Contact Probes and Probe Holders

Abstract

To provide a contact probe capable of suppressing occurrence of expansion / contraction operation failure due to foreign matters, a probe holder, and a probe unit.SOLUTION: A contact probe according to the present invention includes a first plunger, a second plunger, and a coil spring that is provided between the first plunger and the second plunger and couples the first plunger and the second plunger so as to be movable forward and backward. The first plunger is provided with a groove portion formed on a side surface of the first plunger.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a contact probe, a probe holder, and a probe unit. [Background technology]

[0002] Conventionally, when conducting a continuity test or an operating characteristic test on a test object such as a semiconductor integrated circuit or a liquid crystal panel, a probe unit including multiple contact probes and a probe holder that houses the multiple contact probes is used to establish an electrical connection between the test object and a signal processing device that outputs a test signal (see, for example, Patent Document 1). The contact probe includes two plungers and a coil spring connecting the two plungers, and the entire contact probe expands and contracts when the coil spring expands and contracts due to an external load. The contact probe shown in Patent Document 1 has a cylindrical outer plunger and a cleaning shaft housed in the outer plunger so that it can move back and forth, and removes deposits (e.g., solder cutting chips) that have adhered to the tip of the outer plunger by moving the cleaning shaft back and forth. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2019-219350 Summary of the Invention [Problem to be solved by the invention]

[0004] However, if the deposits removed from the outer plunger are caught between the contact probe and the probe holder, the plunger and the deposits may interfere with each other, causing malfunction when the contact probe is extended or retracted.

[0005] The present invention has been made in view of the above, and has an object to provide a contact probe, a probe holder, and a probe unit that can suppress the occurrence of malfunctions in the extension and retraction operation due to foreign matter. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems and achieve the object, the contact probe of the present invention comprises a first plunger, a second plunger, and a coil spring provided between the first and second plungers and connecting the first and second plungers so that the first and second plungers can move back and forth freely, and is characterized in that the first plunger is provided with a groove portion formed on a side surface of the first plunger.

[0007] Furthermore, the contact probe according to the present invention is characterized in that, in the above invention, the first plunger has a columnar main body portion, a tip portion provided at one end of the main body portion and having a contact portion that comes into contact with a contact object, and a base end portion provided on the side of the main body opposite the contact portion and to which a coil spring is connected, and the groove portion is formed by recessing a part of the main body portion and extends circumferentially.

[0008] Furthermore, the contact probe according to the present invention is characterized in that, in the above invention, the first plunger has a columnar main body portion, a tip portion provided at one end of the main body portion and having a contact portion that comes into contact with a contact object, and a base end portion provided on the side of the main body opposite the contact portion and to which a coil spring is connected, and the groove portion has a recess extending from one longitudinal end to the other end of the main body portion.

[0009] In addition, the contact probe of the present invention is characterized in that, in the above invention, the contact portion has a plurality of claw portions arranged circumferentially, and the groove portion has the recesses each provided at a position corresponding to between the claw portions in the circumferential direction.

[0010] In addition, the contact probe of the present invention is characterized in that, in the above invention, the contact portion has a plurality of claw portions arranged circumferentially, and the groove portion consists of a plurality of recesses extending from the main body portion to a portion of the contact portion.

[0011] In the contact probe according to the present invention, in the above invention, the recess extends spirally in the main body portion.

[0012] Furthermore, the contact probe according to the present invention is characterized in that, in the above invention, the first plunger has a columnar main body portion, a tip portion provided at one end of the main body portion and having a contact portion that comes into contact with a contact object, and a base end portion provided on the side of the main body portion opposite the contact portion and to which a coil spring is connected, and the groove portion is formed by recessing a portion of the main body portion and having a plurality of recesses arranged in a staggered pattern.

[0013] Furthermore, the contact probe according to the present invention is characterized in that, in the above invention, the first plunger has a columnar main body portion, a tip portion provided at one end of the main body portion and having a contact portion that comes into contact with a contact object, and a base end portion provided on the side of the main body opposite the contact portion side and to which a coil spring is connected, and the groove portion is formed by recessing a part of the main body portion, and has a first recess extending circumferentially and a second recess extending from the first recess toward the contact portion side.

[0014] Moreover, in the contact probe according to the present invention, in the above invention, the groove portion further has a third recess portion extending from the first recess portion toward the base end portion.

[0015] Furthermore, the probe holder according to the present invention is characterized in that it has a first plunger, a second plunger, and a holder hole formed between the first and second plungers to hold a contact probe having a coil spring that connects the first and second plungers so that they can move back and forth, and the holder hole is provided with a groove portion extending from an opening on the side through which the first plunger is inserted.

[0016] Furthermore, the probe unit according to the present invention comprises a contact probe having a first plunger, a second plunger, and a coil spring provided between the first and second plungers and connecting the first and second plungers so that they can move back and forth freely, and a probe holder having a holder hole for holding the contact probe, wherein a groove portion is provided on a side surface of the first plunger or on the side of the holder hole through which the first plunger is inserted.

[0017] Furthermore, the probe unit according to the present invention is characterized in that, in the above invention, the first plunger has a columnar main body, a tip end provided at one end of the main body and having a contact portion that comes into contact with a contact object, and a base end provided on the side of the main body opposite the contact portion and to which a coil spring is connected, the holder hole has a small diameter portion through which the tip end of the first plunger is inserted and a large diameter portion in which the base end is accommodated, the groove is provided in the tip portion, and when the coil spring is contracted and the first plunger is pushed into the probe holder, the end of the groove on the base end side is located within the small diameter portion. [Effects of the Invention]

[0018] According to the present invention, it is possible to suppress malfunctions in the extension and retraction operation caused by foreign matter. [Brief explanation of the drawings]

[0019] [Figure 1] FIG. 1 is a perspective view showing a configuration of a probe unit including a contact probe according to an embodiment of the present invention. [Figure 2] FIG. 2 is a partial cross-sectional view showing the configuration of a main part of the probe unit shown in FIG. [Figure 3] FIG. 3 is a diagram showing a configuration of a main part of a contact probe included in a probe unit according to an embodiment of the present invention. [Figure 4]FIG. 4 is a partial cross-sectional view showing the configuration of the main part of the probe unit during testing of a semiconductor integrated circuit. [Figure 5] FIG. 5 is a partial cross-sectional view showing a configuration of a main part of a contact probe according to the first modification. [Figure 6] FIG. 6 is a partial cross-sectional view showing the configuration of a main part of a contact probe according to the second modification. [Figure 7] FIG. 7 is a partial cross-sectional view showing the configuration of a main part of a contact probe according to a third modification. [Figure 8] FIG. 8 is a partial cross-sectional view showing the configuration of a main part of a contact probe according to the fourth modification. [Figure 9] FIG. 9 is a partial cross-sectional view showing the configuration of a main part of a contact probe according to the fifth modification. [Figure 10] FIG. 10 is a partial cross-sectional view showing the configuration of a main part of a contact probe according to the sixth modification. [Figure 11] FIG. 11 is a partial cross-sectional view showing the configuration of a main part of a contact probe according to Modification 6, and is a partial cross-sectional view showing a state in which the coil spring is contracted. [Figure 12] FIG. 12 is a partial cross-sectional view showing the configuration of a main part of a contact probe according to the seventh modification. [Figure 13] FIG. 13 is a partial cross-sectional view showing the configuration of a main part of a contact probe according to Modification 7, showing a state in which the coil spring is contracted. [Figure 14] FIG. 14 is a partial cross-sectional view showing the configuration of a main part of a contact probe according to Modification 8. As shown in FIG. [Figure 15] FIG. 15 is a diagram showing the shape of the opening of the small diameter portion of the probe holder according to the ninth modification. [Figure 16] FIG. 16 is a diagram showing the shape of the opening of the small diameter portion of the probe holder according to the tenth modification. DETAILED DESCRIPTION OF THE INVENTION

[0020] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. However, the present invention is not limited to the following embodiments. Furthermore, the drawings referred to in the following description merely show the shapes, sizes, and positional relationships in a schematic manner to enable the contents of the present invention to be understood, and therefore the present invention is not limited to only the shapes, sizes, and positional relationships exemplified in the drawings.

[0021] Fig. 1 is a perspective view showing the configuration of a probe unit according to one embodiment of the present invention. The probe unit 1 shown in Fig. 1 is a device used when testing the electrical characteristics of a semiconductor integrated circuit 100, which is an object to be tested, and is a device that electrically connects the semiconductor integrated circuit 100 and a circuit board 200 that outputs a test signal to the semiconductor integrated circuit 100.

[0022] The probe unit 1 comprises conductive contact probes 2 (hereinafter simply referred to as "probes 2") that contact electrodes of two different contacted bodies, a semiconductor integrated circuit 100 and a circuit board 200, at both ends of the longitudinal direction, a probe holder 3 that stores and holds the multiple probes 2 according to a predetermined pattern, and a holder member 4 that is provided around the probe holder 3 and prevents the semiconductor integrated circuit 100, which comes into contact with the multiple probes 2 during testing, from shifting in position.

[0023] FIG. 2 is a partial cross-sectional view showing the detailed configuration of the probe 2 accommodated in the probe holder 3. The probe 2 shown in FIG. 2 is formed using a conductive material and includes a first plunger 21 that contacts an electrode of the semiconductor integrated circuit 100 when testing the semiconductor integrated circuit 100, a second plunger 22 that contacts an electrode of a circuit board 200 that includes a test circuit, and a coil spring 23 that is provided between the first plunger 21 and the second plunger 22 and connects the first plunger 21 and the second plunger 22 so that they can move back and forth. In FIG. 2, the first plunger 21, the second plunger 22, and the coil spring 23 that constitute the probe 2 share the same axis. That is, the central axes of the first plunger 21, the second plunger 22, and the coil spring 23 are located on the same straight line. Note that the "same axis" includes deviations due to distortion of individual components, manufacturing errors, etc. When the probe 2 contacts the semiconductor integrated circuit 100, the coil spring 23 expands and contracts in the axial direction, thereby cushioning the impact on the electrodes of the semiconductor integrated circuit 100 and applying a load to the semiconductor integrated circuit 100 and the circuit board 200.

[0024] The first plunger 21 has a tapered tip shape and includes a tip portion 21a that contacts an electrode of the semiconductor integrated circuit 100, a flange portion 21b that has a diameter larger than that of the tip portion 21a, and a base portion 21c that extends via the flange portion 21b to the opposite side of the tip portion 21a, has a diameter smaller than that of the flange portion 21b, and into which one end of the coil spring 23 is press-fitted. The first plunger 21 can move in the axial direction by the expansion and contraction action of the coil spring 23, and is urged toward the semiconductor integrated circuit 100 by the elastic force of the coil spring 23, so as to contact the electrode of the semiconductor integrated circuit 100.

[0025] 3 is a diagram showing the configuration of the main parts of a contact probe included in a probe unit according to one embodiment of the present invention. In first plunger 21, tip portion 21a has main body portion 211 extending from flange portion 21b, and contact portion 212 provided at the end of main body portion 211 opposite flange portion 21b and adapted to come into contact with an electrode of semiconductor integrated circuit 100. In this embodiment, contact portion 212 is described as having a crown shape with multiple claw portions 212a, but it may have other shapes, such as a cone shape or a spherical shape.

[0026] The main body 211 extends in a cylindrical shape. A groove 24 is formed in part of the side surface of the main body 211. The groove 24 is formed by recessing part of the side surface of the main body 211, and has a bottomed recess 24a extending in the circumferential direction. The volume of the internal space formed by the groove 24 is set, for example, according to the amount of cutting chips that may be generated during the number of inspections performed by the probe 2. The volume of this internal space corresponds to the volume of the space formed by the imaginary outer peripheral surface when the main body 211 does not have the groove 24 and the wall surfaces that form the groove 24.

[0027] 2, second plunger 22 has a tapered tip shape and includes tip portion 22a that comes into contact with an electrode of circuit board 200, flange portion 22b that has a diameter larger than that of tip portion 22a, and base end portion 22c that extends via flange portion 22b to the opposite side of tip portion 22a, has a diameter smaller than that of flange portion 22b, and is press-fit with the other end of coil spring 23. Second plunger 22 can move in the axial direction by the expansion and contraction action of coil spring 23, and is urged toward circuit board 200 by the elastic force of coil spring 23, coming into contact with the electrode of circuit board 200.

[0028] The coil spring 23 has a tightly wound portion 23a attached to the base end 21c of the first plunger 21 and a loosely wound portion 23b attached to the base end 22c of the second plunger 22 and wound at predetermined intervals. The coil spring 23 is formed, for example, by winding a single conductive wire.

[0029] An end of the tightly wound portion 23a is press-fitted into the base end 21c of the first plunger 21 and abuts against the flange portion 21b. On the other hand, an end of the loosely wound portion 23b is press-fitted into the base end 22c of the second plunger 22 and abuts against the flange portion 22b. The first plunger 21 and the second plunger 22 are joined to the coil spring 23 by the winding force of the spring and / or by soldering. The probe 2 expands and contracts in the axial direction due to the expansion and contraction of the loosely wound portion 23b.

[0030] The probe holder 3 is made of an insulating material such as resin, machinable ceramic, or silicon, and is formed by laminating a first member 31 located on the upper surface side of Fig. 2 and a second member 32 located on the lower surface side. The first member 31 and the second member 32 are each formed with the same number of holder holes 33 and 34 for accommodating a plurality of probes 2, and the holder holes 33 and 34 for accommodating the probes 2 are formed so that their axes coincide with each other. The positions at which the holder holes 33 and 34 are formed are determined according to the wiring pattern of the semiconductor integrated circuit 100.

[0031] The holder holes 33 and 34 each have a stepped hole shape with a different diameter along the penetration direction. That is, the holder hole 33 is composed of a small-diameter portion 33a having an opening on the upper end surface of the probe holder 3 and a large-diameter portion 33b having a larger diameter than the small-diameter portion 33a. On the other hand, the holder hole 34 is composed of a small-diameter portion 34a having an opening on the lower end surface of the probe holder 3 and a large-diameter portion 34b having a larger diameter than the small-diameter portion 34a. The shapes of the holder holes 33 and 34 are determined depending on the configuration of the probe 2 to be accommodated. The flange portion 21b of the first plunger 21 abuts against the boundary wall surface between the small-diameter portion 33a and the large-diameter portion 33b of the holder hole 33, thereby preventing the probe 2 from slipping out of the probe holder 3. Furthermore, the flange portion 22b of the second plunger 22 abuts against the boundary wall surface between the small diameter portion 34a and the large diameter portion 34b of the holder hole 34, thereby preventing the probe 2 from slipping out of the probe holder 3.

[0032] 4 is a diagram showing a state during testing of the semiconductor integrated circuit 100 using the probe holder 3. During testing of the semiconductor integrated circuit 100, the coil spring 23 is compressed along the longitudinal direction due to contact loads from the semiconductor integrated circuit 100 and the circuit board 200. During testing, a test signal supplied from the circuit board 200 to the semiconductor integrated circuit 100 travels from the electrode 201 of the circuit board 200 through the second plunger 22, the tightly wound portion 23a, and the first plunger 21 of the probe 2 to reach the connection electrode 101 of the semiconductor integrated circuit 100.

[0033] When the contact portion 212 of the first plunger 21 comes into contact with the connection electrode 101 during inspection, a portion of the connection electrode 101 may be scraped off, causing cutting chips to adhere to the contact portion 212. The cutting chips that come into contact with the contact portion 212 fall and get between the first plunger 21 and the small diameter portion 33a. At this time, the cutting chips are contained in the groove portion 24. In addition to the cutting chips, chips generated by the operation of the first plunger 21 may also be contained in the groove portion 24.

[0034] In this embodiment, a groove 24 is provided on the side surface of the first plunger to accommodate cutting chips and the like generated when the first plunger comes into contact with the connection electrode 101, thereby preventing the first plunger 21 from interfering with the cutting chips that have entered between the first plunger 21 and the small diameter portion 33a when the first plunger 21 moves relative to the probe holder 3. According to this embodiment, by providing the groove 24 in the first plunger 21, it is possible to prevent malfunction of the extension / retraction operation of the probe 2 caused by foreign matter such as cutting chips.

[0035] (Variation 1) Next, a first modification of the present invention will be described with reference to Fig. 5. Fig. 5 is a partial cross-sectional view showing the configuration of the main part of a contact probe according to the first modification. The same components as those in the probe unit 1 according to the embodiment are denoted by the same reference numerals. The probe unit according to the first modification includes a first plunger 21A instead of the first plunger 21.

[0036] The first plunger 21A has a tapered tip shape and includes a tip portion 21a that contacts an electrode of the semiconductor integrated circuit 100, a flange portion 21b that has a diameter larger than that of the tip portion 21a, and a base portion 21c that extends to the opposite side of the tip portion 21a via the flange portion 21b, has a diameter smaller than that of the flange portion 21b, and into which one end of the coil spring 23 is pressed.

[0037] In the first modification, a groove 24A is formed in a part of the side surface of the main body 211 of the tip portion 21a. The groove 24A has a plurality of bottomed recesses 24b extending from one end to the other end of the main body 211 in the longitudinal direction. The recesses 24b are formed in positions corresponding to between the claw portions of the contact portion 212 in the circumferential direction of the main body 211. The longitudinal direction of the main body 211 is the direction extending from the contact portion 212 toward the flange portion 21b, and corresponds to the axial direction of the probe 2. The recesses 24b may also be formed in positions corresponding to, for example, the centers of the claw portions of the contact portion 212 in the circumferential direction of the main body 211.

[0038] In the first modification, too, cutting chips that adhere to the contact portion 212 during inspection are collected in one of the recesses 24b of the groove portion 24A.

[0039] In this first modification, similarly to the embodiment, a groove 24A for accommodating cutting chips and the like generated when the first plunger 21A comes into contact with the connection electrode 101 is provided on the side surface of the first plunger 21A, thereby preventing cutting chips that have entered between the first plunger 21A and the small diameter portion 33a from interfering with the first plunger 21A when the first plunger 21A moves relative to the probe holder 3. According to this first modification, by providing the groove 24A in the first plunger 21A, it is possible to prevent malfunction of the extension / retraction operation of the probe caused by foreign matter such as cutting chips.

[0040] (Variation 2) Next, a second modification of the present invention will be described with reference to Fig. 6. Fig. 6 is a partial cross-sectional view showing the configuration of the main part of a contact probe according to the second modification. The same components as those in the probe unit 1 according to the embodiment are denoted by the same reference numerals. The probe unit according to the second modification includes a first plunger 21B instead of the first plunger 21.

[0041] The first plunger 21B has a tapered tip shape and includes a tip portion 21a that contacts an electrode of the semiconductor integrated circuit 100, a flange portion 21b that has a diameter larger than that of the tip portion 21a, and a base portion 21c that extends opposite the tip portion 21a via the flange portion 21b, has a diameter smaller than that of the flange portion 21b, and into which one end of the coil spring 23 is pressed.

[0042] In Modification 2, tip portion 21a has groove portion 24B formed in part of the side surface. Groove portion 24B has a plurality of bottomed recesses 24c extending from flange portion 21b of main body portion 211 to part of contact portion 212. Recesses 24c extend in the longitudinal direction of contact portion 212 from the end portion on the main body portion 211 side to the center of the outer surface of the claw portion of contact portion 212.

[0043] In the second modification, too, cutting chips that adhere to the contact portion 212 during inspection are collected in one of the recesses 24c of the groove portion 24B.

[0044] In this second modification, similarly to the embodiment, a groove 24B for accommodating cutting chips and the like generated when the first plunger 21B comes into contact with the connection electrode 101 is provided on the side surface of the first plunger 21B, thereby preventing cutting chips that have entered between the first plunger 21B and the small diameter portion 33a from interfering with the first plunger 21B when the first plunger 21B moves relative to the probe holder 3. According to this second modification, by providing the groove 24B in the first plunger 21B, it is possible to prevent malfunction of the extension / retraction operation of the probe caused by foreign matter such as cutting chips.

[0045] (Variation 3) Next, a third modification of the present invention will be described with reference to Fig. 7. Fig. 7 is a partial cross-sectional view showing the configuration of the main part of a contact probe according to the third modification. The same components as those in the probe unit 1 according to the embodiment are denoted by the same reference numerals. The probe unit according to the third modification includes a first plunger 21C instead of the first plunger 21.

[0046] The first plunger 21C has a tapered tip shape, a tip portion 21a that contacts an electrode of the semiconductor integrated circuit 100, a flange portion 21b that has a diameter larger than the diameter of the tip portion 21a, and a base end portion 21c that extends opposite the tip portion 21a via the flange portion 21b, has a diameter smaller than the flange portion 21b, and into which one end of the coil spring 23 is pressed.

[0047] In Modification 3, a groove 24C is formed in part of the side surface of tip portion 21a. Groove portion 24C has a bottomed recess 24d that extends from one end to the other in the longitudinal direction of main body portion 211. Recess 24d extends spirally in main body portion 211, rotating and translating about the central axis that extends in the longitudinal direction of main body portion 211.

[0048] In the third modification, cutting chips that adhere to the contact portion 212 during inspection are also collected in the recessed portion 24d of the groove portion 24C.

[0049] In the present modified example 3, similarly to the embodiment, a groove portion 24C for accommodating cutting chips and the like generated when the first plunger 21C comes into contact with the connection electrode 101 is provided on the side surface of the first plunger 21C, thereby preventing cutting chips that have entered between the first plunger 21C and the small diameter portion 33a from interfering with the first plunger 21C when the first plunger 21C moves relative to the probe holder 3. According to the present modified example 3, by providing the groove portion 24C in the first plunger 21C, it is possible to prevent malfunction of the extension / retraction operation of the probe caused by foreign matter such as cutting chips.

[0050] Furthermore, according to variant example 3, recess 24d is spirally shaped, so that when main body 211 moves back and forth, recess 24d exists somewhere in the longitudinal direction, and cutting chips can be efficiently and reliably accommodated in groove 24C.

[0051] Furthermore, the groove may be a combination of the spiral recessed portion according to the third modification and the linear recessed portion according to the first or second modification.

[0052] (Variation 4) Next, a fourth modification of the present invention will be described with reference to Fig. 8. Fig. 8 is a partial cross-sectional view showing the configuration of the main part of a contact probe according to the fourth modification. Note that the same components as those in the probe unit 1 according to the embodiment are given the same reference numerals. The probe unit according to the fourth modification includes a first plunger 21D instead of the first plunger 21.

[0053] The first plunger 21D has a tapered tip shape, a tip portion 21a that contacts an electrode of the semiconductor integrated circuit 100, a flange portion 21b that has a diameter larger than the diameter of the tip portion 21a, and a base end portion 21c that extends opposite the tip portion 21a via the flange portion 21b, has a diameter smaller than the flange portion 21b, and into which one end of the coil spring 23 is pressed.

[0054] In the fourth modification, a groove 24D is formed in a part of the side surface of the tip portion 21a. The groove 24D has a plurality of bottomed recesses 24e provided in the main body portion 211. The recesses 24d have spherical wall surfaces that form a hemispherical space. The plurality of recesses 24e are arranged in the main body portion 211 in a houndstooth pattern, for example, as shown in FIG. 8. Note that the arrangement of the recesses 24e is not limited to the arrangement shown in FIG. 8.

[0055] In the fourth modification, too, cutting chips that adhere to the contact portion 212 during inspection are collected in one of the recesses 24e of the groove portion 24D.

[0056] In the present fourth modification, similarly to the embodiment, a groove 24D for accommodating cutting chips and the like generated when the first plunger 21D comes into contact with the connection electrode 101 is provided on the side surface of the first plunger 21D, thereby preventing cutting chips that have entered between the first plunger 21D and the small diameter portion 33a from interfering with the first plunger 21D when the first plunger 21D moves relative to the probe holder 3. According to the present fourth modification, by providing the groove 24D in the first plunger 21D, it is possible to prevent malfunction of the extension / contraction operation of the probe caused by foreign matter such as cutting chips.

[0057] (Variation 5) Next, a fifth modified example of the present invention will be described with reference to Fig. 9. Fig. 9 is a partial cross-sectional view showing the configuration of the main part of a contact probe according to the fifth modified example. Note that the same components as those in the probe unit 1 according to the embodiment are given the same reference numerals. The probe unit according to the fifth modified example includes a first plunger 21E instead of the first plunger 21.

[0058] The first plunger 21E has a tapered tip shape, a tip portion 21a that contacts an electrode of the semiconductor integrated circuit 100, a flange portion 21b that has a diameter larger than the diameter of the tip portion 21a, and a base end portion 21c that extends opposite the tip portion 21a via the flange portion 21b, has a diameter smaller than the flange portion 21b, and into which one end of the coil spring 23 is pressed.

[0059] In Modification 5, a groove 24E is formed in a part of the side surface of the tip portion 21a. The groove 24E has a plurality of bottomed recesses 24a (see FIG. 3: first recess), 24f (second recess), and 24g (third recess). The recess 24f extends from the end of the recess 24a on the contact portion 212 side toward the contact portion 212. The recess 24g extends from the end of the recess 24a on the flange portion 21b side toward the flange portion 21b. The recesses 24f and 24g extend in the longitudinal direction of the main body portion 211 on opposite sides to the recess 24a. Note that the recesses 24f and 24g may be formed at different positions in the circumferential direction. Furthermore, although FIG. 9 shows an example in which the recesses 24f and 24g extend in the longitudinal direction of the main body portion 211, they may also extend at an angle relative to the longitudinal direction.

[0060] In the fifth modification, too, cutting chips that adhere to the contact portion 212 during inspection are collected in one of the recesses 24a, 24f, and 24g of the groove portion 24E.

[0061] In the present modified example 5, similarly to the embodiment, a groove portion 24E for accommodating cutting chips and the like generated when the first plunger 21E comes into contact with the connection electrode 101 is provided on the side surface of the first plunger 21E, thereby suppressing interference between the first plunger 21E and the small diameter portion 33a and the first plunger 21E when the first plunger 21E moves relative to the probe holder 3. According to the present modified example 5, by providing the groove portion 24E in the first plunger 21E, it is possible to suppress malfunction of the extension / retraction operation of the probe caused by foreign matter such as cutting chips.

[0062] (Variation 6) Next, a sixth modification of the present invention will be described with reference to Figs. 10 and 11. Figs. 10 and 11 are partial cross-sectional views showing the configuration of the main parts of a contact probe according to the sixth modification. Fig. 10 shows a state in which the flange portion is in contact with the probe holder. Fig. 11 shows a state in which the coil spring is contracted. Note that the same components as those in the probe unit 1 according to the embodiment are denoted by the same reference numerals. The probe unit according to the sixth modification includes a first plunger 21F instead of the first plunger 21.

[0063] The first plunger 21F has a tapered tip shape, a tip portion 21a that contacts an electrode of the semiconductor integrated circuit 100, a flange portion 21b that has a diameter larger than the diameter of the tip portion 21a, and a base end portion 21c that extends opposite the tip portion 21a via the flange portion 21b, has a diameter smaller than the flange portion 21b, and into which one end of the coil spring 23 is pressed.

[0064] In the sixth modification, a groove 24F is formed in a part of the side surface of the tip portion 21a. The groove 24F has a plurality of bottomed recesses 24h that extend from the end of the body portion 211 on the contact portion 212 side to the longitudinal center of the body portion 211. The recesses 24h extend from the end of the contact portion 212 on the body portion 211 side to the longitudinal center of the body portion 211. When the coil spring 23 is contracted during testing and the first plunger 21F is pressed into the probe holder 3 (see FIG. 11), the recesses 24h are set to a length that allows them to remain within the small diameter portion 33a and not to enter the large diameter portion 33b.

[0065] In the sixth modification, cutting chips that adhere to the contact portion 212 during inspection are also collected in one of the recesses 24f of the groove portion 24F.

[0066] In the sixth modification, similarly to the embodiment, a groove 24F for accommodating cutting chips and the like generated when the first plunger 21F comes into contact with the connection electrode 101 is provided on the side surface of the first plunger 21F, thereby preventing cutting chips that have entered between the first plunger 21F and the small diameter portion 33a from interfering with the first plunger 21F when the first plunger 21F moves relative to the probe holder 3. According to the sixth modification, by providing the groove 24F in the first plunger 21F, it is possible to prevent malfunction of the extension / retraction operation of the probe caused by foreign matter such as cutting chips.

[0067] Furthermore, according to variant example 6, when the coil spring 23 contracts during inspection, etc., the groove portion 24F (recess 24h) is set to a length that prevents it from entering the large diameter portion 33b. This prevents cutting chips and the like held by the recess 24h from entering the large diameter portion 33b, 34b or the small diameter portion 34a, thereby preventing the coil spring 23 or the second plunger 22 from malfunctioning.

[0068] (Variation 7) Next, a seventh modification of the present invention will be described with reference to Figs. 12 and 13. Figs. 12 and 13 are partial cross-sectional views showing the configuration of the main parts of a contact probe according to the seventh modification. Fig. 12 shows a state in which the flange portion is in contact with the probe holder. Fig. 13 shows a state in which the coil spring is contracted. Note that the same components as those in the probe unit 1 according to the embodiment are denoted by the same reference numerals. The probe unit according to the seventh modification includes a first plunger 21G instead of the first plunger 21.

[0069] The first plunger 21G has a tapered tip shape, a tip portion 21a that contacts an electrode of the semiconductor integrated circuit 100, a flange portion 21b that has a diameter larger than the diameter of the tip portion 21a, and a base end portion 21c that extends opposite the tip portion 21a via the flange portion 21b, has a diameter smaller than the flange portion 21b, and into which one end of the coil spring 23 is pressed.

[0070] In the seventh modification, a groove 24G is formed in a part of the side surface of the tip portion 21a. The groove 24G has a plurality of bottomed recesses 24a (see FIG. 3) and 24f (see FIG. 9). When the coil spring 23 is contracted during testing and the first plunger 21G is pushed into the probe holder 3 (see FIG. 13), the recesses 24a are formed at positions that remain within the small diameter portion 33a and do not enter the large diameter portion 33b.

[0071] In the seventh modification, cutting chips that adhere to the contact portion 212 during inspection are also collected in either the recessed portion 24a or 24f of the groove portion 24F.

[0072] In the seventh modification, similarly to the embodiment, a groove 24G for accommodating cutting chips and the like generated when the first plunger 21G comes into contact with the connection electrode 101 is provided on the side surface of the first plunger 21G, thereby preventing cutting chips that have entered between the first plunger 21G and the small diameter portion 33a from interfering with the first plunger 21G when the first plunger 21G moves relative to the probe holder 3. According to the seventh modification, by providing the groove 24G in the first plunger 21G, it is possible to prevent malfunction of the extension / retraction operation of the probe caused by foreign matter such as cutting chips.

[0073] Furthermore, according to variant example 7, when the coil spring 23 contracts during inspection, etc., the groove portion 24G (recess 24a) is formed at a position where it does not enter the large diameter portion 33b, thereby preventing cutting chips and the like held by the recess 24a from entering the large diameter portion 33b, 34b or the small diameter portion 34a and causing malfunction of the coil spring 23 or the second plunger 22.

[0074] In the sixth and seventh modifications, the grooves are formed at positions where they do not enter the large diameter portion 33b, but the grooves may be formed at positions where they enter the large diameter portion 33b when the coil spring 23 is compressed. In this way, it is also possible to configure the device so that cutting chips that come into contact with the first plunger are actively dropped into the large diameter portion 33b.

[0075] (Variation 8) Next, an eighth modification of the present invention will be described with reference to Fig. 14. Fig. 14 is a partial cross-sectional view showing the configuration of the main part of a contact probe according to the eighth modification. Note that the same components as those in the probe unit 1 according to the embodiment are given the same reference numerals. The probe unit according to the eighth modification includes a first plunger 21H instead of the first plunger 21.

[0076] The first plunger 21H has a tapered tip shape and includes a tip portion 21a that contacts an electrode of the semiconductor integrated circuit 100, and a base end portion 21c that is connected to the base end side of the tip portion 21a and into which one end of the coil spring 23 is press-fitted. Unlike the first plunger 21, the first plunger 21H does not have a flange portion 21b.

[0077] In Modification 8, grooves 24H are formed in part of the side surface of the main body 211 of the tip end 21a. The grooves 24H have a plurality of bottomed recesses 24i extending from one longitudinal end to the other of the main body 211. The recesses 24i are formed in positions corresponding to between the claws of the contact portion 212 in the circumferential direction of the main body 211. Note that the recesses 24i may also be formed in positions corresponding to, for example, the centers of the claws of the contact portion 212 in the circumferential direction of the main body 211.

[0078] In the eighth modification, cutting chips that adhere to the contact portion 212 during inspection are also collected in one of the recesses 24i of the groove portion 24H.

[0079] In the present modification 8, similarly to the embodiment, a groove 24H for accommodating cutting chips and the like generated when the first plunger 21H comes into contact with the connection electrode 101 is provided on the side surface of the first plunger 21H, thereby preventing cutting chips that have entered between the first plunger 21H and the small diameter portion 33a from interfering with the first plunger 21H when the first plunger 21H moves relative to the probe holder 3. According to the present modification 8, by providing the groove 24i in the first plunger 21H, it is possible to prevent malfunction of the extension / retraction operation of the probe caused by foreign matter such as cutting chips.

[0080] (Variation 9) Next, a ninth modification of the present invention will be described with reference to Fig. 15. Fig. 15 is a diagram showing the shape of the opening of the small diameter portion of the probe holder according to the ninth modification. Note that the same components as those in the probe unit 1 according to the embodiment are denoted by the same reference numerals. In the probe unit according to the ninth modification, a groove 33c is formed in the small diameter portion 33a of the probe holder 3.

[0081] In Modification 9, small diameter portion 33a is formed with groove portion 33c that forms an internal space protruding from the outer edge of small diameter portion 33a. Groove portion 33c has an arc-shaped wall surface with a radius of curvature smaller than that of small diameter portion 33a, and has multiple (four in Modification 9) recesses 33d that extend in the longitudinal direction of small diameter portion 33a. Here, the longitudinal direction of small diameter portion 33a is the direction parallel to the axial direction of holder hole 33. Note that the groove portion may be configured to have a bottom on the large diameter portion side, or may be configured to be formed in the large diameter portion as well.

[0082] In the ninth modification, too, cutting chips that adhere to the contact portion 212 during inspection are collected in one of the recesses 33d of the groove portion 33c.

[0083] In the present modified example 9, a groove 33c is provided in the small diameter portion 33a of the probe holder 3 to accommodate cutting chips and the like generated when the probe holder 3 comes into contact with the connection electrode 101, thereby preventing the first plunger 21 from interfering with the cutting chips that have entered between the first plunger 21 and the small diameter portion 33a when the first plunger 21 moves relative to the probe holder 3. According to the present modified example 9, by providing the groove 33c in the probe holder 3, it is possible to prevent malfunction of the probe extension / retraction operation caused by foreign matter such as cutting chips.

[0084] (Variation 10) Next, a tenth modification of the present invention will be described with reference to Fig. 16. Fig. 16 is a diagram showing the shape of the opening of the small diameter portion of the probe holder according to the tenth modification. Note that the same components as those in the probe unit 1 according to the embodiment are given the same reference numerals. In the probe unit according to the tenth modification, a groove 33e is formed in the small diameter portion 33a of the probe holder 3.

[0085] In Modification 10, small diameter portion 33a is formed with groove portion 33e that forms an internal space protruding from the outer edge of small diameter portion 33a. Groove portion 33e has an arc-shaped wall surface with a radius of curvature smaller than that of small diameter portion 33a, and includes multiple (eight in Modification 10) recesses 33f that extend in the longitudinal direction of small diameter portion 33a.

[0086] In the tenth modification, too, cutting chips that adhere to the contact portion 212 during inspection are collected in one of the recesses 33f of the groove portion 33e.

[0087] In the present modified example 10, a groove 33e is provided in the small diameter portion 33a of the probe holder 3 to accommodate cutting chips and the like generated when the probe holder 3 comes into contact with the connection electrode 101, thereby preventing the first plunger 21 from interfering with the cutting chips that have entered between the first plunger 21 and the small diameter portion 33a when the first plunger 21 moves relative to the probe holder 3. According to the present modified example 10, by providing the groove 33e in the probe holder 3, it is possible to prevent malfunction of the probe extension / retraction operation caused by foreign matter such as cutting chips.

[0088] The shape and number of the grooves (recesses) formed in the small diameter portion 33a are not limited to those in the ninth and tenth modified examples.

[0089] Although the embodiments of the present invention have been described above, the present invention should not be limited to the above-described embodiments. For example, the shape of the first plunger may be different depending on the mounting position or the shape or arrangement of the connection electrode. Also, a groove formed in the first plunger may be combined with a groove formed in the probe holder. Furthermore, the present invention can also be applied to a so-called barrel probe in which the flanges and base ends of the first and second plungers, as well as the coil spring, are covered by a cylindrical member.

[0090] In this way, the present invention can include various embodiments not described here, and various design changes can be made within the scope that does not deviate from the technical idea specified by the claims.

[0091] As described above, the contact probe, the probe holder, and the probe unit according to the present invention are suitable for suppressing the occurrence of malfunctions in the extension and retraction operation due to foreign matter. [Explanation of symbols]

[0092] 1 probe unit 2 Contact probe (probe) 3 Probe holder 21, 21A~21H First plunger 21a, 22a tip 21b, 22b flange part 21c, 22c proximal end 22 Second plunger 23 Coil spring 23a Closely wound part 23b Coarse winding section 24, 24A~24H, 33c, 33e Groove 24a~24i, 33d, 33f recesses 31 First member 32 Second member 33, 34 Holder holes 33a, 34a Small diameter section 33b, 34b Large diameter section 100 Semiconductor Integrated Circuit 101 Connection electrode 200 Circuit Boards 201 Electrode

Claims

1. A first plunger; A second plunger; a coil spring provided between the first and second plungers and connecting the first and second plungers so as to be movable forward and backward; Equipped with The first plunger is a columnar main body and a tip provided at one end of the main body and having a contact portion that comes into contact with a contact object; a base end portion provided on the opposite side of the main body portion from the contact portion side and to which a coil spring is connected; and The first plunger has: a bottomed groove portion formed on a side surface of the first plunger on the side surface on the tip end portion side and extending from the side surface in a direction perpendicular to a central axis of the first plunger; A contact probe characterized by being provided with:

2. The groove portion is formed by recessing a part of the main body portion and extends along the circumferential direction. The contact probe according to claim 1 .

3. The groove portion has a recess extending from one end to the other end in the longitudinal direction of the main body portion. The contact probe according to claim 1 .

4. The contact portion has a plurality of claw portions arranged in a circumferential direction, The groove portion has the recessed portions provided at positions corresponding to the gaps between the claw portions in the circumferential direction. The contact probe according to claim 3 .

5. The contact portion has a plurality of claw portions arranged in a circumferential direction, The groove portion is composed of a plurality of recesses extending from the main body portion to a part of the contact portion. The contact probe according to claim 3 .

6. The recess extends spirally in the body portion. The contact probe according to claim 3 .

7. The groove portion is formed by recessing a part of the main body portion to form a plurality of recesses arranged in a staggered pattern. The contact probe according to claim 1 .

8. The groove portion is a first recess formed by recessing a portion of the main body and extending along a circumferential direction; a second recess extending from the first recess toward the base end; The contact probe according to claim 1, further comprising:

9. The groove portion is a third recess extending from the first recess toward the contact portion; The contact probe according to claim 8, further comprising:

10. a holder hole is formed to hold a contact probe having a first plunger, a second plunger, and a coil spring provided between the first and second plungers and connecting the first and second plungers so that the first and second plungers can move back and forth; The holder hole has: a groove portion extending from an opening on the side through which the first plunger is inserted; A probe holder comprising:

Images