Detection device, detection method, exposure device, and article manufacturing method

Abstract

To provide a technique advantageous for achieving improvement of overlay accuracy and high throughput using a plurality of detection systems for detecting mutually different marks.SOLUTION: A detection device for detecting a plurality of marks provided on an object includes: a stage which holds the object and is rotatable; a plurality of detection systems which are arranged while being separated from each other so as to detect mutually different marks, among the plurality of marks provided on the object held by the stage; and a processing part for performing first processing of detecting the plurality of marks by the one or more detection systems among the plurality of detection systems and obtaining a first detection value, in a first state where the stage is arranged at a first rotation angle, and second processing of detecting the plurality of marks by the two or more detection systems among the plurality of detection systems and obtaining a second detection value, in a second state where the stage is arranged at a second rotation angle different from the first rotation angle, and for determining a difference between the first detection value and the second detection value for each of the plurality of marks.SELECTED DRAWING: Figure 11

Description

[Technical Field]

[0001] The present invention relates to a detection apparatus, a detection method, an exposure apparatus, and a method for manufacturing an article. [Background technology]

[0002] In recent years, in the exposure equipment used in the manufacture of semiconductor devices, etc., there has been a demand for further miniaturization as well as higher accuracy in the overlay precision between the master and the substrate. Since overlay precision typically requires about 1 / 5 of the resolution, improving overlay precision becomes increasingly important as semiconductor devices become more miniaturized.

[0003] One method for improving overlay accuracy is to increase the number of marks (alignment marks) on a substrate that are detected by a position detection system. However, this method increases the time required to detect the marks (detection time), resulting in a decrease in the throughput of the device. Therefore, in order to achieve both an increase in the number of marks to be detected and a reduction in detection time, a technique has been proposed in which multiple position detection systems are used to detect multiple marks on a substrate. To achieve high-precision mark detection using multiple position detection systems, it is necessary to reduce the adjustment error of each position detection system. Therefore, a method has been proposed in which an offset for each position detection system is calculated using a reference mark (fiducial mark) (see Patent Document 1). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent Publication No. 2021-9230 Summary of the Invention [Problem to be solved by the invention]

[0005] However, even if the offsets of multiple position detection systems relative to the reference mark are calculated, the amount of stage rotation relative to each position detection system will differ depending on the placement error of the substrate relative to the stage, which may affect the accuracy of mark detection. This is due to errors that occur when the stage orientation when detecting a mark on the substrate with one position detection system (single eye) differs from the stage orientation when detecting marks on the substrate with multiple position detection systems (compound eye). Furthermore, even when the same compound eye is used, the amount of stage rotation will differ depending on the placement error of the substrate relative to the stage, which will affect the accuracy of mark detection.

[0006] The present invention has been made in consideration of the problems with the conventional technology, and has as its exemplary object to provide a technology that is advantageous for improving overlay accuracy and achieving high throughput by using multiple detection systems that detect different marks. [Means for solving the problem]

[0007] In order to achieve the above object, one aspect of the present invention provides a detection device for detecting a plurality of marks provided on an object, the detection device comprising: a rotatable stage that holds the object; and a plurality of detection systems that are arranged apart from one another so as to detect different marks from one another among the plurality of marks provided on the object held by the stage. The detection device performs a first process in which, in a first state in which the stage is arranged at a first rotation angle, the plurality of marks are detected by one or more detection systems of the plurality of detection systems to obtain a first detection value; and a second process in which, in a second state in which the stage is arranged at a second rotation angle different from the first rotation angle, the plurality of marks are detected by two or more detection systems of the plurality of detection systems to obtain a second detection value, and calculates a difference between the first detection value and the second detection value for each of the plurality of marks. A correction value for correcting the detection value detected by the detection system based on the and a processing unit for determining

[0008] Further objects and other aspects of the present invention will become apparent from the following description of the embodiments with reference to the accompanying drawings. [Effects of the Invention]

[0009] According to the present invention, for example, it is possible to provide a technique that is advantageous for improving overlay accuracy and achieving high throughput by using a plurality of detection systems that detect different marks. [Brief explanation of the drawings]

[0010] [Figure 1] 1 is a schematic diagram showing the configuration of an exposure apparatus according to one aspect of the present invention. [Figure 2] FIG. 4 is a diagram showing a detailed configuration of a stage reference plate. [Figure 3] FIG. 2 is a schematic diagram showing a specific configuration of a position detection system. [Figure 4] FIG. 2 is a diagram showing the configuration of a substrate alignment detection system. [Figure 5] FIG. 2 is a diagram for explaining detection of an alignment mark by one position detection system. [Figure 6] FIG. 2 is a diagram for explaining detection of an alignment mark by one position detection system. [Figure 7] FIG. 2 is a diagram for explaining detection of an alignment mark by one position detection system. [Figure 8] FIG. 2 is a diagram for explaining detection of an alignment mark by one position detection system. [Figure 9] FIG. 2 is a diagram for explaining simultaneous detection of alignment marks by two position detection systems. [Figure 10] FIG. 2 is a diagram for explaining simultaneous detection of alignment marks by two position detection systems. [Figure 11] FIG. 2 is a diagram for explaining simultaneous detection of alignment marks by two position detection systems. [Figure 12] FIG. 2 is a diagram for explaining simultaneous detection of alignment marks by two position detection systems. [Figure 13] FIG. 2 is a diagram for explaining simultaneous detection of alignment marks by two position detection systems. [Figure 14]10 is a flowchart for explaining simultaneous detection of alignment marks 19 by two position detection systems in this embodiment. [Figure 15] FIG. 10 is a diagram for explaining the θZ coefficient in detail. [Figure 16] FIG. 10 is a diagram for explaining the θZ coefficient in detail. [Figure 17] 10A and 10B are diagrams illustrating an example of an attachment error of a position detection system with respect to a base plate. [Figure 18] FIG. 2 is a diagram showing an example of an alignment mark provided on a substrate. [Figure 19] FIG. 2 is a diagram for explaining simultaneous detection of alignment marks by two position detection systems. [Figure 20] FIG. 2 is a diagram for explaining simultaneous detection of alignment marks by two position detection systems. [Figure 21] FIG. 2 is a diagram for explaining simultaneous detection of alignment marks by two position detection systems. [Figure 22] FIG. 2 is a diagram for explaining simultaneous detection of alignment marks by two position detection systems. DETAILED DESCRIPTION OF THE INVENTION

[0011] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. Note that the following embodiments do not limit the invention according to the claims. Although multiple features are described in the embodiments, not all of these multiple features are necessarily essential to the invention, and multiple features may be combined arbitrarily. Furthermore, in the accompanying drawings, the same reference numerals are used to designate the same or similar components, and redundant explanations will be omitted.

[0012] First Embodiment 1 is a schematic diagram showing the configuration of an exposure apparatus 100 according to one aspect of the present invention. The exposure apparatus 100 is a lithography apparatus that exposes a substrate via an original and forms a pattern on the substrate. The exposure apparatus 100 has an original stage 2 that holds an original 1 (reticle or mask), a substrate stage 4 that holds a substrate 3, and an illumination optical system 5 that illuminates the original 1 held on the original stage 2. The exposure apparatus 100 also has a projection optical system 6 that projects (an image of) the pattern of the original 1 onto the substrate 3 held on the substrate stage 4, and a controller 17 that performs overall control of the operation of the exposure apparatus 100.

[0013] In this embodiment, the exposure apparatus 100 is a scanning exposure apparatus (scanner) that transfers the pattern of the original 1 onto the substrate 3 while synchronously scanning the original 1 and the substrate 3 in the scanning direction (i.e., in a step-and-scan manner). However, the exposure apparatus 100 may also be an exposure apparatus (stepper) that transfers the pattern of the original 1 onto the substrate 3 while fixing the original 1 (i.e., in a step-and-repeat manner).

[0014] 1, the direction coinciding with the optical axis of the projection optical system 6 (optical axis direction) is referred to as the Z direction, the scanning direction of the original 1 and substrate 3 in a plane perpendicular to the Z direction is referred to as the Y direction, and the direction perpendicular to the Z direction and the Y direction (non-scanning direction) is referred to as the X direction. Furthermore, the directions around the X axis, the Y axis, and the Z axis are referred to as the θX direction, the θY direction, and the θZ direction, respectively.

[0015] The illumination optical system 5 illuminates the original 1, specifically a predetermined illumination area on the original, with light (exposure light) having a uniform illuminance distribution. Examples of the exposure light include the g-line or i-line of an ultra-high pressure mercury lamp, a KrF excimer laser, an ArF excimer laser, and an F2 laser. Furthermore, in order to manufacture finer semiconductor elements, extreme ultraviolet light (EUV light) of several nanometers to several hundred nanometers may be used as the exposure light.

[0016] The original stage 2 holds the original 1 and is configured to be movable two-dimensionally within a plane perpendicular to the optical axis of the projection optical system 6, i.e., within the XY plane, and to be rotatable in the θZ direction. The original stage 2 is driven by a driving mechanism (not shown) such as a linear motor.

[0017] A mirror 7 is provided on the original stage 2. A laser interferometer 9 is provided opposite the mirror 7. The two-dimensional position and rotation angle of the original stage 2 (the original 1 held by it) are measured in real time by the laser interferometer 9, and the measurement results are output to a control unit 17. The control unit 17 controls the drive mechanism based on the measurement results of the laser interferometer 9, and positions the original 1 held by the original stage 2.

[0018] The projection optical system 6 includes a plurality of optical elements and projects the pattern of the original 1 onto the substrate 3 at a predetermined projection magnification β. In this embodiment, the projection optical system 6 is a reduction optical system having a projection magnification β of, for example, 1 / 4 or 1 / 5.

[0019] The substrate stage 4 includes a Z stage that holds the substrate 3 via a chuck, an XY stage that supports the Z stage, and a base that supports the XY stage. The substrate stage 4 is driven by a drive mechanism 18 that includes a linear motor and the like.

[0020] The substrate stage 4 is provided with a mirror 8 . Furthermore, laser interferometers 10 and 12 for measuring the position of the substrate stage 4 are provided at positions facing the mirror 8. The positions of the substrate stage 4 in the X, Y, and θZ directions are measured in real time by the laser interferometer 10, and the measurement results are output to a control unit 17. The positions of the substrate stage 4 in the Z, θX, and θY directions are measured in real time by the laser interferometer 12, and the measurement results are output to the control unit 17. The control unit 17 positions the substrate 3 held by the substrate stage 4 by controlling a drive mechanism 18 based on the measurement results of the laser interferometers 10 and 12.

[0021] A stage reference plate 11 is provided on the substrate stage 4 so as to be at approximately the same height as the surface of the substrate 3 held on the substrate stage 4. FIG. 2 is a diagram showing the detailed configuration of the stage reference plate 11 (11a, 11b, 11c) provided on the substrate stage 4. The stage reference plate 11 may be provided at one corner of the substrate stage 4, or at multiple corners of the substrate stage 4. The stage reference plate 11 may also be provided along the sides of the substrate stage 4. In this embodiment, as shown in FIG. 2, three stage reference plates 11a, 11b, and 11c are provided for the substrate stage 4.

[0022] 2, the stage reference plate 11 is provided with a reference mark 39 for the position detection system, which is detected by the position detection system 42, and a reference mark 38, which is detected by the original alignment detection system 13 or 14. The stage reference plate 11 may be provided with a plurality of reference marks 38 or a plurality of reference marks 39. The positional relationship (X direction and Y direction) between the reference mark 38 and the reference mark 39 is set to a predetermined positional relationship (i.e., is known). The reference mark 38 and the reference mark 39 may be a common mark.

[0023] The original alignment detection system 13 is provided near the original stage 2. The original alignment detection system 13 detects an original reference mark (not shown) provided on the original 1 held on the original stage 2 and a reference mark 38 provided on a stage reference plate 11 on the substrate stage via the projection optical system 6. The original alignment detection system 13 detects the original reference mark provided on the original 1 and the reference mark 38 via the projection optical system 6 using the same light source as the light source used when actually exposing the substrate 3. Specifically, the original alignment detection system 13 detects reflected light from the original reference mark and the reference mark 38 (reflective mark) using an imaging element (e.g., a photoelectric conversion element such as a CCD camera). Based on the detection signal from the imaging element, the original 1 and the substrate 3 are aligned. At this time, by adjusting the position and focus of the master reference mark provided on the master 1 and the reference mark 38 provided on the stage reference plate 11, the relative positional relationship (X, Y, Z) between the master 1 and the substrate 3 can be adjusted.

[0024] The original alignment detection system 14 is provided on the substrate stage 4. The original alignment detection system 14 is a transmission-type detection system and is used when the reference mark 38 is a transmission-type mark. The original alignment detection system 14 detects the original reference mark provided on the original 1 and the reference mark 38 provided on the stage reference plate 11 using the same light source as the light source used when actually exposing the substrate 3. Specifically, the original alignment detection system 14 detects transmitted light that has passed through the original reference mark and the reference mark 38 with a light intensity sensor. At this time, the original alignment detection system 14 detects the intensity of the transmitted light while moving the substrate stage 4 in the X direction (or Y direction) and Z direction. This makes it possible to align the positions and focus of the original reference mark provided on the original 1 and the reference mark 38 provided on the stage reference plate 11.

[0025] In this way, the relative positional relationship (X, Y, Z) between the original 1 and the substrate 3 can be adjusted using either the original alignment detection system 13 or the original alignment detection system 14.

[0026] The focus detection system 15 includes a light projection system that projects light onto the surface of the substrate 3 at an oblique incidence, and a light receiving system that receives light reflected from the surface of the substrate 3. The focus detection system 15 detects the position of the substrate 3 in the Z direction (height direction) and outputs the detection result to the control unit 17. The control unit 17 controls the drive mechanism 18 based on the detection result of the focus detection system 15, thereby adjusting the position in the Z direction and the tilt angle of the substrate 3 held by the substrate stage 4.

[0027] As will be described later, the substrate alignment detection system 16 is composed of multiple position detection systems 42, each of which includes an illumination system and a light-receiving system. The illumination system illuminates the alignment marks 19 on the substrate 3 and the reference marks 39 on the stage reference plate 11 with light. The light-receiving system receives light (reflected light) from the alignment marks 19 on the substrate 3 and the reference marks 39 on the stage reference plate 11. The substrate alignment detection system 16 detects the alignment marks 19 and the reference marks 39 and outputs the detection results to the control unit 17. Based on the detection results of the substrate alignment detection system 16, the control unit 17 controls the drive mechanism 18 that drives the substrate stage 4, and adjusts the position of the substrate 3 held by the substrate stage 4 in the X and Y directions.

[0028] The configuration of a substrate alignment detection system is generally broadly divided into two types: an off-axis alignment (OA) detection system and a TTL (Through the Lens Alignment) detection system. OA detection systems optically detect alignment marks on a substrate without using a projection optical system. TTL detection systems detect alignment marks on a substrate via a projection optical system using light (non-exposure light) with a wavelength different from that of exposure light. In this embodiment, the substrate alignment detection system 16 is an OA detection system, but the alignment detection method is not limited to this. For example, if the substrate alignment detection system 16 is a TTL detection system, it detects alignment marks 19 on the substrate 3 via the projection optical system 6, but the basic configuration is the same as that of an OA detection system.

[0029] 3 is a schematic diagram showing the specific configuration of the substrate alignment detection system 16, and more specifically, one position detection system 42 that constitutes the substrate alignment detection system 16. The position detection system 42 includes a light source 20, a first condenser optical system 21, a wavelength filter plate 22, a second condenser optical system 23, an aperture stop plate 24, a first illumination system 25, a second illumination system 26, a polarizing beam splitter 27, and an NA stop 28. The position detection system 42 also includes an AF prism 29, a λ / 4 plate 30, an objective lens 31, a relay lens 32, a first imaging system 33, an aperture stop 34, a second imaging system 35, an optical member for adjusting a wavelength shift difference 36, and a photoelectric conversion element 37.

[0030] In this embodiment, light source 20 emits visible light (for example, light with a wavelength of 500 nm or more and 700 nm or less), blue wavelength light (for example, light with a wavelength of 450 nm or more and 550 nm or less (blue wavelength light)), and infrared light (for example, light with a wavelength of 700 nm or more and 1500 nm or less). The light from light source 20 passes through first condenser optical system 21, wavelength filter plate 22, and second condenser optical system 23, and reaches aperture stop plate 24 located at the pupil plane (optical Fourier transform plane with respect to the object plane) of position detection system 42.

[0031] The wavelength filter plate 22 is provided with a plurality of wavelength filters that pass light in different wavelength bands, and one wavelength filter is selected from the plurality of wavelength filters and placed in the optical path of the position detection system 42 under the control of the control unit 17. In this embodiment, the wavelength filter plate 22 is provided with a wavelength filter that passes infrared light, a wavelength filter that passes visible light, and a wavelength filter that passes blue wavelength light. By switching between these wavelength filters in the wavelength filter plate 22, it is possible to select the wavelength band of light that illuminates the alignment mark 19 provided on the substrate 3. Furthermore, the wavelength filter plate 22 may be configured to allow a new wavelength filter to be added in addition to the plurality of wavelength filters provided in advance.

[0032] Aperture diaphragm plate 24 is provided with a plurality of aperture diaphragms with different illumination σ, and the illumination σ of the light illuminating alignment mark 19 can be changed by switching the aperture diaphragms arranged in the optical path of position detection system 42 under the control of control unit 17. Furthermore, aperture diaphragm plate 24 may have a configuration that allows a new aperture diaphragm to be added in addition to the plurality of aperture diaphragms provided in advance.

[0033] The light that reaches the aperture stop plate 24 is guided to the polarizing beam splitter 27 via the first illumination system 25 and the second illumination system 26. Of the light guided to the polarizing beam splitter 27, S-polarized light that is perpendicular to the paper surface is reflected by the polarizing beam splitter 27, passes through the NA stop 28, the AF prism 29, and the λ / 4 plate 30, and is converted into circularly polarized light. The light that has passed through the λ / 4 plate 30 (illumination light) passes through the objective lens 31 and illuminates the alignment mark 19 provided on the substrate 3. The NA of the NA stop 28 can be changed by changing the aperture amount under the control of the control unit 17.

[0034] Reflected light, diffracted light, and scattered light (detected light) from the alignment mark 19 pass through the objective lens 31 and the λ / 4 plate 30 to be converted into P-polarized light parallel to the paper surface. The light then passes through the AF prism 29 and the NA diaphragm 28 and then the polarizing beam splitter 27. The light that passes through the polarizing beam splitter 27 passes through the relay lens 32, the first imaging system 33, the aperture diaphragm 34, the second imaging system 35, and the wavelength shift difference adjustment optical member 36 before reaching the photoelectric conversion element 37 (e.g., an imaging element such as a CCD image sensor). The photoelectric conversion element 37 detects the light from the alignment mark 19, and the accumulation time can be extended until the intensity of the detected light exceeds a certain threshold. The accumulation time of the photoelectric conversion element 37 is controlled by the control unit 17.

[0035] In the exposure apparatus 100, the substrate alignment detection system 16 is composed of a plurality of position detection systems 42, each having the configuration shown in FIG. 3, as described above. In other words, the substrate alignment detection system 16 constitutes a position detection system group consisting of a plurality of position detection systems 42. In this embodiment, as shown in FIGS. 4(a) and 4(b), the substrate alignment detection system 16 includes three position detection systems 42a, 42b, and 42c that are arranged apart from one another so as to detect different alignment marks. The position detection systems 42a, 42b, and 42c are held on the base plate 40 via drivers 41a, 41b, and 41c, respectively. The drivers 41a, 41b, and 41c drive the position detection systems 42a, 42b, and 42c, respectively, to change the positions of the position detection systems 42a, 42b, and 42c relative to the base plate 40. In other words, the driving units 41 a , 41 b , and 41 c change the relative positional relationship of the position detection systems 42 a , 42 b , and 42 c on the base plate 40 .

[0036] The substrate alignment detection system 16 is made up of multiple position detection systems 42, and is therefore capable of simultaneously detecting multiple alignment marks 19 provided on the substrate 3. The alignment marks 19 are usually provided on the substrate 3 at a repetition period that corresponds to the arrangement of shot areas on the substrate (shot layout). Information regarding the arrangement of the alignment marks 19 provided on the substrate 3 is stored (memorized) in a storage unit provided in the exposure apparatus 100, for example, in the memory of the control unit 17.

[0037] 4(a), for example, under the control of the control unit 17, the position detection system 42c is driven in the X direction via the drive unit 41c based on information regarding the arrangement of the alignment marks 19, specifically, information regarding the spacing between the alignment marks 19a and 19b. Then, as shown in FIG. 4(b), by arranging the alignment mark 19a below the position detection system 42a and arranging the alignment mark 19b below the position detection system 42c, it becomes possible to simultaneously detect the alignment marks 19a and 19b. Although two alignment marks 19a and 19b are provided on the substrate 3 in FIGS. 4(a) and 4(b), more alignment marks 19 may be provided on the substrate 3.

[0038] As shown in Figures 4(a) and 4(b), a plurality of alignment marks 19 are provided on the substrate 3. The substrate alignment detection system 16 detects each of the plurality of alignment marks 19 with the position detection system 42, thereby being able to determine each component of the magnification, shift, rotation, etc. of the substrate 3. In particular, in recent years, there has been a demand for detecting a large number of alignment marks 19 in order to achieve high-precision alignment and improve overlay accuracy.

[0039] Detection of the alignment mark 19 on the substrate by one position detection system 42 (monocular) will be described with reference to FIGS.

[0040] 5 and 6 show a sequence in which the position detection system 42a detects the alignment marks 19a and 19b when the substrate 3 is placed on the substrate stage 4 without any placement error (when the substrate 3 is placed without rotation). For ease of explanation, the number of alignment marks 19 provided on the substrate 3 is two in FIGS. 5 and 6, but three or more alignment marks 19 may be provided on the substrate 3. First, as shown in FIG. 5, the substrate stage 4 is driven so that the left alignment mark 19a on the substrate is positioned below the position detection system 42a, and the position detection system 42a detects the alignment mark 19a. Next, as shown in FIG. 6, the substrate stage 4 is driven in the direction of arrow 43 (X direction) so that the right alignment mark 19b on the substrate is positioned below the position detection system 42a, and the position detection system 42a detects the alignment mark 19b.

[0041] 7 and 8 show a sequence in which the position detection system 42a detects the alignment marks 19a and 19b when the substrate 3 is placed with a placement error relative to the substrate stage 4 (when the substrate 3 is rotated). First, as shown in Fig. 7, the substrate stage 4 is driven so that the left alignment mark 19a on the substrate is positioned below the position detection system 42a, and the position detection system 42a detects the alignment mark 19a. Next, as shown in Fig. 8, the substrate stage 4 is driven in the directions of arrows 43 (X direction) and 44 (Y direction) so that the right alignment mark 19b on the substrate is positioned below the position detection system 42a, and the position detection system 42a detects the alignment mark 19b.

[0042] 5 to 8, in detection using a single position detection system 42a, alignment marks 19a and 19b can be positioned under the position detection system 42a simply by driving the substrate stage 4 in the X and Y directions, regardless of whether or not the substrate 3 has a placement error. Therefore, in FIGS. 5 and 6, or in FIGS. 7 and 8, the rotation angle at which the substrate stage 4 is positioned relative to the position detection system 42a is the same, so it can be seen that no error occurs due to the θZ control (rotational drive) of the substrate stage 4. Thus, when detecting multiple alignment marks with a single camera, the substrate stage 4 is positioned at the same rotation angle, which has the advantage of allowing the alignment marks to be detected without errors due to the θZ control of the substrate stage 4. On the other hand, because the substrate stage 4 must be driven to detect each alignment mark, it has the disadvantage of taking time to detect the alignment marks and reducing throughput.

[0043] The simultaneous detection of alignment marks 19 on a substrate by two position detection systems 42 (compound eyes (two eyes)) will be described below.

[0044] 9 shows a sequence in which the position detection systems 42a and 42c detect the alignment marks 19a and 19b, respectively, when the substrate 3 is placed on the substrate stage 4 without any placement error (when the substrate 3 is placed without rotation). First, the substrate stage 4 is driven so that the left alignment mark 19a on the substrate is positioned below the position detection system 42a. Next, the position detection system 42c is driven via the driver 41c so that the right alignment mark 19b on the substrate is positioned below the position detection system 42c (so that the position detection system 42c is positioned above the alignment mark 19b). This makes it possible to simultaneously detect the alignment mark 19a with the position detection system 42a and the alignment mark 19b with the position detection system 42c, as shown in FIG. Therefore, compared to when alignment marks 19a and 19b are detected by one position detection system 42a (FIGS. 5 and 6), there is no need to drive substrate stage 4 in the direction of arrow 43, and alignment marks 19a and 19b can be detected in a short time. In practice, driving of position detection system 42c by driver 41c is performed before driving substrate stage 4 to position alignment mark 19a below position detection system 42a, in accordance with the shot layout of substrate 3. In other words, the distance between position detection system 42a and position detection system 42c is adjusted in advance based on the distance between alignment mark 19a and alignment mark 19b.

[0045] 9 assumes an ideal state in which the substrate 3 is placed without any placement error on the substrate stage 4. However, in reality, as shown in FIGS. 10 and 11, the substrate 3 is often placed with a placement error on the substrate stage 4 (the substrate 3 is rotated and placed). For this reason, it is not easy to simultaneously detect each alignment mark (e.g., alignment marks 19a and 19b) using a compound eye (e.g., position detection systems 42a and 42c).

[0046] Fig. 10 shows a sequence in which position detection systems 42a and 42c detect alignment marks 19a and 19b, respectively, in a state in which substrate 3 is placed with a placement error relative to substrate stage 4 (a state in which substrate 3 is rotated and placed). In Fig. 10, position detection system 42c is driven in advance via driver 41c so that the distance (design value) between alignment mark 19a and alignment mark 19b matches the distance between position detection system 42a and position detection system 42c.

[0047] 10, the substrate stage 4 is driven so that the left alignment mark 19a on the substrate is positioned below the position detection system 42a. At this time, because the substrate 3 is rotating relative to the substrate stage 4, it is not possible to position the right alignment mark 19b on the substrate below the position detection system 42c simply by driving the position detection system 42c according to the spacing between the alignment marks 19a and 19b. Therefore, it is not possible to simultaneously detect the alignment mark 19a with the position detection system 42a and the alignment mark 19b with the position detection system 42c.

[0048] 11, the substrate stage 4 is rotated in the direction of arrow 45 (θZ direction) from the state shown in FIG. 10. This allows alignment mark 19b to be positioned below position detection system 42c while maintaining alignment mark 19a positioned below position detection system 42a. In this way, by positioning alignment marks 19a and 19b below position detection systems 42a and 42c, respectively, it becomes possible to simultaneously detect alignment marks 19a and 19b.

[0049] As described above, when the substrate 3 is rotated relative to the substrate stage 4, the substrate stage 4 is generally rotated in the θZ direction, and the alignment marks 19a and 19b are simultaneously detected by the position detection systems 42a and 42c, respectively. However, a problem occurs in that the detection results of the alignment mark 19 do not completely match when the substrate stage 4 is rotated in the θZ direction (FIG. 11) and when the substrate stage 4 is not rotated in the θZ direction (FIGS. 5 to 9).

[0050] As described above, the position of the substrate stage 4 is controlled based on the measurement results of the laser interferometers 10 and 11. Here, while drive correction of the substrate stage 4 in the X and Y directions (FIGS. 5 to 9) is difficult, drive correction of the substrate stage 4 in the θZ direction (FIG. 11) cannot be performed with the same accuracy. This is because, although the position of the substrate stage 4 is controlled by irradiating light from the laser interferometer 10 onto the mirror 8 on the substrate stage and detecting the returned light from the mirror 8, correction in the θZ direction increases the error compared to correction in the X and Y directions.

[0051] 5 to 9, if only the drive correction in the X and Y directions of the substrate stage 4 is required, the substrate stage 4 may be controlled so that the return light from the mirror 8 returns to the same position with respect to the laser interferometer 10, regardless of the position of the substrate stage 4. Possible errors in this case include the shape of the mirror 8 on the substrate stage and air fluctuations between the mirror 8 and the laser interferometer 10.

[0052] 11, when the substrate stage 4 is rotationally driven in the θZ direction, the light from the laser interferometer 10 is not irradiated perpendicularly to the mirror 8 on the substrate stage 4, and the light returning from the mirror 8 to the laser interferometer 10 is significantly shifted (displaced). It would be ideal if the rotation of the substrate stage 4 in the θZ direction could be accurately measured by the laser interferometer 10 and the position of the substrate stage 4 could be corrected, but in reality, due to measurement errors and the influence of tilt in the X direction, the position of the substrate stage 4 cannot be accurately corrected, resulting in an Abbe error.

[0053] Thus, compared to drive correction in the X and Y directions of the substrate stage 4 (FIGS. 5 to 9), drive correction in the θZ direction of the substrate stage 4 (FIG. 11) generates an Abbe error, making it impossible to perform correction with the same accuracy as drive correction in the X and Y directions. It is also known that there is an Abbe error that depends on the coordinates (position) of the substrate stage 4, and there is also the problem that the Abbe error varies depending on the shot area of ​​the substrate 3.

[0054] Furthermore, the placement (arrangement) state of the substrate 3 relative to the substrate stage 4 may differ between the first substrate 3 and the second and subsequent substrates 3, even if the alignment mark 19a is positioned below the position detection system 42a, as shown in FIG. 10, for example. FIG. 12 shows an example of a state in which the second and subsequent substrates 3 are placed on the substrate stage 4. Referring to FIG. 12, it can be seen that when the alignment mark 19a is positioned below the position detection system 42a, the substrate 3 is placed with a rotation (tilt) that tends to differ from the state (placed state) shown in FIG. 10. When the substrate 3 is placed relative to the substrate stage 4 in the state shown in FIG. 12, in order for the position detection systems 42a and 42c to simultaneously detect the alignment marks 19a and 19b, respectively, the substrate stage 4 needs to be rotated at an angle different from the state shown in FIG. 11.

[0055] For example, as shown in FIG. 12, the substrate stage 4 is driven so that the left alignment mark 19a on the substrate is positioned below the position detection system 42a. The position detection system 42c is assumed to be driven in advance via the drive unit 41c so that the distance (design value) between the alignment marks 19a and 19b matches the distance between the position detection systems 42a and 42c. In this case, because the substrate 3 is rotating relative to the substrate stage 4, simply driving the position detection system 42c according to the distance between the alignment marks 19a and 19b will not allow the right alignment mark 19b on the substrate to be positioned below the position detection system 42c. Therefore, when the substrate 3 is placed relative to the substrate stage 4 in the state shown in FIG. 12, the substrate stage 4 is rotated in the direction of arrow 46 (the θZ direction) as shown in FIG. 13. In this way, by positioning the alignment marks 19a and 19b below the position detection systems 42a and 42c, respectively, it becomes possible to simultaneously detect the alignment marks 19a and 19b.

[0056] 11 and 13, it can be seen that in order for the position detection systems 42a and 42c to simultaneously detect the alignment marks 19a and 19c, respectively, the direction and amount of rotation of the substrate stage 4 must differ depending on the state of the substrate 3 relative to the substrate stage 4. If the direction and amount of rotation of the substrate stage 4 differ, it will be affected by errors in the drive correction of the substrate stage 4 by the laser interferometers 10 and 12, which will become a source of error in the simultaneous detection of the alignment marks 19 on the substrate by the two position detection systems 42 (compound eyes (two eyes)).

[0057] Therefore, this embodiment provides a technique for simultaneously detecting the alignment marks 19 on the substrate with high accuracy using multiple position detection systems 42 at all times, regardless of the placement error (shift or θZ) of the substrate 3 relative to the substrate stage 4. As a result, even when using multiple position detection systems 42, it is possible to improve overlay accuracy and achieve high throughput without being affected by the placement error of the substrate 3 relative to the substrate stage 4.

[0058] 14, the simultaneous detection (detection method) of the alignment marks 19 by the two position detection systems 42 in this embodiment will be described. The simultaneous detection of the alignment marks 19 by the two position detection systems 42 is performed by the control unit 17 comprehensively controlling the position detection systems 42 (substrate alignment detection system 16) and the substrate stage 4. Therefore, the substrate stage 4, the position detection systems 42, and the control unit 17 function as a detection device that detects the alignment marks 19 provided on the substrate 3.

[0059] In S47, one of the position detection systems 42 (monocular) detects the alignment marks 19 provided on the first substrate 3, and a process is performed to obtain a detection value for each alignment mark 19 (monocular alignment for the first substrate). Specifically, as shown in Figures 7 and 8, when the substrate 3 is rotated relative to the substrate stage 4, the alignment marks 19a and 19b are detected by one position detection system 42a while the substrate stage 4 is driven in the X and Y directions. Here, the detection value for one of the alignment marks 19a and 19b (for example, alignment mark 19a) is set as detection value 49.

[0060] Thus, S47 corresponds to a first process of detecting the multiple alignment marks 19 with one or more of the multiple position detection systems 42 to obtain a first detection value in a first state in which the substrate stage 4 is positioned at the first rotation angle. Here, the first state is a state in which the substrate stage 4 is positioned at a first rotation angle that is a predetermined reference rotation angle (for example, 0 degrees in the θZ direction with respect to the X direction or the Y direction) in a plane (in the XY plane) parallel to the holding surface that holds the substrate 3 of the substrate stage 4. Also, in the first state, it is preferable that the substrate stage 4 is positioned so that light from the laser interferometer 10 is irradiated perpendicularly to the mirror 8 on the substrate stage 4.

[0061] In S48, two of the position detection systems 42 (compound eyes) detect the alignment marks 19 provided on the first substrate 3, and a process is performed to obtain a detection value for each alignment mark 19 (compound eye alignment for the first substrate). Specifically, as shown in FIG. 11, when the substrate 3 is rotated relative to the substrate stage 4, the substrate stage 4 is rotated in the θZ direction, and the alignment marks 19a and 19b are simultaneously detected by the two position detection systems 42a and 42c, respectively. Here, the detection value for one of the alignment marks 19a and 19b (for example, alignment mark 19a) is defined as detection value 50. The rotation angle of the substrate stage 4 is defined as θ45.

[0062] Thus, S48 corresponds to a second process of detecting the multiple alignment marks 19 with two or more of the multiple position detection systems 42 to obtain second detection values ​​in a second state in which the substrate stage 4 is positioned at a second rotation angle different from the first rotation angle. Here, the second state is a state in which the substrate stage 4 is positioned at the second rotation angle in a plane (XY plane) parallel to the holding surface that holds the substrate 3 on the substrate stage 4. In addition, in the second state, the substrate stage 4 is positioned so that two or more of the multiple position detection systems 42 can detect the multiple alignment marks 19 provided on the substrate 3 (first object) held by the substrate stage 4. In addition, in the second state, at least one of the rotation direction and the rotation amount of the substrate stage 4 is different from that in the first state.

[0063] In S47 and S48, the substrate 3 is held (placed) in the same state relative to the substrate stage 4, so the detection values ​​for each alignment mark 19 ideally will be the same. However, in reality, due to the influence of errors in driving correction of the substrate stage 4 in the θZ direction, the detection values ​​for each alignment mark will not be the same in S47 and S48. Here, the control unit 17 calculates the difference between the detection value 49 obtained in S47 and the detection value 50 obtained in S48 as the detection value Δ51. In this way, the control unit 17 functions as a processing unit that calculates the difference between the first detection value (detection value 49) and the second detection value (detection value 50).

[0064] In S52, two of the position detection systems 42 (compound eyes) detect the alignment marks 19 provided on the second substrate 3, and a process is performed to obtain a detection value of each alignment mark 19 (compound eye alignment for the second substrate). Specifically, as shown in FIG. 13, when the substrate 3 is rotated relative to the substrate stage 4, the substrate stage 4 is rotated in the θZ direction, and the alignment marks 19a and 19b are simultaneously detected by the two position detection systems 42a and 42c, respectively. Here, the detection value for one of the alignment marks 19a and 19b (for example, alignment mark 19a) is defined as detection value 53. The rotation angle of the substrate stage 4 is defined as θ46.

[0065] Note that, in S48 and S52, the substrate 3 is basically held (placed) in a different state (rotation) relative to the substrate stage 4, and therefore the rotation of the substrate stage 4 in the θZ direction required for simultaneous detection of the alignment marks 19a and 19b is different. In other words, at least one of the direction and amount of rotation of the substrate stage 4 is different in S48 and S52. Here, the rotational difference between the rotation angle θ45 of the substrate stage 4 in S48 and the rotation angle θ46 of the substrate stage 4 in S52 is defined as the θZ difference Δ54.

[0066] In S80, the detection value of each alignment mark 19 obtained in S52 is corrected to obtain a correction value TV53. The detection value 53 for the alignment mark 19a obtained in S52 includes the influence of the driving correction error in the θZ direction of the substrate stage 4 for the alignment mark 19a obtained in S47. Therefore, it is necessary to remove the influence of the driving correction error in the θZ direction of the substrate stage 4 from the detection value 53 for the alignment mark 19a obtained in S52 (i.e., correct the detection value 53) to obtain the correction value TV53. Specifically, the correction value TV53 is obtained by subtracting the detection value Δ51, the product of the θZ difference Δ54 and the θZ coefficient from the detection value 53 ("detection value 53 - detection value Δ51 - θZ difference Δ54 × θZ coefficient"). Note that the θZ coefficient is a coefficient that indicates the amount of error generated by the rotation angle at which the substrate stage 4 is positioned, i.e., the relationship between the rotation angle at which the substrate stage 4 is positioned and the amount of error included in the detection value of the alignment mark 19.

[0067] Thus, S80 corresponds to a third process in which, in a third state in which the substrate stage 4 is positioned at a third rotation angle relative to the second or subsequent substrate 3, the alignment marks 19 are detected by two or more of the position detection systems 42 to obtain a third detection value. Here, the third rotation angle is different from the second rotation angle. The third state is a state in which the substrate stage 4 is positioned at the third rotation angle in a plane (XY plane) parallel to the holding surface of the substrate stage 4 that holds the substrate 3. Here, since the first process (S47) and the second process (S47) have been performed, the difference between the first detection value (detection value 49) and the second detection value (detection value 50) is calculated. Therefore, the first process and the second process do not need to be performed for the second or subsequent substrates 3 (second objects) that are processed after the first substrate 3 (first object). In the third state, at least one of the rotation direction and rotation amount of the substrate stage 4 is different from that in the second state. In addition, in the third state, the substrate stage 4 is positioned so that two or more of the multiple position detection systems 42 can detect multiple alignment marks 19 provided on the second or subsequent substrate 3 (second object) held by the substrate stage 4.

[0068] The θZ coefficient will be described in detail with reference to FIGS. 15 and 16. First, as shown in FIG. 15, with the substrate stage 4 positioned at a predetermined reference rotation angle in the θZ direction, the reference marks MK on the stage reference plate 11 provided on the substrate stage 4 are simultaneously detected by the position detection systems 42a and 42c. Here, the detection value for one reference mark MK is stored as detection value 56 in, for example, a memory unit of the control unit 17. Next, as shown in FIG. 16, with the substrate stage 4 positioned at a rotation angle θ58 in the θZ direction that is different from the reference angle, the reference marks MK on the stage reference plate 11 provided on the substrate stage 4 are simultaneously detected by the position detection systems 42a and 42c. Here, the detection value for the same reference mark MK as in FIG. 15 is stored as detection value 57 in, for example, a memory unit of the control unit 17.

[0069] The difference in the detection values ​​resulting from rotating the substrate stage 4 in the θZ direction by a rotation angle θ58 is expressed as detection value 57 - detection value 56. Therefore, the θZ coefficient, which is the amount of error generated by the rotation state of the substrate stage 4, is calculated as (detection value 57 - detection value 56) / θ58. In this way, the θZ coefficient is obtained in advance based on the detection values ​​obtained by detecting the reference mark MK provided on the substrate stage 4 with multiple position detection systems 42 while changing the rotation angle of the substrate stage 4.

[0070] In this embodiment, for the sake of simplicity, FIGS. 15 and 16 show an example in which the θZ coefficient is obtained by detecting the same reference mark MK, but the present invention is not limited to this. For example, the θZ coefficient may be obtained by rotating the substrate stage 4 significantly in the θZ direction and detecting different reference marks. The coordinates (positions) of the reference marks provided on the stage reference plate 11 are known. Therefore, when detecting different reference marks, the θZ coefficient can be obtained by subtracting the difference in the design values ​​of the coordinates of each reference mark from the difference in the detected values ​​and dividing the result by the rotation angle of the substrate stage 4. By rotating the substrate stage 4 significantly to detect different reference marks, the difference in the detected values ​​becomes larger relative to the detection repeatability, making it possible to obtain a θZ coefficient with higher accuracy.

[0071] Furthermore, in this embodiment, for the sake of simplicity, the substrate stage 4 is assumed to be positioned at two different rotation angles, and the θZ coefficient is calculated linearly from the difference in the detection values ​​obtained at each rotation angle, but this is not limiting. For example, the substrate stage 4 may be positioned at three or more rotation angles, and the θZ coefficient may be calculated using an approximation formula from the detection values ​​(values) obtained when the substrate stage 4 is positioned at each rotation angle.

[0072] The θZ coefficient is obtained using the stage reference plate 11 (reference mark), and therefore it is sufficient to obtain it once at a stage prior to aligning or exposing the substrate 3. Specifically, if the θZ coefficient is obtained in advance at the stage of adjusting the device, it is not necessary to obtain the θZ coefficient again unless there is a change in the adjustment state of the device, and it can be used continuously.

[0073] Furthermore, in this embodiment, the θZ coefficient is obtained from the detection value obtained by detecting the reference mark MK provided on the stage reference plate 11, but the θZ coefficient may also be obtained from the detection value obtained by detecting the alignment mark 19 provided on the substrate 3.

[0074] In this embodiment, simultaneous detection of the alignment mark 19 using two position detection systems 42 (compound eyes) has been described. However, in practice, as shown in FIGS. 5 to 9 , the alignment mark 19 may be detected by one position detection system 42 (monocular) without rotating the substrate stage 4 in the θZ direction. In this case, it is preferable that the detection value for the alignment mark 19 be the same regardless of whether the compound eye or monocular is used. If the detection values ​​for the alignment mark 19 differ between the compound eye and the monocular, even for the same shot layout, the detection values ​​must be managed depending on the combination of position detection systems 42 used to detect the alignment mark 19, which can be cumbersome. In this embodiment ( FIG. 14 ), the detection values ​​for the alignment mark 19 can be matched between the compound eye and the monocular, making it possible to detect the alignment mark 19 without being affected by placement error of the substrate 3 relative to the substrate stage 4. Therefore, according to this embodiment, Abbe error is suppressed, and the alignment mark 19 can be detected with high accuracy regardless of whether the compound eye or monocular is used.

[0075] Mounting errors generally occur when mounting the position detection systems 42a, 42b, and 42c on the base plate 40. Among these mounting errors, the mounting error in the X direction can be reduced by driving the position detection systems 42a, 42b, and 42c in the X direction using the drivers 41a, 41b, and 41c to adjust their positional relationship. On the other hand, as shown in FIG. 17 , for example, the mounting error θ59 in the Y direction between the position detection systems 42a and 42c cannot be reduced by driving the position detection systems 42a and 42c using the drivers 41a and 41c. Therefore, ideally, there should be no mounting error in the Y direction between the position detection systems 42a and 42c. However, in practice, the spacing between the position detection systems 42a and 42c needs to be adjusted depending on the shot layout, and therefore, the mounting error in the Y direction fluctuates when the position detection systems 42a and 42c are driven in the X direction.

[0076] In this embodiment, there is no need to manage the mounting error (error amount) in the Y direction corresponding to the positions of the position detection systems 42a and 42c in the X direction. Specifically, this can be addressed by adding the mounting error θ59 in the Y direction between the position detection systems 42a and 42c to the error amount (θZ error) generated by the placement error of the substrate 3 relative to the substrate stage 4. For example, in FIG. 13 , assuming that there is no mounting error in the Y direction between the position detection systems 42a and 42c, the substrate stage 4 is rotated in the θZ direction to reduce the influence of the placement error of the substrate 3 relative to the substrate stage 4. Here, if there is a mounting error θ59 in the Y direction between the position detection systems 42a and 42c as shown in FIG. 17 , the substrate stage 4 can be rotated in the θZ direction by a rotation angle θ46+θ59. As described above, according to this embodiment, regardless of the mounting error in the Y direction corresponding to the positions of the position detection systems 42a and 42c in the X direction, correction is possible by rotating the substrate stage 4 in the θZ direction.

[0077] Furthermore, in this embodiment, the combination (compound eye) of the position detection systems 42a and 42c has been described as an example. However, the present invention can also be applied to a combination (compound eye) of the position detection systems 42a and 42b. As shown in FIG. 17, the mounting error in the Y direction between the position detection systems 42a and 42b is θ60. Furthermore, assuming that there is no mounting error in the Y direction between the position detection systems 42a and 42b, the substrate stage 4 is rotated in the θZ direction by a rotation angle θ46 to reduce the influence of a placement error of the substrate 3 relative to the substrate stage 4. In this case, the substrate stage 4 is rotated in the θZ direction by a rotation angle θ46+θ60. As such, according to this embodiment, regardless of the mounting error in the Y direction corresponding to the positions of the position detection systems 42a and 42b in the X direction, correction is possible by rotating the substrate stage 4 in the θZ direction.

[0078] 17, the θZ error differs depending on the mounting error in the Y direction of the position detection systems 42a, 42b, and 42c relative to the base plate 40. Depending on the shot layout, the alignment mark 19 may be simultaneously detected by the position detection systems 42a and 42b, or may be simultaneously detected by the position detection systems 42b and 42c.

[0079] For example, FIG. 18 shows a simplified view of the alignment marks 19 provided on the substrate 3. Assume that a total of 12 alignment marks 19 are provided, with four columns in the X direction and three rows in the Y direction. Consider a case in which the alignment marks 19 in columns L62 and L63 are simultaneously detected by the position detection systems 42a and 42b, and the alignment marks 19 in columns L64 and L65 are simultaneously detected by the position detection systems 42b and 42c. Here, as shown in FIG. 17, the mounting error in the Y direction between the position detection systems 42a and 42b is θ60, and the mounting error in the Y direction between the position detection systems 42b and 42c is θ61. In this case, when the alignment marks 19 in columns L62 and L63 are simultaneously detected by the position detection systems 42a and 42b, the substrate stage 4 needs to be rotated in the θZ direction so that the substrate 3 rotates by a rotation angle θ60, as shown in FIG. 19. Furthermore, when simultaneously detecting the alignment marks 19 in columns L64 and L65 using position detection systems 42b and 42c, the substrate stage 4 must be rotated in the θZ direction so that the substrate 3 rotates at a rotation angle θ61, as shown in FIG. 20.

[0080] As shown in FIGS. 19 and 20 , when detecting multiple alignment marks 19 on a substrate 3, the substrate stage 4 is positioned at different rotation angles. Therefore, while detecting multiple alignment marks 19 on a single substrate 3, the rotation angle (posture) at which the substrate stage 4 is positioned changes, resulting in different Abbe errors. Also, referring to FIG. 18 , when detecting the alignment marks 19 on rows L66, L67, and L68, their Y coordinates are different, so Abbe errors rotating in the θZ direction also occur depending on the position in the Y direction. For these reasons, it is difficult to achieve high-accuracy detection of the alignment marks 19 by correcting the posture of the substrate stage 4 from the Abbe coefficient. On the other hand, according to this embodiment ( FIG. 14 ), by using monocular alignment as a reference and managing the difference in the detection values ​​in compound eye alignment, high-accuracy detection of the alignment marks 19 is possible regardless of the installation error of the position detection system 42.

[0081] As described above, in this embodiment, monocular alignment and compound alignment are performed on the first substrate 3, the difference between the detected values ​​is calculated, and this difference is used to correct the compound alignment for the second and subsequent substrates 3. Furthermore, because the placement error of the second and subsequent substrates 3 relative to the substrate stage 4 differs from the placement error of the first substrate 3 relative to the substrate stage 4, this embodiment also corrects errors resulting from the rotation angle at which the substrate stage 4 is positioned. This makes it possible to always perform simultaneous detection of the alignment marks 19 on the substrate with high accuracy using multiple position detection systems 42, regardless of the placement error (shift and θZ) of the substrate 3 relative to the substrate stage 4. Therefore, even when multiple position detection systems 42 are used, it is possible to achieve improved overlay accuracy and high throughput without being affected by the placement error of the substrate 3 relative to the substrate stage 4.

[0082] The detection value Δ51, which is the difference between the detection value obtained by monocular alignment and the detection value obtained by compound eye alignment for the first substrate 3, can be continuously used for the second and subsequent substrates 3, but may also be updated at an appropriate time.

[0083] For example, exposure apparatus 100 typically calibrates the apparatus using the first substrate in a lot of 25 substrates (management is performed on a lot-by-lot basis). Therefore, the detection value Δ51 can be updated when the lot is changed. In other words, the detection value Δ51 can be updated in response to a change in the lot, which is the unit for processing substrates 3. The detection value Δ51 can also be updated when the layout of multiple marks on substrate 3 is changed or when a predetermined time (a fixed time) has elapsed. While the present embodiment has been described as acquiring the difference in detection value (detection value Δ51) between monocular alignment and compound alignment for one alignment mark, this is not limiting. It is also possible to acquire the difference in detection value between monocular alignment and compound alignment for the entire substrate 3, i.e., for each of multiple alignment marks.

[0084] Furthermore, in this embodiment, the case where two alignment marks 19a and 19b provided on the substrate 3 are simultaneously detected by the position detection systems 42a and 42c (combination) has been described, but the combination of position detection systems is not limited to this. For example, the alignment marks 19a and 19b may be simultaneously detected by the position detection systems 42a and 42b, or the alignment marks 19a and 19b may be simultaneously detected by the position detection systems 42b and 42c. Furthermore, three alignment marks 19 provided on the substrate 3 may be simultaneously detected by the position detection systems 42a, 42b, and 42c (three eyes).

[0085] Furthermore, although the driving units 41a, 41b, and 41c have been described as driving the position detection systems 42a, 42b, and 42c only in the X direction, the position detection systems 42a, 42b, and 42c may be driven in all of the X, Y, and Z directions. In this case, components that cannot be removed by driving the position detection systems 42a, 42b, and 42c by the driving units 41a, 41b, and 41c can be corrected by driving (rotating) the substrate stage 4.

[0086] 11 and 13, the present embodiment has been described taking as an example a case where the position detection systems 42a and 42c simultaneously detect the alignment marks 19a and 19b, respectively, by rotating the substrate stage 4 in the θZ direction. However, each of the multiple position detection systems 42 may detect the alignment mark 19 by individually driving the alignment mark 19 into the center of the field of view (detection area).

[0087] Second Embodiment In this embodiment, an application to the mounting error in the Z direction of the position detection systems 42a, 42b, and 42c relative to the base plate 40 will be described. The mounting error in the Z direction of the position detection systems 42a, 42b, and 42c relative to the base plate 40 cannot be reduced by driving the position detection systems 42a, 42b, and 42c using the drivers 41a, 41b, and 41c. In such a case, the substrate stage 4 is rotated around one axis (the Y axis) in a plane (the XY plane) parallel to the holding surface that holds the substrate 3 on the substrate stage 4. Specifically, it is necessary to correct the mounting error in the Z direction of the position detection systems 42a, 42b, and 42c by rotating (tilting) the substrate stage 4 in the θY direction. Therefore, as shown in FIG. 11 , when the substrate stage 4 is rotated in the θZ direction to simultaneously detect the alignment mark 19 using the two position detection systems 42, if there is a mounting error in the Z direction, it is necessary to also rotate the substrate stage 4 in the θY direction. This causes an Abbe error, and so conventional methods cannot correct the drive of the substrate stage 4 in the X and Y directions with the same accuracy.

[0088] As shown in Figure 21, consider a case where the position detection systems 42a, 42b, and 42c are attached to the base plate 40 with a misalignment in the Z direction, causing their respective focuses to be misaligned. In this case, in order for the position detection systems 42a and 42b (two eyes) to simultaneously detect the alignment mark 19, it is necessary to rotate (tilt) the substrate stage 4 in the direction of arrow 69 (the θY direction). This allows the focuses of the position detection systems 42a and 42b to coincide with the surface of the substrate 3, making it possible to simultaneously detect the alignment mark 19. Note that, to simultaneously detect the alignment mark 19 with the position detection systems 42b and 42c (two eyes), it is sufficient to rotate (tilt) the substrate stage 4 in the direction of arrow 70 (the θY direction) as shown in Figure 22.

[0089] In this way, when multiple alignment marks 19 provided on the substrate 3 are simultaneously detected using the position detection systems 42a, 42b, and 42c, the substrate stage 4 needs to be rotated not only in the θZ direction but also in the θY direction.

[0090] <Third embodiment> The method for manufacturing an article according to an embodiment of the present invention is suitable for manufacturing articles such as liquid crystal display devices, semiconductor devices, flat panel displays, and MEMS. This manufacturing method includes the steps of exposing a substrate coated with a photosensitive agent using the exposure apparatus 100 described above and developing the exposed photosensitive agent. The developed photosensitive agent pattern is then used as a mask to perform etching and ion implantation processes on the substrate, forming a circuit pattern on the substrate. These exposure, development, etching, and other processes are repeated to form a circuit pattern consisting of multiple layers on the substrate. In subsequent processes, the substrate on which the circuit pattern has been formed is diced, followed by chip mounting, bonding, and inspection. This manufacturing method may also include other well-known processes (e.g., oxidation, film formation, vapor deposition, doping, planarization, resist stripping, etc.). The method for manufacturing an article according to this embodiment is advantageous over conventional methods in at least one of the performance, quality, productivity, and production cost of the article.

[0091] The invention is not limited to the above-described embodiments, and various changes and modifications can be made without departing from the spirit and scope of the invention. Accordingly, the following claims are appended to apprise the public of the scope of the invention. [Explanation of symbols]

[0092] 100: exposure device 3: substrate 4: substrate stage 16: substrate alignment detection system 42: position detection system 17: control unit

Claims

1. A detection device that detects a plurality of marks provided on an object, a stage capable of holding and rotating the object; a plurality of detection systems arranged apart from each other so as to detect different marks from each other among the plurality of marks provided on the object held by the stage; a processing unit that performs a first process of detecting the plurality of marks with one or more detection systems of the plurality of detection systems to obtain first detection values ​​in a first state in which the stage is disposed at a first rotation angle, and a second process of detecting the plurality of marks with two or more detection systems of the plurality of detection systems to obtain second detection values ​​in a second state in which the stage is disposed at a second rotation angle different from the first rotation angle, and that calculates a correction value for correcting the detection value detected by the detection system based on a difference between the first detection value and the second detection value for each of the plurality of marks; A detection device comprising:

2. The processing unit The difference is obtained by performing the first processing and the second processing on a first object; performing a third process for detecting a plurality of marks provided on a second object to be processed after the first object with two or more detection systems of the plurality of detection systems in a third state in which the stage is disposed at a third rotation angle different from the second rotation angle, to obtain a third detection value; 2. The detection device according to claim 1.

3. 3. The detection device according to claim 2, wherein at least one of a direction and an amount of rotation of the stage is different between the second state and the third state.

4. The detection device according to claim 3, characterized in that the processing unit corrects the third detection value to obtain a correction value using the difference, the rotational difference between the second rotation angle and the third rotation angle, and a coefficient indicating the relationship between the rotation angle of the stage and the amount of error contained in the detection value of the mark.

5. The detection device according to claim 4 , wherein the processing unit calculates the correction value by subtracting the difference and the product of the rotation difference and the coefficient from the third detection value.

6. The detection device according to claim 4 or 5, characterized in that the processing unit acquires the coefficients in advance based on detection values ​​obtained by detecting a reference mark provided on the stage with the plurality of detection systems while changing the rotation angle of the stage.

7. The detection device according to any one of claims 1 to 6, characterized in that the processing unit performs the first processing and the second processing to update the difference in accordance with a change in the lot that is the unit for processing the object.

8. The detection device according to any one of claims 1 to 6, characterized in that the processing unit performs the first processing and the second processing to update the difference in accordance with a change in the layout of a plurality of marks provided on the object.

9. The detection device according to claim 1 , wherein the processing unit updates the difference by performing the first process and the second process in response to the passage of a predetermined time.

10. 10. The detection device according to claim 1, wherein the second state is a state in which the stage is rotated within a plane parallel to a holding surface of the stage that holds the object.

11. 10. The detection device according to claim 1, wherein the second state is a state in which the stage is rotated around one axis in a plane parallel to a holding surface that holds the object on the stage.

12. A detection method for detecting a plurality of marks using a detection device having a rotatable stage that holds an object, and a plurality of detection systems that are arranged apart from each other so as to detect mutually different marks among a plurality of marks provided on the object held by the stage, the method comprising: detecting the plurality of marks with one or more detection systems among the plurality of detection systems in a first state in which the stage is disposed at a first rotation angle to obtain a first detection value; detecting the plurality of marks with two or more detection systems among the plurality of detection systems in a second state in which the stage is disposed at a second rotation angle different from the first rotation angle to obtain second detection values; determining a correction value for correcting the detection value detected by the detection system based on a difference between the first detection value and the second detection value; A detection method comprising:

13. An exposure apparatus for exposing a substrate, 12. An exposure apparatus comprising: a detection apparatus according to claim 1, which detects a plurality of marks provided on the substrate as an object.

14. exposing a substrate using the exposure apparatus according to claim 13; developing the exposed substrate; manufacturing an article from the developed substrate; A method for manufacturing an article, comprising:

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