Filter removal tool for substrate storage container and method of use

Abstract

To provide a jig for removing the filter of a substrate container and a method for using the same with which it is possible to facilitate and quicken filter removal work irrespective of the skill level of workers.SOLUTION: A removal jig 30 for a filter 20 attached to a lid 3 of a substrate container serves as: a pedestal jig 31 that comes into contact with a cover plate 6 of the lid 3 and causes a hollow cylinder part 33 to face a recess 7; and an operation jig 36 that is inserted into the hollow cylinder part 33 so as to be able to move in the vertical direction. A pair of separating claws 34 in contact with a locking claw 9 of the recess 7 are provided at a prescribed interval to the lower part from inside the pedestal jig 31, and a holding cylinder 39 fitted to a protruding tube 22 of the filter 20 is held to an operation handle 37 of the operation jig 36 via the pair of separating claws 34. Also, a lure lock 43 fitted into the protruding tube is built-in in the holding cylinder 39, and the holding cylinder 39 of the operation jig 36 is pressed against the separating claws 34 of the pedestal jig 31 to bend, thereby causing the locking claw 9 to separate from a flange 24 of the protruding tube 22.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a filter removal jig for a substrate storage container that stores semiconductor wafers or the like, and a method for using the same. [Background technology]

[0002] Conventionally, a dedicated substrate storage container called a FOSB has been used for storing and transporting semiconductor wafers. As partially shown in FIG. 10, this type of substrate storage container 1 comprises a container body 2 for storing semiconductor wafers, and a lid body 3 that is removably fitted to the open front of the container body 2, and a filter 20 for adjusting air pressure is attached to the lid body 3 (see Patent Document 1).

[0003] As partially shown in Figures 10 to 12, the lid body 3 is composed of a lid body 4 that fits into the open front of the container body 2, a pair of cover plates 6 that cover both sides of the surface of the lid body 4, and a locking mechanism that is installed between the lid body 4 and the pair of cover plates 6.

[0004] A communication hole 5 is drilled in at least one of both side surfaces of the lid body 4, and a filter 20 is attached to this communication hole 5 and covered by a cover plate 6. A recessed portion 7 is formed in the cover plate 6 so as to be recessed and face the filter 20, and a detachment hole 8 for the filter 20 is drilled in this recessed portion 7 so as to face the communication hole 5 of the lid body 4, and a partition piece that partitions this detachment hole 8 is a deformable locking claw 9 for the filter 20.

[0005] As partially shown in Figures 11 and 12, the filter 20 comprises a communicating tube 21 that is press-fitted into the communicating hole 5 of the lid body 4 and communicates with the inside of the container body 2, and a protruding tube 22 that faces the communicating tube 21 and protrudes to the outside from the detachable hole 8 of the recess 7 of the lid body 3, and a filter material 25 is interposed between the communicating tube 21 and the protruding tube 22.

[0006] Outwardly projecting flanges 23, 24 are formed on the opposing open ends of the communicating pipe 21 and the protruding pipe 22, respectively, and these flanges 23, 24 are connected to each other and sandwich the filter medium 25 therebetween. When the filter 20 is attached, the peripheral edge of the flange 24 of the protruding pipe 22 comes into close proximity with the end of the locking claw 9 of the recess 7 located above, with a gap between them, and this proximity prevents the filter 20 from falling off.

[0007] Incidentally, the substrate storage container 1 may be reused repeatedly, and before this reuse, the container body 2 and the lid 3 are washed separately in a cleaning tank. When washing the lid 3, if the filter 20 remains attached to the lid 3, problems such as reduced workability will arise, so it is necessary to remove the filter 20 by pulling it out from the lid 3.

[0008] Conventionally, when removing a filter 20 by pulling it out from the lid body 3, the lid body 3 is placed on a work table to expose its cover plate 6, and the locking claws 9 of the recessed portion 7 of the cover plate 6 are carefully pushed down toward the lid body 4 (see Figure 12), thereby spreading the locking claws 9 of the recessed portion 7 downward and separating them from the flange 24 of the protruding tube 22 of the filter 20.While ensuring that the locking claws 9 are kept separated, the protruding tube 22 of the filter 20 is grasped and pulled up, and the communicating tube 21 of the filter 20 comes out of the communicating hole 5 of the lid body 4, allowing the filter 20 to be pulled out and removed through the detachment hole 8 of the recessed portion 7. [Prior art documents] [Patent documents]

[0009] [Patent Document 1] Japanese Patent Application Laid-Open No. 2006-24585 Summary of the Invention [Problem to be solved by the invention]

[0010] Conventional substrate storage containers 1 are configured as described above, but removing the filter 20 from the lid 3 requires skilled work, which may make it difficult to remove the filter 20 smoothly or quickly.

[0011] To explain this point in more detail, when removing the filter 20 from the lid 3, it is necessary to push the locking claws 9 of the recess 7 downward to separate them from the flange 24 of the protruding tube 22 of the filter 20. However, if the operator is not skilled, the locking claws 9 of the recess 7 may be pushed downward in the vertical direction, which may result in the ends of the locking claws 9 coming into contact with the peripheral edge of the flange 24 and causing damage (see Figure 12). Furthermore, when the filter 20 is pulled up while maintaining the deformed locking claws 9 in a separated state, the deformed locking claws 9 may return to their original state, resulting in the locking claws 9 coming into contact with and damaging the flange 24 (see Figure 13).

[0012] One way to eliminate these concerns is to have experienced workers take charge of the work, but with this method, the ease of removal depends heavily on the skill level of the particular worker, and some workers may cause problems with the removal work, making it difficult to achieve smooth and rapid removal work.

[0013] The present invention has been made in consideration of the above, and aims to provide a filter removal tool for a substrate storage container that can facilitate and speed up filter removal work regardless of the worker's level of skill, and a method for using the same. [Means for solving the problem]

[0014] In order to solve the above-mentioned problems, the present invention is a method for removing a filter attached to a lid of a substrate storage container using a removal jig, The lid body includes a lid body that is fitted into the opening of the container body of the substrate storage container, and a cover that sandwiches the filter between the lid body and the lid body, the cover is formed with a recess that is recessed toward the filter, the recess is provided with a detachable hole for the filter, and a partition piece that partitions the detachable hole is a deformable locking claw for the filter, The filter includes a communication tube that is detachably inserted into the communication port of the lid body of the lid body, and a protruding tube that protrudes from a detachable hole in the recessed portion of the lid body opposite to the communication tube, and flanges that sandwich the filter material are formed on the opposing open ends of the communication tube and the protruding tube, respectively, so that the flange of the protruding tube can interfere with the locking claw of the recessed portion, The removal jig includes a base jig that contacts the cover of the lid body and faces the hollow portion to the recessed portion, and an operating jig that is inserted into the hollow portion of the base jig using an operating handle so that it can be moved up and down. At least the lower part of the base jig has a plurality of separating claws at a predetermined interval that can contact the locking claws of the recessed portion. A retaining tube that is interposed between the plurality of separating claws and fitted onto the protruding tube of the filter is attached to the operating handle of the operating jig, and a connecting joint that is inserted into the protruding tube of the filter is built into this retaining tube. By contacting the retaining tube of the operating jig with the plurality of separating claws of the base jig and bending it, the plurality of separating claws come into contact with the locking claws of the recessed portion and deform, thereby separating the locking claws from the flange of the protruding tube.

[0015] In addition, a positioning recess is formed on either the cover of the lid body or the base jig of the removal jig, and a positioning protrusion is formed on the other, and by fitting these positioning recess and positioning protrusion together, the hollow portion of the base jig can be positioned in the removal hole of the recessed portion. In addition, a locking protrusion for a removal jig can be formed on the protruding tube of the filter, allowing the operating jig to rotate with the retaining tube inserted into the hollow portion of the base jig, and an inner flange can be formed on the open end of this retaining tube so that the locking protrusion of the protruding tube can be locked onto its peripheral portion, and a guide recess can be formed on the inner flange to fit through the locking protrusion of the protruding tube.

[0016] Furthermore, the holding cylinder of the operating jig can be divided into a plurality of arc-shaped pieces, and the connecting joint can be fitted between the plurality of arc-shaped pieces. In addition, the connection joint can be formed into an approximately cylindrical shape with its open ends having different diameters, and an alignment flange can be formed on the outer peripheral surface of one end of the connection joint, so that the other end of the connection joint can be inserted and fitted into the protruding tube of the filter. In addition, a surrounding wall that is closely aligned with the inner peripheral surface of the retaining tube can be provided on the outer peripheral surface of the connecting joint near the other end, and the protruding tube of the filter can be surrounded by this surrounding wall with a gap therebetween.

[0017] In order to solve the above problems, the present invention provides a method for using a filter removal jig for a substrate storage container according to claim 1 or 2, which comprises: The base jig of the removal jig is placed on the recessed portion of the cover of the lid body, and the multiple separating claws are fitted into the recessed portion of the cover. The retaining tube of the operating jig is inserted into the hollow portion of the base jig and the operating jig is pushed down, causing the retaining tube to come into contact with the multiple separating claws and spread the locking claws in the recess, and the connecting joint is inserted and fitted into the protruding tube of the filter. Thereafter, the operating jig is pulled up and the filter's connecting tube is removed from the connecting port of the lid body.

[0018] Here, the filter material of the filter in the claims may be singular or plural. Furthermore, the multiple separation claws of the removal jig may be provided at a predetermined interval on the lower part of the base jig, or may be provided at a predetermined interval from the inside to the lower part of the base jig. The positioning recess may be formed on the cover of the lid body, or on the base jig of the removal jig. In contrast, the positioning protrusion may be formed on the base jig of the removal jig, or on the cover of the lid body. Furthermore, although it is preferable to provide multiple locking protrusions and guide recesses, they may also be singular.

[0019] According to the present invention, when removing the filter by pulling it out from the lid, the cover of the lid is exposed, the base jig of the removal jig is placed over its recess, the multiple separating claws of the base jig are fitted into the recess of the cover, the retaining cylinder of the operating jig is inserted into the hollow part of the base jig, and the operating handle of the operating jig is pressed downward to fit the connecting joint inside the retaining cylinder into the protruding tube of the filter. At this time, the descending retaining cylinder comes into contact with the multiple separating claws and bends them outward, and each separating claw bends outward and pushes apart the locking claws in the recess. [Effects of the Invention]

[0020] According to the present invention, the filter removal work can be made smoother and faster regardless of the skill level of the worker. In addition, by moving the operating jig up and down, the retaining tube and the connecting joint can be moved up and down together, which reduces the number of parts and simplifies the configuration.

[0021] According to the invention described in claim 2, by fitting the positioning recess and the positioning protrusion together, the hollow portion of the base jig can be positioned in the detachment hole of the recess, so that the connecting joint of the operating jig can be properly inserted into the protruding tube of the filter, making the filter removal work smoother, faster, and easier.

[0022] According to the invention of claim 3, by rotating the operating jig to shift the guide recess of the inner flange of the holding tube from the locking protrusion of the filter, the inner flange of the holding tube and the locking protrusion of the filter lock together, preventing the filter from falling off the connecting joint. Therefore, even if the filter's communicating tube is tightly attached to the connecting port of the lid, the filter can be securely removed by pulling it out strongly from the lid. It is also possible to prevent the filter's protruding tube from rubbing against the connecting joint and falling off, generating dust.

[0023] According to the invention described in claim 4, the retaining tube and the connecting joint are not one unit, but the connecting joint is fitted between a number of divided arc pieces, and then the arc pieces can be combined to form the retaining tube, which makes it easy to manufacture and disassemble the operating jig, and also makes it possible to give the retaining tube and the connecting joint multiple functions.

[0024] According to the invention of claim 5, since both ends of the connection joint have different diameters, it is easy to visually identify the shape of the connection joint and it is possible to install the connection joint in the correct orientation inside the retaining cylinder. In addition, since an alignment flange is formed on the outer peripheral surface of one end of the connection joint, using this flange makes it possible to prevent the connection joint from rattling inside the retaining cylinder. [Brief explanation of the drawings]

[0025] [Figure 1] 1 is a perspective view illustrating a main portion of an embodiment of a filter removal jig for a substrate storage container according to the present invention; [Figure 2] 1 is a cross-sectional explanatory view schematically showing an embodiment of a filter removal jig for a substrate storage container according to the present invention. [Figure 3] 10 is an explanatory view schematically showing the relationship between a cover plate of a lid and a base jig that constitutes the removal jig in an embodiment of a filter removal jig for a substrate storing container according to the present invention. FIG. [Figure 4] 10 is an explanatory view schematically showing a luer lock in an embodiment of a filter removal jig for a substrate storage container according to the present invention. FIG. [Figure 5] FIG. 10 is an explanatory diagram showing a state in which a base jig of the removal jig is placed on a recessed portion of a cover plate in an embodiment of a filter removal jig for a substrate storage container according to the present invention, and a pair of separating claws is inserted into the recessed portion. [Figure 6] 6 is an explanatory view schematically showing a state in which the operating jig of the removal jig in FIG. 5 is pushed down and rotated. FIG. [Figure 7] 7 is an explanatory view schematically showing a state in which the inner flange of the holding cylinder of the removal jig in FIG. 6 can be locked onto the locking rib of the filter. FIG. [Figure 8] 8 is an explanatory view schematically showing a state in which the operating jig of the removal jig in FIG. 7 is being pulled up. FIG. [Figure 9] 9 is an explanatory view showing a state in which the communication tube of the filter is removed from the communication hole of the lid body in FIG. 8.

[0023] FIG. [Figure 10] FIG. 2 is an overall perspective view showing a substrate storage container. [Figure 11] FIG. 10 is an explanatory cross-sectional view showing a state in which a filter is attached to a lid body. [Figure 12] 10 is a cross-sectional explanatory view showing a state in which the locking claws of the recessed portion come into contact with and damage the flange periphery of the protruding pipe. FIG. [Figure 13] 10 is an explanatory cross-sectional view showing a state in which the deformed locking claw of the recessed portion returns to its original state and comes into contact with the flange of the protruding pipe. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0026] A preferred embodiment of the present invention will now be described with reference to the drawings. The filter removal jig for a substrate storage container in this embodiment is a dedicated jig for removing a filter 20 attached to the lid 3 of a substrate storage container 1 using a removal jig 30, as shown in Figures 1 to 10. The pair of separating claws 34 of the base jig 31 constituting the removal jig 30 are brought into contact with the retaining tube 39 of the operating jig 36, causing the pair of separating claws 34 to come into contact with the locking claws 9 of the recess 7 and deform, thereby separating the locking claws 9 from the flange 24 of the protruding tube 22, thereby contributing to the achievement of Goal 9 of the SDGs (the United Nations' International Goals for Sustainable Development, consisting of 17 global goals and 169 targets (achievement criteria)) adopted at the United Nations Summit.

[0027] As partially shown in Figure 10, the substrate storage container 1 comprises a container body 2 for storing a plurality of semiconductor wafers in an aligned manner, and a lid body 3 that is removably fitted to the open front of the container body 2, and a filter 20 that adjusts the air pressure to facilitate removal is removably attached to the lid body 3.

[0028] Although not shown, the semiconductor wafers are thin, brittle, high-quality silicon wafers, for example, 300 mm in diameter, stored horizontally inside the container body 2, with 25 wafers aligned vertically at predetermined intervals. The container body 2 and the lid 3 are each formed by injection-molding a plurality of parts from a molding material containing a predetermined resin, and these parts are assembled together. Examples of the predetermined resin used in the molding material include thermoplastic resins such as polycarbonate resin, cycloolefin polymer, polyetherimide resin, polyetherketone resin, polyetheretherketone resin, polybutylene terephthalate resin, polyacetal resin, and liquid crystal polymer, as well as alloys of these resins.

[0029] The container body 2 is formed as a front-open box with an opening at the front, and has a plurality of pairs of left and right support pieces arranged vertically on both sides of the interior to horizontally support semiconductor wafers, and locking holes are formed as recesses on both upper and lower sides of the inner periphery of the front. The lid 3, as shown in Figures 1 to 3 and 5 to 9, is composed of a lid body 4 with a generally dish-shaped cross section that fits into the open front of the container body 2, a pair of cover plates 6 that cover both sides of the open surface of the lid body 4, and a locking mechanism 11 that is installed between the lid body 4 and the pair of cover plates 6.

[0030] The lid body 4 is configured as a substantially rectangular shape in plan view, and has openings for the locking mechanism 11 that penetrate both upper and lower sides of its peripheral wall, facing the locking holes in the container body 2, and a circular communication hole 5 that communicates with the interior of the container body 2 is drilled near the center of at least one of the two side surfaces, as shown in Figures 5 to 9, and a filter 20 is detachably attached to this communication hole 5 and covered by a cover plate 6. The cover plate 6 is formed as a light-transmitting, substantially rectangular plate in plan view, and has a recess 7 formed therein that is recessed and faces the filter 20, and a detachment hole 8 for the filter 20 that faces the communication hole 5 in the lid body 4 is drilled in the center of this recess 7, and the detachment hole 8 is formed by a partition piece that is substantially L-shaped in cross section and that serves as a deformable locking claw 9 for the filter 20.

[0031] The recess 7 is formed to have a circular shape in a plan view, but may be formed to have a rectangular, polygonal, or other shape as necessary. A plurality of positioning holes 10 of different sizes for the removal jig 30 are drilled around the periphery of the recess 7, and each positioning hole 10 is formed to have, for example, a rectangular shape in plan view (see FIG. 3). The detachment hole 8 of the recess 7 is larger than the communication hole 5 of the lid body 4, but is formed to have a diameter smaller than the diameter of the filter 20 in order to prevent the filter 20 from falling off. The end of the locking claw 9 that defines the detachment hole 8 is preferably notched obliquely or tapered in order to avoid contact with the filter 20.

[0032] 1, the locking mechanism 11 is composed of a pair of left and right operating reels 12 that are pivotally supported at the center of both sides of the lid body 4 and rotated by operating an operating key of the lid body opener that penetrates the cover plate 6, a pair of upper and lower connecting bars 13 that slide with the rotation of each operating reel 12, and a plurality of locking claws 14 that protrude from recessed openings in the peripheral wall of the lid body as each connecting bar 13 slides. When the lid body 3 fitted to the front of the container body 2 is locked, each operating reel 12 rotates in one direction to slide the pair of connecting bars 13 toward the peripheral wall of the lid body 3, and this sliding causes each locking claw 14 to swing out from the recessed opening in the peripheral wall of the lid body and engage with a locking hole on the inner periphery of the front of the container body 2, thereby securely locking the lid body 3.

[0033] As shown in Figures 1, 2, 5 to 9, the filter 20 comprises a reduced-diameter communicating tube 21 that is press-fitted into the communicating hole 5 of the lid body 4 of the lid body 3 and communicates with the inside of the container body 2, and an expanded-diameter protruding tube 22 that faces the communicating tube 21 and protrudes through a gap from the detachable hole 8 of the recessed portion 7 of the lid body 3 to the outside, and incorrect installation is prevented in advance due to at least the difference in diameter between the communicating tube 21 and the protruding tube 22.

[0034] The communicating pipe 21 and the protruding pipe 22 are each formed into a cylindrical shape using a molding material containing, for example, a specified resin, and each of the opposing open ends is formed with a ring-shaped flange 23, 24 that protrudes radially outward.These flanges 23, 24 are bonded together at their peripheral edges to form an integrated unit, and a disk-shaped filter material 25 is sandwiched between the pair of flanges 23, 24 with a small gap between them.

[0035] A plurality of (two in this embodiment) locking ribs 26 for use with the removal jig 30 are formed at predetermined intervals on the tip of the outer peripheral surface of the protruding tube 22, and each locking rib 26 is formed to have a rectangular or approximately semicircular cross section. When the filter 20 is attached to the lid body 4, the peripheral surface of the flange 24 of this protruding tube 22 comes into close proximity to the end of the locking claw 9 of the recess 7 located above, with a small gap between them, allowing interference, and this proximity effectively prevents the filter 20 from falling off the lid body 4. The filter medium 25 is, for example, a molecular filtration filter, and a plurality of sheets are stacked and interposed between the flanges 23 and 24.

[0036] As shown in Figures 1 to 9, the removal jig 30 comprises a base jig 31 mounted opposite the cover plate 6 of the lid body 3, and a rotatable operating jig 36 that is detachably inserted into the base jig 31 from above using an operating handle 37 and moves up and down. The base jig 31 has a pair of separating claws 34 built in that fit into the recess 7 of the cover plate 6, and the operating handle 37 of the operating jig 36 supports a retaining tube 39 that is interposed between the pair of separating claws 34, and the retaining tube 39 has a built-in luer lock 43 for pulling out the filter 20.

[0037] The base jig 31 and the operating jig 36 are each molded from a molding material containing a predetermined resin or elastomer, with the aim of making them as metal-free as possible. The predetermined resin is not particularly limited, but examples thereof include thermoplastic resins such as polyether ether ketone resin, polyacetal resin, polycarbonate resin, cycloolefin polymer resin, cycloolefin copolymer resin, polypropylene resin, polyetherimide resin, polyether ketone resin, polybutylene terephthalate resin, and liquid crystal polymer, as well as alloys of these.

[0038] The base jig 31 is formed, for example, as a generally I-shaped block, with large and small working flanges 32 extending horizontally from the upper and lower peripheries to help stabilize its posture, and a hollow cylindrical portion 33 formed in the vertical direction at the center so as to face the attachment hole 8 of the recessed portion 7. Inside this base jig 31, a pair of left and right separating claws 34 are provided opposite each other at a predetermined interval and tilted to hold the hollow cylindrical portion 33, with each separating claw 34 formed, for example, as an elongated, generally L-shaped plate extending downward. The lower portion of each separating claw 34 protrudes outward from the lower surface of the lower portion of the base jig 31 so as to be able to come into contact with the outer periphery of the retaining cylinder 39, and is bent outward when pressed against the descending retaining cylinder 39, so that the bent shorter sides press against the locking claws 9 of the recessed portion 7, causing deformation.

[0039] As shown in Figure 3, multiple positioning ribs 35 of different sizes are formed protruding from the peripheral edge of the lower surface of the base jig 31, and each positioning rib 35 is positioned and fitted into the positioning hole 10, thereby functioning to position the detachment hole 8 of the recess portion 7 and the hollow cylinder portion 33 of the base jig 31 with high precision.

[0040] The operating jig 36 is provided with an operating handle 37 for gripping operation, and a long, thin bar 38 is formed integrally and hanging down from the lower part of this operating handle 37. A cylindrical retaining tube 39 is detachably supported on this bar 38 and is inserted into the hollow tube portion 33 of the base jig 31 so that it can move up and down. This retaining tube 39 is fitted onto the protruding tube 22 of the filter 20 from the outside while bending the pair of separating claws 34 outward.

[0041] The retaining tube 39 is divided into a pair of elongated arc-shaped pieces 40, and a plurality of mounting ribs for a luer lock 43 are formed protruding from the lower inner peripheral surface of each arc-shaped piece 40, and the luer lock 43 is fitted into the projection tube 22 of the filter 20 and is inserted between the lower parts of the pair of arc-shaped pieces 40. The pair of arc-shaped pieces 40 are combined to form such a retaining tube 39 into a cylindrical shape with a diameter slightly larger than that of the flange 24 of the projection tube 22, and the retaining tube 39 is rotatably inserted into the hollow tube portion 33 and protrudes outward and downward beyond the pair of separating claws 34.

[0042] An inner flange 41 is provided around the inner peripheral surface of the open lower end of the retaining tube 39, through which the protruding tube 22 of the filter 20 passes, and guide grooves 42 that can face the multiple locking ribs 26 of the protruding tube 22 are cut out at predetermined intervals in this inner flange 41 (see Figures 5 and 6). When each guide groove 42 is positioned and aligned with the locking ribs 26 of the protruding tube 22 from above, it is slidably fitted into the locking rib 26 and functions to lower the retaining tube 39 closer to the filter 20.

[0043] On the other hand, if the protruding tube 22 is not positioned and aligned after it has already been inserted into the locking rib 26, the peripheral portion of the inner flange 41 will collide with the locking rib 26, thereby restricting the retaining tube 39 from descending and approaching the filter 20, and the peripheral portion of the inner flange 41 will lock with the locking rib 26, preventing the filter 20 from falling off the retaining tube 39.

[0044] 2 and 4 to 9, the luer lock 43 is formed in a transparent or translucent, generally cylindrical shape with its open upper and lower ends formed with different diameters, a tapered flange 44 for alignment around the outer peripheral surface of the enlarged-diameter upper end, and its reduced-diameter lower end tightly fitted into the projection tube 22 of the filter 20 to pull out the filter 20. A generally cylindrical surrounding wall 45 is provided around the outer peripheral surface of the lower end of the luer lock 43, surrounding the lower end of the luer lock 43 and in close contact with the inner peripheral surface of the retaining tube 39, and this surrounding wall 45 surrounds the projection tube 22 of the filter 20 via a gap. The open end of the surrounding wall 45 contacts the inner flange 41 of the retaining tube 39, and together with the tapered flange 44, effectively prevents the luer lock 43 from shifting or rattling.

[0045] In the above configuration, when removing the filter 20 by pulling it out from the lid 3, first, the lid 3 is placed on a work table to expose the cover plate 6, and the base jig 31 of the removal jig 30 is placed on the recessed portion 7 of the cover plate 6 (see FIG. 1), and the pair of separating claws 34 are fitted into the recessed portion 7 of the cover plate 6 (see FIGS. 2 and 5). At this time, the positioning rib 35 of the base jig 31 is tightly fitted into the positioning hole 10 of the cover plate 6, and the hollow cylindrical portion 33 is centered and positioned on the protruding tube 22 of the filter 20.

[0046] Next, the retaining tube 39 of the operating jig 36 is inserted into the hollow tube portion 33 of the base jig 31 and rotated so that its guide groove 42 faces the locking rib 26 of the protruding tube 22 of the filter 20 from above, and the operating handle 37 of the operating jig 36 is pressed down to fit the guide groove 42 into the locking rib 26 of the filter 20 (see Figure 6), and the lower end of the luer lock 43 of the operating jig 36 is inserted into the protruding tube 22 of the filter 20 (see Figure 7).

[0047] At this time, the descending retaining tube 39 presses against the inner surfaces of the pair of separating claws 34, bending them outward, and each separating claw 34 bends outward, pushing the locking claws 9 in the recessed portion 7 downward and apart. By being pushed outward, each locking claw 9 separates from the flange 24 of the protruding tube 22 and is no longer able to interfere, allowing the filter 20 to be safely pulled out and removed.

[0048] Next, the operating jig 36 is rotated by a predetermined rotation angle, such as 90°, to shift the position of the guide groove 42, thereby enabling the peripheral portion of the inner flange 41 of the retaining tube 39 to engage with the locking rib 26 of the filter 20, and the operating handle 37 is pressed down to tightly and closely fit the lower end of the luer lock 43 near the inner bottom of the protruding tube 22 of the filter 20. Thereafter, the operating jig 36 is pulled up while holding the base jig 31 (see Figure 8), thereby removing the communicating tube 21 of the filter 20 from the communicating hole 5 of the lid main body 4 (see Figure 9).

[0049] At this time, even if the protruding tube 22 of the filter 20 tries to fall out from the lower end of the luer lock 43, the guide groove 42 of the retaining tube 39 and the locking rib 26 of the protruding tube 22 do not face each other, and the peripheral edge of the inner flange 41 of the retaining tube 39 and the locking rib 26 are in an engaged state, so the filter 20 will not fall out of the luer lock 43. After the filter 20 has been removed from the lid main body 4, the base jig 31 can be lifted up to remove the filter 20 from the detachment hole 8 of the recess 7 while it is still held by the removal jig 30 (see Figure 2).

[0050] According to the above, the pressure contact of the retaining tube 39 causes the separating claws 34 to bend outward and reliably push the locking claws 9 in the recessed portion 7 downward, thereby allowing the locking claws 9 to be appropriately curved and deformed, eliminating the risk of the ends of the locking claws 9 accidentally coming into contact with the peripheral edge of the flange of the protruding tube 22 and causing damage. Furthermore, the pressure contact between the separating claws 34 and the retaining tube 39 causes the separating claws 34 to reliably maintain the deformed state of the locking claws 9, allowing the deformed locking claws 9 to return to their original state, eliminating the risk of the locking claws 9 coming into contact with the flange 24 and causing damage.

[0051] Furthermore, the peripheral edge of inner flange 41 of retaining tube 39 and locking rib 26 of filter 20 are locked together, preventing filter 20 from falling off luer lock 43, thereby significantly improving the holding power of operating jig 36. Therefore, even if communicating tube 21 of filter 20 is tightly attached to communicating hole 5 of lid body 3 or there is a problem with the holding power of luer lock 43, filter 20 can be reliably removed by forcefully pulling it out from lid main body 4 without being damaged.

[0052] Furthermore, since the luer lock 43 is fitted between the lower portions of the pair of divided arc-shaped pieces 40 and then the pair of arc-shaped pieces 40 are combined to form the retaining cylinder 39, the manufacturing and disassembly of the operating jig 36 is simplified, and it is possible to impart multiple or different functions to the retaining cylinder 39 and luer lock 43. Furthermore, since the upper and lower ends of the luer lock 43 have different diameters, it is easy to visually identify the shape and orientation of the luer lock 43, and it is possible to install the luer lock 43 in the appropriate orientation within the retaining cylinder 39. Furthermore, since the luer lock 43 is formed with a tapered flange 44 and surrounding wall 45, these can be used to effectively prevent the luer lock 43 from rattling within the retaining cylinder 39.

[0053] In the above embodiment, communication holes 5 may be drilled on both sides of the surface of the lid body 4, and the filter 20 may be detachably attached to each communication hole 5. Furthermore, the pair of separating claws 34 in the above embodiment may be inclined and extended so as to gradually widen downward from the lower surface of the base jig 31, or portions of the separating claws 34 may be bent or curved to ensure reliable pressure contact with the holding tube 39. The number of pairs of separating claws 34 may be increased to three, four, or the like. An outer flange may be provided around the outer peripheral surface of the open lower end of the holding tube 39, and this outer flange may be pressed against the inner surface of the separating claws 34 to bend significantly outward. Furthermore, the material or surface friction coefficient of the luer lock 43 may be changed to improve the holding force, thereby making it more difficult for the protruding tube 22 of the filter 20 to come off. [Industrial Applicability]

[0054] The filter removal jig for a substrate storage container and the method for using the same according to the present invention are used in the fields of manufacturing and using substrate storage containers. [Explanation of symbols]

[0055] 1. Substrate storage container 2 Container body 3 Lid 4 Lid body 5 Communication hole (communication port) 6 Cover plate (cover) 7. Recess 8 Detachment hole 9 Locking claw 10 Positioning hole (positioning recess) 20 filters 21 Communication pipe 22 Projection tube 23 flange 24 flange 25 Filter media 26 Locking rib (locking protrusion) 30 Removal jig 31 Base jig 33 Hollow cylinder part (hollow part) 34 Separation claw 35 Positioning rib (positioning protrusion) 36 Operating jig 37 Operating handle 39 Holding tube 40 Arc Piece 41 Inner flange 42 Guide groove (guide recess) 43 Luer lock (connection joint) 44 Tapered flange (flange for alignment) 45 Siege Wall

Claims

1. A filter removal jig for a substrate storage container that removes a filter attached to a lid of the substrate storage container using the removal jig, The lid body includes a lid body that is fitted into the opening of the container body of the substrate storage container, and a cover that sandwiches the filter between the lid body and the lid body, the cover is formed with a recess that is recessed toward the filter, the recess is provided with a detachable hole for the filter, and a partition piece that partitions the detachable hole is a deformable locking claw for the filter, The filter includes a communication tube that is detachably inserted into the communication port of the lid body of the lid body, and a protruding tube that protrudes from a detachable hole in the recessed portion of the lid body opposite to the communication tube, and flanges that sandwich the filter material are formed on the opposing open ends of the communication tube and the protruding tube, respectively, so that the flange of the protruding tube can interfere with the locking claw of the recessed portion, The removal jig includes a base jig that contacts the cover of the lid body so that its hollow portion faces the recessed portion, and an operating jig that is inserted into the hollow portion of the base jig using an operating handle so that it can be moved up and down, and at least the lower part of the base jig has a plurality of separating claws at predetermined intervals that can contact the locking claws of the recessed portion, and a retaining tube that is interposed between the plurality of separating claws and fitted onto the protruding tube of the filter is attached to the operating handle of the operating jig, and a connecting joint that can be inserted into the protruding tube of the filter is built into this retaining tube, and by contacting and bending the plurality of separating claws of the base jig with the retaining tube of the operating jig, the plurality of separating claws are contacted and deformed with the locking claws of the recessed portion, and the locking claws are separated from the flange of the protruding tube.

2. A filter removal jig for a substrate storage container as described in claim 1, wherein a positioning recess is formed in either the cover of the lid body or the base jig of the removal jig, and a positioning protrusion is formed in the other, and by fitting these positioning recess and positioning protrusion together, the hollow portion of the base jig is positioned in the removal hole of the recessed portion.

3. 3. A filter removal jig for a substrate storage container as set forth in claim 1 or 2, wherein a locking protrusion for the removal jig is formed on the protruding tube of the filter, the operating jig is rotatable with the retaining tube inserted in the hollow portion of the base jig, an inner flange is formed on the open end of the retaining tube so that the locking protrusion of the protruding tube can be locked on its peripheral portion, and a guide recess is formed on the inner flange so that the locking protrusion of the protruding tube can be inserted into it.

4. 3. A filter removal jig for a substrate storage container according to claim 1, wherein the holding cylinder of the operating jig is divided into a plurality of arcuate pieces, and connecting joints are fitted between the plurality of arcuate pieces.

5. 3. A filter removal jig for a substrate storage container as described in claim 1 or 2, wherein the connection joint is formed into a roughly cylindrical shape with its open ends having different diameters, a flange for alignment is formed on the outer peripheral surface of one end of the connection joint, and the other end of the connection joint can be inserted and fitted into the protruding tube of the filter.

6. A method for using the filter removal jig for a substrate storage container according to claim 1 or 2, comprising: A method of using a filter removal jig for a substrate storage container, characterized by placing a base jig of the removal jig on a recessed portion of the cover of the lid body, fitting multiple spacing claws into the recessed portion of the cover, inserting the retaining tube of the operating jig into the hollow portion of the base jig and pushing down the operating jig so that the retaining tube comes into contact with the multiple spacing claws and spreads the locking claws in the recessed portion, and inserting and fitting the connecting joint into the protruding tube of the filter, and then pulling up the operating jig and removing the filter's communicating tube from the communicating port of the lid body.

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