Substrate transfer system and substrate transfer method

Abstract

To acquire information relating to a substrate being transported.SOLUTION: A substrate transport system 1 includes: a horizontal articulated robot 2 that has a hand 3 holding a substrate 9 and transports the substrate; a camera 5 that captures an image of the substrate; and controllers 18, 20 that receive data of the image captured by the camera and detect a color, a temperature or surface wetness of the substrate.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The technology disclosed herein is a substrate transfer system and substrate transport method Regarding. [Background technology]

[0002] Patent Document 1 describes a conventional substrate transfer system. The substrate transfer system includes a horizontal articulated robot. A hand of the robot holds a substrate. The robot transfers the substrate held by the hand.

[0003] The substrate transport system includes a camera that is fixed to the hand and captures an image of the hand when the hand is not holding a substrate. A diagnostic device including a computer determines whether deformation has occurred in the hand based on the image captured by the camera. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent No. 6718352 Summary of the Invention [Problem to be solved by the invention]

[0005] Information about the substrate can be used by a substrate transport system, including a robot, but conventional systems are unable to obtain information about the substrate. [Means for solving the problem]

[0006] The present disclosure relates to a substrate transfer system. a horizontal articulated robot having a hand for holding a substrate and for transporting the substrate; a camera for photographing the substrate; a controller that receives photographic data from the camera and detects the temperature of the substrate; Equipped with 、 the camera is a thermographic camera; the controller receives the photographed data from the camera and detects the temperature distribution on the surface of the substrate; the hand is an edge grip hand having an edge guide that engages with the outer periphery of the substrate, The controller allows the horizontal articulated robot to hold the substrate when the temperature of the portion of the substrate where the edge guide engages is equal to or lower than an allowable temperature based on the detected temperature distribution on the surface of the substrate, and prohibits the horizontal articulated robot from holding the substrate when the temperature exceeds the allowable temperature. do. [Effects of the Invention]

[0007] The substrate transport system described above can obtain information about the substrate because the camera takes an image of the substrate. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 shows a substrate transport system. [Figure 2] FIG. 2 is a block diagram of a substrate transport system. [Figure 3] Figure 3 shows the robot's hand. [Figure 4] Figure 4 is an image of the board taken by the camera. [Figure 5] FIG. 5 is an image of the board taken by the camera. [Figure 6] FIG. 6 shows a substrate transfer system according to a modified example. [Figure 7] FIG. 7 is a block diagram of a substrate transfer system according to a modified example. DETAILED DESCRIPTION OF THE INVENTION

[0009] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The substrate transfer system described herein is an example, and will be described below with reference to the accompanying drawings.

[0010] (Substrate transport system) FIG. 1 is a plan view of a substrate transfer system 1. FIG. 2 is a block diagram of the substrate transfer system 1. The substrate transfer system 1 transfers a substrate 9. The substrate 9 is a semiconductor wafer or a glass substrate. The substrate transfer system 1 is, for example, an Equipment Front End Module (EFEM). The substrate transfer system 1 is, for example, a sorter. The substrate transfer system 1 is, for example, a stocker. A robot system 6 is incorporated into the substrate transfer system 1.

[0011] The substrate transfer system 1 includes a housing 10. The housing 10 has a first wall 11, a second wall 12, a third wall 13, and a fourth wall 14. The first wall 11, the second wall 12, the third wall 13, and the fourth wall 14 are each perpendicular to the floor. The first wall 11 and the third wall 13 face each other in a first direction. The second wall 12 and the fourth wall 14 face each other in a second direction. The second direction is perpendicular to the first direction. The first wall 11 and the second wall 12, and the first wall 11 and the fourth wall 14 are connected to each other, and the third wall 13 and the second wall 12, and the third wall 13 and the fourth wall 14 are connected to each other. The first wall 11, the second wall 12, the third wall 13, and the fourth wall 14 form a closed transfer space 15.

[0012] The housing 10 also has a ceiling wall. The ceiling wall is connected to the first wall 11, the second wall 12, the third wall 13, and the fourth wall 14, and closes the upper end of the transfer space 15. An aligner 42 is located in the transfer space 15. The aligner 42 aligns the substrate 9. The aligner 42 is not an essential element of the substrate transfer system 1 or the robot system 6.

[0013] The illustrated substrate transfer system 1 is incorporated into substrate processing equipment 4. Note that the substrate processing equipment 4 is not an essential element of the substrate transfer system 1 or the robot system 6. The substrate processing equipment 4 performs, for example, heat treatment, impurity introduction treatment, thin film formation treatment, lithography treatment, cleaning treatment, and planarization treatment on the substrate 9. Alternatively, the substrate processing equipment 4 inspects the appearance or dimensions of the substrate 9. Alternatively, the processing performed by the substrate processing equipment 4 may be temporary accommodation for transferring the substrate 9. In this case, accommodation of the substrate 9 by the substrate processing equipment 4 is also included in the processing of the substrate 9. A third wall 13 separates the transfer space 15 from the substrate processing equipment 4. The third wall 13 has an opening 16. The opening 16 is openable and closable. When the opening 16 is open, the transfer space 15 and the substrate processing equipment 4 communicate with each other, and when the opening 16 is closed, communication between the transfer space 15 and the substrate processing equipment 4 is blocked.

[0014] The substrate processing equipment 4 has a FOUP (Front Opening Unified Pod) 41. The FOUP 41 accommodates substrates 9. The substrate processing equipment 4 has a plurality of FOUPs 41. The plurality of FOUPs 41 are lined up along a first wall 11. The first wall 11 has openings 17 corresponding to the FOUPs 41. A FOUP opener opens and closes the openings 17. The FOUP opener switches between communication and cut-off between the transfer space 15 and the FOUP 41.

[0015] The substrate transfer system 1 includes a robot 2. The robot 2 transfers substrates 9 between a FOUP 41, an aligner 42, and the substrate processing equipment 4 (see the solid lines and the two-dot chain lines in FIG. 1). The robot 2 is located in a transfer space 15. The robot 2 is a horizontal articulated robot. The structure of the robot 2 will be described later.

[0016] The substrate transfer system 1 includes a system controller 18. Note that the system controller 18 is not an essential element of the substrate transfer system 1 or the robot system 6. The system controller 18 performs overall control of the substrate transfer system 1.

[0017] The robot controller 20 is electrically connected to the system controller 18. The electrical connection includes a wired or wireless connection. The robot controller 20 is also electrically connected to the robot 2. The robot controller 20 and the robot 2 constitute a robot system 6. The robot controller 20 controls the robot 2. More specifically, the robot controller 20 receives a control signal from the system controller 18 and outputs a control signal to the robot 2. The robot 2 receives the control signal from the robot controller 20 and transports the substrate 9 in this case. Note that the robot controller 20 is not an essential element of the substrate transport system 1 or the robot system 6.

[0018] The aligner 42 is electrically connected to the robot controller 20. The electrical connection may be a wired or wireless connection. The aligner 42 is controlled by the robot controller 20.

[0019] (Robot structure) As described above, the robot 2 is a horizontal articulated robot. As shown in FIG. 1, the robot 2 has a base 21. The base 21 is installed in the transfer space 15. The robot 2 has a manipulator 200. The manipulator 200 includes an arm 22 and a hand 3.

[0020] The base 21 supports the arm 22. The arm 22 can move up and down relative to the base 21. The arm 22 has links 221 and 222. The arm 22 has a plurality of links 221 and 222. The arm 22 of the illustrated robot 2 has two links, link 221 and link 222. Note that the number of links forming the arm 22 is not limited to two.

[0021] A first end of link 221 is supported by base 21. Base 21 supports the first end of link 221. Link 221 is rotatable about a first axis X1 extending in the vertical direction relative to base 21. A second end of link 221 is connected to a first end of link 222. Link 222 is rotatable about a second axis X2 extending in the vertical direction relative to link 221.

[0022] The hand 3 is connected to a second end of the link 222. The hand 3 and the second end of the link 222 are connected to each other. The hand 3 is rotatable around a third axis X3 that extends in the vertical direction relative to the link 222.

[0023] 3 shows the hand 3. The hand 3 is an end effector that holds the substrate 9. The hand 3 has a main body 31 and a holding portion 32. The main body 31 supports the holding portion 32. The main body 31 is rotatably connected to the second end of the link 222.

[0024] As shown in the upper diagram of FIG. 3, the holding portion 32 is substantially Y-shaped in plan view, and as shown in the lower diagram of FIG. 3, it is in the form of a thin plate.

[0025] The hand 3 generally holds the substrate 9 in various ways, such as by gripping, suction, placement, or engagement. The hand 3 in the illustration is an edge grip hand. The hand 3 has an edge guide 33, a second guide 34, and an actuator 35. The edge guide 33, the second guide 34, and the actuator 35 constitute the grip 30 of the hand 3. The edge guide 33 is located at the tip of the holding portion 32 and engages with the outer edge of the substrate 9. The second guide 34 is located at the base end of the holding portion 32. The second guide 34 is located on the opposite side of the substrate 9 from the edge guide 33. The actuator 35 is, for example, an expandable air cylinder. The actuator 35 displaces the second guide 34 so that it moves toward and away from the substrate 9 (see the arrow in the upper diagram of Figure 3). As the second guide 34 approaches the substrate 9, the edge guide 33 and the second guide 34 sandwich the substrate 9. The hand 3 grips the substrate 9. As the second guide 34 moves away from the substrate 9, the substrate 9 is released from being held between the edge guide 33 and the second guide 34. The hand 3 releases its grip on the substrate 9.

[0026] The robot 2 has a sensor 36. The sensor 36 detects the substrate 9 held by the hand 3. The sensor 36 is attached to the hand 3 as shown enlarged in the lower diagram of FIG. 3. The sensor 36 is, for example, an optical sensor. The sensor 36 detects the substrate 9 held by the hand 3. More specifically, the sensor 36 projects light onto the substrate 9 and receives light reflected by the surface of the substrate 9. When the hand 3 is not holding the substrate 9, the sensor 36 does not receive reflected light, and therefore the sensor 36 can detect that the substrate 9 is not being held by the hand 3.

[0027] (Camera for photographing circuit boards) The robot system 6 includes a camera 5. The camera 5 photographs a substrate 9. As shown in FIG. 3, the camera 5 is fixed to the hand 3 of the robot 2. More specifically, the camera 5 is fixed to the upper surface of the main body 31 of the hand 3. The camera 5 photographs the substrate 9 held by the hand 3 in the transfer space 15. The camera 5 photographs the substrate 9, for example, while the robot 2 is transferring the substrate 9.

[0028] The camera 5 includes, for example, an image sensor and a lens. The lens focuses light onto the image sensor. The image sensor outputs a signal corresponding to the amount of light received. The image sensor is a CCD (Charge Coupled Device) sensor or a CMOS (Complementary Metal Oxide Semiconductor) sensor.

[0029] FIG. 4 is an example of an image 50 captured by the camera 5. The camera 5 is fixed to the hand 3 so as to capture substantially the entire surface of the substrate 9 held by the hand 3, and the lens has an angle of view that allows the entire surface of the substrate 9 held by the hand 3 to be captured. The distance between the camera 5 and the substrate 9 held by the hand 3 is short. The angle of view of the lens is relatively wide. The image 50 captured by the camera 5 is a color image. However, it is not excluded that the image captured by the camera 5 may be a black and white image.

[0030] The robot controller 20 or the system controller 18 receives data of the images 50 taken by the camera 5. The robot controller 20 may receive the data of the images 50 taken by the camera 5, or the system controller 18 may receive the data of the images 50 taken by the camera 5. Both the robot controller 20 and the system controller 18 may receive the data of the images 50 taken by the camera 5.

[0031] Since the camera 5 is fixed to the hand 3, the pixel positions occupied by the surface of the substrate 9 in the image 50 captured by the camera 5 are determined in advance. Note that the robot controller 20 or the system controller 18 may identify the substrate 9 in the image 50 captured by the camera 5 by extracting edges in the image 50.

[0032] The interior of the transfer space 15 has sufficient brightness to allow the image sensor to capture an image of the substrate 9. The substrate transfer system 1 may have a light source for photography, for example, in the transfer space 15. The light intensity of the light source is set according to the light sensitivity of the image sensor. As will be described later, the light source may be white light so that the color of the substrate 9 can be determined based on the image captured by the camera.

[0033] (Detecting the color of the board using camera image data) As described above, the robot controller 20 or the system controller 18 receives the data captured by the camera 5. The robot controller 20 or the system controller 18 detects the color of the substrate 9 based on the image 50 of the substrate 9 captured by the camera 5 (see FIG. 4).

[0034] The color of the substrate 9 varies depending on the type or thickness of the film formed on the surface of the substrate 9. The robot controller 20 or the system controller 18 determines the type of the substrate 9 held by the hand 3 based on the color of the substrate 9. The robot controller 20 or the system controller 18 stores correspondence information between the color of the substrate 9 and the type of the substrate 9 in advance.

[0035] The sensor 36 of the hand 3 determines whether or not the substrate 9 is present based on the amount of light reflected from the surface of the substrate 9. In other words, if the amount of reflected light received by the sensor 36 exceeds the determination threshold, the sensor 36 determines that the hand 3 is holding the substrate 9. If the amount of reflected light received by the sensor 36 is equal to or less than the determination threshold, the sensor 36 determines that the hand 3 is not holding the substrate 9.

[0036] The intensity of light reflected from the surface of the substrate 9 varies depending on the color of the substrate 9. The judgment threshold of the sensor 36 is generally set in advance to a constant value that corresponds to the color of the surface of the substrate 9 held by the hand 3. However, if the color of the substrate 9 held by the hand 3 changes, and the judgment threshold is set to a constant value, there is a risk that the hand 3 may erroneously determine that it is not holding the substrate 9, even though it is actually holding the substrate 9, due to the relatively low intensity of the reflected light. Stopping the robot system 6 or the substrate transfer system 1 due to an erroneous determination by the sensor 36 reduces the efficiency of the robot system 6 or the substrate transfer system 1.

[0037] Therefore, the robot controller 20 or the system controller 18 adjusts the judgment threshold of the sensor 36 in accordance with the color of the substrate 9 judged based on the image 50 captured by the camera 5. Since the judgment threshold of the sensor 36 matches the color of the substrate 9, erroneous judgment by the sensor 36 is suppressed. A decrease in the efficiency of the robot system 6 or the substrate transport system 1 caused by erroneous judgment by the sensor 36 is suppressed.

[0038] Instead of adjusting the judgment threshold value of the sensor 36, the amount of light that the sensor 36 projects onto the substrate 9 may be adjusted according to the color of the substrate 9.

[0039] It should be noted that the color information obtained based on the image 50 captured by the camera 5 is not limited to the use of adjustment of the sensor 36 .

[0040] (Detection of wetness on the substrate surface using camera image data) The robot controller 20 or the system controller 18 detects wetting of the surface of the substrate 9 due to the liquid adhering to the surface of the substrate 9 based on the image 50 of the substrate 9 taken by the camera 5 (see the upper diagram in FIG. 5). Due to the difference between the refractive index of the substrate 9 and the refractive index of the liquid, the reflectance of the surface of the substrate 9 differs from the reflectance of the liquid adhering to the surface. Based on the image 50 of the substrate 9 taken by the camera 5, the robot controller 20 or the system controller 18 can detect wetting of the surface of the substrate 9. To improve the accuracy of wetting detection, the robot controller 20 or the system controller 18 may perform machine learning.

[0041] The robot controller 20 or the system controller 18 can determine, for example, based on the image 50 of the substrate 9 taken by the camera 5, that cleaning liquid remains on the surface of the substrate 9 after the cleaning process. Alternatively, the robot controller 20 or the system controller 18 can determine the amount of cleaning liquid remaining on the surface of the substrate 9, for example, whether droplets remain on the surface of the substrate 9 or whether the cleaning liquid has spread over the entire surface of the substrate 9. If the robot controller 20 or the system controller 18 determines that the surface of the substrate 9 is wet, the robot controller 20 or the system controller 18 may perform error processing in the substrate transfer system 1.

[0042] Furthermore, for example, before the developing step, the robot controller 20 or the system controller 18 can determine that the developer has been applied to the surface of the substrate 9 based on the image 50 of the substrate 9 taken by the camera 5. If the robot controller 20 or the system controller 18 determines that the developer has not been applied to the surface of the substrate 9, the robot controller 20 or the system controller 18 may perform error processing in the substrate transport system 1. Furthermore, for example, after the developing step, the robot controller 20 or the system controller 18 can determine whether the development has been properly completed based on the image 50 of the substrate 9 taken by the camera 5. If the robot controller 20 or the system controller 18 determines that the development has not been properly completed, the robot controller 20 or the system controller 18 may perform error processing in the substrate transport system 1.

[0043] The information about wetness obtained based on the image 50 captured by the camera 5 can also be used for purposes other than those mentioned above.

[0044] (Detection of substrate temperature using camera image data) The camera 5 may be a thermography camera. The robot controller 20 or the system controller 18 can detect the temperature of the substrate 9 or the temperature distribution on the surface of the substrate 9 based on an image 50 of the substrate 9 taken by the camera 5 (see the lower diagram in FIG. 5). The image data taken by the camera 5 may include temperature information along with the image 50. The robot controller 20 or the system controller 18 may also estimate the temperature of the substrate 9 or the temperature distribution on the surface of the substrate 9 based on the color of the image 50. The robot controller 20 or the system controller 18 may determine that an abnormality has occurred when the temperature of the substrate 9 is equal to or higher than a predetermined value, and may perform error processing in the substrate transfer system 1.

[0045] The information about the temperature or temperature distribution of the substrate 9 acquired based on the image 50 can be used for various purposes.

[0046] (Action and effect) The substrate transfer system 1 or the robot system 6 includes a camera 5 that captures an image of the substrate 9 held by the hand 3. Based on the image 50 captured by the camera 5, the substrate transfer system 1 or the robot system 6 can obtain information about the substrate 9.

[0047] Because the camera 5 is fixed to the hand 3, it can photograph the substrate 9 while the robot 2 is transporting the substrate 9. Because the robot 2 does not stop operating to allow the camera 5 to take photographs, the transport efficiency of the substrate transport system 1 or the robot system 6 is improved. Another advantage is that because the camera 5 is fixed to the hand 3, the camera 5 can photograph the substrate 9 for a longer period of time. Attaching the camera 5 to the hand 3 is advantageous for photographing the substrate 9.

[0048] The camera 5 may photograph the substrate 9 while the robot 2 stops transporting the substrate 9. For example, immediately after the robot 2 removes the substrate 9 from the FOUP 41, the robot 2 may temporarily stop transporting the substrate 9, and the camera 5 may photograph the substrate 9. Alternatively, the robot 2 may temporarily stop transporting the substrate 9 immediately before, during, or immediately after the robot 2 sets the substrate 9 in the aligner 42, and the camera 5 may photograph the substrate 9. Taking photographs while the transport of the substrate 9 is stopped improves the quality of the photographed image 50. For example, a light source for photography may be installed at a location where the transport of the substrate 9 is stopped for the camera 5 to take a photograph.

[0049] Because the camera 5 is fixed to the hand 3, the substrate transfer system 1 or the robot system 6 can use one camera 5 to capture an image of the substrate 9 held by the hand 3. In other words, the substrate transfer system 1 does not require multiple cameras 5 to be installed in various locations in the transfer space 15. The substrate transfer system 1 is simple.

[0050] The camera 5 has an angle of view that captures the entire surface of the substrate 9. The image 50 captured by the camera 5 includes the entire surface of the substrate 9. The robot controller 20 or the system controller 18 can accurately acquire information about the substrate 9.

[0051] The robot controller 20 or the system controller 18 receives the photographic data from the camera 5 and detects the color of the board 9. Based on the color of the board 9, the robot controller 20 or the system controller 18 can determine the type of board 9 held by the hand 3.

[0052] Furthermore, the robot controller 20 or the system controller 18 sets a determination threshold value relating to the amount of light received by the sensor 36 based on the detected color of the board 9. Erroneous determination by the sensor 36 is suppressed.

[0053] The robot controller 20 or the system controller 18 receives the photographic data from the camera 5 and detects wetness on the surface of the substrate 9. The robot controller 20 or the system controller 18 can accurately determine the state of the substrate 9 before or after processing the substrate 9. The robot controller 20 or the system controller 18 can quickly perform error processing in the robot system 6 or the substrate transfer system 1 as necessary.

[0054] The robot controller 20 or the system controller 18 receives the photographic data from the camera 5 and detects the temperature of the substrate 9 or the temperature distribution on the surface of the substrate 9. The robot controller 20 or the system controller 18 can quickly detect any temperature abnormality in the substrate 9.

[0055] As described above, the substrate transfer system 1 or the robot system 6 can acquire information about the substrate 9, and the acquired information about the substrate 9 can be used for various purposes.

[0056] (Modifications regarding photographing of the board) The camera 5 fixed to the hand 3 may photograph the substrate 9 in the substrate processing equipment 4 through the opening 16. Based on the photographic data of the camera 5, the robot controller 20 or the system controller 18 can detect the color of the substrate 9 when removing the substrate 9 from the substrate processing equipment 4.

[0057] Furthermore, the robot controller 20 or the system controller 18 can detect whether the surface of the substrate 9 is wet when the substrate 9 is taken out of the substrate processing equipment 4 based on the photographing data of the camera 5.

[0058] Here, if the surface of the substrate 9 is wet, there is a risk that the grip 30 of the hand 3 will slip when gripping the substrate 9. When the robot controller 20 or the system controller 18 detects that the surface of the substrate 9 is wet, the robot controller 20 or the system controller 18 may slow down the operation of the actuator 35 when gripping the substrate 9. Slowing down the operation of the actuator 35 increases the stability of holding the substrate 9 by the hand 3. Because the robot 2 can stably hold the substrate 9, it is possible to prevent the robot system 6 or the substrate transfer system 1 from stopping because the robot 2 is unable to hold the substrate 9, for example.

[0059] Furthermore, when the substrate 9 is taken out of the substrate processing equipment 4, the robot controller 20 or the system controller 18 can detect the temperature of the substrate 9 or the temperature distribution on the surface of the substrate 9 based on the photographed data of the camera 5.

[0060] The robot controller 20 or the system controller 18 may determine whether the temperature of the portion of the substrate 9 that is in contact with the edge guide 33 or the second guide 34 is below a permissible temperature based on the temperature distribution on the surface of the substrate 9. The permissible temperature is the temperature at which the edge guide 33 or the second guide 34 is permitted to hold the substrate 9. The permissible temperature is set, for example, according to the heat resistance temperature of the edge guide 33 or the second guide 34. If the temperature of the specific portion of the substrate 9 is below the permissible temperature, the robot controller 20 or the system controller 18 permits the hand 3 to hold the substrate 9, and if the temperature of the specific portion of the substrate 9 exceeds the permissible temperature, the robot controller 20 or the system controller 18 prohibits the hand 3 from holding the substrate 9 and waits for the temperature of the substrate 9 to drop.

[0061] Based on the detected temperature distribution on the surface of the substrate 9, the robot controller 20 or the system controller 18 causes the hand 3 of the robot 2 to grasp the substrate 9 when a specific location on the substrate 9 drops below an allowable temperature. The robot 2 can quickly begin transporting the substrate 2. For example, the waiting time of the robot 2 is shorter than when the robot 2 starts transporting the substrate 2 after waiting for a predetermined time to elapse, taking into account a drop in the temperature of the substrate 9. Detecting the temperature of the substrate 9 or the temperature distribution on the surface of the substrate 9 improves the transport efficiency of the substrate transport system 1 or the robot system 6 by reducing unnecessary waiting time.

[0062] The camera 5 fixed to the hand 3 enables detection of the color, temperature, or surface wetness of the substrate 9. Using the information on the substrate 9 acquired based on the image 50, it is possible to prevent the substrate transfer system 1 or the robot system 6 from stopping due to an erroneous determination or the occurrence of an abnormality in the substrate transfer system 1. Furthermore, the use of the information on the substrate 9 improves the transfer efficiency of the substrate transfer system 1 or the robot system 6 by reducing unnecessary waiting time.

[0063] (Modification of the substrate transfer system) Fig. 6 shows a substrate transfer system 100 according to a modified example. Fig. 7 is a block diagram of the substrate transfer system 100. In the substrate transfer system 100, the camera 5 is not fixed to the robot 2. The camera 5 is fixed to, for example, the ceiling wall of the housing 10. More specifically, as shown in Fig. 6, the camera 5 is located near the aligner 42 in the transfer space 15. The camera 5 photographs the substrate 9 set on the aligner 42.

[0064] The camera 5 is electrically connected to a system controller 18. The system controller 18 detects the color of the substrate 9 based on the image data captured by the camera 5. The system controller 18 also detects the wetness of the surface of the substrate 9 based on the image data captured by the camera 5. The system controller 18 also detects the temperature of the substrate 9 or the temperature distribution on the surface of the substrate 9 based on the image data captured by the camera 5.

[0065] In addition to being positioned near the aligner 42, the camera 5 may also be positioned near the opening 16, as shown by the dashed line in FIG. 6, to capture images of the substrate 9 in the substrate processing equipment 4. Based on the image data captured by the camera 5, the system controller 18 can detect the color of the substrate 9 when the substrate 9 is removed from the substrate processing equipment 4. Based on the image data captured by the camera 5, the system controller 18 can also detect wetness on the surface of the substrate 9 when the substrate 9 is removed from the substrate processing equipment 4. Based on the image data captured by the camera 5, the system controller 18 can also detect the temperature of the substrate 9 or the temperature distribution on the surface of the substrate 9 when the substrate 9 is removed from the substrate processing equipment 4.

[0066] The position of the camera 5 is not limited to a specific position, and can be set at various positions in the transfer space 15.

[0067] The aligner 42 may be connected to and controlled by the system controller 18 .

[0068] In the hand 3, an attachment member may be interposed between the main body 31 and the holder 32. The holder 32 is fixed to the main body 31 via the attachment member. When the camera 5 is fixed to the hand 3, the camera 5 may be fixed to the main body 31. The camera 5 may also be fixed to the attachment member.

[0069] The functions of the elements disclosed herein can be performed using circuits or processing circuits, including general-purpose processors, special-purpose processors, integrated circuits, ASICs (Application Specific Integrated Circuits), conventional circuits, and / or combinations thereof, configured or programmed to perform the disclosed functions. A processor is considered a processing circuit or circuit because it includes transistors and other circuitry. In this disclosure, a circuit, unit, or means is hardware that performs the recited functions or hardware that is programmed to perform the recited functions. The hardware may be hardware disclosed herein or other known hardware that is programmed or configured to perform the recited functions. Where the hardware is a processor, which is considered a type of circuit, the circuit, means, or unit is a combination of hardware and software, and the software is used to configure the hardware and / or processor.

[0070] (Aspect) The above-described embodiment is a specific example of the following aspects.

[0071] (Aspect 1) a horizontal articulated robot (2) having a hand (3) for holding a substrate (9) and transporting the substrate (9); a camera (5) for photographing the substrate (9); a controller (18, 20) that receives photographic data from the camera (5) and detects the color of the substrate (9); A substrate transport system (1, 100) comprising:

[0072] Based on the photographic data of the substrate 9 taken by the camera 5, the controllers 18, 20 can obtain color information of the substrate 9. The substrate transfer system 1, 100 can use the color information of the substrate 9 for various purposes.

[0073] (Aspect 2) The horizontal articulated robot (2) has an optical substrate detection sensor (36) that receives reflected light of light irradiated onto the substrate (9) held by the hand (3), A substrate conveying system (1, 100) according to aspect 1, wherein the controller (18, 20) sets a threshold value for the amount of light received by the substrate detection sensor (36) based on the color of the substrate (9) detected based on the photographic data.

[0074] Changing the threshold value for detection by the substrate detection sensor 36 based on the color of the substrate 9 reduces false detections by the substrate detection sensor 36. The substrate transport system 1, 100 can reduce a decrease in transport efficiency caused by false detections by the substrate detection sensor 36.

[0075] (Aspect 3) a horizontal articulated robot (2) having a hand (3) for holding a substrate (9) and transporting the substrate (9); a camera (5) for photographing the substrate (9); a controller (18, 20) that receives photographic data from the camera (5) and detects the temperature of the substrate (9); A substrate transport system (1, 100) comprising:

[0076] Based on the photographic data of the substrate 9 taken by the camera 5, the controllers 18, 20 can obtain information on the temperature of the substrate 9. The substrate transfer system 1, 100 can use the information on the temperature of the substrate 9 for various purposes.

[0077] (Aspect 4) In the substrate transfer system (1, 100) according to aspect 3, the controller (18, 20) determines that an abnormality has occurred when the temperature of the substrate (9) is equal to or higher than a predetermined value.

[0078] The controllers (18, 20) can quickly detect abnormalities in the temperature of the substrate (9) based on information about the temperature of the substrate (9) photographed by the camera (5).

[0079] (Aspect 5) The camera (5) is a thermography camera, The substrate transfer system (1, 100) according to aspect 3 or 4, wherein the controller (18, 20) receives photographic data from the camera (5) and detects a temperature distribution on the surface of the substrate (9).

[0080] The substrate transfer system (1, 100) can use information about the temperature distribution on the surface of the substrate (9) for various purposes.

[0081] (Aspect 6) The hand (3) is an edge grip hand having an edge guide (33) that engages with the outer periphery of the substrate (9), In the substrate transport system (1, 100) described in aspect 5, the controller (18, 20) allows the horizontal articulated robot (2) to hold the substrate (9) when the temperature of the point on the substrate (9) where the edge guide (33) engages is below an allowable temperature based on the detected temperature distribution on the surface of the substrate (9), and prohibits the horizontal articulated robot (2) from holding the substrate (9) when the temperature exceeds the allowable temperature.

[0082] Based on the detected temperature distribution, if the temperature at the point where the edge guide (33) engages falls below the allowable temperature, the horizontal articulated robot (2) can hold the substrate (9). This reduces the unnecessary waiting time for the temperature of the substrate (9) to drop, thereby improving the transport efficiency of the substrate transport system (1, 100).

[0083] (Aspect 7) a horizontal articulated robot (2) having a hand (3) for holding a substrate (9) and transporting the substrate (9); a camera (5) for photographing the substrate (9); a controller (18, 20) that receives photographic data from the camera (5) and detects wetness of the surface of the substrate (9); A substrate transport system (1, 100) comprising:

[0084] Based on the photographic data of the substrate 9 taken by the camera 5, the controllers 18, 20 can obtain information on the wetness of the surface of the substrate 9. The substrate transfer system 1, 100 can use the information on the wetness of the surface of the substrate 9 for various purposes.

[0085] (Aspect 8) A substrate transfer system (1, 100) according to aspect 7, wherein the controller (18, 20) determines that an abnormality exists when the surface of the substrate (9) is wet.

[0086] The controllers (18, 20) can quickly detect abnormalities in the substrate (9) based on information about the wetness of the surface of the substrate (9) photographed by the camera (5).

[0087] (Aspect 9) The hand (3) is an edge grip hand having an edge guide (33) that engages with the outer periphery of the substrate (9) and a second guide (34) that moves toward and away from the substrate (9) on the opposite side of the edge guide (33) across the substrate (9), A substrate transport system (1, 100) as described in aspect 7 or 8, wherein the controller (18, 20) changes the approach operation of the second guide (34) to the substrate (9) when the detected surface of the substrate (9) is wet.

[0088] When the surface of the substrate (9) is wet, if the approaching operation of the second guide (34) toward the substrate (9) is changed, the hand (3) can stably hold the substrate (9).

[0089] (Aspect 10) The substrate transfer system (1, 100) according to any one of aspects 1 to 9, wherein the camera (5) photographs the substrate (9) held by the hand (3).

[0090] (Aspect 11) A substrate transport system (1, 100) according to any one of aspects 1 to 10, wherein the camera (5) photographs the substrate (9) set in an aligner (42) that adjusts the orientation of the substrate (9).

[0091] (Aspect 12) A substrate transport system (1, 100) according to any one of aspects 1 to 11, wherein the camera (5) photographs the substrate (9) set in substrate processing equipment (4) that processes the substrate (9).

[0092] The camera (5) can take images of the substrate (9) at various times.

[0093] (Aspect 13) A substrate transport system (1, 100) according to any one of aspects 1 to 12, wherein the camera (5) is located on the ceiling of a space (15) in which a manipulator (200) of the horizontal articulated robot (2) moves.

[0094] The camera (5) located on the ceiling is suitable for photographing the board (9).

[0095] (Aspect 14) A substrate transport system (1, 100) according to any one of aspects 1 to 12, wherein the camera (5) is fixed to the hand (3).

[0096] A camera (5) fixed to the hand (3) can photograph the substrate (9) from a position close to the substrate (9).

[0097] (Aspect 15) The horizontal articulated robot (2) transports the substrate (9), The substrate (9) is photographed by a camera (5), The substrate transport method includes detecting the color of the substrate (9) based on photographic data of the substrate (9).

[0098] (Aspect 16) The horizontal articulated robot (2) transports the substrate (9), The substrate (9) is photographed by a camera (5), The substrate transport method includes detecting the temperature of the substrate (9) based on photographic data of the substrate (9).

[0099] (Aspect 17) The horizontal articulated robot (2) transports the substrate (9), The substrate (9) is photographed by a camera (5), The substrate transport method includes detecting the wetness of the surface of the substrate (9) based on photographic data of the substrate (9).

[0100] (Aspect 18) a horizontal articulated robot (2) having a hand (3) for holding a substrate (9) and transporting the substrate (9); a camera (5) fixed to the hand (3) and adapted to photograph the substrate (9) held by the hand (3); A substrate transport system (1, 100) comprising:

[0101] Because the camera (5) photographs the substrate (9), the substrate transport system (1, 100) can acquire information about the substrate (9). In addition, because the camera (5) moves to various positions together with the hand (3), a single camera (5) can photograph multiple substrates (9). In addition, because the camera (5) can photograph the substrate (9) while the horizontal articulated robot (2) is transporting the substrate (9), the transport efficiency of the horizontal articulated robot (2) is improved.

[0102] (Aspect 19) A substrate transport system (1, 100) according to aspect 18, wherein the camera (5) photographs the surface of the substrate (9).

[0103] Various processes can be performed based on the image of the surface of the substrate (9) taken by the camera (5).

[0104] (Aspect 20) A substrate transport system (1, 100) according to aspect 19, wherein the camera (5) has a field of view that captures the entire surface of the substrate (9).

[0105] Since the entire surface of the substrate (9) is photographed, more information about the substrate (9) can be obtained.

[0106] (Aspect 21) A substrate transport system (1, 100) according to any one of aspects 18 to 20, wherein the camera (5) photographs the substrate (9) while the horizontal articulated robot (2) is transporting the substrate (9).

[0107] Since the transport of the substrate (9) is not stopped for the camera (5) to take a photograph, the transport efficiency of the substrate transport system (1, 100) is improved.

[0108] (Aspect 22) A substrate transport system (1, 100) according to any one of aspects 18 to 20, wherein the camera (5) photographs the substrate (9) while the horizontal articulated robot (2) stops transporting the substrate (9).

[0109] When the camera (5) photographs the surface of the substrate (9) while the transport of the substrate (9) is stopped, the substrate transport system (1, 100) can acquire a high-quality image (50).

[0110] (Aspect 23) A substrate transport system (1, 100) according to aspect 22, wherein the camera (5) photographs the substrate (9) at the timing when the horizontal articulated robot (2) removes the substrate (9) from the FOUP (41).

[0111] The camera (5) can take a picture of the substrate (9) at the appropriate time.

[0112] (Aspect 24) A substrate transport system (1, 100) according to aspect 22, wherein the camera (5) photographs the substrate (9) at the timing when the horizontal articulated robot (2) sets the substrate (9) in the aligner (42).

[0113] The camera (5) can take a picture of the substrate (9) at the appropriate time.

[0114] (Aspect 25) A substrate transfer system (1, 100) according to any one of aspects 18 to 24, wherein the color of the substrate (9) is detected based on the photographic data of the camera (5).

[0115] Once the color of the substrate (9) is detected, the substrate transport system (1, 100) can determine the type of film formed on the substrate (9).

[0116] (Aspect 26) A substrate transfer system (1, 100) according to any one of aspects 18 to 24, wherein the temperature of the substrate (9) is detected based on photographic data of the camera (5).

[0117] If the temperature of the substrate (9) is detected, the substrate transfer system (1, 100) can determine whether there is an abnormality in the substrate (9).

[0118] (Aspect 27) A substrate transfer system (1, 100) according to aspect 26, wherein a temperature distribution on the surface of the substrate (9) is detected based on photographic data from the camera (5).

[0119] If the temperature distribution on the surface of the substrate (9) is detected, the horizontal articulated robot (2) can quickly hold the substrate (9), thereby reducing the waiting time for the temperature of the substrate (9) to drop.

[0120] (Aspect 28) A substrate transfer system (1, 100) according to any one of aspects 18 to 24, wherein wetness of the surface of the substrate (9) is detected based on photographic data from the camera (5).

[0121] If the wetness of the surface of the substrate (9) is detected, the substrate transfer system (1, 100) can determine the condition of the surface of the substrate (9). [Explanation of symbols]

[0122] 1. Substrate transport system 100 Substrate transport system 2. Horizontal articulated robot 3 hands 41 Hoop 42 Alaina 5. Camera 6. Robot System 9 Substrate

Claims

1. a horizontal articulated robot having a hand for holding a substrate and for transporting the substrate; a camera for photographing the substrate; a controller that receives photographic data from the camera and detects the temperature of the substrate; Equipped with the camera is a thermographic camera; the controller receives the photographed data from the camera and detects the temperature distribution on the surface of the substrate; the hand is an edge grip hand having an edge guide that engages with the outer periphery of the substrate, The controller, based on the detected temperature distribution on the surface of the substrate, allows the horizontal articulated robot to hold the substrate when the temperature of the point on the substrate where the edge guide engages is below an allowable temperature, and prohibits the horizontal articulated robot from holding the substrate when the temperature exceeds the allowable temperature.

2. 2. The substrate transfer system according to claim 1, The controller determines that an abnormality has occurred when the temperature of the substrate is equal to or higher than a predetermined value.

3. 3. The substrate transfer system according to claim 1, The camera photographs the substrate held by the hand.

4. 3. The substrate transfer system according to claim 1, The camera photographs the substrate set in an aligner that adjusts the orientation of the substrate.

5. 3. The substrate transfer system according to claim 1, The camera photographs the substrate set in substrate processing equipment that processes the substrate.

6. 3. The substrate transfer system according to claim 1, A substrate transport system, wherein the camera is positioned on the ceiling of a space in which a manipulator of the horizontal articulated robot moves.

7. 3. The substrate transfer system according to claim 1, The camera is fixed to the hand.

8. 4. The substrate transfer system according to claim 3, the horizontal articulated robot temporarily stops transporting the substrate to photograph the substrate with the camera; The camera photographs the substrate while the horizontal articulated robot temporarily stops transporting the substrate.

9. The thermography camera photographs the board, a controller receives the photographed data from the thermographic camera and detects the temperature distribution on the surface of the substrate; When the temperature of the portion of the substrate where the edge guide of the edge grip hand engages is equal to or lower than an allowable temperature, the controller permits the horizontal articulated robot to hold the substrate with the edge grip hand, and when the temperature exceeds the allowable temperature, prohibits the horizontal articulated robot from holding the substrate with the edge grip hand; A substrate transport method, in which the substrate held by the edge grip hand is transported by the horizontal articulated robot.

Images