Gas Processing System and Method

Abstract

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A gas processing system with a preheater, useful for treating a gas stream by flowing the gas into contact with a medium (eg, purification medium, catalyst, adsorbent), and associated methods are described.

Description

[Technical Field]

[0001] SUMMARY The present disclosure relates to a gas processing system including a preheater used to process gas by flowing the gas into contact with a medium, and related methods. [Background technology]

[0002] Gases are used as source or process materials (collectively referred to as "source gases") for many different commercial and industrial purposes, including the manufacture of semiconductors and microelectronic devices.

[0003] To prepare the gas for use in the process, the gas stream may be handled or treated in a variety of different ways to impart any of a variety of different effects to the gas. Prior to using the feed gas in a manufacturing process, the feed gas may be heated, cooled, purified, or filtered.

[0004] Gas purification systems are adapted to supply a consistent flow of highly purified feed gases to a portion of a manufacturing facility, such as a semiconductor or microelectronic processing tool. Exemplary gases include nitrogen, argon, helium, hydrogen, ammonia, carbon dioxide, clean dry air ("CDA"), and oxygen, each in a highly purified form.

[0005] Techniques for purifying gas streams can involve contacting the gas with a media material that can remove a certain amount of impurities from the gas. According to some techniques, impurities are removed from the gas stream by sequestering the impurities, for example, by adsorbing the impurities onto the surface of an adsorbent (i.e., "adsorption media"). According to other techniques, impurities can be chemically converted using a catalyst to a derivative compound that is considered more (or less) desirable compared to the original impurity.

[0006] Manufacturers have designed highly specialized equipment to carry out gas purification processes. Systems for purifying gas include a container (vessel) that holds some type of media (e.g., purification media), such as an adsorbent or catalyst, and associated flow control equipment that directs a stream of feed gas through the container and into contact with the media. Controls are provided to control process conditions such as temperature, pressure, and flow rate.

[0007]

[0003] Many gas purification systems include a preheater that is used to preheat the gas before it flows into a vessel containing a medium. For example, to improve the efficiency of a catalytic purification process, the gas may be preheated before contacting the catalyst. These types of catalytic process equipment include a vessel containing the catalyst, a flow control that causes the gas to flow through the catalyst, and a preheater that heats the gas to a high temperature before it flows and contacts the catalyst.

[0008] Gas preheaters can also be useful in adsorption-based gas purification systems. In these systems, adsorption purification is performed by flowing a gas through an adsorption medium. By flowing the gas through the adsorption medium, impurities are adsorbed onto the adsorption medium. Over a period of use, impurities accumulate on the adsorption medium. After sufficient accumulation, the adsorption medium becomes less effective and can be "regenerated" by removing the accumulated impurities from the medium.

[0009] The regeneration process may be carried out with the adsorption media remaining in the same vessel that contained the media during the purification step by passing a heated gas ("regeneration gas") through the adsorption media in its original vessel. The regeneration gas contacts the surface of the adsorption media, and adsorbed impurities that have accumulated on the media surface desorb from the surface and are carried away from the adsorption media by the regeneration gas.

[0010] For efficient regeneration of the adsorption medium with the regeneration gas, the regeneration gas is usually preheated before contacting the adsorption medium. The equipment required for the regeneration process includes a vessel containing the adsorption medium, a flow control section to effect flow of the regeneration gas through the adsorption medium during the regeneration step, and a preheater to heat the regeneration gas before it flows through the adsorption medium. Summary of the Invention

[0011] Conventional preheaters for gas purification systems are separate from the vessel containing the media (the "media vessel"). Some preheater designs ("stand-alone" designs) locate the preheater at a location remote from the media vessel and connect the preheater to the media vessel through an extended gas flow conduit. Other designs locate the preheater near the media vessel, perhaps as part of a common structure ("integrated" designs), but these designs do not offer a size advantage; i.e., a preheater with an "integrated" design is the same size as a "stand-alone" preheater. Additionally, a preheater with an "integrated" design does not allow for the sharing of thermal energy between the preheater and the media vessel other than the flow of heated gas from the preheater to the media vessel.

[0012] The following description relates to a gas processing facility that includes a media vessel and a preheater of a novel, inventive design. The novel design allows the preheater to share thermal energy with the media vessel through the structure of the preheater and media vessel, e.g., through the sidewalls of the structure, in addition to the heat exchanged by the preheated gas flowing from the preheater to the media vessel. Additionally or alternatively, the novel design allows for a reduction in the size of the preheater combination or a reduction in the overall size of the combined preheater and media vessel.

[0013] The gas processing facilities described generally include a preheater for preheating the gas stream before it passes to a subsequent processing operation, such as contacting the gas stream with a medium, which may be, for example, a catalyst or an adsorption medium.

[0014] Various different types of gas processing operations involve contacting the gas with another material, which is collectively referred to herein as a “media.” The media can be any of a variety of materials, with particular examples being solid materials (i.e., as opposed to liquid or gaseous materials) that can be in a variety of forms (e.g., particles, granules, solids (non-liquid, non-gaseous) having porous morphology and of a variety of sizes), which, when contacted with the gas, can function as a catalyst, adsorbent, or for another purpose.

[0015] When treating a gas by contacting the gas with a medium and allowing the medium to interact with the gas, the process may require or be improved by operating the process at high temperatures, heating the gas, the medium, or both. For example, processes for purifying a feed gas by catalytic techniques are typically carried out at high temperatures. Similarly, processes for regenerating adsorption media used in adsorption-type purification techniques are typically carried out at high temperatures. For these methods, the relevant gas (feed gas or regeneration gas) is preheated before the gas is contacted with the relevant medium (catalyst or adsorption media).

[0016] During the process of contacting the gas with the medium at elevated temperatures to allow the medium to interact with the gas, preferred conditions include uniform temperature distribution throughout the process, i.e., throughout the media bed. Preferably, the vessel containing the medium with the gas flowing through it is controlled at the desired process temperature, and the entire vessel, as well as all locations of the vessel, gas, and medium, are maintained at the same desired process temperature. Thermal gradients throughout the vessel are preferably minimized to produce high process efficiency.

[0017] In a typical design of a gas purification system, the gas preheater is a completely separate structure from the vessel containing the media (e.g., purification media such as a catalyst or adsorbent). A separate (stand-alone) preheater is an independent piece of process equipment that requires separate flow controls, separate temperature and pressure controls and sensors, separate heating and insulation equipment, and an entirely separate physical containment structure. The separate preheater must be constructed to control gas flow at the same pressure as the media vessel and must have heating elements and insulation that are entirely separate from the heating elements and insulation of the media vessel.

[0018] According to a modified version of the standalone design, the gas preheater can be positioned so that the output of the preheater is near the input end of the media vessel. The preheater is physically located "in-line" with the media vessel. Gas enters the preheater and flows through it at a location completely upstream of and in-line with the media vessel. The preheater and media vessel remain substantially separate physical structures. The two physical structures share substantially no common structure, and the two separate structures do not allow for a significant (useful) amount of heat energy exchange, i.e., do not allow for a significant (useful) amount of heat energy exchange other than through the flow of preheated gas from the preheater to the media vessel.

[0019] This patent application describes a gas treatment apparatus including a preheater integrated into the physical structure of a media vessel to allow the preheater to share space with the media vessel, share thermal energy with the media vessel by conductive heat transfer, or both. The described design allows a significant amount of thermal energy to be transferred from the preheater to the media vessel by thermal conduction through the two-dimensional physical surfaces of the preheater and media vessel, particularly through the two-dimensional sidewalls of the preheater and media vessel.

[0020] An example of a gas purification apparatus as described includes a media vessel having an inlet at one end, an outlet at an opposite end, and a length and volume extending between the two ends. According to the exemplary apparatus, a preheater is located along at least a portion of the length of the media vessel. Also, for example, the preheater may be in contact with the media vessel along the length of the media vessel, allowing thermal energy to be transferred by thermal conduction between the preheater and the media vessel. The exemplary apparatus includes a preheater located along the length of the media vessel, including an end of the media vessel and a portion extending from the end of the media vessel along the length of the media vessel toward the opposite end.

[0021] In an exemplary design, the surface of the preheater along its length is in contact with or shared with the surface of the media vessel along its length. Because the two surfaces are shared or in thermal contact, the combined structure can potentially be designed with an overall reduction in physical components. The reduction in the amount of physical components can enable cost savings, a reduction in the overall size (particularly the length) of the two combined components, or both.

[0022] An exemplary preheater design includes an interior volume, at least a portion of which is annular in shape. The annular preheater volume can provide intimate contact between the gas flowing through the annular preheater volume and a heating element in contact with the exterior surface of the preheater. By bringing the gas flowing through the annular volume of the preheater into intimate contact with the heating element, the efficiency with which the heating element heats the gas can be improved, which can potentially enable the use of a preheater of reduced size, e.g., having a smaller interior volume or smaller overall space requirements compared to other preheater designs.

[0023] An example of an annular interior volume of a preheater can include one or more interior surfaces that guide the flow of gas through the annular volume. One example is a channel in the interior surface of the annular volume that guides the flow of gas along a helical path extending along the length of the annular volume. The helical channel as part of the annular volume of the preheater can force the gas flowing through the preheater to flow around the circumference of the preheater and gradually (in a helical path) along the length of the preheater. The annular path uniformly distributes thermal energy within the gas through the preheater, i.e., thermal energy is efficiently and uniformly transferred from the heating element in contact with the preheater to the gas flow within the interior volume of the preheater. The efficient transfer of thermal energy to the gas creates a gas flow from the preheater that is highly uniform in temperature when it exits the preheater, with little or no temperature fluctuations within the gas and reduced or significantly eliminated thermal gradients within the gas.

[0024] In one aspect, the present disclosure relates to a gas treatment apparatus comprising a media vessel including a media vessel inlet end including a media vessel inlet, a media vessel outlet end including a media vessel outlet, a media vessel sidewall extending a length between the inlet end and the outlet end, and a media vessel interior extending between the inlet end and the outlet end, and a gas preheater located along the length of the media vessel sidewall.

[0025] In another aspect, the present disclosure relates to a method of using a gas purification apparatus comprising: a media vessel including a media vessel inlet end including a media vessel inlet; a media vessel outlet end including a media vessel outlet; a media vessel sidewall extending a length between the inlet end and the outlet end; a media vessel interior extending a length between the inlet end and the outlet end; and a media contained therein; a gas preheater located along the length of the media vessel sidewall; and a heating element covering at least a portion of the preheater. The method includes flowing a gas through the preheater to preheat the gas; and passing the preheated gas through the media vessel interior in contact with the media. [Brief explanation of the drawings]

[0026] [Figure 1]FIG. 1 illustrates a prior art arrangement of a preheater and media vessel. [Figure 2] FIG. 1 illustrates a prior art arrangement of a preheater and media vessel. [Figure 3] 1 illustrates a gas processing system herein. [Figure 4] 1 illustrates a gas processing system herein. [Figure 5A] FIG. 1 illustrates an example of a preheater including an internal flow control surface. [Figure 5B] FIG. 1 illustrates an example of a preheater including an internal flow control surface. DETAILED DESCRIPTION OF THE INVENTION

[0027] All figures are schematic and illustrative and are not necessarily to scale.

[0028] Below, a gas processing facility useful for processing a gas stream and including a preheater is described, as well as a method of using the facility to process a gas by heating the gas ("preheating") prior to subsequent processing operations performed on the gas stream.

[0029] Equipment and techniques for treating gas streams can involve contacting the gas stream with a medium. When purifying a gas, the gas contains impurities and the medium can reduce the amount of impurities in the gas during contact between the medium and the gas.

[0030] Some gas purification techniques remove impurities from a gas stream by sequestering the impurities, for example, by adsorbing the impurities onto the surface of an adsorbent material. The gas is flowed into contact with a solid adsorbent material, and impurities present in the gas are attracted to and adsorbed onto the surface of the adsorbent, removing the impurities from the gas. A variety of adsorbent materials are known. Adsorbents can be any of a variety of sizes and shapes, such as small particulates, granules, pellets, shells, cubes, monoliths, etc., with a desired amount of surface area per volume.

[0031] The composition of the adsorbent material in a gas purification process may also vary and may be selected based on the type of gas being treated, the type of impurities, the desired removal efficiency, or other factors. Examples of adsorbents known to be useful for adsorbing impurities from gas streams include, among others, activated carbon, zeolite materials, "metal-organic framework" (MOF) adsorbents, getters such as zinc-vanadium getters and zinc-aluminum getters.

[0032] Types of gases that contain impurities and that can be treated to remove impurities using adsorbents include nitrogen, argon, helium, hydrogen, ammonia, carbon dioxide, clean dry air ("CDA"), and oxygen, among others.

[0033] During use of an adsorbent-based gas purification system, a certain amount of impurities will accumulate on the adsorbent. The accumulated impurities can be removed from the adsorbent by a "regeneration" process, and the adsorbent can then be used again to purify gas. In the regeneration process, a gas stream ("regeneration gas") is passed over the adsorbent at an elevated temperature. The elevated temperature is generated by a preheater, as described herein.

[0034] The regeneration gas can be any gas effective in the regeneration process to remove accumulated impurities from the adsorption medium. The composition of the regeneration gas for removing impurities from the adsorption medium depends on factors including the type of feed gas processed using the adsorption medium. For the exemplary system, regeneration gases that may be useful for removing accumulated impurities from the adsorption medium used to remove impurities from a specific type of feed gas (shown in parentheses) include the following: nitrogen / hydrogen mixture (nitrogen), argon / hydrogen mixture (argon), helium / hydrogen mixture (helium), hydrogen (hydrogen), nitrogen / hydrogen mixture (ammonia), nitrogen / hydrogen mixture (carbon dioxide), clean dry air (clean dry air), and oxygen (oxygen).

[0035] Different gas purification techniques can reduce or remove certain amounts of impurities from a gas using catalysts in the gas purification process. With these techniques, impurities contained in the gas can be chemically transformed, e.g., chemically reduced or chemically oxidized, using a catalyst to become more (or less) desirable chemical compounds compared to the original impurities. Exemplary catalysts are those that convert nitrogen oxides (NO x These techniques are effective in chemically reducing impurities (e.g., nitrogen oxides, carbon monoxide, or hydrocarbons such as methane) to form water and carbon dioxide. With these techniques, gas is flowed into contact with a catalytic material, and impurities (e.g., nitrogen oxides, carbon monoxide, or hydrocarbons such as methane) are chemically converted (e.g., chemically reduced or chemically oxidized) to more desirable chemical compounds than the original impurities.

[0036] The composition of the catalyst in the gas purification process may also vary and may be selected based on the type of gas being treated, the types of impurities contained in the gas being treated, the desired efficiency of impurity removal, and other factors. Examples of catalysts known to be useful for converting impurities contained in gas streams include rhodium, platinum, palladium, among others.

[0037] A gas treatment apparatus for treating a gas by flowing the gas through a bed of media includes a vessel containing the media ("media vessel") and a flow control adapted to direct the flow of the gas through the media. The apparatus also includes a preheater used to heat ("preheat") the gas before it enters the media vessel.

[0038] In accordance with the described example of a gas treatment device, a useful device includes a media container having an inlet end, an outlet end, a length extending between the ends, and a sidewall extending along the length and defining an interior volume of the media container. The sidewall may be made of a rigid, thermally conductive material such as metal.

[0039] Also, according to an exemplary apparatus, a portion of the preheater is located adjacent to an exterior surface of the media vessel along at least a portion of the length of the media vessel. A useful or preferred preheater may comprise a two-dimensional surface in thermal contact with the exterior two-dimensional surface of the media vessel.

[0040] A preheater "in thermal contact" with a media vessel refers to a preheater having a two-dimensional surface (such as a sidewall) located sufficiently close to the two-dimensional surface (such as a sidewall) of the media vessel such that a useful amount of thermal energy can be transferred from the surface of the preheater to the surface of the media vessel; the useful amount of thermal energy may exceed the negligible amount of thermal energy transferred from the preheater to the media vessel during use of the preheater to supply preheated gas to the media vessel. The amount of thermal energy that can be transferred between two surfaces will depend on the distance or amount of contact between the two surface structures, the composition and thermal conductivity of the two surface structures, and the composition and form of any (solid, liquid, gas) material disposed between the two surfaces.

[0041] To provide a useful amount of thermal contact between the preheater and the media vessel, an exemplary gas treatment device can be constructed with a two-dimensional thermally conductive surface of the preheater sidewall in direct contact with a two-dimensional thermally conductive surface of the media vessel sidewall. The preheater sidewall structure is identifiable as a separate physical structure that is not an essential component of the media vessel, and the two distinct sidewall structures are in direct physical contact with each other, allowing efficient transfer of thermal energy from the surface of the preheater sidewall to the surface of the media vessel sidewall via thermal conduction.

[0042] Alternatively, the separate sidewalls of the media vessel and preheater, which are separately identifiable and connected to only one of the media vessel or preheater, may be separated by a small distance or space and still be considered to be in thermal contact. The space between the two sidewalls may be empty (i.e., filled with air) or filled with a thermally conductive material. The two sidewall structures may have opposing surfaces facing each other at a distance small enough to allow the desired transfer of heat between the structures. Exemplary distances may be relatively small, for example, less than 10 millimeters, or less than 5, 2, or 1 millimeter. A gas or solid material (e.g., air or a thermally conductive solid) present between the two sidewall surfaces allows for efficient transfer of heat between the two sidewalls.

[0043] Alternatively, the gas treatment apparatus as described may be constructed such that the sidewall of the media vessel and the sidewall of the preheater are made from a single physical structure, the single sidewall structure serving to define the interior of the media vessel on one side of the sidewall (the "inside" of the single sidewall) and the interior of the preheater on the opposite side of the sidewall (the "outside" of the single sidewall).

[0044] In contrast, the sidewall structures of the media vessel and the preheater are considered to be not in thermal contact with one another if the two structures are positioned in a manner that does not allow for a useful amount of thermal energy transfer from the preheater to the media vessel during a gas processing process as described herein. In various previous designs of gas processing systems, the preheater and media vessel have been positioned so that the two are not in thermal contact.

[0045] For example, referring to Figure 1, a "stand-alone" preheater 10 is a separate device and is located a distance away from media vessel 20. The two units are connected only by a gas flow conduit that carries preheated gas from the outlet of preheater 10 to the inlet of media vessel 20. Preheater 10 includes an interior volume that is heated using heaters 12 (not specifically shown) and insulated by insulating material 18 located generally around the periphery of the preheater structure.

[0046] Gas enters inlet 14 and passes through the interior volume of preheater 10, including the surrounding annular volume near heater 12. The interior volume of preheater 10 is maintained at an elevated temperature using heater 12 to produce a desired increase in the temperature of the gas. Preheated gas 22 flows out outlet 16 and then through a conduit (not shown) that connects to input 30 of media vessel 20. Media vessel 20 includes an interior containing media 26 and is heated and insulated by heater 24 (not specifically shown) and insulating material 28, respectively, located around and surrounding media vessel 20. The exchange of thermal energy from preheater 10 to media vessel 20 is limited to the exchange that occurs with the flow of preheated gas 22 from preheater 10 to media vessel 20. The physical structure of media vessel 20 is not in thermal contact with the physical structure of preheater 10.

[0047] Referring to FIG. 2, a gas processing system 32 is illustrated schematically comprising a media vessel 40 and a preheater 42 located "upstream" from an inlet 46 of the media vessel 40. "Upstream" refers to the system as flow is directed first through the preheater and then through the media vessel 40. As shown, the preheater 42 is a device located in-line with the media vessel 40 at a distance from the media vessel 40, with the preheater separated from the media vessel by an air gap 50. The preheater 42 is connected to the inlet 46 of the media vessel 44 through the air gap 50 (including a thermocouple 52), and preheated gas enters the inlet 46 through an outlet 48 of the preheater 42. In this design of the preheater and media vessel system, the preheater 42 is said to be "integrated" with the media vessel.

[0048] The preheater 42 includes an interior volume 34 and a filter 36 that are heated using a heater (not shown), which may be located on the exterior surface of the preheater 42, and insulated by insulating material 38 located generally around the preheater 42. During use of the preheater 42, gas flow enters the inlet 44 and passes through the interior volume 34 of the preheater 42, including the surrounding annular volume near the heater. The heater heats the interior volume 34 to an elevated temperature, increasing the temperature of the gas passing through the volume 34. The preheated gas 60 flows out the outlet 48, through the void 50, and then into the media vessel 40 through the inlet 46. The media vessel 40 includes an interior containing a media 66, and is heated and insulated by the heater (not shown) and insulating material 38, which respectively surround the exterior surface of the media vessel 40.

[0049] The exchange of thermal energy between the media vessel 40 and the preheater 42 occurs with the flow of preheated gas 60 from the preheater 42 to the media vessel 40. The media vessel 40 is not in thermal contact with the preheater 42. The media vessel 40 and the "integral" preheater 42 are constructed such that the outlet end of the preheater 42 is aligned with the inlet 46 of the media vessel 40. No portion of the preheater 42 extends along any portion of the length of the media vessel 40, and the two-dimensional surface of the preheater's sidewall (68) is not in thermal contact with the two-dimensional surface of the media vessel's sidewall (70).

[0050] As shown, the sidewall 70 of the media vessel 40 and the sidewall 68 of the preheater 42 may be constructed of a single piece of material extending along the length of both the media vessel 40 and the preheater 42. The use of this single piece of material as the sidewall construction for both the media vessel and the preheater ensures that there is no thermal contact between the media vessel and the preheater, at least because the amount of heat energy that can be transferred along the material, through the thickness of the material, and along the length of the material is negligible.

[0051] In contrast to such previous designs, the exemplary preheaters herein include a physical structure that is in thermal contact with the media vessel, e.g., across a two-dimensional surface of the structure. The thermal contact between the media vessel and the preheater allows a significant amount of useful thermal energy to be transferred from the preheater to the media vessel by thermal conduction.

[0052] To achieve this transfer of thermal energy, the two-dimensional surface portion of the preheater is physically located adjacent to the outer two-dimensional surface of the media vessel along the length of the media vessel, and preferably may be in direct physical contact with the outer surface of the media vessel. Preferably, the preheater sidewall and the media vessel sidewall are each made of a material having good thermal conductivity, such as a metal.

[0053] According to an exemplary gas treatment device design, the preheater includes an interior volume extending along the length of the media vessel. More specifically, the preheater includes an entire interior volume through which gas flows during use, including an annular portion (the "annular volume"). The annular volume extends along a portion of the preheater located along the outer surface of the media vessel for at least a portion of the length of the media vessel between the media vessel inlet and the media vessel outlet.

[0054] In the exemplary preheater, the overall interior volume of the preheater also includes a non-annular (e.g., cylindrical) portion located adjacent to and in-line with the outlet end of the media vessel. This portion of the overall interior volume of the preheater is referred to herein as the "end volume" of the preheater. The exemplary end volume may have a cross-sectional shape and size (e.g., diameter) approximately equal to the cross-sectional shape and size of the media vessel and may have a length extending in a direction parallel to the length of the media vessel.

[0055] Depending on the use of the preheater, the preheater may include one or more passages that allow gas flow between an external location and the preheater's internal volume, which may be either an end volume or an annular volume. These passages extend across the preheater's external side or end walls and may be referred to as a "passage," "inlet," or "outlet." However, regardless of whether the passage is referred to as an "inlet" or "outlet," the passages typically allow gas flow in two directions, either into or out of the preheater, and may function as either an inlet or an outlet during different process steps performed by the gas processing equipment using the preheater.

[0056] In one particular type of exemplary preheater, the preheater may include two passages: one passage may be positioned to allow gas flow between an annular volume of the preheater and an exterior location; and a different passage may be positioned to allow gas flow between an end volume of the preheater and an exterior location.

[0057] In an alternative example, the preheater may include only one passageway positioned to allow gas flow between the annular portion of the preheater and an external location, eliminating the need for a second passageway passing directly between the end volume of the preheater and the external location.

[0058] In the exemplary apparatus, locating the preheater outside the media vessel along a portion of the length of the media vessel enables useful or advantageous features of the apparatus. These may include one or more of the following: efficient performance of the preheater, such as in terms of gas flow volume and efficiency and uniformity of heating of the gas; reduced requirements for auxiliary equipment, such as multiple separate heating devices and insulating materials, for the preheater and media vessel combination; structural advantages based on reduced size and space requirements of the designs herein; or milder operating conditions for the gas flowing through the preheater, such as reduced pressure or flow rate of the regeneration gas required to flow through the preheater.

[0059] In general, preheaters as described can function with improved efficiency when used to preheat gas delivered to a media vessel. The location of the preheater on the exterior surface of the media vessel, along the length of the media vessel, and preferably in thermal contact with the media vessel, provides a highly efficient method of heating gas flowing through the preheater while simultaneously heating at least a portion of the media vessel and the media contained within at least a portion of the media vessel.

[0060] One benefit is that the location of the preheater along the length of the media vessel, with the preheater and media vessel located along a shared length of the gas treating apparatus, can allow for a reduction in the overall size of the preheater or apparatus. The overall volume of the combined preheater and media vessel can be significantly reduced compared to the combined overall volume of an equivalent media vessel and "standalone" preheater, or the combined overall volume of an equivalent media vessel and "integrated" preheater.

[0061] Additionally, the location of the preheater on the outer surface of the media vessel along its length allows for a reduction in the size and amount of total heating elements and insulating material required to heat and insulate the preheater and media vessel. Both the "standalone" and "integrated" preheater designs (see Figures 1 and 2) do not achieve a significant amount of heat transfer between the media vessel and the preheater other than through the flow of heated gas between the preheater and the media vessel. In contrast, the preheater as described transfers thermal energy from the preheater to the media vessel by thermal conduction through the sidewalls of the preheater and the media vessel. The heating elements and insulating material used to heat and insulate the preheater are positioned in thermal contact with the media vessel and function to simultaneously heat and insulate both the preheater and the media vessel (at least a portion of the media vessel).

[0062] Additionally, the location of the preheater on the outer surface of the media vessel along its length provides a single structure with a compact (efficient) overall size, including a reduced overall length of the combined preheater and media vessel structure compared to previous designs. The combined overall length of the preheater and media vessel herein may be significantly reduced compared to the combined overall length of an equivalent media vessel and "all-in-one" preheater having the same throughput, e.g., including the same sized media vessel.

[0063] In some gas processing apparatus, the volume of the preheater relative to the media vessel may be less than the volume of the relative volume of the preheater relative to the media vessel of different designs, e.g., the "standalone" or "integrated" designs shown in Figures 1 and 2. In exemplary designs, the preheater volume of a gas processing system herein (e.g., as illustrated in Figures 3 or 4) may be less than 50, 40, 30, 20, or 10 percent of the volume of the media vessel.

[0064] Similarly, depending on the application of the gas treating device, the volumetric flow rate of gas through the preheater relative to the volumetric flow rate of gas through the media vessel of the gas treating device may be reduced, or may be at a lower pressure, or both, compared to the gas flow that may be required through a preheater of a different design, such as a "stand-alone" or "integrated" preheater. For example, a preheater herein used to preheat regeneration gas may function effectively during a regeneration step with the use of a significantly lower volumetric flow rate of regeneration gas through the preheater compared to the gas flow rate that may be required for a "stand-alone" or "integrated" preheater design used to preheat regeneration gas.

[0065] One specific example of the gas processing equipment described is a gas purification system including an adsorbent contained within a media container. See FIG. 3. To provide a high level of purity for the feed gas used in a commercial manufacturing process, the process may begin with a source of highly purified feed gas ("feed gas"), typically contained in and supplied from a storage container. Before sending the feed gas from the storage container for use in the manufacturing process, the feed gas is treated by an additional (final) purification step at the manufacturing process location. By common technology, this step is carried out by flowing the feed gas from the storage container through a gas purification system containing an adsorbent medium in particulate form, i.e., a "bed" of adsorbent medium particles. The gas stream passes through the bed of adsorbent medium particles, bringing the gas into contact with the surface of the adsorbent medium. When the feed gas contacts the surface of the adsorbent medium, impurities present at very low levels in the feed gas are adsorbed by the adsorbent medium and removed from the feed gas.

[0066] During the service life of a gas purification system, impurities removed from the feed gas adsorb onto the adsorption media and gradually accumulate. After sufficient accumulation, the adsorption media becomes loaded with impurities and becomes less effective. The media can be either replaced or "regenerated." Media regeneration refers to the process of removing a certain amount of accumulated impurities from the media, allowing the media to be used again to remove impurities from the feed gas.

[0067] A regeneration process can be carried out with the adsorption media remaining in the adsorption vessel used to contain the media during the purification process by passing a heated gas ("regeneration gas") through the adsorption media in the vessel. The regeneration gas contacts the surface of the adsorption media, and impurities adsorbed and accumulated on the media surface desorb from the surface and are carried away from the media in the regeneration gas stream. By removing a sufficient amount of the adsorbed impurities from the adsorbent, the regenerated adsorbent can be reused to remove impurities from a feed gas.

[0068] The regeneration gas may be heated, i.e., preheated, before contacting the adsorption medium. The heated regeneration gas is capable of removing a greater amount of impurities from the adsorption medium compared to an unheated regeneration gas.

[0069] Referring to FIG. 3, an example of a gas treatment apparatus as described herein is illustrated for use in purifying a gas by adsorbing impurities in the gas onto the surface of a bed of adsorption media particles, which is additionally capable of regenerating the adsorption media by passing a heated regeneration gas through the bed of adsorption media to remove impurities from the adsorption media.

[0070] The gas treatment device 100 includes a media vessel and a preheater as part of a single gas treatment device. The preheater is structurally coupled to the media vessel to provide effective preheating of the regeneration gas flowing through the preheater.

[0071] Apparatus 100 includes a media vessel 110 defining a media vessel interior 120 (cylindrical, as shown) containing media 122 in the form of a bed of media particles (as shown). Media 122 may be particles of an adsorbent material, and gas processing apparatus 100 may be used as a gas purification apparatus for removing impurities from a feed gas by adsorbing the impurities onto media 122 as the feed gas flows through a bed of media 122.

[0072] The media vessel 110 includes an inlet 140, an outlet 142, and an interior volume 120 between the inlet and outlet. More specifically, the media vessel 110 includes an inlet end 130 (as shown, in an upper or "top" position) including an end wall 134 that includes the media vessel inlet (opening) 140. The media vessel 110 also includes an outlet end 132 (as shown, in a lower or "bottom" position) including an end wall 136 having a media vessel outlet (one or more passages) 142. The media vessel interior 120 is defined by the inlet end wall 134, the outlet end wall 136, and a sidewall (shown as cylindrical) 138. The media vessel outlet 142 can be a support structure such as a screen or perforated plate or disk that includes a plurality of openings sized smaller than the size of the particles of media 122. The media vessel outlet 142 can thereby support the particles of media 122 while allowing gas flow to pass between the interior of the vessel 110 and the interior of the preheater 150.

[0073] The preheater 150 is located at the outlet end in contact with the bottom portion of the media vessel 110 and along at least a portion of the exterior length of the media vessel 110. The length of the media vessel 110 is the distance between the inlet end wall 134 and the outlet end wall 136.

[0074] The preheater 150 is made up of an interior sidewall 152, which, optionally and as shown, is of the same construction as the sidewall 138 of the media vessel 110. The preheater 150 also includes an exterior sidewall 154 opposite the interior sidewall 152. The preheater 150 also includes a preheater outlet 158 ​​and a preheater inlet 162.

[0075] The preheater 150 includes a preheater interior volume 160 that includes two portions: annular volume 160a and end volume 160b. The annular volume 160a is a substantially annular volume defined by an inner interior sidewall 152 and an outer exterior sidewall 154 and extending along a portion of the length of the media vessel 110. The end volume 160b is a substantially flat cylindrical volume (having a height (in the length direction of the media vessel 110) substantially less than its diameter) defined by the media vessel end wall 136 on one side (top) of the end volume 160b and by the preheater end wall 156 on the opposite side (bottom) of the end volume 160b.

[0076] Insulating or heating layer 170, which may include heaters, insulating (low thermal conductivity) material, or both, is positioned above preheater 150 and vessel 110 so as to surround both. At the location of preheater 150 along the lower portion of the length of apparatus 100, at the outlet end of vessel 110, heat from the heaters in heating layer 170 flows into preheater 150 to heat gas flowing through the interior volume of preheater 150. Heat may also be transferred from preheater 150 to vessel 110 by thermal conduction through sidewall 152 (which is also sidewall 138).

[0077] In use, apparatus 100 can be used as a gas purification apparatus to treat (purify) a feed gas provided for use in a manufacturing process (not shown) for producing semiconductors or microelectronic devices, etc. In this use, a feed gas having a relatively high level of purity can be flowed through media vessel inlet 140 into media vessel 110. The feed gas passes through vessel 110, contacts the surface of adsorption media 122, passes through media vessel outlet 142, then passes through end volume 160b of preheater 150, and exits preheater 150 through preheater outlet 158. During this process, the valve at preheater inlet 162 is closed, preventing gas flow through inlet 162.

[0078] The preheater outlet 158 ​​is connected directly or indirectly to a manufacturing device, such as a semiconductor or microelectronic device manufacturing system, that will receive the treated feed gas exiting the preheater outlet 158 ​​.

[0079] The feed gas exiting preheater outlet 158 ​​has a reduced level of impurities compared to the feed gas entering vessel 110 at inlet 140. As the feed gas passes through vessel 110 and contacts media 122, impurities in the feed gas are adsorbed and accumulated on the surfaces of adsorption media 122. After a certain amount of impurities, as accumulated during use, media 122 becomes less useful and can be regenerated by contacting media 122 with a regeneration gas, such that the regeneration gas removes (desorbs) a certain amount of the accumulated impurities from media 122.

[0080] In the exemplary system, the regeneration gas can flow through vessel 110 in a direction opposite to the direction of flow of the feed gas through vessel 110; i.e., during the purification step, the feed gas flows from top to bottom (as shown) from inlet 140 to outlet 142, and during the regeneration step, the regeneration gas flows from bottom to top from outlet 142 (which now functions as an inlet) to inlet 140 (which now functions as an outlet).

[0081] 3, the regeneration gas may be preheated using a preheater 150, with the preheated regeneration gas flowing from the preheater interior volume through vessel outlet 142 to the interior 120 of the media vessel 110. The regeneration gas may be preheated by flowing the regeneration gas through inlet 162, through the interior volume 160 of the preheater 150, and then through media vessel outlet 142 (which also functions as an inlet) to the interior 120 of the media vessel 110 while heating the preheater with heat.

[0082] Upon entering the preheater interior volume 160 through inlet 162, the temperature of the regeneration gas can be any useful temperature, such as ambient temperature (e.g., 23 degrees Celsius) or near ambient temperature, e.g., a temperature in the range of 20-25 degrees Fahrenheit. The temperature of the preheater and preheated gas can be any useful temperature, e.g., a temperature of at least 200 degrees Celsius, e.g., a temperature in the range of 210-350°C.

[0083] The preheated regeneration gas passes through media vessel 110 and contacts media 122, causing accumulated impurities present on the surface of media 122 to be desorbed and removed from the adsorption media surface by the regeneration gas. The regeneration gas exits vessel 110 by flowing through vessel "inlet" 140 (which functions as an outlet), carrying with it the impurities desorbed and removed from adsorption media 122.

[0084] In certain exemplary gas purification systems, the flow rate of the regeneration gas through the preheater and media vessel during the regeneration step may be lower than the flow rate of the feed gas through the media vessel and preheater during the step of purifying the feed gas.

[0085] The flow rate of the feed gas through the media vessel can vary depending, among other things, on the type of gas, the type of media (catalyst, adsorbent), and the type and amount of impurities to be removed. 3 / hour), examples of the flow rate of the source gas through the medium vessel are 10 to 200NM 3 / hour, e.g., 20~160NM 3 / hour range.

[0086] According to an exemplary method of using the gas treatment apparatus as described, during the regeneration step, the flow rate of the regeneration gas can be a fraction of the flow rate of the feed gas through the media vessel during the purification step. The flow rate of the regeneration gas can be, for example, less than 50, 40, 30, 20, 15, or 10 percent of the flow rate of the feed gas through the media vessel during the purification step. The ability to perform the regeneration step using a significantly lower flow rate of the regeneration gas compared to the flow rate of the feed gas during the purification step can be advantageous because it allows the preheater to be constructed with a smaller size, e.g., volume.

[0087] Similarly, the pressure of the regeneration gas can be a fraction of the pressure of the feed gas flowing through the preheater and passing through the media vessel during the purification process. The pressure of the feed gas in the media vessel during the purification process can range from 1 to 300 pounds per square inch, gauge (psig). The pressure of the regeneration gas in the preheater as described during the regeneration process can range from 1 to 60 pounds per square inch, gauge (psig). Stated another way, the pressure (psig) of the regeneration gas flowing through the preheater during the regeneration process can be less than 50, 40, or 30 percent of the pressure (psig) of the feed gas flowing through the media vessel during the purification process.

[0088] Table 1 shows examples of materials and operating conditions that can be used to treat various types of feed gases (listed above) in a purification process by passing the feed gas through an adsorbent-based gas purification system as described.

[0089] Table 1 also provides examples of materials (regeneration gases (“regen gases”)) and process parameters useful in gas treatment equipment as described herein. The table lists the feed gas (top) that undergoes a purification step, exemplary flow rates of the feed gas during the purification step, the chemical makeup of the regeneration gas used to regenerate the adsorption medium, exemplary flow rates of the regeneration gas, and exemplary maximum temperatures during regeneration. TIFF0007784454000001.tif74170

[0090] The gas treatment devices herein can be used with different types of media. Referring to Figure 4, an example of a gas treatment device as described herein for use in purifying a gas by passing the gas through a bed of catalyst particles is illustrated.

[0091] Gas treatment device 200 comprises a media vessel and a preheater as part of a single (combined) gas treatment device. The preheater is structurally combined with the media vessel to provide effective preheating of the raw material gas flowing through the preheater and then the media vessel.

[0092] Apparatus 200 includes a media vessel 210 defining a media vessel interior 220 (cylindrical, as shown) containing media 222 in the form of a bed of catalyst particles (as shown). Media 222 can be particles of catalyst particles. Gas treatment apparatus 200 can be used as a gas purification apparatus to remove (e.g., chemically alter) impurities from a feed gas by reaction of the impurities with the catalyst surfaces as the feed gas flows through the bed and contacts the catalyst particles 222.

[0093] Media vessel 210 includes an inlet 240, an outlet 242, and an interior volume 220 between the inlet and outlet. More specifically, media vessel 210 includes an inlet end 230 (as shown, in an upper or "top" position) that includes an end wall 234 that includes one or more media vessel inlets (openings) 240. Media vessel 210 also includes an outlet end 232 (as shown, in a lower or "bottom" position) that includes an end wall 236. Media vessel interior 220 is defined by inlet end wall 234, outlet end wall 236, and a sidewall (shown as cylindrical) 238. Media vessel outlet end 232 may include a support structure, such as a screen or perforated plate or disk, that includes a plurality of openings sized smaller than the size of the particles of media 222. Media vessel outlet end 232 can thereby support the particles of media 222 while allowing gas flow to pass between the interior of vessel 210 and outlet 242.

[0094] The apparatus 200 also includes a preheater 250 located at the inlet end in contact with the upper portion of the media vessel 210 and along at least a portion of the exterior length of the media vessel 210. The length of the media vessel 210 is the distance between the inlet end wall 234 and the outlet end wall 236.

[0095] Preheater 250 is made up of an interior sidewall 252, which, optionally and as shown, is of the same construction as sidewall 238 of media vessel 210. Preheater 250 also includes an exterior sidewall 254 opposite interior sidewall 252. Preheater 250 also includes a preheater inlet 262.

[0096] Preheater 250 includes a preheater interior volume 260 that includes two portions: annular volume 260a and end volume 260b. Annular volume 260a is a substantially annular-shaped volume bounded by an inner interior sidewall 252 and an outer exterior sidewall 254 and extending along a portion of the length of media vessel 210. End volume 260b is a substantially flat, cylindrical volume (with a height (along the length of media vessel 210) significantly less than its diameter) bounded by media vessel end wall 234 on one side of end volume 260b (the bottom side as shown) and by preheater end wall 256 on the opposite side of end volume 260b (the top side as shown).

[0097] Insulating or heating layer 270, which may include heaters, insulating (low thermal conductivity) material, or both, is located above preheater 250 and media vessel 210 so as to surround both. At the location of preheater 250 along the upper portion of the length of apparatus 200, at the inlet end of vessel 210, heat from the heaters in heating layer 270 flows into preheater 250 to heat gas flowing through the interior volume of preheater 250. Heat may also be conducted from preheater 250 through sidewall 252 (also sidewall 238) to vessel 210.

[0098] In use, apparatus 200 may be used as a gas purification apparatus to process (purify) a feed gas provided as a purified feed gas for use in a manufacturing process (not shown) for producing semiconductor or microelectronic devices, etc. In this use, the feed gas at a relatively high level of purity may be flowed through media vessel inlet 240 into media vessel 210 after being preheated using preheater 250. The feed gas passes through preheater inlet 262, through volume 160 of preheater 250, through inlet 240, and into media vessel 210.

[0099] Upon entering the preheater interior volume 260 through inlet 262, the temperature of the feed gas can be any useful temperature, such as ambient temperature (e.g., 23 degrees Celsius) or near ambient temperature, e.g., a temperature in the range of 20-25 degrees Celsius. The temperature of the preheater and preheated gas can be any useful temperature, e.g., a temperature of at least 200 degrees Celsius, e.g., a temperature in the range of 210-350°C.

[0100] The preheated gas passes through a bed of catalyst particles 222 and then through a media vessel outlet 242. The outlet 242 is connected directly or indirectly to a manufacturing device, such as a semiconductor or microelectronic device manufacturing system, that will receive the treated feed gas exiting the preheater outlet 242. The feed gas exiting the preheater outlet 242 has reduced levels of impurities compared to the feed gas entering the preheater 250 at inlet 262.

[0101] In certain examples of the preheater as described, the interior volume, including the annular volume and the end volume, may more specifically include an annular volume defined by a sidewall including channels for directing flowing gas through the annular volume to increase the efficiency of the preheater. One example of a useful flow path for the annular volume is a spiral flow path that causes gas to flow through a spiral path that wraps around the media vessel multiple times while proceeding from the preheater inlet to the end volume of the preheater.

[0102] 5A and 5B, an example of a preheater sidewall configuration that creates a spiral flow path for gas through the annular space of the preheater is shown. A portion of a gas processing apparatus 300 is shown, including a preheater 350 and a media vessel 310.

[0103] 5A is a cross-sectional view showing the sidewall surface and the interior of the preheater, and FIG. 5B is a cross-sectional view showing the interior of the media container and a cross section of the sidewall and the interior of the preheater.

[0104] Preheater 350 includes a preheater interior volume 360 ​​that includes two portions: annular volume 360a and end volume 360b. Annular volume 360a is a substantially annular-shaped volume defined by a grooved surface of inner interior sidewall 352 and an outer, ungrooved exterior sidewall 354. Annular volume 360a extends along a portion of the length of media vessel 310, which contains media 302 (shown in FIG. 5B but not in FIG. 5A). Thermocouple 312 is shown in FIG. 5A.

[0105] As shown, grooved interior sidewall 352 includes a surface having rounded grooves 370 that form a helical channel 380 that extends circumferentially around media vessel 310 between preheater inlet 356 and end volume 360b. At inlet 356, which is in the upper (as shown) position of annular volume 360a, the annular volume includes a continuous annular space 358 that extends in a non-helical circular path around the entire circumference of media vessel 310 at the length of inlet 356. In a particularly preferred example of annular volume 360a, helical channel 380 intersects with annular space 358 circumferentially opposite inlet 356, i.e., helical channel 380 intersects with annular space 358 180 degrees from inlet 356 relative to the circumference of annular volume 360a.

[0106] In use, gas (e.g., regeneration gas or feed gas) enters inlet 356 (see arrow indicating direction of flow), enters annular space 358, flows halfway (180 degrees) around the circumference of annular volume 160a, and enters the upper (shown) end of helical channel 358. The gas flows in a helical path through annular volume 160a to end volume 360b. As it flows through helical channel 358, a heater (not shown) in contact with exterior sidewall 354 heats the gas, raising its temperature to the desired temperature. The preheated gas enters end volume 360b and then enters interior 304 of media vessel 310 and passes through a bed of media 302.

[0107] In a first aspect, a gas treatment apparatus includes a media vessel including a media vessel inlet end including a media vessel inlet, a media vessel outlet end including a media vessel outlet, a media vessel sidewall extending a length between the inlet end and the outlet end, and a media vessel interior extending between the inlet end and the outlet end, and a gas preheater located along the length of the media vessel sidewall.

[0108] Also disclosed is a second aspect of the first aspect, wherein the gas preheater is in thermal contact with the sidewall of the media vessel.

[0109] Also disclosed is a third aspect of the first or second aspect, wherein the gas preheater extends circumferentially around the media vessel sidewall.

[0110] Additionally, a fourth aspect of any one of the first to third aspects is disclosed, wherein the preheater extends from the outlet end along a portion of the length of the media vessel sidewall.

[0111] Also disclosed is a fifth aspect of any one of aspects 1 to 4, further comprising a heating element in thermal contact with at least a portion of the preheater, the preheater being disposed between the media vessel sidewall and the heating element.

[0112] Also disclosed is a sixth aspect of any one of aspects 1 to 5, further comprising an insulating material covering at least a portion of the preheater, wherein the preheater is disposed between the medium container and the insulating material.

[0113] Additionally, a seventh aspect of any one of the first to sixth aspects is disclosed, further comprising a perforated end wall at the media vessel outlet, the perforated end wall separating the media vessel interior from the preheater interior.

[0114] Additionally, an eighth aspect of any one of the first to seventh aspects is disclosed, wherein the preheater has a preheater interior volume that is less than 30 percent of the volume of the media vessel interior.

[0115] Also disclosed is a ninth aspect of any one of the first to eighth aspects, wherein the apparatus includes a preheater inlet that allows gas to pass between an external location and the preheater interior, the preheater inlet being located between the media vessel inlet end and the media vessel outlet end.

[0116] Also disclosed is a tenth aspect according to the ninth aspect, further including a preheater outlet that allows gas to pass between an external location and the interior of the preheater, and an opening at the outlet end of the media vessel that allows gas to pass between the interior of the preheater and the interior of the media vessel.

[0117] Additionally, an eleventh embodiment is disclosed according to any one of the first to tenth embodiments, wherein the preheater includes an inner sidewall extending along and around a portion of the length of the media vessel sidewall, an outer sidewall extending along and around a portion of the length of the media vessel sidewall, a preheater end wall spaced from the media vessel outlet, and a preheater interior volume including an annular volume bounded by the inner and outer sidewalls and an end volume bounded by an end of the media vessel outlet and the preheater end wall.

[0118] Also disclosed is a twelfth aspect according to the eleventh aspect, wherein the annular volume includes a helical channel that causes gas to flow through the annular volume in a helical path around the circumference of the annular volume.

[0119] Also disclosed is a thirteenth aspect of any one of aspects 1 to 12, wherein the media vessel comprises a media selected from an adsorption media and a catalyst.

[0120] In a fourteenth aspect, there is provided a method of using a gas treatment apparatus, the apparatus comprising: a media container including a media container inlet end including a media container inlet; a media container outlet end including a media container outlet; a media container sidewall extending a length between the inlet end and the outlet end; a media container interior extending a length between the inlet end and the outlet end; and a media contained therein; a gas preheater located along the length of the media container sidewall; and a heating element covering at least a portion of the preheater; the method comprising flowing a gas through the preheater to preheat the gas; and passing the preheated gas through the media container interior to contact the media.

[0121] Also disclosed is a fifteenth aspect according to the fourteenth aspect, wherein the medium is an adsorption medium, the gas is a regeneration gas, and the method includes flowing a feed gas through the interior of a media container to contact the adsorption medium, and after flowing the feed gas through the interior of the media container, adsorbing impurities contained in the feed gas by the adsorption medium to remove them from the process gas; flowing the regeneration gas through a preheater to preheat the regeneration gas; and flowing the preheated regeneration gas through the interior of the media container to contact the adsorption medium.

[0122] Also disclosed is a sixteenth aspect according to the fifteenth aspect, wherein the apparatus includes a preheater inlet that allows gas to pass between an external location and the preheater interior, the preheater inlet being located between a media container inlet end and a media container outlet end, a preheater outlet that allows gas to pass between the external location and the preheater interior, and an opening at the outlet end of the media container that allows gas to pass between the preheater interior and the media container interior, and the method includes: a process gas entering the media container interior through the media container inlet; the process gas exiting the media container interior through the media container outlet and entering the preheater interior; and the process gas flowing out of the preheater interior through the preheater outlet.

[0123] Also disclosed is a seventeenth aspect according to the sixteenth aspect, wherein the regeneration gas enters the preheater through the preheater inlet, the regeneration gas exits the preheater through the media vessel outlet and enters the media vessel, and the regeneration gas flows out of the media vessel through the media vessel inlet.

[0124] Also disclosed is an 18th aspect of any one of the 14th to 17th aspects, further including flowing a feed gas through an interior of the medium vessel at a certain feed gas flow rate, and flowing a regeneration gas through a preheater at a certain regeneration gas flow rate that is less than the feed gas flow rate.

[0125] Also disclosed is a 19th aspect according to the 18th aspect, wherein the regeneration gas flow rate is less than 50 percent of the process gas flow rate.

[0126] Also disclosed is a twentieth aspect of any one of the fourteenth to nineteenth aspects, further comprising flowing a feed gas therethrough at a constant feed gas pressure and flowing a regeneration gas through the preheater at a constant regeneration gas pressure less than the feed gas pressure.

[0127] Also disclosed is a 21st embodiment according to the 20th embodiment, wherein the regeneration gas pressure is less than 50 percent of the feed gas pressure.

[0128] Also disclosed is a 22nd aspect according to any one of the 15th to 21st aspects, wherein the feed gas is selected from nitrogen, argon, hydrogen, ammonia, carbon dioxide, clean dry air, and oxygen.

[0129] Also disclosed is a 23rd aspect according to the 14th aspect, wherein the medium comprises a catalyst, and the gas is a feed gas selected from nitrogen, argon, hydrogen, carbon dioxide, clean dry air, and oxygen.

[0130] Also disclosed is a 24th aspect according to the 14th and 15th aspects, wherein the impurities are nitrogen oxides, carbon monoxide, or hydrocarbons.

[0131] Also disclosed is a 25th aspect according to the 14th and 15th aspects, wherein the impurity is methane.

Claims

1. a media container inlet end including a media container inlet; a media container outlet end including a media container outlet; a media container sidewall extending a length between the inlet end and the outlet end; and a media container interior extending between the inlet end and the outlet end; a medium container comprising: a gas preheater located along the length of the media vessel sidewall; a gas preheater inlet located between the media vessel inlet end and the media vessel outlet end for allowing gas to pass between an external location and the interior of the gas preheater; a gas preheater outlet for allowing gas to pass between an external location and the interior of the gas preheater; an opening at the outlet end of the media vessel that allows gas to pass between the interior of the gas preheater and the interior of the media vessel; 10. A gas treatment device comprising:

2. 10. The gas treatment device of claim 1, wherein the gas preheater is in thermal contact with the media vessel sidewall.

3. 10. The gas treatment device of claim 1, wherein the gas preheater extends circumferentially around the media vessel sidewall.

4. 10. The gas treatment device of claim 1, wherein the gas preheater extends from the outlet end along a portion of the length of the media vessel sidewall.

5. 10. The gas treatment apparatus of claim 1, further comprising a heating element in thermal contact with at least a portion of the gas preheater, the gas preheater being disposed between the media vessel sidewall and the heating element.

6. The gas treatment device of claim 1 , further comprising a thermal insulator covering at least a portion of the gas preheater, the gas preheater being disposed between the medium vessel and the thermal insulator.

7. 10. The gas treatment device of claim 1, further comprising a perforated end wall at the media vessel outlet, the perforated end wall separating the media vessel interior from the gas preheater interior.

8. 10. The gas processing apparatus of claim 1, wherein the gas preheater has an interior preheater volume that is less than 30 percent of the volume of the interior of the media vessel.

9. The gas preheater an interior sidewall extending along a portion of the length of and around the media container sidewall; an exterior sidewall extending along a portion of the length of and around the media container sidewall; a preheater end wall spaced from the media vessel outlet; an annular volume bounded by an inner sidewall and an outer sidewall; and an end volume bounded by the end of the media vessel outlet and the preheater end wall; a preheater interior volume including: The gas treatment device of claim 1 , comprising:

10. 10. The gas treatment apparatus of claim 9, wherein the annular volume includes a helical channel that causes gas to flow through the annular volume in a helical path around the circumference of the annular volume.

11. 1. A method of using a gas treatment device, comprising: a media container inlet end including a media container inlet; a media container outlet end including a media container outlet; a media container sidewall extending a length between the inlet end and the outlet end; a media container interior extending between an inlet end and an outlet end; and Media contained within a medium container comprising: a gas preheater located along the length of the media vessel sidewall; a heating element covering at least a portion of the preheater; a gas preheater inlet located between the media vessel inlet end and the media vessel outlet end for allowing gas to pass between an external location and the interior of the gas preheater; a gas preheater outlet for allowing gas to pass between an external location and the interior of the gas preheater; an opening at the outlet end of the media vessel that allows gas to pass between the interior of the gas preheater and the interior of the media vessel; Including, The method is flowing the gas through a gas preheater to preheat the gas; Passing the preheated gas through the medium container to contact the medium; A method comprising:

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