industrial robots

Abstract

To provide an industrial robot capable of reducing costs, even if it is possible to transport a comparatively heavy transported object such as a mask and to efficiently transport a comparatively light transported object such as a glass substrate.SOLUTION: In an industrial robot, an arm 7 is equipped with a first tip end side arm portion 10, a second tip end side arm portion 11, and a common arm portion 12. The common arm portion 12 is equipped with a first common arm portion 20 to which a base end side of the first tip end side arm portion 10 is rotatably coupled, and a second common arm portion 21 to which a base end side of the second tip end side arm portion 11 is rotatably coupled. In the industrial robot, a first distance L1 between centers is shorter than a second distance L2 between centers, or a first common arm width H1 is wider than a second common arm width H2, and the stiffness on the first common arm portion 20 side of the common arm portion 12 is higher than the stiffness on the second common arm portion 21 side of the common arm portion 12.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to an industrial robot for transporting an object to be transported. [Background technology]

[0002] Conventionally, an industrial robot that transports glass substrates for liquid crystal displays in a vacuum has been known (see, for example, Patent Document 1). The industrial robot described in Patent Document 1 includes two hands, an arm to which the two hands are rotatably connected, and a main body to which the arms are rotatably connected. The arm is composed of two tip-side arm sections to which the tips of the two hands are rotatably connected, and one common arm section to which the base ends of the two tip-side arm sections are rotatably connected. The common arm section is formed in a substantially V-shape. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2018-15839 Summary of the Invention [Problem to be solved by the invention]

[0004] The industrial robot described in Patent Document 1, for example, loads and unloads glass substrates into and from a process chamber. In the process chamber, a predetermined process is performed on the glass substrate to manufacture a liquid crystal display. For example, in the process chamber, a predetermined process is performed on the glass substrate using a mask that partially covers the surface of the glass substrate. When a mask is used in the process chamber, a situation may arise where, in order to clean the used and dirty mask, the used mask must be periodically unloaded from the process chamber and the cleaned mask must be loaded into the process chamber.

[0005] In this case, if the mask is transported to the process chamber by the same industrial robot that transports the glass substrate to the process chamber, the configuration of the LCD manufacturing system can be simplified. However, the mask is heavier than the glass substrate, for example, weighing more than 30 times as much. Therefore, it is difficult to transport the mask using the same industrial robot that transports the glass substrate.

[0006] In order to enable the transport of masks by industrial robots for transporting glass substrates, it is sufficient to increase the rigidity of the industrial robot. However, simply increasing the rigidity of the industrial robot to transport masks, which are transported less frequently than glass substrates, would increase costs, such as the manufacturing cost of the industrial robot.

[0007] Therefore, an object of the present invention is to provide an industrial robot that is capable of transporting relatively heavy objects such as masks, and is also capable of efficiently transporting relatively light objects such as glass substrates, while still being able to reduce costs. [Means for solving the problem]

[0008] In order to solve the above problems, the industrial robot of the present invention comprises a first hand and a second hand on which a transport object is placed, an arm to which the first hand and the second hand are rotatably connected at their tip ends with the vertical direction as the axis of rotation, and an arm support part to which the base end side of the arm is rotatably connected with the vertical direction as the axis of rotation, the arm comprising a first tip side arm part to which the first hand is rotatably connected at its tip end, a second tip side arm part to which the second hand is rotatably connected at its tip end, and a common arm part to which the base end side of the first tip side arm part and the base end side of the second tip side arm part are rotatably connected with the vertical direction as the axis of rotation and which is rotatably connected to the arm support part, the common arm part comprising a first common arm part to which the first tip side arm part is rotatably connected at its tip end, and a second common arm part to which the second tip side arm part is rotatably connected at its tip end and an arm section, wherein the horizontal distance between the rotation center of the common arm section relative to the arm support section and the rotation center of the first tip-side arm section relative to the first common arm section is defined as a first center distance, the horizontal distance between the rotation center of the common arm section relative to the arm support section and the rotation center of the second tip-side arm section relative to the second common arm section is defined as a second center distance, the width of the first common arm section in a direction perpendicular to the longitudinal direction and the up-down direction of the first common arm section is defined as a first common arm width, and the width of the second common arm section in a direction perpendicular to the longitudinal direction and the up-down direction of the second common arm section is defined as a second common arm width, at least the first center distance is shorter than the second center distance or the first common arm width is wider than the second common arm width, and the rigidity of the first common arm section side of the common arm section is higher than the rigidity of the second common arm section side of the common arm section. The base end of the first common arm is rotatably connected to the arm support, and the base end of the second common arm is fixed to the base end of the first common arm. It is characterized by:

[0009] In the industrial robot of the present invention, the common arm section includes a first common arm section to which a first tip-side arm section is rotatably connected at its tip end, and a second common arm section to which a second tip-side arm section is rotatably connected at its tip end. Also, in the present invention, at least the first center distance is shorter than the second center distance, or the first common arm width is wider than the second common arm width, and the rigidity of the common arm section on the first common arm section side is higher than the rigidity of the common arm section on the second common arm section side.

[0010] Therefore, in the present invention, it is possible to transport a relatively heavy object, such as a mask, using the first common arm portion, the first tip-side arm portion, and the first hand. Furthermore, in the present invention, because the rigidity of the second common arm portion side of the common arm portion is lower than the rigidity of the first common arm portion side of the common arm portion, it may be difficult to transport a relatively heavy object using the second common arm portion, the second tip-side arm portion, and the second hand. However, if the object is relatively light, such as a glass substrate, it is possible to transport the object using the second common arm portion, the second tip-side arm portion, and the second hand. That is, in the present invention, it is possible to transport a relatively light object using two hands, the first hand and the second hand. Therefore, in the present invention, it is possible to efficiently transport a relatively light object, such as a glass substrate.

[0011] Furthermore, the present invention makes it possible to reduce the cost of the industrial robot compared to when the rigidity of the second common arm portion of the common arm portion is equivalent to the rigidity of the first common arm portion of the common arm portion. That is, the present invention makes it possible to reduce the cost of the industrial robot even though it is capable of transporting relatively heavy objects and efficiently transporting relatively light objects. Furthermore, in the present invention, the base end side of the first common arm part is rotatably connected to the arm support part, and the base end of the second common arm part is fixed to the base end side of the first common arm part. For example, if the common arm part has a member rotatably connected to the arm support part, and the base end of the first common arm part and the base end of the second common arm part are fixed to this member (i.e., if the first common arm part is connected to the arm support part via a specified member), there is a risk of a decrease in rigidity at the part where the first common arm part is fixed to this member, but this problem does not arise because the first common arm part is directly connected to the arm support part.

[0012] In the present invention, it is preferable that the first center distance is shorter than the second center distance and the first common arm width is wider than the second common arm width. This configuration makes it possible to further increase the rigidity of the first common arm portion side of the common arm portion. Therefore, it becomes possible to transport heavier objects using the first common arm portion, the first tip-side arm portion, and the first hand.

[0013] In the present invention, if the horizontal distance between the center of rotation of the first tip-side arm section relative to the first common arm section and the center of rotation of the first hand relative to the first tip-side arm section is defined as a third center-to-center distance, and the horizontal distance between the center of rotation of the second tip-side arm section relative to the second common arm section and the center of rotation of the second hand relative to the second tip-side arm section is defined as a fourth center-to-center distance, it is preferable that the first center-to-center distance is shorter than the second center-to-center distance, the first center-to-center distance and the third center-to-center distance are equal, and the second center-to-center distance and the fourth center-to-center distance are equal, and the rigidity of the first tip-side arm section is higher than the rigidity of the second tip-side arm section.

[0014] With this configuration, the rigidity of the first tip-side arm section connected to the first common arm section is increased, making it possible to transport heavier objects using the first common arm section, first tip-side arm section, and first hand. Also, compared to when the rigidity of the second tip-side arm section is equivalent to that of the first tip-side arm section, it is possible to reduce the cost of the industrial robot.

[0015] In the present invention, if the width of the first tip-side arm portion in a direction perpendicular to the longitudinal direction and the up-down direction of the first tip-side arm portion is defined as the first tip-side arm width, and the width of the second tip-side arm portion in a direction perpendicular to the longitudinal direction and the up-down direction of the second tip-side arm portion is defined as the second tip-side arm width, it is preferable that the first tip-side arm width is wider than the second tip-side arm width and the rigidity of the first tip-side arm portion is higher than the rigidity of the second tip-side arm portion.

[0016] With this configuration, the rigidity of the first tip-side arm section connected to the first common arm section is increased, making it possible to transport heavier objects using the first common arm section, first tip-side arm section, and first hand. Also, compared to when the rigidity of the second tip-side arm section is equivalent to that of the first tip-side arm section, it is possible to reduce the cost of the industrial robot.

[0017] In the present invention, it is preferable that the vertical thickness of the first tip-side arm section is greater than the vertical thickness of the second tip-side arm section, and that the rigidity of the first tip-side arm section is greater than the rigidity of the second tip-side arm section. With this configuration, the rigidity of the first tip-side arm section connected to the first common arm section is increased, making it possible to transport heavier objects using the first common arm section, the first tip-side arm section, and the first hand. Furthermore, it is possible to reduce the cost of the industrial robot compared to when the rigidity of the second tip-side arm section is equivalent to the rigidity of the first tip-side arm section.

[0019] In the present invention, it is preferable that the angle formed between the first common arm portion and the second common arm portion is 90° when viewed from the top-bottom direction. With this configuration, the configuration of the first common arm portion and the second common arm portion is simplified compared to when the angle formed between the first common arm portion and the second common arm portion is an acute angle or an obtuse angle when viewed from the top-bottom direction, and it becomes possible to easily fix the base end of the second common arm portion to the base end side of the first common arm portion. [Effects of the Invention]

[0020] As described above, the industrial robot of the present invention is capable of transporting relatively heavy objects such as masks, and is also capable of efficiently transporting relatively light objects such as glass substrates, thereby making it possible to reduce the cost of the industrial robot. [Brief explanation of the drawings]

[0021] [Figure 1]1 is a plan view of an industrial robot according to an embodiment of the present invention; [Figure 2] 2 is a cross-sectional view for explaining the internal configuration of the arm shown in FIG. 1. FIG. [Figure 3] FIG. 2 is a plan view of the arm shown in FIG. [Figure 4] FIG. 10 is a plan view of an industrial robot according to another embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0022] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0023] (Configuration of industrial robots) Fig. 1 is a plan view of an industrial robot 1 according to an embodiment of the present invention. Fig. 2 is a cross-sectional view for explaining the internal configuration of an arm 7 shown in Fig. 1.

[0024] The industrial robot 1 (hereinafter referred to as "robot 1") of this embodiment is a horizontal articulated robot for transporting, for example, a glass substrate 2 for an organic EL (organic electroluminescence) display or a glass substrate 2 for a liquid crystal display (hereinafter referred to as "substrate 2"). The robot 1 is incorporated into a display manufacturing system and used to transport the substrate 2 in a vacuum. The display manufacturing system is equipped with multiple process chambers.

[0025] The robot 1 transports the substrate 2 to the process chamber. That is, the robot 1 loads the substrate 2 into the process chamber and unloads the substrate 2 from the process chamber. In the process chamber, a predetermined process is performed on the substrate 2 using a mask 3 that partially covers the surface of the substrate 2 in order to manufacture a display. The mask 3 is periodically cleaned. The cleaning of the mask 3 is performed outside the process chamber.

[0026] The robot 1 of this embodiment also transports the mask 3 to the process chamber. That is, the robot 1 transports the mask 3 out of the process chamber and into the process chamber. For example, the robot 1 transports a used mask 3 transported out of the process chamber into the mask storage section, and transports a cleaned mask 3 out of the mask storage section and into the process chamber. The mask 3 is heavier than the substrate 2. For example, the weight of the mask 3 is 30 times or more the weight of the substrate 2. The substrate 2 and mask 3 of this embodiment are objects to be transported by the robot 1.

[0027] The robot 1 includes a hand 5 on which a substrate 2 and a mask 3 are mounted, a hand 6 on which the substrate 2 is mounted, an arm 7 to which the hands 5 and 6 are rotatably connected with an axial direction of rotation in the vertical direction, and a main body 8 to which the arm 7 is rotatably connected with an axial direction of rotation in the vertical direction. The hands 5 and 6 are rotatably connected to the tip end of the arm 7. The base end of the arm 7 is rotatably connected to the main body 8. The robot 1 normally transports the substrate 2 with the two hands 5 and 6, and transports the mask 3 with the hand 5 when replacing the mask 3. In this embodiment, the hand 5 is the first hand, the hand 6 is the second hand, and the main body 8 is the arm support unit.

[0028] The arm 7 includes a tip-side arm section 10 to which the hand 5 is rotatably connected, a tip-side arm section 11 to which the hand 6 is rotatably connected, and a common arm section 12 to which the tip-side arms 10, 11 are rotatably connected with the vertical direction as the axis of rotation and which is also rotatably connected to the main body section 8. The arm 7 in this embodiment is composed of the tip-side arms 10, 11 and the common arm section 12. The hand 5 is rotatably connected to the tip side of the tip-side arm section 10. The hand 6 is rotatably connected to the tip side of the tip-side arm section 11. The tip-side arm section 10 in this embodiment is a first tip-side arm section, and the tip-side arm section 11 is a second tip-side arm section.

[0029] The base ends of the tip-side arms 10 and 11 are rotatably connected to the common arm 12. Specifically, the common arm 12 is formed so that its shape when viewed from above and below is V-shaped, with the base end of the tip-side arm 10 rotatably connected to one tip end of the V-shaped common arm 12, and the base end of the tip-side arm 11 rotatably connected to the other tip end of the common arm 12. The base end of the common arm 12 is rotatably connected to the main body 8. Specifically, the center portion (vertex portion) of the V-shaped common arm 12 is rotatably connected to the main body 8. A more specific configuration of the arm 7 will be described later.

[0030] The hand 5 is arranged below the hand 6. The tip side arm unit 10 is arranged below the hand 5. The tip side arm unit 11 is arranged above the hand 6. The common arm unit 12 is arranged below the tip side arm unit 10. In other words, the tip side arm units 10, 11 are arranged above the common arm unit 12. The common arm unit 12 is arranged above the main body unit 8.

[0031] The hands 5 and 6 each have a base 14 connected to the arm 7 and a fork 15 protruding horizontally from the base 14. The base 14 of the hand 5 is rotatably connected to the tip of the tip-side arm 10, and the base 14 of the hand 6 is rotatably connected to the tip of the tip-side arm 11. The fork 15 is fixed to the base 14. The substrate 2 and the mask 3 are loaded on the fork 15 of the hand 5. That is, the hand 5 transports the substrate 2 as well as the mask 3. The substrate 2 is loaded on the fork 15 of the hand 6. That is, the hand 6 transports the substrate 2 but does not transport the mask 3.

[0032] The robot 1 is equipped with an arm section drive mechanism 16 that rotates the tip-side arm section 10 relative to the common arm section 12 and rotates the hand 5 relative to the tip-side arm section 10, and an arm section drive mechanism 17 that rotates the tip-side arm section 11 relative to the common arm section 12 and rotates the hand 6 relative to the tip-side arm section 11. The robot 1 also is equipped with an arm section drive mechanism that rotates the common arm section 12 relative to the main body section 8, and an elevation mechanism that raises and lowers the arm 7 relative to the main body section 8.

[0033] (Specific configuration of the arm) FIG. 3 is a plan view of the arm 7 shown in FIG.

[0034] As described above, the arm 7 is composed of the tip-side arm portions 10, 11 and the common arm portion 12. The tip-side arm portions 10, 11 are formed in the shape of a block that has an elongated oval shape when viewed from the top-bottom direction and is relatively thin in thickness in the top-bottom direction. The tip-side arm portions 10, 11 are formed in a hollow shape. The thickness (thickness in the top-bottom direction) t1 of the tip-side arm portion 10 is constant, and the thickness (thickness in the top-bottom direction) t2 of the tip-side arm portion 11 is constant.

[0035] As described above, the common arm portion 12 is formed so that its shape when viewed from above and below is V-shaped. The common arm portion 12 is formed hollow. The common arm portion 12 includes a first common arm portion 20 to which the tip-side arm portion 10 is rotatably connected, and a second common arm portion 21 to which the tip-side arm portion 11 is rotatably connected. The common arm portion 12 in this embodiment is composed of the first common arm portion 20 and the second common arm portion 21.

[0036] The first common arm portion 20 has an elongated oval shape when viewed from the top-bottom direction and is formed like a block with a relatively thin thickness in the top-bottom direction. The second common arm portion 21 has an elongated, approximately rectangular shape when viewed from the top-bottom direction and is formed like a block with a relatively thin thickness in the top-bottom direction. The tip of the second common arm portion 21 has a semicircular shape when viewed from the top-bottom direction, and the base end of the second common arm portion 21 has a linear shape when viewed from the top-bottom direction. The thickness of the first common arm portion 20 (thickness in the top-bottom direction) is constant, and the thickness of the second common arm portion 21 (thickness in the top-bottom direction) is also constant. Furthermore, the thickness of the first common arm portion 20 and the thickness of the second common arm portion 21 are equal.

[0037] The tip-side arm portion 10 is rotatably connected to the tip side of the first common arm portion 20. The tip-side arm portion 11 is rotatably connected to the tip side of the second common arm portion 21. The base end side of the first common arm portion 20 is rotatably connected to the main body portion 8. The base end of the second common arm portion 21 is fixed to the base end side of the first common arm portion 20. The first common arm portion 20 and the second common arm portion 21 are arranged at the same position in the vertical direction. When viewed from the vertical direction, the angle θ formed by the first common arm portion 20 and the second common arm portion 21 is 90°.

[0038] 3, if the horizontal distance between the rotation center C1 of the common arm portion 12 relative to the main body portion 8 and the rotation center C2 of the tip-side arm portion 10 relative to the first common arm portion 20 is defined as a first center-to-center distance L1, and the horizontal distance between the rotation center C1 and the rotation center C3 of the tip-side arm portion 11 relative to the second common arm portion 21 is defined as a second center-to-center distance L2, the first center-to-center distance L1 is shorter than the second center-to-center distance L2. Also, if the width of the first common arm portion 20 in a direction perpendicular to the longitudinal direction of the first common arm portion 20 and the up-down direction is defined as a first common arm width H1, and the width of the second common arm portion 21 in a direction perpendicular to the longitudinal direction of the second common arm portion 21 and the up-down direction is defined as a second common arm width H2, the first common arm width H1 is wider than the second common arm width H2.

[0039] In this way, the first center distance L1 is shorter than the second center distance L2, the first common arm width H1 is wider than the second common arm width H2, and as described above, the thickness of the first common arm portion 20 and the thickness of the second common arm portion 21 are equal, so that the rigidity of the first common arm portion 20 side of the common arm portion 12 is higher than the rigidity of the second common arm portion 21 side of the common arm portion 12. Specifically, the rigidity of the portion of the common arm portion 12 between the rotation center C1 and the rotation center C2 is higher than the rigidity of the portion of the common arm portion 12 between the rotation center C1 and the rotation center C3.

[0040] 3, if the horizontal distance between the rotation center C4 and the rotation center C2 of the hand 5 relative to the distal arm unit 10 is defined as a third center-to-center distance L3, and the horizontal distance between the rotation center C5 and the rotation center C3 of the hand 6 relative to the distal arm unit 11 is defined as a fourth center-to-center distance L4, the first center-to-center distance L1 is equal to the third center-to-center distance L3, and the second center-to-center distance L2 is equal to the fourth center-to-center distance L4. That is, the third center-to-center distance L3 is shorter than the fourth center-to-center distance L4.

[0041] Furthermore, if the width of the tip-side arm section 10 in a direction perpendicular to the longitudinal direction and the up-down direction of the tip-side arm section 10 is defined as a first tip-side arm width H3, and the width of the tip-side arm section 11 in a direction perpendicular to the longitudinal direction and the up-down direction of the tip-side arm section 10 is defined as a second tip-side arm width H4, the first tip-side arm width H3 is wider than the second tip-side arm width H4. Furthermore, as shown in Fig. 2, the thickness t1 of the tip-side arm section 10 is thicker than the thickness t2 of the tip-side arm section 11.

[0042] Therefore, the rigidity of the tip-side arm unit 10 is higher than the rigidity of the tip-side arm unit 11. Specifically, the rigidity of the portion of the tip-side arm unit 10 between the rotation centers C2 and C4 is higher than the rigidity of the portion of the tip-side arm unit 11 between the rotation centers C3 and C5. In addition, in this embodiment, the length (longitudinal length) of the tip-side arm unit 10 is shorter than the length (longitudinal length) of the tip-side arm unit 11.

[0043] The arm 7 is extendable relative to the main body 8 between a position where it extends so that the tips of the hands 5, 6 (specifically, the tips of the forks 15) are separated from a joint 23, which is the connection between the main body 8 and the common arm 12, and a position where it retracts so that the tips of the hands 5, 6 are closer to the joint 23. When the part of the arm 7 on the tip-side arm 10 side extends so that the tip of the hand 5 is separated from the joint 23, the part of the arm 7 on the tip-side arm 11 side retracts, and when the part of the arm 7 on the tip-side arm 11 side extends so that the tip of the hand 6 is separated from the joint 23, the part of the arm 7 on the tip-side arm 10 side retracts. When the arm 7 retracts relative to the main body 8, the hands 5, 6 move linearly in the horizontal direction while facing in a fixed direction relative to the main body 8.

[0044] (Main effect of this form) As described above, in this embodiment, the first center distance L1 is shorter than the second center distance L2, and the first common arm width H1 is wider than the second common arm width H2, so that the rigidity of the first common arm section 20 side of the common arm section 12 is higher than the rigidity of the second common arm section 21 side of the common arm section 12. Therefore, in this embodiment, it is possible to transport a heavy mask 3 using the first common arm section 20, the tip-side arm section 10, and the hand 5.

[0045] Furthermore, in this embodiment, since the rigidity of the second common arm section 21 side of the common arm section 12 is lower than the rigidity of the first common arm section 20 side of the common arm section 12, it is difficult to transport the mask 3 using the second common arm section 21, the tip-side arm section 11, and the hand 6. However, if the substrate 2 is light, it is possible to transport the substrate 2 using the second common arm section 21, the tip-side arm section 11, and the hand 6. That is, in this embodiment, it is possible to transport the substrate 2 using two hands 5, 6. Therefore, the robot 1 in this embodiment can efficiently transport light substrates 2.

[0046] Furthermore, in this embodiment, it is possible to reduce the cost of the robot 1 compared to when the rigidity of the second common arm portion 21 side of the common arm portion 12 is equivalent to the rigidity of the first common arm portion 20 side of the common arm portion 12. That is, the robot 1 of this embodiment is capable of transporting a heavy mask 3 and is also capable of efficiently transporting a light substrate 2, and it is therefore possible to reduce the cost of the robot 1.

[0047] In this embodiment, the third center-to-center distance L3 is shorter than the fourth center-to-center distance L4, the first tip-side arm width H3 is wider than the second tip-side arm width H4, and the thickness t1 of the tip-side arm unit 10 is thicker than the thickness t2 of the tip-side arm unit 11, so that the rigidity of the tip-side arm unit 10 is higher than the rigidity of the tip-side arm unit 11. That is, in this embodiment, the rigidity of the tip-side arm unit 10 connected to the first common arm unit 20 is higher. Therefore, in this embodiment, it is possible to transport a heavier mask 3 using the first common arm unit 20, the tip-side arm unit 10, and the hand 5. Furthermore, in this embodiment, it is possible to reduce the cost of the robot 1 compared to when the rigidity of the tip-side arm unit 11 is equivalent to the rigidity of the tip-side arm unit 10.

[0048] In this embodiment, the base end side of the first common arm portion 20 is rotatably connected to the main body portion 8, and the base end of the second common arm portion 21 is fixed to the base end side of the first common arm portion 20. For example, if the common arm portion 12 has a member that is rotatably connected to the main body portion 8, and the base end of the first common arm portion 20 and the base end of the second common arm portion 21 are fixed to this member (i.e., if the first common arm portion 20 is connected to the main body portion 8 via a predetermined member), there is a risk of a decrease in rigidity of the portion where the first common arm portion 20 is fixed to this member; however, in this embodiment, since the first common arm portion 20 is directly connected to the main body portion 8, such a problem does not arise.

[0049] In this embodiment, the angle θ formed between the first common arm portion 20 and the second common arm portion 21 is 90° when viewed from the top-bottom direction. Therefore, in this embodiment, the configurations of the first common arm portion 20 and the second common arm portion 21 are simplified compared to when the angle θ is an acute angle or an obtuse angle, and the base end of the second common arm portion 21 can be easily fixed to the base end side of the first common arm portion 20.

[0050] (Example of modification of industrial robots) FIG. 4 is a plan view of a robot 1 according to another embodiment of the present invention.

[0051] In the above-described embodiment, the robot 1 may be provided with a swing arm 25, as shown in FIG. 4, to which the base end side of the arm 7 is rotatably connected and which is also rotatably connected to the main body 8. In the modified example shown in FIG. 4, the swing arm 25 serves as an arm support part to which the base end side of the arm 7 is rotatably connected. The swing arm 25 has an elongated oval shape when viewed from the top-bottom direction and is formed like a block with a relatively thin thickness in the top-bottom direction. The base end side of the arm 7 is connected to the tip side of the swing arm 25. The base end side of the swing arm 25 is connected to the main body 8.

[0052] The swing arm 25 is disposed below the arm 7 and above the main body 8. The arm 7 is rotatable relative to the swing arm 25 with the vertical direction as the axis of rotation. The swing arm 25 is rotatable relative to the main body 8 with the vertical direction as the axis of rotation. The robot 1 includes an arm section drive mechanism that rotates the common arm section 12 relative to the swing arm 25, an arm section drive mechanism that rotates the swing arm 25 relative to the main body 8, and an elevation mechanism that raises and lowers the swing arm 25 relative to the main body 8.

[0053] (Other embodiments) The above-described embodiment is one example of a preferred embodiment of the present invention, but the present invention is not limited to this embodiment and various modifications can be made without departing from the spirit of the present invention.

[0054] In the above-described embodiment, the thickness of the first common arm portion 20 may be greater than the thickness of the second common arm portion 21. Furthermore, in the above-described embodiment, the first common arm width H1 and the second common arm width H2 may be equal, provided that the first center distance L1 is shorter than the second center distance L2 and the rigidity of the first common arm portion 20 side of the common arm portion 12 is higher than the rigidity of the second common arm portion 21 side of the common arm portion 12. Furthermore, in the above-described embodiment, the first common arm width H1 and the second center distance L2 may be equal, provided that the first common arm width H1 is wider than the second common arm width H2 and the rigidity of the first common arm portion 20 side of the common arm portion 12 is higher than the rigidity of the second common arm portion 21 side of the common arm portion 12.

[0055] That is, it is sufficient that at least the first center distance L1 is shorter than the second center distance L2 or the first common arm width H1 is wider than the second common arm width H2, so that the rigidity of the first common arm section 20 side of the common arm section 12 is higher than the rigidity of the second common arm section 21 side of the common arm section 12. However, as in the above-described embodiment, if the first center distance L1 is shorter than the second center distance L2 and the first common arm width H1 is wider than the second common arm width H2, it is possible to further increase the rigidity of the first common arm section 20 side of the common arm section 12. Therefore, in the above-described embodiment, it is possible to transport a heavier mask 3 using the first common arm section 20, the tip-side arm section 10, and the hand 5.

[0056] In the above-described embodiment, as long as the rigidity of the tip-side arm section 10 is higher than the rigidity of the tip-side arm section 11, the third center-to-center distance L3 and the fourth center-to-center distance L4 may be equal, the first tip-side arm width H3 and the second tip-side arm width H4 may be equal, and the thickness t1 of the tip-side arm section 10 and the thickness t2 of the tip-side arm section 11 may be equal.

[0057] In the above-described embodiment, the common arm portion 12 may include an arm base portion that is rotatably connected to the main body portion 8. In this case, for example, the base end of the first common arm portion 20 and the base end of the second common arm portion 21 are fixed to this arm base portion. Also, in the above-described embodiment, the angle θ formed between the first common arm portion 20 and the second common arm portion 21 when viewed from the top-bottom direction may be an obtuse angle or an acute angle. Also, in the above-described embodiment, an object to be transported other than the substrate 2 and the mask 3 may be transported by the hand 5, and an object to be transported other than the substrate 2 may be transported by the hand 6. [Explanation of symbols]

[0058] 1. Robots (industrial robots) 2. Substrates (glass substrates, transported objects) 3 Masks (transported items) 5th Hand (1st Hand) 6th hand (2nd hand) 7 Arm 8 Main body (arm support) 10 tip-side arm portion (first tip-side arm portion) 11 Tip-side arm portion (second tip-side arm portion) 12 Common arm section 20 First common arm 21 Second common arm 25 Swing arm (arm support) C1 Rotation center of the common arm relative to the arm support C2: Rotation center of the first tip arm portion relative to the first common arm portion C3: Rotation center of the second tip arm section relative to the second common arm section C4 Rotation center of the first hand relative to the first tip arm C5 Rotation center of the second hand relative to the second tip arm L1 1st center distance L2 2nd center distance L3 3rd center distance L4 4th center distance H1 First common arm width H2 Second common arm width H3 First tip arm width H4 Second tip arm width t1 Thickness of the first arm at the tip in the vertical direction t2 Thickness of the second arm at the tip in the vertical direction θ: Angle between the first common arm and the second common arm

Claims

1. a first hand and a second hand on which an object to be transported is placed; an arm to which the first hand and the second hand are rotatably connected at their distal ends with the vertical direction as the axial direction of rotation; and an arm support part to which the base end of the arm is rotatably connected with the vertical direction as the axial direction of rotation; the arm includes a first tip-side arm section to which the first hand is rotatably connected at a tip side thereof, a second tip-side arm section to which the second hand is rotatably connected at a tip side thereof, and a common arm section to which a base end side of the first tip-side arm section and a base end side of the second tip-side arm section are rotatably connected with an axial direction of rotation in the up-down direction, and which is rotatably connected to the arm support section, the common arm portion includes a first common arm portion to which the first tip-side arm portion is rotatably connected at a tip side thereof, and a second common arm portion to which the second tip-side arm portion is rotatably connected at a tip side thereof, Let us define a first center-to-center distance as the horizontal distance between the rotation center of the common arm portion relative to the arm support portion and the rotation center of the first tip-side arm portion relative to the first common arm portion, a second center-to-center distance as the horizontal distance between the rotation center of the common arm portion relative to the arm support portion and the rotation center of the second tip-side arm portion relative to the second common arm portion, a first common arm width as the width of the first common arm portion in a direction perpendicular to the longitudinal direction and the up-down direction of the first common arm portion, and a second common arm width as the width of the second common arm portion in a direction perpendicular to the longitudinal direction and the up-down direction of the second common arm portion, At least, the first center distance is shorter than the second center distance, or the first common arm width is wider than the second common arm width, and the rigidity of the common arm portion on the first common arm portion side is higher than the rigidity of the common arm portion on the second common arm portion side, a base end side of the first common arm portion is rotatably connected to the arm support portion, An industrial robot, characterized in that a base end of the second common arm portion is fixed to a base end side of the first common arm portion.

2. 2. The industrial robot according to claim 1, wherein the first center distance is shorter than the second center distance, and the first common arm width is wider than the second common arm width.

3. Let us assume that the horizontal distance between the rotation center of the first tip side arm section relative to the first common arm section and the rotation center of the first hand relative to the first tip side arm section is a third center-to-center distance, and the horizontal distance between the rotation center of the second tip side arm section relative to the second common arm section and the rotation center of the second hand relative to the second tip side arm section is a fourth center-to-center distance, the first center distance is shorter than the second center distance; 3. The industrial robot according to claim 1, wherein the first center-to-center distance is equal to the third center-to-center distance, the second center-to-center distance is equal to the fourth center-to-center distance, and the rigidity of the first tip-side arm portion is higher than the rigidity of the second tip-side arm portion.

4. When the width of the first tip side arm portion in a direction orthogonal to the longitudinal direction and the up-down direction of the first tip side arm portion is defined as a first tip side arm width, and the width of the second tip side arm portion in a direction orthogonal to the longitudinal direction and the up-down direction of the second tip side arm portion is defined as a second tip side arm width, 4. The industrial robot according to claim 1, wherein a width of the first tip-side arm is wider than a width of the second tip-side arm, and a rigidity of the first tip-side arm portion is higher than a rigidity of the second tip-side arm portion.

5. 5. The industrial robot according to claim 1, wherein a vertical thickness of the first tip-side arm portion is greater than a vertical thickness of the second tip-side arm portion, and a rigidity of the first tip-side arm portion is higher than a rigidity of the second tip-side arm portion.

6. 6. The industrial robot according to claim 1, wherein the angle between the first common arm portion and the second common arm portion is 90 degrees when viewed from above and below.

Images