Conveying device and conveying method

Abstract

To prevent occurrence of a trouble caused by a presence of a narrow area when a to-be-conveyed article is conveyed along a conveyance path in a vertical direction having the narrow area.SOLUTION: A conveyance device can convey a to-be-conveyed article 12 supported by a supporting body 11 in a non-limited area and a limited area narrower than the non-limited area along a vertical direction 13. The conveyance device has a first detection device, a second detection device, and a control device 35. The first detection device detects whether a shake from a regular position of the to-be-conveyed article 12 supported by the supporting body 11 is within or out of the range of the non-limited area. The second detection device detects whether the shake from the regular position of the to-be-conveyed article 12 supported by the supporting body 11 is within or out of the range of the limited area narrower than the non-limited area. The control device 35, based on a detection result of the first detection device and a detection result of the second detection device, controls a conveyance operation of the to-be-conveyed article 12 by the supporting body 11.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a conveying device and a conveying method. [Background technology]

[0002] A known conveying device includes a conveying body that runs along a ceiling rail installed on the ceiling of a building, and a support body that is attached to the conveying body and is movable vertically downward from the conveying body and vertically upward toward the conveying body (Patent Document 1). By supporting the object to be conveyed by the support body, the object is conveyed vertically by the support body and horizontally by the conveying body. A processing device is provided on the floor inside the building to perform a predetermined process on the object to be conveyed. The processing device has a platform on which the object to be conveyed is received from the support body and placed.

[0003] The object supported by the support is transported above the processing device by the movement of the transport body, and then the support moves vertically downward, sending the object into the processing device and placing it on the placement table. The object placed on the placement table is subjected to a predetermined process by the processing device. After processing, the object is moved upward from the processing device by the support and then transported to another location by the transport body. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2021-187563 A, particularly FIG. 1 Summary of the Invention [Problem to be solved by the invention]

[0005] Some known processing devices have a structure above the loading platform on which an operation panel for the processing device is installed. This structure is called a "cover." In such processing devices, the support that supports the transported object passes through the interior of the structure when the unprocessed transported object is lowered onto the loading platform or when the processed transported object is lifted from the loading platform.

[0006] However, the interior of the structure described above is narrower than other areas. Therefore, when the support supporting the transported object passes through the structure, special care is required to prevent problems such as the transported object or the support from coming into contact with or colliding with the structure. The reasons for this need include the possibility that the support and the transported object may be displaced from their specified positions due to shaking during their lifting and lowering operations, that the support's support posture for the transported object may deviate from its normal position, or that the transport body may stop at a position that is different from the normal position when it stops above the processing device.

[0007] Furthermore, not only when a narrow internal structure is provided in the processing device as described above, but also when the transported object is transported in the vertical direction, various cases are conceivable in which a similar situation may occur.

[0008] SUMMARY OF THE INVENTION It is therefore an object of the present invention to prevent problems associated with the presence of narrow areas when transporting an object along a vertical transport path having narrow areas. [Means for solving the problem]

[0009] To achieve this object, the conveying device of the present invention comprises: A conveying device capable of conveying an object supported by a support along a vertical direction between an unrestricted area and a restricted area narrower than the unrestricted area, a first detection device that detects whether a deviation of the transported object supported by the support from a normal position is within a non-restricted area in a direction intersecting the vertical direction or outside the non-restricted area; a second detection device that detects whether a deviation of the transported object supported by the support from a normal position is within a restricted area narrower than the non-restricted area in a direction intersecting the vertical direction or outside the restricted area; a control device that controls a transport operation of the support body to transport the transported object based on a detection result of the first detection device and a detection result of the second detection device; The present invention is characterized by having the following.

[0010] Therefore, according to the conveying device of the present invention, the first detection device can detect whether the deviation of the conveyed object supported by the support from its normal position in a direction intersecting the vertical direction is within or outside the non-restricted region, and the second detection device can detect whether the deviation of the conveyed object supported by the support from its normal position in a direction intersecting the vertical direction is within or outside the restricted region, which is narrower than the non-restricted region. Therefore, according to the conveying device of the present invention, when the conveyed object is supported by the support and conveyed in the vertical direction, even if there are an unrestricted region and a restricted region, conveying control can be performed appropriately corresponding to each region.

[0011] According to the conveying device of the present invention, The control device In the non-restricted region, the transport operation of the transported object by the support is controlled based on the detection result of the first detection device, and In the restricted area, it is preferable that the transport operation of the object by the support body is controlled based on the detection result of the second detection device.

[0012] In this case, the control device can perform a transport operation of the transported object that is appropriately suited to the non-restricted area, and can also perform a transport operation of the transported object that is appropriately suited to the restricted area.

[0013] According to the conveying device of the present invention, a processing device for a transported object, the processing device having an unrestricted area and a restricted area; a carrier that travels horizontally at a position above the processing device while holding the support; and The support preferably transports the object between a position above the processing device and a position in the processing device where the object is placed, by a lifting operation.

[0014] In this case, in the processing device for the transported object, transport control can be performed that is appropriately adapted to each of the non-restricted area and the restricted area.

[0015] According to the transport device of the present invention, a plurality of processing devices may be provided, including a first processing device having a restricted area and a second processing device not having a restricted area.

[0016] In this case, the first processing device having a restricted area can perform control based on the detection results from both the first and second detection devices, whereas the second processing device not having a restricted area can perform control based only on the detection result from the first detection device, thereby achieving reliable results with simple control.

[0017] According to the transport device of the present invention, it is preferable that at least one of the control device, the transport body, and the support has map information relating to the restricted area in each processing device.

[0018] In this case, transport control can be performed that appropriately corresponds to each of the non-restricted areas and the restricted areas while recognizing the locations of the restricted areas and other non-restricted areas in each processing device, thereby enabling more reliable transport control.

[0019] According to the transport device of the present invention, it is preferable that the map information includes the installation position of at least one of the restricted area and the unrestricted area along the vertical movement path of the support.

[0020] In this case, highly accurate control can be performed by reliably recognizing the positions of the restricted area and non-restricted area along the vertical direction.

[0021] The transport device of the present invention preferably includes a position detection device that detects the position of the support along the movement path of the support.

[0022] In this case, the conveying operation in the non-restricted area and the restricted area can be controlled while detecting the position of the support that supports the conveyed object, thereby enabling reliable control.

[0023] According to the transport device of the present invention, it is preferable that the control device controls the moving speed of the support along the moving path of the support.

[0024] According to the present invention, it is possible to control the conveying operation in various ways based on the detection results of the first detection device and the second detection device, but in particular, by controlling the movement speed of the support along its movement path, for example, conveying at a low speed only in the restricted area and not performing such control in the non-restricted area, efficient conveying can be achieved.

[0025] In particular, according to the present invention, it is preferable that when the second detection device detects that the deviation of the transported object supported by the support from its normal position is outside the restricted area, the control device slows down the movement speed of the support compared to when the deviation of the transported object supported by the support from its normal position is within the restricted area.

[0026] In this case, even if the deviation of the transported object supported by the support from its normal position during actual transport is outside the restricted area, if this deviation is due to the vibration of the support or the transported object, the deviation will become smaller accordingly once the vibration has subsided. Therefore, by moving the support at a low speed without stopping, it is possible to pass through the restricted area without major trouble, and transport can be carried out without reducing transport efficiency.

[0027] According to the conveying device of the present invention, the first detection device detects a first physical quantity that changes when the deflection of the transported object from the normal position is within a non-restricted region and when the deflection is outside the non-restricted region; The second detection device preferably detects a second physical quantity that changes depending on whether the deflection of the transported object from the normal position is within the restricted region or outside the restricted region.

[0028] That is, as the first and second detectors, detectors that can perform detection based on any physical principle can be appropriately adopted.

[0029] According to the conveying device of the present invention, a light irradiation device provided on the conveying body for irradiating a light beam toward the support; a reflecting member provided on the support and / or the transported object to reflect the light beam from the light beam irradiation device; a light amount detecting device provided on the conveying body and configured to detect the amount of light reflected from the reflecting member; the reflecting member has a first reflector and a second reflector having different reflectivities, the first reflector is formed to a size corresponding to an area where the deflection of the object from the normal position is not restricted, The second reflector is formed to have a size corresponding to a limit area for the deflection of the transported object from the normal position, the first detection device detects whether a deviation of the transported object from a normal position is within a non-restricted area or outside the non-restricted area based on a first difference in the light amount of the reflected light detected by the light amount detection device; It is preferable that the second detection device detects whether the deviation of the transported object from its normal position is within or outside the restricted area based on a second difference in the light intensity of the reflected light detected by the light intensity detection device.

[0030] This allows the first and second detection devices to be specifically configured.

[0031] According to the conveying device of the present invention, The first reflector is larger in size than the second reflector, The second reflector is preferably disposed within the area in which the first reflector is disposed.

[0032] This allows the reflecting member to be configured compactly.

[0033] The conveying method of the present invention includes: When a transported object supported by a support is transported in a horizontal direction at a position above a processing device by a transport body holding the support, and the support is lowered from the transport body or raised toward the transport body to raise and lower the transported object between the transport body and the processing device, determining whether or not there is a restricted area narrower than the non-restricted area along the vertical direction in the predetermined processing device and the position of the restricted area by a control operation using the map information in the control device; a first detection device detects whether a deviation from a normal position of the transported object being supported by the support and lowered is within or outside the range of the non-restricted area in a direction intersecting the vertical direction; a second detection device detects whether a deviation from a normal position of the transported object being supported by the support and lowered is within or outside the range of the restricted area in a direction intersecting the vertical direction; The control device controls the lifting and lowering operation of the support in the non-restricted area based on the detection result of the first detection device, and controls the lifting and lowering operation of the support in the restricted area based on the detection result of the second detection device. It is characterized by:

[0034] Therefore, according to the conveying method of the present invention, the first detection device can detect whether the deviation of the conveyed object supported by the support from its normal position in a direction intersecting the vertical direction is within or outside the range of the non-restricted area, and the second detection device can detect whether the deviation of the conveyed object supported by the support from its normal position in a direction intersecting the vertical direction is within or outside the range of the restricted area that is narrower than the non-restricted area. Therefore, according to the conveying method of the present invention, when the conveyed object is supported by the support and conveyed in the vertical direction, even if there are an unrestricted area and a restricted area, conveying control can be performed appropriately corresponding to each area. [Effects of the Invention]

[0035] According to the present invention, when an object to be transported is supported by a support body and transported in a vertical direction, even if there are non-restricted areas and restricted areas that are narrower than the non-restricted areas, transport control can be performed to appropriately respond to each area and prevent the occurrence of problems. [Brief explanation of the drawings]

[0036] [Figure 1] 1 is a diagram showing a transport device according to an embodiment of the present invention; [Figure 2] FIG. 10 is a diagram conceptually illustrating a non-restricted area and a restricted area. [Figure 3] FIG. 10 is a diagram illustrating an example of a reflecting member. [Figure 4] FIG. 2 is a diagram showing the configurations of a first detection device and a second detection device. [Figure 5] FIG. 2 is a diagram showing a first detection device. [Figure 6] FIG. 2 shows a second detection device. [Figure 7] FIG. 10 is a diagram illustrating an example of a transport device equipped with a plurality of processing devices. [Figure 8] FIG. 2 is a diagram illustrating map information and a location detection device. DETAILED DESCRIPTION OF THE INVENTION

[0037] As shown in Fig. 1, which illustrates an embodiment of the conveying device of the present invention, an object 12 supported by a support 11 is conveyed in a vertical direction 13. Fig. 1 also shows a processing device 14 for performing a predetermined process on the object 12. The processing device 14 is installed on the floor 15 of a building.

[0038] Above the floor surface 15, a ceiling rail 16 is laid in a horizontal direction perpendicular to the plane of the paper in FIG. 1 . A carriage-type transport body 17 is provided, which travels while being guided by the ceiling rail 16. The support body 11 is provided on the transport body 17 and is capable of moving vertically downward from the transport body 17 toward the processing device 14, and is also capable of moving vertically upward from the processing device 14 toward the transport body 17. The transport body 17 is provided with a drive device 18 for moving the support body 11 in the vertical direction. The support body 11 is provided with a chuck 19 for releasably gripping the transported object 12. In the example shown, the chuck 19 is configured to suspend and support the transported object 12 while gripping it.

[0039] The processing device 14 has a mounting table 21 on which the transported object 12 to be processed is placed. The transported object 12 is supported on the support 11 by a chuck 19 and transported together with the support 11 by the transport body 17 in the horizontal direction, and the support 11 is moved downward in the vertical direction 13 by the drive device 18, whereby the transported object 12 is placed on the mounting table 21 of the processing device 14. The drive device 18 also moves the support 11 upward in the vertical direction 13, whereby the transported object 12 is transported from the mounting table 21 to a position above the processing device 14.

[0040] Once the transported object 12 is placed on the mounting table 21 of the processing device 14, the support 11 releases the chuck 19 from gripping the transported object 12, and is moved by the drive device 18 to a position above the transported object 12. As a result, the transported object 12, while placed on the mounting table 21, is subjected to a predetermined processing by the processing device 14 without being obstructed by the support 11.

[0041] After the predetermined processing is performed on the transported object 12 by the processing device 14, the support 11 is moved downward again in the vertical direction, and the transported object 12 placed on the mounting table 21 is again gripped and supported by the chuck 19. Thereafter, the support 11 is raised, and the transported object 12 is separated upward from the processing device 14, and the transported object 12 is moved upward by the transporting body 1. 7 The vehicle travels along the ceiling rail 16 and is transported to a predetermined location.

[0042] It is possible that the transported object 12 on the mounting table 21 is processed while being held by the chuck.

[0043] The processing device 14 has a cover 22 above the mounting table 21. A panel 23 is provided on the cover 22. The panel 23 is provided with buttons for an operator to operate, a display for displaying information to the operator, and the like.

[0044] As described above, in the processing device 14, a cover 22 is provided on the mounting table 21, and therefore the support body 11 supporting the transported object 12 passes through the inside of the cover 22 when the transported object 12 is lowered onto the mounting table 21 and when the transported object 12 is lifted from the mounting table 21.

[0045] However, the cover 22 is not sufficiently large compared to the support 11 including the chuck 19 and the transported object 12. Rather, the cover 22 is formed with a relatively compact shape and dimensions as a component that constitutes part of the processing device 14. For this reason, when the support 11 and the transported object 12 gripped by the chuck 19 move vertically inside the cover 22, they are forced to move along a narrower passage than when moving in other places.

[0046] In the present invention, the narrow space inside the cover 22 through which the support 11 and the transported object 12 pass is referred to as the restricted area. A space other than the restricted area that is not so narrow is referred to as the non-restricted area.

[0047] 2 is a plan view conceptually showing the unrestricted area 25 and the restricted area 26. From FIG. 2, it can be seen that the restricted area 26 for the support 11, the chuck 19, and the transferred object 12 is narrow, while the unrestricted area 25 is wider than the restricted area 26.

[0048] To improve transport efficiency, it is necessary to raise and lower the support 11 as quickly as possible. However, raising and lowering at high speed can cause vibration. This vibration can cause the support 11, including the chuck 19, and the transported object 12 to deviate from their normal positions. In FIG. 2, the solid lines indicate a state in which the support 11, chuck 19, and transported object 12 are within a restricted area 26. FIG. 2 also shows a state in which the support 11, chuck 19, and transported object 12 extend beyond the restricted area 26 to a position 27; a state in which the support 11, chuck 19, and transported object 12 extend beyond the restricted area 26 to a position 28 within a non-restricted area 25; and a state in which the support 11, chuck 19, and transported object 12 extend beyond the non-restricted area 25 to a position 29.

[0049] If the support 11 including the chuck 19 is deflected from its normal position, the load 12 will also deflect accordingly. Conversely, if the load 12 is deflected from its normal position, the support 11 and chuck 19 will also deflect accordingly. In other words, the support 11, chuck 19, and load 12 will deflect together. However, in the present invention, the load 12 is firmly supported by the chuck 19 of the support 11, and therefore no positional deviation will occur between the support 11 and chuck 19 and the load 12.

[0050] 1, directions in which support 11 and transported load 12 may deviate from their normal positions are shown by arrow 30, arrowhead 31, and notch 32. However, deflection of support 11 and transported load 12 from their normal positions is not limited to these directions, and may occur in any direction within a horizontal plane intersecting the vertical direction.

[0051] Although a detailed example will be described later, the conveying device shown in Fig. 1 includes a first detection device and a second detection device. The first detection device detects whether the deflection of the conveyed object 12 supported by the support 11, i.e., the support 11, the chuck 19, and the conveyed object 12, from the normal position is within a non-restricted area 25 in a direction intersecting the vertical direction, as shown in Fig. 2, or whether it is outside the non-restricted area 25. In contrast, the second detection device detects whether the deflection of the conveyed object 12 supported by the support 11, i.e., the support 11, the chuck 19, and the conveyed object 12, from the normal position is within a restricted area 26 in a direction intersecting the vertical direction, or whether it is outside the restricted area 26.

[0052] In the present invention, such first and second detection devices can be arbitrarily selected and used by a person skilled in the art from among many commonly known detection devices, as long as they have the above-mentioned detection function. In other words, the first detection device can perform its detection function as long as it detects a first physical quantity that changes when the deviation of the transported object 12 or the like from its normal position is within the unrestricted region 25 and when it is outside the unrestricted region 25. The second detection device can perform its detection function as long as it detects a second physical quantity that changes when the deviation of the transported object 12 or the like from its normal position is within the restricted region 26 and when it is outside the restricted region 26.

[0053] The conveying device shown in Fig. 1 further includes a control device 35. The control device 35 controls the conveying operation of the support 11 for the object 12 to be conveyed, based on the detection results of the first detection device and the second detection device. Specific examples of the control of the conveying operation include controlling the drive device 18 by the control device 35 to increase or decrease the vertical movement speed of the support 11, and stopping and restarting the movement of the support 11. However, other forms of control of the conveying operation are also possible.

[0054] By controlling the transport operation of the support 11 for the transported object 12 in this manner, even if the unrestricted area 25 and the restricted area 26 exist when the support 11 supports the transported object 12 and transports it in the vertical direction, transport control can be performed appropriately for each of the areas 25, 26. For example, within the unrestricted area 25, efficient transport can be achieved by moving the support 11 at high speed. In the restricted area 26, the moving speed of the support 11 can be reduced compared to the unrestricted area 25, allowing the transported object 12 to be transported carefully.

[0055] For example, when the support 11, chuck 19, and load 12 are within the restricted area 26 shown in Fig. 2, the load can be transported without any problems despite the existence of the restricted area 26. In this case, the load 12 can be transported at high speed over the entire range of the vertical transport by the support 11 without any problems.

[0056] 2, depending on the degree of protrusion and other conditions, it may be possible to pass through the restricted area 26 simply by slowing down the movement of the support 11, and therefore such a case can be dealt with effectively. For example, if the vibration occurring in the support 11, chuck 19, and transported object 12 is due to the vibration of the support 11, chuck 19, and transported object 12, the vibration will often gradually subside depending on the type and degree of the vibration, so it is efficient to anticipate this and reduce the moving speed of the support 11 and observe the situation.

[0057] Furthermore, for example, if the support 11, chuck 19, or transported object 12 remains in a state of protruding into position 29 outside the non-restricted area 25 shown in Fig. 2 and remains in that state, the control device 35 can issue a warning to the operator or stop the support. The control device 35 can also perform other appropriate control based on the detection results of the first detection device and the second detection device.

[0058] There are various possible modes for controlling the movement of the support 11 and the transported object 12 using the first and second detection devices. In particular, in the non-restricted area 25, it is preferable to have the control device 35 control the transport operation of the transported object 12 by the support 11 based on the detection result of the first detection device, i.e., the detection result of whether the deviation of the transported object 12 supported by the support 11 from the normal position is within the non-restricted area 25 or outside the non-restricted area 25, in order to achieve efficient control. Also, in the restricted area 26, it is preferable to have the control device 35 control the transport operation of the transported object 12 by the support 11 based on the detection result of the second detection device, i.e., the detection result of whether the deviation of the transported object 12 supported by the support 11 from the normal position is within the non-restricted area 25 or outside the non-restricted area 25. or regulation limited area 2 6 In order to achieve efficient control, it is preferable that the control device 35 controls the transport operation of the transported object 12 by the support 11 based on the detection result of whether the load is outside the range of the load 12. This is because control can be performed in response to the detection result.

[0059] As described above, any device can be used as the first and second detectors, but the following describes new first and second detectors based on the present invention, which utilize optical detection techniques.

[0060] 3, a first reflective seal 36 and a second reflective seal 37 are provided on the upper surface of the support 11, for example. The first reflective seal 36 is formed to a size corresponding to the allowable range of vibration of the support 11, chuck 19, and transported object 12 in the non-restricted area 25. The second reflective seal 37 is formed to a size corresponding to the allowable range of vibration of the support 11, chuck 19, and transported object 12 in the restricted area 26. As shown in FIG. 2, the restricted area 26 is narrower than the non-restricted area 25, and therefore the second reflective seal 37, which is formed to correspond to the allowable range of vibration of the support 11, chuck 19, and transported object 12 in the restricted area 26, is formed to a size smaller than the first reflective seal 36, which is formed to correspond to the allowable range of vibration of the support 11, chuck 19, and transported object 12 in the non-restricted area 25.

[0061] 3, the second reflective sticker 37 is provided inside the area where the first reflective sticker 36 is provided. For example, if the first and second reflective stickers 36, 37 are designed to be attached to an object, the first reflective sticker 36 can be attached to the support 11, and the second reflective sticker 37 can be further attached to the surface of the first reflective sticker 36.

[0062] It is preferable that the first reflective sticker 36 and the second reflective sticker 37 have different light reflectivities from each other and from the surface of the support 11. Specific configuration examples of the first and second detection devices using such first reflective sticker 36 and second reflective sticker 37 are as follows.

[0063] As shown in Fig. 1, the conveyor 17 is provided with a light projecting and receiving device 38. The light projecting and receiving device 38 can project laser light 39 vertically downward toward the portions of the support body 11 where the first and second reflective stickers 36, 37 are affixed, and can detect the amount of laser light reflected from below the light projecting and receiving device 38. Therefore, based on the magnitude of the deflection of the support body 11, the amount of laser light reflected from the support body 11 when the laser light 39 irradiates the second reflective sticker 37, when the laser light 39 irradiates the first reflective sticker 36, and when the laser light 39 irradiates the support body 11 as shown in Fig. 3 is detected. 1 The amount of reflected light changes depending on whether the laser light 39 is irradiating the surface of the second reflective seal 37, the first reflective seal 36, or the support 11. This makes it possible to detect whether the laser light 39 is irradiating the second reflective seal 37, the first reflective seal 36, or the support 11. This makes it possible to know the magnitude of deviation from the correct position in the horizontal direction for the support 11, the chuck 19, and the transported object 12.

[0064] FIG. 4 shows the detailed structure of the light projecting and receiving device 38. The light projecting and receiving device 38 includes a light source 40 as a light beam irradiation device for projecting laser light 39, and a light intensity sensor 42 as a light intensity detection device for receiving reflected light 41 from the target, i.e., the second reflective seal 37, the first reflective seal 36, and the support body 11, and detecting the amount of light. The light source 40 projects the laser light 39 under the control of the control device 35. For accurate detection, it is preferable that the laser light 39 be projected in a spot shape as shown in FIG. 3. The light intensity sensor 42 sends a signal corresponding to the detected light intensity to the control device 35. The arrow 43 in FIG. 4 indicates horizontal vibration that may occur in the support body 11, the chuck 19, and the transported object 12.

[0065] FIG. 5 shows a first detection device 45. In FIG. 5, laser light 39 from a light source 40 is irradiated onto a first reflective seal 36 in accordance with the magnitude of vibration occurring in the support 11, the chuck 19, and the transported object 12, and reflected light 41 from the first reflective seal 36 is incident on a light intensity sensor 42, which detects the amount of light. Although not shown, when a large vibration occurs, the laser light 39 from the light source 40 is irradiated onto the surface of the support 11, which has a reflectivity different from that of the first reflective seal 36 and the second reflective seal 37, and the reflected light from the surface of the support 11 is incident on the light intensity sensor 42, which detects the amount of light. The amount of light 41 reflected from the first reflective seal 36 and the reflected light from the surface of the support 11 differs from each other. This is because there is a difference in reflectivity between them. When the light quantity 41 reflected from the first reflective sticker 36 is incident on the light quantity sensor 42, the control device 35 determines that the vibrations occurring in the support body 11, the chuck 19, and the transported object 12 are within the non-restricted area 25 shown in Fig. 2. When the light quantity 41 reflected from the surface of the support body 11 is incident on the light quantity sensor 42, the control device 35 determines that the vibrations occurring in the support body 11, the chuck 19, and the transported object 12 are outside the non-restricted area 25 shown in Fig. 2. The first detection device 45 is systematically constructed by such a detection system.

[0066] 6 shows a second detection device 46. As with the first detection device 45, laser light 39 from a light source 40 is irradiated onto a second reflective seal 37 in accordance with the magnitude of vibration occurring in the support 11, the chuck 19, or the transported object 12, and reflected light 41 from the second reflective seal 37 is incident on a light intensity sensor 42, which detects the amount of light. When a large vibration occurs, the laser light 39 from the light source 40 is irradiated onto a first reflective seal 36 or the support 11, which have a reflectivity different from that of the second reflective seal 37, and reflected light from the first reflective seal 36 or the support 11 is incident on the light intensity sensor 42, which detects the amount of light. The amount of light reflected from the second reflective seal 37 is different from the amount of light reflected from the first reflective seal 36 or the support 11. When the light intensity sensor 42 detects the amount of light corresponding to the reflected light 41 from the second reflective seal 37, the control device 35 determines that the vibrations occurring in the support body 11, chuck 19, and transported object 12 are within the restricted area 26 shown in Fig. 2. When the light intensity sensor 42 detects the amount of light corresponding to the reflected light from the first reflective seal 36 and the support body 11, the control device 35 determines that the vibrations occurring in the support body 11, chuck 19, and transported object 12 are outside the restricted area 26 shown in Fig. 2. A second detection device 46 is systematically constructed using such a detection system.

[0067] In the above, an example has been described in which the first reflective seal 36 and the second reflective seal 37 are provided on the support body 11. However, the first reflective seal 36 and the second reflective seal 37 can also be provided in other locations, for example, on the chuck 19 or the transported object 12. Alternatively, a plurality of first reflective seals 36 and a plurality of second reflective seals 37 can be provided at a plurality of arbitrary positions on the support body 11, the chuck 19, and the transported object 12. In other words, the first reflective seal 36 and the second reflective seal 37 can be provided on the support body 11 including the chuck 19 and / or the transported object 12.

[0068] In Fig. 3, rectangular shapes are shown as the first reflective sticker 36 and the second reflective sticker 37. This corresponds to the planar shapes of the restricted area 26 and the non-restricted area 25 shown in Fig. 2, and is particularly suited to the case where the restricted area 26 is formed on the cover 22 of the processing device 14 as shown in Fig. 1. On the other hand, if the planar shapes of the restricted area 26 and the non-restricted area 25 are shapes other than rectangular, it is preferable that the shapes of the first reflective sticker 36 and the second reflective sticker 37 also be made to correspond to that. Furthermore, in some cases, the restricted area 26 may be formed by only two specific sides that can constitute a rectangle.

[0069] The above describes particularly preferred examples of the first detection device 45 and the second detection device 46. According to the above examples, the first detection device 45 and the second detection device 46 can be constructed with a simple configuration that uses the first reflective sticker 36, the second reflective sticker 37 that can be attached over the first reflective sticker 36, and the light-emitting / receiving device 38.

[0070] However, the first detection device 45 and the second detection device 46 may have other configurations. For example, instead of a laminated structure, a frame-shaped first reflective sticker 36 may be provided around the second reflective sticker 37, or the first reflective sticker 36 and the second reflective sticker 37 may be arranged side by side. Other configurations may also be employed. In the illustrated example, the required detection is performed by detecting the amount of reflected light using the light quantity sensor 42 of the light projecting / receiving device 38, but other methods may also be employed. For example, image processing technology or other optical methods may be used. Alternatively, detection may be performed using a method other than optical methods, such as an electromagnetic displacement sensor. In other words, a person skilled in the art may use any suitable detection means already known in the art to implement the present invention, as described above.

[0071] As shown in FIG. 7, in the conveying device of the present invention, it is preferable that multiple processing devices 14, 14, ... are installed on floor surface 15, and conveyance body 17 is configured to travel along ceiling rail 16 across the multiple processing devices 14, 14, .... This allows multiple processing operations to be performed on a single conveyed object 12, and also allows multiple conveyed objects 12 to be processed simultaneously. In the example shown in FIG. 7, there are processing devices 14 with covers 22 and processing devices 48 without covers. In the processing devices 14 with covers 22, it is preferable to perform the above-mentioned control using control device 35. In contrast, in the case of processing devices 48 without covers, there is an unrestricted area 25 shown in FIG. 2 but no restricted area 26, so it is sufficient to perform control based only on the detection results of first detection device 45, and control based on the detection results of second detection device 46 is not necessary.

[0072] As shown in FIG. 8, the control device 35 preferably includes a storage medium 50 storing map information related to each processing device 14 and the restricted area 26 of each processing device 14. Alternatively, the storage medium 50 storing the map information may be provided on the support 11 shown in FIG. 8 or on the carrier 17 (not shown in FIG. 8). That is, the storage medium 50 storing the map information is preferably provided on at least one of the control device 35, the carrier 17, and the support 11. The storage medium 50 storing the map information may also be provided in a location other than the control device 35, the carrier 17, and the support 11. With this configuration, the control device 35 can recognize the positions of the processing device 14 having the cover 22, i.e., the restricted area 26, and the processing device 48 not having the cover 22, i.e., the restricted area 26, shown in FIG. 7, and perform appropriate control according to the position information.

[0073] The map information stored in the storage medium 50 can include the installation position of the cover 22, i.e., the restricted area 26, along the movement path in the vertical direction 13 shown in Fig. 1. With this configuration, the control device 35 can perform highly accurate control by reliably recognizing the positions of the restricted area 26 and the unrestricted area 25 along the vertical direction 13.

[0074] 8 and 1, the conveying device of the present invention preferably includes a position detection device 51 that detects the position of the support 11 along the movement path of the support 11 in the vertical direction 13. With this configuration, the conveying operation in the unrestricted area 25 and the restricted area 26 can be controlled by the control device 35 while detecting the position of the support 11 supporting the conveyed object 12, thereby enabling reliable control. For example, if the drive device 18 for moving the support 11 in the vertical direction is a motor or the like, the position detection device 51 can be configured by a rotary encoder linked to this motor.

[0075] When the position detection device 51 is provided, the control device 35 can determine whether the support 11 and the transported object 12 are at the installation position of the cover 22 or a nearby position along the vertical direction 13, that is, whether they are in the restricted area 26 or nearby, thereby enabling more precise control to be performed that is adapted to these positions and areas.

[0076] For example, when the support 11 and the load 12 are in or near the restricted area 26, if the second detector 46 detects that they have gone outside the restricted area 26, the system can be controlled to take appropriate, careful action, such as stopping the lifting or slowing down the lifting speed to monitor the situation. 6 Or when it is not present in the vicinity thereof, i.e., when it is present in the non-restricted area 25, even if it protrudes from the restricted area 26, the transported object 12 can be raised and lowered without any problem as long as it is contained within the non-restricted area 25.

[0077] If the position detector 51 detects that the restricted area 26 has been passed, the lifting operation can be continued without any problems, or the speed can be increased.

[0078] The transport device and the transport method of the present invention enable rapid and accurate control in the event of an earthquake. As is well known, seismic waves include P waves, which are longitudinal waves, and S waves, which are transverse waves. P waves have smaller amplitudes than S waves but travel faster. S waves have larger amplitudes but travel slower than P waves. If P waves are observed during an earthquake, the movement of the support 11 is generally stopped. On the other hand, if the first detection device 45 and the second detection device 46 detect that the shaking of the support 11 and the transported object 12 when receiving P waves during movement is not very large, it is possible to take measures such as safely lowering the transported object 12 to the platform 21 or safely raising it to the transport body 17 before the S waves arrive.

[0079] The conveying device of the present invention and the above-described conveying method can also be used for inspecting processing equipment 14, 48. For example, if the detection result of the second detection device 46 is "inside the restricted area 26," but the conveyed object 12 or the support 11 including the chuck 19 collides with the cover 22 of the processing equipment 14, a record of the collision can be stored in a memory device in the control device 35, for example, to indicate that the cover 22 is installed imperfectly. [Explanation of symbols]

[0080] 11 Support 12 Conveyed object 17 Transporter 19. Chuck 21 Mounting table 22 Cover 25 Unrestricted Area 26 Restricted Area 35 Control device 36 First Reflective Sticker 37 Second Reflective Sticker 38 Light emitter / receiver device 40 light source 42 Light sensor 45 First detection device 46 Second detection device 50 Storage medium 51 Position detection device

Claims

1. A conveying device capable of conveying an object supported by a support along a vertical direction between an unrestricted area and a restricted area narrower than the unrestricted area, a first detection device that detects whether a deviation of the transported object supported by the support from a normal position is within a non-restricted area in a direction intersecting the vertical direction or outside the non-restricted area; a second detection device that detects whether a deviation of the transported object supported by the support from a normal position is within a restricted area narrower than the non-restricted area in a direction intersecting the vertical direction or outside the restricted area; a control device that controls a transport operation of the support body to transport the transported object based on a detection result of the first detection device and a detection result of the second detection device; a light irradiation device provided on the conveying body for irradiating a light beam toward the support; a reflecting member provided on the support and / or the transported object to reflect the light beam from the light beam irradiation device; a light amount detecting device provided on the conveying body and configured to detect the amount of light reflected from the reflecting member; the reflecting member has a first reflector and a second reflector, the first reflector is formed to a size corresponding to an area where the deflection of the object to be conveyed from the normal position is not restricted, the second reflector is formed to a size corresponding to a limit area for deflection of the transported object from a normal position, the first detection device detects a first physical quantity that changes when a deflection of the transported object from a normal position is within a non-restricted region and when the deflection is outside the non-restricted region; the first detection device detects whether a deviation of the transported object from a normal position is within a non-restricted area or outside the non-restricted area based on a first difference in the light amount of the reflected light detected by the light amount detection device; the second detection device detects a second physical quantity that changes when the deflection of the transported object from the normal position is within a restricted region and when the deflection is outside the restricted region; A conveying device characterized in that the second detection device detects whether the deviation of the conveyed object from its normal position is within a restricted area or outside the restricted area based on a second difference in the light intensity of the reflected light detected by the light intensity detection device.

2. 2. The transport device according to claim 1, wherein the first reflector and the second reflector have different reflectivities.

3. The first reflector is larger in size than the second reflector, 3. The transport device according to claim 1, wherein the second reflector is disposed within the area where the first reflector is disposed.

4. a processing device for a transported object, the processing device having an unrestricted area and a restricted area; a carrier that travels horizontally at a position above the processing device while holding the support; and 2. The transport device according to claim 1, wherein the support member is adapted to transport the object between a position above the processing device and a position in the processing device where the object is placed by a lifting motion.

5. At least one of the control device, the transport body, and the support has map information relating to at least one of the restricted area and the non-restricted area in each processing device; 5. The transport device according to claim 4, wherein the map information includes the installation position of at least one of a restricted area and an unrestricted area along the vertical movement path of the support.

6. the control device controls the speed of movement of the support along the path of movement of the support; The conveying device described in claim 1, characterized in that the control device slows down the movement speed of the support when the second detection device detects that the deviation of the transported object supported by the support from its normal position is outside the restricted area, compared to when the deviation of the transported object supported by the support from its normal position is within the restricted area.

7. 2. The conveying device according to claim 1, wherein when it is detected that the support has passed through a restricted area in the vertical direction, the control device continues or increases the speed of the movement of the support in the vertical direction.

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