Sheet peeling device and sheet peeling method

Abstract

To provide a sheet peeling device which can prevent a peeled adhesive sheet from being recovered skewed toward one portion of recovery means, and to provide a sheet peeling method.SOLUTION: A sheet peeling device EA includes: peeling means 10 which holds an adhesive sheet AS applied to an adherend WK, peels the adhesive sheet AS from the adherend WK, and releases the peeled adhesive sheet AS held thereby to cause the adhesive sheet AS to fall freely; recovery means 20 which recovers the adhesive sheet AS freely fallen from the peeling means 10; and recovery position change means 30 which changes a recovery position of the adhesive sheet AS relative to the recovery means 20.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a sheet peeling device and a sheet peeling method. [Background technology]

[0002] BACKGROUND ART Sheet peeling devices are known that peel an adhesive sheet attached to an adherend from the adherend and collect the adhesive sheet with a collecting means (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2012-64850 Summary of the Invention [Problem to be solved by the invention]

[0004] In the sheet peeling device 10 (sheet peeling device) described in Patent Document 1, as shown in Figure 2(E) of this specification, the peeled adhesive sheet S (adhesive sheet) is collected in one place in the collection box 72 (collection means), which causes the adhesive sheet to overflow from the collection means and makes it impossible for the collection means to collect the adhesive sheet even though there is still more that can be collected.

[0005] An object of the present invention is to provide a sheet peeling device and a sheet peeling method that can prevent peeled adhesive sheets from being collected unevenly in one place on a collection means. [Means for solving the problem]

[0006] The present invention employs the configurations described in the claims. [Effects of the Invention]

[0007] According to the present invention, the recovery position of the adhesive sheet relative to the recovery means is changed, so that it is possible to prevent the peeled adhesive sheet from being recovered unevenly in one place on the recovery means. Furthermore, by changing the trajectory of the freely falling adhesive sheet or by mutually changing the position where the adhesive sheet is released from its hold and the position of the recovery means, the recovery position of the adhesive sheet can be changed more reliably. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is an explanatory diagram of a sheet peeling device according to an embodiment of the present invention. [Figure 2] 1A to 1D are diagrams illustrating the operation of a sheet peeling device, and FIG. 1E is a diagram showing an example of a defect in a conventional sheet peeling device. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In this embodiment, the X-axis, Y-axis, and Z-axis are orthogonal to each other, and the X-axis and Y-axis are axes within a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. Furthermore, in this embodiment, when viewed from the front direction of Figure 1 parallel to the Y-axis, "up" is the direction of the Z-axis arrow, "down" is the opposite direction, "left" is the direction of the X-axis arrow, "right" is the opposite direction, "front" is the direction of the Y-axis arrow, and "rear" is the opposite direction.

[0010] The sheet peeling device EA is provided with peeling means 10 which carries out a peeling process in which an adhesive sheet AS attached to an adherend WK is held and peeled off from the adherend WK, and the peeled adhesive sheet AS is released from the hold and allowed to fall freely, recovery means 20 which carries out a recovery process in which the adhesive sheet AS which has fallen freely from the peeling means 10 is recovered, and recovery position changing means 30 which carries out a recovery position changing process in which the recovery position of the adhesive sheet AS relative to the recovery means 20 is changed, and is arranged near a support means 40 which supports the adherend WK.

[0011] The peeling means 10 includes a feeding means 11 for feeding out heat-sensitive adhesive peeling tape PT, a pressing means 12 for pressing the peeling tape PT against an adhesive sheet AS to adhere it, a cutting means 13 for cutting the peeling tape PT, a guiding means 14 for guiding the adhesive sheet AS to which the peeling tape PT has been adhered, and a conveying means 15 for conveying the peeled adhesive sheet AS. The payout means 11 is provided with: a support roller 11C supported on a rotating arm 11B rotatable around a rotating shaft 11A and supporting the peeling tape PT; a drive roller 11E supported on an output shaft (not shown) of a rotary motor 11D serving as a drive device; a spring 11F serving as a biasing means for biasing the rotating arm 11B in the direction of the drive roller 11E; a storage means 11J supported on an output shaft 11H of a linear motor 11G serving as a drive device; suction means 11M such as a decompression pump or vacuum ejector that is stored in the storage means 11J and sucks the peeling tape PT through suction holes 11L formed in an adsorption surface 11K, which is the bottom surface of the storage means 11J; and an auxiliary roller 11Q supported on an output shaft 11P of a linear motor 11N serving as a drive device, which brings the peeling tape PT into contact with the adsorption surface 11K. The pressing means 12 includes a linear motor 12A as a driving device housed within the housing means 11J, a pressing head 12C supported by a slider 12B of the linear motor 12A and arranged so as to be capable of protruding and retracting from the bottom surface of the housing means 11J, and a heating means 12D such as a coil heater or the heating side of a heat pipe provided on the pressing head 12C. The cutting means 13 includes a linear motor 13A as a driving device housed in the housing means 11J, and a cutting blade 13C supported by a slider 13B of the linear motor 13A and provided so as to be capable of projecting and retracting from the bottom surface of the housing means 11J. The guide means 14 includes a linear motor 14A as a driving device, a rotary motor 14C as a driving device supported by a slider 14B of the linear motor 14A, a pressure roller 14D supported by an output shaft (not shown) of the rotary motor 14C, a support member 14G supported by an output shaft 14F of a direct-acting motor 14E as a driving device, a pinch roller 14H rotatably supported by the support member 14G, a sheet support member 14K supported by the support member 14G, and a contact roller 14N rotatably supported by a slider 14M of the linear motor 14L as a driving device. The conveying means 15 includes a support frame 15C supported by a slider 15B of a linear motor 15A as a driving device, a linear motor 15D as a driving device supported by the support frame 15C, an upper chuck member 15F as a pressing member supported by an output shaft 15E of the linear motor 15D, and a lower chuck member 15G as a pressing member supported at the bottom of the support frame 15C.

[0012] The recovery means 20 is provided with a recovery box 21 for recovering the adhesive sheet AS peeled off from the adherend WK.

[0013] The recovery position changing means 30 is provided with a trajectory changing means 31 that changes the trajectory of the freely falling adhesive sheet AS. The trajectory changing means 31 includes a gas supplying means 31A such as a pressure pump or a turbine that supplies gas as a fluid, and a nozzle 31C connected to the gas supplying means 31A via a pipe 31B.

[0014] The support means 40 includes a linear motor 41 as a driving device, and a table 42 supported by a slider 41A of the linear motor 41 and having a support surface 42A that can be adsorbed and held by a pressure reduction means (holding means) such as a vacuum pump or a vacuum ejector (not shown).

[0015] The operation of the sheet peeling device EA will now be described. First, a user of the sheet peeling device EA (hereinafter simply referred to as "user") sets the peeling tape PT on the sheet peeling device EA, whose components are arranged in the initial positions shown by solid lines in Fig. 1, and then inputs a signal to start automatic operation via input means such as an operation panel or a personal computer (not shown). Then, the peeling means 10 drives the suction means 11M, and starts suction and holding the peeling tape PT on the suction surface 11K.

[0016] Next, when a user or a transport means (not shown), such as an articulated robot or a belt conveyor, places the adherend WK with the adhesive sheet AS attached at a predetermined position on the support surface 42A, as shown by the solid line in Fig. 1, the support means 40 drives the pressure-reducing means (not shown) to begin suction-holding the adherend WK on the support surface 42A. The support means 40 then drives the linear motor 41 to move the table 42 to the right, and stops driving the linear motor 41 when one outer periphery AS1 of the adhesive sheet AS is positioned directly below the pressing head 12C, as shown by the two-dot chain line in Fig. 1. Next, the peeling means 10 drives the linear motor 11N to retract the auxiliary roller 11Q from below the container means 11J, as shown by the two-dot chain line in Fig. 1, and then drives the rotary motor 11D and linear motor 11G to lower the container means 11J to a predetermined position directly above the adhesive sheet AS while feeding out the peeling tape PT. Then, the peeling means 10 drives the heating means 12D and the linear motor 12A, and as shown in FIG. 2(A), the heated pressure head 12C is lowered to press and adhere the peeling tape PT to the outer periphery AS1 of the adhesive sheet AS.

[0017] When the application of the peeling tape PT to the adhesive sheet AS is complete, the peeling means 10 stops driving the suction means 11M and drives the linear motor 12A and direct-acting motor 11G to return the pressure head 12C and the storage means 11J to their initial positions. Next, the peeling means 10 drives the direct-acting motor 14E to pinch the peeling tape PT between the pinch roller 14H and the presser roller 14D with a predetermined pressure. Thereafter, the support means 40 drives the linear motor 41 to move the table 42 leftward, positioning the outer periphery AS1 of the adhesive sheet AS directly below the lowest part of the presser roller 14D. Next, the peeling means 10 drives the rotary motor 11D to wind up the peeling tape PT by a predetermined length and drives the linear motor 14A to fold the peeling tape PT at the lowest part of the presser roller 14D while pressing the folded portion, as shown in FIG. 2(B). Then, the peeling means 10 and the support means 40 drive the rotary motor 14C and the linear motor 41 to move the table 42 to the left while rotating the presser roller 14D counterclockwise, and the peeling means 10 drives the linear motor 14L to move the contact roller 14N to the right while bringing it into contact with the peeling tape PT and the adhesive sheet AS. As a result, the adhesive sheet AS is peeled off from the adherend WK while being pressed against the lowermost part of the presser roller 14D, following the peeling tape PT, and is then folded back by the contact roller 14N.

[0018] When the entire adhesive sheet AS has been peeled off from the adherend WK, the peeling means 10 and supporting means 40 stop driving the linear motor 14L, rotary motor 14C, and linear motor 41, and lock the rotation of the rotary motor 14C with the other outer periphery AS2 of the adhesive sheet AS pinched between the presser roller 14D and pinch roller 14H. Next, the peeling means 10 drives the rotary motor 11D and linear motor 14L to move the contact roller 14N left and right and to pay out and take up the peeling tape PT, so that the area of ​​the peeling tape PT near the outer periphery AS1 of the adhesive sheet AS is positioned directly under the cutting blade 13C. Thereafter, with the rotation of the rotary motor 11D locked, the peeling means 10 drives the linear motor 14L and the rotary motor 14C to release the other outer periphery AS2 of the adhesive sheet AS from between the presser roller 14D and the pinch roller 14H, and aligns one outer periphery AS1 and the other outer periphery AS2 of the adhesive sheet AS as shown by the two-dot chain line in Fig. 2(B). Next, the peeling means 10 drives the linear motor 15A to move the slider 15B leftward to move the upper chuck member 15F and the lower chuck member 15G to the positions shown in Fig. 2(B), and then drives the linear motor 14L to return the contact roller 14N to its initial position.

[0019] Then, the peeling means 10 drives the linear motors 11G and 15D, and as shown in Figure 2(C), lowers the containing means 11J and upper chuck member 15F, folding one side of the adhesive sheet AS over the other, thereby folding the adhesive sheet AS. Next, the peeling means 10 drives the suction means 11M, and after sucking and holding the peeling tape PT with the suction surface 11K, drives the linear motor 13A, and raises and lowers the cutting blade 13C to cut the peeling tape PT. Thereafter, the peeling means 10 drives the linear motor 11G and linear motor 13A, and returns the containing means 11J and cutting blade 13C to their initial positions, and then drives the linear motor 11N, and returns the auxiliary roller 11Q to its initial position. Next, the peeling means 10 drives the linear motor 15A to return the slider 15B to its initial position, and then drives the linear motor 15D to move the upper chuck member 15F to its initial position relative to the linear motor 15D, thereby releasing the adhesive sheet AS from its hold. As a result, the adhesive sheet AS falls freely and is collected in the collection box 21, as shown by the solid line in Fig. 2(D). Note that once every two times the adhesive sheet AS is dropped into the collection box 21, the collection position changing means 30 drives the gas supply means 31A to blow gas onto the adhesive sheet AS from the nozzle 31C, thereby moving the trajectory of the freely falling adhesive sheet AS to the left, as shown by the two-dot chain line in Fig. 2(D), and changing the collection position of the adhesive sheet AS relative to the collection means 20 to the left. Then, the support means 40 stops driving the pressure reducing means (not shown) and releases the suction and holding of the adherend WK on the support surface 42A, and then the user or the transport means (not shown) transports the adherend WK on the table 42 to the next process, and each means drives its respective driving device to return each component to its initial position, and the same operations are repeated thereafter.

[0020] According to the embodiment described above, the recovery position of the adhesive sheet AS relative to the recovery means 20 is changed, so that the peeled adhesive sheet AS can be prevented from being recovered unevenly in one place by the recovery means 20.

[0021] As described above, the best configurations, methods, and the like for implementing the present invention have been disclosed in the above description, but the present invention is not limited thereto. That is, although the present invention has been particularly illustrated and described mainly with reference to specific embodiments, those skilled in the art can make various modifications to the above-described embodiments in terms of shape, material, quantity, and other detailed configurations without departing from the scope of the technical idea and purpose of the present invention. Furthermore, the above-disclosed descriptions limiting the shape, material, and the like are provided as examples to facilitate understanding of the present invention and are not intended to limit the present invention. Therefore, descriptions using names of components that are free from some or all of the limitations on shape, material, and the like are included in the present invention.

[0022] For example, the peeling means 10 may be configured to apply a sheet of peeling tape to the adhesive sheet AS, or may directly hold and peel off the adhesive sheet AS using a driving device or suction holding, etc., without using the peeling tape PT, or may peel off the adhesive sheet AS by driving at least one of the rotation motor 11D, the rotation motor 14C, and the linear motor 41, or may fold the adhesive sheet AS so that one side of the adhesive sheet AS is pressed against one another, or may fold the adhesive sheet AS so that one side of the adhesive sheet AS is not pressed against one another, or the adhesive sheet AS does not need to be folded, or if the peeling tape PT is applied to the adhesive sheet AS by another device, the feeding means 11, pressing means 12, and cutting means 13 may not be provided. The payout means 11 may use, instead of or in combination with the spring 11F as the urging means, an elastic member such as rubber or resin, a driving device, or a pinch roller that sandwiches the peeling tape PT between itself and the drive roller 11E, or may use, instead of or in combination with the auxiliary roller 11Q, a configuration in which the peeling tape PT is brought into contact with the suction surface 11K by using a rod-shaped member, a plate-shaped member, or air blowing, or if the peeling tape PT can be held by the suction means 11M alone, the auxiliary roller 11Q may not be provided, or the peeling tape PT may be supported without urging the rotating arm 11B toward the drive roller 11E, or if the peeling tape PT is supported without urging the rotating arm 11B toward the drive roller 11E, a pinch roller that sandwiches the peeling tape PT between itself and the drive roller 11E may be used. The pressing means 12 does not have to be housed in the housing means 11J, and when a pressure-sensitive adhesive peeling tape PT is used, the heating means 12D may or may not be present. The cutting means 13 does not have to be housed in the housing means 11J, and may not be present if the peeling tape PT is cut by another device. The guiding means 14 may press the adhesive sheet AS so that the area that has been peeled off from the adherend WK comes into contact with the area that is attached to the adherend WK, or may press the adhesive sheet AS so that it does not come into contact with the area, or may press the adhesive sheet AS at any position, such as the left end, middle part, or right end part of the adhesive sheet AS, or may press the folded part of the adhesive sheet AS at a position other than the lowest part of the press-down roller 14D, or may use a plate-like member or air blown in place of or in combination with the pinch roller 14H to pinch the peeling tape PT or the like between the press-down roller 14D, or may move the sheet support member 14K with a driving device other than the linear motor 14E, or it may not be necessary to align one outer periphery AS1 of the adhesive sheet AS with the other outer periphery AS2, or the adhesive sheet AS may be folded two or more times to form three or more folds, or may use a rod-like member, a plate-like member, or the like in place of or in combination with the contact roller 14N. The conveying means 15 may be composed of a driving device such as a belt conveyor or a driving roller that conveys the adhesive sheet AS to the recovery box 21, or other pressing members such as rollers may be used instead of or in combination with the upper chuck member 15F and the lower chuck member 15G, or at least one of the upper chuck member 15F and the lower chuck member 15G may be provided with a bent portion holding means that holds the bent portion of the adhesive sheet AS, and such bent portion holding means may be of any type, such as one that holds the bent portion by suction or by penetrating a penetrating member such as a needle or protrusion into the bent portion.

[0023] The recovery means 20 may be configured to recover the adhesive sheets AS in bags, trays, or the like instead of or in combination with the recovery box 21, or may recover unfolded adhesive sheets AS.

[0024] The recovery position changing means 30 may change the fluid sprayed by the trajectory changing means 31 to a gas such as the atmosphere, a simple gas, a mixed gas, etc., or a liquid such as water, a mixed liquid, an organic solvent, or a gel, or may change the recovery position of the adhesive sheet AS by changing the spray strength of the fluid by the trajectory changing means 31, or may employ a trajectory changing means that moves a contact member such as a plate-shaped member or a rod-shaped member in and out of the trajectory of the adhesive sheet AS along which it freely falls, thereby changing the recovery position of the adhesive sheet AS relative to the recovery means 20, or may employ a detection means composed of an imaging means such as a camera or projector that detects the deviation of the adhesive sheet AS in the recovery means 20, or various sensors such as an optical sensor or an ultrasonic sensor, and change the recovery position of the adhesive sheet AS based on the detection results of the detection means. The recovery position changing means 30 may include a relative position adjusting means for mutually changing the position where the peeling means 10 releases the hold of the adhesive sheet AS and the position of the recovery means 20. In this case, for example, the conveying means 15 may serve as the relative position adjusting means, and the recovery position of the adhesive sheet AS relative to the recovery means 20 may be changed by changing the position where the linear motor 15D releases the hold of the adhesive sheet AS relative to the recovery box 21, or as shown by the two-dot chain line in Fig. 2(D) , a linear motor 32 as a driving device, a rotary motor (not shown), or the like may serve as the relative position adjusting means, and the recovery box 21 may be supported by a slider 32A of the linear motor 32 or an output shaft of the rotary motor (not shown), and the recovery box 21 may be linearly moved or rotated relative to the position where the linear motor 15D releases the support of the adhesive sheet AS, thereby changing the recovery position of the adhesive sheet AS relative to the recovery means 20. The recovery position changing means 30 may be equipped with both a trajectory changing means 31 and a relative position adjusting means, or may change the recovery position of the adhesive sheet AS every time the operation of dropping the adhesive sheet AS into the recovery box 21 is performed a predetermined number of times, such as 5 or 10 times.

[0025] The support means 40 may move the peeling tape PT without or while moving the adherend WK, or may move the adherend WK and the peeling tape PT using other driving equipment such as an articulated robot instead of or in combination with the linear motor 41, and may or may not be included in the sheet peeling device EA of the present invention.

[0026] The materials, types, shapes, etc. of the adhesive sheet AS, release tape PT, and adherend WK are not particularly limited. For example, the adhesive sheet AS, release tape PT, and adherend WK may be circular, oval, polygonal (e.g., triangular, rectangular), or other shapes. The adhesive sheet AS and release tape PT may have pressure-sensitive or heat-sensitive adhesive properties. Furthermore, such adhesive sheets AS and release tapes PT may be, for example, single-layer adhesive sheets, those with an intermediate layer between the substrate and the adhesive layer, those with three or more layers, such as those with a cover layer on top of the substrate, or even so-called double-sided adhesive sheets in which the substrate can be peeled from the adhesive layer. The double-sided adhesive sheets may have a single or multiple intermediate layer, or may be single-layer or multi-layer sheets without an intermediate layer. The adherend WK may be, for example, a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disk, a glass plate, a steel plate, a ceramic plate, a wooden board, or a resin, or may be a composite formed from two or more of these, and may also be any type of member or article. The adhesive sheet AS may be interpreted in terms of its function or use, and may refer to any sheet, film, tape, etc., such as an information label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, or a recording layer-forming resin sheet.

[0027] The means and steps of the present invention are not limited in any way as long as they can perform the operations, functions, or steps described for those means and steps, and are in no way limited to the components and steps of a single embodiment shown in the above embodiment. For example, the peeling means may be any means that holds an adhesive sheet attached to an adherend, peels it from the adherend, and releases the hold on the peeled adhesive sheet to allow it to fall freely, and is not limited in any way as long as it is within the scope of the common general technical knowledge at the time of filing (the same applies to other means and steps).

[0028] The driving device in the above-described embodiments may be an electric device such as a rotary motor, a linear motor, a single-axis robot, or an articulated robot with two or more joints, or an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, or a rotary cylinder, or may be a direct or indirect combination of these. In the above-described embodiments, when a rotating member such as a roller is used, a driving device for rotating the rotating member may be provided, the surface of the rotating member or the rotating member itself may be made of a deformable member such as rubber or resin, or the surface of the rotating member or the rotating member itself may be made of a non-deformable member, or other members such as a rotating or non-rotating shaft or blade may be used instead of the roller, and when a pressing means or pressing member such as a pressing roller or pressing head that presses an object to be pressed is used, a roller, a round bar, a blade material, a brush-like member, or a member that blows air or gas may be used instead of or in combination with the above-described examples, or the pressing member may be made of a deformable member such as rubber, resin, sponge, or a non-deformable member such as metal or resin. Alternatively, when a supporting (holding) means or a supporting (holding) member that supports (holds) a supported member (held member) is used, a configuration in which the supported member is supported (held) may be adopted using a gripping means such as a mechanical chuck or a chuck cylinder, Coulomb force, an adhesive (adhesive sheet, adhesive tape), a pressure-sensitive adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, driving equipment, or the like. When a cutting means or a cutting member that cuts a member to be cut or forms an incision or cutting line in a member to be cut is used, cutting means using a cutter blade, laser cutter, ion beam, fire, heat, water pressure, an electric heating wire, spraying of gas or liquid, or the like may be used instead of or in combination with the above-mentioned examples, or a cutting means may be used to move the cutting means and cut using a combination of appropriate driving equipment. [Explanation of symbols]

[0029] EA...Sheet peeling device 10...Removal means 15...Transportation means (relative position adjustment means) 20...Recovery method 30...Collection position change means 31...Trajectory change means 32...Linear motor (relative position adjustment means) AS...Adhesive sheet WK...Adherend

Claims

1. peeling means for holding an adhesive sheet attached to an adherend and peeling it off from the adherend, and then releasing the adhesive sheet from the adherend to allow it to fall freely; a recovery means for recovering the adhesive sheet at a predetermined position after it has been allowed to fall freely from the peeling means; a recovery position changing means for changing a recovery position of the adhesive sheet within the recovery means, the recovery position changing means includes trajectory changing means for changing the trajectory of the freely falling adhesive sheet by at least one of blowing gas onto the adhesive sheet above the recovery means and moving an abutting member in and out, A sheet peeling device characterized by recovering the adhesive sheet on the trajectory before it was changed by the trajectory changing means using the recovery means at the predetermined position, and recovering the adhesive sheet on the trajectory after it was changed by the trajectory changing means using the recovery means at the predetermined position.

2. A peeling means for holding an adhesive sheet attached to an adherend and peeling it off the adherend, and then releasing the hold on the peeled adhesive sheet to allow the adhesive sheet to fall freely; a recovery means for recovering the adhesive sheet at a predetermined position after it has been allowed to fall freely from the peeling means; a recovery position changing means for changing a recovery position of the adhesive sheet in the recovery means by changing a position at which the adhesive sheet is released by a transport means that holds and transports the peeled adhesive sheet, A sheet peeling device characterized by releasing the adhesive sheet at a position before the change by the conveying means and recovering the adhesive sheet with the recovery means at the predetermined position, and releasing the adhesive sheet at a position after the change by the conveying means and recovering the adhesive sheet with the recovery means at the predetermined position.

3. a peeling step in which an adhesive sheet attached to an adherend is held and peeled off from the adherend, and the held adhesive sheet is released to allow the peeled adhesive sheet to fall freely; a recovery step of recovering the adhesive sheet that has been allowed to fall freely in the peeling step by a recovery means at a predetermined position; a recovery position changing step of changing the recovery position of the adhesive sheet within the recovery means; the recovery position changing step includes a trajectory changing step of changing the trajectory of the freely falling adhesive sheet by at least one of blowing gas onto the adhesive sheet above the recovery means and moving an abutting member in and out; A sheet peeling method characterized by recovering the adhesive sheet on the trajectory before it is changed in the trajectory changing process using the recovery means at the predetermined position, and recovering the adhesive sheet on the trajectory after it is changed in the trajectory changing process using the recovery means at the predetermined position.

4. A peeling step in which an adhesive sheet attached to an adherend is held and peeled off from the adherend, and the peeled adhesive sheet is released from the hold and allowed to fall freely; a recovery step of recovering the adhesive sheet that has been allowed to fall freely in the peeling step by a recovery means at a predetermined position; a recovery position changing step of changing a recovery position of the adhesive sheet in the recovery means by changing a position at which the adhesive sheet is released by a transport means that holds and transports the peeled adhesive sheet; A sheet peeling method characterized by carrying out the steps of releasing the adhesive sheet at a position before the change by the conveying means and recovering the adhesive sheet by the recovery means at the predetermined position, and releasing the adhesive sheet at a position after the change by the conveying means and recovering the adhesive sheet by the recovery means at the predetermined position.

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