Component mounting device and tool checking method

The component mounting device uses a control system with image capture and pattern matching to verify correct tool attachment, addressing the issue of improper tool attachment in ultrasonic horn systems and preventing defective products.

JP7780740B2Active Publication Date: 2025-12-05PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD
View PDF 3 Cites 0 Cited by

Patent Information

Application Number
JP2021182235
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Filing Date
2021-11-09
Publication Date
2025-12-05
Estimated Expiration
2041-11-09

AI Technical Summary

Technical Problem

In component mounting devices using ultrasonic horns, manual attachment of tools can lead to incorrect tools being attached, resulting in improper component mounting and defective products.

Method used

A component mounting device equipped with a control system that includes a storage unit for registered tool sizes, an imaging unit for capturing tool images, a pattern matching unit for template generation, and a determination unit to verify the correct tool attachment by comparing measured tool dimensions with registered values.

Benefits of technology

Prevents incorrect tool attachment during component mounting, ensuring proper tool usage and reducing the production of defective products.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure 0007780740000001
    Figure 0007780740000001
  • Figure 0007780740000002
    Figure 0007780740000002
  • Figure 0007780740000003
    Figure 0007780740000003
Patent Text Reader

Abstract

To provide a component mounting device and a tool confirmation method with which it is possible to prevent a situation where component mounting work is carried out while a tool, which is not the tool that should be attached, is attached to a mounting head.SOLUTION: A tool confirmation method includes: reading, when a tool is attached to a mounting head, the size of a tool that should be attached to the mounting head (registered tool size) from a storage unit in which said size is stored (step ST3); capturing an image of the tool attached to the mounting head and acquiring a tool image which is the captured image (step ST4); measuring the size of the tool attached to the mounting head on the basis of the acquired tool image (step ST7); and determining, on the basis of the measured tool size and the registered tool size that is read out, whether or not the tool attached to the mounting head is the same as the tool that should be attached to the mounting head (steps ST9 to ST 11).SELECTED DRAWING: Figure 15
Need to check novelty before this filing date? Find Prior Art

Description

[Technical Field]

[0001] The present invention relates to a component mounting apparatus that holds components with a tool attached to a mounting head and mounts them on a board, and a tool confirmation method for the component mounting apparatus. [Background technology]

[0002] A die bonder, which mounts components by pressing them against a substrate, has been known as one type of component mounting device. Another type of die bonder is known in which a bonding tool (hereinafter referred to as "tool") consisting of a nozzle is attached to an ultrasonic horn, and the tool is brought close to the substrate while ultrasonic vibrations are applied from the ultrasonic horn to the component picked up by the tool, thereby mounting the component (see, for example, Patent Document 1 listed below). In this case, a tool of a size corresponding to the shape and size of the component is used, and the tool is manually attached to the mounting head or replaced by an operator. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2005-235817 Summary of the Invention [Problem to be solved by the invention]

[0004] However, in cases where tools are manually attached to the mounting head, such as in the case of a die bonder using an ultrasonic horn, it is possible that an operator may mistakenly attach a tool other than the one that should be attached. If component mounting is performed with a tool other than the one that should be attached attached to the mounting head, the components may not be properly mounted on the board, resulting in the production of defective products.

[0005] Therefore, an object of the present invention is to provide a component mounting device and a tool checking method that can prevent a situation in which component mounting work is performed with a tool other than the tool that should be mounted on the mounting head. [Means for solving the problem]

[0006] The component mounting device of the present invention is Consists of a nozzle and has suction holes A component mounting apparatus that holds components with a tool and mounts them on a board, and generation data for generating a template for pattern matching having a shape corresponding to the suction hole of the tool to be attached to the mounting head. and a storage unit storing the size of the tool to be attached to the attachment head when the tool is attached to the attachment head. and the generated data. a reading unit that reads out the tool information from the storage unit; and an imaging unit that captures an image of the tool attached to the mounting head. a pattern matching execution unit that generates the template from the generated data and executes pattern matching to check whether a portion matching the template is detected in the image; a determination unit that determines that the tool attached to the mounting head is not the same as the tool that should be attached to the mounting head when a portion matching the template is not detected in the image by the pattern matching execution unit; and a determination unit that determines that the tool attached to the mounting head is not the same as the tool that should be attached to the mounting head when a portion matching the template is detected in the image by the pattern matching execution unit. before Recorded picture a measuring unit that measures the size of the tool attached to the mounting head based on the image; The determination unit comprises: and determining whether or not the tool attached to the mounting head is the same as the tool that should be attached to the mounting head based on the size of the tool measured by the measuring unit and the size of the tool read by the reading unit. Ru, Equipped with.

[0007] The tool checking method of the present invention involves Consists of a nozzle and has suction holes A tool confirmation method for a component mounting apparatus that holds components with a tool and mounts them on a board, comprising: determining the size of the tool to be mounted on the mounting head when the tool is mounted on the mounting head; and generation data for generating a template for pattern matching having a shape corresponding to the suction hole of the tool to be attached to the mounting head. This is remembered Taki a reading step of reading from a memory unit; and an image acquiring step of capturing an image of the tool attached to the mounting head. a pattern matching execution step of generating the template from the generated data and executing pattern matching to check whether a portion matching the template is detected in the image of the tool acquired in the image acquisition step; a first determination step of determining that the tool attached to the mounting head is not the same as the tool that should be attached to the mounting head if a portion matching the template is not detected in the image in the pattern matching execution step; and a second determination step of determining that the tool attached to the mounting head is not the same as the tool that should be attached to the mounting head if a portion matching the template is detected in the image in the pattern matching execution step. before Recorded picturea measuring step of measuring the size of the tool attached to the mounting head based on the image; and determining whether or not the tool attached to the mounting head is the same as the tool that should be attached to the mounting head based on the size of the tool measured in the measuring step and the size of the tool read out in the reading step. No. 2 and a determining step. [Effects of the Invention]

[0008] According to the present invention, it is possible to prevent a situation in which component mounting work is performed with a tool different from the tool that should originally be mounted attached. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a perspective view of a component mounting device according to an embodiment of the present invention; [Figure 2] 1 is a side view of a component mounting apparatus according to an embodiment of the present invention; [Figure 3] FIG. 1 is a side view of a portion of a component mounting apparatus according to an embodiment of the present invention. [Figure 4] 1 is a bottom perspective view of a tool provided in a component mounting apparatus according to an embodiment of the present invention; FIG. [Figure 5] FIG. 2 is a block diagram showing a control system of a component mounting device according to an embodiment of the present invention. [Figure 6] FIG. 10 is a diagram showing an example of registered tool sizes stored in a storage unit included in the component mounting device according to the embodiment of the present invention. [Figure 7] FIG. 1 is a side view of a portion of a component mounting apparatus according to an embodiment of the present invention. [Figure 8] 1A and 1B are diagrams illustrating a procedure for measuring the size of a tool attached to a component mounting device according to an embodiment of the present invention. [Figure 9] 1A and 1B are diagrams illustrating a procedure for measuring the size of a tool attached to a component mounting device according to an embodiment of the present invention. [Figure 10] 1A and 1B are diagrams illustrating a procedure for measuring the size of a tool attached to a component mounting device according to an embodiment of the present invention. [Figure 11] 1A and 1B are diagrams illustrating a procedure for measuring the size of a tool attached to a component mounting device according to an embodiment of the present invention. [Figure 12] 1A and 1B are diagrams illustrating a procedure for measuring the size of a tool attached to a component mounting device according to an embodiment of the present invention. [Figure 13] 1A and 1B are diagrams illustrating a procedure for measuring the size of a tool attached to a component mounting device according to an embodiment of the present invention. [Figure 14] 1A and 1B are diagrams showing an example of a determination result made by a determination unit included in a component mounting device according to an embodiment of the present invention. [Figure 15] A flowchart showing the flow of a tool checking method by a component mounting device according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0010] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. Figures 1 and 2 show a component mounting apparatus 1 according to an embodiment of the present invention. The component mounting apparatus 1 is a die bonder (flip chip bonder) that mounts components BH on a carried-in substrate KB by flip chip bonding. For convenience of explanation, the horizontal direction in which the substrate KB is transported is defined as the X direction (the left-right direction as seen from the operator OP), and the horizontal direction perpendicular to the X direction is defined as the Y direction (the front-rear direction as seen from the operator OP). The up-down direction is defined as the Z direction.

[0011] 1 and 2, a beam member 12 extending in the Y direction is provided in an area on the right side of the base 11 as seen from the operator OP. The beam member 12 is supported by two support columns 13 aligned in the Y direction. A substrate supply stage 14 is provided in an area on the rear side of the base 11 (the far side as seen from the operator OP). A transport conveyor 15 that transports substrates KB in the X direction is provided on the upper surface of the substrate supply stage 14.

[0012] A component supply stage 16 is provided in the front area (the front side as seen from the operator OP) on the base 11. The component supply stage 16 is supported in a horizontal position by a plurality of support columns 17 extending in the Z direction. The support columns 17 are erected on a base table 19 attached to a component supply stage moving mechanism 18 consisting of an XY table. Therefore, the component supply stage 16 can be freely moved in the XY plane (horizontal plane) by the component supply stage moving mechanism 18.

[0013] A large number of parts BH, which are formed by cutting a semiconductor wafer Wf into a grid pattern, are held on the part supply stage 16 via an adhesive sheet-like member 20. An ejector 21 is provided below the sheet-like member 20, with upwardly facing push-up pins 21P that are movable in the vertical direction (FIG. 2).

[0014] 1 and 2, a first camera 22 is provided with its imaging field of view facing downward above the component supply stage 16. The imaging optical axis LJ of the first camera 22 coincides with the axis extending in the driving direction (Z direction) of the thrust pin 21P of the ejector 21 (FIG. 2).

[0015] 1 and 2, a second camera installation table 23 is provided extending in the X direction in the area between the board supply stage 14 and the component supply stage 16. A second camera 24 is provided on the second camera installation table 23 with its imaging field of view facing upward.

[0016] 1, a pickup head moving mechanism 25 is provided below the beam member 12. The pickup head moving mechanism 25 has a pickup head holding arm 26 that extends and protrudes in the X direction (leftward), and a pickup head 27 is provided at the tip (left end) of the pickup head holding arm 26. A nozzle 28 is attached to the pickup head 27.

[0017] 1 and 2, the pickup head moving mechanism 25 moves the pickup head holding arm 26 in the Y and Z directions. The pickup head moving mechanism 25 also rotates the pickup head holding arm 26 around an axis along the X direction (X axis) to turn the pickup head 27 (i.e., the nozzle 28) upside down.

[0018] 1 and 2, a slide plate 31 is provided on the left surface of the beam member 12. The slide plate 31 is moved along the beam member 12 (i.e., in the Y direction) by a slide plate moving mechanism 32 provided on the left surface of the beam member 12. A mounting head 34 is attached to the slide plate 31 via a mounting head lifting mechanism 33. The mounting head 34 is movable (lifted and lowered) in the Z direction by the mounting head lifting mechanism 33.

[0019] 3, an ultrasonic horn 40 is attached to the bottom of the mounting head 34 via a holder 35. The ultrasonic horn 40 has an ultrasonic vibrator 41 on its side, and a bonding tool (tool 42) extending downward from its bottom surface. The tool 42 is detachable from the ultrasonic vibrator 41.

[0020] The tool 42 consists of a nozzle with a rectangular end face (hereinafter referred to as the "tool end face 42T") at its tip (the lower end when attached to the ultrasonic horn 40), and has a circular suction hole 42H in its center (Fig. 4). The tool 42 is manually attached to the ultrasonic horn 40 by an operator OP. When the tool 42 is attached to the ultrasonic horn 40, the four sides of the rectangle of the tool end face 42T extend along the X or Y direction, as shown in Fig. 4.

[0021] 3, an internal conduit 43 connected to the suction hole 42H is formed inside the ultrasonic horn 40. The internal conduit 43 is connected to a switching valve 45 via an external conduit 44 extending outside the ultrasonic horn 40. The switching valve 45 is connected to a negative pressure source 46 and a positive pressure source 47. The ultrasonic vibrator 41 is driven by a driver 48. The driver 48 is connected to a control device 50.

[0022] 5, the control device 50 controls the transport operation of the transport conveyor 15 to transport the board KB and position it at a predetermined position. The control device 50 controls the component supply stage moving mechanism 18 to move the component supply stage 16 (i.e., the component BH) in the XY plane. The control device 50 controls the ejector 21. The ejector 21 is controlled by the control device 50 to move the push-up pin 21P upward.

[0023] The control device 50 also controls the pickup head moving mechanism 25 to move the pickup head holding arm 26 in the X and Z directions and rotate it about the X axis. The control device 50 controls the slide plate moving mechanism 32 to move the slide plate 31 (i.e., the mounting head 34) in the Y direction. The control device 50 controls the mounting head lifting mechanism 33 to lift and lower the mounting head 34.

[0024] The control device 50 controls the switching valve 45 to generate negative or positive pressure in the nozzle 28 and the tool 42. The negative pressure acts as a component suction force that causes the nozzle 28 or the tool 42 to suction the component BH, and the positive pressure acts as a blow pressure that releases the component BH that has been sucked by the nozzle 28 or the tool 42.

[0025] The control device 50 controls the driver 48 to drive the ultrasonic vibrator 41. When the ultrasonic vibrator 41 is driven, the tool 42 attached to the ultrasonic horn 40 vibrates ultrasonically.

[0026] The control device 50 controls the imaging operation of the first camera 22. The first camera 22 captures an image of the component BH on the component supply stage 16 from above. The control device 50 processes the image captured by the first camera 22 to recognize the component BH.

[0027] The control device 50 controls the imaging operation of the second camera 24. The second camera 24 images, from below, the component BH that the placement head 34 has picked up via the tool 42 attached to the ultrasonic horn 40, and also images, from below, the ultrasonic horn 40 attached to the placement head 34. The control device 50 processes the images captured by the second camera 24 to recognize the component BH or to confirm the tool 42. Here, "confirming the tool 42" refers to confirming whether the tool 42 attached to the placement head 34 (or more directly to the ultrasonic horn 40) is the tool 42 that should be attached to the placement head 34 (described below).

[0028] When component BH is to be placed on board KB in component mounting device 1, control device 50 first controls component supply stage moving mechanism 18 to move component supply stage 16 within the XY plane, thereby positioning component BH to be placed on board KB on imaging optical axis LJ of first camera 22 (also above ejector 21). At this stage, component BH on component supply stage 16 faces upward with its circuit formation surface facing upward.

[0029] The control device 50 positions the component BH on the imaging optical axis LJ of the first camera 22, and then causes the first camera 22 to capture an image of the component BH, thereby recognizing the component BH. After recognizing the component BH, the control device 50 controls the ejector 21 to move the ejection pins 21P upward. As a result, the component BH on the component supply stage 16 is pushed up by the ejection pins 21P and separated from the sheet-like material 20.

[0030] When the component BH is pushed up by the ejector 21, the control device 50 activates the pickup head moving mechanism 25 to position the nozzle 28 of the pickup head 27 above the component BH (arrow A shown in FIG. 2). Then, a negative pressure (adsorption force) is applied to the nozzle 28, causing it to pick up the component BH.

[0031] After component BH is picked up by pickup head 27, control device 50 rotates pickup head 27 around the X axis (arrow B in FIG. 2) to turn component BH upside down. This positions component BH with its circuit-forming surface facing downward. After component BH has been turned upside down, control device 50 controls slide plate movement mechanism 32 and mounting head lifting mechanism 33 to position mounting head 34 above pickup head 27 (i.e., above component BH) (arrow C in FIG. 2).

[0032] When the mounting head 34 is positioned above the pickup head 27, the control device 50 stops supplying negative pressure to the nozzle 28 of the pickup head 27 and applies negative pressure to the tool 42 of the ultrasonic horn 40 to pick up the component BH. This transfers the component BH from the pickup head 27 to the mounting head 34.

[0033] Once component BH has been transferred from pickup head 27 to mounting head 34, control device 50 moves mounting head 34 to position component BH picked up by tool 42 above second camera 24. Then, second camera 24 captures an image of component BH from below, and component BH is recognized based on the image of component BH acquired by the image capture.

[0034] After the control device 50 recognizes the component BH picked up by the tool 42, it moves the mounting head 34 above the board KB (arrow D shown in FIG. 2). Once the mounting head 34 has moved above the board KB, it lowers the tool 42 (ultrasonic head 40) and applies blow pressure to the tool 42 while pressing the component BH against the board KB, thereby mounting the component BH on the board KB.

[0035] The control device 50 repeats the above-described series of steps from picking up the components BH to mounting them on the board KB. Then, when all the components BH to be mounted on the board KB have been mounted on the board KB, the transport conveyor 15 is operated to transport the board KB out of the component mounting device 1. This completes the component mounting operation for one board KB.

[0036] In the component mounting apparatus 1 of this embodiment, in the setup work before the start of the component mounting work, the operator OP attaches an appropriate tool 42 to the ultrasonic horn 40. The tool 42 that the operator OP should attach to the mounting head 34 is determined in advance based on the production program to be executed, and is shown to the operator OP via the touch panel 58.

[0037] The operator OP attaches the tool 42 indicated via the touch panel 58 to the ultrasonic horn 40. If the tool 42 attached by the operator OP at this time is not the tool 42 that should be attached to the mounting head 34, i.e., if a tool 42 different from the tool 42 indicated to the operator OP via the touch panel 58 is attached to the mounting head 34, then the component BH will not be correctly mounted on the board, and there is a risk that a defective product will be produced.

[0038] For this reason, the component mounting apparatus 1 of this embodiment is capable of performing tool confirmation to confirm whether the tool 42 attached by the operator OP is the tool 42 that should be attached to the mounting head 34. This function will be explained below.

[0039] 5, the control device 50 includes a storage unit 51, a readout unit 52, an imaging execution unit 53, a pattern matching execution unit 54, a measurement unit 55, a determination unit 56, and a notification control unit 57. A touch panel 58 serving as an input / output device is connected to the control device 50.

[0040] A plurality of tools 42 that may be attached to the mounting head 34 are pre-registered (stored) in the memory unit 51. The memory unit 51 also stores size data for each of the registered tools 42 as a "registered tool size."

[0041] The registered tool size includes at least the horizontal length x and vertical length y of the rectangular shape of the tool end face 42T. Here, the horizontal length x of the tool end face 42T refers to the length of the side along the X direction when the tool 42 is attached to the mounting head 34 (ultrasonic horn 40). Furthermore, the vertical length y of the tool end face 42T refers to the length of the side along the Y direction when the tool 42 is attached to the mounting head 34 (FIG. 4).

[0042] 6, for example, the registered tool sizes are stored as xr(n) (n=1, 2, 3, . . . ) which are the registered tool sizes (registered values) of the horizontal side length x shown in FIG. 4 and yr(n) (n=1, 2, 3, . . . ) which are the registered tool sizes (registered values) of the vertical side length y shown in FIG. 4 for a plurality of tools 42 corresponding to tool numbers #1, #2, #3, . . . (FIG. 6). The storage unit 51 also stores generation data (here, inner diameters Rr(n) (n=1, 2, 3, . . . ) of the suction holes 42H) which are data for generating a pattern matching template having a circular hole shape corresponding to the suction holes 42H opened in the end faces (tool end faces 42T) of the four types of registered tools 42.

[0043] After the tool 42 to be attached to the mounting head 34 is indicated to the operator OP by being displayed on the touch panel 58, for example, the reading unit 52 reads out the template generation data and registered tool size corresponding to the suction hole 42H of the tool 42. For example, in the example of Fig. 6, after the operator OP indicates one of the tools 42 with tool numbers #1, #2, #3, ... as the tool 42 to be attached to the mounting head 34, the template generation data and registered tool size of the tool 42 are read out by the reading unit 52.

[0044] The imaging execution unit 53 positions the tool 42 attached to the mounting head 34 by the operator OP above the second camera 24 (FIG. 7), and then causes the second camera 24 to capture an image of the tool 42 from below, thereby acquiring an image of the tool end face 42T of the tool (hereinafter referred to as the "tool image GZ"; FIG. 8(a)). In this embodiment, imaging of the tool 42 by the second camera 24 acquires a tool image GZ in which the tool end face 42T is bright and the surrounding background is dark, as shown in FIG. 8(a). In this embodiment, the second camera 24 and the imaging execution unit 53 of the control device 50 thus constitute an imaging unit 61 that captures an image of the tool 42 attached to the mounting head 34 and acquires an image of the tool 42 (tool image GZ) (FIG. 5).

[0045] The pattern matching execution unit 54 generates a circular template from the generated data (inner diameter Rr) read by the readout unit 52, and then uses the template to perform pattern matching on the entire tool image GZ. If a circular portion of a size that matches the template is detected in the tool image GZ, the pattern matching execution unit 54 determines the center position CT ( FIG. 8(a) ) of the detected circular portion and then issues a measurement instruction (an instruction to execute measurement) to the measurement unit 55. On the other hand, if the pattern matching execution unit 54 does not detect a portion in the tool image GZ that matches the template, it determines that the tool 42 attached to the mounting head 34 is different from the tool 42 that should be attached to the mounting head 34, and does not issue a measurement instruction to the measurement unit 55.

[0046] When receiving a measurement instruction from the pattern matching execution unit 54, the measurement unit 55 measures the outer dimensions of the rectangular shape of the tool 42 attached to the mounting head 34 based on the tool image GZ. Specifically, as shown in FIG. 8( a), the measurement unit 55 measures the lengths of the four sides of the rectangular shape of the tool end face 42T, i.e., the length x1S of the side extending in the X direction on the upper side of the tool image GZ (referred to as the "upper side x1"), the length x2S of the side extending in the X direction on the lower side (referred to as the "lower side x2"), the length y1S of the side extending in the Y direction on the right side (referred to as the "right side y1"), and the length y2S of the side extending in the Y direction on the left side (referred to as the "left side y2"). Hereinafter, the length x1S of the upper side x1, the length x2S of the lower side x2, the length y1S of the right side y1, and the length y2S of the left side y2 of the tool 42 measured based on the tool image GZ will be referred to as "measurement values."

[0047] The measurement unit 55 measures the four sides of the tool end face 42T, i.e., the length x1S of the top side x1, the length x2S of the bottom side x2, the length y1S of the right side y1, and the length y2S of the left side y2 of the tool end face 42T, for example, by the following procedure. That is, the measurement unit 55 first sets an upper side detection region R1 in an area expected to include a portion of the top side x1 of the rectangular shape of the tool 42, based on the center position CT of the circular shape of the template identified in the tool image GZ, and sets a lower side detection region R2 in an area expected to include a portion of the bottom side x2 of the rectangular shape of the tool 42 ( FIG. 8(b) ). The measurement unit 55 also sets a right side detection region R3 in an area expected to include a portion of the right side y1 of the rectangular shape of the tool 42, based on the center position CT of the circular shape of the template identified in the tool image GZ, and sets a left side detection region R4 in an area expected to include a portion of the left side y2 of the rectangular shape of the tool 42 ( FIG. 8(b) ).

[0048] In Figure 9(a), the top edge detection region R1 is composed of multiple strip-shaped regions TR subdivided in the X direction. The measurement unit 55 inspects the pixel brightness of each strip-shaped region TR constituting the set top edge detection region R1 in a direction from the outside to the inside of the tool end face 42T (from the top to the bottom of the page in Figure 9(a); see arrow S1 in the figure), and detects the position where the pixel brightness changes from dark to light as the light-dark transition point PT (Figure 9(a)). After detecting the light-dark transition points PT in all strip-shaped regions TR within the top edge detection region R1 in this way, linear regression is performed on all detected light-dark transition points PT to obtain a line x1L corresponding to the top edge x1 of the tool end face 42T (Figure 9(b)).

[0049] In Figure 10(a), the bottom edge detection region R2 is composed of multiple strip-shaped regions TR subdivided in the X direction. The measurement unit 55 inspects the pixel brightness of each strip-shaped region TR constituting the set bottom edge detection region R2 in a direction from the outside to the inside of the tool end face 42T (from the bottom to the top of the page in Figure 10(a); see arrow S2 in the figure) and detects the position where the pixel brightness changes from dark to light as the light-dark transition point PT (Figure 10(a)). After detecting the light-dark transition points PT in all strip-shaped regions TR within the bottom edge detection region R2 in this way, linear regression is performed on all detected light-dark transition points PT to obtain a line x2L corresponding to the bottom edge x2 of the tool end face 42T (Figure 10(b)).

[0050] In FIG. 11(a), the right-side detection region R3 is composed of multiple rectangular regions TR subdivided in the Y direction. The measurement unit 55 inspects the pixel brightness of each rectangular region TR constituting the set right-side detection region R3 in a direction from the outside to the inside of the tool end face 42T (from right to left on the paper in FIG. 11(a); see arrow S3 in the figure). The measurement unit 55 detects the position where the pixel brightness changes from dark to light as the light-dark transition point PT (FIG. 11(a)). After detecting the light-dark transition points PT in all rectangular regions TR within the right-side detection region R3 in this way, linear regression is performed on all detected light-dark transition points PT to obtain a straight line y1L corresponding to the right side y1 of the tool end face 42T (FIG. 11(b)).

[0051] In FIG. 12(a), the left-side detection region R4 is composed of multiple rectangular regions TR subdivided in the Y direction. The measurement unit 55 inspects the pixel brightness of each rectangular region TR constituting the set left-side detection region R4 in a direction from the outside to the inside of the tool end face 42T (from left to right on the paper in FIG. 12(a); see arrow S4 in the figure), and detects the position where the pixel brightness changes from dark to light as the light-dark transition point PT (FIG. 12(a)). After detecting the light-dark transition points PT in all rectangular regions TR within the left-side detection region R4 in this way, linear regression is performed on all detected light-dark transition points PT to obtain a line y2L corresponding to the left side y2 of the tool end face 42T (FIG. 12(b)).

[0052] Once the four straight lines x1L, x2L, y1L, and y2L are obtained as described above (Figure 13(a)), the coordinates of the four vertices P1, P2, P3, and P4 of the rectangular shape enclosed by these four straight lines x1L, x2L, y1L, and y2L (with the four straight lines x1L, x2L, y1L, and y2L as its four sides) are calculated. Here, vertex P1 is the intersection of line x1L and line y1L, and vertex P2 is the intersection of line x1L and line y2L. Vertex P3 is the intersection of line x2L and line y1L, and vertex P4 is the intersection of line x2L and line y2L.

[0053] After determining the coordinates of each of the four vertices P1, P2, P3, and P4, the measurement unit 55 determines the distance (x1S) between the two vertices P1 and P2 as the measurement value (x1S) of the top side x1, the distance (x2S) between the two vertices P3 and P4 as the measurement value (x2S) of the bottom side x2, the distance (y1S) between the two vertices P1 and P3 as the measurement value (y1S) of the right side y1, and the distance (y2S) between the two vertices P2 and P4 as the measurement value (y2S) of the left side y2 (FIG. 13(b)).

[0054] Once the measurement unit 55 has determined the measurement value (x1S) of the top side x1, the measurement value (x2S) of the bottom side x2, the measurement value (y1S) of the right side y1, and the measurement value (y2S) of the left side y2, the judgment unit 56 determines the ratio W (x1S / xr (=W1), x2S / xr (=W2), y1S / yr (=W3), y2S / yr (=W4)) of the measurement value to the registered value based on these measurement values ​​(x1S, x2S, y1S, y2S) and the registered values ​​(xr, yr) read by the reading unit 52 (Figures 14(a) and (b)). Then, after calculating the ratio W of the measured value to the registered value, the ratio W of the measured value is subtracted from 1 to calculate the ratio H of the difference between the measured value and the registered value (H1 (= 1 - W1), H2 (= 1 - W2), H3 (= 1 - W3), H4 (= 1 - W4)) (Figures 14(a) and (b)).

[0055] After calculating the difference ratio H of the measured value to the registered value for each of the four sides as described above, it is determined whether each of these difference ratios H is equal to or less than a predetermined tolerance (for example, 10%). If the difference ratio H is equal to or less than the tolerance, it is determined that the measured value matches the registered value (determined as "match"), and if the difference ratio H is greater than the tolerance, it is determined that the measured value does not match the registered value (determined as "mismatch").

[0056] FIG. 14(a) shows an example in which the top side x1, bottom side x2, right side y1, and left side y2 are all determined to "match." On the other hand, FIG. 14(b) shows an example in which the right side y1 and left side y2 are determined to "match," but the top side x1 and bottom side x2 are determined to "mismatch." Note that a "match" is determined not only when the registered value and the measured value perfectly match (the difference ratio H is H=0), but also when the difference ratio H is equal to or less than the allowable value, because, when measuring the length of the side based on an image (tool image GZ), it is considered inevitable that some degree of error (error from the true value) will occur.

[0057] As described above, the determination unit 56 determines whether the measurement values ​​for each of the four sides of the tool end face 42T match the registered values. If the determination unit 56 determines that the measurement values ​​for all four sides match the registered values, it determines that the tool 42 attached to the mounting head 34 is the same as the tool 42 that should be attached to the mounting head 34 (the tool 42 that should be attached is attached), and makes a determination of "OK." On the other hand, if the determination unit 56 determines that the measurement values ​​for at least one of the four sides do not match the registered values ​​(mismatch), it determines that the tool 42 attached to the mounting head 34 is not the same as the tool 42 that should be attached to the mounting head 34 (the tool 42 that should be attached is not attached), and makes a determination of "NG."

[0058] The notification control unit 57 notifies the operator OP of the determination result by the determination unit 56, i.e., the determination result of "OK" or "NG", by displaying the result of the determination by the determination unit 56 on the touch panel 58. In this manner, in this embodiment, the notification control unit 57 and the touch panel 58 constitute notification means 62 that notifies the operator OP of the determination result determined by the determination unit 56 (FIG. 5).

[0059] 15, a procedure for tool confirmation (tool confirmation method) when the operator OP attaches the tool 42 to the mounting head 34 will be described. In tool confirmation, the control device 50 first displays on the touch panel 58 the tool 42 to be attached to the mounting head 34 (to the ultrasonic horn 40) based on the production program, etc., that is executing the component mounting work (step ST1).

[0060] After displaying the tool 42 to be attached to the mounting head 34 on the touch panel 58, the control device 50 waits for a predetermined operation (attachment completion operation) to be performed on the touch panel 58 by the operator OP who attached the tool 42 to the mounting head 34 (step ST2). Then, upon detecting that the operator OP has performed the attachment completion operation, the reading unit 52 reads out the registered tool size of the tool 42 to be attached to the mounting head 34 (the tool 42 displayed on the touch panel 58) from the memory unit 51 (reading process of step ST3).

[0061] Once the reading unit 52 has read out the registered tool size of the tool 42 to be attached to the mounting head 34, the control device 50 moves the mounting head 34 to position the tool 42 attached to the mounting head 34 above the second camera 24 (FIG. 7). Once the tool 42 is positioned above the second camera 24, the imaging execution unit 53 causes the second camera 24 to take an image and acquires an image (tool image GZ) of the tool 42 attached to the mounting head 34 (image acquisition process in step ST4).

[0062] Once the tool image GZ is acquired by the second camera 24 capturing an image of the tool 42, the pattern matching execution unit 54 executes pattern matching on the tool image GZ (pattern matching execution process of step ST5). In pattern matching, the readout unit 52 generates a template corresponding to the shape of the suction hole 42H of the tool 42 to be attached to the mounting head 34 based on the generated data read out from the memory unit 51, and checks whether a portion matching the generated template is detected in the tool image GZ (step ST6).

[0063] If, as a result of the pattern matching performed by the pattern matching execution unit 54, a part matching the template is detected (contained) in the tool image GZ, the measurement unit 55 measures the length of each side (each of the four sides) of the tool end face 42T in the tool image GZ based on the tool image GZ in the manner described above (measurement process of step ST7).

[0064] After the measuring unit 55 measures the length of each side of the tool end face 42T, the determining unit 56 calculates the ratio H (H1, H2, H3, H4) of the difference between the measured value and the registered value for each side in the manner described above, based on the measured value of each side and the registered value for each side read out by the reading unit 52 (step ST8). Then, based on whether the ratio H of the difference between the measured value and the registered value for each side is equal to or smaller than a predetermined allowable value, it is determined whether each side matches the registered tool size (step ST9).

[0065] If the result of the above determination is that all of the measurement values ​​of the four sides match the registered tool size, the determination unit 56 determines "OK" (step ST10). On the other hand, if at least one of the measurement values ​​of the four sides does not match (mismatches) the registered tool size, the determination unit 56 determines "NG" (step ST11). Note that, in the above-mentioned step ST6, the determination unit 56 also determines "NG" if no part matching the template generated from the generation data read by the read unit 52 is detected in the tool image GZ.

[0066] As described above, in this embodiment, the determination unit 56 determines whether or not the tool 42 attached to the mounting head 34 is the same as the tool 42 to be attached to the mounting head 34, based on the length of the side of the end face (tool end face 42T) of the tool 42 measured by the measurement unit 55 and the length of the side of the tool end face 42T read by the reading unit 52 (determination process of steps ST9 to ST11). More specifically, the determination unit 56 determines whether or not the tool 42 attached to the mounting head 34 is the same as the tool 42 to be attached to the mounting head 34, based on the ratio H of the difference between the length of the side of the tool end face 42T measured by the measurement unit 55 and the length of the side of the tool end face 42T read by the reading unit 52 (the length of the side of the tool end face 42T included in the registered tool size).

[0067] If the determination unit 56 determines "OK" in step ST10 or "NG" in step ST11, the notification control unit 57 notifies the operator OP of the determination result of the determination unit 56 via the touch panel 58 (step ST12). This allows the operator OP to know whether the correct tool 42 is attached to the mounting head 34, and allows the operator OP to take appropriate measures before performing the component mounting work, such as removing the attached tool 42 and reattaching the correct tool 42 (the tool 42 that should be attached to the mounting head 34).

[0068] As described above, in the component mounting apparatus 1 (tool confirmation method) of this embodiment, the size of the tool 42 to be mounted on the mounting head 34 (registered tool size) is read from the memory unit 51 where it is stored (reading step of step ST3), and the tool 42 mounted on the mounting head 34 is imaged to obtain a tool image GZ (image acquisition step of step ST4).The size of the tool 42 mounted on the mounting head 34 is then measured based on the acquired tool image GZ (measurement step of step ST7), and it is determined whether the tool 42 mounted on the mounting head 34 is the same as the tool 42 to be mounted on the mounting head 34 based on the measured size of the tool 42 and the read-out registered tool size (determination steps of steps ST9 to ST11).

[0069] Therefore, even if the operator OP mistakenly attaches a tool 42 different from the tool 42 that should be attached to the mounting head 34, the operator OP can notice this before the component mounting operation begins, and can prevent the component mounting operation from being performed with a tool 42 different from the tool 42 that should have been attached. This also makes it possible to prevent a situation in which defective products are produced due to the incorrect attachment of the tool 42.

[0070] Furthermore, in this embodiment, as described above, after the generation data of the template corresponding to the suction hole 42H of the tool 42 to be attached to the mounting head 34 is read out from the memory unit 51, the judgment unit 56 performs pattern matching to detect a portion in the image of the tool 42 (tool image GZ) acquired by the imaging unit 61 that has a shape portion that matches the template generated from the generation data (pattern matching execution process of step ST5), and measures the lengths of the four sides and makes a judgment only when a shape portion that matches the template is detected (contained) in the tool image GZ by pattern matching.

[0071] If no part matching the template of the suction hole 42H is detected in the tool image GZ in pattern matching, it is clear that the tool 42 attached to the mounting head 34 is not the same as the tool 42 that should be attached, and therefore a judgment result (NG judgment) can be made at that point without measuring the lengths of the four sides. Therefore, according to the component mounting apparatus 1 (tool confirmation method) of this embodiment, it is possible to shorten the time required for tool confirmation work when the judgment result is NG.

[0072] While the present invention has been described above in terms of preferred embodiments, it is not limited to the above and various modifications are possible. For example, in the above-described preferred embodiments, the determination unit 56 may determine whether the tool 42 attached to the mounting head 34 is the same as the tool 42 that should be attached to the mounting head 34, based on the size of the tool 42 measured by the measurement unit 55 and the registered tool size read by the reading unit 52, and the procedure for determining this may be different from that described above. Also, in the above-described preferred embodiments, the tool 42 attached to the mounting head 34 was a bonding tool (more specifically, a US tool), but the tool 42 does not necessarily have to be a bonding tool as long as it has the function of holding a component BH and mounting it on a board KB while attached to the mounting head 34. [Industrial Applicability]

[0073] To provide a component mounting device and a tool checking method capable of preventing a situation in which component mounting work is performed with a tool different from the tool that should originally be mounted attached to a mounting head. [Explanation of symbols]

[0074] 1. Component placement device 14 Substrate supply stage 16 Parts supply stage 22 Camera 1 24 Second Camera 34 Mounting head 40 Ultrasonic Horn 42 Tools 42T Tool end face 50 Control device 51 Storage section 52 Readout section 53 Imaging execution unit 54 Pattern matching execution unit 55 Measurement section 56 Judgment section 57 Notification control section 58 Touch Panel 61 Imaging unit 62 Notification means GZ Tool Image PT Light / dark transition point H Difference Percentage BH parts KB board

Claims

1. A component mounting device that holds components with a tool having a nozzle attached to a mounting head and has suction holes and mounts the components on a board, a storage unit that stores generation data for generating a template for pattern matching having a size of the tool to be attached to the mounting head and a shape corresponding to a suction hole of the tool to be attached to the mounting head; a reading unit that reads, when a tool is attached to the mounting head, the size of the tool to be attached to the mounting head and the generated data from the storage unit; an imaging unit that captures an image of a tool attached to the mounting head and acquires an image of the tool; a pattern matching execution unit that generates the template from the generated data and executes pattern matching to check whether a portion matching the template is detected in the image; a determination unit that determines that the tool attached to the mounting head is not the same as the tool that should be attached to the mounting head when the pattern matching execution unit does not detect a portion that matches the template in the image; a measurement unit that measures a size of the tool attached to the mounting head based on the image when a portion that matches the template is detected in the image by the pattern matching execution unit; Equipped with the determination unit determines whether the tool attached to the mounting head is the same as the tool that should be attached to the mounting head, based on the size of the tool measured by the measurement unit and the size of the tool read by the read unit. Component placement device.

2. 2. The component mounting device according to claim 1, further comprising a notification means for notifying the result of the determination made by said determining section.

3. 3. The component mounting apparatus according to claim 1, wherein the tool attached to the mounting head is a bonding tool.

4. 4. The component mounting device according to claim 1, wherein the tool end face, which is the end face of the tip of the tool, has a rectangular shape, the tool size read out by the reading unit includes the lengths of the sides of the tool end face, the measuring unit measures the lengths of the sides of the tool end face based on the image of the tool acquired by the imaging unit, and the determining unit determines whether the tool attached to the mounting head is the same as the tool that should be attached to the mounting head, based on the lengths of the sides of the tool end face measured by the measuring unit and the lengths of the sides of the tool end face read out by the reading unit.

5. 5. The component mounting device according to claim 4, wherein the determination unit determines whether the tool attached to the mounting head is the same as the tool that should be attached to the mounting head, based on a ratio of a difference between the length of the side of the tool end face measured by the measurement unit and the length of the side of the tool end face read by the read unit.

6. 1. A tool confirmation method for a component mounting apparatus that holds components and mounts them on a board using a tool that is made up of a nozzle attached to a mounting head and has a suction hole, comprising: a reading step of reading, when a tool is attached to the mounting head, generation data for generating a pattern matching template having a size of the tool to be attached to the mounting head and a shape corresponding to a suction hole of the tool to be attached to the mounting head from a storage unit in which the generation data has been stored; an image capturing step of capturing an image of the tool attached to the mounting head; a pattern matching execution step of generating the template from the generated data and executing pattern matching to check whether a portion matching the template is detected in the image of the tool acquired in the image acquisition step; a first determination step of determining that the tool attached to the mounting head is not the same as the tool that should be attached to the mounting head when a portion that matches the template is not detected in the image in the pattern matching execution step; a measuring step of measuring a size of the tool attached to the mounting head based on the image when a portion matching the template is detected in the image in the pattern matching executing step; a second determination step of determining whether the tool attached to the mounting head is the same as the tool that should be attached to the mounting head, based on the tool size measured in the measuring step and the tool size read out in the reading step; Tool confirmation method.

Citation Information

Patent Citations

  • System for monitoring semiconductor device manufacturing process

    JP2001338938A

  • Apparatus and method for bonding electronic part

    JP2005235817A

  • Component mounting device and nozzle size detection method

    JP2022021083A