Semiconductor Module

Abstract

The present invention improves adhesion properties between a sealing resin and a joining part of a metal wiring board in a semiconductor module. The semiconductor module (1) comprises: a multi-layer substrate (2) having a plurality of circuit boards (22) arranged on the upper surface of an insulating plate (20), a semiconductor element (3) arranged on the upper surface of at least one of the circuit boards, and a metal wiring board (4) arranged on the upper surface of the semiconductor element. The metal wiring board has a joining part (40) joined to the upper surface of the semiconductor element via a joining member (S3). The joining part includes a plate-like portion having an upper surface and a lower surface. The plate-like portion has a plurality of roughening recesses which roughen the upper surface, and the plurality of roughening recesses are configured from a plurality of kinds of roughening recesses (49a, 49b, 49c, 49d, 49e) which are different in terms of at least one of the opening size, the opening shape, and the depth.

Description

[Technical Field]

[0001] The present invention relates to a semiconductor module. [Background technology]

[0002] 2. Description of the Related Art Semiconductor modules have substrates on which semiconductor elements such as IGBTs (Insulated Gate Bipolar Transistors), power MOSFETs (Metal Oxide Semiconductor Field Effect Transistors), and FWDs (Free Wheeling Diodes) are mounted, and are used in inverter devices and the like.

[0003] In this type of semiconductor module, for example, in Patent Documents 1 to 3, a semiconductor element is disposed on an insulating substrate (which may also be called a laminated substrate), and a metal wiring board (which may also be called a lead frame) for wiring is disposed on the upper surface electrode of the semiconductor element. The metal wiring board is formed into a predetermined shape, for example, by pressing a metal plate. One end of the metal wiring board is electrically joined to the upper surface electrode via a bonding material such as solder.

[0004] In a semiconductor module, a sealing resin is filled inside a case member, and the internal structure including a metal wiring board is covered with the sealing resin. In order to improve the adhesive strength of the sealing resin to the metal wiring board, in Patent Document 4, a dovetail groove whose open portion is narrower than the width of the bottom is formed in the metal wiring board, and in Patent Document 5, a plurality of lattice-shaped grooves are formed in the metal wiring board.

[0005] Patent documents 6-9 describe forming multiple dimples on the surface of a metal wiring board and providing protrusions (turned portions, hooked portions) on the inner walls of the dimples to improve the adhesive strength of the sealing resin. One method of forming such dimples is to form a hole in a first press, and then perform a second press around the periphery of the hole to deform part of the hole and form a protrusion on the inner wall. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Application Laid-Open No. 2018-088448 [Patent Document 2] Japanese Patent Application Laid-Open No. 2016-139635 [Patent Document 3] Japanese Patent Application Laid-Open No. 2015-176871 [Patent Document 4] Japanese Patent Application Publication No. 6-163773 [Patent Document 5] Patent Publication No. 2021-077718 [Patent Document 6] Japanese Patent Application Publication No. 7-273270 [Patent Document 7] Japanese Patent Application Laid-Open No. 2005-191178 [Patent Document 8] Japanese Patent Application Laid-Open No. 2017-005124 [Patent Document 9] Japanese Patent Application Laid-Open No. 2007-258587 Summary of the Invention [Problem to be solved by the invention]

[0007] In this type of semiconductor module, the power semiconductor elements generate heat during switching operations. In the structure in which the metal wiring board is soldered to the surface of the power semiconductor elements as described above, the internal stress caused by temperature changes may cause distortion at the joint. As a result, it is expected that the adhesion of the sealing resin to the joint of the metal wiring board may decrease.

[0008] The present invention has been made in view of the above points, and one of its objects is to provide a semiconductor module that can improve the adhesion between the joints of the metal wiring board and the sealing resin. [Means for solving the problem]

[0009] A semiconductor module according to one embodiment of the present invention comprises a laminated substrate having a plurality of circuit boards arranged on the upper surface of an insulating plate, a semiconductor element arranged on the upper surface of at least one of the circuit boards, and a metal wiring board arranged on the upper surface of the semiconductor element, wherein the metal wiring board has a joint joined to the upper surface of the semiconductor element via a bonding material, the joint including a plate-like portion having an upper surface and a lower surface, the plate-like portion having a plurality of roughened recesses that roughen the upper surface, and the plurality of roughened recesses are composed of a plurality of types of roughened recesses that differ in at least one of opening size, opening shape, and depth. [Effects of the Invention]

[0010] According to the present invention, it is possible to improve the adhesion between the joints of the metal wiring board and the sealing resin in the semiconductor module. [Brief explanation of the drawings]

[0011] [Figure 1] 1 is a schematic diagram of a semiconductor device according to an embodiment of the present invention as viewed from above; [Figure 2] 2 is a cross-sectional view of the semiconductor device shown in FIG. 1 taken along line AA. [Figure 3] FIG. 2 is an enlarged view of a metal wiring board according to the present embodiment. [Figure 4] 4 is a plan view showing the first embodiment of the metal wiring board shown in FIG. 3 as viewed in the direction of arrow B. FIG. [Figure 5] 4 is an enlarged view of a portion C of the metal wiring board shown in FIG. [Figure 6] 1 is a plan view showing a specific example of a semiconductor module to which a metal wiring board according to an embodiment of the present invention is applied; [Figure 7] 1 is an equivalent circuit diagram of a semiconductor device according to an embodiment of the present invention; [Figure 8] 4 is a plan view showing the second embodiment of the metal wiring board shown in FIG. 3 as viewed in the direction of arrow B. FIG. [Figure 9] FIG. 9 is a cross-sectional view taken along line DD in FIG. 8. DETAILED DESCRIPTION OF THE INVENTION

[0012] A semiconductor module and a semiconductor device to which the present invention can be applied will be described below. First, with reference to FIGS. 1 to 7, the overall configuration of the semiconductor module and the semiconductor device, and the schematic configuration of the metal wiring board included in the semiconductor module and the semiconductor device will be described. FIG. 1 is a schematic diagram of a semiconductor device according to the present embodiment as viewed from above. FIG. 2 is a cross-sectional view of the semiconductor device shown in FIG. 1 taken along line AA. FIG. 3 is an enlarged view of a metal wiring board according to the present embodiment. FIG. 4 is a plan view of the metal wiring board shown in FIG. 3 as viewed in the direction of arrow B. FIG. 5 is an enlarged view of part C of the metal wiring board shown in FIG. 3. FIG. 6 is a plan view showing a specific example of a semiconductor module to which the metal wiring board according to the present embodiment is applied. FIG. 7 is an equivalent circuit diagram of the semiconductor device according to the present embodiment. Here, the semiconductor element 3 is configured to have an anti-parallel circuit of an IGBT and an FWD connected in series.

[0013] In the following figures, the longitudinal direction of the semiconductor module (cooler) is defined as the X direction, the transverse direction of the semiconductor module (cooler) as the Y direction, and the height direction (thickness direction of the board) as the Z direction. The longitudinal direction of the semiconductor module indicates the direction in which multiple circuit boards are arranged. The X, Y, and Z axes in the figures are perpendicular to each other and form a right-handed system. In some cases, the X direction may be referred to as the left-right direction, the Y direction as the front-rear direction, and the Z direction as the up-down direction. These directions (front-rear, left-right, up-down) are terms used for convenience of explanation, and their correspondence with the X, Y, and Z directions may change depending on the mounting orientation of the semiconductor module. For example, the heat dissipation surface (cooler side) of the semiconductor module is referred to as the bottom side, and the opposite side as the top side. In this specification, a plan view refers to the top or bottom of the semiconductor module as viewed from the Z direction. The aspect ratios and relative sizes of the components in each figure are merely schematic diagrams and may not necessarily match. For the sake of convenience, the size relationships between the components may be exaggerated.

[0014] A semiconductor device 100 according to this embodiment is applied to a power conversion device such as an inverter for an industrial or automotive motor. As shown in Figures 1 and 2, the semiconductor device 100 is configured by placing a semiconductor module 1 on the upper surface of a cooler 10. Note that the cooler 10 has an optional configuration relative to the semiconductor module 1.

[0015] The cooler 10 dissipates heat from the semiconductor module 1 to the outside and has an overall rectangular parallelepiped shape. Although not specifically shown, the cooler 10 is configured by providing multiple fins on the underside of a base plate and housing these fins in a water jacket. However, the cooler 10 is not limited to this and can be modified as appropriate.

[0016] The semiconductor module 1 is configured by arranging a laminated substrate 2, a semiconductor element 3, a metal wiring board 4, and the like in a case 11.

[0017] The laminated substrate 2 is formed of, for example, a DCB (Direct Copper Bonding) substrate, an AMB (Active Metal Brazing) substrate, or a metal-based substrate. The laminated substrate 2 is formed by laminating an insulating plate 20, a heat sink 21, and a plurality of circuit boards 22, and is formed into a rectangular shape as a whole in a plan view.

[0018] Specifically, the insulating plate 20 is formed as a plate-like body having an upper surface and a lower surface, and has a rectangular shape in plan view that is long in the X direction. The insulating plate 20 may be formed from a ceramic material such as aluminum oxide (Al2O3), aluminum nitride (AlN), silicon nitride (Si3N4), aluminum oxide (Al2O3), and zirconium oxide (ZrO2).

[0019] The insulating plate 20 may be formed of, for example, a thermosetting resin such as an epoxy resin or a polyimide resin, or a composite material in which a thermosetting resin is filled with glass or a ceramic material. The insulating plate 20 is preferably flexible and may be formed of, for example, a material containing a thermosetting resin. The insulating plate 20 may also be called an insulating layer or an insulating film.

[0020] The heat sink 21 has a predetermined thickness in the Z direction and a rectangular shape in plan view that is long in the Y direction. The heat sink 21 is formed of a metal plate with good thermal conductivity, such as copper or aluminum. The heat sink 21 is disposed on the lower surface of the insulating plate 20. The lower surface of the heat sink 21 is the surface to be attached to the cooler 10 to which the semiconductor module 1 is attached, and also functions as a heat dissipation surface (heat dissipation area) for dissipating heat from the semiconductor module 1. The heat sink 21 is bonded to the upper surface of the cooler 10 via a bonding material S1 such as solder. The heat sink 21 may be disposed on the upper surface of the cooler 10 via a thermally conductive material such as thermal grease or thermal compound.

[0021] The plurality of circuit boards 22, each having a predetermined thickness, are arranged on the upper surface of the insulating plate 20. Each circuit board 22 is formed in the shape of an electrically independent island. For example, the circuit boards 22 have a rectangular shape in a plan view and are arranged side by side in the X direction on the insulating plate 20. The number of circuit boards 22 is not limited to two as shown in FIG. 1 and can be changed as appropriate. Three or more circuit boards 22 may be arranged on the insulating plate 20 as shown in FIG. 6. The shapes, arrangement locations, etc. of the circuit boards 22 are also not limited to these and can be changed as appropriate. These circuit boards 22 are formed from metal plates with good thermal conductivity, such as copper or aluminum. The circuit boards 22 may also be called circuit layers or circuit patterns.

[0022] A semiconductor element 3 is disposed on the upper surface of a predetermined circuit board 22 (the circuit board 22 on the negative side in the X direction) via a bonding material S2 such as solder. The semiconductor element 3 is formed in a rectangular shape in a plan view using a semiconductor substrate made of, for example, silicon (Si) or silicon carbide (SiC). The semiconductor element 3 may be a power semiconductor element. The semiconductor element 3 may be a switching element such as an IGBT (Insulated Gate Bipolar Transistor) or a power MOSFET (Metal Oxide Semiconductor Field Effect Transistor), or a diode such as an FWD (Free Wheeling Diode).

[0023] In this embodiment, the semiconductor element 3 is configured as an RC (Reverse Conducting)-IGBT element that combines the functions of an IGBT (Insulated Gate Bipolar Transistor) element and an FWD (Free Wheeling Diode) element.

[0024] The semiconductor element 3 is not limited to this, and may be configured by combining the above-mentioned switching elements, diodes, etc. For example, an IGBT element and an FWD element may be configured separately. Also, an RB (Reverse Blocking)-IGBT or the like having sufficient voltage resistance against reverse bias may be used as the semiconductor element 3. The shape, number, and location of the semiconductor element 3 may be changed as appropriate.

[0025] Furthermore, electrodes (not shown) are formed on the upper and lower surfaces of the semiconductor element 3. For example, the electrode on the upper surface (upper surface electrode) is composed of an emitter electrode (source electrode) or a gate electrode, and the electrode on the lower surface (lower surface electrode) is composed of a collector electrode (drain electrode).

[0026] The semiconductor element 3 in this embodiment is a so-called vertical switching element in which the above-described functional element is formed on a semiconductor substrate, but is not limited to this and may also be a horizontal switching element.

[0027] A metal wiring board 4 is disposed on the upper surface of the semiconductor element 3. The metal wiring board 4 is a plate-like body having an upper surface and a lower surface, and is formed from a metal material such as copper, copper alloy, aluminum alloy, or iron alloy. The metal wiring board 4 is formed into a predetermined shape, for example, by press working. Note that the shape of the metal wiring board 4 shown below is merely an example and can be modified as appropriate. The metal wiring board may also be called a lead frame.

[0028] The metal wiring board 4 according to this embodiment is an elongated body extending in the X direction so as to straddle a plurality of circuit boards 22 in a plan view, and has a crank shape bent multiple times in a side view. Specifically, as shown in Figures 2 and 3, the metal wiring board 4 includes a first bonding portion 40 bonded to the upper surface (upper electrode) of the semiconductor element 3 via a bonding material S3, a second bonding portion 41 bonded to the upper surface of the circuit board 22 on the positive side in the X direction via a bonding material S4, and a connecting portion 42 connecting the first bonding portion 40 and the second bonding portion 41.

[0029] The width of the metal wiring board 4 in the Y direction is uniform from the first bonding portion 40 to the second bonding portion 41. The first bonding portion 40, the second bonding portion 41, and the connecting portion 42 are arranged in a line along the X direction in a plan view. The width of the metal wiring board 4 in the Y direction does not need to be uniform from the first bonding portion 40 to the second bonding portion 41, and may have different widths as shown in FIG. 6. The first bonding portion 40, the second bonding portion 41, and the connecting portion 42 do not need to be arranged in a line, and may be arranged so that they are diagonally offset from each other as shown in FIG. 6.

[0030] The first bonding portion 40 is formed in a rectangular shape that is smaller than the outline of the semiconductor element 3 in a plan view, and includes a plate-like portion having an upper surface and a lower surface. A first bent portion 43 that is bent at a substantially right angle and rises upward is formed at the end of the first bonding portion 40 on the positive side in the X direction (the connecting portion 42 side). One end (left end) of the connecting portion 42 is connected to the upper end of the first bent portion 43.

[0031] A plurality of through holes 46 are formed in the first joint portion 40. A total of four through holes 46 are provided, two in the X direction and two in the Y direction. The four through holes 46 are positioned slightly inward from the four corners of the first joint portion 40. Each through hole 46 penetrates the first joint portion 40 in the Z direction.

[0032] The second joint portion 41 is formed in a rectangular shape that is smaller than the outline of the circuit board 22 in a plan view, and includes a plate-like portion having an upper surface and a lower surface. A second bent portion 44 that is bent at a substantially right angle and rises upward is formed at the end of the second joint portion 41 on the negative side in the X direction (the connecting portion 42 side). The other end (right end) of the connecting portion 42 is connected to the upper end of the second bent portion 44.

[0033] A plurality of through holes 48 are formed in the second joint portion 41. Two through holes 48 are provided at different positions in the Y direction. Each through hole 48 penetrates the second joint portion 41 in the Z direction.

[0034] The connecting portion 42 extends in the horizontal direction, and as described above, one end is connected to the first bent portion 43 and the other end is connected to the second bent portion 44.

[0035] The length of the first bent portion 43 in the Z direction is shorter than that of the second bent portion 44 by the thickness of the semiconductor element 3. That is, the first bonding portion 40 and the second bonding portion 41 are provided at positions with different heights. More specifically, the first bonding portion 40 is provided at a higher position than the second bonding portion 41.

[0036] The shape, number, and placement of the metal wiring boards 4 described above are merely examples, and are not limited to these and can be changed as appropriate. As will be described in detail later, multiple (e.g., four) metal wiring boards 4 may be placed per semiconductor module, as shown in Fig. 6. In this embodiment, the semiconductor element 3, metal wiring boards 4, and main terminals described later form an inverter circuit, for example, as shown in Fig. 7.

[0037] The laminated substrate 2, the semiconductor element 3, and the metal wiring board 4 are surrounded by a case 11. The case 11 has a cylindrical or frame shape that is rectangular in plan view, and is made of, for example, synthetic resin. The case 11 may be made of a thermosetting resin material such as epoxy resin or silicone rubber. The lower end of the case 11 is adhered to the upper surface of the cooler 10 via an adhesive (not shown), and the upper end extends to a position sufficiently higher than the upper surface of the metal wiring board 4. In this way, the case 11 surrounds the laminated substrate 2, the semiconductor element 3, and the metal wiring board 4, and defines a space to accommodate the laminated substrate 2, the semiconductor element 3, and the metal wiring board 4.

[0038] The internal space defined by the case 11 is filled with a sealing resin 5. The sealing resin 5 may be filled so that the upper surface reaches the upper end of the case 11. This seals the laminated substrate 2, the semiconductor element 3, and the metal wiring board 4. The metal wiring board 4 is entirely covered with the sealing resin 5.

[0039] The sealing resin 5 may be made of, for example, a thermosetting resin. The sealing resin 5 preferably contains at least one of epoxy, silicone, urethane, polyimide, polyamide, and polyamideimide. For example, an epoxy resin mixed with a filler is suitable for the sealing resin 5 in terms of insulation, heat resistance, and heat dissipation.

[0040] 6, the case 11 may be provided with a plurality of main terminals 60 for main current and a plurality of control terminals 61 for control. The main terminals 60 are formed of long, plate-like bodies and embedded in the side walls of the case 11. In FIG. 6, two main terminals 60 constituting the N terminal and the P terminal are arranged side by side in the X direction on the side wall of the case 11 located on the negative side in the Y direction. Furthermore, a main terminal 60 constituting the M terminal is arranged on the side wall of the case 11 located on the positive side in the Y direction.

[0041] As described above, in this embodiment, the semiconductor element 3, the metal wiring board 4, the main terminals 60, etc. form an inverter circuit as shown in Fig. 7, for example. These main terminals 60 (N terminal, P terminal, M terminal) correspond to IN(N) (which may be called a low potential side input terminal or a negative terminal), IN(P) (which may be called a high potential side input terminal or a positive terminal), and OUT(M) (which may be called an output terminal or an intermediate terminal) in Fig. 7, respectively.

[0042] The control terminal 61 is formed of a long, plate-like body and is embedded in the side wall of the case 11 located on the positive side in the Y direction. The control terminal 61 is electrically connected to a predetermined control electrode of the semiconductor element 3 via a wiring member such as a bonding wire. The main terminal 60 and the control terminal 61 are formed from a metal material such as copper, a copper alloy-based material, an aluminum alloy-based material, or an iron alloy-based material, and have a predetermined electrical conductivity and a predetermined mechanical strength. The shape, number, arrangement, etc. of the main terminal 60 and the control terminal 61 are not limited to these and can be changed as appropriate.

[0043] In semiconductor modules, it is necessary to prevent delamination from progressing along the interface between the metal wiring board and the encapsulating resin. One possible method for reducing delamination is to increase the surface area of ​​the metal wiring board and improve the adhesion (anchor effect) between the metal wiring board and the encapsulating resin. One way to increase the surface area of ​​the metal wiring board is to form an uneven surface on the metal wiring board. However, if the underside of the metal wiring board (the surface facing the semiconductor element) is uneven, voids and sink marks are likely to occur in the bonding material. This may affect the mounting quality of the metal wiring board.

[0044] In addition, methods for roughening the surface of a metal wiring board include laser processing and wet methods using chemicals. However, these methods not only increase costs, but also make the underside of the metal wiring board rough, which makes it more likely that voids and sink marks will form in the bonding material. In other words, it is difficult to roughen the metal wiring board without affecting the quality of the bonding material directly below the metal wiring board.

[0045] In this embodiment, a plurality of through holes 46 are provided in the first bonding portion 40, and a plurality of roughened recesses 49 are provided on the upper surface (surface) of the first bonding portion 40. By forming a plurality of through holes 46, in the bonding process of the metal wiring board 4, it is possible to prevent the first bonding portion 40 from tilting with respect to the upper surface of the semiconductor element 3 while ensuring the thickness of the bonding material S3, and to stabilize the posture of the metal wiring board 4 (first bonding portion 40).

[0046] The through holes 48 formed in the second joint portion 41 have the same effect as the through holes 46 in the first joint portion 40. Therefore, in the bonding process of the metal wiring board 4, the thickness of the bonding material S4 is ensured, while the second joint portion 41 is prevented from tilting relative to the upper surface of the circuit board 22, and the posture of the metal wiring board 4 (second joint portion 41) can be stabilized.

[0047] The through holes 46 and 48 are cylindrical. However, the shape of the through holes formed in the first bonding portion 40 and the second bonding portion 41 is not limited to a cylindrical shape.

[0048] Furthermore, the upper surface of the first bonding portion 40 is roughened by forming a plurality of roughened recesses 49. As a result, the surface area of ​​the upper surface of the first bonding portion 40 is increased, and it is possible to improve the adhesion (anchor effect) between the upper surface of the first bonding portion 40 and the sealing resin 5. In particular, it is preferable that the sealing resin 5 penetrates into the roughened recesses 49. This can be expected to further enhance the anchor effect. Therefore, it is possible to suppress the progression of peeling of the sealing resin 5 on the upper surface of the metal wiring board 4 above the semiconductor element 3 due to thermal stress.

[0049] The through-holes 46 and the roughened recesses 49 in the first bonding portion 40 and the through-holes 48 in the second bonding portion 41 are formed by, for example, press working.

[0050] Furthermore, the plurality of roughened recesses 49 may be formed on the upper surface of the second bonding portion 41, or may be formed only on the upper surface of the first bonding portion 40. In other words, the roughened recesses 49 may not be formed in the connecting portion 42, the first bent portion 43, and the second bent portion 44, which constitute portions other than the first bonding portion 40.

[0051] Because the semiconductor element 3, which is a heat source, is located directly below the first bonding portion 40, it is possible to make it more susceptible to the anchoring effect due to the roughening. Furthermore, by roughening only the portion where the anchoring effect needs to be improved, it is not necessary to incur extra processing costs. In other words, the second bonding portion 41, the connecting portion 42, the first bent portion 43, and the second bent portion 44 have less effect on peeling of the sealing resin 5 than the first bonding portion 40. In this case, the surfaces of the second bonding portion 41, the connecting portion 42, the first bent portion 43, and the second bent portion 44 are flat, and their surface roughness may be equivalent to the surface roughness of the underside of the first bonding portion 40.

[0052] Furthermore, the lower surface of the first bonding portion 40 is preferably a flat surface excluding the through-holes 46. That is, it is preferable that the roughened recesses 49 are not formed on the lower surface of the first bonding portion 40. For example, it is preferable that the surface roughness of the lower surface of the first bonding portion 40 is smaller than the surface roughness of the upper surface of the first bonding portion 40. When the lower surface of the first bonding portion 40 is flat, voids and sink marks are less likely to occur in the bonding material S3.

[0053] As shown in FIG. 5, a coating film F may be interposed at the interface between the upper surface of the first bonding portion 40 and the sealing resin 5.

[0054] Next, referring mainly to Figures 4, 8, and 9, an embodiment showing the configuration of multiple roughened recesses (49) provided on the upper surface of the first bonding portion 40 will be described. Figure 4 shows a first embodiment, and Figures 8 and 9 show a second embodiment. In each embodiment, the upper surface of the first bonding portion 40 has a roughened region roughened by multiple roughened recesses and a non-roughened region where no roughened recesses are formed. The non-roughened region includes four through holes 46. The roughened region is formed by multiple types of roughened recesses that differ in at least one of opening size, opening shape, and depth.

[0055] In the first embodiment shown in FIG. 4, two types of roughened recesses of different sizes are provided on the upper surface of the first bonding portion 40. That is, a first roughened recess 49a and a second roughened recess 49b having a smaller opening size than the first roughened recess 49a are arranged on the upper surface of the first bonding portion 40. The size of the roughened recess here particularly refers to the opening size in a planar view. Both the first roughened recess 49a and the second roughened recess 49b are recesses having a quadrangular prism shape (a rectangular shape in a planar view). The opening sizes of the first roughened recess 49a and the second roughened recess 49b are different, with the opening size of the second roughened recess 49b being smaller than the opening size of the first roughened recess 49a.

[0056] A plurality of first roughened recesses 49a and a plurality of second roughened recesses 49b are provided on the upper surface of the first bonding portion 40. At locations where a plurality of second roughened recesses 49b are lined up, the spacing (pitch) between the second roughened recesses 49b in the X direction and the Y direction is smaller than the spacing (pitch) between the first roughened recesses 49a. In other words, the first roughened recesses 49a and the second roughened recesses 49b, which have different opening sizes, are arranged at different spacings.

[0057] On the top surface of the first bonding portion 40, first roughened recesses 49a with large openings are arranged in areas where sufficient space can be secured. Second roughened recesses 49b with small openings are arranged in areas where it is not suitable to arrange the first roughened recesses 49a due to space limitations. Specifically, the second roughened recesses 49b are arranged around the four through holes 46 included in the non-roughened area and near the four corners of the rectangular first bonding portion 40. In areas adjacent to the non-roughened area (through holes 46), small second roughened recesses 49b are arranged at a high density to improve the anchoring effect. Peeling at the interface between the first bonding portion 40 and the sealing resin 5 is likely to occur from the outer periphery (edge) of the first bonding portion 40. However, by arranging small second roughened recesses 49b in the four corners of the first bonding portion 40, it is possible to roughen the area where peeling is most likely to occur.

[0058] By arranging two types of first roughened recesses 49a and second roughened recesses 49b of different sizes in this manner, it is possible to perform roughening with more space efficiency than when only one type of roughened recess is used, thereby increasing the surface area of ​​the first joint 40. In particular, in areas where space is limited, such as around the through holes 46 and near the four corners of the first joint 40, the roughening effect can be enhanced by using the small second roughened recesses 49b.

[0059] The shapes of the first roughened recesses 49a and the second roughened recesses 49b may be shapes other than rectangular prisms, such as prisms other than rectangular prisms (such as hexagonal prisms), cylinders, or spherical recesses. The depths of the first roughened recesses 49a and the second roughened recesses 49b may be the same or different. Furthermore, the number of types of roughened recesses is not limited to two, such as the first roughened recesses 49a and the second roughened recesses 49b, and three or more types of roughened recesses with different sizes (opening sizes) may be mixed and arranged.

[0060] 8 and 9, three types of roughened recesses with different shapes, namely, a plurality of third roughened recesses 49c, a plurality of fourth roughened recesses 49d, and a plurality of fifth roughened recesses 49e, are provided on the upper surface of the first bonding portion 40. The plurality of third roughened recesses 49c are arranged at predetermined intervals in the X direction and the Y direction, and fourth roughened recesses 49d and fifth roughened recesses 49e, which have shapes different from the third roughened recesses 49c, are also arranged partially. Specifically, the fourth roughened recesses 49d are arranged around the four through holes 46 included in the non-roughened region, and the fifth roughened recesses 49e are arranged near the four corners of the first bonding portion 40.

[0061] 4, and has a square opening in plan view. The fourth roughened recess 49d is a rectangular recess with its longitudinal direction oriented in the X direction. The fifth roughened recess 49e is an L-shaped recess with its longitudinal direction oriented in the Y direction and one Y-direction end bent in the X direction.

[0062] Three fourth roughened recesses 49d are arranged between two through holes 46 in the Y direction. The spacing (pitch) between these three fourth roughened recesses 49d in the Y direction is smaller than the spacing (pitch) between the third roughened recesses 49c in the X and Y directions. In other words, the third roughened recesses 49c and the fourth roughened recesses 49d are arranged at different spacings, and in the region adjacent to the non-roughened region (through holes 46), the fourth roughened recesses 49d are arranged closer together and at a higher density, thereby improving the anchor effect.

[0063] Furthermore, one fourth roughened recess 49d is arranged in the Y direction on the outer side of each through hole 46. Therefore, the fourth roughened recess 49d is arranged on both sides of each through hole 46 in the Y direction, and the surface area of ​​the upper surface of the first bonding portion 40 can be efficiently increased on both the inner and outer sides of the through hole 46 in the Y direction, thereby achieving an excellent anchor effect.

[0064] The fifth roughened recesses 49e have an L-shaped opening that fits along the four corners of the first bonding portion 40. This allows the surface area of ​​the upper surface of the first bonding portion 40 to be efficiently increased near the four corners of the first bonding portion 40, thereby achieving an excellent anchor effect.

[0065] By arranging three types of roughened recesses with different shapes in this manner, namely, the third roughened recesses 49c, the fourth roughened recesses 49d, and the fifth roughened recesses 49e, it is possible to perform roughening with more space efficiency than when only one type of roughened recess is used, thereby increasing the surface area of ​​the first bonding portion 40. In particular, the roughening effect can be enhanced in areas with many space constraints, such as around the through holes 46 and positions near the four corners of the first bonding portion 40.

[0066] Fig. 9 shows the cross-sectional structure of the first bonding portion 40 at a position along line DD in Fig. 8. As shown in Fig. 9, the third roughened recess 49c, the fourth roughened recess 49d, and the fifth roughened recess 49e each have a different depth. The depth Z2 of the fourth roughened recess 49d is smaller than the depth Z1 of the third roughened recess 49c, and the depth Z3 of the fifth roughened recess 49e is larger than the depth Z1 of the third roughened recess 49c.

[0067] In this way, by making the depths of the third roughened recesses 49c, the fourth roughened recesses 49d, and the fifth roughened recesses 49e different, the surface area of ​​the first bonding portion 40 varies depending on the depth. Therefore, by appropriately controlling the depths of the third roughened recesses 49c, the fourth roughened recesses 49d, and the fifth roughened recesses 49e, it is possible to further improve the roughening effect of the first bonding portion 40.

[0068] As described above, peeling at the interface between the first bonding portion 40 and the sealing resin 5 is likely to occur from the outer periphery (edge) of the first bonding portion 40, and peeling that occurs in the outer periphery of the first bonding portion 40 progresses toward the inner region of the first bonding portion 40. By increasing the depth of the fifth roughened recesses 49e arranged near the four corners of the first bonding portion 40, the anchor effect is improved, and peeling of the sealing resin 5 in the outer periphery of the first bonding portion 40 can be suppressed.

[0069] As described above, the third roughened recess 49c, the fourth roughened recess 49d, and the fifth roughened recess 49e are different from one another in terms of the opening shape in plan view and the depth in the Z direction. That is, the elements that define the shape of a roughened recess include at least the opening shape and the depth.

[0070] 9, three types of roughened recesses 49c, 49d, and 49e with different opening shapes are mixed and arranged, but two types of roughened recesses with different opening shapes or depths, or four or more types of roughened recesses with different opening shapes or depths may be mixed and arranged. Also, the third, fourth, and fifth roughened recesses 49c, 49d, and 49e may differ only in their opening shapes, with the depths being the same.

[0071] To summarize the first and second embodiments, multiple types of roughened recesses that differ in at least one of the opening size, opening shape, and depth are provided on the upper surface of the first bonding portion 40. This makes it easier to arrange multiple roughened recesses at high density and to increase the degree of increase in surface area due to the multiple roughened recesses.

[0072] Furthermore, the plurality of types of roughened recesses are arranged at different intervals suited to the respective opening sizes and opening shapes, allowing the roughened recesses to be arranged at high density and in a space-efficient manner.

[0073] Furthermore, the second roughened recess 49b and the fourth roughened recess 49d arranged around the through hole 46 included in the non-roughened region of the top surface of the first bonding portion 40 have different opening sizes or opening shapes from the first roughened recess 49a and the third roughened recess 49c arranged at positions away from the through hole 46. This allows the roughened recesses to be spread all the way up to the vicinity of the through hole 46, which has a circular shape in plan view, thereby enhancing the surface roughening effect.

[0074] In the above embodiment, first bonding portion 40 of metal wiring board 4 has through-hole 46 in the non-roughened region on the top surface, but the configuration of the non-roughened region is not limited to a through-hole. For example, when connecting a wire to the top surface of metal wiring board 4, the location where the wire is connected may be the non-roughened region. Also, a protrusion protruding upward from metal wiring board 4 or a bottomed hole (a recess having a different shape, depth, etc. from a roughened recess) provided on the top surface of metal wiring board 4 can be used as the non-roughened region.

[0075] The present invention can also be applied to the bonding portion of a metal wiring board that does not have a non-roughened region such as through-hole 46 on the upper surface (where a plurality of roughened recesses are arranged over the entire surface).

[0076] Furthermore, the shapes of the multiple types of roughened recesses are not limited to those shown in Figures 4, 8, and 9. For example, roughened recesses having a triangular, circular, elliptical, or other shape in plan view may also be used.

[0077] As described above, according to this embodiment, it is possible to improve the adhesion between the metal wiring board and the sealing resin, and also to improve the bonding strength between the semiconductor element and the metal wiring board while ensuring the thickness of the bonding material.

[0078] Although the present embodiment and modifications have been described, other embodiments may be combinations of the above embodiments and modifications in whole or in part.

[0079] Furthermore, in the above-described embodiments, the number and locations of the semiconductor elements are not limited to the above-described configurations, and can be changed as appropriate.

[0080] Furthermore, in the above embodiment, the number and layout of the circuit boards are not limited to the above configuration, and can be changed as appropriate.

[0081] In addition, in the above-described embodiment, the laminated substrate and the semiconductor element are configured to be rectangular or square in plan view, but are not limited to this configuration and may be configured to be polygonal shapes other than those described above.

[0082] Furthermore, the present embodiment is not limited to the above-described embodiments and modifications, and may be variously changed, substituted, or modified within the scope of the spirit of the technical idea. Furthermore, if the technical idea can be realized in a different way due to technological advances or derived other technologies, it may be implemented using that method. Therefore, the claims cover all embodiments that may fall within the scope of the technical idea.

[0083] The features of the above embodiment are summarized below. The semiconductor module according to the above embodiment comprises a laminated substrate having a plurality of circuit boards arranged on the upper surface of an insulating plate, a semiconductor element arranged on the upper surface of at least one of the circuit boards, and a metal wiring board arranged on the upper surface of the semiconductor element, wherein the metal wiring board has a joint joined to the upper surface of the semiconductor element via a bonding material, the joint including a plate-like portion having an upper surface and a lower surface, the plate-like portion having a plurality of roughened recesses that roughen the upper surface, and the plurality of roughened recesses are composed of a plurality of types of roughened recesses that differ in at least one of opening size, opening shape, and depth.

[0084] The plurality of types of roughened recesses are arranged at different intervals.

[0085] In addition, the upper surface of the plate-shaped portion has a non-roughened area that does not have the roughened recess, and the roughened recess arranged around the non-roughened area and the roughened recess arranged at a position away from the non-roughened area have different opening sizes or opening shapes.

[0086] The non-roughened region has a through-hole penetrating the plate-like portion.

[0087] The joint has a rectangular shape in a plan view, and has the roughened recess with an L-shaped opening along a corner of the joint. [Industrial Applicability]

[0088] As described above, the present invention has the effect of improving the adhesion between the joints of the metal wiring board and the sealing resin, and is particularly useful for semiconductor modules for industrial or electrical applications.

[0089] This application is based on Japanese Patent Application No. 2022-177077, filed November 4, 2022, the contents of which are incorporated herein in their entirety. [Explanation of symbols]

[0090] 1: Semiconductor module 2:Laminated substrate 3: Semiconductor elements 4:Metal wiring board 5: Sealing resin 10:Cooler 11: Case 20: Insulating plate 21: Heat sink 22: Circuit board 40: 1st joint (joint) 41:Second joint 42:Connection part 43: 1st bending part 44:Second bending part 46: Through hole (non-roughened area) 48:Through hole 49: Roughened recess 49a: First roughened recess 49b: second roughened recess 49c: Third roughened recess 49d: Fourth roughened recess 49e: Fifth roughened recess 60: Main terminal 61: Control terminal 100: Semiconductor device F: Coating film S1: Bonding material S2: Bonding material S3: Bonding material S4: Bonding material Z1: Depth of the third roughened recess Z2: Depth of the fourth roughened recess Z3: Depth of the fifth roughened recess

Claims

1. a laminated substrate having a plurality of circuit boards disposed on an upper surface of an insulating plate; a semiconductor device disposed on a top surface of at least one of the circuit boards; a metal wiring board disposed on the upper surface of the semiconductor element, the metal wiring board has a bonding portion bonded to the upper surface of the semiconductor element via a bonding material, the joint includes a plate-like portion having an upper surface and a lower surface; the plate-like portion has a plurality of roughened recesses that roughen the upper surface, the plurality of roughened recesses are constituted by a plurality of types of roughened recesses that differ in at least one of an opening size, an opening shape, and a depth; The joint has a rectangular shape in a plan view, and the roughened recess has an L-shaped opening along a corner of the joint.

2. The plate-shaped portion has a through hole penetrating the plate-shaped portion, the roughened recesses arranged around the through holes have opening sizes smaller than the roughened recesses arranged outside the periphery of the through holes; The semiconductor module according to claim 1 .

3. The plate-shaped portion has a plurality of through holes penetrating the plate-shaped portion, an interval between the plurality of roughened recesses arranged between the plurality of through holes is smaller than an interval between the plurality of roughened recesses arranged other than between the plurality of through holes; The semiconductor module according to claim 1 .

4. A laminated substrate having a plurality of circuit boards arranged on an upper surface of an insulating plate; a semiconductor device disposed on a top surface of at least one of the circuit boards; a metal wiring board disposed on the upper surface of the semiconductor element, the metal wiring board has a bonding portion bonded to the upper surface of the semiconductor element via a bonding material, the joint includes a plate-like portion having an upper surface and a lower surface; the plate-like portion has first to third roughened recesses that roughen the upper surface and a plurality of through holes that penetrate the plate-like portion, the first roughened recess is disposed between the second roughened recess and the third roughened recess; the second roughened recesses are disposed between the plurality of through holes and have a depth smaller than that of the first roughened recesses; the third roughened recesses are arranged near the four corners of the joint and have a greater depth than the first roughened recesses; Semiconductor module.

5. A laminated substrate having a plurality of circuit boards arranged on an upper surface of an insulating plate; a semiconductor device disposed on a top surface of at least one of the circuit boards; a metal wiring board disposed on the upper surface of the semiconductor element, the metal wiring board has a bonding portion bonded to the upper surface of the semiconductor element via a bonding material, the joint includes a plate-like portion having an upper surface and a lower surface; the plate-like portion has a plurality of roughened recesses that roughen the upper surface and a plurality of through holes that penetrate the plate-like portion, the roughened recesses arranged between the plurality of through holes have an opening size smaller than that of the roughened recesses arranged other than between the plurality of through holes; Semiconductor module.

6. The spacing between the plurality of roughened recesses arranged between the plurality of through holes is smaller than the spacing between the plurality of roughened recesses arranged other than between the plurality of through holes. The semiconductor module according to claim 5 .

7. The plate-like portion has first to third roughening recesses that roughen the upper surface, the first roughened recess is disposed between the second roughened recess and the third roughened recess; the second roughened recesses are disposed between the plurality of through holes and have a depth smaller than that of the first roughened recesses; the third roughened recesses are arranged near the four corners of the joint and have a greater depth than the first roughened recesses; The semiconductor module according to claim 5 .

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