Wet processing work holder

Abstract

To provide a highly versatile work-piece holder for use in wet processing, enabling suitable implementation of wet processing regardless of the shape, size, quantity and the like of a work-piece to be processed.SOLUTION: A work-piece holder 10 is constituted to support a work-piece 50 to be subjected to wet processing. The work-piece holder 10 at least comprises a holder body 12, a hanging unit 14, work-piece support units 16 and 18, and foot units 30 and 125. The hanging unit 14 is constituted to hang / support the holder body 12 within a wet processing region. The work-piece support units 16 and 18 are constituted to be supported by the holder body 12 in a position-adjustable state and to support the work-piece 50. The foot units 30 and 125 are constituted to enable the holder body 12 to stand thereon. The work-piece support units 16 and 18 each comprise a pair of position-adjustable work-piece receivers 20 constituted to support the work-piece 50.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a work holder for wet processing, for supporting a workpiece to be wet processed. [Background technology]

[0002] Electroless plating has been widely used to form metal films on workpieces such as glass substrates and silicon substrates. In electroless plating, the workpiece is often immersed in a plating bath while suspended on a work holder to bring the workpiece into contact with the plating solution.

[0003] However, if plating solution remains in contact with the workpiece supported by the work holder, the old plating solution is not replaced with new plating solution, which can cause the problem of metal ions not being smoothly supplied to the surface of the workpiece.

[0004] Therefore, among the prior art, there is a wet treatment device that employs a work holder feed mechanism that can raise and lower the workpiece while immersed in the treatment liquid. By adopting such a configuration, it is believed that uniform surface treatment of the workpiece can be achieved. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2015-179747 Summary of the Invention [Problem to be solved by the invention]

[0006] However, conventional work holders are designed to process workpieces of the same shape and size, and are therefore not suitable for processing multiple workpieces of different shapes and sizes.

[0007] Furthermore, since the number of workpieces that can be stored per workpiece holder is usually fixed, it is difficult to handle situations where a small number of workpieces needs to be processed for development prototyping or an irregular number of workpieces needs to be processed.

[0008] An object of the present invention is to provide a versatile work holder for wet processing that can perform appropriate wet processing regardless of the shape, size, number, etc. of the workpieces to be processed. [Means for solving the problem]

[0009] The wet processing work holder according to the present invention is for supporting a workpiece to be wet processed. A typical example of wet processing is electroless plating, but it can also be used for cleaning, etching, and other processes.

[0010] This wet processing work holder comprises at least a holder body, a hanging part, a work support part, and legs. Stainless steel is an example of the material for the work holder, but other metals, resins, and other materials can also be used as long as they meet the required conditions of corrosion resistance, workability, strength, etc.

[0011] The hanging part is for suspending and supporting the holder body in a wet processing area (e.g., in a plating bath for electroless plating, in an etching tank for etching, etc.) The hanging part may be a part of the holder body or may be a separate member.

[0012] The work support portion is supported by the holder body in a positionally adjustable state and is configured to support the work. The work support portion has a positionally adjustable work receiver configured to support the work.

[0013] The work support part may be a part of the holder body or may be a separate part. When the work support part is configured integrally with the holder body, the work support part is configured by adjusting the position of the work receiver relative to the holder body.

[0014] The legs are configured to allow the holder body to stand on its own. The legs may be configured by shaping the lower part of the holder body to make it easy to stand on its own, or by attaching separate leg members to the holder body.

[0015] In this configuration, a highly versatile work holder can be realized by appropriately adjusting the position of the workpiece receiver according to the shape and size of the workpiece, etc. This eliminates the need to prepare a dedicated jig for each workpiece to be processed, as was previously the case.

[0016] Furthermore, because the legs allow the holder body to stand on its own, it is easy to arrange a desired number of workpiece holders at a desired pitch within the wet processing area, making it easier to accommodate variations in the number of workpieces to be processed.

[0017] Furthermore, the device can be placed in an appropriate location such as on a workbench or desk during pre- or post-wet processing (cleaning, drying, firing, etc.) or while waiting for processing, thereby improving work efficiency.

[0018] By using a work holder that can be hung or made to stand on its own, a work holder that can be used for a wide range of purposes, from development to mass production, can be realized.

[0019] In the above-described configuration, It is preferable that the holder body is plate-shaped, the work support portion is a work support member having a long, thin plate shape that can be attached to the holder body so as to be freely position-adjustable, and that multiple work receivers are provided on the work support member.

[0020] Furthermore, it is preferable that the workpiece receiving tool has a support groove configured to support the workpiece, and is supported rotatably and slidably relative to the workpiece supporting member. [Effects of the Invention]

[0021] According to this invention, it is possible to realize a highly versatile wet processing work holder that can perform appropriate wet processing regardless of the shape, size, number, etc. of the workpieces to be processed. [Brief explanation of the drawings]

[0022] [Figure 1] 1 is a diagram illustrating an outline of a use situation of a work holder according to an embodiment of the present invention. [Figure 2] FIG. 2 is a diagram illustrating an example of a schematic configuration of a work holder according to an embodiment of the present invention. [Figure 3] FIG. 10 is a diagram illustrating an example of a method for using a work holder. [Figure 4] FIG. 10 is a diagram showing an example of a state in which a plurality of work holders are connected together. DETAILED DESCRIPTION OF THE INVENTION

[0023] 1 shows an example of a state in which a work holder 10 according to an embodiment of the present invention is used. The work holder 10 is configured to hold a workpiece 50 to be wet-treated.

[0024] In this embodiment, electroless plating is described as an example of wet processing, but the work holder 10 can be used in other wet processing. The work holder 10 can also be used in processes before and after the wet processing (degreasing process, cleaning process, heat treatment process).

[0025] The electroless plating process uses a plating bath 60. In this embodiment, for example, a plating solution containing copper ions and a reducing agent is used for the plating bath 60. The desired copper plating film is formed on the workpiece 50 by immersing the workpiece 50 in the plating bath 60 for a predetermined time while stirring the plating solution using an air bubbling mechanism (not shown) or the like.

[0026] For example, copper sulfate (e.g., copper concentration of about 1 gram / liter to 5 grams / liter) can be used as a copper ion source in the plating bath 60. An example of a complexing agent is EDTA (ethylenediaminetetraacetic acid), and an example of a reducing agent is formaldehyde (CHO).

[0027] A surfactant may be added to the plating bath 60 as needed. The metal ion source, complexing agent, and reducing agent for film formation are not limited to those described above, and the work holder 10 can be used in various types of wet processes.

[0028] In this embodiment, the temperature of the plating bath 60 is usually set to about 40 to 80° C. By immersing the workpiece 50 in this environment for about 5 to 30 minutes, a film having a thickness of about 0.2 to 0.8 μm is formed on the surface of the workpiece 50 to be treated.

[0029] 2 shows a schematic configuration of the work holder 10. As described above, the work holder 10 is configured to support a workpiece 50 to be electroless plated.

[0030] The work holder 10 includes a holder body 12 , a hanging member 14 , a first work support member 16 , a second work support member 18 , a leg attachment portion 125 , and a leg member 30 .

[0031] The holder body 12 is made of stainless steel and has a U-shaped plate shape in plan view, with multiple long holes 40 arranged along the longitudinal direction. Both ends of the holder body 12 are bent at right angles, and these parts serve as leg attachment parts 125 to allow the holder body to stand on its own.

[0032] The hanging member 14 is an elongated plate made of stainless steel and has a plurality of long holes 40 arranged along its length. The hanging member 14 serves to suspend and support the holder body 12 within the plating bath 60, with one end attached to the holder body 12 by a fastener 90 and the other end hung from a hook 70 provided on the work transfer mechanism or the work holding mechanism.

[0033] By selectively passing the hook 70 through a suitable slot 40 among the multiple slots 40 provided in the hanging member 14, it is possible to position the work holder 10 at a suitable height in the plating bath 60.

[0034] In this embodiment, the hanging member 14 is an independent member separate from the holder body 12, but a part of the holder body 12 may be configured as the hanging portion.

[0035] The first work support member 16 and the second work support member 18 are each in the form of a long, narrow plate made of stainless steel with a plurality of elongated holes 40 arranged along the longitudinal direction. The first work support member 16 and the second work support member 18 are attached to the elongated holes 40 at desired positions in the holder body 12 with fasteners 90.

[0036] The positions of the first work support member 16 and the second work support member 18 in the holder body 12 can be adjusted by selecting the elongated holes 40 to which the first work support member 16 and the second work support member 18 are attached, or by loosening and sliding the fasteners 90 within the length range of the elongated holes 40.

[0037] In this embodiment, the first work support member 16 and the second work support member 18 are separate and independent members from the holder body 12, but a part of the holder body 12 may be configured as a work support portion.

[0038] The first work support member 16 and the second work support member 18 each include a plurality of positionably adjustable workpiece receivers 20 configured to support a workpiece 50 .

[0039] The workpiece receiving fixture 20 is attached to the first workpiece supporting member 16 and the second workpiece supporting member 18 in a state in which it can rotate and slide freely. The workpiece receiving fixture 20 is provided with a support groove for supporting the workpiece 50. Note that the state in which it can rotate and slide freely means that the angle and position can be adjusted when the fasteners 90 are loosened, and the position is fixed by tightening the fasteners 90.

[0040] In this embodiment, the work support portion of the present invention is made up of the first work support member 16, the second work support member 18, and the work receiver 20. However, if the work receiver 20 is attached directly to the holder body 12 at a desired position to support the work 50, then the multiple work receivers 20 correspond to the work support portion of the present invention.

[0041] The leg members 30 are attached to the leg attachment portions 125 of the holder body 12 in a rotatable and slidable state. The leg members 30 are made of stainless steel and have a long, thin plate shape, and are configured so that the holder body 12 can stand on its own by adjusting the angle of placement.

[0042] In this embodiment, the leg member 30 is a separate and independent member from the holder main body 12, but it may also be configured as a work support portion by modifying the shape of a part of the holder main body 12 (e.g., by enlarging the area of ​​the leg mounting portion 125).

[0043] 3(A) to 3(C), an example of how to use the work holder 10 will be described. First, the attachment positions of the first work support member 16 and the second work support member 18 are determined according to the shape and size of the work 50.

[0044] 3(A), the most suitable position of the multiple elongated holes 40 in the holder body 12 is selected to determine the approximate height of the first work support member 16 and the second work support member 18. After that, the height can be fine-tuned by raising or lowering the elongated holes 40 within the length of the selected elongated holes 40, and then the positions can be fixed by tightening the fasteners 90.

[0045] In this embodiment, a combination of a bolt and a nut is used as the fastener 90, but it is also possible to use screws, washers, springs, etc. as appropriate, or to use caulking or the like as appropriate.

[0046] Next, the position of the receiver 20 is adjusted as shown in Figure 3(B) so that the workpiece 50 can be stably held. In this embodiment, the angle of the workpiece receiver 20 is adjusted so that the support groove of the workpiece receiver 20 opens toward the center of the workpiece 50.

[0047] The adjustment method for the workpiece receiving fixtures 20 is not limited to this, and by adjusting the distance between the workpiece receiving fixtures 20 or adjusting their orientation, it is possible to generally accommodate workpieces 50 of various sizes and shapes.

[0048] If necessary, the angle of the leg members 30 can be adjusted as shown in Fig. 3(C). Depending on the space available for placing the work holder 10 and the required level of stability, the angle of the leg members 30 can be adjusted appropriately or the leg members 30 can be replaced with different sized ones.

[0049] The work holder 10 can be used in processes before and after the electroless plating process, which makes it possible to reduce the number of workpiece 50 transfer operations in a series of processes.

[0050] The work holder 10 does not apply a clamping force to the work 50, so there is no problem of pinching marks being left behind. In addition, since the lower part of the work 50 (the area below the center of the work 50) is supported, it is expected to be effective in preventing contamination caused by dripping of plating liquid.

[0051] Furthermore, since it is easy to fine-tune the shape and thickness of the groove in the receiving jig 20, it is possible to accommodate a wider variety of workpieces.

[0052] Furthermore, since the work holder 10 as a whole is provided with a large number of long holes 40, it is possible to reduce the weight and create a situation where the plating solution is less likely to stagnate.

[0053] Each work holder 10 is self-supporting and can accommodate various types of workpieces 50, making it possible to use it in a wide range of stages from development to mass production. Furthermore, as shown in Figure 4, by connecting multiple work holders 10 to form a single workpiece holding structure, it becomes easier to handle a large number of workpieces 50.

[0054] As shown in FIG. 4, by fixing the leg mounting portion 125 of the work holder 10 at a desired position on the connecting member 80 and connecting the upper portions of multiple work holders 10 to which the leg mounting portions 125 are connected by a connecting pole 85, it becomes possible to simultaneously handle a large number of workpieces 50 (including a mixture of different types of workpieces).

[0055] When adopting such a configuration, if the work holders 10 are arranged too close together, it may cause stagnation or dripping of the plating solution, so it is advisable to provide an appropriate interval between them. This configuration can be used when processing workpieces 50 of different sizes all at once, and is therefore expected to improve productivity.

[0056] The above-described embodiments should be considered to be illustrative in all respects and not restrictive. The scope of the present invention is defined not by the above-described embodiments but by the claims. Furthermore, the scope of the present invention is intended to include all modifications that are equivalent to the claims and fall within the scope thereof. [Explanation of symbols]

[0057] 10-Work holder 12-Holder body 14-Hanging member 16 - first work support member 18 - Second work support member 20-Workpiece holder 30-leg member 40-long hole 50-Work 60-Plating bath 70-Hook 80-Connecting member 85-Connecting Pole 90-Fastener

Claims

1. A wet processing work holder for supporting a workpiece to be wet processed, comprising: A holder body; a hanging portion for suspending and supporting the holder body within a wet processing area; a workpiece support portion that is supported by the holder main body in a positionally adjustable state and that is configured to support the workpiece; a leg portion configured to allow the holder body to stand on its own; At least 10. A work holder for wet processing, wherein the work support portion has a position-adjustable work receiving tool configured to support the work.

2. The holder body has a plate shape, the workpiece support portion is a workpiece support member having a long and narrow plate shape that can be attached to the holder main body so as to be positionally adjustable; 2. The wet processing work holder according to claim 1, wherein a plurality of the workpiece receivers are provided on the workpiece support member.

3. 3. The wet processing work holder according to claim 2, wherein the work receiving tool has a support groove configured to support a workpiece, and is supported rotatably and slidably relative to the work supporting member.

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