cleaning device

Abstract

To provide a cleaning device capable of removing solder balls formed in irregular positions. The cleaning device 10 cleans a workpiece W having a solder resist portion W1 and a pad portion W2 that is not covered by the solder resist portion W1, and includes a chucking mechanism that chucks the workpiece W, and a removal brush unit 130 that includes a brush roller 134 that rotates relative to the workpiece W while in contact with the workpiece W while the workpiece W is held by the chucking mechanism, thereby applying a peeling force to the solder balls SB formed on the solder resist portion W1.

Description

[Technical Field]

[0001] The present invention relates to a cleaning device for removing excess solder balls adhering to a workpiece. [Background technology]

[0002] A dust removal device such as that shown in Patent Document 1 is used to remove dust adhering to various workpieces such as printed circuit boards and semiconductor substrates. This dust removal device includes dust removal rolls (41A, 41B) that remove dust from the upper or lower surface of the workpiece (W), and a pair of adhesive tape holders (50) that hold, at both ends, an adhesive tape roll (T1) that transfers dust adhering to the dust removal rolls (41A, 41B) under pressure. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 7531962 Summary of the Invention [Problem to be solved by the invention]

[0004] Incidentally, some workpieces require solder paste (cream solder) to be printed on specific conductive areas. In such workpieces, the solder paste may adhere in dots to irregular locations other than the desired printed locations (hereinafter, such dots of solder paste adhered to irregular locations will be referred to as solder balls).

[0005] Such solder balls may spread during reflow and short-circuit adjacent regular printed areas, or may short-circuit adjacent regular printed areas during flattening by a roller.

[0006] However, the dust removal device disclosed in Patent Document 1 cannot remove the above-mentioned solder balls.

[0007] SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and has as its object to provide a cleaning device capable of removing solder balls formed in irregular positions. [Means for solving the problem]

[0008] In order to solve the above problems, according to a first aspect of the present invention, there is provided a cleaning device for cleaning a workpiece having a solder resist portion and a pad portion not covered by the solder resist portion, characterized in that it comprises a chucking mechanism for chucking the workpiece, and a removal brush unit having a brush roller that rotates relative to the workpiece while in contact with it while the workpiece is held by the chucking mechanism, thereby applying a peeling force to the solder balls formed in the solder resist portion. [Effects of the Invention]

[0009] According to the present invention, it is possible to provide a cleaning device capable of removing solder balls formed in irregular positions. [Brief explanation of the drawings]

[0010] [Figure 1] 1 is a side view showing a main part of a configuration of a cleaning device according to an embodiment of the present invention; [Figure 2] 2A and 2B are plan views showing the configuration of a workpiece to be cleaned by the cleaning device shown in FIG. 1, where (A) shows the state before solder paste is applied, (B) shows the state after solder paste has been applied correctly, (C) shows the state in which solder paste has not been applied correctly and solder balls have been formed, and (D) shows the state in which a short circuit has occurred due to flattening. [Figure 3] 2 is a partial perspective view showing the main part of the workpiece transport unit of the cleaning device shown in FIG. 1 as viewed from below. FIG. [Figure 4]2 is a partial perspective view for mainly explaining a workpiece delivery unit and a jaw holding and moving mechanism that are provided in the cleaning device shown in FIG. 1. FIG. [Figure 5] 2 is a perspective view for explaining the work lower support part provided in the cleaning device shown in FIG. 1. FIG. [Figure 6] 2 is a partial perspective view showing a configuration focusing on a claw holding and moving mechanism provided in the cleaning device shown in FIG. 1. FIG. [Figure 7] 2 is a perspective view showing the configuration of a horizontal chucking mechanism provided in the cleaning device shown in FIG. 1. FIG. [Figure 8] 2 is a perspective view showing the configuration of an upper pressing mechanism included in the cleaning device shown in FIG. 1. FIG. [Figure 9] 2 is a perspective view showing the configuration of a removal brush unit included in the cleaning device shown in FIG. 1, showing the removal brush unit as viewed from below. FIG. [Figure 10] 10 is a cross-sectional view showing the removal brush unit shown in FIG. 9 cut along the XZ plane. [Figure 11] 2 is a perspective view showing the configuration of a dust removal roller unit provided in the cleaning device shown in FIG. 1. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0011] A cleaning device 10 according to a first embodiment of the present invention and a method for renewing an adhesive tape in the cleaning device 10 will be described below with reference to the drawings.

[0012] [1. Configuration of cleaning device 10] 1 is a side view showing the main components of a cleaning device 10 according to one embodiment of the present invention. The cleaning device 10 according to this embodiment is a device for removing solder balls formed by solder paste adhering in dots at irregular positions other than the desired printing location, while also removing dust adhering to the surface of the workpiece W. Note that the cleaning device 10 may also be configured to only remove the solder balls without removing the dust.

[0013] The cleaning device 10 includes a housing 20 , a workpiece transport unit 30 , an upper pressing mechanism 120 , a removing brush unit 130 , a dust removal roller unit 140 , a dust box 150 , and a control unit 200 .

[0014] [1-1. About Work W] The workpiece W from which solder balls and dust are removed by the cleaning device 10 has a configuration as shown in Fig. 2. Fig. 2 is a plan view showing the configuration of the workpiece W to be cleaned by the cleaning device 10, in which (A) shows the state before the solder paste is applied, (B) shows the state after the solder paste has been applied properly, (C) shows the state after the solder paste has not been applied properly and solder balls have been formed, and (D) shows the state after a short circuit has occurred due to flattening.

[0015] As shown in Fig. 2(A), the workpiece W has a solder resist portion W1 and a pad portion W2. The solder resist portion W1 is an insulating film that covers a pattern portion made of, for example, copper, to prevent solder from adhering to the pattern portion during soldering. The pad portion W2 is an opening portion that is not covered by the solder resist portion W1 and is the portion to which solder paste is applied.

[0016] As shown in Figure 2(B), in a normal application state in which the paste application portion W3 is applied to the pad portion W2, adjacent paste application portions P1 are spaced apart from each other, preventing short circuits from occurring between them.

[0017] Here, as shown in Fig. 2(C), an abnormal application state may occur, for example, where a solder ball SB is formed in the solder resist portion W1 between adjacent pad portions W2. If flattening is performed in this state to make the solder paste height uniform, the solder ball SB may spread, causing a short circuit between adjacent pad portions W2, as shown in Fig. 2(D).

[0018] In view of this problem, the cleaning device 10 of this embodiment aims to remove solder balls SB formed in irregular positions.

[0019] When solder paste is applied to the pad W2, the solder paste is not removed even by the removal brush unit 130 described below due to the bond between the copper portion of the pad W2 and the solder paste. However, the bonding strength of the solder balls SB formed on the solder resist W1 to the solder resist W1 is significantly weaker than the bonding strength between the copper portion of the pad W2 and the solder paste. For this reason, the removal brush unit 130 described below can remove the solder balls SB from the solder resist W1.

[0020] [1-2. About the enclosure 20] The housing 20 is constructed by combining structural members such as metal pillars, with outer walls attached between the pillars as necessary. The housing 20 supports various components of the cleaning device 10. The housing 20 is provided with beams 21 that support an upper pressing mechanism 120, which will be described later (see FIG. 8).

[0021] [1-3. Work transport unit 30] Fig. 3 is a partial perspective view showing the state in which the main parts of the work transport unit 30 of the cleaning device 10 shown in Fig. 1 are seen from below. As shown in Figs. 1 and 3, the work transport unit 30 includes a base part 40, a base movement mechanism 50, a work feed unit 60, a distance adjustment mechanism 70, a work lower support part 80, a front and rear chucking mechanism 90, and a lateral chucking mechanism 110.

[0022] [1-3A. About the base part 40] The base portion 40 is composed of a plurality of plate members 41 including side plates 41a to 41c. The base portion 40 may include various members such as a frame member and a reinforcing bar in addition to the plurality of plate members 41. The base portion 40 supports a portion of the work transport unit 30 above a fitting portion 52, which will be described later.

[0023] [1-3B. About the base movement mechanism 50] The base moving mechanism 50 is a part that moves the base part 40 along the transport direction (X direction). The base moving mechanism 50 includes a base rail 51, a fitting part 52, and a movement motor 53.

[0024] The base rails 51 are attached to the lower side inside the housing 20. A pair of base rails 51 are provided inside the housing 20, and are provided along the conveyance direction (X direction). The fitting portions 52 are fitted into the base rails 51 and move along the base rails 51. The movement motor 53 is a portion that provides a driving force for the fitting portions 52 to move along the base rails 51.

[0025] Note that the base rail 51 may be of a type that incorporates a ball screw, for example, and moves a fitting portion 52 having a portion that meshes with the ball screw by rotating the ball screw using a movement motor 53. However, the fitting portion 52 may also have a rotating portion such as a wheel or roller, and move along the base rail 51 by rotating the rotating portion by driving the movement motor 53.

[0026] The movement motor 53 is an electric actuator that provides a driving force for moving the fitting portion 52 along the base rail 51. As the movement motor 53, for example, a stepping motor that is easy to control the position can be used, but various motors such as a servo motor, an AC motor, or a DC motor can also be used. Furthermore, instead of the movement motor 53 that is an electric actuator, an air actuator that is driven by air may be used.

[0027] [1-3C. Work delivery unit 60] 4 is a partial perspective view for mainly explaining the workpiece feed-out unit 60 and the front and rear chucking mechanisms 90. As shown in FIG. 4, the workpiece feed-out unit 60 is equipped with an end feed-out mechanism 61. The end feed-out mechanisms 61 are provided on one side (Y1 side) in the width direction (Y direction) and the other side (Y2 side) in the width direction (Y direction). That is, a pair of end feed-out mechanisms 61 are provided. One end side and the other end side in the width direction of the workpiece W are placed on feed-out belts 62 (described later) of each end feed-out mechanism 61, respectively, and in this state, feed-out motors 64 (described later) on the one end side and the other end side are simultaneously driven, thereby enabling the workpiece W to be fed.

[0028] Each end feed mechanism 61 includes a feed belt 62, a plurality of rollers 63, and a feed motor 64. The feed belt 62 is a belt on which the end of the workpiece W in the width direction (Y direction) is placed on the upper side. The feed belt 62 is provided so that its extension direction is along the feed direction (X direction) of the workpiece W.

[0029] The rollers 63 are rollers for supporting the delivery belt 62 in a tensioned state. One of the rollers 63 is a drive roller to which a driving force is transmitted from the delivery motor 64. Therefore, the other rollers to which the driving force from the delivery motor 64 is not transmitted are driven rollers.

[0030] The feed motor 64 is a motor that provides a driving force for feeding the workpiece W. This feed motor 64 can be, for example, a stepping motor, but various motors such as a servo motor, an AC motor, or a DC motor can also be used.

[0031] [1-3D. Regarding the gap adjustment mechanism 70] 3, the gap adjustment mechanism 70 is a mechanism for adjusting the gap between one end feed mechanism 61 and the other end feed mechanism 61 in accordance with the dimension in the width direction (Y direction) of the workpiece W. This gap adjustment mechanism 70 is a mechanism for adjusting the gap between the side plate 41a that supports one end feed mechanism 61 and the side plate 41b that supports the other end feed mechanism 61, among the multiple plate members 41. As a result, the pair of end feed mechanisms 61 is adjusted to a dimension that corresponds to the width of the workpiece W.

[0032] The gap adjustment mechanisms 70 are provided on the front side (X1 side) of the base part 40 and on the rear side (X2 side) of the base part 40. This makes it possible to stably adjust the gap between the pair of end part feeding mechanisms 61.

[0033] The gap adjustment mechanism 70 includes a ball screw 71, a screw receiving portion 72, and a gap adjustment motor 73. The ball screw 71 is a shaft-shaped member having a thread formed thereon. One end of the ball screw 71, where the thread is not formed, is rotatably supported by one side plate 41a, and the other end of the ball screw 71, where the thread is not formed, is rotatably supported by the other side plate 41c.

[0034] Furthermore, the screw receiving portion 72 is a portion that meshes with the threads of the ball screw 71. This screw receiving portion 72 is attached to the lower side of the side plate 41b. Therefore, when the ball screw 71 rotates, the screw receiving portion 72 and the side plate 41b move along the ball screw 71. This causes the other end-feeding mechanism 61 attached to the side plate 41b to move, and this movement makes it possible to adjust the distance between the pair of end-feeding mechanisms 61 to a dimension that corresponds to the width of the workpiece W.

[0035] The gap adjustment motor 73 is a part that provides a driving force that moves the screw receiving portion 72 along the ball screw 71. As the gap adjustment motor 73, for example, a stepping motor that is easy to control the position can be used, but various motors such as a servo motor, an AC motor, or a DC motor can also be used.

[0036] [1-3E. Regarding the work lower support part 80] Next, the work lower support part 80 will be described. Fig. 5 is a perspective view for explaining the work lower support part 80. As shown in Fig. 5, the work lower support part 80 includes a board support base 81, a pin installation board 82, support pins 83, a work support plate 84, a lower support base 85, an up / down actuator 86, a sliding guide 87, and a pickup mechanism 88.

[0037] The board support base 81 is a plate-like member that supports the pin installation board 82. On the lower surface side of this board support base 81, an upper slider of a pickup mechanism 88, which will be described later, is attached.

[0038] The pin installation board 82 is a plate-like member on which the support pins 83 are installed. To enable the installation of the support pins 83, the upper surface of the pin installation board 82 is provided with a number of insertion holes 82a into which the lower ends of the support pins 83 are inserted.

[0039] The support pin 83 is a pin-shaped (rod-shaped) member whose lower end is inserted into the insertion hole 82a described above. As an example of this support pin 83, for example, a configuration can be adopted in which the lower end inserted into the insertion hole 82a is formed in a shape different from that of the upper side, thereby forming a step between the lower end side and the portion above it, thereby defining the upper end height of the support pin 83. Note that as an example of the different shape of the lower end of the support pin 83 inserted into the insertion hole 82a, a configuration in which the diameter is smaller than that of the upper side may be adopted, and other shapes other than circular (for example, a polygonal shape, an oval shape, etc.) may also be adopted.

[0040] A workpiece support plate 84, which will be described later, is attached to the upper end of the support pin 83. Therefore, like the lower end, the upper end of the support pin 83 is formed to have a shape different from that of the lower end, thereby determining the vertical position of the workpiece support plate 84. As an example of the shape of the upper end of the support pin 83, a configuration in which the diameter is smaller than that of the lower end may be adopted, and other shapes other than a circle (for example, a polygonal shape, an oval shape, etc.) may also be adopted.

[0041] The work support plate 84 is a plate-shaped (e.g., long plate-shaped) member on whose upper surface the work W is placed. An insertion hole (not shown) is provided on the lower surface of the work support plate 84, and the upper end of the support pin 83 described above is inserted into the insertion hole.

[0042] By using the pin installation board 82, support pins 83, and workpiece support plate 84 as described above, it is possible to support the underside of the workpiece W. Specifically, as shown in FIG. 5 , the lower end of the support pin 83 is inserted into a desired insertion hole 82a of the pin installation board 82, so that the support pin 83 is erected on the pin installation board 82, and a plurality of such support pins 83 is provided. Thereafter, the upper end of the support pin 83 is inserted into the insertion hole of the workpiece support plate 84, and the workpiece support plate 84 is attached to the support pin 83. By installing such workpiece support plates 84 in the number sufficient to stably support the workpiece W, it is possible to stably support the underside of the workpiece W.

[0043] 5, four support pins 83 are used per work support plate 84, and two work support plates 84 are used to support the work W. However, as long as the work W can be stably supported, the number of support pins 83 and the number of work support plates 84 may be any number.

[0044] The lower support base 85 is a plate-like member located below the board support base 81. A pickup mechanism 88, which will be described later, is disposed between the upper surface of the lower support base 85 and the lower surface of the board support base 81. The upper end of a rod 86a of a vertical actuator 86, which will be described later, is attached to the lower surface of the lower support base 85.

[0045] The vertical actuator 86 is an actuator such as an air cylinder or an electric actuator. A main body (reference numeral omitted) of the vertical actuator 86 is fixed to the lower plate member 41 of the base 40. The upper end of a rod 86a included in the vertical actuator 86 is connected to the lower surface of the lower support base 85. Therefore, when the vertical actuator 86 is operated, the lower support base 85 can move up and down.

[0046] Furthermore, the sliding guide 87 is a portion that guides the lower support base 85 to move up and down relative to the side plates 41 a and 41 c when the vertical actuator 86 is operated, and a guide member such as a linear guide can be used. The rail portions of the sliding guide 87 are attached to the side plates 41 a and 41 c, respectively, and the block of the sliding guide 87 is attached to the lower support base 85. Furthermore, multiple sliding guides 87, for example, two sliding guides 87, are attached to each of the side plates 41 a and 41 c. This allows the lower support base 85 to move up and down stably relative to the side plates 41 a and 41 c when the vertical actuator 86 is operated.

[0047] The pickup mechanism 88 is a mechanism for further lifting the workpiece W, while it is placed on the workpiece support plate 84, to a clamping position where it is clamped between the workpiece support plate 84 and an upper presser mechanism 120, which will be described later. After the workpiece W is clamped between the workpiece support plate 84 and the upper presser mechanism 120, a lateral chucking mechanism 110, which will be described later, is activated, thereby clamping both ends of the workpiece W in the width direction.

[0048] As described above, the pickup mechanism 88 is disposed between the upper surface of the lower support base 85 and the lower surface of the board support base 81. The pickup mechanism 88 includes a ball screw 88a, a lower block 88b, a base-side block 88c, and a pickup motor 88d. The ball screw 88a is a shaft-shaped member having a screw thread formed thereon. Both ends of the ball screw 88a, which do not have a screw thread formed thereon, are rotatably supported by the lower support base 85.

[0049] The lower block 88b is a member that meshes with the threads of the ball screw 88a and moves along the ball screw 88a on the lower support base 85. Therefore, a guide member (reference number omitted) such as a linear guide for guiding the movement of the lower block 88b is attached to the upper surface of the lower support base 85. The lower block 88b is provided with an inclined surface 88b1 that is inclined relative to the horizontal plane.

[0050] The base-side block 88c is a member attached to the underside of the board support base 81. The base-side block 88c is provided with a slope 88c1 that faces the slope 88b1. A guide member (not shown), such as a linear guide, is attached between these slopes 88b1 and 88c1. Therefore, when the lower block 88b moves along the ball screw 88a, the height of the base-side block 88c changes due to the relative sliding between the slopes 88b1 and 88c1. This allows the workpiece W to be lifted to the clamping position described above, and the workpiece support plate 84 to be lowered after the workpiece W has been clamped.

[0051] The pickup motor 88d is a part that provides a driving force for moving the lower block 88b along the ball screw 88a. As the pickup motor 88d, for example, a stepping motor that is easy to control the position can be used, but various motors such as a servo motor, an AC motor, or a DC motor can also be used.

[0052] [1-3F. Front and rear chucking mechanism 90] Next, a description will be given of the front and rear chucking mechanism 90. Fig. 6 is a partial perspective view showing the configuration focusing on the front and rear chucking mechanism 90.

[0053] 3, the front and rear chucking mechanisms 90 are provided on one side (Y1 side) in the width direction (Y direction) and the other side (Y2 side) in the width direction (Y direction). That is, a pair of front and rear chucking mechanisms 90 are provided.

[0054] As shown in FIGS. 4 and 6, the front and rear chucking mechanism 90 has a front chuck portion 91 and a rear chuck portion 95. The front chuck portion 91 is located in front of the workpiece W and is used to chuck the front side of the workpiece W. The front chuck portion 91 has front chuck jaws 92 and a front vertical drive portion 93. The front chuck jaws 92 are used to chuck the front side of the workpiece W. A claw portion 92a that protrudes rearward is provided on the upper end side of the front chuck jaws 92. The claw portion 92a is located on the upper surface side of the front end of the workpiece W placed on the workpiece support plate 84, thereby positioning the front side and the vertical direction of the workpiece W.

[0055] The front vertical drive unit 93 is a part that applies a driving force to move the front chuck jaws 92 up and down, and a block part (reference numeral omitted) of the front vertical drive unit 93 that moves up and down is attached to the front chuck jaws 92. The front vertical drive unit 93 is, for example, an actuator such as an air cylinder or an electric actuator, but may also be configured to use a motor and a ball screw.

[0056] The rear chuck portion 95 is a portion located on the rear side of the workpiece W and used to chuck the rear side of the workpiece W. The rear chuck portion 95 includes a rotating shaft 96, a rotating arm 97, rear chuck claws 98, a rear up / down drive portion 99, and a rear chuck moving mechanism 100.

[0057] The rotating shaft 96 is a part that pivotally supports the front side (X1 side) of the rotating arm 97 so that it can rotate freely, and is pivotally supported by the side plates 41a and 41b. The rotating arm 97 is an arm-shaped member whose length is in the front-to-rear direction (X direction), and rotates around the rotating shaft 96 located on the front side (X1 side) of the rotating arm 97 as a rotation fulcrum. Therefore, the rear side of the rotating arm 97 moves up and down as it rotates.

[0058] A guide shaft 97a is attached to the rear side of the rotating arm 97. The guide shaft 97a is a shaft member for guiding the vertical movement of the rotating arm 97 along elongated holes 42 (see FIG. 5) formed in the side plates 41a and 41b.

[0059] The rear chuck jaws 98 are located on the rear side of the workpiece W and are used to chuck the rear side of the workpiece W. The rear chuck jaws 98 are supported by the rotary arm 97 via a rear chuck moving mechanism 100, which will be described later. A claw portion 98a that protrudes forward is provided on the upper end side of the rear chuck jaws 98. The claw portion 98a is positioned on the upper surface side of the rear end of the workpiece W placed on the work support plate 84, thereby positioning the rear side of the workpiece W and in the up-down direction.

[0060] The rear vertical drive unit 99 is a part that applies a driving force to move the rear chuck jaws 98 up and down, and a rod portion 99a of the rear vertical drive unit 99 that moves up and down is attached to the rear end side (X2 side) of the rotary arm 97. The rear vertical drive unit 99 is, for example, an actuator such as an air cylinder or an electric actuator, but may also be configured to use a motor and a ball screw.

[0061] 4, the rear chuck moving mechanism 100 is a mechanism that moves the rear chuck jaws 98 in the front-to-rear direction (X direction). By moving the rear chuck jaws 98 in the front-to-rear direction (X direction) with the rear chuck moving mechanism 100, it becomes possible to clamp (chuck) the workpiece W between the front chuck jaws 92 and the rear chuck jaws 98 and to release the clamping.

[0062] The rear chuck moving mechanism 100 includes a moving belt 101, a driving pulley 102, a driven pulley 103, a driving motor 104, and a belt attachment 105. The moving belt 101 is a belt to which the rear chuck claws 98 are attached and which moves the rear chuck claws 98 in the front-rear direction, and is stretched along the front-rear direction (X direction).

[0063] The drive pulley 102 is a pulley for driving the transfer belt 101, and is connected to the output shaft of a drive motor 104, which will be described later. The drive pulley 102 is located on the front side (X1 side) of the transfer belt 101, and stretches the transfer belt 101 in the front-to-rear direction (X direction) together with the driven pulley 103. In this embodiment, the drive pulley 102 is provided coaxially with the above-mentioned rotation shaft 96, but a non-coaxial configuration may also be adopted.

[0064] The driven pulley 103 is located on the rear side (X2 side) of the transfer belt 101, and together with the drive pulley 102, stretches the transfer belt 101 in the front-rear direction (X direction).

[0065] The drive motor 104 is a part that provides a driving force to rotate the drive pulley 102. As the drive motor 104, for example, a stepping motor that is easy to control the position can be used, but various motors such as a servo motor, an AC motor, or a DC motor can also be used.

[0066] The belt attachment tool 105 is a member for attaching the rear chuck claws 98 to the moving belt 101. Therefore, the rear chuck claws 98 are fixed to the upper part of the belt attachment tool 105. In the configuration shown in Fig. 4, the belt attachment tool 105 is configured to be fixed to the moving belt 101 by sandwiching the moving belt 101 from above and below.

[0067] The rear chuck moving mechanism 100 is not limited to a configuration using the moving belt 101, the driving pulley 102, and the driven pulley 103. For example, a configuration may be adopted in which a portion to which the rear chuck claws 98, similar to the belt mounting fixture 105, are attached are moved in the front-rear direction (X direction) by the rotation of a ball screw.

[0068] [1-3G. Regarding the horizontal chucking mechanism 110] Next, a description will be given of the horizontal chucking mechanism 110. Fig. 7 is a perspective view showing the configuration of the horizontal chucking mechanism 110. Note that Fig. 7 also shows the feed belt 62 and the like together with the horizontal chucking mechanism 110.

[0069] As shown in FIG. 7, the horizontal chucking mechanism 110 includes a support plate 111, a slide driving unit 112, a slide guide 113, a slide table 114, and a horizontal clamping plate 115.

[0070] The support plate 111 is a part that supports other members of the horizontal chucking mechanism 110, and is attached to each of the side plates 41a and 41b. The support plate 111 fixes a slide drive unit 112 and a slide guide 113, which will be described later.

[0071] The slide driving unit 112 is a part that applies a driving force to slide the slide table 114 and the horizontal clamping plates 115, and is disposed between the support plate 111 and the slide table 114. A main body (reference number omitted) of the slide driving unit 112 is attached to the upper surface of the support plate 111, and a block (reference number omitted) that slides relative to the main body is attached to the lower surface of the slide table 114. The slide driving unit 112 is, for example, an actuator such as an air cylinder or an electric actuator, but may also use a motor and a ball screw.

[0072] In addition, since the slide drive unit 112 is sufficient as long as the horizontal clamping plate 115 can chuck and release the chucking of the widthwise end of the workpiece W, the sliding distance of the slide table 114 relative to the support plate 111 does not need to be very large.

[0073] The slide guide 113 is a member that guides the sliding of the slide table 114 relative to the support plate 111, and is disposed between the support plate 111 and the slide table 114, similar to the slide drive unit 112 described above. In the configuration shown in Fig. 7, the slide guides 113 are provided on the front side (X1 side) and rear side (X2 side) in the front-to-rear direction (X direction) with the slide drive unit 112 in between. Note that the rail portions of the slide guide 113 are attached to the support plate 111, and the blocks of the slide guide 113 are attached to the slide table 114, but this attachment may be reversed.

[0074] The lateral clamping plates 115 are members that come into contact with both side edges of the workpiece W in the width direction (Y direction) and hold the workpiece W in a clamped state. These lateral clamping plates 115 are attached to the slide table 114, but are positioned closer to the workpiece W than the slide table 114. Therefore, when the slide driving unit 112 operates to move the slide table 114 toward the workpiece W, both side edges of the workpiece W in the width direction (Y direction) are held in a clamped state. On the other hand, when the slide driving unit 112 operates to move the slide table 114 away from the workpiece W, the holding state of both sides of the workpiece W in the width direction (Y direction) is released.

[0075] [1-4. Regarding the upper holding mechanism 120] Next, the upper presser mechanism 120 will be described. As shown in Fig. 1, the upper presser mechanism 120 is provided on the upper part of the work transport unit 30. This upper presser mechanism 120 is a part that presses down the work W from above when the work W is chucked by the front chuck jaws 92, the rear chuck jaws 98, and the pair of side clamping plates 115.

[0076] 8 is a perspective view showing the configuration of the upper pressing mechanism 120. The upper pressing mechanism 120 is a part that presses the workpiece W placed on the workpiece support plate 84 from above. With the workpiece W pressed in this manner, the pair of lateral clamping plates 115 described above abut against both side edges of the workpiece W in the width direction (Y direction) to hold the workpiece W, making it possible to correct any warpage that has occurred in the workpiece W. Therefore, when cleaning the workpiece W in a way that prevents warpage from occurring, it is possible to adopt a configuration that omits the upper pressing mechanism 120.

[0077] As shown in Fig. 8, the upper presser mechanism 120 includes a pressing actuator 121, a pressing base 122, and a pressing member 123. The pressing actuator 121 is an actuator such as an air cylinder or an electric actuator. A main body (reference numeral omitted) of the pressing actuator 121 is fixed to the beam 21 described above. The lower end of a rod 121a included in the pressing actuator 121 is connected to the upper surface of the pressing base 122. Therefore, when the pressing actuator 121 operates, the pressing base 122 and the pressing member 123 can move up and down.

[0078] Furthermore, pressing base part 122 is attached to the lower end side of rod 121a as described above. This pressing base part 122 is a base part for supporting pressing member 123, which will be described next. Note that, although pressing base part 122 is made up of multiple members in the configuration shown in Fig. 8, pressing base part 122 may also be made up of a single member.

[0079] Further, the pressing member 123 is a member that comes into contact with the workpiece W placed on the workpiece support plate 84 and presses the workpiece W. In the configuration shown in FIG. 8, the pressing member 123 has portions that press the four corners of the workpiece W, and also has portions that come into linear contact with both ends of the workpiece W in the width direction (Y direction) along the front-rear direction (X direction). This allows the pressing member 123 to correct warpage of the workpiece W while avoiding electronic components mounted on the workpiece W. However, the pressing member 123 may have any shape as long as it is capable of correcting warpage of the workpiece W.

[0080] The pressing base 122 is provided with a long groove 122a extending along the width direction (Y direction) of the workpiece W, and the pressing member 123 is attached to the pressing base 122 via a fixture 124 inserted into the long groove 122a. Therefore, by sliding the fixture 124 along the long groove 122a, the pressing member 123 can be positioned to correspond to the width of the workpiece W. Although not shown, the pressing base 122 is also provided with a long groove extending along the transport direction (X direction) of the workpiece W, and by sliding the fixture 124 along the long groove, the pressing member 123 can be positioned to correspond to the transport direction of the workpiece W. However, a configuration in which the long groove extending along the transport direction (X direction) of the workpiece W is omitted may be adopted.

[0081] [1-5. About the Removal Brush Unit 130] Next, the removal brush unit 130 will be described. Fig. 9 is a perspective view showing the configuration of the removal brush unit 130, and is a view showing the removal brush unit 130 as viewed from below. Fig. 10 is a cross-sectional view showing the removal brush unit 130 cut along the XZ plane.

[0082] 9 and 10 is a part for removing excess solder balls SB (see FIG. 2) that are attached to irregular positions that are not desired portions of the workpiece W. This removal brush unit 130 includes a support frame 131, a roller lifting drive unit 132, a roller support unit 133, a brush roller 134, a roller motor 135, and a dust removal brush 136.

[0083] The support frame 131 is a part that supports other members of the removal brush unit 130, and is attached to the housing 20. Therefore, even when the work transport unit 30 moves along the base rail 51, the removal brush unit 130 does not move in the transport direction (X direction), but moves relative to the work W.

[0084] The roller lifting drive unit 132 is a part that provides a driving force to move up and down the parts (brush roller 134, roller motor 135, dust removal brush 136, etc.) supported by the roller support unit 133. The main body of this roller lifting drive unit 132 is attached to the support frame 131, and the lower end of rod 132a of this roller lifting drive unit 132 pushes in part of the roller support unit 133, causing the brush roller 134, etc. to descend.

[0085] The roller lifting drive unit 132 is an actuator such as an air cylinder or an electric actuator, but may also be a motor and a ball screw.

[0086] The roller support portion 133 is a portion that rotatably supports the roller lifting drive portion 132. Therefore, the roller support portion 133 is also provided with a bearing portion (reference numeral omitted). The roller support portion 133 also supports the front dust removal brush 136a and the rear dust removal brush 136b of the dust removal brush 136. However, the upper dust removal brush 136c is fixedly provided with respect to the support frame 131. Therefore, when the roller lifting drive portion 132 is driven, the roller support portion 133 moves up and down, causing the front dust removal brush 136a and the rear dust removal brush 136b to move up and down, but the upper dust removal brush 136c does not move up and down.

[0087] The brush roller 134 is a member that comes into contact with the upper surface of the workpiece W in a rotating state to remove the solder balls SB (see FIG. 2) formed on the solder resist portion W1 of the workpiece W. That is, when solder paste is applied to the pad portion W2, it is difficult to remove the solder paste even when the brush roller 134 comes into contact with the upper surface of the workpiece W in a rotating state due to the chemical bond between the copper portion of the pad portion W2 and the solder paste.

[0088] On the other hand, when a solder ball SB is formed on the solder resist portion W1, the chemical bonding strength of the solder ball SB to the solder resist portion W1 is much weaker than the chemical bonding strength between the copper portion of the pad portion W2 and the solder paste. In other words, when the brush roller 134 comes into contact with the solder ball SB while rotating, the chemical bonding strength is only strong enough to remove the solder ball SB.

[0089] The brush roller 134 that removes such solder balls SB is configured to have enough rigidity and strength to apply a peeling force sufficient to peel the solder balls SB from the solder resist portion W1 when the brush roller 134 comes into contact while rotating. In order to apply such a peeling force, the surface of the brush roller 134 can be made of various materials, such as fibrous, hard sponge, cotton, wire, or net-like materials.

[0090] The specific surface material of the brush roller 134 can be various chemical fibers, natural fibers, sponge-like materials, metal wires, rubber-based materials, etc. Examples of chemical fibers or resin-based hard sponge-like materials, resin-based wire-like materials, resin-based cotton-like materials, and resin-based net-like materials include various resins that can be made into fibers, such as nylon, polyamide (nylon 6, nylon 66), polyethylene, polyethylene terephthalate (PET), polyvinyl chloride (PVC), polypropylene (PP), polyurethane, polyester, acrylic, rayon, aramid, Teflon, acetate, acrylonitrile butadiene styrene (ABS resin), and Teflon. Chemical fibers made of resins other than those listed above may also be used.

[0091] Furthermore, various natural materials such as natural fibers, natural filaments, and natural cotton can be used, including palm, coconut, karukaya, and loofah, which are used for scrubbing brushes, palmyra, tahina, red fern, black fern, and pakin, which are used for brooms, etc. Natural materials other than those listed above may also be used.

[0092] As the metal wire, iron, stainless steel, brass, copper, aluminum, and titanium materials can be used, but it goes without saying that various other metal materials can also be used.

[0093] In addition, various rubber materials can be used, such as natural rubber, nitrile rubber, urethane rubber, silicone rubber, fluororubber, acrylic rubber, isoprene rubber, styrene rubber, butadiene rubber, ethylene-propylene rubber, butyl rubber, etc. Of course, rubber materials other than those listed above can also be used.

[0094] Furthermore, the rigidity and hardness of the surface of the brush roller 134 may be adjusted by appropriately adjusting the ratio of the diameter of the core portion on the inner diameter side of the surface to the outer diameter of the brush roller 134.

[0095] The roller motor 135 is a part that provides the driving force to rotate the brush roller 134. As the roller motor 135 simply needs to rotate the brush roller 134, various DC motors and AC motors can be used.

[0096] The dust removal brush 136 is a part for removing dust such as removed solder balls SB, which is generated from the workpiece W by the rotation of the brush roller 134, from the workpiece W and the brush roller 134. The dust removed by the dust removal brush 136 falls toward a dust box 150 installed on the lower side inside the housing 20.

[0097] The dust removal brush 136 is provided with a front dust removal brush 136a, a rear dust removal brush 136b, and an upper dust removal brush 136c. The front dust removal brush 136a is installed on the front side (X1 side) of the brush roller 134. In other words, the front dust removal brush 136a is installed on the upstream side of the brush roller 134 in the conveying direction of the workpiece W.

[0098] The rear dust removal brush 136b is disposed rearward (X2 side) of the brush roller 134. That is, the rear dust removal brush 136b is disposed downstream of the brush roller 134 in the conveying direction of the workpiece W. In the configuration shown in FIG. 9, the rear dust removal brush 136b is provided in three rows to prevent dust from scattering toward the dust removal roller unit 140, which will be described later. However, the number of rows of the rear dust removal brush 136b and the front dust removal brush 136a can be set to any appropriate number greater than or equal to one.

[0099] 10, the upper dust removal brush 136c is located above the brush roller 134. When the brush roller 134 moves upward, the upper dust removal brush 136c comes into contact with the brush roller 134 to remove dust adhering to the brush roller 134.

[0100] Here, the dust removal brush 136 can be made of various materials as long as it can effectively remove dust such as solder balls SB generated by the workpiece W from the workpiece W and the brush roller 134. Such materials include various chemical fibers, natural fibers, sponge-like materials, metal wire, rubber-based materials, etc., and among these, wire-shaped materials are preferable. Note that specific materials can be appropriately selected from those listed for the brush roller 134.

[0101] [1-6. Dust Removal Roller Unit 140] Next, the dust removal roller unit 140 will be described. Fig. 11 is a perspective view showing the configuration of the dust removal roller unit 140. As shown in Fig. 11, this is a part that comes into contact with the upper surface of the workpiece W to remove dust from the workpiece W. This dust removal roller unit 140 includes a roll support frame 141, a roll lifting cylinder 142, a sliding guide 143, a dust removal roller 144, an adhesive tape holder 145, and a roller drive motor 146.

[0102] The roll support frame 141 is a part that supports other members of the dust removal roller unit 140, and is attached to the housing 20. Therefore, even if the work transport unit 30 moves along the base rail 51, the dust removal roller unit 140 does not move in the transport direction (X direction), but moves relative to the work W.

[0103] The roll lifting cylinder 142 is a part that applies a driving force to lift and lower an adhesive tape holder 145, which will be described later. When the adhesive tape roll T1R held by the adhesive tape holder 145 is lowered, the dust removal roller 144 is lowered via this adhesive tape roll T1R. As shown in FIG. 11 , a hook portion 142a is provided at the lower end of the roll lifting cylinder 142, and this hook portion 142a rises and falls as the roll lifting cylinder 142 operates. Therefore, when dust removal from the workpiece W is completed and the adhesive tape roll T1R is raised by the roll lifting cylinder 142, the dust removal roller 144 rises via the hook portion 142a.

[0104] The roll lifting cylinder 142 is, for example, an air cylinder, but may also be an actuator such as an electric actuator, or a motor and ball screw. The roll lifting cylinder 142 is equipped with a piston rod (not shown), and by moving the piston rod up and down, it is possible to move the dust removal roller 144 (described later) up and down.

[0105] The sliding guide 143 is a part that guides the vertical sliding of the dust removal roller 144 and adhesive tape holder 145, which will be described later, and can be, for example, a linear guide. In the configuration shown in Fig. 11, a block part 143b fixed to the dust removal roller 144 and a block part 143c fixed to the adhesive tape holder 145 slide separately and independently on rail part 143a of the sliding guide 143. Therefore, the adhesive tape holder 145 comes into contact with the dust removal roller 144 due to its own weight.

[0106] The dust removal roller 144 is a part that comes into contact with the workpiece W and adsorbs dust present on the surface of the workpiece W. The dust removal roller 144 has a cylindrical portion 144a, a rotating shaft 144b, and an adhesive rubber layer 144c. The cylindrical portion 144a is a cylindrical member that is attached to the rotating shaft 144b so that its center of rotation is the rotating shaft 144b, and an adhesive rubber layer 144c is attached to its outer circumferential surface. The rotating shaft 144b is attached to the rotation center of the cylindrical portion 144a. The rotating shaft 144b is attached to the block portion 143b via a bearing 147, and is capable of moving up and down along the rail portion 143a of the sliding guide 143.

[0107] The adhesive rubber layer 144c is made of adhesive rubber that can adsorb dust. An adsorption layer (not shown) is provided on the surface of the adhesive rubber layer 144c, and the adsorption layer is made of a material that has excellent dust adsorption properties, such as silicone rubber. A conductive layer, such as nitrile rubber or carbon rubber, may be provided below the adsorption layer.

[0108] The adhesive tape holder 145 includes an adhesive tape holder 145a and a rotating shaft 145b. The adhesive tape holder 145a rotatably holds both ends of the adhesive tape roll T1R. The rotating shaft 145b is attached to the center of rotation of the adhesive tape holder 145a. The rotating shaft 145b is attached to a block portion 143c via a bearing 148, and is movable up and down along the rail portion 143a of the sliding guide 143.

[0109] The adhesive tape roll T1R held by the adhesive tape holder 145a is a rolled adhesive tape. The surface of the adhesive tape T1 is an adhesive surface. The adhesive surface is capable of retaining dust adsorbed to the dust removal roller 144. Therefore, the adhesive force of the adhesive surface of the adhesive tape T1 to the dust is greater than the adhesive force of the dust removal roller 144 to the dust. This allows the dust to be efficiently transferred from the dust removal roller 144 to the adhesive surface of the adhesive tape T1. The adhesive tape T1 of the adhesive tape roll T1R has slits that enable it to be separated into sheets. Therefore, by pulling out the adhesive tape T1 from the adhesive tape roll T1R and then cutting it along the slits, the contaminated adhesive tape T1 can be easily replaced with a clean adhesive tape T1.

[0110] The roller drive motor 146 is a part that provides the driving force to rotate the dust removal roller 144. As the roller drive motor 146 simply needs to rotate the dust removal roller 144, various DC motors and AC motors can be used.

[0111] [1-7. About Dust Box 150] 1, a dust box 150 is provided below the housing 20. The dust box 150 is a box-shaped portion for collecting dust such as solder balls SB removed from the workpiece W. The dust box 150 is provided so as to be removable from the housing 20. Therefore, when the amount of dust accumulated in the dust box 150 reaches a predetermined amount, the dust box 150 can be removed from the housing 20 and the dust can be discarded.

[0112] [1-8. Control Unit 200 and Operation Unit 210] Next, the control unit 200 will be described. As shown in Fig. 1, the cleaning device 10 is provided with a control unit 200 that controls the operation of each driving part of the cleaning device 10. This control unit 200 can be, for example, a dedicated control circuit such as an ASIC (Application Specific Integrated Circuit), a computer equipped with a processor such as a CPU (Central Processing Unit) and memory (RAM (Random Access Memory), ROM (Read Only Memory), non-volatile memory, etc.), a sequencer, etc.

[0113] Specifically, the control unit 200 is a part that controls the driving of the movement motor 53, the delivery motor 64, the gap adjustment motor 73, the up / down actuator 86, the pickup motor 88d, the front up / down drive unit 93, the rear up / down drive unit 99, the drive motor 104, the slide drive unit 112, the pressing actuator 121, the roller lift drive unit 132, the roller motor 135, the roll lift cylinder 142, and the roller drive motor 146. Note that the concept of the control unit 200 can also include a motor driver for driving the motor when the drive unit is a motor, an actuator driver for driving the actuator when the drive unit is an actuator, and the like.

[0114] The cleaning device 10 also includes an operation unit 210. The operation unit 210 is a section for inputting information related to the operation of the cleaning device 10, and includes, for example, a touch panel, operation buttons, etc. Based on an operation on the operation unit 210, a command based on the operation is given to the control unit 200.

[0115] [2. Operation when cleaning the workpiece W in the cleaning device 10] Next, the operation of the cleaning device 10 when cleaning the workpiece W will be described below.

[0116] Step S01: Adjusting the distance between the pair of end delivery mechanisms 61 First, in the cleaning device 10, the control unit 200 operates the gap adjustment motor 73 of the gap adjustment mechanism 70 based on an input regarding the size of the workpiece W at the operation unit 210. As a result, the gap between the pair of end-feeding mechanisms 61 is adjusted to a dimension corresponding to the width of the workpiece W.

[0117] Step S02: Installing the pin installation board 82 and the workpiece support plate 84 Before or after step S01 described above, the user installs support pins 83 on the pin installation board 82. In this case, the number and spacing of the support pins 83 are adjusted according to the dimensions of the workpiece W so that the workpiece W can be stably held. After the installation of the support pins 83 is completed, a workpiece support plate 84 is attached to the top of the support pins 83. This makes it possible for the workpiece W to be supported by the workpiece support plate 84.

[0118] Step S03: Placing the workpiece W on the delivery belt 62 and moving the workpiece W After steps S01 and S02 are completed, the workpiece W is placed on the feed belts 62. At this time, one end side (Y1 side) of the workpiece W in the width direction is placed on one feed belt 62, and the other end side (Y2 side) of the workpiece W in the width direction is placed on the other feed belt 62.

[0119] After this placement, when a sensor (not shown) detects the presence of the workpiece W, the control unit 200 activates the feed motor 64, which drives a pair of feed belts 62 and moves the workpiece W to a predetermined lift position.

[0120] Step S04: Raise the front chuck jaws 92 and move the rear chuck jaws 98 to the front side After positioning the workpiece W at the lift position as described above, the control unit 200 operates the front vertical drive unit 93 of the front and rear chucking mechanism 90 to raise the front chuck jaws 92 to a predetermined height. After this, the control unit 200 operates the drive motor 104 to drive the transfer belt 101 and move the rear chuck jaws 98 to the front side (X1 side). Note that, prior to operating the drive motor 104 as described above, the rear vertical drive unit 99 is operated to set the rotating arm 97 in a horizontal state.

[0121] As a result, the front side (X1 side) of the workpiece W comes into contact with the front chuck jaws 92, and the rear side (X2 side) of the workpiece W comes into contact with the rear chuck jaws 98. In addition, the claw portions 92a and 98a are positioned on the upper side (Z1 side) of the workpiece W, and the upper sides (Z1 sides) of the four corners of the workpiece W are held down by the claw portions 92a and 98a.

[0122] Step S05: Raise the work W Next, the control unit 200 operates the vertical actuator 86 to raise the portion of the workpiece lower support unit 80 that is above the lower support base 85. As a result, the workpiece W is lifted from the pair of delivery belts 62 to a predetermined upper standby position.

[0123] Step S06: Clamping the workpiece W from above and below (correcting the warpage of the workpiece W) Next, the control unit 200 activates the pickup motor 88d of the pickup mechanism 88 to raise the workpiece W to a predetermined clamping position and maintain the position at that position. After this, the control unit 200 activates the pressing actuator 121 to press the pressing member 123 from above (the Z1 side) of the workpiece W. As a result, the workpiece W is clamped from above and below between the workpiece support plate 84 and the pressing member 123. As a result, even if the workpiece W is warped, the warp is corrected.

[0124] Step S07: Press the workpiece W horizontally With the workpiece W clamped from above and below as described above, the control unit 200 activates the slide drive unit 112 of the lateral chucking mechanism 110 to clamp the workpiece W between the pair of lateral clamping plates 115 from both sides in the width direction (Y direction) of the workpiece W. As a result, the workpiece W is clamped from the front and back, up and down, and left and right with its warpage corrected. After this, the control unit 200 activates the pressing actuator 121 to retract the pressing member 123 upward.

[0125] Step S08: Move the work W downstream to remove the solder ball SB With the workpiece W held as described above, the control unit 200 operates the movement motor 53 to move the entire workpiece transport unit 30 downstream in the transport direction (X direction). At this time, the removing brush unit 130 and the dust removal roller unit 140 do not move in the transport direction (X direction) and remain positioned at their predetermined positions.

[0126] Furthermore, when a sensor (not shown) detects the progress of the workpiece W, the control unit 200 activates the roller lifting drive unit 132 to lower the brush roller 134 and the dust removal brush 136. Also, before or after this lowering, the roller motor 135 is activated to rotate the brush roller 134. At this time, the direction of rotation of the roller motor 135 is the direction (reverse rotation) in which the brush roller 134 returns the workpiece W to the upstream side.

[0127] After this, as the workpiece W advances downstream toward the brush roller 134, the top surface of the workpiece W first comes into contact with the front dust removal brush 136a, which removes dust present on the surface of the workpiece W. Then, the brush roller 134 comes into contact with the top surface of the workpiece W. At this time, the brush roller 134 rotates in the reverse direction, returning the workpiece W upstream, as described above. This reverse rotation of the brush roller 134 applies a peeling force to the excess solder balls SB (see FIG. 2) that are attached to irregular positions (solder resist portion W1) that are not the desired portions of the workpiece W, causing the solder balls SB to peel off from the solder resist portion W1. As a result, the solder balls SB are peeled off from the solder resist portion W1.

[0128] In this state, when the workpiece W advances further downstream, the rear dust removal brush 136b comes into contact with the upper surface of the workpiece W. As a result, even if dust such as solder balls SB peeled off from the solder resist portion W1 is present on the upper surface of the workpiece W, the dust is removed from the upper surface of the workpiece W by the rear dust removal brush 136b.

[0129] When the workpiece W passes the brush roller 134 and the rear dust removal brush 136b, the control unit 200 operates the roller lifting drive unit 132 to raise the brush roller 134 and the dust removal brush 136. At this time, 136c, which is located at the top of the brush roller 134, comes into contact with the brush roller 134. In this state, by operating the roller motor 135 for a predetermined period of time, dust adhering to the brush roller 134 can be removed by 136c.

[0130] Step S09: Raising the brush roller 134 and the dust removal brush 136 After removing the dust as described above, the control unit 200 activates the roller lifting drive unit 132 to lift the brush roller 134 and the dust removal brush 136. This puts the brush roller 134 and the dust removal brush 136 into a state ready for removing dust from the next workpiece W.

[0131] Step S10: Move the workpiece W downstream to remove dust As described above, the solder balls SB are removed from the workpiece W, and furthermore, before or after the operation of step S09, the control unit 200 actuates the roll lifting cylinder 142 to lower the dust removal roller 144. At this time, the adhesive tape roll T1R also lowers above and in contact with the dust removal roller 144.

[0132] At this time, the work transport unit 30 continues to move downstream in the overall transport direction (X direction). Therefore, the work W comes into contact with the dust removal roller 144, and dust present on the upper surface of the work W is transferred to the dust removal roller 144. Furthermore, due to contact between the dust removal roller 144 and the adhesive tape roll T1R, the dust transferred to the dust removal roller 144 is transferred to the adhesive tape T1 of the adhesive tape roll T1R.

[0133] Step S11: Raising the dust removal roller 144 and adhesive tape roll T1R After removing dust from the workpiece W as described above, the control unit 200 activates the roll lifting cylinder 142 to raise the dust removal roller 144 and the adhesive tape roll T1R. This puts the dust removal roller 144 and the adhesive tape roll T1R into a state ready for removing dust from the next workpiece W.

[0134] Step S12: Stop conveying the workpiece W and move the rear chuck jaws 98 to the rear side Around step S11, the control unit 200 stops the operation of the movement motor 53. After that, the control unit 200 operates the drive motor 104 to move the rear chuck jaws 98 to the rear side (X2 side) by driving the movement belt 101. This releases the chucking of the workpiece W in the front-to-rear direction (X direction) by the front chuck jaws 92 and the rear chuck jaws 98.

[0135] Furthermore, the slide drive unit 112 of the horizontal chucking mechanism 110 is operated to move the pair of horizontal clamping plates 115 in a direction away from the workpiece W. This releases the chucking of the workpiece W in the width direction (Y direction) by the pair of horizontal clamping plates 115. As a result, both ends of the workpiece W in the width direction (Y direction) are placed on the pair of feed belts 62.

[0136] Step S13: Stop conveying the workpiece W and lower the rear chuck jaws 98 After step S12, the control unit 200 stops the operation of the movement motor 53. Thereafter, the control unit 200 operates the rear up / down drive unit 99 to lower the rear side (X2 side) of the rotating arm 97. Then, the rear side (X2 side) of the rear chuck moving mechanism 100 supported by the rotating arm 97 also lowers, and therefore the rear chuck jaws 98 supported by the movement belt 101 of the rear chuck moving mechanism 100 also lowers. At this time, the rear chuck jaws 98 are lowered to a position where they do not interfere with the transport path of the workpiece W to the downstream side.

[0137] Step S14: Discharge of the workpiece W to the downstream side After step S13, the control unit 200 activates the feed motor 64, and discharges the workpiece W to the downstream side (X2 side) by driving the feed motor 64. That is, the workpiece W is delivered from the cleaning device 10 to a device located downstream of the mounting process, such as a reflow device.

[0138] Step S15: Preparation for processing the next work W In step S14, after the workpiece W is discharged downstream (X2 side), preparations are made for processing the next workpiece W. Specifically, the control unit 200 drives the front vertical drive unit 93 to lower the front chuck jaws 92, thereby preventing interference with the delivery of the next workpiece W. The control unit 200 also operates the movement motor 53 to return the workpiece transport unit 30 to the front side (X1 side). Furthermore, the control unit 200 operates the rear vertical drive unit 99 to return the rotating arm 97 to a horizontal position.

[0139] The operations of each step as described above are performed for each workpiece W. The steps described above can be interchanged as long as the processing of the workpiece W is not hindered.

[0140] (Reference example) The following shows the results of removing solder balls SB from a workpiece W of a predetermined size using a specific brush roller 134. The results are shown below as Reference Examples 1 to 4, with the brush pressing amount and brush rotation speed. Reference example 1: Brush pressure 1.0 mm, brush rotation speed 600 rpm, removal rate (1st time) 93%, removal rate (2nd time) 97%, Reference example 2: Brush pressure 1.0 mm, brush rotation speed 800 rpm, removal rate (1st time) 99%, removal rate (2nd time) 99%, Reference example 3: Brush pressure 2.0 mm, brush rotation speed 600 rpm, removal rate (1st time) 96%, removal rate (2nd time) 99%, Reference example 4: Brush pressure 2.0 mm, brush rotation speed 800 rpm, removal rate (1st pass) 100%, removal rate (2nd pass) 100%

[0141] In the above description, the brush indentation amount is 0.0 mm when the brush roller 134 abuts against the workpiece W without being deformed, and the "brush indentation amount" indicates how far the center of rotation of the brush roller 134 has advanced from there toward the workpiece W. Therefore, when the brush indentation amount is a predetermined value greater than 0, the brush roller 134 is deformed, like an automobile tire.

[0142] The brush rotation speed is set in a direction (reverse rotation) in which the workpiece W is returned upstream by the brush roller 134. The "removal rate" indicates the percentage of solder balls SB (solder balls SB formed in irregular positions) present in the solder resist portion W1 of the workpiece W that have been removed.

[0143] As is clear from the above results, the removal rate was 100% in both the first and second experimental results in Reference Example 4. Therefore, in Reference Example 4, the excess solder balls SB present on the solder resist portion W1 were completely removed.

[0144] [3. Notes] The contents described in the above-described embodiment can be understood, for example, as follows. [1] That is, A cleaning device 10 for cleaning a workpiece W having a solder resist portion W1 and a pad portion W2 that is not covered by the solder resist portion W1, Chucking mechanisms (front and rear chucking mechanisms 90 and lateral chucking mechanisms 110) that chuck the workpiece W; a removal brush unit 130 including a brush roller 134 that rotates relative to the workpiece W while in contact with the workpiece W while the workpiece W is held by a chucking mechanism (front / rear chucking mechanism 90 and lateral chucking mechanism 110), thereby applying a peeling force to the solder balls SB formed on the solder resist portion W1; It is equipped with:

[0145] The cleaning device 10 configured in this manner can remove solder balls SB that are not formed on the pad portions W2 that are in the correct positions but are formed on the solder resist portion W1 that is in the incorrect position. This makes it possible to prevent the solder balls SB from spreading and short-circuiting adjacent pad portions W2 when flattening the solder balls SB that are present on the solder resist portion W1.

[0146] [2] In addition to the above-mentioned embodiment, in addition to the contents described in [1] above, The chucking mechanism includes: a front-rear chucking mechanism 90 that chucks the workpiece W in the front-rear direction (X direction), which is the transport direction in which the workpiece W is transported; a lateral chucking mechanism 110 for chucking the workpiece W in a width direction (Y direction) of the workpiece W that is perpendicular to the front-rear direction (X direction); It is preferable to have:

[0147] When configured in this manner, the workpiece W is chucked in the front-rear direction (X direction) by the front-rear chucking mechanism 90, and in the width direction (Y direction) by the lateral chucking mechanism 110. Therefore, the front-rear and left-right sides of the workpiece W are chucked, so that the workpiece W can resist the peeling force of the brush roller 134 peeling off the solder balls SB, and stable cleaning of the workpiece W is possible.

[0148] [3] In addition to the above-mentioned [2], in the above embodiment, The front and rear chucking mechanism 90 is A front chuck jaw 92 is positioned on the front side (X1 side) of the workpiece W and chucks the front side (X1 side) of the workpiece W; A rear chuck jaw 98 is positioned on the rear side (X2 side) of the workpiece W and chucks the rear side (X2 side) of the workpiece W; Equipped with It is preferable that the rear chuck claws 98 are attached to a rotating arm 97 that rotates around the front side (X1 side) in the front-to-back direction (X direction) as a fulcrum via a moving belt 101 that can be driven in the front-to-back direction (X direction).

[0149] In this configuration, the rear chuck jaws 98 are attached to a rotating arm 97 that rotates around a fulcrum on the front side (X1 side) in the front-rear direction (X direction), and therefore can move up and down by rotating the rotating arm 97. Therefore, after cleaning of the workpiece W is completed, when the workpiece W is transported downstream (X2 side) in the transport direction (X direction), it is possible to prevent the rear chuck jaws 98 from interfering with the workpiece W by rotating the rotating arm 97.

[0150] Furthermore, by driving the transfer belt 101, the workpiece W can be chucked in the front-rear direction (X direction) and the chucked state can be easily released.

[0151] [4] In addition to the above-mentioned [3], in the above embodiment, A workpiece delivery unit 60 is provided, which is composed of a pair of end delivery mechanisms 61 each having a pair of delivery belts 62 that support both ends of the workpiece W. It is preferable to provide a work lower support portion 80 that lifts the work W from the delivery belt 62 when the work W is chucked by the chucking mechanism (front and rear chucking mechanism 90 and lateral chucking mechanism 110).

[0152] When configured in this manner, when chucking the workpiece W, the workpiece W is lifted by the workpiece lower support portion 80, making it possible to achieve a good chucking condition without interference with the delivery belt 62, particularly in the width direction (Y direction) of the workpiece W.

[0153] [5] In addition to the above-mentioned embodiments, in addition to the above-mentioned [1] to [4] or a combination thereof, When the workpiece W is transported in the forward and backward direction (X direction), It is preferable that the removal brush unit 130 is provided with a dust removal brush 136 for removing dust present on the workpiece W on at least one of the front side (X1 side) and rear side (X2 side) of the brush roller 134 in the front-to-rear direction (X direction).

[0154] In this configuration, it is possible to effectively remove dust such as solder balls SB removed from the workpiece W by the rotation of the brush roller 134 from the workpiece W. Therefore, it is possible to prevent product defects caused by dust adhering to the workpiece W after cleaning by the cleaning device 10.

[0155] [6] In addition to the above-mentioned embodiments, in addition to any of the above-mentioned [1] to [5] or a combination thereof, A work transport unit 30 is provided to transport the work W after cleaning while the work W is held by the chucking mechanisms (front and rear chucking mechanisms 90 and lateral chucking mechanisms 110), The workpiece transport unit 30 is equipped with a chucking mechanism (front and rear chucking mechanism 90 and lateral chucking mechanism 110), It is preferable that a dust removal roller unit 140 is arranged downstream (X2 side) of the removal brush unit 130 in the conveying direction (X direction) of the workpiece W, and includes a dust removal roller 144 that adsorbs dust adhering to the workpiece W, and an adhesive tape holder 145 that holds an adhesive tape roll T1R at both ends to transfer the dust adhering to the dust removal roller 144.

[0156] In this configuration, the dust removal roller unit 140 can remove dust from the workpiece W after the excess solder balls SB have been removed by the removal brush unit 130.

[0157] [4. Modifications] Although the embodiments of the present invention have been described above, the present invention can be modified in various other ways, which will be described below.

[0158] In the above-described embodiment, the cleaning device 10 employs a configuration including the dust removal roller unit 140. However, a configuration not including the dust removal roller unit 140 may also be employed.

[0159] Furthermore, if no electronic components are mounted on the underside of the workpiece W, a configuration may be adopted in which the workpiece W is held by a separate method without using the workpiece feed unit 60, the workpiece lower support part 80, the front and rear chucking mechanism 90, or the side chucking mechanism 110, and excess solder balls SB are removed by the removal brush unit 130. In this case, the workpiece W may be held by vacuum suction. Also, the workpiece W may be sent downstream (X2 side) in the transport direction (X direction) while being vacuum suctioned.

[0160] Furthermore, in the above-described embodiment, the dust after the excess solder balls SB are removed by the removal brush unit 130 falls into the dust box 150. However, instead of or together with the dust box 150, a cleaner having a duct for sucking in dust may be provided. [Explanation of symbols]

[0161] 10...cleaning device, 20...casing, 21...beam portion, 30...work transport unit, 40...base portion, 41...plate member, 41a, 41b, 41c...side plate, 42...long hole, 50...base movement mechanism, 51...base rail, 52...fitting portion, 53...movement motor, 60...work feed unit, 61...end feed mechanism, 62...feed belt, 63...roller, 64...feed motor, 70...gap adjustment mechanism, 71...ball screw, 72...screw receiving portion, 73...gap adjustment motor, 80...work lower support portion, 81...board support base , 82... pin installation board, 82a... insertion hole, 83... support pin, 84... work support plate, 85... lower support base, 86... up and down actuator, 86a... rod, 87... sliding guide, 88... pickup mechanism, 88a... ball screw, 88b... lower block, 88b1, 88c1... inclined surface, 88c... base side block, 88d... pickup motor, 90... front and rear chucking mechanism, 91... front chuck portion, 92... front chuck claw, 92a, 98a... claw portion, 93... front up and down drive portion, 95... rear chuck portion, 96... rotating shaft, 97... Rotating arm, 97a... guide shaft, 98... rear chuck jaws, 99... rear up / down drive unit, 99a... rod unit, 100... rear chuck moving mechanism, 101... moving belt, 102... driving pulley, 103... driven pulley, 104... driving motor, 105... belt attachment, 110... horizontal chucking mechanism, 111... support plate, 112... slide drive unit, 113... slide guide, 114... slide table, 115... horizontal clamping plate, 120... upper holding mechanism, 121... pressing actuator, 121a... rod, 122... pressing base unit, 12 2a...long groove portion, 123...pressure member, 124...mounting fixture, 130...removal brush unit, 131...support frame, 132...roller lifting drive unit, 132a...rod, 133...roller support portion, 134...brush roller, 135...roller motor, 136...dust removal brush, 136a...front dust removal brush, 136b...rear dust removal brush, 136c...upper dust removal brush, 140...dust removal roller unit, 141...roll support frame, 142...roll lifting cylinder, 143...sliding guide, 143a...rail portion, 143b,143c...block portion, 144...dust removal roller, 144a...tubular portion, 144b...rotating shaft, 144c...adhesive rubber layer, 145...adhesive tape holder, 145a...adhesive tape holder, 145b...rotating shaft, 146...roller drive motor, 147, 148...bearing, 150...dust box, 200...control unit, 210...operation unit, P1...paste application unit, SB...solder ball, T1...adhesive tape, T1R...adhesive tape roll, W...work, W1...solder resist portion, W2...pad portion, W3...paste application unit,

Claims

1. A cleaning device for cleaning a workpiece having a solder resist portion and a pad portion not covered by the solder resist portion, a chucking mechanism for chucking the workpiece; a removal brush unit including a brush roller that rotates relative to the workpiece while in contact with the workpiece while the workpiece is held by the chucking mechanism, thereby applying a peeling force to the solder balls formed on the solder resist portion; A cleaning device comprising:

2. 2. The cleaning device according to claim 1, The chucking mechanism includes: a front-rear chucking mechanism that chucks the workpiece in a front-rear direction, which is a transport direction in which the workpiece is transported; a lateral chucking mechanism that chucks the workpiece in a width direction of the workpiece that is perpendicular to the front-rear direction; A cleaning device comprising:

3. 3. The cleaning device according to claim 2, The front and rear chucking mechanism is A front chuck jaw is positioned on the front side of the workpiece and chucks the front side of the workpiece; A rear chuck jaw is located on the rear side of the workpiece and chucks the rear side of the workpiece. Equipped with The rear chuck jaws are attached to a rotating arm that rotates around a fulcrum at the front side in the front-rear direction via a moving belt that can be driven in the front-rear direction. A cleaning device characterized by:

4. 4. The cleaning device according to claim 3, a workpiece delivery unit including a pair of end delivery mechanisms each having a pair of delivery belts that support both ends of the workpiece; a work lower support part that lifts the work from the delivery belt when the chucking mechanism chucks the work, A cleaning device characterized by:

5. 2. The cleaning device according to claim 1, When the conveying direction of the workpiece is the front-rear direction, The removing brush unit is provided with a dust removing brush on at least one of the front and rear sides of the brush roller in the front-rear direction, the dust removing brush removing dust from the workpiece. A cleaning device characterized by:

6. 2. The cleaning device according to claim 1, a work transport unit that transports the work while the work is held by the chucking mechanism is provided; the workpiece transport unit is equipped with the chucking mechanism, A dust removal roller unit is disposed downstream of the removing brush unit in the conveying direction of the workpiece, the dust removal roller unit including a dust removal roller that adsorbs dust adhering to the workpiece, and an adhesive tape holder that holds, at both ends thereof, an adhesive tape roll that transfers the dust adhering to the dust removal roller. A cleaning device characterized by:

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