Scrubber combustor

Abstract

The present invention provides a scrubber combustor comprising: a preheat spray ring formed using a porous material having a predetermined thickness and preheating and spraying fuel gas in a preheat combustion space formed therein; a preheat guide ring surrounding the outer periphery of the preheat spray ring and having a plurality of preheat guide holes penetrating from the outer periphery to the inner periphery; and a preheat combustor module including a housing separated from the outer periphery of the preheat guide ring and forming a ring-shaped gas channel through which the fuel gas flows.

Description

[Technical Field]

[0001] SUMMARY OF THE INVENTION The present invention relates to a scrubber combustor for use with heated scrubbers used to treat exhaust gases produced during electronics industry processes. [Background technology]

[0002] Exhaust gases generated in electronics manufacturing processes, such as semiconductor, LCD, and OLED manufacturing processes, are composed of VOCs, PFC gases, water, and other substances. PFC gases, in particular, are gas components generated during semiconductor etching and chemical vapor deposition processes and are known to contribute to global warming. Additionally, PFC gases are known to be highly chemically stable and do not decompose during processing. PFC gases contained in exhaust gases are treated by scrubbers using heating, deposition, or plasma methods.

[0003] The heating method described above is the most common method for treating PFC gases. Using conventional heating methods, exhaust gases are treated and decomposed at temperatures of 1,300°C or higher using oxygen as an oxidizing agent, and the nitrogen and oxygen contained in the exhaust gases react to produce large amounts of nitrogen oxides, which are harmful substances. Furthermore, due to the tightening of emission standards for nitrogen oxides contained in exhaust gases, it has become necessary to reduce the amount of nitrogen oxides. Summary of the Invention [Problem to be solved by the invention]

[0004] The present invention provides a scrubber combustor that improves flame stability and efficiency in exhaust gas treatment. [Means for solving the problem]

[0005] To achieve the above object, the scrubber combustor of the present invention includes a preheating atomizing ring made of a porous material having a predetermined thickness and configured to preheat and atomize fuel gas in a preheating combustion space formed therein, a preheating guide ring having a plurality of guide holes extending from its outer periphery to its inner periphery, and a preheating combustor module separated from the outer periphery of the preheating guide ring to form a ring-shaped gas channel through which the fuel gas flows, wherein the inner periphery of the preheating guide ring can be in contact with the outer periphery of the preheating atomizing ring.

[0006] Additionally, the preheat atomizing ring described above is formed using a porous structure and could be formed using perforated plates, metal fibers, metal foams, packed beads, ceramic foams, nano-sized porous media, or porous sintered metals.

[0007] In addition, the above-mentioned preheat combustor module is formed using at least two layers, and the above-mentioned preheat combustor module can spray fuel gases having different components or different mixing ratios.

[0008] In addition, the above-mentioned scrubber combustor may further include a mixing combustor module having a mixing spray ring positioned in the upper part or the lower part of the above-mentioned preheating combustion module, the mixing spray ring being formed with a plurality of spray holes penetrating from the outer periphery to the inner periphery and spraying mixed fuel gas into a mixed combustion space formed therein, a mixing guide ring having a plurality of mixing guide holes penetrating from the outer periphery to the inner periphery, and a mixing housing separated from the outer periphery of the above-mentioned mixing guide ring and forming a ring-shaped mixed gas channel through which the above-mentioned mixed fuel gas flows. Here, the above-mentioned mixing combustion space may be connected to the above-mentioned preheating combustion space.

[0009] Additionally, it is contemplated that the above-described mixer combustor module may be formed using at least two layers.

[0010] In addition, it is considered that the scrubber combustor may further include a lower spray module positioned in the lower portion of the preheating combustor module or in the lower portion of the mixing combustor module and having a lower spray ring that sprays lower fuel gas into a lower combustion space connected to the preheating combustion space or the mixing combustion space.

[0011] In addition, it is considered that the above-mentioned lower spray module may further include a lower housing that encloses the outer periphery of the above-mentioned lower combustion space, and is formed thereon using a ring-shaped lower gas channel through which the above-mentioned lower fuel gas flows, and is provided with a lower outer hole that penetrates from the outer periphery to the above-mentioned lower gas channel, and the above-mentioned lower spray ring is positioned inside the above-mentioned lower gas channel and may include lower spray holes that spray the above-mentioned lower fuel gas.

[0012] In addition, the above-mentioned lower spray module is provided with a lower separation panel separating the first lower gas channel and the second lower gas channel, and the above-mentioned lower outer wall holes and the above-mentioned lower spray holes can be connected to the above-mentioned first lower gas channel and the second lower gas channel, respectively.

[0013] In addition, it is believed that the scrubber combustor may further include a combustor that preheats a mixed gas having fuel reach conditions and then reforms the gas into a mixed gas having hydrogen reach conditions and sprays it into the preheated combustion space.

[0014] In addition, it is considered that the above-mentioned combustor may include a preheating layer formed using a housing in the shape of a tube with upper and lower open portions and using a porous material, positioned in the upper portion inside the above-mentioned housing to preheat the above-mentioned mixed gas having fuel reach conditions, and a reforming layer formed using a porous material and reforming the above-mentioned mixed gas having fuel reach conditions into the above-mentioned mixed gas having hydrogen reach conditions.

[0015] In addition, the scrubber combustor according to an embodiment of the present invention includes: a main combustor module that sprays main fuel gas into a main combustion space formed therein; an upper head module that is positioned in an upper part of the main combustor module and supplies exhaust gas to the main combustion space, and includes an upper head having a combustor-containing groove that opens at a bottom and an upper fuel supply channel that supplies upper fuel gas to the combustor-containing groove; and an upper combustor module that closes a lower part of the combustor-containing groove to form an upper gas channel in the upper part and supplies upper fuel to the main combustion space.

[0016] Additionally, it is contemplated that the upper spray panel may be constructed of a porous material having a predetermined thickness and have a plurality of holes extending therethrough from the top to the bottom.

[0017] In addition, it is believed that the upper head may further include a reverse-expansion combustor having a head channel with a reverse-expansion portion extending from the outer upper side to the lower side, and extending through the head channel with a reverse-expansion portion and exposed to the lower side of the upper head.

[0018] In addition, the upper spray panel may include a spray channel with a reverse expansion section penetrating from the top to the bottom, and the reverse expansion combustor may be exposed below the lower side of the upper head through the spray channel with a reverse expansion section.

[0019] Additionally, the reverse expansion combustor may include a first nozzle having a first main body in the shape of a tube, a second nozzle having a second main body positioned to surround the outer periphery of the first main body, and a third nozzle having a third main body positioned to surround the outer periphery of the second main body.

[0020] In addition, it is believed that the first nozzle described above can spray an oxidizer, the second nozzle described above can spray a fuel or a mixed gas of fuel and oxidizer, and the third nozzle described above can spray a mixed gas of oxidizer or a mixed gas of fuel and oxidizer.

[0021] In addition, it is contemplated that the above-mentioned scrubber combustor may further include a first separation component positioned between the above-mentioned main body and the second main body to maintain a separation space between the above-mentioned first main body and the second main body, and a second separation component positioned between the above-mentioned second main body and the third main body to maintain a separation distance between the above-mentioned second main body and the third main body.

[0022] Effect of the invention The scrubber combustor under the present invention is composed of a mixing combustor module and a preheating combustor module having different structures that are vertically stacked to increase flame stability and exhaust gas treatment efficiency.

[0023] In addition, with the scrubber combustor under the present invention, the type and amount of oxidant supplied to the mixing combustor module and the type and amount of oxidant supplied to the preheating combustor module, as well as the amount of fuel supplied to each module, are adjusted differently to increase efficiency in treating exhaust gases.

[0024] In addition, with the scrubber combustor under the present invention, at least two preheat combustor modules equipped with porous atomizing rings are stacked according to the composition and amount of exhaust gas entering the semiconductor process to increase the treatment efficiency of the exhaust gas.

[0025] In addition, with the scrubber combustor under the present invention, at least two preheat combustor modules equipped with porous atomizing rings are stacked according to the composition and amount of exhaust gas flowing into the semiconductor process, and their heights are formed differently to increase the exhaust gas treatment efficiency.

[0026] In addition, with the scrubber combustor under the present invention, at least two preheating modules with porous atomizing rings are stacked, and fuel and oxidant are supplied independently to provide different equivalence ratios to increase exhaust gas treatment efficiency.

[0027] In addition, the scrubber combustor under the present invention premixes and then sprays into the combustion zone, thus providing a high degree of mixing of the fuel and oxidizer, thereby stabilizing flame formation.

[0028] In addition, the scrubber combustor under the present invention is equipped with a lower fuel spray module in which fuel is additionally sprayed or a lower oxidizer spray module in which oxidizer is additionally sprayed, thereby making it possible to substantially eliminate pollutants such as nitrogen oxides and carbon monoxide. [Brief explanation of the drawings]

[0029] [Figure 1] 1 is a horizontal cross-sectional view of a scrubber combustor according to an embodiment of the present invention; [Figure 2] 2 is a vertical cross-sectional view of a section within the scrubber combustor of FIG. 1 that includes a mixing combustor module, a preheat combustor module, and an underside spray module. [Figure 3] FIG. 2 is a horizontal cross-sectional view of the scrubber combustor shown in FIG. 1 taken along line AA. [Figure 4] FIG. 2 is a horizontal cross-sectional view of the scrubber combustor shown in FIG. 1 taken along line BB. [Figure 5] 10A-10C are perspective views illustrating the integration of various upper housing configurations for use with scrubber combustors according to embodiments of the present invention. [Figure 6] FIG. 2 is a side cross-sectional view of a scrubber combustor according to another embodiment of the present invention. [Figure 7] FIG. 7 is a horizontal cross-sectional view taken along line CC in FIG. 6. [Figure 8] FIG. 7 is a horizontal cross-sectional view taken along line DD in FIG. 6. [Figure 9] FIG. 2 is a side cross-sectional view of a scrubber combustor according to another embodiment of the present invention. [Figure 10] FIG. 10 is an enlarged view of the reverse expansion combustor of FIG. [Figure 11] FIG. 11 is a horizontal cross-sectional view of EE in FIG. [Figure 12] FIG. 11 is a horizontal cross-sectional view taken along the line FF in FIG. [Figure 13] FIG. 2 is a side cross-sectional view of a scrubber combustor according to another embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0030] A scrubber combustor according to an embodiment of the present invention will be described below with reference to the accompanying drawings.

[0031] First, the structure of a scrubber combustor according to an embodiment of the present invention will be described below.

[0032] Figure 1 is a horizontal cross-sectional view of a scrubber combustor according to an embodiment of the present invention. Figure 2 is a vertical cross-sectional view of a section within the scrubber combustor of Figure 1 including a mixing combustor module, a preheat combustor module, and a lower spray module. Figure 3 is a horizontal cross-sectional view of the scrubber combustor shown in Figure 1 taken along line AA. Figure 5 is a perspective view showing the integrated upper housing of various structures used with scrubber combustors according to an embodiment of the present invention.

[0033] 1-5, it can be seen that a scrubber combustor (100) according to an embodiment of the present invention can include a mixing combustor module (110) and a preheating combustor module (120). In addition, the scrubber combustor (100) can further include a lower spray module (130). In addition, the scrubber combustor (100) can further include an upper head module (140).

[0034] The scrubber combustor (100) described above can be formed by selectively including a mixing combustor module (110) and a preheating combustor module (120) depending on the composition and amount of exhaust gas generated in a semiconductor manufacturing process or a panel display device manufacturing process. For example, the scrubber combustor (100) can be formed by including a preheating combustor module (120) instead of the mixing combustor module (110). In this case, the scrubber combustor (100) can include at least two vertically stacked preheating combustor modules (120). In addition, the scrubber combustor (100) can be formed by stacking a plurality of the mixing combustor modules (110) and the preheating combustor modules (120). For example, the scrubber combustor (100) can be formed by stacking at least one mixing combustor module (110) and at least one preheating combustor module (120) sequentially from top to bottom. Additionally, it is contemplated that the above-described scrubber combustor (100) may be formed by stacking at least one preheat combustor module (120) and at least one mixing combustor module (110) from top to bottom. Additionally, it is contemplated that the above-described scrubber combustor (100) may be formed by stacking a preheat combustor module (120), a mixing combustor module (110), and a preheat combustor module (120) from top to bottom. The focus of the following description of the above-described scrubber combustor (100) will be on the vertical layer structure of the mixing combustor module (110) and the preheat combustor module (120).

[0035] Additionally, the height of the preheat combustor module 120 can be set independently of the height of the mixing combustor module 110, depending on the composition and volume of exhaust gas entering the semiconductor manufacturing process or the flat panel display device manufacturing process, using the scrubber combustor 100. Additionally, the height of the preheat combustor module 120 can be set higher than the height of the mixing combustor module 110, using the scrubber combustor 100.

[0036] Using the above-described scrubber combustor (100), exhaust gases can enter the upper portion of the mixing combustor module (110) from within the combustor module (110). Thus, using the above-described scrubber combustor (100), the exhaust gases flow from the upper portion to the lower portion, and from the mixing combustor module (110) to the preheat combustor module (120) for combustion.

[0037] In addition, the type and amount of oxidizer or the amount of fuel supplied to the mixer combustor module 110 and the preheater combustor module 120 can be adjusted differently depending on the composition and amount of exhaust gas flowing in during the flat panel display device manufacturing process or the semiconductor manufacturing process. For example, the mixer combustor module 110 described above is supplied with a mixed fuel gas containing an oxidizer including air and oxygen and a fuel. The mixed fuel gas is sprayed through relatively large spray holes, allowing the exhaust gas (semiconductor waste gas) to be combusted by stably forming a relatively high-temperature flame. In addition, the preheater combustor module 120 can supply preheated fuel gas containing an oxidizer including a relatively small amount of air and a fuel, which can be mixed with the preheated fuel gas through a porous spray ring having a predetermined length. The preheated mixed gas passing through the porous spray ring can then be used to combust the exhaust gas (semiconductor waste gas) through surface combustion by stably forming a flame.

[0038] In addition, when the above-described scrubber combustor (100) is used, when at least two preheat combustor modules (120) are stacked, it is possible to increase the exhaust gas treatment efficiency by supplying preheated fuel gas mixed with fuel and oxidizer in different proportions so that each preheat combustor module (120) has a different equivalence ratio.

[0039] The fuel supplied to the scrubber combustor (100) described above may be any hydrocarbon fuel (C), including hydrogen (H), methane (CH), propane (C,H), natural gas (CH + C,H), or any mixture thereof. n H m ) can be any of the fuels selected from the group consisting of:

[0040] Additionally, the oxidant used with the above-described scrubber combustor (100) can be any of the fuels selected from oxygen, compressed dry air (CDA), air, a gas mixture containing oxygen and air, a gas mixture containing oxygen and CDA, a gas mixture containing oxygen and nitrogen, a gas mixture containing CDA and nitrogen, a gas mixture containing air and nitrogen, a gas mixture containing oxygen, air, and nitrogen, or mixtures thereof.

[0041] The mixed fuel gas and preheat gas are mixed in a predetermined ratio outside the scrubber combustor 100 and supplied to the mixing combustor module 110 and the preheat combustor module 120. Therefore, after the fuel and the oxidizer are uniformly mixed, the mixed fuel gas and preheat fuel gas are supplied to the mixing combustor module 110 and the preheat combustor module 120, which reduces the degree of incomplete combustion and reduces the amount of exhaust gas generated.

[0042] The mixing combustor module is formed using a mixing housing (111), a mixing spray ring (115), a mixing guide ring (116), and a mixing supply pipe (117). The mixing combustor module (110) is positioned in the upper portion of the scrubber combustor (100). The mixing combustor module (110) includes a mixing combustion space (110a) through which exhaust gas flows and a mixed gas channel (110b) to which mixed fuel gas is supplied. The mixing combustion space (110a) is formed inside the mixing spray ring (115) positioned inside the mixing housing (111). The mixed gas channel (110b) is formed between the inside of the mixing housing (111) and the outer periphery of the mixing spray ring (115). The mixed gas channel (110b) is connected to the mixing supply pipe (117). The mixed fuel gas is sprayed through the mixing spray ring 115 and forms a flame in the mixing combustion space 110a along the inner circumference of the mixing spray ring 115. The mixing combustor module 110 combusts the exhaust gas flowing into the mixing combustion space 110a using the flame. The mixing combustor module 110 supplies the combusted exhaust gas to the preheat combustor module 120.

[0043] The mixing housing (111) is formed with a ring-shaped mixed gas channel (110b) inside, through which the mixed fuel gas flows, and the inside opens toward the mixed combustion space (110a). The mixed gas channel (110b) can be positioned outside the mixed combustion space (110a). It is considered that the mixed gas channel (110b) can be formed so that its inner periphery wraps around the outer periphery of the mixed combustion space (110a). In addition, the mixing housing (111) is formed in a ring shape, and a mixing housing hole (111a) is positioned inside, penetrating from the upper part to the lower part. The mixing housing hole (111a) opens the mixed combustion space (110a) vertically. The mixed gas channel (110b) is connected to the mixed combustion space (110a), and the incoming mixed gas is sprayed into the mixed combustion space (110a). The mixing housing (111) is formed using a mixing outer wall ring (112), a mixing upper panel ring (113), and a mixing lower panel ring (114). It is contemplated that the outer wall ring, the mixing upper panel ring (113), and the mixing lower panel ring (114) may be integrally formed. The mixing housing (111) has an inner side facing the mixing outer wall ring (112) that is " The mixing housing (111) described above provides a mixed gas channel (110b) through which the mixed fuel gas supplied through the mixture supply pipe (117) flows. The mixed fuel gas flowing into the inside of the mixing housing (111) flows along the mixed gas channel (110b), passes through the mixing guide ring (116), and is sprayed into the mixed fuel gas through the mixing spray ring (115).

[0044] The mixing outer wall ring (112) is formed in the shape of a circular ring having a predetermined diameter and height. The outer diameter of the mixing upper panel ring (113) corresponds to the diameter of the mixing outer wall ring (112), and its inner diameter corresponds to the diameter of the mixing housing hole (111a). The mixing upper panel ring (113) is connected to the upper portion of the mixing outer wall ring (112). The mixing lower panel ring (114) is formed in a shape corresponding to the mixing upper panel ring (113) and is connected to the lower portion of the mixing outer wall ring (112). It is considered that the mixing outer wall ring (112) may include a mixing outer wall hole (112a). The mixing outer wall hole (112a) is formed from the outer periphery to the inner periphery and is combined with a mixing supply pipe (117).

[0045] The mixing spray ring (115) is formed in a ring shape with a predetermined diameter and height. The mixing spray ring (115) is formed to have a diameter corresponding to the mixing housing hole (111a) and is combined with the mixing housing hole (111a) of the mixing housing (111). In addition, the mixing spray ring (115) is supported and combined between the mixing upper panel ring (113) and the mixing lower panel ring (114) of the mixing housing (111). The mixing spray ring (115) spatially separates the mixed gas channel (110b) and the mixing combustion space (110a).

[0046] The mixing spray ring 115 is formed using a plurality of mixing spray holes 115a that penetrate from the outer periphery to the inner periphery. The mixing spray holes 115a function as spray nozzles that spray the mixed fuel gas. The mixing spray holes 115a are formed to be distributed throughout the mixing spray ring 115. Many of the mixing spray holes 115a form a single spray nozzle, and the single spray nozzles can be positioned separately from each other. For example, the single spray nozzle can be positioned at the center of the single mixing spray hole 115a, and multiple mixing spray holes 115a can be positioned radially to form a flower shape. When the mixing spray holes 115a are shaped to form a single spray nozzle, the mixed fuel gas is sprayed at a single point, which allows a flame to be formed and maintained stably, thereby enabling efficient combustion of exhaust gases.

[0047] The mixing guide ring (116) is formed in a ring shape corresponding to the mixing spray ring (115), and its diameter is larger than that of the mixing spray ring (115). The mixing guide ring (116) is positioned between the mixing outer wall ring (112) of the mixing housing (111) and the mixing spray ring (115). The mixing guide ring (116) is supported and combined between the mixing upper panel ring (113) and the mixing lower panel ring (114) of the mixing housing (111). Therefore, the mixing guide ring (116) can separate the mixed fuel space (110b) into the mixing inner gas channel (110c) and the mixing outer gas channel (110d). The mixing guide ring (116) allows the mixed fuel gas supplied to the mixing outer gas channel (110d) to pass through and flow into the mixing inner gas channel (110c). Therefore, the mixed fuel gas is mixed by flowing into the mixing outer gas channel 110d, and then mixed again by passing through the mixing guide ring 116 and flowing into the mixing inner gas channel. As a result, the mixed fuel gas can be mixed more efficiently because it is mixed in two stages.

[0048] The mixing guide ring (116) is formed with a plurality of mixing guide holes (116a) that penetrate from the outer periphery to the inner periphery. The mixing guide holes (116a) are formed to be dispersed throughout the mixing guide ring (116). The mixing guide holes (116a) are formed with a larger area than the mixing spray holes (115a). The mixed fuel gas supplied to the mixing guide holes (116a) flows along the mixing outer gas channel (110d), passes through the mixing guide ring (116a), and is supplied to the mixing inner gas channel (110c).

[0049] The mixing guide holes 116a are formed so that their total area is larger than that of the mixing spray holes 115a. The mixing guide holes 116a minimize a drop in the supply pressure of the mixed fuel gas in the mixing inner gas channel separated by the mixing guide ring 116a to ensure smooth spraying of the mixed fuel gas through the mixing spray holes 115a. If the total area of ​​the mixing guide holes 116a is smaller than that of the mixing spray holes 115a, the pressure in the mixing outer gas channel 110d increases and the pressure in the inner gas channel 110c decreases relatively, which may prevent smooth spraying of the mixed fuel gas through the mixing spray holes 115a.

[0050] The above-mentioned mixing supply pipe (117) is combined with the mixing housing (111) to supply mixed fuel gas to the mixed gas channel (110b). The above-mentioned mixing supply pipe (117) can be combined with the mixing outer wall hole (112a) of the mixing outer wall ring (112). However, the above-mentioned mixing supply pipe (117) can also be combined with the mixing upper panel ring (113) or the mixing lower panel ring (114) of the mixing housing (111). In addition, depending on the diameter or height of the mixing housing (111), more than one of the above-mentioned mixing supply pipes (117) can be combined with the mixing outer wall ring (112) at predetermined intervals along the circumferential or vertical direction.

[0051] The above-mentioned mixture supply pipe (117) can be aligned perpendicular to the tangent of the mixing guide ring (116) so that the mixed fuel gas is supplied toward the center of the mixing housing (111). In addition, the above-mentioned mixture supply pipe (117) can be aligned at a predetermined angle to the tangent of the mixing guide ring (116) of the mixing housing (111) so that the mixed fuel gas flows in a rotating manner along the mixed gas channel (110b) of the mixing housing (111). More specifically, the above-mentioned mixture supply pipe (117) can supply the mixed fuel gas so that the mixed fuel gas flows along the mixed outer gas channel (110d) of the mixing housing (111).

[0052] The mixed fuel supply pipe 117 supplies a mixed fuel gas containing fuel, air, and oxygen. The mixed fuel gas contains air and oxygen as oxidizers, which increases the stability of the flame formed along the inner circumference of the mixed spray ring 115 and increases the flame temperature.

[0053] The mixture supply pipe (117) may further include a mixture spray panel (118). The mixture spray panel (118) is formed in the shape of a panel having a predetermined thickness. The mixture spray panel (118) may be positioned near an end region of the mixture supply pipe (117). The mixture spray panel (118) is positioned vertically on the central axis of the mixture supply pipe (117). The mixture spray panel (118) prevents the mixed fuel gas supplied to the mixture supply pipe (117) from being sprayed directly onto the mixture guide ring (116).

[0054] The preheat combustor module (120) may include a preheat housing (121), a preheat spray ring (125), a preheat guide ring (126), and a preheat supply pipe (127). The mixing combustor module (110) is positioned in the lower portion of the scrubber combustor (100). That is, the preheat combustor module (120) is combined with the lower portion of the mixing combustor module (110). The preheat combustor module (120) includes a preheat combustion space (120a) into which exhaust gas flows and a preheat gas channel (120b) to which preheat fuel gas is supplied. The preheat combustion space (120a) is formed inside the preheat spray ring (125) positioned inside the preheat housing (121).

[0055] On the other hand, if only the preheat combustor module (120) is formed in the scrubber combustor, the preheat housing (121) can be referred to as a housing, the preheat gas channel (120b) can be referred to as a gas channel, and the preheat fuel gas can be referred to as a fuel gas. Additionally, the preheat spray ring (125), preheat guide ring (126), and preheat supply pipe (127) can be referred to as a guide ring, spray ring, and supply pipe, respectively.

[0056] The preheat combustion space (120a) is connected to the mixed combustion space (110a) in the upper section. Therefore, exhaust gas combusted in the mixed combustion space (110a) flows into the preheat combustion space (120a) in the lower section. The preheat gas channel (120b) is formed between the inside of the preheat housing (121) and the outer periphery of the preheat guide ring (126). The preheat gas channel (120b) is connected to the preheat supply pipe (127). The preheat fuel gas is sprayed through the preheat spray ring (125) and forms a flame in the preheat combustion space (120a) along the inner periphery of the preheat spray ring (125). The preheat combustor module (120) uses a flame to treat the exhaust gas flowing from the mixed combustion space (110a) into the preheat combustion space (120a). The preheat combustor module (120) described above discharges combusted exhaust gases into the lower section.

[0057] There is at least one preheat combustor module (120), and multiple preheat combustor modules can be stacked vertically. Additionally, there can be multiple preheat combustor modules (120) of different heights.

[0058] It is contemplated that the preheat housing 121, preheat guide ring 126, and preheat supply pipe 127 described above may be formed in the same manner or similarly to the mixing housing 111, mixing guide ring 116, and mixing supply pipe 117. Accordingly, the description of the preheat housing 121, preheat guide ring 126, and preheat supply pipe 127 described above will focus on the differences between the mixing housing 111, mixing guide ring 116, and mixing supply pipe 117.

[0059] The preheating housing (121) has a ring-shaped preheating gas channel (120b) formed therein through which preheating fuel gas flows, and the inside of the preheating gas channel (120b) opens into the preheating combustion space (120a). The preheating gas channel (120b) can be positioned outside the preheating combustion space (120a). The preheating gas channel (120b) can be formed to surround the outer periphery of the preheating combustion space (120a). In addition, the preheating housing (121) is formed in a ring shape with a preheating housing hole (121a) that penetrates from the upper part to the lower part of the inside. The preheating housing hole (121a) opens the preheating combustion space (120a) vertically. The preheating gas channel (120b) is connected to the preheating combustion space (120a), and the flowing preheating fuel gas is sprayed into the preheating combustion space (120a). It is believed that the preheat housing (121) may include a preheat outer wall ring (122), a preheat upper panel ring (123), and a preheat lower panel ring (124), while the lower portion of the preheat housing (121) is open and may be closed by a lower spray module (130).

[0060] The preheat fuel gas flowing into the preheat housing 121 flows along the preheat gas channel 120b, passes through the preheat guide ring 126, and is sprayed into the preheat fuel space through the preheat spray ring 126. The preheat outer wall ring 122 may include preheat outer wall holes 122a.

[0061] The preheat spray ring (126) is formed in a ring shape having a predetermined thickness, a predetermined inner diameter, and a predetermined height. It is considered that the preheat spray ring (125) can be formed with a thickness corresponding to or thinner than the sum of the thickness of the mixing spray ring (115) of the mixing combustor module (110) and the width of the mixing inner gas channel (110c). The outer periphery of the preheat spray ring (125) can contact or then separate from the inner periphery of the preheat guide ring (126). In addition, it is considered that the preheat spray ring (125) can be formed with an inner diameter equal to the inner diameter of the mixing spray ring (115). It is considered that the inner periphery of the preheat spray ring (125) can form a side surface flush with the inner periphery of the mixing spray ring (115). Therefore, exhaust gas flowing out of the mixing combustion space (110a) of the mixing spray ring (115) can gently flow into the preheat combustion space (120a) of the preheat spray ring (125). It is contemplated that the preheat spray ring (125) can be formed with a height corresponding to the height of the preheat housing (121). The preheat spray ring (125) is coupled to the preheat housing hole (121a) of the preheat housing (121). In addition, the preheat spray ring (125) can be supported and combined between the preheat upper panel ring (123) and the preheat lower panel ring (124) of the preheat housing (121). The preheat spray ring (125) can spatially separate the preheat gas channel (120b) and the preheat combustion space (120a).

[0062] The preheating spray ring 125 may be formed from a porous material. The preheating spray ring 125 may be formed from any porous material, including perforated plates, metal fibers, metal foams, packed beads, ceramic foams, and porous sintered metals. Therefore, the preheating spray ring 125 may have a plurality of holes extending from the inner periphery to the outer periphery. The plurality of holes formed inside the preheating spray ring 125 act as spray nozzles for injecting preheated fuel gas. The preheating spray ring 125 uniformly sprays the preheated fuel gas, thereby ensuring uniform and stable flame formation. In addition, the preheating spray ring 125 has a predetermined thickness, allowing it to preheat and spray the preheated fuel gas flowing into the outer periphery. Therefore, the preheating spray ring 125 ensures stable flame formation. The preheating spray ring 125 may be formed to a thickness sufficient to preheat the preheated fuel gas.

[0063] It is contemplated that the preheat guide ring (126) described above may be formed in a ring shape corresponding to the preheat spray ring (125), and that its inner diameter may be formed to a size corresponding to the outer diameter of the preheat spray ring (125). It is contemplated that the preheat guide ring (126) described above may be formed such that its inner periphery contacts the outer diameter of the preheat spray ring (125). Therefore, the preheat combustor module (120) described above may not have a channel corresponding to the mixing inner gas channel (110c) of the mixing combustor module (110).

[0064] The preheat guide ring 126 is formed with a plurality of guide holes 126a that penetrate from the outer periphery to the inner periphery. The guide holes 126a are formed to be dispersed throughout the preheat guide ring 126. Preheated fuel gas supplied to the guide holes 126a is supplied directly to the preheat spray ring 125.

[0065] The preheat supply pipe 127 is combined with the preheat housing 121 to supply preheated fuel gas to the preheat gas channel 120b. The preheat supply pipe 127 can be combined with the preheat outer wall hole 122a of the preheat outer wall ring 122. The preheat supply pipe 127 can further include a preheat spray panel 128. The preheat spray panel 128 is formed in the shape of a panel having a predetermined thickness. The preheat spray panel 128 can be positioned near the end region of the preheat supply pipe 127. The preheat spray panel 128 is positioned vertically on the central axis of the preheat supply pipe 127. The preheat spray panel 128 ensures that the preheated fuel gas supplied to the preheat supply pipe 127 is not directly sprayed onto the preheat guide ring 126.

[0066] The lower spray module (130) includes a lower housing (131) and a lower spray ring (135). Additionally, the lower spray module (130) may further include a lower separation panel (137). The lower spray module (130) is positioned in the lower portion of the preheat combustor module (120). The lower spray module (130) includes a lower combustion space (130a) into which exhaust gas flows. The lower combustion space (130a) is formed inside the lower spray ring (135) positioned inside the lower housing (131). Additionally, the lower spray module (130) further includes a lower gas channel (130b). The lower gas channel (130b) is formed between the outer periphery of the lower spray ring (135) and the inside of the lower housing (131). The lower gas channel (130b) provides a path through which the lower fuel gas or oxidant flows. The lower gas channel (130b) is connected to a separate lower section supply pipe (not shown). The lower fuel gas can be injected through the lower spray ring (135) to further combust the exhaust gas. The lower spray module (130) can spray an oxidant in addition to the lower fuel gas. It is contemplated that the oxidant can be a gas containing oxygen or ozone.

[0067] The lower housing (131) is formed with a ring-shaped lower gas channel (130b) through which the lower fuel gas flows, and the inside of the lower gas channel (130b) opens into the lower fuel combustion space (130a). In addition, the lower housing (131) is formed in the shape of a ring with a lower housing hole (131a) penetrating from the upper part to the lower part on the inside of the lower housing. The lower housing (131) has a vertical cross section of " The lower housing hole (131a) opens vertically to the lower combustion space (130a). The lower gas channel (130b) is connected to the lower combustion space (130a), and the lower fuel gas that flows in is sprayed into the lower combustion space (130a).

[0068] The lower housing 131 is formed with a lower outer wall hole 131b. The lower outer wall hole 131 is formed from the outer periphery to the inner periphery and is connected to the lower gas channel 130b. The lower outer wall hole 131b can be combined with the lower portion supply pipe.

[0069] The lower spray ring (135) is formed in a ring shape with a predetermined diameter and height. The diameter of the lower spray ring (135) corresponds to the lower housing hole (131a) and is fitted into the lower housing hole (131a) of the lower housing (131). In addition, the lower spray ring (135) is fitted into the inside of the lower gas channel (130b). The lower spray ring (135) spatially separates the lower gas channel (130b) from the lower combustion space (130a).

[0070] The lower spray ring (135) may include a plurality of lower spray holes (135a) extending from the outer periphery to the inner periphery. The lower spray holes (135a) may act as spray nozzles for spraying the lower fuel gas. There may be more than one lower spray hole (135a) spaced apart along the circumferential direction of the lower spray ring (135). In addition, the lower spray holes (135a) may be formed vertically spaced apart. The lower spray holes (135a) may be formed to be inclined downward and inward. Thus, the lower spray holes (135a) may inject the lower fuel gas so that it is sprayed downward toward the center of the lower housing (131).

[0071] The lower separator panel 137 may be formed in the shape of a ring having a predetermined thickness and may be formed with a flat surface corresponding to the flat surface of the lower gas channel 130b. The lower separator panel 137 has an outer diameter corresponding to the outer diameter of the lower gas channel 130b, and an inner diameter corresponding to the inner diameter of the lower gas channel 130b. Therefore, the outer periphery of the lower separator panel 137 contacts the inner periphery of the lower gas channel 130b, and the inner periphery contacts the outer periphery of the lower spray ring 135.

[0072] The lower separation panel (137) can be positioned vertically at an intermediate height of the lower gas channel (130b). The lower separation panel (137) can vertically separate the lower gas channel (130b). Therefore, the lower gas channel (130b) can be formed using the mixed lower gas channel (130c) and the second lower gas channel (130d). In addition, the lower spray module (130) can form lower outer wall holes (131b) in each of the mixed lower gas channel (130c) and the second lower gas channel (130d). In addition, the lower spray ring (135) can form lower spray holes (135a) in each of the mixed lower gas channel (130c) and the second lower gas channel (130d). Therefore, the lower spray module (130) can spray different fuel gases using the mixed lower gas channel (130c) and the second lower gas channel (130d). For example, the mixed lower gas channel (130c) can spray fuel for additional combustion to reduce the amount of nitrogen oxides contained in the combusted exhaust gas. That is, since the exhaust gas flowing from the preheat combustor module (120) to the lower section is in a solid state, it is possible to reduce nitrogen oxides by supplying additional fuel and burning it. In addition, the second lower gas channel (130d) can spray an oxidizer to eliminate nitrogen oxides or hydrocarbon products. That is, it is possible to eliminate hydrocarbon products by spraying an oxidizer such as oxygen into the exhaust gas flowing from the preheat combustor module (120) to the lower section.

[0073] The upper head module (140) described above may include an upper head (141) and an exhaust gas inlet pipe (142). The upper head module (140) may be coupled to the upper portion of the mixer-combustor module (110) to seal the upper portion of the upper head module (140) and supply exhaust gas to the mixer-combustor module (110). Various configurations of upper head modules (140) used in scrubbers for treating semiconductor exhaust gases may be used for the upper head module (140). For example, as shown in Figures 5(a), (b), and (c), the upper head module (140) described above may be configured with two, three, or four exhaust gas inlet pipes (142).

[0074] It is contemplated that the upper head (141) may be formed in a generally conical shape. It is contemplated that the upper head (141) may be formed in various shapes necessary to seal the upper portion of the mixer-combustor module (110). It is contemplated that the lower portion of the upper head (141) may be formed in a flat surface shape corresponding to the upper portion of the mixer-combustor module (110). The lower portion of the upper head (141) is coupled to the upper portion of the mixer-combustor module (110) to seal the upper portion of the mixer-combustor module (110). More specifically, the lower side of the upper head (141) is coupled to the upper portion of the mixer-combustor space (110a) of the mixer-combustor module (110) to seal the upper portion of the mixer-combustor space (110a).

[0075] It is contemplated that the upper head (141) may include a waste gas inlet channel (141a). The waste gas inlet channel (141a) may extend from the upper portion of the upper head (141) to the lower portion thereof and be coupled to the combustion and mixing space (110a). The waste gas inlet channel (141a) provides a channel through which waste gas flows into the combustion space (110a). Depending on the amount of waste gas flowing in and the structure of the upper head (141), there may be at least two waste gas inlet channels (141). It is contemplated that three or four waste gas inlet channels (141a) may be formed. The waste gas inlet channel (141a) supplies waste gas flowing in from the outside to the combustion and mixing space (110a).

[0076] The waste gas inlet channel (142) is formed in a pipe shape and is combined with the outside of the waste gas inlet channel (141a) of the upper head (141). The number of the waste gas inlet pipes (142) can correspond to the number of the waste gas inlet channels (141a) of the upper head (141). It is considered that the waste gas inlet pipes (142) can be connected to the main process line pipe (not shown). The waste gas inlet pipes (142) supply the waste gas flowing into the process line to the waste gas inlet channel (141a) of the upper head (141).

[0077] Meanwhile, in the lower part of the above-mentioned scrubber combustor (100), although not specifically shown, combustion components (not shown) and a water tank (not shown) are installed in the lower part thereof, and in addition, water treatment components (not shown) may be installed in the upper part of the water tank.

[0078] A scrubber combustor according to another embodiment of the present invention will now be described.

[0079] Figure 6 is a vertical cross-sectional view of a scrubber combustor according to another embodiment of the present invention. Figure 7 is a horizontal cross-sectional view taken along CC in Figure 6. Figure 8 is a horizontal cross-sectional view taken along DD in Figure 6.

[0080] A scrubber combustor (200) according to another embodiment of the present invention may include a main combustor module (210), an upper head module (240), and an upper combustor module (250). Although not specifically shown, in the case of the scrubber combustor (200) described above, the lower combustor module (130) of FIGS. 1-5 may be located in a lower portion of the main combustor module (210). Additionally, in the case of the scrubber combustor described above, similar to the scrubber combustor (100) of FIGS. 1-5, the main combustor module (210) may be formed using a combustor module (110) and a preheat combustor module (120), or more than one of either of the two may be present.

[0081] In addition, it is contemplated that the above-described scrubber combustor (200) may be configured, as compared to the scrubber combustor (100) of FIGS. 1-5, by additionally including an upper combustor module (250). In addition, it is contemplated that the upper head module (240) of the scrubber combustor (200) may be configured differently as compared to the scrubber combustor (100) of FIGS. 1-5. In addition, it is contemplated that the main combustor module (210) of the above-described scrubber combustor (200) may be configured in the same manner or similarly to the mixing combustor module (110) or the preheating combustor module (120) of FIGS. 1-5. Therefore, the following description of the above-described scrubber combustor (200) will focus on the upper head module (240) and the upper combustor module (250). In addition, in the case of the above-described scrubber combustor (200), the same or similar structures as those of the scrubber combustor (100) of Figures 1 to 5 may be assigned the same numbers, and detailed descriptions thereof may be omitted.

[0082] The scrubber combustor (200) described above can treat exhaust gases more efficiently because it forms flames in the side and upper portions. That is, the scrubber combustor (200) can combust exhaust gases by using the flame formed by the main combustor module (210) in the side portion of the main combustion space (210a) and the flame formed by the upper combustor module (250) in the upper portion of the main combustion space (210a).

[0083] It is contemplated that the above-described main combustor module (210) may be formed to have the same structure as or a similar structure to the preheat combustor module (120). For example, it is contemplated that the above-described main combustor module (210) may include a preheat housing (121), a preheat spray ring (125), a preheat guide ring (126), and a preheat supply pipe (127). In addition, the above-described main combustor module (210) may further include a preheat spray module (130). Meanwhile, it is contemplated that the above-described main combustor module (210) may be formed to have the same structure as or a similar structure to the mixing combustor module (110). A detailed description of the above-described main combustor module (210) will be omitted here.

[0084] On the other hand, if the above-mentioned scrubber combustor is formed using only the preheat combustor module (120), the preheat housing (121) can be referred to as a housing, the preheat gas channel (120b) can be referred to as a gas channel, and the preheat fuel gas can be referred to as a fuel gas. In addition, the above-mentioned preheat spray ring (125), preheat guide ring (126), and preheat supply pipe (127) can be referred to as a guide ring, spray ring, and supply pipe, respectively.

[0085] The main combustor module (210) may include a preheating gas channel (120b). The main combustor module (210) atomizes the main combustion gas to form a flame in the main combustion space (210a). The main combustion gas may be the same as the preheating combustion gas. Additionally, the main combustion gas may be the same as the mixed combustion gas.

[0086] The upper head module (240) may include an upper head (141) and an exhaust gas inlet pipe (142). The upper head module (240) may be coupled to an upper portion of the main combustor module (210) to seal the upper portion of the main combustor module (210). Additionally, the upper head module (240) may supply exhaust gas to the main combustion space (210a).

[0087] The upper head (241) may include an exhaust gas inlet channel (241b), a combustor-containing groove (241b), and an upper fuel supply channel (241c). The upper head (241) may be formed in a generally conical shape. The upper head (241) may be formed in various shapes necessary to seal the upper portion of the main combustor module (210). The lower portion of the upper head (241) may be formed in a flat-surface shape corresponding to the upper portion of the main combustor module (210). The lower portion of the upper head (241) mates with and seals the upper portion of the main combustor module (210). More specifically, the lower side of the upper head (241) is coupled to the upper portion of the main combustion space (210a) of the main combustor module (210) to seal the upper portion of the preheat combustion space (210a).

[0088] The above-mentioned waste gas inlet channel (241) can penetrate from the upper part of the upper head (241) to the lower part and connect to the main combustion space (210a). It is considered that at least two waste gas inlet channels (241a) can be formed.

[0089] The combustor-containing groove (241b) is formed with a predetermined contained height from the lower portion to the upper portion. The combustor-containing groove (241b) is formed in the upper head (241) with an inner diameter corresponding to the diameter of the main combustion space (210a). In addition, the combustor-containing groove (241b) may be formed with an inner diameter corresponding to the outer diameter of the preheat spray ring (125). The combustor-containing groove (241b) may be formed in an area including the space between the exhaust gas inlet channels (241a). That is, the combustor-containing groove (241b) may be shaped into a cone-shaped shape with a contained height, formed by the exhaust gas inlet channels (241a) penetrating from the upper portion to the lower portion. The combustor-containing groove (241b) provides a space for the combustor module (250).

[0090] The upper fuel supply channel (241c) is formed from the outside of the upper head (241) through to the combustor-containing groove (241b). There may be one or at least two upper fuel supply channels (241c). When at least two upper fuel supply channels (241c) are formed, they may be positioned separately circumferentially using the center of the combustor-containing groove (241b) as a reference point. In addition, the upper fuel supply channel (241) may be formed from the upper center of the upper head (241) through to the center of the combustor-containing groove (241b). The upper fuel supply channel (241c) provides a path for upper fuel gas to be supplied to the combustor-containing groove (241b).

[0091] The upper combustor module (250) may include an upper spray panel (251) and an upper guide panel (252). The upper combustor module (250) may be coupled to the combustor-containing groove (241b) of the upper head (241), with the upper side of the upper guide panel (252) separated from the inner upper side of the combustor-containing groove (241b). Therefore, the upper combustor module (250) may be formed using an upper gas channel (250a) in the upper portion of the combustor-containing groove (241). The upper gas channel (250a) supplies upper fuel gas, supplied through the upper fuel supply channel (241c), through the upper guide panel (252). The upper combustor module (250) may supply upper fuel gas to the main combustion space (210a) to form a flame in the main combustion space (210a).

[0092] The upper spray panel (251) may have a predetermined thickness and may be formed into a shape corresponding to the flat surface shape of the combustor-containing groove (241b). The upper spray panel (251) may be substantially disk-shaped, and its outer diameter may be the same as or larger than the inner diameter of the preheating spray ring (125). In addition, the upper spray panel (251) may be combined with the upper side of the preheating spray ring (125). The upper spray panel (241) may be formed by having an exhaust gas inlet channel (241a) penetrating from the top to the bottom of the upper spray panel (241). The upper spray panel (251) may be formed from the same material as the preheating spray ring (125). The upper spray panel (251) may be combined with the combustor-containing groove (241b) and seal the lower portion of the combustor-containing groove (241b). The upper spray panel (251) can be mated with the lower side of the upper head (241) so that the lower side forms the same flat surface as the lower side of the upper head (241). The upper spray panel (251) can seal the lower portion of the combustor-containing groove (241b).

[0093] The upper spray panel (251) has a plurality of holes formed therein that act as spray nozzles, ensuring that the upper fuel gas is evenly sprayed to the lower portion. In addition, the upper spray panel (251) evenly sprays the upper fuel gas to the lower portion, thereby ensuring that a flame is formed and maintained uniformly. In addition, the upper spray panel (251) is formed with a predetermined thickness, so that the upper fuel gas flowing in from above can be preheated and sprayed. Therefore, the upper spray panel (251) ensures that a flame is formed stably.

[0094] The upper guide panel (252) has a predetermined thickness and is formed in a shape corresponding to the flat surface shape of the upper spray panel (251b). The upper guide panel (252) can be assembled so that its lower side contacts the upper side of the upper spray panel (251). In addition, the lower side of the upper guide panel (252) can be assembled so that it is separated from the upper side of the upper spray panel (251).

[0095] The upper guide panel 252 is formed by providing a plurality of upper guide holes 252a penetrating from the top to the bottom. The upper guide holes 252a may be formed in a dispersed manner over the entire surface of the upper guide panel 252. The upper guide holes 252a ensure that the supplied upper fuel gas is directly supplied to the upper spray panel 251.

[0096] Next, a scrubber combustor according to another embodiment of the present invention will be described.

[0097] Figure 9 is a vertical cross-sectional view of a scrubber combustor according to another embodiment of the present invention. Figure 10 is an enlarged view of the reverse expansion combustor of Figure 9. Figure 11 is a horizontal cross-sectional view taken along line EE of Figure 10. Figure 12 is a horizontal cross-sectional view taken along line FF of Figure 10.

[0098] Referring to Figures 9-12, a scrubber combustor (300) according to another embodiment of the present invention includes a main combustor module (210), an upper head module (340), an upper combustor module (350), and a reverse-expansion combustor (400). Although not specifically shown, in the case of the scrubber combustor (300) described above, the lower combustor module (130) of Figures 1-5 can be positioned in a lower portion of the main combustor module (210). Additionally, in the case of the scrubber combustor described above, it is contemplated that the main combustor module (210) can be formed using a mixing combustor module (110) and a preheating combustor module (120), or more than one of these components, as shown in Figures 1-5.

[0099] The above-described scrubber combustor (300) may be formed by adding a reverse expansion combustor (400) compared to the scrubber combustor shown in FIGS. 6 to 8. The above-described scrubber combustor (300) is formed identically or similarly to the scrubber combustor (200) shown in FIGS. 6 to 8, except that the reverse expansion combustor (400) is formed by providing a channel combined with the upper combustor module (350). Therefore, the description of the above-described scrubber combustor (300) will focus on components that are different from those of the scrubber combustor (200) shown in FIGS. 6 to 8. In addition, the same reference numerals will be assigned to the same or similar structures as those of the scrubber combustor shown in FIGS. 6 to 8, and detailed descriptions will be omitted. Meanwhile, the above-described reverse expansion combustor (400) may be applied in the same manner as the scrubber combustor (100) shown in FIGS. 1 to 5.

[0100] In the case of the above-described scrubber combustor 300, the reverse expansion combustor 400 installed by penetrating the upper head module 340 and the upper combustor module 350 forms a flame in the upper portion of the main combustion space 210a, so that the above-described scrubber combustor 300 can more efficiently treat exhaust gases.

[0101] It is contemplated that the above-described upper head module (340) may include an upper head (341) and an exhaust gas inlet pipe (142). It is contemplated that the above-described upper head module (340) may support a reverse expansion combustor (400) that extends through the upper head (341) and is exposed to the main combustion space (210a).

[0102] The upper head 341 may include a waste gas inlet channel 241 a, a combustor-containing groove 241 b, an oxidant supply channel 241 c, and a reverse-expansion-containing head channel 341 d. The upper head 341 supports a reverse-expansion combustor 400 that extends from its outer upper portion into the combustor-containing groove 241 b.

[0103] The reverse-expansion head channel (341d) extends from the outer center of the upper head (341) to the upper center of the combustor groove (241b). The reverse-expansion head channel (341d) provides a path through which the reverse-expansion combustor (400) is coupled. The reverse-expansion head channel (341d) may have an inner diameter corresponding to the outer diameter of the reverse-expansion combustor (400).

[0104] The upper combustor module (350) described above may include an upper spray panel (351) and an upper guide panel (352). The upper combustor module (350) may support a reverse combustor (400) extending from top to bottom. Thus, the upper combustor module (350) may be used to form holes in the upper spray panel (351) and the upper guide panel (352) through which the reverse expansion combustor (400) extends.

[0105] The upper spray panel (351) may include a reverse-expansion-containing spray channel (351a). The reverse-expansion-containing spray channel (351a) may extend from the center of the upper side of the upper spray panel (351) to the lower side. The reverse-expansion-containing spray channel (351a) may extend from the center of the upper side of the upper spray panel (351) to the upper side of the combustor-containing groove (241b).

[0106] It is contemplated that the reverse-expansion atomizing channel 351 a described above can be formed with an inner diameter corresponding to the outer diameter of the reverse-expansion combustor 400. The reverse-expansion atomizing channel 351 a described above supports the through-type reverse-expansion combustor 400.

[0107] The upper guide panel (352) may include a reverse-expansion guide channel (352b). The reverse-expansion guide channel (352b) extends from the upper center of the upper guide panel (352) to the lower side. The reverse-expansion guide channel (352b) may have an inner diameter corresponding to the outer diameter of the reverse-expansion combustor (400). The reverse-expansion guide channel (352b) supports the through-type reverse-expansion combustor (400).

[0108] 9 to 11, the reverse expansion combustor 400 includes a first nozzle 410, a second nozzle 420, and a third nozzle 430. The reverse expansion combustor 400 may further include a first separation element 440 and a second separation element 450. The reverse expansion combustor 400 may be shaped so that the first nozzle 410, the second nozzle 420, and the third nozzle 430 form a three-pipe configuration with the same central axis. The reverse expansion combustor 400 is supported when the upper head module 340 and the upper combustor module 350 are penetrated, and forms a flame in the main combustion space 210a. The reverse expansion combustor can combust exhaust gas flowing into the main combustion space 210a.

[0109] The reverse expansion combustor (400) can selectively spray fuel and oxidizer from the first nozzle (410), the second nozzle (420), or the third nozzle (430) depending on the type of exhaust gas being treated. For example, the first nozzle (410) can spray the oxidizer, the second nozzle (420) can spray the fuel, and the third nozzle (430) can spray the oxidizer. In addition, the oxygen content of the oxidizer sprayed from the first nozzle (410) can be different from the oxygen content of the oxidizer sprayed from the third nozzle (430). For example, the oxygen content of the oxidizer sprayed from the first nozzle (410) can be higher than the oxygen content of the oxidizer sprayed from the third nozzle (430). In such a case, it is believed that the reverse expansion combustor (400) can stably form a flame therein because the fuel sprayed from the second nozzle (420) expands with the oxidizer sprayed from the first nozzle (410). In addition, the reverse expansion combustor (400) can stably maintain a flame with the oxidizer sprayed from the third nozzle (430). In addition, the oxidizer sprayed from the first nozzle (410) can have a lower oxygen content than the oxidizer sprayed from the third nozzle (430).

[0110] In addition, it is believed that the first nozzle (410) can spray oxidizer, and the second nozzle (420) and the third nozzle (430) can spray fuel. In such a case, when the oxidizer sprayed by the first nozzle (410) comes into contact with the fuel sprayed by the second nozzle (420) and the third nozzle (430), the reverse expansion combustor (400) forms a flame. In particular, it is believed that the reverse expansion combustor (400) can form a stable flame relatively inward because the fuel expands in the direction of the oxidizer sprayed inward.

[0111] In addition, it is believed that the first nozzle (410) can spray an oxidizer, and the second nozzle (420) and the third nozzle (430) can spray a mixture of fuel and oxidizer, respectively. In addition, the first nozzle (410) and the third nozzle (430) can spray an oxidizer, and the second nozzle (420) can spray a mixture of fuel and oxidizer. In such a case, it is believed that the reverse expansion combustor (400) can reduce the generation of nitrogen oxides because a flame is formed when a portion of the fuel is premixed with the oxidizer and then sprayed.

[0112] Oxygen, CDA, air, oxygen + air, oxygen + CDA, oxygen + nitrogen, CDA + nitrogen, air + nitrogen, and oxygen + air + nitrogen can be used with the above oxidizers. In addition, hydrogen (H2), methane (CH4), propane (C3H8), natural gas (CH4 + C3H8 + others) can be used with the above fuels. In addition, all hydrocarbon fuels (C n H m ) can be used.

[0113] The first nozzle (410) may include a first main body (411) and a first nozzle supply pipe (413). The first nozzle (410) may be positioned at the innermost position of the reverse expansion combustor (400). The first nozzle (410) may spray an oxidizer. The first nozzle (410) may form a first channel (410a) through which the oxidizer flows.

[0114] The first main body (411) may be formed in the shape of a pipe with an open upper and lower portion. The first main body (411) may be used to form a first channel (410a) therein. The first main body (411) may have a first inner diameter, a first outer diameter, and a first height. The first main body (411) may have the same first inner diameter at the upper and lower portions. Additionally, the first main body (411) may have the same outer diameter at the upper and lower portions. That is, the first main body (411) may be formed in the shape of a straight pipe. The first inner diameter may be an appropriate length depending on the amount of oxidant to be sprayed. That is, the first inner diameter may be a diameter corresponding to the horizontal cross-sectional area of ​​the first channel (410a) required for the oxidant to flow.

[0115] The first outer diameter of the first main body (411) is determined depending on the required strength and heat resistance, and may be formed with an appropriate thickness. The first height may be determined depending on the structure of the scrubber in which the reverse expansion combustor (400) is installed. The first main body (411) may be formed so that its lower end forms a flat surface. The first main body (411) may be formed from a corrosion-resistant metal material such as stainless steel. The first main body (411) may be formed from a corrosion-resistant material because it may come into contact with components such as F or Cl.

[0116] The first nozzle supply pipe (413) may be formed by a pipe having the same inner diameter as the first main body (411). The first nozzle supply pipe (413) may be straight or curved depending on the position where the reverse expansion combustor (400) is formed. The lower end of the first nozzle supply pipe (413) is connected to the upper end of the first main body (411) and supplies the oxidant supplied from the outside to the first main body (411).

[0117] The second nozzle (420) may include a second main body (421), a second sealing ring (422), and a second nozzle supply pipe (423). The second nozzle (420) may be positioned outside the first nozzle (410) of the reverse expansion combustor (400). The second nozzle (420) may form a second channel (420a) therein through which either fuel or oxidizer flows. The second nozzle (420) may spray only fuel or a mixture of fuel and oxidizer.

[0118] It is contemplated that the second main body (421) described above can be formed in the shape of a pipe with an open upper and lower portion. The second main body (421) described above can have a second inner diameter, a second outer diameter, and a second height. With respect to the second main body (421) described above, the second inner diameter can be the same in the upper and lower portions. In addition, the second outer diameter of the second main body (421) described above can be the same in the upper and lower portions. That is, it is contemplated that the second main body (421) described above can be formed in the shape of a straight pipe. The second inner diameter can be larger than the first outer diameter of the first main body (411).

[0119] The second main body (421) can be positioned outside the first main body (411) so that its central axis is positioned at the same position as the central axis of the first main body (411). For example, the second main body (421) can be combined with the first main body (411) so as to form a concentric circle with the first main body (411) using a horizontal cross section as a reference point. The inner periphery of the second main body (421) can be formed using a second channel (420a) because it is positioned to completely surround the outer periphery of the first main body (411). That is, the first main body (411) can be inserted inside the second main body (421). In addition, the second channel (420a) can be formed as a space between the outer periphery of the first main body (411) and the inner periphery of the second main body (421). Therefore, the second inner diameter can be appropriately determined depending on the amount of fuel or mixed gas to be sprayed and the outer diameter of the first main body (411). That is, the second inner diameter can be determined depending on the horizontal cross section and the first outer diameter of the second channel (420a). The second channel (420a) provides a path through which the fuel or the mixed gas of fuel and oxidizer injected from the second nozzle (420) flows. In addition, the second height can be determined depending on the structure of the scrubber in which the reverse expansion combustor (400) is installed. The second height can be lower than the first height of the first main body (411). The second main body (421) can be formed so that its lower end forms a flat surface. In addition, the second main body (421) can be combined with the first main body (411) so that its lower end is positioned at the same height as the lower end of the first main body (411). Therefore, the upper end of the second main body 421 can be positioned lower than the upper end of the first main body 411. The second outer diameter of the second main body 421 can be determined depending on the required strength and heat resistance, and it is considered that it can be formed with an appropriate thickness. It is considered that the second main body 421 can be formed of a corrosion-resistant metal material such as stainless steel.The second main body (421) mentioned above may come into contact with elements such as F or Cl, and therefore may be made of a corrosion-resistant material.

[0120] The second sealing ring (422) may include a second through-hole (422a). The second sealing ring (422) may be formed in a panel shape having a diameter corresponding to the second inner diameter or the second outer diameter of the second main body (421). The second through-hole (422a) may be formed with a diameter corresponding to the first outer diameter of the first main body (411). The second sealing ring (422) provides a passage through which the first main body (411) is inserted to seal the upper end of the second main body (421). The first main body (411) is assembled to the second main body (421) by being inserted into the inside of the second main body (421) through the second through-hole (422a).

[0121] The second nozzle supply pipe (423) may be formed by a pipe having a predetermined inner diameter. The second nozzle supply pipe (423) may be connected to one end of the second channel (420a) and may be combined with the upper portion of the second main body (421). The second nozzle supply pipe (423) may be straight or curved depending on the position where the reverse expansion combustor (400) is formed. The second nozzle supply pipe (423) supplies fuel or mixed gas supplied from outside to the second main body (421).

[0122] The third nozzle (430) may include a third main body (431), a third sealing ring (432), and a third nozzle supply pipe (433). The third nozzle may be positioned outside the second nozzle (420) of the reverse expansion combustor (400). The third nozzle (430) may define a third channel (430a) therein through which either fuel or oxidizer flows. The third nozzle (430) may spray only fuel or a mixture of fuel and oxidizer.

[0123] The third main body (431) may be formed in the shape of a pipe with an open upper and lower portion. The third main body (431) may have a third inner diameter, a third outer diameter, and a third height. The third main body (431) may have the same third inner diameter at the upper and lower portions. In addition, the third main body (431) may have the same outer diameter at the upper and lower portions. That is, the third main body (431) may be formed in the shape of a straight pipe. The third inner diameter may be larger than the second outer diameter of the second main body (421). The third main body (431) may be positioned outside the second main body (421) so that its central axis is aligned with the central axis of the first main body (411). For example, the above-mentioned second main body (421) can be inserted inside the third main body (431). In addition, the above-mentioned third main body (431) can be combined with the second main body (421) to form a concentric circle with the first main body (411) and the second main body (421).

[0124] The third main body (431) may be formed using a third channel (430a) by being positioned such that its inner periphery completely surrounds the outer periphery of the second main body (421). The third channel (4320) may be formed by the space between the outer periphery of the second main body (421a) and the inner periphery of the third main body (431). Therefore, the third inner diameter may be appropriately determined depending on the amount of fuel or mixed gas to be sprayed and the outer diameter of the second main body (421a). That is, the third inner diameter may be determined by the horizontal cross-sectional area of ​​the third channel (430a) and the second outer diameter. The third diameter (430a) provides a path through which the fuel or mixed gas of fuel and oxidizer injected from the third nozzle (420) flows.

[0125] In addition, the third height may be appropriately determined depending on the structure in which the reverse expansion combustor (400) is installed. The third height may be lower than the second height of the second main body (421). The third main body (431) may be formed so that its lower end forms a flat surface. In addition, the third main body (431) may be combined with the first main body (411) so that its lower end has the same height as the lower end of the first main body (411) and the lower end of the second main body (421). The upper end of the third main body (431) may be lower than the upper end of the second main body (421).

[0126] Meanwhile, although not specifically shown, the third main body 431 may be formed so that its lower end is lower than the lower ends of the first main body 411 and the second main body 421. In this case, the first main body 411 and the second main body 421 may be positioned at the same height. The third main body 431 is the area where the flame is formed, enveloping the outside of the flame to prevent the inflow of waste gas. Therefore, the reverse expansion combustor 400 can prevent the flame from being extinguished by the inflowing waste gas. In addition, the flame can be prevented from being extinguished even when the waste gas supplied in the semiconductor manufacturing process contains a substantial amount of nitrogen.

[0127] In addition, although not specifically shown, the above-mentioned reverse expansion combustor (400) can improve combustion efficiency by pre-mixing the fuel and oxidizer or by using a reverse expansion section of the fuel when the lower end heights of the first main body (411), the second main body (421), and the third main body (431) are set separately.

[0128] When using the third main body (431), the third outer periphery is determined according to the required strength and heat resistance, and it can be formed with an appropriate thickness. The third main body (431) can be formed of a corrosion-resistant metal material such as stainless steel. Since the third main body (431) may come into contact with components such as F or Cl, it can be formed of a corrosion-resistant material.

[0129] The third sealing ring (432) may include a third through-hole (432a). The third sealing ring (432) may be formed in the shape of a panel having a diameter corresponding to the third inner diameter or the third outer diameter of the third main body (431). The third through-hole (432a) may be formed with a diameter corresponding to the second outer diameter of the second main body (421). The third sealing ring (432) provides a passage through which the second main body (421) is inserted when sealing the upper end of the third main body (431). The second main body (421) is assembled with the third main body (431) by being inserted into the third main body (431) through the third through-hole (432a).

[0130] The third nozzle supply pipe (433) may be formed in the shape of a pipe having a predetermined inner diameter. The third nozzle supply pipe (433) is combined with the upper portion of the third main body (431) to be connected to the third channel (430a). The third nozzle supply pipe (433) may be straight or curved depending on the position where the reverse expansion combustor (400) is formed. The third nozzle supply pipe (433) supplies fuel or mixed gas supplied from outside to the third main body (431).

[0131] The first separation component (440) may be in the shape of a block, rod, or panel and may have a length or width corresponding to the distance between the first main body (411) and the second main body (421). The first separation component (440) may have a length corresponding to the distance between the outer periphery of the first main body (411) and the outer periphery of the second main body (421). In such a case, the inner end of the first separation component (440) may be in contact with the outer periphery of the first main body (411), and the outer end may be coupled to penetrate the second main body (421) and be exposed to the outer periphery. In addition, the second separation component (440) may have a length corresponding to the distance between the outer periphery of the first main body (411) and the outer periphery of the second main body (421). In such a case, the first separation component (440) described above can be in contact with the outer periphery of the first main body (411), and its outer end can be in contact with the inner periphery of the second main body (421). The first separation component (440) described above can have an inner end in the shape of a hole corresponding to the outer or inner periphery of the first main body (411), and an outer end in the shape of a hole corresponding to the inner or outer diameter of the second main body (421).

[0132] It is contemplated that the first separation component (440) described above may be formed from a porous material, such as a perforated plate, beads, porous foam, sintered plate, metal fiber, or packed beads.

[0133] More than one of the first separation components (440) can be positioned separately along the height of the first main body (411). In addition, at least two of the first separation components (440) can be positioned separately along the circumferential direction of the first main body (411). The first separation components (440) support the first main body (411) and the second main body (421) and maintain the separation distance between the first main body (411) and the second main body (421). More specifically, the inner and outer sides of the first separation components (440) are mated with the first main body (411) and the second main body (421), respectively, such that the spacing between the outer periphery of the first main body (411) and the inner periphery of the second main body (421) is consistently maintained.

[0134] The second separation element (450) may be in the shape of a block, rod, or panel and may have a length or width corresponding to the distance between the second main body (421) and the third main body (431). The second separation element (450) may have a length corresponding to the distance between the outer periphery of the second main body (421) and the outer periphery of the third main body (431). In such a case, the second separation element (450) may be assembled such that its inner end contacts the outer periphery of the second main body (421) and its outer end penetrates the third main body (431) and is exposed to the outer periphery. In addition, the second separation element (450) may have a length corresponding to the distance between the outer periphery of the second main body (421) and the inner periphery of the third main body (431). In such a case, the above-mentioned second separation component (450) can be in contact with the outer periphery of the second main body (421), and its outer end can be in contact with the inner periphery of the third main body (431). It is contemplated that the above-mentioned second separation component (450) can be in the shape of a hole corresponding to the outer or inner periphery of the second main body (421), and its outer end can be formed in the shape of a hole corresponding to the inner or outer diameter of the third main body (431).

[0135] It is contemplated that the second separation component (450) may be formed from a porous material, such as a perforated plate, beads, porous foam, sintered plate, metal fibers, or packed beads.

[0136] More than one of the second separation components (450) can be positioned separately along the height of the second main body (411). In addition, at least two of the second separation components (450) can be positioned separately along the circumferential direction of the second main body (421). The second separation components (450) support the second main body (421) and the third main body (421) and maintain the separation distance between the second main body (421) and the third main body (431). More specifically, the inner and outer sides of the second separation components (450) are coupled to the second main body (421) and the third main body (431), respectively, such that the spacing between the outer periphery of the second main body (421) and the inner periphery of the third main body (431) is consistently maintained.

[0137] The reverse expansion combustor (400) described above may be assembled such that the first main body (411), the second main body (421), and the third main body (431) are separated from one another. For example, the second sealing ring (422) of the second main body (421) may be assembled such that it is separated from the outer periphery of the first main body (411). In addition, the third sealing ring (432) of the third main body (431) may be assembled such that it is separated from the outer periphery of the second main body (421). In addition, the first separation component (440) and the second separation component (450) described above may be assembled such that the first main body (411) and the second main body (421) or the second main body (431) and the third main body (431) are separated. Therefore, by using the reverse expansion combustor (400) described above, when a single main body is relatively severely corroded, it is possible to reduce the overall maintenance cost by simply replacing the main body.

[0138] In addition, the reverse expansion combustor (400) described above can be used to form a partial oxidation flame with a fuel-rich combustion state by adjusting the oxidizer sprayed from the first nozzle (410) and the third nozzle (430). Therefore, the reverse expansion combustor (400) described above can increase the DRE (%) of NF3 and CF4 by using the hydrogen radicals generated by the partial oxidation flame.

[0139] In addition, the above-mentioned reverse expansion combustor (400) can increase the DRE (%) of the PFC gas by differentiating the type of oxidizer sprayed from the first nozzle (410) and the second nozzle (420) depending on the type of PFC gas and adjusting the temperature and strength of the flame.

[0140] In addition, by using a gas mixture with reduced oxygen and nitrogen content sprayed from the first nozzle (410) or the third nozzle (430), it is possible to reduce the amount of carbon monoxide and nitrogen oxides produced during the combustion process.

[0141] A scrubber combustor according to another embodiment of the present invention will now be described.

[0142] FIG. 13 is a vertical cross-sectional view of a scrubber combustor according to another embodiment of the present invention.

[0143] 13, it can be seen that a scrubber combustor (500) according to another embodiment of the present invention can include a mixing combustor module (110), a preheat combustor module (120), an upper head module (540), and a super-adiabatic combustor (560). In addition, the above-described scrubber combustor (500) can further include a lower spray module (130).

[0144] Compared with the scrubber combustor (100) of FIGS. 1-5, the scrubber combustor (500) described above may additionally include a super-adiabatic combustor (560). Additionally, the specific configuration of the upper head module (540) of the scrubber combustor (500) may be different. Meanwhile, the mixing combustor module (110) and the preheating combustor module (120) of the scrubber combustor (500) may be configured in the same manner or similarly to the mixing combustor module (110) or the preheating combustor module (120) of FIGS. 1-5. Therefore, the following description of the scrubber combustor (500) will focus on the upper head module (540) and the super-adiabatic combustor (560). Additionally, in the case of the scrubber combustor (500) described above, the same or similar structures as those of the scrubber combustor (100) of FIGS. 1-5 will be assigned the same reference numerals, and detailed descriptions thereof will be omitted.

[0145] On the other hand, although the above-described scrubber combustor (500) is not specifically shown, it is considered that the main combustor module (210) of Figures 6-8 can be formed in place of the mixing combustor module (110) and the preheating combustor module (120). Therefore, the above-described superadiabatic combustor (560) can be applied in the same or similar structure as the scrubber combustor (200) of Figures 6-8 and the scrubber combustor (300) of Figures 9-12.

[0146] It is contemplated that the above-described upper head module (540) may include an upper head (541) and an exhaust gas inlet pipe (142). It is contemplated that the above-described upper head module (540) may support a super-insulated combustor (560) that extends through the upper head (541) and is exposed to the main combustion space (210a).

[0147] The upper head (541) may include a waste gas inlet channel (141a) and a super-insulation-containing head channel (541d). The upper head (541) supports a super-insulated combustor (560) in combination with the super-insulated head channel (541d).

[0148] It is contemplated that the superinsulation-containing head channel (541d) described above may be formed by penetrating from the outer center of the upper head (541) to the lower side. The superinsulation-containing head channel (541d) described above provides a path that interlocks when penetrating the superinsulation combustor (560). It is contemplated that the superinsulation-containing head channel (541d) described above may be formed with an inner diameter that corresponds to the outer diameter of the superinsulation combustor (560).

[0149] The super-insulated combustor (560) may include a super-insulated housing (561), a preheating layer (562), and a reforming layer (563). The super-insulated combustor (560) may be combined with a super-insulated head channel (541d) to form a flame in the mixing and combustion space (110a). The super-insulated combustor (560) may preheat and reform a fuel-rich mixed gas into a hydrogen-rich mixed gas to be atomized. Here, the fuel may be a hydrocarbon gas such as CH4.

[0150] The super-insulated housing (561) may be formed in the shape of a tube, pipe, or barrel with an open upper and lower portion. The super-insulated housing (561) may be formed in the shape of a cylinder. The super-insulated housing (561) may be formed with an appropriate inner diameter depending on the amount of mixed gas to be introduced. The super-insulated housing (561) may be formed from a corrosion-resistant and thermally conductive metal material. The gas housing may be formed from, for example, stainless steel or an Invar alloy.

[0151] The preheating layer (562) may be formed in the shape of a block having a predetermined height and a horizontal cross-sectional shape of the super-insulated housing (561). The preheating layer (562) may be formed as a circular block. The preheating layer (562) may be formed of a porous material. The preheating layer (562) may be formed of a porous foam, beads, or honeycomb. The porous foam may include a plurality of curved holes extending from the top to the bottom. The porous foam may be formed of a ceramic foam or a metal foam. Additionally, the ceramic foam may be formed of alumina (Al2O3), zirconia (ZrO2, PSZT), silicon carbide (SiC), or oxide-bonded silicon carbide (OBSiC). The honeycomb may include a plurality of straight holes extending from the top to the bottom. The beads may be formed of a ceramic foam. Thus, it is contemplated that the beads may be formed from alumina (Al2O3), zirconia (ZrO2, PSZT), silicon carbide (SiC), or oxide-bonded silicon carbide (OBSiC). It is contemplated that the honeycomb may be formed from a ceramic material or a metallic material. It is contemplated that the honeycomb may be formed from a ceramic material such as cordierite. In addition, it is contemplated that the honeycomb may be formed from a metallic alloy such as Fe-Cr-Al.

[0152] The preheating layer (562) can be located in the upper portion of the super-insulated housing (561). The preheating layer (562) can be located such that its upper side is separated from the upper end to the lower end of the gas housing. Therefore, the preheating layer (562) can be formed by including a space in the upper portion through which the fuel-rich mixed gas flows. In addition, the preheating layer (562) can be heated by heat transferred from the reforming layer (563) located in the lower portion. Therefore, the preheating layer (562) can preheat the fuel-rich mixed gas flowing from the upper portion and supply it to the reforming layer (563).

[0153] The reforming layer (563) may be formed in the shape of a block having a predetermined height and a horizontal cross-sectional shape of the super-insulating housing (561). The reforming layer (563) may be formed with the same horizontal area as the preheating layer (562). The reforming layer (563) may be formed with an appropriate height depending on the amount of mixed gas flowing in. For example, if the reforming layer (563) is too low, the reforming reaction may not proceed sufficiently. The reforming layer (563) may have passages through which gas can flow from the top to the bottom. The reforming layer (563) may be formed with a porous foam or honeycomb structure throughout. The reforming layer (563) may be formed of a ceramic material or a metal material. The reforming layer (563) may be formed of alumina or an alloy. The aforementioned reforming layer (563) can be positioned within the super-insulated housing (561) at the lower portion of the preheating layer, with its upper side in contact with the upper side of the preheating layer (562).

[0154] The reforming layer 563 partially oxidizes the preheated fuel-rich mixed gas flowing from the preheating layer 562 located in the upper portion to convert it into a hydrogen-rich mixed gas. The reforming layer 563 converts the fuel-rich mixed gas into a hydrogen-rich mixed gas through a partial oxidation reaction. For example, the reforming layer 563 can convert the mixed gas into a hydrogen-rich state according to the following reaction formula 1):

[0155] CH4+1 / 202→CO+2H2+Q 1)

[0156] It is believed that the reforming layer (563) can form a flame by spraying the hydrogen-rich mixed gas downward. The flame formed by the reforming layer (563) can decompose the waste gas by reacting with the waste gas in the mixed combustion space (110a) of the mixed combustion module. For example, the hydrogen-rich mixed gas can decompose the waste gas as shown in the following reactions 2) and 3). Reaction 2) shows the decomposition of CF4 contained in the waste gas, and reaction 3) shows the case where the waste gas contains NF3.

[0157] CF4+2H2+Q→4HF+C 2)

[0158] 2NF3+3H2+Q→4HF+N2...3)

[0159] Additionally, the reforming layer (563) can transfer heat generated by the flame to the preheating layer (562) located in the upper section, which, when heated, can preheat the fuel-rich gas mixture entering from the upper section.

[0160] The preheating layer (562) and the reforming layer (563) can improve thermal efficiency by recycling heat. That is, the preheating layer (562) can preheat the mixed gas with heat transferred from the reforming layer (563). In particular, the preheating layer (562) and the reforming layer (563) are formed using a porous material, which increases the contact area of ​​the mixed gas and results in efficient heat recycling. In addition, the preheating layer (562) and the reforming layer (563) can increase the heat and the range of the mixed gas due to vortex motion generated when the mixed gas flows through the porous material. In addition, the preheating layer (562) and the reforming layer (563) can form a superadiabatic flame having a temperature higher than the adiabatic flame temperature due to the high degree of heat recycling.

[0161] The super-adiabatic combustor (560) described above can expand the combustion limit by increasing the amount of heat generated relative to the amount of heat lost. The super-adiabatic combustor (560) described above can burn under both ultra-low fuel and ultra-high fuel conditions. That is, the super-adiabatic combustor (560) described above can be applied to a highly efficient, low-pollution combustor through mixed combustion under ultra-low fuel conditions. In addition, the super-adiabatic combustor (560) described above can reform fuel by producing hydrogen and carbon monoxide through partial oxidation under ultra-high fuel conditions.

[0162] The above description is a single embodiment for realizing the scrubber combustor under the present invention, and the above-mentioned invention is not limited to the above-mentioned embodiment. As will be described in the claims section below, the technical spirit of the present invention encompasses the scope within which a person skilled in the art with a standard level of knowledge in the field to which the present invention pertains can make various modifications without departing from the gist of the present invention.

[0163] Explanation of symbols 100,200,300,500 Scrubber combustor 110 Mixing Combustor Module 111 Mixed Housing 112 Mixed outer wall ring 113 Mixed Upper Panel Ring 114 Mixed Lower Panel Ring 115 Mixing spray ring 116 Mixed Guide Ring 117 Mixed Supply Pipe 120 Preheater Combustor Module 121 Preheating housing 122 Preheating outer wall ring 123 Preheat upper panel ring 124 Preheat lower panel ring 125 Preheating spray ring 126 Preheating guide ring 127 Preheat supply pipe 128 Preheating spray panel 130 Lower Spray Module 131 Lower housing 135 Lower spray ring 137 Lower separation panel 140 Upper head module 141 Upper Head 142 Waste gas inlet pipe 210 Main Combustor Module 240,340,540 Upper head module 241,341,541 Upper head 250,350 Upper Combustor Module 251,351 Upper spray panel 252,352 Upper guide panel 400 Reverse expansion combustor 410 First Nozzle 411 First Main Body 413 First Supply Pipe 420 Second Nozzle 421 Second Main Body 422 Second sealing ring 423 Supply Pipe 430 Third Nozzle 431 Third Main Body 432 Third Sealing Ring 433 Third Supply Pipe 440 First Separation Component 450 Second Separation Component 560 Super-Adiabatic Combustor 561 Super Insulated Housing 562 Preheating layer 563 Modified Layer

Claims

1. A scrubber combustor, 1. A preheat combustor module comprising: a preheating spray ring formed of a porous material having a predetermined thickness, which is formed using metal fibers, metal foam, packed beads, ceramic foam, nano-sized porous media, or porous sintered metal, and which preheats fuel gas and sprays the fuel gas into a preheating combustion space formed radially inside; a preheating guide ring that surrounds the outer periphery of the preheating spray ring and has a plurality of preheating guide holes that penetrate from the outer periphery to the inner periphery; a housing defining a ring-shaped gas channel between the outer periphery of the preheat guide ring and the housing, through which the fuel gas flows; a preheat combustor module comprising: a mixing combustor module including: a mixing spray ring, the mixing spray ring having a plurality of spray holes formed therethrough from the outer periphery to the inner periphery, positioned in an upper part or a lower part of the preheating combustor module, for spraying a mixed fuel gas containing an oxidizer including air and oxygen and a fuel into a mixed combustion space formed radially inward; a mixing guide ring, the mixing guide ring being separated from the outer periphery of the mixing spray ring and having a plurality of guide holes formed therethrough from the outer periphery to the inner periphery; and a mixing housing, the mixing housing forming a mixed gas channel through which the mixed fuel gas flows between the outer periphery of the mixing guide ring and the mixing housing, The mixing combustion space is connected to the preheating combustion space, The scrubber combustor comprises: a lower spray module, which is located in a lower portion of the preheating combustion module or the mixing combustion module located in the relatively lower portion, and which has a lower spray ring therein for spraying lower fuel gas into a lower combustion space connected to the preheating combustion space or the mixing combustion space; the lower spray module further comprises a lower housing surrounding the outer periphery of the lower combustion space to form a ring-shaped lower gas channel through which the lower fuel gas flows, and having a lower outer wall hole penetrating from the outer periphery to the lower gas channel; the lower spray ring is positioned radially inward of the lower gas channel and includes lower spray holes for spraying the lower fuel gas or oxidizer; A scrubber combustor characterized by:

2. The scrubber combustor of claim 1 , wherein the inner periphery of the preheat guide ring is in contact with the outer periphery of the preheat atomizing ring.

3. There are at least two stacked preheat combustor modules; The preheat combustor module atomizes fuel gases having different components or different mixing ratios; 2. The scrubber combustor of claim 1.

4. The scrubber combustor of claim 1 wherein there are at least two stacked mixing combustor modules.

5. the lower atomization module includes a lower separation panel separating a first lower gas channel and a second lower gas channel positioned vertically in the lower gas channel; the lower outer wall holes and the lower spray holes are connected to the first lower gas channel and the second lower gas channel, respectively; 2. The scrubber combustor of claim 1.

6. 2. The scrubber combustor according to claim 1, further comprising an adiabatic combustor that preheats the fuel-rich mixed gas, reforms it into a hydrogen-rich mixed gas, and sprays it into the preheated combustion space.

7. 7. The scrubber combustor according to claim 6, wherein the adiabatic combustor includes an insulating housing formed in the shape of a tube that opens at the upper and lower portions, a preheating layer positioned on the inside upper side of the insulating housing to preheat the fuel-rich mixed gas, and a reforming layer formed using a porous material and positioned on the lower portion of the preheating layer to reform the fuel-rich mixed gas into the hydrogen-rich mixed gas.

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