Valve plate for a sealing device that closes an opening in a wall to create a vacuum seal.

Abstract

A valve plate for a closure device for vacuum-tightly closing an opening (2) in a wall (3) has on its front side a sealing ring (8) which seals against the wall (3) and on its rear side a recess (29) which is coupled to a valve rod (4) of the closure device. The recess (29) arranged on the rear side of the valve plate (1) is joined by an extension (30) at least in the region of two side walls of the recess (29) located opposite each other. For each extension (30) there is a threaded hole (31) which opens into the extension (30) at the side wall of the extension (30), and the valve rod (4) can be connected to the valve plate (1) by means of a respective retaining pin (39) which is screwed into the respective threaded hole (31) and protrudes with its end portion from the threaded hole (31) into the extension (30), with the end portion of the retaining pin (39) cooperating with a groove (32a) arranged in a connecting portion (32) connected to the end of the valve rod (4) or in a connecting portion (32) formed integrally with the valve rod (4) at the end of the valve rod (4).

Description

Technical Field

[0001] The present invention relates to a valve plate for a closing device that hermetically closes an opening provided in a wall, having a sealing ring on the front surface for sealing against the wall and a recess on the back surface for coupling to a valve rod of the closing device. Further, the present invention relates to a closing device comprising such a valve plate, the valve plate being coupled to a valve rod of the closing device.

[0002] A closing device for hermetically closing an opening provided in a wall may be formed, in particular, in the form of a vacuum valve. This vacuum valve has a valve housing in which the valve plate is disposed. One of the plurality of walls of this valve housing has an opening that can be closed by the valve plate, and another wall of the valve housing has another opening for forming a through passage that penetrates the valve housing in the open state of the vacuum valve. Another possibility for forming a closing device for hermetically closing an opening provided in a wall is a vacuum door that shields an opening provided in a vacuum chamber from an outer space surrounding the vacuum chamber (in this case, the vacuum door can also be regarded as a kind of vacuum valve). In this case, the opening that can be closed by the valve plate may be directly disposed on the wall of the vacuum chamber to which the closing device is attached. Thus, in this case, this wall does not form part of the closing device.

[0003] In vacuum valves and vacuum doors, it may sometimes be necessary to maintain the valve plate, particularly due to wear of the sealing ring disposed on the valve plate, which is used for sealing against a sealing surface disposed on a wall. In particular, this wear is relatively high when using erosive process gases such as those used in the semiconductor industry, for example. In order to maintain the valve plate, the valve plate must be removable from the valve rod. For this purpose, generally, a screw fastening is performed between the valve rod and the valve plate.

[0004] European Patent No. 0453857 describes a vacuum valve in which a coupling device for connecting a valve plate to a valve rod is screw-fastened to the back surface of the valve plate. In the same specification, in order to achieve uniform compression of an elastic seal ring positioned on the front surface of the valve plate, despite errors in the closed state of the vacuum valve, the coupling device has mobility not only around an axis parallel to the longitudinal direction of the valve plate, but also around an axis perpendicular to the longitudinal direction of the valve plate.

[0005] Previously, vacuum valves in the form of angle valves are known, in which one end of the valve rod has a male thread, and this male thread allows the valve rod to be directly screwed into a threaded blind hole formed on the back surface of the valve plate. In this previous use, the valve plate is not movable relative to the valve rod.

[0006] Another coupling device between the valve plate and the valve rod, which allows for the movement of the valve plate relative to the valve rod, is evident from U.S. Patent No. 7,134,642 and U.S. Patent No. 3,837,617. The valve plate shown in these patents has an opening on one narrow face of the valve plate to accommodate the end portion of the valve rod and / or part of the coupling device.

[0007] In industrially implemented vacuum processes, it is generally desirable to minimize the amount of particles emitted into the vacuum from the vacuum components used, in order to avoid compromising the quality of the vacuum process. However, many particles are generated and emitted when components are moved in a sliding motion relative to each other.

[0008] The object of the present invention is to improve upon the valve plate configuration described at the beginning and provide an advantageous valve plate that can be easily and reliably coupled to a valve rod, is detachable from the valve rod, and can be coupled directly to the valve rod or via a coupling device coupled to the valve rod. According to the present invention, this is achieved by a valve plate having the features of claim 1.

[0009] In the valve plate according to the present invention, a recess is located on the back surface of the valve plate opposite the front surface, and an extension portion extends from each of the two opposing side walls of the recess. A threaded hole is formed in the valve plate for each extension portion, and this threaded hole opens into the extension portion at the side wall of each extension portion. Each retaining pin is screwed into each threaded hole and protrudes from the threaded hole into the extension portion at its end, and the end of each retaining pin cooperates with a groove located in a coupling portion connected to the end of the valve rod or a coupling portion formed integrally with the valve rod at the end of the valve rod, thereby enabling the valve plate to be coupled to the valve rod. Therefore, in order to detach the valve plate from the valve rod, the retaining pin may be loosened until the end of the retaining pin is disengaged from one groove or each of the grooves.

[0010] Advantageously, the threaded holes mentioned above extend parallel to the plane on which the valve plate is located. In particular, the threaded holes are positioned at an angle greater than 45°, preferably 90°, with respect to the longitudinal direction of the valve plate.

[0011] The dimensions of the recess extensions are, advantageously, smaller than the dimensions of the recess (excluding these extensions) in the corresponding directions, when measured in any direction parallel to the plane on which the valve plate is located. The extensions originate from the recess of the valve plate and preferably extend in directions oriented toward each other, parallel to the longitudinal direction of the valve plate.

[0012] Advantageously, the valve plate has a sealing surface or such seal that surrounds the recess, including the expansion portion. Thus, a seal can be achieved between the valve plate and a coupling piece that is coupled to the end of the valve rod or formed integrally with the valve rod at the end of the valve rod, with at least one coupling portion protruding, via this sealing surface or seal. Thus, the inner chamber of the recess, including the expansion portion, can be sealed from the surrounding space that forms, for example, the inner chamber of the valve housing. If particles are formed during the sliding relative motion between members placed within the recess of the valve plate, these particles can be prevented from advancing out of this inner chamber by the seal.

[0013] The closing device according to the present invention has a valve plate according to the present invention, the valve plate is coupled to the valve rod of the closing device, and the retaining pin is engaged in at least one groove located in at least one coupling portion.

[0014] Preferably, a coupling piece with at least one protruding coupling portion is detachably coupled to the end of the valve rod. In particular, there may be some mobility between the coupling piece and the valve rod. Thus, the coupling piece may be part of a coupling device positioned between the valve plate and the valve rod. However, it is also conceivable and possible that the coupling piece is fundamentally formed integrally with the end of the valve rod.

[0015] The connecting piece advantageously has an extension that protrudes into a recess in the valve plate, and a rotation prevention means is formed between this extension and the valve plate. This can be achieved, in particular, by the extension of the connecting piece having an outer circumferential contour that is not circular, and this outer circumferential contour cooperating with the corresponding outer circumferential contour of the recess.

[0016] The groove into which the end portion of each retaining pin engages, or each groove, advantageously has a bevel that cooperates with the conically tapering end portion of each retaining pin (viewed in a cross-sectional view extending parallel to the longitudinal direction of each retaining pin and through the longitudinal central axis of each retaining pin). This causes the coupling piece to be pressed against the valve plate when the retaining pin is coupled to at least one coupling portion. This results in a stable coupling. In this case, it is also possible to compress the annular seal between the coupling piece and the valve plate, including the expansion portion surrounding the recess.

[0017] Further advantages and details of the present invention will be described below with reference to the accompanying drawings. [Brief explanation of the drawing]

[0018] [Figure 1] This is a partial perspective view of a closing device equipped with a valve plate according to the present invention in the open position. [Figure 2] This is a perspective view similar to Figure 1, showing the valve plate in the closed position. [Figure 3] This is a side view of the closing device in the open position of the valve plate. [Figure 4] This figure shows the closing mechanism in the open position of the valve plate. [Figure 5] This is a cross-sectional view along line AA in Figure 4. [Figure 6] This is a side view of the front end of a valve rod, which has a valve plate connected to the valve rod via a coupling device. [Figure 7] This is a perspective view of a valve plate coupled to a coupling device. [Figure 8] This is a perspective view from a different direction than Figure 7. [Figure 9] This is a perspective view showing the front end of the valve rod, the coupling device, and the valve plate in a disassembled state. [Figure 10] This is a plan view of the back surface of the valve plate. [Figure 11] This is a cross-sectional view along line AA in Figure 10. [Figure 12]It is a cross-sectional view taken along the line B-B in FIG. 10. [Figure 13] It is a plan view of the back surface of the valve plate to which the coupling device is coupled. [Figure 14] It is a cross-sectional view taken along the line C-C in FIG. 13. [Figure 15] It is a cross-sectional view taken along the line D-D in FIG. 13. [Figure 16] It is a cross-sectional view taken along the line E-E in FIG. 13. [Figure 17] It is a cross-sectional view taken along the line F-F in FIG. 13. [Figure 18] It is an exploded view of the coupling device. [Figure 19] It is an exploded view of the coupling device seen from a direction different from FIG. 18.

[0019] The drawings are shown partially simplified with different scales respectively.

[0020] Hereinafter, embodiments of the present invention will be described based on FIGS. 1 to 19.

[0021] A closing device is illustrated in the drawings. This closing device has a valve plate 1 that is displaceable between an open position (FIG. 1) and a closed position (FIG. 2). In the open position of this valve plate, an opening 2 provided in the wall 3 is open, and in the closed position, the opening 2 is hermetically closed by the valve plate 1.

[0022] Hermetic closure means a leakage rate Q of less than 10 -4 mbar l / s.

[0023] The valve plate 1 is supported by a valve rod 4 having a longitudinal axis 26. In this embodiment, the displacement of the valve plate 1 between the open position and the closed position is performed only by the axial displacement of the valve rod 4.

[0024] In this embodiment, a drive device 5 formed by a pneumatic piston cylinder unit is used to displace the valve rod 4 and move the valve plate 1 between the open and closed positions. The valve rod 4 is either coupled to the piston rod of this piston cylinder unit or formed integrally with the piston rod.

[0025] A seal ring 8 made of elastomer material is used to seal the space between the valve plate 1 and the wall 3 when the closing device is in the closed position. This seal ring 8 is provided on the front surface of the valve plate 1. The opening 2 provided in the wall 3 is surrounded by a sealing surface 13 that forms a sealing seat, which the seal ring 8 contacts when the valve plate 1 is in the closed position.

[0026] The seal ring 8 may be positioned in a groove provided on the front surface of the valve plate 1 and held within this groove, or it may be vulcanized and fixed to the front surface of the valve plate 1.

[0027] The wall 3 may be part of the valve housing, of which only a portion is shown in Figures 1 to 4. The remaining part of the valve housing is shown by a dashed line in Figure 5. Thus, this valve housing has an inner chamber in which the valve plate 1 is arranged. Furthermore, such a valve housing has a second opening 9, also shown in Figure 5, for example, an opening 9 located opposite opening 2, which forms a through passage that penetrates the valve housing when the valve plate 1 is in the open position. Thus, in this embodiment, the closing device also includes a valve housing with a wall 3 having opening 2, forming a vacuum valve.

[0028] The valve housing has another opening 11 through which the valve rod 4 is led out of the inner chamber of the valve housing. This opening 11 is vacuum-tightly closed by a connecting piece 10 to which the drive unit 5 is attached. The valve rod 4 passes through a through passage provided in the connecting piece 10 and is guided axially by the connecting piece 10. An annular seal 12 is used to seal the space between the valve housing and the connecting piece 10. In this embodiment, a bellows 6 is used to seal the valve rod 4 against the through passage provided in the connecting piece 10. For sealing, instead of a bellows, a mechanical seal with at least one seal ring may be provided.

[0029] In a modified embodiment, a closing device may be provided on the outside of the vacuum chamber wall, formed as shown in Figures 1 to 4, i.e., as shown in Figure 5 without the dashed line. In this case, the opening 2 aligns with the opening in this wall of the vacuum chamber, and the wall 3 is sealed against the wall of the vacuum chamber in the region surrounding the opening 2. In such applications, the closing device may also be called a door.

[0030] In yet another embodiment, the wall 3 having the opening 2 may be part of the vacuum chamber. Thus, the vacuum chamber has another opening corresponding to the illustrated opening 11, through which the valve rod 4 is led out of the inner chamber of the vacuum chamber and closed by a connecting piece 10. In this case, the drive unit 5 is also attached to the connecting piece, and the valve rod extends through a through passage provided in the connecting piece. The valve rod may also be sealed by a bellows (or mechanical seal) and guided into the vacuum region of the vacuum chamber. In other words, in this embodiment, the wall 3 having the opening 2 does not constitute part of the closing device.

[0031] The valve plate 1 is formed with a substantially rectangular outer contour. In this specification, "substantially rectangular" means that the valve plate is formed in a rectangular shape with rounded corners.

[0032] The opening 2 has a corresponding contour.

[0033] The valve plate 1 is located within a plane 14, which can also be called the central plane or main plane of the valve plate. The seal ring 8 extends parallel to this plane 14.

[0034] On the back surface of the valve plate 1, opposite to the front surface where the seal ring 8 is located, the valve plate has a protruding section 1a. A recess 29, which will be explained in more detail below, is provided in this protruding section 1a.

[0035] In this embodiment, the valve rod 4 is coupled to the valve plate 1 by a coupling device 15. This coupling device 15 allows for movement between the valve plate 1 and the valve rod 4. For this purpose, the coupling device 15 has a joint head 16. This joint head 16 is tightly coupled to the valve rod 4 and is located in a housing chamber 18 inside a housing-shaped joint body. The joint body comprises a coupling piece 17a having a pot-shaped notch and a cover portion 17b that closes the coupling piece and is sealed to the coupling piece by an annular seal 21. The cover portion 17b is coupled to the coupling piece 17a via a screw 22.

[0036] As will be explained in more detail below, the connection to the valve plate 1 is made via the connecting piece 17a.

[0037] The valve rod 4 is connected to the joint head 16 by a connecting screw 23. This connecting screw 23 passes through a central through hole 24 provided in the joint head 16 and is screwed into a threaded hole 25 provided at the end face side of the valve rod 4. In this case, the valve rod has a connecting section 4a having at least a substantially square cross-section, and the joint head 16 has a recess 16a having a corresponding outer contour, into which the connecting section 4a of the valve rod 4 protrudes, preventing the valve rod from rotating relative to the joint head.

[0038] To allow the connecting screw 23 to be screwed into the threaded hole 25 of the valve rod 4, the connecting piece 17a has a window opening 20 at its bottom.

[0039] The cover portion 17b has a window opening 27 through which the valve rod 4 protrudes in the end portion region. At the central position of the coupling device, where the valve plate 1 is oriented perpendicular to the longitudinal axis 26 of the valve rod 4 (i.e., the plane 14 on which the valve plate 1 is located is perpendicular to the longitudinal axis 26), an annular gap s exists between the valve rod 4 and the edge of the window opening 27 provided in the cover portion 17b. This allows the valve plate 1 to rotate (limited) around any axis perpendicular to the longitudinal axis 26 of the valve rod 4, starting from the central position.

[0040] Within the housing chamber 18 of the joint bodies 17a and 17b, a first joint socket portion 35 and a second joint socket portion 36 are arranged. These joint socket portions 35 and 36 each have concave joint surfaces 35a and 36a, respectively. These concave joint surfaces 35a and 36a each have the form of a section on the inner surface of a sphere. The concave joint surfaces 35a and 36a of the joint socket portions 35 and 36 are placed over the joint head 16 from opposite sides and cooperate with the convex joint surfaces 16b and 16c of the joint head 16, respectively. These convex joint surfaces 16b and 16c are each formed in the form of a section on a sphere and each constitutes a section on the outer surface of the joint head 16.

[0041] The joint socket portions 35 and 36 are pressed against the joint head 16 by a spring-elastic element 37 in the form of a spring disc. This spring-elastic element 37 is screw-fastened to the connecting piece 17a by a screw 38. The spring-elastic element 37 has a radial notch in a region following the opening 37a, and the segment separated by this notch is bent upward. In this region, the spring-elastic element 37 is in contact with the second joint socket portion 36, pressing this second joint socket portion 36 toward the joint head 16. This causes the joint head 16 to be pressed toward the first joint socket portion 35, which rests on the bottom surface of the bottom of a pot-shaped recess provided in the connecting piece 17a.

[0042] This ensures that the joint head is held in place by frictional connection precisely in the position shown. This frictional connection is strong enough to support the weight of the valve plate 1 without changing the position of the joint head 16 and without being affected by the spatial position of the closing device.

[0043] The opening 37a of the spring elastic element 37 is larger than the window opening 27 of the cover portion 17b. Therefore, in the joint head 16, the seal ring 19, which is positioned in the region surrounding the recess 16a, can pass through the opening 37a of the spring elastic element 37 and be pressed against the inner surface of the cover portion 17b in the region surrounding the window opening 27.

[0044] The joint head 16 has pins protruding from opposite sides. Each pin 16d protrudes into a corresponding groove 17c provided in the coupling piece 17a. Each groove 17c is formed in a wall that defines a pot-shaped notch. The grooves 17c extend parallel to the longitudinal axis 26 of the valve rod 4 at the central position of the coupling device.

[0045] The joint head 16 is prevented from rotating relative to the joint body about the longitudinal axis 26 of the valve rod 4 by a pin that cooperates with a groove. However, the joint head 16 can be tilted about any axis perpendicular to the longitudinal axis 26 of the valve rod 4 (until the annular gap s disappears).

[0046] Therefore, the coupling device forms a ball joint that is prevented from rotating about an axis located perpendicular to the equatorial plane of the joint head 16, that is, about the longitudinal axis 26 of the valve rod 4 coupled to the joint head.

[0047] A recess 29 is positioned in the protruding section 1a on the back surface of the valve plate 1. This recess 29 starts from the upper surface of the protruding section 1a, which is parallel to the plane 14 of the valve plate 1, and extends from this upper surface in a direction perpendicular to the plane 14 of the valve plate 1. The recess is defined by its bottom towards the front surface of the valve plate.

[0048] In the regions of the two side walls of the recess 29, which are located opposite each other, one extension 30 originates from each of the recesses 29. The dimensions of both extensions, when measured in any direction parallel to the plane 14 on which the valve plate is located, are significantly smaller, preferably less than half the size, of the dimensions of the recess 29 (excluding these extensions) when measured in the corresponding direction. The extensions 30 originate from the recess 29 in the opposite direction, which is parallel to the longitudinal extension direction of the valve plate.

[0049] Each side wall of the expansion portion has a threaded hole 31. In this embodiment, this threaded hole 31 is positioned parallel to the plane 14 of the valve plate and at a 90° angle to the longitudinal direction of the valve plate. The end of each threaded hole 31 opposite to the opening into each expansion portion 30 opens to the side surface of the protruding section 1a.

[0050] The connecting piece 17a has an extension 17e on the side facing away from the valve rod 4. This extension 17e is inserted into a recess 29 of the valve plate 1 while coupled to the valve plate 1. Therefore, the extension 17e protrudes into the recess 29 in a direction perpendicular to the plane 14 of the valve plate 1. This extension 17e of the connecting piece 17a has an outer peripheral contour that is different from a circle, and the recess 29 has a corresponding outer peripheral contour. This creates a rotation prevention means between the connecting piece 17a and the valve plate 1 (with respect to an axis perpendicular to the plane of the valve plate).

[0051] A stepped surface 17d is located between the extension 17e and the remaining portion of the connecting piece 17a. This stepped surface 17d contacts the upper surface of the protruding portion 1a of the valve plate 1 when the connecting piece 17a is connected to the valve plate 1. An annular seal 33 is positioned on the stepped surface 17d. This seal 33 is pressed against the sealing surface 34 of the valve plate 1 when connected to the valve plate 1. This sealing surface 34 surrounds the recess 29 together with the extension 30 and is positioned on the upper surface of the protruding portion 1a of the valve plate 1. Alternatively, the sealing surface 34 may be positioned on the stepped surface 17d and the annular seal 33 may be positioned on the valve plate 1.

[0052] A pin-shaped connecting portion 32 protrudes beyond the stepped surface 17d of the connecting piece 17a. For this reason, in this embodiment, the connecting portion 32 has a male thread. This male thread allows the connecting portion 32 to be screwed into each threaded hole 40 provided in the connecting piece 17a.

[0053] Therefore, in this embodiment, there are two pin-shaped connecting portions 32 corresponding to both existing extension portions 30. When the connecting piece 17a is inserted into the recess 29 with its extension portion 17e, one of the two pin-shaped connecting portions 32 protrudes into one extension portion 30, and the other connecting portion 32 protrudes into the other extension portion 30. The connecting portions protrude into each extension portion 30 in a direction perpendicular to the plane 14 of the valve plate.

[0054] A retaining pin 39 is screwed into the threaded hole 31. One end of each retaining pin 39, which is positioned parallel to the plane 14 of the valve plate 1, protrudes from the threaded hole 31 into the region of the respective expansion portion 30, where it protrudes into a groove 32a provided on the shaft of each connecting portion 32. The end portion of each retaining pin 39 is formed without threads and tapers conically toward its end. The groove 32a of the connecting portion 32 has a corresponding shape that tapers conically toward the bottom of the groove when viewed in cross-section (see Figure 17 in particular). Therefore, the side wall of each groove 32a opposite to the connecting piece 17a forms a slope that cooperates with the end portion of each retaining pin 39. Thus, when the retaining pin is screwed in with its end portion entering the groove 32a, the connecting piece 17a is pulled toward the valve plate 1. At this time, the seal 33 is compressed, and the stepped surface 17d of the connecting piece 17a comes into contact with the upper surface of the protruding section 1a of the valve plate 1.

[0055] Therefore, a stable and rigid bond is formed between the valve plate 1 and the connecting piece 17a, and this bond can be easily separated by loosening the retaining pin 39.

[0056] The housing chambers 18 of the joint bodies 17a and 17b are sealed by a seal 21 between the cover portion 17b and the connecting piece 17a, and by a seal ring 19 between the cover portion 17b and the joint head 16. The recess 29 of the valve plate 1 is sealed against the connecting piece 17a by a seal 33. This prevents particles generated during the movement of the joint head 16, particularly against the joint socket portions 35 and 36, from reaching the chambers surrounding the valve plate 1. Advantageously, the retaining pin 39 may also be sealed against the protruding portion 1a of the valve plate 1 by a seal, preferably in the area of ​​its head. This can be seen particularly in Figure 17 (seals are not reference numerals).

[0057] Various modifications to the illustrated embodiments of the present invention can be conceived and made without departing from the scope of the present invention as defined in the claims.

[0058] Therefore, the coupling device that creates mobility between the valve plate 1 and the valve rod 4 may be omitted. In this case, the coupling piece may be firmly coupled to the valve rod, for example, by screw fastening to the valve rod. In this case, the pot-shaped notch with a groove, the seal 21, and the threaded holes for the screws 22 and 38 may also be omitted. On the side opposite to the valve rod, such a coupling piece may be formed similarly to the coupling piece 17a shown in the drawing. Furthermore, an integrated configuration of the valve rod with such a coupling piece, for example by welding, is also conceivable and possible.

[0059] Instead of the protruding section 1a, the valve plate 1 may have a crossbeam on its back surface. This crossbeam is open to the plate-like main body of the valve plate 1 at a central section in its longitudinal direction and is coupled to the main body of the valve plate only at both ends. In this case, a recess 29 may be located in the central section in the longitudinal direction of the crossbeam of the valve plate. Such a crossbeam may be welded or screw-fastened to the main body of the valve plate at both ends. The recess is advantageously defined by a bottom facing the front surface of the valve plate. In this case, the interior chamber of the recess may be sealed to the surrounding space.

[0060] In another possible modified configuration, the pin-shaped coupling portion 32 may be omitted, and instead, the coupling piece 17a may have an extension having a shape that protrudes both into the recess 29 and into the lateral expansion portion 30. This extension may have a groove in the region protruding into the lateral expansion portion 30 that cooperates with the retaining pin 39, or it may have a single groove that surrounds the extension in an annular manner. In this case, the retaining pin 39 cooperates with each section of this groove. Thus, this extension constitutes a single coupling portion having at least one groove that cooperates with the end portion of each retaining pin. In such a configuration, the coupling piece 17a may be movable, rigidly coupled to the valve rod, or integrally formed with the valve rod.

[0061] Furthermore, the recess 29 may have more than two expansions, with the connecting portion or each connecting portion protruding from the valve rod side into these expansions. In this case, the end portion of the retaining pin protrudes into these expansions through the opening of the threaded hole and engages with at least one groove of at least one connecting portion. [Explanation of Symbols]

[0062] 1 Valve plate 1a Protruding section 2 aperture 3 walls 4 valve rod 4a Combined category 5. Drive unit 6 Bellows 8 sealing rings 9 aperture 10 connecting pieces 11 Aperture 12 stickers 13 Sealing surface 14 plane 15 Coupling device 16 Joint Heads 16a Recess 16b Joint surface 16c Joint surface 16d pin 17a Connecting piece 17b Cover section 17c groove 17d step surface 18 Confinement Rooms 19 Seal ring 20 Window openings 21 stickers 22 screws 23 Joint screws 24 Through holes 25 threaded holes 26 Longitudinal axis 27 Window openings 29 Recess 30 Expansion section 31 Threaded holes 32 Joining part 32a groove 33 Seals 34 Sealing surface 35 Joint socket part 35a Joint surface 36. Joint socket section 36a Joint surface 37 Spring elastic elements 37a aperture 38 screws 39 Retaining pins 40 threaded holes

Claims

1. A valve plate for a closing device that vacuum-seals an opening (2) provided in a wall (3), the valve plate having a sealing ring (8) on its front surface that seals against the wall (3), and a recess (29) on its back surface that connects to a valve rod (4) of the closing device, In the recess (29) located on the back surface of the valve plate (1), one extension (30) extends in at least the regions of the two side walls of the recess (29) that are facing each other. A valve plate characterized in that each expansion portion (30) has a threaded hole (31) which opens into the expansion portion (30) in the side wall of each expansion portion (30), and each retaining pin (39) is screwed into each threaded hole (31) and protrudes at its end from the threaded hole (31) into the expansion portion (30), so that the end portion of the retaining pin (39) cooperates with a groove (32a) located in a coupling portion (32) which is connected to the end of the valve rod (4) or the coupling portion (32) which is formed integrally with the valve rod (4) at the end of the valve rod (4), thereby enabling the valve rod (4) to be connected to the valve plate (1).

2. The valve plate according to claim 1, characterized in that the threaded hole (31) extends parallel to the plane (14) on which the valve plate (1) is located.

3. The valve plate according to claim 1 or 2, characterized in that the threaded holes (31) are each arranged at an angle greater than 45° with respect to the longitudinal direction of the valve plate (1).

4. The valve plate according to claim 3, characterized in that the threaded holes (31) are each arranged at an angle of 90° with respect to the longitudinal extension direction of the valve plate (1).

5. The valve plate according to any one of claims 1 to 4, characterized in that the dimensions of the extension portion (30) in any direction parallel to the plane (14) on which the valve plate (1) is located are smaller than the dimensions of the recess (29) excluding the extension portion (30) in the corresponding direction.

6. The valve plate according to any one of claims 1 to 5, characterized in that the extended portion (30) extends from the recess (29) provided in the valve plate (1) in directions parallel to the longitudinal extension direction of the valve plate (1) and oriented toward directions away from each other.

7. The valve plate (1) is characterized by having a sealing surface (34) or seal that surrounds the recess (29) including the expansion portion (30), and the sealing surface (34) or seal that seals the space between the valve plate (1) and a connecting piece (17a) that is attached to the end of the valve rod (4) or formed integrally with the valve rod (4) at the end of the valve rod (4), and from which at least one connecting portion (32) protrudes, according to any one of claims 1 to 6.

8. The valve plate according to any one of claims 1 to 7, characterized in that the recess (29), including the expanded portion (30), is located on the protruding portion (1a) of the valve plate (1) provided on the back surface of the valve plate (1).

9. A closing device comprising a valve plate (1) according to any one of claims 1 to 8, wherein the valve plate (1) is coupled to the valve rod (4) of the closing device, and the retaining pin (39) is engaged in at least one groove (32a) located in at least one of the coupling portions (32).

10. The closing device according to claim 9, characterized in that the connecting piece (17a) is detachably coupled to the end of the valve rod (4) or is integrally formed with the valve rod (4) at the end of the valve rod (4), and the at least one connecting portion (32) protrudes beyond the connecting piece (17a).

11. The closing device according to claim 10, characterized in that the connecting piece (17a) has an extension (17e), the extension (17e) protruding into the recess (29) of the valve plate (1), and is prevented from rotating relative to the valve plate (1) by an outer peripheral contour that is different from a circle and cooperates with the corresponding outer peripheral contour of the recess (29).

12. The closing device according to claim 10 or 11, characterized in that the at least one groove (32a) into which the end portion of the retaining pin (39) engages has a slope that cooperates with the conical tapering end portion of each retaining pin (39), and when the retaining pin (39) is coupled to the at least one coupling portion (32), the coupling piece (17a) is pressed against the valve plate (1).

13. The closing device according to any one of claims 10 to 12, characterized in that the connecting piece (17a) is sealed to the valve plate (1) by an annular seal (33) in a region surrounding the recess (29) including the expansion portion (30).

14. A closing device according to any one of claims 10 to 13, characterized in that each of the extended portions (30) of the recess (29) provided in the valve plate (1) has a connecting portion (32), the connecting portion (32) has a shaft portion that protrudes beyond the connecting piece (17a), and the shaft portion is annularly surrounded by each of the grooves (32a) into which the end portions of each of the retaining pins (39) protrude inward.

15. The closing device according to any one of claims 10 to 14, characterized in that the connecting piece (17a) is movably coupled to the valve rod (4).

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