Substrate transport device

Abstract

To cope with a difference in specifications between a pre-process device and a post-process device, and improve the convenience of setting of transport conditions.SOLUTION: A substrate carrier can exchange signals with a pre-process device or a post-process device, and transports a substrate according to a transport sequence. The substrate carrier includes a setting portion that sets transport conditions for transporting the substrate on software, and a changing portion that changes the transport sequence on the basis of the transport conditions set by the setting portion.SELECTED DRAWING: Figure 7

Description

[Technical Field]

[0001] The present specification discloses a substrate transport apparatus. [Background technology]

[0002] Conventionally, a proposed substrate transport device of this type includes a sub-controller that receives control signals from a main controller that directly controls the substrate-related processing device, an instruction input unit that inputs various instructions to the sub-controller, and an SMEMA (Surface Mount Equipment Manufacturers Association) interface to which an external device is connected (see, for example, Patent Document 1). The instruction input unit includes three short-circuit connectors. A user connects or disconnects the short-circuit connector to a first connector connected to the sub-controller to input to the sub-controller either a follow instruction to control the substrate transport device based on the control signal received from the main controller or an independent instruction to independently control the substrate transport device. The user also connects or disconnects the short-circuit connector to a second connector connected to the sub-controller to input the substrate transport direction to the sub-controller. The user also connects or disconnects the short-circuit connector to a third connector connected to the sub-controller to input to the sub-controller either an SMEMA application instruction to apply SMEMA to the sub-controller or an SMEMA non-use instruction not to apply SMEMA to the sub-controller. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2013-201425 Summary of the Invention [Problem to be solved by the invention]

[0004] As described above, although the above-described substrate-related work system allows the user to set the substrate transport conditions by attaching and detaching the short connector, there are cases where the settings cannot be made due to loss of the short connector, etc., which makes it less convenient.

[0005] The main object of the present disclosure is to accommodate differences in specifications between pre-processing devices and post-processing devices and to improve convenience in setting transport conditions. [Means for solving the problem]

[0006] The present disclosure has adopted the following means to achieve the above-mentioned main object.

[0007] The substrate transport device of the present disclosure is A substrate transport device capable of exchanging signals with a front-end process device or a back-end process device and transporting a substrate according to a transport sequence, a setting unit that sets transport conditions for transporting the substrate on software; a change unit that changes the transport sequence based on the transport conditions set by the setting unit; The gist of the project is to provide the following:

[0008] In the substrate transport device disclosed herein, transport conditions for transporting substrates are set in software, and the transport sequence is changed based on the set transport conditions. This makes it possible to accommodate differences in the specifications of pre- and post-processing equipment. Furthermore, operators can set transport conditions according to the specifications of pre- and post-processing equipment without the need for short connectors, etc., thereby improving convenience. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is a schematic configuration diagram of a substrate-related operation system including a plurality of modules. [Figure 2] 3 is a schematic configuration diagram of a substrate transport device and a clamp device provided in each module. FIG. [Figure 3] FIG. 2 is an explanatory diagram showing an electrical connection relationship of the substrate-related operating system. [Figure 4] FIG. 2 is an explanatory diagram showing a communication interface between two adjacent modules. [Figure 5]10 is a flowchart illustrating an example of a transport condition setting process. [Figure 6] FIG. 2 is an explanatory diagram illustrating an example of monitoring target data. [Figure 7] 10 is a flowchart illustrating an example of a substrate loading process. [Figure 8] 10 is a flowchart illustrating an example of a substrate unloading process. DETAILED DESCRIPTION OF THE INVENTION

[0010] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present disclosure will be described with reference to the drawings.

[0011] Fig. 1 is a schematic diagram of a substrate-related operating system including multiple modules. Fig. 2 is a schematic diagram of a substrate transport device and a clamp device provided in each module. Fig. 3 is an explanatory diagram showing the electrical connection relationship of the substrate-related operating system. In Fig. 1, the left-right direction indicates the X-axis direction, and the front-back direction indicates the Y-axis direction. In Fig. 2, the left-right direction indicates the X-axis direction, and the up-down direction indicates the Z-axis direction.

[0012] As shown in FIGS. 1 to 3, the substrate-related processing system 1 includes a plurality of processing devices 10 that perform predetermined operations on a substrate S, and a management device 50 that manages the entire system. Each processing device 10 includes a processing head 11, an operation panel 12, a substrate transport mechanism 20 that transports the substrate S, a clamping mechanism 30 that clamps the substrate, and a control device 40. Examples of the processing devices 10 include a printing device that prints solder on a substrate, a component mounting device that mounts components on a substrate, and an adhesive dispensing device that applies adhesive to a substrate. The plurality of processing devices 10 are arranged so that their respective substrate transport mechanisms 20 are aligned in the left-right direction (X-axis direction) to form a production line.

[0013] The operation panel 12 is a touch panel display device that displays various information such as status information and setting information of the operating device 10 and allows the operator to perform various input operations.

[0014] Each substrate transport mechanism 20 is a belt conveyor mechanism that receives the substrate S delivered from the substrate transport mechanism 20 of the working device 10 (hereinafter also referred to as the "pre-process device") located upstream and transports it to the working position of the corresponding working device. When the substrate S is transported to the working position by the substrate transport mechanism 20, the clamping mechanism 30 clamps the substrate S. Furthermore, when the work by the corresponding working device is completed, the substrate transport mechanism 20 delivers the substrate S to the substrate transport mechanism 20 of the working device (hereinafter also referred to as the "post-process device") located downstream.

[0015] As shown in FIG. 2, each substrate transport mechanism 20 includes a pair of front and rear conveyor belts 21 and a transport motor 24 that drives the conveyor belts 21 in a circular motion. The conveyor belts 21 are respectively suspended over a pair of left and right rollers 23 supported on opposing surfaces of a pair of front and rear side frames 22. The rollers 23 are driven to rotate by the transport motor 24. The substrate transport mechanism 20 transports the substrate S on the conveyor belts 21 by the conveyor belts 21 being driven to rotate by the rotation of the rollers 23. The transport motor 24 is provided with an encoder 25 for detecting the transport position of the substrate S. Note that one of the pair of side frames 22 is configured to be movable toward and away from the other. As a result, the substrate transport mechanism 20 can transport substrates S of different sizes by adjusting the spacing between the pair of conveyor belts 21 to match the size of the substrate S.

[0016] As shown in FIGS. 1 and 2, a substrate detection sensor 28 for detecting the passage of a substrate S is installed at the entrance of the substrate transport path of each substrate transport mechanism 20. The substrate detection sensor 28 has a light-emitting unit 28a and a light-receiving unit 28b arranged at a predetermined interval in a direction perpendicular to the substrate transport direction. When there is no substrate S between the light-emitting unit 28a and the light-receiving unit 28b, the light-receiving unit 28b receives light from the light-emitting unit 28a. However, when there is a substrate S between the light-emitting unit 28a and the light-receiving unit 28b, the light from the light-emitting unit 28a is blocked by the substrate S and cannot be received. Therefore, the substrate detection sensor 28 can detect the passage of the substrate S by detecting whether the light-receiving unit 28b receives light from the light-emitting unit 28a.

[0017] Each clamping mechanism 30 includes a substrate pressure plate 31, a clamper 32, and a lift plate 33. The substrate pressure plate 31 is fixed to the upper ends of a pair of front and rear side frames 22 so as to extend horizontally and in the left-right direction (X-axis direction) above the conveyor belt 21. The clamper 32 clamps the substrate S by pushing up the backside of the substrate S on the conveyor belt 21 and pressing it against the substrate pressure plate 31. The clamper 32 is attached to a lift plate 33 that is raised and lowered by a lift motor 34, and rises and falls together with the lift plate 33 as the lift plate 33 rises and falls. The lift motor 34 is equipped with an encoder 35 for detecting the lift position of the clamper 32. In addition, multiple backup pins (not shown) are arranged on the upper surface of the lift plate 33. When the lift plate 33 rises, the substrate S is clamped by the clamper 32 and supported by the backup pins.

[0018] Each control device 40 is configured as a microprocessor centered around a CPU 41, and in addition to the CPU 41, is equipped with a ROM 42, a RAM 43, a non-volatile storage device 44, an input / output port, and a communication port. The control device 40 inputs detection signals from the encoder 25 of the substrate transport mechanism 20, the encoder 35 of the clamp mechanism 30, the substrate detection sensor 28, etc., and inputs operation signals from the operation panel 12. The control device 40 outputs drive signals to the transport motor 24 of the substrate transport mechanism 20, the lift motor 34 of the clamp mechanism 30, etc., and outputs display signals to the operation panel 12.

[0019] Furthermore, each control device 40 is connected to each other via a communication port so as to be able to communicate with each other. Each control device 40 has a communication interface (SMEMA interface) conforming to the SMEMA (Surface Mount Equipment Manufacturers Association) standard for synchronizing the operation of the conveyor belt 21 that transports the substrate S between the pre-processing device and the post-processing device. The SMEMA interface has multiple terminals for communicating the status of the substrate S being dispensed or received by opening and closing electrical contacts. The multiple terminals include, for example, first terminals T11 and T12 for exchanging a signal (substrate request signal) requesting the pre-processing device to dispense the substrate S, and second terminals T21 and T22 for exchanging a signal (substrate present signal) indicating that a substrate S is available for dispense (unloading) with the post-processing device. In this embodiment, the control device 40 of the substrate transport mechanism 20 may have both the first terminals T11, T12 and the second terminals T21, T22, or may have the first terminals T11, T12 but not the second terminals T21, T22, depending on the transport specifications. When communication is performed between the control devices 40 of two working devices 10 each having both the first terminals T11, T12 and the second terminals T21, T22, the control devices 40 can exchange a substrate request signal and a substrate presence signal for removal with each other (see FIG. 4(a)). On the other hand, when communication is performed between a control device 40 of a working apparatus 10 having both first terminals T11, T12 and second terminals T21, T22 and a control device 40 of a working apparatus 10 having first terminals T11, T12 but not second terminals T21, T22, the control devices 40 can exchange substrate request signals with each other but cannot exchange unloaded substrate presence signals (see FIG. 4(b)). Note that the transport processes (loading process, unloading process) performed based on signals exchanged with pre-processing equipment and post-processing equipment will be described later.

[0020] The management device 50 is a general-purpose computer equipped with a CPU, ROM, RAM, etc. An input device 51 such as a keyboard and a mouse, and a display device 52 are connected to the management device 50. The management device 50 is communicably connected to the control devices of the respective operation devices 10, and exchanges data and control signals with each other.

[0021] Next, the operation of the substrate-related work system 1 configured in this manner will be described. In particular, the operation of the substrate transport mechanism 20 will be described. A flowchart showing an example of transport condition reception processing executed by the CPU 41 of the control device 40. This processing is executed when an operator instructs setting of transport conditions. Here, the transport conditions are conditions for starting to receive (carry in) the substrate S delivered from the previous process equipment, or for starting to deliver (unload) the substrate S to the next process equipment. The transport condition reception processing sets the conditions for starting to load the substrate S on the software based on input operations by the operator. Note that in this embodiment, the transport condition reception processing is configured to set only the conditions for starting to load the substrate S, but it may also be configured to set the conditions for starting to unload the substrate S.

[0022] When the transport condition reception process is executed, the CPU 41 of the control device 40 displays a transport condition setting screen on the operation panel 12 for setting transport conditions (step S100). The transport conditions are established when a predetermined signal is monitored and the monitored signal reaches a predetermined state. The transport conditions are set by the operator using the operation panel 12 to select a signal to be monitored from among multiple types of signals. In this embodiment, the multiple types of signals include an unloaded substrate presence signal exchanged with a pre-processing device or a post-processing device, and a signal (substrate detection sensor signal) from the substrate detection sensor 28 provided in the substrate transport mechanism 20 that is about to transport the substrate S. After displaying the transport condition setting screen, the CPU 41 determines whether the operator has completed selection of the monitoring target (step S110). If it determines that the selection is complete, the CPU 41 registers the selected monitoring target in the storage device 44 (step S120) and terminates the transport condition setting process. FIG. 6 is an explanatory diagram showing an example of monitoring target data. In the example of FIG. 6, the unloaded substrate presence signal is set as a monitoring target, and the substrate detection sensor signal is set as an unmonitoring target.

[0023] Next, the transport process (substrate carry-in process and substrate carry-out process) using the monitored data will be described. First, the substrate carry-in process will be described, and then the substrate carry-out process will be described. Fig. 7 is a flowchart showing an example of the substrate carry-in process executed by the CPU 41 of the control device 40. This process is repeatedly executed at predetermined time intervals.

[0024] When the substrate loading process is executed, the CPU 41 of the control device 40 first outputs an ON signal to the upstream process device (step S200). Next, the CPU 41 determines whether the unloading substrate presence signal is to be monitored (step S210). This determination can be made based on the monitoring target data registered in the storage device 44. If the CPU 41 determines that the unloading substrate presence signal is to be monitored, the CPU 41 waits for the unloading substrate presence signal from the upstream process device to be turned ON (step S220) and proceeds to step S230. On the other hand, if the CPU 41 determines that the unloading substrate presence signal is not to be monitored, the CPU 41 skips step S220 and proceeds to step S230.

[0025] Next, the CPU 41 determines whether the substrate detection sensor signal is a signal to be monitored (step S230). This determination can be made based on the monitoring target data registered in the storage device 44. If the CPU 41 determines that the substrate detection sensor signal is a signal to be monitored, it waits until the substrate detection sensor signal is turned on (step S240), and then controls the drive of the transport motor 24 so that the loading of the substrate S begins (step S250). After starting the loading of the substrate S, the CPU 41 waits until the loading of the substrate S is completed (step S260), and then outputs an off-signal to the pre-processing device (step S270), thereby ending the substrate loading process. On the other hand, if the CPU 41 determines in S230 that the substrate detection sensor signal is not to be monitored, it skips step S240, drives and controls the transport motor 24 so that the loading of the substrate S begins (step S250), waits until the loading of the substrate S is completed (step S260), outputs an off-signal to the pre-processing device for the substrate request signal (step S270), and ends the substrate loading process.

[0026] 8 is a flowchart showing an example of the substrate unloading process executed by the CPU 41 of the control device 40. This process is repeatedly executed at predetermined time intervals.

[0027] When the substrate unloading process is executed, the CPU 41 of the control device 40 first waits until the work on the substrate S by the working device 10 is completed (step S300). When the CPU 41 determines that the work is completed, it outputs an ON signal indicating that a substrate is present for unloading to the subsequent process device (step S310), and waits until a substrate request signal from the subsequent process device is turned ON (step S320). When the CPU 41 determines that the substrate request signal has been turned ON, it controls the drive of the transport motor 24 so that unloading of the substrate S to the subsequent process device begins (step S330). Then, the CPU 41 waits until unloading of the substrate S is completed (step S340), and outputs an OFF signal indicating that a substrate is present for unloading to the subsequent process device (step S350), thereby ending the substrate unloading process.

[0028] Here, the correspondence between the main elements of the embodiment and the main elements of the present disclosure described in the claims will be described. That is, the substrate transport mechanism 20 and the control device 40 of the embodiment correspond to the substrate transport device of the present disclosure, the CPU 41 of the control device 40 that executes the transport condition setting process corresponds to the setting unit, and the CPU 41 of the control device 40 that executes the processes of steps S210 to S240 of the substrate loading process corresponds to the changing unit.

[0029] It goes without saying that the present disclosure is not limited to the above-described embodiments, and can be embodied in various forms as long as they fall within the technical scope of the present disclosure.

[0030] For example, in the above-described embodiment, the CPU 41 sets, via software input by the operator, which of the unloaded substrate presence signal and the substrate detection sensor signal to include in the monitoring targets. However, the CPU 41 may be configured so that it is not possible to select a setting that excludes both the unloaded substrate presence signal and the substrate detection sensor signal from the monitoring targets.

[0031] As described above, in the substrate transport device disclosed herein, transport conditions for transporting substrates are set in software, and the transport sequence is changed based on the set transport conditions. This makes it possible to accommodate differences in the specifications of pre-processing equipment and post-processing equipment. Furthermore, the operator can set the transport conditions according to the specifications of the pre-processing equipment and post-processing equipment without the need to prepare short connectors, etc., thereby improving convenience.

[0032] In the substrate transport device of the present disclosure, the transport sequence may include a sequence in which the condition for starting substrate transport is that a substrate presence signal has been received from the upstream process device, and a sequence in which the condition for starting substrate transport is not that a substrate presence signal has been received from the upstream process device. This allows appropriate software settings to be used even when connected to a upstream process device that is not capable of outputting a substrate presence signal.

[0033] Furthermore, the substrate transport device of the present disclosure may include a substrate detection unit provided on the front-end process device side of the substrate transport path to detect the substrate, and the transport sequence may include a sequence in which the conditions for starting substrate transport include detection of the substrate by the substrate detection unit, and a sequence in which the conditions for starting substrate transport do not include detection of the substrate by the substrate detection unit. This makes it possible to easily set in software whether or not the conditions for starting substrate transport include detection of the substrate by the substrate detection unit. [Industrial Applicability]

[0034] The present disclosure is applicable to industries such as the manufacturing industry of substrate transport devices. [Explanation of symbols]

[0035] 1 substrate-to-substrate working system, 10 working device, 11 head, 12 operation panel, 20 substrate transport device, 21 conveyor belt, 22 side frame, 23 roller, 24 transport motor, 25 encoder, 28 substrate detection sensor, 28a light emitting unit, 28b light receiving unit, 30 clamping device, 31 substrate holding plate, 32 clamper, 33 lifting plate, 34 lifting motor, 35 encoder, 40 control device, 41 CPU, 42 ROM, 43 RAM, 44 storage device, 50 management device, 51 input device, 52 display device, S substrate, T11, T12 first terminal, T21, T22 second terminal.

Claims

1. A substrate transport device capable of exchanging signals with a front-end process device or a back-end process device and transporting a substrate according to a transport sequence, a setting unit that sets transport conditions for transporting the substrate on software; a change unit that changes the transport sequence based on the transport conditions set by the setting unit; Equipped with The transport sequence includes a sequence in which a condition for starting transport of a substrate is that a substrate presence signal indicating the presence of a substrate is received from the upstream process device, and a sequence in which a condition for starting transport of a substrate is not that a substrate presence signal is received from the upstream process device. Substrate transport device.

2. A substrate transport device capable of exchanging signals with a pre-process device or a post-process device and transporting a substrate according to a transport sequence, a setting unit that sets transport conditions for transporting the substrate on software; a change unit that changes the transport sequence based on the transport conditions set by the setting unit; a substrate detection unit provided on the substrate transport path on the side of the front-end process device to detect the substrate; the transport sequence includes a sequence in which the condition for starting transport of the substrate is that the substrate has been detected by the substrate detection unit, and a sequence in which the condition for starting transport of the substrate is not that the substrate has been detected by the substrate detection unit. Substrate transport device.

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