System and method for ozone decomposition for plasma processing systems

Abstract

The present disclosure describes a material surface treatment system and method employing a by-product treatment system configured to receive by-products generated by application of a plasma, the by-product treatment system being configured to decompose the by-products, and exhaust the decomposed by-products from the material surface treatment. The disclosed by-product treatment system modifies the by-products prior to exhaust from the material treatment system to reduce or eliminate by-product contamination to the ambient atmosphere.

Description

[Technical Field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application is a non-provisional application of U.S. Provisional Patent Application No. 63 / 058,247, filed July 29, 2020, entitled "Systems And Methods For Ozone Degradation For A Plasma Treatment System," which is incorporated herein by reference in its entirety. [Background technology]

[0002] background Some material surface treatment systems utilize high-voltage electrodes to treat the surface of an article, such as a foil or film, by electrical discharge. Conventional treatment systems are used to modify the properties of the material being treated. Such systems may employ corona and plasma treatment systems, which employ corona and plasma electrodes to generate plasma used to treat the material. However, the use of corona and plasma treatment systems produces by-products that can cause air pollution if not treated. Therefore, manufacturers would benefit from a system or method for material surface treatment that mitigates the by-product problem. Summary of the Invention

[0003] overview Systems and methods for material surface treatment are disclosed. In particular, the systems and methods employ a by-product treatment system configured to receive by-products generated by application of plasma, decompose the by-products, and exhaust the decomposed by-products from the material surface treatment.

[0004] These and other features and advantages of the present invention will become apparent from the following detailed description taken in conjunction with the appended claims.

[0005] BRIEF DESCRIPTION OF THE DRAWINGS The benefits and advantages of the present invention will become readily apparent to those skilled in the art after reviewing the following detailed description and accompanying drawings. [Brief explanation of the drawings]

[0006] [Figure 1] 1 is a schematic diagram of an exemplary material surface treatment system according to aspects of the present disclosure. FIG.

[0007] [Figure 2] FIG. 2 is another exemplary schematic diagram of a material surface treatment system according to aspects of the present disclosure.

[0008] [Figure 3] 3 is a flowchart representing example machine-readable instructions that may be executed by the example material surface treatment system of FIGS. 1-2 to treat by-products from a material surface treatment process, according to an embodiment of the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0009] The drawings are not necessarily to scale. Where appropriate, like or identical reference numbers are used to refer to like or identical components.

[0010] Detailed Description The present disclosure describes a material surface treatment system and method employing a byproduct treatment system configured to receive byproducts generated by application of plasma, decompose the byproducts, and exhaust the decomposed byproducts from the material surface treatment. In some examples, process gases and / or atmospheric gases are subjected to a plasma discharge during material surface treatment. As a result, the gases may produce one or more byproducts. The disclosed byproduct treatment system modifies the byproducts prior to exhaust from the material treatment system to reduce or eliminate byproduct contamination of the surrounding atmosphere.

[0011] In some instances, the by-product(s) include ozone. Ozone (O3) is a highly reactive gas composed of three oxygen atoms and is produced through natural or man-made processes. However, when exposed to the atmosphere, ozone can contaminate the surrounding environment by interacting with atmospheric gases, sensitive materials, and / or organic compounds or structures.

[0012] Ozone presents a problem because it can remain volatile for extended periods of time. For example, ozone in air can have a half-life of several months at low temperatures and several days at standard temperature and pressure (STP). However, at high temperatures (e.g., 250°C or higher), the half-life of ozone can be only a few seconds. Additionally or alternatively, ozone can be decomposed by exposure to certain radiation energy, such as wavelengths within the ultraviolet range (e.g., the ultraviolet C (UVC) range of 280 nm to 100 nm).

[0013] In disclosed examples, a by-product treatment system is configured to receive by-products from a material surface treatment system and decompose the by-products prior to capture and / or exhaust. For example, by-products of a plasma-based material treatment process are exhausted from a material treatment environment and received by a by-product treatment system. The by-product treatment system may include a plenum, manifold, or other structure that receives, concentrates, and / or separates the by-products. Once in the by-product treatment system, the by-product decomposition device subjects the by-products to one or more techniques designed to decompose the by-products. For example, the techniques may include applying heat (e.g., via one or more heating elements), radiation (e.g., via one or more radiation sources), and / or one or more materials (e.g., catalysts, chemicals such as chlorine, structural traps, etc.) to reduce and / or otherwise mitigate by-product contamination characteristics.

[0014] In the case of ozone by-products, the application of energy radiation and / or heat can cause the ozone (O3) to decompose into oxygen (O2). Thus, by directing the ozone by-products from the material surface treatment environment through a by-product treatment system, a portion of the ozone can be decomposed into oxygen. As a result, a lower percentage of the by-products released into the work environment and / or atmosphere contain contaminating ozone.

[0015] In some examples, the by-product decomposition device can include a radiation source (e.g., an ultraviolet light source) and / or a heating element (e.g., a resistive heater) that decomposes the by-products. For example, the ultraviolet light source provides light within the UVC band (e.g., having a wavelength of 280 nanometers to 100 nanometers).

[0016] Additionally or alternatively, the by-product treatment system can incorporate other devices and / or techniques to further affect ozone decomposition. For example, the by-product treatment system can include one or more catalysts and / or one or more surface treatments with materials that promote decomposition of the by-products. The by-product decomposition device can be located collinear with the electrodes and / or materials, and multiple by-product treatment devices can be included (e.g., at various locations throughout the by-product treatment system). The location and / or type of by-product treatment device, along with the addition of filters, catalysts, etc., can be optimized to ensure the maximum amount of ozone is decomposed for a particular application.

[0017] Material surface treatment systems can be equipped to treat a variety of materials (e.g., plastics such as polyethylene and polypropylene) that have surfaces with low surface tension that inhibit bonding by surface treatments such as printing inks, coatings, and / or adhesives. Material surface treatment systems are employed to modify the properties of specific materials (e.g., plastics and / or flexible substrates) for specific applications (e.g., inks, coatings, adhesives, and / or laminations). For example, plastic films generally require some type of surface treatment to achieve proper chemical bonding by inks, adhesives, etc. This is in contrast to porous materials such as paper, which allow ink to penetrate the medium.

[0018] Such systems and methods can be used to effectively process a wide variety of materials, such as polyethylene, polypropylene, nylon, vinyl, PVC, PET, metalized surfaces, foil, paper, and paperboard stock.

[0019] Various techniques have been implemented to provide desired material properties for such materials. For example, corona treatment is a surface treatment that employs a relatively low-temperature corona discharge to alter the surface properties of a material. Corona treatment, which utilizes one or more electrodes, provides desired adhesive properties at an affordable cost. Corona electrodes generate high-voltage discharges and are effective for modifying the surface energy of workpiece materials (e.g., plastics, paper, foils, etc.).

[0020] Another example is plasma treatment, where a gas is injected into the electrode discharge to treat the surface of a material. For example, some materials are more likely to undergo plasma treatment than corona treatment to achieve desired material properties, such as bonding properties.

[0021] Plasma treatments are often associated with increased costs and complexity compared to corona treatments, such as the use of more complex electrodes and more process control, which limits their use on a larger scale in industry. However, some materials respond more favorably to plasma treatments than corona treatments (e.g., fluoropolymers, polypropylene, etc.).

[0022] As disclosed in this disclosure, both corona treatment systems and plasma treatment systems employing corona electrodes and plasma electrodes, respectively, can be employed to decompose by-products and exhaust the decomposed by-products from material surface treatment, as provided in the examples below.

[0023] Advantageously, the disclosed material surface treatment systems and methods are configured to incorporate the by-product treatment system into existing exhaust pipes, lines, etc. Thus, existing material surface treatment systems can be retrofitted with the by-product treatment system without adding separate machinery or equipment to the work environment.

[0024] Although examples of by-product treatment systems are provided in this disclosure with reference to material surface treatment systems, the by-product treatment systems are applicable to treating by-products from any system or process in which by-products are generated. Additionally, while some examples are directed to by-products including ozone, other by-products can be similarly decomposed through use of the exemplary by-product treatment systems. For example, the application of ultraviolet radiation and / or heat can be used to sterilize, disinfect, and / or decontaminate environments through a germicidal and / or microbiocidal effect (e.g., to inactivate organic compounds, bacteria, viruses, including coronaviruses, proteins, and proteins).

[0025] In a disclosed example, a material surface treatment system is provided, comprising an electrode configured to generate a discharge to generate a plasma composed of an ionized process gas and apply the plasma to a material in a treatment environment proximate the electrode, and further comprising a by-product treatment system configured to receive by-products generated by the application of the plasma, decompose the by-products, and exhaust the decomposed by-products from the material surface treatment.

[0026] In some instances, the by-products include ozone.

[0027] In some examples, the by-product processing system includes an ultraviolet light source that decomposes the by-products. In examples, the ultraviolet light source provides light at a wavelength between 240 nanometers and 260 nanometers. In some examples, the ultraviolet light source is disposed within a plenum, the plenum configured to receive the by-products from the processing environment and exhaust the decomposed by-products from the material processing system. In some examples, the ultraviolet light source is disposed collinear with the electrode.

[0028] In some examples, the by-product treatment system comprises a heating element that decomposes the by-products. In some examples, the by-product treatment system further comprises one or more catalysts that facilitate decomposition of the by-products.

[0029] In some examples, the by-product treatment system comprises one or more surfaces comprising a material that promotes decomposition of the by-products. In examples, the material comprises carbon, carbon fiber, or an inert surface treatment.

[0030] In some disclosed examples, a material surface treatment system includes an electrode configured to generate a plasma composed of an ionized process gas by generating an electrical discharge and apply the plasma to a material in a treatment environment adjacent the electrode, and a by-product treatment system disposed collinear with a portion of the electrode, the by-product treatment system configured to receive by-products generated by the application of the plasma from the treatment environment, decompose the by-products, and exhaust the decomposed by-products from the material surface treatment.

[0031] In some examples, the system includes a grounded roll configured to engage the material, the material being exposed to the plasma discharged from the electrode when the plasma is drawn into the grounded roll, the grounded roll being electrically connected to a reference voltage. In examples, the grounded roll is positioned collinear with a portion of the by-product treatment system.

[0032] In some examples, the decomposed by-products are discharged from the by-product treatment system to a by-product treatment unit, which in examples comprises one or more of a filter, a chemical catalyst, or a heat source.

[0033] In some examples, the electrode includes one of a plasma electrode or a corona electrode. In examples, the by-products include ozone. In examples, the by-product treatment system includes one or more of an ultraviolet light source or a heating element that decomposes the by-products.

[0034] In some disclosed examples, a material surface treatment system includes an electrode configured to generate a discharge to generate a plasma composed of an ionized process gas and apply the plasma to a material proximate the electrode within the treatment environment. A by-product treatment system includes a radiation source configured to receive by-products generated by the application of the plasma and to irradiate the by-products to decompose them. In some examples, the by-products include ozone.

[0035] As used in this disclosure, the term "power source" refers to any device capable of supplying power to a material processing system when power is applied, including, but not limited to, inverters, converters, resonant power supplies, quasi-resonant power supplies, etc., as well as control circuitry and other associated support circuitry. The term can include energy storage devices and / or circuitry and / or connections that draw power from various external sources.

[0036] As used in this disclosure, "circuitry" or "circuitry portion" includes any analog and / or digital components, power and / or control elements, e.g., microprocessors, digital signal processors (DSPs), software, etc., discrete and / or integrated components, or portions and / or combinations thereof.

[0037] As used in this disclosure, "power conversion circuitry" and / or "power conversion circuit" refer to circuitry and / or electrical components that convert electrical power from one or more first forms (e.g., power output by a generator) to one or more second forms having any combination of voltage, current, frequency, and / or reaction characteristics. Power conversion circuitry may include safety circuitry, output selection circuitry, measurement and / or control circuitry, and / or any other circuitry that provides suitable features.

[0038] As used in this disclosure, the terms "first" and "second" may be used to list different components or elements of the same type and do not necessarily imply any particular order.

[0039] 1 illustrates a material processing system 10 including a discharge electrode 14 in electrical communication with a power source 12. The electrode 14 can be disposed within an enclosure 24, which can create a controlled processing environment (e.g., controlled pressure, temperature, by-product contamination, etc.) for conducting the material processing process. In some examples, a grounded roller 16 (e.g., a grounded bare roll with a path to ground or other reference voltage) is utilized and positioned to pass a web of material 22 (e.g., textile, paper, plastic, film, etc.) near the electrode 14 for treatment with the plasma 32 generated by the discharge of the electrode 14.

[0040] In some examples, the discharge electrode 14 comprises a dielectric tube (e.g., ceramic) or a stainless steel electrode, and the grounded roller 16 comprises a metallic material (e.g., a stainless steel roller, etc.) or a dielectric material (e.g., ceramic or glass coated, silicone, elastomer, various polymers, etc.) coated grounded roller, both of which cooperate to distribute the high voltage charge uniformly along the length of the electrode 14.

[0041] The power source 12 that provides the power input may include a high voltage transformer, a power converter, and / or a power source (e.g., a utility power source). In some examples, the power source 12 provides an applied power density to the discharge electrode 14 of about 10 watts per square meter to 110 watts per square meter, and in some examples, about 20 watts per square meter to 60 watts per square meter, although other ranges are contemplated.

[0042] The system 10 receives a process gas, which is then transported through a conduit 27 (e.g., via a fan, pump, etc.) to the region between the electrode 14 and the grounded roller 16. When the process gas 28 reaches the electrode 14, a high-voltage discharge generates a plasma 32, which ionizes the process gas molecules. For example, functional groups (e.g., hydroxyl groups) of the ionized molecules in the process gas are attracted to the grounded roller 16, drawing the plasma 32 to the material 22. The plasma 32 also propagates collisions of the ionized molecules. In particular, in response to application of the plasma 32 during a material surface treatment process, one or more properties of the material can be altered, such as to adjust the material's porosity, adhesive ability, or strength, among other non-limiting properties. Exemplary material treatment processes can produce one or more byproducts 30 (e.g., water vapor, unreacted gases, ozone).

[0043] In some industrial processes, one or more of the by-products 30 may be designated as requiring treatment following the material processing process. For example, the by-products may react with the atmosphere in a harmful manner, requiring treatment of the by-products 30 before they can be released into the work environment or atmosphere. As shown in FIG. 1 , one or more exhaust ports 52 draw the by-products 30 from the material processing environment within the enclosure 24 to a by-product treatment system 49. For example, the by-product treatment system 49 may include a pipe 50 (e.g., a conduit, a plenum, a manifold, etc.) and a by-product treatment device 54 (and / or multiple by-product treatment devices 54A). Once treated, the treated by-products 30A are exhausted from the pipe 50 through an outlet or plenum 56, such as by power from a fan 62.

[0044] In some examples, the by-product treatment device 54 is an ultraviolet light source (e.g., emitting light in the ultraviolet C (UVC) band having a wavelength of 280 nanometers to 100 nanometers). The by-product treatment device 54 is positioned within the tube 50 (or plenum, manifold, conduit, etc.) such that some or all of the length of the electrode 14 corresponds to the length of the by-product treatment device 54. For example, exhaust ports 52 can be positioned along the length of the by-product treatment system 49 or the tube 50 to facilitate drawing the by-products 30 into the tube 50 through the ports 52 (e.g., by negative pressure generated by fans 62, which can be located at one or more locations in the plenum 56, within the treatment unit 60, and / or before and / or after the treatment unit 60). Once processed, the decomposed by-products 30A are exhausted from the material processing system 10 via the plenum 56. In some examples, fans 62 and / or other device(s) can be employed to regulate the flow of exhaust air through and / or from the tube 50.

[0045] Additionally or alternatively, by-product treatment system 49 can incorporate other devices and / or techniques to further affect ozone decomposition. For example, by-product treatment device 54, 54A can include a heating element to decompose the by-products, one or more catalysts (e.g., introduced into the atmosphere within tube 50 and applied as a chemical filter including MnO), and / or one or more surface treatments with materials that promote decomposition of the by-products (e.g., carbon, carbon fiber, copper, silver, or inert surface treatments, as non-limiting examples). In some examples, one or more of these devices and / or techniques (including application of UV light) can be provided within by-product treatment unit 60. For example, by-product treatment unit 60 can receive treated by-product 30A from by-product treatment system 49 for further processing.

[0046] In some examples, the treatment unit 60 may additionally or alternatively treat high levels of nitrogen oxides (NO ) in the exhaust by-products. x ) configured to reduce NO xIn some instances, such NO mitigation systems may be included. x The abatement system can employ ammonia (NH3) as an additive to the exhaust and direct the resulting gas to a catalyst. This mixture is then mixed with NOx, such as N2 and H2O. x can be converted to a natural-based component. In some instances, NO x The abatement system may be a separate unit from the processing unit 60. For example, x The abatement system may be connected directly to the plenum 56 and / or ducts 50 to receive the by-product exhaust 30A, and / or may be connected to the treatment unit 60 itself.

[0047] In the disclosed examples, the material is one of the following non-limiting characteristics: polymer, synthetic woven and / or nonwoven fabric, natural fiber woven fabric, filament, yarn, elastomer, or metal. In either case, the material may be presented for processing in various configurations. For example, the material may be presented as a substantially flexible web, film, foil, etc., and the material transport is adapted to be transferred from a source roll 20 to a receiving roll 18. In some examples, the material is presented as a substantially flat, e.g., rigid, semi-rigid, or flexible, sheet, plate, board, etc. (See, e.g., the exemplary system of FIG. 2).

[0048] In some examples, material processing processes are controlled by one or more programs executed by one or more control circuits, such as on an integrated or remote computing platform. For example, the control circuitry, control circuitry, and / or controller can include digital and / or analog circuitry, discrete and / or integrated circuitry, microprocessors, digital signal processors (DSPs), field programmable gate arrays (FPGAs), and / or other logic circuitry, and / or associated software, hardware, and / or firmware. The control circuitry or control circuitry can be located on one or more circuit boards that form part or all of the controller and are used to control the material processing process. The control circuitry can include memory for storing information, such as program instructions, executed by the control circuitry, and the memory can include volatile and / or nonvolatile memory devices and / or other storage devices.

[0049] In some examples, the process gas can include a mixture of different gases, including, among others, a mixture of nitrogen and oxygen. For example, the process gas mixture can include nitrogen at a concentration of about 99% to 80%, and in some examples, about 97% to 88%, although other ranges are contemplated. The plasma gas mixture can include oxygen at a concentration of about 20% to 1%, and in some examples, about 12% to 3%, although other ranges are contemplated. In some examples, the process gas or gas mixture, when ionized, can form certain functional groups, such as, but not limited to, hydroxyl groups, carboxyl groups, carbonyl groups, or amines.

[0050] FIG. 2 illustrates another exemplary material processing system 10 configured to process substantially flat articles for processing. As shown in FIG. 2, the transport system includes one or more platforms and / or belts 41 upon which the material structure 36 (e.g., a substantially flat structure, e.g., a rigid, semi-rigid, or flexible sheet, plate, board, etc.) rests as it traverses the region between the electrode 14 and the ground block 38. In some examples, the platform 41 is driven by one or more rollers 40, 42 and operates as a conveyor for the material structure 36. In additional or alternative examples, the material structure 36 rests on one or more rollers 40, 42 and is transported through the enclosure 24 without the assistance of the platform 41. A by-product processing system 49 operates according to the example provided with respect to FIG. 1 to process by-products 30 from the material processing process.

[0051] 3 provides a flowchart depicting example instructions 100 that may be executed by the example by-product treatment system of FIGS. 1-2 to decompose by-products, according to an embodiment of the present disclosure. At block 102, a material surface treatment process employing plasma is performed (e.g., by using plasma or corona electrodes). At block 104, by-products of the plasma treatment are exhausted to the by-product treatment system. At block 106, the by-product treatment device is activated so that the by-products (e.g., ozone) are decomposed (e.g., reduced to oxygen). At block 108, the decomposed by-products are exhausted from the by-product treatment system (e.g., to a by-product treatment unit and / or to the environment).

[0052] As used in this disclosure, "and / or" means any one or more of the items in the list connected by "and / or." As an example, "x and / or y" means any element of the three-element set {(x), (y), (x, y)}. In other words, "x and / or y" means "one or both of x and y." As another example, "x, y and / or z" means any element of the seven-element set {(x), (y), (z), (x, y), (x, z), (y, z), (x, y, z)}. In other words, "x, y and / or z" means "one or more of x, y and z." As used in this disclosure, the term "exemplary" means serving as a non-limiting example, instance, or illustration. As used in this disclosure, the term "for example" begins a list of one or more non-limiting examples, instances, or illustrations.

[0053] Although the present methods and / or systems have been described with reference to certain specific embodiments, those skilled in the art will recognize that various modifications and equivalents may be substituted without departing from the scope of the present methods and / or systems. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the present disclosure without departing from the scope of the present disclosure. For example, the example systems, blocks, and / or components disclosed may be combined, divided, rearranged, and / or otherwise modified. Therefore, the present methods and / or systems are not limited to the particular embodiments disclosed. Instead, the present methods and / or systems include all embodiments falling within the scope of the appended claims, both literally and under the doctrine of equivalents. [Configuration 1] 1. A material surface treatment system comprising: an electrode for generating a discharge to generate a plasma comprised of the ionized process gas and for applying the plasma to materials proximate the electrode within the processing environment; a by-product treatment system configured to receive by-products generated by the application of the plasma, the by-product treatment system decomposing the by-products and exhausting the decomposed by-products from the material surface treatment; A material surface treatment system comprising: [Configuration 2] 2. The material surface treatment system of claim 1, wherein the by-products include ozone. [Configuration 3] 2. The material surface treatment system of claim 1, wherein the by-product treatment system includes an ultraviolet light source that decomposes the by-products. [Configuration 4] 4. The material surface treatment system of claim 3, wherein the ultraviolet light source provides light at a wavelength of 240 nanometers to 260 nanometers. [Configuration 5] 4. The material surface processing system of claim 3, wherein the ultraviolet light source is disposed within a plenum, the plenum configured to receive the by-products from the processing environment and exhaust the decomposed by-products from the material processing system. [Configuration 6] 4. The material surface treatment system of claim 3, wherein the ultraviolet light source is positioned collinear with the electrode. [Configuration 7] 2. The material surface treatment system of claim 1, wherein the by-product treatment system includes a heating element that decomposes the by-products. [Configuration 8] 10. The material surface treatment system of claim 1, wherein the by-product treatment system further comprises one or more catalysts that promote decomposition of the by-products. [Configuration 9] 10. The material surface treatment system of claim 1, wherein the by-product treatment system comprises one or more surfaces comprising a material that promotes decomposition of the by-products. [Configuration 10] 10. The material surface treatment system of claim 9, wherein the material comprises carbon, carbon fiber, or an inert surface treatment agent. [Configuration 11] 1. A material surface treatment system comprising: an electrode for generating a discharge to generate a plasma comprised of the ionized process gas and for applying the plasma to materials proximate the electrode within the processing environment; a by-product treatment system disposed collinear with a portion of the electrode, receiving by-products from the processing environment produced by the application of the plasma; The by-products are decomposed, and the decomposed by-products are discharged from the material surface treatment. a by-product processing system configured as follows: A material surface treatment system comprising: [Configuration 12] 12. The material surface treatment system of claim 11, further comprising a grounded roll configured to engage the material, the material being exposed to the plasma emitted from the electrode when the plasma is drawn into the grounded roll, the grounded roll being electrically connected to a reference voltage. [Configuration 13] 13. The material surface treatment system of claim 12, wherein the grounded roll is positioned collinear with a portion of the by-product treatment system. [Configuration 14] 12. The material surface treatment system of claim 11, wherein the decomposed by-products are discharged from the by-product treatment system to a by-product treatment unit. [Configuration 15] 15. The material surface treatment system of claim 14, wherein the by-product treatment unit comprises one or more of a filter, a chemical catalyst, or a heat source. [Configuration 16] 12. The material surface treatment system of claim 11, wherein the electrode comprises one of a plasma electrode or a corona electrode. [Configuration 17] 12. The material surface treatment system of claim 11, wherein the by-products include ozone. [Configuration 18] 12. The material surface treatment system of claim 11, wherein the by-product treatment system comprises one or more of an ultraviolet light source or a heating element that decomposes the by-products. [Configuration 19] 1. A material surface treatment system comprising: an electrode for generating a discharge to generate a plasma comprised of the ionized process gas and for applying the plasma to materials proximate the electrode within the processing environment; a by-product processing system that receives by-products generated by the application of the plasma, the by-product processing system comprising a radiation source configured to irradiate the by-products to decompose them; A material surface treatment system comprising: [Configuration 20] 20. The material surface treatment system of claim 19, wherein the by-products include ozone.

Claims

1. 1. A material surface treatment system comprising: an electrode for generating a discharge to generate a plasma comprised of the ionized process gas and for applying the plasma to materials proximate the electrode within the processing environment; a by-product treatment system configured to receive by-products generated by the application of the plasma, the by-product treatment system decomposing the by-products and exhausting the decomposed by-products from the material surface treatment system; and Equipped with the by-product treatment system comprising one or more surfaces comprising a material that promotes decomposition of the by-products; The material includes carbon fiber. Material surface treatment system.

2. The material surface treatment system of claim 1 , wherein the by-products include ozone.

3. The material surface treatment system of claim 1 , wherein the by-product treatment system comprises an ultraviolet light source that decomposes the by-products.

4. 4. The material surface treatment system of claim 3, wherein the ultraviolet light source provides light at a wavelength between 240 nanometers and 260 nanometers.

5. 4. The material surface treatment system of claim 3, wherein the ultraviolet light source is disposed within a plenum, the plenum configured to receive the by-products from the treatment environment and exhaust the decomposed by-products from the material surface treatment system.

6. The material surface treatment system according to claim 3 , wherein the ultraviolet light source is disposed on the same vertical line as the electrode.

7. The material surface treatment system of claim 1 , wherein the by-product treatment system comprises a heating element that decomposes the by-products.

8. The material surface treatment system of claim 1 , wherein the by-product treatment system further comprises one or more catalysts that promote decomposition of the by-products.

9. 1. A material surface treatment system comprising: an electrode for generating a discharge to generate a plasma comprised of the ionized process gas and for applying the plasma to materials proximate the electrode within the processing environment; a by-product treatment system disposed vertically in line with a portion of the electrode, receiving by-products from the processing environment produced by the application of the plasma; Decomposing the by-products and discharging the decomposed by-products from the material surface treatment system. a by-product processing system configured as follows: Equipped with the material surface treatment system further comprises a grounded roll configured to engage the material, the material being exposed to the plasma emitted from the electrode when the plasma is drawn into the grounded roll, the grounded roll being electrically connected to a reference voltage. Material surface treatment system.

10. The material surface treatment system of claim 9 , wherein the grounded roll is positioned vertically co-linear with a portion of the by-product treatment system.

11. 10. The material surface treatment system of claim 9, wherein the decomposed by-products are discharged from the by-product treatment system to a by-product treatment unit.

12. The material surface treatment system of claim 11 , wherein the by-product treatment unit comprises one or more of a filter, a chemical catalyst, or a heat source.

13. The system for treating a material surface according to claim 9 , wherein the electrode comprises one of a plasma electrode or a corona electrode.

14. The material surface treatment system of claim 9 , wherein the by-products include ozone.

15. 10. The material surface treatment system of claim 9, wherein the by-product treatment system comprises one or more of an ultraviolet light source or a heating element that decomposes the by-products.

16. 1. A material surface treatment system comprising: an electrode for generating a discharge to generate a plasma comprised of the ionized process gas and for applying the plasma to materials proximate the electrode within the processing environment; a by-product processing system that receives by-products generated by the application of the plasma, the by-product processing system comprising a radiation source configured to irradiate the by-products to decompose them; Equipped with the by-product treatment system comprising one or more surfaces comprising a material that promotes decomposition of the by-products; The material includes carbon fiber. Material surface treatment system.

17. 17. The material surface treatment system of claim 16, wherein the by-products include ozone.

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