High-precision microscope scanner

Abstract

The present invention discloses a high-precision microscope scanner. It includes a main body base, on which a Y-axis cross-roller sliding unit is provided via a ZY-axis common bottom plate, and a Y-axis sliding drive unit is arranged on one side of the main body base. An X-axis cross-roller sliding unit and an X-axis sliding drive unit are provided on the Y-axis cross-roller sliding unit. A slide holder and an overall illumination unit are provided on the X-axis cross-roller sliding unit, and a lifting focus unit is arranged at the center of the main body base. In addition, there is a Z-axis sliding unit on the ZY-axis common bottom plate, and an oil-immersion lens unit is installed on the Z-axis sliding unit. Above the X-axis cross-roller sliding unit, a fluorescence module is arranged via a gantry, the lower end of the fluorescence module is connected to the oil-immersion lens unit, and the upper end is connected to a scanning camera. Furthermore, an overall camera and an upper illumination unit are provided on the gantry. The present invention significantly improves the control accuracy during scanning through the optimized design of the X, Y, and Z-axis movement structures of the fiber scanner.

Description

[Technical Field]

[0001] The present invention relates to the field of automated microscopy, and more particularly to high-precision microscope scanners. [Background technology]

[0002] The fully automated microscope is a high-tech, integrated optoelectronic product that uses an advanced distributed control system and a modularized built-in structure to achieve three-axis XYZ control of the stage and automatic adjustment of light source brightness. It also features software-based functions such as automated panoramic scanning, automated image composition, automatic repositioning, synchronized viewing, and remote operation, and is designed to improve work efficiency.

[0003] The fully automated microscope employs a standard RS232 communication interface, allowing users to easily adjust the microscope's field of view, focus, and brightness via a computer. Furthermore, the control system's automatic focusing, automatic control of XYZ three-axis movement, and automatic magnification conversion functions enable sequential sample movement and meandering scanning, enabling automatic measurement and analysis of multi-viewpoint images.

[0004] As such, fully automated microscopes have become an essential component of automated microscopy image analysis due to their high reliability, excellent stability, and high accuracy. However, conventional automated microscopes have a control accuracy of 1-2 μm, which is only compatible with 20x or 40x dry (air) objectives, and cannot support scanning with oil immersion objectives of 60x or higher. In the latter case, the control accuracy of the automated microscope structure must reach 0.2 μm, which has long been a challenge for the high-precision microscope scanner industry. Summary of the Invention

[0005] SUMMARY OF THE INVENTION In order to solve the drawbacks of the prior art, the present invention provides a high-precision microscope scanner that significantly improves the control accuracy during scanning.

[0006] In order to achieve the above technical effects and solve the conventional technical problems, the present invention uses the following technical means.

[0007] A high-precision microscope scanner including a main body base, a Y-axis cross roller sliding unit, a Y-axis sliding drive unit, an X-axis cross roller sliding unit, an X-axis sliding drive unit, a slide holder, an elevation focus unit, an overall illumination unit, a Z-axis sliding unit, an oil immersion lens unit, an overall camera, an upper illumination unit, a fluorescence module, and a scanning camera, The Y-axis cross roller sliding unit is installed on the main body base via a ZY-axis common bottom plate, the Y-axis sliding drive unit is disposed on one side of the main body base and is connected to the Y-axis cross roller sliding unit, the X-axis cross roller sliding unit and the X-axis sliding drive unit are both installed on the Y-axis cross roller sliding unit, and the X-axis sliding drive unit is connected to the X-axis cross roller sliding unit, the slide holder and the overall illumination unit are installed on the X-axis cross roller sliding unit, the lifting focus unit is disposed in the center of the main body base and is located below the slide holder, and the Z-axis sliding unit a unit is placed on the ZY-axis shared base plate and is located on one side of the assembly of the Y-axis cross roller sliding unit and the X-axis cross roller sliding unit; the oil immersion lens unit is placed on the Z-axis sliding unit and is located above the slide holder; the fluorescence module is placed above the assembly of the Y-axis cross roller sliding unit and the X-axis cross roller sliding unit via a gantry; the lower end of the fluorescence module is connected to the oil immersion lens unit and the upper end is connected to the scanning camera; the overall camera and the upper illumination unit are both installed on the gantry and a high-precision microscope scanner is located on one side of the fluorescence module.

[0008] Furthermore, the main body base includes a base bottom plate, with a base bottom plate front support block and a base bottom plate rear support block disposed on the front and rear sides of the underside of the base bottom plate. A marble base is installed between the base bottom plate front support block and the base bottom plate rear support block, and the marble base is tightly fixed to the underside of the base bottom plate. Handles are provided on the left and right sides of the base bottom plate, and each handle is fixedly connected to the end of the base bottom plate support block on the corresponding side. The base bottom plate also has a Y-axis sliding drive unit mounting hole for mounting the Y-axis sliding drive unit and a lifting focus unit mounting slot for mounting the bottom structure of the lifting focus unit.

[0009] The Y-axis cross roller sliding unit further includes a Y-axis cross roller mounting bottom plate, and a Y-axis sliding area top plate is disposed on the top surface of the Y-axis cross roller mounting bottom plate via two sets of Y-axis cross roller guides (left and right). A Y-axis independent adjustment screw plate is installed on the outer surface of each of the two sets of Y-axis cross roller guides, and these Y-axis independent adjustment screw plates are fixedly connected to the undersides of the left and right sides of the Y-axis sliding area top plate. The adjustment screws of the two Y-axis independent adjustment screw plates face inward, facing the outer surfaces of the two sets of Y-axis cross roller guides. A Y-axis cross roller rear stopper plate is disposed between the two sets of Y-axis cross roller guides. The underside of the Y-axis cross roller rear stopper plate is fixedly connected to the upper surface of the Y-axis cross roller mounting bottom plate, but its upper surface does not contact the lower surface of the Y-axis sliding area top plate. The left and right sides of the Y-axis cross roller rear stopper plate are fixedly connected to the inner surfaces of the corresponding Y-axis cross roller guides. A first focus lens mounting hole is provided in the center of the Y-axis cross roller mounting bottom plate for mounting the lift-and-low focus unit. Furthermore, an X-axis cross roller sliding unit mounting area for installing the X-axis cross roller sliding unit is provided in the front center of the top surface of the Y-axis sliding area top plate, and an X-axis sliding drive unit mounting area is provided in the rear portion of the Y-axis sliding area top plate for mounting the X-axis sliding drive unit. The top surface of the Y-axis sliding area top plate between the X-axis cross roller sliding unit mounting area and the X-axis sliding drive unit mounting area is provided as a Y-axis sliding drive unit connection area for transmitting and connecting with the Y-axis sliding drive unit. Furthermore, a first focus lens relief hole is provided in the center of the Y-axis sliding area top plate and at a corresponding position on the Y-axis cross roller rear stopper plate to avoid the top structure of the lift-and-low focus unit.

[0010] The Y-axis sliding drive unit further includes a crossbar for flexibly and securely connecting to the Y-axis sliding drive unit connection area. Soft pads are installed at the front and rear of the Y-axis sliding drive unit connection area, and the crossbar is clamped to the Y-axis sliding area top plate via the front and rear soft pads. One end of the crossbar is fixedly connected to a right crossbar support block via a right crossbar support, which is slidably connected to a right Y-axis sliding guide fixed to the ZY-axis common bottom plate 15. The other end of the crossbar is fixedly connected to a left crossbar support block via a left crossbar support, which is fixedly connected to a rack fixing plate. The rack fixing plate is slidably connected to a left Y-axis sliding guide fixed to a Y-axis motor fixing plate. The Y-axis motor fixing plate is fixedly connected to the main body base. A Y-axis motor is installed on the Y-axis motor fixing plate via a Y-axis motor mounting base, and a Y-axis gear is provided on the output shaft of the Y-axis motor. A Y-axis rack is installed on the rack fixing plate, and the Y-axis gear and the Y-axis rack are in mesh. A spring fixing block is installed on the rack fixing plate, and a spring for tightening the rack fixing plate is installed between the spring fixing block and the Y-axis motor fixing plate.

[0011] The X-axis cross roller sliding unit 4 further includes a first X-axis cross roller mounting bottom plate. A first X-axis sliding area top plate is installed on the top surface of the first X-axis cross roller mounting bottom plate via two sets of front and rear first X-axis cross roller guides. The first X-axis sliding area top plate is fixedly connected to the top surfaces of the two sets of front and rear first X-axis cross roller guides with three triangularly arranged fixing screws. Several adjustment screws are installed around each fixing screw to adjust the level of the first X-axis sliding area top plate on the two sets of front and rear first X-axis cross roller guides. An X-axis cross roller rear stopper plate is installed between the two sets of first X-axis cross roller guides, and the lower surface of the X-axis cross roller rear stopper plate is fixedly connected to the upper surface of the first X-axis cross roller mounting bottom plate. The upper surface of the X-axis cross roller rear stopper plate does not contact the lower surface of the first X-axis sliding area top plate, and the front and rear sides of the X-axis cross roller rear stopper plate are fixedly connected to the inner surfaces of the two sets of front and rear first X-axis cross roller guides, respectively. Furthermore, a first X-axis independent adjustment screw plate is installed on each of the outer surfaces of the two sets of first X-axis cross roller guides, and the two first X-axis independent adjustment screw plates are fixedly connected to the front and rear sides of the underside of the first X-axis slide area top plate, respectively. The adjustment screws of the two first X-axis independent adjustment screw plates 5 face inward, facing the outer surfaces of the two sets of first X-axis cross roller guides. A relief hole for a second focus lens is provided in the center of the first X-axis cross roller mounting bottom plate and at a corresponding position on the X-axis cross roller rear stopper plate to avoid contact with the upper structure of the lifting focus unit. A slide holder mounting slot is provided in the center of the first X-axis slide area top plate, and the rear of the first X-axis slide area top plate serves as an X-axis slide drive unit connection area for drive connection with the X-axis slide drive unit.An overall illumination unit mounting slot for fixing an overall illumination unit is provided on the upper surface of the X-axis cross roller rear stopper plate, and a part of the overall illumination unit is fixedly connected to the X-axis cross roller rear stopper plate through the overall illumination unit mounting slot, while another part of the overall illumination unit extends inward between the slide holder mounting slot and the second focus lens relief hole.

[0012] Furthermore, an electromagnetic suction unit for adsorbing the slide holder is installed on one side of the frame of the slide holder mounting slot. The electromagnetic suction unit includes an electromagnet mounting base fixed to one side of the frame of the slide holder mounting slot, and at least two electromagnetic coils are embedded in the upper surface of the electromagnet mounting base. The electromagnet mounting base is provided with electromagnet connection terminals for connecting an external power source to the electromagnetic coils. Two steel balls are embedded in the inner surface of the electromagnet mounting base for contacting the side surfaces of the slide holder, and one steel ball is embedded in the upper surface of the frame of the slide holder mounting slot, opposite the electromagnet mounting base, for contacting the lower surface of the slide holder.

[0013] Furthermore, the X-axis sliding drive unit includes an X-axis soft pad located in the X-axis sliding drive unit mounting area at the rear of the upper surface of the Y-axis sliding area top plate, and an X-axis power fixing plate is installed on the X-axis soft pad. A second X-axis cross roller mounting base plate is located in front of the X-axis power fixing plate, and a second X-axis sliding area top plate is installed on the front and rear of the upper surface of the second X-axis cross roller mounting base plate via two sets of second X-axis cross roller guides. A second X-axis independent adjustment screw plate is installed on the outside of each of the two sets of second X-axis cross roller guides, and the two second X-axis independent adjustment screw plates are fixed to both the front and rear sides of the underside of the second X-axis sliding area top plate. The screws of the two second X-axis independent adjustment screw plates face inward, facing the outer surfaces of the two sets of second X-axis cross roller guides. An X-axis linear motor is installed on the upper rear of the X-axis power fixing plate via a pair of left and right linear motor mounting bases, and the X-axis linear motor is fixed to the rear of the second X-axis sliding area top plate via an X-axis transmission connection part. Furthermore, X-axis moving pressure blocks are installed on both left and right ends of the second X-axis sliding area top plate. An X-axis moving pressure block fixture is installed in the X-axis sliding drive unit connection area on the rear of the first X-axis sliding area top plate, and X-axis moving pressure block fine-motion lift guides are provided on the left and right of the X-axis moving pressure block fixture. The two X-axis moving pressure blocks are connected to the X-axis moving pressure block fine-motion lift guides.

[0014] The slide holder further includes a slide holder body, with a slide holder handle disposed on one side of the slide holder body. The slide holder body is provided with at least one slide mounting hole for mounting a slide, with each slide mounting hole having a hollow center. The frame of each slide mounting hole is provided with a slide end stopper, a slide inner support block, and a slide outer leaf spring composite pressing block structure, with the slide inner support block and the slide outer leaf spring composite pressing block structure positioned opposite each other. The frame of each slide mounting hole is further provided with a slide bottom support protrusion and two adjustment screw holes, into which slide adjustment screws are inserted. The slide bottom support protrusion and two slide adjustment screws are arranged in an inverted triangle, providing three-point support for the slide.

[0015] The lifting focus unit further includes a T-shaped frame, with a focusing lens lifting motor mounted on the rear of the upper end surface of the T-shaped frame and a ball screw mounted on the front of the upper end surface. A drive pulley is mounted on the shaft of the focusing lens lifting motor, a driven pulley is attached to the upper end of the ball screw, and a timing belt is attached between the drive pulley and the driven pulley. A ball screw auxiliary guide is mounted on the front of the upright plate of the T-shaped frame, and a nut of the ball screw is fixedly connected to the slider of the ball screw auxiliary guide. A focusing lens support plate is mounted on the ball screw nut via a focusing lens lifting block. A focusing lens adjustment intermediate plate is mounted on the focusing lens support plate, and a focusing lens adjustment upper plate is mounted on the intermediate plate. A focusing lens is installed on the focusing lens adjustment upper plate via a focusing lens connecting pipe. A small photoelectric switch for limiting the focusing lens is mounted on the side of the upright plate of the T-shaped frame, and a focusing lens limiter sensitive to the photoelectric switch is mounted on the nut of the ball screw. In addition, a lower illumination unit is disposed below the condenser lens support plate, and the lower illumination unit is fixedly connected to the ZY-axis common bottom plate.

[0016] The Z-axis sliding unit further includes a Z-axis support column fixed to the ZY-axis common base plate, and the Z-axis support column is located on one side of the assembly of the Y-axis cross roller sliding unit and the X-axis cross roller sliding unit. A Z-axis ball screw is disposed on the inner surface of the Z-axis support column via a pair of upper and lower bearing blocks, and a Z-axis guide is attached to the inner surface of the Z-axis support column parallel to the Z-axis ball screw. A Z-axis driving motor is installed on the upper part of the Z-axis support column, and the shaft of the Z-axis driving motor is connected to the upper end of the Z-axis ball screw. A Z-axis lifting plate is attached to the nut of the Z-axis ball screw, and the Z-axis lifting plate is fixedly connected to the slider of the Z-axis guide. The Z-axis lifting plate is further provided with a Z-axis support column, and a Z-axis arm is attached to the side of the Z-axis support column via two sets of Z-axis cross roller guides. In addition, a piezoelectric ceramic stack moving device hanger is disposed on top of the Z-axis support, and a pen-shaped piezoelectric ceramic stack moving device is connected between the piezoelectric ceramic stack moving device hanger and the Z-axis arm. The Z-axis arm has a mounting hole for an oil immersion lens, and an oil immersion lens adjustment plate is attached to the mounting hole for the oil immersion lens. The oil immersion lens adjustment plate is fixed to the Z-axis arm with three lock bolts arranged in a triangle, and one side of each lock bolt is provided with an adjustment screw for fine-tuning the levelness of the oil immersion lens adjustment plate.

[0017] The oil immersion lens unit further includes an objective lens, an elastic drip nozzle, and a drip nozzle fixing block. The objective lens is attached to the oil immersion lens mounting hole of the Z-axis arm and fixed to the oil immersion lens adjustment plate. The drip nozzle fixing block is fixed to the underside of the Z-axis arm, and the elastic drip nozzle is attached to the drip nozzle fixing block and fixed to the side wall of the objective lens by the oil drip tube retainer plate, and the oil outlet is located in a position facing the lens portion of the objective lens.

[0018] The beneficial effects of the present invention are as follows: The present invention utilizes a novel structural design and mounting method for the X and Y cross roller sliders, enabling random vibration in the Z direction to be controlled to within 0.2 μm. Furthermore, the non-rigid direct connection of the X and Y axes prevents instability in one part of the moving axis from being transmitted to the X and Y moving areas. Furthermore, the vertically adjustable base structure and mounting method for the lens prevent bias during high-speed up and down movement of the Z axis, and the Z-axis grating ruler effectively compensates for instability in the Z axis structure through feedback from the Y moving base. Furthermore, the three-point support slide holder allows for easy adjustment of the levelness of the slide within the slide holder, and the three-point support electromagnets used to suction-fix the slide holder minimize the load on the slide holder during movement in the X and Y directions. Taken together, these advantages enable the present invention to significantly improve the scanning accuracy of microscope scanners. The above description is merely a summary of the technical solution of the present invention, and in order to make the technical solution of the present invention more clearly understood and be able to be implemented in accordance with the present specification, the following detailed description will be given with reference to the preferred embodiments and drawings of the present invention. Specific implementation methods of the present invention are shown in detail in the following embodiments and drawings. [Brief explanation of the drawings]

[0019] The following drawings are provided for a better understanding of the present invention and constitute a part of this application. The illustrative examples and descriptions in this application should not be construed as undue limitations on the present invention. [Figure 1] FIG. 1 is a front perspective view of the overall structure of the high-precision microscope scanner of the present invention. [Figure 2] FIG. 2 is a rear perspective view of the overall structure of the high-precision microscope scanner of the present invention. [Figure 3] FIG. 3 is a top perspective view of the main body base of the present invention. [Figure 4] FIG. 4 is a bottom perspective view of the main body base of the present invention. [Figure 5] FIG. 5 is a front perspective view of the Y-axis cross roller sliding unit of the present invention. [Figure 6] FIG. 6 is a rear perspective view of the Y-axis cross roller sliding unit of the present invention. [Figure 7] FIG. 7: An enlarged view of the Y-axis sliding limiting mechanism of the Y-axis cross roller sliding unit in the present invention. [Figure 8] FIG. 8 is a front perspective view of the Y-axis sliding drive unit of the present invention. [Figure 9] FIG. 9 is an enlarged view of the electric motor portion of the Y-axis sliding drive unit in the present invention. [Figure 10] FIG. 10 is an assembly diagram of the Y-axis sliding drive unit and the Y-axis cross roller sliding unit in the present invention. [Figure 11] FIG. 11 is a front perspective view of the assembly of the X-axis cross roller sliding unit and the Y-axis cross roller sliding unit of the present invention. [Figure 12] FIG. 12 is a rear perspective view of the assembly of the X-axis cross roller sliding unit and the Y-axis cross roller sliding unit of the present invention. [Figure 13] FIG. 13 is an enlarged view of the electromagnetic adsorption unit of the X-axis cross roller sliding unit in the present invention. [Figure 14] FIG. 14 is a front perspective view of the X-axis sliding drive unit of the present invention. [Figure 15] FIG. 15 is a rear perspective view of the X-axis sliding drive unit of the present invention. [Figure 16] FIG. 16: An assembly diagram of the X-axis sliding drive unit and the X-axis cross roller sliding unit in the present invention. [Figure 17] FIG. 17 is a perspective view of the slide holder of the present invention with a slide attached thereto. [Figure 18] FIG. 18: A perspective view of a slide holder according to the present invention. [Figure 19] FIG. 19: An enlarged view of the leaf spring type composite pressing block structure on the outer side of the slide of the slide holder in the present invention. [Figure 20] FIG. 20 is a schematic diagram of the mounting position of the lifting focus unit in the present invention. [Figure 21] FIG. 21 is a perspective view of the lift focus unit of the present invention. [Figure 22] FIG. 22 is a front perspective view of the Z-axis sliding unit of the present invention. [Figure 23] FIG. 23 is a rear perspective view of the Z-axis sliding unit of the present invention. [Figure 24] FIG. 24: An enlarged view of the oil immersion lens unit of the present invention. [Figure 25] FIG. 25: A front perspective view of an assembly of a Y-axis sliding drive unit, a Y-axis cross roller sliding unit, an X-axis cross roller sliding unit, an X-axis sliding drive unit, a Z-axis sliding unit and an oil immersion lens unit in the present invention. [Figure 26] FIG. 26: A rear perspective view of an assembly of a Y-axis sliding drive unit, a Y-axis cross roller sliding unit, an X-axis cross roller sliding unit, an X-axis sliding drive unit, a Z-axis sliding unit and an oil immersion lens unit in the present invention. [Figure 27] FIG. 27: A bottom perspective view of the functional components located on the gantry in the present invention. [Figure 28] FIG. 28: A top perspective view of the functional components located on the gantry in the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0020] The present invention will be described in detail below based on examples with reference to the drawings. The following description is for a deeper understanding of the present invention and constitutes a part of this application. The illustrative examples and descriptions in this application do not constitute an inappropriate limitation on the present invention.

[0021] As shown in reference Figures 1 and 2, this is a high-precision microscope scanner including a main body base 1, a Y-axis cross roller sliding unit 2, a Y-axis sliding drive unit 3, an X-axis cross roller sliding unit 4, an X-axis sliding drive unit 5, a slide holder 6, an elevation focus unit 7, an overall illumination unit 8, a Z-axis sliding unit 9, an oil immersion lens unit 10, an overall camera 11, an upper illumination unit 12, a fluorescence module 13, and a scanning camera 14.

[0022] The Y-axis cross roller sliding unit 2 is installed on the main body base 1 via a ZY-axis common bottom plate 15, the Y-axis slide drive unit 3 is located on one side of the main body base 1 and is connected to the Y-axis cross roller sliding unit 2, the X-axis cross roller sliding unit 4 and the X-axis slide drive unit 5 are both installed on the Y-axis cross roller sliding unit 2, and the X-axis slide drive unit 5 is connected to the X-axis cross roller sliding unit 4, the slide holder 6 and the overall illumination unit 8 are installed on the X-axis cross roller sliding unit 4, the lifting focus unit 7 is located in the center of the main body base 1 and is located below the slide holder 6, and the Z-axis slide The slide holder 6 is mounted on the ZY-axis sliding unit 9, and is located on one side of the assembly of the Y-axis cross roller sliding unit 2 and the X-axis cross roller sliding unit 4. The oil immersion lens unit 10 is mounted on the Z-axis sliding unit 9 and is located above the slide holder 6. The fluorescence module 13 is mounted on a gantry 16 above the assembly of the Y-axis cross roller sliding unit 2 and the X-axis cross roller sliding unit 4. The lower end of the fluorescence module 13 is connected to the oil immersion lens unit 10 and the upper end is connected to the scanning camera 14. The overall camera 11 and the upper illumination unit 12 are both mounted on the gantry 16 and are located on one side of the fluorescence module 13.

[0023] 3 and 4, the main body base 1 includes a single base bottom plate 101. A base bottom plate front support block 102 and a base bottom plate rear support block 103 are disposed on the front and rear sides of the underside of the base bottom plate 101. A marble base 104 is installed between the base bottom plate front support block 102 and the base bottom plate rear support block 103, and the marble base 104 is tightly secured to the underside of the base bottom plate 101. Handles 105 are provided on the left and right sides of the base bottom plate 101, and each handle 105 is fixedly connected to the end of the corresponding base bottom plate support block. The base bottom plate 101 also has Y-axis slide drive unit mounting holes 106 for mounting the Y-axis slide drive unit 3 and an elevation focus unit mounting slot 107 for mounting the bottom structure of the elevation focus unit 7.

[0024] 5 and 6, in an embodiment of the present invention, the Y-axis cross roller sliding unit 2 includes a Y-axis cross roller mounting bottom plate 201 fixed to the ZY-axis shared bottom plate 15. A Y-axis sliding area top plate 203 is disposed on the upper surface of the Y-axis cross roller mounting bottom plate 201 via two sets of Y-axis cross roller guides 202 (left and right). A Y-axis independent adjusting screw plate 204 is mounted on the outer surface of each of the two sets of Y-axis cross roller guides 202, and the Y-axis independent adjusting screw plates 204 are fixedly connected to the undersides of the left and right sides of the Y-axis sliding area top plate 203. The adjusting screws of the two Y-axis independent adjusting screw plates 204 face inward, facing the outer surfaces of the two sets of Y-axis cross roller guides 202. Furthermore, a Y-axis cross roller rear stopper plate 213 is disposed between the two sets of Y-axis cross roller guides 202, and the underside of the Y-axis cross roller rear stopper plate 213 is fixedly connected to the upper surface of the Y-axis cross roller mounting bottom plate 201, but its upper surface does not contact the underside of the Y-axis sliding area top plate 203. In addition, the left and right sides of the Y-axis cross roller rear stopper plate 213 are fixedly connected to the inner surfaces of the corresponding Y-axis cross roller guides 202. This structure optimizes the parallelism of the two sets of Y-axis cross roller guides 202 in space, making them able to withstand heavy loads.

[0025] A first focus lens mounting hole 205 for mounting the lift-and-low focus unit 7 is provided in the center of the Y-axis cross roller mounting bottom plate 201. Furthermore, an X-axis cross roller sliding unit mounting area for installing the X-axis cross roller sliding unit 4 is provided in the front center of the upper surface of the Y-axis sliding area top plate 203, and an X-axis sliding drive unit mounting area for mounting the X-axis sliding drive unit 5 is provided in the rear of the Y-axis sliding area top plate 203. The upper surface of the Y-axis sliding area top plate 203 between the X-axis cross roller sliding unit mounting area and the X-axis sliding drive unit mounting area is a Y-axis sliding drive unit connecting area for transmitting and connecting with the Y-axis sliding drive unit 3. Furthermore, a first focus lens relief hole 206 for avoiding the top structure of the lift-and-low focus unit 7 is provided in the center of the Y-axis sliding area top plate 203 and at a corresponding position on the Y-axis cross roller rear stopper plate 213.

[0026] 6, a Y-axis sliding limiting mechanism is installed on one side of the Y-axis cross roller sliding unit 2 to limit the sliding position of the Y-axis sliding area top plate 203 in the Y direction. The Y-axis sliding limiting mechanism includes a Y-axis photocoupler limiting plate 207 and a Y-axis optical limiter 208 for triggering the photocouplers on the front and rear ends of the Y-axis photocoupler limiting plate 207. The Y-axis photocoupler limiting plate 207 is installed on the ZY-axis common bottom plate 15, and the Y-axis optical limiter 208 is installed on the left or right end face of the Y-axis sliding area top plate 203, with the Y-axis optical limiter 208 and the Y-axis photocoupler limiting plate 207 positioned vertically in correspondence with each other.

[0027] 5 and 7, a Y-axis sliding grating mechanism for detecting the sliding distance in the Y direction of the Y-axis sliding area top plate 203 is installed on the other side of the Y-axis cross roller sliding unit 2. The Y-axis sliding grating mechanism includes a Y-axis grating ruler 209, a Y-axis grating ruler read head 210, a Y-axis grating ruler read head base 211, and a Y-axis zero position magnet 212. The Y-axis grating ruler read head 210 is installed on the ZY-axis common bottom plate 15 via the Y-axis grating ruler read head base 211, and the Y-axis grating ruler 209 is installed on the left or right end surface of the Y-axis sliding area top plate 203, with the Y-axis grating ruler 209 and the Y-axis grating ruler read head 210 corresponding to each other at left and right positions. The Y-axis zero position magnet 212 is located below the Y-axis grating ruler 209 and is fixedly connected to the side end surface of the Y-axis slide area top plate 203 .

[0028] As an embodiment of the present invention, as shown in FIG. 8 and FIG. 9, the Y-axis sliding drive unit 3 includes a crossbar 301 for flexibly and fixedly connecting with the Y-axis sliding drive unit connection area.

[0029] The right end of the crossbar 301 is fixedly connected to a right crossbar support block 303 via a right crossbar support 302, and the right crossbar support block 303 is slidably connected to a right Y-axis sliding guide 304 fixed to the ZY-axis common bottom plate 15.

[0030] The left end of the crossbar 301 is fixedly connected to a left crossbar support block 306 via a left crossbar support 305, and the left crossbar support block 306 is fixedly connected to a rack fixing plate 307. The rack fixing plate 307 is slidably connected to a left Y-axis sliding guide 314 fixed to a Y-axis motor fixing plate 308. The Y-axis motor fixing plate 308 is positioned in the Y-axis sliding drive unit mounting hole 106 on the base bottom plate 101, and the height of the Y-axis motor fixing plate 308 is lower than the height of the base bottom plate 101, and the Y-axis motor fixing plate 308 is fixedly connected to the underside of the base bottom plate 101. A Y-axis motor 310 is installed on the Y-axis motor fixing plate 308 via a Y-axis motor mounting base 309, and a Y-axis gear 311 is provided on the output shaft of the Y-axis motor 310. A Y-axis rack 312 is provided on the rack fixing plate 307, and the Y-axis gear 311 and the Y-axis rack 312 are engaged with each other. A spring fixing block 313 is provided on the rack fixing plate 307, and a spring (not shown) for tightening the rack fixing plate 307 is installed between the spring fixing block 313 and the Y-axis motor fixing plate 308.

[0031] As shown in FIG. 10 , the crossbar 301 is clamped to the Y-axis sliding area top plate 203 via front and rear soft pads 316, allowing the Y-axis sliding drive unit 3 to drive and slide the Y-axis cross roller sliding unit 2. The specific process is as follows: The Y-axis motor 310 rotates the Y-axis gear 311 forward or backward, causing the meshed Y-axis rack 312 to slide back and forth on the Y-axis left sliding guide 314. The Y-axis rack 312 functions as a power source, moving the crossbar 301 back and forth in the Y-axis direction via the gear fixing plate 307, the left crossbar support connection block 306, and the left crossbar support 305. At the same time, the right crossbar support 302 and the right crossbar support block 303 work assistedly to synchronously slide the crossbar 301 back and forth on the right Y-axis sliding guide 304. Through the transmission of the crossbar 301, the Y-axis sliding area top plate 203 slides back and forth along the two sets of Y-axis cross roller guides 202 on the Y-axis cross roller mounting bottom plate 201, thereby enabling the X-axis cross roller sliding unit 4 and X-axis sliding drive unit 5, which are located on the Y-axis cross roller sliding unit 2, to move in the Y-axis direction. In addition, in cooperation with the Y-axis sliding limiting mechanism and the Y-axis sliding grating mechanism, the slide holder 6 can move stably and accurately in the Y-axis direction.

[0032] Y-axis cross roller sliding unit 2 is driven by Y-axis motor 310, Y-axis gear 311, and Y-axis rack 312, and power is transmitted through a gantry structure consisting of crossbar 301, left crossbar support 305, and right crossbar support 302. Crossbar 301 straddles the upper surface of Y-axis sliding area top plate 203 and is clamped to Y-axis sliding area top plate 203 via soft pad 316. When Y-axis sliding drive unit 3 drives Y-axis cross roller sliding unit 2, crossbar 301 is not rigidly connected to Y-axis sliding area top plate 203, making it difficult for torsional force to be transmitted between them, and the rack fixing plate is tightened on one side by a spring (not shown), eliminating backlash.

[0033] In one embodiment of the present invention, as shown in FIGS. 11 and 12 , the X-axis cross roller sliding unit 4 includes a first X-axis cross roller mounting bottom plate 401 fixed to the X-axis cross roller sliding unit mounting area of ​​the Y-axis sliding area top plate 203. A first X-axis sliding area top plate 403 is installed on the top surface of the first X-axis cross roller mounting bottom plate 401 via two sets of front and rear first X-axis cross roller guides 402. The first X-axis sliding area top plate 403 is fixedly connected to the top surfaces of the two sets of front and rear first X-axis cross roller guides 402 with three fixing screws arranged in a triangle. Several adjustment screws are also installed around each fixing screw. In this way, the first X-axis sliding area top plate 403 is supported on the two sets of front and rear first X-axis cross roller guides 402 by the adjustment screws around the fixing screws. Two fixing screws are installed on one set of first X-axis cross roller guides 402, and one fixing screw is installed on the other set of first X-axis cross roller guides 402. Using the principle of three points determining one plane, the first X-axis sliding area top plate 403 can be quickly adjusted horizontally on the two sets of first X-axis cross roller guides 402 by adjusting the adjustment screws around the three fixing screws. Finally, the first X-axis sliding area top plate 403 is fixed to the two sets of first X-axis cross roller guides 402 by tightening the three fixing screws. This structure and installation method places the first X-axis cross roller guides 402 in a state where no force is applied in the Z direction, eliminating deviations in the horizontality of the first X-axis sliding area top plate 403 caused by deformation of the first X-axis cross roller guides 402 and making it suitable for small loads.

[0034] An X-axis cross roller back stopper plate 404 is installed between the two sets of first X-axis cross roller guides 402, and the underside of the X-axis cross roller back stopper plate 404 is fixedly connected to the upper surface of the first X-axis cross roller mounting bottom plate 401. The upper surface of the X-axis cross roller back stopper plate 404 does not contact the lower surface of the first X-axis slide area top plate 403, and the front and rear sides of the X-axis cross roller back stopper plate 404 are fixedly connected to the inner surfaces of the front and rear two sets of first X-axis cross roller guides 402, respectively. Furthermore, first X-axis independent adjustment screw plates 405 are installed on the outer surfaces of the two sets of first X-axis cross roller guides 402, and the two first X-axis independent adjustment screw plates 405 are fixedly connected to the front and rear sides of the underside of the first X-axis slide area top plate 403, respectively. The adjustment screws of the two first X-axis independent adjustment screw plates 405 face inward, facing the outer surfaces of the two sets of first X-axis cross roller guides 402.

[0035] A second focus lens clearance hole 406 is provided in the center of the first X-axis cross roller mounting bottom plate 401 and at a corresponding position on the X-axis cross roller rear stopper plate 404 to avoid the top structure of the lifting focus unit 7. A vertically penetrating slide holder mounting slot 407 is provided in the center of the first X-axis sliding area top plate 403, and the rear portion of the first X-axis sliding area top plate 403 serves as an X-axis slide drive unit connection area for driving connection with the X-axis slide drive unit 5. An overall illumination unit mounting slot 408 for fixing an overall illumination unit 8 is provided on the top surface of the X-axis cross roller rear stopper plate 404, and a portion of the overall illumination unit 8 is fixedly connected to the X-axis cross roller rear stopper plate 404 via the overall illumination unit mounting slot 408. The other portion of the overall illumination unit 8 extends inward between the slide holder mounting slot 407 and the second focus lens clearance hole 406.

[0036] 11 to 13, an electromagnetic suction unit 409 for adsorbing the slide holder 6 is installed on one side of the frame of the slide holder mounting slot 407. The electromagnetic suction unit 409 includes an electromagnet mounting base 4091 fixed to one side of the frame of the slide holder mounting slot 407, and at least two electromagnetic coils 4092 are embedded in the upper surface of the electromagnet mounting base 4091. The electromagnet mounting base 4091 is provided with an electromagnet connection terminal 4093 for connecting an external power source to the electromagnetic coils 4092. Two steel balls 4094 for contacting the side surfaces of the slide holder 6 are embedded in the inner surface of the electromagnet mounting base 4091, and one steel ball 4094 for contacting the lower surface of the slide holder 6 is embedded in the upper surface of the frame of the slide holder mounting slot 407, opposite the electromagnet mounting base 4091. With this structure, the slide holder 6 is installed in the slide holder mounting slot 407 using a three-point support method, with two of the support points located on the electromagnet mounting base 4091. These two support points are the magnetic force output points, and after electricity is applied, the iron slide holder 6 is firmly fixed at these three support points. This minimizes the force applied to the slide holder 6 when it moves in the X and Y directions.

[0037] 12, an X-axis sliding grating mechanism for detecting the X-direction sliding distance of the first X-axis sliding area top plate 403 is installed on one side of the X-axis cross roller sliding unit 4. The X-axis sliding grating mechanism includes an X-axis grating ruler 514, an X-axis grating ruler read head 515, an X-axis grating ruler read head base 516, and an X-axis zero position magnet (not shown). The X-axis grating ruler read head 515 is installed on the first X-axis cross roller mounting bottom plate 401 via the X-axis grating ruler read head base 516, and the X-axis grating ruler 514 is installed on the front or rear end surface of the first X-axis sliding area top plate 403, and the X-axis grating ruler 514 corresponds to the position of the X-axis grating ruler read head 515. The X-axis zero position magnet (not shown) is located below the X-axis grating ruler 514 and is fixedly connected to the side end surface of the first X-axis slide area top plate 403.

[0038] In an embodiment of the present invention, as shown in Figures 14 and 15, the X-axis sliding drive unit 5 includes an X-axis soft pad 501 arranged in the X-axis sliding drive unit mounting area on the rear upper surface of the Y-axis sliding area top plate 203, and an X-axis power fixing plate 502 is installed on the X-axis soft pad 501.

[0039] A second X-axis cross roller mounting bottom plate 503 is disposed in front of the X-axis power fixing plate 502, and a second X-axis slide area top plate 506 is mounted on the front and rear of the top surface of the second X-axis cross roller mounting bottom plate 503 via two sets of second X-axis cross roller guides 504. A second X-axis independent adjustment screw plate 505 is mounted on the outside of each of the two sets of second X-axis cross roller guides 504, and the two second X-axis independent adjustment screw plates 505 are fixed to both the front and rear of the underside of the second X-axis slide area top plate 506. The screws of the two second X-axis independent adjustment screw plates 505 face inward, facing the outer surfaces of the two sets of second X-axis cross roller guides 504.

[0040] An X-axis linear motor 508 is installed on the rear upper surface of the X-axis power fixing plate 502 via a pair of left and right linear motor mounting bases 507, and the X-axis linear motor 508 is fixed to the rear of the second X-axis sliding area top plate 506 via an X-axis transmission connector 509. Furthermore, X-axis moving pressure blocks 510 are attached to both left and right ends of the second X-axis sliding area top plate 506, respectively.

[0041] 15, an X-axis sliding limiting mechanism for limiting the X-direction movement range of the second X-axis sliding area top plate 506 is installed on the rear side of the X-axis sliding drive unit 5. The X-axis sliding limiting mechanism includes an X-axis photocoupler limiting plate 512 and an X-axis optical limiter 513 for triggering the photocouplers on both the front and rear ends of the X-axis photocoupler limiting plate 512. The X-axis photocoupler limiting plate 512 is installed on the X-axis power fixing plate 502, and the X-axis optical limiter 513 is attached to the rear end surface of the second X-axis sliding area top plate 506, with the X-axis optical limiter 513 and the X-axis photocoupler limiting plate 512 positioned in a vertically corresponding manner.

[0042] 16, an X-axis moving pressure block fixture 511 is installed in the X-axis sliding drive unit connection area at the rear of the first X-axis sliding area top plate 403, and X-axis moving pressure block fine-motion lifting guides 517 are provided on the left and right sides of the X-axis moving pressure block fixture 511. The two X-axis moving pressure blocks 510 are connected to the X-axis moving pressure block fine-motion lifting guides 517, allowing the X-axis sliding drive units 5 to drive and slide the X-axis cross roller sliding units 4. The specific process is as follows: An X-axis linear motor 508 slides the second X-axis sliding area top plate 506 left and right on the second X-axis cross roller mounting bottom plate 503 along two sets of second X-axis cross roller guides 504 via an X-axis movement connection part 509, and a pair of horn-shaped X-axis movement pressure blocks 510 on the second X-axis sliding area top plate 506 clamp both ends of an X-axis movement pressure block fixture 511 on the second X-axis sliding area top plate 506, sliding the first X-axis sliding area top plate 403 left and right on the first X-axis cross roller mounting bottom plate 401 along two sets of first X-axis cross roller guides 402. Furthermore, cooperation between the X-axis sliding limiting mechanism and the X-axis sliding grating mechanism achieves stable and accurate movement of the slide holder 6 in the X-axis direction.

[0043] X-axis cross roller sliding unit 4 is driven by X-axis linear motor 508, and second X-axis slide area top plate 506 of X-axis cross roller sliding unit 4 is mounted on two independent second X-axis cross roller guides 504, which are designed to suppress vibration when the mover of X-axis linear motor 508 moves. In addition, X-axis moving press block fine-motion lift guides 517 arranged on both ends of X-axis moving press block fixture 511 form a slidable rigid connection between X-axis moving press block 510 and X-axis moving press block fixture 511, making it possible to minimize vibration transmitted to X-axis cross roller sliding unit 4 by the operation of X-axis sliding drive unit 5.

[0044] 17 to 19, in an embodiment of the present invention, a slide holder 6 includes a slide holder main body 601, and a slide holder handle 602 is disposed on one side of the slide holder main body 601. The slide holder main body 601 is provided with at least one slide mounting hole 604 for mounting a slide 603, and the center of each slide mounting hole 604 is hollow. The frame of each slide mounting hole 604 is provided with a slide end stopper 605, a slide inner support block 606, and a slide outer leaf spring composite pressing block structure 607, with the slide inner support block 606 and the slide outer leaf spring composite pressing block structure 607 positioned opposite each other. The frame of each slide mounting hole 604 is provided with a slide bottom support protrusion 608 and two adjustment screw holes 609, into which slide adjustment screws (not shown) are inserted. The slide bottom support protrusion 608 and the two slide adjustment screws are arranged in an inverted triangle to provide three-point support for the slide 603. This structure allows the slide 603 to be placed in the slide mounting hole 604 with three-point support. The tail of the slide 603 can be adjusted horizontally on the slide holder body 601, with the slide bottom support protrusion 608 as one fulcrum and the head of the slide 603 as fulcrums, with the two slide adjustment screws as fulcrums.

[0045] 19, the slide outer leaf spring composite pressure block structure 607 is composed of a leaf spring fixing base 6071, a leaf spring 6072, a pressure head 6073, and a pressure head operating unit 6074. The leaf spring fixing base 6071 is fixed to one end of the slide mounting hole 604, and the front end of the leaf spring 6072 is fixed to the front end of the inner surface of the leaf spring fixing base 6071. The pressure head 6073 is fixed to the rear inner surface of the leaf spring 6072, and the pressure head operating unit 6074 is attached to the outer surface of the pressure head 6073. A lateral pressure contact head 6075 having an inverted triangle shape is provided on the inner surface of the pressure head 6073. The slide inner support block 606 is fixed to the front end of the other end of the slide mounting hole 604 and is positioned opposite the pressure head 6073. An inverted triangular support contact head 6061 is disposed on the slide inner support block 606 on the side that contacts the slide 603. To install the slide 603, the pressure head operating part 6074 is rotated to move the pressure head 6073 outward, thereby opening the slide mounting hole 604. Next, the slide 603 is placed in the slide mounting hole 604, and the slide end stopper 605 and the slide inner support block 606 determine its position in the X and Y directions. Finally, when the pressure head operating part 6074 is released, the restoring force of the leaf spring 6072 causes the pressure head 6073 to return to its original position, and the slide 603 is sandwiched between the slide inner support block 606 and the pressure head 6073. At this time, the inverted triangular lateral pressure contact head 6075 and the support contact head 6061 apply downward pressure to the slide 603, ensuring that the slide 603 is placed in a stable position supported by the three-point support formed by the slide bottom support protrusion 608 and two slide adjustment screws.

[0046] 20 and 21, in an embodiment of the present invention, the lifting focus unit 7 includes a T-frame 701, a condenser lens lifting motor 702 is provided at the rear of the upper end surface of the T-frame 701, and a ball screw 703 is disposed at the front of the upper end surface. A drive pulley 704 is provided on the shaft of the condenser lens lifting motor 702, a driven pulley 705 is attached to the upper end of the ball screw 703, and a timing belt (not shown) is fitted between the drive pulley 704 and the driven pulley 705. A ball screw auxiliary guide 706 is provided on the front of the upright plate of the T-frame 701, and a nut of the ball screw 703 is fixedly connected to a slider of the ball screw auxiliary guide 706. A condenser lens support plate 708 is provided on the nut of the ball screw 703 via a condenser lens lifting block 707. A condenser lens adjustment intermediate plate 709 is attached to the condenser lens support plate 708, and a condenser lens adjustment upper plate 710 is further disposed thereon. A condenser lens 712 is installed on the condenser lens adjustment upper plate 710 via a condenser lens connection pipe 711. A small photoelectric switch 713 for limiting the condenser lens is attached to the side of the upright plate of the T-shaped frame 701, and a condenser lens limiter 714 that responds to the photoelectric switch 713 is installed on the nut of the ball screw 703. In addition, a bottom lighting unit 715 is disposed below the condenser lens support plate 708, and the bottom lighting unit 715 is fixedly connected to the ZY-axis common bottom plate 15.

[0047] As shown in FIG. 8 , the ZY-axis common base plate 15 is formed with a second focus lens mounting hole 315 for mounting the lift-and-focus unit 7. When the lift-and-focus unit 7 is mounted on the main body base 1, the lower part of the lift-and-focus unit 7 passes through the first focus lens mounting hole 205 located in the center of the Y-axis cross roller mounting base plate 201 and the second focus lens mounting hole 315 on the ZY-axis common base plate 15, and is fixed to the lift-and-focus unit mounting slot 107 on the base base plate 101. The upper part of the lift-and-focus unit 7 passes through the first focus lens clearance hole 206 located in the center of the Y-axis slide area top plate 203, reaches the second focus lens clearance hole 406 located in the center of the first X-axis cross roller mounting base plate 401, and finally faces the slide holder 6 placed on the slide holder mounting slot 407 located in the center of the first X-axis slide area top plate 403. The lift-and-lowering operation of the condenser lens 712 is as follows. First, condenser lens lifting motor 702 rotates drive pulley 704, which rotates driven pulley 705 via a timing belt (not shown), causing a nut on ball screw 703 to move up and down. Accompanying this movement, condenser lens lifting block 707 moves up and down along ball screw auxiliary guide 706, and condenser lens lifting block 707 moves condenser lens 712 up and down via condenser lens support plate 708, condenser lens adjustment intermediate plate 709, condenser lens adjustment upper plate 710, and condenser lens connecting pipe 711. Furthermore, in cooperation with condenser lens limiter miniature photoelectric switch 713 and condenser lens limiter 714, the position of condenser lens 712 is precisely controlled.

[0048] 22 and 23, in an embodiment of the present invention, the Z-axis sliding unit 9 includes a Z-axis support 901 fixed to the ZY-axis common base plate 15, and the Z-axis support 901 is disposed on one side of the assembly of the Y-axis cross roller sliding unit 2 and the X-axis cross roller sliding unit 4. A Z-axis ball screw 902 is disposed on the inner surface of the Z-axis support 901 via a pair of upper and lower bearing blocks, and a Z-axis guide 903 is attached to the inner surface of the Z-axis support 901 in parallel with the Z-axis ball screw 902. A Z-axis driving motor 904 is installed on the top of the Z-axis support 901, and the shaft of the Z-axis driving motor 904 is connected to the upper end of the Z-axis ball screw 902. A Z-axis lifting plate 905 is attached to the nut of the Z-axis ball screw 902, and the Z-axis lifting plate 905 is fixedly connected to the slider of the Z-axis guide 903. Furthermore, a Z-axis support column 906 is provided on the Z-axis lift plate 905, and a Z-axis arm 909 is attached to the side of the Z-axis support column 906 via two sets of Z-axis cross roller guides 908. A piezoelectric ceramic stack moving device hanger 912 is disposed on the top of the Z-axis support column 906, and a pen-shaped piezoelectric ceramic stack moving device 913 is connected between the piezoelectric ceramic stack moving device hanger 912 and the Z-axis arm 909. A mounting hole for an oil immersion lens is formed in the Z-axis arm 909, and an oil immersion lens adjustment plate 907 is attached to the mounting hole for the oil immersion lens. The oil immersion lens adjustment plate 907 is fixed to the Z-axis arm 909 with three lock bolts arranged in a triangle, and one side of each lock bolt is provided with an adjustment screw for fine-tuning the levelness of the oil immersion lens adjustment plate 907.

[0049] In a more preferred embodiment, a ball screw adapter is provided on the body of the Z-axis ball screw 902, and the ball screw adapter is fixed to the Z-axis support column 901. In addition, an upper limit block for the Z-axis ball screw is provided on the top of the Z-axis lift plate 905, which comes into contact with and controls the ball screw adapter.

[0050] In a more preferred embodiment, a Z-axis sliding limiting mechanism is installed on one side of the Z-axis sliding unit 9 to limit the sliding position of the Z-axis lifting plate 905 in the Z direction. The Z-axis sliding limiting mechanism includes a Z-axis photocoupler limiting plate 914 and a Z-axis optical limiter 915 for triggering photocouplers on both the front and rear ends of the Z-axis photocoupler limiting plate 914. The Z-axis photocoupler limiting plate 914 is installed on the Z-axis support 901, and the Z-axis optical limiter 915 is attached to the Z-axis lifting plate 905, with the Z-axis optical limiter 915 and the Z-axis photocoupler limiting plate 914 aligned front to back.

[0051] In a more preferred embodiment, a Z-axis sliding grating mechanism for detecting the Z-direction movement distance of the Z-axis arm 909 is installed on the other side of the Z-axis sliding unit 9. The Z-axis sliding grating mechanism includes a Z-axis grating ruler 911, a Z-axis grating ruler read head 916, a Z-axis grating ruler read head base 917, and a Z-axis zero-position magnet (not shown). The Z-axis grating ruler read head 916 is attached to the Z-axis support 906 via the Z-axis grating ruler read head base 917, and the Z-axis grating ruler read head base 917 is fixedly connected to the ZY-axis common base plate 15. The Z-axis grating ruler 911 is attached to the Z-axis arm 909, and the Z-axis grating ruler 911 and the Z-axis grating ruler read head 916 are arranged at corresponding positions on the left and right. The Z-axis zero position magnet is located on the left side of the Z-axis grating ruler 911 and is fixed to the side end surface of the Z-axis arm 909 .

[0052] In a further preferred embodiment, the pen-shaped piezoelectric ceramic stack moving device includes a pressure tube, a piezoelectric ceramic stack, an upper cap, a lower nut, a load nut, a load nut adapter, and a disc spring. The pressure tube is straight, and the piezoelectric ceramic stack is rod-shaped and variable in length and disposed within the pressure tube. The upper cap is attached to the upper end of the pressure tube, and its inner surface is fixed to the top of the piezoelectric ceramic stack. The lower nut is attached to the lower end of the pressure tube, and the load nut is disposed within the lower nut so as to be extendable and contractible. The output end of the load nut is located outside the pressure tube, and its input end is located inside the pressure tube. The load nut adapter and the disc spring are disposed within the pressure tube, and the upper end of the load nut adapter is fixed to the bottom of the piezoelectric ceramic stack, and the lower end of the load nut adapter is fixedly connected to the input end of the load nut. The upper end of the disc spring contacts the lower end of the load nut adapter, and its lower end contacts the bottom surface of the inner wall of the lower nut.

[0053] The Z-axis sliding unit 9 controls the up and down movement of the microscope lens, and its specific operation is as follows: The Z-axis driving motor 904 moves the Z-axis lifting plate 905 up and down on the Z-axis support column 901 along the Z-axis guide 903 via the Z-axis ball screw 902, and the Z-axis lifting plate 905 moves the Z-axis arm 909 up and down via the Z-axis support column 906 with large coarse adjustment. Meanwhile, the pen-type piezoelectric ceramic stack moving device 913 moves the Z-axis arm 909 up and down on the Z-axis support column 906 along the Z-axis cross roller guide 908 with fine adjustment, and in cooperation with the Z-axis sliding limiting mechanism and the Z-axis sliding grating mechanism, precise movement of the lens in the Z-axis direction is realized.

[0054] The Z-axis sliding unit 9 is configured with two stages: coarse adjustment and fine adjustment. The coarse adjustment stage is driven by a highly rigid Z-axis cross roller guide 908 and a Z-axis ball screw 902, and has a stroke of 30 mm, which allows for large step movements. The fine adjustment stage is driven by a pen-type piezoelectric ceramic stack movement device 913, and has a stroke of 100 μm, which allows for small step movements of the lens.

[0055] The Z-axis sliding unit 9 is also used to adjust the position of the microscope lens. The microscope lens is attached to an oil immersion lens adjustment plate 907, which is supported by three adjustment screws and fixed to the Z-axis arm 909 by three lock bolts. The perpendicularity of the oil immersion lens and slide can be adjusted by adjusting the height of the adjustment screws around the three lock bolts. After adjustment is complete, the three lock bolts can be tightened with a large torque to fix the lens to the Z-axis arm 909, preventing the oil immersion lens from shaking during high-speed up and down movement along the Z axis.

[0056] The Z-axis sliding unit 9 is fixed to the ZY-axis common base plate 15, and the Z-axis grating ruler receives feedback from the Y-axis base, thereby allowing the instability of the Z-axis sliding unit 9 to be corrected to the maximum extent possible.

[0057] 24 to 26, in an embodiment of the present invention, the oil immersion lens unit 10 includes an objective lens 1001, an elastic drip nozzle 1003, and a drip nozzle fixing block 1002. The objective lens 1001 is attached to the oil immersion lens mounting hole 910 of the Z-axis arm 909 and is fixed to the oil immersion lens adjustment plate 907. The drip nozzle fixing block 1002 is fixed to the underside of the Z-axis arm 909, and the elastic drip nozzle 1003 is attached to the drip nozzle fixing block 1002 and fixed to the side wall of the objective lens 1001 by a presser plate of the oil drip tube, with an oil outlet positioned opposite the lens portion of the objective lens 1001.

[0058] As an embodiment of the present invention, as shown in Figures 25 and 26, an oil supply unit 17 is installed on one side of the Z-axis sliding unit 9, and the oil supply unit 17 is connected to an elastic drip nozzle 1003 via an oil pipe.

[0059] As shown in Figures 27 and 28, the fluorescent module 13 includes a six-hole wheel assembly 1301, a fluorescent turntable 1302, and a fluorescent lamp head 1303. The six-hole wheel assembly 1301, the fluorescent turntable 1302, and the fluorescent lamp head 1303 are all attached to the gantry 16. The lower end of the six-hole wheel assembly 1301 is located directly above the objective lens 1001, and the scanning camera 14 is fixed to the gantry 16 and faces downward toward the upper end of the six-hole wheel assembly 1301. The fluorescent lamp head 1303 faces the rear end of the six-hole wheel assembly 1301 via the fluorescent turntable 1302. Furthermore, the overall camera 11 and the upper illumination unit 12 are also disposed on the gantry 16, and are all located on one side of the six-hole wheel assembly 1301.

[0060] The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention. Those skilled in the art can make various changes and modifications based on the present invention. However, any modifications, equivalent replacements, improvements, etc. made without departing from the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A high-precision microscope scanner including a main body base (1), a Y-axis cross roller sliding unit (2), a Y-axis sliding drive unit (3), an X-axis cross roller sliding unit (4), an X-axis sliding drive unit (5), a slide holder (6), an elevation focus unit (7), an overall illumination unit (8), a Z-axis sliding unit (9), an oil immersion lens unit (10), an overall camera (11), an upper illumination unit (12), a fluorescence module (13), and a scanning camera (14), The Y-axis cross roller sliding unit (2) is installed on the main body base (1) via a ZY-axis common bottom plate (15), the Y-axis sliding drive unit (3) is arranged on one side of the main body base (1) and is connected to the Y-axis cross roller sliding unit (2), the X-axis cross roller sliding unit (4) and the X-axis sliding drive unit (5) are both installed on the Y-axis cross roller sliding unit (2), and the X-axis sliding drive unit (5) is connected to the X-axis cross roller sliding unit (4), the slide holder (6) and the overall illumination unit (8) are arranged on the X-axis cross roller sliding unit (4), the lifting focus unit (7) is arranged in the center of the main body base (1) and is located below the slide holder (6), and the Z-axis sliding unit (9) is connected to the ZY 1. A high-precision microscope scanner, comprising: a microscope mounted on a shared-axis base plate (15) and located on one side of the assembly of the Y-axis cross roller slide unit (2) and the X-axis cross roller slide unit (4); the oil immersion lens unit (10) is mounted on the Z-axis slide unit (9) and located above the slide holder (6); the fluorescence module (13) is mounted above the assembly of the Y-axis cross roller slide unit (2) and the X-axis cross roller slide unit (4) via a gantry (16); the lower end of the fluorescence module (13) is connected to the oil immersion lens unit (10) and the upper end is connected to the scanning camera (14); and the overall camera (11) and the upper illumination unit (12) are both mounted on the gantry (16) and located on one side of the fluorescence module (13).

2. The main body base (1) includes a single base bottom plate (101), and a base bottom plate front support block (102) and a base bottom plate rear support block (103) are respectively arranged on the front and rear sides of the underside of the base bottom plate (101). A marble base (104) is installed between the base bottom plate front support block (102) and the base bottom plate rear support block (103). The marble base (104) is fixed in close contact with the underside of the base bottom plate (101), and on the left and right sides of the base bottom plate (101).

2. The high-precision microscope scanner according to claim 1, characterized in that each of the handles (105) is provided, and each handle (105) is fixedly connected to the end of the base bottom plate support block on the corresponding side, and the base bottom plate (101) is provided with a Y-axis slide drive unit mounting hole (106) for mounting the Y-axis slide drive unit (3) and a lift-and-low focus unit mounting slot (107) for mounting the bottom structure of the lift-and-low focus unit (7).

3. The Y-axis cross roller sliding unit (2) includes a Y-axis cross roller mounting bottom plate (201), and a Y-axis slide area top plate (203) is disposed on the upper surface of the Y-axis cross roller mounting bottom plate (201) via two sets of Y-axis cross roller guides (202) on the left and right. A Y-axis independent adjustment screw plate (204) is installed on each of the outer surfaces of the two sets of Y-axis cross roller guides (202), and the Y-axis independent adjustment screw plate (204) is fixedly connected to the lower surfaces of both the left and right sides of the Y-axis slide area top plate (203), and the adjustment screws of the two Y-axis independent adjustment screw plates (204) are each facing inward. A Y-axis cross roller rear stopper plate (213) is disposed between the two sets of Y-axis cross roller guides (202), facing the outer surfaces of the Y-axis cross roller guides (202) of the two sets, and the lower surface of the Y-axis cross roller rear stopper plate (213) is fixedly connected to the upper surface of the Y-axis cross roller mounting bottom plate (201), but its upper surface is not in contact with the lower surface of the Y-axis slide area top plate (203), and the left and right side surfaces of the Y-axis cross roller rear stopper plate (213) are fixedly connected to the inner surfaces of the corresponding Y-axis cross roller guides (202), respectively; The center of the Y-axis cross roller mounting bottom plate (201) is provided with a first focus lens mounting hole (205) for mounting the lifting focus unit (7), and the front center of the top surface of the Y-axis slide area top plate (203) is provided with an X-axis cross roller sliding unit mounting area for installing the X-axis cross roller sliding unit (4), and the rear of the Y-axis slide area top plate (203) is provided with an X-axis sliding drive unit mounting area for installing the X-axis sliding drive unit (5), and the X-axis cross roller sliding unit (4) is provided with a first focus lens mounting hole (205) for mounting the lifting focus unit (7).

2. The high-precision microscope scanner according to claim 1, characterized in that the upper surface of the Y-axis sliding area top plate (203) between the mat mounting area and the X-axis sliding drive unit mounting area is a Y-axis sliding drive unit connection area for transmission connection with the Y-axis sliding drive unit (3), and a relief hole (206) for a first focus lens to avoid the top structure of the lifting focus unit (7) is provided at the center of the Y-axis sliding area top plate (203) and at the corresponding position of the Y-axis cross roller back stopper plate (213).

4. The Y-axis sliding drive unit (3) includes a crossbar (301) for flexibly and fixedly connecting to the Y-axis sliding drive unit connection area, and soft pads (316) are installed at the front and rear of the Y-axis sliding drive unit connection area, respectively, and the crossbar (301) is clamped and connected to the Y-axis sliding area top plate (203) via the front and rear soft pads; The right end of the crossbar (301) is fixedly connected to a right crossbar support block (303) via a right crossbar support (302), and the right crossbar support block (303) is slidably connected to a right Y-axis sliding guide (304) fixed to the ZY-axis common bottom plate (15). The left end of the crossbar (301) is fixedly connected to a crossbar left support connection block (306) via a crossbar left support (305), and the crossbar left support connection block (306) is fixedly connected to a rack fixing plate (307), and the rack fixing plate (307) is slidably connected to a Y-axis sliding left guide (314) fixed to a Y-axis motor fixing plate (308), and the Y-axis motor fixing plate (308) is fixedly connected to the main body base (1), and the Y-axis motor (31) is mounted on the Y-axis motor fixing plate (308) via a Y-axis motor mounting base (309). 0), a Y-axis gear (311) is provided on the output shaft of the Y-axis motor (310), a Y-axis rack (312) is provided on the rack fixing plate (307), the Y-axis gear (311) and the Y-axis rack (312) are engaged with each other, a spring fixing block (313) is provided on the rack fixing plate (307), and a spring for tightening the rack fixing plate (307) is installed between the spring fixing block (313) and the Y-axis motor fixing plate (308).

5. The X-axis cross roller sliding unit (4) includes a first X-axis cross roller mounting bottom plate (401), and a first X-axis slide area top plate (403) is installed on the upper surface of the first X-axis cross roller mounting bottom plate (401) via two sets of first X-axis cross roller guides (402) at the front and rear. The first X-axis slide area top plate (403) is fixedly connected to the upper surfaces of the two sets of first X-axis cross roller guides (402) at the front and rear by three fixing screws arranged in a triangle, and several adjustment screws are installed around each fixing screw to adjust the horizontal direction of the first X-axis slide area top plate (403) on the two sets of first X-axis cross roller guides (402) at the front and rear. Between the two sets of first X-axis cross roller guides (402), an X-axis cross roller rear stopper plate (404) is installed, and the lower surface of the X-axis cross roller rear stopper plate (404) is fixedly connected to the upper surface of the first X-axis cross roller mounting bottom plate (401). The upper surface of the X-axis cross roller rear stopper plate (404) does not contact the lower surface of the first X-axis slide area top plate (403). The front and rear sides of the X-axis cross roller rear stopper plate (404) are respectively connected to the front and rear two sets of a first X-axis independent adjusting screw plate (405) is installed on the outer surface of each of the two sets of first X-axis cross roller guides (402); the two first X-axis independent adjusting screw plates (405) are fixedly connected to the front and rear sides of the underside of the first X-axis slide area top plate (403), respectively; and the adjusting screws of the two first X-axis independent adjusting screw plates (405) face inward and face the outer surfaces of the two sets of first X-axis cross roller guides (402); A relief hole (406) for a second focus lens is provided in the center of the first X-axis cross roller mounting bottom plate (401) and at a corresponding position on the X-axis cross roller rear stopper plate (404) to avoid the top structure of the lifting focus unit (7). A slide holder mounting slot (407) is provided in the center of the first X-axis slide area top plate (403) through the top and bottom, and the rear of the first X-axis slide area top plate (403) is an X-axis slide drive unit connection area for drive connection with the X-axis slide drive unit (5). an overall illumination unit mounting slot (408) for fixing an overall illumination unit (8) is provided on the upper surface of the X-axis cross roller rear stopper plate (404), a part of the overall illumination unit (8) is fixedly connected to the X-axis cross roller rear stopper plate (404) through the overall illumination unit mounting slot (408), and another part of the overall illumination unit (8) extends inward between the slide holder mounting slot (407) and the second focus lens relief hole (406); An electromagnetic suction unit (409) for adsorbing the slide holder (6) is installed on one side of the frame of the slide holder mounting slot (407), and the electromagnetic suction unit (409) includes an electromagnet mounting base (4091) fixed to one side of the frame of the slide holder mounting slot (407), at least two electromagnet coils (4092) are embedded in the upper surface of the electromagnet mounting base (4091), and the electromagnet mounting base (4091) is provided with an electromagnet connection terminal (4093) for connecting an external power source to the electromagnet coils (4092); 2. The high-precision microscope scanner according to claim 1, wherein two steel balls (4094) are embedded in the inner surface of the electromagnet mounting base (4091) for contacting the side of the slide holder (6), and one steel ball (4094) is embedded in the upper surface of the frame of the slide holder mounting slot (407) on the opposite side of the electromagnet mounting base (4091) for contacting the lower surface of the slide holder (6).

6. The X-axis sliding drive unit (5) includes an X-axis soft pad (501) arranged in the X-axis sliding drive unit mounting area at the rear of the upper surface of the Y-axis sliding area top plate (203), an X-axis power fixing plate (502) is installed on the X-axis soft pad (501), a second X-axis cross roller mounting bottom plate (503) is arranged in front of the X-axis power fixing plate (502), and two sets of second X-axis cross roller guides (504) are arranged at the front and rear of the upper surface of the second X-axis cross roller mounting bottom plate (503). ) and a second X-axis slide area top plate (506) is installed via a second X-axis slide area top plate (506), and second X-axis independent adjustment screw plates (505) are installed on the outside of the two sets of second X-axis cross roller guides (504), respectively. The two second X-axis independent adjustment screw plates (505) are fixed to the front and rear sides of the underside of the second X-axis slide area top plate (506), and the screws of the two second X-axis independent adjustment screw plates (505) face inward and face the outer surfaces of the two sets of second X-axis cross roller guides (504), 6. The high-precision microscope scanner according to claim 5, characterized in that an X-axis linear motor (508) is installed on the upper rear of the X-axis power fixing plate (502) via a pair of left and right linear motor mounting bases (507), the X-axis linear motor (508) is fixed to the rear of the second X-axis sliding area top plate (506) via an X-axis transmission connection part (509), and X-axis moving pressure blocks (510) are attached to both left and right ends of the second X-axis sliding area top plate (506).

7. The slide holder (6) comprises a slide holder body (601), a slide holder handle (602) is disposed on one side of the slide holder body (601), at least one slide mounting hole (604) for mounting a slide (603) is provided on the slide holder body (601), the center of each slide mounting hole (604) is hollow, and the frame of each slide mounting hole (604) is provided with a slide end stopper (605), a slide inner support block (606), and a slide outer leaf spring type composite pressing block structure ( The high-precision microscope scanner according to claim 5, characterized in that the slide inner support block (606) and the slide outer leaf spring composite pressing block structure (607) are arranged opposite to each other, the frame of each slide mounting hole (604) is provided with a slide bottom support protrusion (608) and two adjustment screw holes (609), slide adjustment screws are inserted into these two adjustment screw holes (609), and the slide bottom support protrusion (608) and the two slide adjustment screws are arranged in an inverted triangle to form a three-point support structure for the slide (603).

8. The lifting focus unit (7) includes a T-shaped frame (701), a condenser lens lifting motor (702) is provided at the rear of the upper end surface of the T-shaped frame (701), a ball screw (703) is arranged at the front of the upper end surface, a drive pulley (704) is installed on the shaft of the condenser lens lifting motor (702), a driven pulley (705) is attached to the upper end of the ball screw (703), a timing belt is installed between the drive pulley (704) and the driven pulley (705), a ball screw auxiliary guide (706) is installed on the front of the vertical plate of the T-shaped frame (701), a nut of the ball screw (703) is fixedly connected to the slider of the ball screw auxiliary guide (706), and a condenser lens support plate (707) is attached to the nut of the ball screw (703) via a condenser lens lifting block (707). a focusing lens adjusting intermediate plate (709) attached to the focusing lens support plate (708), a focusing lens adjusting upper plate (710) disposed thereon, a focusing lens (712) attached to the focusing lens adjusting upper plate (710) via a focusing lens connecting pipe (711), a small photoelectric switch (713) for limiting the focusing lens attached to the side of the upright plate of the T-shaped frame (701), a focusing lens limiter (714) sensitive to the photoelectric switch (713) installed on the nut of the ball screw (703), a lower illumination unit (715) disposed below the focusing lens support plate (708), and the lower illumination unit (715) fixedly connected to the ZY-axis common bottom plate (15).

9. The Z-axis sliding unit (9) includes a Z-axis support (901) fixed to the ZY-axis common bottom plate (15), and the Z-axis support (901) is arranged on one side of the assembly of the Y-axis cross roller sliding unit (2) and the X-axis cross roller sliding unit (4). A Z-axis ball screw (902) is arranged on the inner surface of the Z-axis support (901) via a pair of upper and lower bearing blocks, and a Z-axis ball screw (902) is arranged on the inner surface of the Z-axis support (901) in parallel with the Z-axis ball screw (902). A guide (903) is attached, and a Z-axis drive motor (904) is installed on the top of the Z-axis support (901), the shaft of the Z-axis drive motor (904) is connected to the upper end of the Z-axis ball screw (902), a Z-axis lift plate (905) is attached to the nut of the Z-axis ball screw (902), the Z-axis lift plate (905) is fixedly connected to the slider of the Z-axis guide (903), and a Z-axis support (906) is attached to the Z-axis lift plate (905). a Z-axis arm (909) attached to a side of the Z-axis support (906) via two sets of Z-axis cross roller guides (908); a piezoelectric ceramic stack moving device hanger (912) disposed on the upper part of the Z-axis support (906); a pen-shaped piezoelectric ceramic stack moving device (913) connected between the piezoelectric ceramic stack moving device hanger (912) and the Z-axis arm (909); an oil immersion lens mounting hole formed in the Z-axis arm (909); an oil immersion lens adjustment plate (907) attached to the oil immersion lens mounting hole; the oil immersion lens adjustment plate (907) fixed to the Z-axis arm (909) by three lock bolts arranged in a triangle; and an adjustment screw provided on one side of each lock bolt for fine-tuning the horizontality of the oil immersion lens adjustment plate (907).

10. The oil immersion lens unit (10) includes an objective lens (1001), an elastic drip nozzle (1003), and a drip nozzle fixing block (1002), the objective lens (1001) is attached to a mounting hole for the oil immersion lens on the Z-axis arm (909) and fixed to the oil immersion lens adjustment plate (907), the drip nozzle fixing block (1002) is fixed to the underside of the Z-axis arm (909), the elastic drip nozzle (1003) is attached to the drip nozzle fixing block (1002) and fixed to the side wall of the objective lens (1001) by a pressure plate of an oil drip tube, and an oil outlet is located in a position facing the lens portion of the objective lens (1001).

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