Tactile sensors and sensing systems

Abstract

The tactile sensor includes a pressure-sensitive section that contains magnetically responsive particles and a measuring section that measures a response amount corresponding to a change in density distribution of the magnetically responsive particles caused by an external force applied to the pressure-sensitive section.

Description

[Technical Field]

[0001] The present invention relates to a tactile sensor and a sensing system. [Background technology]

[0002] In recent years, automation using robots has been promoted to improve productivity and alleviate labor shortages. In particular, replacing manual work with robots has attracted attention. Accordingly, there is an increasing demand for tactile sensors that can detect the force that a robot applies to an object that is the target of work. Because tactile sensors come into physical contact with objects, they are at risk of failure due to deterioration, so ease of replacement is important for tactile sensors.

[0003] For example, WO2019 / 049888 discloses a tactile sensor. This tactile sensor comprises a non-magnetic flexible layer formed on a substrate, a magnetic flexible layer in which unmagnetized particles having a magnetic permeability higher than that of the non-magnetic flexible layer are dispersed and formed so as to be supported by the non-magnetic flexible layer, a coil formed on the substrate whose inductance changes based on the displacement of the particles due to an external force acting on the magnetic flexible layer, and an inductance measurement circuit that measures the change in inductance of the coil. Summary of the Invention [Problem to be solved by the invention]

[0004] The tactile sensor of WO2019 / 049888 measures the amount of displacement, so there are limitations to the measurement sensitivity.

[0005] An object of the present invention is to improve the measurement sensitivity of a tactile sensor. [Means for solving the problem]

[0006] One aspect of the present invention is Equipped with a pressure-sensitive part, the pressure-sensitive portion includes magnetically responsive particles; a measuring unit that measures a response amount corresponding to a change in density distribution of magnetically responsive particles caused by an external force applied to the pressure-sensitive unit; It is a tactile sensor. [Brief explanation of the drawings]

[0007] [Figure 1] 1 is a block diagram showing the configuration of a tactile sensor system according to an embodiment of the present invention; [Figure 2] FIG. 2 is a diagram illustrating the configuration of a tactile sensor according to the present embodiment. [Figure 3] 2B is a cross-sectional view of the tactile sensor of FIG. 2A taken along a dashed dotted line C1. [Figure 4] FIG. 2 is an explanatory diagram of a measurement process according to the present embodiment. [Figure 5] FIG. 10 is a diagram showing an example of a screen displaying measurement results according to the present embodiment. [Figure 6] FIG. 10 is a diagram illustrating the configuration of a tactile sensor according to a first modified example. [Figure 7] FIG. 10 is a cross-sectional view of a pressure-sensitive portion of a second modified example. [Figure 8] FIG. 10 is a diagram illustrating an example of application example 4 of modification example 3. [Figure 9] FIG. 10 is a diagram showing an example of an application example 6 of the modified example 3. DETAILED DESCRIPTION OF THE INVENTION

[0008] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. In the drawings for explaining the embodiment, the same components are generally designated by the same reference numerals, and repeated description thereof will be omitted.

[0009] (1) Configuration of the tactile sensor system The configuration of the tactile sensor system will be described. Fig. 1 is a block diagram showing the configuration of the tactile sensor system of this embodiment. Fig. 2 is a diagram showing the configuration of the tactile sensor of this embodiment. Fig. 3 is a cross-sectional view of the tactile sensor of Fig. 2A taken along the dashed dotted line C1. FIG. 2A is a perspective view of the tactile sensor 1. FIG. FIG. 2B is an XY plan view of the measurement unit 11.

[0010] As shown in FIG. 1, the tactile sensor system includes a tactile sensor 1 and a display device 2.

[0011] As shown in FIGS. 1 to 3, the tactile sensor 1 includes a pressure-sensitive section 10, a measuring section 11, a control section 12, a power source 13, and a cover 14. The pressure-sensing unit 10, the cover 14, the measuring unit 11, and the control unit 12 are stacked along the Z axis (FIG. 2A).

[0012] The pressure-sensitive section 10 is configured to show a reaction according to an external force applied from outside the tactile sensor 1. Specifically, the pressure-sensitive part 10 includes a magnetic layer but does not include a non-magnetic layer. The magnetic layer includes magnetically responsive particles. The magnetically responsive particles are in a foamed state. The magnetic layer is a composite material mixture of a matrix and a magnetically responsive material. The pressure-sensitive portion 10 is formed by dispersing the magnetically responsive material in the matrix.

[0013] The base material is a predetermined flexible material. The material of the base material is, for example, at least one of the following: Polyurethane foam Silicone elastomer

[0014] The magnetically responsive material is a base material mixed with magnetically responsive particles at a certain weight ratio. Magnetically responsive particles are fine particles of magnetic materials (e.g., iron) and conductors (e.g., aluminum, copper, or carbon). Magnetically responsive particles have the property of changing magnetic fields. This property depends on the type and diameter of the magnetically responsive particles and the strength of the magnetic field to which they are subjected.

[0015] Magnetically responsive materials have the property of being affected by a magnetic field. When an external force is applied to the magnetically responsive material, the magnetically responsive material is compressed under the influence of the external force. When the magnetically responsive material is compressed, the density distribution of the magnetically responsive particles within the magnetically responsive material changes. When the density distribution of the magnetically responsive particles changes, the magnetic field also changes.

[0016] The measuring section 11 is configured to measure the magnitude of the external force (hereinafter referred to as "amount of external force acting") at each position on the pressure sensitive section 10 based on the change in density distribution of the magnetically responsive material. Specifically, it includes a measuring element 111 and a measuring circuit 112 . The measuring element 111 includes a coil 1111 and a capacitor 1112 . The coil 1111 and the capacitor 1112 are connected in parallel with the measurement circuit 112. That is, the coil 1111, the capacitor 1112, and the measurement circuit 112 form an LC parallel resonant circuit. The measurement circuit 112 applies an AC current to the coil 1111 and the capacitor 1112. This causes the impedance to become infinite at a certain frequency, causing a resonance phenomenon between the coil 1111 and the capacitor 1112. The measurement circuit 112 utilizes this resonance phenomenon to measure the amount of change in inductance of the coil 1111 (hereinafter referred to as "inductance change amount" ΔL).

[0017] The control unit 12 is configured to calculate a physical quantity based on the response amount (for example, the amount of inductance change ΔL) measured by the measurement unit 11. The physical quantity is the amount of external force acting on the pressure sensitive unit 10 at each position. The physical quantity includes, for example, at least one of the following: Newton force [N] Pressure [Pa] Pressing length [cm]

[0018] The control unit 12 is configured to generate a display signal for displaying the physical quantity calculated by the control unit 12 on the display device 2, and to transmit the display signal to the display device 2.

[0019] The power supply 13 is configured to supply power to the measurement unit 11 and the control unit 12 .

[0020] The cover 14 is located between the pressure-sensing unit 10 and the measuring unit 11 . The cover 14 is configured to prevent an external force applied to the pressure-sensing unit 10 from acting on the measuring unit 11 . The material of the cover 14 includes, for example, at least one of the following: Acrylic resin ·PLA (Poly-Lactic Acid) resin ·ABS (Acrylonitrile Butadiene Styrene) resin Polyethylene resin Polyethylene terephthalate resin

[0021] The display device 2 is connected to the control unit 12 by wire or wirelessly. The display device 2 is configured to display an image according to a display signal transmitted from the control unit 12 (for example, an image showing a physical quantity calculated by the control unit 12). The display device 2 is, for example, at least one of the following: Displays (e.g., liquid crystal displays or organic electroluminescence (EL) displays) Personal computers Smartphone ·tablet

[0022] (2) Measurement process The measurement process of this embodiment will be described below. Fig. 4 is an explanatory diagram of the measurement process of this embodiment. Fig. 5 is a diagram showing an example of a screen displaying the measurement results of this embodiment.

[0023] As shown in FIG. 4, when an external force F is applied to the pressure-sensitive section 10, the density distribution of the magnetically responsive material contained in the magnetic layer 101 changes (FIG. 4A). When the density distribution of the magnetically responsive material changes, the magnetic field H changes (Figure 4B). When the magnetic field H changes, the response (resonance frequency) of the measuring element 111 changes.

[0024] In this case, the amount of change in inductance ΔL of the coil 1111 is expressed by Equation 1.

number

[0025] The measurement circuit 112 measures the amount of inductance change ΔL based on the resonant frequency of the coil 1111 and the capacitor 1112 based on Equation 1. The control unit 12 calculates the amount of external force acting on the pressure sensitive unit 10 at each position on the pressure sensitive unit 10 based on the amount of inductance change ΔL measured by the measurement circuit 112. The control unit 12 generates a display signal for displaying an image showing the calculation result of the physical quantity.

[0026] As shown in FIG. 5A, when an external force is applied to the area X1Y2 of the pressure sensitive section 10, the control section 12 calculates the amount of external force acting on the pressure sensitive section 10 for each position. The control unit 12 generates a display signal for displaying an image showing the result of the calculation, and transmits the display signal to the display device 2.

[0027] As shown in FIG. 5B, the display device 2 displays an image corresponding to the display signal. The image includes a simulated image of the pressure sensitive part 10 . The simulated image is divided into multiple regions (four regions in FIG. 5B). The simulated image is displayed in a display mode (for example, at least one of a color and a pattern) according to the calculation result of the control unit 12 (that is, the amount of external force acting at each position on the pressure-sensitive unit 10).

[0028] (3) Summary of this embodiment According to this embodiment, the amount of response according to the change in density distribution of the magnetically responsive particles is measured. This allows the sensitivity of the tactile sensor 1 to be improved.

[0029] According to this embodiment, the response amount (inductance change amount ΔL) may be measured using an LC parallel resonant circuit formed by the coil 1111 and the capacitor 1112. This allows the accuracy and speed of the tactile sensor 1 to be improved.

[0030] According to this embodiment, the magnetically responsive particles may be in a foamed state. This allows the sensitivity of the tactile sensor 1 to be further improved.

[0031] According to this embodiment, the pressure-sensitive part 10 does not need to include a non-magnetic layer. This allows the sensitivity of the tactile sensor 1 to be further improved.

[0032] According to this embodiment, a control unit 12 may be provided that calculates a physical quantity based on the response quantity. This allows the desired physical quantity to be obtained.

[0033] According to this embodiment, the physical quantity may be the amount of external force acting on the pressure sensitive section 10 at each position. This makes it possible to obtain the distribution of the amount of external force applied to the pressure-sensitive section 10.

[0034] According to this embodiment, a cover 14 disposed between the pressure-sensing unit 10 and the measuring unit 11 may be provided. This makes it possible to prevent damage to the measuring unit 11 due to external forces.

[0035] (4) Variations A modification of this embodiment will now be described.

[0036] (4-1) Variation 1 A first modification of this embodiment will be described below. The first modification of this embodiment is an example in which the measuring element is a magnet and a Hall element.

[0037] (4-1-1) Configuration of the tactile sensor system of Modification 1 The following describes the configuration of the tactile sensor system of Modification 1. Fig. 6 is a diagram showing the configuration of the tactile sensor of Modification 1.

[0038] As shown in FIG. 6, the tactile sensor 1 includes a pressure-sensitive unit 10, a measuring unit 11, a control unit 12, a power source 13, and a cover 14. The pressure-sensing unit 10, the control unit 12, the power supply 13 and the cover 14 are the same as those in FIG.

[0039] The measuring section 11 is configured to measure the amount of external force acting on each position of the pressure-sensitive section 10 based on the change in density distribution of the magnetically responsive material. Specifically, it includes a measuring element 111 and a measuring circuit 112 . The measuring element 111 includes a magnet 1113 and a Hall element 1114 .

[0040] The Hall element 1114 is connected to the measurement circuit 112 . The Hall element 1114 generates a voltage corresponding to the magnetic field generated by the magnet 1113 .

[0041] The measurement circuit 112 measures the amount of change ΔB in the magnetic field of the Hall element 1114 (hereinafter referred to as "magnetic field change amount"). The magnetic field change amount ΔB is an example of a response amount.

[0042] (4-1-2) Measurement process of variation 1 The measurement process of the first modification will be described.

[0043] As shown in FIG. 4, when an external force F is applied to the pressure-sensitive section 10, the density distribution of the magnetically responsive material contained in the magnetic layer 101 changes (FIG. 4A). When the density distribution of the magnetically responsive material changes, the magnetic field H changes (Figure 4B). When the magnetic field H changes, the response of the measuring element 111 (magnetic field B of the magnet 1113) changes.

[0044] In this case, the change ΔB in the magnetic field B is expressed by Equation 2. ΔB=b(V)-b(V0)…(Formula 2) b(): Magnetic field function with voltage as a variable V: Voltage of the Hall element 1114 when an external force F is applied to the pressure-sensitive section 10 V0: Voltage of the Hall element 1114 when no external force F is applied to the pressure sensitive section 10

[0045] The measurement circuit 112 measures the magnetic field change amount ΔB based on Equation 2. The control unit 12 calculates the amount of external force F acting on the pressure sensitive unit 10 at each position based on the magnetic field change amount ΔB measured by the measurement circuit 112. The control unit 12 generates a display signal for displaying an image showing the calculation result of the physical quantity.

[0046] (4-1-3) Summary of Modification 1 According to the first modification, the response amount (magnetic field change amount ΔB) may be measured using the magnet 1113 and the Hall element 1114. This makes it possible to measure the action vector of the external force in addition to the amount of the external force.

[0047] (4-2) Variation 2 A second modification of this embodiment will now be described. The second modification of this embodiment is an example in which the pressure-sensitive section 10 is divided into at least two regions.

[0048] (4-2-1) Configuration of the pressure-sensing unit of Modification 2 The configuration of the pressure sensitive section 10 of the second modified example of this embodiment will be described below.

[0049] As shown in Figure 7, the pressure-sensitive part 10 includes a high-density region 10a and a low-density region 10b.

[0050] High density region 10a contains magnetically responsive particles at a higher density than low density region 10b. That is, the pressure-sensitive part 10 has at least two magnetic layers containing magnetically responsive particles with different densities.

[0051] (4-2-2) Summary of Modification 2 According to the second modification, the high-density region 10a and the low-density region 10b have different responsiveness to an external force, thereby realizing a tactile sensor 1 in which the sensitivity differs for each region of the pressure-sensitive section 10.

[0052] (4-3) Variation 3 Modification 3 of this embodiment will be described. Modification 3 of this embodiment is an example of the use of the tactile sensor 1.

[0053] (4-3-1) Application example 1 A description will be given of Application Example 1. Application Example 1 is an example in which the tactile sensor 1 is placed on a car seat.

[0054] Specifically, the tactile sensor 1 is disposed on a car seat (for example, the seat surface and backrest). The tactile sensor 1 arranged on the seat surface detects body movement (for example, movement of the occupant's waist in the seat) in a direction perpendicular to the seat surface. A tactile sensor 1 placed on the backrest detects body movements in the direction of travel of the car. The control unit 12 adds up the vertical body movement and the forward body movement to calculate the body movement of the entire body as the amount of external force acting.

[0055] According to the first application example, the accuracy of detecting the body movement of the seat occupant can be improved.

[0056] In the first application example, an acceleration sensor may also be used. The acceleration sensor measures the vibration of the car. The control unit 12 may calculate the body movement, pulse, and heart rate of the user based on the body movement in the vertical direction measured by the tactile sensor 1 and the vibration measured by the acceleration sensor.

[0057] (4-3-2) Application example 2 A description will be given of Application Example 2. Application Example 2 is an example in which the tactile sensor 1 is disposed on the end effector of a robot that grasps an object.

[0058] In Use Example 2, the "target object" is an object to be grasped by the robot.

[0059] Specifically, the tactile sensor 1 detects the movement of the end effector of the robot. is placed in the chuck. In this case, the pressure-sensitive part 10 is shaped to fit the shape of the target object. There may be a plurality of measuring elements 111. When the zipper closes, the tactile sensor 1 comes into contact with the target object, and the target object is grasped by the robot, the control unit 12 calculates the pressure generated when the robot and the target object come into contact as the amount of external force acting. The control unit 12 is connected to the controller of the robot.

[0060] According to the second application example, the pressure-sensitive unit 10 is flexible and conforms to the shape of the target object, allowing the robot to firmly grasp the target object without damaging it.

[0061] (4-3-3) Application example 3 A description will be given of Application Example 3. Application Example 3 is an example in which the tactile sensor 1 is disposed in factory automation (hereinafter referred to as "FA") equipment.

[0062] In the third application example, the FA device includes, for example, a collaborative robot. "Target object" refers to an object that is handled by FA equipment.

[0063] Specifically, the tactile sensor 1 is disposed on the housing of the FA device. In this case, the pressure-sensitive part 10 is molded to fit the shape of the target object. There may be a plurality of measuring elements 111. When the tactile sensor 1 comes into contact with a target object, the tactile sensor 1 detects the contact between the FA device and the target object from the deformation of the pressure-sensitive part 10. The control unit 12 is connected to the controller of the FA device.

[0064] According to the third application example, it is possible to expand the area in which contact between the FA device and the target object can be detected, and also to improve the response speed to the contact.

[0065] (4-3-4) Application example 4 Next, an explanation will be given of application example 4. Application example 4 is an example in which the tactile sensor 1 is disposed on a game controller. FIG. 8 is a diagram illustrating an example of application example 4 of modification example 3. In FIG.

[0066] Specifically, the tactile sensor 1 is disposed in a game device (for example, a game controller or a game console). In this case, the pressure-sensitive units 10 are each molded to fit the shape of the housing of the game device. There may be a plurality of measuring elements 111. A cover 14 may be placed over the pressure sensitive portion 10 . The control unit 12 calculates an analog value according to the amount of user operation (for example, pressing a button on a game controller), or generates an ON signal or an OFF signal according to the amount of user operation.

[0067] As shown in FIG. 8, the tactile sensor 1 includes a pair of pressure-sensitive units 10, a measuring unit 11, a control unit 12, and a pair of covers 14.

[0068] Covers 14 are arranged on both sides of the measuring unit 11. The cover 14 is disposed between the pressure-sensing unit 10 and the measuring unit 11 .

[0069] The control unit 12 is disposed between the measurement unit 11 and the cover 14 . The arrangement of the control unit 12 is not limited to the example shown in FIG.

[0070] According to the fourth application example, the durability of the game device can be improved. In particular, the example in Fig. 8 can improve the accuracy of detecting whether the user is gripping the game controller, thereby enabling the user's gripping of the game controller to be included in the game instructions.

[0071] (4-3-5) Application example 5 A description will be given of application example 5. Application example 5 is an example in which the tactile sensor 1 is placed on furniture (for example, a bed, a cushion, a chair, or flooring).

[0072] Specifically, the tactile sensor 1 is placed on a piece of furniture (for example, a mattress on a bed). In this case, the pressure-sensitive parts 10 are each molded to fit the shape of the furniture. There may be a plurality of measuring elements 111. When the user puts their weight on the furniture, the pressure-sensitive part 10 deforms in response to the weight, and the tactile sensor 1 detects that the user has put their weight on the furniture.

[0073] In particular, when the control unit 12 is connectable to the Internet, the control unit 12 may transmit the detection result (that is, that the user has put their weight on the furniture) to a client device (for example, a smartphone) connected to the Internet.

[0074] According to the use example 5, it is possible to improve the accuracy of detecting that the user has put their weight on the furniture. Furthermore, according to Use Example 5, the tactile sensor 1 is placed inside the furniture, so the detection accuracy can be improved without impairing the aesthetic appearance of the furniture.

[0075] In particular, in Use Example 5, the control unit 12 transmits the detection result to the client device, so that the user of the client device can easily know whether the user of the furniture is safe or not, even if the user is far away from the user of the furniture.

[0076] (4-3-6)Application example 6 A description will be given of Application Example 6. Application Example 6 is an example in which the tactile sensor 1 is disposed on a pipe. FIG. 9 is a diagram illustrating an example of application example 6 of modification example 3. In FIG.

[0077] Specifically, as shown in FIG. 9A, the tactile sensor 1 has an O-ring shape. As shown in FIG. 9B, the tactile sensor 1 is placed at the connection between the pipe D1 and the pipe D2. At least one measuring element 111 is disposed below the pressure sensitive section 10 . The pressure-sensitive portion 10 deforms in response to pressure applied to the connection, and the tactile sensor 1 measures the pressure applied to the connection of the pipes. The control unit 12 calculates an index value indicating the airtightness corresponding to the pressure as the amount of external force acting.

[0078] According to the use example 6, the state of the pipes D1 to D2 can be easily monitored.

[0079] (4-3-7) Application example 7 A description will be given of Application Example 7. Application Example 7 is an example in which the tactile sensor 1 is disposed on a lever for heavy machinery.

[0080] Specifically, the tactile sensor 1 is disposed on a lever for operating heavy machinery. The heavy machinery is, for example, at least one of a construction machine and an agricultural machine. In this case, the pressure-sensing unit 10 is molded to fit the shape of the housing of each heavy machine. There may be a plurality of measuring elements 111. A cover 14 may be placed over the pressure sensitive portion 10 . The control unit 12 calculates an analog value according to the amount of user operation (for example, the amount of gripping of a heavy machinery lever), or generates an ON signal or an OFF signal according to the amount of user operation.

[0081] An example of the seventh application example is similar to that shown in FIG.

[0082] According to Application Example 7, the lever for heavy machinery can be made smaller.

[0083] Although the embodiments of the present invention have been described in detail above, the scope of the present invention is not limited to the above-described embodiments. Furthermore, the above-described embodiments can be improved or modified in various ways without departing from the spirit of the present invention. Furthermore, the above-described embodiments and Modification 1 can be combined. [Explanation of symbols]

[0084] 1: Tactile sensor 2:Display device 10: Pressure-sensitive part 10a: High density area 10b: Low density area 11: Measurement section 12: Control section 13: Power supply 14: Cover 101:Magnetic layer 111: Measuring element 112: Measurement circuit 1111: Coil 1112: Capacitor 1113: Magnet 1114: Hall element

Claims

1. Equipped with a pressure-sensitive part, the pressure-sensitive portion includes magnetically responsive particles; a measuring unit that measures a response amount corresponding to a change in density distribution of magnetically responsive particles caused by an external force applied to the pressure-sensitive unit, The magnetically responsive particles are in a foamed state. Tactile sensor.

2. Equipped with a pressure-sensitive part, the pressure-sensitive portion includes magnetically responsive particles; a measuring unit that measures a response amount corresponding to a change in density distribution of magnetically responsive particles caused by an external force applied to the pressure-sensitive unit, The pressure-sensitive portion does not include a non-magnetic layer. Sensor.

3. Equipped with a pressure-sensitive part, the pressure-sensitive portion includes magnetically responsive particles; a measuring unit that measures a response amount corresponding to a change in density distribution of magnetically responsive particles caused by an external force applied to the pressure-sensitive unit, The pressure-sensitive portion includes a high-density region and a low-density region. Tactile sensor.

4. the measurement unit includes a measurement element and a measurement circuit, the measuring element forms an LC parallel resonant circuit including a coil and a capacitor; 4. The tactile sensor according to claim 1, wherein the measurement circuit measures, as the response amount, an amount of change in inductance of the coil in response to a pressure applied to the pressure sensitive portion.

5. the measurement unit includes a measurement element and a measurement circuit, the measuring element is a magnet and a Hall element, the measurement circuit measures a change in magnetic field of the Hall element as the response amount; The tactile sensor according to any one of claims 1 to 3.

6. a control unit that calculates a physical quantity based on the response quantity, The tactile sensor according to any one of claims 1 to 3.

7. The physical quantity is an amount of external force acting on each position of the pressure sensing unit. The tactile sensor according to claim 6 .

8. a tactile sensor disposed on a seat surface and a backrest of a vehicle seat and configured to measure a body movement of an occupant of the seat; The tactile sensor Equipped with a pressure-sensitive part, the pressure-sensitive portion includes magnetically responsive particles; a measuring unit that measures a response amount corresponding to a change in density distribution of magnetically responsive particles caused by an external force applied to the pressure-sensitive unit, an acceleration sensor for measuring vibrations of the vehicle; a means for calculating the body movement, pulse, and heart rate of the occupant based on the body movement measured by the tactile sensor and the vibration measured by the acceleration sensor; Sensing system.

9. Equipped with tactile sensors, The tactile sensor Equipped with a pressure-sensitive part, the pressure-sensitive portion includes magnetically responsive particles; a measuring unit that measures a response amount corresponding to a change in density distribution of magnetically responsive particles caused by an external force applied to the pressure-sensitive unit, The tactile sensor is disposed on a piece of furniture and detects the weight of a user placed on the piece of furniture.

10. A device comprising the tactile sensor according to any one of claims 1 to 3, The tactile sensor is disposed on an end effector of a robot and measures pressure generated when the robot grasps an object.

11. A device comprising the tactile sensor according to any one of claims 1 to 3, The tactile sensor is disposed in a factory automation device and detects contact between the factory automation device and a target object.

12. A device comprising the tactile sensor according to any one of claims 1 to 3, The tactile sensor is disposed in a game device and generates a signal in response to a user's operation.

13. A device comprising the tactile sensor according to any one of claims 1 to 3, The tactile sensor is disposed at a connection portion of a pipe and measures pressure applied to the connection portion of the pipe.

14. A device comprising the tactile sensor according to any one of claims 1 to 3, The tactile sensor is disposed on a lever for heavy machinery and measures the strength of the force with which a user grips the lever for heavy machinery.

Images