Semiconductor Devices

Abstract

To provide a semiconductor device with low resistance.SOLUTION: A semiconductor device 100 includes: a semiconductor chip 10 including a first electrode 11 connected to a first surface 10a, and a second electrode 12 and a third electrode 13 which are connected to a second surface 10b; a first conductor 21 including a first portion p1 and a first intermediate portion mp1, in which the first portion is connected to the second electrode and the first portion is provided between the semiconductor chip and the first intermediate portion in a first direction Z; a second conductor 22 including a third portion p3, a second intermediate portion mp2, and a fourth portion p4, and disposed along a second direction X directed toward the fourth portion from the third portion, in which a length of the first intermediate portion is longer than a length of the third portion; a third conductor 23 provided on the first surface side; a first connector 41 provided between the first intermediate portion and the third portion; a second connector 42 provided between the second electrode and the first portion; and a third connector 43 provided between the third conductor and the first electrode.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] FIELD An embodiment of the present invention relates to a semiconductor device. [Background technology]

[0002] Semiconductor devices having semiconductor chips such as MOSFETs (Metal Oxide Semiconductor Field Effect Transistors) are used for applications such as power conversion. For example, when the above-mentioned semiconductor device is a vertical MOSFET, a source electrode and a gate electrode provided on the top surface of the semiconductor chip are each connected to a connector provided on the semiconductor chip. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2021-027146 Summary of the Invention [Problem to be solved by the invention]

[0004] The problem to be solved by the present invention is to provide a semiconductor device with low resistance. [Means for solving the problem]

[0005] A semiconductor device according to an embodiment includes a semiconductor chip having a first surface, a second surface, a first electrode electrically connected to the first surface, a second electrode electrically connected to the second surface, and a third electrode electrically connected to the second surface; a first conductive member including a first portion and a first intermediate portion, the first portion being electrically connected to the second electrode, the direction from the semiconductor chip to the first portion being along a first direction, the direction from the first portion to the first intermediate portion being along a second direction intersecting the first direction, and the first portion being provided between the semiconductor chip and the first intermediate portion in the first direction; and a third portion. a second conductive member including a second intermediate portion and a fourth portion, the direction from the third portion toward the fourth portion being along the second direction, the length of the first intermediate portion in the second direction being longer than the length of the third portion in the second direction, and the second intermediate portion being provided between the third portion and the fourth portion in the second direction; a third conductive member provided on the first surface side; a conductive first connecting member provided between the first intermediate portion and the third portion; a conductive second connecting member provided between the second electrode and the first portion; and a conductive third connecting member provided between the third conductive member and the first electrode. In the first direction, the second surface is provided between the third portion and the first surface, and a part of the third portion is provided between the semiconductor chip and the first intermediate portion. [Brief explanation of the drawings]

[0006] [Figure 1] 1 is a schematic diagram of a semiconductor device 100 according to an embodiment. [Figure 2] 1 is a schematic diagram of a semiconductor device 100 according to an embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0007] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In the following description, the same components will be denoted by the same reference numerals, and the description of components that have already been described will be omitted as appropriate.

[0008] In this specification, in order to indicate the positional relationship of parts, etc., the upward direction of the drawing will be described as "up" and the downward direction of the drawing will be described as "down." In this specification, the concepts of "up" and "down" do not necessarily refer to the direction of gravity.

[0009] (Embodiment) The semiconductor device of the embodiment includes a semiconductor chip having a first surface, a second surface, a first electrode electrically connected to the first surface, a second electrode electrically connected to the second surface, and a third electrode electrically connected to the second surface; a first conductive member including a first portion and a first intermediate portion, wherein the first portion is electrically connected to the second electrode, and the direction from the semiconductor chip to the first portion is along a first direction, and the direction from the first portion to the first intermediate portion is along a second direction intersecting the first direction, and the first portion is provided between the semiconductor chip and the first intermediate portion in the first direction; and a second conductive member including a third portion, a second intermediate portion, and a fourth portion, wherein the direction from the third portion to the fourth portion is along the second direction. the length of the first intermediate portion in the second direction is longer than the length of the third portion in the second direction, and the second intermediate portion in the second direction is between the third and fourth portions; a third conductive member including a fifth and sixth portion, wherein the semiconductor chip is provided between the first and fifth portions, the direction from the sixth portion to the fifth portion is along a third direction that intersects the first direction, and the third portion is provided between the fifth portion and the first intermediate portion; a conductive first connecting member provided between the first intermediate portion and the third portion; a conductive second connecting member provided between the second electrode and the first portion; and a conductive third connecting member provided between the fifth portion and the first electrode.

[0010] Fig. 1 is a schematic diagram of a semiconductor device 100 according to an embodiment. Fig. 1(c) is a schematic perspective view of the semiconductor device 100 according to an embodiment. Fig. 1(b) is a schematic cross-sectional view taken along line A1-A2 in Fig. 1(c). Figs. 1(a) and 2 are enlarged views of the schematic cross-sectional view taken along line A1-A2 in Fig. 1(c).

[0011] The semiconductor device 100 includes a semiconductor chip 10, a first conductive member 21, a second conductive member 22, a third conductive member 23, a fourth conductive member 24, a fifth conductive member 25, a first connecting member 41, a second connecting member 42, a third connecting member 43, and a resin 30.

[0012] The semiconductor chip 10 is a chip in which a vertical MOSFET, an IGBT (Insulated Gate Bipolar Transistor), or the like is provided on a semiconductor substrate such as Si (silicon), SiC (silicon carbide), GaAs (gallium arsenide), or GaN (gallium nitride). The semiconductor chip 10 includes a first electrode 11 (e.g., a drain electrode), a second electrode 12 (e.g., a source electrode), and a semiconductor layer 10s. In this example, the semiconductor layer 10s is provided between the first electrode 11 and the second electrode 12. The semiconductor chip 10 also includes a third electrode 13 (e.g., a gate electrode). For example, the semiconductor chip 10 includes a first surface (e.g., a bottom surface) 10a and a second surface (e.g., an top surface) 10b opposite to the first surface 10a. The first electrode 11 is provided on the first surface 10a. The second electrode 12 and the third electrode 13 are provided on the second surface 10b.

[0013] 1(a) and 1(b), the first conductive member 21 is provided on the second surface 10b side of the semiconductor chip 10, and includes a first portion p1, a first intermediate portion mp1, and a second portion p2. Note that the first conductive member 21 does not necessarily have to include the second portion p2.

[0014] The first portion p1 is electrically connected to the semiconductor chip 10. In this example, the first portion p1 is electrically connected to the second electrode 12 (for example, the source electrode) (see FIG. 1(a)).

[0015] Here, the X direction (X-axis direction), the Y direction (Y-axis direction) that intersects perpendicularly with the X direction, and the Z direction (Z-axis direction) that intersects perpendicularly with the X and Y directions are defined.

[0016] The direction from the semiconductor chip 10 toward the first portion p1 is along the first direction (Z-axis direction). For example, the first portion p1 is located above the semiconductor chip 10.

[0017] The direction from the first portion p1 toward the first intermediate portion mp1 and the second portion p2 is along the second direction. The second direction intersects with the first direction (Z-axis direction). In this example, the second direction is the X-axis direction. For example, at least a portion of the first conductive member 21 extends along the X-axis direction.

[0018] The first intermediate portion mp1 is located between the second portion p2 and the first portion p1 in the second direction (X-axis direction). The position of the first intermediate portion mp1 in the second direction is between the position of the second portion p2 in the second direction and the position of the first portion p1 in the second direction. In this example, the first intermediate portion mp1 is located above the second portion p2 and the first portion p1. The first portion p1 and the second portion p2 are provided between the semiconductor chip 10 and the first intermediate portion mp1 in the first direction (Z-axis direction). The first intermediate portion mp1 is provided to relieve stress applied to the semiconductor chip 10. The first intermediate portion mp1 is, for example, along the XY plane and parallel to the XY plane.

[0019] The second conductive member 22 includes a third portion p3 and a fourth portion p4. The direction from the third portion p3 to the fourth portion p4 is along the second direction. The second direction intersects with the first direction (Z-axis direction). The third portion p3 is, for example, along the XY plane and parallel to the XY plane.

[0020] The second conductive member 22 may further include a second intermediate portion mp2 in addition to the third portion p3 and the fourth portion p4. In the second direction, the second intermediate portion mp2 is located between the third portion p3 and the fourth portion p4. In this example, the third portion p3 is located higher than the fourth portion p4. For example, the position of the second intermediate portion mp2 in the first direction (Z-axis direction) is between the position of the third portion p3 in the first direction and the position of the fourth portion p4 in the first direction.

[0021] The second portion p2 is provided on the second intermediate portion mp2. In the first direction, the second portion p2 overlaps with the second intermediate portion mp2. That is, the second portion p2 is provided along the second intermediate portion mp2.

[0022] As shown in FIG. 2, the length L1 of the first intermediate portion mp1 in the second direction (in this example, the X-axis direction) is longer than the length L2 of the third portion p3 in the second direction.

[0023] As shown in FIG. 1(a), the first connection member 41 is provided between the first intermediate portion mp1 and the third portion p3. The first connection member 41 connects the first intermediate portion mp1 and the third portion p3. The first connection member 41 is conductive. The first connection member 41 includes, for example, solder.

[0024] Preferably, the first connecting member 41 is further provided between the second portion p2 and the second intermediate portion mp2.

[0025] 2, the second portion p2 and the second intermediate portion mp2 preferably extend along a fourth direction that intersects with the first and second directions. In other words, the second portion p2 and the second intermediate portion mp2 preferably extend in the fourth direction.

[0026] In the first direction, the second surface 10b of the semiconductor chip 10 is preferably provided between the third portion p3 and the first surface 10a of the semiconductor chip 10. Furthermore, the second surface 10b of the semiconductor chip 10 is preferably provided between the lower surface p3a of the third portion p3 and the first surface 10a of the semiconductor chip 10.

[0027] A part of the third portion p3 is preferably provided between the semiconductor chip 10 and the first intermediate portion mp1. In other words, the third portion p3 preferably extends onto the semiconductor chip 10.

[0028] The second electrode 12 (e.g., a source electrode) of the semiconductor chip 10 is electrically connected to the second conductive member 22 via the first conductive member 21, the first connecting member 41, and the second connecting member 42. The fourth portion p4 of the second conductive member 22 serves as an external terminal connected to the outside.

[0029] In this way, the first conductive member 21 electrically connects the semiconductor chip 10 and the second conductive member 22 (external terminal). The first conductive member 21 is, for example, a connector. The first conductive member 21 is, for example, a metal plate. Meanwhile, the third portion p3 of the second conductive member 22 functions as a post.

[0030] These components are covered with, for example, resin 30. The resin 30 is, for example, a sealing resin.

[0031] 1(b) and 1(c), the resin 30 does not cover the fourth portion p4 of the second conductive member 22. The fourth portion p4 is exposed from the resin 30. This allows the fourth portion p4 to be electrically connected to the outside.

[0032] 1(b), a resin 30 is provided above the first conductive member 21. For example, a first portion p1 is located between a part of the resin 30 and the semiconductor chip 10 in the Z-axis direction.

[0033] As shown in FIGS. 1(a) and 1(b), the second connection member 42 is located between the semiconductor chip 10 and the first portion p1. The second connection member 42 connects the semiconductor chip 10 and the first portion p1. The second connection member 42 is conductive. The second connection member 42 includes, for example, solder. The second connection member 42 electrically connects the second electrode 12 of the semiconductor chip 10 and the first portion p1.

[0034] As shown in FIG. 1B, the third conductive member 23 is provided on the first surface 10a side of the semiconductor chip 10 and includes a fifth portion p5 and a sixth portion p6. In the first direction (Z-axis direction), the fifth portion p5 overlaps with the semiconductor chip 10. The direction from the fifth portion p5 toward the semiconductor chip 10 is along the first direction (Z-axis direction). The third portion p3 is provided between the fifth portion p5 and the first intermediate portion mp1. The direction from the sixth portion p6 toward the fifth portion p5 is along a third direction that intersects with the first direction. In this example, the third direction is the X-direction. Note that the second direction and the third direction may be the same. The semiconductor chip 10 is provided between the first portion p1 and the fifth portion p5. The third portion p3 is provided between the fifth portion p5 and the first intermediate portion mp1.

[0035] The third conductive member 23 is, for example, a bed. The third conductive member 23 may function as a heat dissipation path for heat generated in the semiconductor chip 10. The third conductive member 23 is, for example, a metal member having a plate-like shape.

[0036] At least a part of the sixth portion p6 of the third conductive member 23 is not covered with the resin 30. At least a part of the sixth portion p6 is exposed from the resin 30. The sixth portion p6 becomes another external terminal that is connected to the outside.

[0037] As shown in FIG. 1(a), the third connection member 43 is provided between the fifth portion p5 and the semiconductor chip 10. In this example, the third connection member 43 is provided between the fifth portion p5 and the first electrode 11 (e.g., a drain electrode). The third connection member 43 is conductive. The third connection member 43 includes, for example, solder. The third connection member 43 electrically connects the fifth portion p5 and the first electrode 11 of the semiconductor chip 10.

[0038] In this way, the first conductive member 21 is electrically connected to the second electrode 12 (for example, a source electrode). The second conductive member 22 is electrically connected to the second electrode 12 via the first conductive member 21. The third conductive member 23 is electrically connected to the first electrode 11 (for example, a drain electrode).

[0039] The fourth conductive member 24 is provided, for example, on the second surface 10b side of the semiconductor chip 10, and is electrically connected to the third electrode 13 (e.g., a gate electrode) by a conductive connecting member not shown (see Figure 1(c)).

[0040] The fifth conductive member 25 is electrically connected to the fourth conductive member 24 by, for example, a conductive connecting member (not shown).

[0041] The third electrode 13 (for example, a gate electrode) of the semiconductor chip 10 is electrically connected to the fifth conductive member 25 via the fourth conductive member 24. The fifth conductive member 25 serves as an external terminal that is connected to the outside.

[0042] In this way, the fourth conductive member 24 electrically connects the semiconductor chip 10 and the fifth conductive member 25 (external terminal). The fourth conductive member 24 is, for example, a connector. The fourth conductive member 24 is, for example, a metal plate. Meanwhile, a portion of the fifth conductive member 25 functions as a post.

[0043] 1(c), the resin 30 does not cover a portion of the fifth conductive member 25. This allows the portion of the fifth conductive member 25 to be electrically connected to the outside.

[0044] The first conductive member 21, the second conductive member 22, the third conductive member 23, the fourth conductive member 24, and the fifth conductive member 25 are made of a metal such as Cu (copper). The first conductive member 21, the second conductive member 22, the fourth conductive member 24, and the fifth conductive member 25 have, for example, a shape formed by bending a plate-like metal member. The connecting members including the first connecting member 41, the second connecting member 42, and the third connecting member 43 are made of, for example, solder. The resin 30 is made of, for example, an epoxy resin. The resin 30 may also contain a filler including, for example, silicon oxide.

[0045] The semiconductor device of the embodiment is, for example, an SOP (small outline package) type semiconductor device.

[0046] The semiconductor device of the embodiment is required to have low resistance, high heat dissipation, and high reliability. In particular, low resistance is directly related to the electrical characteristics of the semiconductor device, including the rated current. Therefore, low resistance is particularly important for the semiconductor device of the embodiment.

[0047] The inventors have pursued extensive development and investigated the resistance of the components included in the semiconductor device of the embodiment. As a result, it has become clear that the resistance of the first conductive member 21 and the resistance of the second conductive member 22 are high in the package portion excluding the semiconductor chip 10. Therefore, reducing the resistance of the first conductive member 21 and the second conductive member 22 is important for realizing low resistance in the semiconductor device of the embodiment.

[0048] Here, in order to reduce the resistance of the first conductive member 21 and the resistance of the second conductive member 22, it is conceivable to increase the film thickness of the first conductive member 21 and the film thickness of the second conductive member 22. This is also preferable from the viewpoint of dissipating heat generated from the semiconductor chip 10 via the first conductive member 21 and the second conductive member 22. However, there is a problem in that the stress applied to the entire semiconductor device 100 including the semiconductor chip 10 becomes large.

[0049] In particular, the manufacturing process of the semiconductor device 100 may include the following process. In this process, the components that will become the second conductive member 22 and the third conductive member 23 are initially included in a single plate-like member, and the second conductive member 22 and the third conductive member 23 are formed later by cutting the plate-like member. In this case, the film thickness of the second conductive member 22 and the film thickness of the third conductive member 23 are equal. Therefore, increasing the film thickness of the second conductive member 22 also increases the film thickness of the third conductive member 23. Therefore, there is a problem in that the increase in the film thickness of the third conductive member 23 further increases the stress applied to the entire semiconductor device 100, including the semiconductor chip 10. Note that the second conductive member 22 and the third conductive member 23 may be processed and formed separately.

[0050] Furthermore, if the stress increases, there is a risk that the reliability of the connections made by the first connecting member 41, the second connecting member 42, and the third connecting member 43 will decrease.

[0051] Furthermore, since the height of the semiconductor device in the Z direction increases, there is a problem that it becomes difficult to reduce the size of the semiconductor device.

[0052] Therefore, in the semiconductor device of the embodiment, the length L1 of the first intermediate portion mp1 of the first conductive member 21 in the second direction is longer than the length L2 of the third portion p3 in the second direction. A conductive first connecting member 41 is provided between the first intermediate portion mp1 and the third portion p3.

[0053] This reduces the electrical resistance between the first intermediate portion mp1 and the third portion p3. Therefore, it is possible to achieve low resistance in the semiconductor device without increasing the film thickness of the first conductive member 21 and the film thickness of the second conductive member 22. Therefore, it is possible to achieve low resistance in the semiconductor device without increasing the stress applied to the entire semiconductor device 100, including the semiconductor chip 10, as much as possible.

[0054] In other words, in the semiconductor device of the embodiment, the film thickness of the first conductive member 21 and the film thickness of the second conductive member 22 are artificially increased by the first intermediate portion mp1 and the third portion p3, thereby making it possible to achieve low resistance in the semiconductor device.

[0055] Furthermore, heat generated from the semiconductor chip 10 is more likely to flow to the third portion p3 via the first intermediate portion mp1, which makes it less likely that fatigue failure will occur in the semiconductor device.

[0056] Note that cracks may occur in the first connection member 41 due to internal stress within the semiconductor device. However, in the semiconductor device of the embodiment, the length L1 of the first intermediate portion mp1 of the first conductive member 21 in the second direction is long. This allows the volume of the first connection member 41 to be increased. As a result, even if cracks occur to some extent, a good connection can be obtained between the first intermediate portion mp1 and the third portion p3.

[0057] Preferably, the first conductive member 21 further includes a second portion p2. During the manufacturing process of the semiconductor device, when the first conductive member 21 is placed on the second conductive member 22, the first conductive member 21 may rotate in the XY plane. This causes the positional relationship of the first conductive member 21 with respect to the semiconductor chip 10 and the second conductive member 22 to shift in the XY plane. However, by including the second portion p2 in the first conductive member 21, even if the first conductive member 21 attempts to rotate in the XY plane, the second portion p2 collides with the second intermediate portion mp2. This makes it possible to suppress rotation of the first conductive member 21 in the XY plane. This makes it easier to manufacture the semiconductor device.

[0058] Furthermore, if the second portion p2 and the second intermediate portion mp2 are electrically connected well, the resistance of the semiconductor device can be further reduced.

[0059] By providing the first connecting member 41 between the second portion p2 and the second intermediate portion mp2, the second portion p2 and the second intermediate portion mp2 are electrically connected to each other well, which makes it possible to further reduce the resistance of the semiconductor device.

[0060] When the second portion p2 and the second intermediate portion mp2 extend in the fourth direction, rotation of the first conductive member 21 in the XY plane can be more effectively suppressed. Furthermore, the second portion p2 and the second intermediate portion mp2 can be more effectively electrically connected. The fourth direction is, for example, a direction non-parallel to the first direction and the second direction. In this case, the lower surface p2a of the second portion p2 is non-parallel to the lower surface mp1a of the first intermediate portion mp1 or the upper surface p4b of the fourth portion p4. In other words, the lower surface p2a of the second portion p2 is inclined with respect to the lower surface mp1a of the first intermediate portion mp1 or the upper surface p4b of the fourth portion p4.

[0061] In the first direction, the second surface 10b of the semiconductor chip 10 is preferably provided between the third portion p3 and the first surface 10a. Furthermore, in the first direction, the second surface 10b of the semiconductor chip 10 is preferably provided between the lower surface p3a of the third portion p3 and the first surface 10a of the semiconductor chip 10. This makes it possible to extend a part of the third portion p3 onto the semiconductor chip 10. This makes it possible to further increase the area of ​​contact between the first intermediate portion mp1 and the third portion p3. This makes it possible to further reduce the resistance of the semiconductor device.

[0062] It is preferable that a part of the third portion p3 is provided between the semiconductor chip 10 and the first intermediate portion mp1. In other words, it is preferable that the third portion p3 extends onto the semiconductor chip 10. This is because it is possible to further reduce the resistance of the semiconductor device.

[0063] According to the semiconductor device of the embodiment, it is possible to provide a semiconductor device with low resistance.

[0064] Although several embodiments and examples of the present invention have been described, these embodiments and examples are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, and are also included in the scope of the invention and its equivalents as defined in the claims. [Explanation of symbols]

[0065] 10: Semiconductor chip 10a: First surface 10b: Second surface 10s: Semiconductor layer 11: First electrode 12: Second electrode 13: Third electrode 21: First conductive member 22: Second conductive member 23: Third conductive member 24: Fourth conductive member 25: Fifth conductive member 30: Resin portion 41: First connection member 42: Second connection member 43: Third connection member 44: Fourth connection member 45: Fifth connection member 46: Sixth connection member 100: Semiconductor device mp1: First intermediate portion mp2: Second intermediate portion p1: First portion p2: Second portion p3: Third portion p3a: Bottom surface p4: Fourth portion p5: Fifth portion p6: Sixth portion

Claims

1. a semiconductor chip having a first surface, a second surface, a first electrode electrically connected to the first surface, a second electrode electrically connected to the second surface, and a third electrode electrically connected to the second surface; a first conductive member including a first portion and a first intermediate portion, the first portion being electrically connected to the second electrode, a direction from the semiconductor chip toward the first portion being along a first direction, a direction from the first portion toward the first intermediate portion being along a second direction intersecting the first direction, and the first conductive member being provided between the semiconductor chip and the first intermediate portion in the first direction; a second conductive member including a third portion, a second intermediate portion, and a fourth portion, wherein a direction from the third portion toward the fourth portion is along the second direction, a length of the first intermediate portion in the second direction is longer than a length of the third portion in the second direction, and the second intermediate portion is provided between the third portion and the fourth portion in the second direction; a third conductive member provided on the first surface side; a first conductive connection member provided between the first intermediate portion and the third portion; a conductive second connection member provided between the second electrode and the first portion; a conductive third connection member provided between the third conductive member and the first electrode; Equipped with In the first direction, the second surface is provided between the third portion and the first surface, a part of the third portion is provided between the semiconductor chip and the first intermediate portion; Semiconductor device.

2. the first conductive member further includes a second portion, the first intermediate portion is provided between the first portion and the second portion in the second direction, and a direction from the first portion toward the second portion is along the second direction; The semiconductor device according to claim 1.

3. The first connecting member is further provided between the second portion and the second intermediate portion.

3. The semiconductor device according to claim 2.

4. the second portion extends in a fourth direction intersecting the first direction and the second direction, The second intermediate portion extends in the fourth direction.

3. The semiconductor device according to claim 2.

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