Furnace core tube holding device

Abstract

To provide a furnace core pipe holding device which improves mounting stability of a furnace core pipe for semiconductor heat treatment.SOLUTION: A furnace core pipe holding device for holding at least one furnace core pipe includes a holding body 1 which is formed with a curved storage part 11 capable of receiving and holding at least a part of the furnace core pipe, and a vibration attenuation structure 2 having a connection member 21 and an attenuation member 22 projecting from the circumference of the curved storage part 11 so as to extend along the shape of the curved storage part 11, wherein the attenuation member 22 has an attenuation part 221, and a pair of sandwiching parts 222 which extend to the side of the holding body 1 from the attenuation part 221 and define a reception groove 223 that receives and holds the connection member 21 together with the attenuation part 221, and sandwiches and holds the connection member 21 entering the reception groove 223 between the pair of sandwiching parts 222.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to a furnace tube holding device for holding a furnace tube for heat treatment of semiconductors. [Background technology]

[0002] Conventional furnace core tubes for semiconductor heat treatment can be stored in an upright or horizontal position by being held in a furnace core tube holding device installed in a storage cabinet. For example, the holder in the furnace core tube storage system described in Patent Document 1 has a buffer pad or the like attached to its surface to protect the furnace core tube, which is usually made of brittle quartz material. However, if the buffer pad itself is not attached or adhered properly, it may not be possible to provide sufficient protection for the furnace core tube and may not be able to hold the furnace core tube stably. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Taiwan Utility Model Registration No. M573511U Summary of the Invention [Problem to be solved by the invention]

[0004] SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a furnace core tube holding device that can improve the mounting stability of a furnace core tube for semiconductor heat treatment. [Means for solving the problem]

[0005] In order to achieve the above-mentioned object, the furnace core tube holding device of the present invention holds at least one furnace core tube and comprises a holding body formed with a curved accommodating section that can receive and hold at least a portion of the furnace core tube, and a vibration damping structure having a connecting member and a damping member that protrude from the periphery of the curved accommodating section so as to extend along the shape of the curved accommodating section, wherein the damping member has a damping section that is attached to the side of the connecting member away from the holding body and can abut against the furnace core tube, and a pair of clamping sections that extend from the damping section toward the holding body and, together with the damping section, define a receiving groove that receives and holds the connecting member, and the damping section is fixed to the curved accommodating section by clamping and holding the connecting member that enters the receiving groove with the pair of clamping sections. [Effects of the Invention]

[0006] The present invention is configured so that the connecting member protruding from the holding body is inserted into a receiving groove defined by a pair of clamping portions and a damping portion, so that the damping member is stably and securely attached to the holding body, thereby providing sufficient protection for the furnace core tube installed on the damping member and enabling the furnace core tube to be stably held. [Brief explanation of the drawings]

[0007] [Figure 1] 1 is a top view showing an embodiment of a furnace core tube holding device of the present invention applied to a storage cabinet, holding a furnace core tube; FIG. [Figure 2] 1 is a perspective view showing the configuration of an embodiment of a furnace core tube holding device of the present invention; [Figure 3] FIG. [Figure 4] FIG. 4 is a partially enlarged exploded perspective view corresponding to FIG. 3. [Figure 5] FIG. 3 is a cross-sectional view taken along line VV in FIG. [Figure 6] FIG. 10 is a side view showing a modified example of the furnace core tube holding device of the present invention. [Figure 7] FIG. 10 is a perspective view showing the configuration of the modified example. [Figure 8]FIG. 10 is an exploded perspective view showing the configuration of the modified example. [Figure 9] FIG. 8 is a cross-sectional view taken along line IX-IX in FIG. DETAILED DESCRIPTION OF THE INVENTION

[0008] 1 and 2 show an embodiment of a furnace core tube holding device 100 of the present invention. As shown, the furnace core tube holding device 100 is adapted to be placed within a storage cabinet 8 and is used to hold at least one furnace core tube 9 within the storage cabinet 8.

[0009] In this embodiment (see Figure 1), the furnace core tube holding device 100 comprises a holding body 1 having a curved accommodating portion 11 capable of receiving and holding at least a portion of the furnace core tube 9, and a vibration damping structure 2 arranged on the holding body 1.

[0010] As shown in the figure, the holding body 1 is plate-shaped and is attached to the storage chest 8 so as to protrude from the inner wall surface of the storage cabinet 8, and at the tip protruding from the storage cabinet 8, a plurality of curved receiving portions 11 (eight in this embodiment) are formed, which are recessed so as to receive and hold at least a part of the furnace core tube 9. There is no particular limit to the number of curved receiving portions 11, and it is possible to form only one.

[0011] The vibration damping structure 2 has connecting members 21 and damping members 22 that protrude from the periphery of all the curved accommodating portions 11 so as to extend along the shape of the curved accommodating portions 11 .

[0012] Fig. 3 is an exploded perspective view of the same embodiment, and Fig. 4 is a partially enlarged perspective view thereof. As shown in the figure, the connecting member 21 is formed to protrude further from the tip edge of the holder body 1 that protrudes from the inner wall surface of the storage cabinet 8, and extends along the tip edge of the holder body 1 that protrudes from the inner wall surface of the storage cabinet 8 over all of the curved storage sections 11. Note that in this embodiment, the connecting member 21 is configured integrally with the holder body 1, but the present invention is not limited to this.

[0013] The damping member 22 is attached to the side of the connecting member 21 away from the holding body 1 and has a damping section 221 that can abut against the furnace core tube 9, and a pair of clamping sections 222 that extend from the damping section 221 toward the holding body 1 and define a receiving groove 223 that, together with the damping section 221, receives and holds the connecting member 21. The material of the damping member 22 can be, for example, rubber.

[0014] The damping portion 221 is a hollow tube extending along the periphery of the curved accommodating portion 11, and further, a pair of ribs 224 are formed on the side of the damping portion 221 that does not face the holding body 1, which protrude and extend parallel to the periphery of the curved accommodating portion 11, and which are arranged with a gap between them in the thickness direction X of the connecting member 21, which will be described later.

[0015] Each of the pair of clamping portions 222 is configured to extend from the damping portion 221 until it abuts against the holding body 1 when the connecting member 21 is received in the receiving groove 223. Furthermore, an engagement tab 226 that protrudes obliquely from the holding body 1 side toward the connecting member 21 side is formed on the inner surface of each clamping portion 222 that faces the receiving groove 223, and when the connecting member 21 enters the receiving groove 223, each engagement tab 226 is deformed by the pressure of the connecting member 21 and closes the gap between the connecting member 21 and each clamping portion 222. This configuration increases the frictional force between the connecting member 21 and each clamping portion 222, allowing the clamping portion 222 and the damping portion 221 to be attached to the connecting member 21 more firmly. Incidentally, as shown in Figures 4 and 5, in this embodiment, one engagement tab 226 is formed on the upper clamping portion 222 of the two clamping portions 222, and three engagement tabs 226 are formed on the lower clamping portion 222. However, in the present invention, there is no particular restriction on the number of engagement tabs 226 formed on the clamping portions 222, and the number can be determined appropriately as needed.

[0016] In this embodiment, as for the dimensions of the connecting member 21, as shown in FIG. 5, the thickness of the connecting member 21 in the thickness direction X, which is the direction in which the pair of clamping portions 222 clamp the connecting member 21, is smaller than the thickness of the holding body 1 in the thickness direction X.

[0017] With this configuration, the damping member 22 attached to the connecting member 21 has the tips extending from the damping portions 221 of the clamping portions 222 abutting against the holding body 1, and the two clamping portions 222 clamp and hold the connecting member 21 from both the top and bottom sides in the figure, so that the relative movement of the damping member 22 with respect to the holding body 1 is almost limited unless the damping member 22 is removed, and therefore the damping member 22 is stably attached to the connecting member 21 and the holding body 1.

[0018] 1, 3, and 5, the furnace core tube holding device 100 of the present invention secures the damping member 221 to the curved receiving portion 11 by clamping and holding the connecting member 21, which enters the receiving groove 223 defined by the damping member 221 and the pair of clamping members 222, between the pair of clamping members 222. This allows the damping member 22 to be stably and reliably attached to the holding body 1, providing sufficient protection for the furnace core tube 9 placed on the damping member 22 and stably holding the furnace core tube 9 in the correct position. Therefore, the damping member 22 can be stably attached to the connecting member 21 and the holding body 1 without using adhesive, and is easy to replace. In particular, the damping member 221 is a hollow tube extending along the periphery of the curved receiving portion 11, and the hollow portion provides excellent vibration damping for the furnace core tube 9.

[0019] In the embodiment shown in Figures 1 to 5, the thickness direction X of the connecting member 21, which is held by the pair of clamping parts 222 clamping the connecting member 21, coincides with the vertical direction, i.e., the furnace core tube holding device 100 of the present invention is configured to hold the furnace core tube 9 in a horizontal direction, while in the modified example shown in Figures 6 to 9, the thickness direction X coincides with the horizontal direction, i.e., the furnace core tube holding device 100 of the present invention is configured to hold the furnace core tube 9 in a vertical direction so as to support it from below.

[0020] As shown in FIG. 6, in this variant, the furnace core tube 9 is accommodated in a curved accommodation portion 11 of a furnace core tube holding device 100 attached to the bottom of the storage chest 8 .

[0021] 7 to 9, the specific configuration of this modified example is such that the thickness direction X, in which the pair of clamping portions 222 clamp the connecting member 21, coincides with the horizontal direction, and two vibration damping structures 2 attached to one block-shaped holding body 1 are arranged side by side in this thickness direction X, thereby holding one furnace core tube 9 at two locations with the two vibration damping structures 2. Note that the configuration is not limited to that shown in Fig. 7, and it is also possible to adopt a configuration in which three or more vibration damping structures 2 are provided on one holding body 1 and arranged along the thickness direction X, and one furnace core tube 9 is supported and held together.

[0022] 8 and 9, each of the two vibration damping structures 2 attached to the holding body 1 in this modified example further includes two limiting walls 23 extending parallel to the connecting member 21 and along the periphery of the curved accommodating portion 11 on both sides of the connecting member 21 in the thickness direction X, which is the direction in which the pair of clamping portions 222 clamp the connecting member 21. The two limiting walls 23, together with the connecting member 21, define limiting grooves 24 into which the two clamping portions 222 can enter, and the two clamping portions 222 are held between one limiting wall 23 and the connecting member 21 in each limiting groove 24, thereby restricting the relative movement of each clamping portion 222 with respect to the limiting walls 23, and the damping member 22 can be attached to the curved accommodating portion 11 more stably.

[0023] To summarize the above, the present invention utilizes a configuration in which the connecting member 21 formed on the holding body 1 side is inserted into the receiving groove 223 formed on the damping member 22 side, and the damping member 22 can be stably attached to the holding body 1 without using adhesive, thereby reliably achieving the object of the present invention.

[0024] Although the embodiment of the present invention has been described above, the present invention is not limited to this, and various modifications are possible without departing from the spirit of the present invention. [Explanation of symbols]

[0025] 100 Furnace core tube holding device 1 Holding body 11 Curved storage section 2. Vibration damping structure 21 Connecting member 22 Damping member 221 Attenuation section 222 Clamping part 223 Receiving groove 224 Ribs 226 Engagement tab 23 Restriction Wall 24 Restriction groove 8 Storage Cabinets 9 Furnace tube X thickness direction

Claims

1. A furnace core tube holding device for holding at least one furnace core tube, a holding body having a curved receiving portion capable of receiving and holding at least a portion of the furnace core tube; a vibration damping structure including a connecting member and a damping member protruding from a periphery of the curved receiving portion so as to extend along the shape of the curved receiving portion, The damping member has a damping portion attached to the side of the connecting member away from the holding body and capable of abutting against the furnace core tube, and a pair of clamping portions extending from the damping portion toward the holding body and defining a receiving groove that receives and holds the connecting member together with the damping portion, and the connecting member entering the receiving groove is clamped and held by the pair of clamping portions, thereby fixing the damping portion to the curved receiving portion, The damping member further has a pair of ribs that protrude from the side of the damping portion that does not face the holding body, extend parallel to the periphery of the curved accommodating portion, and are arranged at a distance from each other in the thickness direction of the connecting member, in a furnace core tube holding device.

2. a thickness of the connection member in a thickness direction of the connection member, in which the pair of clamping portions clamp the connection member, is smaller than a thickness of the holding body in the thickness direction; 2. The furnace core tube holding device according to claim 1, wherein each of the pair of clamping portions is configured to extend from the attenuation portion until it abuts against the holding body when the connecting member is received in the receiving groove.

3. 2. The furnace core tube holding device according to claim 1, wherein said attenuation portion is a hollow tube extending along the periphery of said curved receiving portion.

4. An engagement tab is formed on an inner surface of each clamping portion facing the receiving groove, the engagement tab projecting obliquely from the holding body side to the connecting member side, 2. The furnace core tube holding device according to claim 1, wherein when the connecting member enters the receiving groove, each of the engagement tabs is deformed by pressure from the connecting member and closes a gap between the connecting member and each of the clamping portions.

5. the vibration damping structure further includes two limiting walls extending parallel to the connecting member along a periphery of the curved accommodating portion on both sides of the connecting member in a thickness direction of the connecting member, which is a direction in which the pair of clamping portions clamp the connecting member; The two limiting walls, together with the connecting member, define limiting grooves into which the two clamping portions can enter, The two clamping portions are held between one of the limiting walls and the connecting member in each of the limiting grooves, 2. The furnace core tube holding device according to claim 1, wherein said damping member can be attached to said curved receiving portion more stably.

6. 2. The furnace core tube holding device according to claim 1, wherein a thickness direction of the connecting member, which is a direction in which the pair of clamping portions clamp the connecting member, coincides with the vertical direction or the horizontal direction.

7. two of the vibration damping structures are arranged on one holding body so as to be aligned in a thickness direction of the connecting member, which is a direction in which the pair of clamping portions clamp the connecting member; 2. The furnace core tube holding device according to claim 1, wherein one furnace core tube is held by two of the vibration damping structures at two locations.

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