Storage container opening / closing device and working device

Abstract

Achieve further improvement in product quality. [Solution] The working device of the present invention is a working device for carrying out the loading and unloading of substrates into and out of a storage container, wherein the storage container comprises a container body forming an opening and a lid portion provided with a protrusion, and the working device comprises an outer wall forming a work chamber and a storage container supply mechanism that connects the substrate loading / unloading opening and the opening to carry out the loading and unloading work, the storage container supply mechanism comprising a housing that forms the loading / unloading opening, a shielding door, and a shielding door moving mechanism, the shielding door comprising a door body provided with a hole through which the protrusion can be inserted, and a protrusion holding mechanism that holds the protrusion inserted into the hole, and the shielding door moving mechanism moves the shielding door together with the lid portion, the protrusion of which is held by the protrusion holding mechanism, in a first direction to pull it into the work chamber, thereby removing the lid portion from the container body, and moves the shielding door in a second direction to connect the loading / unloading opening and the opening.

Description

[Technical Field]

[0001] The present invention is mainly Storage container opening / closing device and working device Regarding. [Background technology]

[0002] Patent Document 1 describes a mechanism for removing a cover (91) from a material box (9). According to the structure of Patent Document 1, the cover of a positioned material box is unlocked, and then the material box is moved back and the cover is raised by the lifting door (1), thereby opening the material box. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Chinese Utility Model No. 218407106 Summary of the Invention [Problem to be solved by the invention]

[0004] According to the above-described structure of Patent Document 1, there is a possibility that foreign matter may get into the material box or the working device when the material box is retracted, which may cause a deterioration in product quality.

[0005] The present invention was made in response to the recognition of the above-mentioned problems, and has an exemplary object to achieve further improvement in product quality. [Means for solving the problem]

[0006] One aspect of the present invention is Storage container opening and closing device The above Storage container opening and closing device teeth, A storage container opening and closing device for opening and closing a lid of a storage container that can store substrates, the storage container comprising: a container body that forms an opening for carrying in and out the substrates; and a lid that is detachably attached to the container body so as to close the opening, the lid having a protrusion that protrudes in a horizontal direction, The storage container opening and closing device is a housing that penetrates in a first direction and forms a passage opening through which the substrate passes; a shielding door capable of shielding the passage opening; a shielding door moving mechanism for moving the shielding door; Equipped with The shielding door is a door body having a hole through which the protrusion can be inserted on one side in the first direction; a protrusion holding mechanism provided on one side of the door body in the first direction and holding the protrusion; a cover member provided on one side of the door body in the first direction and covering the hole and the protrusion holding mechanism; Equipped with the protrusion holding mechanism holds the protrusion inserted into the hole to hold the lid; The shielding door moving mechanism includes: The shielding door is moved together with the lid portion held by the protrusion holding mechanism in the first direction and a second direction perpendicular to the first direction to remove the lid portion from the container body, thereby connecting the passage opening and the opening. It is characterized by: [Effects of the Invention]

[0007] According to the present invention, it is possible to improve the quality of products. [Brief explanation of the drawings]

[0008] [Figure 1] 1 is a perspective view illustrating an example of the appearance of a working device according to an embodiment; [Figure 2] FIG. 10 is a perspective view showing an example of the internal structure of a storage container supply mechanism. [Figure 3] FIG. 10 is a perspective side view of a portion of the structure of the storage container supply mechanism. [Figure 4] FIG. 10 is a perspective view showing an example of the structure of a storage container. [Figure 5] FIG. 10 is a perspective view showing an example of the internal structure of a storage container supply mechanism. [Figure 6] 10A and 10B are schematic side views for explaining the opening and closing operation of the storage container. [Figure 7] FIG. 2 is a perspective view showing an example of the structure of a transport task unit. [Figure 8] FIG. 10 is a perspective view showing an example of the internal structure of a support table that supports a carry-in / out mechanism. [Figure 9] FIG. 9 is a perspective view showing a part of FIG. 8 not shown and including a carry-in / out mechanism. [Figure 10] 10A and 10B are perspective views showing examples of driving modes of a loading / unloading mechanism. [Figure 11] FIG. 10 is a perspective view showing an example of the detailed structure of a loading / unloading mechanism. [Figure 12] FIG. 10 is a side view showing an example of the detailed structure of the loading / unloading mechanism. [Figure 13] 1A to 1C are schematic top views showing some examples of how substrates are carried in and out or transported. [Figure 14] FIG. 10 is a perspective view showing another example of the structure of the transport task unit. [Figure 15] FIG. 10 is a perspective view showing an example of the detailed structure of a loading / unloading mechanism. [Figure 16] FIG. 2 is a perspective view showing the detailed structure of a fork advance / retract mechanism. [Figure 17] FIG. 4 is a side view showing the detailed structure of the conveyor lifting mechanism. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, the embodiments will be described in detail with reference to the accompanying drawings. Note that the following embodiments do not limit the scope of the invention as claimed, and not all combinations of features described in the embodiments are necessarily essential to the invention. Two or more of the features described in the embodiments may be arbitrarily combined. Furthermore, the same reference numerals are used for the same or similar components, and redundant explanations will be omitted.

[0010] First Embodiment <An example of the overall configuration of the work device> 1 is a perspective view showing the appearance of a working apparatus 1 according to the first embodiment. The working apparatus 1 is configured to be able to perform a predetermined task on a workpiece to be worked on, and in this embodiment includes a storage container supply mechanism 2, a transport task unit 3, a control unit 9, and an exterior panel 10. In this embodiment, the work to be worked on is a substrate such as a glass substrate, a mounting substrate, or a semiconductor substrate (substrate SB in FIGS. 4, 10, etc.), which is stored in a predetermined storage container 7 and can be carried in and out between the storage container 7 and the working device 1. In this specification, transfer into the working device 1 is referred to as "carrying in," and transfer out of the working device 1 is referred to as "carrying out."

[0011] Here, as with other drawings described later, to facilitate understanding of the structure, the left-right direction or width direction of the working device 1 is illustrated as the X direction, the front-rear direction or depth direction is illustrated as the Y direction, and the up-down direction or height direction is illustrated as the Z direction. The X, Y, and Z directions intersect each other (substantially perpendicular), and the X and Y directions form a horizontal plane.

[0012] In this specification, the relative positional relationship between elements can be described based on the X, Y, and Z directions. One arbitrary direction can be represented by "+" and the opposite direction can be represented by "-". For example, the -X direction corresponds to the left direction, and the +X direction corresponds to the right direction, and when there is no distinction between the left and right directions, it is simply expressed as the X direction. As an example, moving in the X direction indicates that it is possible to move (reciprocate) in both the +X and -X directions. Similarly, the -Y direction side (or -Y side) corresponds to the front side or near side, and the +Y direction side (or +Y side) corresponds to the back side or far side, and when there is no distinction between the front and rear directions, it is simply expressed as the Y direction. As an example, being located on the front side of a specific element indicates being located on the -Y direction side. Similarly, the -Z direction corresponds to the downward direction, and the +Z direction corresponds to the upward direction, and when there is no distinction between the upward and downward directions, it is simply expressed as the Z direction. As an example, being located above a specific element indicates being located on the +Z direction side (or +Z side).

[0013] Although details will be described later, the storage container 7 is configured to be able to store one or more substrates SB, and a user can transport the storage container 7 to the front of the working device 1, for example, using a dolly 8. The storage container supply mechanism 2 enables the substrates SB to be loaded and unloaded from such a storage container 7 via a loading / unloading port 201 formed in its housing.

[0014] The transport operation unit 3 performs transport operations for the substrate SB. For example, the transport operation unit 3 transports the substrate SB that has been taken out / loaded into the storage container 7, and transfers (transfers) the substrate SB to another subsequent operation unit. The transport operation unit 3 can also transport the substrate SB received from the other operation unit and store it in / load it out of the storage container 7. The other operation units are capable of performing predetermined operations on the substrate SB, and examples of the operations include processing operations performed on the substrate, such as heating, cleaning, polishing, and implantation.

[0015] The control unit 9 controls the entire system of the working apparatus 1 and controls the drive of the storage container supply mechanism 2 and the transport work unit 3. In this embodiment, the control unit 9 is located on the left side of the front side of the working apparatus 1 together with an operation input unit (for example, a touch panel display, etc.). The user can input setting information related to the work content via this operation input unit, and the control unit 9 controls the drive of the storage container supply mechanism 2 and the transport work unit 3 based on this setting information.

[0016] In this embodiment, the control unit 9 includes a CPU (Central Processing Unit) and memory, and the CPU and memory execute a program for controlling the drive of the storage container supply mechanism 2 and the transport task unit 3. In another embodiment, the control unit 9 may be configured as a semiconductor device such as an ASIC (Application Specific Integrated Circuit). In other words, each function of the task device 1 may be realized by either hardware or software.

[0017] The exterior panel 10 forms the outer wall of the working apparatus 1, and separates an area including the space into which the substrate SB is carried in as a working chamber from the external space. The exterior panel 10 may be expressed as an apparatus housing, additionally including frame members that form the framework of the working apparatus 1. Some of the elements of the storage container supply mechanism 2 and the control unit 9 form part of the outer wall of the working apparatus 1, or are attached to the exterior panel 10.

[0018] In this embodiment, two storage container supply mechanisms 2 are illustrated as being arranged side by side in the X direction, but the number is not limited to this example, and a single storage container supply mechanism 2 may be arranged, or three or more storage container supply mechanisms 2 may be arranged.

[0019] <Example of the configuration of a loading / unloading operation unit> Fig. 2 is a perspective view showing the internal structure of the storage container supply mechanism 2. Fig. 3 is a schematic left side view and a schematic right side view, in perspective, of part of the structure of the storage container supply mechanism 2. A loading / unloading opening 201 leading to the work chamber is provided in the center of the front side of a wall material 200 that constitutes the housing of the storage container supply mechanism 2, and although details will be described later, the substrate SB is loaded and unloaded through the loading / unloading opening 201.

[0020] The storage container supply mechanism 2 is provided below the loading / unloading port 201 with a storage container support table 211, a support table lifting mechanism 213, and a support table advancing / retracting mechanism 212. The storage container support table 211 is configured to be able to support a storage container 7, and the storage container 7 can be placed on the upper surface of the storage container support table 211, and is also provided with a lower positioning unit 2111, which will be described later. The support table lifting mechanism 213 is able to move the storage container support table 211 in the Z direction, and by lifting the storage container support table 211, the lower positioning unit 2111 engages with an engaging unit 703 on the bottom surface of a container main body 700, which will be described later, so that the storage container support table 211 supports the storage container 7. The support table advancing / retracting mechanism 212 is able to move the storage container support table 211 in the Y direction, thereby advancing and retracting the storage container support table 211 and the storage container 7 placed thereon. That is, the storage container 7 is supported by the storage container support base 211 and can be raised and lowered by the support base lifting mechanism 213 and can be advanced and retreated by the support base advancing and retreating mechanism 212 .

[0021] The storage container supply mechanism 2 further includes a shielding door 221 and a shielding door moving mechanism 231 . The shielding door 221 shields the loading / unloading opening 201 formed in the wall material 200 from the inside of the work room. As will be described in detail later, the shielding door 221 moves away from the loading / unloading opening 201 to release the shielding, and the shielding door 221 rises to open the loading / unloading opening 201 and assume an open state. In addition, the shielding door 221 descends to a position opposite the loading / unloading opening 201, and the shielding door 221 approaches the loading / unloading opening 201 to shield the loading / unloading opening 201, and the loading / unloading opening 201 assumes a closed state. Here, when the loading / unloading opening 201 is in an open state, the shielding door 221 is in an open state, and when the loading / unloading opening 201 is in a closed state, the shielding door 221 is in a closed state. In this embodiment, the shielding door 221 is made of a member larger than the loading / unloading opening 201, and shields the loading / unloading opening 201 by abutting against the wall material 200 surrounding the loading / unloading opening 201. Here, a sealing member that abuts against the shielding door 221 may be provided on the workroom side of the loading / unloading opening 201 or the wall material 200. Alternatively, the shielding door 221 may be made of a member that is approximately the same size as the loading / unloading opening 201, and the shielding door 221 may fit into the loading / unloading opening 201 to shield the loading / unloading opening 201. In this case, the sealing member may be provided on the edge of the loading / unloading opening 201.

[0022] The shielding door moving mechanism 231 is configured to be movable so that the shielding door 221 can be changed from one of an open state and a closed state to the other, and includes a shielding door retracting mechanism 232 and a shielding door lifting mechanism 233 in this embodiment. The shielding door retraction mechanism 232 includes a guide member 2321 and a drive unit 2322 (first movement mechanism). The guide member 2321 holds the shielding door 221 and guides it movably in the Y direction. In this embodiment, the guide member 2321 is a guide rail extending in the Y direction. The drive unit 2322 includes a power source that generates power, and a drive mechanism that moves the shielding door 221 in the Y direction using the power of the power source.

[0023] The shielding door lifting / lowering mechanism 233 includes a guide member 2331 and a drive unit 2332 (second movement mechanism). The guide member 2331 holds the shielding door 221 and the shielding door retracting mechanism 232 and guides them movably in the Z direction. In this embodiment, the guide member 2331 is a guide rail extending in the Z direction. The drive unit 2332 includes a power source that generates power, and a drive mechanism that moves the shielding door 221 and the shielding door retracting mechanism 232 in the Z direction using the power of the power source.

[0024] For example, when the shielding door 221 is changed from a closed state to an open state, the shielding door retracting mechanism 232 moves the shielding door 221 in the +Y direction to retract it, and the shielding door lifting mechanism 233 moves the shielding door 221 and the shielding door retracting mechanism 232 in the +Z direction to lift them away from the loading / unloading opening 201. On the other hand, when the shielding door 221 is changed from an open state to a closed state, the shielding door lifting mechanism 233 moves the shielding door 221 and the shielding door retracting mechanism 232 in the -Z direction to lower them, and the shielding door retracting mechanism 232 moves the lowered shielding door 221 in the -Y direction to shield the loading / unloading opening 201. The shielding door moving mechanism 231 may also be expressed as a shielding door opening and closing mechanism.

[0025] The shielding door retracting mechanism 232 and the shielding door lifting mechanism 233 can be disposed at least partially to the side of the loading / unloading opening 201 and outward (in the -Y direction) from the wall material 200. In this embodiment, the guide members 2321 and 2331 and the drive unit 2322 are provided outward (in the -Y direction) from the wall material 200 and on one side (in the +X direction) and the other side (in the -X direction) from the loading / unloading opening 201, respectively, and the drive unit 2332 is provided outward (in the -Y direction) from the wall material 200 and on the other side (in the -X direction) from the loading / unloading opening 201. This reduces the number of components of the shielding door retracting mechanism 232 and the shielding door lifting mechanism 233 located within the working chamber, thereby ensuring sufficient space for the working chamber and reducing the impact on the work of transporting substrates SB within the working chamber, which will be described later.

[0026] <Example of storage container configuration> 4 is a perspective view showing the structure of the storage container 7. The storage container 7 includes a container body 700 and a lid 701. An opening OP7 is provided on the side of the container body 700, and one or more substrates SB are supported in a horizontal position along a support member provided on the inner wall of the container body 700, and can be individually inserted and removed horizontally through the opening OP7.

[0027] The lid 701 is detachably attached to the container body 700 so as to cover the opening OP7. In this embodiment, the lid 701 and an edge 704 around the opening OP7 of the container body 700 are both detachable by pins and pinholes (not shown) and / or magnets. With this configuration, the lid 701 can be removed by applying a force in a direction away from the container body 700 (the +Y direction in the figure).

[0028] Although details will be described later, a protrusion 702 that protrudes or extends horizontally is provided on the outer surface of the lid portion 701 (the surface on the +Y side in the figure). In this embodiment, the protrusion 702 has a shape including a rod portion extending like a bar and legs whose both ends are connected to the lid portion 701, and for convenience, this shape is taken to be a horizontal U-shape. One or more protrusions 702 may be provided, but it is preferable to provide multiple protrusions (four in this embodiment). The protrusions 702 may also be expressed as extensions.

[0029] Furthermore, although details will be described later, an engagement portion 703 is provided on each of the upper and lower portions of the container body 700. In this embodiment, the container body 700 is provided with the engagement portion 703 on each of its top surface and bottom surface. 3 again, the storage container supply mechanism 2 further includes an upper positioning unit 2411 and an upper positioning unit moving mechanism 2412 above the loading / unloading port 201. The upper positioning unit moving mechanism 2412 is configured to move the upper positioning unit 2411 in the Z direction.

[0030] With this configuration, the upper positioning portion 2411 can engage with the engaging portion 703 on the top surface of the container body 700, and the lower positioning portion 2111 can engage with the engaging portion 703 on the bottom surface of the container body 700, thereby enabling positioning of the container body 700. That is, the upper positioning portion 2411, the upper positioning portion moving mechanism 2412, the lower positioning portion 2111, the support platform advancing and retracting mechanism 212, and the support platform lifting and lowering mechanism 213 work together to function as a positioning mechanism 241 that positions the container body 700 (storage container 7). As a result, the top and bottom surfaces of the container body 700 are each positioned, and any twisting or bending of the container body 700 is eliminated.

[0031] In this embodiment, a pair of engagement portions 703 are provided on the left and right sides of each of the top and bottom surfaces of the container body 700, and the positioning portions 2111 and 2411 are provided corresponding to the pair of engagement portions 703 on the left and right sides, but the number of these is not limited to this example.

[0032] <Example of shielding door configuration> 5(a) and 5(b) are perspective views showing the internal structure of the storage container supply mechanism 2, showing the shielding door 221 as viewed from the work chamber side (the side opposite to the side where the storage containers 7 are arranged). The shielding door 221 includes a door main body 221B, a protrusion holding mechanism 222, and a cover member 223. The door main body 221B is provided with one or more (four in this embodiment) holes OP2 through which the protrusions 702 can be inserted, in accordance with the number and positions of the protrusions 702.

[0033] The protrusion holding mechanism 222 includes a protrusion holding part 2221 and an actuator 2222. One or more protrusion holding parts 2221 (four in this embodiment) are provided corresponding to the number of holes OP2. The protrusion holding mechanism 222 may have a shape that can engage with the protrusion 702 having the above-mentioned horizontal U-shape. In this embodiment, the protrusion holding mechanism 222 has a U-shape that is open at the top, and for convenience, this shape is assumed to be a vertical U-shape. Each protrusion holding portion 2221 is connected to an actuator 2222 via a connecting member, and can be raised and lowered based on the power from the actuator 2222. That is, as shown in Fig. 5(a), when the actuator 2222 rises as shown by arrow A51, each protrusion holding portion 2221 rises as shown by arrow A52.

[0034] The cover member 223 is provided on the working chamber side so as to cover the hole OP2 and the protrusion holding mechanism 222, and has a predetermined opening through which wires such as signal lines and power lines connected to the actuator 2222 are inserted.

[0035] When the protrusion 702 of the lid 701 of the storage container 7 is inserted into the hole OP2, the corresponding protrusion holder 2221 rises based on the power of the actuator 2222. At this time, the vertical U-shaped protrusion holder 2221 supports the horizontal U-shaped protrusion 702 from below. With this configuration, the protrusion holding mechanism 222 can hold the protrusion 702 as shown in FIG. 5(b).

[0036] <Opening and closing of storage containers for loading and unloading> 6(a) to 6(g) are schematic side views illustrating the opening and closing operations of the storage container 7 for carrying in and out according to this embodiment. For ease of understanding, dashed arrows are shown in the drawings to indicate the direction of the operations relative to the elements in which the operations occur. First, the user places the storage container 7 in front of the storage container supply mechanism 2 using the dolly 8 (see FIG. 6(a)).

[0037] Next, based on the setting information input by the user, the control unit 9 causes the support platform elevating mechanism 213 to raise the storage container support platform 211, and the storage container support platform 211 supports the storage container 7. This transfers the storage container 7 from the dolly 8 to the storage container support platform 211 (see FIG. 6(b)). Prior to this, the control unit 9 may cause the support platform advancing and retreating mechanism 212 to advance and retreat the storage container support platform 211 so that the lower positioning portion 2111 on the top surface of the storage container support platform 211 engages with the engaging portion 703 on the bottom surface of the container main body 700.

[0038] After raising the storage container support base 211 until the lower positioning portion 2111 reaches a predetermined height, the control unit 9 causes the support base advancing / retracting mechanism 212 to advance / retract the storage container support base 211, bringing the storage container 7 close to the shielding door 221 (see FIG. 6(c)). As a result, the protrusion 702 of the lid 701 is inserted into the hole OP2, and the engaging portion 703 on the top surface of the container body 700 and the upper positioning portion 2411 are overlapped in the Z direction (the engaging portion 703 is positioned so as to be engageable with the upper positioning portion 2411). The user can remove the cart 8 from in front of the storage container supply mechanism 2 as needed.

[0039] The control unit 9 further lowers the upper positioning part 2411 using the upper positioning part moving mechanism 2412, and engages it with the engaging part 703 on the top surface of the container body 700 (see FIG. 6(d)). In this way, the storage container 7 (container body 700) is positioned, and the position of the storage container 7 relative to the storage container supply mechanism 2 is determined.

[0040] Thereafter, the control unit 9 drives the protrusion holding mechanism 222 of the shielding door 221, and raises the protrusion holding portion 2221 based on the power of the actuator 2222, thereby holding the protrusion 702 inserted into the hole OP2 (see Figures 6(e) and 5(b)).

[0041] In this state, the control unit 9 drives the shielding door retracting mechanism 232 to move and retract the shielding door 221 in the +Y direction, away from the loading / unloading opening 201 (see FIG. 6(f)). As a result, the lid 701 is removed from the container body 700.

[0042] Then, the control unit 9 drives the shielding door lifting mechanism 233 to move the shielding door 221, which has been retracted and separated from the loading / unloading opening 201, in the +Z direction to lift it (see FIG. 6(g)). As a result, the lid 701, whose protrusion 702 is held by the protrusion holding mechanism 222 of the shielding door 221, is raised together with the shielding door 221.

[0043] In this way, the storage container supply mechanism 2 opens the storage container 7 and connects the opening OP7 to the loading / unloading port 201. This allows the substrate SB to be loaded and unloaded. When the storage container 7 is closed, the above-described procedure can be performed in reverse order. In this embodiment, the opening and closing of the loading / unloading opening 201, the opening and closing of the shielding door 221, the opening and closing of the storage container 7, the opening OP7, and the opening and closing of the lid 701 correspond to one another. For example, opening the loading / unloading opening 201 may be rephrased as opening the shielding door 221, the storage container 7, the opening OP7, or the lid 701.

[0044] Furthermore, the cart 8 is configured so that it can transfer the storage container 7 onto the storage container support stand 211 by raising the storage container support stand 211, and so that it can receive the storage container 7 from the storage container support stand 211 by lowering the storage container support stand 211.

[0045] In addition, in this embodiment, the user transports the storage container 7 using a cart 8, but this is not limited to this, and the storage container 7 may also be transported using, for example, an AGV (Automatic Guided Vehicle) or an AMR (Autonomous Mobile Robot), etc.

[0046] According to this configuration, when the loading / unloading opening 201 and the opening OP7 are opened to allow the substrate SB to be loaded or unloaded, the container body 700 can be kept close to the loading / unloading opening 201, which prevents foreign matter from entering the inside of the container body 700 and the working chamber of the working device 1, and is therefore advantageous for improving product quality. Furthermore, when loading or unloading the substrate SB, the user does not need to move the container body 700 back and forth, which makes it possible to load or unload the substrate SB in an appropriate manner relatively easily. The same applies when the loading / unloading opening 201 and the opening OP7 are closed.

[0047] <Example of the configuration of the transport operation unit> 7 is a perspective view of the transport operation unit 3. The transport operation unit 3 includes a carry-in / out mechanism 31, a left-right movement mechanism 321, and a support table 329. The carry-in / out mechanism 31 includes a fork 311 and a conveyor 312. The fork 311 is a plate-shaped substrate support member that can support the substrate SB from below, and in this embodiment, the forks 311 are a pair of plate-shaped members that each extend in one direction and are arranged a predetermined distance apart from each other. The conveyor 312 is a substrate transport mechanism capable of transporting the substrate SB. In this embodiment, the conveyor 312 is a roller conveyor having three transport roller rows made up of a plurality of transport rollers, and each pair of forks 311 is provided between the transport roller rows. Further details will be described later.

[0048] Here, in this embodiment, fork 311 is a plate-shaped member, but it may be a rod-shaped member extending in one direction, and there may be three or more forks. Furthermore, the upper surface of fork 311 may be provided with a plurality of convex support portions that come into contact with and support the substrate. Furthermore, conveyor 312 may be a belt conveyor, and transport operation unit 3 may be referred to as an operation device.

[0049] The support base 329, details of which will be described later, supports the loading / unloading mechanism 31 so that it can move in both the Y and Z directions and rotate around the Z direction as a central axis. The support base 329 may also be expressed as a rotating support base.

[0050] The left-right movement mechanism 321 supports the support base 329 and the loading / unloading mechanism 31 thereon so that it can move in the X direction, and in this embodiment, includes a support plate 3210, a pair of guide rails 3211, and a drive unit 3212. The support base 329 and various mechanisms at least partially built into it, which will be described later, are mounted on the support plate 3210. The pair of guide rails 3211 are spaced apart in the Y direction and extend in the X direction, and support the support plate 3210 so that it can move in the X direction. The drive unit 3212 includes a power source that generates power and a drive mechanism that moves the support plate 3210 in the X direction using the power of the power source. With this configuration, the left-right movement mechanism 321 forms a slider that can move (reciprocate) in the X direction.

[0051] 8 is a perspective view showing the internal structure of the support base 329. The support base 329 has the front-rear movement mechanism 322, the up-down movement mechanism 323, and the rotation mechanism 324 at least partially built in.

[0052] The front-rear movement mechanism 322 includes a support plate 3220, a pair of guide rails 3221, and a drive unit 3222. A vertical movement mechanism 323 is mounted on the support plate 3220. The pair of guide rails 3221 are spaced apart in the X direction and extend in the Y direction, and support the support plate 3220 so that it can move in the Y direction. The drive unit 3222 includes a power source that generates power, and a drive mechanism that moves the support plate 3220 in the Y direction using the power of the power source. With this configuration, the front-rear movement mechanism 322 forms a slider that can move (advance and retreat) in the Y direction.

[0053] The vertical movement mechanism 323 includes a support plate 3230, a ball screw shaft 3231, a power source 3232, and a pair of guide rails 3233. A rotation mechanism 324 is mounted on the support plate 3230. The ball screw shaft 3231 extends in the Z direction and rotates about the Z direction by the power of the power source 3232. The pair of guide rails 3233 are spaced apart in the Y direction and extend in the Z direction, supporting the support plate 3230 so that it can move in the Z direction. The support plate 3230 is threadedly engaged with the ball screw shaft 3231 extending in the Z direction. When the ball screw shaft 3231 rotates based on the power of the power source 3232, the support plate 3230 moves in the Z direction along the guide rails 3233. With this configuration, the vertical movement mechanism 323 forms a slider that can move (raise and lower) in the Z direction.

[0054] The rotation mechanism 324 includes a support part 3241 and a drive part 3242. The support part 3241 is configured to be rotatable around the Z direction as a rotation axis based on the power of the drive part 3242, and the carry-in / out mechanism 31 is mounted on the support part 3241.

[0055] 9 is a perspective view showing the entire structure including the carry-in / out mechanism 31, with some parts of FIG. 8 not shown. The carry-in / out mechanism 31 is rotatably supported by a rotation mechanism 324, which is supported by a vertical movement mechanism 323 so that it can move up and down, which is mounted on a front-rear movement mechanism 322 so that it can move forward and backward, and which is mounted on a left-right movement mechanism 321 so that it can reciprocate. With this configuration, the carry-in / out mechanism 31 is movable in any of the X, Y, and Z directions, and its posture / orientation can be changed in any direction (horizontal direction) on the XY plane.

[0056] The order in which the mechanisms 321 to 324 are arranged is not limited to this example.

[0057] For example, in this embodiment, the rotation mechanism 324 is mounted on the vertical movement mechanism 323 so that it can be raised and lowered, the vertical movement mechanism 323 is mounted on the front-rear movement mechanism 322 so that it can move back and forth, and the front-rear movement mechanism 322 is mounted on the left-right movement mechanism 321 so that it can move back and forth, but in other embodiments, the rotation mechanism 324 may be mounted on the front-rear movement mechanism 322 so that it can be moved back and forth, the front-rear movement mechanism 322 may be mounted on the vertical movement mechanism 323 so that it can be raised and lowered, and the vertical movement mechanism 323 may be mounted on the left-right movement mechanism 321 so that it can move back and forth.

[0058] The left-right movement mechanism 321 may be expressed as a reciprocating mechanism, or may be expressed as a loading / unloading mechanism left-right movement mechanism, a loading / unloading mechanism reciprocating mechanism, or the like to distinguish it from other mechanisms. The forward / backward movement mechanism 322 may be expressed as an advancing / retracting mechanism, or, to distinguish it from other mechanisms, may be expressed as a loading / unloading mechanism forward / backward movement mechanism, a loading / unloading mechanism advancing / retracting mechanism, etc. (Note that the expressions "reciprocating" and "advancing / retracting" are used for the purpose of distinction and are interchangeable.) The vertical movement mechanism 323 may be expressed as a lifting mechanism, or may be expressed as a loading / unloading mechanism vertical movement mechanism, a loading / unloading mechanism lifting mechanism, or the like to distinguish it from other mechanisms. Furthermore, since the rotation mechanism 324 changes the attitude / orientation of the loading / unloading mechanism 31, it may be referred to as an attitude change mechanism, or, to distinguish it from other mechanisms, it may be referred to as an loading / unloading mechanism rotation mechanism, an loading / unloading mechanism attitude change mechanism, etc. All of the above-mentioned operations are included in the broad definition of movement, and the above-mentioned mechanisms 321-324 may simply be referred to as movement mechanisms. In this case, they may be given terms such as "first" and "second" to distinguish them from one another; for example, mechanisms 321-324 may be referred to as first to fourth movement mechanisms, respectively. Alternatively, the above-mentioned mechanisms 321-324 may be referred to as carry-in / out mechanism movement mechanisms to distinguish them from other mechanisms, and in this case, they may be given terms such as "first" and "second."

[0059] 10(a) and 10(b) are perspective views showing the driving mode of the loading / unloading mechanism 31. In the loading / unloading mechanism 31, in this embodiment, the fork 311 can move forward and backward in one direction, and Fig. 10(a) shows the fork 311 in an advanced state, and Fig. 10(b) shows the fork 311 in a retracted state. As described above, the conveyor 312 has three rows of conveying rollers, and a pair of forks 311 is provided between each row of conveying rollers. In other words, the conveyor 312 has three rows of conveying rollers spaced apart in a plane direction perpendicular to the conveying direction, and a fork 311 is provided between each of the multiple roller rows.

[0060] In this embodiment, a row of conveying rollers consisting of multiple conveying rollers 312a, a row of conveying rollers consisting of multiple conveying rollers 312c, and a row of conveying rollers consisting of multiple conveying rollers 312b are arranged in this order in a plane direction perpendicular to the conveying direction. One of the pair of forks 311 is arranged between the row of conveying rollers consisting of multiple conveying rollers 312a and the row of conveying rollers consisting of multiple conveying rollers 312c. The other of the pair of forks 311 is arranged between the row of conveying rollers consisting of multiple conveying rollers 312c and the row of conveying rollers consisting of multiple conveying rollers 312b. Here, the carry-in / out mechanism 31 may also be referred to as a carry-in / out device.

[0061] The plurality of transport rollers 312a, 312b, and 312c are each made up of a roller section that supports and transports the substrate SB, and a sprocket section that rotates integrally with the roller section. The sprocket sections of the plurality of transport rollers 312a, 312b, and 312c are connected by a belt (not shown) so that their rotations are interlocked. Each of the plurality of conveying rollers 312 a , 312 b , and 312 c is connected to a shaft 3121 . A power source 3122 is connected to the shaft 3121, and the shaft 3121 is rotated by the power of the power source 3122. As the shaft 3121 rotates, one of the transport rollers 312a rotates, and the other transport roller 312a rotates via the belt. The same applies to the transport rollers 312b and 312c. The substrate SB is transported by the rotation of the transport rollers 312a, 312b, and 312c.

[0062] 11 is a perspective view showing the detailed structure of the carry-in / out mechanism 31. In addition to including forks 311 and conveyors 312, the carry-in / out mechanism 31 further includes a support plate 3130, a fork advance / retract mechanism 313, and a conveyor lifting / lowering mechanism 314. The fork advance / retract mechanism 313 includes a fork support member 3131, a guide mechanism 3132, a belt 3133, and a power source 3134. The conveyor lifting / lowering mechanism 314 includes a connecting plate 3140, a drive unit 3141, support plates 3142a to 3142c, and a guide member 3143. The fork advance / retract mechanism 313 and the conveyor lifting / lowering mechanism 314 are provided on the support plate 3130.

[0063] 16 is a perspective view showing the detailed structure of the fork advancing and retreating mechanism 313. The following description will be made with reference to FIGS.

[0064] In this embodiment, a pair of guide mechanisms 3132 are provided on the support plate 3130 to extend in one direction. The belt 3133 is an endless traveling belt that extends between the pair of guide mechanisms 3132 in parallel with the guide mechanisms 3132 and is rotatable based on the power of the power source 3134. The fork support member 3131 has a pair of support portions 3131a that support the base end (one end) of the plate-shaped fork 311 so that the fork 311 is in a horizontal position, a holding portion 3131b that is held by the pair of guide mechanisms 3132 so as to be able to reciprocate along the guide mechanisms 3132, a plate portion 3131c that connects the support portions 3131a and the holding portions 3131b, and a connecting portion 3131d that is connected to the belt 3133. Therefore, the fork support member 3131 is supported so as to be able to reciprocate along the guide mechanism 3132 and moves along the guide mechanism 3132 by the rotation of the belt 3133. The pair of forks 311 also move along the guide mechanism 3132 along with the fork support member 3131. Here, the fork support member 3131 supports the base ends of the forks 311, and therefore may be referred to as a base end support member. In this embodiment, the support portion 3131a is a plate-like member having a predetermined width in one direction, and supports the forks 311 from below so as to overlap with the base ends (one ends) of the forks 311 when viewed vertically.

[0065] As mentioned above, since the loading / unloading mechanism 31 can be rotated by the rotation mechanism 324, the fork 311 can be moved in any horizontal direction, and the forward and backward movement of the fork 311 here corresponds to the withdrawal and storage of the fork 311 (see Figures 10(a) to 10(b)).

[0066] 17(a) and 17(b) are side views showing the detailed structure of the conveyor lifting mechanism 314. Fig. 17(a) shows the state when the conveyor 312 is lowered, and Fig. 17(b) shows the state when the conveyor 312 is raised. The following description will be made with reference to Figs. 11 and 17.

[0067] The guide member 3143 is provided on the support plate 3130. The support plates 3142a and 3142b are supported by a plurality of guide members 3143 that respectively guide the support plates 3142a and 3142b so that they can move up and down. The support plate 3142c is disposed between the support plates 3142a and 3142b, and the support plates 3142a to 3142c are connected to the connecting plate 3140. In other words, the support plates 3142a to 3142c and the connecting plate 3140 are supported so that they can move up and down relative to the support plate 3130. In this embodiment, the connecting member 3140 forms a horizontal plane together with the support member 3130, but this is not limited thereto, and the connecting member 3140 may be located in a position and have a shape that does not interfere with the forward and backward movement of the fork 311 by the fork forward and backward movement mechanism 313 described above. A pair of drive parts 3141 are provided, each of which is connected (engaged) with a support plate 3142a and 3142b.

[0068] The drive unit 3141 has a rotary shaft and includes a power source 3141a that generates power, a cam member 3141b attached to the rotary shaft, and cam groove members 3141c attached to each of the support plate members 3142a and 3142b, which engage with the cam member 3141b. In this embodiment, the cam member 3141b is eccentrically positioned relative to the center CL of the rotary shaft, and the cam groove member 3141c engages with the cam member 3141b and has a cam groove extending horizontally. Therefore, when the cam member 3141b is rotated by the drive unit 3141, the cam groove member 3141c rises and falls, and accordingly, the support plate members 3142a and 3142b on which the cam groove member 3141c is installed rise and fall. Furthermore, as the support plate members 3142a and 3142b rise and fall, the support plate member 3142c, which is connected by the connecting member 3140, also rises and falls.

[0069] The support plates 3142a, 3142b, and 3142c rotatably support the plurality of conveying rollers 312a, 312b, and 312c, respectively. In this embodiment, a cam mechanism is used for the drive unit, but this is not limited to this, and for example, a cylinder or the like may be used for the drive unit.

[0070] 12 is a side view showing the detailed structure of the carry-in / out mechanism 31. As described above, the support plates 3142a, 3142b, and 3142c that support the plurality of transport rollers 312a, 312b, and 312c can be raised and lowered relative to the support plate 3130 based on the power of the drive unit 3141. That is, the conveyor 312 can be raised and lowered relative to the support plate 3130 based on the power of the drive unit 3141. Here, the fork advancement / retraction mechanism 313 only moves the fork 311 forward and backward, and the fork 311 does not move up and down relative to the support plate 3130. Therefore, the transport surface of the conveyor 312 can move between a first position P1 below a position P0 of the upper surface of the fork 311 (the support surface that supports the substrate SB) and a second position P2 above the position P0. For example, the substrate SB on the fork 311 is transferred from the fork 311 to the conveyor 312 when the conveyor 312 rises from position P1 to position P2. Also, the substrate SB on the conveyor 312 at position P2 is transferred from the conveyor 312 to the fork 311 when the conveyor 312 descends from position P2 to position P1. That is, the conveyor lifting mechanism 314 raises and lowers the conveyor 312, thereby transferring the substrate SB between the fork 311 and the conveyor 312. The conveyor lifting mechanism 314 may be simply referred to as a lifting mechanism.

[0071] According to this configuration, the substrate SB is transferred between the fork 311 and the conveyor 312 by raising and lowering the conveyor 312 relative to the fork 311, and the fork 311 only moves forward and backward by the fork advancing and retreating mechanism 313. When the substrate SB is transferred between the fork 311 and the conveyor 312, particularly when the substrate SB is transferred from the conveyor 312 to the fork 311, the conveyor 312 moves down to cause the fork 311 to support the substrate SB, so the fork 311 is stopped. Therefore, the magnitude of vibrations generated in the fork 311 when the substrate SB is transferred can be reduced, and the waiting time until the vibrations that affect the start of the forward movement of the fork 311 subsides is shortened, making it possible to improve the efficiency of loading and unloading and the transport of the substrate SB.

[0072] In addition, the power lines and signal lines (not shown) connected to each power source exemplified in this embodiment only need to be arranged in a manner that allows the corresponding elements to move back and forth, forward and backward, etc., and are held and arranged, for example, by a cable carrier or the like.

[0073] <About board loading and unloading> The loading and unloading of the substrate SB by the loading and unloading mechanism 31 is performed by the fork advancing and retracting mechanism 313 moving the fork 311 forward and backward (see Figures 10(a) to 10(b)), and at that time, the substrate SB may be moved forward and backward by the forward and backward movement mechanism 322 to bring it closer to the container body 700.

[0074] The substrate SB can also be carried in and out by transport by the conveyor 312, which may involve advance and retreat by the front-rear movement mechanism 322. For example, although not shown in the present embodiment, the carry-in / out mechanism 31 may also transfer the substrate SB to another working unit equipped with a predetermined board receiving portion. In such a case, the carry-in / out mechanism 31 can use the front-rear movement mechanism 322 to move the fork 311 and the conveyor 312 close to the board receiving portion of the other working unit, and carry the substrate SB out to the other working unit by transport by the conveyor 312.

[0075] 13(a) to 13(d) are schematic top views showing some examples of how the substrate SB is carried in and out or transported.

[0076] 13(a), an operation unit 4 that performs a predetermined operation (e.g., a cleaning operation) on a substrate SB is arranged as the other operation unit on the rear side of the operation apparatus 1. In this example, another loading / unloading port may be provided on the rear side of the operation apparatus 1, and another storage container supply mechanism 2 may be added as needed. According to the configuration of the transport operation unit 3 of this embodiment, as described above, the carry-in / out mechanism 31 is movable in all of the X, Y, and Z directions and can change its posture by rotation. Therefore, the substrate SB taken out from the container main body 700A via the operating device 1 is carried out to another operating unit 4 via the path of arrow A131, and after operation is performed in the operating unit 4, it can be stored in another container main body 700B from the operating unit 4 via the operating device 1 via a path different from that of arrow A131 (see arrow A132). Therefore, according to this embodiment, the substrate SB can be managed separately before and after operation by the operating unit 4. Furthermore, the removal of the substrate SB during this example (transportation to the working unit 4 and transport to the container body 700B) may be performed by the advance and retreat of the fork 311, by transport by the conveyor 312, or by a combination of these.

[0077] 13(b), the substrate SB is carried out at the same position as the unloading of the substrate SB into the working unit 4 and the loading of the substrate SB from the working unit 4. According to the configuration of this embodiment, the substrate SB taken out of the container body 700A and carried out to the working unit 4 (see arrow A133) can be stored in another container body 700B (see arrow A134) after being processed by the working unit 4. 13(c), the working unit 4 is disposed on the side of the working apparatus 1. In this example, another loading / unloading port may be provided on the side of the working apparatus 1, and another storage container supply mechanism 2 may be added as necessary. According to the configuration of this embodiment, the substrate SB taken out of the container body 700A and carried out to the working unit 4 (see arrow A135) can be stored in another container body 700B (see arrow A136) after being worked on by the working unit 4.

[0078] 13(d), the substrate SB is simply transferred from the container body 700A to the container body 700B without any operation by the operation unit 4. According to the configuration of this embodiment, the substrate SB taken out from the container body 700A can be stored as is in another container body 700B (see arrow A137).

[0079] In any of the cases of Figures 13(b) to 13(d), similar to Figure 13(a), the substrate SB may be transported by the advance and retreat of the fork 311, or by transport by the conveyor 312, or by a combination of these.

[0080] As described above, the configuration of this embodiment makes it possible to load / unload or transport the substrate SB in a variety of ways, and to diversify the arrangement of the working unit 4. Therefore, this embodiment can be said to be advantageous in diversifying the work content.

[0081] Second Embodiment In the first embodiment described above, an example of the configuration of the transport work unit 3 is shown in which the loading / unloading mechanism 31 can be moved in any of the X, Y, and Z directions and its posture can be changed by rotation, but the configuration is not limited to this.

[0082] 14 is a perspective view of a transport operation unit 3 according to the second embodiment, with exterior panel 10 not shown. In this embodiment, in addition to carry-in / out mechanism 31, transport operation unit 3 is equipped with left-right movement mechanism 321R, front-rear movement mechanism 322R, up-down movement mechanism 323R, and rotation mechanism 324R. Mechanisms 321R to 324R are configured to be able to achieve the same functions as mechanisms 321 to 324 described above, respectively, and are distinguished here by adding an "R" to the end of their reference numerals (the same applies to the individual elements of mechanisms 321R to 324R, such as support plate member 3230R).

[0083] FIG. 15 shows a structure in which the loading / unloading mechanism 31 is separated from the front-rear moving mechanism 322R and the rotating mechanism 324R.

[0084] In the structure of this embodiment, the loading / unloading mechanism 31 is rotatably supported by a rotation mechanism 324R, the rotation mechanism 324R is mounted on a front-rear movement mechanism 322R so that it can move back and forth, the front-rear movement mechanism 322R is supported on a vertical movement mechanism 323R so that it can rise and fall, and the vertical movement mechanism 323R is mounted on a left-right movement mechanism 321R so that it can reciprocate.

[0085] The structure of this embodiment differs from the first embodiment described above in that the rotation mechanism 324R is mounted on the front-rear movement mechanism 322R so that it can move back and forth, the front-rear movement mechanism 322R is supported on the up-down movement mechanism 323R so that it can rise and fall, and the up-down movement mechanism 323R is mounted on the left-right movement mechanism 321R so that it can reciprocate.

[0086] Furthermore, in this embodiment, the configuration of the vertical movement mechanism 323R is different from that of the first embodiment. In this embodiment, in the vertical movement mechanism 323R, the support plate 3230R is provided movably along an elevation guide member 3233R extending in the Z direction alongside the ball screw shaft 3231R, thereby enabling the loading / unloading mechanism 31 to be raised and lowered. The vertical movement mechanism 323R is configured in a columnar shape and disposed on the -X side of the loading / unloading mechanism 31; that is, it is not disposed on the +X side of the loading / unloading mechanism 31. Therefore, the loading / unloading mechanism 31 can load and unload the substrate SB on the side opposite to the vertical movement mechanism 323R (i.e., the +X side). With this configuration, loading and unloading of the substrate SB can be achieved even in the example of FIG. 13(c). With the configuration of this embodiment, loading and unloading operations can be performed at a lower position than in the first embodiment.

[0087] <Program> As described above, the program executed by the CPU of the control unit 9 when controlling the entire system of the working apparatus 1 may be stored as a computer program on a computer-readable storage medium. Alternatively, the working apparatus 1 may be equipped with a computer program product that realizes the same function when the program is executed by a processor.

[0088] <Other> In the above explanation, for ease of understanding, each element is shown with a name related to its function, but each element is not limited to having the content described in the embodiment as its main function, and may have that function as an auxiliary function.

[0089] In the above description, for ease of understanding, each element is shown by a name related to its function, but each element is not limited to having the content described in the embodiment as its main function, but may have that function as an auxiliary function. Therefore, each element is not strictly limited to the expression, and the expression can be replaced with another equivalent expression. In the same vein, expressions such as "apparatus," "unit," "mechanism," "member," "portion," "component, piece," "structure," "assembly," "means," etc. may be interchangeable or omitted.

[0090] Furthermore, two or more elements having similar functions may be distinguished by using expressions such as "first" and "second," but these expressions are not intended to set priorities, and their order may be interchangeable. For example, the X direction may be the first direction and the Y direction may be the second direction, or the Y direction may be the first direction and the X direction may be the second direction (the same applies to the Z direction).

[0091] Furthermore, two or more elements exemplified as selectable in the embodiments are not strictly limited to the examples and may be arbitrarily combined, for example, each of the two or more exemplified elements may be selected additionally or alternatively. As an example, when two elements A and B can be arbitrarily combined, they may be expressed as "A and / or B" or "at least one of A and B" to indicate either A only, B only, or both A and B.

[0092] Summary of the embodiment Some features exemplified in the embodiments are as follows: [1] A working device for carrying a substrate into and out of a storage container capable of storing the substrate, The storage container includes: a container body having an opening for carrying in and out the substrate; a lid portion that is detachably attached to the container body so as to close the opening, the lid portion having a protrusion that protrudes in a horizontal direction; Equipped with The working device is an outer wall defining an area including a space through which the substrate is transferred to form a working chamber; a container supply mechanism on which the container is placed; Equipped with The container supply mechanism includes: a housing that forms at least a part of the outer wall and that forms a loading / unloading opening through which the substrate is loaded into and exits the working chamber; a shielding door capable of shielding the loading / unloading opening; a shielding door moving mechanism for moving the shielding door; Equipped with The shielding door is a door body having a hole through which the protrusion can be inserted into the work chamber; a protrusion holding mechanism provided on the working chamber side of the door body and holding the protrusion; a cover member provided on the working chamber side of the door body to cover the hole and the protrusion holding mechanism; Equipped with the protrusion holding mechanism holds the protrusion inserted into the hole to hold the lid; The shielding door moving mechanism includes: The shielding door is moved in a first direction together with the lid portion held by the protrusion holding mechanism to be pulled into the working chamber, thereby removing the lid portion from the container body; The shielding door is moved in a second direction perpendicular to the first direction to connect the loading / unloading opening with the opening, thereby enabling the substrate to be loaded and unloaded from the storage container. A working device characterized by: [2] The storage container includes: a first engagement portion provided at the bottom; a second engagement portion provided on the upper portion; Equipped with the storage container supply mechanism further includes a positioning mechanism for positioning the storage container; The positioning mechanism includes: a first positioning portion that engages with the first engaging portion; a first positioning unit moving mechanism that moves the first positioning unit in a vertical direction; a second positioning portion that engages with the second engaging portion; a second positioning unit moving mechanism that moves the second positioning unit in a vertical direction; Equipped with The working device according to [1], characterized in that [3] the storage container has a first engagement portion provided at a lower portion, the storage container supply mechanism further includes a positioning mechanism for positioning the storage container; The positioning mechanism includes: a first positioning portion that engages with the first engaging portion; a first positioning unit moving mechanism that moves the first positioning unit in a vertical direction; a third positioning unit moving mechanism that moves the first positioning unit and the first positioning unit moving mechanism in the first direction; Equipped with The working device according to [1], characterized in that [4] The shielding door moving mechanism includes: a first moving mechanism that moves the shielding door in the first direction to retract it into the working chamber; a second moving mechanism that moves the shielding door in the second direction to open or close it; Equipped with The working device according to [1], characterized in that [5] The first moving mechanism includes: a first guide member that holds the shielding door and guides it movably in the first direction; a first drive unit that moves the shielding door along the first guide member in the first direction; Equipped with The second moving mechanism includes: a second guide member that holds the shielding door and the first moving mechanism and guides them movably in the second direction; a second drive unit that moves the shielding door and the first moving mechanism in the second direction along the second guide member; Equipped with At least one of the first guide member, the first drive unit, the second guide member, and the second drive unit is located outward from the working chamber. The working device according to [4], characterized in that [6] Further comprising a control unit, The control unit controlling the shielding door so that the protrusion of the lid of the storage container positioned at a predetermined position is held by the protrusion holding mechanism; The shielding door is moved in a first direction together with the lid portion, the protrusion of which is held by the protrusion holding mechanism, to be pulled into the working chamber, thereby removing the lid portion from the container body, and further the shielding door is moved in a second direction perpendicular to the first direction to connect the loading / unloading port and the opening. The shielding door moving mechanism is controlled so as to do this. The working device according to [1], characterized in that [7] The storage container includes: a first engagement portion provided at the bottom; a second engagement portion provided on the upper portion; Equipped with The container supply mechanism includes: a first positioning portion that engages with the first engaging portion; a first positioning unit moving mechanism that moves the first positioning unit in a vertical direction; a second positioning portion that engages with the second engaging portion; a second positioning unit moving mechanism that moves the second positioning unit in a vertical direction; Equipped with The control unit controlling the first positioning unit moving mechanism to raise the first positioning unit and engage it with the first engaging unit; controlling the second positioning unit moving mechanism to lower the first positioning unit and engage it with the first engaging unit; Positioning the container at a predetermined location The working device according to [6] is characterized in that [8] 1. A method for controlling a working device for carrying a substrate into and out of a storage container capable of storing the substrate, comprising: The storage container includes: a container body having an opening for carrying in and out the substrate; a lid portion that is detachably attached to the container body so as to close the opening, the lid portion having a protrusion that protrudes in a horizontal direction; Equipped with The working device is an outer wall that defines a region including a space into which the substrate is carried and forms a working chamber; a storage container supply mechanism that connects the opening with a loading / unloading port through which the substrate is loaded and unloaded, thereby enabling the substrate to be loaded and unloaded from the storage container; Equipped with The container supply mechanism includes: a housing that forms at least a part of the outer wall and that forms the loading / unloading port; a shielding door capable of shielding the loading / unloading opening; a shielding door moving mechanism for moving the shielding door; Equipped with The shielding door is a door body provided with a hole through which the protrusion can be inserted; a protrusion holding mechanism provided on the working chamber side of the door body and holding the protrusion inserted into the hole; a cover member provided on the working chamber side of the door body to cover the hole and the protrusion holding mechanism; Equipped with The control method includes: positioning the container at a predetermined location; holding the protrusion of the lid of the positioned storage container by the protrusion holding mechanism; moving the shielding door together with the lid portion, the protrusion of which is held by the protrusion holding mechanism, in a first direction to pull it into the working chamber, thereby removing the lid portion from the container body; moving the shielding door in a second direction perpendicular to the first direction to communicate the loading / unloading opening with the opening; have A control method comprising: [9] A computer-readable storage medium on which a computer program is stored, When the computer program is executed by a processor, each step of the control method described in [8] is realized. A computer-readable storage medium comprising:

[10] A computer program product comprising a computer program, When the computer program is executed by a processor, each step of the control method described in [8] is realized. 1. A computer program product comprising:

[0093] The invention is not limited to the above-described embodiment, and various modifications and variations are possible within the scope of the gist of the invention. [Explanation of symbols]

[0094] 1: working device, 2: storage container supply mechanism, 3: transport work unit, 7: storage container, 9: control unit, 201: loading / unloading opening, 221: shielding door, 221B: door body, 222: protrusion holding mechanism, 223: cover member, 231: shielding door moving mechanism, 31: loading / unloading mechanism, 311: fork (substrate support member), 312: conveyor (substrate transport mechanism), 313: fork advance / retract mechanism, 314: conveyor lifting mechanism.

Claims

1. A storage container opening and closing device for opening and closing a lid of a storage container that is capable of storing substrates, the storage container comprising: a container body that forms an opening for loading and unloading the substrate; and a lid that is detachably attached to the container body so as to close the opening, the lid having a protrusion that protrudes horizontally, The storage container opening and closing device is a housing that penetrates in a first direction and forms a passage opening through which the substrate passes; a shielding door capable of shielding the passage opening; a shielding door moving mechanism for moving the shielding door; Equipped with The shielding door is a door body having a hole through which the protrusion can be inserted on one side in the first direction; a protrusion holding mechanism provided on one side of the door body in the first direction and holding the protrusion; a cover member provided on one side of the door body in the first direction, the cover member covering the hole and the protrusion holding mechanism; Equipped with the protrusion holding mechanism holds the protrusion inserted into the hole to hold the lid; The shielding door moving mechanism includes: The shielding door is moved together with the lid portion held by the protrusion holding mechanism in the first direction and a second direction perpendicular to the first direction to remove the lid portion from the container body, thereby connecting the passage opening and the opening. A storage container opening and closing device characterized by the above.

2. The storage container comprises: a first engagement portion provided at the bottom; a second engagement portion provided on the upper portion; Equipped with The storage container opening / closing device further includes a positioning mechanism for positioning the storage container, The positioning mechanism includes: Located on the other side of the door body in the first direction, a first positioning portion that engages with the first engaging portion; a first positioning unit moving mechanism that moves the first positioning unit in a vertical direction; a second positioning portion that engages with the second engaging portion; a second positioning unit moving mechanism that moves the second positioning unit in a vertical direction; Equipped with 2. The storage container opening and closing device according to claim 1.

3. The storage container has a first engagement portion provided at the bottom, The storage container opening / closing device further includes a positioning mechanism for positioning the storage container, The positioning mechanism includes: Located on the other side of the door body in the first direction, a first positioning portion that engages with the first engaging portion; a first positioning unit moving mechanism that moves the first positioning unit in a vertical direction; a third positioning unit moving mechanism that moves the first positioning unit and the first positioning unit moving mechanism in the first direction; Equipped with 2. The storage container opening and closing device according to claim 1.

4. The shielding door moving mechanism is a first moving mechanism that moves the shielding door in the first direction; a second moving mechanism that moves the shielding door in the second direction; Equipped with The first moving mechanism includes: a first guide member that holds the shielding door and guides it movably in the first direction; a first drive unit that moves the shielding door along the first guide member in the first direction; Equipped with The second moving mechanism includes: a second guide member that holds the shielding door and the first moving mechanism and guides them movably in the second direction; a second drive unit that moves the shielding door and the first moving mechanism in the second direction along the second guide member; Equipped with At least one of the first guide member, the first drive unit, the second guide member, and the second drive unit is located on the other side of the door body in the first direction.

2. The storage container opening and closing device according to claim 1.

5. Further comprising a control unit, The control unit controlling the shielding door so that the protrusion of the lid of the storage container positioned at a predetermined position is held by the protrusion holding mechanism; The shielding door moving mechanism is controlled so as to move the shielding door together with the lid portion, the protrusion of which is held by the protrusion holding mechanism, in the first direction and the second direction to remove the lid portion from the container body and to connect the passage opening and the opening.

2. The storage container opening and closing device according to claim 1.

6. The storage container comprises: a first engagement portion provided at the bottom; a second engagement portion provided on the upper portion; Equipped with The storage container opening and closing device is a first positioning portion that engages with the first engaging portion; a first positioning unit moving mechanism that moves the first positioning unit in a vertical direction; a second positioning portion that engages with the second engaging portion; a second positioning unit moving mechanism that moves the second positioning unit in a vertical direction; Equipped with The control unit controlling the first positioning portion moving mechanism to raise the first positioning portion and engage it with the first engaging portion; controlling the second positioning unit moving mechanism to lower the second positioning unit and engage it with the second engaging unit; Positioning the container at a predetermined location 6. The storage container opening and closing device according to claim 5.

7. A work device for carrying a substrate into and out of a storage container capable of storing the substrate, comprising: an outer wall defining an area including a space through which the substrate is transferred to form a working chamber; A storage container opening / closing device according to any one of claims 1 to 6; a transport operation unit provided in the work chamber, which removes the substrate from the storage container placed on the storage container opening / closing device, or stores the substrate in the storage container; Equipped with The storage container opening and closing device is provided on a part of the outer wall. A working device characterized by:

Images