Microstructure transfer method for microstructure transfer device

Abstract

To provide a microstructure transfer device and a microstructure transfer method capable of fixing a plurality of replicas to a sheet-like body (a film).SOLUTION: A microstructure transfer device 1 includes: an unwinder 5 for winding a flexible sheet-like body 4 and unwinding the sheet-like body 4; a winder 6 for winding the sheet-like body 4 conveyed via a plurality of guide rolls 3; a stage 11 that is disposed between the unwinder 5 and the winder 6 and on which a mold 14 is placed on whose surface a fine uneven pattern is formed and coated with photocurable resin; an imprint roll 2 that reciprocates at least between both ends of the mold 14 while depressing the sheet-like body 4 to the mold 14 from above; and a curing light irradiator 8 for irradiating the sheet-like body 4 depressed by the mold 14 with ultraviolet light. A plurality of replicas 20 are continuously fixed to the sheet-like body 4.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a microstructure transfer device that uses a mold having a fine concave-convex pattern on the surface, such as on the order of nanometers, to transfer a microstructure onto a substrate. of The present invention relates to a method for transferring a fine structure. [Background technology]

[0002] Ultraviolet / electron beam lithography, a microfabrication technology used in semiconductor manufacturing, requires expensive equipment and complex processes, resulting in problems with improving manufacturing time and costs. However, advances in nanoimprint lithography (NIL), which directly transfers a mold (also called a stamper or template) with a fine concave-convex pattern onto a resin material, have made it possible to easily realize fine patterns on the order of 10 nm to several hundred nm using simple equipment and processes, making NIL more advantageous in terms of equipment price and mass production costs. For example, Patent Document 1 discloses a microstructure in which a fine concave-convex pattern formed on the surface of a mold is inversely transferred onto the mold using electroless plating. In particular, Patent Document 1 describes forming a stamper by placing a buffer material on the top surface of the resulting microstructure (the surface opposite to the surface on which the fine concave-convex pattern is formed) and coating the surface of the fine concave-convex pattern with a release agent.

[0003] Furthermore, Patent Document 2 proposes an NIL device in which the cross-sectional area of ​​the portion that holds the substrate pressure surface is smaller than the cross-sectional area of ​​the substrate pressure surface of the stamper in order to improve the time required for the temperature rise and cooling cycle in heat and pressure transfer. Patent Document 3 discloses an NIL device that is equipped with a temporary placement surface on which a substrate is temporarily placed and a temporary placement member that gradually moves the substrate to the substrate placement surface, thereby preventing misalignment due to air voids between the substrate and substrate placement stage and enabling high-precision transfer.

[0004] Patent Document 4 proposes a roll-to-roll NIL device that allows buffer materials to be replaced sequentially during heating and pressure application, with the aim of achieving higher-precision transfer.

[0005] Furthermore, Patent Document 5 discloses an NIL device that uses multiple rollers to heat and press a stamper onto a resin layer to transfer the pattern, enabling accurate and high-precision pattern transfer even when the rotation speed of the transfer roll is increased, with the aim of improving production throughput and reducing mass production costs.

[0006] As an example of a device using a photocurable resin, Patent Document 6 discloses an NIL device that presses a mold against a workpiece made of a thin film of ultraviolet-curable resin to perform compression molding, and then irradiates ultraviolet light to transfer a pattern, wherein a temperature rise is suppressed by using a light source that does not continuously emit heat rays at the same time as the ultraviolet light. Patent Document 7 discloses an NIL device that uses a roll-to-roll method to feed a photocurable transfer sheet having a photocurable transfer layer to which a transparent film is adhesively fixed, exposes the photocurable transfer layer, presses it with a stamper, and irradiates it with light from a UV lamp to transfer the fine concave-convex pattern of the stamper. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] Japanese Patent Application Laid-Open No. 2005-189128 [Patent Document 2] Japanese Patent Application Laid-Open No. 2004-288784 [Patent Document 3] Japanese Patent Application Laid-Open No. 2006-62208 [Patent Document 4] Japanese Patent Application Laid-Open No. 2004-288804 [Patent Document 5] Japanese Patent Application Laid-Open No. 2006-326948 [Patent Document 6] WO2009 / 110596 publication [Patent Document 7] JP 2011-66100 A Summary of the Invention [Problem to be solved by the invention]

[0008] The NIL devices disclosed in the above-mentioned Patent Documents 1 to 6 are configured to imprint substrates one by one using a mold. However, because they use a stamp method that directly contacts the mold, there is a risk of the mold being damaged by the adhesion of material or foreign matter to the mold. Since mold manufacturing is extremely expensive and takes a long time, it is necessary to minimize the number of times a mold is used. Also, there is a risk of mold damage or chipping due to the mold being dropped or hit during mold changeover.

[0009] Therefore, a method is used in which replica molds are formed from soft materials using a master mold, rather than using expensive master molds for production. However, replica molds need to be replaced every few hundred times, although the frequency varies depending on the product and material, and because the replacement and setup of replica molds (hereinafter referred to as replicas) takes time, there has been a demand for reducing setup costs.

[0010] Furthermore, the NIL device disclosed in the above-mentioned Patent Document 7 is configured to form an intermediate stamper (replica) using a mold, then feed the intermediate stamper at a pitch and imprint substrates one by one using the intermediate stamper. Therefore, because the expensive mold is configured to be constantly placed below a photocurable transfer sheet having a photocurable transfer layer to which a transparent film on which the intermediate stamper is formed is adhesively fixed, there is a risk that the mold may be damaged by foreign matter, etc., falling from the photocurable transfer sheet.

[0011] Furthermore, with the recent rapid spread of relatively small displays such as those for smartphones and tablet devices, there is a demand for manufacturing equipment for liquid crystal panels, etc. with higher throughput. In addition, with the accelerating trend toward larger screens and higher resolutions for display panels for televisions, there is a demand for next-generation displays with even higher definition.

[0012] Therefore, the present invention provides a microstructure transfer device and a microstructure transfer method that can fix multiple replicas to a sheet-like body (film).The present invention also provides a microstructure transfer device and a microstructure transfer method that can continuously form patterns on a substrate using multiple consecutive replicas on the above-mentioned sheet-like body (film). [Means for solving the problem]

[0013] In order to solve the above problems, a micropattern transfer device according to the present invention is provided. Microstructure transfer method The apparatus includes an unwinder that winds a flexible sheet-like body and unwinds the sheet-like body; a winder that winds the sheet-like body that is transported via a plurality of guide rolls; a stage that is disposed between the unwinder and the winder and that places a mold having a fine concave-convex pattern formed on its surface and coated with a photocurable resin; an imprint roll that moves back and forth between at least both ends of the mold while pressing the sheet-like body against the mold from above; and a curing light irradiator that irradiates curing light onto the sheet-like body pressed against the mold. and, a film clamp that clamps the sheet-like body to an end of the mold or substrate that is located upstream in a conveying direction of the sheet-like body when the imprint roll moves while pressing the sheet-like body; A method for transferring a fine structure of a fine structure transfer device, which continuously fixes a plurality of replicas to the sheet-like body And, The apparatus includes, among the plurality of guide rolls, a first guide roll adjacent to the imprint roll and positioned upstream in the conveying direction of the sheet-like body, and a second guide roll adjacent to the imprint roll and positioned downstream in the conveying direction of the sheet-like body, wherein when the imprint roll moves while pressing the sheet-like body, the second guide roll is positioned above the imprint roll and moves together with the imprint roll at a constant speed, and the curing light irradiator is positioned between the imprint roll and the first guide roll, and when the imprint roll moves while pressing the sheet-like body, moves downstream to follow the imprint roll and the second guide roll while irradiating curing light. It is characterized by the following. Furthermore, a method for transferring a fine structure using a fine structure transfer device according to the present invention includes an unwinder that winds up a flexible sheet-like body and unwinds the sheet-like body, a winder that winds up the sheet-like body that is transported via a plurality of guide rolls, a stage that is arranged between the unwinder and the winder and that places a mold having a fine concave-convex pattern formed thereon and coated with a photocurable resin, an imprint roll that moves back and forth between at least both ends of the mold while pressing the sheet-like body against the mold from above, a curing light irradiator that irradiates curing light onto the sheet-like body pressed against the mold, and a film clamp that clamps the sheet-like body to an end of the mold or substrate that is located upstream in the transport direction of the sheet-like body when the imprint roll moves while pressing the sheet-like body. a first guide roll positioned upstream of the imprint roll in the conveying direction of the sheet-like body, and a second guide roll positioned downstream of the imprint roll in the conveying direction of the sheet-like body, wherein the second guide roll is positioned above the imprint roll and moves at a constant speed together with the imprint roll when the imprint roll moves while pressing the sheet-like body; and the curing light irradiator is positioned between the imprint roll and the first guide roll, and the imprint roll moves downstream at a constant speed together with the second guide roll while pressing the sheet-like body, and then moves downstream while irradiating curing light.

[0019] Microstructure transfer device according to the present invention Microstructure transfer method teeth, It has a photo-curable resin application mechanism, The photocurable resin is applied to the mold and / or the substrate. Ruko It is characterized by the following. [Effects of the Invention]

[0025] According to the present invention, it is possible to provide a fine structure transfer device and a fine structure transfer method that can continuously fix a plurality of replicas to a sheet-like body (film).

[0026] For example, the ability to continuously attach multiple replicas to a sheet-like body improves the throughput of replica formation. Furthermore, even if one of the replicas attached to the sheet-like body reaches its limit of use, the next replica can be used simply by feeding the sheet-like body at a certain pitch, thereby reducing the costs of replica replacement and setup work.

[0027] Problems, configurations, and effects other than those described above will become apparent from the following description of the embodiments. [Brief explanation of the drawings]

[0028] [Figure 1] 1 is a side view showing a schematic configuration of a micropattern transfer device of Example 1 according to an embodiment of the present invention. [Figure 2] FIG. 2 is a plan view of the micropattern transfer device shown in FIG. [Figure 3A] 10A and 10B are diagrams showing a positioning step using an imaging unit during replica formation. [Figure 3B] 10A and 10B are diagrams showing the film clamp and imprint roll pressing process during replica formation. [Figure 3C] 1A to 1C are diagrams illustrating nanoimprint operation steps during replica formation. [Figure 3D] FIG. 10 is a diagram showing a curing light irradiation step during replica formation. [Figure 3E] FIG. 10 is a diagram showing a peeling step during replica formation. [Figure 4A] 10A and 10B are diagrams showing the operation of the upstream guide roll, the imprint roll, and the downstream guide roll, and showing the state when a marker attached to a sheet is detected. [Figure 4B]10A and 10B are diagrams showing the operation of the upstream guide roll, the imprint roll, and the downstream guide roll, and are diagrams showing the state during the positioning operation and the positioning confirmation. [Figure 4C] 10A and 10B are diagrams showing the operation of the upstream guide roll, the imprint roll, and the downstream guide roll, and are diagrams showing the state when the film is clamped and the upstream guide roll is clamped. [Figure 4D] FIG. 10 is a diagram showing the operation of the upstream guide roll, the imprint roll, and the downstream guide roll, and is a diagram showing the state when the imprint roll is lowered. [Figure 4E] FIG. 10 is a diagram showing the operation of the upstream guide roll, the imprint roll, and the downstream guide roll, illustrating the state when the imprint roll and the downstream guide roll start to press. [Figure 4F] FIG. 10 is a diagram showing the operation of the upstream guide roll, the imprint roll, and the downstream guide roll, showing the state when both the imprint roll and the downstream guide roll move downstream and press. [Figure 4G] FIG. 10 is a diagram showing the operation of the upstream guide roll, the imprint roll, and the downstream guide roll, and is a diagram showing the state when the curing light irradiator is lowered. [Figure 4H] FIG. 10 is a diagram showing the operation of the upstream guide roll, the imprint roll, and the downstream guide roll, showing the state when curing light is irradiated. [Figure 4I] FIG. 10 is a diagram showing the operation of the upstream guide roll, imprint roll, and downstream guide roll, illustrating the state when the film clamp is raised / retracted and both the imprint roll and downstream guide roll start to move upstream. [Figure 4J] FIG. 10 is a diagram showing the operation of the upstream guide roll, the imprint roll, and the downstream guide roll, and is a diagram showing the state during peeling. [Figure 4K] FIG. 10 is a diagram showing the operation of the upstream guide roll, the imprint roll, and the downstream guide roll, showing the state when both the imprint roll and the downstream guide roll start to move upstream. [Figure 5]FIG. 1 shows an overview of the process during replica formation, where (A) is film alignment, (B) is pressing (imprinting), (C) is curing light irradiation, (D) is peeling, and (E) is a diagram showing the completion of replica formation. [Figure 6] 2 is a side view showing a schematic configuration of the fine structure transfer device shown in FIG. 1, and is a side view showing the transfer of a fine concave-convex pattern onto a glass substrate by replica. FIG. [Figure 7] FIG. 7 is a plan view of the micropattern transfer device shown in FIG. 6. [Figure 8] FIG. 1 shows an overview of the process for forming a pattern on a glass substrate, where (A) shows replica alignment, (B) shows pressing (imprinting), (C) shows curing light irradiation, (D) shows peeling, and (E) shows the completion of pattern formation on the glass substrate. [Figure 9] FIG. 10 is a plan view of a micropattern transfer device according to a second embodiment of the present invention. [Figure 10] FIG. 10 is a plan view of a micropattern transfer device according to a third embodiment of the present invention. [Figure 11A] FIG. 10 is a diagram showing a state in which a mold is set on a stage in a replica formation process. [Figure 11B] 10A and 10B are diagrams showing the application of photocurable resin and mold positioning in the replica formation process. [Figure 11C] FIG. 10 is a diagram showing the continuous replica formation state in the replica formation process. [Figure 11D] 10A and 10B are diagrams showing the mold return state in the replica forming process. [Figure 12A] 1A and 1B are diagrams showing a state in which a glass substrate is set on a stage in a pattern forming process on the glass substrate. [Figure 12B] 1A to 1C are diagrams illustrating the application of a photocurable resin and the positioning of a mold in a pattern formation process on a glass substrate. [Figure 12C] 1A and 1B are diagrams showing a state in which patterns are continuously formed on a glass substrate in a pattern forming process. [Figure 12D] 1A and 1B are diagrams illustrating a state in which the glass substrate is returned in the pattern formation process on the glass substrate. [Figure 13] FIG. 10 is a front view of a micropattern transfer device according to a fourth embodiment of the present invention. [Figure 14] 14 is a view taken in the direction of the arrow A in FIG. 13, and is a cross-sectional view of the backup roll mechanism. DETAILED DESCRIPTION OF THE INVENTION

[0029] In this specification, a fine pattern region having a fine concave-convex pattern formed on one mold or the surface of one mold is referred to as a "cell."

[0030] Furthermore, in this specification, a glass substrate is described as an example of a transfer object onto which a fine pattern is transferred by a replica onto which the fine pattern of a mold (metal mold) is transferred, but it goes without saying that the transfer object is not limited to this and also includes substrates made of various panel materials such as resin substrates or film substrates. In other words, the transfer object onto which a fine pattern is transferred by a replica is a substrate.

[0031] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. [Example]

[0032] Fig. 1 is a side view showing a schematic configuration of a fine structure transfer device of Example 1 according to an embodiment of the present invention, and Fig. 2 is a plan view of the fine structure transfer device shown in Fig. 1. The outline arrows shown in Fig. 1 and Fig. 2 indicate the conveying direction (supply direction) of a sheet-like body (film) 4.

[0033] (Configuration of the microstructure transfer device)

[0034] 1, the microstructure transfer device 1 includes, from the upstream side, an unwinder 5 that winds up an unwound film (sheet-like body), a guide roll 3 that transports the sheet-like body (film) 4 delivered from the unwinder 5, a dry cleaner 9 that blows air onto the sheet-like body (film) 4 to remove dust adhering to the film surface, two guide rolls 3 that transport the sheet-like body (film) 4 vertically downward, an upstream guide roll (first guide roll) 3a that is arranged upstream of the imprint roll 2 (described in detail below) via a curing light irradiator 8, the curing light irradiator 8, the imprint roll 2, and a downstream guide roll (second guide roll) 3b that is arranged adjacent to and downstream of the imprint roll 2. Here, the curing light irradiator 8 irradiates, for example, ultraviolet light as curing light.

[0035] The microstructure transfer device 1 also includes a guide roll 3 that guides the sheet-like body (film) 4 vertically upward as it passes through the downstream guide roll (second guide roll) 3b, a guide roll 3 that transports the sheet-like body (film) 4 horizontally downstream from the guide roll 3 and guides the sheet-like body (film) 4 vertically downward, a laser marker 10 that irradiates a laser to add markers at positions corresponding to the start and end of a fine pattern area formed on the mold as the sheet-like body (film) 4 passes through the guide roll 3, a dry cleaner 9 that blows air onto the sheet-like body (film) 4 to remove dust adhering to the film surface, two guide rolls 3 arranged below the dry cleaner 9, a dancer roll 7, a cleaning roll 12, two guide rolls 3, and a winder 6 that winds up the sheet-like body (film) 4.

[0036] The surfaces (outer surfaces) of the paired cleaning rolls 12 are coated in advance with glue or the like, and the sheet-like body (film) 4 passes between the paired cleaning rolls 12 while being sandwiched and in contact with each other, thereby removing dust and other particles adhering to the film surface. At this time, the replica, which will be described in detail later, is hardened and firmly adhered to the sheet-like body (film) 4, so the replica does not detach or peel from the sheet-like body (film) 4 when passing between the paired cleaning rolls 12. Note that, although this embodiment shows a configuration in which the microstructure transfer device 1 has the cleaning roll 12, the installation of the cleaning roll 12 is optional. In other words, a configuration without the cleaning roll 12 is also possible.

[0037] The sheet material (film) 4 is flexible and has the property of transmitting light. The dancer roll 7 applies a predetermined tension to the conveyed sheet material (film) 4 by displacing left and right in FIG. 1 , i.e., back and forth in a horizontal plane. For example, due to differences in the diameters of the guide rolls, even if the sheet material (film) 4 is fed from the unwinder 5 at a predetermined feed rate (speed), the film may sag. However, by displacing the dancer roll 7 back and forth to adjust the tension on the sheet material (film) 4, the above-mentioned sagging can be prevented.

[0038] 1 and 2, the microstructure transfer device 1 includes a stage 11 on which a mold (metal mold) 14 is placed, the stage 11 being movable in the X and Y directions in a horizontal plane and displaceable in a rotational direction (θ). A photocurable resin is applied in advance to a fine concave-convex pattern formed on the surface of the mold (metal mold) 14, and the mold (metal mold) is loaded onto (loaded from) and unloaded from (unloaded from) the stage 11 by a transport mechanism such as a robot arm (not shown) (arrows in FIG. 2). The stage 11 is provided with, for example, a vacuum chuck, which fixes the placed mold (metal mold) 14 onto the stage 11.

[0039] 2, the microstructure transfer device 1 is provided with two imaging unit support sections 18, both ends of which are movably supported by the gantry 13, between the upstream guide roll (first guide roll) 3a and the curing light irradiator 8, and two upstream imaging units 17a, which are spaced apart from each other along the width direction of the sheet-like material (film) 4. Also, between the imprint roll 2 and the downstream guide roll (second guide roll) 3b, two imaging unit support sections 18, both ends of which are movably supported by the gantry 13, and two downstream imaging units 17b, which are spaced apart from each other along the width direction of the sheet-like material (film) 4. For example, a CCD or the like is used as the upstream imaging unit 17a and the downstream imaging unit 17b. The upstream imaging unit 17a and the downstream imaging unit 17b are used to detect four markers added by the laser marker 10 on the sheet-like material (film) 4 when positioning the sheet-like material (film) 4, as described below. Between the downstream guide roll (second guide roll) 3b and the stage 11, a film clamp 16 is provided.

[0040] (Operation of the microstructure transfer device during replica formation)

[0041] 3A to 3E show the steps involved in replica formation. In the alignment step using the imaging unit shown in FIG. 3A, the downstream guide roll (second guide roll) 3b moves downstream to a position beyond the edge of the stage 11 while maintaining a predetermined distance from the surface of the mold (metal mold) 14 placed on the stage 11. The upstream imaging unit 17a and the downstream imaging unit 17b move vertically above the sheet (film) 4 to positions corresponding to the start of the fine pattern area on the surface of the mold (metal mold) 14 (the upstream end in the conveying direction of the sheet (film) 4) and the end of the fine pattern area (the downstream end in the conveying direction of the sheet (film) 4), respectively. When the upstream imaging unit 17a and the downstream imaging unit 17b detect markers attached to the conveyed sheet (film) 4, the winder 6 stops winding the sheet (film) 4.

[0042] 3B, first, the film clamp 16 descends and clamps the sheet material (film) 4. This fixes the sheet material (film) 4. The imprint roll 2 also descends and presses the sheet material (film) 4. In this state, the downstream guide roll (second guide roll) 3b moves upstream together with the guide roll 3 disposed vertically above it, and stops at a position where it is a predetermined distance from the imprint roll 2.

[0043] In the nanoimprint operation process shown in Figure 3C, the imprint roll 2 moves downstream while pressing the sheet-like body (film) 4 at the same speed as the downstream guide roll (second guide roll) 3b. At this time, in the example shown in Figure 4C, the curing light irradiator 8 moves so as to follow the imprint roll 2, the downstream guide roll (second guide roll) 3b, and the guide roll 3 arranged vertically above it. Since the imprint roll 2 moves downstream at the same speed as the downstream guide roll (second guide roll) 3b, the positional relationship between them, i.e., the distance, is maintained constant. Therefore, the path length of the sheet-like body (film) 4 does not change, and even when the imprint roll 2 moves while pressing the sheet-like body (film) 4, the tension applied to the sheet-like body (film) 4 does not fluctuate.

[0044] 3D , as described above, the curing light irradiator 8 moves downstream to follow the imprint roll 2, and therefore moves downstream while irradiating ultraviolet light (curing light), and the photocurable resin previously applied to the surface of the mold (metal mold) 14 having a fine pattern region works with the pressing force of the imprint roll 2 to adhere to the sheet-like body (film) 4. As a result, the fine concave-convex pattern formed on the surface of the mold (metal mold) 14 is inversely transferred onto the sheet-like body (film) 4. Therefore, in this embodiment, the nanoimprint operation step and the curing light irradiation step are performed simultaneously.

[0045] 3E, the imprint roll 2 moves upstream at the same speed as the downstream guide roll (second guide roll) 3b and the guide roll 3 disposed vertically above it, thereby uniformly peeling the replicas adhered to the sheet-like body (film) 4 from the surface of the mold (metal mold) 14. In other words, the replicas adhered to the sheet-like body (film) 4 and the mold (metal mold) 14 can be peeled off without damaging them.

[0046] As described above, according to the microstructure transfer device 1 of this embodiment, the imprint roll 2 moves back and forth downstream and upstream at the same speed as the downstream guide roll (second guide roll) 3b and the guide roll 3 arranged vertically above it, making it possible to easily form a replica.

[0047] Next, the operations of the upstream guide roll (first guide roll) 3a, the imprint roll 2, and the downstream guide roll (second guide roll) 3b will be described in detail using Figures 4A to 4K. As shown in Figure 4A, the downstream guide roll (second guide roll) 3b moves downstream and stops at a position beyond the downstream end of the mold (metal mold) 14. At this time, the distance L1 between the axial centers of the upstream guide roll (first guide roll) 3a and the downstream guide roll (second guide roll) 3b is, for example, 4000 mm. Furthermore, the length L2 of the fine pattern region, which is the region where the fine concave-convex pattern formed on the surface of the mold (metal mold) 14 exists, is, for example, 65 inches. Two upstream imaging units 17a and two downstream imaging units 17b are positioned vertically above the sheet material (film) 4 being transported between the upstream guide roll (first guide roll) 3a, the imprint roll 2, and the downstream guide roll (second guide roll) 3b, and detect markers at positions corresponding to the start and end of the fine pattern area that have been added to the sheet material (film) 4 in advance by a laser marker 10. The sheet material (film) 4 is transported at a pitch by the drive of a winder 6 over a length equivalent to one cell.

[0048] 4B, when the four markers are detected by the upstream-side imaging unit 17a and the downstream-side imaging unit 17b, the stage 11 on which the mold (metal mold) 14 is placed is rotated, for example, in the rotation direction (θ) based on the detected four markers, and positioned so that the four markers overlap with the start and end of the fine pattern region. The positioning is also confirmed based on the images captured by the upstream-side imaging unit 17a and the downstream-side imaging unit 17b.

[0049] Once positioning is complete, as shown in Fig. 4C, film clamp 16, which has a substantially L-shaped cross section, presses and clamps sheet material (film) 4 against the surface of mold (metal mold) 14. It also clamps upstream guide roll (first guide roll) 3a.

[0050] Next, as shown in Fig. 4D, the imprint roll 2 descends, and as shown in Fig. 4E, the downstream guide roll (second guide roll) 3b, which had been stopped at a position beyond the downstream end of the mold (metal mold) 14, moves upstream to assume a predetermined positional relationship with the imprint roll 2. At this time, the downstream guide roll (second guide roll) 3b is positioned vertically above the imprint roll 2 and upstream of the upstream guide roll (first guide roll) 3a. Therefore, the sheet-like body (film) 4 that extends from the position pressed by the imprint roll 2 to the downstream guide roll (second guide roll) 3b forms a predetermined angle with the surface of the mold (metal mold) 14.

[0051] As shown in Figure 4F, the imprint roll 2 moves at the same speed as the downstream guide roll (second guide roll) 3b while pressing the sheet-like material (film) 4 to a position beyond the downstream end of the mold (metal mold) 14. Because the imprint roll 2 and the downstream guide roll (second guide roll) 3b move at a constant speed, their positional relationship remains constant as they move downstream, and no fluctuation occurs in the tension applied to the sheet-like material (film) 4. Here, for example, the movement speed of the imprint roll 2 and the downstream guide roll (second guide roll) 3b is 150 mm / s.

[0052] 4G, the curing light irradiator 8 descends to a position directly above the film clamp 16. The curing light irradiator 8 then irradiates ultraviolet light (curing light) from above the sheet (film) 4 onto the photocurable resin that has been applied in advance to the fine pattern region on the surface of the mold (metal mold) 14 and that has been pressed onto the sheet (film) 4 by the pressing force of the imprint roll 2, while moving to the vicinity of the imprint roll 2 that is located beyond the downstream end of the mold (metal mold) 14. This hardens the photocurable resin, and the fine concave-convex pattern formed on the surface of the mold (metal mold) 14 is inversely transferred onto the sheet (film) 4.

[0053] As shown in FIG. 4I, the film clamp 16 then rises and retreats from the mold (metal mold) 14. Then, the imprint roll 2 starts to move upstream at a constant speed together with the downstream guide roll (second guide roll) 3b. As shown in FIG. 4J, the imprint roll 2 moves upstream at a constant speed together with the downstream guide roll (second guide roll) 3b, so that the replica fixed to the sheet-like body (film) 4 is peeled off uniformly from the fine concave-convex pattern formed on the surface of the mold (metal mold) 14. The upstream guide roll (first guide roll) 3a continues to be clamped until the imprint roll 2 reaches the vicinity of the upstream end of the mold (metal mold) 14. Finally, as shown in Figure 4K, when the imprint roll 2 reaches near the upstream end of the mold (metal mold) 14, the upstream guide roll (first guide roll) 3a is released from the clamp, and the imprint roll 2 and the downstream guide roll (second guide roll) 3b rise, resulting in a replica of one cell fixed to the sheet-like body (film) 4.

[0054] Although not shown, thereafter, a winder 6 winds up the sheet-like material (film) 4 by a length (pitch) of at least one cell, and an unwinder 5 pitch-feeds the sheet-like material (film) 4. Thereafter, by repeating (step-and-repeat) the operations shown in Figures 4A to 4K, multiple replicas transferred from the same mold 14 are fixed to the sheet-like material (film) 4.

[0055] 3A to 3E, the nanoimprinting operation step and the curing light irradiation step are performed simultaneously. However, in FIGS. 4A to 4K, the curing light irradiation step is performed after the nanoimprinting operation step is completed. Thus, the nanoimprinting operation step and the curing light irradiation step may be performed simultaneously, or the curing light irradiation step may be performed after the nanoimprinting operation step is completed. Furthermore, the takt time for the curing light irradiation step depends on the irradiation process characteristics (irradiation speed, irradiation energy, etc.) that are determined by the photocuring characteristics of the photocurable resin, the amount of resin applied, and the adhesion characteristics of the film and substrate material. The irradiation start timing, curing light irradiator movement speed, and irradiation time can be arbitrarily controlled by a curing light irradiator control mechanism (not shown).

[0056] FIG. 5 is a diagram showing an overview of the replica formation process, with (A) showing film alignment, (B) showing pressing (imprinting), (C) showing curing light irradiation, (D) showing peeling, and (E) showing the completion of replica formation. In FIG. 5(A), a sheet-like body (film) 4 is aligned on a mold (metal mold) 14 having a fine concave-convex pattern formed on its surface, with a photocurable resin 19 pre-applied. Then, in FIG. 5(B), the imprint roll 2 presses the sheet-like body (film) 4 against the resin 19 while moving downstream. In FIG. 5(C), the curing light irradiator 8 irradiates ultraviolet light (curing light) onto the sheet-like body (film) 4 pressed against the resin 19 while moving downstream. In FIG. 5(D), the imprint roll 2 moves upstream, and the sheet-like body (film) 4 with the cured resin adhered thereto is peeled off from the mold (metal mold) 14. In FIG. 5(E), the replica 20 is formed by completely peeling off the mold (metal mold) 14 and being fixed to the sheet-like body (film) 4.

[0057] (Operation of the microstructure transfer device when forming a pattern on a glass substrate)

[0058] The operation of forming (transferring) a fine concave-convex pattern by replica onto a glass substrate using the fine structure transfer device 1 will be described below. Fig. 6 is a side view showing the schematic configuration of the fine structure transfer device shown in Fig. 1, showing the side view when transferring a fine concave-convex pattern onto a glass substrate by replica, and Fig. 7 is a plan view of the fine structure transfer device shown in Fig. 6. The difference from Figs. 1 and 2 above is that instead of a configuration in which a mold (metal mold) 14 is placed on the stage 11, a glass substrate 15 is placed on it. Therefore, explanations of Figs. 6 and 7 will be omitted here.

[0059] 3A to 3E, a glass substrate 15 to which a photocurable resin has been applied in advance is placed on a stage 11, and a replica having a fine concave-convex pattern on its surface, which is fixed to a sheet-like body (film) 4, is pressed against the photocurable resin on the glass substrate 15 by an imprint roll 2, which moves downstream at the same speed as a downstream guide roll (second guide roll) 3b. In addition, a curing light irradiator 8 moves downstream while irradiating ultraviolet light (curing light) so as to follow the imprint roll 2, and the photocurable resin on the glass substrate 15 is cured. As shown in FIG. 3E, the replica is peeled off from the glass substrate 15 with the cured photocurable resin, thereby forming a fine concave-convex pattern on the surface of the glass substrate 15.

[0060] 4A to 4K, the mold (metal mold) 14 to which a photocurable resin has been applied in advance is replaced with a glass substrate 15 to which a photocurable resin has been applied in advance, and the operations of the upstream guide roll (first guide roll) 3a, the imprint roll 2, and the downstream guide roll (second guide roll) 3b described above form (transfer) the fine concave-convex pattern of the replica fixed to the sheet material (film) 4 onto the glass substrate 15. When the replica reaches its usage limit, for example, several hundred times, the winder 6 winds up at least one cell length (pitch) of the sheet material (film) 4, and the unwinder 5 feeds the sheet material (film) 4 by that pitch. As a result, the operations of FIGS. 4A to 4K are repeated again using a new replica, and the fine concave-convex patterns of the replica are transferred onto a plurality of glass substrates 15 to form patterns.

[0061] In this way, replacement with a new replica is possible simply by pitch-feeding the sheet-like body (film) 4, which reduces the costs involved in replica replacement and setup work.

[0062] Furthermore, the same micropattern transfer device 1 can continuously fix replicas to a plurality of sheet-like bodies (films), and then the replicas can be used to form a pattern on a glass substrate, thereby improving throughput.

[0063] FIG. 8 is a diagram showing an overview of the process for forming a pattern on a glass substrate, with (A) replica alignment, (B) pressing (imprinting), (C) curing light irradiation, (D) peeling, and (E) showing the completion of pattern formation on the glass substrate. In FIG. 8(A), a replica 20 bonded to a sheet-like body (film) 4 is aligned with a glass substrate 15, the surface of which has been previously coated with a photocurable resin 19. Then, in FIG. 8(B), the replica 20 bonded to the sheet-like body (film) 4 is moved downstream while being pressed against the glass substrate 15 coated with the resin 19 by an imprint roll 2. In FIG. 8(C), ultraviolet light (ultraviolet light) is irradiated from a curing light irradiator 8 onto the resin 19 on the glass substrate 15, passing through the replica 20 bonded to the sheet-like body (film) 4, while the curing light irradiator 8 moves downstream. In Fig. 8(D), the imprint roll 2 moves upstream, and the replica 20 fixed to the sheet-like body (film) 4 is peeled off from the glass substrate 15 having the cured resin 19. In Fig. 8(E), the replica 20 fixed to the sheet-like body (film) 4 is completely peeled off from the glass substrate 15, and a fine concave-convex pattern of the replica is formed on the glass substrate 15.

[0064] In this embodiment, the microstructure transfer device 1 is configured to continuously bond a plurality of replicas 20 to the sheet-like body (film) 4, and then transfer (form) a fine concave-convex pattern by using the replicas 20 to a glass substrate 15 previously coated with a photocurable resin, but this is not necessarily limited to this. For example, the microstructure transfer device 1 of this embodiment may be configured to continuously bond a plurality of replicas 20 to the sheet-like body (film) 4, and then use the replicas to transfer the fine concave-convex pattern of the replicas to a glass substrate in another device.

[0065] According to this embodiment, it is possible to provide a fine structure transfer device and a fine structure transfer method that can continuously fix a plurality of replicas to a sheet-like body (film).

[0066] Furthermore, according to this embodiment, a plurality of replicas can be continuously fixed to the sheet-like body, thereby improving the throughput of replica formation.

[0067] Furthermore, if the microstructure transfer device of this embodiment is used to form replicas and form patterns by transferring the replica's fine uneven pattern onto a glass substrate, even if one of the multiple replicas fixed to the sheet-like body reaches its usage limit, the next new replica can be used simply by feeding the sheet-like body at a certain pitch, thereby reducing the costs of replica replacement and setup work. [Example]

[0068] FIG. 9 is a plan view of a microstructure transfer device of Example 2 according to another embodiment of the present invention. As shown in FIG. 9, this example differs from Example 1 in that it is configured with a continuous replica formation device 21, a photocurable resin application mechanism 22, a replica shape inspection device 31, and a pattern formation device 41. In particular, this example differs from Example 1 in that it is provided with a continuous replica formation device 21 for replica formation, and a photocurable resin application mechanism 22 that applies photocurable resin to a mold (metal mold) in the continuous replica formation device 21. It also differs from Example 1 in that it is provided with a replica shape inspection device 31 that inspects the shape of the replica before forming a fine uneven pattern on a glass substrate using the replica. Components similar to those in Example 1 are designated by the same reference numerals, and descriptions that overlap with Example 1 will be omitted below.

[0069] As shown in Figure 9, the configuration of the replica continuous formation apparatus 21 is almost the same as that of the microstructure transfer apparatus 1 shown in the above-mentioned first embodiment. Before the mold (metal mold) 14 is carried into the stage, a photocurable resin application mechanism 22 applies a photocurable resin to the fine uneven pattern formed on the surface of the mold (metal mold) 14. Note that an inkjet printer, for example, is used as the photocurable resin application mechanism 22. The mold (metal mold) 14 to which the photocurable resin has been applied is placed on the stage, and multiple replicas 20 are continuously fixed to the sheet-like body (film) 4 by the operation of the imprint roll 2, guide roll 3, unwinder 5, winder 6, etc., as in the above-mentioned first embodiment.

[0070] The replica 20 formed by the replica continuous forming apparatus 21 is sent to a replica shape inspection apparatus 31, which inspects whether or not there are any defects or failures in the fine uneven pattern formed (transferred) on the replica 20. As a shape inspection apparatus used in the replica shape inspection apparatus 31, for example, an atomic force microscope (AFM), a scanning electron microscope (SEM), or a scatterometry optical inspection apparatus can be used. Among these, it is preferable to use an AFM.

[0071] When the replica shape inspection device 31 determines that a replica is defective, it recognizes information about the cell where the defect was identified (such as placement and defect details) and stores it in a storage unit (not shown). The replica shape inspection device 31 and the pattern formation device 41 share defect information about the defective cell via a network or the like.

[0072] The pattern forming device 41 includes a transport mechanism 42 that transports the glass substrate 15 coated with a photocurable resin carried in from an upstream device to the pattern forming device 41, or transports the glass substrate 15 on which a fine concavo-convex pattern has been formed by the pattern forming device 41 to a downstream device. The pattern forming device 41 also accommodates the glass substrate 15 coated with a photocurable resin carried in by the transport mechanism 42 in a gantry 13, and from there, the device includes an unwinder 5 and a winder 6 similar to those of the microstructure transfer device 1 shown in the first embodiment, as well as various rolls (not shown), to form (transfer) the fine concavo-convex pattern of the replica 20 onto the glass substrate 15.

[0073] According to this embodiment, since a plurality of replicas can be continuously fixed to a sheet-like body by the replica continuous forming device 21, it is possible to reduce the setup time for replica replacement, as in the first embodiment.

[0074] Furthermore, according to this embodiment, cells determined to be defective by the replica shape inspection device 31 can be automatically skipped by the pattern forming device 41, making it possible to form fine uneven patterns using only good replicas, thereby improving the yield of glass substrates having fine uneven patterns formed on their surfaces. [Example]

[0075] 10 is a plan view of a micropattern transfer device of Example 3 according to another embodiment of the present invention. This Example differs from Examples 1 and 2 in that the micropattern transfer device includes a mechanism for applying a photocurable resin for a replica and a mechanism for applying a photocurable resin for a glass substrate. The same components as those in Examples 1 and 2 are given the same reference numerals, and redundant explanations will be omitted below.

[0076] As shown in FIG. 10, the microstructure transfer device 1a includes a replica photocurable resin application mechanism 22a and a glass substrate photocurable resin application mechanism 22b, one on each side of the gantry 13. In FIG. 10, the length direction of the microstructure transfer device 1a is defined as the X direction, and the width direction of the microstructure transfer device 1a is defined as the Y direction. The replica photocurable resin application mechanism 22a, which is located on the side where the mold (metal part) 14 placed on the stage 11 and carried into the gantry 13 is located, is movable back and forth in the Y direction and is configured to apply photocurable resin to the mold (metal part) 14 placed on the stage 11 and carried into the gantry 13. The glass substrate photocurable resin application mechanism 22b, which is located on the side where the glass substrate 15 placed on the stage 11 and carried into the gantry 13 is located, is movable back and forth in the Y direction and is configured to apply photocurable resin to the glass substrate 15 placed on the stage 11 and carried into the gantry 13. As the replica photocurable resin application mechanism 22a and the glass substrate photocurable resin application mechanism 22b, for example, an inkjet printer or the like is used.

[0077] Next, the operation of the micropattern transfer device 1a in the replica formation process will be described. FIG. 11A is a diagram showing a state in which a mold is set on a stage in the replica formation process. As shown in FIG. 11A, a mold (metal mold) 14 is set (placed) on the stage 11. At this time, the replica photocurable resin application mechanism 22a is waiting at its initial position. FIG. 11B is a diagram showing a state in which the photocurable resin is applied and the mold is positioned in the replica formation process. The replica photocurable resin application mechanism 22a moves in the Y direction to a position where the mold (metal mold) 14 placed on the stage 11 is carried into the gantry 13. The replica photocurable resin application mechanism 22a applies photocurable resin to the surface of the mold (metal mold) 14 when the mold (metal mold) 14 placed on the stage 11 is carried into the gantry 13. FIG. 11C is a diagram showing a state in which replicas are continuously formed in the replica formation process. In FIG. 11C, as shown in Example 1 above, a replica is formed on a sheet-like body (film) (not shown) in which the fine concave-convex pattern formed on the surface of the mold (metal mold) 14 is inversely transferred. 11D is a diagram showing the mold returning state in the replica formation process. After the replica is formed, the mold (metal mold) 14 is carried out of the gantry while still placed on the stage 11.

[0078] Next, the operation of the micropattern transfer device 1a in the pattern formation process on a glass substrate will be described. FIG. 12A is a diagram showing the state in which a glass substrate is set on a stage in the pattern formation process on a glass substrate. As shown in FIG. 12A, a glass substrate 15 is set (placed) on the stage 11. At this time, the mechanism 22b for applying a photocurable resin for a glass substrate waits at its initial position. FIG. 12B is a diagram showing the state in which a photocurable resin is applied and the glass substrate is positioned in the pattern formation process on a glass substrate. As shown in FIG. 12B, the mechanism 22b for applying a photocurable resin for a glass substrate moves in the Y direction to a region of the glass substrate 15 placed on the stage 11 where a pattern is to be formed and where the glass substrate 15 is to be loaded into the gantry 13. When the glass substrate 15 placed on the stage 11 is loaded into the gantry 13, the mechanism 22b for applying a photocurable resin for a glass substrate applies a photocurable resin to the region of the glass substrate 15 where a pattern is to be formed. FIG. 12C is a diagram showing the state in which patterns are continuously formed in the pattern formation process on a glass substrate. In the gantry 13, a fine concave-convex pattern of the replica 20 is formed (transferred) on an area of ​​the glass substrate 15 placed on the stage 11 where a photocurable resin has been applied by the glass substrate photocurable resin application mechanism 22b. Fig. 12D is a diagram showing the glass substrate being returned in the pattern formation process on the glass substrate. After the pattern is formed on the glass substrate 15, the glass substrate 15 is carried out of the gantry while still placed on the stage 11.

[0079] According to this embodiment, by providing a photocurable resin application mechanism for replicas 22a and a photocurable resin application mechanism for glass substrates 22b that can operate independently during the replica formation process and the pattern formation process on the glass substrate, it is possible to use the same microstructure transfer device 1a to perform everything from applying the photocurable resin to continuous replica formation and even pattern formation on the glass substrate 15, thereby improving workability. [Example]

[0080] Fig. 13 is a front view of a micropattern transfer device of Example 4 according to another embodiment of the present invention (view as viewed in the direction of the arrow A in Figs. 1 and 6), and Fig. 14 is a view as viewed in the direction of the arrow A in Fig. 13. This Example differs from Examples 1 to 3 in that the outer peripheral surface of the imprint roll is provided with a urethane rubber lining and a backup roll mechanism is provided directly above the imprint roll.

[0081] As shown in FIG. 13 , the micropattern transfer device of this embodiment includes a pair of Z-axis drive units 51, each disposed above the imprint roll 2 near both longitudinal ends thereof, and a load cell 52 disposed below each Z-axis drive unit 51 for monitoring the load. As shown in FIG. 14 , the imprint roll 2 has a urethane rubber lining 56 on its outer circumferential surface, and a backup roll mechanism 55 disposed directly above the imprint roll 2. As shown in FIG. 13 , multiple backup roll mechanisms 55 are provided at predetermined intervals along the longitudinal direction of the imprint roll 2. These multiple backup roll mechanisms enable individual adjustment of the height and pressing force. Note that in the example shown in FIG. 13 , a mold (metal mold) 14 is placed on the stage 11, i.e., multiple replicas are continuously fixed to the sheet-like body (film) 4. However, when a micropattern is transferred to a glass substrate 15 using replicas, the glass substrate 15 is placed on the stage 11.

[0082] According to this embodiment, the height and pressing force of the imprint roll 2 can be adjusted individually by the backup roll mechanism 55, so that deflection of the imprint roll 2 itself can be suppressed.

[0083] Furthermore, since the height and pressing force of the imprint roll 2 can be adjusted individually using the backup roll mechanism 55, the imprint roll 2 can flexibly follow the sheet-like body (film) against the mold (metal mold) and imprint with uniform pressure.

[0084] Furthermore, because the backup roll mechanism 55 can individually adjust the height and pressing force of the imprint roll 2, when multiple molds are used, it is possible to absorb the differences in level between the molds, flexibly follow them, and imprint with uniform pressure. Furthermore, the backup roll mechanism 55 can transmit pressure uniformly to highly viscous resin materials, enabling high-precision imprinting. Furthermore, after imprinting is completed and the photocurable resin has hardened, the backup roll mechanism 55 prevents roller escape during peeling, even for films with poor peelability or photocurable resins with strong adhesive strength, and enables the film to be reliably peeled with uniform peeling force (tension).

[0085] 13, multiple backup roll mechanisms 55 are provided at predetermined intervals along the longitudinal direction of the imprint roll 2, but this is not necessarily limited to this, and the backup roll mechanisms 55 may be provided at any one location along the longitudinal direction of the imprint roll 2. The number of backup roll mechanisms 55 to be provided may be set appropriately as needed.

[0086] Furthermore, the arrangement of the backup roll mechanisms 55 when installed is not limited to the single row shown in the figure. For example, the backup roll mechanisms 55 may be arranged in multiple rows, such as two or three rows, on the outer periphery of the imprint roll 2.

[0087] The present invention is not limited to the above-described embodiment, but includes various modifications. For example, the above-described embodiments have been described in detail to clearly explain the present invention, and are not necessarily limited to those including all of the described configurations. Furthermore, it is possible to replace part of the configuration of one embodiment with the configuration of another embodiment, and it is also possible to add the configuration of another embodiment to the configuration of one embodiment. Furthermore, it is also possible to add, delete, or replace part of the configuration of each embodiment with the configuration of another embodiment. [Explanation of symbols]

[0088] 1,1a···Microstructure transfer device 2. Imprint roll 3. Guide roll 3a: Upstream guide roll (first guide roll) 3b: Downstream guide roll (second guide roll) 4. Sheet-like body (film) 5...Unwinder 6... Winder 7. Dancer Roll 8...Curing light irradiator 9. Dry cleaner 10. Laser marker 11 Stages 12 Cleaning roll 13. Gantry 14. Mold 15. Glass substrate 16. Film clamp 17a Upstream imaging unit 17b Downstream imaging unit 18. Imaging unit support part 19. Resin 20... Replica 21. Continuous replica forming device 22...Photo-curable resin application mechanism 22a···Photo-curable resin application mechanism for replicas 22b...Photocurable resin coating mechanism for glass substrates 31 Replica shape inspection device 41. Pattern forming device 42. Transfer mechanism 51 Z-axis drive unit 52 Load cell 55 Backup roll mechanism 56···Urethane rubber lining

Claims

1. an unwinder that winds a flexible sheet-like material and unwinds the sheet-like material; a winding machine that winds up the sheet material transported via a plurality of guide rolls; a stage disposed between the unwinder and the winder, on which a mold having a fine concave-convex pattern formed on a surface thereof and a photocurable resin applied thereto is placed; an imprint roll that reciprocates between at least both ends of the mold while pressing the sheet-like body against the mold from above; a curing light irradiator that irradiates curing light onto the sheet-like body pressed against the mold; a film clamp that clamps the sheet-like body to an end of the mold or substrate that is located upstream in a conveying direction of the sheet-like body when the imprint roll moves while pressing the sheet-like body; A microstructure transfer method for a microstructure transfer device that continuously fixes a plurality of replicas to the sheet-like body, comprising: Among the plurality of guide rolls, a first guide roll is adjacent to the imprint roll and positioned upstream in the conveying direction of the sheet-like body, and a second guide roll is adjacent to the imprint roll and positioned downstream in the conveying direction of the sheet-like body, the second guide roll is located above the imprint roll and moves together with the imprint roll at a constant speed when the imprint roll moves while pressing the sheet-like body; A method for transferring a microstructure using a microstructure transfer device, characterized in that the curing light irradiator is located between the imprint roll and the first guide roll, and when the imprint roll moves while pressing the sheet-like body, the curing light irradiator moves downstream to follow the imprint roll and the second guide roll while irradiating curing light.

2. 2. The method for transferring a micropattern of a micropattern transfer device according to claim 1, It has a photo-curable resin application mechanism, A method for transferring a fine structure using a fine structure transfer device, comprising applying the photocurable resin to the mold and / or the substrate.

3. An unwinder that winds a flexible sheet-like body and unwinds the sheet-like body; a winding machine that winds up the sheet material transported via a plurality of guide rolls; a stage disposed between the unwinder and the winder, on which a mold having a fine concave-convex pattern formed on a surface thereof and a photocurable resin applied thereto is placed; an imprint roll that reciprocates between at least both ends of the mold while pressing the sheet-like body against the mold from above; a curing light irradiator that irradiates curing light onto the sheet-like body pressed against the mold; a film clamp that clamps the sheet-like body to an end of the mold or substrate that is located upstream in a conveying direction of the sheet-like body when the imprint roll moves while pressing the sheet-like body; A microstructure transfer method for a microstructure transfer device that continuously fixes a plurality of replicas to the sheet-like body, comprising: Among the plurality of guide rolls, a first guide roll is adjacent to the imprint roll and positioned upstream in the conveying direction of the sheet-like body, and a second guide roll is adjacent to the imprint roll and positioned downstream in the conveying direction of the sheet-like body, the second guide roll is located above the imprint roll and moves together with the imprint roll at a constant speed when the imprint roll moves while pressing the sheet-like body; A method for transferring a fine structure using a fine structure transfer device, characterized in that the curing light irradiator is located between the imprint roll and the first guide roll, and the imprint roll moves downstream at a constant speed together with the second guide roll while pressing the sheet-like body, and then moves downstream while irradiating curing light.

4. 4. The method for transferring a fine structure using a fine structure transfer device according to claim 3, It has a photo-curable resin application mechanism, A method for transferring a fine structure using a fine structure transfer device, comprising applying the photocurable resin to the mold and / or the substrate.

Images