Waste gas treatment equipment, system and method for high flow rate combustible waste gas

Abstract

The present application provides a waste gas treatment facility, system and method for high flow rate combustible waste gas. [Solution] The exhaust gas treatment equipment includes a cabinet, an exhaust gas treatment chamber, and a negative pressure device. The cabinet is provided with an exhaust gas inlet and a gas outlet. The exhaust gas treatment chamber is provided within the cabinet and includes a reaction chamber and a heat exchange chamber. The reaction chamber is connected to the exhaust gas inlet and has an open top. The exhaust gas sent to the reaction chamber from the exhaust gas inlet is combusted in the reaction chamber to produce post-combustion gas. The heat exchange chamber is connected to the reaction chamber and to the gas outlet. A heat exchange tube is installed in the heat exchange chamber and a heat exchange medium is installed in the heat exchange tube, thereby lowering the temperature of the post-combustion gas. The negative pressure device is connected to the gas outlet and is configured to extract the gas in the exhaust gas treatment chamber from the gas outlet.

Description

[Technical Field]

[0001] The present application relates to the technical field of semiconductor equipment, and more particularly to waste gas treatment equipment, systems and methods for treating high flow combustible waste gases. [Background technology]

[0002] In semiconductor processes (e.g., integrated circuit wafer manufacturing processes), waste gases are continuously generated, and the waste gases often contain flammable and explosive by-products, such as hydrogen gas, silicon compounds, chlorides, and hydrides. These waste gases are prone to explosion and have high destructive power.

[0003] In the prior art, in order to treat combustible waste gas (e.g., waste gas containing a relatively large amount of hydrogen gas), a sufficient amount of combustion supporting gas is supplied from a gas supply system, the combustible waste gas is burned by the combustion supporting gas, and the post-combustion gas is cooled and cleaned by methods such as showering with circulating water and washing with fresh water, thereby achieving the treatment of the waste gas.

[0004] However, when treating a large flow rate of combustible waste gas (for example, combustible waste gas with a flow rate of 200 slm or more), a large amount of combustion supporting gas is consumed, and the inventors have noticed that in the prior art, all of the combustion supporting gas is supplied to the waste gas treatment facility by a gas supply system, which results in a problem of relatively high costs for treating the waste gas.

[0005] The inventors noticed that in conventional technology, gas combustion is often followed by a water shower to lower the temperature, but in this type of temperature lowering method, large amounts of water resources are consumed because circulating water is controlled to be showered continuously and new water is continuously supplied for cleaning, and because these water resources are supplied by a water supply system, the operating costs of the water supply system are relatively high. Summary of the Invention

[0006] The present application aims to provide a waste gas treatment facility, system and method for high flow rate combustible waste gas.

[0007] In one aspect, the present application provides a waste gas treatment system for a large flow rate of combustible waste gas, the waste gas treatment system including a cabinet, a waste gas treatment chamber, and a negative pressure device, the cabinet is provided with a waste gas inlet and a gas outlet, the waste gas treatment chamber is provided within the cabinet and includes a reaction chamber and a heat exchange chamber, the reaction chamber is connected to the waste gas inlet and has an open top, waste gas sent to the reaction chamber from the waste gas inlet is combusted in the reaction chamber to generate post-combustion gas, the heat exchange chamber is connected to the reaction chamber and to the gas outlet, a heat exchange tube is installed in the heat exchange chamber and a heat exchange medium is installed in the heat exchange tube to reduce the temperature of the post-combustion gas, and the negative pressure device is connected to the gas outlet and configured to extract the gas in the waste gas treatment chamber through the gas outlet.

[0008] In certain embodiments, a heat exchange medium inlet and a heat exchange medium outlet are provided in a sidewall of the heat exchange chamber, each of the heat exchange medium inlet and the heat exchange medium outlet communicating with a heat exchange tube.

[0009] In some embodiments, the heat exchange chamber includes a first heat exchange chamber, a transition chamber, and a second heat exchange chamber, wherein the first heat exchange chamber has a top communicating with the bottom of the reaction chamber and configured to receive post-combustion gas from the reaction chamber, the transition chamber communicates with the bottom of the first heat exchange chamber and receives the gas passing through the first heat exchange chamber, one end of the second heat exchange chamber communicates with the transition chamber and receives the gas passing through the transition chamber, and the other end of the second heat exchange chamber communicates with the gas outlet and discharges the gas passing through the second heat exchange chamber, and at least one S-shaped space is formed within the transition chamber for gas to pass through.

[0010] In some embodiments, a heat exchange medium inlet and a heat exchange medium outlet are provided in a side wall of the second heat exchange chamber, the heat exchange medium inlet being provided in a side wall at the other end of the second heat exchange chamber, and the heat exchange medium outlet being provided in a side wall at one end of the second heat exchange chamber.

[0011] In some embodiments, the exhaust gas treatment equipment further includes a pressure relief device and a pressure relief exhaust gas discharge line, the pressure relief device is installed on a side wall of the reaction chamber, and when the pressure received by the pressure relief device exceeds a first predetermined pressure threshold, the pressure relief device ruptures, and the pressure relief exhaust gas discharge line has one end connected to the pressure relief device and the other end connected to a gas discharge port, and when the pressure relief device ruptures, the gas in the reaction chamber is discharged through the gas discharge port.

[0012] In some embodiments, the exhaust gas treatment equipment further includes an intake pipe, an intake valve, a backup pipe, the backup valve, and a pressure detection device, wherein the intake pipe is installed outside the cabinet and is in communication with the exhaust gas inlet and configured to send the exhaust gas to the exhaust gas inlet, the intake valve is installed in the intake pipe and is configured to control communication and blocking of the intake pipe, the backup pipe is installed outside the cabinet and in communication with the intake pipe and is installed in a portion of the intake pipe between the intake port of the intake pipe and the intake valve, the intake port is an inlet in the intake pipe that is connected to external equipment and receives the exhaust gas, and the backup valve is installed in the backup pipe, and the pressure detection device detects the pressure inside the reaction chamber and controls to open the backup valve and close the intake valve when the pressure inside the chamber exceeds a second predetermined pressure threshold.

[0013] In some embodiments, the waste gas treatment equipment further includes a cabinet exhauster, the cabinet exhauster including a gas inlet and a gas outlet, the gas inlet being located inside the cabinet and the gas outlet being located outside the cabinet, the cabinet exhauster discharging gas inside the cabinet when activated, and the pressure detection device controlling the cabinet exhauster to operate to discharge gas inside the cabinet when the pressure inside the chamber exceeds a second predetermined pressure threshold.

[0014] In some embodiments, the waste gas treatment equipment further comprises a variable frequency blower, and the cabinet is further provided with a combustion supporting gas inlet, the variable frequency blower is installed in the cabinet and connected to the reaction chamber and configured to send air into the reaction chamber, and the reaction chamber is in communication with the combustion supporting gas inlet and receives the combustion supporting gas sent through the combustion supporting gas inlet by the gas supply system.

[0015] In one aspect, the present application provides a semiconductor manufacturing system, the system including the waste gas treatment facility for the high-flow combustible waste gas described above.

[0016] In one aspect, the present application provides a waste gas treatment method, which is used in the waste gas treatment equipment for treating a large amount of combustible waste gas as described above, and includes the steps of combusting the waste gas in a reaction chamber to obtain a burned gas, performing a heat exchange temperature-reducing treatment on the burned gas in a heat exchange chamber to obtain a cooled gas, and discharging the cooled gas from a gas outlet. [Effects of the Invention]

[0017] The waste gas enters the waste gas treatment chamber through the waste gas inlet, and with the help of a negative pressure device, the waste gas passes through the reaction chamber and the heat exchange chamber in order, undergoes combustion and temperature reduction, and is then discharged through the gas outlet, thereby achieving the purpose of waste gas treatment.

[0018] According to the open structure provided in the reaction chamber, the combustion supporting gas used for burning the waste gas in the reaction chamber can be supplied by the external air drawn in through the open structure, thereby reducing the amount of combustion supporting gas supplied by the gas supply system and reducing the cost of the combustion supporting gas.

[0019] The temperature of the combustion gas is lowered by heat exchange with the combustion gas through the heat exchange tubes in the heat exchange chamber and the heat exchange medium in the heat exchange tubes. This eliminates the need to cool the combustion gas by showering it with circulating water or to wash the combustion gas with new water, thereby reducing the amount of water used.

[0020] The waste gas treatment system according to the present application does not require the installation of a pipeline system such as a drainage pipeline and a new water pipeline outside the waste gas treatment chamber, which can contribute to reducing the volume of the waste gas treatment equipment.

[0021] In order to more clearly explain the technical solutions in the embodiments of the present application, the following will briefly explain the drawings necessary for explaining the embodiments. The drawings explained are only some embodiments of the present application. Those skilled in the art can obtain other drawings based on these drawings without using inventive ability. [Brief explanation of the drawings]

[0022] [Figure 1] 1 is a schematic block diagram of a waste gas treatment facility according to an embodiment of the present application; [Figure 2] 1 is a schematic diagram of a waste gas treatment chamber according to an embodiment of the present application; [Figure 3] 1 is a flow chart of a waste gas treatment method according to an embodiment of the present application. DETAILED DESCRIPTION OF THE INVENTION

[0023] Hereinafter, exemplary embodiments will be described more fully with reference to the drawings. However, the exemplary embodiments may be implemented in various forms and are not limited to the embodiments described herein. Providing these embodiments will make this application thorough and complete, and will fully convey the concept of the exemplary embodiments to those skilled in the art. In the drawings, similar reference numerals indicate similar parts, and therefore redundant description will be omitted.

[0024] The described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided to thoroughly understand the embodiments of the present disclosure. However, it will be apparent to those skilled in the art that the technical solutions of the present disclosure can be implemented without these specific details, or that other methods, elements, materials, devices, etc. may be used. In such cases, well-known structures, methods, devices, implementations, materials, or operations are not specifically shown or described.

[0025] Additionally, the terms "comprise," "have," and similar terms are intended to cover a non-exclusive inclusion. For example, a process, method, system, or facility comprising a series of steps or units is not necessarily limited to only those specified elements, but may include other elements not specified or inherent in such process, method, product, or facility.

[0026] The terms "first," "second," and the like used in the specification, claims, and drawings of this application are intended to distinguish between different objects and do not describe a particular order.

[0027] The technical solutions of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. The described embodiments are only some of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without using inventive ability fall within the scope of protection of the present application.

[0028] In one aspect, the present application provides a waste gas treatment system for a large flow rate of combustible waste gas. As shown in Figure 1, the waste gas treatment system includes a cabinet 01, a waste gas treatment chamber 02, and a negative pressure device 03. The cabinet 01 is provided with a waste gas inlet 11 and a gas outlet 12, and the waste gas treatment chamber 02 is provided within the cabinet 01. The negative pressure device 03 is in communication with the gas outlet 12 and is configured to extract gas from the waste gas treatment chamber 02 through the gas outlet 12.

[0029] As shown in Figure 2, the exhaust gas treatment chamber 02 includes a reaction chamber 21 and a heat exchange chamber 22. The reaction chamber 21 is connected to the exhaust gas inlet 11 and is configured to receive exhaust gas sent from the exhaust gas inlet 11 to the reaction chamber 21. The exhaust gas is combusted in the reaction chamber 21 to generate a gas after combustion. The heat exchange chamber 22 is connected to both the reaction chamber 21 and the gas outlet 12 and is configured to perform a heat exchange temperature-lowering process on the gas after combustion from the reaction chamber 21 to obtain a gas after temperature-lowering. The gas after temperature-lowering is discharged from the gas outlet 12.

[0030] 2, the top of the reaction chamber 21 has an open structure 211. In order for the waste gas to be burned in the reaction chamber 21, a combustion-supporting gas such as air or oxygen gas needs to be introduced. The reaction chamber 21 is put into a negative pressure state by the action of the negative pressure device 03, so that the outside air flows into the reaction chamber 21 through the open structure 211 at the top of the reaction chamber 21, thereby supplying the combustion-supporting gas to the reaction chamber 21.

[0031] As shown in FIG. 2, the top of the reaction chamber 21 and the exhaust gas inlet 11 are connected by an exhaust gas inlet pipe, one end of which is connected to the exhaust gas inlet 11 and the other end of which penetrates the open structure 211 and is installed inside the reaction chamber 21.

[0032] In some embodiments, the reaction chamber 21 according to the present application is configured as a short reaction chamber structure. A large flow rate of flammable waste gas (e.g., a large flow rate of hydrogen gas waste gas) is easily combustible, requires less energy to ignite, and releases more heat.

[0033] In view of this, the embodiment of the present application corresponds to shortening the length of the reaction chamber 21 in the prior art and moving the bottom end of the prior art reaction chamber 21 upward relative to the prior art without changing the overall dimensions of the waste gas treatment chamber 02.

[0034] In this way, the reaction chamber 21 is shortened, and some excess space is formed below the bottom end of the reaction chamber 21. In the embodiment of the present application, this excess space also functions as part of the heat exchange chamber 22 to perform a temperature reduction process on the combustion gas. Therefore, the exhaust gas treatment equipment of the present application can lengthen the temperature reduction space compared to the prior art, thereby improving the temperature reduction effect of the exhaust gas treatment equipment.

[0035] 2, a heat exchange tube 221 is installed in the heat exchange chamber 22, and a heat exchange medium 222 is provided in the heat exchange tube 221. A low-temperature heat exchange medium 222 is used as the heat exchange medium 222 in the heat exchange tube 221.

[0036] The combustion gas produced in the reaction chamber 21 is sent into the heat exchange chamber 22 and comes into contact with the outer wall of the heat exchange tubes 221 in the heat exchange chamber 22 .

[0037] As a result, the heat exchange medium 222 in the heat exchange tube 221 exchanges heat with the post-combustion gas outside the heat exchange tube 221, absorbing the heat from the post-combustion gas and lowering the temperature of the post-combustion gas. The gas with the lowered temperature is then discharged from the gas outlet 12, completing the treatment of the waste gas.

[0038] In some embodiments, the heat exchange medium 222 is a material that transfers heat during the heat exchange process, and can be, but is not limited to, relatively low-temperature water, refrigerant, and relatively low-temperature air to reduce the temperature of the post-combustion gas.

[0039] In conventional technologies, the temperature of post-combustion waste gas is often lowered by showering it with cooling water. The gas obtained by showering it with cooling water contains several solid or liquid products, which must be removed by washing with water. Therefore, in conventional technologies, after obtaining the post-combustion gas, the post-combustion gas is further treated through shower cooling, washing, water / gas separation, mist removal, and other processes before being discharged.

[0040] Prior art waste gas treatment systems require a continuous supply of recycled cooling water and fresh water for shower cooling, washing, etc.

[0041] However, in the conventional technology, the space for cooling is relatively small and a large amount of heat is released by the combustion of a large amount of waste gas, so the amount of recycled cooling water used is relatively large. For example, the heat generated by the combustion of hydrogen gas with a flow rate of 600 slm is approximately 7476 kJ, and in order to cool the gas after combustion to 50°C, the flow rate of recycled cooling water needs to be approximately 69.7 L / min.

[0042] Furthermore, in the prior art, new water is generally continuously supplied by a water supply system, and the new water cannot be recycled, resulting in a relatively large amount of water resource usage and a relatively high cost for the water supply system.

[0043] In other words, prior art waste gas treatment methods consume large amounts of water resources.

[0044] Furthermore, in the case of the conventional waste gas treatment method, a pipeline system such as a drainage pipeline and a new water pipeline is required outside the waste gas treatment chamber 02, so the volume of the waste gas treatment equipment is relatively large and the cost is relatively high.

[0045] In the waste gas treatment equipment for large volume combustible waste gas according to the present application, both the chambers for water shower cooling and cleaning in the prior art are replaced with the heat exchange chamber 22, and the temperature of the burned gas is lowered by heat exchange between the heat exchange medium 222 in the heat exchange tube 221 and the burned gas, and the cooled gas can be directly discharged from the gas outlet 12, eliminating the need to lower the temperature by a water shower and the need for processing such as cleaning of the cooled gas.

[0046] In this way, if the heat exchange medium 222 is not an aqueous medium, it becomes unnecessary to use circulated cooling water, and the burden on the water supply system can be reduced.

[0047] When the heat exchange medium 222 is an aqueous medium, the waste gas treatment equipment of the present application uses both the chambers for water shower cooling and cleaning in the prior art as the heat exchange chamber 22, which is equivalent to lengthening the temperature reduction space, so that the water flow rate of the heat exchange medium 222 is smaller than the flow rate of conventional recycled cooling water, which can contribute to reducing the amount of recycled cooling water used.

[0048] The waste gas treatment equipment according to the present invention does not require the use of fresh water to wash the gas after the temperature has been lowered, and therefore the amount of fresh water used is reduced.

[0049] The waste gas treatment equipment according to the present application does not require a pipeline system such as a drainage pipeline and a new water pipeline outside the waste gas treatment chamber 02, which can contribute to reducing the volume of the waste gas treatment equipment.

[0050] In the above-described waste gas treatment equipment, waste gas enters the waste gas treatment chamber 02 through the waste gas inlet 11, and under the action of the negative pressure device 03, the waste gas passes through the reaction chamber 21 and the heat exchange chamber 22 in order to be combusted and cooled, and then is discharged from the gas outlet 12, thereby achieving the purpose of waste gas treatment.

[0051] According to the open structure 211 provided in the reaction chamber 21, the combustion supporting gas used for burning the waste gas in the reaction chamber 21 can be supplied by the external air drawn in through the open structure 211, thereby reducing the amount of combustion supporting gas supplied by the gas supply system and reducing the cost of the combustion supporting gas.

[0052] The temperature of the combustion gas is lowered by heat exchange with the combustion gas through the heat exchange tubes 221 in the heat exchange chamber 22 and the heat exchange medium 222 in the heat exchange tubes 221. This eliminates the need to cool the combustion gas by showering it with circulating water or to wash the combustion gas with new water, thereby reducing the amount of water resources used.

[0053] The waste gas treatment system according to the present application does not require the installation of a pipeline system such as a drainage pipeline and a new water pipeline outside the waste gas treatment chamber 02, which contributes to reducing the volume of the waste gas treatment equipment.

[0054] 2, a sidewall of the heat exchange chamber 22 is provided with a heat exchange medium inlet 222 and a heat exchange medium outlet 223. The heat exchange medium inlet 222 is configured to receive a heat exchange medium, and the heat exchange medium outlet 223 is configured to discharge the heat exchange medium.

[0055] 2, the heat exchange medium inlet 222 and the heat exchange medium outlet 223 each communicate with a heat exchange tube 221. The heat exchange medium flows into the heat exchange tube 221 from the heat exchange medium inlet 222, and the heat exchange medium in the heat exchange tube 221 flows through the flow path of the heat exchange tube 221 and flows out from the heat exchange medium outlet 223.

[0056] In an exemplary embodiment, the heat exchange tubes 221 are evenly installed between the inlet side and the outlet side of the heat exchange chamber 22. The inlet side of the heat exchange chamber 22 is the inlet side through which the combustion gas flows into the heat exchange chamber 22, and the outlet side of the heat exchange chamber 22 is the side of the heat exchange chamber 22 that connects to the gas outlet 12 and is used to discharge the cooled gas.

[0057] As the combustion gas flows into the heat exchange chamber 22 and is discharged from the heat exchange chamber 22, it continuously comes into contact with the outer wall of the heat exchange tube 221 and exchanges heat with the heat exchange medium in the heat exchange tube 221, thereby achieving a relatively good temperature reduction effect.

[0058] In some embodiments, as shown in FIG. 2, the heat exchange chamber 22 specifically includes a first heat exchange chamber 224, a transition chamber 225, and a second heat exchange chamber 226.

[0059] In an exemplary embodiment, the first heat exchange chamber 224 has a top portion communicating with the bottom portion of the reaction chamber 21 and is configured to receive the combustion gas from the reaction chamber 21. The combustion gas comes into contact with the outer walls of the heat exchange tubes 221 in the first heat exchange chamber 224 in the first heat exchange chamber 224 to perform a first temperature reduction process, thereby obtaining gas whose temperature has been reduced for the first time.

[0060] In an exemplary embodiment, the transition chamber 225 communicates with the bottom of the first heat exchange chamber 224 and the bottom of the second heat exchange chamber 226. As shown in Figure 2, the bottom of the transition chamber 225 is a closed structure, and the bottom of the first heat exchange chamber 224 communicates directly with the top of the transition chamber 225, and the bottom of the second heat exchange chamber 226 communicates directly with the top of the transition chamber 225.

[0061] The transition chamber 225 is configured to receive the gas whose temperature has been lowered the first time from the first heat exchange chamber 224. The gas whose temperature has been lowered the first time flows through the transition chamber 225, and while flowing through the transition chamber 225, the gas comes into contact with the outer wall of the heat exchange tube 221 inside the transition chamber 225, and is subjected to a second temperature lowering process inside the transition chamber 225, thereby obtaining gas whose temperature has been lowered again.

[0062] 2, there is at least one S-shaped space 2251 within the transition chamber 225 for gas to pass through. The heat exchange tubes 221 within the transition chamber 225 are arranged along the S-shaped space 2251, i.e., the heat exchange tubes 221 are configured to penetrate the transition chamber 225 via the S-shaped space 2251. The gas whose temperature has been initially lowered is sent through the S-shaped space 2251 within the transition chamber 225 and is lowered in temperature by contacting the outer wall of the heat exchange tubes 221 within the S-shaped space 2251.

[0063] Providing an S-shaped space 2251 within the transition chamber 225 contributes to extending the total flow path of the gas within the transition chamber 225, thereby contributing to extending the time that the gas whose temperature has been lowered the first time stays within the transition chamber 225, contributing to extending the contact time between the gas whose temperature has been lowered the first time and the heat exchange tube 221, and contributing to improving the temperature lowering effect of the gas whose temperature has been lowered the first time.

[0064] In some embodiments, the S-shaped space 2251 in the transition chamber 225 is specifically realized by installing a partition set in the transition chamber 225. As shown in Figure 2, the partition set includes a first partition set 2252 and a second partition set 2253, where a first height corresponding to the first partition set 2252 is smaller than the chamber height of the transition chamber 225. A second height corresponding to the second partition set 2253 is smaller than the chamber height of the transition chamber 225.

[0065] The bottom of the first partition plate 2252 is vertically connected to the bottom of the transition chamber 225 , thereby forming a first gap between the top of the transition chamber 225 and the top of the first partition plate 2252 .

[0066] The top of the second partition plate 2253 is vertically connected to the top of the transition chamber 225 , thereby forming a second gap between the bottom of the transition chamber 225 and the bottom of the second partition plate 2253 .

[0067] The first partition plate 2252 and the second partition plate 2253 are parallel to each other and are spaced apart by a predetermined third gap.

[0068] The first gap, the second gap, and the third gap form the S-shaped space 2251. The gas whose temperature has been lowered the first time flows through the transition chamber 225 along the S-shaped space 2251.

[0069] 2, one end of the second heat exchange chamber 226 communicates with the top of the transition chamber 225, receives the cooled gas from the transition chamber 225, and reduces the temperature of the cooled gas again in the second heat exchange chamber 226 to obtain cooled gas. The other end of the second heat exchange chamber 226 communicates with the gas outlet 12, and discharges the cooled gas from the gas outlet 12.

[0070] In some embodiments, as shown in FIG. 2, the heat exchange medium inlet 222 and the heat exchange medium outlet 223 are located on a side wall of the second heat exchange chamber 226, and the heat exchange medium inlet 222 is located above the heat exchange medium outlet 223.

[0071] 2, the heat exchange medium inlet 222 is provided in a sidewall at one end of the second heat exchange chamber 226. The one end of the second heat exchange chamber 226 is an end that communicates with the transition chamber 225. The heat exchange medium inlet 222 is provided in a sidewall at the other end of the second heat exchange chamber 226. The other end of the second heat exchange chamber 226 is an end that communicates with the gas outlet 12.

[0072] In some embodiments, a large amount of heat is generated during the combustion of a large amount of waste gas in the reaction chamber, which may cause an explosion due to excessive pressure in the reaction chamber. In view of this, in order to reduce the loss caused by an explosion in the reaction chamber, the waste gas treatment equipment further includes a pressure relief device 04 and a pressure relief waste gas discharge line 05, as shown in FIG.

[0073] 2, the pressure relief device 04 is installed on the sidewall of the reaction chamber 21. When the pressure received by the pressure relief device 04 exceeds a first predetermined pressure threshold, the pressure relief device 04 will burst.

[0074] Optionally, the pressure relief device 04 is specifically a rupture disk.

[0075] Optionally, the first predetermined pressure threshold is specifically determined based on the explosion pressure of the reaction chamber 21. For example, the reaction chamber 21 may explode when the pressure inside the chamber is 80, that is, the explosion pressure of the reaction chamber 21 is 80 or more, and the first predetermined pressure threshold may be specifically 80 or a value obtained by subtracting a predetermined value from the explosion pressure, for example, 75.

[0076] The pressure release waste gas discharge pipe 05 has one end connected to the pressure release device 04 and the other end connected to the gas discharge port 12, and when the pressure release device 04 ruptures, the gas in the reaction chamber 21 is sent to the gas discharge port 12.

[0077] In the exemplary embodiment, a large flow rate of combustible waste gas is introduced into the reaction chamber 21, and energy is released during the combustion process of the waste gas, so that the pressure within the reaction chamber 21 is relatively high. If the pressure within the reaction chamber 21 is too high, there is a risk that the reaction chamber 21 will explode.

[0078] In the embodiment of the present application, a pressure relief device 04 is installed on the side wall of the reaction chamber 21. When the pressure in the reaction chamber 21 is relatively high and there is a risk of explosion, the pressure relief device 04 will automatically burst when the pressure received by the pressure relief device 04 exceeds a first predetermined pressure threshold. Then, the combustible waste gas and the gas after combustion in the reaction chamber 21 are sent to the pressure relief waste gas discharge line 05 through the side wall where the pressure relief device 04 is located. Then, the gas in the reaction chamber 21 is sent to the gas discharge port 12 via the pressure relief waste gas discharge line 05 and discharged from the gas discharge port 12, and then the operator can take appropriate measures.

[0079] In the embodiment of the present application, by installing the pressure release device 04 and the pressure release waste gas discharge line 05, when there is a risk of explosion, they can operate in a timely manner to reduce the probability of explosion in the reaction chamber 21, and contribute to reducing losses caused by the explosion of the reaction chamber 21.

[0080] In some embodiments, as shown in FIG. 2, the exhaust gas treatment system further includes an intake line 06, an intake valve 07, a backup line 08, a backup valve 09, and a pressure sensing device.

[0081] 1 and 2, the intake pipe 06 is installed outside the cabinet 01. One end of the intake pipe 06 communicates with the waste gas inlet 11, and the other end is an intake port, which is an inlet through which the intake pipe 06 is connected to external equipment and receives waste gas.

[0082] That is, waste gas generated in an external facility is sent from the intake port to the intake pipe 06, sent via the intake pipe 06 to the waste gas intake port 11, and then sent into the reaction chamber 21 for treatment.

[0083] The intake valve 07 is installed in the intake pipe 06 and is configured to control the communication and blocking of the intake pipe 06 to control the feeding of the waste gas in the intake pipe 06.

[0084] When the intake valve 07 is opened to put the intake pipe 06 in a communication state, the waste gas received by the intake pipe 06 is sent to the waste gas inlet 11 and then sent to the reaction chamber 21. When the intake valve 07 is closed, the waste gas received by the intake pipe 06 cannot be sent to the waste gas inlet 11, that is, cannot be sent to the reaction chamber 21.

[0085] 1 and 2, the auxiliary pipe 08 is installed outside the cabinet 01. One end of the auxiliary pipe 08 communicates with the intake pipe 06, and the other end of the auxiliary pipe 08 is installed in a portion of the intake pipe 06 between the intake port of the intake pipe 06 and the intake valve 07. The auxiliary valve 09 is installed in the auxiliary pipe 08 and is configured to control communication and blocking of the auxiliary pipe 08.

[0086] Optionally, the end of the auxiliary line 08 that is not in communication with the intake line 06 may be connected to, specifically, an auxiliary exhaust gas treatment facility or an exhaust gas collection facility, but is not limited thereto.

[0087] In some embodiments, a pressure sensing device is connected to the intake valve 07 and the auxiliary valve 09. The pressure sensing device can sense the pressure within the reaction chamber 21 and control the auxiliary valve 09 to open and the intake valve 07 to close when the pressure within the chamber exceeds a second predetermined pressure threshold.

[0088] In an exemplary embodiment, when the pressure inside the reaction chamber 21 exceeds the second predetermined pressure threshold, the pressure inside the reaction chamber 21 is excessive and there is a risk of explosion. In this case, the pressure detection device controls the intake valve 07 to close, blocking the intake line 06, and the waste gas from the external equipment cannot be sent into the reaction chamber 21 via the intake line 06.

[0089] In this case, the pressure detection device controls the auxiliary valve 09 to open, thereby putting the auxiliary pipe 08 into a communication state, and thereby the waste gas from the external facility can be sent to the auxiliary pipe 08 via the intake pipe 06 and sent out via the auxiliary pipe 08. For example, the waste gas from the external facility is sent to the auxiliary waste gas treatment facility via the intake pipe 06 and the auxiliary pipe 08 and treated by the auxiliary waste gas treatment facility.

[0090] In some embodiments, the second predetermined pressure threshold may be equal to the first predetermined pressure threshold, less than the first predetermined pressure threshold, or greater than the first predetermined pressure threshold, and is not limited thereto.

[0091] In the present application, by installing the intake pipe 06, the intake valve 07, the spare pipe 08, the spare valve 09 and the pressure detection device, when the pressure inside the reaction chamber 21 is excessive, the waste gas from the external equipment is sent to another equipment for appropriate treatment, and is not sent further into the reaction chamber 21 where there is a risk of explosion, thereby reducing the risk of explosion of the reaction chamber 21. Furthermore, if the reaction chamber 21 has already exploded, such installation can reduce the damage caused by the explosion of the reaction chamber 21.

[0092] In some embodiments, the waste gas treatment facility specifically further comprises a cabinet exhauster.

[0093] The cabinet exhauster includes a gas inlet and a gas outlet, the gas inlet being located inside the cabinet 01 and the gas outlet being located outside the cabinet 01. When the cabinet exhauster is operating, it can exhaust gas inside the cabinet 01 through the gas inlet and the gas outlet.

[0094] The pressure detection device controls the cabinet exhauster to operate and exhaust gas from the cabinet 01 when the pressure in the chamber exceeds a second predetermined pressure threshold.

[0095] In an exemplary embodiment, if the pressure inside the reaction chamber 21 is excessive, the reaction chamber 21 may explode, or the pressure release device 04 may burst, causing the gas inside the reaction chamber 21 to be discharged through the gas outlet 12. In such a case, the gas inside the reaction chamber 21 may overflow from the open structure 211 of the reaction chamber 21 and further overflow into the cabinet 01, causing some accumulation of gas inside the cabinet 01.

[0096] In response to this, when the pressure detection device detects that the pressure inside the chamber has exceeded a second predetermined pressure threshold, it controls the cabinet exhauster to operate, causing the cabinet exhauster to exhaust gas that has overflowed from inside the reaction chamber 21 into the cabinet 01 from the cabinet 01, thereby reducing the risk of a serious accident occurring.

[0097] 1 and 2, the waste gas treatment facility further includes a variable frequency blower 010. The variable frequency blower 010 is installed in the cabinet 01, communicates with the reaction chamber 21, and is configured to blow air into the reaction chamber 21.

[0098] The cabinet 01 is further provided with a combustion supporting gas inlet 011. The reaction chamber 21 is in communication with the combustion supporting gas inlet 011. The combustion supporting gas inlet 011 can receive the combustion supporting gas supplied by a gas supply system.

[0099] In an exemplary embodiment, as shown in FIG. 2, the combustion supporting gas inlet 011 and the reaction chamber 21 are connected by a pipe line, one end of which is the combustion supporting gas inlet 011 and the other end of which extends from an opening at the top of the reaction chamber 21 into the interior of the reaction chamber 21.

[0100] In an exemplary embodiment, the combustion supporting gas in the reaction chamber 21 specifically has three sources. One is to naturally draw air from outside the reaction chamber 21 through the open structure 211 of the reaction chamber 21, and the air is used as the combustion supporting gas in the reaction chamber 21. Another is to introduce air from the external environment outside the cabinet 01 into the reaction chamber 21 by a variable frequency blower 010, and the air is used as the combustion supporting gas. Another is to introduce the combustion supporting gas into the reaction chamber 21 by a gas supply system through the combustion supporting gas inlet 011.

[0101] In an exemplary embodiment, the combustion supporting gas supplied into the reaction chamber 21 by the gas supply system is specifically CDA (Clean Dry Air).

[0102] By installing the open structure 211, the variable frequency blower 010 and the combustion supporting gas inlet 011, the present application can provide sufficient combustion supporting gas in the reaction chamber 21 to combust a large amount of combustible waste gas and dilute the concentration of the waste gas in the reaction chamber 21. In this way, the amount of combustion supporting gas supplied by the gas supply system can be reduced.

[0103] In some embodiments, the exhaust gas treatment equipment further includes a control device that detects the exhaust gas flow rate in the reaction chamber 21, determines a gas supply amount for the variable frequency blower 010 based on the exhaust gas flow rate, a predetermined open structure intake air flow rate, and a predetermined gas supply amount of the gas supply system, and controls the variable frequency blower 010 to send air into the reaction chamber 21 according to the gas supply amount.

[0104] The predetermined open structure intake air flow rate is specifically the flow rate of air that is drawn in through the open structure 211 when the flow rate of the waste gas in the reaction chamber 21 is the waste gas flow rate.

[0105] The predetermined gas supply system gas supply amount is the flow rate of the gas supplied by the gas supply system.

[0106] The control device determines the required amount of combustion support gas based on the waste gas flow rate. For example, oxygen gas accounts for about 1 / 5 of the amount of oxygen in air. To completely combust the waste gas and reduce the risk of explosion due to an excessively high content of oxygen in the waste gas, the required amount of combustion support gas should be three times the waste gas flow rate. In other words, 1 slm of hydrogen gas consumes about 3 slm of air, and about 1,800 slm of air is required to process 600 slm of hydrogen gas.

[0107] Then, the control device determines the gas supply amount of the variable frequency blower 010 based on the required amount, the predetermined open structure intake air flow rate and the predetermined gas supply system gas supply amount, and controls the variable frequency blower 010 to send the air of the gas supply amount to the reaction chamber 21 according to the gas supply amount, thereby ensuring complete combustion of the waste gas and reducing the probability of explosion in the reaction chamber 21.

[0108] In another aspect of the present application, the present application further provides a semiconductor manufacturing system, which includes a waste gas treatment facility for high-flow combustible waste gas according to the above embodiment.

[0109] In another aspect of the present application, the present application further provides a waste gas treatment method, which is used in the waste gas treatment equipment for treating a large amount of combustible waste gas according to the above embodiment. As shown in Figure 3, the method includes steps S31 to S33.

[0110] In step S31, the waste gas is combusted in the reaction chamber 21 to obtain a combustion gas.

[0111] In step S32, the gas after combustion is subjected to a heat exchange temperature-lowering process in the heat exchange chamber 22 to obtain a gas after temperature-lowering.

[0112] In step S33, the gas after the temperature drop is discharged from the gas outlet 12.

[0113] The above are only preferred embodiments of the present application and are not intended to limit the present application. Although the present application has been described in detail with reference to the above embodiments, those skilled in the art may modify the technical solutions of the above embodiments and make equivalent substitutions for some of the features therein. As long as they do not deviate from the spirit and principles of the present application, any modifications, equivalent substitutions, improvements, etc., fall within the protection scope of the present application. [Explanation of symbols]

[0114] 01 Cabinet 11 Waste gas intake 12 Gas outlet 02 Waste gas treatment room 21 Reaction chamber 211 Open structure 22 Heat exchange room 221 Heat exchange tube 222 Heat exchange medium inlet 223 Heat exchange medium outlet 224 1st heat exchange room 225 Transition Room 2251 S-shaped space 2252 First partition 2253 Second partition 226 2nd heat exchange room 03 Negative pressure device 04 Pressure relief device 05 Pressure release waste gas discharge line 06 Intake pipe 07 Intake valve 08 Reserve pipeline 09 Spare valve 010 Variable Frequency Blow Machine 011 Combustion-supporting gas inlet

Claims

1. a cabinet, a waste gas treatment chamber, and a negative pressure device; The cabinet is provided with a waste gas inlet and a gas outlet; the waste gas treatment chamber is provided in the cabinet and includes a reaction chamber and a heat exchange chamber; the reaction chamber is in communication with the exhaust gas inlet, the top of the reaction chamber has an open structure, and exhaust gas sent from the exhaust gas inlet to the reaction chamber is combusted in the reaction chamber to generate a combustion gas; the heat exchange chamber is in communication with the reaction chamber and the gas outlet, a heat exchange tube is installed in the heat exchange chamber, and a heat exchange medium is installed in the heat exchange tube, thereby reducing the temperature of the combustion gas; The negative pressure device is in communication with the gas outlet and is configured to extract gas in the waste gas treatment chamber through the gas outlet. A waste gas treatment facility for large flow rates of combustible waste gas.

2. A heat exchange medium inlet and a heat exchange medium outlet are provided on a side wall of the heat exchange chamber, and the heat exchange medium inlet and the heat exchange medium outlet are each in communication with the heat exchange tube.

2. The waste gas treatment facility for large flow rate combustible waste gas according to claim 1.

3. the heat exchange chamber includes a first heat exchange chamber, a transition chamber, and a second heat exchange chamber; the first heat exchange chamber has a top portion in communication with a bottom portion of the reaction chamber and is configured to receive post-combustion gas from the reaction chamber; the transition chamber communicates with the bottom of the first heat exchange chamber and receives gas passing through the first heat exchange chamber; One end of the second heat exchange chamber communicates with the transition chamber to receive the gas passing through the transition chamber, and the other end of the second heat exchange chamber communicates with the gas outlet to discharge the gas passing through the second heat exchange chamber; At least one S-shaped space is formed within the transition chamber for gas to pass through.

3. The waste gas treatment facility for large flow rate combustible waste gas according to claim 2.

4. The heat exchange medium inlet and the heat exchange medium outlet are provided in a side wall of the second heat exchange chamber, the heat exchange medium inlet is provided in the side wall at the other end of the second heat exchange chamber, and the heat exchange medium outlet is provided in the side wall at the one end of the second heat exchange chamber.

4. The waste gas treatment facility for large flow rate combustible waste gas according to claim 3.

5. a pressure relief device and a pressure relief waste gas exhaust line; the pressure release device is installed on a sidewall of the reaction chamber, and when a pressure received by the pressure release device exceeds a first predetermined pressure threshold, the pressure release device bursts; The pressure release waste gas discharge pipe has one end connected to the pressure release device and the other end connected to the gas discharge port, and when the pressure release device bursts, the gas in the reaction chamber is discharged through the gas discharge port.

2. The waste gas treatment facility for large flow rate combustible waste gas according to claim 1.

6. an intake pipe, an intake valve, a spare pipe, a spare valve, and a pressure detection device; the intake pipe is installed outside the cabinet and communicates with the exhaust gas inlet, configured to deliver exhaust gas to the exhaust gas inlet; the intake valve is installed in the intake pipe line and configured to control communication and blocking of the intake pipe line; the auxiliary pipeline is installed outside the cabinet, communicates with the intake pipeline, and is installed in a portion of the intake pipeline between an intake port of the intake pipeline and the intake valve, the intake port being an inlet of the intake pipeline connected to external equipment and receiving waste gas; the standby valve is installed in the standby pipeline; The pressure detection device detects the pressure in the reaction chamber, and when the pressure in the chamber exceeds a second predetermined pressure threshold, controls the auxiliary valve to open and the intake valve to close.

2. The waste gas treatment facility for large flow rate combustible waste gas according to claim 1.

7. Further equipped with a cabinet exhauster, the cabinet exhauster includes a gas inlet and a gas outlet, the gas inlet is provided inside the cabinet, and the gas outlet is provided outside the cabinet, and when the cabinet exhauster is operated, it exhausts gas inside the cabinet; The pressure detection device controls the cabinet exhauster to operate when the pressure in the chamber exceeds a second predetermined pressure threshold to exhaust gas from the cabinet.

7. The waste gas treatment facility for large flow rate combustible waste gas according to claim 6.

8. Further comprising a variable frequency blower; the variable frequency blower is installed in the cabinet, connected to the reaction chamber, and configured to blow air into the reaction chamber; The cabinet is further provided with a combustion-supporting gas inlet; The reaction chamber is in communication with the combustion supporting gas inlet and receives the combustion supporting gas delivered through the combustion supporting gas inlet by a gas supply system.

2. The waste gas treatment facility for large flow rate combustible waste gas according to claim 1.

9. The waste gas treatment facility for large volume of combustible waste gas according to any one of claims 1 to 8 is included. A semiconductor manufacturing system comprising:

10. A waste gas treatment method used in a waste gas treatment facility for a large flow rate of combustible waste gas according to any one of claims 1 to 8, comprising: Combusting the waste gas in the reaction chamber to obtain a combustion gas; a step of performing a heat exchange temperature-reducing process on the combustion gas in a heat exchange chamber to obtain a temperature-reduced gas; and discharging the gas after the temperature has been lowered from a gas outlet. A method for treating waste gas comprising:

Images