Pressure Sensor

Abstract

The pressure sensor (201) includes a first sensing module (203) including a first negative electrode (207) and a first support structure (208) spaced apart above the first negative electrode. A first flexible insulating layer (205) covers an upper surface (209) of the first support structure, and a first positive electrode (206) is spaced apart on a lower surface (210) of the first flexible insulating layer and distributed between the first supports. The second sensing module (204) includes a second negative electrode (213) disposed on the first flexible insulating layer, and a second support structure (214) is spaced apart above the second negative electrode. A second flexible insulating layer (211) covers an upper surface (216) of the second support structure. The second positive electrodes (212) are spaced apart on the lower surface (217) of the second flexible insulating layer and distributed among the second support structures, the first support structures being offset from the second support structures.

Description

[Technical Field]

[0001] [CROSS-REFERENCE TO RELATED APPLICATIONS] This application claims priority to Chinese Utility Model Patent No. ZL2020 20211296.2, filed on February 25, 2020, the entire contents of which are incorporated herein by reference. [Background technology]

[0002] The present invention relates to pressure sensors and touch screens including pressure sensors. Touch panels with integrated force sensors based on changes in electrical contact resistance or capacitance are known in the art and are becoming increasingly widely used. Such touch panels and their respective sensors are also often designed to have larger contact areas. Summary of the Invention [Problem to be solved by the invention]

[0003] However, unlike single-point pressure sensors, pressure sensors with large sensing areas require a support around the contact area so that the initial position of the film layer within the sensor remains constant. However, when a user touches the support area, the conductive positive electrode of the pressure sensor does not receive input pressure, creating a 'blind spot'. Therefore, pressure sensing over the entire area cannot be achieved. To solve this problem, there remains a need to provide a pressure sensor and corresponding touch screen. [Means for solving the problem]

[0004] [Brief description of the invention] According to a first aspect of the present invention, there is provided a method for manufacturing a semiconductor device, comprising: a first sensing module; a second sensing module positioned on the first sensing module; the first sensing module including: a first negative electrode; a plurality of first support structures spaced apart on the first negative electrode; a first flexible insulating layer disposed to cover an upper surface of each of the plurality of first support structures; and a plurality of first support structures spaced apart on a lower surface of the first flexible insulating layer. gap the second sensing module includes a plurality of first positive electrodes distributed on the first flexible insulating layer; a second negative electrode disposed on the first flexible insulating layer; a plurality of second support structures disposed at intervals on the second negative electrode; a second flexible insulating layer disposed to cover an upper surface of each of the plurality of second support structures; and a plurality of second support structures disposed at intervals on a lower surface of the second flexible insulating layer. gap a plurality of second positive electrodes distributed across the plurality of first support structures; wherein the plurality of first support structures are offset from the plurality of second support structures. [Brief explanation of the drawings]

[0005] [Figure 1] FIG. 1 shows an electronic device with an integrated touchscreen that includes a pressure sensor. [Figure 2] FIG. 2 is a schematic cross-sectional view of a pressure sensor provided according to one embodiment of the present invention. [Figure 3] FIG. 3 is an exploded schematic view of the pressure sensor of FIG. [Figure 4] FIG. 4 shows a pressure sensor according to the present invention when a force is applied. DETAILED DESCRIPTION OF THE INVENTION

[0006] Embodiments of the present invention will now be described, by way of example only, with reference to the drawings. The detailed embodiments illustrate the best mode known to the inventors and support the invention as claimed. However, they are merely exemplary and should not be used to interpret or limit the scope of the claims. Their purpose is to provide instruction to those skilled in the art. Elements and processes distinguished by ordinal phrases such as "first" or "second" do not necessarily define any order or ranking.

[0007] [Detailed Description of the Invention] (Figure 1) As shown in FIG. 1, the pressure sensor according to the present invention can be incorporated into electronic devices such as mobile phones. The embodiment of FIG. 1 shows a user 101 using an electronic device 102, where the electronic device 102 is a mobile phone. In an embodiment, the mobile phone 102 includes a touchscreen 103. Thus, the user 101 can use the mobile phone 102 in a conventional manner by applying pressure with a finger to operate the mobile phone 102 via the touchscreen 103. In accordance with the present invention, touchscreen 103 includes a pressure sensor having the characteristics of any one of pressure sensors 201 described with respect to FIGS.

[0008] (Figure 2) As will now be described with respect to FIGS. 2 and 3, an embodiment of the present invention provides a pressure sensor 201 that is integrated into the touchscreen 103 depicted in FIG. 2, pressure sensor 201 includes a substrate 202, a first sensing module 203, and a second sensing module 204. In an embodiment, first sensing module 203 includes a first flexible insulating layer 205, a plurality of first positive electrodes 206, a first negative electrode 207, and a plurality of first support structures 208.

[0009] In the embodiment, a first negative electrode 207 is disposed on the substrate 202, and a plurality of first support structures 208 are spaced apart on the first negative electrode 207. A first flexible insulating layer 205 is disposed to cover an upper surface 209 of the plurality of first support structures 208. A plurality of first positive electrodes 206 are spaced apart on a lower surface 210 of the first flexible insulating layer 205, and each of the plurality of positive electrodes 206 is distributed among a corresponding one of the plurality of first support structures 208.

[0010] The pressure sensor 201 further includes a second sensing module 204. The second sensing module 204 includes a second flexible insulating layer 211, a plurality of second positive electrodes 212, a second negative electrode 213, and a plurality of second support structures 214. The second flexible insulating layer 211 has a first negative electrode 213 disposed on the first flexible insulating layer 205 on a top surface 215 of the first flexible insulating layer 205. The second flexible insulating layer 211 has a plurality of second positive electrodes 212 disposed in spaced relation thereto, and the second flexible insulating layer 211 covers a top surface 216 of the plurality of second support structures 215. The second flexible insulating layer 211 has a second positive electrode 212 disposed in spaced relation thereto on a bottom surface 217 of the second flexible insulating layer 211. The second positive electrodes 206 are further distributed among the plurality of second support structures 214.

[0011] The plurality of first support structures 208 and the plurality of second support structures 214 are staggered or offset. That is, each second support structure 214 corresponds to and is aligned with one of the first positive electrodes 206. For example, second support structure 214C is aligned with first positive electrode 206B. Furthermore, each second positive electrode 212 corresponds to and is aligned with a corresponding first support structure 208. For example, second positive electrode 212B is aligned with first support structure 208B. In the embodiment of Figures 2 and 3, the number of the plurality of first positive electrodes 206, the number of the plurality of first support structures 208, the number of the plurality of second positive electrodes 212, and the number of the plurality of second support structures 214 are multiple and substantially the same.

[0012] In one embodiment, the first support structure 208 and the second positive electrode 212 are positioned directly across from each other, and the second support structure 214 and the first positive electrode 206 are positioned directly across from each other, with the non-sensing area of ​​each becoming a sensing area. In an embodiment, each first positive electrode 206 is Located in the gap between the two Similarly, each second positive electrode 212 is the 2 support structure 214 Located in the gap between the two In one embodiment, the width of the first positive electrode 206 is smaller than the gap distance between the two first support structures 208. Similarly, the width of each second positive electrode 212 is smaller than the gap distance between the two second support structures 214. In an embodiment, the first support structure and the second support structure comprise an adhesive material or glue. In an alternative embodiment, either the first support structure or the second support structure comprises an alternative gasket material.

[0013] (Figure 3) Figure 3 further illustrates in a schematic exploded view pressure sensor 201. It will be understood that the descriptions of pressure sensor 201 in Figures 2 and 3 relate to the same pressure sensor and all numerals are used to relate to the same features and components. 2 and 3, the first negative electrode 207 includes a first negative electrode metal layer 301 and a first elastic conductive layer 302. The first negative electrode metal layer 301 is disposed on the substrate 202. The first elastic conductive layer 302 is disposed on the first negative electrode metal layer 301, and a plurality of first support structures 208 are disposed on the first elastic conductive layer 302 at intervals as described above.

[0014] Similarly, the second negative electrode 213 includes a second negative electrode metal layer 303 and a second elastic conductive layer 304. The second negative electrode metal layer 303 is disposed on the upper surface 215 of the first flexible insulating layer 205, and the second elastic conductive layer 304 is disposed on the second elastic conductive layer 304. A plurality of second support structures 214 are disposed at intervals on the second elastic conductive layer 304. In one embodiment, the plurality of first support structures 208 and the plurality of second support structures 215 are colloids. In one embodiment, the first elastic conductive layer 302 and the second elastic conductive layer 304 are compressible conductors. In this particular embodiment, the first elastic conductive layer 302 and the first negative electrode metal layer 301 are separated by a predetermined distance. Additionally, the second elastic conductive layer 304 is separated from the second negative electrode metal layer 303 by a predetermined distance such that the first elastic conductive layer 302 and the second elastic conductive layer 304 are subjected to a force. In this manner, when a force is applied, the first negative electrode metal layer 301 and the second negative electrode metal layer 303 come together.

[0015] In one embodiment, the first elastic conductive layer 302 and the second elastic conductive layer 304 are incompressible conductors, and each elastic conductive layer 302, 304 can be in direct contact with a corresponding negative electrode metal layer. In one embodiment, each elastic conductive layer 302, 304 comprises a compressible elastic conductor such that as the applied force increases, the contact area increases, thereby affecting the applied force. In a particular embodiment, the material of the plurality of first positive electrodes 206, the first negative electrode metal layer 301, the plurality of second positive electrodes 212, and the second negative electrode metal layer 303 each includes silver.

[0016] (Figure 4) In previously known applications, existing pressure sensors with large contact areas effectively have a non-sensing area. When a user touches the support structure of a pressure sensor in an existing single-layer sensor, the positive conductive electrode is not pushed down when force is applied, and the positive conductive electrode cannot contact the corresponding negative conductive electrode. This means that no electrical path is formed, and the pressure sensor cannot respond accurately.

[0017] In contrast, the pressure sensor of the claimed invention includes two sensing modules 203 and 204 such that the first positive electrode 206 of the first sensing module 203, the second support structure 214 of the second sensing module 204, and the first support structure 208 of the first sensing module 203 are opposed to the second positive electrode 212 of the second sensing module 204.

[0018] 4 illustrates this arrangement and shows the response of pressure sensor 201 when a force is applied by a user's finger 401. In an embodiment, the finger of user 101 applies a force to second flexible insulating layer 211 of pressure sensor 201. When the applied pressure contacts an area on second flexible insulating layer 212 corresponding to second positive electrode 212, the external pressure compresses second positive electrode 212C, bringing second positive electrode 212C into contact with second negative electrode 213. When second positive electrode 212C and second negative electrode 213 come into contact, pressure sensor 201 outputs an electrical resistance signal. As the electrical contact resistance changes, the output electrical signal reflects the force applied to the sensing area.

[0019] When the applied force is transmitted to the second flexible insulating layer 211 corresponding to the second support structure 214, the applied external pressure pushes down the second support structure 214D. Because the second support structure 214 transmits at least a portion of the applied force, the first positive electrode 206C located below the second support structure 214D receives the pressure transmitted by the second support structure 214D. In this manner, the first positive electrode 206C and the first negative electrode 207 can be brought into contact. When the first negative electrode 207 is activated, the pressure sensor 201 outputs a resistance signal. Again, as the electrical contact resistance output changes, the output electrical signal reflects the force applied to the sensing area.

[0020] In the pressure sensor of the present invention, the two-layer sensing module means that the multiple first support structures 208 of the first sensing module 203 are offset from the multiple second support structures 214 of the second sensing module 204 so that a user can apply force to one or more of the second support structures 214. Because the second support structures 214 are positioned under the second flexible insulating layer 212, the second support structures 214 transfer at least a portion of the force to the first positive electrode 206 located on the first sensing module 203 after stress is applied to the second support structures 214. When the second negative electrode 213 contacts and becomes conductive, this solves the problem that the existing pressure sensor of the support structure is a non-sensing area of ​​a large-scale pressure sensor. This ensures that the full range of the pressure sensor can be used, even when the user cannot easily identify the blind spot when using the pressure sensor.

Claims

1. a first sensing module and a second sensing module located on the first sensing module; the first sensing module: a first negative electrode; a plurality of first support structures spaced apart on the first negative electrode; a first flexible insulating layer disposed over a top surface of each of the plurality of first support structures; and a plurality of first positive electrodes spaced apart on a lower surface of the first flexible insulating layer and distributed in gaps between the plurality of first support structures; the second sensing module: a second negative electrode disposed on the first flexible insulating layer; a plurality of second support structures disposed at intervals on the second negative electrode; a second flexible insulating layer disposed over an upper surface of each of the plurality of second support structures; a plurality of second positive electrodes spaced apart on a lower surface of the second flexible insulating layer and distributed in gaps between the plurality of second support structures; the plurality of first support structures are offset from the plurality of second support structures; Pressure sensor.

2. The pressure sensor of claim 1 , further comprising a substrate, the first sensing module being located on the substrate.

3. The pressure sensor of claim 2 , wherein the first negative electrode is disposed on the substrate.

4. 4. The pressure sensor according to claim 2, wherein the first negative electrode comprises a first negative electrode metal layer and a first elastic conductive layer.

5. the first negative electrode metal layer is disposed on the substrate; and the first elastic conductive layer is disposed on the first negative electrode metal layer; and the plurality of first support structures are spaced apart on the first elastic conductive layer; 5. The pressure sensor according to claim 4.

6. 6. The pressure sensor according to claim 1, wherein the second negative electrode includes a second negative electrode metal layer and a second elastic conductive layer.

7. the second negative electrode metal layer is disposed on the top surface of the first flexible insulating layer; and the second elastic conductive layer is disposed on the second negative electrode metal layer; and the plurality of second support structures are spaced apart on the second elastic conductive layer; 7. The pressure sensor according to claim 6.

8. the first negative electrode includes a first elastic conductive layer and the second negative electrode includes a second elastic layer; and wherein when either one of the elastic conductive layers is subjected to an applied force, the contact area of ​​the elastic conductive layer increases.

4. The pressure sensor according to claim 1.

9. The pressure sensor of claim 1 , wherein the first support structure and the second support structure comprise a colloidal material.

10. The pressure sensor of claim 1 , wherein the plurality of first support structures are located directly opposite the plurality of second positive electrodes.

11. The pressure sensor of claim 1 , wherein the plurality of second support structures are located directly opposite the plurality of first positive electrodes.

12. a width of each of the first positive electrodes is less than a width of a gap between two of the plurality of first support structures; and a width of the second positive electrode is smaller than a width of a gap between two of the plurality of second support structures; The pressure sensor according to claim 11.

13. The pressure sensor according to claim 2 , wherein the first negative electrode is disposed on the substrate.

14. A touchscreen including a pressure sensor according to any one of claims 1 to 13.

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