Frequency sweep characteristic measuring device, LiDAR device, and frequency sweep characteristic measuring method

Abstract

To provide a frequency sweeping characteristic measurement device which can accurately measure the frequency sweeping characteristic of light.SOLUTION: A frequency sweeping characteristic measurement device 2 comprises: an asymmetric MZI 120; a light receiver 121; an AD converter 122; and a second signal processing unit 123. The second signal processing unit 123 calculates the frequency sweeping characteristic of laser light output by an LD 100 by performing signal processing on a beat signal from the AD converter 122 and calculates a nonlinear component. The second signal processing unit 123 comprises: a waveform adjustment part 124; a Hilbert transformation part 125; an instantaneous phase calculation part 126; a frequency calculation part 127; a nonlinear component calculation part 128; and an LD drive signal control part 129. The waveform adjustment part 124 performs waveform adjustment such that the amplitude matches the phase on both ends of the beat signal.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a frequency sweep characteristic measurement device and a frequency sweep characteristic measurement method for measuring the frequency sweep characteristics of frequency-swept light, and also to an FMCW LiDAR device. [Background technology]

[0002] LiDAR (Light Detection and Ranging) is a technology that uses laser light to detect an object and measure the distance to that object. LiDAR has two ranging methods: TOF and FMCW. FMCW is a technology that modulates the frequency of light into a triangular wave and measures the distance to the object and its speed from the beat signal between the reference light and the received light.

[0003] The frequency of the laser light is swept by sweeping the input current in a triangular waveform. However, due to the heat dissipation characteristics of the laser and changes in carrier concentration caused by the injected current, the graph of the frequency-time characteristics (frequency sweep characteristics) draws a nonlinear curve with respect to time. When this nonlinear component is small, the frequency of the beat signal is also nearly constant, the spectral width is narrow, and the sensitivity and resolution are good (see Figure 8). On the other hand, when the nonlinear component is large, the frequency of the beat signal spreads and the spectral width expands, resulting in a decrease in sensitivity and resolution (see Figure 9).

[0004] In addition, the frequency characteristics of a laser fluctuate due to factors such as changes in the temperature of the surrounding environment. Therefore, it is necessary to constantly or periodically analyze the frequency sweep characteristics of the laser and correct them so that they become linear.

[0005] Non-Patent Document 1 describes a method for improving the linearity of frequency sweep characteristics as follows: First, an electromagnetic wave is passed through an asymmetric Mach-Zehnder interferometer and then received by a photodetector to generate a beat signal. The beat signal is then subjected to a Hilbert transform to measure the quadrature component (Q component). Next, the instantaneous phase of the beat signal is calculated by calculating the inverse tangent of the quadrature component and the original beat signal (I component). The frequency sweep characteristics of the laser are then calculated from the instantaneous phase of the beat signal using an approximation formula based on Taylor expansion. Using this calculated frequency sweep characteristic, the input signal to the laser is updated using a voltage update algorithm, correcting the frequency sweep characteristic to be linear. Here, to minimize the impact of non-ideal transitions, 20% of the beat signal at both ends is not used as input to the voltage update algorithm, and the remaining 80% is input. [Prior art documents] [Non-patent literature]

[0006] [Non-Patent Document 1] X. Zhang, J. Pouls, and MC Wu, “Laser frequency sweep linearization by iterative learning pre-distortion for FMCW LiDAR,” Optics Express, 27(7) 9965 (2019) Summary of the Invention [Problem to be solved by the invention]

[0007] However, in Non-Patent Document 1, the ROI (Region of Interest; the proportion of the frequency sweep characteristics analyzed) of the beat signal is limited to 80%. This is because the distortion (large offset and ripple) at both ends of the quadrature signal caused by the Hilbert transform causes non-ideal transitions, so the distortion at both ends of the quadrature signal is not included in the calculation. As a result, the 20% area outside the ROI cannot be sufficiently linearized, and part of the signal cannot be used for ranging. This results in a decrease in detection sensitivity.

[0008] Although the distortion at both ends of the quadrature signal can be improved by multiplying it with a window function, the effect is limited and errors occur in the measurement results. Also, since the amplitude near both ends is made close to 0, errors due to other factors such as thermal disturbance tend to become relatively large.

[0009] Quadrature detection can be used to obtain the quadrature components of the beat signal, but this requires expensive equipment such as an acousto-optic frequency shifter, which requires additional components.

[0010] SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a frequency sweep characteristic measuring device that can measure the frequency sweep characteristics of light with high precision. [Means for solving the problem]

[0011] The present invention provides a frequency sweep characteristic measurement device for measuring the frequency sweep characteristic of frequency-swept laser light, the device comprising: an asymmetric Mach-Zehnder interferometer for splitting the laser light, providing a predetermined optical path length difference, and then combining the split laser light to generate combined light; an optical receiver for receiving the combined light output from the asymmetric Mach-Zehnder interferometer, converting it into an electrical beat signal, and outputting the electrical beat signal; and a waveform adjustment unit for adjusting the waveform so that the amplitude and phase of both ends of the beat signal are identical. The waveform is adjusted by the waveform adjustment unit. a Hilbert transform unit that performs a Hilbert transform on the beat signal to calculate an orthogonal component; and the orthogonal component from the Hilbert transform unit. The waveform is adjusted by the waveform adjustment unit.The frequency sweep characteristic measuring device comprises an instantaneous phase calculating unit that calculates the instantaneous phase of the beat signal by calculating the arctangent of the beat signal, and a frequency calculating unit that calculates the frequency sweep characteristic of the laser light from the instantaneous phase and the optical path length difference.

[0012] In the present invention, the waveform adjustment unit may extract two zero-crossing points from near both ends of the beat signal, where the signs of the differential values ​​at the zero-crossing points are the same, and delete the beat signal outside the two points, thereby adjusting the waveform so that the amplitudes and phases of both ends of the beat signal are the same.

[0013] In the present invention, the asymmetric Mach-Zehnder interferometer may have a variable optical path length difference, and the waveform adjusting unit may adjust the waveform by controlling the optical path length difference so that the amplitudes and phases of both ends of the beat signal match.

[0014] In the present invention, the asymmetric Mach-Zehnder interferometer may include an optical path changeover switch that changes over a plurality of optical paths having different optical path lengths, and the optical path changeover switch may change over the optical paths to vary the optical path length difference, and the waveform adjustment unit may adjust the waveform so that both ends of the beat signal have the same amplitude and phase by controlling the selection of the optical path by the optical path changeover switch.

[0015] The present invention also provides an FMCW type LiDAR device having an LD that emits laser light and the frequency sweep characteristic measurement device described in claims 1 to 4, The LiDAR device is characterized by having a laser drive signal control unit that calibrates the drive signal of the LD so as to reduce the nonlinear component of the laser light based on the frequency sweep characteristic of the laser light calculated by the frequency sweep characteristic measurement device.

[0016] The present invention also provides a frequency sweep characteristics measurement method for measuring the frequency sweep characteristics of frequency-swept laser light, comprising the steps of: branching the laser light, providing a predetermined optical path length difference, and then combining the branched laser light to generate combined light; receiving the combined light and converting it into a beat signal, which is an electrical signal; adjusting a waveform so that the amplitudes and phases of both ends of the beat signal match; performing a Hilbert transform on the waveform-adjusted beat signal to calculate an orthogonal component; calculating the arc tangent of the orthogonal component and the waveform-adjusted beat signal to calculate the instantaneous phase of the beat signal; and calculating the frequency sweep characteristics of the laser light from the instantaneous phase and the optical path length difference. [Effects of the Invention]

[0017] According to the present invention, the frequency sweep characteristics of light can be measured with high precision. [Brief explanation of the drawings]

[0018] [Figure 1] 1 is a diagram showing the configuration of a frequency sweep characteristic measurement apparatus according to a first embodiment. [Figure 2] 10 is a graph showing the analysis results of frequency sweep characteristics. [Figure 3] 10 is a graph showing the analysis results of frequency sweep characteristics. [Figure 4] 10A and 10B are diagrams showing a method for adjusting the waveform so that both ends of a beat signal are continuous. [Figure 5] FIG. 10 is a diagram showing the configuration of a frequency sweep characteristic measurement apparatus according to a second embodiment. [Figure 6] A diagram showing the configuration of the asymmetric MZI220. [Figure 7] Graph showing the relationship between ΔL and the maximum value of νnl. [Figure 8] FIG. 10 is a diagram illustrating a case where the nonlinear component of the frequency sweep characteristic is small. [Figure 9] FIG. 10 is a diagram illustrating a case where the nonlinear component of the frequency sweep characteristic is large. DETAILED DESCRIPTION OF THE INVENTION

[0019] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0020] (First embodiment) FIG. 1 is a diagram showing the configuration of an FMCW-LiDAR device according to a first embodiment, which is capable of measuring frequency sweep characteristics in real time and calibrating the frequency sweep characteristics of the FMCW-LiDAR device to be linear.

[0021] 1, the FMCW-LiDAR device of the first embodiment is composed of a LiDAR device 1 and a frequency sweep characteristic measurement device 2. The LiDAR device 1 is composed of an LD (laser diode) 100, optical couplers 101 to 103, an optical transmitting antenna 104, an optical receiving antenna 105, a photoreceiver 106, an AD converter 107, a first signal processing unit 108, a DA converter 109, and an LD driver circuit 110. The frequency sweep characteristic measurement device 2 is composed of an asymmetric MZI (asymmetric Mach-Zehnder interferometer) 120, a photoreceiver 121, an AD converter 122, and a second signal processing unit 123.

[0022] (Configuration of LiDAR device 1) First, each component of the LiDAR device 1 will be described.

[0023] The LD 100 is a frequency-variable laser diode that emits laser light. The frequency is controlled by the LD driver circuit 110, and the time characteristic of the frequency (frequency sweep characteristic) is controlled so that a triangular shape is periodically repeated. In other words, the frequency is controlled so that a section in which the frequency increases linearly with time and a section in which the frequency decreases linearly with time are repeated. The wavelength band of the laser light is arbitrary, for example, the infrared band.

[0024] The optical coupler 101 is an optical device that splits the laser light from the LD 100 into two beams. One of the split laser beams is input to the optical coupler 102, and the other is input to the asymmetric MZI 120.

[0025] The optical coupler 102 is an optical device similar to the optical coupler 101, and is an optical device that splits the laser light from the optical coupler 101 into a transmission light and a reference light. The transmission light is input to an optical transmitting antenna 104, and the reference light is input to an optical coupler 103.

[0026] The optical transmitting antenna 104 is an optical device that irradiates the transmitted light from the optical coupler 102 onto an object.

[0027] The optical receiving antenna 105 is an optical device that receives the transmitted light (received light) reflected by the object. The received light is input to the optical coupler 103.

[0028] The optical coupler 103 is an optical device that combines the reference light from the optical coupler 102 and the received light from the optical receiving antenna 105 and outputs the combined light.

[0029] The photoreceiver 106 is a device that receives the combined light from the optical coupler 103, converts it into an electrical signal, and generates and outputs a beat signal generated by interference between the reference light and the received light. The photoreceiver 106 is, for example, a Ge photodiode. The photoreceiver 106 is preferably a differential balanced detector. Alternatively, it is preferable to insert a filter that cuts DC components between the photoreceiver 106 and the AD converter 107.

[0030] The AD converter 107 is a device that converts the beat signal from the photodetector 106 from an analog signal to a digital signal and outputs the digital signal.

[0031] The first signal processing unit 108 calculates the distance to the object and the relative velocity of the object by processing the beat signal from the AD converter 107. It also generates an LD drive signal for driving the LD 100. The first signal processing unit 108 has a Fourier transform unit 111, a peak detection unit 112, a distance / velocity calculation unit 113, and an LD drive reference signal generation unit 114. The functions and operations of these units will be described later.

[0032] The DA converter 109 is a device that converts the LD drive signal from the first signal processing unit 108 from digital to analog and outputs the signal.

[0033] The LD drive circuit 110 is a circuit that controls the frequency of the laser light emitted by the LD 100 based on the LD drive signal from the first signal processing unit 108. Specifically, the frequency is controlled by controlling the input current to the LD 100.

[0034] (Configuration of frequency sweep characteristic measuring device 2) Next, each component of the frequency sweep characteristic measurement apparatus 2 will be described.

[0035] The asymmetric MZI 120 is an optical device that splits the laser light from the optical coupler 101 into two beams, gives them a predetermined optical path difference ΔL, and then combines them.

[0036] The photodetector 121 is a device that receives the combined light from the asymmetric MZI 120, converts it into an electrical signal, and generates and outputs a beat signal resulting from interference between two lights having a predetermined optical path length difference ΔL. The photodetector 121 is, for example, a Ge photodiode. It is preferable that the photodetector 121 be a differential balanced detector. Alternatively, it is preferable to insert a filter that cuts DC components between the photodetector 121 and the AD converter 122.

[0037] The asymmetric MZI 120 and the photodetector 121 may be packaged together as a single optical integrated circuit chip. This allows for simplification of the device configuration and cost reduction. The optical waveguide in the optical integrated circuit is made of Si, SiN, or the like, and the photodetector 121 is a Ge photodiode. Part of the components from the asymmetric MZI 120 to the photodetector 121 may be integrated into an optical integrated circuit.

[0038] The AD converter 122 is a device that converts the beat signal from the photodetector 121 from an analog signal to a digital signal and outputs the digital signal.

[0039] The second signal processing unit 123 calculates the frequency sweep characteristics of the laser light output from the LD 100 and calculates the nonlinear component by processing the beat signal from the AD converter 122. The second signal processing unit 123 has a waveform adjustment unit 124, a Hilbert transform unit 125, an instantaneous phase calculation unit 126, a frequency calculation unit 127, a nonlinear component calculation unit 128, and an LD drive signal control unit 129. The functions and operations of these units will be described later.

[0040] (Operation of LiDAR device 1) Next, a description will be given of the operation of the FMCW-LiDAR device of the first embodiment. First, a description will be given of the operation of distance measurement by the LiDAR device 1.

[0041] The LD 100 is driven by the LD drive circuit 110 based on the LD drive signal from the first signal processing unit 108, and the frequency sweep characteristics of the laser light emitted by the LD 100 are controlled so as to periodically repeat a triangular shape. Here, the LD drive signal is an LD drive reference signal generated by the LD drive reference signal generation unit 114, calibrated by the LD drive signal control unit 129 of the second signal processing unit 123. The LD drive reference signal is a signal whose voltage value repeatedly changes in a triangular shape.

[0042] Next, laser light from LD 100 is split into two by optical coupler 101, and further split into reference light and transmitted light by optical coupler 102. The transmitted light is irradiated onto an external object from optical transmitting antenna 104. The transmitted light is reflected by the object, and the reflected light, that is, received light, is received by optical receiving antenna 105. Then, the reference light split by optical coupler 102 and the received light from optical receiving antenna 105 are combined by optical coupler 103, and an optical receiver 106 generates a beat signal, which is an electrical signal.

[0043] Next, the beat signal is converted from an analog signal to a digital signal by an AD converter 107. Then, the signal is processed by a first signal processing unit 108 to calculate the distance to the object and the relative velocity of the object. Specifically, the signal processing is as follows.

[0044] First, the Fourier transform unit 111 performs a Fourier transform on the beat signal to calculate the frequency spectrum of the beat signal. Next, the peak detection unit 112 detects the frequency of the peak in the frequency spectrum. This determines the beat frequency in the interval where the frequency increases linearly and the beat frequency in the interval where the frequency decreases linearly. Then, the distance / velocity calculation unit 113 calculates the distance to the object and the relative velocity of the object from the frequencies of the two beat signals.

[0045] (Operation of frequency sweep characteristic measuring device 2) Next, the operation of the frequency sweep characteristic measurement apparatus 2 will be described.

[0046] One of the laser beams split into two by the optical coupler 101 is passed through an asymmetric MZI 120, and then received by a photodetector 121 to generate a beat signal. The beat signal is then converted from an analog signal to a digital signal by an AD converter 122.

[0047] Next, the waveform is adjusted by the waveform adjusting unit 124 so that the waveform is continuous at both ends of the beat signal, that is, so that the amplitude and phase match at both ends. A specific method of waveform adjustment is as follows.

[0048] First, high-frequency noise in the beat signal is removed by a moving average. Then, two adjacent zero-crossing points (points where the amplitude is 0) are extracted near both ends of the beat signal (see FIG. 4(a)). The zero-crossing points can be easily detected by using a balanced type photodetector 121 or by using a DC block filter to cut the DC component.

[0049] Next, calculate the differential values ​​of the beat signal at the four extracted zero-crossing points. Then, select two of the four zero-crossing points whose differential values ​​have the same sign (see Figure 4(b)). It does not matter whether the two points have a positive sign or a negative sign. In the example of Figure 4(b), select 1 and 3, or 2 and 4.

[0050] Next, the measurement points outside the two selected points are deleted from the beat signal (see Figure 4(c)). In the example in Figure 4(c), two points 1 and 3 are selected, and the measurement points outside of them are deleted. This makes it possible to adjust the waveform so that the amplitude and phase match at both ends of the beat signal. It also makes it possible to minimize the area where the beat signal waveform is cut.

[0051] The method for adjusting the waveform of the beat signal is not limited to the above method; any method can be used to extract points near both ends of the beat signal where the amplitude and phase match, and then delete the parts outside those points. However, the above method makes it easy to extract points near both ends of the beat signal where the amplitude and phase match. It is not necessary for the amplitude and phase to match perfectly; some error is acceptable as long as the effects of the present invention are achieved. For example, it is sufficient to ensure that the absolute value of the amplitude difference between both ends is 1% or less of the maximum amplitude, and the absolute value of the phase difference is 0.01π or less.

[0052] Next, the beat signal is subjected to a Hilbert transform by the Hilbert transform unit 125 to calculate the quadrature component (Q component). Here, the waveform of the beat signal is adjusted before the Hilbert transform so that both ends of the beat signal are continuous, thereby reducing distortion at both ends of the Q component and distortion at the boundary between the frequency up section and the frequency down section.

[0053] Next, the instantaneous phase φb(t) of the beat signal is calculated by the instantaneous phase calculation unit 126. The instantaneous phase φb(t) of the beat signal can be obtained by calculating the arctangent of the original beat signal (I component) and the Q component of the beat signal. In other words, it can be obtained by calculating φb(t)=arctan(Q / I). Note that the instantaneous phase of the beat signal obtained in this way has a waveform that is folded over at ±π, so it is subjected to unwrapping processing.

[0054] Next, the frequency calculation unit 127 calculates the instantaneous frequency v(t) of the beat signal, i.e., the frequency sweep characteristic of the beat signal. The instantaneous frequency v(t) is obtained by differentiating the instantaneous phase φb(t), and is given by 2πv(t)=d(φb(t)) / dt. Here, by performing a Taylor expansion of φb(t-τ) with respect to τ to perform a first-order approximation, v(t)=φb(t) / (2πτ) is obtained. τ is the propagation delay time in the asymmetric MZI 120, and τ=ΔL / c (c is the speed of light). τ is 1 ns to 100 ns, which is sufficiently small, so this approximation can be performed. v(t) is calculated using this approximation formula.

[0055] Next, the nonlinear component of the instantaneous frequency is calculated by the nonlinear component calculation unit 128. v(t) is expressed as v(t) = γt + vnl(t). Here, γ is the frequency change rate, vnl(t) is the nonlinear component of v(t), and γ is known. Therefore, the nonlinear component vnl(t) of v(t) is calculated from this equation.

[0056] Next, the LD drive signal control unit 129 calibrates the LD drive reference signal to generate the LD drive signal. Specifically, the LD drive signal is generated by adding a distortion corresponding to νnl(t) to the LD drive reference signal. This allows the nonlinear components in the frequency sweep characteristics of the laser light emitted by the LD 100 to be subtracted in advance. When the LD 100 is driven based on the LD drive signal calibrated in this way, the nonlinear components in the frequency sweep characteristics of the laser light can be reduced.

[0057] The LD drive reference signal may be calibrated constantly or as needed.

[0058] As described above, in the FMCW-LiDAR device of the first embodiment, the waveform adjustment unit 124 adjusts the waveform so that the beat signal is continuous at both ends, thereby enabling accurate measurement of the frequency sweep characteristics of the laser beam. Therefore, by calibrating the sweep frequency of the laser beam using the measured frequency sweep characteristics, the linearity of the sweep frequency of the laser beam can be improved, thereby improving ranging performance. Furthermore, since the ROI is wider than in conventional methods, the range over which the laser beam can be calibrated is wider, thereby improving the sensitivity and distance resolution of the FMCW-LiDAR device. Furthermore, since the frequency sweep characteristics of the laser beam can be measured without using expensive equipment such as a frequency shifter, costs can be reduced.

[0059] Next, the analysis results of the beat signal related to the first embodiment will be described.

[0060] γ=1.0GHz / 125μs, νnl(t)=9×10 5 sin[2π 4×10 3 A beat signal V(t) ∝ cos[2πν(t)τ] was generated where V(t) ∝ cos[2πν(t)τ], and the frequency sweep characteristics of the laser beam were analyzed. Here, by adjusting τ, beat signals with discontinuous and continuous ends were generated. The fundamental oscillation wavelength of the laser beam was 1550 nm. Figures 2 and 3 are graphs showing the analysis results of the frequency sweep characteristics of the laser beam and the analysis results of the nonlinear components. Figure 2 shows the case where the beat signal is discontinuous at both ends, and Figure 3 shows the case where the beat signal is continuous at both ends.

[0061] As shown in Figure 2, when the beat signal is discontinuous at both ends, a steep offset occurs at the boundary between the frequency up and down sections and at both ends, and ripples occur continuously before and after the offset. In other words, it was found that the frequency sweep characteristics of the laser beam cannot be measured accurately at the boundary between the frequency up and down sections and at both ends. As a result, it was found that the offset and ripple sections cannot be corrected so that the frequency sweep characteristics of the laser beam become linear.

[0062] On the other hand, when the beat signal is continuous at both ends, no offset or ripple was observed, as shown in Figure 3. Therefore, it was found that the first embodiment can measure the frequency sweep characteristics of a laser beam with high accuracy, and can correct the frequency sweep characteristics of a laser beam linearly over a sufficiently wide range.

[0063] (Second embodiment) The FMCW-LiDAR device of the second embodiment is a modification of the mechanism for making both ends of the beat signal continuous in the FMCW-LiDAR device of the first embodiment. As shown in Fig. 5, the FMCW-LiDAR device of the second embodiment is configured by changing the asymmetric MZI 120 and waveform adjustment unit 124 in the FMCW-LiDAR device of the first embodiment to an asymmetric MZI 220 and waveform adjustment unit 224. The other configurations are the same as those of the first embodiment.

[0064] The asymmetric MZI 220 is an asymmetric MZI that can control the optical path length difference. An example of a control mechanism for the optical path length difference is shown in Fig. 6. As shown in Fig. 6, the asymmetric MZI 220 has optical couplers 201 to 203 and an optical path changeover switch 204.

[0065] The optical coupler 201 is an optical device that splits the laser light from the optical coupler 101 into two. One of the split laser lights is input to an optical path changeover switch 204, and the other is input to an optical coupler 203.

[0066] The optical path changeover switch 204 is an optical device that selects one of a plurality of optical paths having different optical path lengths and outputs the laser light from the optical coupler 201 to that optical path, and the selection of the optical path is controlled by the waveform adjustment unit 124. The optical path changeover switch 204 is, for example, a switch that combines a multimode interference coupler and a phase shifter, or a switch that uses the resonance of a ring resonator. The laser light from the optical path selected by the optical path changeover switch 204 is input to the optical coupler 202.

[0067] Optical coupler 202 is an optical device that is connected to multiple optical paths from the optical path changeover switch and outputs laser light input from those optical paths to one optical path. Optical coupler 202 is, for example, a multi-mode interference coupler (MMI) or a star coupler. The laser light from optical coupler 202 is input to optical coupler 203.

[0068] The optical coupler 203 is an optical device that combines the laser light from the optical coupler 201 and the laser light from the optical coupler 202 and outputs the combined light. The combined light is input to the photodetector 121.

[0069] The waveform adjustment unit 224 generates and outputs a control signal that controls the selection of an optical path in the optical path changeover switch 204. Then, based on the control signal, it controls the selection of an optical path in the optical path changeover switch 204 so that the beat signal is continuous at both ends. Specifically, the control signal for the optical path changeover switch 204 is generated as follows, and the selection of an optical path in the optical path changeover switch 204 is controlled by the control signal.

[0070] There are N+1 optical paths that can be selected by the optical path switching switch 204, and the optical path lengths are arranged in ascending order of 0, 1, ..., i, ..., N. Then, it is assumed that a control signal to select the i-th optical path is output from the waveform adjusting unit 124, and the i-th optical path is selected by the optical path switching switch 204 based on the control signal.

[0071] Here, the step size of the optical path length (the difference between the i-th and (i+1)-th optical path lengths) should be set to a / 2 or less, where a is the range of the optical path length difference where no offset or ripple occurs (i.e., the range of the optical path length difference where the maximum value of the nonlinear component νnl(t) of the instantaneous frequency is minimum).

[0072] First, high frequency noise is removed by a moving average from the beat signal from the AD converter 122. Then, the error δ between both ends of the beat signal (the difference in amplitude between both ends) is detected.

[0073] Next, it is determined whether the absolute value of the error δ is equal to or less than a predetermined value. The error δ may be set so that both ends of the beat signal are sufficiently continuous. For example, it may be set to a value such that the absolute value of the amplitude difference between both ends is 1% or less of the maximum amplitude.

[0074] If the absolute value of the error δ is equal to or less than a predetermined value, the control signal is not updated, and the beat signal is output to the Hilbert transformer 125 and the instantaneous phase calculator 126 .

[0075] On the other hand, if the absolute value of the error δ is greater than the predetermined value, differential values ​​a1 and a2 at both ends of the beat signal are calculated, and sgn{δ×sgn(a1·a2)} is calculated.

[0076] Next, the control signal to select the i-th optical path is updated by setting i=i+sgn{δ×sgn(a1·a2)}. Thereafter, the control signal is updated repeatedly until the absolute value of the error δ becomes equal to or less than a predetermined value.

[0077] Of course, it is not necessary to update the control signal in this way, and i may simply be increased by 1 and repeated until the absolute value of the error δ becomes equal to or less than a predetermined value.

[0078] As described above, in the second embodiment, the asymmetric MZI 220 is one capable of controlling the optical path length difference, and the waveform adjustment unit 224 controls the optical path length difference so that both ends of the beat signal become continuous.

[0079] Next, the analysis results of the beat signal relating to the second embodiment will be described.

[0080] γ=1.0GHz / 125μs, νnl(t)=9×10 5 sin[2π 4×10 3 t], and the optical path length difference ΔL in the asymmetric MZI was swept to calculate the maximum value of νnl.

[0081] Figure 7 is a graph showing the relationship between ΔL and the maximum value of νnl. As shown in Figure 7, peaks where the maximum value of νnl decreases appear approximately every 20 cm, and it was found that the width when the maximum value of νnl decreases is approximately 8 mm. When the width when the maximum value of νnl decreases deviates from this width, the maximum value of νnl increases by more than an order of magnitude. This is because both ends of the beat signal become discontinuous, causing a large offset and resulting in measurement errors. Furthermore, in this case, it was found that the increment width of the optical path length in the asymmetric MZI 220 should be 4 mm or less.

[0082] If the effective refractive index of the optical fiber is 1.46, the time required to pass through 8 mm of optical fiber is approximately 39 ps. Therefore, it was found that if the propagation delay time in the asymmetric MZI220 is controlled to fall within the range of 39 ps, both ends of the beat signal can be made continuous, thereby reducing measurement errors.

[0083] (Variation) In the first and second embodiments, an example is shown in which the frequency sweep characteristic measurement device of the present invention is applied to an FMCW-LiDAR device, but the present invention can be applied to any example in which measurement of frequency sweep characteristics is required. For example, the present invention can be applied to a spectrometer. Furthermore, in the first and second embodiments, the frequency is swept linearly, but the present invention can also be applied to cases other than linear. [Industrial Applicability]

[0084] The frequency sweep characteristic measuring device of the present invention can be used in LiDAR and spectrometers, and can be used to improve the linearity of frequency sweep characteristics. [Explanation of symbols]

[0085] 1:LiDAR device 2: Frequency sweep characteristic measuring device 100:LD 101-103, 201-203: Optical couplers 104: Optical transmitting antenna 105: Optical receiving antenna 106, 121: Receiver 107, 122: AD converter 108: First signal processing unit 109: DA converter 110: LD drive circuit 111: Fourier transform section 112: Peak detection unit 113: Distance / speed calculation section 114: LD drive reference signal generation unit 120, 220: Asymmetric MZI 123: Second signal processing unit 124, 224: Waveform adjustment section 125: Hilbert transformer 126: Instantaneous phase calculation section 127: Frequency calculation section 128: Nonlinear component calculation unit 129: LD drive signal control unit 204: Optical path changeover switch

Claims

1. A frequency sweep characteristic measuring device for measuring the frequency sweep characteristics of frequency-swept laser light, an asymmetric Mach-Zehnder interferometer that splits the laser light, gives a predetermined optical path length difference, and then combines the split laser light to generate combined light; a photodetector that receives the combined light output from the asymmetric Mach-Zehnder interferometer, converts the combined light into a beat signal, which is an electrical signal, and outputs the beat signal; a waveform adjusting unit that adjusts the waveform so that the amplitude and phase of both ends of the beat signal match; a Hilbert transform unit that performs a Hilbert transform on the beat signal whose waveform has been adjusted by the waveform adjustment unit to calculate an orthogonal component; an instantaneous phase calculation unit that calculates an instantaneous phase of the beat signal by calculating the arctangent of the quadrature component from the Hilbert transform unit and the beat signal whose waveform has been adjusted by the waveform adjustment unit; a frequency calculation unit that calculates a frequency sweep characteristic of the laser light from the instantaneous phase and the optical path length difference; A frequency sweep characteristic measuring device comprising:

2. 2. The frequency sweep characteristics measurement apparatus according to claim 1, wherein the waveform adjustment section extracts two zero-crossing points near both ends of the beat signal, where the signs of the differential values ​​at the zero-crossing points are the same, and deletes the beat signal outside the two points, thereby adjusting the waveform so that the amplitudes and phases of both ends of the beat signal are the same.

3. the asymmetric Mach-Zehnder interferometer has a variable optical path length difference; 2. The frequency sweep characteristic measurement apparatus according to claim 1, wherein the waveform adjustment unit adjusts the waveform by controlling the optical path length difference so that the amplitude and phase of both ends of the beat signal match.

4. the asymmetric Mach-Zehnder interferometer has an optical path changeover switch that changes over a plurality of optical paths having different optical path lengths, and the optical path changeover switch changes over the optical paths, thereby making the optical path length difference variable; 4. The frequency sweep characteristic measurement apparatus according to claim 3, wherein the waveform adjustment unit adjusts the waveform so that both ends of the beat signal have the same amplitude and phase by controlling the selection of the optical path in the optical path changeover switch.

5. An FMCW type LiDAR device having an LD that emits laser light and the frequency sweep characteristic measurement device according to any one of claims 1 to 4, a laser drive signal control unit that calibrates the drive signal of the LD based on the frequency sweep characteristic of the laser beam calculated by the frequency sweep characteristic measurement device so as to reduce a nonlinear component of the laser beam; A LiDAR device characterized by:

6. A frequency sweep characteristic measurement method for measuring the frequency sweep characteristics of frequency-swept laser light, comprising: splitting the laser light to give a predetermined optical path length difference, and then combining the split laser light to generate combined light; receiving the combined light and converting it into a beat signal, which is an electrical signal; adjusting the waveform so that both ends of the beat signal have the same amplitude and phase; the waveform-adjusted beat signal is subjected to a Hilbert transform to calculate an orthogonal component; calculating an arctangent of the quadrature component and the waveform-adjusted beat signal to calculate an instantaneous phase of the beat signal; calculating a frequency sweep characteristic of the laser beam from the instantaneous phase and the optical path length difference; A frequency sweep characteristic measuring method comprising:

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