Photoelectric conversion device, equipment including photoelectric conversion device, and method for manufacturing photoelectric conversion device

Abstract

To provide a photoelectric conversion device enhanced in its performance and reliability.SOLUTION: A photoelectric conversion device comprises: a semiconductor substrate having a photoelectric conversion part; a metal-containing part provided over a semiconductor substrate so as not to overlap with at least part of the photoelectric conversion part; an interlayer insulation film disposed over the semiconductor substrate so as to cover the metal-containing part; a first silicon nitride layer disposed over the photoelectric conversion part so as to have a portion located between the interlayer insulation film and the semiconductor substrate; a silicon oxide film having a portion disposed between the first silicon nitride layer and the photoelectric conversion part, and a portion disposed between the interlayer insulation film and the metal-containing part; a second silicon nitride layer disposed between the silicon oxide film and the metal-containing part; a contact plug in contact with the metal-containing part, extending through the interlayer insulation film, the silicon oxide film, and the second silicon nitride layer; and a contact plug in contact with the semiconductor substrate, extending through the interlayer insulation film and the silicon oxide film.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a photoelectric conversion device. [Background technology]

[0002] In a photoelectric conversion device, a photoelectric conversion unit and elements other than the photoelectric conversion unit are provided on the same semiconductor substrate. An anti-reflection structure and a waveguide structure are provided on the photoelectric conversion unit, and contact plugs and the like are connected to the elements. Therefore, it is necessary to design a photoelectric conversion device taking into account the characteristics of both the photoelectric conversion unit and the other elements.

[0003] Patent Document 1 discloses that a silicide block film (71) is formed on the photoelectric conversion section (21) from the same film layer as a sidewall formation film (137) having a stacked structure of a silicon oxide film (134) and a silicon nitride film (135). It also discloses that an etching stopper film (74) made of a silicon nitride film is formed over the entire surface of the pixel section (12) and peripheral circuit section (13). It also discloses that a waveguide (23) is formed on the photoelectric conversion section (21).

[0004] Patent Document 2 discloses a control film (410) that serves as an etching stopper when forming an opening (421) for a light-guiding member (420), and a protective film (250) that serves as an etching stopper for forming a contact hole in the peripheral circuit region. It also describes that the control film (410) and the protective film (250) are formed from the same silicon nitride film.

[0005] Patent Document 3 discloses that a waveguide is formed that penetrates an interlayer insulating film (IF1) and a contact etch stress liner film (CESL) that is a silicon nitride film and reaches a sidewall insulating film (SWI) that is also a silicon nitride film. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Application Laid-Open No. 2010-56516 [Patent Document 2] Japanese Patent Application Laid-Open No. 2013-84740 [Patent Document 3] Japanese Patent Application Laid-Open No. 2014-56878 Summary of the Invention [Problem to be solved by the invention]

[0007] With conventional technology, contamination or damage to the photoelectric conversion unit can cause noise, potentially reducing the quality of photoelectric conversion. Furthermore, the reliability of electrical connections to elements other than the photoelectric conversion unit is important for ensuring the reliability of the photoelectric conversion device. Conventional technology does not sufficiently improve the performance and reliability of photoelectric conversion devices.

[0008] SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a photoelectric conversion device with improved performance and reliability. [Means for solving the problem]

[0009] A first aspect of the means for solving the problem is a photoelectric conversion device comprising: a semiconductor substrate having a photoelectric conversion portion; a metal-containing portion provided on the semiconductor substrate so as not to overlap at least a portion of the photoelectric conversion portion; an interlayer insulating film arranged on the semiconductor substrate so as to cover the metal-containing portion; a first silicon nitride layer arranged on the photoelectric conversion portion so as to have a portion located between the interlayer insulating film and the semiconductor substrate; a silicon oxide film having a portion arranged between the first silicon nitride layer and the photoelectric conversion portion and a portion arranged between the interlayer insulating film and the metal-containing portion; a second silicon nitride layer arranged between the silicon oxide film and the metal-containing portion; a contact plug that penetrates the interlayer insulating film, the silicon oxide film, and the second silicon nitride layer and contacts the metal-containing portion; and a contact plug that penetrates the interlayer insulating film and the silicon oxide film and contacts the semiconductor substrate.

[0010] The second aspect of the means for solving the problem is: A photoelectric conversion device comprising: a semiconductor substrate having a photoelectric conversion portion; a metal-containing portion provided on the semiconductor substrate so as not to overlap at least a portion of the photoelectric conversion portion; a first silicon nitride layer arranged on the photoelectric conversion portion, wherein the distance between the photoelectric conversion portion and the first silicon nitride layer is smaller than the distance between the wiring layer and the semiconductor substrate; a silicon oxide film having a portion arranged between the first silicon nitride layer and the photoelectric conversion portion and a portion arranged on the metal-containing portion; a second silicon nitride layer arranged between the silicon oxide film and the metal-containing portion; and a contact plug that penetrates the silicon oxide film and the second silicon nitride layer and contacts the wiring layer and the metal-containing portion.

[0011] The third aspect of the means to solve the problem is: A photoelectric conversion device comprising: a semiconductor substrate having a photoelectric conversion unit; an electrode arranged on the semiconductor substrate; a sidewall spacer covering a side surface of the electrode; an interlayer insulating film arranged on the semiconductor substrate so as to cover the electrode and the sidewall spacer; a first silicon nitride layer arranged on the photoelectric conversion unit; a silicon oxide film located between the first silicon nitride layer and the photoelectric conversion unit, and between the interlayer insulating film and the sidewall spacer; a second silicon nitride layer having a portion arranged between the silicon oxide film and the sidewall spacer; and a contact plug that penetrates the interlayer insulating film, the silicon oxide film, and the silicon nitride layer and is connected to an element including the electrode, wherein the distance between the photoelectric conversion unit and the first silicon nitride layer is shorter than the length of the contact plug.

[0012] A fourth aspect of the means for solving the problem is a method for manufacturing a photoelectric conversion device, comprising the steps of: forming a first silicon nitride film to cover a metal-containing portion on a semiconductor substrate; forming a silicon oxide film on the first silicon nitride film to cover a photoelectric conversion portion provided on the semiconductor substrate; forming a second silicon nitride film to cover the photoelectric conversion portion; forming an interlayer insulating film to cover a portion of the first silicon nitride film located above the metal-containing portion and a portion of the second silicon nitride film located above the photoelectric conversion portion; forming a hole in the interlayer insulating film and the first silicon nitride film located above the metal-containing portion; and arranging a conductor in the hole.

[0013] A fifth aspect of the means for solving the problems is a method for manufacturing a photoelectric conversion device, comprising the steps of: forming a first silicon nitride film to cover a metal-containing portion on a semiconductor substrate; forming a second silicon nitride film to cover a photoelectric conversion portion provided on the semiconductor substrate and the metal-containing portion; forming an interlayer insulating film to cover a portion of the first silicon nitride film located above the metal-containing portion and a portion of the second silicon nitride film located above the photoelectric conversion portion; forming a hole in the interlayer insulating film and the first silicon nitride film located above the metal-containing portion; and arranging a conductor in the hole, wherein the second silicon nitride film is thicker than the first silicon nitride film. [Effects of the Invention]

[0014] According to the present invention, a photoelectric conversion device with improved performance and reliability is provided. [Brief explanation of the drawings]

[0015] [Figure 1] FIG. 1 is a schematic diagram illustrating a photoelectric conversion device. [Figure 2] FIG. 1 is a schematic diagram illustrating the structure of a photoelectric conversion device. [Figure 3] FIG. 1 is a schematic diagram illustrating the structure of a photoelectric conversion device. [Figure 4]5A to 5C are schematic diagrams illustrating a method for manufacturing a photoelectric conversion device. [Figure 5] 5A to 5C are schematic diagrams illustrating a method for manufacturing a photoelectric conversion device. [Figure 6] 5A to 5C are schematic diagrams illustrating a method for manufacturing a photoelectric conversion device. [Figure 7] 5A to 5C are schematic diagrams illustrating a method for manufacturing a photoelectric conversion device. [Figure 8] 5A to 5C are schematic diagrams illustrating a method for manufacturing a photoelectric conversion device. [Figure 9] FIG. 1 is a schematic diagram illustrating the structure of a photoelectric conversion device. [Figure 10] FIG. 1 is a schematic diagram illustrating the structure of a photoelectric conversion device. DETAILED DESCRIPTION OF THE INVENTION

[0016] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description and drawings, common reference numerals are used to designate common components across multiple drawings. Therefore, common configurations will be described with mutual reference to multiple drawings, and descriptions of configurations with common reference numerals will be omitted as appropriate. Furthermore, configurations with similar names but different reference numerals can be distinguished as a first configuration, a second configuration, a third configuration, etc.

[0017] FIG. 1(a) is a schematic diagram of equipment EQP including a photoelectric conversion device APR according to an embodiment of the present invention. The photoelectric conversion device APR includes a semiconductor device IC. The semiconductor device IC is a semiconductor chip provided with a semiconductor integrated circuit. The photoelectric conversion device APR may include, in addition to the semiconductor device IC, a package PKG for storing these. The photoelectric conversion device APR can be used as an image sensor, an AF (Auto Focus) sensor, a photometric sensor, or a distance measuring sensor.

[0018] The equipment EQP may further comprise at least one of an optical system OPT, a control device CTRL, a processing device PRCS, a display device DSPL, a memory device MMRY, and a mechanical device MCHN. The details of the device EQP will be described later.

[0019] The semiconductor device IC has a pixel area PX in which pixel circuits PXC, each including a photoelectric conversion unit, are arranged two-dimensionally. The semiconductor device IC may have a peripheral area PR around the pixel area PX. The peripheral area PR may also include a drive circuit for driving the pixel circuits PXC, a signal processing circuit for processing signals from the pixel circuits PXC, and a control circuit for controlling the drive circuit and the signal processing circuit. The signal processing circuit may perform signal processing such as correlated double sampling (CDS), amplification, and AD (Analog-Digital) conversion. In another example of a semiconductor device IC, at least a portion of the peripheral circuits arranged in the peripheral area PR may be arranged on a semiconductor chip separate from the semiconductor chip on which the pixel area PX is arranged, and the two semiconductor chips may be stacked.

[0020] FIG. 1(b) shows an example of a pixel circuit PXC. The pixel circuit PXC includes a photoelectric conversion element PD1, a photoelectric conversion element PD2, transfer gates TX1 and TX2, and a capacitance element FD. The pixel circuit PXC may also include an amplification transistor SF, a reset transistor RS, and a selection transistor SL. The photoelectric conversion elements PD1 and PD2 are each a photodiode or a photogate. The transfer gates TX1 and TX2 are MIS (Metal-Insulator-Semiconductor) gates, and the amplification transistor SF, reset transistor RS, and selection transistor SL are MIS transistors. The amplification transistor SF may be a junction field-effect transistor. In this example, two photoelectric conversion elements PD1 and PD2 share one amplification transistor SF, but three or more photoelectric conversion elements may share one amplification transistor SF, or an amplification transistor SF may be provided for each photoelectric conversion element PD1 and PD2. The amplification transistor SF, reset transistor RS, and selection transistor SL may have a common structure, and the reset transistor RS, selection transistor SL, and amplification transistor SF are collectively referred to as pixel transistors. The transfer gates TX1 and TX2, pixel transistors, and peripheral transistors are semiconductor elements including gate electrodes. In addition, the photoelectric conversion device APR may include semiconductor elements such as diodes, resistors, and capacitors.

[0021] The signal charge generated by the photoelectric conversion elements PD1 and PD2 is transferred to the floating node FN of the capacitor element FD via the transfer gates TX1 and TX2. The gate of the amplifier transistor SF, which forms a source follower circuit together with the current source CS, is connected to the floating node FN, and the pixel signal as a voltage signal is output to the signal output line OUT. The reset transistor RS resets the charge and potential of the floating node FN, and the selection transistor SL switches the connection between the amplifier transistor SF and the signal output line OUT. The reset transistor RS and amplifier transistor SF are connected to a power supply line VDD. The signal output line OUT and the power supply line VDD are provided for each column of the pixel circuit PXC. Based on the difference in signals from the photoelectric conversion elements PD1 and PD2, focus detection and distance measurement using phase difference detection are possible. Furthermore, imaging is possible using the signals from one or both of the photoelectric conversion elements PD1 and PD2.

[0022] 2(a) is a schematic plan view of the surface vicinity of the pixel area PX of the semiconductor substrate 10 provided in the photoelectric conversion device APR, and FIG. 2(b) is a schematic cross-sectional view of the photoelectric conversion device APR, including a cross section taken along line AB in FIG. 2(a). Below, the structure of the photoelectric conversion device APR will be described without distinguishing between the plan view and the cross-sectional view. The column direction, in which pixels are arranged in a pixel column of the pixel area PX, is defined as the X direction; the row direction, in which pixels are arranged in a pixel row of the pixel area PX, is defined as the Y direction; and the thickness direction, which indicates the thickness of a layer or film, is defined as the Z direction. The X direction, Y direction, and Z direction are perpendicular to each other.

[0023] This embodiment is characterized by the positional relationship between a silicon oxide member (layer or film) and a silicon nitride member (layer or film). Silicon oxide members, described as separate members, may have a separate member made of a different material between them, or may be similar materials but have different compositions. The same applies to silicon nitride members. A film refers to a continuous structure, while a layer may be discontinuous. In the following description, silicon oxide refers to a compound of oxygen (O) and silicon (Si), in which the elements other than the light elements (hydrogen (H) and helium (He)) that occupy the top two positions in the composition ratio of the constituent elements of the compound are oxygen (O) and silicon (Si). Silicon oxide may contain light elements such as hydrogen (H), and the amount (atomic %) of hydrogen (H) may be greater or less than that of oxygen (O) and silicon (Si). Silicon oxide may contain elements other than oxygen (O), silicon (Si), hydrogen (H), and helium (He) at concentrations lower than those of oxygen (O) and silicon (Si). Typical elements that can be contained in silicon oxide are hydrogen (H), boron (B), carbon (C), nitrogen (N), fluorine (F), phosphorus (P), chlorine (Cl), and argon (Ar). When nitrogen is the only element other than the third most abundant light element among the constituent elements of silicon oxide, this silicon oxide can be called silicon nitride oxide or nitrogen-containing silicon oxide.

[0024] Similarly, silicon nitride refers to a compound of nitrogen (N) and silicon (Si), in which the elements other than the light elements occupying the top two positions in the composition ratio of the constituent elements of the compound are nitrogen (N) and silicon (Si). When oxygen is the third most abundant element other than the light element among the constituent elements of silicon nitride, the silicon nitride can be referred to as silicon oxynitride or oxygen-containing silicon nitride. Silicon nitride can contain elements other than nitrogen (N) and silicon (Si) at concentrations lower than those of nitrogen (N) and silicon (Si). Typical elements that can be contained in silicon nitride are boron (B), carbon (C), oxygen (O), fluorine (F), phosphorus (P), chlorine (Cl), and Ar (argon). When oxygen is the third most abundant element other than the light element among the constituent elements of silicon nitride, the silicon nitride can be referred to as silicon oxynitride or oxygen-containing silicon nitride. The elements contained in the constituent components of the photoelectric conversion device APR can be analyzed using energy dispersive X-ray spectrometry (EDX). The hydrogen content can be analyzed by Elastic Recoil Detection Analysis (ERDA).

[0025] In the pixel area PX of the semiconductor substrate 10, a photoelectric conversion unit 11, a charge detection unit 12, a drain 13 of the pixel transistor, and a source 14 of the pixel transistor are provided in an element region defined by an element isolation region 9. In addition, in the peripheral area PR of the semiconductor substrate 10, a source 16 and a drain 17 of the peripheral transistor are provided in an element region defined by an element isolation region 9.

[0026] Gate electrodes 42 of transfer gates TX1 and TX2 and gate electrodes 43 of pixel transistors are arranged on the semiconductor substrate 10. A dielectric region 61 is arranged on the photoelectric conversion unit 11 via a silicon nitride layer 31. FIG. 2(a) shows the outlines of the silicon nitride layer 31 and the dielectric region 61. Furthermore, gate electrodes 47 of peripheral transistors are arranged on the semiconductor substrate 10. The peripheral transistors are arranged in the peripheral area PR and are, for example, NMOS transistors or PMOS transistors that constitute a CMOS circuit, and in this example, PMOS transistors are used.

[0027] Contact plugs 501, 502, 503, and 504 are disposed on the semiconductor substrate 10, penetrating the interlayer insulating film 40. The contact plugs 501, 502, 503, and 504 are conductive members containing a barrier metal such as titanium or titanium nitride and a conductor such as tungsten. Typically, the barrier metal of the contact plugs 501, 502, 503, and 504 contacts the interlayer insulating film 40. The contact plugs 501, 502, 503, and 504 are provided in holes (contact holes) formed in the films or layers they penetrate. The contact plug 501 is connected to the charge detection unit 12 and the drain 13, and the contact plug 502 is connected to the gate electrodes 42 and 43. The contact plug 503 is connected to the source 16 and the drain 17, and the contact plug 504 is connected to the gate electrode 47.

[0028] Interlayer insulating films 50 and 70 are disposed on the semiconductor substrate 10. The interlayer insulating film 50 is a laminated film of an interlayer insulating layer 56 and a diffusion prevention layer 57, and wiring layers 51, 52, and 53 covered with the diffusion prevention layer 57 are provided between the multiple interlayer insulating layers 56. The wiring layer 51 is in contact with contact plugs 501, 502, 503, and 504. The number of silicon carbide layers including the diffusion prevention layer 57 may be equal to or greater than one time but less than two times the number of copper wiring layers. In this example, the number of silicon carbide layers is three, and the number of copper wiring layers is also three. The interlayer insulating layer 56 is a silicon oxide layer, and the silicon oxide layer preferably contains 5 to 30 atomic % of hydrogen. The diffusion prevention layer 57 is a silicon carbide layer, and the silicon carbide layer may contain 20 to 60 atomic % of hydrogen.

[0029] A dielectric member 60 is provided on the semiconductor substrate 10. The dielectric member 60 is a member formed by integrating a dielectric region 61 surrounded by interlayer insulating films 40 and 50 with a dielectric film 62 located on the interlayer insulating film 50. In this example, the dielectric region 61 can be arranged across multiple photoelectric conversion units 11 as shown in FIG. 2(a) to improve sensitivity. Alternatively, the dielectric region 61 can be arranged for each of the multiple photoelectric conversion units 11 to improve light separation accuracy. The dielectric member 60 is made of silicon oxide, silicon nitride, and / or resin. The refractive index of the dielectric member 60 is preferably higher than that of the interlayer insulating layer 56, but may be equal to or lower than that of the interlayer insulating layer 56. The refractive index of the dielectric member 60 may be lower than that of the diffusion prevention layer 57. The boundary between the dielectric region 61 and the dielectric film 62 is defined by an imaginary plane (dotted line in FIG. 2(b)) including the upper surface of the interlayer insulating film 50. The interlayer insulating film 70 covers the dielectric member 60, and the wiring layer 55 on the interlayer insulating film 70 is connected to the wiring layer 53 through a via plug 54 that penetrates the interlayer insulating film 70. The interlayer insulating film 70 is a silicon oxide film, and the silicon oxide film can contain 5 to 30 atomic % of hydrogen. An inorganic material film 80 having an intralayer lens is provided on the interlayer insulating film 70. The inorganic material film 80 can function as a passivation film or an anti-reflection film. The inorganic material film 80 may be a multi-layer film including at least two layers selected from a silicon nitride layer, a silicon oxynitride layer, a silicon nitride oxide layer, and a silicon oxide layer. An organic material film 90 including a planarization layer 91, a color filter layer 92, a planarization layer 93, and a microlens layer 94 is provided on the silicon nitride film. The color filter layer 92 forms a multi-color filter array, and the microlens layer 94 forms a microlens array.

[0030] FIG. 3 is a schematic cross-sectional view showing a detailed configuration between the semiconductor substrate 10 and the interlayer insulating film 40 and the dielectric region 61 in the photoelectric conversion device APR described in FIG.

[0031] The photoelectric conversion section 11 comprises photoelectric conversion elements PD1 and PD2 as photodiodes. The photoelectric conversion unit 11 includes an n-type semiconductor region 111 as a charge accumulation region (cathode), and a p-type semiconductor region 112 as a well region (anode) provided deeper than the semiconductor region 111 in the semiconductor substrate 10. The photoelectric conversion unit 11 includes a p-type semiconductor region 113 as a surface isolation region provided between the semiconductor region 111 and the surface of the semiconductor substrate 10. The semiconductor region 113 makes the photoelectric conversion unit 11 a buried photodiode.

[0032] The gate electrodes 42 and 43 are, for example, n-type polysilicon electrodes. The thickness T42 of the gate electrode 42 is, for example, 50 to 300 nm, typically 100 to 200 nm. The thickness of the gate electrode 42 is equal to the thickness T42. The gate electrode 47 has a polycide structure including a p-type polysilicon portion 471 and a metal-containing portion 473. The thickness of the gate electrode 47 may be greater than or equal to the thickness T42. Semiconductor elements such as resistors and capacitors disposed in the peripheral area PR may also be formed of polysilicon electrodes and may have a configuration similar to that of the gate electrodes 42, 43, and 47. A contact plug 504 contacts the metal-containing portion 473. The sidewall spacer 48 is a multilayer member including a silicon nitride layer 483 and a silicon oxide layer 482. The silicon oxide layer 482 is located between the silicon nitride layer 483 and the side surface of the gate electrode 47 and between the silicon nitride layer 483 and the semiconductor substrate 10 (semiconductor regions 151 and 161).

[0033] A gate insulating film 24 is disposed between the gate electrodes 42 and 43 and the semiconductor substrate 10 . A gate insulating film 26 is disposed between the gate electrode 47 and the semiconductor substrate 10. The gate insulating film 24 can be thinner than the gate insulating film 26, and for example, the thickness of the gate insulating film 24 is 5 to 10 nm, and the thickness of the gate insulating film 26 is 1 to 5 nm. The gate insulating film 24 and the gate insulating film 26 can be silicon oxide films containing nitrogen.

[0034] Sidewall spacers 48 for the gate electrode 47 are provided so as to cover the side surfaces of the gate electrode 47 .

[0035] The charge detection unit 12 constituting the capacitance element FD includes a low-concentration n-type semiconductor region 121 and a high-concentration n-type semiconductor region 122. The semiconductor region 121 functions as a floating diffusion region. The semiconductor region 121 is located under the contact plug 501 and functions as a contact region with which the contact plug 501 makes contact. A metal compound (silicide) between the metal component of the contact plug 501 and the semiconductor substrate 10 (semiconductor regions 122, 132) may be formed between the contact plug 501 and the semiconductor substrate 10. In this case, too, it can be said that the contact plug 501 is in contact with the semiconductor substrate 10 (semiconductor regions 122, 132). The metal component of the contact plug 501 that forms a compound with the semiconductor substrate 10 may be a metal (e.g., titanium) contained in the barrier metal of the contact plug 501. The drain 13 includes a low-concentration n-type semiconductor region 131 and a high-concentration n-type semiconductor region 132. The semiconductor region 131 is located under the contact plug 501 and functions as a contact region with which the contact plug 501 makes contact. The source 16 includes a low-concentration p-type semiconductor region 161 serving as an LDD region, a medium-concentration p-type semiconductor region 162, and a metal-containing portion 163. The drain 17 similarly includes a low-concentration p-type semiconductor region 171, a medium-concentration p-type semiconductor region 172, and a metal-containing portion 173. The semiconductor regions 161 and 171 are located under the sidewall spacer 48, and the semiconductor regions 162 and 172 are located under the metal-containing portion 173. The contact plug 503 contacts the metal-containing portions 163 and 173. The metal-containing portions 163, 173, and 473 are provided in the source 16, drain 17, and gate electrode 47 of the peripheral transistor, but may be provided in only one of them. Furthermore, a metal-containing portion may be provided in the pixel transistor, but this increases the generation of noise. Therefore, when providing a metal-containing portion in the pixel transistor, it is advisable to place it only under the contact plugs 501 and 502 .

[0036] The metal-containing portions 163, 173, and 473 are regions containing metal and are made of a metal or a metal compound. Examples of the metal contained in the metal-containing portions 163, 173, and 473 include cobalt (Co), nickel (Ni), titanium (Ti), tantalum (Ta), and tungsten (W). Typically, the metal-containing portions 163, 173, and 473 are portions made of a semiconductor metal compound, and more typically, portions (silicide portions) made of a silicon metal compound, i.e., a silicide. Suitable silicides include cobalt silicide, nickel silicide, tungsten silicide, and titanium silicide. The metal-containing portions 163, 173, and 473 may be compounds of a metal and germanium. The metal-containing portion 473 may be a metal nitride, such as tantalum nitride, titanium nitride, or aluminum nitride, or a metal carbide. The metal-containing portions 163, 173, 473 are provided for the purpose of reducing the resistance between the transistor and the contact plugs 503, 504. The metal-containing portions may be provided for other purposes, for example, to make the gate electrode a metal gate, or may be provided as a light-shielding member for the semiconductor substrate 10. The metal-containing portions are provided so as not to overlap at least the photoelectric conversion portion 11 so that the photoelectric conversion portion 11 can receive light. In this example, the metal-containing portions 163, 173, 473 are arranged in the peripheral area PR, and therefore the metal-containing portions 163, 173, 473 do not overlap the photoelectric conversion portion 11. Even when the metal-containing portions are provided in the pixel area PX, it is preferable that the metal-containing portions be provided so as not to overlap the photoelectric conversion portion 11.

[0037] The photoelectric conversion device APR includes a silicon nitride layer 31, a silicon oxide film 21, and a silicon nitride layer 32 disposed on a semiconductor substrate 10. The contact plugs 501 and 502 penetrate through the silicon oxide film 21 in addition to the interlayer insulating film 40. The contact plugs 501 and 502 are in contact with the silicon oxide film 21 in addition to the interlayer insulating film 40. Typically, the barrier metal of the contact plugs 501 and 502 is in contact with the interlayer insulating film 40 and the silicon oxide film 21. The contact plugs 503 and 504 penetrate through the silicon oxide film 21 and the silicon nitride layer 32 in addition to the interlayer insulating film 40. The contact plugs 503 and 504 are in contact with the silicon oxide film 21 and the silicon nitride layer 32. Typically, the barrier metal of the contact plugs 503 and 504 is in contact with the silicon oxide film 21 and the silicon nitride layer 32.

[0038] The silicon nitride layer 31 is disposed on the photoelectric conversion unit 11 so as to have a portion 311 located between the interlayer insulating film 40 and the semiconductor substrate 10. The silicon nitride layer 31 also has a portion 312 disposed between the dielectric region 61 and the photoelectric conversion unit 11. The thickness T31 of the portion 312 of the silicon nitride layer 31 may be smaller than the thickness T311 of the portion 311 of the silicon nitride layer 31 (T312 < T311). The thickness T312 may be 25 to 75% of the thickness T311. The thickness T311 is, for example, 30 to 120 nm, and the thickness T312 is, for example, 10 to 60 nm. When the dielectric region 61 is not provided, the entire silicon nitride layer 31 is located between the interlayer insulating film 40 and the semiconductor substrate 10, and the entire silicon nitride layer 31 may have a substantially uniform thickness (the thickness distribution is ±10% or less). The silicon nitride layer 31 on the photoelectric conversion unit 11 functions as a protective layer by itself, and can reduce damage and contamination to the photoelectric conversion unit 11 during the manufacture and use of the photoelectric conversion device APR.

[0039] In improving the optical properties of the silicon nitride layer 31 with respect to the photoelectric conversion unit 11, it is preferable that the silicon nitride layer 31 is somewhat close to the photoelectric conversion unit 11. The distance D1 between the silicon nitride layer 31 and the photoelectric conversion unit 11 is preferably smaller than the distance D5 between the semiconductor substrate 10 and the wiring layer 51 (D1 < D5). Also, the distance D1 between the silicon nitride layer 31 and the photoelectric conversion unit 11 is preferably smaller than the length L3 of the contact plug 503 (D1 < L3), and is also preferably smaller than the length of the contact plug 501. Note that the length of the contact plug 501 may be considered equal to the length L3 of the contact plug 503. Further, the distance D1 between the silicon nitride layer 31 and the photoelectric conversion unit 11 is preferably smaller than the length L4 of the contact plug 504 (D1 < L4), and is also preferably smaller than the length of the contact plug 502. Note that the length of the contact plug 502 may be considered equal to the length L4 of the contact plug 504. Note that the distance D5 is approximately equal to the length L3, but the distance D5 may be smaller than the length L3 (D5 ≦ L3).

[0040] The silicon oxide film 21 is disposed between the interlayer insulating film 40 and the semiconductor substrate 10. The silicon oxide film 21 has a portion 211 provided in the pixel area PX and a portion​​​Both the interlayer insulating film 40 and the silicon oxide film 21 can be made of silicon oxide, but the interlayer insulating film 40 and the silicon oxide film 21 can be distinguished by measuring the concentrations of silicon (Si), oxygen (O), argon (Ar), boron (B), phosphorus (P), etc. The thickness T21 of the silicon oxide film 21 is, for example, 50 to 150 nm. It is preferable that the difference in thickness between the portion 211 and the portion 212 is small. The silicon oxide film 21 can have a substantially uniform thickness throughout (thickness distribution of ±10% or less). If the silicon oxide film 21 only has the portion 211, the contact plugs 503 and 504 do not penetrate the silicon oxide film 21.

[0041] A silicon nitride layer 32 is disposed between the silicon oxide film 21 and the peripheral transistor. The silicon nitride layer 32 covers the source 16, the drain 17, the gate electrode 47, and the sidewall spacer 48. The thickness T32 of the silicon nitride layer 32 is, for example, 10 to 100 nm. The silicon nitride layer 32 may be in contact with the source 16, the drain 17, the gate electrode 47, and the sidewall spacer 48. More specifically, the silicon nitride layer 32 may be in contact with the metal-containing portions 163, 173, the silicon nitride layer 483, and the metal-containing portion 473. Therefore, the distance between the silicon nitride layer 32 and the metal-containing portions 163, 173, and 473 may be zero.

[0042] Increasing the thickness T311 of the portion 311 of the silicon nitride layer 31 can reduce contamination via the interlayer insulating film 40. In particular, it is preferable to make the thickness T311 larger than the thickness T32 of the silicon nitride layer 32. The thickness T311 is preferably 110% or more of the thickness T32, and may be 150% or more of the thickness T32. The thickness T311 may be 300% or less of the thickness T32, and may be 150% or less of the thickness T32.

[0043] By separating the upper surface of portion 312 as far as possible from semiconductor substrate 10, damage to photoelectric conversion body 11 can be reduced. The distance between the upper surface of portion 312 and semiconductor substrate 10 is expressed as the sum (D1+T312) of thickness T312 of portion 312 and distance D1 between portion 312 and semiconductor substrate 10. The distance between the upper surface of the portion 312 and the semiconductor substrate 10 is preferably greater than the thickness T42 of the gate electrode 42. By providing the silicon oxide film 21, this distance D1 can be increased.

[0044] By making the thickness T312 as large as possible, contamination via the dielectric region 61 can be reduced. The thickness T312 is preferably 25% or more of the thickness T32, and more preferably 50% or more of the thickness T32. The thickness T312 may be smaller than the thickness T32, or may be 75% or less of the thickness T32. When the thickness of the silicon nitride layer 31 is 150% or less of the thickness of the silicon nitride layer 32, the thickness T32 may be between the thickness T312 and the thickness T311. When the thickness T311 is sufficiently larger than the thickness T32, the thickness T312 may be larger than the thickness T32.

[0045] If the silicon oxide film 21 is present only in the portion 211 or the portion 212, a difference in elevation may occur in the underlying surface of the interlayer insulating film 40 between the pixel area PX and the peripheral area PR. By providing both the portion 211 and the portion 212, the difference in elevation between the underlying surface of the interlayer insulating film 40 between the pixel area PX and the peripheral area PR can be reduced compared to when only the portion 211 or the portion 212 is provided. This improves the flatness of the upper surface of the interlayer insulating film 40 and reduces uneven light interference caused by differences in optical path length between pixels. This also improves the reliability of the contact plugs 501, 502, 503, and 504 and the wiring layer. The thickness T21 of the silicon oxide film 21 can be made larger than the thickness T311 of the portion 311 of the silicon nitride layer 31 and the thickness T32 of the silicon nitride layer 32 (T21 > T311, T32).

[0046] The silicon nitride layer 32 can suppress the diffusion of metal from the metal-containing portions 163, 173, and 473. By disposing the silicon nitride layer 32 closer to the metal-containing portions 163, 173, and 473 than the portion 212 of the silicon oxide film 21, it is possible to effectively suppress the diffusion of metal from the metal-containing portions 163, 173, and 473. It is more effective if the distance between the silicon nitride layer 32 and the metal-containing portions 163, 173, and 473 is small, and it is preferable to set this distance to zero as described above.

[0047] The photoelectric conversion device APR can further include at least one of a silicon oxide layer 22, a silicon nitride layer 33, and a silicon oxide layer 23 arranged on the semiconductor substrate 10. In this example, all three layers are provided, but of these three layers, it is particularly preferable to provide the silicon nitride layer 33. The silicon nitride layer 33 is disposed between the silicon oxide film 21 and the photoelectric conversion unit 11. The silicon oxide layer 22 is disposed between the silicon oxide film 21 and the silicon nitride layer 33. The silicon oxide layer 23 is disposed between the semiconductor substrate 10 and the silicon nitride layer 33. In the pixel area PX, an insulator film 49, which is a multi-layer film including the silicon oxide layer 22, the silicon nitride layer 33, and the silicon oxide layer 23, covers the semiconductor substrate 10 and the gate electrodes 42 and 43. The contact plugs 501 and 502 penetrate the silicon oxide layer 22, the silicon nitride layer 33, and the silicon oxide layer 23 in addition to the interlayer insulating film 40. The contact plugs 501 and 502 can be in contact with the silicon oxide layer 22, the silicon nitride layer 33, and the silicon oxide layer 23. Typically, the barrier metal of the contact plugs 501 and 502 contacts the silicon oxide film 21 and the silicon nitride layer 32 .

[0048] The silicon nitride layer 33 can function as an anti-reflection layer for light incident on the photoelectric conversion unit 11. Furthermore, stacking the silicon nitride layer 33 and the silicon nitride layer 31 with the silicon oxide film 21 interposed therebetween to generate multiple reflections can further enhance the anti-reflection function. The portion of the silicon nitride layer 33 covering the semiconductor region other than the photoelectric conversion unit 11 can function to protect the semiconductor substrate 10 from contamination and damage. Because the silicon nitride layer 31 is not provided on the semiconductor region other than the photoelectric conversion unit 11, the silicon nitride layer 33 partially fulfills the role of the silicon nitride layer 31 on the photoelectric conversion unit 11. The silicon oxide layer 23 can function as a buffer layer to prevent the silicon nitride layer 33 from contacting the semiconductor substrate 10. The silicon nitride layer 33 is spaced apart from the semiconductor substrate 10, thereby suppressing the generation of dark current. The distance D3 between the silicon nitride layer 33 and the semiconductor substrate 10 is preferably greater than the distance between the silicon nitride layer 32 and the metal-containing portions 163 and 173. In this example, the gate insulating film 24 extends from between the semiconductor substrate 10 and the gate electrodes 42, 43 onto the semiconductor region not covered by the gate electrodes 42, 43. Therefore, the distance D3 between the silicon nitride layer 33 and the semiconductor substrate 10 is equal to the sum of the thickness of the silicon oxide layer 23 and the thickness between the silicon nitride layer 33 and the gate insulating film 24.

[0049] When the dielectric region 61 is made of silicon nitride, the silicon nitride layer 31 and the dielectric region 61 are made of the same material. With this configuration, reflection at the interface between the silicon nitride layer 31 and the dielectric region 61 is less likely to occur, improving light utilization efficiency.

[0050] The silicon oxide layer 23, silicon nitride layer 33, silicon oxide layer 22, silicon oxide film 21, and silicon nitride layer 31 on the photoelectric conversion section 11 function as an anti-reflection layer against light to be incident on the semiconductor substrate 10. The distance D2 between the silicon nitride layer 31 and the silicon nitride layer 33 is important for the performance of this multilayer anti-reflection layer. This is because multiple reflections occur between the silicon nitride layer 31 and the silicon nitride layer 31, and the function of reducing reflection through interference of the multiple reflected light is achieved. This distance D2 can be controlled by adjusting the total thickness of the silicon oxide layer 22 and the silicon oxide film 21. The distance D2 between the silicon nitride layer 31 and the silicon nitride layer 33 is preferably λ / 8n to 4λ / 8n (λ: wavelength of incident light (400 nm≦λ≦800 nm), n: refractive index of silicon oxide (n≈1.5)). The distance D2 is, for example, 50 to 150 nm. To improve sensitivity and prevent stray light, it is preferable that the distance L3 be less than the maximum value of λ, that is, less than 800 nm.

[0051] The silicon oxide layer 23 has a thickness of, for example, 5 to 20 nm, the silicon nitride layer 33 has a thickness T33 of, for example, 20 to 100 nm, and the silicon oxide layer 22 has a thickness of, for example, 10 to 100 nm. The silicon oxide film 21 has a thickness of, for example, 20 to 200 nm, and the silicon nitride layer 31 has a thickness of, for example, 20 to 100 nm. The thickness of the silicon oxide film 21 can be made larger than the thickness of the silicon oxide layer 22.

[0052] To obtain the effect of improving the performance and reliability of the photoelectric conversion device APR, the optimal relationship between the dimensions and distances of the above-mentioned layers and films can be summarized as follows: D3 <T312<T32≦T33<T311<T21<D2<D1<T42<L4<D5≦L3である。また、T21<100nm、L4> 200 nm, and L3<800 nm. It is not necessary to satisfy this relationship for all dimensions and distances, and the magnitude relationship defined here may be satisfied for at least two combinations of dimensions and distances.

[0053] The method for manufacturing the photoelectric conversion device APR will be described using Figures 4 to 8. Figures 4 to 8 show the structure of the part corresponding to the cross-sectional view shown in Figure 3 in the order of steps, but the order of steps does not necessarily have to be the same as Figures 4 to 8. In Figures 4 to 8, reference numerals are omitted for parts that may remain unchanged from parts already shown.

[0054] 4(a), a semiconductor substrate 10 is prepared having an element region defined by an element isolation region 9. The element isolation region 9 can be formed by a known method, having a LOCOS structure or an STI structure. A p-type semiconductor region 112 and an n-type semiconductor region 111 are formed as well regions in the element region of the semiconductor substrate 10.

[0055] In step b shown in FIG. 4(b), gate electrodes 42, 43, and 47 are formed on the semiconductor substrate 10. First, gate insulating films 24 and 26 are formed on the semiconductor substrate 10, and then a conductive film made of polysilicon or the like is formed on the gate insulating films 24 and 26. The conductive film is patterned to form the gate electrodes 42, 43, and 47. Furthermore, semiconductor regions 113, 121, 131, 14, 131, and 171 are formed by ion implantation. The semiconductor region 111 may be formed after the gate electrode 42 is formed.

[0056] In step c shown in FIG. 4(c), an insulator film 490 is formed so as to cover the photoelectric conversion section 11. The insulator film 490 is a multi-layer film including a silicon oxide layer 220, a silicon nitride layer 330 between the silicon oxide layer 220 and the semiconductor substrate 10, and a silicon oxide layer 230 between the silicon nitride layer 330 and the semiconductor substrate 10. The insulator film 490 is formed by laminating the silicon oxide layer 230, the silicon nitride layer 330, and the silicon oxide layer 220 in this order from the semiconductor substrate 10 side. Each layer of the insulator film 490 can be formed by thermal CVD (Chemical Vapor Deposition), for example, LP (Low Pressure)-CVD.

[0057] 4(d), sidewall spacers 48 are formed from the insulator film 490. The sidewall spacers 48 can be formed by masking the insulator film 490 with a resist pattern in the pixel area PX and anisotropically etching the insulator film 490 in the peripheral area PR. The silicon nitride layer 483 of the sidewall spacer 48 is formed from the silicon nitride layer 330 of the insulator film 490, and the silicon oxide layer 482 of the sidewall spacer 48 is formed from the silicon oxide layer 230 of the insulator film 490. The sidewall spacers 48 may include a silicon oxide layer (not shown) formed from the silicon oxide layer 220.

[0058] The portion of the insulator film 490 located in the pixel area PX remains as the insulator film 49. The silicon oxide layer 22 of the insulator film 49 is formed from the silicon oxide layer 220 of the insulator film 490. The silicon nitride layer 33 of the insulator film 49 is formed from the silicon nitride layer 330 of the insulator film 490. The silicon oxide layer 23 of the insulator film 49 is formed from the silicon oxide layer 230 of the insulator film 490.

[0059] Furthermore, in step d, the medium concentration semiconductor region 162 of the source 16 and the medium concentration semiconductor region 172 of the drain 17 are formed using the sidewall spacers 48 as a mask.

[0060] In step e shown in FIG. 5( e), a metal film 300 is formed in contact with the semiconductor substrate 10 and the portion of the insulator film 49 located above the photoelectric conversion unit 11. The metal film 300 preferably contacts the silicon oxide layer 22 of the insulator film 49. In other words, at the stage of forming the metal film 300, it is preferable that the silicon oxide layer 22 remains on the silicon nitride layer 33 of the insulator film 49. The metal film 300 can also contact the gate electrode 47. The metal film 300 is, for example, a cobalt film, a nickel film, a tungsten film, or a titanium film. The metal film 300 can be formed by, for example, sputtering, so as to cover the semiconductor regions 162, 172 and the gate electrode 47 in the peripheral area PR.

[0061] In the peripheral area PR, the semiconductor regions 162, 172 and the gate electrode 47 of the semiconductor substrate 10 must be exposed. Therefore, the semiconductor regions 162, 172 and the gate electrode 47 may react with oxygen in the atmosphere, forming a native oxide film on their surfaces. Alternatively, portions of the insulator film 490 and the gate insulating film 26 may remain on the surfaces of the semiconductor regions 162, 172 and the gate electrode 47. If a native oxide film or an insulator film exists between the metal film 300 to be formed thereon and the silicon, the reaction due to the heat treatment may be inhibited, potentially resulting in poor formation of the metal-containing portion. To avoid this, the native oxide film and the insulator film are removed by etching immediately before forming the metal film 300. For example, wet etching using a chemical solution containing hydrofluoric acid may be used for the etching.

[0062] Etching of the native oxide film and the insulator film may thin the portion of the underlying insulator film 49 located above the photoelectric conversion section 11. Specifically, the silicon oxide layer 22 of the insulator film 49 becomes thinner due to the etching.

[0063] In step f shown in FIG. 5(f), metal-containing portions 163, 173, and 473 are formed on the semiconductor substrate 10 using the metal film 300. After the metal film 300 is formed, heat treatment is performed to react the metal of the metal film 300 with the silicon (single crystal silicon) of the semiconductor substrate 10 and the silicon (polycrystalline silicon) of the gate electrode 47. This forms the metal-containing portions 163, 173, and 473 made of silicide, which is a compound of metal and silicon. The metal-containing portions 163, 173, and 473 can be cobalt silicide, nickel silicide, tungsten silicide, or titanium silicide depending on the metal type of the metal film 300. In the pixel area PX, silicide is not formed because the silicon nitride layer 33 and the silicon oxide layer 22 cover the semiconductor substrate 10. This configuration reduces diffusion of metals such as cobalt and nickel, making it possible to reduce leakage current in the photoelectric conversion unit 11 and noise (so-called white defects) in the photoelectric conversion unit 11. It should be noted that a metal-containing portion may be provided in any configuration of the pixel area PX, and a metal-containing portion may not be provided in any configuration of the peripheral area PR.

[0064] After the metal-containing portions 163, 173, and 473 are formed, the unreacted metal in the metal film 300 is removed by etching.

[0065] As the metal film 300 is etched, the portion of the underlying insulator film 49 located above the photoelectric conversion body 11 may become thinner. Specifically, the silicon oxide layer 22 of the insulator film 49 becomes thinner due to the etching.

[0066] The residue of the silicon oxide layer 220 remaining on the sidewall spacers 48 formed in step d can be removed by etching the native oxide film or the insulator film or by etching the metal film 300 as described above.

[0067] 5(g), a silicon nitride film 320 is formed so as to cover the metal-containing portions 163, 173, and 473 on the semiconductor substrate 10. The silicon nitride film 320 is formed across the pixel area PX and the peripheral area PR, and can be formed by, for example, a plasma CVD method.

[0068] 5(h), the silicon nitride film 320 is removed from above the photoelectric conversion section 11. The portion of the silicon nitride film 320 located above the peripheral transistor remains as the silicon nitride layer 32.

[0069] As the silicon nitride film 320 is etched, the portion of the underlying insulator film 49 located above the photoelectric conversion section 11 may become thinner. Specifically, the silicon oxide layer 22 of the insulator film 49 becomes thinner due to the etching.

[0070] 6(i), a silicon oxide film 21 is formed on the silicon nitride film 320 (silicon nitride layer 32) so as to cover the photoelectric conversion unit 11 provided on the semiconductor substrate 10. The silicon oxide film 21 is formed across the pixel area PX and the peripheral area PR, and can be formed by, for example, a plasma CVD method.

[0071] As described above, the distance between the silicon nitride layer 31 and the semiconductor substrate 10, and further the distance between the silicon nitride layer 31 and the silicon nitride layer 33, affect the reflectance of the photoelectric conversion unit 11. In this embodiment, the optical characteristics can be optimized by forming the silicon oxide film 21 to an appropriate thickness. Furthermore, the thickness of the silicon oxide film 21 can be set according to the thickness of the silicon oxide layer 22, which is thinned in several processes. The amount of reduction in the thickness of the silicon oxide layer 22 can be determined in advance, and the thickness of the silicon oxide film 21 can be determined according to that amount of reduction. Alternatively, the thickness of the silicon oxide layer 22 may be measured during manufacturing, and the thickness of the silicon oxide film 21 may be determined according to the measurement results. For example, forming the silicon oxide film 21 is extremely effective when the thickness of the silicon oxide film 21 needs to be thicker than the thickness of the silicon oxide layer 22 that is ultimately left. The reduced thickness of the silicon oxide layer 22 is, for example, 10 to 100 nm, and the thickness of the silicon oxide film 21 is, for example, 20 to 200 nm.

[0072] 6(j), a silicon nitride film 310 is formed on the silicon oxide film 21 so as to cover the photoelectric conversion unit 11 provided on the semiconductor substrate 10. The silicon nitride film 310 is formed across the pixel area PX and the peripheral area PR, and can be formed by, for example, a plasma CVD method. The thickness of the silicon nitride film 310 is preferably thicker than that of the silicon nitride film 320 (silicon nitride layer 32).

[0073] In step k shown in FIG. 6(k), the silicon nitride film 310 is removed from above the pixel transistors. Portions of the silicon nitride film 310 located above the photoelectric conversion units 11 remain as the silicon nitride layer 31. The silicon nitride film 310 can be patterned into the silicon nitride layer 31 having a desired shape by lithography and etching. The silicon nitride layer 31 is provided on the n-type semiconductor region 111, i.e., extending from above the photoelectric conversion units 11 to above parts of the gate electrodes 42 of the transfer gates TX1 and TX2. The upper surface of the silicon nitride layer 31 has a shape that follows the height difference caused by the gate electrodes 42. In regions of the pixel area PX where the contact plugs 501 and 502 are arranged, the silicon nitride film 310 is preferably removed by etching.

[0074] 6(l), an interlayer insulating film 40 is formed. The interlayer insulating film 40 is formed so as to cover a portion of the silicon nitride film 320 located above the transistor including the electrodes (silicon nitride layer 32) and a portion of the silicon nitride film 310 located above the photoelectric conversion section 11 (silicon nitride layer 31). The interlayer insulating film 40 is planarized using a planarization method such as a reflow method, an etch-back method, or a CMP method.

[0075] 7(m), contact holes 401 and 402 located above the pixel transistors are formed in the interlayer insulating film 40, the silicon oxide film 21, and the insulator film 49. The contact holes 401 and 402 are holes provided at least in the interlayer insulating film 40.

[0076] To form the contact holes 401 and 402 in the pixel area PX, the interlayer insulating film 40, the silicon oxide film 21, the silicon oxide layer 22, the silicon nitride layer 33, and the silicon oxide layer 23 are sequentially etched by plasma etching. At this time, the silicon nitride layer 33 can function as an etching stopper. More specifically, the etching conditions for etching the silicon oxide layer 22 are such that the etching rate for the silicon nitride layer 33 is lower than the etching rate for the silicon oxide layer 22. Note that if the silicon oxide layer 22 is not present in the pixel area PX, the silicon oxide layer 22 can be replaced with the silicon oxide film 21.

[0077] The silicon nitride layer 33, which serves as an etching stopper, cancels variations in the depth of the contact holes 401, 402 when etching up to layers above the silicon nitride layer 33. Then, by etching the thin silicon nitride layer 33 close to the semiconductor substrate 10 while reducing variations in the depth of the contact holes 401, 402, it is possible to suppress damage to the semiconductor substrate 10. It is preferable to place the silicon nitride layer 33 close to the semiconductor substrate 10; however, if the silicon nitride layer 33 comes into contact with the semiconductor substrate 10, noise is likely to occur, so a silicon oxide layer 23 is disposed between the silicon nitride layer 33 and the semiconductor substrate 10.

[0078] If step h is not performed, the silicon nitride film 320 is disposed on the pixel transistors. To form the contact holes 401 and 402, the interlayer insulating film 40, the silicon oxide film 21, the silicon nitride film 320, the silicon oxide layer 22, the silicon nitride layer 33, and the silicon oxide layer 23 are etched in this order. The presence of the silicon nitride film 320 complicates the process of switching etching conditions and etching stop conditions, potentially resulting in a reduced yield. By contrast, removing the silicon nitride film 320 from above the pixel transistors in step h reduces the number of times the conditions for etching the silicon nitride layer need to be switched (to just one time). This facilitates the formation of the contact holes 401 and 402, reduces variations, and improves yield.

[0079] Similarly, if step k is not performed, the silicon nitride film 310 is disposed on the pixel transistor. To form the contact holes 401 and 402, the interlayer insulating film 40, the silicon nitride film 310, the silicon oxide film 21, the silicon oxide layer 22, the silicon nitride layer 33, and the silicon oxide layer 23 are etched in this order. In this case, the presence of the silicon nitride film 310 complicates the process of switching etching conditions and etching stop conditions, potentially resulting in a reduced yield. By contrast, removing the silicon nitride film 310 from above the pixel transistor in step k reduces the number of times the conditions for etching the silicon nitride layer 31 need to be switched (to just one time). This facilitates the formation of the contact holes 401 and 402, reduces variations, and improves yield.

[0080] Semiconductor regions 122 and 132 are formed as contact regions by implanting ions into the semiconductor substrate 10 through the contact holes 401. When forming the semiconductor regions 122 and 132, the contact holes 401 are covered with a resist mask, thereby preventing impurities from penetrating the gate electrodes 42 and 43 and being implanted into the channel region.

[0081] 7(n), contact holes 403 and 404 located above the peripheral transistors are formed in the interlayer insulating film 40, the silicon oxide film 21, and the silicon nitride film 320 (silicon nitride layer 32). The contact holes 403 and 404 are holes provided at least in the interlayer insulating film 40.

[0082] To form the contact holes 403 and 404 in the peripheral area PR, the interlayer insulating film 40, the silicon oxide film 21, and the silicon nitride layer 32 are sequentially etched by plasma etching. At this time, the silicon nitride layer 32 can function as an etching stopper. More specifically, the etching conditions for etching the silicon oxide film 21 are such that the etching rate for the silicon nitride layer 32 is lower than the etching rate for the silicon oxide film 21. Note that if the silicon oxide film 21 is not present in the peripheral area PR, the silicon oxide film 21 can be replaced with the interlayer insulating film 40.

[0083] The silicon nitride layer 32, which serves as an etching stopper, cancels variations in the depth of the contact holes 403 and 404 when etching up to the upper layers of the silicon nitride layer 32. Then, the thin silicon nitride layer 32 close to the semiconductor substrate 10 is etched while reducing variations in the depth of the contact holes 403 and 404. This makes it possible to suppress damage to the semiconductor substrate 10 and metal scattering from the metal-containing portions 163, 173, and 473. For this reason, it is preferable that the silicon nitride layer 32 be as close as possible to the metal-containing portions 163, 173, and 473, and that the silicon nitride layer 32 be in contact with the metal-containing portions 163, 173, and 473. Furthermore, it is preferable that the silicon nitride layer 32 be as thin as possible.

[0084] If step k is not performed, the silicon nitride film 310 is disposed on the peripheral transistors. To form the contact holes 403 and 404, the interlayer insulating film 40, the silicon nitride film 310, the silicon oxide film 21, and the silicon nitride layer 32 are etched in this order. In this case, the presence of the silicon nitride film 310 complicates the process of switching etching conditions and etching stop conditions, potentially resulting in a reduced yield. By contrast, removing the silicon nitride film 310 from above the peripheral transistors in step k reduces the number of times the conditions for etching the silicon nitride layer need to be switched (to just one time). This facilitates the formation of the contact holes 403 and 404, reduces variations, and improves yield.

[0085] 7(o), a conductor is disposed in the contact holes 401, 402, 403, and 404. The conductor may be a laminate of a barrier metal and tungsten. Excess conductor on the interlayer insulating film 40 is removed by a CMP method or the like to form contact plugs 501, 502, 503, and 504.

[0086] As in steps m and n, it is preferable to form contact holes 401 and 402 and contact holes 403 and 404 separately. Metal-containing portions 163, 173, and 473 are formed in at least a portion of the peripheral area PR, and contact holes 403 and 404 expose the metal-containing portions 163, 173, and 473. In such a case, etching during the formation of contact holes 403 and 404 in the peripheral area PR may cause metal from the metal-containing portions 163, 173, and 473 to scatter. Therefore, when forming contact holes 403 and 404, it is preferable that contact holes 401 and 402 are either not yet formed, are blocked with a resist mask, or are already blocked with contact plugs 501 and 502. In this example, contact holes 401 and 402 are formed before contact holes 403 and 404 are formed, and then contact holes 403 and 404 are formed with contact holes 401 and 402 blocked with a resist mask. The resist mask can prevent the metal of the metal-containing portions 163 , 173 , and 473 from entering the contact holes 401 and 402 .

[0087] If the influence of metal scattering from metal-containing portions 163, 173, 473 is small, contact holes 401, 402 and contact holes 403, 404 may be formed simultaneously. In this case, it is preferable that the difference in thickness between silicon nitride layer 33 and silicon nitride layer 32 is small. For example, it is preferable that the difference in thickness between the silicon nitride layer 33 and the silicon nitride layer 32 is 10 nm or less. If they are equivalent, the contact holes 401 and 402 in the pixel area PX and the contact holes 403 and 404 in the peripheral area PR can be formed simultaneously. However, even if the difference in thickness between the silicon nitride layer 33 and the silicon nitride layer 32 is 10 nm or less, it is preferable to perform separate steps such as steps m and n. In particular, if the distance between the silicon nitride layer 33 and the semiconductor substrate 10 is different from the distance between the silicon nitride layer 32 and the metal-containing portions 163 and 173, it is preferable to perform separate steps such as steps m and n.

[0088] The order of steps m and n may be reversed. In this example, step o is performed after steps m and n, but for example, contact holes 403 and 404 may be formed after contact plugs 501 and 502 are formed by disposing a conductor in contact holes 401 and 402. Contact holes 401 and 402 may be formed after contact plugs 503 and 504 are formed by disposing a conductor in contact holes 403 and 404.

[0089] In the next step, as shown in FIG. 8(p1), which corresponds to FIG. 2(b), an interlayer insulating film 50 and multiple wiring layers 51, 52, and 53 are formed on the interlayer insulating film 40. The wiring layers 51, 52, and 53 are copper layers, and the wiring layer 51 can be formed by a single damascene method, while the wiring layers 52 and 53 can be formed by a dual damascene method. The interlayer insulating layer 56 is a silicon oxide layer having a thickness of 100 nm to 1000 nm, and the diffusion prevention layer 57 is a silicon carbide layer having a thickness of 10 to 100 nm. The interlayer insulating layer 56 and the diffusion prevention layer 57 can be formed by a plasma CVD method. The interlayer insulating layer 56 can be formed by a plasma CVD method using a silane-based gas as a raw material gas.

[0090] In step p shown in FIG. 8(p1) corresponding to FIG. 2(b) and (p2) corresponding to FIG. 3, a resist pattern having an opening corresponding to the photoelectric conversion section 11 is formed on the interlayer insulating film 50. Then, this resist pattern is used as a mask to etch the interlayer insulating film 50. Furthermore, the interlayer insulating film 40 is etched to form an opening 406 whose bottom is formed by the silicon nitride film 310 (silicon nitride layer 31). When etching the interlayer insulating film 40, the silicon nitride layer 31 can function as an etching stopper. More specifically, the etching conditions for etching the interlayer insulating film 40 are such that the etching rate for the silicon nitride layer 31 is lower than the etching rate for the interlayer insulating film 40.

[0091] The silicon nitride layer 31 can be etched by etching when forming the opening 406 . The portion of the silicon nitride layer 31 below the opening 406 is etched, thereby reducing the thickness from T311 to T312. As a result, the portion 311 and the portion 312 are formed. The thickness T311 may be 25 to 75% of the thickness T312. By making the silicon nitride layer 31 sufficiently thick, the possibility that the opening 406 will penetrate the silicon nitride layer 31 when it is formed can be reduced. Furthermore, the silicon nitride layer 31 can have the function of reducing plasma damage to the photoelectric conversion body 11 during etching to form the opening 406. The effect of the silicon nitride layer 31 to reduce plasma damage when the opening 406 is formed is also effectively achieved by making the silicon nitride layer 31 sufficiently thick.

[0092] In step q shown in FIG. 8(q1) corresponding to FIG. 2(b) and FIG. 8(q2) corresponding to FIG. 3, a dielectric is disposed in the opening 406 as shown in FIG. 3, thereby forming a dielectric member 60 including a dielectric region 61. By disposing a dielectric having a higher refractive index than the interlayer insulating layers 56, such as silicon nitride, in the opening 406, an optical waveguide is formed in which the dielectric region 61 serves as a core and the interlayer insulating layers 56 serve as cladding. The dielectric disposed in the opening 406 does not need to have a higher refractive index than the interlayer insulating layers 56 and may be, for example, silicon oxide. Even if the thickness of the silicon nitride layer 31 changes due to etching when forming the opening 406 in the interlayer insulating film 40, using silicon nitride for the dielectric region 61 reduces the effect on the optical characteristics of the interface between the silicon nitride layer 31 and the dielectric region 61.

[0093] A detailed example of a method for forming the dielectric member 60 will be described. First, the opening 406 is filled with silicon nitride, which has a higher refractive index than silicon oxide, the main material constituting the multiple interlayer insulating layers 56. Specifically, silicon nitride is deposited over the entire surface of the semiconductor substrate 10 by HDP (High Density Plasma)-CVD, and the silicon nitride is then filled into the opening 406. The silicon nitride layer 31 can also function to reduce plasma damage to the photoelectric conversion unit 11 when a dielectric is deposited by plasma CVD. The effect of reducing plasma damage when filling the opening 406 with a dielectric can also be effectively achieved by making the silicon nitride layer 31 sufficiently thick. Then, excess silicon nitride formed in the peripheral area PR is removed by plasma etching. Furthermore, the silicon nitride on the interlayer insulating film 50 outside the opening 406 is planarized by CMP (Chemical Mechanical Polishing). At this time, not all of the silicon nitride disposed on the interlayer insulating film 50 is removed, but remains as the dielectric film 62. The dielectric film 62 is a layer having a thickness of, for example, 100 nm to 500 nm, which extends from above the dielectric region 61 to the upper surface of the interlayer insulating film 50. This is to suppress damage to the wiring layer.

[0094] Next, in the peripheral area PR, the dielectric film 62 is removed by etching. Since the dielectric film 62 made of silicon nitride has high residual stress, reducing the area of ​​the dielectric film 62 can reduce warping of the semiconductor substrate 10 and peeling of the dielectric film 62 and the interlayer insulating film 50.

[0095] 2(b), an interlayer insulating film 70 is formed to cover the dielectric film 62. The interlayer insulating film 70 is made of, for example, silicon oxide, and can be formed by a plasma CVD method using silane as a raw material gas.

[0096] In the next step s, as shown in FIG. 2(b), a via hole is formed in the interlayer insulating film 70 in the peripheral area PR. Since the dielectric film 62 has been removed from the peripheral area PR, it becomes easy to form a via hole that penetrates the interlayer insulating film 70 and the interlayer insulating film 50 and reaches the wiring layer 53. A via plug 54 is formed in the via hole. A wiring layer 55 is formed on the interlayer insulating film 70. The wiring layer 55 can be composed of an aluminum layer and can be patterned to include a pad electrode and a light-shielding pattern.

[0097] In the next step t, as shown in FIG. 2(b), a silicon nitride film is formed by plasma CVD, and this silicon nitride film is processed to have intralayer lenses 81, thereby forming an inorganic material film 80.

[0098] In the next step u, as shown in FIG. 2(b), an organic material film 90 including a planarization layer 91, a color filter layer 92, a planarization layer 93, and a microlens layer 94 is formed on the inorganic material film 80.

[0099] In the next step v, the wafer is diced and divided into a plurality of semiconductor device ICs.

[0100] In the next step w, the semiconductor device IC is mounted in a package PKG.

[0101] Through the above steps, the photoelectric conversion device APR can be manufactured.

[0102] Having the silicon oxide film 21 have a portion 211 in the pixel area PX and a portion 212 in the peripheral area PR is advantageous in terms of improving reliability. This is because having the silicon oxide film 21 have the portions 211 and 212 reduces the difference in height of structures formed on the semiconductor substrate 10 between the pixel area PX and the peripheral area PR. The structures formed on the semiconductor substrate 10 include gate electrodes 42 and 43 and silicon nitride layers 31, 32, and 33. In the pixel area PX, in addition to the silicon oxide layer 22 and the silicon oxide film 21, there is also the silicon nitride layer 31, and the total height is greater than that of the silicon nitride layer 32 in the peripheral area PR. This difference in height is reflected in the difference in height of the upper surface of the interlayer insulating film 40 formed on this structure. The interlayer insulating film 40 is planarized by the CMP method. If the difference in height of the upper surface of the interlayer insulating film 40 is large, the difference in height cannot be eliminated, and portions of the upper surface of the interlayer insulating film 40 that are farther and farther from the semiconductor substrate 10 are likely to occur. That is, even after planarization of the interlayer insulating film 40, the interlayer insulating film 40 may be higher in the pixel area PX where structures are taller and lower in the peripheral area PR where structures are shorter. Furthermore, even within the pixel area PX, the interlayer insulating film 40 may be lower closer to the peripheral area PR. With this shape, there is a difference in the thickness of the contact holes 401, 402, 403, and 404 to be etched. This may result in opening defects or etching damage to the semiconductor substrate 10. In this case, there is a risk of contact plug shorts and degradation of image quality. Furthermore, during the metal material removal process when forming the contact plugs 501, 502, 503, and 504 and the wiring layer 51 using the damascene method, metal may remain in unintended areas. This may result in short-circuiting of the contact plugs or wiring.

[0103] In the above-described manufacturing method, step j (and step k) can also be performed after step g (and step h). The silicon nitride layer 31 (silicon nitride film 310) can also be made thicker than the silicon nitride layer 32 (silicon nitride film 320). However, it is preferable to separate the silicon nitride layer 31 (silicon nitride film 310) from the photoelectric conversion section 11 and place the silicon nitride layer 32 (silicon nitride film 320) close to the metal-containing portions 163, 173, 473. Therefore, it is preferable to perform steps g and h after steps j and k.

[0104] At least one of steps h, i, and k may be omitted. However, as described above, in order to facilitate the formation of contact holes, it is preferable to perform steps h and k to eliminate overlap of the silicon nitride films. Furthermore, in order to separate the silicon nitride layer 31 (silicon nitride film 310) from the photoelectric conversion section 11, it is preferable to perform step i to form the silicon oxide film 21. Step i is also preferable in terms of adjusting the distance between the silicon nitride layer 31 and the silicon nitride layer 33 of the photoelectric conversion section 11 to optimize the optical characteristics.

[0105] The silicon nitride film 320 that becomes the silicon nitride layer 32 may be different from the silicon nitride film 310 that becomes the silicon nitride layer 31 in thickness, composition, film quality, film formation method and / or film formation conditions.

[0106] As described above, it is preferable that the silicon nitride layer 31 is thick, and it is preferable that the silicon nitride layer 32 is thin. In this embodiment, the silicon nitride film 310 and the silicon nitride film 320 are formed in separate steps g and j, which makes it easy to optimize the thickness. The difference in thickness between the silicon nitride film 320 and the silicon nitride film 310 is preferably 5 nm or more. The thicknesses of the two films can be 10 to 100 nm, and the difference in thickness between the silicon nitride film 320 and the silicon nitride film 310 may be 50 nm or less.

[0107] The silicon nitride film 310 and the silicon nitride film 320 may have different compositions. For example, the composition ratio of silicon (Si) and nitrogen (N) may be different, or the concentrations of elements other than silicon (Si) and nitrogen (N), such as argon (Ar) and chlorine (Cl), may be different.

[0108] The silicon nitride film 310 and the silicon nitride film 320 may have different film properties. The silicon nitride film 310 (silicon nitride layer 31) and the silicon nitride film 320 (silicon nitride layer 32) may have different residual stresses. The residual stress of the silicon nitride film 310 (silicon nitride layer 31) is preferably smaller than the residual stress of the silicon nitride film 320 (silicon nitride layer 32). The effect of residual stress will be explained. The silicon nitride layer 32 applies compressive or tensile stress to the channel region of the semiconductor substrate 10, causing distortion in the silicon crystal and improving the mobility of carriers passing therethrough. Improving the mobility of majority carriers in the transistor improves the driving performance. Whether the stress is compressive or tensile and the magnitude of the stress can be selected arbitrarily depending on the desired effect. The silicon nitride layer 32 can also improve the driving performance of the transistor. In the pixel area PX, due to issues with adhesion to the silicon oxide layer 22, if the silicon nitride film 310 has a large compressive or tensile residual stress, there is a risk of film peeling. Therefore, in this embodiment, it is preferable to remove at least a portion of the silicon nitride film 310 in the pixel area PX. For the same reason, it is preferable that the residual stress of the silicon nitride layer 31 formed in the pixel area PX be small. That is, it is preferable that the silicon nitride layer 32 and the silicon nitride layer 31 have different residual stresses. The silicon nitride layer 32 and the silicon nitride layer 31 are formed in separate processes under separate conditions. This allows for the residual stresses to be individually selected, allowing films with different residual stresses to be formed. The silicon nitride layer 32 and the silicon nitride layer 31 are both insulating films made of silicon nitride and are deposited, for example, by plasma CVD. The residual stress of the deposited films can be controlled by adjusting parameters such as the plasma temperature and pressure. The residual stress of the silicon nitride layer 32 can also be changed by adding a heat treatment process. In this case, only the silicon nitride layer 32 needs to be heat-treated, so the heat treatment can be performed before depositing the silicon nitride film 310. By having the silicon nitride layer 32 and the silicon nitride layer 31 have different residual stresses, it is possible to simultaneously improve the driving capability of the transistor and suppress film peeling. This makes it possible to improve the performance of the photoelectric conversion device APR.

[0109] The silicon nitride film 310 and the silicon nitride film 320 may be formed by different methods. For example, the silicon nitride film 320 may be formed by thermal CVD, and the silicon nitride film 310 may be formed by plasma CVD. One of the silicon nitride film 310 and the silicon nitride film 320 may be formed using DCS (dichlorosilane) as a source gas, and the other of the silicon nitride film 310 and the silicon nitride film 320 may be formed using HCD (hexachlorodisilane) as a source gas.

[0110] The film formation conditions may be different between the silicon nitride film 310 and the silicon nitride film 320. The plasma power, gas flow rate, gas pressure, and film formation temperature of one of the silicon nitride film 310 and the silicon nitride film 320 may be different from those of the other of the silicon nitride film 310 and the silicon nitride film 320.

[0111] (Second embodiment) Fig. 9 is a schematic cross-sectional view of a photoelectric conversion device APR according to the second embodiment. Fig. 9 is a cross-section of a portion corresponding to the schematic cross-sectional view of Fig. 3. In Fig. 9, the wiring layer 51 shown in Fig. 3 is omitted.

[0112] In this embodiment, similar to the silicon nitride layer 31 in the pixel area PX, a silicon nitride layer 34 is disposed between the interlayer insulating film 40 and the silicon oxide film 21 in the peripheral area PR. Note that the contact plugs 503, 504 do not penetrate the silicon nitride layer 34, and the interlayer insulating film 40 is interposed between the contact plugs 503, 504 and the silicon nitride layer 34. By disposing the silicon nitride layer 34, it is possible to reduce the height difference of the underlying layer of the interlayer insulating film 40, which is caused by the thickness of the silicon nitride layer 31. It is also possible to reduce the height difference of the underlying layer of the interlayer insulating film 40, which is caused by the silicon nitride layer 31 being thicker than the silicon nitride layer 32. It is also possible to reduce the height difference of the underlying layer of the interlayer insulating film 40, which is caused by the thickness of the insulator film 49.

[0113] This embodiment differs from the first embodiment in the patterning of the silicon nitride film 310 in step j of the manufacturing method. In the first embodiment, after the silicon nitride film 310 is formed, the silicon nitride film 310 in the peripheral area PR is removed by etching, but in this embodiment, the silicon nitride film 310 is left in at least a part of the peripheral area PR. When patterning the silicon nitride film 310, the silicon nitride film 310 is patterned so that a portion of the silicon nitride film 310 at an arbitrary position in the peripheral area PR remains as a silicon nitride layer 34. In other words, a part of the silicon nitride film 310 is located between the silicon nitride film 320 and the interlayer insulating film 40. The thickness of the silicon nitride layer 34 is equivalent to the thickness of the silicon nitride layer 31, and is 95 to 105% of the thickness of the silicon nitride layer 31 even when an error is taken into account.

[0114] In this embodiment, the reliability of the photoelectric conversion device APR can be improved for the same reason as in the first embodiment, where the silicon oxide film 21 has the portion 211 in the pixel area PX and the portion 212 in the peripheral area PR. That is, this is because, below the interlayer insulating film 40, the difference in elevation between the pixel area PX and the peripheral area PR, which is caused by at least the thickness of the silicon nitride film 310, can be reduced, and the flatness of the upper surface of the interlayer insulating film 40 can be improved.

[0115] Here, the silicon nitride layer 34 is preferably positioned to avoid the positions where the contact plugs 501, 502, 503, and 504 will be formed in a later step. In other words, the silicon nitride layer 34 is provided away from the contact plugs 501, 502, 503, and 504. To achieve this, the silicon nitride film 310 can be patterned so that the silicon nitride layer 34 has openings corresponding to the contact plugs 503 and 504. This is because, as described in steps n and m, if the silicon nitride film 310 is etched when forming the contact holes 401, 402, 403, and 404, it becomes difficult to switch the etching conditions and set the etching stop conditions. As described above, according to this embodiment, by leaving at least a portion of the silicon nitride film 310 in the peripheral area PR, it is possible to suppress the occurrence of defects and the deterioration of image quality.

[0116] (Third embodiment) Fig. 10 is a schematic cross-sectional view of a photoelectric conversion device APR according to the third embodiment. Fig. 10 is a cross-section of a portion corresponding to the schematic cross-sectional view of Fig. 3. In Fig. 9, the wiring layer 51 shown in Fig. 3 is omitted.

[0117] In this embodiment, in the pixel area PX, the semiconductor substrate 10 is provided with a charge retention unit 18 that retains charges generated in the photoelectric conversion unit 11. Charges generated in the photoelectric conversion unit 11 are transferred to the charge retention unit 18 by a transfer gate including a gate electrode 41. The charges retained in the charge retention unit 18 are transferred to the charge detection unit 12 by a transfer gate including a gate electrode 42. Note that the thickness of the gate electrode 41 can be considered to be equal to the thickness of the gate electrode 42, so the thickness of the gate electrode 41 is indicated as T42. The charge retention unit 18 includes an n-type semiconductor region 181 as a charge retention region, a p-type semiconductor region 182 as a well region, and a p-type semiconductor region 183 between the semiconductor region 181 and the surface of the semiconductor substrate 10.

[0118] The photoelectric conversion device APR of this embodiment further includes a light-shielding film 58 that covers the charge retention portion 18 between the silicon oxide film 21 and the charge retention portion 18. The light-shielding film 58 has an opening 580 above the photoelectric conversion portion 11, and the photoelectric conversion portion 11 receives light through the opening 580. In other words, the light-shielding film 58 does not overlap the portion of the photoelectric conversion portion 11 below the opening 580. By providing the charge retention portion 18 that is shielded from light by the light-shielding film 58, a global electronic shutter function can be realized. In this example, the light-shielding film 58 overlaps a portion of the photoelectric conversion portion 11 to improve light shielding to the charge retention portion 18.

[0119] A difference in elevation can occur between the pixel area PX and the peripheral area PR by the thickness of the light-shielding film 58. The silicon oxide film 21 has a portion 213 located between the interlayer insulating film 40 and the light-shielding film 58. Since the portion 212 of the silicon oxide film 21 is located in the peripheral area PR, the difference in elevation can be reduced by the thickness of the light-shielding film 58. A silicon oxide film 25 is provided between the light-shielding film 58 and the silicon oxide layer 22. A portion 253 of the silicon oxide film 25 located below the light-shielding film 58 can have a planarizing function that reduces the difference in elevation of the layer below the light-shielding film 58 caused by the gate electrodes 41, 42. The silicon oxide film 25 has a portion 252 located between the silicon oxide film 21 and the silicon nitride layer 32.

[0120] Although not shown, the light-shielding film 58 is a metal-containing member, and a contact plug in contact with the light-shielding film 58 can be formed in a contact hole that penetrates the interlayer insulating film 40 and the silicon oxide film 21. In this case, it is preferable to provide a silicon nitride layer between the interlayer insulating film 40 and the silicon oxide film 21 as an etching stopper for the contact hole and to prevent diffusion of the metal in the light-shielding film 58.

[0121] (Devices equipped with photoelectric conversion devices) The equipment EQP shown in Fig. 1(a) will be described in detail. The photoelectric conversion apparatus APR may include a package PKG that houses the semiconductor device IC in addition to a semiconductor device IC having a semiconductor substrate 10. The package PKG may include a base body to which the semiconductor device IC is fixed, a cover body made of glass or the like that faces the semiconductor device IC, and connecting members such as bonding wires or bumps that connect terminals provided on the base body to terminals provided on the semiconductor device IC.

[0122] The equipment EQP may further include at least one of an optical system OPT, a control device CTRL, a processing device PRCS, a display device DSPL, and a memory device MMRY. The optical system OPT forms an image on the photoelectric conversion device APR and is, for example, a lens, a shutter, or a mirror. The control device CTRL controls the photoelectric conversion device APR and is, for example, a semiconductor device such as an ASIC. The processing device PRCS processes signals output from the photoelectric conversion device APR and is, for example, a semiconductor device such as a CPU or ASIC for configuring an AFE (analog front end) or a DFE (digital front end). The display device DSPL is an EL display device or a liquid crystal display device that displays information (images) obtained by the photoelectric conversion device APR. The memory device MMRY is a magnetic device or a semiconductor device that stores information (images) obtained by the photoelectric conversion device APR. The memory device MMRY is a volatile memory such as an SRAM or a DRAM, or a non-volatile memory such as a flash memory or a hard disk drive. The mechanical device MCHN has a moving part or a propulsion part such as a motor or an engine. In the device EQP, the signal output from the photoelectric conversion device APR is displayed on the display device DSPL, and transmitted to the outside by a communication device (not shown) provided in the device EQP. For this purpose, the device EQP preferably further includes a memory device MMRY and a processing device PRCS in addition to the memory circuit unit and arithmetic circuit unit provided in the photoelectric conversion device APR.

[0123] The device EQP shown in Fig. 1(a) can be an electronic device such as an information terminal with a photographing function (e.g., a smartphone or a wearable device) or a camera (e.g., an interchangeable lens camera, a compact camera, a video camera, or a surveillance camera). The mechanical device MCHN in the camera can drive components of the optical system OPT for zooming, focusing, and shutter operation. Furthermore, the device EQP may be transportation equipment (moving body) such as a vehicle, a ship, or an aircraft. The mechanical device MCHN in transportation equipment may be used as a moving device. The device EQP as transportation equipment is suitable for transporting the photoelectric conversion device APR or for assisting and / or automating driving (piloting) using a photographing function. The processing device PRCS for assisting and / or automating driving (piloting) can perform processing to operate the mechanical device MCHN as a moving device based on information obtained by the photoelectric conversion device APR.

[0124] Use of the photoelectric conversion device APR according to this embodiment enables high performance. Therefore, when the photoelectric conversion device APR is installed in a transportation device to photograph the exterior of the transportation device or measure the external environment, excellent image quality and measurement accuracy can be obtained. Furthermore, reliability can be improved to a level sufficient for installation in equipment used in harsh environments such as transportation devices. Therefore, when manufacturing and selling transportation devices, deciding to install the photoelectric conversion device APR according to this embodiment in transportation devices is advantageous in terms of improving the performance of the transportation devices.

[0125] The embodiments described above can be modified as appropriate without departing from the technical concept. The disclosure of the embodiments includes not only what is clearly stated in this specification, but also all matters that can be understood from this specification and the drawings attached hereto. [Explanation of symbols]

[0126] 10. Semiconductor substrate 11 Photoelectric conversion unit 40 Interlayer insulating film 163, 173 Metal-containing parts 47 Gate electrode 48 Sidewall spacer 31 Silicon nitride layer 310 Silicon nitride film 32 Silicon nitride layer 320 Silicon nitride film 21 Silicon oxide film 503 Contact plug

Claims

1. a semiconductor substrate having a photoelectric conversion unit and a charge retention unit that retains charges generated by the photoelectric conversion unit; a silicide portion provided on the semiconductor substrate; an interlayer insulating film disposed on the silicide portion; a dielectric region disposed on the photoelectric conversion portion so as to be surrounded by the interlayer insulating film; a light-shielding film located between the interlayer insulating film and the semiconductor substrate; a first insulating layer made of a material other than silicon oxide and disposed between the interlayer insulating film and the photoelectric conversion unit; a first silicon oxide film having a first portion disposed between the first insulating layer and the photoelectric conversion portion and a second portion disposed between the interlayer insulating film and the silicide portion; a second silicon oxide film disposed between the first insulating layer and the photoelectric conversion portion; a second insulating layer made of a material different from silicon oxide and disposed between the first silicon oxide film and the silicide portion; Equipped with the light-shielding film is disposed so as to cover the charge retention portion, a portion of the first silicon oxide film is disposed between the first insulating layer and the light-shielding film; a gate electrode of a transfer transistor that transfers charges from the photoelectric conversion portion to the charge storage portion, and a portion of the second silicon oxide film is disposed between the light-shielding film and the gate electrode of the transfer transistor;

2. an electrode disposed on the semiconductor substrate; 2. The photoelectric conversion device according to claim 1, wherein the silicide portion is disposed on the electrode.

3. a sidewall spacer covering a side surface of the electrode; 3. The photoelectric conversion device according to claim 2, wherein the second insulating layer is disposed between the first silicon oxide film and the sidewall spacer.

4. an impurity region provided in the semiconductor substrate; 4. The photoelectric conversion device according to claim 1, wherein the silicide portion is disposed on the impurity region.

5. 5. The photoelectric conversion device according to claim 1, wherein the dielectric region contains silicon nitride.

6. 6. The photoelectric conversion device according to claim 1, wherein the first insulating layer has a portion having a thickness greater than a thickness of the second insulating layer.

7. 7. The photoelectric conversion device according to claim 1, further comprising a contact plug in contact with the interlayer insulating film and the silicide portion, the contact plug penetrating the first silicon oxide film.

8. 8. The photoelectric conversion device according to claim 1, wherein the thickness distribution of the first silicon oxide film from the first portion to the second portion is ±10% or less.

9. 9. The photoelectric conversion device according to claim 1, wherein the first insulating layer and the second insulating layer are silicon nitride layers.

10. 10. The photoelectric conversion device according to claim 1, wherein the second silicon oxide film is disposed between the first silicon oxide film and the gate electrode.

11. An apparatus comprising the photoelectric conversion device according to any one of claims 1 to 10, An apparatus characterized by further comprising at least one of an optical system that forms an image on the photoelectric conversion device, a control device that controls the photoelectric conversion device, a processing device that processes signals output from the photoelectric conversion device, a mechanical device that is controlled based on information obtained by the photoelectric conversion device, a display device that displays the information obtained by the photoelectric conversion device, and a storage device that stores the information obtained by the photoelectric conversion device.

Images