Information collection system, test board, and information collection method

Abstract

The purpose of the present invention is to provide technology that can acquire information on the distance between a functional member and a substrate in a substrate processing device.　The present invention is an information gathering system that acquires information related to a substrate processing device having a substrate holding unit that holds a substrate and an annular member (26) positioned on the back surface side of the substrate, wherein said information gathering system comprises: a disk-form body (7) having a bottom surface that can be held by the substrate holding unit; irradiation units (71, 74) that irradiate the annular member (26) with measurement waves, said irradiation units (71, 74) being secured to the body (7); a detection unit (72) that detects the response to the measurement waves from the irradiation unit, said detection unit (72) being secured to the body part; and a calculation unit (73) that acquires information about the gap between the body (7) and the annular member (26) on the basis of the response detected by the detection unit (72).

Description

[Technical Field]

[0001] The present disclosure relates to an information collection system, a test substrate, and an information collection method. [Background technology]

[0002] In the manufacturing process of semiconductor devices, semiconductor wafers are stored in a carrier and transported to a substrate processing apparatus for processing. Examples of such processing include liquid processing, such as forming a coating film by supplying a coating liquid and developing. During such liquid processing, a processing liquid is supplied from a nozzle to a wafer stored in a cup. Patent Document 1 describes a developing apparatus that includes a cup with an annular protrusion facing the underside of the wafer. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2020-13932 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a technique capable of acquiring distance information between a functional member and a substrate in a substrate processing apparatus. [Means for solving the problem]

[0005] An information collection system according to one aspect of the present disclosure is an information collection system that acquires information related to a substrate processing apparatus having a substrate holding unit that holds a substrate and an annular member located on the back side of the substrate, and includes a disk-shaped main body having a bottom surface that can be held by the substrate holding unit, an irradiation unit that is fixed to the main body and irradiates a measurement wave onto the annular member, a detection unit that is fixed to the main body and detects a response to the measurement wave from the irradiation unit on the main body, and a calculation unit that acquires information about the distance between the main body and the annular member. [Effects of the Invention]

[0006] According to the present disclosure, a technique is provided that can acquire distance information between a functional member and a substrate in a substrate processing apparatus. [Brief explanation of the drawings]

[0007] [Figure 1] FIG. 1 is a diagram illustrating a schematic configuration example of an information collection system according to an exemplary embodiment. [Figure 2] FIG. 2 is a diagram illustrating a schematic configuration example of an information collection system according to an exemplary embodiment. [Figure 3] FIG. 3 is a diagram showing an example of a schematic configuration of a coating unit in a coating and developing apparatus. [Figure 4] FIG. 4 is a diagram showing an example of the relationship between the inspection wafer, the control device, and the information collection device. [Figure 5] FIG. 5 is a diagram showing an example of the hardware configuration of the inspection wafer, the control device, and the information collection device. [Figure 6] FIG. 6 is a diagram showing an example of the configuration of a distance estimation unit in an inspection wafer. [Figure 7] 7(a) and 7(b) are diagrams showing an example of the configuration of a distance estimation unit in an inspection wafer. [Figure 8] 8(a) and 8(b) are diagrams for explaining an example of processing related to an image captured by an inspection wafer. [Figure 9] FIG. 9 is a diagram illustrating an example of a model for calculating a distance used by the calculation unit. [Figure 10] FIG. 10 is a diagram showing an example of processing in the calculation unit of the inspection wafer. [Figure 11] FIG. 11 is a diagram for explaining an example of processing in the calculation unit of the inspection wafer. [Figure 12] FIG. 12 is a diagram for explaining an example of processing in the calculation unit of the inspection wafer. [Figure 13] 13(a) and 13(b) are diagrams for explaining an example of processing in the calculation unit of the inspection wafer. [Figure 14] FIG. 10 is a sequence diagram illustrating an example of a processing procedure between devices in an information collection system according to an embodiment. [Figure 15] FIG. 10 is a sequence diagram illustrating an example of a processing procedure between devices in an information collection system according to an embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0008] Various exemplary embodiments are described below.

[0009] In one exemplary embodiment, an information collection system is provided for acquiring information about a substrate processing apparatus having a substrate holding unit that holds a substrate and an annular member located on a backside of the substrate, the information collection system including: a disk-shaped main body having a bottom surface that can be held by the substrate holding unit, an irradiation unit that is fixed to the main body and irradiates the annular member with a measurement wave, a detection unit that is fixed to the main body and detects a response to the measurement wave from the irradiation unit, and a calculation unit that acquires information about a gap between the main body and the annular member based on the response detected by the detection unit.

[0010] According to the information collection system, a measurement wave is irradiated onto the annular member from an irradiation unit fixed to the disk-shaped main body, a response to the measurement wave from the irradiation unit is detected by a detection unit fixed to the main body, and information on the distance between the main body and the annular member is obtained from the response result. Since the main body can be held by a substrate holder, this configuration makes it possible to obtain distance information between the functional member and the substrate in the substrate processing apparatus.

[0011] In one embodiment, the irradiating unit irradiates light as the measurement wave, and the detecting unit is a camera that captures an image of the annular member irradiated with the light.

[0012] In this case, the calculation unit acquires information about the distance between the main body and the annular member using the image captured by the camera. By using various information contained in the image to acquire the information about the distance, it is possible to acquire more accurate information about the distance between the functional member and the substrate in the substrate processing apparatus.

[0013] The light irradiated from the irradiation unit may be band-shaped light, and the band-shaped light is irradiated onto the annular member so as to extend in a direction intersecting the circumferential direction of the annular member and from a direction other than perpendicular to the upper end of the annular member.The calculation unit may identify the irradiation position of the band-shaped light on the annular member from an image captured by the camera, and based on this information, obtain information on the distance between the main body unit and the annular member.

[0014] By using a strip-shaped light, it is possible to easily irradiate the strip-shaped light onto the annular member even if the positions of the annular member and the main body change slightly. Furthermore, when the annular member is irradiated from a direction other than perpendicular to the top end of the annular member, the irradiation position of the strip-shaped light on the annular member changes depending on the distance between the main body and the annular member. Therefore, by configuring the calculation unit to identify the irradiation position of the strip-shaped light on the annular member and calculate the distance between the main body and the annular member based on this information, it is possible to obtain more accurate information regarding the distance between the functional component and the substrate in the substrate processing apparatus.

[0015] The calculation unit may be configured to acquire information about the distance between the main body and the annular member based on a model showing the relationship between the irradiation position of the strip-shaped light on the annular member and the distance between the main body and the annular member.

[0016] As described above, by configuring the distance between the main body and the annular member to be calculated based on a model, it is possible to obtain more accurate information regarding the distance between the functional member and the substrate in the substrate processing apparatus.

[0017] The calculation unit may be configured to determine a change in the light intensity distribution in the circumferential direction of the annular member from information regarding the light intensity distribution contained in the image captured by the camera, and to identify the irradiation position of the band-shaped light on the annular member from the information regarding the change.

[0018] By adopting the above configuration, it is possible to more accurately identify the irradiation position of the band-shaped light, thereby making it possible to obtain more accurate information regarding the distance between the functional component and the substrate in the substrate processing apparatus.

[0019] The upper surface of the annular member may have irregularities that are repeated along the circumferential direction, and the calculation unit may use a fast Fourier transform on the image captured by the camera to remove from the image frequency components of the light intensity that are repeated along the circumferential direction of the annular member, thereby identifying the irradiation position of the band-like light on the annular member.

[0020] When the upper surface of the annular member has repeated irregularities along the circumferential direction, it may be difficult to identify the irradiation position of the band-like light due to light scattered by the irregularities. In such cases, by performing a process of removing frequency components using a fast Fourier transform as described above, it is possible to more accurately identify the irradiation position of the band-like light.

[0021] The annular member may be a liquid processing cup that is located on the back side of the substrate and includes a back surface liquid receiving portion that has a convex portion that prevents the processing liquid supplied to the substrate from flowing around to the back surface, and the distance between the main body portion and the annular member may be the distance between the main body portion and the convex portion of the back surface liquid receiving portion.

[0022] Since the convex portion of the back surface liquid receiving portion is a component disposed close to the substrate, it is necessary to accurately grasp the distance between the convex portion and the substrate. Therefore, by adopting the above configuration, it becomes possible to grasp the distance between the convex portion and the substrate more accurately.

[0023] The substrate processing apparatus may also include an information collection device capable of communicating with a control device that controls the substrate processing apparatus, and an inspection substrate capable of communicating with the information collection device and having the main body unit, the irradiation unit, and the detection unit, wherein the irradiation unit and the detection unit operate based on instructions from the information collection device.

[0024] In this case, the calculation unit may be provided on the testing board and operate based on instructions from the information collection device. Alternatively, the calculation unit may be provided in the information collection device.

[0025] In one exemplary embodiment, a testing board is provided for acquiring information about a substrate processing apparatus having a substrate holding part for holding a substrate and an annular member located on a back surface side of the substrate, the testing board including: a disk-shaped main body having a bottom surface that can be held by the substrate holding part; an irradiation part fixed to the main body and irradiating the annular member with a measurement wave; and a detection part fixed to the main body and detecting a response to the measurement wave from the irradiation part.

[0026] According to the above-mentioned test board, a measurement wave is irradiated onto the annular member from an irradiation unit fixed to the disk-shaped main body, a response to the measurement wave from the irradiation unit is detected by a detection unit fixed to the main body, and information on the distance between the main body and the annular member is obtained from the response result. Because the main body can be held by a substrate holder, this configuration makes it possible to obtain information on the distance between the functional member and the substrate in the substrate processing apparatus.

[0027] The present invention may be an aspect further including a calculation unit that acquires information about the gap between the main body and the annular member based on the response detected by the detection unit.

[0028] In one exemplary embodiment, an information collecting method is provided for acquiring information about a substrate processing apparatus having a substrate holding unit that holds a substrate and an annular member located on a backside of the substrate, the information collecting method including: holding a bottom surface of a disk-shaped main body with the substrate holding unit; irradiating the annular member with a measurement wave from an irradiation unit fixed to the main body; detecting a response to the measurement wave from the irradiation unit with a detection unit fixed to the main body; and acquiring information about a distance between the main body and the annular member with a calculation unit based on the response detected by the detection unit.

[0029] According to the above-described information collection method, a measurement wave is irradiated onto the annular member from an irradiation unit fixed to the disk-shaped main body, a response to the measurement wave from the irradiation unit is detected by a detection unit fixed to the main body, and information on the distance between the main body and the annular member is obtained from the response result. Since the main body can be held by a substrate holder, this configuration makes it possible to obtain distance information between the functional member and the substrate in the substrate processing apparatus.

[0030] In the irradiating, the irradiating unit may irradiate light as the measurement wave, and the detecting unit may be a camera that captures an image of the annular member irradiated with the light.

[0031] In this case, the calculation unit acquires information about the distance between the main body and the annular member using the image captured by the camera. By using various information contained in the image to acquire the information about the distance, it is possible to acquire more accurate information about the distance between the functional member and the substrate in the substrate processing apparatus.

[0032] In the irradiating step, the light irradiated from the irradiating unit is band-shaped light, and the band-shaped light is irradiated onto the annular member so as to extend in a direction intersecting the circumferential direction of the annular member and from a direction other than perpendicular to the upper end of the annular member.In the acquiring step, the calculation unit may identify the irradiation position of the band-shaped light on the annular member from an image captured by the camera, and acquire information about the distance between the main body unit and the annular member based on this information.

[0033] By using a strip-shaped light, it is possible to easily irradiate the strip-shaped light onto the annular member even if the positions of the annular member and the main body change slightly. Furthermore, when the annular member is irradiated from a direction other than perpendicular to the top end of the annular member, the irradiation position of the strip-shaped light on the annular member changes depending on the distance between the main body and the annular member. Therefore, by configuring the calculation unit to identify the irradiation position of the strip-shaped light on the annular member and calculate the distance between the main body and the annular member based on this information, it is possible to obtain more accurate information regarding the distance between the functional component and the substrate in the substrate processing apparatus.

[0034] In the acquiring, the calculation unit may acquire information about the distance between the main body portion and the annular member based on a model showing the relationship between the irradiation position of the strip-shaped light on the annular member and the distance between the main body portion and the annular member.

[0035] As described above, by configuring the distance between the main body and the annular member to be calculated based on a model, it is possible to obtain more accurate information regarding the distance between the functional member and the substrate in the substrate processing apparatus.

[0036] In the acquiring step, the calculation unit may determine a change in the light intensity distribution in the circumferential direction of the annular member from information relating to the light intensity distribution contained in the image captured by the camera, and may identify the irradiation position of the band-shaped light on the annular member from the information on the change.

[0037] By adopting the above configuration, it is possible to more accurately identify the irradiation position of the band-shaped light, thereby making it possible to obtain more accurate information regarding the distance between the functional component and the substrate in the substrate processing apparatus.

[0038] The upper surface of the annular member may have irregularities that are repeated along the circumferential direction, and in the acquiring step, the calculation unit may use a fast Fourier transform on the image captured by the camera to remove from the image frequency components of the light intensity that are repeated along the circumferential direction of the annular member, thereby identifying the irradiation position of the band-like light on the annular member.

[0039] When the upper surface of the annular member has repeated irregularities along the circumferential direction, it may be difficult to identify the irradiation position of the band-like light due to light scattered by the irregularities. In such cases, by performing a process of removing frequency components using a fast Fourier transform as described above, it is possible to more accurately identify the irradiation position of the band-like light.

[0040] Illustrative Embodiments Various exemplary embodiments will be described in detail below with reference to the drawings, in which the same or equivalent parts are designated by the same reference numerals.

[0041] [Information gathering system] An information collection system 1 according to an embodiment of the present disclosure is shown in Fig. 1. The information collection system 1 is made up of a substrate processing system 2, a test wafer 7 (test substrate), and an information collection device 9.

[0042] The substrate processing system 2 processes the workpiece W, which is a circular substrate, by transporting it between processing modules using a transport mechanism. This processing includes supplying resist to the workpiece W stored in a cup in a processing module for forming a resist film, and forming the resist film.

[0043] The inspection wafer 7 is transported within the substrate processing system 2 by the transport mechanism in place of the workpiece W. The inspection wafer 7 has the function of capturing an image of the upper end of the ring that constitutes the cup, acquiring image data, and acquiring information relating to the distance (spacing) between the workpiece W and the upper end of the ring when the workpiece W is placed in the processing module.

[0044] The information collection device 9 controls the inspection wafer 7 and acquires the estimated results transmitted from the inspection wafer 7. Furthermore, by acquiring information on these distances based on this information before the substrate processing system 2 processes the workpiece W, abnormalities in the process of forming a resist film on the workpiece W can be prevented.

[0045] [Substrate processing system] The substrate processing system 2 includes a coating / developing apparatus 2A, an exposure apparatus 2B, and a control device 100 (control unit). The exposure apparatus 2B is an apparatus that exposes a resist film (photosensitive coating) formed on a workpiece W (substrate). Specifically, the exposure apparatus 2B irradiates an exposure target portion of the resist film with energy rays using a method such as immersion exposure. The coating / developing apparatus 2A performs a process of coating a resist (chemical solution) on the surface of the workpiece W to form a resist film before the exposure process by the exposure apparatus 2B, and then performs a development process of the resist film after the exposure process. Note that the processing module that is the target of inspection using the above-mentioned inspection wafer 7 is provided in the coating / developing apparatus 2A. Therefore, in the following embodiments, the coating / developing apparatus 2A will be described as a substrate processing apparatus.

[0046] [Substrate processing equipment] As an example of the substrate processing apparatus, the configuration of a coating and developing apparatus 2A will be described. As shown in FIGS. 1 and 2, the coating and developing apparatus 2A includes a carrier block 4, a processing block 5, and an interface block 6.

[0047] The carrier block 4 introduces the workpiece W into the coating and developing apparatus 2A and removes the workpiece W from the coating and developing apparatus 2A. For example, the carrier block 4 can support a plurality of carriers C for the workpiece W and has a built-in transport device A1 including a transfer arm. The carrier C accommodates a plurality of circular workpieces W, for example. The transport device A1 removes the workpiece W from the carrier C and delivers it to the processing block 5, and receives the workpiece W from the processing block 5 and returns it to the carrier C. The processing block 5 has a plurality of processing modules 11, 12, 13, and 14.

[0048] The processing module 11 incorporates a coating unit U1, a heat treatment unit U2, and a transport device A3 that transports the workpiece W to these units. The processing module 11 forms an underlayer film on the surface of the workpiece W using the coating unit U1 and the heat treatment unit U2. The coating unit U1 applies a treatment liquid for forming the underlayer film onto the workpiece W. The heat treatment unit U2 performs various heat treatments associated with the formation of the underlayer film.

[0049] The processing module 12 (liquid processing unit) incorporates a coating unit U1, a heat-processing unit U2, and a transport device A3 that transports the workpiece W to these units. The processing module 12 performs liquid processing, including forming a resist film on the underlying film using the coating unit U1 and the heat-processing unit U2. The coating unit U1 applies a processing liquid (resist) for forming a resist film onto the underlying film. The heat-processing unit U2 performs various heat processes associated with the formation of the coating. The coating unit U1 has the function of forming a coating film made of resist liquid on the periphery of the workpiece W.

[0050] The processing module 13 incorporates a coating unit U1, a heat treatment unit U2, and a transport device A3 that transports the workpiece W to these units. The processing module 13 forms an upper layer film on the resist film using the coating unit U1 and the heat treatment unit U2. The coating unit U1 applies a liquid for forming the upper layer film onto the resist film. The heat treatment unit U2 performs various heat treatments associated with the formation of the upper layer film.

[0051] The processing module 14 incorporates a coating unit U1, a heat-treating unit U2, and a transport device A3 that transports the workpiece W to these units. The processing module 14 uses the coating unit U1 and the heat-treating unit U2 to perform development of the exposed resist film and heat treatment associated with the development. The coating unit U1 applies a developer to the surface of the exposed workpiece W and then rinses it away with a rinse liquid, thereby developing the resist film. The heat-treating unit U2 performs various heat treatments associated with the development. Specific examples of heat treatments include a heat treatment before the development process (PEB: Post Exposure Bake) and a heat treatment after the development process (PB: Post Bake).

[0052] A shelf unit U10 is provided on the carrier block 4 side within the processing block 5. The shelf unit U10 is divided into multiple cells arranged in the vertical direction. A transport device A7 including a lifting arm is provided near the shelf unit U10. The transport device A7 raises and lowers the workpiece W between the cells of the shelf unit U10.

[0053] A shelf unit U11 is provided on the interface block 6 side in the processing block 5. The shelf unit U11 is divided into a plurality of cells arranged in the vertical direction.

[0054] The interface block 6 transfers the workpiece W to and from the exposure apparatus 2B. For example, the interface block 6 has a built-in transport device A8 that includes a transfer arm, and is connected to the exposure apparatus 2B. The transport device A8 transfers the workpiece W placed on the shelf unit U11 to the exposure apparatus 2B. The transport device A8 receives the workpiece W from the exposure apparatus 2B and returns it to the shelf unit U11.

[0055] The coating and developing apparatus 2A is controlled by a control device 100. The control device 100 holds information relating to the processing procedure for executing processing related to the workpiece W in the coating and developing apparatus 2A, and controls each unit so that the workpiece W is loaded into the coating and developing apparatus 2A and the desired processing is executed. The control device 100 transmits and receives information to and receives information from an information collection device 9, which will be described later, and has a function of notifying the information collection device 9 of the transport state when an inspection wafer 7, which will be described later, is loaded into the coating and developing apparatus 2A.

[0056] The following describes the processing of the workpiece W performed in the substrate processing system 2. The control device 100 controls the coating and developing device 2A to process the workpiece W, for example, in the following procedure. First, the control device 100 controls the transport device A1 to transport the workpiece W in the carrier C to the shelf unit U10, and then controls the transport device A7 to place the workpiece W in a cell for the processing module 11.

[0057] Next, the control device 100 controls the transport device A3 to transport the workpiece W on the shelf unit U10 to the coating unit U1 and heat treatment unit U2 in the processing module 11. The control device 100 also controls the coating unit U1 and heat treatment unit U2 to form an underlayer film on the surface of the workpiece W. Thereafter, the control device 100 controls the transport device A3 to return the workpiece W on which the underlayer film has been formed to the shelf unit U10, and controls the transport device A7 to place the workpiece W in the processing module 12.

[0058] Next, the control device 100 controls the transport device A3 to transport the workpiece W from the shelf unit U10 to the coating unit U1 and heat treatment unit U2 in the processing module 12. The control device 100 controls the coating unit U1 and heat treatment unit U2 to form a resist film on the underlying film of the workpiece W. An example of a liquid processing method performed in the processing module 12 will be described later. Thereafter, the control device 100 controls the transport device A3 to return the workpiece W to the shelf unit U10, and controls the transport device A7 to place the workpiece W in a cell for the processing module 13.

[0059] Next, the control device 100 controls the transport device A3 to transport the workpiece W on the shelf unit U10 to the coating unit U1 and heat treatment unit U2 in the processing module 13. The control device 100 also controls the coating unit U1 and heat treatment unit U2 to form an upper layer film on the resist film of the workpiece W. Thereafter, the control device 100 controls the transport device A3 to transport the workpiece W to the shelf unit U11.

[0060] Next, the control device 100 controls the transport device A8 to send the workpiece W stored in the shelf unit U11 to the exposure device 2B. Then, in the exposure device 2B, an exposure process is performed on the resist film formed on the workpiece W. Thereafter, the control device 100 controls the transport device A8 to receive the exposed workpiece W from the exposure device 2B and place the workpiece W in a cell for the processing module 14 in the shelf unit U11.

[0061] Next, the control device 100 controls the transport device A3 to transport the workpiece W on the shelf unit U11 to the heat treatment unit U2 of the processing module 14. Then, the control device 100 controls the coating unit U1 and the heat treatment unit U2 to perform the heat treatment associated with the development process and the development process. With the above, the control device 100 completes the substrate processing for one workpiece W.

[0062] [Application unit] Next, the coating unit U1 of the processing module 12 will be described in detail. As shown in Fig. 3, the coating unit U1 of the processing module 12 includes a spin chuck 21 (substrate holder), a rotation drive unit 22, support pins 24, a guide ring 25, a cup 27, an exhaust pipe 28, and a drain port 29. The coating unit U1 also includes a processing liquid supply unit 31. Although multiple types of processing liquid supply units 31 may be provided, only one type is shown in this embodiment as an example.

[0063] The spin chuck 21 holds the workpiece W horizontally. The spin chuck 21 is connected to a rotation drive unit 22 via a shaft 21a extending in the up-down direction (vertical direction). The rotation drive unit 22 rotates the spin chuck 21 at a predetermined rotation speed based on a control signal output from the control device 100.

[0064] A shroud 23 is provided around the shaft 21a, and support pins 24 are provided extending vertically so as to penetrate the shroud 23. The support pins 24 are pins that can support the back surface of the workpiece W, and as an example, three support pins 24 are provided around the shaft of the spin chuck 21. The support pins 24 can be raised and lowered by a lifting mechanism (not shown). The support pins 24 transfer the workpiece W between a transport mechanism (not shown) for the workpiece W and the spin chuck 21.

[0065] The guide ring 25 is provided below the workpiece W held by the spin chuck 21 and has the function of guiding the processing liquid supplied to the surface of the workpiece W toward a drain port. A cup 27 is provided around the outer periphery of the guide ring 25 to prevent the processing liquid from scattering. The cup 27 is open at the top so that the workpiece W can be transferred to the spin chuck 21. A space that serves as a drain path for the liquid is formed between the side surface of the cup 27 and the outer periphery of the guide ring 25. An exhaust pipe 28 is provided below the cup 27, and a drain port 29 is provided to discharge the liquid moving through the space.

[0066] Guide ring 25 is a member that is formed so as to expand from the peripheral edge of shroud 23 described above toward cup 27, and has a circular shape in a plan view, and is located below workpiece W held by spin chuck 21. The lower part of guide ring 25 is connected to the inner wall of cup 27, and is configured to prevent the processing liquid from leaking out of cup 27.

[0067] The upper surface of guide ring 25 is composed of inclined surfaces 25a and 25b. Inclined surface 25a is located closer to the center of cup 27 than inclined surface 25b. Inclined surface 25a slopes upward toward the outside of cup 27, while inclined surface 25b slopes downward toward the outside of cup 27. As a result, the vertical cross section of guide ring 25 is formed in a mountain shape.

[0068] The boundary between the inclined surfaces 25a and 25b of the guide ring 25 is provided with a ring upper end 26 (annular protrusion) formed by the steep gradient of these surfaces. The ring upper end 26 is formed to protrude upward, and follows the circumference of the workpiece W placed on the spin chuck 21 and is close to the peripheral edge of the workpiece W. This ring upper end 26 prevents the processing liquid supplied to the front surface of the workpiece W from flowing around to the back surface of the workpiece W and depositing at a position close to the center of the workpiece W, or prevents a mist of the processing liquid from depositing at a position close to the center of the back surface of the workpiece W. The position of the guide ring 25 relative to the cup 27 may be changed. Therefore, the height of the ring upper end 26 relative to the workpiece W and the spin chuck 21 supporting the workpiece W may be changed.

[0069] The coating unit U1 is also provided with a processing liquid supply part 31. The processing liquid supply part 31 discharges processing liquid from above the workpiece W supported by the spin chuck 21 toward the periphery of the workpiece W on the front surface side.

[0070] The processing liquid supply unit 31 includes a nozzle 31a, a processing liquid supply source 31b, and a pipe 31c. An open / close valve controlled by the control device 100 may be provided on the pipe 31c of the processing liquid supply unit 31. The supply / stop of the processing liquid may be switched by switching the open / close state of the open / close valve based on a control signal from the control device 100.

[0071] The nozzle 31a is attached to, for example, an arm extending horizontally, and is movable horizontally. The nozzle 31a is also movable vertically. A movement mechanism is provided for moving the nozzle 31a horizontally and vertically, and the operation of the movement mechanism allows the nozzle 31a to move between a standby position outside the cup 27 and above the workpiece W.

[0072] Examples of the processing liquid supplied from the processing liquid supply unit 31 include a processing liquid (e.g., a resist liquid) and a solvent used when forming a coating film on the periphery of the workpiece W. When it is necessary to supply multiple processing liquids to the workpiece W, multiple processing liquid supply units 31 may be provided in the coating unit U1.

[0073] When the control device 100 controls the coating unit U1 described above, it executes liquid processing on the workpiece W using the processing module 12 in accordance with predetermined conditions. The control device 100, for example, supplies each processing liquid to the workpiece W using the processing liquid supply unit 31 based on predetermined conditions, and controls the rotation of the workpiece W at that time. The control device 100 may be configured with multiple functional modules for executing the above liquid processing. Each functional module is not limited to being realized by executing a program, but may also be realized by a dedicated electrical circuit (for example, a logic circuit) or an integrated circuit (ASIC: Application Specific Integrated Circuit) that integrates such a circuit.

[0074] [Inspection wafers and information collection devices] Next, the inspection wafer 7, which is transported to the coating / developing apparatus 2A and undergoes inspection in the coating unit U1, will be described with reference to FIG. 4. The inspection wafer 7 has the function of measuring the distance between the bottom surface of the workpiece W and the ring top end 26 when the workpiece W is supported by the spin chuck 21. During assembly or adjustment of the coating unit U1, the distance between the bottom surface of the workpiece W and the ring top end 26 may fall outside the appropriate range. If processing of the workpiece W is performed in this state, the ring top end 26 may come into contact with the workpiece W or may become too far away from the workpiece W. To prevent this from occurring, the inspection wafer 7 is transported to the coating unit U1 instead of the workpiece W. The inspection wafer 7 is supported on the spin chuck 21 in the same way as the workpiece W, and an image of the ring top end 26 is captured by the inspection wafer 7 to obtain image data. The distance between the bottom surface of the workpiece W (the bottom surface of the inspection wafer 7) and the ring top end 26 is then calculated from the image data.

[0075] The inspection wafer 7 includes a main body 70, a light source 71 (illumination unit), a camera 72 (detection unit), a calculation unit 73, an optical system 74 (illumination unit), an equipment mounting board 81, and a battery 82. The main body 70 is a circular board that is the same size as the workpiece W in a plan view. The light source 71, the camera 72, the calculation unit 73, the optical system 74, the equipment mounting board 81, and the battery 82 are provided on the main body 70. The main body 70 is transported by a transport mechanism, the support pins 24 of the coating unit U1, and the like, just like the workpiece W, and its underside is configured as a flat surface just like the underside of the workpiece W so that the center of the backside is held by suction on the spin chuck 21. Note that FIG. 4 and other figures show the inspection wafer 7 held by the spin chuck 21.

[0076] As will be described in detail later, the inspection wafer 7 transmits a line of light L1 (band-shaped light) from the light source 71 to the upper surface of the ring upper end 26. Furthermore, the bright line generated when the line of light L1 reaches the upper surface of the ring upper end 26 is captured by the camera 72. The optical system 74 is positioned so that the line of light L1 reaches the ring upper end 26 and the bright line can be captured by the camera 72. Furthermore, the calculation unit 73 has the function of estimating the distance between the bottom surface of the workpiece W (the bottom surface of the inspection wafer 7) and the ring upper end 26 from the image data captured by the camera 72. In this way, the light source 71, the camera 72, the calculation unit 73, and the optical system 74 function as a distance estimation unit that estimates the distance between the main body 70 and the ring upper end 26. Furthermore, the light source 71 and the optical system 74 function as an irradiation unit that causes the line of light L1 to reach the top surface of the ring upper end 26.

[0077] A device mounting board 81 is provided in the center of the main body 70. The camera 72 and the calculation unit 73 may be connected to the device mounting board 81 via cables (not shown). In this case, image data acquired by the camera 72 and calculation results by the calculation unit 73 may be transmitted to the device mounting board 81 via the cables. The device mounting board 81 is configured with multiple boards, including, for example, a DSP (digital signal processor) board, but is shown as a single board for convenience, and has various devices mounted thereon. These devices include a device that switches on / off light irradiation by the light source 71 by wirelessly receiving a signal from the information collection device 9, a device that captures images using the camera 72, and a device (transmitter) that transmits calculation results by the calculation unit 73 to the information collection device 9. A battery 82 is provided in the center of the main body 70 and supplies power to the light source 71, the camera 72, and each device included in the device mounting board 81.

[0078] The device mounting board 81 may be configured with a plurality of functional modules for executing the above-mentioned processes on the inspection wafer 7. Each functional module is not limited to being realized by the execution of a program, but may be realized by a dedicated electric circuit (for example, a logic circuit) or an integrated circuit (ASIC: Application Specific Integrated Circuit) that integrates such a circuit. It may also be something.

[0079] The inspection wafer 7 operates based on instructions from the information collecting device 9 and transmits the results to the information collecting device 9. In this way, the inspection wafer 7 acquires instructions from the information collecting device 9 by communicating with the information collecting device 9, and performs operations related to capturing and calculating image data for estimating the distance between the bottom surface of the workpiece W (the bottom surface of the inspection wafer 7) and the ring upper end 26 based on the instructions. Furthermore, the calculation results of the inspection wafer 7 are sent to the information collecting device 9.

[0080] Meanwhile, the information collecting device 9 has the function of operating the inspection wafer 7 at appropriate timing in conjunction with the control device 100. The transport status of the inspection wafer 7 in the control device 100, particularly information indicating that the inspection wafer 7 has been transported to the coating unit U1, is sent from the control device 100 to the information collecting device 9. Based on this notification from the control device 100, the information collecting device 9 controls the inspection wafer 7 to perform imaging and calculations for estimating the distance between the underside of the inspection wafer 7 and the ring upper end 26. After collecting the estimation result from the inspection wafer 7, the information collecting device 9 determines whether the result is within a predetermined reference value range and, based on the result, decides whether to continue subsequent processing, etc.

[0081] The information collection device 9 may be configured with a plurality of functional modules for transmitting and receiving information between the control device 100 and the inspection wafer 7, and for executing judgments and the like based on the inspection results of the inspection wafer 7 in the information collection device 9. Each functional module is not limited to being realized by the execution of a program, but may also be realized by a dedicated electric circuit (for example, a logic circuit) or an integrated circuit (ASIC: Application Specific Integrated Circuit) that integrates such a circuit.

[0082] [Hardware configuration of control device, inspection wafer, and information collection device] The hardware of the control device 100, the inspection wafer 7 (particularly the equipment mounting board 81), and the information collecting device 9 may be configured by, for example, one or more control computers. As shown in FIG. 5, each of the control device 100, the inspection wafer 7, and the information collecting device 9 includes a circuit 201 as a hardware configuration. The circuit 201 may be configured by electric circuit elements. The circuit 201 includes a processor 202, a memory 203, and It may include storage 204 , a driver 205 , and an input / output port 206 .

[0083] The processor 202 executes programs in cooperation with at least one of the memory 203 and the storage 204, and configures the above-mentioned functional modules by inputting and outputting signals via the input / output port 206. The memory 203 and the storage 204 store various information, programs, etc. used by the control device 100, the inspection wafer 7, and the information collection device 9, respectively. The driver 205 is a circuit that drives the control device 100, the inspection wafer 7, and the information collection device 9 and their associated functional units. The input / output port 206 inputs and outputs signals between the driver 205 and the associated functional units.

[0084] The substrate processing system 2 may include one control device 100, or may include a controller group (controller) configured with multiple control devices 100. When the substrate processing system 2 includes a controller group, for example, multiple functional modules may be implemented by different control devices, or may be implemented by a combination of two or more control devices 100. When the control device 100 is configured with multiple computers (circuits 201), multiple functional modules may each be implemented by a single computer (circuit 201). Furthermore, the control device 100 may be implemented by a combination of two or more computers (circuits 201). The control device 100 may have multiple processors 202. In this case, multiple functional modules may each be implemented by a single processor 202, or may be implemented by a combination of two or more processors 202. Some of the functions of the control device 100 of the substrate processing system 2 may be provided in a device separate from the substrate processing system 2, and connected to the substrate processing system 2 via a network to perform various operations in this embodiment. For example, if the functions of the processor 202, memory 203, and storage 204 of multiple substrate processing systems 2 are combined into one or more separate devices, it becomes possible to remotely and collectively manage and control the information and operations of multiple substrate processing systems 2.

[0085] [Detailed structure of the distance estimation unit on the inspection wafer] The distance estimation section of the inspection wafer 7 will be described with reference to FIGS.

[0086] Through holes 75 are formed in the peripheral portion of the main body 70 of the inspection wafer 7 at positions spaced apart in the circumferential direction of the main body 70. The through holes 75 are elongated and extend in the tangential direction of the main body 70, and are formed at positions corresponding to the ring upper end 26 in a plan view when the inspection wafer 7 is supported by the spin chuck 21. A camera 72 functioning as an imaging unit and a calculation unit 73 connected to the camera 72 are provided at positions closer to the center of the main body 70 than the through holes 75. The field of view of the camera 72 is directed toward the peripheral edge of the main body 70.

[0087] The light source 71 emits a linear light beam. The light source 71 may be, for example, a laser light source. In the example shown in FIGS. 6 to 8, the light source 71 emits a linear light beam L1 extending in a direction parallel to the main surface of the main body 70. As illustrated in FIG. 7(b), the length (longitudinal length) of the linear light beam L1 is set to be greater than the width (radial length) of the ring upper end 26. This is intended to ensure that the linear light beam L1 reaches the ring upper end 26 even if the relative position between the ring upper end 26 and the inspection wafer 7 changes slightly. The linear light beam L1 is reflected by a mirror 74a serving as an optical system, emitted downward, i.e., toward the spin chuck 21, passes through the through-hole 75, and reaches the upper surface of the ring upper end 26 located below the main body 70 (see FIG. 7(a)).

[0088] Meanwhile, a prism 74b serving as an optical system is arranged on the optical axis of the camera 72. The prism 74b captures the ring upper end 26 and its surroundings below the main body 70 via the through-hole 75. Therefore, the camera 72 can capture an image of the area below the main body 70 via the through-hole 75 and the prism 74b. When the inspection wafer 7 is held by the spin chuck 21, the prism 74b is positioned above the ring upper end 26, and the camera 72 can capture an image of a portion of the upper surface of the ring upper end 26 in the circumferential direction.

[0089] Fig. 8(a) shows a schematic example of image data acquired by the imaging. As shown in Fig. 7(a), the line of light L1 passes through mirror 74a and reaches ring upper end 26. At this time, as shown in Fig. 7(b) and other figures, a bright line Lp where the irradiation intensity of line of light L1 is increased may be formed on the surface of ring upper end 26 at the position where line of light L1 arrives.

[0090] Meanwhile, camera 72 captures an image of the surface of ring upper end 26 via prism 74b, thereby acquiring the distribution of scattered light of line light L1 as image data. Therefore, camera 72 captures an image in which a bright line Lp corresponding to line light L1 appears on ring upper end 26, as shown in Fig. 8(a). Furthermore, as shown in Fig. 8(b), it is expected that the light distribution on ring upper end 26 will have a peak of light intensity (representative point) at a position corresponding to bright line Lp, when the direction in which ring upper end 26 extends is taken as the x-coordinate.

[0091] Here, the line of light L1 is irradiated from an inclined direction, not perpendicular to the surface of the ring upper end 26. Therefore, when the distance between the main body 70 and the ring upper end 26 is closer than the reference distance (the distance corresponding to the set value), the line of light L1 reaches the main body 70 at an earlier stage (i.e., the optical path is shorter) than shown in FIG. 7(a). On the other hand, when the distance between the main body 70 and the ring upper end 26 is farther than the reference distance, the line of light L1 reaches the main body 70 at a later stage (i.e., the optical path is longer) than shown in FIG. 7(a). In other words, the position of the bright line Lp appearing on the surface of the ring upper end 26 varies depending on the distance between the main body 70 and the ring upper end 26. As a result, for example, as illustrated in FIG. 8(a), when the distance is closer than the reference distance, the bright line Lp shifts in one direction, and when the distance is farther, the bright line Lp shifts in the other direction.

[0092] In this way, the position of the bright line Lp changes depending on the distance between the main body 70 and the ring upper end 26. Using the above-mentioned characteristics, the inspection wafer 7 identifies the position of the bright line Lp on the ring upper end 26 in the image data captured by the camera 72, and estimates the distance between the underside of the main body 70 and the ring upper end 26 based on this position.

[0093] The calculation unit 73 estimates the distance between the bottom surface of the main body 70 and the ring upper end 26 based on the image data captured by the camera 72. At this time, the calculation unit 73 prepares a model based on multiple image data captured under conditions in which the distance between the bottom surface of the main body 70 and the ring upper end 26 is known. Specifically, a model is prepared in advance that specifies the relationship between the x coordinate, i.e., the position of the bright line Lp due to the line light L1 in the image data, and the distance between the bottom surface of the main body 70 and the ring upper end 26. As illustrated in FIG. 9 , when the position of the bright line Lp due to the line light L1 in the image data (the coordinate of the representative point in the horizontal direction) is defined as x and the distance between the bottom surface of the main body 70 and the ring upper end 26 is defined as y, an approximation function y=f(x) that defines the x-y relationship can be set. This approximation function is prepared in advance as a model for estimating the distance between the bottom surface of the main body 70 and the ring upper end 26. This makes it possible to estimate the distance to the ring upper end 26 using an approximation function as a model from the position of the bright line Lp of the line light L1 in image data obtained when the distance to the ring upper end 26 is unknown. Note that there does not need to be just one model, and for example, models may be created individually depending on the type of guide ring 25 provided in the coating unit U1.

[0094] [Distance estimation method (information collection method)] Next, among the distance estimation methods (information collection methods) for the inspection wafer 7, we will explain a method for estimating the distance between the lower surface of the main body 70 and the ring upper end 26 from image data in the calculation unit 73, with reference to the flow chart shown in Figure 10 and the examples shown in Figures 11 to 13.

[0095] In the examples shown in Figures 10 to 13, we will explain a case where the ring upper end 26 is not flat but has been surface-processed to have repeated irregularities in the circumferential direction. When the ring upper end 26 is flat, the bright line Lp appears relatively clearly in the image data captured using the above method, and it is therefore considered relatively easy to identify the representative point where the light intensity peaks. On the other hand, when the ring upper end 26 has surface processing marks, as shown in image D1 in Figure 11, for example, the bright line Lp is not clearly visible due to the surface irregularities, and the line light L1 is diffused by the irregularities before and after it. Therefore, since the calculation unit 73 cannot identify the representative point by simply measuring the light intensity for each pixel in the image data, the following image processing is performed.

[0096] First, in step S01, the calculation unit 73 converts the image data acquired by the camera 72 into grayscale. If the image captured by the camera 72 is a grayscale image, this process may be omitted.

[0097] Next, in step S02, the calculation unit 73 identifies the brightest y-coordinate in the image data. As shown in FIG. 11, image D1 can be expressed using x- and y-coordinates, with the x-axis representing the direction along the ring top end 26 and the y-axis representing the direction perpendicular to the x-axis. However, image D1 also includes areas where the ring top end 26 is not captured. Therefore, as shown in FIG. 11, the calculation unit 73 sums the luminance values ​​of all pixels with the same y-value when each pixel is located at (x, y) to create a graph G1 representing the cumulative luminance value for each y-coordinate. Furthermore, by calculating the moving average value of each point ±py, a graph G2 is obtained that somewhat absorbs the fluctuations in the luminance values ​​for each y-coordinate. In this graph G2, the y-coordinate with the highest luminance value can be identified as the representative y-coordinate P1.

[0098] Next, in step S03, the calculation unit 73 calculates, for each x coordinate, a moving average value of the representative y coordinate P1±py obtained in step S02. Specifically, as shown in FIG. 12, an average value (moving average) is calculated from the brightness values ​​of pixels at the same x coordinate within the range of the representative y coordinate P1±py identified in step S02. As a result, a graph showing the average brightness values ​​for each x coordinate is obtained, as shown in graph G3 in FIG. 12. In graph G3, brightness fluctuations resulting from the surface irregularities (surface processing marks) of the ring upper end 26, which are also shown in image D1, appear as uneven brightness values.

[0099] Next, in step S04, the calculation unit 73 performs a process for canceling the brightness fluctuations resulting from the surface processing marks. Specifically, by applying FFT (Fast Fourier Transformation) to the brightness value data obtained as the graph G3, the graph The luminance values ​​contained in the rough G3 are divided into frequency components. The result is graph G4 shown in Figure 13(a). From this result, high-frequency components (e.g., components with periods of 12 or more) are cut (zero converted) and then an inverse FFT is applied. As a result, graph G5 is obtained, as shown in Figure 13(b), from which high-frequency components have been removed. By performing this type of processing, components derived from the continuous unevenness of surface processing marks are removed.

[0100] Next, in step S05, the calculation unit 73 identifies a representative point based on graph G5 after removing components derived from surface processing marks. The x-coordinate with the largest luminance value in graph G5 shown in FIG. 13(b) may be used as the representative point. However, to identify a representative point P2 based on information from a wider range, the following procedure may be performed. Specifically, after detecting the maximum luminance value in graph G5 shown in FIG. 13(b), a range R1 of luminance values ​​exceeding 75% of this maximum value is identified, and a range R2 of x-coordinates within the luminance value range R1 is identified. The x-coordinate that is the center of gravity of the luminance value distribution in range R2 may then be calculated, and this x-coordinate may be used as the representative point. By performing such calculations, the representative point can be calculated taking into account changes in luminance values ​​of x-coordinates around the x-coordinate where the luminance value peaks. Furthermore, by using information from the range R1 of luminance values ​​exceeding 75% of the maximum luminance value, it is possible to use information from a range where the waveform maintains a good left-right symmetry.

[0101] Next, in step S06, the calculation unit 73 estimates the distance between the lower surface of the main body 70 and the ring upper end 26 by applying the x coordinate of the representative point obtained in step S05 to the model. As described above, the calculation unit 73 stores in advance a model that indicates the relationship between the x coordinate in the image data and the distance between the lower surface of the main body 70 and the ring upper end 26, as shown in Fig. 9. The calculation unit 73 calculates the distance between the lower surface of the main body 70 and the ring upper end 26 by applying the x coordinate of the representative point calculated in step S05 to the model.

[0102] Through the above procedure, the process of calculating the distance between the lower surface of the main body 70 and the ring upper end 26 based on the image D1 is completed.

[0103] [Control method between control device - information collection device - inspection wafer]

[0104] 14 and 15, the processing flow between the control device 100, the information collecting device 9, and the test wafer 7 of the coating and developing apparatus 2A will be described. The control device 100 controls each component of the coating and developing apparatus 2A as a substrate processing apparatus. The control device 100 pre-programs a procedure for transporting the test wafer 7 in place of the workpiece W, loading it into the coating unit U1 for inspection, in addition to the procedure for performing substrate processing on the workpiece W. The following example assumes that the control device 100 is executing control for performing an inspection using the test wafer 7. At this time, the information collecting device 9 operates the test wafer 7 based on a notification from the control device 100. Based on instructions from the information collecting device 9, the test wafer 7 is imaged in the coating unit U1, and the distance between the bottom surface of the main body 70 and the ring upper end 26 is calculated.

[0105] FIG. 14 shows a sequence diagram in which the information collection device 9 individually instructs the inspection wafer 7 to start and end operations.

[0106] First, the control device 100 controls the transport of the inspection wafer 7, and the loading into the coating unit U1 is completed (step S11). Then, the control device 100 notifies the information collection device 9 that the loading has been completed. The information collection device 9 determines the next operation based on the notification from the control device 100 (step S12), and then instructs the inspection wafer 7 to start data collection (step S13).

[0107] In the inspection wafer 7, when the equipment mounting board 81 receives the instruction from the information collecting device 9, it instructs each unit to start operating. As a result, for example, the light source 71 starts emitting the line light L1, the camera 72 starts repeatedly capturing images at predetermined intervals, and the calculation unit 73 starts a process of calculating the distance between the bottom surface of the main body 70 and the ring upper end 26 from the image data (step S14). In addition, the equipment mounting board 81 notifies the information collecting device 9 that data collection for the inspection wafer 7 has begun. Based on the notification from the inspection wafer 7, the information collecting device 9 determines that the inspection wafer 7 has reached a ready state, and issues an operation start instruction to the control device 100 to execute an operation based on the conditions for data collection by the inspection wafer 7 (step S15).

[0108] Based on instructions from the information collecting device, the control device 100 controls the coating unit U1 to start a predetermined operation (step S16) and then controls the coating unit U1 to end the operation after performing a pre-specified operation (step S17). At this time, the control device 100 notifies the information collecting device 9 that the predetermined operation has been completed in the coating unit U1. Based on the notification from the control device 100, the information collecting device 9 instructs the inspection wafer 7 to end the data collection operation (step S18). When the inspection wafer 7 ends data collection based on instructions from the information collecting device 9 (step S19), it summarizes the information to be notified to the information collecting device 9 (step S20) and reports the results. As an example, a configuration may be adopted in which the calculation result of the distance between the bottom surface of the main body 70 and the ring upper end 26 calculated for each image in the calculation unit 73 of the inspection wafer 7 is processed to create a summary, and the summary is notified to the information collecting device 9.

[0109] When the information collecting device 9 receives the processing result from the inspection wafer 7, it determines the distance between the lower surface of the main body 70 and the ring upper end 26 based on a criterion such as whether the result falls within a predetermined reference range (step S21). The information collecting device 9 may also determine the next operation based on the determination result (step S22). For example, if the result of the determination (S21) indicates that the distance between the lower surface of the main body 70 and the ring upper end 26 falls within the reference range (OK determination), the information collecting device 9 may be configured to instruct the control device 100 to proceed with the unloading operation of the inspection wafer 7. If the result of the determination (S21) indicates that the distance between the lower surface of the main body 70 and the ring upper end 26 falls within the reference range (NG determination), for example, detailed data may be obtained from the inspection wafer 7 instead of summary data. The information collecting device 9 may then perform a process to closely examine the results. Note that these are merely examples and may be modified as appropriate.

[0110] FIG. 15 shows a sequence diagram in which the information collection device 9 issues instructions related to a series of operations to the inspection wafer 7 all at once.

[0111] First, the control device 100 controls the transport of the inspection wafer 7, and the loading into the coating unit U1 is completed (step S31). The control device 100 then notifies the information collecting device 9 that the loading has been completed. The information collecting device 9 determines the next operation based on the notification from the control device 100 (step S32), and then instructs the inspection wafer 7 to start data collection (step S33). At this time, the information collecting device 9 also notifies the inspection wafer 7 of the conditions for ending data collection. As an example, the information collecting device 9 may notify the inspection wafer 7 of the data collection time (the time from image capture to calculation) for the inspection wafer 7, thereby notifying the end condition of data collection. Furthermore, when it is desired to collect images captured by the camera 72 of the inspection wafer 7, the information collecting device 9 may instruct the inspection wafer 7 to collect images, and may end the image capture when a specific number of images (e.g., one or more) have been collected. Then, the inspection wafer 7 may instruct the information collecting device 9 to capture the captured images.

[0112] In the inspection wafer 7, when the equipment mounting board 81 receives an instruction from the information collecting device 9, it instructs each unit to start operating. As a result, for example, the light source 71 starts emitting line light L1, and the camera 72 starts capturing images under predetermined conditions. Furthermore, when instructed by the information collecting device 9, the calculation unit 73 starts a process of calculating the distance between the bottom surface of the main body 70 and the ring upper end 26 from the image data (step S34). When data collection under the predetermined conditions is completed, the information to be notified to the information collecting device 9 is compiled (step S35) and the results are reported.

[0113] When the information collecting device 9 receives the processing result from the inspection wafer 7, it may determine the distance between the lower surface of the main body 70 and the ring upper end 26 based on criteria such as whether the result is within a preset criteria range (step S36). Also, if the purpose is to collect data from the inspection wafer 7 (for example, to obtain an image), the information collecting device 9 may perform the next operation without making a determination. The subsequent processing is changed as appropriate depending on the subsequent processing, etc., similar to the case shown in FIG.

[0114] [Effect] According to the information collection system 1 and information collection method described above, a light source 71 serving as an irradiation unit fixed to a disk-shaped main body 70 irradiates a line of light L1 as a measurement wave onto the ring upper end 26, which is an annular member. A camera 72 serving as a detection unit fixed to the main body 70 detects a response to the measurement wave from the irradiation unit. A calculation unit 73 then acquires information about the distance between the main body and the annular member from the response result. The main body 70 can be held by a spin chuck 21 serving as a substrate holder, and this configuration makes it possible to acquire information about the distance between a functional member and a substrate in the substrate processing apparatus.

[0115] Furthermore, when light is used as the measurement wave as described above, the calculation unit 73 acquires information about the distance between the main body 70 and the ring upper end 26 using the image captured by the camera 72. By using various pieces of information contained in the image to acquire the distance information, it becomes possible to acquire more accurate information about the distance between the functional components and the substrates in the substrate processing apparatus.

[0116] Furthermore, the light emitted from the irradiation unit may be line light L1 (belt-shaped light). In this case, the line light L1 may be irradiated onto the annular member from a direction other than perpendicular to the upper end of the annular member so as to extend in a direction intersecting the circumferential direction of the annular member. In this configuration, the calculation unit 73 may identify the irradiation position of the belt-shaped light on the annular member from an image captured by the camera 72, and may acquire information about the distance between the main body unit and the annular member based on this information.

[0117] By using a strip-shaped light, it is possible to easily irradiate the strip-shaped light onto the annular member even if the position of the annular member and the main body 70 changes slightly. Furthermore, when the annular member is irradiated from a direction other than perpendicular to the top end of the annular member, the irradiation position of the strip-shaped light on the annular member changes depending on the distance between the main body 70 and the annular member. Therefore, as described in the above embodiment, the calculation unit 73 is configured to identify the irradiation position of the strip-shaped light on the annular member and calculate the distance between the main body and the annular member based on this information. This makes it possible to obtain more accurate information regarding the distance between the functional components and substrates in the substrate processing apparatus.

[0118] The calculation unit may acquire information about the distance between the main body and the annular member based on a model that indicates the relationship between the irradiation position of the strip-shaped light on the annular member and the distance between the main body and the annular member. By adopting such a configuration, it is possible to acquire more accurate information about the distance between the functional member and the substrate in the substrate processing apparatus.

[0119] The calculation unit 73 may determine the change in the light intensity distribution in the circumferential direction of the annular member from information regarding the light intensity distribution contained in the image captured by the camera 72, and may identify the irradiation position of the band-like light on the annular member from the information on the change.

[0120] As described in the above embodiment, the upper surface of the annular member may have irregularities that are repeated along the circumferential direction. The calculation unit 73 may perform a fast Fourier transform on an image captured by a camera to remove from the image frequency components of the light intensity that are repeated along the circumferential direction of the annular member, thereby identifying the irradiation position of the band-like light on the annular member.

[0121] When the upper surface of the annular member has repeated irregularities along the circumferential direction, it may be difficult to identify the irradiation position of the band-like light due to light scattered by the irregularities. In such cases, by performing a process of removing frequency components using a fast Fourier transform as described above, it is possible to more accurately identify the irradiation position of the band-like light.

[0122] The annular member may be a liquid processing cup including a backside liquid receiving portion located on the backside of the substrate and having a convex portion that prevents the processing liquid supplied to the substrate from flowing around to the backside. In this case, the distance between the main body portion 70 and the annular member may be the distance between the main body portion 70 and the convex portion of the backside liquid receiving portion. Note that the backside liquid receiving portion corresponds to the above-mentioned guide ring 25, and the ring upper end portion 26 of the guide ring 25 corresponds to the above-mentioned convex portion. As described above, the ring upper end portion 26 is a member that is disposed in close proximity to the workpiece W, and therefore, it is necessary to accurately grasp the distance therebetween. Therefore, the above-mentioned configuration makes it possible to more accurately grasp the distance to the substrate.

[0123] [Variations] Although various exemplary embodiments have been described above, the present invention is not limited to the above-described exemplary embodiments, and various omissions, substitutions, and modifications may be made. Furthermore, elements in different embodiments may be combined to form other embodiments.

[0124] For example, in the above embodiment, a configuration in which the line light L1 is irradiated onto the ring upper end 26 has been described, but the line light L1 may be realized as light in a state other than laser light. Furthermore, the measurement wave is not limited to light, and may be a sound wave, including ultrasound. Thus, the type of measurement wave is not limited. An appropriate device can be selected as the detection unit depending on the type of measurement wave.

[0125] Furthermore, in the above embodiment, an example has been described in which the calculation unit 73 is mounted on the inspection wafer 7, but a function corresponding to the calculation unit 73 may be provided in the information collecting device 9. In this case, the inspection wafer 7 may be configured to transmit image information captured by the camera 72 directly to the information collecting device 9.

[0126] In addition, although the above embodiment has been described as a case where the distance between the substrate and the annular member is measured, the functional member in question may be another member included in the substrate processing apparatus. As an example, the inspection wafer described in the above embodiment may be used to obtain the distance (spacing) between the workpiece W and an arm that transports the workpiece W in the coating / developing apparatus 2A.

[0127] From the foregoing, it will be understood that various embodiments of the present disclosure have been described herein for purposes of illustration, and that various modifications may be made without departing from the scope and spirit of the present disclosure. Accordingly, the various embodiments disclosed herein are not intended to be limiting, with the true scope and spirit being indicated by the appended claims. [Explanation of symbols]

[0128] 1...information collection system, 2...substrate processing system, 2A...coating and developing apparatus, 2B...exposure apparatus, 7...inspection wafer (inspection substrate), 9...information collection device, 21...spin chuck (substrate holding part), 25...guide ring, 26...upper end of ring, 27...cup, 70...main body, 71...light source, 72...camera, 73...calculation part, 74...optical system, 74a...mirror, 74b...prism, 75...through hole, 81...equipment mounting board, 82...battery, 100...control device, control device (control unit).

Claims

1. 1. An information collection system for acquiring information about a substrate processing apparatus having a substrate holder that holds a substrate and an annular member located on a back surface side of the substrate, a disk-shaped main body having a bottom surface that can be held by the substrate holding part; an irradiation unit fixed to the main body and configured to irradiate the annular member with a measurement wave; a detection unit fixed to the main body unit and detecting a response to the measurement wave from the irradiation unit; a calculation unit that acquires information about the gap between the main body and the annular member based on the response detected by the detection unit; An information gathering system having:

2. the irradiation unit irradiates light as the measurement wave, The information collection system according to claim 1 , wherein the detector is a camera that captures an image of the annular member illuminated with the light.

3. The light emitted from the irradiation unit is a band-shaped light, the band-like light is irradiated onto the annular member so as to extend in a direction intersecting a circumferential direction of the annular member and from a direction different from a direction perpendicular to an upper end of the annular member; The information collection system of claim 2, wherein the calculation unit identifies the irradiation position of the band-shaped light on the annular member from the image captured by the camera, and based on this information, obtains information on the distance between the main body and the annular member.

4. The information collection system of claim 3, wherein the calculation unit acquires information on the distance between the main body and the annular member based on a model showing the relationship between the irradiation position of the band-shaped light on the annular member and the distance between the main body and the annular member.

5. The information collection system of claim 3 or 4, wherein the calculation unit determines the change in the light intensity distribution in the circumferential direction of the annular member from information regarding the light intensity distribution contained in the image captured by the camera, and identifies the irradiation position of the band-shaped light on the annular member from the information on the change.

6. The upper surface of the annular member has irregularities that are repeated along the circumferential direction, The information collection system of claim 5, wherein the calculation unit uses a fast Fourier transform on the image captured by the camera to remove frequency components of light intensity that are repeated along the circumferential direction of the annular member from the image, thereby identifying the irradiation position of the band-shaped light on the annular member.

7. the annular member is located on the back surface side of the substrate, and includes a back surface liquid receiving portion having a convex portion that prevents the processing liquid supplied to the substrate from flowing around to the back surface, The information collection system according to claim 1 , wherein the gap between the main body and the annular member is the gap between the main body and the convex portion of the rear surface liquid receiving portion.

8. an information collection device capable of communicating with a control device that controls the substrate processing apparatus; a testing board capable of communicating with the information collection device, the testing board including the main body, the irradiation unit, and the detection unit; Including, The information collection system according to claim 1 , wherein the irradiation unit and the detection unit operate based on instructions from the information collection device.

9. 9. The information collection system according to claim 8, wherein the calculation unit is provided on the test board and operates based on instructions from the information collection device.

10. The information collection system according to claim 8 , wherein the calculation unit is provided in the information collection device.

11. A test board for obtaining information about a substrate processing apparatus having a substrate holder for holding a substrate and an annular member located on a back surface side of the substrate, a disk-shaped main body having a bottom surface that can be held by the substrate holding part; an irradiation unit fixed to the main body and configured to irradiate the annular member with a measurement wave; a detection unit fixed to the main body unit and detecting a response to the measurement wave from the irradiation unit; A test substrate having:

12. The testing board according to claim 11 , further comprising a calculation unit that obtains information about the gap between the main body and the annular member based on the response detected by the detection unit.

13. 1. An information collection method for acquiring information about a substrate processing apparatus having a substrate holder that holds a substrate and an annular member located on a back surface side of the substrate, the method comprising: holding a bottom surface of a disk-shaped main body portion by the substrate holding portion; irradiating the annular member with a measurement wave from an irradiation unit fixed to the main body; detecting a response to the measurement wave from the irradiation unit in a detection unit fixed to the main body unit; acquiring information about the gap between the main body and the annular member in a calculation unit based on the response detected by the detection unit; How we collect information, including:

14. In the irradiating, the irradiating unit irradiates light as the measurement wave, The information collection method according to claim 13 , wherein the detector is a camera that captures an image of the annular member illuminated with the light.

15. The light irradiated from the irradiating unit in the irradiating step is a strip-shaped light, the band-like light is irradiated onto the annular member so as to extend in a direction intersecting a circumferential direction of the annular member and from a direction different from a direction perpendicular to an upper end of the annular member; The information collection method described in claim 14, wherein, in the acquiring, the calculation unit identifies the irradiation position of the band-shaped light on the annular member from the image captured by the camera, and acquires information on the distance between the main body and the annular member based on this information.

16. The information collection method described in claim 15, wherein in the acquiring, the calculation unit acquires information on the distance between the main body portion and the annular member based on a model showing the relationship between the irradiation position of the band-shaped light on the annular member and the distance between the main body portion and the annular member.

17. 17. The information collection method of claim 15 or 16, wherein, in the acquiring step, the calculation unit determines the change in the light intensity distribution in the circumferential direction of the annular member from information relating to the light intensity distribution contained in the image captured by the camera, and identifies the irradiation position of the band-shaped light on the annular member from the information on the change.

18. The upper surface of the annular member has irregularities that are repeated along the circumferential direction, 18. The information collection method of claim 17, wherein in the acquiring step, the calculation unit uses a fast Fourier transform on the image captured by the camera to remove frequency components of light intensity that are repeated along the circumferential direction of the annular member from the image, thereby identifying the irradiation position of the band-shaped light on the annular member.

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