X-ray spectrometer and X-ray spectrometer system

Abstract

To provide an X-ray spectrometer for suppressing contamination of a sample while avoiding complication of a configuration and complicated adjustment work, and an X-ray spectroscopy system.SOLUTION: An X-ray spectrometer has a diaphragm member that is arranged adjacent to a sample stage on which a sample is placed to adjust an amount of X-rays condensed by a condenser, and a holding member for holding the diaphragm member and cooling the diaphragm member by cooling media supplied from the outside. The diaphragm member is formed in a plate shape by a passage portion in which an aperture that is an opening through which X-rays pass is formed, and a holding portion held by the holding member.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an X-ray spectrometer and an X-ray spectroscopic system that are configured to suppress contamination of a measurement sample. [Background technology]

[0002] Reducing carbon dioxide emissions is considered essential to realizing a sustainable society, and research and development of clean energy devices and innovative materials is being actively conducted. In parallel with the development of these devices and materials, cutting-edge analytical technologies using synchrotron radiation X-rays are also developing, and research is being conducted on absorption, emission, photoelectron, and other spectroscopy methods using hard and soft X-rays. Among these, microspectroscopy, which allows operando analysis of devices in their operating state and state analysis using spatial information indicating the analysis location, is gaining significant importance.

[0003] In X-ray microscopes and electron microscopes, a technique called a cold trap is generally used as a countermeasure against contamination of the sample surface by the beam (see, for example, Patent Document 1). Patent Document 1 discloses a technique in which a metal cold trap plate placed near the objective lens is cooled by a cooler, causing gas molecules to be adsorbed onto the cold trap plate. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2001-110346 Summary of the Invention [Problem to be solved by the invention]

[0005] However, the method described in Patent Document 1 requires the installation of a new cold trap plate, and the installation also requires the adjustment of the peripheral configuration and the position relative to the sample. This leads to a complex configuration and requires tedious adjustment work. In particular, when the distance from the sample increases, sample contamination cannot be sufficiently suppressed.

[0006] The present invention has been made to solve the above-mentioned problems, and aims to provide an X-ray microspectroscopy system that suppresses sample contamination while avoiding complex configurations and tedious adjustment work. [Means for solving the problem]

[0007] An X-ray spectrometer according to one aspect of the present invention is Placement The X-ray condenser has an aperture member that is arranged adjacent to the sample stage and adjusts the amount of X-rays condensed by the condenser, and a holding member that holds the aperture member and cools it with a cooling medium supplied from the outside.The aperture member is formed in a plate shape and includes a passing portion in which an aperture, which is an opening that allows X-rays to pass through, is formed, and a holding portion that is held by the holding member.

[0008] An X-ray spectrometer according to one aspect of the present invention is Placement The microscope has an aperture member that is arranged adjacent to the sample stage and adjusts the amount of X-rays focused by the collector, and a holding member that holds the aperture member. The aperture member is formed in a plate shape with a passing section in which an aperture that is an opening that allows X-rays to pass is formed, and a holding section that is held by the holding member. The holding section has a circulation section where a cooling medium supplied from a cooling device flows in and out.

[0009] An X-ray spectrometer according to one aspect of the present invention is PlacementThe aperture member is arranged adjacent to the sample stage and adjusts the amount of X-rays focused by the collector, and a holding unit rotatably holds the aperture member and cools it with a cooling medium supplied from a cooling device. The aperture member has a disk-shaped blade portion provided with a plurality of apertures, and a rotation shaft connected to the center of the blade portion.

[0010] An X-ray spectrometer according to one aspect of the present invention adjusts the amount of X-rays collected by a collector, and includes a first aperture member including a disk-shaped blade portion provided with apertures that are openings, and a second aperture member downstream of the first aperture member in the X-ray direction, where a sample S is Placement The apparatus has a second aperture member that is arranged adjacent to the sample stage and has an aperture that is an opening that allows X-rays to pass through, a first holding unit that rotatably holds the aperture member and cools the aperture member 130 with a cooling medium supplied from the outside, and a second holding unit that holds the second aperture member and cools the second aperture member with a cooling medium supplied from the outside.

[0011] An X-ray spectroscopy system according to one aspect of the present invention includes a light source that emits X-rays, a spectroscopy processing device that adjusts the X-rays emitted from the light source to X-rays with a wavelength and energy suitable for input to a collector, a cooling device that is a supply source of a cooling medium, and the X-ray spectroscopy device according to any one of claims 1 to 9. [Effects of the Invention]

[0012] The present invention relates to a method for producing a sample. Placement The aperture member is arranged adjacent to the sample stage, and a holding member or holding unit that holds the aperture member is arranged, and the aperture member is cooled by a cooling medium supplied from the outside. In other words, the aperture member arranged near the sample stage functions as a cold trap plate, so contamination of the sample can be suppressed while avoiding a complicated configuration and troublesome adjustment work. [Brief explanation of the drawings]

[0013] [Figure 1] 1 is a configuration diagram illustrating a schematic example of an X-ray spectrometer and an X-ray spectroscopic system according to a first embodiment of the present invention. [Figure 2] FIG. 2 is an explanatory diagram schematically illustrating an example of the configuration of the detector in FIG. [Figure 3] FIG. 2 is an explanatory diagram schematically illustrating another configuration example of the detector in FIG. [Figure 4] 2 is an explanatory diagram schematically illustrating an example of the configuration of the holding unit in FIG. 1. FIG. [Figure 5] 1. FIG. 4 is an explanatory diagram schematically showing another example of the configuration of the holding unit of FIG. [Figure 6] 2 is a block diagram illustrating a functional configuration of a management device in FIG. 1. FIG. [Figure 7] FIG. 10 is a configuration diagram illustrating a holding unit of an X-ray spectrometer according to Modification 1A of Embodiment 1 of the present invention. [Figure 8] FIG. 10 is a configuration diagram illustrating a holding unit of an X-ray spectrometer according to Modification 1B of Embodiment 1 of the present invention. [Figure 9] FIG. 10 is a configuration diagram illustrating a schematic example of an X-ray spectrometer and an X-ray spectroscopic system according to a second embodiment of the present invention. [Figure 10] 10 is an explanatory view illustrating an inner tube and its surrounding configuration in the holding unit of FIG. 9. FIG. [Figure 11] 10 is an explanatory diagram showing a configuration example of the holding unit of FIG. 9. FIG. [Figure 12] 11 is an explanatory diagram showing a configuration example of the seal portion of FIG. 10, partially including a cross section. [Figure 13] 10 is a block diagram illustrating a functional configuration of the management device of FIG. 9. [Figure 14] FIG. 10 is a plan view showing an example of an aperture provided in a blade portion according to a modified example of the second embodiment of the present invention. [Figure 15] 15 is a schematic cross-sectional view illustrating a cross section taken along line AA in FIG. 14. [Figure 16] 15 is an explanatory diagram illustrating a schematic example of the aperture and its surroundings in FIG. 14. FIG. [Figure 17]FIG. 10 is a schematic cross-sectional view showing another example of an aperture according to a modified example of the second embodiment of the present invention. [Figure 18] FIG. 10 is a schematic cross-sectional view showing another example of the configuration of the aperture according to the modified example of the second embodiment of the present invention. [Figure 19] FIG. 10 is a schematic cross-sectional view showing another example of the configuration of the aperture according to the modified example of the second embodiment of the present invention. [Figure 20] FIG. 10 is a configuration diagram illustrating a schematic example of an X-ray spectrometer and an X-ray spectroscopic system according to a third embodiment of the present invention. [Figure 21] 21 is a block diagram illustrating a functional configuration of the management device of FIG. 20. DETAILED DESCRIPTION OF THE INVENTION

[0014] Embodiment 1 An example of the overall configuration of an X-ray spectrometer 10 and an X-ray spectroscopic system 100 according to the first embodiment of the present invention will be described with reference to Figures 1 to 3. The positions, sizes, shapes, etc. of the components of the X-ray spectroscopic system 100 shown in Figures 1 to 3 are merely examples and can be changed as appropriate depending on the installation environment of the X-ray spectroscopic system 100, the combination of components, etc. The same applies to the following figures. Note that Figures 2 and 3 only show a part of the aperture member 30.

[0015] The X-ray spectroscopy system 100 includes a light source 1 that includes an X-ray tube and emits X-rays, and a spectroscopic processing device 2 that focuses the X-rays emitted from the light source 1 and adjusts them to X-rays with a wavelength and energy used for spectroscopic measurement. The X-ray spectroscopy system 100 also includes an X-ray spectrometer 10 that focuses the X-rays output from the spectroscopic processing device 2 and irradiates the sample S, a cooling device 70 that is a supply source of a cooling medium, and a management device 80 that controls and manages the operation of various actuators within the system.

[0016] The spectroscopic processing device 2 is configured to include at least one of, for example, a crystal monochromator, a diffraction grating monochromator, and a slit. The configuration of the spectroscopic processing device 2 is determined depending on the configuration of the collector 20 in the X-ray spectrometer 10. The cooling device 70 supplies a cooling medium to the holding unit 40. The cooling device 70 is configured to supply liquid nitrogen or a cooling gas as the cooling medium. The cooling device 70 is equipped with a first medium pipe 43a for supplying the cooling medium to the holding unit 40 and a second medium pipe 43b for recovering the cooling medium that has passed through the holding unit 40 into the cooling device 70. The first medium pipe 43a and the second medium pipe 43b are configured, for example, by flexible hoses.

[0017] The X-ray spectrometer 10 has a condenser 20, an aperture member 30, a holding unit 40, a detector 50, a sample stage 55, and a drive mechanism 60. In the X-ray spectroscopic system 100 of FIG. 1, the condenser 20, the aperture member 30, the holding unit 40, the detector 50, and the sample stage 55 are arranged inside a vacuum vessel 5. The sample stage 55 is a stage on which a sample S to be observed is mounted. Placement The sample stage 55 is configured to be movable at a fine pitch in three perpendicular directions (so-called X, Y, and Z directions) by being driven, for example, by a piezoelectric element. In FIG. 1, the traveling direction of the X-rays is the positive direction of the X-axis, and the Z direction corresponds to the up-down direction.

[0018] The collector 20 focuses the X-rays and is composed of a focusing mirror such as an ellipsoidal mirror or an X-ray ring focusing mirror. The collector 20 may be a Fresnel zone plate (FZP) or a capillary mirror. The collector 20 is held by, for example, a holding stage (not shown).

[0019] The diaphragm member 30 is provided adjacent to the sample stage 55 and adjusts the amount of light that passes through. The diaphragm member 30 is made of a metal with high thermal conductivity, such as copper, aluminum, or iron. The diaphragm member 30 in the first embodiment has one aperture 3h, which is an opening that allows X-rays to pass through. The diaphragm member 30 is formed in a plate shape by a passing portion 31 in which the aperture 3h, which is an opening that allows X-rays to pass through, is formed, and a holding portion 32 that is held by a holding unit 40. Note that, with the recent advancement of microfabrication technology, it is now possible to form holes on the sub-micrometer scale as the aperture 3h.

[0020] The holding unit 40 holds the diaphragm member 30 and cools the diaphragm member 30 with a cooling medium supplied from the cooling device 70. The holding unit 40 has a holding member 41 that holds the diaphragm member 30. The holding member 41 is formed of a metal with high thermal conductivity, such as copper, aluminum, or stainless steel. The holding member 41 has an engaging portion 41k that engages with the diaphragm member 30. The engaging portion 41k may be configured to cover the entire holding portion 32, or may be configured to cover only a portion of the holding portion 32. The holding unit 40 has a first connecting portion 42a that guides the cooling medium supplied from the cooling device 70 to a circulating portion 41j, and a second connecting portion 42b that guides the cooling medium in the circulating portion 41j to the cooling device 70.

[0021] The holding member 41 is supported by support members 45 arranged both inside and outside the vacuum vessel 5. The support member 45 is arranged between the inside and outside of the vacuum vessel 5 via a seal 48 provided on the outer wall of the vacuum vessel 5. One end of the support member 45 is connected to the holding member 41 and the other end is connected to a drive mechanism 60. The drive mechanism 60 enables the support member 45 to move in three perpendicular directions. The seal 48 seals the connection between the support member 45 and the outer wall of the vacuum vessel 5 so that the inside of the vacuum vessel 5 can be maintained in a vacuum state even when the support member 45 moves. The seal 48 can be a so-called magnetic fluid seal or any of various other well-known configurations. The drive mechanism 60 includes, for example, a piezoelectric element, and finely moves the support member 45 in each direction to achieve fine movement of the holding member 41.

[0022] The detector 50 detects photoelectron beams, fluorescent X-rays, or transmitted X-rays generated when the sample S is irradiated with X-rays that have passed through the aperture member 30. That is, the detector 50 can be configured as a photoelectron spectrometer, an X-ray absorption spectrometer, or an X-ray emission spectrometer used in an arrangement such as that shown in Fig. 2. The detector 50 may also be configured as a transmission absorption spectrometer used in an arrangement such as that shown in Fig. 3.

[0023] Photoelectron spectroscopy measures the energy and density of states (DOS) of electrons in a material by measuring the number and kinetic energy of electrons (photoelectrons) ejected from the material upon irradiation with light. X-ray absorption spectroscopy detects information about the electronic state and local structure of the absorbing atom by energizing core electrons near the element-specific energy (the so-called absorption edge) and causing them to transition to unoccupied electron orbitals according to selection rules. X-ray absorption spectroscopy is based on the fluorescence yield method (total fluorescence yield method or partial fluorescence yield method), which measures fluorescent X-rays emitted from the sample S due to incident X-rays. It also includes the partial electron yield method, which detects electrons emitted from the sample S upon X-ray absorption, and the total electron yield method, which measures the current compensating for the emitted electrons. An example of an X-ray absorption spectroscopy instrument is a silicon drift detector, a type of energy dispersive X-ray detector.

[0024] When the X-ray spectroscopy system 100 is equipped with an X-ray absorption spectroscopy device based on the total electron yield method as the detector 50, it is preferable to configure it to have a measuring instrument (not shown) that measures a current that compensates for electrons emitted as a result of X-ray absorption. This measuring instrument is connected, for example, to a current measurement cable that is drawn from the sample stage 55 on which the sample S is placed to the outside of the apparatus.

[0025] An X-ray emission spectrometer detects X-rays emitted when inner shell electrons of a sample S are excited to an outer shell state by X-rays, and the excited state relaxes by emitting X-rays. An X-ray emission spectrometer is used in combination with an emission spectrometer (not shown). A transmission absorption spectrometer detects the wavelength and amount absorbed by the sample S based on the difference between the X-rays irradiated on the sample S and the X-rays transmitted through the sample S. When a transmission absorption spectrometer is used as the detector 50, the sample stage 55 is Placement The portion is configured to transmit light.

[0026] The distance T between the aperture member 30 and the sample stage 55 can be adjusted appropriately by at least one of driving the sample stage 55 and operating the drive mechanism 60. The distance T is adjusted according to, for example, the field of view range and magnification.

[0027] Next, an example of the configuration of the holding member 41 in the present embodiment 1 will be described with reference to Figures 4 and 5. Here, the engaging portion 41k is an internal configuration of the holding member 41 and cannot be seen from the outside, but in Figures 4 and 5, a part of the engaging portion 41k is shown with a solid line to clearly show the shape of the engaging portion 41k. Components that are common to each figure are given the same reference numerals, and duplicate explanations will be omitted.

[0028] The holding member 41 has a circulation section 41j through which the cooling medium supplied from the cooling device 70 flows in and out. That is, the cooling medium supplied from the cooling device 70 is temporarily stored in the circulation section 41j and then flows out toward the cooling device 70. The holding member 41 has an opening 41h through which the throttle member 30 is inserted. The throttle member 30 is used with the holding section 32 inserted inside the circulation section 41j. The holding member 41 has an inlet 41a through which the cooling medium flows into the circulation section 41j and an outlet 41b through which the cooling medium flows out from the circulation section 41j. That is, the first connecting section 42a connects the first medium pipe 43a and the inlet 41a and guides the cooling medium to the circulation section 41j. The second connecting section 42b connects the outlet 41b and the second medium pipe 43b and guides the cooling medium to the cooling device 70.

[0029] The first medium pipe 43a is connected to the first connecting part 42a via a first relay part 46a provided in the vacuum vessel 5, and the second medium pipe 43b is connected to the second connecting part 42b via a second relay part 46b provided in the vacuum vessel 5. That is, in the X-ray spectroscopy system 100, the cooling medium circulates between the cooling device 70 and the circulation part 41j via the first medium pipe 43a and the second medium pipe 43b.

[0030] The engaging portion 41k illustrated in FIG. 4 is provided around the opening 41h of the holding member 41 and includes an opening support portion 41m that supports the holding portion 32 and a pair of side end support portions 41n that support both side ends of the holding portion 32. More specifically, the pair of side end support portions 41n are each connected to the opening support portion 41m, extend from the opening support portion 41m along the extension direction of the diaphragm member 30, and are formed to cover the side ends of the holding portion 32. The inner periphery of the opening support portion 41m, i.e., the outer periphery of the opening 41h, is preferably slightly narrower than the outer periphery of the holding portion 32. The distance between the pair of side end support portions 41n is preferably slightly narrower than the width of the holding portion 32, and the width between the opposing inner surfaces of the side end support portions 41n is preferably slightly narrower than the thickness of the holding portion 32.

[0031] One or more linear or dot-like protrusions may be provided on the opposing edge portions of the side end support portion 41n, and recesses corresponding to the protrusions may be provided in the holding portion 32 at locations positioned opposite the protrusions. Alternatively, one or more linear or dot-like recesses may be provided on the opposing edge portions of the side end support portion 41n, and protrusions corresponding to the recesses may be provided in the holding portion 32 at locations positioned opposite the recesses.

[0032] The height of the opening support portion 41m can be set arbitrarily, taking into consideration, for example, stable support of the diaphragm member 30. While FIG. 4 shows an example in which the side end support portion 41n covers the entire side end of the holding portion 32, the side end support portion 41n may be formed to cover only a portion of the holding portion 32. The height of the outer periphery of the side end support portion 41n can be set arbitrarily, taking into consideration, for example, stable support of the diaphragm member 30. However, the engagement portion 41k may be formed to have only the opening support portion 41m, or may be formed to have only a pair of side end support portions 41n.

[0033] 5 includes an opening support portion 41m and an end support portion 41p that supports the end of the holding portion 32 on the opposite side from the passing portion 31. More specifically, the end support portion 41p is formed in a groove shape on the inner wall of the holding member 41, i.e., on the upper surface of the circulation portion 41j. The inner circumference of the end support portion 41p is preferably slightly narrower than the outer circumference of the end of the holding portion 32. However, the engaging portion 41k may be formed to include only the opening support portion 41m or only the end support portion 41p.

[0034] Engagement portion 41k may be configured by combining, for example, all or some of the components in Fig. 4 with all or some of the components in Fig. 5. While Figs. 4 and 5 show a configuration example in which holding portion 32 is partially covered by engagement portion 41k and holding portion 32 is directly immersed in the cooling medium, this is not limiting, and holding member 41 may be configured so that engagement portion 41k covers the entire periphery of holding portion 32. When holding member 41 supports throttling member 30 by engagement portion 41k, the cooling medium supplied from cooling device 70 comes into direct or indirect contact with holding portion 32, and the entire throttling member 30 is cooled.

[0035] Next, the functional configuration of the management device 80 will be outlined with reference to Fig. 6. The management device 80 is configured by, for example, a PC (Personal Computer) used by an administrator who manages the X-ray spectroscopy system 100. PCs include tablet PCs, notebook PCs, desktop PCs, as well as smartphones.

[0036] 6, the management device 80 has at least a communication unit 81, a control unit 82, a storage unit 83, an input unit 84, and a display unit 85. The communication unit 81 is an interface for performing wired or wireless communication with the detector 50, the sample stage 55, the drive mechanism unit 60, the cooling device 70, and the like. The storage unit 83 stores various information in addition to the operating program of the control unit 82. The storage unit 83 can be configured with RAM (Random Access Memory), ROM (Read Only Memory), PROM (Programmable ROM) such as flash memory, SSD (Solid State Drive), HDD (Hard Disk Drive), or the like.

[0037] The input unit 84 includes, for example, a keyboard and a pointing device such as a mouse or a trackball. The input unit 84 accepts input operations by the user and transmits an operation signal corresponding to the accepted content to the control unit 82. The X-ray spectroscopy system 100 may also include a mechanism operation means which is a controller for controlling the operation of the drive mechanism unit 60. In this case, the mechanism operation means accepts input operations by the user and transmits an operation signal corresponding to the accepted content to the control unit 82. Similarly, the X-ray spectroscopy system 100 may also include a stage operation means which is a controller for controlling the operation of the sample stage 55. In this case, the stage operation means accepts input operations by the user and transmits an operation signal corresponding to the accepted content to the control unit 82.

[0038] The display unit 85 is formed of, for example, a liquid crystal display (LCD), and displays various information in response to instructions from the control unit 82. The management device 80 may have, instead of the input unit 84 and the display unit 85, a touch panel including a display panel that displays characters, images, etc., and detection means that is stacked on the display panel and detects touch operations. The management device 80 may have both the input unit 84 and a touch panel.

[0039] The control unit 82 drives the drive mechanism unit 60 in response to operation signals from the input unit 84, etc., to adjust the position of the aperture member 30. The control unit 82 drives the sample stage 55 in response to operation signals from the input unit 84, etc., to adjust the position of the sample S. The control unit 82 operates the cooling device 70 based on preset operating conditions, to cool the aperture member 30. The control unit 82 has a function to display various information on the display unit 85. The control unit 82 may also have a function to analyze the electron beam, fluorescent X-ray, or transmitted X-ray detected by the detector 50. The control unit 82 can be configured by a calculation device such as a CPU (Central Processing Unit) or a GPU (Graphics Processing Unit), and an operating program that cooperates with the calculation device to realize the various functions described above.

[0040] As described above, the X-ray spectrometer 10 of the first embodiment includes the aperture member 30 disposed adjacent to the sample stage 55 and the holding member 41 that holds the aperture member 30 and cools the aperture member 30 with a cooling medium supplied from an external source. The aperture member 30 is formed into a plate shape by the passage portion 31 having the aperture 3h, which is an opening that allows X-rays to pass through, and the holding portion 32 held by the holding member 41. Since the aperture member 30 functions as a cold trap plate near the sample stage 55, the periphery of the sample can be cooled without increasing the number of components. This prevents the configuration from becoming complicated and requires complicated adjustment work, while suppressing sample contamination. The shorter the distance between the aperture member 30 and the surface of the sample S, the more desirable it is. This distance can be set, for example, in the range of several μm to several hundred μm. However, depending on the type of sample S, the distance between the aperture member 30 and the surface of the sample S may be approximately 1 mm.

[0041] Reported cutting-edge analytical techniques using synchrotron X-rays include operando measurements of all-solid-state Li-ion batteries using a scanning photoelectron microscope using soft X-rays. Currently, X-rays focused to a diameter of approximately 100 nm are used. Recently, with the development of concentrators, the use of X-rays with a focused diameter of 50 nm or 10 nm is anticipated. When focused X-rays reach a relatively small focused diameter, such as 50 nm or 10 nm, the intensity of the X-rays irradiated onto the sample stage becomes very strong, raising concerns about damage to the sample S. Additionally, there is also concern that hydrocarbon gases in the vacuum chamber may be decomposed and contaminate the surface of the sample S. Furthermore, there is also concern that the sample S damaged by the focused X-rays or hydrocarbon molecules on the surface of the sample S may be further decomposed by the focused X-rays and re-deposited, thereby contaminating the sample. In this regard, the X-ray spectrometer 10 of the first embodiment has a cooling function in the aperture member 30 due to the above-described configuration, which is equivalent to placing a cold trap plate directly above the sample S. Therefore, with a simple configuration, it is possible to avoid complicated adjustment work and to suppress contamination of the sample S.

[0042] The holding member 41 also has a circulation section 41j through which a cooling medium supplied from the outside flows in and out, and the holding member 32 is disposed inside the circulation section 41j. Therefore, the cold of the holding member 32, which is cooled by contact with the cooling medium in the circulation section 41j, is directly transferred to the passage section 31 located directly above the sample S, thereby cooling the vicinity of the sample S, thereby more accurately suppressing contamination of the sample S. Advances in microfabrication technology allow the diameter of the aperture 3h to be set to tens of nanometers to several micrometers, or even several micrometers to several hundred micrometers. Making the diameter of the aperture 3h as small as possible effectively increases the area of ​​the cooling plate located near the sample S, which is more preferable. Furthermore, forming the diaphragm member 30 from a metal with high thermal conductivity, such as copper, allows it to function as a more efficient cold trap.

[0043] Here, the X-ray spectroscopy system 100 may be configured to have a temperature sensor, such as a thermistor, that measures the temperature of the aperture member 30, and the control unit 82 may control the cooling device 70 based on the temperature measured by the temperature sensor. Incidentally, when the sample S is ablated by X-rays or electron beams, the sample S may become charged. Therefore, in order to efficiently repair the sample S, the control unit 82 or the like may be provided with a function to apply a charge to the aperture member 30.

[0044] <Variation 1A> Next, the aperture member 30A and the holding unit 40A in Modification 1A of the present embodiment 1, and their peripheral configuration will be described with reference to Fig. 7. The overall configuration of the X-ray spectroscopy system 100 in Modification 1A is the same as that in Fig. 1. The X-ray spectroscopy device 10 in Modification 1A has an aperture member 30A instead of the aperture member 30, and a holding unit 40A instead of the holding unit 40, and the configurations related to these alternative configurations are different from those in Fig. 1.

[0045] The holding unit 40A has a holding member 41A that holds the diaphragm member 30A. The diaphragm member 30A adjusts the amount of X-rays collected by the condenser 20, and is formed in a plate shape by a passing portion 31 in which an aperture 3h that is an opening that allows X-rays to pass is formed, and a holding portion 32A that is held by the holding member 41.

[0046] The holding unit 32A has a circulation section 32j through which the cooling medium supplied from the cooling device 70 flows in and out. In other words, the cooling medium supplied from the cooling device 70 is temporarily stored in the circulation section 32j and flows out toward the cooling device 70. The holding unit 40A has a first connecting section 42a that guides the cooling medium supplied from the cooling device 70 to the circulation section 32j and a second connecting section 42b that guides the cooling medium in the circulation section 32j to the cooling device 70. In this Modification 1A, the first medium pipe 43a supplies the cooling medium to the throttling member 30 via the first connecting section 42a, and the second medium pipe 43b recovers the cooling medium that has passed through the throttling member 30 to the cooling device 70 via the second connecting section 42b. In other words, in the X-ray spectroscopy system 100 of this Modification 1A, the cooling medium circulates between the cooling device 70 and the circulation section 32j via the first medium pipe 43a and the second medium pipe 43b.

[0047] The holding unit 32A has an inlet 32a for allowing the cooling medium to flow into the circulation unit 32j and an outlet 32b for allowing the cooling medium to flow out of the circulation unit 32j. That is, the first connecting unit 42a connects the first medium pipe 43a to the inlet 32a and guides the cooling medium to the circulation unit 32j. The second connecting unit 42b connects the outlet 32b to the second medium pipe 43b and guides the cooling medium to the cooling device 70.

[0048] The holding member 41A has an engaging portion 141k that engages with the diaphragm member 30A. The engaging portion 141k illustrated in FIG. 7 is formed in a groove shape so that the portion of the holding portion 32A opposite the passing portion 31 can be fitted therein. The inner circumference of the holding member 41A is preferably slightly narrower than the outer circumference of the holding portion 32A. The holding member 41A and the diaphragm member 30A may be connected with fixing means such as screws or bolts to increase the support force of the holding member 41A for the diaphragm member 30A. Furthermore, a protrusion may be provided on a part or the entire circumference of the side surface of the engaging portion 141k (the inner surface of the holding member 41A), or a protrusion may be provided at a position corresponding to the engaging portion 141k of the holding portion 32A. A recess or protrusion may be provided on the side surface of the engaging portion 141k, and a protrusion or recess may be provided on the holding portion 32A corresponding to the recess or protrusion of the engaging portion 141k.

[0049] As described above, in the X-ray spectrometer 10 of the present modified example 1A, the holding part 32A of the aperture member 30A has the circulation part 32j through which the cooling medium supplied from the cooling device 70 flows in and out. Therefore, the cold of the holding part 32A, which is cooled by contact with the cooling medium in the circulation part 32j, is directly transmitted to the passing part 31 disposed directly above the sample S, and the vicinity of the sample S is cooled, so that contamination of the sample S can be suppressed more accurately.

[0050] <Variation 1B> Next, the aperture member 30B and the holding unit 40B in Modification 1B of the present embodiment 1, and their peripheral configuration will be described with reference to Figure 8. The overall configuration of the X-ray spectroscopy system 100 in Modification 1B is the same as that in Figure 1. The X-ray spectroscopy device 10 in Modification 1B has an aperture member 30B instead of the aperture member 30, and a holding unit 40B instead of the holding unit 40, and the configurations related to these alternative configurations are different from those in Figure 1.

[0051] The holding unit 40B has a holding member 41B that holds the diaphragm member 30B. The diaphragm member 30B adjusts the amount of X-rays collected by the condenser 20, and is formed in a plate shape by a passing portion 31 in which an aperture 3h, which is an opening that allows X-rays to pass, is formed, and a holding portion 32B that is held by the holding member 41B.

[0052] The throttle member 30B has a circulation section 32j through which the cooling medium supplied from the cooling device 70 flows in and out. That is, the cooling medium supplied from the cooling device 70 is temporarily stored in the circulation section 32j and then flows out toward the cooling device 70. While FIG. 8 shows an example in which the circulation section 32j is formed in the holding section 32B, the circulation section 32j may be formed across the passing section 31 and the holding section 32B. The holding unit 40B has a first connecting section 42a that guides the cooling medium supplied from the cooling device 70 to the circulation section 32j and a second connecting section 42b that guides the cooling medium in the circulation section 32j to the cooling device 70. In this modification 1B, the first medium pipe 43a supplies the cooling medium to the throttle member 30 via the first connecting section 42a, and the second medium pipe 43b recovers the cooling medium that has passed through the throttle member 30 to the cooling device 70 via the second connecting section 42b. That is, in the X-ray spectroscopy system 100 of the present modification 1B, the cooling medium circulates between the cooling device 70 and the circulation unit 32j via the first medium pipe 43a and the second medium pipe 43b.

[0053] The holding member 41B has an inlet 41a for allowing the coolant to flow into the circulation section 32j and an outlet 41b for allowing the coolant to flow out from the circulation section 32j. The holding section 32B has an inlet 32a for allowing the coolant to flow into the circulation section 32j and an outlet 32b for allowing the coolant to flow out from the circulation section 32j. The connection between the inlet 41a and the inlet 32a and the connection between the outlet 41b and the inlet 32b may be sealed to prevent leakage of the coolant. In this modification 1B, the first connecting section 42a is inserted into the inlet 41a and the inlet 32a, and the second connecting section 42b is inserted into the outlet 41b and the inlet 32b.

[0054] The holding member 41B has an engagement portion 142k with which the diaphragm member 30B engages. The engagement portion 142k is formed in a groove shape so that the holding portion 32B can be inserted. To prevent a gap from forming between the groove-shaped engagement portion 142k formed in the holding member 41B and the holding portion 32B inserted therein, it is preferable that the side wall of the engagement portion 142k is slightly narrower than the outer wall of the holding portion 32B. In the holding unit 40B of this modification 1B, the first connecting portion 42a and the second connecting portion 42b are arranged to straddle the holding member 41B and the diaphragm member 30B. Therefore, the first connecting portion 42a and the second connecting portion 42b can support the holding force of the holding member 41B to hold the diaphragm member 30B.

[0055] However, the holding member 41B and the diaphragm member 30B may be connected by fixing means such as screws or bolts, a protrusion may be provided on a part of or the entire circumference of the side surface of the engaging portion 142k, or a protrusion may be provided at a location corresponding to the engaging portion 142k of the holding portion 32A. A recess or protrusion may be provided on the side surface of the engaging portion 142k, and a protrusion or recess may be provided in the holding portion 32B corresponding to the recess or protrusion of the engaging portion 142k.

[0056] As described above, in the X-ray spectrometer 10 of Modification 1B, the holding portion 32B of the aperture member 30B has the circulation portion 32j through which the cooling medium supplied from the cooling device 70 flows in and out. Therefore, the cold of the holding portion 32B, which is cooled by contact with the cooling medium in the circulation portion 32j, is directly transferred to the passing portion 31 disposed directly above the sample S, thereby cooling the vicinity of the sample S, thereby more accurately suppressing contamination of the sample S. Furthermore, in the holding unit 40B of Modification 1B, the first connecting portion 42a is inserted into the inlet 32a via the inlet 41a, and the second connecting portion 42b is inserted into the inlet 32b via the outlet 41b. Therefore, the holding member 41B is supported by the first connecting portion 42a and the second connecting portion 42b, which further strengthens the connection between the aperture member 30B and the holding member 41B, thereby enabling the aperture member 30B to be held more stably.

[0057] Embodiment 2 9 to 12, an example of the overall configuration of the X-ray spectrometer 110 and the X-ray spectroscopic system 200 according to the second embodiment of the present invention will be described. The positions, sizes, shapes, etc. of the components of the X-ray spectroscopic system 200 shown in FIGS. 9 to 12 are merely examples, and can be changed as appropriate depending on the installation environment of the X-ray spectroscopic system 200, the combination of components, etc. The same components as those in the first embodiment are designated by the same reference numerals, and the description thereof will be omitted.

[0058] The X-ray spectroscopy system 200 includes an X-ray spectroscopy device 110 that focuses X-rays output from the spectroscopy processing device 2 and irradiates the sample S, a cooling device 70 that supplies a cooling medium to the holding unit 140, and a management device 180 that controls and manages the operation of various actuators within the system. The cooling device 70 supplies the cooling medium to the holding unit 140. A medium pipe 43 is attached to the cooling device 70 to supply the cooling medium to the holding unit 140. The medium pipe 43 is formed of, for example, a flexible hose.

[0059] The X-ray spectrometer 110 has a collector 20, an aperture member 130, a holding unit 140, a detector 50, a sample stage 55, and a drive mechanism 160. In the X-ray spectroscopic system 200 of Fig. 9, the collector 20, the aperture member 130, the holding unit 140, the detector 50, and the sample stage 55 are arranged inside a vacuum vessel 5. The drive mechanism 160 is used to drive the holding unit 140.

[0060] The aperture member 130 is provided adjacent to the sample stage 55 and adjusts the amount of X-rays collected by the collector 20. More specifically, the aperture member 130 is composed of a disk-shaped blade portion 131 mounted on an optical chopper or the like, and a rotating shaft 132 connected to the center of the blade portion 131. The blade portion 131 is provided with a plurality of apertures 30h that are openings that allow X-rays to pass through. Here, an optical chopper is a device that modulates continuous light using rotating blades.

[0061] The holding unit 140 rotatably holds the diaphragm member 130. Similar to an optical chopper, the holding unit 140 has a configuration for controlling the time for irradiating X-rays by rotating the diaphragm member 130. The holding unit 140 of the second embodiment has an inner tube 45a, an outer tube 45b, a seal portion 148, and a rotation support portion 150. The seal portion 148 is provided on the upper wall of the vacuum vessel 5, and the inner tube 45a and the outer tube 45b are provided from the inside to the outside of the vacuum vessel 5 via the seal portion 148. A medium tube 43 extending from the cooling device 70 is attached to the end of the inner tube 45b outside the vacuum vessel 5.

[0062] 10 and 11, the inner pipe 45a has a plurality of discharge holes 45h formed at its end within the vacuum vessel 5. Figures 10 and 11 show an example in which the discharge holes 45h are provided around the entire periphery of the inner pipe 45a. The discharge holes 45h are holes for discharging the cooling medium that has flowed into the inner pipe 45a from the cooling device 70 through the medium pipe 43 into the inside of the outer pipe 45b.

[0063] A bearing 45j is attached to the outer wall of the inner tube 45a, allowing the outer tube 45b to rotate around the inner tube 45a. The bearing 45j is made of, for example, a bearing, and rotatably connects the outer tube 45b to the inner tube 45a. In other words, the outer tube 45b functions as a hollow shaft that can rotate at high speed. Although two bearings 45j are shown in each figure, this is not a limitation, and the holding unit 140 may have one or three or more bearings 45j.

[0064] As shown in FIG. 11, the outer tube 45b extends from the inside to the outside of the vacuum vessel 5 and is provided so as to be rotatable about the inner tube 45a. That is, the outer tube 45b is attached to the outside of the inner tube 45a so as to surround at least a portion of the inner tube 45a. A rotation support 150 that rotatably supports the throttle member 130 is attached to the ends of the inner tube 45a and the outer tube 45b inside the vacuum vessel 5. The rotation support 150 includes an interlocking portion 151 that rotates in conjunction with the rotation of the outer tube 45b, an aperture support 152 fixed to the bottom of the inner tube 45a, a first gear G1, and a second gear G2. The aperture support 152 includes a shaft support 152a that rotatably supports the rotation shaft 132. A pipe seal member 153 seals the gap between the interlocking portion 151 and the aperture support 152 (see FIG. 12).

[0065] The first gear G1 and the second gear G2 are arranged so that their rotation axes are perpendicular. The first gear G1 and the second gear G2 are so-called transmission axis conversion gears (gears where two axes intersect), and are formed, for example, by bevel gears, miter gears, spiral bevel gears, or crown gears. That is, the first gear G1 and the second gear G2 are arranged so that the gears mesh with each other. The first gear G1 is connected to the interlocking portion 151 and rotates in accordance with the rotation of the outer tube 45b. The second gear G2 is connected to the end of the rotation shaft 132 opposite the blade portion 131 and transmits the rotation of the first gear G1 to the rotation shaft 132.

[0066] 12, the seal portion 148 is a so-called magnetic fluid seal that includes a housing 148a, ball beads 148b, a permanent magnet 148c, and a magnetic fluid 148d. That is, the seal portion 148 is configured to maintain the airtightness of the vacuum vessel 5 by fixing the magnetic fluid 148d around the outer tube 45b, which serves as the rotation axis, with the permanent magnet 148c, thereby creating a fluid O-ring. Because the holding unit 140 is configured as described above, it is possible to rotate the throttle member 130 at high speed.

[0067] The seal portion 148 may be configured such that a heating means such as a ribbon heater or a belt heater is wrapped around the outer wall of the housing 148a. A temperature sensor may be provided to measure the temperature of the seal portion 148 or the outer tube 45b, and the management device 180 may control the temperature of the heating means based on the temperature measured by the temperature sensor. In this way, condensation can be prevented from occurring on the atmospheric side of the outer tube 45b (a location outside the vacuum vessel 5) that is cooled inside the vacuum vessel 5.

[0068] Next, the configuration of the drive mechanism 160 and the functional configuration of the management device 180 will be described briefly with reference to Fig. 13. The management device 180 is configured, for example, by a PC used by an administrator who manages the X-ray spectroscopy system 100. In the management device 180, components similar to those of the management device 80 of the first embodiment are designated by the same reference numerals, and descriptions thereof will be omitted.

[0069] 13, the drive mechanism 160 has a three-way drive mechanism 161 and a rotation drive mechanism 162. The three-way drive mechanism 161 is configured similarly to the drive mechanism 60 of the first embodiment, and realizes minute movement of the diaphragm member 130 by minutely moving the holding unit 140 in each direction. The rotation drive mechanism 162 is controlled by the management device 180 and includes a motor (not shown) that serves as a power source for rotating the outer tube 45b. That is, the outer tube 45b is connected to the motor of the rotation drive mechanism 162 and rotates in conjunction with the drive of the motor.

[0070] 13, the management device 180 has at least a communication unit 81, a control unit 182, a storage unit 83, an input unit 84, and a display unit 85. The control unit 182 drives the three-way drive mechanism unit 161 in response to an operation signal from the input unit 84, etc., to adjust the position of the diaphragm member 30. The control unit 182 drives the motor of the rotation drive mechanism unit 162 in response to an operation signal from the input unit 84, etc., to rotate the outer tube 45b, thereby rotating the diaphragm member 130 via the rotation support unit 150. Other configurations of the control unit 182 are similar to those of the control unit 82 of the first embodiment.

[0071] 10 to 12 show an example in which discharge holes 45h are provided around the entire circumference of the inner tube 45a, but this is not limiting. The inner tube 45a may have discharge holes 45h only in a portion of its circumference, such as on the throttle member 130 side. The shape of the discharge holes 45h is not limited to the examples shown in the figures, and discharge holes 45h of various shapes can be formed in the inner tube 45a. Furthermore, the number of discharge holes 45h is not limited to the examples shown in the figures, and the inner tube 45a may have any number of discharge holes 45h, one or more. Furthermore, the size of the discharge holes 45h is not limited to the examples shown in the figures, and discharge holes 45h of various sizes can be formed in the inner tube 45a.

[0072] While each figure illustrates an example in which the bearing 45j is provided outside the vacuum vessel 5, this is not limiting. The bearing 45j may be provided inside the vacuum vessel 5, or may be provided both inside and outside the vacuum vessel 5. The X-ray spectroscopy system 200 may be provided with a temperature sensor that measures the temperature of the aperture member 130, and the control unit 182 may control the cooling device 70 based on the temperature measured by the temperature sensor. In this case, a non-contact low-temperature infrared thermometer or the like may be used as the temperature sensor. Incidentally, when the sample S is ablated by X-rays or electron beams, the sample S may acquire an electric charge. Therefore, to efficiently repair the sample S, the control unit 182 or the like may be provided with a function to apply an electric charge to the aperture member 130. The X-ray spectroscopy device 110 and the X-ray spectroscopy system 200 may also include an aperture between the aperture member 130 and the sample stage 55, which functions similarly to the aperture member 30 of the first embodiment.

[0073] As described above, the X-ray spectrometer 110 according to the second embodiment is configured such that the sample S Placement The aperture member 130 is disposed adjacent to the sample stage 55 and adjusts the amount of X-rays collected by the collector 20. The aperture member 130 is rotatably supported by a holding unit 140, which cools the aperture member 130 with a cooling medium supplied from a cooling device 70. The aperture member 130 includes a disk-shaped blade portion 131 having a plurality of apertures 30h formed therein, and a rotation shaft 132 connected to the center of the blade portion 131. Since the aperture member 130 functions as a cooling trap near the sample stage 55, the periphery of the sample S can be cooled without increasing the number of components. This prevents the sample S from being contaminated while avoiding a complex configuration and complicated adjustment work. The shorter the distance between the aperture member 130 and the surface of the sample S, the more desirable it is. This distance can be set, for example, in the range of several μm to several hundred μm. However, depending on the type of sample S, the distance between the aperture member 130 and the surface of the sample S may be approximately 1 mm.

[0074] More specifically, the holding unit 140 is provided from the inside to the outside of the vacuum vessel 5 in which the throttling member 130 is installed, and has an inner tube 45a whose end outside the vacuum vessel 5 is connected to the cooling device 70 via a medium pipe 43, and which has a discharge hole 45h formed at its end inside the vacuum vessel 5. The holding unit 140 also has an outer tube 45b that is provided from the inside to the outside of the vacuum vessel 5 and is rotatable around the inner tube 45a. The holding unit 140 further has a rotation support part 150 that is attached to the ends of the inner tube 45a and the outer tube 45b inside the vacuum vessel 5 and supports the throttling member 130 in a rotatable state. Therefore, the cooling medium supplied from the cooling device 70 can be discharged from the discharge hole 45h of the inner tube 45a to cool the end of the outer tube 45b and the throttling member 130, thereby preferably suppressing contamination of the sample S.

[0075] The rotation support part 150 has an interlocking part 151 that rotates in conjunction with the rotation of the outer tube 45b, an aperture support part 152 fixed to the bottom of the inner tube 45a, a first gear G1 that is connected to the interlocking part 151 and rotates in conjunction with the rotation of the outer tube 45b, and a second gear G2 that is connected to the end of the rotation shaft 132 opposite the blade part 131 and transmits the rotation of the first gear G1 to the rotation shaft 132. That is, since the holding unit 140 is configured so that the aperture member 130 rotates in conjunction with the rotation of the outer tube 45b, the aperture member 130 can function as an optical chopper while also functioning as a cooling trap that suppresses contamination of the sample S. Note that, by adopting the above-described configuration, the holding unit 140 in the second embodiment is capable of rotating the aperture member 130 at high speeds of 1,000 rpm to 10,000 rpm.

[0076] <Modification> 11 shows an example in which the blade portion 131 has a cylindrical aperture 30h, that is, an example in which the distance from the center of the aperture 30h to the hole wall 3w of the blade portion 131 is constant from the entrance side to the exit side. Here, the entrance side refers to the surface of the blade portion 131 on which X-rays are incident, and the exit side refers to the surface of the blade portion 131 on which X-rays are exited. However, because the holding unit 140 rotates the blade portion 131 at high speed, if the aperture 30h is cylindrical and the blade portion 131 has a certain thickness or more, the X-rays may hit the hole wall 3w and be scattered as they pass through the aperture 30h.

[0077] Therefore, blade portion 131 of this modified example is configured to have aperture 30h that is formed so that it is narrower on the incident side than on the exit side (so that the hole diameter on the incident side is smaller than on the exit side). Specific examples of the shape of blade portion 131 of this modified example, i.e., the shape of aperture 30h, will be described with reference to Figures 14 to 19.

[0078] First, an example of blade portion 131 in this modified example will be described with reference to Figures 14 to 16. Figure 14 shows an example of aperture 30h in this modified example, and Figure 15 shows a schematic cross section of blade portion 131 taken along line AA in Figure 14. Figure 16 is a perspective view that schematically illustrates the periphery of aperture 30h in blade portion 131 in Figure 14.

[0079] The blade portion 131 illustrated in FIGS. 14 to 16 has an aperture 30h formed such that the hole wall 3w widens outward from the incident side toward the exit side. That is, the aperture 30h is formed such that the distance from its center to the hole wall 3w gradually increases from the incident side toward the exit side. While FIGS. 14 to 16 show an example in which the hole diameter of the aperture 30h changes at a constant rate, this is not limiting. For example, the aperture 30h may be configured such that the hole diameter changes exponentially from the incident side toward the exit side. In this case, the hole wall 3w appears as a curve in a cross section such as that shown in FIG. 15.

[0080] 14 to 16 has a cone-shaped aperture 30h that widens from the entrance side toward the exit side. Therefore, even if the blade portion 131 has a certain thickness or more, the hole wall 3w does not extend along the direction in which the X-rays enter (traveling direction), and the thickness of the blade portion 131 at the location of the aperture 30h is effectively reduced, thereby suppressing scattering of X-rays. Furthermore, since there is no need to reduce the overall thickness of the blade portion 131, the strength of the blade portion 131 can be ensured.

[0081] Next, with reference to FIGS. 17 to 19, other configuration examples of the aperture 30h in this modification will be described. FIGS. 17 to 19 are schematic cross-sectional views based on a plan view similar to FIG. 14. In the blade portion 131 illustrated in FIG. 17, the hole wall 3w has a shape in which a cylindrical portion and a cone-shaped portion are connected. Therefore, in the schematic cross-section illustrated in FIG. 17, the surface of the hole wall 3w is indicated by a straight line parallel to the X-ray propagation direction and a straight line inclined from the center of the aperture 30h toward the outside. Even with this configuration, the thickness of the blade portion 131 at the aperture 30h is essentially reduced, thereby suppressing X-ray scattering. Furthermore, since it is not necessary to reduce the overall thickness of the blade portion 131, the strength of the blade portion 131 can be ensured. The aperture 30h may be formed so that a portion of the hole wall 3w is curved in the cross-section illustrated in FIG. 17. The cylindrical portion of the hole wall 3w may be formed to a thickness of several microns to submicron.

[0082] The blade portion 131 illustrated in FIG. 18 has a cylindrical step portion 3m and a cone-shaped inclined portion 3n as components forming the outer contour of the aperture 30h. That is, the hole wall 3w has a shape in which a cylindrical portion, an annular portion, and a cone-shaped portion are connected. However, the aperture 30h may be formed so that a portion of the hole wall 3w is curved in the cross section shown in FIG. 18. The blade portion 131 illustrated in FIG. 19 has a cylindrical step portion 3m on the incident side of the aperture 30h. That is, the hole wall 3w has a shape in which a cylindrical portion, an annular portion, and a cylindrical portion are connected. By adopting a configuration having a flange-shaped step portion 3m on the incident side, as in the blade portion 131 illustrated in FIGS. 18 and 19, the thickness of the aperture 30h is reduced, thereby suppressing X-ray scattering. Furthermore, since there is no need to reduce the overall thickness of the blade portion 131, the strength of the blade portion 131 can be ensured. The step portion 3m is preferably formed to have a thickness of several micrometers to submicrometers.

[0083] Embodiment 3 An example of the overall configuration of an X-ray spectrometer 210 and an X-ray spectroscopic system 300 according to the third embodiment of the present invention will be described with reference to Fig. 20. The positions, sizes, shapes, etc. of the components of the X-ray spectroscopic system 300 shown in Fig. 20 are merely examples, and can be changed as appropriate depending on the installation environment of the X-ray spectroscopic system 300, the combination of components, etc. Components similar to those in the first and second embodiments are designated by the same reference numerals, and descriptions thereof will be omitted.

[0084] The X-ray spectrometer 210 of this third embodiment has an aperture member 30, a holding unit 40, and their peripheral configurations configured in the same manner as in the first embodiment, and an aperture member 130, a holding unit 140, and their peripheral configurations configured in the same manner as in the second embodiment.

[0085] More specifically, the X-ray spectrometer 210 adjusts the amount of X-rays collected by the collector 20, and has an aperture member 130 including a disk-shaped blade portion 131 in which an aperture 30h, which is a plurality of openings, is provided. The aperture 30h corresponds to the "first hole," and the aperture member 130 corresponds to the "first aperture member." The X-ray spectrometer 210 has a holding unit 140 that rotatably holds the aperture member 130 and cools the aperture member 130 with a cooling medium supplied from the outside. The holding unit 140 is disposed closer to the light source 1 than the holding unit 40. The holding unit 140 corresponds to the "first holding unit."

[0086] The X-ray spectrometer 210 is located downstream of the aperture member 130 in the X-ray direction, and the sample S is Placement The X-ray spectrometer 210 has an aperture member 30 that is disposed adjacent to a sample stage 55 that is mounted on the X-ray emitting surface, and that has an aperture 3h formed therein, which is an opening that allows X-rays to pass through. The aperture 3h corresponds to the "second hole," and the aperture member 30 corresponds to the "second aperture member." The X-ray spectrometer 210 has a holding unit 40 that holds the second aperture member 30 and cools the aperture member 30 with a cooling medium supplied from the outside. The holding unit 40 is connected to a drive mechanism 60 via a support member 45. The holding unit 40 corresponds to the "holding unit."

[0087] As shown in FIG. 21 , the management device 280 includes at least a communication unit 81, a control unit 282, a storage unit 83, an input unit 84, and a display unit 85. The control unit 282 drives the three-way drive mechanism 161 in response to an operation signal from the input unit 84, thereby adjusting the position of the diaphragm member 30. The control unit 282 drives the motor of the rotation drive mechanism 162 in response to an operation signal from the input unit 84, thereby rotating the outer tube 45b and thereby rotating the diaphragm member 130 via the rotation support unit 150. The control unit 282 drives the drive mechanism 60 in response to an operation signal from the input unit 84, thereby adjusting the position of the diaphragm member 30. The other configuration of the control unit 282 is similar to that of the control unit 82 of the first embodiment and the control unit 282 of the second embodiment.

[0088] The X-ray spectroscopy system 300 may be provided with a temperature sensor that measures the temperature of at least one of the diaphragm member 30 and the diaphragm member 130, and the control unit 282 may control the cooling device 70 based on the temperature measured by the temperature sensor. In this case, a non-contact low-temperature infrared thermometer or the like may be used as the temperature sensor. Incidentally, when the sample S is ablated by X-rays or electron beams, the sample S may become electrically charged. Therefore, in order to efficiently repair the sample S, the control unit 282 or the like may be provided with a function to apply an electric charge to at least one of the diaphragm member 30 and the diaphragm member 130.

[0089] 20 illustrates a configuration in which a cooling medium is supplied from one cooling device 70 to each of the holding unit 40 and the holding unit 140, but is not limited to this. The X-ray spectroscopy system 300 may have separate cooling devices that supply a cooling medium to the holding unit 40 and that supply a cooling medium to the holding unit 140.

[0090] The configuration of Modification 1A or 1B can be applied to the X-ray spectroscopy system 300. That is, the X-ray spectroscopy system 300 may be configured to have the holding unit 40 of Modification 1A or the holding unit 40B of Modification 1B instead of the holding unit 40. That is, the aperture member 30 may be formed in a plate shape by a passing portion 31 in which an aperture 3h is formed, and a holding portion 32 which has a circulating portion 32j through which the cooling medium flows in and out, and which is held by a holding member 41. Also, the configuration of the modification of Embodiment 2 may be applied to the X-ray spectroscopy system 300.

[0091] The above-described embodiments are merely examples of X-ray spectrometers and X-ray spectrometer systems, and the technical scope of the present invention is not limited to these embodiments. For example, in the first embodiment, the X-ray spectrometer 10 may be configured with the aperture member 30 and the holding unit 40. In other words, the collector 20, the detector 50, the sample stage 55, and the drive mechanism 60 may be external components of the X-ray spectrometer 10. The X-ray spectrometer system 100 does not need to include all of the light source 1, the spectroscopic processing device 2, the cooling device 70, and the management device 80, and may be configured to include the X-ray spectrometer 10 and at least one of the light source 1, the spectroscopic processing device 2, the cooling device 70, and the management device 80.

[0092] In the second embodiment, the X-ray spectrometer 110 may be configured with the aperture member 130 and the holding unit 140, that is, the collector 20, the detector 50, the sample stage 55, and the drive mechanism 160 may be configured externally to the X-ray spectrometer 10. The X-ray spectrometer system 200 does not need to include all of the light source 1, the spectroscopic processing device 2, the cooling device 70, and the management device 80, and may be configured to include the X-ray spectrometer 110 and at least one of the light source 1, the spectroscopic processing device 2, the cooling device 70, and the management device 80.

[0093] In the third embodiment, the X-ray spectrometer 210 may be configured with the aperture member 30 and the holding unit 40, and the aperture member 130 and the holding unit 140. In other words, the collector 20, the detector 50, the sample stage 55, the drive mechanism 60, and the drive mechanism 160 may be external components of the X-ray spectrometer 210. The X-ray spectrometer system 300 does not need to include all of the light source 1, the spectroscopic processing device 2, the cooling device 70, and the management device 80, and may be configured to include the X-ray spectrometer 210 and at least one of the light source 1, the spectroscopic processing device 2, the cooling device 70, and the management device 80. [Explanation of symbols]

[0094] 1 light source, 2 spectroscopic processing device, 3h, 30h aperture, 3n step section, 3m slope section, 3w hole wall, 5 vacuum vessel, 10, 110, 210 X-ray spectrometer, 20 condenser, 30, 30A, 30B, 130 aperture member, 31 passage section, 32, 32A, 32B holding section, 32a inlet, 32b Outlet, 32j, 41j Circulation part, 40, 40A, 40B, 140 Holding unit, 41, 41A, 41B Holding member, 41h Opening, 41k Engagement part, 41m Opening support part, 41n Side end support part, 41p End support part, 41a Inlet, 41b Outlet, 42a First connection part, 42b Second connection part, 43 Media pipe, 43a First media pipe, 43b Second medium tube, 45 Support member, 45a Inner tube, 45b Outer tube, 45h Discharge hole, 45j Bearing portion, 46a First relay portion, 46b Second relay portion, 48 Seal portion, 50 Detector, 55 Sample stage, 60, 160 Drive mechanism portion, 70 Cooling device, 80, 180, 280 Management device, 81 Communication portion, 82, 182, 282 Control portion, 83 Memory portion, 84 Input portion, 85 Display portion, 100, 200, 300 X-ray spectroscopy system, 131 Blade portion, 132 Rotating shaft, 141k, 142k Engagement portion, 148 Seal portion, 148a Housing, 148b Ball beads, 148c Permanent magnet, 148d Magnetic fluid, 150 Rotation support portion, 151 Interlocking portion, 152 Aperture support portion, 152a shaft support portion, 153 pipe seal member, 161 three-way drive mechanism portion, 162 rotation drive mechanism portion.

Claims

1. an aperture member disposed adjacent to a sample stage on which a sample is placed, and which adjusts the amount of X-rays collected by the collector; a holding member that holds the diaphragm member and cools the diaphragm member with a cooling medium supplied from an external source; and The throttle member is The X-ray tube is formed in a plate shape by a passing portion having an aperture formed therein, which is an opening for passing X-rays, and a holding portion held by the holding member, The holding member is It has a circulation section through which a cooling medium supplied from the outside flows in and out, The holding portion is provided inside the circulation section, X-ray spectrometer.

2. an aperture member disposed adjacent to a sample stage on which a sample is placed, and which adjusts the amount of X-rays collected by the collector; a holding member that holds the diaphragm member; and The throttle member is The X-ray tube is formed in a plate shape by a passing portion having an aperture formed therein, which is an opening for passing X-rays, and a holding portion held by the holding member, The holding portion is A circulation section through which a cooling medium supplied from the outside flows in and out is provided. X-ray spectrometer.

3. an aperture member disposed adjacent to a sample stage on which a sample is placed, and which adjusts the amount of X-rays collected by the collector; a holding unit that rotatably holds the diaphragm member and cools the diaphragm member with a cooling medium supplied from a cooling device; and The throttle member is a disk-shaped blade portion provided with a plurality of apertures; a rotating shaft connected to a central portion of the blade portion; having X-ray spectrometer.

4. The holding unit is an inner tube that is provided from the inside to the outside of the vacuum container in which the throttle member is installed, the cooling device being connected to an end outside the vacuum container via a medium pipe, and the inner tube having a discharge hole formed at an end inside the vacuum container; an outer tube extending from the inside to the outside of the vacuum vessel and capable of rotating about the inner tube; a rotation support portion attached to an end portion of the inner tube and the outer tube inside the vacuum vessel, the rotation support portion supporting the throttle member in a rotatable state; having 4. The X-ray spectrometer of claim 3.

5. The rotation support portion is a linking portion that links with the rotation of the outer tube; a throttle support portion fixed to a bottom portion of the inner tube; a first gear connected to the interlocking portion and rotating in accordance with the rotation of the outer tube; a second gear connected to an end of the rotary shaft opposite to the blade portion and transmitting the rotation of the first gear to the rotary shaft; having 5. The X-ray spectrometer of claim 4.

6. a first aperture member for adjusting the amount of X-rays collected by the condenser, the first aperture member including a disk-shaped blade portion having a plurality of first holes as openings; a second aperture member disposed downstream of the first aperture member in the X-ray direction and adjacent to a sample stage on which a sample is placed, the second aperture member having a second hole formed therein as an opening through which the X-ray passes; a first holding unit that rotatably holds the first diaphragm member and cools the first diaphragm member with a cooling medium supplied from an external source; a second holding unit that holds the second diaphragm member and cools the second diaphragm member with a cooling medium supplied from an external source; having X-ray spectrometer.

7. a first aperture member for adjusting the amount of X-rays collected by the condenser, the first aperture member including a disk-shaped blade portion having a plurality of first holes as openings; a second aperture member disposed downstream of the first aperture member in the X-ray direction and adjacent to a sample stage on which a sample is placed, the second aperture member having a second hole formed therein as an opening through which the X-ray passes; a first holding unit that rotatably holds the first diaphragm member and cools the first diaphragm member with a cooling medium supplied from an external source; a second holding unit including a holding member that holds the second diaphragm member; and The second diaphragm member is a passage portion in which the second hole is formed, and a holding portion having a circulation portion through which the cooling medium flows in and out, the holding portion being held by the holding member, and being formed in a plate shape; X-ray spectrometer.

8. the collector for collecting X-rays; a detector for detecting photoelectrons or transmitted X-rays generated due to irradiation of a sample with X-rays that have passed through the aperture member; further comprising The X-ray spectrometer according to any one of claims 1 to 5.

9. The condenser that condenses X-rays; a detector for detecting photoelectrons or transmitted X-rays generated due to irradiation of a sample with X-rays that have passed through the first aperture member and the second aperture member; further comprising 8. The X-ray spectrometer according to claim 6 or 7.

10. a light source that emits X-rays; a spectroscopic processing device that focuses the X-rays emitted from the light source and adjusts them to X-rays with wavelengths and energy levels used in spectroscopic measurement; a cooling device that is a supply source of a cooling medium; An X-ray spectrometer according to any one of claims 1 to 9; An X-ray spectroscopy system having:

Images