Laminate for circuit board

Abstract

This laminate for a circuit board, which is a laminate of a metal nitride sintered board and a copper sheet, is characterized by: having such a size that the shortest length between the center of the plane and the periphery is 50 mm or more; and having a void ratio X of 0.50% or less, said void ratio X being defined as the ratio, relative to the measured length LI of the joining interface between the metal nitride sintered board and the copper sheet measured in a cut surface that is created by cutting the laminate along the lamination direction, of the total length LB of voids with a diameter of 1 μm or more that are found in the vicinity of the joining interface.　The present invention can provide a laminate that exhibits excellent heat dissipation, can minimize the amount of a residual etchant, said etchant having been employed in patterning, in the joining interface and has high product reliability.

Description

[Technical Field]

[0001] The present invention relates to a laminate for a circuit board used in various power modules. [Background technology]

[0002] In recent years, power modules using power semiconductors have been widely used from the viewpoint of energy conservation. A power module has a structure in which power semiconductor elements and the like are mounted on a circuit board. When a large current flows through this circuit board, heat dissipation and insulation properties are required, so a ceramic circuit board with a metal plate bonded to it is used.

[0003] In such ceramic circuit boards, metal nitride sintered substrates, specifically aluminum nitride sintered substrates and silicon nitride sintered substrates, which have high thermal conductivity, are used as the ceramics from the viewpoint of heat dissipation, and copper plates, which have low electrical resistivity, are used as the metal plates. When joining a metal nitride sintered substrate and a copper plate, an active metal brazing method known as the AMB method (for example, Patent Document 1) is generally used. The active metal brazing method is a technique in which a paste-like brazing material containing metal particles such as silver or copper, active metal particles such as titanium, a binder (resin), and a solvent is applied to a metal nitride sintered substrate by a printing method or other method, and then heated to about 850°C in a vacuum brazing furnace to obtain a metal nitride sintered substrate-metal laminate. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2016-169111 Summary of the Invention [Problem to be solved by the invention]

[0005] However, it has been found that when a metal nitride sintered substrate-metal laminate is produced using the active metal brazing method, problems may arise, such as the etching solution used to pattern the metal being likely to remain at the bonding interface, or the heat dissipation properties of the resulting laminate being reduced. Therefore, an object of the present invention is to provide a laminate that has excellent heat dissipation properties, is less likely to leave an etching solution used in patterning at the bonding interface, and is highly reliable as a product. [Means for solving the problem]

[0006] The present inventors have conducted extensive research to identify the cause of the above-mentioned problems, and as a result, have found that active metal brazing is prone to the formation of voids at the bonding interface of the laminate, which causes the above-mentioned problems such as residual etching solution and reduced heat dissipation. When using active metal brazing to bond a metal nitride sintered substrate to a metal to form a laminate, a brazing material made from a paste of metal particles is applied to the substrate, and unnecessary resin and solvent must be removed before heat bonding. Because the paste-coated metal nitride sintered substrate is then heated and bonded to a copper plate, it is difficult to completely remove the binder contained in the paste. In this process, the binder remains as residue at the bonding interface between the metal nitride sintered substrate and the metal, which can result in voids at the interface between the metal nitride sintered substrate and the brazing material or the copper plate and the brazing material. The occurrence of voids is particularly pronounced in large laminates compared to small ones. That is, the inventors have found that the above problems can be solved by reducing voids at the bonding interface, and have completed the present invention.

[0007] That is, the present invention relates to the following [1] to [5]. [1] A laminate of a metal nitride sintered substrate and a copper plate, the laminate having a minimum length from the center of the surface to the periphery of 50 mm or more, and a measured length L of the bonding interface between the metal nitride sintered substrate and the copper plate measured on a cross section cut in the lamination direction of the laminate. IThe total length L of voids with a diameter of 1 μm or more observed near the bonding interface B A laminate for circuit boards, characterized in that the void ratio X, which is the ratio of the above, is 0.50% or less. [2] The laminate for circuit boards according to the above [1], wherein the thickness (t1) of the metal nitride sintered substrate is 0.2 to 1.0 mm, and the ratio (t2 / t1) of the thickness (t2) of the copper plate to the thickness (t1) of the metal nitride sintered substrate is 0.5 to 8. [3] The laminate for circuit boards according to the above [1] or [2], wherein the metal nitride sintered substrate is a silicon nitride sintered substrate. [4] A laminate for circuit boards according to any one of [1] to [3] above, in which a laminate of the metal nitride sintered substrate and a copper plate is bonded via a bonding layer containing a nitride of a reactive metal and having a thickness of 0.01 to 1 μm. [5] The laminate for circuit boards according to the above [4], wherein the silver concentration in a 20 μm zone from the interface between the copper plate and the bonding layer in the thickness direction of the copper plate is 3 mass % or less. [Effects of the Invention]

[0008] The present invention is a laminate of a metal nitride sintered substrate and a copper plate with few voids, which has good heat dissipation properties and makes it difficult for the etching solution used to pattern the copper plate to remain at the bonding interface. Furthermore, since it is a large laminate, mass production is possible when the laminate is divided into individual pieces, improving manufacturing efficiency. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a cross-sectional view schematically showing one embodiment of a laminate for circuit boards of the present invention. [Figure 2] FIG. 10 is a diagram illustrating a method for calculating the void fraction X. [Figure 3] FIG. 2 is a cross-sectional view schematically showing another embodiment of the laminate for circuit boards of the present invention. [Figure 4] FIG. 2 is a cross-sectional view schematically showing another embodiment of the laminate for circuit boards of the present invention. [Figure 5]FIG. 2 is a cross-sectional view schematically showing another embodiment of the laminate for circuit boards of the present invention. [Figure 6] FIG. 2 is a diagram illustrating the shortest length from the center to the periphery of a surface of the laminate for circuit board of the present invention. [Figure 7] 1A to 1C are cross-sectional views showing steps in a method for manufacturing a laminate for a circuit board according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0010] [Laminates for circuit boards] The laminate for circuit board of the present invention is a laminate of a metal nitride sintered substrate and a copper plate, wherein the laminate has a size in which the shortest length from the center of the surface to the periphery is 50 mm or more, and the measured length L of the bonding interface between the metal nitride sintered substrate and the copper plate is measured on a cross section obtained by cutting the laminate in the lamination direction. I The total length L of voids with a diameter of 1 μm or more observed in the vicinity of the bonding interface, specifically within a 20 μm width from the bonding interface to the copper plate side B The void ratio X is 0.50% or less.

[0011] The laminate for circuit boards of the present invention will be described below with reference to the drawings, but the present invention is not limited to the drawings. 1 shows a laminate 30 for a circuit board, which is one embodiment of the laminate for a circuit board of the present invention. The laminate 30 for a circuit board includes a metal nitride sintered substrate 10 and a copper plate 20 laminated on the surface of the metal nitride sintered substrate 10. The metal nitride sintered substrate 10 and the copper plate 20 are bonded together, and the vicinity of the bonded interface I between them has a void fraction X of not more than a certain level, as will be described later.

[0012] The laminate 30 for a circuit board of the present invention is measured on a cross section obtained by cutting the laminate in the lamination direction, and the measured length L of the bonding interface between the metal nitride sintered substrate and the copper plate is I The total length L of voids with a diameter of 1 μm or more observed near the bonding interface B Ratio (100 × L B / L I) is 0.50% or less. By setting the void fraction X to 0.50% or less, the heat dissipation properties of the laminate for circuit boards are improved, problems such as residual etching solution during circuit pattern formation are reduced, and the reliability of the product is improved. From these viewpoints, the void fraction X is preferably 0.10% or less, and more preferably 0.03% or less.

[0013] Next, the measured length of the bonded interface, L I and the total length L of voids with a diameter of 1 μm or more that are confirmed near the bonding interface B The calculation method will be explained below. First, one or more cut surfaces are prepared by cutting the circuit board laminate in the lamination direction in any direction passing through the center point on the plane of the laminate. Then, 500 random locations on each interface of the cut surface are observed under a scanning electron microscope (SEM) at a magnification of 500 times. FIG. 2 shows a schematic cross section of the circuit board laminate cut in the stacking direction. For ease of explanation, hatching is omitted from the drawing. Voids are also shown enlarged. In the cut surface of FIG. 2, the measured length i of the bonding interface I between the metal nitride sintered substrate 10 and the copper plate 20 is 200 μm within the field of view. When the 500 interfaces are observed, the total length L of the bonding interface is I becomes 100,000 μm (10 cm).

[0014] Next, the total length L of the bonded interface where voids with a diameter of 1 μm or more are found near the bonded interface B Here, the diameter of a void refers to the diameter of a circle if the shape of the void observed on the cross section is circular, and if the shape is other than circular, refers to the maximum value of the linear distance between any two points on the circumference of the shape. The vicinity of the bonding interface refers to a range of 20 μm from the bonding interface toward the copper plate. Specifically, in Figure 2, the region between bonding interface I and point P, which is 20 μm from bonding interface I toward the copper plate, is the vicinity of the bonding interface. In other words, since voids due to bonding only occur on the copper plate side, it is sufficient to observe the voids on the copper plate side.In addition, in the present invention, by using a substrate with a smooth surface as described below, it has been confirmed that there are no voids with a diameter of 1 μm or more within a width of 20 μm from the interface to the metal nitride sintered substrate side. In addition, the total length L of voids with a diameter of 1 μm or more observed near the bonded interface B is the total length L of the bonding interface mentioned above. I This refers to the sum of the projected lengths onto the bonding interface of individual voids with a diameter of 1 μm or more observed in Fig. 2. For example, in the cross section shown in Fig. 2, two voids with a diameter of 1 μm or more are observed near the bonding interface I, that is, within a range of 20 μm from the bonding interface I to the copper plate side, and the projected lengths of each void onto the bonding interface I are b1 and b2. Therefore, the total length L of the bonding interface is I If n voids with a diameter of 1 μm or more are found within the range, L B is required.

[0015]

number

[0016] Furthermore, the laminate 30 for a circuit board of the present invention may include a metal nitride sintered substrate 10 and copper plates 20 provided on both sides of the metal nitride sintered substrate 10 as shown in FIG. In this case, there are two bonding interfaces I (I1 and I2 in FIG. 3) between the metal nitride sintered substrate 10 and the copper plate 20, and the measured length L I is calculated by multiplying the total number of measurement points (500) on each interface (front and back) (1000) by the measurement length per point for each of the front and back joint interfaces observed by SEM on the cut surface.

[0017] 4, the metal nitride sintered substrate 10 and the copper plate 20 in the circuit board laminate 30 may be bonded via a bonding layer 15. When the circuit board laminate has the bonding layer 15, the measured length L of the bonding interface is I The total length of voids with a diameter of 1 μm or more observed near the bonded interface is L B The calculation is performed based on the bonding interface Ia between the metal nitride sintered substrate 10 and the bonding layer 15. As will be described later, it is preferable to make the thickness of the bonding layer 15 thin, and if the bonding layer 15 is formed thin, the bonding layer may not be visible by SEM. In such a case, as in the case described with reference to FIG. 1, the bonding interface I between the metal nitride sintered substrate 10 and the copper plate 20 observed by SEM is used as a reference, and the L I and L B is measured to determine the void fraction X.

[0018] Furthermore, as shown in FIG. 5, the laminate for circuit board 30 of the present invention may have copper plates 20 provided on both sides of the metal nitride sintered substrate 10 with bonding layers 15 interposed therebetween. In this case, there are two bonding interfaces between the metal nitride sintered substrate 10 and the bonding layer 15 that are used as the basis for calculating the void ratio X (I in FIG. 5). a1 and I a2 ) exists, but the measured length of the bonded interface L I is the sum of the number of measurement points (500) on the front and back of the bonded interface observed by SEM on the cut surface (1000) multiplied by the measurement length per point, and the measured length L of the bonded interface is I The total length L of voids with a diameter of 1 μm or more that are confirmed in the region B The ratio is the void fraction X.

[0019] The circuit board laminate 30 of the present invention has a minimum length from the center C of the surface to the periphery of 50 mm or more. While such large circuit board laminates generally tend to have many voids at the bonding interface, the circuit board laminate of the present invention has very few voids, as described above. Therefore, the laminate has excellent productivity, excellent heat dissipation properties, and reduced problems such as residual etching solution. From the viewpoint of further improving productivity, the minimum length from the center C of the surface of the laminate 30 to the periphery is preferably 70 mm or more, more preferably 90 mm or more, and practically preferably 110 mm or less.

[0020] Here, the center of the surface means the center of the shape (hereinafter also referred to as the surface shape) as viewed from above (or below) in the stacking direction of the circuit board laminate 30. For example, Fig. 6 shows an example of the surface shape of the circuit laminate 30 as viewed from above in the stacking direction, and the shortest distance of a straight line connecting the center C of the surface shape and any point on the periphery of the surface shape is the shortest length d. The center C is the intersection of the diagonals if the surface shape is quadrangular such as rectangular, the center of the circle if it is circular, or the intersection of the major and minor axes if it is elliptical. If the surface shape is any other shape, the center C in the present invention is the center of the circumscribing circle of the surface shape.

[0021] (metal nitride sintered substrate) The metal nitride sintered substrate in the present invention is not particularly limited, but from the viewpoint of heat dissipation, a silicon nitride sintered substrate, an aluminum nitride sintered substrate, or the like is preferred. Among them, a silicon nitride sintered substrate is more preferred because it has a high toughness value and is less likely to break even though it is a thin substrate. A metal nitride sintered substrate can be obtained by firing a silicon nitride powder, an aluminum nitride powder, or the like.

[0022] The thickness (t1) of the metal nitride sintered substrate is not particularly limited, but is preferably 0.2 to 1.0 mm from the viewpoint of reducing the weight of the laminate for circuit boards. The metal oxide sintered substrate is not particularly limited as long as the shortest length from the center to the periphery of the laminate surface is 50 mm or more. The laminate can be divided into small pieces after production, and manufacturing efficiency is improved by first manufacturing a large laminate. Furthermore, according to the manufacturing method of the laminate of the present invention described below, a large laminate can be obtained while reducing voids at the bonding interface.

[0023] (copper plate) The copper plate in the present invention can be made of oxygen-free copper, tough-pitch copper, phosphor bronze, or the like, without any particular limitations. However, oxygen-free copper, which has a high elongation rate, is preferred in terms of stress after bonding. Regarding the thickness (t2) of the copper plate, if the metal nitride sintered substrate is thin, bonding a thick copper plate to it will crack the metal nitride sintered substrate due to stress caused by the difference in thermal expansion during bonding. Therefore, the thickness (t2) of the copper plate is preferably selected so that the ratio (t2 / t1) of the thickness (t2) of the copper plate to the thickness (t1) of the metal nitride sintered substrate is 0.5 to 8, more preferably 1 to 3. Note that the thickness (t2) of the copper plate refers to the thickness of the copper plate when the copper plate is provided on only one side of the metal nitride sintered substrate, and refers to the combined thickness of the two copper plates when the copper plate is provided on both sides of the metal nitride sintered substrate. Furthermore, considering productivity, multiple metal nitride sintered substrates and copper plates may be stacked during bonding, so the size of the copper plate is preferably the same as that of the metal oxide sintered substrate from the viewpoint of reducing voids at the bonding interface.

[0024] (Joining layer) As described above, in the laminate for circuit board of the present invention, the metal nitride sintered substrate and the copper plate may be bonded via a bonding layer. By bonding via the bonding layer, the metal nitride sintered substrate and the copper plate are more firmly bonded to each other. The bonding layer contains a nitride of a reactive metal, which strengthens the bond between the metal nitride sintered substrate and the copper plate. A typical example of the reactive metal is titanium (Ti). The reactive metal nitride is a reaction product between an active metal such as titanium that constitutes a reactive metal layer formed on a circuit board laminate or a metal nitride sintered substrate and nitrogen atoms of the metal nitride sintered substrate, as will be described later in the description of the method for manufacturing a circuit board laminate.

[0025] As will be described later in the manufacturing method, when forming the bonding layer, it is preferable to provide an antioxidant layer made of silver (Ag) or the like on the surface of the layer made of the active metal. The antioxidant layer diffuses into the copper plate and disappears during the bonding process, but by providing such an antioxidant layer, oxidation of the active metal can be prevented during the manufacturing of the circuit board laminate. However, silver, which is most preferably used as an antioxidant layer, may have adverse effects when etching or plating a copper plate, and is also prone to ion migration when current is applied to the circuit. Therefore, it is more preferable to reduce the amount of silver contained in the copper plate near the bonding layer. Therefore, the silver concentration in a 20 μm zone from the interface between the copper plate and the bonding layer in the thickness direction of the copper plate is preferably 3 mass % or less, and more preferably 2 mass % or less. The silver concentration in a 20 μm zone from the interface between the copper plate and the bonding layer in the thickness direction of the copper plate is the average of the silver concentration at the interface between the copper plate and the bonding layer and the silver concentration at a portion 20 μm away from the interface in the thickness direction of the copper plate. The silver concentration can be measured using an electron probe microanalyzer (EPMA).

[0026] Furthermore, when copper plates 10 are provided on both sides of a metal nitride sintered substrate via bonding layers as shown in Figure 5, there are two 20 μm zones in the thickness direction of the copper plate from the interface between the copper plate and the bonding layer, and the silver concentration in both of these zones is preferably 3 mass% or less, and more preferably 2 mass% or less.

[0027] According to the method for manufacturing a laminate for a circuit board described below, the bonding layer can be formed without using active metal brazing, so the amount of silver contained in the copper plate near the bonding layer can be reduced to a certain level. The thickness of the bonding layer is not particularly limited, but is preferably 0.01 to 1 μm, and more preferably 0.05 to 0.6 μm. If the thickness of the bonding layer is equal to or greater than these lower limits, the bonding strength will be high, and if the thickness of the bonding layer is equal to or less than these upper limits, good heat dissipation properties can be maintained.

[0028] [Method of manufacturing a laminate for circuit boards] The method for producing the laminate for circuit boards of the present invention is not particularly limited, but from the viewpoint of reducing voids at the bonding interface, it is preferable to produce it through the following steps.

[0029] A preferred method for producing a laminate for circuit boards in the present invention is A method for manufacturing a laminate for a circuit board, which is a laminate of a metal nitride sintered substrate and a copper plate, comprising: Step 1 of preparing a metal nitride sintered substrate having a surface roughness (Ra) of 0.6 μm or less; A reactive metal layer forming process 2 for forming a reactive metal layer containing a metal that reacts with the metal nitride sintered substrate and the copper plate on at least one surface of the metal nitride sintered substrate and the copper plate; a hot pressing process 3 in which the metal nitride sintered substrate and the copper plate are laminated together with the reactive metal layer between the metal nitride sintered substrate and the copper plate, and pressure is applied between the metal nitride sintered substrate and the copper plate in a non-oxidizing atmosphere at a temperature at which a reaction occurs between the reactive metal layer and the copper plate and between the metal nitride sintered substrate and the copper plate; The method for producing a laminate for a circuit board is characterized by comprising the steps of:

[0030] The following description will be given with reference to the drawings. Fig. 7 shows one embodiment of the method for manufacturing a laminate for circuit boards in the present invention, and shows each manufacturing step of a laminate for circuit boards (Fig. 7(f)) in which a metal nitride sintered substrate 10 and a copper plate 20 are bonded via a bonding layer 15.

[0031] (Process 1) Step 1 is a step of preparing a metal nitride sintered substrate 10 (FIG. 7(a)) having a surface roughness (Ra) of 0.6 μm or less. Although there are no particular limitations on the metal nitride sintered substrate 10, silicon nitride sintered substrates, aluminum nitride sintered substrates, etc. are preferred from the viewpoint of heat dissipation. Among these, silicon nitride sintered substrates are preferred because they have high toughness and are less likely to break even when thin. These metal nitride sintered substrates 10 can be obtained by firing silicon nitride powder or aluminum nitride powder.

[0032] The surface roughness (Ra) of the metal nitride sintered substrate is preferably 0.6 μm or less, more preferably 0.5 μm or less. When the surface roughness (Ra) is below these upper limits, it becomes easier to suppress the generation of voids at the bonding interface. The arithmetic mean curvature (Spc) of the peaks on the surface of the metal nitride sintered substrate is preferably 4.5 [1 / mm] or less, and more preferably 4.2 [1 / mm] or less. By adjusting the arithmetic mean curvature (Spc) of the peaks to this range while adjusting the surface roughness (Ra) to the above range, it becomes easier to suppress the generation of voids at the bonding interface.

[0033] The values ​​of Ra, which indicates the surface roughness, and Spc, which indicates the state of the protrusions on the surface, will be specifically shown in the examples described below, and are values ​​determined using a non-contact three-dimensional measuring device (manufactured by Keyence Corporation, product name: VR-5000).

[0034] Here, we will explain Spc. The arithmetic mean curvature of the peaks Spc represents the average of the principal curvatures of the peaks on a surface. The following formula is used to calculate the arithmetic mean curvature of the peaks Spc. In the formula below, z represents the height direction component in the x and y coordinates, n represents the number of peaks, and the arithmetic mean curvature of the peaks Spc represents the average value of the reciprocals of the radii of the approximation circles of the peaks of the surface unevenness. The smaller this value, the more rounded the peaks are and the wider the shape.

[0035]

number

[0036] It is preferable to use a metal nitride sintered substrate 10 that has not been surface-polished after firing. Using a substrate in an as-fired state, i.e., an as-fired substrate, is preferable to a surface-polished metal nitride sintered substrate 10, because the microscopic surface shape tends to be smoother and voids are less likely to form at the bonding interface. In particular, it is preferable to use a metal nitride sintered substrate 10 that has not been surface-polished after firing and has a surface roughness (Ra) within the above range, and it is more preferable to use a metal nitride sintered substrate 10 whose surface roughness (Ra) and arithmetic mean curvature of peaks (Spc) are both within the above ranges. Here, "no surface polishing after firing" means that no polishing treatment is performed to smooth the surface of the metal nitride sintered substrate obtained by sintering the metal nitride powder, but blasting treatment or the like may be performed to remove foreign matter such as a release agent adhering to the surface.

[0037] There are no particular limitations on the method for producing a metal nitride sintered substrate having the above surface characteristics. However, a typical example of a method for producing a silicon nitride sintered substrate is a method for producing a silicon nitride sintered substrate having a β-phase ratio of 90% or more and a specific surface area of ​​7 to 20 m. 2 / g, crystal distortion is 4.0 × 10 -4 One method involves heating a green sheet containing the above silicon nitride powder and sintering aids, with a total aluminum content adjusted to 800 ppm or less, to a temperature of 1200 to 1800°C in an inert gas atmosphere under a pressure of 0 MPa·G or more but less than 0.1 MPa·G to sinter the silicon nitride. Here, the "G" at the end of the pressure unit MPa·G stands for gauge pressure. According to the above method, by using silicon nitride powder with a high beta conversion rate, a large specific surface area obtained by the specific pulverization described below, and high crystal distortion, dense sintering can be performed at low pressure and low temperature, thereby suppressing the growth of needle-like crystals, particularly on the surface of the silicon nitride sintered substrate, and suppressing the formation of pores of 1 to 10 μm on the substrate surface, while obtaining a silicon nitride sintered substrate with excellent properties.

[0038] [Green Sheet] In the method for producing a silicon nitride sintered substrate of the present invention, the green sheet contains a specific silicon nitride powder and a sintering aid, which will be described below.

[0039] <Silicon nitride powder> (β conversion rate) The silicon nitride powder contained in the green sheet has a beta phase ratio of 80% or more. Silicon nitride powder with a beta phase ratio of 80% or more can be obtained without setting strict manufacturing conditions, so it can be manufactured at relatively low cost. Therefore, by using silicon nitride powder with a high beta phase ratio, the overall manufacturing cost of the silicon nitride sintered body can be reduced. Furthermore, by setting the beta phase ratio high, the amount of oxygen absorbed when α-type silicon nitride particles transform into β-type silicon nitride particles during sintering can be further reduced. Here, the beta phase ratio of the silicon nitride powder is preferably 85% or more, more preferably 90% or more. The β-phase ratio of silicon nitride powder refers to the peak intensity ratio of the β-phase to the total of the α-phase and β-phase in the silicon nitride powder [100 × (β-phase peak intensity) / (α-phase peak intensity + β-phase peak intensity)], which is determined by powder X-ray diffraction (XRD) measurement using CuKα radiation. More specifically, it can be determined by calculating the weight ratio of the α-phase and β-phase in the silicon nitride powder using the method described in C.P. Gazzara and D.R. Messier: Ceram. Bull., 56 (1977), 777-780.

[0040] (specific surface area) The specific surface area of ​​silicon nitride powder is 7 to 20 m 2 / g. The specific surface area of ​​silicon nitride powder is 20m 2 When the specific surface area exceeds 7m / g, it becomes difficult to reduce the amount of dissolved oxygen. 2 If the specific surface area of ​​the silicon nitride powder is less than 12 to 15 m / g, it will be difficult to obtain a silicon nitride sintered body having high density and strength. 2 / g. In the present invention, the specific surface area means a BET specific surface area measured by a BET single-point method using nitrogen gas adsorption.

[0041] (crystal distortion) In the production of the silicon nitride sintered substrate of the present invention, the silicon nitride powder has the above properties and a crystal distortion of 4.0 × 10 -4 It is not clear how such crystal strain affects the formation of a network structure on the surface of the resulting silicon nitride sintered substrate, i.e., the generation of pores, but experiments by the present inventors have confirmed that by increasing the crystal strain of the silicon nitride powder, the cumulative volume of the specific pores can be reduced. The crystal distortion was measured by the method shown in the examples.

[0042] The silicon nitride powder is not particularly limited, but from the viewpoint of reducing the amount of dissolved oxygen, for example, it is advisable to use a high-purity raw material when producing the silicon nitride powder. For example, when producing silicon nitride powder by direct nitridation, it is preferable to use a silicon powder that does not cause oxygen to dissolve inside as the raw material. Specifically, it is preferable to use silicon powder derived from semiconductor-grade silicon, such as cutting powder generated when processing the silicon, for example. A typical example of the semiconductor-grade silicon is polycrystalline silicon obtained by the so-called "Siemens process," in which high-purity trichlorosilane is reacted with hydrogen in a bell jar-type reaction vessel.

[0043] In addition, the average particle size of silicon nitride powder D 50 The average particle size D is preferably 0.5 to 3 μm, and more preferably 0.7 to 1.7 μm. When silicon nitride powder having such an average particle size is used, sintering proceeds more easily. 50 is a value measured by a laser diffraction scattering method on a 50% volume basis.

[0044] The proportion of particles with a particle size of 0.5 μm or less in the silicon nitride powder is preferably 20 to 50 mass %, more preferably 20 to 40 mass %. The proportion of particles with a particle size of 1 μm or more in the silicon nitride powder is preferably 20 to 50 mass %, more preferably 20 to 40 mass %. The use of silicon nitride powder with such a particle size distribution makes it easier to obtain a dense silicon nitride sintered body with high thermal conductivity. The reason for this is not clear, but it is thought that, unlike α-type silicon nitride particles, β-type silicon nitride particles are less likely to dissolve and re-precipitate during sintering, and that by maintaining a certain balance between fine particles and coarse particles in the early stages of sintering, it is possible to obtain a denser sintered body. The amount of silicon nitride powder in the green sheet is preferably 70 mass % or more, and more preferably 80 mass % or more, based on the total amount of the green sheet.

[0045] <Production of silicon nitride powder> The method for producing silicon nitride powder is not particularly limited as long as it is a method that can produce silicon nitride powder having the above-mentioned properties. Examples of methods that can be used for producing silicon nitride powder include a reduction-nitridation method in which silica powder is used as a raw material and nitrogen gas is passed through in the presence of carbon powder to produce silicon nitride, a direct nitridation method in which silicon powder is reacted with nitrogen at high temperatures, and an imide decomposition method in which silicon halide is reacted with ammonia. However, from the viewpoint of ease of producing silicon nitride powder having the above-mentioned properties, the direct nitridation method is preferred, and among these, the direct nitridation method (combustion synthesis method) that utilizes self-combustion is more preferred.

[0046] The combustion synthesis method uses silicon powder as a raw material, forcibly ignites a portion of the raw material powder under a nitrogen atmosphere, and synthesizes silicon nitride by self-heating of the raw material compound. The combustion synthesis method is a known method, and reference can be made to, for example, JP 2000-264608 A and WO 2019 / 167879 A. Furthermore, although the above-mentioned combustion synthesis method can produce a material with a certain degree of crystal strain, further pulverization can increase the crystal strain. As the pulverization method, pulverization with a vibration ball mill is preferred, and the pulverization is preferably carried out for 5 to 15 hours.

[0047] <Sintering aid> In the green sheet used to produce the silicon nitride sintered substrate of the present invention, any known sintering aid can be used without particular restriction, but it is preferable to use a sintering aid containing a compound that does not have an oxygen bond, as this can prevent a decrease in the thermal conductivity of the resulting silicon nitride sintered substrate.

[0048] As the compound without oxygen bonds, carbonitride compounds containing rare earth elements or magnesium (hereinafter also referred to as specific carbonitride compounds) and nitride compounds (hereinafter also referred to as specific nitride compounds) are preferred. The use of such specific carbonitride compounds and specific nitride compounds makes it easier to more effectively obtain silicon nitride sintered bodies with high thermal conductivity. The specific carbonitride compounds function as gettering agents that adsorb oxygen contained in the silicon nitride powder, and the specific nitride compounds reduce the total oxygen content of the silicon nitride sintered body, resulting in a silicon nitride sintered body with high thermal conductivity.

[0049] In the carbonitride-based compound containing a rare earth element, the rare earth element is preferably Y (yttrium), La (lanthanum), Sm (samarium), Ce (cerium), Yb (ytterbium), or the like. Examples of carbonitride compounds containing rare earth elements include Y2Si4N6C, Yb2Si4N6C, and Ce2Si4N6C. Among these, Y2Si4N6C and Yb2Si4N6C are preferred from the viewpoint of facilitating the production of silicon nitride sintered bodies with high thermal conductivity. Examples of magnesium-containing carbonitride compounds include MgSi4N6C, etc. Examples of magnesium-containing nitride compounds include MgSiN2, etc. These specific carbonitride compounds and specific nitride compounds may be used alone or in combination of two or more. Among the carbonitride compounds containing rare earth elements or magnesium element described above, particularly preferred compounds and specific nitride compounds are Y2Si4N6C, MgSi4N6C, and MgSiN2.

[0050] Furthermore, the sintering aid may further contain a metal oxide in addition to the compound having no oxygen bond. When the sintering aid contains a metal oxide, the sintering of the silicon nitride powder proceeds more easily, making it easier to obtain a denser, stronger sintered body. Examples of metal oxides include yttria (Y2O3), magnesia (MgO), and ceria (CeO). Among these, yttria is preferred. One type of metal oxide may be used alone, or two or more types may be used in combination. The mass ratio of the oxygen-free compound, typified by the specific carbonitride-based compound, to the metal oxide contained in the sintering aid (oxygen-free compound / metal oxide) is preferably 0.2 to 4, and more preferably 0.6 to 2. Within this range, a dense silicon nitride sintered body with high thermal conductivity can be easily obtained. The content of the sintering aid in the green sheet is preferably 5 to 20 parts by mass, and more preferably 7 to 10 parts by mass, relative to 100 parts by mass of the silicon nitride powder.

[0051] <Binder> The green sheet can be formed using a binder. In this case, the green sheet is formed into a sheet from a molding composition described below, dried as necessary, and degreased under known conditions to remove the binder, followed by firing. The binder is not particularly limited, but examples thereof include polyvinyl alcohol, polyvinyl butyral, methyl cellulose, alginic acid, polyethylene glycol, carboxymethyl cellulose, ethyl cellulose, and acrylic resin. The content of the binder used in producing the green sheet is preferably 1 to 30 parts by mass relative to 100 parts by mass of silicon nitride powder, and the proportion may be determined appropriately depending on the molding method.

[0052] <Total aluminum content> The total aluminum content (by mass) of the green sheet is 800 ppm or less. That is, the green sheet used in the present invention has a very small amount of aluminum, which makes it possible to obtain a silicon nitride sintered body with high thermal conductivity. The total aluminum content of the green sheet is preferably 700 ppm or less, more preferably 600 ppm or less.

[0053] [Production of green sheets] The method for producing the green sheet used in the present invention is not particularly limited, and examples thereof include a method in which a molding composition containing at least silicon nitride powder and a sintering aid is molded by a known molding method, such as press molding, extrusion molding, injection molding, doctor blade molding, etc., with the doctor blade method being particularly preferred. The molding composition may contain a solvent from the viewpoint of ease of handling and molding. The solvent is not particularly limited, and examples include organic solvents such as alcohols and hydrocarbons, and water. However, in the present invention, it is preferable to use water. That is, it is preferable to obtain a green sheet by molding a molding composition containing silicon nitride powder, a sintering aid, and water. Using water as a solvent is preferable because it reduces the environmental impact compared to using an organic solvent.

[0054] [Sintering method] In the method for producing a silicon nitride sintered substrate of the present invention, the above-mentioned green sheet is degreased as necessary and then fired under certain conditions to sinter the silicon nitride. In the firing process, the green sheet is generally coated in advance with a release agent made of boron nitride powder. The firing conditions are described below.

[0055] The firing is carried out in an inert gas atmosphere, such as a nitrogen atmosphere or an argon atmosphere. In addition, in such an inert gas atmosphere, firing is carried out under a pressure of 0 MPa·G or more and less than 0.1 MPa·G. The pressure is preferably 0 MPa·G or more and 0.05 MPa·G or less. Since the calcination does not require high pressure, it can be carried out in a batch furnace such as a muffle furnace or a tubular furnace, or in a continuous furnace such as a pusher furnace.

[0056] The green sheet is fired by heating to a temperature of 1200 to 1800° C. If the temperature is less than 1200° C., sintering of silicon nitride will be difficult to proceed, and if the temperature exceeds 1800° C., silicon nitride will be prone to decomposition. From these viewpoints, the heating temperature during firing is preferably 1600 to 1800° C. The firing time is not particularly limited, but is preferably about 3 to 20 hours.

[0057] When a binder is used to form the green sheet, it is preferable to remove organic components such as the binder by providing a degreasing step. The degreasing conditions are not particularly limited, but the green sheet may be heated to 450 to 650°C in air or in an inert atmosphere such as nitrogen or argon. By carrying out the above firing, a silicon nitride sintered substrate having the above-mentioned characteristic properties can be obtained. After firing, the silicon nitride substrate of the present invention is subjected to the above-mentioned blasting treatment to remove any adhering substances such as a release agent made of boron nitride powder, and then used as a silicon nitride sintered substrate.

[0058] (Process 2) Step 2 is a reactive metal layer formation step in which a reactive metal layer containing a metal that reacts with the metal nitride sintered substrate 10 and the copper plate 20 is formed on the surface of at least one of the metal nitride sintered substrate 10 and the copper plate 20. In step 2, a reactive metal layer 11 is formed on the metal nitride sintered substrate 10 prepared in step 1 (FIG. 7(b)). The reactive metal layer 11 contains a metal that reacts with the substrate and the copper plate at high temperatures, and titanium (Ti) is used as the metal. Titanium is particularly preferred because it forms an alloy with copper in the copper plate 20 and reacts with nitrogen in the metal nitride sintered substrate 10 to form titanium nitride (TiN).

[0059] The reactive metal layer 11 is formed by, for example, sputtering, and its thickness is much thinner than the metal nitride sintered substrate 10, the copper plate 20, or a commonly used brazing material (active metal brazing material), and its thickness is, for example, 0.01 μm to 1.0 μm, preferably 0.01 to 0.1 μm, and more preferably 0.01 to 0.05 μm. As will be described later, the reactive metal layer 11 is used only to react with the metal nitride sintered substrate 10 or the copper plate 20 to form a bonding layer, and a thin thickness is preferable in order to make the bonding layer thin.

[0060] Although titanium is easily oxidized in the atmosphere, the sputtering method is performed in a vacuum (in a reduced pressure atmosphere), and oxidation of the reactive metal layer 11 is suppressed during step 2 (reactive metal layer deposition step). In step 2, vacuum deposition may be used as another method that can form a thin film of the reactive metal layer 11 without oxidizing it, similar to sputtering.

[0061] Furthermore, prior to the hot-pressing process described below, it is preferable to continuously deposit an oxidation-resistant layer 12 on the reactive metal layer 11 to prevent oxidation when the reactive metal layer 11 is removed from the substrate in the atmosphere. The oxidation-resistant layer 12 is made of a metal that is less susceptible to oxidation in the atmosphere than the reactive metal layer 11 and that allows the copper plate 20 and the reactive metal layer 11 to react with each other through the oxidation-resistant layer 12 at high temperatures. Specifically, gold (Au), silver (Ag), copper (Cu), tin (Sn), platinum (Pt), or aluminum (Al) can be used, with silver being preferred. The oxidation-resistant layer 12 is provided to prevent oxidation of the reactive metal layer 11 in the atmosphere. Because the bond is primarily formed by the reactive metal layer 11, the oxidation-resistant layer 12 is preferably thin enough to allow reaction (alloy reaction) between the reactive metal layer 11 and the copper plate 20. The thickness of the antioxidant layer 12 is not particularly limited, but is, for example, 0.1 to 1 μm, and preferably 0.1 to 0.6 μm.

[0062] The anti-oxidation layer 12 can be formed by sputtering in the same manner as the reactive metal layer 11. Therefore, the anti-oxidation layer 12 can be formed by sputtering in a vacuum (reduced pressure atmosphere) following the formation of the reactive metal layer 11 (FIG. 7(b)), without taking the substrate 10 with the reactive metal layer 11 formed on its surface (FIG. 7(b)) out into the atmosphere.

[0063] (Step 3) Step 3 is a hot pressing step in which the metal nitride sintered substrate 10 and the copper plate 20 are laminated together with the reactive metal layer 11 between the metal nitride sintered substrate 10 and the copper plate 20, and pressure is applied between the substrate 10 and the copper plate 20 in a non-oxidizing atmosphere at a temperature at which a reaction occurs between the reactive metal layer 11 and the copper plate 20 and between the metal nitride sintered substrate 10 and the copper plate 20.

[0064] In step 3, after step 2 described above, a copper plate 20 separate from the metal nitride sintered substrate 10 is prepared (FIG. 7(d)), which is brought into close contact with the side of the substrate 10 on which the reactive metal layer 11 and the like are formed, and hot pressing is performed by applying pressure in the thickness direction and heating as shown in FIG. 7(e) (hot pressing step). Here, the metal nitride sintered substrate 10 and the copper plate 20 are sandwiched between a hot press base 100 on the lower side and a spacer 110 on the upper side, and pressed at a predetermined pressure. The atmosphere in the hot pressing step is preferably a non-oxidizing atmosphere (e.g., argon), and more preferably a vacuum. The degree of vacuum is preferably 0.01 Pa or less, more preferably 0.005 Pa or less, before heating. After adjusting to such a degree of vacuum, heating to the temperature described below can be started. It is also preferable to maintain the above-mentioned degree of vacuum even during heating. By adjusting to such a degree of vacuum, a laminate with few voids can be obtained. Note that in the method using an active metal brazing material, it is difficult to achieve the above-mentioned degree of vacuum because the binder component decomposes during heating. The heating temperature, i.e., the temperature at which a reaction occurs between the reactive metal layer and the copper plate and the substrate, is, for example, 600° C. to 1080° C., preferably 650° C. to 1050° C., and more preferably 850° C. to 1000° C. The rate of temperature rise when adjusting to such a temperature varies depending on various conditions such as the size of the equipment, but is preferably 2 to 20° C. / min from the viewpoint of productivity. After adjusting the temperature to this level, pressure is applied between the substrate and the copper plate. The pressure is preferably in the range of 1 MPa to 100 MPa. If the temperature and pressure are too low, bonding is difficult, while if the temperature and pressure are too high, the shape and thickness of the copper plate 20 will change significantly due to plastic deformation. For example, if the temperature exceeds 1080°C, copper will melt.

[0065] 7(f), the reactive metal layer 11 reacts with the surrounding material to form a bonding layer 15, which bonds the copper plate 20 to the substrate 10. In this way, the metal nitride sintered substrate of the present invention in which the substrate 10 and the copper plate 20 are bonded by the bonding layer 15 has reduced voids at the bonding interface. Although the bonding layer 15 is shown in an exaggerated manner in FIG. 7, in reality the thickness of this bonding layer 15 is negligible compared to the thickness of the bonding layer formed when a brazing material is used.

[0066] When the copper plate 20 is used as wiring, after the copper plate 20 is bonded to the substrate 10 as shown in FIG. 7(f), the copper plate 20 is appropriately etched and patterned.

[0067] 7, a copper plate 20 is bonded to the upper surface of the substrate 10, but another copper plate 20 can also be bonded to the lower surface. In this case, the reactive metal layer 11 shown in FIG. 7(b) and, if necessary, the antioxidant layer 12 shown in FIG. 7(c) are formed on the lower surface in the same manner, and hot pressing is performed with the copper plate 20 also provided on the lower surface. In this case, the above-mentioned patterning can be performed separately or simultaneously on the upper and lower surfaces.

[0068] In the above example, the reactive metal layer 11 and the optional antioxidant layer 12 are sequentially formed on the substrate 10, and then the copper plate 20 is bonded to the substrate. However, conversely, the reactive metal layer 11 and the optional antioxidant layer 12 may be sequentially formed on the surface of the copper plate 20 facing the substrate 10 (the lower surface in FIG. 7 ). In this case, the copper plate 20 and the substrate 10 can be bonded by performing a hot pressing process similar to that described above. Alternatively, the reactive metal layer 11 and the optional antioxidant layer 12 may be formed on both the substrate 10 and the copper plate 20, respectively. However, to simplify the manufacturing process and reduce the thickness of the bonding layer, it is preferable to form the reactive metal layer 11 and the optional antioxidant layer 12 on only one of the substrate 10 and the copper plate 20. In particular, forming them only on the substrate 10 is more preferable from the viewpoint of adhesion. The anti-oxidation layer 12 cannot be confirmed as a separate layer because it diffuses to the copper plate side during the reaction caused by hot pressing.

[0069] As mentioned above, the copper plate 20 may undergo plastic deformation during the hot pressing process. This plastic deformation affects the deformation and warpage of the circuit board after its manufacture or when a subsequent thermal cycle is applied. If plastic deformation occurs during cooling to room temperature after the hot pressing process, the stress in the copper plate 20 and the bonding layer 15 at room temperature is reduced, thereby reducing the warpage of the circuit board at room temperature. Therefore, the temperature and pressure of the hot pressing process can be set according to not only the bonding conditions but also the warpage of the circuit board. In other words, by causing plastic deformation in the copper plate 20 during cooling from the hot pressing process, the warpage (deformation) of the circuit board at room temperature can be reduced.

[0070] Furthermore, even if a thin oxide layer forms on the outermost surface of the reactive metal layer 11 (titanium) at room temperature, the pressure and temperature of the hot-pressing process can be set so that the bonding layer 15 is formed by the hot-pressing process as described above. In this case, the above-mentioned antioxidant layer 12 is unnecessary. The same applies to cases where the oxide layer can be removed by various treatments before the hot-pressing process. However, as described above, it is easy to continuously form the antioxidant layer 12 and the reactive metal layer 11 by sputtering, which reliably suppresses oxidation of the reactive metal layer 11 before the hot-pressing process. Therefore, it is particularly preferable to sequentially form the reactive metal layer 11 and the antioxidant layer 12 by sputtering. For example, if the reactive metal layer 11 is titanium, it is preferable to form the antioxidant layer 12 because titanium oxidizes in air. However, this oxidation proceeds gradually, and this situation depends on the time interval between the reactive metal layer formation process and the hot-pressing process. For example, the antioxidant layer 12 is particularly effective when this time interval is several days or longer. However, if this time interval is negligibly short, the antioxidant layer 12 may not be formed.

[0071] Titanium used as the reactive metal layer 11 reacts with copper constituting the copper plate 20 and nitrogen and the like constituting the substrate 10 to form an alloy layer (bonding layer 15). Therefore, the bonding layer 15 is formed stably.

[0072] Even when an active metal brazing material is used, titanium is still present at the interface. However, the titanium content is as low as about 1%, so the situation is completely different, and bonding using only the thin and strong bonding layer 15 as described above cannot be achieved.

[0073] In the above example, the reactive metal layer 11 is made of titanium, but the reactive metal layer 11 may contain a material other than titanium as long as the bonding layer 15 is formed in the same manner as described above. Similarly, other metals may be used as the main component of the reactive metal layer 11 as long as they can react with the nitrogen of the substrate 10 or the copper on the copper plate 20 side and can be formed into a thin film on the substrate 10 side or the copper plate 20 side as described above.

[0074] The thermal conductivity of titanium constituting the reactive metal layer 11 is significantly lower than that of copper constituting the copper plate 20. Therefore, if a thick layer of titanium remains in the bonding layer 15 as the reactive metal layer 11, the effective thermal conductivity of the bonding layer 15 will decrease. On the other hand, only the alloyed portions formed by the reaction of the titanium in the reactive metal layer 11 with the copper of the copper plate 20 and the nitrogen in the substrate 10 contribute to bonding. Therefore, as long as such alloyed portions are formed, it is preferable that the reactive metal layer 11 be thin, and it is preferable that as little titanium remains in the reactive metal layer 11 as is after the hot pressing process. For this reason, the thickness of the reactive metal layer 11 in FIG. 7(c) is preferably 1 μm or less. If this thickness exceeds 1 μm, the thermal conductivity of the circuit board will be low. Furthermore, to improve manufacturing throughput, it is preferable that the reactive metal layer 11 and the oxidation prevention layer 12 formed by the sputtering method be thin. On the other hand, even when the thickness of the reactive metal layer 11 is set to the lower limit of the thickness controllable by sputtering film formation (e.g., approximately 0.01 μm), strong bonding can be obtained. Furthermore, if the thickness of the reactive metal layer 11 is less than 0.01 μm, it is difficult to control the film thickness, and therefore it may be difficult to obtain a uniform effective film thickness, making it difficult to obtain sufficient bonding strength. However, compared to forming the reactive metal layer 11 by applying a brazing material, when the reactive metal layer 11 and the like are formed by a sputtering method as described above, they can be made sufficiently thin. For this reason, it is preferable that the thickness of the reactive metal layer 11 be in the range of 0.01 to 1 μm.

[0075] Furthermore, during the hot pressing process, the difference in thermal expansion between the copper plate 20 and the substrate 10 becomes large, resulting in large shear strain between them. It is difficult for the bonding interface (bonding layer 15) to bear this shear strain alone if the bonding layer 15 is thin, making it difficult to obtain high bonding strength through the bonding layer 15. However, by adjusting the pressure and temperature during the hot pressing process, the contraction and expansion of the copper plate 20 can be constrained, thereby reducing this shear strain. In other words, in the above manufacturing method, the settings of the pressure and temperature during the hot pressing process are particularly important. In this case, by bringing the thermal expansion coefficient of the spacer 110 used in FIG. 7(e) closer to that of the substrate 10, this shear strain can be particularly reduced. It is particularly preferable to use a CIP carbon plate as the material for such a spacer 110.

[0076] As described above, the laminate for circuit boards of the present invention can be produced through steps 1 to 3. By patterning the copper plate before singulating the obtained laminate for circuit boards, circuit boards can be efficiently produced. For patterning, a known method can be used: a pattern is drawn on the surface of the copper plate with resist, the copper is etched using a ferric chloride solution, and then the bonding layer is etched. Note that because the bonding layer contains reactive metal nitrides, while reactive metals alone can usually be etched using fluoronitric acid, this bonding layer must be etched using an etching solution suitable for reactive metal nitrides, such as an ammonium fluoride-hydrogen peroxide etching solution or a mixed solution of ammonia and hydrogen peroxide. When the laminate for a circuit board is to be divided into individual pieces, a general dividing technique such as dicing or a laser scriber can be used. [Example]

[0077] EXAMPLES The present invention will be explained in more detail below with reference to examples, but the present invention is not limited to these examples. In the examples, the measurements were carried out as follows.

[0078] (1) Void fraction X The laminates for circuit boards produced in the examples and comparative examples were cut using a dicing device, and the cross sections were polished. The cross sections were observed using an SEM (JEOL Ltd., electron probe microanalyzer JXA-8230) to measure the length L of the bonding interface. I The total length L of voids with a diameter of 1 μm or more observed in an area 20 μm from the bonding interface to the copper plate side B The ratio was calculated to calculate the void fraction X. The total length of the voids was calculated by measuring and integrating the projected lengths of the voids parallel to the substrate.

[0079] (2) Silver concentration For the cross section of the laminate for circuit boards prepared in the measurement of the void fraction X, the silver concentration at the interface between the copper plate and the bonding layer and the silver concentration at a distance of 20 μm from the interface in the thickness direction of the copper plate were measured at five locations, and the average value was calculated. The average value is shown in the table as the silver concentration in the band 20 μm from the interface between the copper plate and the bonding layer in the thickness direction of the copper plate. In addition, since the circuit board laminates of each example and comparative example have bonding layers formed on both sides of the substrate, there are two 20 μm zones from the interface between the silicon nitride sintered substrate and the bonding layer in the direction of the bonding layer, but the silver concentration in the two zones is the same. The silver concentration was measured using an EPMA (Electron Probe Microanalyzer JXA-8230, manufactured by JEOL Ltd.).

[0080] (3) Ra and Spc of sintered silicon nitride substrate The values ​​used were those specified in the international standard ISO 25178 for surface texture (surface roughness measurement). Specifically, Ra and Spc were values ​​obtained by measuring an arbitrary evaluation area of ​​1000 μm × 1000 μm on the silicon nitride sintered substrate using a non-contact 3D measuring device (Keyence Corporation, product name: VR-5000). Specifically, an arbitrary area of ​​2 cm × 2 cm was selected, and at least 20 evaluation areas of 1000 μm × 1000 μm were measured within that arbitrary area, and the values ​​obtained were averaged.

[0081] (4) Crystal distortion of silicon nitride powder The calculation was carried out by powder X-ray diffraction (XRD) using CuKα radiation according to the following procedure. The X-ray detector was scanned in 0.02° steps over the 2θ range of 15 to 80° to obtain an X-ray diffraction pattern, and the integral widths of the (101), (110), (200), (201), and (210) planes of the β phase were calculated from the pattern, and these integral widths were substituted into the Williamson-Hall equation shown below in Equation 2. The following equation 2 was plotted with "2sinθ / λ" on the X axis and "βcosθ / λ" on the Y axis, and the crystal distortion (η) was calculated from the slope of the straight line obtained by the least squares method. βcosθ / λ=η×(2sinθ / λ)+(1 / Dc) (2) (β: integral width (rad), θ: Bragg angle (rad), η: crystal distortion, λ: X-ray wavelength, Dc: crystal diameter (nm))

[0082] [Example 1] Silicon powder (semiconductor grade, average particle size 5 μm) was mixed with silicon nitride powder (average particle size 1.5 μm) as a diluent to obtain a raw material powder (Si: 80 mass%, Si3N4: 20 mass%). The raw material powder was filled into a reaction vessel to form a raw material powder layer. Next, the reaction vessel was placed in a pressure-resistant sealed reactor equipped with an ignition device and a gas supply and exhaust mechanism, and the reactor was depressurized and degassed, and then nitrogen gas was supplied to replace the atmosphere. Thereafter, nitrogen gas was gradually supplied, and the pressure was increased up to 0.7 MPa. The bulk density of the raw material powder at the time when the predetermined pressure was reached (at the time of ignition) was 0.5 g / cm 3 It was.

[0083] The end of the raw material powder in the reaction vessel was then ignited, and a combustion synthesis reaction took place, resulting in an agglomerated product made of silicon nitride. The resulting agglomerated product was crushed by rubbing against each other, and then an appropriate amount was placed in a vibration ball mill and finely pulverized for 6 hours. The inside of the mill was lined with urethane to prevent heavy metal contamination, and balls made primarily of silicon nitride were used as the milling media. Just before the start of fine pulverization, 1% by mass of ethanol was added as a grinding aid, and the mill was sealed and pulverized to a density of 5.4 × 10 -3The powder was then pulverized until the crystal distortion reached 99%.

[0084] A slurry-like molding composition was prepared by mixing 100 parts by weight of the silicon nitride powder obtained by the above method, 2 parts by weight of the oxygen-free compound Y2Si4N6C powder, 5 parts by weight of MgSiN2 powder, 3 parts by weight of yttria powder, and 22 parts by weight of water as a binder dispersion medium. The molding composition was then formed into a sheet using a doctor blade method to obtain a green sheet. The green sheet was placed in a sintering chamber using boron nitride powder as a release agent and degreased at 550°C in dry air. It was then placed in a sintering furnace and sintered at 1780°C for 9 hours in a nitrogen atmosphere under a pressure of 0.02 MPa·G to obtain a silicon nitride sintered substrate. The resulting silicon nitride sintered substrate was then blasted with alumina abrasive grains with an average particle size of 500 μm at a pressure of 0.3 MPa to remove surface impurities.

[0085] The silicon nitride sintered substrate thus obtained had a substrate size of 190 mm x 140 mm, a thickness of 0.32 mm, a surface roughness of 0.4 μm (Ra), and an Spc value of 4.2 (1 / mm). Ti and Ag were then deposited in this order on both sides of the substrate by sputtering, forming Ti and Ag layers. Oxygen-free copper plates (copper plates) of the same size and thickness as the silicon nitride sintered substrate, each 0.3 mm thick, were then laminated on both sides of the silicon nitride sintered substrate. The substrate was then placed in a hot press, the vacuum atmosphere was reduced to 0.005 Pa, and the copper plates and silicon nitride sintered substrate were heated to 850 °C while a load of 10 MPa was applied to them. In this way, a circuit board laminate was produced, comprising a silicon nitride sintered substrate and copper plates bonded to both sides of the substrate via bonding layers. The evaluation results are shown in Table 1. Furthermore, it was confirmed that in the obtained laminate for circuit board, the Ti layer was present with the above-mentioned thickness as a layer of Ti reaction products including Ti nitride, and the Ag layer had diffused into the copper plate and disappeared.

[0086] [Example 2] A laminate for a circuit board was produced in the same manner as in Example 1, except that the substrate size and copper plate size were 110 mm × 110 mm. The evaluation results are shown in Table 1. Furthermore, it was confirmed that in the obtained laminate for circuit board, the Ti layer was present with the above-mentioned thickness as a layer of Ti reaction products including Ti nitride, and the Ag layer had diffused into the copper plate and disappeared.

[0087] [Example 3] A laminate for a circuit board was produced in the same manner as in Example 1, except that the thickness of the oxygen-free copper plate (copper plate) was 0.8 mm and the pressure during hot pressing was 15 MPa. The evaluation results are shown in Table 1. Furthermore, it was confirmed that in the obtained laminate for circuit board, the Ti layer was present with the above-mentioned thickness as a layer of Ti reaction products including Ti nitride, and the Ag layer had diffused into the copper plate and disappeared.

[0088] [Comparative Example 1] A powder mixture of 12 wt% Cu powder, 88 wt% Ag powder, and 2 wt% Ti powder was blended with 7 wt% terpineol and 3 wt% acrylic resin (total paste ratio) using a three-roll mill. The resulting mixture was then uniformly mixed using a three-roll mill to prepare a brazing filler and active metal paste. This paste was then applied to both sides of a 190mm x 140mm silicon nitride sintered substrate with a thickness of 0.32mm, a surface roughness of 0.4μm Ra, and an Spc value of 4.2 (1 / mm) by screen printing. After application, the paste was dried and degreased in a nitrogen atmosphere at 320°C for 5 minutes. Oxygen-free copper plates of the same size and thickness as the silicon nitride sintered substrate were then laminated on both sides. The substrate was then evacuated to 0.005 Pa under a load of 0.1 kPa and heated to 850°C to produce a circuit board laminate. The evaluation results are shown in Table 1.

[0089] Comparative Example 2 A laminate for a circuit board was produced in the same manner as in Comparative Example 1, except that the size of the substrate was 110 mm × 110 mm and the size of the copper plate was 110 mm × 110 mm. The evaluation results are shown in Table 1.

[0090] [Reference example 1] A commercially available silicon nitride plate (size 110 mm × 110 mm, thickness 0.32 mm, Ra 0.8 μm, Spc value 6.0 (1 / mm)) was used, and a laminate for a circuit board was produced in the same manner as in Example 1, except that the copper plate size was changed to 110 mm × 110 mm. The evaluation results are shown in Table 1.

[0091] [Table 1]

[0092] The laminates for circuit boards shown in each example had an extremely low void fraction X, despite their large size. It was found that the low void fraction X resulted in high heat dissipation, and furthermore, reduced amount of etching solution remaining during etching, improving the reliability of the product. [Explanation of symbols]

[0093] 10 Metal nitride sintered substrate 11 Reactive metal layer 12 Antioxidant layer 15 Bonding layer 20 copper plate 30 Laminate for circuit board 100 bases 110 Spacer

Claims

1. A laminate of a metal nitride sintered substrate and a copper plate, wherein the metal nitride sintered substrate has a surface roughness (Ra) of 0.6 μm or less and an arithmetic mean curvature (Spc) of the peaks of the surface of 4.5 [1 / mm] or less, and the metal nitride sintered substrate and the copper plate are bonded together via a bonding layer having a thickness of 0.01 to 1 μm, the bonding layer containing a nitride of a reactive metal, and the laminate has a minimum length from the center of the surface to the periphery of 50 mm or more, and a measured length L of a bonding interface between the metal nitride sintered substrate and the copper plate measured on a cross section obtained by cutting the laminate in the lamination direction. Ｉ The total length L of voids with a diameter of 1 μm or more observed in the vicinity of the bonding interface Ｂ 1. A laminate for circuit boards, characterized in that the void ratio X, which is the ratio of

2. The thickness of the metal nitride sintered substrate (t １ ) is 0.2 to 1.0 mm, and the thickness (t １ ) to the thickness of the copper plate (t ２ ) ratio (t ２ / t １ 2. The laminate for circuit boards according to claim 1, wherein the value of (a) is 0.5 to 8.

3. 3. The laminate for circuit boards according to claim 1, wherein the metal nitride sintered substrate is a silicon nitride sintered substrate.

4. The laminate for circuit boards according to any one of claims 1 to 3, wherein the silver concentration in a zone 20 µm from the interface between the copper plate and the bonding layer in the thickness direction of the copper plate is 3 mass% or less.

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