Nozzle and liquid ejection device

Abstract

To finely coat liquid without increase in tact time.SOLUTION: A nozzle 6 includes a nozzle body 6g, a nozzle tip 6e provided on one end of the nozzle body, a discharge port 6d formed on the tip of an orifice 6c provided inside the nozzle tip, and a contact part 14 surrounding a periphery of the nozzle tip, in which in a discharge direction of liquid discharged from the discharge port, a first distance L1 between a surface 30a of a coated article 30 to which the liquid is coated and the discharge port is larger than a second distance L2 between a contact tip 14a of the contact part and the surface of the coated article, a notch part is provided in the contact tip so that the contact tip does not interfere with the liquid coated to the coated article when the nozzle body is moved to the coated article, and a distance between the discharge port and the contact tip is set at a predetermined distance L so that the liquid coated to the surface of the coated article from the discharge port in a state in which the contact tip comes in contact with the surface of the coated article becomes a predetermined shape.SELECTED DRAWING: Figure 7

Description

[Technical Field]

[0001] The present invention relates to a nozzle and a liquid ejection device. [Background technology]

[0002] Conventionally, there are liquid ejection devices that apply minute amounts of liquid to minute areas of a substrate. In applying liquid minutely, it is important to precisely maintain the working distance (WD), the distance from the nozzle outlet to the destination (coating surface). Here, we will explain the operation of a nozzle in fine liquid application. Figure 8 shows the operation of a conventional nozzle 50. First, a robot moves the nozzle 50 to the position where the liquid is to be applied. As shown in Figure 8(a), the nozzle 50 ejects liquid from the nozzle outlet 50a, forming a liquid sphere (hereinafter referred to as a liquid sphere) 51 at the outlet 50a. Next, the robot lowers the nozzle 50 a predetermined distance to bring the liquid sphere 51 into contact with the surface (coating surface) 30a of the substrate (object to be coated) 30. Finally, the nozzle 50 is raised to place the liquid sphere 51 on the surface 30a. This results in fine droplets of liquid 52 being applied to the surface 30a of the substrate 30.

[0003] However, when the nozzle 50 is moved up and down by a robot, there is an error in the amount of movement of the nozzle 50 by the robot, making it difficult to stably maintain a minute processing distance WD of several tens to several hundreds of micrometers at a constant value. In particular, when the surface 30a is not flat but distorted or has irregularities, it is extremely difficult to stably and accurately apply liquid 52 of a predetermined diameter to the surface 30a. Therefore, Patent Document 1 discloses a liquid application device that maintains a constant processing distance WD in accordance with the irregularities of the surface 30a by measuring the processing distance WD in advance using a laser height sensor. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2008-096117 Summary of the Invention [Problem to be solved by the invention]

[0005] However, providing a distance measurement device such as a laser height sensor in a liquid application device increases the cost of the liquid application device, and there is also the problem that the time required for the liquid application operation (hereinafter referred to as takt time) when the processing distance WD is measured by the distance measurement device before each liquid application is two to three times longer than the takt time when the processing distance WD is not measured.

[0006] Therefore, the present invention provides an inexpensive nozzle that can apply a liquid in fine amounts without increasing the takt time. [Means for solving the problem]

[0007] A nozzle according to one embodiment of the present invention comprises: A nozzle body; a liquid passage provided inside the nozzle body; a nozzle tip provided at one end of the nozzle body; an orifice provided inside the nozzle tip portion so as to communicate with the liquid passage; a discharge port formed at a tip end of the orifice for discharging a liquid; a contact portion surrounding the nozzle tip portion; Equipped with a first distance between the discharge port and a surface of the workpiece to be coated with the liquid in a discharge direction of the liquid discharged from the discharge port is greater than a second distance between a contact tip of the contact portion and the surface of the workpiece; a notch is provided in the contact tip so that the contact tip does not interfere with the liquid being applied to the workpiece when the nozzle body is moved relative to the workpiece, The distance between the discharge outlet and the contact tip is set to a predetermined distance so that the liquid applied from the discharge outlet to the surface of the workpiece will have a predetermined shape when the contact tip is in contact with the surface of the workpiece. [Effects of the Invention]

[0008] According to the present invention, it is possible to apply a liquid finely using an inexpensive nozzle without increasing the tact time. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is a diagram showing a liquid ejection device. [Figure 2] FIG. [Figure 3] Cross-sectional view of a nozzle. [Figure 4] FIG. [Figure 5] FIG. [Figure 6] FIG. 10 is a diagram showing a robot equipped with a dispenser. [Figure 7] 5A to 5C are diagrams showing the operation of a nozzle according to the present embodiment. [Figure 8] FIG. 10 is a diagram showing the operation of a conventional nozzle. DETAILED DESCRIPTION OF THE INVENTION

[0010] The present invention will be described below based on preferred embodiments with reference to the drawings. However, unless otherwise specified, the dimensions, materials, shapes, relative positions, etc. of the components described in the following embodiments are not intended to limit the scope of the present invention.

[0011] (Liquid discharge device) FIG. 1 is a diagram showing a liquid ejection device 1. The liquid ejection device 1 has a dispenser 2, a liquid supply source 3, an air supply source 4, a control device 5, and a robot 20. The robot 20 is a dispenser moving device that holds the dispenser 2 and moves it. The liquid supply source 3 stores liquid. The air supply source 4 supplies pressurized air to the dispenser 2 and the liquid supply source 3. The control device 5 controls the air supply source 4. The liquid supply source 3 supplies liquid to the dispenser 2 using the pressurized air supplied from the air supply source 4. The control device 5 controls the supply of pressurized air from the air supply source 4 to the dispenser 2, and controls the opening and closing of a nozzle 6 of the dispenser 2. When the nozzle 6 is opened, liquid is ejected from the nozzle 6. When the nozzle 6 is closed, ejection of liquid from the nozzle 6 is stopped.

[0012] FIG. 2 is a cross-sectional view of the dispenser 2. The dispenser 2 has a dispenser body 7 and a nozzle 6. The dispenser body 7 has an upper part (cylinder body) 7a and a lower part (liquid-contacting body) 7b. The upper part 7a and the lower part 7b are fastened together with screws 10. The nozzle 6 is attached to the dispenser body 7 with a nozzle cap 8 that screws onto the lower end part 7c of the lower part 7b of the dispenser body 7. The lower part 7b of the dispenser body 7 is provided with a liquid inlet 7d that receives the liquid supplied from the liquid supply source 3, a liquid passage 7e through which the liquid passes, and a liquid discharge port 7f that discharges the liquid. The liquid discharge port 7f communicates with the liquid passage 6a provided in the nozzle 6.

[0013] The upper portion 7a of the dispenser body 7 is provided with an air inlet 7g that receives pressurized air supplied from the air supply source 4, and a piston chamber 7h that communicates with the air inlet 7g. The piston chamber 7h is provided with a piston 11 that divides the piston chamber 7h into two sections and is movable within the piston chamber 7h. A rear end (one end) 12a of a needle valve 12 is fixed to the piston 11. The needle valve 12 passes through the piston chamber 7h and the liquid passage 7e and extends into the liquid passage 6a of the nozzle 6. A spring (elastic member) 13 that urges the piston 11 toward the nozzle 6 is provided in the piston chamber 7h. The spring 13 urges the piston 11 toward the nozzle 6, causing a tip end (other end) 12b of the needle valve 12 to abut against a valve seat 6b provided at the entrance of an orifice 6c (FIG. 3) of the nozzle 6. The piston 11 and spring 13 constitute a valve opening / closing mechanism that moves the needle valve 12 between an open position and a closed position.

[0014] When pressurized air is supplied from the air supply source 4 to the piston chamber 7h, the piston 11 moves against the biasing force of the spring 13 in a direction away from the nozzle 6, moving the needle valve 12 to the open position so that the tip 12b of the needle valve 12 moves away from the valve seat 6b of the nozzle 6. Liquid supplied from the liquid supply source 3 to the liquid inlet 7d passes through the liquid passage 7e and the liquid passage 6a and is discharged from the nozzle 6 through the gap between the tip 12b of the needle valve 12 and the valve seat 6b. On the other hand, when the supply of pressurized air from the air supply source 4 to the piston chamber 7h is stopped, the biasing force of the spring 13 moves the piston 11 toward the nozzle 6, moving the needle valve 12 to the closed position so that the tip 12b of the needle valve 12 abuts against the valve seat 6b of the nozzle 6, closing the nozzle 6. This stops the discharge of liquid from the nozzle 6.

[0015] In this embodiment, the needle valve 12 is moved by air pressure to eject liquid from the nozzle 6. However, the method of ejecting liquid from the nozzle 6 is not limited to this, and liquid may be ejected from the nozzle 6 by a valve such as a diaphragm valve, a piston valve, or a screw valve, or by a piezoelectric element.

[0016] (nozzle) FIG. 3 is a cross-sectional view of the nozzle 6. As shown in FIG. 3, the nozzle 6 includes a nozzle body 6g, a liquid passage 6a, a valve seat 6b, a discharge port 6d for discharging the liquid, and an orifice 6c extending from the valve seat 6b to the discharge port 6d. The discharge port 6d is provided in a nozzle tip 6e. The liquid passage 6a is provided inside the nozzle body 6g of the nozzle 6. The nozzle body 6g may be made of a material such as SUS303. The nozzle tip 6e is provided at one end of the nozzle body 6g. The nozzle tip 6e may be made of a material such as zirconia-added alumina. In this embodiment, the nozzle tip 6e is fixed to the nozzle body 6g, but the nozzle tip 6e may be formed integrally with the nozzle body 6g. As shown in FIG. 3, a contact portion (guide) 14 is provided near the discharge port 6d. The contact portion 14 is preferably made of a material having excellent strength and toughness, such as zirconia.

[0017] FIG. 4 is a perspective view of the nozzle 6. In this embodiment, the contact portion 14 is formed in a substantially cylindrical shape (sleeve) that surrounds the nozzle tip 6e in a circumferential direction. The contact tip 14a of the contact portion 14 contacts the substrate to which the liquid is to be applied. The contact tip 14a of the contact portion 14 is provided with multiple notches 14b. The multiple notches 14b are provided so that the contact portion 14 does not interfere with the liquid applied to the substrate. However, depending on the application conditions, the contact portion 14 may not interfere with the liquid applied to the substrate. In such cases, the notches 14b may not be provided in the contact portion 14. The contact portion 14 may be provided so as to surround the entire periphery of the discharge port 6d, or may be provided in a part or multiple parts of the periphery of the discharge port 6d.

[0018] FIG. 5 is an enlarged cross-sectional view of the discharge port 6d of the nozzle 6. The contact tip 14a of the contact portion 14 extends from the discharge port 6d in the axial direction Z of the orifice 6c of the nozzle 6. The distance between the discharge port 6d and the contact tip 14a of the contact portion 14 in the axial direction Z is set to a predetermined distance (spacing) L according to specifications such as the viscosity of the liquid to be applied, the diameter of the liquid sphere, and the inner diameter of the orifice 6c. The tip of the orifice 6c may be formed as a thin tube (capillary) 6f that generates capillary action. The inner diameter (capillary 6f) of the tip of the orifice 6c of the nozzle 6 and the predetermined distance L are set arbitrarily according to the shape and size of the liquid to be applied. In this embodiment, the contact tip 14a of the contact portion 14 protrudes from the discharge port 6d in the discharge direction (axial direction Z) of the liquid discharged from the discharge port 6d. However, for example, when applying liquid to the inside of a groove, the contact tip 14a of the contact portion 14 may be recessed from the discharge port 6d in the discharge direction. That is, in the discharge direction (axial direction Z), the first distance L1 between the discharge port 6d and the surface (coating surface) 30a of the substrate (object to be coated) 30 may be different from the second distance L2 between the contact tip 14a of the contact portion 14 and the surface 30a of the substrate 30. The first distance L1 may be greater than or less than the second distance L2.

[0019] (robot) FIG. 6 is a diagram showing a robot 20 equipped with a dispenser 2. The dispenser 2 of the liquid discharge device 1 is equipped to the robot 20. The robot 20 has a table 21, a gantry 22, and a carrier 23. The table 21 supports a substrate 30 to which a liquid is to be applied. The gantry 22 is supported by the table 21 so as to be movable in the Y direction. The carrier 23 is supported by the gantry 22 so as to support the dispenser 2 and be movable in the X direction. The dispenser 2 is supported by the carrier 23 so as to be movable in the Z direction. In the embodiment shown in FIG. 6, the X direction indicates the front-rear direction, the Y direction indicates the left-right direction, and the Z direction indicates the up-down direction. The X direction, Y direction, and Z direction are perpendicular to each other. The table 21 may support the substrate 30 so as to be movable in the X direction, the Y direction, or both the X and Y directions.

[0020] The notch portion 14b shown in Figure 4 is preferably provided at the contact tip portion 14a in the direction of relative movement of the nozzle 6 and the substrate 30 so that the contact portion 14 does not interfere with the liquid applied to the substrate 30 when the nozzle 6 moves along the surface 30a of the substrate 30.

[0021] (Nozzle operation) FIG. 7 is a diagram showing the operation of the nozzle 6 according to this embodiment. First, the robot 20 moves the dispenser 2 to the position where the liquid is to be applied using the gantry 22 and carrier 23. As shown in FIG. 7(a), a liquid sphere 15 is formed at the outlet 6d of the nozzle 6. The control device 5 controls the air supply source 4 to control the movement of the needle valve 12, thereby forming the liquid sphere 15. The diameter of the liquid sphere 15 is set so that the liquid to be applied to the substrate 30 has a predetermined diameter (e.g., 200 μm). At this time, the liquid sphere 15 and the contact tip 14a of the contact portion 14 are separated from the surface 30a of the substrate 30.

[0022] Next, the dispenser 2 is moved downward in the Z direction by the carrier 23, and the nozzle 6 is lowered until the contact tip 14a of the contact portion 14 lightly contacts the surface 30a of the substrate 30, as shown in FIG. 7(b). The carrier 23 functions as an actuator that moves the nozzle 6 so that the contact tip 14a of the contact portion 14 contacts the surface 30a of the substrate 30. At this time, the processing distance WD between the discharge port 6d and the surface 30a becomes a predetermined distance L, and the liquid ball 15 contacts the surface 30a of the substrate (workpiece) 30. The predetermined distance is set so that the liquid applied from the discharge port 6d to the surface (workpiece) 30a will have a predetermined shape when the contact tip 14a of the contact portion 14 is in contact with the surface 30a of the substrate 30.

[0023] Finally, the dispenser 2 is moved upward in the Z direction by the carrier 23, and the contact tip 14a of the contact portion 14 is moved away from the surface 30a of the substrate 30, as shown in Figure 7(c). As a result, the liquid sphere 15 is moved away from the discharge port 6d and remains on the surface 30a, and the liquid 16 having the desired diameter is applied to the surface 30a.

[0024] According to this embodiment, the contact portion 14 is provided on the outside of the nozzle tip 6e of the nozzle 6, and the distance between the discharge port 6d and the contact tip 14a of the contact portion 14 is set to a predetermined distance L. As a result, even if the surface 30a is distorted or has some unevenness, the processing distance WD between the discharge port 6d and the surface 30a can always be maintained at the predetermined distance L, and liquid with a stable diameter can be applied to the surface 30a.

[0025] The processing distance WD between the discharge port 6d and the surface 30a is set according to conditions such as the viscosity of the liquid and the diameter of the liquid to be applied. The processing distance WD can be easily changed by changing the distance between the discharge port 6d and the contact tip 14a of the contact portion 14. For example, multiple nozzles 6 with different distances between the discharge port 6d and the contact tip 14a of the contact portion 14 may be prepared. The nozzle 6 according to this embodiment applies the liquid to the surface 30a by contacting and then separating from the surface 30a, and therefore can be called a stamping nozzle.

[0026] In this embodiment, the liquid is applied to the surface 30a in dots, but this is not limiting. The liquid may be continuously discharged from the discharge port 6d. For example, the liquid may be continuously discharged while the robot 20 moves the dispenser 2 along a predetermined path with the contact tip 14a of the contact portion 14 in contact with the surface 30a of the substrate 30.

[0027] According to this embodiment, the liquid can be applied finely using an inexpensive nozzle 6 without increasing the takt time.

[0028] The present invention is not limited to the above-described embodiments, and can be implemented in various other forms without departing from its characteristic features. Therefore, the above-described embodiments are merely illustrative in all respects and should not be interpreted as limiting. The scope of the present invention is defined by the claims and is not limited in any way by the text of the specification. Furthermore, all modifications and variations within the equivalent scope of the claims are within the scope of the present invention. [Explanation of symbols]

[0029] 6 Nozzle 6a...Liquid passage 6c···Orifice 6d...Discharge port 6e Nozzle tip 6g Nozzle body 14...Abutment part 14a...Abutting tip 30...Base material 30a...Surface L: Predetermined distance L1: First distance L2: Second distance

Claims

1. A nozzle body; a liquid passage provided inside the nozzle body; a nozzle tip provided at one end of the nozzle body; an orifice provided inside the nozzle tip portion so as to communicate with the liquid passage; a discharge port formed at a tip end of the orifice for discharging a liquid; an abutment portion formed as a sleeve surrounding the nozzle tip portion and the orifice, the abutment portion having an abutment tip portion and a notch portion provided in the abutment tip portion; Equipped with a first distance between the discharge port and a surface of the workpiece to be coated with the liquid in a discharge direction of the liquid discharged from the discharge port is greater than a second distance between the contact tip of the contact portion and the surface of the workpiece; the notch is provided in the contact tip so that the contact tip does not interfere with the liquid being applied to the workpiece when the nozzle body is moved relative to the workpiece, A nozzle characterized in that the distance between the discharge outlet and the contact tip is set to a predetermined distance so that the liquid applied from the discharge outlet to the surface of the workpiece will have a predetermined shape when the contact tip is in contact with the surface of the workpiece.

2. The notch portion has an end portion away from the abutting tip portion, The nozzle described in claim 1, characterized in that in the ejection direction of the liquid ejected from the ejection port, a third distance between the surface of the workpiece to which the liquid is applied and the end of the cutout portion is greater than the first distance between the surface of the workpiece to which the liquid is applied and the ejection port.

3. A nozzle as described in claim 1 or 2, characterized in that the nozzle body is made of a first material and the abutment portion is made of a second material different from the first material.

4. A liquid discharge device that discharges a liquid to apply the liquid to a surface of a coating object, A dispenser; a liquid source that supplies the liquid to the dispenser; a dispenser moving device that moves the dispenser in the front-rear direction, the left-right direction, and the up-down direction toward and away from the object to be coated; Equipped with The dispenser comprises: a dispenser body including a liquid inlet for receiving the liquid supplied from the liquid supply source and a liquid outlet for discharging the liquid; a nozzle attached to the dispenser body; Equipped with The nozzle is A nozzle body; a liquid passage provided inside the nozzle body and communicating with the liquid outlet of the dispenser body; a nozzle tip provided at one end of the nozzle body; an orifice provided inside the nozzle tip portion so as to communicate with the liquid passage; a discharge port formed at a tip end of the orifice for discharging the liquid; an abutment portion formed as a sleeve surrounding the nozzle tip portion and the orifice, the abutment portion having an abutment tip portion and a notch portion provided in the abutment tip portion; Equipped with a first distance between the surface of the workpiece and the discharge port in a discharge direction of the liquid discharged from the discharge port is greater than a second distance between the contact tip of the contact portion and the surface of the workpiece; the notch is provided in the contact tip so that the contact tip does not interfere with the liquid being applied to the workpiece when the nozzle body is moved relative to the workpiece, A liquid ejection device characterized in that the distance between the ejection outlet and the contact tip is set to a predetermined distance so that the liquid applied from the ejection outlet to the surface of the workpiece will have a predetermined shape when the contact tip is in contact with the surface of the workpiece by the dispenser moving device.

5. The notch portion has an end portion away from the abutting tip portion, A liquid ejection device as described in claim 4, characterized in that in the ejection direction of the liquid ejected from the ejection port, a third distance between the surface of the substrate to which the liquid is applied and the end of the cutout portion is greater than the first distance between the surface of the substrate to which the liquid is applied and the ejection port.

6. A liquid ejection device as described in claim 4 or 5, characterized in that the nozzle body is made of a first material, and the abutment portion is made of a second material different from the first material.

7. a valve seat provided at the entrance of the orifice of the nozzle; a needle valve movable between an open position away from the valve seat and a closed position in contact with the valve seat; a valve opening / closing mechanism that moves the needle valve between the open position and the closed position; 7. The liquid ejection device according to claim 4, further comprising:

8. The valve opening and closing mechanism includes: a piston chamber provided inside the dispenser; a piston fixed to one end of the needle valve and movable within the piston chamber; an air supply source that supplies pressurized air to the piston chamber to move the needle valve to the open position where the other end of the needle valve is separated from the valve seat; an elastic member that biases the needle valve toward the closed position where the other end of the needle valve abuts against the valve seat; The liquid ejection device according to claim 7 , further comprising:

9. Further comprising a piezoelectric element, 9. The liquid ejection device according to claim 4, wherein the liquid is ejected from the ejection opening of the nozzle by operation of the piezoelectric element.

Images