powder of the dielectric material described above and an organic vehicle. The organic vehicle contained in the ceramic paste contains, for example, a resin and an organic solvent. The ceramic paste may also contain a dispersant, a plasticizer, a dielectric, a glass frit, or an insulator. The conductive paste contains, for example, the powder of the conductive material described above and an organic vehicle. The organic vehicle contained in the conductive paste contains a resin and an organic solvent. The conductive paste may also contain an inorganic compound or a plasticizer.

[0046] In the element body 3 prepared through the above-described process, one ends 7a, 9a of the multiple internal electrodes 7, 9 are located in the first direction D1 inside the element body 3 with respect to the end face 3a. This is because, when the chip is fired as described above, the shrinkage rate of the dielectric layers constituting the element body 3 differs from that of the multiple internal electrodes 7, 9. 7, in the element body 3 prepared by this manufacturing method, the distance in the first direction D1 from one end 7a to one end face 3a increases in the third direction D3 from region R3 to region R1. The distance in the first direction D1 from one end 7a to one end face 3a increases in the third direction D3 from region R3 to region R2. Although not shown, the distance in the first direction D1 from one end 9a to the other end face 3a increases from region R3 to region R1 in the third direction D3. The distance in the first direction D1 from one end 9a to the other end face 3a increases from region R3 to region R2 in the third direction D3.

[0047] In step S2, grooves 11 are formed in the end face 3a by irradiating the end face 3a with laser light. In this manufacturing method, by irradiating the end face 3a with laser light, the grooves 11 are formed in a wave shape so that the grooves 11 intersect with the internal electrodes 7, 9 when viewed from the first direction D1. In step S2, by forming the grooves 11 in a wave shape so that they intersect with the internal electrodes 7, 9, each of the internal electrodes 7, 9 is exposed from the end face 3a at the positions where they intersect with the grooves 11. In other words, by irradiating the end face 3a with laser light, each of the internal electrodes 7, 9 is exposed from the end face 3a at the positions where they intersect with the grooves 11.

[0048] The laser that irradiates the end face 3a with laser light is, for example, a rare-earth fiber laser. For example, the laser is a mode-locked pulsed laser, and the laser light is pulsed laser light. The wavelength of the laser light irradiated onto the end face 3a is, for example, 250 nm or more and 1600 nm or less. The pulse duration of the laser light irradiated onto the end face 3a is, for example, 10 ps or less. The pulse energy of the laser light irradiated onto the end face 3a is, for example, 5 μJ or more and 200 μJ or less.

[0049] As described above, in this manufacturing method, grooves 11 are formed in a wavy pattern on end face 3a by irradiating end face 3a with laser light. The laser light irradiation intervals become closer at positions where the laser scanning line turns back. As a result, in the electronic component obtained by this manufacturing method, depth d1 of groove portion 11a and depth d2 of groove portion 11a are greater than depth d3 of groove portion 11a.

[0050] In step S3, the external electrode 5 is disposed on the end face 3a. In this manufacturing method, the external electrode 5 is formed on the end face 3a so that each of the multiple internal electrodes 7, 9 is physically connected to the external electrode 5. Each of the multiple internal electrodes 7, 9 and the external electrode 5 are physically connected at the positions where the grooves 11 and the multiple internal electrodes 7, 9 intersect. The disposition of the external electrode 5 includes, for example, the following steps: First, a conductive paste is applied to the surface of the element body 3. Next, the applied conductive paste is baked onto the element body 3. This forms the electrode layer E. The conductive paste is applied by, for example, a dipping method, a printing method, or a transfer method. In this manufacturing method, the conductive paste is applied to five surfaces: one end face 3a, a pair of side faces 3c, and a pair of side faces 3c. The electrode layer E may be formed by, for example, a physical vapor deposition (PVD) method or a chemical vapor deposition (CVD) method.

[0051] The above process results in the production of electronic component 1. As described above, electronic component 1 establishes electrical connection between external electrode 5 and multiple internal electrodes 7, 9, and can improve the connection strength between element body 3 and external electrode 5. The above-described manufacturing method reliably produces electronic component 1 that establishes electrical connection between external electrode 5 and multiple internal electrodes 7, 9, and can improve the connection strength between element body 3 and external electrode 5. In the process of forming the grooves 11 in a wavy shape, the number of internal electrodes 7, 9 that intersect per laser beam scan is greater than in the process of forming the grooves in a linear shape. In other words, in the process of forming the grooves 11 in a wavy shape, the number of laser beam scans is less than in the process of forming the grooves in a linear shape. As a result, this manufacturing method efficiently manufactures the electronic component 1.

[0052] Although the embodiments of the present invention have been described above, the present invention is not necessarily limited to the above-described embodiments, and various modifications are possible without departing from the spirit of the present invention.

[0053] The depths d1 and d2 do not have to be greater than the depth d3 in the electronic component 1. As described above, an electronic component 1 in which the depths d1 and d2 are greater than the depth d3 can reliably establish electrical connections between the multiple internal electrodes 7 and the external electrodes 5, further improving the connection strength between the element body 3 and the external electrodes 5. In the electronic component 1, the depth of the groove portion 11a does not have to increase from region R3 toward region R1 in the third direction D3. The depth of the groove portion 11a does not have to increase from region R3 toward region R2 in the third direction D3. An electronic component 1 in which the depth of the groove portion 11a increases from region R3 toward region R1 in the third direction D3 and from region R3 toward region R2 in the third direction D3 more reliably establishes electrical connection between the multiple internal electrodes 7, 9 and the external electrode 5, as described above. In the electronic component 1, the periods T1 and T2 do not have to be shorter than the period T3. As described above, the electronic component 1 in which the periods T1 and T2 are shorter than the period T3 can reliably establish electrical connection between the multiple internal electrodes 7 and the external electrode 5, and can reliably improve the connection strength between the element body 3 and the external electrode 5.

[0054] In this embodiment and this modified example, the electronic component 1 has been described as a multilayer ceramic capacitor, but the electronic components to which the present invention can be applied are not limited to multilayer ceramic capacitors. Applicable electronic components include, for example, multilayer varistors, multilayer piezoelectric actuators, multilayer thermistors, and multilayer solid-state batteries.

[0055] As can be understood from the above description of the embodiments and modifications, this specification includes disclosure of the following aspects. (Appendix 1) an element body having an end surface on which a groove is formed; a plurality of internal electrodes arranged in the element body so as to face each other; an external electrode disposed on the end surface and electrically connected to the plurality of internal electrodes; when the groove and the plurality of internal electrodes are viewed from a direction perpendicular to the end face, the groove is formed in a wave shape so as to intersect with the plurality of internal electrodes, an electronic component, wherein each of the plurality of internal electrodes is exposed from the end face at a position where the internal electrodes intersect with the groove, and is physically connected to the external electrode. (Appendix 2) the element body has a first surface and a second surface that face each other in a direction in which the plurality of internal electrodes face each other, The end surface is a first region located closer to the first surface in the direction in which the plurality of internal electrodes face each other; a second region located closer to the second surface in the direction in which the plurality of internal electrodes face each other; a third region located between the first region and the second region in the direction in which the plurality of internal electrodes face each other, The groove is made up of one groove portion, the groove portion is formed in the first region, the second region, and the third region so as to intersect with the plurality of internal electrodes when the groove portion and the plurality of internal electrodes are viewed from the direction orthogonal to the end face, 2. The electronic component of claim 1, wherein the depth of the groove portion in the first region and the depth of the groove portion in the second region are greater than the depth of the groove portion in the third region. (Appendix 3) 3. The electronic component of claim 2, wherein the depth of the groove portion increases from the third region toward the first region in the direction in which the internal electrodes face each other, and also increases from the third region toward the second region in the direction in which the internal electrodes face each other. (Appendix 4) the groove includes a plurality of groove portions; when the plurality of groove portions and the plurality of internal electrodes are viewed from the direction orthogonal to the end face, each of the plurality of groove portions is formed so as to intersect with a different plurality of internal electrodes among the plurality of internal electrodes, 2. An electronic component as described in Appendix 1, wherein each of the plurality of internal electrodes is exposed at the end surface at a position where it intersects with a corresponding one of the plurality of groove portions and is physically connected to the external electrode. (Appendix 5) the element body has a first surface and a second surface that face each other in a direction in which the plurality of internal electrodes face each other, The plurality of groove portions a first groove portion located closest to the first surface in the direction in which the plurality of internal electrodes face each other and having a wave shape having a first period; a second groove portion located closest to the second surface in the direction in which the plurality of internal electrodes face each other and having a wave shape having a second period; a third groove portion located between the first groove portion and the second groove portion in the direction in which the plurality of internal electrodes face each other and having a wave shape with a third period, 5. The electronic component of claim 4, wherein the first period and the second period are different from the third period. (Appendix 6) 6. The electronic component of claim 5, wherein the first period and the second period are shorter than the third period. (Appendix 7) 7. The electronic component according to any one of claims 4 to 6, wherein the plurality of groove portions are spaced apart from one another. (Appendix 8) 8. The electronic component of claim 7, wherein the groove portions are parallel to one another. (Appendix 9) An electronic component according to any one of appendices 1 to 8, wherein when the groove and the plurality of internal electrodes are viewed from the direction perpendicular to the end face, the groove intersects each of the plurality of internal electrodes obliquely. (Appendix 10) 10. The electronic component according to any one of appendices 1 to 9, wherein the grooves are formed in a sinusoidal or triangular wave shape when viewed from the direction perpendicular to the end face. (Appendix 11) 11. The electronic component according to any one of appendices 1 to 10, wherein the electronic component is a multilayer ceramic capacitor. (Appendix 12) A method for producing an electronic component according to any one of Supplementary Notes 1 to 11, forming the groove on the end surface by irradiating the end surface with laser light; and disposing the external electrode on the end surface, the forming step includes a step of exposing each of the plurality of internal electrodes from the end face at a position where the groove intersects with the groove by forming the groove in a wave shape so that the groove intersects with the plurality of internal electrodes when the groove and the plurality of internal electrodes are viewed from a direction perpendicular to the end face, The method for manufacturing an electronic component, wherein the arranging step includes a step of forming the external electrodes on the end faces so as to physically connect each of the plurality of internal electrodes to the external electrodes at the positions where the internal electrodes intersect with the grooves. [Explanation of symbols]

[0056] 1...Electronic component, 3...Element body, 3a...End surface, 3e...Side surface, 5...External electrode, 7,9...Internal electrode, 11...Groove, 11a,11a1,11a2,11a3...Groove portion, d1,d2,d3...Depth, R1,R2,R3...Area, T1,T2,T3...Period.

Claims

1. an element body having an end surface on which a groove is formed; a plurality of internal electrodes arranged in the element body so as to face each other; an external electrode disposed on the end surface and electrically connected to the plurality of internal electrodes; when the groove and the plurality of internal electrodes are viewed from a direction perpendicular to the end face, the groove is formed in a wave shape so as to intersect with the plurality of internal electrodes, an electronic component, wherein each of the plurality of internal electrodes is exposed from the end face at a position where the internal electrodes intersect with the groove, and is physically connected to the external electrode.

2. the element body has a first surface and a second surface that face each other in a direction in which the plurality of internal electrodes face each other, The end surface is a first region located closer to the first surface in the direction in which the plurality of internal electrodes face each other; a second region located closer to the second surface in the direction in which the plurality of internal electrodes face each other; a third region located between the first region and the second region in the direction in which the plurality of internal electrodes face each other, The groove is made up of one groove portion, the groove portion is formed in the first region, the second region, and the third region so as to intersect with the plurality of internal electrodes when the groove portion and the plurality of internal electrodes are viewed from the direction orthogonal to the end face, The electronic component according to claim 1 , wherein a depth of the groove portion in the first region and a depth of the groove portion in the second region are greater than a depth of the groove portion in the third region.

3. 3. The electronic component according to claim 2, wherein a depth of the groove portion increases from the third region toward the first region in the direction in which the plurality of internal electrodes face each other, and also increases from the third region toward the second region in the direction in which the plurality of internal electrodes face each other.

4. the groove includes a plurality of groove portions; when the plurality of groove portions and the plurality of internal electrodes are viewed from the direction orthogonal to the end face, each of the plurality of groove portions is formed so as to intersect with a different plurality of internal electrodes among the plurality of internal electrodes, 2. The electronic component according to claim 1, wherein each of the plurality of internal electrodes is exposed at the end surface at a position where the internal electrodes intersect with a corresponding one of the plurality of groove portions and is physically connected to the external electrode.

5. the element body has a first surface and a second surface that face each other in a direction in which the plurality of internal electrodes face each other, The plurality of groove portions a first groove portion located closest to the first surface in the direction in which the plurality of internal electrodes face each other and having a wave shape having a first period; a second groove portion located closest to the second surface in the direction in which the plurality of internal electrodes face each other and having a wave shape having a second period; a third groove portion located between the first groove portion and the second groove portion in the direction in which the plurality of internal electrodes face each other and having a wave shape with a third period, The electronic component of claim 4 , wherein the first period and the second period are different from the third period.

6. The electronic component according to claim 5 , wherein the first period and the second period are shorter than the third period.

7. The electronic component according to claim 4 , wherein the plurality of groove portions are spaced apart from one another.

8. The electronic component according to claim 7 , wherein the plurality of groove portions are parallel to one another.

9. The electronic component according to any one of claims 1 to 8, wherein when the groove and the plurality of internal electrodes are viewed from the direction perpendicular to the end face, the groove intersects each of the plurality of internal electrodes obliquely.

10. The electronic component according to claim 9 , wherein the grooves are formed in a sinusoidal or triangular wave shape when viewed from the direction perpendicular to the end face.

11. The electronic component according to claim 1 , wherein the electronic component is a multilayer ceramic capacitor.

12. 2. The method for manufacturing an electronic component according to claim 1, forming the groove on the end surface by irradiating the end surface with laser light; and disposing the external electrode on the end surface, the forming step includes a step of exposing each of the plurality of internal electrodes from the end face at a position where the groove intersects with the groove by forming the groove in a wave shape so that the groove intersects with the plurality of internal electrodes when the groove and the plurality of internal electrodes are viewed from a direction perpendicular to the end face, A method for manufacturing an electronic component, wherein the arranging step includes a step of forming the external electrodes on the end faces so that each of the plurality of internal electrodes is physically connected to the external electrodes at the positions where they intersect with the grooves.

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