Vacuum Pump System

Abstract

To make it possible for a device computer and a control device of a valve to communicate with a control device of a vacuum pump.SOLUTION: A vacuum pump system 100 includes a vacuum pump 1, a valve 2, and a device computer 3. The vacuum pump 1 evacuates an exhaust object device CH and has a pump control device 11. The valve 2 controls a pressure inside the exhaust object device CH by controlling a valve opening, and has a valve control device 21. The device computer 3 is connected to the valve 2. The valve control device 21 can communicate with the device computer 3 with the usage of a first protocol or a second protocol. The pump control device 11 can communicate with the usage of a third protocol having compatibility with the second protocol. The valve control device 21 uses the second protocol as a protocol used for communication, and communicates with the device computer 3 and the pump control device 11 using the second protocol.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present invention relates to a vacuum pump system. [Background technology]

[0002] Some vacuum pumps include a turbine vane pump section consisting of fixed vanes and rotary vanes, and a drag pump section located downstream of the turbine vane pump section in the exhaust direction. A vacuum pump system including this vacuum pump is used as a means for evacuating an apparatus to be evacuated, such as a process chamber for performing processes such as dry etching or CVD (Chemical Vapor Deposition). In this vacuum pump system, a valve is provided between the vacuum pump and the apparatus to be evacuated (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2016-21789 Summary of the Invention [Problem to be solved by the invention]

[0004] The vacuum pump system may further include an equipment computer connected to the valve. This equipment computer can communicate with the valve control device using a predetermined protocol and can acquire various information obtained by the valve control device in order to monitor the status of the vacuum pump system and / or the process being performed in the equipment to be evacuated.

[0005] On the other hand, in order to obtain more detailed information about the vacuum pump system and / or process, information obtained by the vacuum pump control device may be required in addition to the valve information. However, the vacuum pump control device communicates with other devices (e.g., other vacuum pumps) using a protocol different from the one used for communication between the above-mentioned equipment computer and the valve control device. Therefore, even if the vacuum pump control device is physically connected to the equipment computer and the valve control device, it cannot communicate with the equipment computer and the valve control device. Furthermore, vacuum pumps have pre-defined protocols in anticipation of multiple use, and these protocols often cannot be changed.

[0006] An object of the present invention is to enable communication between an equipment computer and a valve control device in a vacuum pump system and a vacuum pump control device whose protocol cannot be changed. [Means for solving the problem]

[0007] A vacuum pump system according to one aspect of the present invention includes a vacuum pump, a valve, and an equipment computer. The vacuum pump evacuates an equipment to be evacuated. The valve is disposed between the equipment to be evacuated and the vacuum pump, and controls the pressure inside the equipment to be evacuated by controlling the valve opening. The equipment computer is connected to the valve. In this vacuum pump system, the valve has a valve control device. The valve control device is capable of communicating with the equipment computer using either a first protocol or a second protocol different from the first protocol. The vacuum pump has a pump control device. The pump control device is connected to the valve control device and is capable of communicating with other equipment using a third protocol compatible with the second protocol. In the above vacuum pump system, when communication is performed between the valve control device and the pump control device, the valve control device uses the second protocol as the protocol used for communication, and communicates with the equipment computer and the pump control device using the second protocol. [Effects of the Invention]

[0008] In the vacuum pump system according to one aspect of the present invention, when communication is performed between the valve control device and the pump control device, the protocol used by the valve control device for communication is the second protocol. This allows the equipment computer, the valve control device, and the pump control device to communicate with each other using the common second protocol. As a result, data can be transmitted and received between the equipment computer, the valve control device, and the pump control device, which cannot change the protocol. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a diagram showing a configuration of a vacuum pump system according to an embodiment; [Figure 2] FIG. 2 is a diagram illustrating the configuration of an equipment computer. [Figure 3] FIG. 2 is a diagram illustrating a configuration of a pump control device. [Figure 4] FIG. 2 is a diagram illustrating a configuration of a valve control device. [Figure 5] FIG. 4 is a processing sequence diagram showing an operation when communication is performed between a valve control device and a pump control device. [Figure 6] FIG. 10 is a process sequence diagram showing a return operation to a normal state. DETAILED DESCRIPTION OF THE INVENTION

[0010] <Vacuum pump system configuration> The configuration of a vacuum pump system according to one embodiment will be described below with reference to the drawings. Fig. 1 shows the configuration of a vacuum pump system 100 according to the embodiment. The vacuum pump system 100 is a system that exhausts gas from inside an exhaust target device CH. The exhaust target device CH is, for example, a process chamber of a semiconductor manufacturing device, various film deposition devices, an etching device, etc.

[0011] The vacuum pump system 100 includes a vacuum pump 1, a valve 2, and an equipment computer 3. The vacuum pump 1 is connected to the inside of the evacuation target equipment CH via the valve 2. The vacuum pump 1 evacuates the inside of the evacuation target equipment CH. The vacuum pump 1 is a pump (e.g., a turbomolecular pump) that has a rotor and a stator and evacuates the evacuation target equipment CH by rotating the rotor. The vacuum pump 1 includes a pump control device 11. The pump control device 11 controls the vacuum pump 1 and collects and stores various data related to the vacuum pump 1 (referred to as pump-related data D1).

[0012] The valve 2 is a device that switches between communication between the suction side of the vacuum pump 1 and the inside of the exhaust target device CH by opening and closing the valve. The valve 2 also controls the pressure inside the exhaust target device CH by controlling the opening degree of the valve to control the suction flow rate inside the exhaust target device CH by the vacuum pump 1. The valve 2 has a valve control device 21. The valve control device 21 controls the valve 2 and collects and stores various data related to the valve 2 (referred to as valve-related data D2).

[0013] The valve control device 21 is connected to a vacuum gauge 4. The vacuum gauge 4 measures the pressure inside the evacuation target device CH. The valve control device 21 can collect the pressure inside the evacuation target device CH measured by the vacuum gauge 4 as valve-related data D2.

[0014] The equipment computer 3 is connected to the valve control device 21 and performs various settings for the vacuum pump system 100. Specifically, the equipment computer 3 sets a set pressure inside the exhaust target equipment CH and sends it to the valve control device 21. During operation of the vacuum pump system 100, the valve control device 21 controls the opening of the valve 2 so that the set pressure received from the equipment computer 3 becomes the set pressure.

[0015] <Device computer configuration> The configuration of the equipment computer 3 will be described using Fig. 2. Fig. 2 is a diagram showing the configuration of the equipment computer 3. The equipment computer 3 is a computer system equipped with a CPU, a storage device such as a ROM, various interfaces, a display, etc. The equipment computer 3 has a storage unit 31 and a control unit 32.

[0016] The storage unit 31 is a part or all of a storage area provided in a storage device constituting the equipment computer 3. The storage unit 31 stores various data, various programs, etc. related to the vacuum pump system 100. Specifically, the storage unit 31 stores a first communication program P1, a second communication program P2, pump-related data D1, and valve-related data D2.

[0017] The first communication program P1 is a program for communicating with an external device or the like using a first protocol. The second communication program P2 is a program for communicating with an external device or the like using a second protocol. The second protocol is a communication protocol different from the first protocol and is incompatible with the first protocol. Here, "incompatible" means that the basic configurations (e.g., communication specifications, etc.) of the first protocol and the second protocol are different. In other words, it means that a device using the first protocol cannot communicate with a device using the second protocol.

[0018] The control unit 32 is a hardware part that is configured by a CPU that constitutes the equipment computer 3 and various interfaces, and executes various information processing in the vacuum pump system 100.

[0019] The control unit 32 is connected to the valve control device 21. The control unit 32 is able to communicate with the valve control device 21 using a first protocol by executing a first communication program P1. The control unit 32 is able to communicate with the valve control device 21 using a second protocol by executing a second communication program P2. In other words, the control unit 32 is able to communicate with the valve control device 21 using either the first protocol or the second protocol.

[0020] Note that, under normal circumstances, such as when the pump control device 11 and the valve control device 21 do not communicate with each other, the control unit 32 can communicate with the valve control device 21 using the first protocol. This allows the control unit 32 to communicate with other devices (e.g., other computers) connected to the device computer 3 under normal circumstances.

[0021] Being able to communicate with the valve control device 21 allows the control unit 32 to collect valve-related data D2 from the valve control device 21 and store it in the memory unit 31. The control unit 32 can also collect and store pump-related data D1 stored in the valve control device 21. In this way, the equipment computer 3 can log various data acquired by the vacuum pump system 100.

[0022] <Configuration of pump control device> The configuration of the pump control device 11 will be described using Fig. 3. Fig. 3 is a diagram showing the configuration of the pump control device 11. The pump control device 11 is a computer system equipped with a CPU, a storage device such as a ROM, various interfaces, etc. The pump control device 11 has a storage unit 111 and a control unit 112.

[0023] The memory unit 111 is a part or all of a memory area provided in a storage device constituting the pump control device 11. The memory unit 111 stores various data related to the vacuum pump 1, various programs related to the control of the vacuum pump 1, etc. Specifically, the memory unit 111 stores a third communication program P3 and pump-related data D1.

[0024] The third communication program P3 is a program for communicating with an external device or the like using a third protocol. The third protocol is not compatible with the above-mentioned first protocol, but is compatible with the second protocol. Here, "compatible" means that the second protocol and the third protocol share the same basic configuration (e.g., communication specifications, basic packet structure, minimum parameters required to realize communication, etc.), but some of the parameters used in communication are different. This enables devices using the second protocol to communicate with devices using the third protocol.

[0025] Unlike the device computer 3, the pump control device 11 has only the third communication program P3. This means that the pump control device 11 is designed on the assumption that it will communicate with other pump control devices, and the communication protocol of the pump control device 11 is fixed to the third protocol. In other words, the communication protocol of the pump control device 11 cannot be changed.

[0026] The pump-related data D1 is data that represents the state of the vacuum pump 1. The pump-related data D1 includes, for example, the rotation speed of the rotor of the vacuum pump 1, the current value supplied to the motor that rotates the rotor, the temperature of the vacuum pump 1, and the position fluctuation value of the rotor. In addition, the pump-related data D1 may include information regarding an alarm that has occurred in the vacuum pump 1. Such pump-related data D1 can be used to monitor, for example, the state of product adhesion inside the vacuum pump 1.

[0027] The control unit 112 is a hardware part configured by a CPU and various interfaces that constitute the pump control device 11, and executes various information processing related to the vacuum pump 1. Specifically, the control unit 112 executes control of the vacuum pump 1. The control unit 112 also acquires measurement values ​​of various sensors provided in the vacuum pump 1 as the above-mentioned pump-related data D1 and stores them in the memory unit 111.

[0028] By executing the third communication program P3, the control unit 112 is able to communicate with other devices using the third protocol. For example, the control unit 112 is able to communicate with pump control devices of other vacuum pumps, a server that manages multiple vacuum pumps, etc.

[0029] As described above, a device using the second protocol can communicate with a device using the third protocol. Therefore, the control unit 112 can communicate with the valve control device 21 using the second protocol by executing the third communication program P3. This allows the control unit 112 to transmit the pump-related data D1 stored in the memory unit 111 to the valve control device 21.

[0030] <Valve control device configuration> The configuration of the valve control device 21 will be described using Fig. 4. Fig. 4 is a diagram showing the configuration of the valve control device 21. The valve control device 21 is a computer system equipped with a CPU, a storage device such as a ROM, various interfaces, etc. The valve control device 21 has a storage unit 211 and a control unit 212.

[0031] The storage unit 211 is a part or all of a storage area provided in a storage device constituting the valve control device 21. The storage unit 211 stores various data related to the valve 2, various programs related to the control of the valve 2, etc. Specifically, the storage unit 211 stores a first communication program P1, a second communication program P2, pump-related data D1, and valve-related data D2.

[0032] The first communication program P1 and the second communication program P2 stored in the storage unit 211 and the first communication program P1 and the second communication program P2 stored in the storage unit 31 of the equipment computer 3 use the same reference numerals, but this simply means that these programs have the same functions. The first communication program P1 and the second communication program P2 stored in the storage unit 211 and the first communication program P1 and the second communication program P2 stored in the storage unit 31 of the equipment computer 3 are different programs when the hardware configuration, operating system, etc. differ between the equipment computer 3 and the valve control device 21.

[0033] The valve-related data D2 includes, for example, the pressure inside the exhaust target device CH, the target pressure inside the exhaust target device CH, the valve opening of the valve 2, and the estimated flow rate when the inside of the exhaust target device is evacuated by the vacuum pump 1. This information is information related to the process executed inside the exhaust target device CH. Therefore, such valve-related data D2 can be used to monitor, for example, the status of the process executed inside the exhaust target device CH.

[0034] The control unit 212 is a hardware part configured by a CPU and various interfaces that constitute the valve control device 21, and executes various information processing related to the valve 2. Specifically, the control unit 212 executes control of the valve 2. For example, the control unit 212 controls the valve opening of the valve 2 so that the pressure inside the exhaust target device CH becomes a set pressure. The control unit 212 also acquires measurement values ​​of various sensors provided in the valve 2, pressure measured by the vacuum gauge 4, and the like as valve-related data D2, and stores them in the memory unit 111.

[0035] The control unit 212 is connected to the equipment computer 3 and is capable of communicating with the equipment computer 3 using a first protocol by executing a first communication program P1. The control unit 212 is also connected to the pump control device 11 and is capable of communicating with the pump control device 11 by executing a second communication program P2. The control unit 212 is also capable of communicating with the equipment computer 3 when the second communication program P2 is being executed.

[0036] In other words, when communicating using the first protocol, the control unit 212 can communicate only with the device computer 3, and when communicating using the second protocol, it can communicate with both the device computer 3 and the pump control device 11.

[0037] This allows the control unit 212 to receive pump-related data D1 stored in the memory unit 111 of the pump control device 11 using the second protocol, and store the data in the memory unit 211 of the valve control device 21. The control unit 212 can also transmit the pump-related data D1 received from the pump control device 11 and the valve-related data D2 stored in the memory unit 211 to the device computer 3 as logging data.

[0038] <Vacuum pump system operation> <Operation when valve control device and pump control device communicate> The operation of the vacuum pump system 100 having the above configuration will be described below. First, the operation when communication occurs between the valve control device 21 and the pump control device 11 will be described using FIG. 5. FIG. 5 is a processing sequence diagram showing the operation when communication occurs between the valve control device 21 and the pump control device 11. The operation shown in the processing sequence diagram of FIG. 5 is executed, for example, when the valve control device 21 acquires valve-related data D2 and then acquires pump-related data D1 at the timing when the valve-related data D2 was acquired from the pump control device 11. In other words, the acquisition timing of the valve-related data D2 and the acquisition timing of the pump-related data D1 are substantially the same. As a result, the pump-related data D1 and the valve-related data D2 correspond to each other, allowing for more accurate data logging.

[0039] Also, before the operations described below, it is assumed that the equipment computer 3 and the valve control device 21 are able to communicate using the first protocol. Note that if the equipment computer 3 and the valve control device 21 are able to communicate using the second protocol before the operations described below, steps S11 to S14 described below among the operations shown in Fig. 5 are unnecessary.

[0040] When the valve control device 21 acquires the valve-related data D2 and simultaneously acquires the pump-related data D1 from the pump control device 11, the control unit 212 of the valve control device 21 transmits a client operation request to the control unit 32 of the device computer 3 (step S11). The client operation request commands the device that receives this request to operate as a client in a server-client system. For example, the device that receives this request will no longer actively acquire data, etc., from the device operating as a server.

[0041] The control unit 32 that has received the client operation request transmits a server operation request to the control unit 212 of the valve control device 21 (step S12). The server operation request commands the device that received this request to operate as a server in a server-client system. For example, the device that received this request actively acquires data, etc. from other devices.

[0042] The control unit 32 of the equipment computer 3 that has received the client operation request and then transmitted the server operation request changes the protocol used for communication from the first protocol to the second protocol (step S13). Specifically, by executing the second communication program P2 stored in the storage unit 31 of the equipment computer 3, the control unit 32 becomes able to communicate with another equipment (valve control device 21) using the second protocol.

[0043] The control unit 212 of the valve control device 21, which receives the server operation request after transmitting the client operation request, changes the protocol used for communication from the first protocol to the second protocol (step S14). Specifically, by executing the second communication program P2 stored in the storage unit 211 of the valve control device 21, the control unit 32 becomes able to communicate with other devices using the second protocol.

[0044] By executing the above steps S11 to S14, a client-server system is formed in which the valve control device 21 acts as the server and the device computer 3 and pump control device 11 act as clients, and communication becomes possible in this client-server system using the second protocol.

[0045] After executing the above steps S11 to S14, the control unit 212 of the valve control device 21 acquires the valve-related data D2 and stores it in the storage unit 211. When acquiring the valve-related data D2, the control unit 212 transmits a transmission request for the pump-related data D1 to the pump control device 11 (step S15).

[0046] The control unit 112 of the pump control device 11 that has received the transmission request transmits the pump-related data D1 acquired when the transmission request was received to the control unit 212 of the valve control device 21 (step S16). The control unit 212 stores the received pump-related data D1 in the storage unit 211 in association with the valve-related data D2 acquired at the same time as the pump-related data D1.

[0047] Thereafter, the control unit 32 of the equipment computer 3 uses the second protocol to transmit a data transmission request for the pump-related data D1 and the valve-related data D2 to the valve control device 21 (step S17).

[0048] The control unit 212 of the valve control device 21, which has received the data transmission request, transmits the pump-related data D1 stored in the storage unit 211 and the valve-related data D2 associated with the pump-related data D1 to the device computer 3 using the second protocol (step S18). The control unit 32, which has received the pump-related data D1 and the valve-related data D2, stores these data in the storage unit 31.

[0049] <Return to normal state> As described above, during normal operation, such as when the pump control device 11 and the valve control device 21 are not communicating with each other, the equipment computer 3 and the valve control device 21 communicate with each other using the first protocol. Hereinafter, with reference to FIG. 6, a return operation to a normal state in which the valve control device 21 and the equipment computer 3 communicate with each other using the first protocol will be described. FIG. 6 is a processing sequence diagram showing the return operation to the normal state. The operation shown in the processing sequence diagram of FIG. 6 is executed, for example, after the valve control device 21 acquires pump-related data D1 from the pump control device 11 and the equipment computer 3 acquires the pump-related data D1 and valve-related data D2 stored in the valve control device 21. In other words, the operation is executed after the equipment computer 3 and the valve control device 21 have been communicating with each other using the second protocol.

[0050] When the recovery operation is started, the control unit 212 of the valve control device 21 transmits a server operation request to the control unit 32 of the device computer 3 (step S21).

[0051] The control unit 32 that has received the server operation request transmits a client operation request to the control unit 212 of the valve control device 21 (step S22).

[0052] The control unit 32 of the equipment computer 3 that has received the server operation request and then sent the client operation request changes the protocol used for communication from the second protocol to the first protocol (step S23). Specifically, by executing the first communication program P1 stored in the storage unit 31 of the equipment computer 3, the control unit 32 becomes able to communicate with another equipment (valve control device 21) using the first protocol.

[0053] The control unit 212 of the valve control device 21, which receives the client operation request after transmitting the server operation request, changes the protocol used for communication from the second protocol to the first protocol (step S24). Specifically, by executing the first communication program P1 stored in the storage unit 211 of the valve control device 21, the control unit 32 becomes able to communicate with other devices using the first protocol.

[0054] By executing the above steps S21 to S24, a client-server system is formed in which the equipment computer 3 is the server and the valve control device 21 is the client, and in this client-server system, communication is possible using the first protocol. Furthermore, by being able to communicate using the first protocol, the equipment computer 3 is able to communicate with other equipment (e.g., other computers) connected to the equipment computer 3. For example, the equipment computer 3 can transmit pump-related data D1 and valve-related data D2 acquired from the pump control device 11 and the valve control device 21 and stored in the storage unit 31 to other equipment using the first protocol.

[0055] Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications are possible without departing from the gist of the invention.

[0056] The vacuum pump system 100 may be connected to another vacuum pump system. In this case, the valve 2 of the vacuum pump system 100 is connected to a valve of the other vacuum pump system to form one network. Also, the vacuum pump 1 of the vacuum pump system 100 is connected to a vacuum pump of the other vacuum pump system to form another network independent of the network formed by multiple valves.

[0057] The vacuum pump 1 may be connected to other devices other than other vacuum pumps that are capable of communicating using a third protocol.

[0058] The operations of the above-described equipment computer 3, pump control device 11, and valve control device 21 can also be applied to a general client-server system. For example, the equipment computer 3 can be a server in one client-server system, the valve control device 21 can be a client in the client-server system, and the pump control device 11 can be a client in another client-server system.

[0059] It will be appreciated by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0060] (First Aspect) A vacuum pump system according to the first aspect includes a vacuum pump, a valve, and an equipment computer. The vacuum pump evacuates an equipment to be evacuated. The valve is disposed between the equipment to be evacuated and the vacuum pump, and controls the pressure inside the equipment to be evacuated by controlling the opening of the valve. The equipment computer is connected to the valve. In this vacuum pump system, the valve has a valve control device. The valve control device is capable of communicating with the equipment computer using either a first protocol or a second protocol different from the first protocol. The vacuum pump has a pump control device. The pump control device is connected to the valve control device and is capable of communicating with other equipment using a third protocol compatible with the second protocol. In this vacuum pump system, when communication is performed between the valve control device and the pump control device, the valve control device uses the second protocol as the protocol used for communication, and communicates with the equipment computer and the pump control device using the second protocol.

[0061] In the vacuum pump system according to the first aspect, when communication is performed between the valve control device and the pump control device, the protocol used by the valve control device for communication is the second protocol. This allows the equipment computer, the valve control device, and the pump control device to communicate with each other using the common second protocol. As a result, data can be transmitted and received between the equipment computer, the valve control device, and the pump control device, which cannot change the protocol.

[0062] (Second Aspect) In the vacuum pump system of the first aspect, the pump control device may store data related to the vacuum pump. In this case, the valve control device may receive the data related to the vacuum pump from the pump control device using a second protocol. In the vacuum pump system according to the second aspect, the data related to the vacuum pump stored in the pump control device, whose protocol cannot be changed, can be acquired by the valve control device.

[0063] (Third Aspect) In the vacuum pump system of the second aspect, the valve control device may transmit data related to the vacuum pump received from the pump control device to the equipment computer using the second protocol. In the vacuum pump system according to the third aspect, data related to the valve stored in the valve control device can be transmitted to the equipment computer that cannot communicate directly with the valve control device.

[0064] (Fourth Aspect) In the vacuum pump of the second or third aspect, the data relating to the vacuum pump may include the rotation speed of the rotor of the vacuum pump and the value of the current supplied to the motor that rotates the rotor. In the vacuum pump system according to the fourth aspect, information relating to the operating state of the vacuum pump can be obtained as the data relating to the vacuum pump.

[0065] (Fifth Aspect) In the vacuum pump systems of the second to fourth aspects, the valve control device may store data related to the valve. In this case, the valve control device may transmit the data related to the vacuum pump and the data related to the valve received from the pump control device to the equipment computer using the second protocol. In the vacuum pump system according to the fifth aspect, both the data related to the vacuum pump and the data related to the corresponding valve can be logged in the equipment computer.

[0066] (Sixth Aspect) In the vacuum pump systems of the first to fifth aspects, the equipment computer may be capable of communicating using the first protocol after communicating using the second protocol. In the vacuum pump system according to the sixth aspect, the equipment computer acquires data of the valve control device and the pump control device using the second protocol, and then becomes capable of communicating with other devices connected to the equipment computer using the first protocol.

[0067] (Seventh Aspect) In the vacuum pump system of the fifth aspect, the data related to the valve may include the pressure inside the exhaust target device, the target pressure inside the exhaust target device, the valve opening, and an estimated flow rate when the vacuum pump evacuates the inside of the exhaust target device. In the vacuum pump system of the seventh aspect, information related to the process performed inside the exhaust target device can be obtained as the data related to the valve. [Explanation of symbols]

[0068] 100: Vacuum pump system CH: Exhaust equipment 1: Vacuum pump 2: Valve 3: Equipment computer 31: Storage section 32: Control section 4: Vacuum gauge 11: Pump control device 111: Storage section 112: Control unit 21: Valve control device 211: Storage section 212: Control unit D1: Pump related data D2: Valve related data

Claims

1. a vacuum pump that draws a vacuum into the device to be evacuated; a valve that is disposed between the exhaust target device and the vacuum pump and controls the pressure inside the exhaust target device by controlling the opening degree of the valve; an instrument computer connected to the valve; A vacuum pump system comprising: the valve has a valve controller capable of communicating with the instrument computer using either a first protocol or a second protocol different from the first protocol; the vacuum pump has a pump controller connected to the valve controller and capable of communicating with other devices using a third protocol that is compatible with the second protocol; When communication is performed between the valve control device and the pump control device, the valve control device uses the second protocol as a protocol for communication, and communicates with the device computer and the pump control device using the second protocol. Vacuum pump system.

2. the pump controller stores data relating to the vacuum pump; the valve controller receiving data regarding the vacuum pump from the pump controller using the second protocol; 10. The vacuum pump system of claim 1.

3. The valve control device includes: transmitting data regarding the vacuum pump received from the pump controller to the instrument computer using the second protocol; 3. The vacuum pump system of claim 2.

4. 3. The vacuum pump system according to claim 2, wherein the data relating to the vacuum pump includes a rotational speed of a rotor of the vacuum pump and a value of a current supplied to a motor that rotates the rotor.

5. The valve controller stores data relating to the valve; The valve control device includes: transmitting the data regarding the vacuum pump and the data regarding the valve received from the pump controller to the instrument computer using the second protocol; 3. The vacuum pump system of claim 2.

6. 2. The vacuum pump system of claim 1, wherein the device computer is capable of communicating using the first protocol after communicating using the second protocol.

7. 6. The vacuum pump system of claim 5, wherein the data related to the valve includes a pressure inside the exhaust target device, a target pressure inside the exhaust target device, an opening degree of the valve, and an estimated flow rate when the vacuum pump evacuates the inside of the exhaust target device.

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