Reticle stocker system and method using the same

Abstract

To provide a reticle stocker system and a method using the same.SOLUTION: The present invention discloses, a reticle stocker system and a method using the same. The reticle stocker system 600 according to the present invention comprises a storage facility 602 including a plurality of storage shelves 604, each of which is adapted to receive a dedicated reticle storage pod 100, and a robot arm 609 configured to move the dedicated reticle storage pod in cooperation with the storage facility. The dedicated reticle storage pod is used only for storage and movement within the storage facility. The storage facility includes a buffer region that is configured to place the one or more dedicated storage pads that has been cleaned or used.SELECTED DRAWING: Figure 4

Description

Technical Field

[0001] The present invention relates to a reticle storage pod and a reticle holding method, and more particularly to a reticle storage pod including an outer pod and an inner pod, and a reticle holding method in cooperation between the outer pod and the inner pod. The reticle storage pod is applicable to a reticle storage system and method.

Background Art

[0002] Currently, in the extreme ultraviolet (EUV) lithography process, a reticle needs to be protected by a reticle pod (EUV POD) having a conventional dual-pod structure including an inner pod (EIP) and an outer pod (EOP). To store the reticle, the reticle was placed in the inner pod, the inner pod was housed in the outer pod, and the entire conventional reticle pod was placed in a nitrogen cabinet and filled with nitrogen to store the reticle.

[0003] In addition, the conventional reticle pod is designed such that the inner pod containing the reticle can avoid particle contamination and damage to the reticle caused by vibration and deviation during long-distance transportation. In addition, since the conventional reticle pod is subjected to various tests and inspections, it can be configured to be appropriately loaded into different process apparatuses, so the structure of the inner pod becomes more complex than that of the outer pod, and the cost also becomes relatively high. When the inner pod of such a reticle pod designed for such a purpose is stored in a nitrogen cabinet for a long time, it does not conform to the usage benefit of the inner pod.

[0004] [[ID=I9]] Referring together to Figures 1 and 2, the conventional reticle pod (10) has a dual-pod structure and includes an inner pod (11) and an outer pod (12), with the inner pod (11) housing the reticle (R) and the outer pod (12) housing the inner pod (11). The inner pod (11) includes a base (20) and a lid (30) that fit together to seal and house the reticle (R). The outer pod (12) includes an outer base (40) and an outer lid (50), with the outer base (40) having support means for the inner pod (11), and the outer lid (50) and the outer base (40) joining together to define the housing space for the inner pod (11). The inside of the outer lid (50) is usually provided with appropriate pressing means to hold down the inner pod (11) when the outer lid (50) and outer base (40) are joined, thereby forming a stable housing. The outer base (40) generally further includes latching means for locking the outer lid (50) to the outer base (40). Since the transportation of such reticle pods (10) in a factory is carried out by an overhead crane system, the top of the outer lid (50) is fitted with a handle (52) that can be grasped by the crane arm. Therefore, conventional reticle pods (10) are disadvantageous for stacking storage due to the height of the handle (52), and the height of the handle (52) takes up additional storage space.

[0005] Furthermore, in typical designs, a conventional inner pod and a conventional outer pod have corresponding mating mechanisms. Therefore, a conventional outer pod can only be combined with its corresponding inner pod, but it cannot be adaptively combined with an inner pod of a different mechanism design. In other words, only compatible outer and inner pods can achieve the effect of stably housing the reticle. Using incompatible outer and inner pods will not achieve the expected stability. Considering manufacturing costs and storage efficiency, conventional outer pod designs have not been able to meet these requirements.

[0006] Therefore, the industry needs reticle storage pods and related methods suitable for long-term storage, as well as reticle storage systems and methods for storing dedicated reticle storage pods. Furthermore, the development of a single outer pod technology compatible with at least two different mechanical designs of inner pods according to the present invention would help reduce storage costs.

[0007] Known reticle pods feature a fixing mechanism that uses an external force applied by the inner pod, namely a hold-down pin. This mechanism can only act on the reticle within the inner pod when the inner pod is housed in the outer pod. For example, the top of the hold-down pin is exposed on the outside of the top of the inner pod. When transporting only the inner pod without the outer pod, the reticle's stability within the inner pod is lacking, making it susceptible to vibration and collisions.

[0008] Furthermore, when storing reticles in a dedicated reticle storage system for extended periods, it is necessary to remove the reticles from the dual-pod structure of the reticle pod and transfer them to the dedicated pod. For this reason, a compatible reticle loading system and related methods must also be developed before storing the reticles in the reticle storage system.

[0009] Furthermore, since reticles are suitable for high-precision manufacturing processes in semiconductor manufacturing equipment, and these expensive reticles must be stored in stockers for extended periods, they must meet stringent environmental conditions. Therefore, there was a need to develop a pipeline gas filling system and related methods for reticle stockers for long-term storage of reticles, as well as a reticle stocker management system and related methods suitable for scheduling the stocker system. [Overview of the project] [Problems that the invention aims to solve]

[0010] To accommodate a greater number of reticles in the same space, the present invention provides a storage means for increasing the efficiency of reticle storage. Specifically, the present invention provides a dedicated reticle storage pod that differs from known reticle pods. For the purpose of distinction, in this disclosure, the term “reticle pod” means a conventional reticle pod, and the term “reticle storage pod” means a dedicated reticle pod presented by the present invention in accordance with the improved efficiency of the storage means.

[0011] If the reticle storage pods are transported only between the storage shelves of the reticle loading system and the reticle stocker system, then a reticle storage pod design for this purpose does not require complex structures and processing, except for the need for protective mechanisms to prevent the intrusion of external particles, thus helping to reduce manufacturing costs. [Means for solving the problem]

[0012] An object of the present invention is to provide a reticle storage pod comprising a base portion having a plurality of supports arranged thereon, each support used to support a corner of a reticle, a pair of limiting blocks extending upward from each support, the pair of limiting blocks respectively located on both sides of the corner; and a plurality of elastic hold-down mechanisms arranged corresponding to each of the plurality of supports, each elastic hold-down mechanism comprising at least one elastic arm, the elastic arm acting on the corner of the reticle supported by the corresponding support, wherein when the cover is placed over the base portion to accommodate the reticle, the pair of limiting blocks restrict the lateral movement of the elastic arm.

[0013] In a specific embodiment, the support has a pair of inclined surfaces, and the pair of inclined surfaces are engaged with the lower edges on both sides of the corner.

[0014] In a specific embodiment, the elastic hold-down mechanism includes a body and a pair of elastic arms extending from the body in different directions, each elastic arm having a limiting portion and an inclined surface extending from the limiting portion, and the two inclined surfaces of the pair of elastic arms are respectively engaged with the upper edges on both sides of the corner.

[0015] In a specific embodiment, the pair of limiting blocks limit two limiting portions of the pair of elastic arms.

[0016] In a specific embodiment, the two inclined surfaces of the pair of elastic arms extend away from the limiting portion and are connected to each other.

[0017] Another object of the present invention is to provide a reticle storage pod comprising an inner pod comprising a lid, a base portion, and a holding mechanism, wherein the lid and the base portion are joined to define a storage space, and the holding mechanism is configured to hold a reticle in the storage space; and an outer pod comprising an outer lid and an outer base portion, wherein the outer lid and the outer base portion are joined to house the inner pod within the outer pod, wherein the outer lid has a flat top surface and a circumferential surface extending downward from the flat top surface, and at least a pair of handles are provided on the circumferential surface, and the pair of handles does not exceed the height of the flat top surface.

[0018] In a specific embodiment, the top surface of the outer base portion is provided with a plurality of positioning pins that support the base portion of the inner pod.

[0019] In a specific embodiment, the outer lid is provided with at least one hold-down mechanism that acts on the lid to hold the inner pod.

[0020] In a specific embodiment, the hold-down mechanism is a hold-down column that acts on the lid of the inner pod.

[0021] In a specific embodiment, the holding mechanism includes at least one support provided on the base portion and at least one elastic hold-down mechanism provided on the lid corresponding to the support, and when the outer lid and the outer base portion are joined to house the inner pod, the hold-down column is pressed against the elastic hold-down mechanism, causing the elastic hold-down mechanism to hold the reticle.

[0022] In a specific embodiment, the hold-down mechanism is a hold-down protruding rib, and when the outer lid and the outer base portion are coupled to house the inner pod, the hold-down protruding rib is pressed against the upper surface of the lid of the inner pod.

[0023] In a specific embodiment, a groove is formed on the upper surface of the lid at a location corresponding to the hold-down protruding rib, and when the outer lid and the outer base portion are joined to house the inner pod, the hold-down protruding rib is pressed against the corresponding groove.

[0024] In a specific embodiment, the hold-down protruding rib is pressed against the corresponding recessed groove, thereby stably positioning the lid and bonding it to the base portion.

[0025] In a specific embodiment, the holding mechanism includes at least one support provided on the base portion and at least one reticle retainer provided on the lid corresponding to the support and having at least one elastic arm, wherein when the lid and the base portion are joined to house the reticle, the support supports the corners of the reticle and the elastic arm of the reticle retainer engages with the corresponding corners, thereby the holding mechanism holding the reticle.

[0026] Another object of the present invention is suitable for storage in an outer pod provided with a plurality of hold-down mechanisms on its inner surface, and includes a lid, a base portion, and a plurality of holding mechanisms. When the lid and the base portion are coupled, a storage space is defined, and these holding mechanisms are configured to hold a reticle so as to be accommodated in the storage space. A reticle storage pod including an inner pod, wherein a plurality of concave grooves are formed at positions on the upper surface of the lid corresponding to the plurality of hold-down mechanisms respectively. When the inner pod is stored in the outer pod, the concave grooves of the lid are respectively engaged with the hold-down mechanisms corresponding thereto, and a pressing force is obtained to stably position the inner pod, thereby strengthening the holding of the reticle by the holding mechanism. The object is to provide a reticle storage pod.

[0027] In a specific embodiment, the concave groove has a bottom surface and a peripheral side surface surrounding the bottom surface, the peripheral side surface has a contour, and the lid exposes the holding mechanism on the lower surface of the concave groove.

[0028] In a specific embodiment, the hold-down mechanism is a hold-down convex rib having the contour corresponding to the concave groove. When the inner pod is stored in the outer pod, the hold-down convex rib is pressed against the bottom surface of the concave groove correspondingly.

[0029] A further object of the present invention is a reticle storage pod including an outer pod, the outer pod includes an outer lid and an outer base portion, the outer lid and the outer base portion are coupled to stably accommodate either a first inner pod or a second inner pod with different structures in the outer pod respectively, and the first inner pod and the second inner pod are each used to accommodate a reticle. At least one first hold-down mechanism and at least one second hold-down mechanism are provided on the outer lid, and the first hold-down mechanism and the second hold-down mechanism act on the lids of the first inner pod and the second inner pod with different structures respectively. The object is to provide a reticle storage pod.

[0030] In a specific embodiment, the first hold-down mechanism and the second hold-down mechanism extend from the lower surface of the outer lid at different heights so that the first hold-down mechanism and the second hold-down mechanism engage with the corresponding structures of the lids of the first and second inner pods, respectively, which have different structures.

[0031] In a specific embodiment, the first hold-down mechanism is a hold-down column, the second hold-down mechanism is a hold-down convex rib having a horseshoe-shaped contour, and the hold-down column is located inside the horseshoe-shaped contour of the hold-down convex rib.

[0032] In a specific embodiment, an elastic hold-down mechanism is provided at a location on the lid of the first inner pod corresponding to the first hold-down mechanism, and the elastic hold-down mechanism includes a hold-down pin, and when the first inner pod is housed in the outer pod, the hold-down column is pressed against the hold-down pin to hold the reticle housed in the first inner pod.

[0033] In a specific embodiment, the elastic hold-down mechanism includes a cap that restricts the hold-down pin, and when the first inner pod is housed in the outer pod, the horseshoe-shaped contour of the hold-down convex rib restricts the lateral movement of the cap.

[0034] In a specific embodiment, a groove is provided on the lid of the second inner pod at a location corresponding to the second hold-down mechanism, the groove having a bottom surface and a circumferential surface surrounding the bottom surface, and the circumferential surface having a horseshoe-shaped contour corresponding to the hold-down convex rib, and when the second inner pod is housed in the outer pod, the hold-down convex rib is pressed against the bottom surface of the groove, and the hold-down convex rib restricts the lateral movement of the lid.

[0035] Another object of the present invention is to provide a method for holding a reticle used in a reticle storage pod to hold a reticle, comprising the steps of: arranging a plurality of supports on the base of the reticle storage pod, each support having a pair of limiting blocks extending upward; arranging a plurality of elastic hold-down mechanisms on the lid of the reticle storage pod, each corresponding to the plurality of supports and each having at least one elastic arm; and when the lid and the base are joined to house the reticle, each support supports the corner of the reticle, the elastic arm of each elastic hold-down mechanism acts on the corresponding corner, and the pair of limiting blocks restrict the lateral movement of the elastic arm.

[0036] In a specific embodiment, the pair of limiting blocks are located on both sides of the corner, respectively.

[0037] In a specific embodiment, the elastic hold-down mechanism includes a main body and a pair of elastic arms, each elastic arm having a limiting portion and an inclined surface extending from the limiting portion.

[0038] In a specific embodiment, when the lid and the base are joined to house the reticle, the two inclined surfaces of the pair of elastic arms are engaged with the upper edges on both sides of the corner.

[0039] In a specific embodiment, the pair of elastic arms extend from different directions of the main body.

[0040] In a specific embodiment, the ends of the pair of elastic arms are connected together.

[0041] To better understand the present invention, you may refer to the following drawings and description. Non-limiting and non-exclusive embodiments will be described with reference to the following drawings. Note that the components in the drawings are not necessarily depicted to their actual size, but are drawn primarily for illustrative purposes of their structure and principle. [Brief explanation of the drawing]

[0042] [Figure 1] This is a disassembled side view of a conventional reticle storage pod. [Figure 2] This is a three-dimensional exploded view of a conventional inner pod and reticle. [Figure 3] This is a block diagram of the reticle stocker system of the present invention. [Figure 4] This is a three-dimensional diagram of the reticle stocker system of the present invention. [Figure 5A] This is an exploded side view of the reticle storage pod of the present invention. [Figure 5B] This is a three-dimensional view of the outer lid of the dedicated outer pod of the present invention. [Figure 5C] This is a three-dimensional view of the outer base portion of the dedicated outer pod of the present invention. [Figure 5D] This is an exploded view of the dedicated inner pod of the present invention. [Figure 5E] This is a top view of the lid of the dedicated inner pod of the present invention. [Figure 5F] This is a bottom view of the lid of the dedicated inner pod of the present invention. [Figure 5G] Figure 5E shows a cross-sectional view of the lid of the dedicated inner pod of the present invention along the dashed line. [Figure 5H] This is a top view of the base portion of the dedicated inner pod of the present invention. [Figure 5I] This is a bottom view of the base portion of the dedicated inner pod of the present invention. [Figure 5J] This is a cross-sectional view of the base portion of the dedicated inner pod of the present invention along the dashed line 5H. [Figure 5K] This is a three-dimensional view of the base portion of the dedicated inner pod of the present invention. [Figure 5L] This is a three-dimensional view of the corner portion of the base of the present invention. [Figure 5M] This is a three-dimensional view of another corner of the base portion of the present invention. [Figure 5N] This figure shows a reticle retainer provided on the inside of the lid of the present invention. [Figure 6A]This figure shows how the reticle retainer of the dedicated inner pod of the present invention and the corresponding support restrict the corners of the reticle. [Figure 6B] This is a partially enlarged diagram showing how the support of the present invention restricts the lateral movement of the reticle retainer. [Figure 7A] This is a three-dimensional diagram of the dedicated inner pod of the present invention. [Figure 7B] This is a cross-sectional view of the dedicated inner pod of the present invention along the dashed line in Figure 7A. [Figure 8A] This is a bottom view of the outer lid of the dedicated outer pod of the present invention. [Figure 8B] This is a magnified view of the hold-down mechanism that acts on the lid of the dedicated inner pod. [Figure 9A] Figure 5A is a cross-sectional view of the reticle storage pod when it is assembled. [Figure 9B] This is a partial enlarged view of the area indicated by the dashed line in Figure 9A. [Figure 10A] This is a three-dimensional diagram of a conventional reticle transport inner pod. [Figure 10B] This figure shows a hold-down mechanism acting on the corresponding mechanism of the lid of a conventional reticle transport inner pod. [Figure 10C] This is an enlarged view of the hold-down mechanism and the corresponding mechanism of the inner pod of the reticle pod. [Figure 11A] This is a cross-sectional view of the dedicated outer pod of the reticle storage pod of the present invention, which houses the dedicated inner pod. [Figure 11B] This is a cross-sectional view of the dedicated outer pod of the reticle storage pod of the present invention, which houses a non-dedicated inner pod. [Figure 12] This figure shows how the lid of the dedicated inner pod of the present invention overlaps with the lid of the inner pod of the reticle pod. [Figure 13] This is a three-dimensional external view of the reticle loading system of the present invention. [Figure 14] This is a schematic diagram of the reticle loading system of the present invention. [Figure 15] This is a load flowchart of the reticle storage method of the present invention. [Figure 16] This is an unload flowchart for the reticle storage method of the present invention. [Figure 17] This is a specific flowchart of the reticle transfer process according to the present invention. [Figure 18] This figure shows a reticle loading system according to a specific embodiment of the present invention. [Figure 19A] This figure shows a reticle clamping mechanism used in a reticle loading system according to a specific embodiment. [Figure 19B] This is a front view of the reticle clamping mechanism. [Figure 19C] This is a top view of the reticle clamping mechanism. [Figure 20] This diagram shows the cooperation between the reticle clamping mechanism and the lifting platform. [Figure 21] This is a flowchart illustrating the error handling process for the reticle loading system. [Figure 22] This is another error handling flowchart for the reticle loading system. [Figure 23] This is a flowchart illustrating the error handling process for the reticle clamping mechanism. [Figure 24] This is a block diagram of the reticle loading system and reticle stocker system of the present invention. [Figure 25] This is a top view of the reticle stocker system of the present invention (showing the specific arrangement inside the reticle stocker system). [Figure 26A] This is a three-dimensional view of a storage shelf according to a specific embodiment of the present invention. [Figure 26B] This diagram shows the bottom arrangement of the storage shelves. [Figure 27A] This diagram shows a storage shelf in the case of a reticle storage pod. [Figure 27B] This is a view from the bottom of a storage shelf that includes a reticle storage pod. [Figure 27C] This is a view of a storage shelf from a different perspective, in the case of a reticle storage pod. [Figure 28A]This is a top view of a storage rack and robot arm according to a specific embodiment (the robot arm is positioned below the reticle storage pod, and the positioning groove at the bottom of the reticle storage pod on the storage rack is indicated by a dashed line). [Figure 28B] This is a side view showing a robotic arm moving under a storage shelf and lifting a reticle storage pod. [Figure 28C] This is a side view showing a robotic arm retrieving a reticle storage pod from a storage shelf. [Figure 29] This diagram shows the upstream air supply pipeline and flow rate control means for the storage rack. [Figure 30] This diagram shows the upstream air supply pipeline connected to the storage rack according to two specific embodiments. [Figure 31] This is a flowchart illustrating the abnormality handling process for the robot arm of a reticle stocker system. [Figure 32] This is a schematic diagram of a reticle loading device and a reticle stocker system according to another embodiment of the present invention. [Figure 33] Figure 32 is a reticle load flowchart according to the embodiment shown. [Figure 34] Figure 32 is a reticle unload flowchart according to the embodiment shown. [Figure 35] Figure 32 is a specific reticle transfer flow diagram according to the embodiment. [Figure 36] This is a schematic diagram of the internal pod transfer flow. [Figure 37] This is a schematic diagram of a reticle loading device and a reticle stocker system according to another embodiment of the present invention. [Figure 38A] This is a diagram showing a storage room according to a specific embodiment. [Figure 38B] This diagram shows the arrangement of the upward-facing mounting surfaces inside the storage compartment. [Figure 38C] This diagram shows a single pod located inside the storage compartment. [Figure 38D] This diagram shows that the mounting mechanism of the storage compartment supports the bottom of the single pod. [Figure 39A]This is a reticle load flow diagram related to Figure 37. [Figure 39B] Figure 37 is a reticle unload flow diagram. [Figure 40] Figure 37 is a specific reticle transfer flow diagram according to an embodiment. [Figure 41A] This diagram illustrates an interaction embodiment between the robotic arm of the storage system and the storage chamber, and shows a flow chart of placing a pod into the storage chamber. [Figure 41B] This diagram illustrates an interaction embodiment between the robotic arm of the storage system and the storage chamber, and shows a flow chart of retrieving a pod from the storage chamber. [Figure 42A] This flowchart illustrates another interaction embodiment between the robotic arm of the storage system and the storage chamber, showing how to place a pod into the storage chamber. [Figure 42B] This flowchart illustrates another interaction embodiment between the robotic arm of the storage system and the storage chamber, showing the process of retrieving a pod from the storage chamber. [Figure 43] This is a schematic diagram of a reticle stocker pipeline gas filling system according to an embodiment of the present invention. [Figure 44] This is a schematic diagram of a reticle loading device and a reticle stocker system according to another embodiment of the present invention. [Figure 45A] Figure 44 is a reticle load flow diagram according to an embodiment. [Figure 45B] Figure 44 is a reticle unload flow diagram according to an embodiment. [Figure 46A] Figure 44 is another reticle load flow diagram according to the embodiment. [Figure 46B] Figure 44 is another reticle unload flow diagram according to the embodiment. [Modes for carrying out the invention]

[0043] The following will provide a more complete description of the present invention with reference to the drawings and will illustrate specific embodiments. However, the claimed subject matter may be specifically implemented in a variety of different forms, and therefore the configuration of the claimed subject matter of the application is not limited to the specific embodiments disclosed herein. The specific embodiments are merely illustrative. Similarly, the present invention is intended to provide a reasonably broad range of the claimed subject matter that is applied for or covered.

[0044] As used herein, the term "in one embodiment" does not necessarily refer to the same specific embodiment, and as used herein, the term "in several other / specific embodiments" does not necessarily refer to different specific embodiments. The claimed subject matter is intended to include all or one combination of specific embodiments.

[0045] In the following description of embodiments, the term “dedicated” refers to technical means presented in accordance with the storage problem that the present invention seeks to solve, such as a dedicated pod, a dedicated outer pod, or a dedicated inner pod. The term “non-dedicated” may be an existing or other novel inner or outer pod of a reticle, rather than a technical means relevant to the storage purpose. A non-dedicated pod as described herein can be understood as an existing reticle pod, such as the conventional dual pod shown in Figure 1, but this does not mean that a non-dedicated pod can only be an existing reticle pod. More specifically, a non-dedicated pod as described herein should be understood as a reticle pod not used for storage purposes, such as a reticle pod suitable for general transport purposes in a factory. This point will be explained first.

[0046] Figure 3 is a block diagram of the reticle stocker system of the present invention. The present invention provides a reticle storage means for storing reticles in a reticle pod 10. The reticle storage system includes a reticle loading system 200 and a reticle stocker system 600, the reticle loading system 200 being used to transfer reticles between the reticle pod 10 and the reticle storage pod 100, or to place an inner pod for housing reticles into the reticle pod 10 or the reticle storage pod 100. It should be understood that the reticle pod 10 described herein may refer to a conventional reticle pod or a reticle pod that works in conjunction with a factory overhead crane system. The reticle storage pod 100, unlike a conventional reticle pod, is a storage means presented by the present invention and dedicated to the reticle stocker system 600 of the present invention.

[0047] The reticle loading system 200 comprises a first port 202 connected to the factory environment and a second port 204 connected to the reticle stocker system 600. The first port 202 allows the reticle pod 10 to be transferred between the factory environment and the load environment provided by the reticle loading system 200, and the second port 204 allows the reticle storage pod 100 to be transferred between the load environment and the storage environment of the reticle stocker system 600. The first port 202 and the second port 204 may include valve means for independently separating the factory environment, the load environment and the storage environment. The first port 202 may be further configured to cooperate with an overhead crane system.

[0048] The reticle stocker system 600 includes one or more reticle storage racks (not shown) capable of storing multiple reticle storage pods 100, a reticle stocker control system 300 for placing and picking up the reticle storage pods 100, a reticle stocker gas filling pipeline system 400 used for the gaseous environment of each reticle storage rack, and a reticle stocker management system 500 responsible for all processes, which will be described in more detail later.

[0049] Figure 4 shows a specific external configuration of the reticle stocker system 600 of the present invention, where the reticle loading system 200 is adjacent to one side of the reticle stocker system 600, but the present invention is not limited thereto. The first port 202 of the reticle loading system 200 is basically upward-facing to facilitate vertical loading or picking of reticle pods 10 in cooperation with an overhead crane system. A second port (not shown) is located on the side of the reticle loading system 200 and faces the reticle stocker system 600 for horizontal loading or picking of reticle storage pods 100.

[0050] The reticle loading system 200 is configured to have identification means for the reticle pod 10 and the reticle storage pod 100, the identification means being used, for example, to identify RFID or two-dimensional codes on the inner and / or outer pods, and the RFID or two-dimensional code information may be associated with an identification number of the pod or reticle. The identification means may further include detecting through the pod's window whether the pellicle inside the pod is damaged and reading the two-dimensional code.

[0051] The first port 202 and the second port 204 correspond to different lifting means within the reticle loading system 200, respectively, that the reticle pod 10 and the reticle storage pod 100 are held by their respective lifting means after they enter the loading environment. The loading environment further includes reticle gripping means for transferring reticles between the reticle pod 10 and the reticle storage pod 100. Details relating to the lifting means and gripping means are described in the following paragraphs.

[0052] If the reticle loading system 200 is unavailable (for example, during maintenance), the reticle stocker system 600 can send the reticle storage pod 100 along with the required reticles to the second port 204. The reticle stocker system 600 provides a manually operated door through which an operator can remove the reticle storage pod 100 and safely retrieve the reticles under the protection of the reticle storage pod 100. A fan-filter unit (FFU) may be located at the top of the reticle stocker system 600 to draw in outside air for use with the reticle stocker system 600. A corresponding exhaust unit is also required.

[0053] Figure 5A is an exploded side view of the reticle storage pod of the present invention. The reticle storage pod of the present invention includes a dedicated inner pod and a dedicated outer pod. In a preferred embodiment of the present invention, the reticle storage pod 100 has a dual-pod structure and is used for storage shelves of the reticle stocker system 600 of the present invention. Despite being used exclusively for storage, the reticle storage pod 100 of the present invention has sealing means to protect the reticle, similar to the conventional reticle pod 10, i.e., the contact surfaces of the pod have excellent sealing and particle-blocking design.

[0054] The reticle storage pod 100 for the reticle stocker system 600 of the present invention includes a dedicated outer pod 102 and a dedicated inner pod 101. The dedicated outer pod 102 houses the dedicated inner pod 101, and stores the reticle R inside the dedicated inner pod 101. The dedicated outer pod 102 consists of an outer lid 150 and an outer base portion 160 (also called a door), and the dedicated inner pod 101 consists of a lid 110 and a base portion 130.

[0055] Compared to the conventional reticle pod 10 in Figure 1, the outer lid 150 of the reticle storage pod 100 of the present invention in Figure 5A does not need to be aligned with the overhead crane system, thus eliminating the need for handles 52 like those on the conventional reticle pod 10, and resulting in a lower overall height for the reticle storage pod 100. Also, compared to the conventional reticle pod 10 in Figure 1, the positioning pins 161 located inside the outer base portion 160 of the present invention in Figure 5A are relatively shorter, so the height of the outer lid 150 and outer base portion 160 of the present invention is smaller than the height of the outer lid 50 and outer base portion 40 of the conventional reticle pod 10 in Figure 1. To minimize the overall height of the reticle storage pod 100 of the present invention, the pair of handles 151 located on both sides of the outer lid 150 are not higher than the top surface of the outer lid 150. The shorter positioning pins 161 also allow for a lower height for the space housing the dedicated inner pod 101. Therefore, the overall height of the reticle storage pod 100 of the present invention is significantly lower than that of a conventional reticle pod 10, allowing the reticle stocker system 600 of the present invention to store more reticle storage pods 100 and reticles.

[0056] Figure 5B is a three-dimensional view of the outer lid 150 of the dedicated outer pod of the present invention, with the structural design for fitting with the overhead crane system omitted. The outer lid 150 has a flat top surface 152 and a circumferential surface extending downward from the flat top surface 152, with a handle 151 extending from the circumferential surface and being substantially no higher than the flat top surface 152, or only slightly higher than the flat top surface 152.

[0057] Figure 5C is a three-dimensional view of the outer base portion 160 of the dedicated outer pod of the present invention, in which a plurality of gas valves 162 and positioning grooves 163 are arranged at the bottom thereof. The gas valves 162 can be combined with specific connection ports for supplying a specific gas to the dedicated outer pod 102 or for discharging gas from the dedicated outer pod 102, and the positioning grooves 163 are used to position the dedicated outer pod 102 at a specific position in the device.

[0058] Figure 5D is an exploded view of the dedicated inner pod 101 of the present invention, which includes a lid 110, a base portion 130, and a retaining mechanism. The lid 110 and the base portion 130 are joined together to define a storage space, and the retaining mechanism supports and restricts the reticle R so that it is housed in the storage space. The top of the lid 110 is basically a flat surface and is provided with a filter membrane cover 112, and has a plurality of grooves 114 of a specific shape and arrangement formed therein, and this embodiment describes four grooves 114 of a specific shape and arrangement as examples.

[0059] Referring to Figures 5E to 5J, compared to the structure of the inner pod 11 of the reticle pod 10 in Figure 1, the holding mechanism of the dedicated inner pod 101 of the reticle storage pod 100 of the present invention is in contact with the chamfered portion of the reticle R. As shown in Figures 5F and 5H, the holding mechanism includes elastic hold-down mechanisms (i.e., reticle retainers 120) provided at the four corners on the inside of the lid 110 and four support members 134 provided on the upper side of the base portion 130, and the number and positional arrangement of the elastic hold-down mechanisms and support members 134 are designed to match the position of the groove 114 at the top of the lid 110. Thus, the positions of these reticle retainers 120 and support members 134 correspond to each other. When the lid 110 and the base 130 are joined to house the reticle (R), the four supports 134 and the corresponding reticle retainers 120 contact and restrict the four corners of the reticle R. Multiple gas passages are provided in the central part of the lid 110, and a filter membrane cover 112 is provided on the upper side to cover these gas passages. Specifically, as shown in Figure 5G, the filter membrane cover 112 is attached to a central recess on the top surface of the lid 110 to prevent it from protruding from the top surface of the lid 110. A pair of handles 111 extending outward from the sides of the lid 110 can interact with certain mechanisms during the lid opening operation of the reticle loading system 200, the relevant details of which are described in the following paragraphs.

[0060] Furthermore, the position of the groove 114 on the top of the lid 110 corresponds to the position of the reticle retainer 120. Therefore, when the dedicated inner pod 101 is housed in the dedicated outer pod 102, the groove 114 of the lid 110 can engage with the hold-down mechanism provided on the inside of the outer lid 150, thereby providing the lid 110 with a pressing force, which reinforces the coupling of the dedicated inner pod 101 and the retention of the reticle R. Related details are described in the following paragraphs.

[0061] Compared to the inner pod 11 of the reticle pod 10 in Figure 1, the dedicated inner pod 101 of the reticle storage pod 100 of the present invention provides more stable storage of the reticle R. The outer lid 150 of the dedicated outer pod 102 applies an external force to the top surface of the lid 110 of the dedicated inner pod 101, prompting the elastic hold-down mechanism (i.e., the reticle retainer 120) provided on the inner surface of the lid 110 to stably press against the four corners of the reticle R. More specifically, to secure the reticle during long-distance transport, the reticle pod 10 in Figure 1 applies an external force from the outer lid 50 of the outer pod 12 to the elastic hold-down mechanism provided on the lid 30 of the inner pod 11, causing the elastic hold-down mechanism to act on the top surface of the reticle. In other words, the outer lid 50 in Figure 1 does not act on the lid 30.

[0062] Compared to the base portion 20 of the inner pod 11 of the reticle pod 10 in Figure 1, the base portion 130 of the dedicated inner pod 101 of the reticle storage pod 100 of the present invention omits the complex structure of the base portion 20, and these omitted complex structures may include reflective laser engraving on the bottom surface of the base portion 20, some window frames and stepped structures. The base portion 130 of the present invention does not require additional processing work, thereby significantly reducing costs, and the bottom surface of the base portion 130 is a flat surface except for the placement of the positioning groove 132 and window W. The base portion 130 is equipped with a window W for detecting the two-dimensional code and pellicle on the reticle R. The bottom surface and sides of the base portion 130 are continuous flat surfaces, and such a stepless design is convenient for purging and cleaning.

[0063] Furthermore, the depth of the pellicle groove 131 on the base portion 130 is greater than the depth of the pellicle groove on the base portion 20 in Figure 1, improving the air exchange efficiency within the pod, increasing the rate of reduction of relative humidity (RH%), and providing advantages for long-term storage of the reticle. As shown in Figure 6A, a circumferential groove 133 is formed in the base portion 130, and four supports 134 are provided in the circumferential groove 133 at positions corresponding to the four corners of the reticle R. After the lid 110 and the base portion 130 are airtightly coupled, the configuration of the circumferential groove 133 helps to capture particles entering the pod.

[0064] Figure 5K is a three-dimensional view of the base portion 130 of the dedicated inner pod of the present invention, and Figures 5L and 5M are enlarged views of the support 134 arranged in the circumferential groove according to the dashed lines in Figure 5K.

[0065] Figure 5N shows a reticle retainer 120 provided inside the lid 110 of the present invention. The elastic hold-down mechanism of the lid 110 of the present invention can be implemented by the reticle retainer 120 shown in Figure 5N. The reticle retainer 120 includes a body 121 and a pair of elastic arms 122 extending in different directions from both sides of the body 121, with one end of each elastic arm 122 connected to the body 121 and the other end connected to a limiting portion 123. One end of the limiting portion 123 is connected to an elastic arm 122 and the other end is connected to an inclined surface 124. These two inclined surfaces 124 extend upward from the limiting portion 123 and the ends of the two inclined surfaces 124 that are separated from the limiting portion 123 are connected. Specifically, the ends of these two inclined surfaces 124 are both connected to a pressing portion 125, but the present invention is not limited thereto, and for example the pressing portion 125 may be omitted.

[0066] The body 121 of the reticle retainer 120 is provided with screw holes, and the reticle retainer 120 can be fixed to the inside of the cover 110 by known fastening means. The two inclined surfaces 124 connecting the pair of elastic arms 122 are used to contact the upper edges on both sides of the corner of the reticle, respectively. In this embodiment, the limiting portion 123 is basically a structure that extends horizontally, and by aligning with the support 134 shown in Figures 5L and 5M, it restricts the lateral movement of the pair of elastic arms 122, thereby having the effect of limiting the shaking of the corner of the reticle.

[0067] Figure 6A shows a reticle retainer 120 and corresponding support 134 of the dedicated inner pod of the present invention for restricting and supporting the corners of the reticle. Figure 6B is a partially enlarged view of the support 134 of the present invention for restricting the lateral movement of the reticle retainer 120.

[0068] The four support members 134 of the base portion 130 of the present invention are each provided within circumferential grooves 133 at the four corners of the base portion 130 and are used to support the corresponding corners of the reticle R. Each support member 134 has two support portions projecting upward from within the circumferential grooves 133, and each support portion has an inclined surface 135 that faces the reticle R and slopes downward toward the reticle R. The pair of inclined surfaces 135 are basically orthogonal, as shown in Figure 6A, and each contacts and engages with the lower edges on both sides of the corresponding corners of the reticle R. Restriction blocks 136 extend upward from the top end of each support portion of the support member 134. The restriction blocks 136 are located at the top end of the inclined surface 135 and do not interfere with the reticle R. When the reticle R is placed on the support member 134, the two restriction blocks 136 of each support member 134 are located on both sides of the corners of the reticle R. As shown in Figures 6A and 6B, when the cover 110 and the base 130 are joined, the two limiting blocks 136 of each support 134 are located outside the limiting portion 123 of the reticle retainer 120, respectively, and restrict the lateral movement of the limiting portion 123 connected to the pair of elastic arms 122. Thus, when the cover 110 and the base 130 are joined, the two limiting portions 123 of the reticle retainer 120 are confined between the two support portions of each support 134, restricting the lateral movement of the pair of limiting portions 123 and reducing the vibration of the reticle retainer 120. In other possible embodiments, the limiting blocks 136 may be located inside the limiting portion 123. Preferably, as shown in Figure 6B, there is a buffer space between the limiting portion 123 and the limiting blocks 136 to prevent the generation of particles due to hardware friction.

[0069] Figure 7A is a three-dimensional view of the dedicated inner pod of the present invention, and Figure 7B is a cross-sectional view of the dedicated inner pod of the present invention along the dashed line in Figure 7A. Compared to the inner pod 11 structure of the reticle pod 10 in Figure 1, the dedicated inner pod 101 of the present invention has no specific bonding direction between the lid 110 and the base 130, the top surface of the lid 110 is a large flat surface without a stepped structure, meaning that the entire lid 110 has a significant reduction in structures such as grooves and edges. Designs such as laser marking, windows, counterweight blocks, and stepped structures are also significantly reduced or eliminated from the bottom surface of the base 130, so the lid 110 and base 130 of the dedicated inner pod 101 of the present invention help to reduce processing steps, facilitate manufacturing, and improve yield. In addition, the base 130 has a pellicle groove 131 with increasing depth, which allows for better exchange efficiency of internal and external air in the storage space of the dedicated inner pod 101 and helps to control the relative humidity RH% of the storage space.

[0070] Furthermore, the holding mechanism of the dedicated inner pod 101 of the present invention includes a chamfered portion of the reticle edge that aligns with a pair of elastic arms 122 of the reticle retainer 120, and a pair of limiting portions 123 that restrict the reticle retainer 120 with a pair of limiting blocks 136 of the support 134, thereby holding the reticle. The support 134 and the reticle retainer 120 also help to guide the reticle by contacting the reticle through the inclined surface 135, thereby preventing marks from being left on the upper and lower surfaces of the reticle, maintaining the horizontal position of the reticle. The contact surface between the lid 110 and the base portion 130 can form a sealed contact via known means. In this embodiment, the contact surface of the base portion 130 is lower than the highest surface of the base portion 130, and the contact surface and the highest surface of the base portion 130 are separated by the circumferential groove 133, which helps to prevent particles from entering the pellicle area.

[0071] Figure 8A is a bottom view of the outer lid 150 of the dedicated outer pod 102 of the present invention, showing that there are four hold-down mechanisms. Figure 8B shows details of the hold-down mechanisms and the hold-down mechanisms acting on the lid 110 of the dedicated inner pod, with the outer lid 150 omitted from the image. Figure 9A is a cross-sectional view of the reticle storage pod 100 in Figure 5A when assembled. Figure 9B is a partially enlarged view of the area indicated by the dashed line in Figure 9A.

[0072] When housing a dedicated inner pod 101 that arranges these hold-down mechanisms inside the dedicated outer pod 102 of the present invention, the outer lid 150 applies a pressing force to the dedicated inner pod 101 housed in the dedicated outer pod 102. Referring together to Figures 5B and 5C, the dedicated outer pod 102 of the present invention includes an outer lid 150 and an outer base portion 160. The hold-down mechanisms further provided by the present invention can be used to house inner pods of different structures, namely the inner pod 11 in Figure 2 or the dedicated inner pod 101 in Figure 5D. In this embodiment, the inner pods of different structures are shown by the dedicated inner pod 101 of the present invention and the inner pod 11 of the reticle pod 10, both having different arrangements on the top surfaces of the lids 110, 30, but the present invention is not limited to these two inner pods.

[0073] The positions of each hold-down mechanism on the inner, downward-facing surface of the outer lid 150 substantially correspond to the positions for holding the four corners of the reticle of the dedicated inner pods 101, 11 of different structures. Each hold-down mechanism includes a first hold-down mechanism and a second hold-down mechanism, the first hold-down mechanism being configured to apply a pressing force only to the lid 30 of the inner pod 11 of the reticle pod 10, but not to the lid 110 of the dedicated inner pod 101 of the present invention. In contrast, the second hold-down mechanism being configured to apply a pressing force only to the lid 110 of the dedicated inner pod 101 of the present invention, but not to the lid 30 of the inner pod 11 of the reticle pod 10. Furthermore, the present invention is not limited to the first and second hold-down mechanisms being separate elements or a single element formed integrally.

[0074] Referring to Figure 8A, the hold-down mechanism of the present invention is positioned on the downward surface of the outer cover 150 and substantially corresponds to the corners of the reticle. In this embodiment, the first hold-down mechanism is a horseshoe-shaped hold-down rib 153, and the second hold-down mechanism is a hold-down column 154, both of which may be made of elastic material. Specifically, the horseshoe-shaped hold-down rib 153 is a curved U-shaped extension, and the hold-down column 154 is located inside the horseshoe-shaped hold-down rib 153, or the hold-down column 154 is surrounded by the horseshoe-shaped hold-down rib 153. The hold-down column 154 in this embodiment has a Y-shaped structure, but the present invention is not limited thereto.

[0075] Referring to Figure 8B, the first hold-down mechanism can be fitted into the groove 114 of the lid 110, and the horseshoe-shaped hold-down rib 153 is of a predetermined size and shape. When the dedicated inner pod 101 is housed in the dedicated outer pod 102 of the reticle storage pod 100 of the present invention, the horseshoe-shaped hold-down ribs 153, which are positioned on the inner surface of the outer lid 150 of the dedicated outer pod 102, are fitted into the corresponding grooves 114 of the lid 110, and the lower surface of the horseshoe-shaped hold-down rib 153 is in contact with the bottom surface of the groove 114, so that the weight of the outer lid 150 acts on the lid 110 via the horseshoe-shaped hold-down rib 153, but the hold-down column 154 cannot contact the bottom surface of the groove 114 due to its size. As shown in Figures 9A and 9B, when the outer lid 150 is connected to the outer base 160 to accommodate the dedicated inner pod 101, the vertical dimension of the horseshoe-shaped hold-down rib 153 is larger than the vertical dimension of the hold-down column 154. As a result, the lower end of the horseshoe-shaped hold-down rib 153 fits into the groove 114 and contacts the bottom surface of the groove 114, and the hold-down column 154 is suspended in the groove 114. In other words, when the dedicated outer pod 102 accommodates the dedicated inner pod 101, the hold-down column 154 does not act on the lid 110. Furthermore, the side walls of the groove 114 restrict the lateral movement of the horseshoe-shaped hold-down rib 153, preventing the dedicated inner pod 101 from swaying laterally in the dedicated outer pod 102.

[0076] Figure 10A is a three-dimensional view of the inner pod 11 for reticle transport. Figure 10B shows the hold-down mechanism acting on the corresponding mechanism of the lid 30 of the inner pod 11 of the reticle pod 10, with the outer lid 150 omitted. Figure 10C is an enlarged view of the hold-down mechanism and the corresponding mechanism of the inner pod 11 of the reticle pod 10.

[0077] An elastic hold-down mechanism is provided on the lid 30 of the inner pod 11, corresponding to a position approximately corresponding to the corner of the reticle. The elastic hold-down mechanism includes a hold-down pin 32 and a cap 34 that secures the hold-down pin 32. Specifically, the top end of the hold-down pin 32 is exposed on the top of the lid 30, and the lower end of the hold-down pin 32 extends downward inward into the lid 30 and is exposed to the storage space of the inner pod 11. When the inner pod 11 houses the reticle and a pressing force is applied to the top end of the hold-down pin 32, the hold-down pin 32 is forcibly lowered, and the reticle is held in place by bringing the lower end of the hold-down pin 32 into contact with the upper surface of the reticle.

[0078] When the dedicated outer pod 102 of the reticle storage pod 100 of the present invention houses the inner pod 11 shown in Figure 10A, the hold-down mechanism provided on the inner surface of the outer lid 150 of the dedicated outer pod 102 can act on the elastic hold-down mechanism of the inner pod 11. Specifically, as shown in Figure 10B, because the vertical dimensions of the horseshoe-shaped hold-down rib 153 and the hold-down column 154 are different, the bottom end of the hold-down column 154 of the hold-down mechanism can abut against the exposed top end of the hold-down pin 32. This allows the weight of the outer lid 150 to press down on the exposed top surface of the hold-down pin 32 via the hold-down column 154, while the horseshoe-shaped hold-down rib 153 surrounds the cap 34 and does not act on the lid 30. As shown in Figure 10C, the inner wall of the horseshoe-shaped hold-down rib 153 restricts the lateral movement of the cap 34, thereby preventing the inner pod 11 from swaying laterally in the dedicated outer pod 102.

[0079] The purpose of the Y-shaped structure of the hold-down column 154 in this embodiment is to create structural interference between the hold-down column 154 and the cap 34, preventing the reticle from being subjected to inappropriate force by the hold-down column 154 excessively pressing down on the hold-down pin 32. Preferably, there is adequate buffer space between the horseshoe-shaped hold-down rib 153 and the cap 34, which prevents the generation of particles due to hardware friction.

[0080] Figure 11A is a cross-sectional view of a dedicated outer pod 102 of the reticle storage pod of the present invention, which houses a dedicated inner pod 101. Figure 11B is a cross-sectional view of a dedicated outer pod 102 of the reticle storage pod of the present invention, which houses a non-dedicated inner pod 11. That is, the dedicated outer pod 102 provided by the present invention includes a hold-down mechanism consisting of two structures, so that it can house not only a dedicated inner pod 101 presented for storage purposes, but also a conventional inner pod 11 widely used in the art. For these two different configurations and intended uses of inner pods 11, 101, such a hold-down mechanism can provide a uniformly stable housing effect.

[0081] Figure 12 shows how the lid 110 of the dedicated inner pod 101 and the lid 30 of the non-dedicated inner pod 11 of the present invention overlap. The volume of the groove 114 is larger than the volume of the cap 34 of the elastic hold-down mechanism, and the height of the top of the hold-down pin 32 of the elastic hold-down mechanism is higher than the bottom surface of the groove 114. The vertical step H shown in the figure is such that when the dedicated inner pod 101 or the non-dedicated inner pod 11 is housed in the dedicated outer pod 102, the horseshoe-shaped hold-down rib 153 presses against the bottom surface of the groove 114, or the bottom surface of the hold-down column 154 of the outer lid 150 presses against the top end of the hold-down pin 32. In other words, in order to accommodate the dedicated inner pod and the non-dedicated inner pod, the vertical dimensions of the first hold-down mechanism (horseshoe-shaped hold-down rib 153) and the second hold-down mechanism (hold-down column 154) provided on the inside of the outer lid 150 of the present invention basically have a height difference similar to that of a vertical step H.

[0082] Figure 13 is a three-dimensional external view of the reticle loading system 200 of the present invention. Figure 14 is a schematic layout diagram of the reticle loading system 200 of the present invention.

[0083] The reticle loading system 200 of the present invention supports the E84 standard and includes a first port 202 that enables loading or unloading of reticle pods 10, and a second port 204 that is connected to a connecting passage of the reticle stocker system 600 in Figure 4 and enables loading or unloading of reticle storage pods 100. Specifically, the factory's overhead crane system can cooperate with the first port 202 to load the reticle pods 10 into or remove the reticle pods 10 from the reticle loading system 200. The second port 204 can cooperate with a robotic arm in the reticle stocker system 600 to transfer the reticle storage pods 100 between the reticle stocker system 600 environment and the reticle loading system 200 environment. In this embodiment, the second port 204 is located on the back side of the reticle loading system 200 and is therefore not shown in Figure 13.

[0084] The reticle loading system 200 is configured to include identification and inspection means for the reticle pods 10 and reticle storage pods 100, such as RFID reading means for the pods or reticles, two-dimensional code reading means, and reticle pellicle inspection means.

[0085] The first port 202 and the second port 204 correspond to the first and second lifting means, respectively. In this embodiment, the first lifting means A mainly controls a lifting platform to place the reticle pod 10 on, and the second lifting means B mainly controls another lifting platform to place the reticle storage pod 100 on. The first lifting means A can keep the lifting platform at different vertical heights A0, A1, and A2, from high to low. Similarly, the second lifting means B can keep the lifting platform at different vertical heights B0, B1, and B2, from high to low. As shown in Figure 14, the reticle pods 10 and 100 located at heights A0 and B0 are both in an open state, the reticle pods 10 and 100 located at heights A1 and B1 are both in an open state (not shown), and the reticle pods 10 and 100 located at heights A2 and B2 are both open, with one of them exposing the reticle. More specifically, when the reticle pods 10 and 100 are located at heights A1 and B1, the outer lid and inner lid are separated from the outer base and inner base by the lid-opening means. More specifically, when the reticle pod 10 and the reticle storage pod 100 are positioned at heights A2 and B2, only the outer base and inner base of each remain on the lifting platform, and the inner and outer covers are blocked, so they do not descend to heights A2 and B2, and at this time the reticle can be positioned in the reticle transfer environment 206.

[0086] The conditions of the reticle transfer environment 206 can differ from heights A0, A1, B0, and B1 in order to ensure that the risk of reticle transfer is low. The reticle transfer environment 206 includes a reticle clamping mechanism configured to pick up the reticle from the base or place the reticle on the base and transfer the reticle between the base of the reticle pod 10 and the base of the reticle storage pod 100.

[0087] Furthermore, the robotic arm within the reticle stocker system 600 can pick up the reticle storage pod 100 in the reticle loading system 200 via the second port 204. If the reticle loading system 200 malfunctions and becomes inoperable, and the reticle storage pod 100 is still inside, the robotic arm of the reticle stocker system 600 can temporarily remove the reticle storage pod 100, thereby preventing the dedicated pod of the reticle stocker system 600 from being contaminated by repairs to the reticle loading system 200.

[0088] To ensure a certain level of cleanliness in the environment within the reticle loading system 200, a fan-filter unit (FFU) for intake, filtration, and exhaust is provided above the stocker, as shown in Figure 13.

[0089] Figures 15 and 16 are reticle loading and unloading flowcharts according to the embodiment of Figure 14.

[0090] Step 1500A: Load the reticle pod 10, which includes an inner pod containing a reticle and an outer pod containing the inner pod, via the first port 202. The reticle is either unused or used and therefore needs to be stored. The inner pod and outer pod may correspond to the inner pod 11 and outer pod 12 in Figure 1, respectively.

[0091] Step 1500B: Load a reticle storage pod 100 from the reticle stocker system 600, which includes an empty dedicated inner pod and a dedicated outer pod containing the dedicated inner pod. The reticle stocker system 600 stores multiple reticle storage pods 100. In the above step, an empty dedicated pod is loaded. The dedicated inner pod and dedicated outer pod may correspond to the dedicated inner pod 101 and dedicated outer pod 102 in Figure 5A.

[0092] Step 1502: The reticle loading system 200 detects the reticle pod 10 and the reticle storage pod 100, respectively, performs the lid-opening operation of the inner and outer pods of the reticle pod 10, performs the lid-opening operation of the dedicated outer pod and dedicated inner pod of the reticle storage pod 100, and lowers the outer base of the reticle pod 10 and the outer base of the reticle storage pod 100 into the reticle transfer environment 206. Specifically, this step can cover the heights A0-A2 and B0-B2 of the first lifting means A and the second lifting means B in Figure 14.

[0093] Step 1504: The reticle is picked up from the base of the reticle pod 10 and transferred to the base of the reticle storage pod 100. This transfer is carried out by a reticle gripping mechanism, and the reticle is moved within a highly clean reticle transfer environment 206 to reduce the risk of reticle contamination.

[0094] Step 1506: Return the reticle pod 10 and the reticle storage pod 100 to the closed position. At this time, the reticle pod 10 is empty, and the reticle storage pod 100 contains reticles waiting to be stored.

[0095] Step 1508: The reticle storage pod 100 containing the reticle is transported to a storage shelf designated by the reticle stocker system 600. Preferably, the designation of the storage shelf is based on the shortest travel path of the robot arm between the storage shelf and the second port 204 in Figure 14.

[0096] Step 1510: The gas filling means is executed to fill the reticle storage pod 100 with a non-reactive gas to complete the storage of the reticle. Specifically, the storage rack is equipped with a dedicated conduit and connector connected to the reticle storage pod 100, and can be filled with nitrogen gas into the dedicated outer pod of the reticle stocker system 600. In other words, the dedicated inner pod to be stored is stored under a specific gaseous atmosphere.

[0097] Step 1600A: Load the reticle pod 10, which includes an empty inner pod and an outer pod containing the inner pod, from the first port 202. The inner pod and outer pod may correspond to the inner pod 11 and outer pod 12 in Figure 1.

[0098] Step 1600B: A reticle storage pod 100, which includes a dedicated inner pod containing reticles and a dedicated outer pod containing the inner pod, is loaded from the reticle stocker system 600 into the reticle loading system 200. The dedicated inner pod and dedicated outer pod may correspond to the dedicated inner pod 101 and dedicated outer pod 102 in Figure 5A. In this step, the reticles are pre-stored in the reticle stocker system 600 and retrieved for various applications.

[0099] Step 1602: The reticle loading system 200 detects the reticle pod 10 and the reticle storage pod 100, respectively, opens the inner and outer pods of the reticle pod 10, opens the inner and outer pods of the reticle storage pod 100, and lowers the outer bases of the reticle pod 10 and the reticle storage pod 100 into the reticle transfer environment 206.

[0100] Step 1604: The reticle is picked up from the base of the reticle storage pod 100 and placed on the base of the reticle pod 10. Similarly, the reticle loading system 200 transfers the reticle from the base of the reticle storage pod 100 to the base of the reticle pod 10 using the reticle clamping mechanism, and the reticle is moved in the reticle transfer environment 206.

[0101] Step 1606: Return the reticle pod 10 and the reticle storage pod 100 to the closed position. At this time, a reticle is placed in the reticle pod 10, and the reticle storage pod 100 is an empty pod.

[0102] Step 1608: The reticle pod 10 containing the reticle is removed from the reticle loading system 200 via the first port 202. Specifically, the first port 202 can be used in cooperation with the overhead crane system to remove the reticle pod 10. The empty reticle storage pod 100 is returned to an appropriate area of ​​the reticle stocker system 600 and awaits use the next time.

[0103] Figure 17 is a specific flowchart of the reticle transfer process according to the present invention. The following explanation will be given in conjunction with Figure 14, where the left half is performed by the first lifting means A, the right half by the second lifting means B, and the remainder is performed jointly.

[0104] Step 1700A: The reticle pod 10, including the inner pod and the outer pod containing the inner pod, is loaded from the first port 202 into the first lifting means A of the reticle loading system 200. Specifically, the lifting platform of the first lifting means A stops at a height A0 to receive and place the reticle pod 10.

[0105] Step 1700B: The reticle stocker system 600 loads the reticle storage pod 100, which includes a dedicated inner pod and a dedicated outer pod housing the inner pod, into the second lifting means B of the reticle loading system 200 via a connecting passage. Specifically, the lifting platform of the second lifting means B stops at a height B0 to receive and place the reticle storage pod 100.

[0106] Step 1702A: The lid of the outer pod of the reticle pod 10 is grasped, and in the process of lowering the lifting platform of the first lifting means A from height A0 to height A1, the lid of the outer pod and the base of the outer pod are separated. When the lifting platform is at height A1, the lid of the outer pod is removed, and only the base of the outer pod and the inner pod remain on the lifting platform.

[0107] Step 1702B: The lid of the outer pod of the reticle storage pod 100 is grasped, and in the process of lowering the lifting platform of the second lifting means B from height B0 to height B1, the lid of the outer pod and the base of the outer pod are separated. When the lifting platform is at height B1, the lid of the outer pod is removed, and only the base of the outer pod and the inner pod remain on the lifting platform.

[0108] Step 1704A: The lid of the inner pod of the reticle pod 10 is grasped, and as the lifting platform of the first lifting means A is lowered from height A1 to height A2, the lid and base of the inner pod are separated. When the lifting platform is at height A2, the lid of the inner pod is removed, and only the base of the outer pod and the base of the inner pod remain on the lifting platform. While the lifting platform is lowering from height A0 to height A2, the reticle loading system 200 can read the two-dimensional code of the inner pod, the two-dimensional code of the reticle, and / or detect the pellicle state in a timely manner.

[0109] Step 1704B: The lid of the inner pod of the reticle storage pod 100 is grasped, and in the process of lowering the lifting platform of the second lifting means B from height B1 to height B2, the lid and base of the inner pod are separated. When the lifting platform is at height B2, the lid of the inner pod is removed, and only the base of the outer pod and the base of the inner pod remain on the lifting platform. While the lifting platform is lowering from height B0 to height B2, the reticle loading system 200 can read the two-dimensional code of the inner pod, the two-dimensional code of the reticle, and / or detect the pellicle condition in a timely manner.

[0110] Step 1706: The reticle is transferred between the base of the inner pod of the reticle pod 10 and the base of the inner pod of the reticle storage pod 100 using the reticle clamping mechanism of the reticle loading system 200. Specific embodiments of the reticle clamping mechanism can be seen in Figures 19A to 19C and their descriptions.

[0111] Step 1708A: In the process of raising the lifting platform of the first lifting means A from height A2 to height A1, the lid of the inner pod of the reticle pod 10 is connected to the base of the inner pod.

[0112] Step 1708B: In the process of raising the lifting platform of the second lifting means B from height B2 to height B1, the lid of the inner pod of the reticle storage pod 100 is connected to the base of the inner pod.

[0113] Step 1710A: In the process of raising the lifting platform of the first lifting means A from height A1 to height A0, the lid of the outer pod of the reticle pod 10 is connected to the base of the outer pod.

[0114] Step 1710B: In the process of raising the lifting platform of the second lifting means B from height B1 to height B0, the lid of the outer pod of the reticle storage pod 100 is connected to the base of the outer pod.

[0115] Step 1712A: The reticle pod 10 is moved out via the first port 202. The lifting platform of the first lifting means A is higher than height A0, exposing the reticle pod 10 to the first port 202 of the reticle loading system 200, and awaiting the subsequent operation of the overhead crane system.

[0116] Step 1712B: The reticle storage pod 100 is loaded into the reticle storage system 600 via the connecting passage of the reticle storage system 600. The robotic arm of the reticle storage system 600 can enter the reticle loading system 200 and pick up the reticle storage pod 100 from the second lifting means B.

[0117] In the above-described embodiment, the first lifting means A and the second lifting means B can each perform the following specialized customized operations on the reticle pod 10 and the reticle storage pod 100, for example, the first lifting means A may be configured to perform locking and unlocking on the outer pod of the reticle storage pod 100.

[0118] Figure 18 shows a reticle loading system according to a specific embodiment of the present invention, which has a first lifting means A and a second lifting means B as shown in Figure 14. The first lifting means A has an outer pod lid support surface 1800A, which is in contact with basically only the lid of the outer pod of the reticle pod 10, that is, the outer pod lid support surface 1800A has a hollow portion in the center from which the base of the outer pod falls. The base of the outer pod of the reticle pod 10 is supported by a lifting platform 1802A. Therefore, if the outer pod of the reticle pod 10 is not locked, the lifting platform 1802A is lowered to separate the lid and base of the outer pod, and the base of the outer pod is lowered together with the inner pod, thereby achieving the objective of opening the pod. Closing the pod is similar; as the lifting platform 1802A rises to a height where it is almost flush with the outer pod lid support surface 1800A, the outer pod lid of the reticle pod 10 is connected to the base.

[0119] The second lifting means B may have a similar configuration for operating the reticle storage pod 100. Figure 18 shows only the open state of the outer pod of the reticle pod 10, but the inner pod of the reticle pod 10 can also be opened by the intervention of other mechanisms. The reticle storage pod 100 can also be opened and closed by the same mechanism. Furthermore, the reticle loading system 200 can be provided with an appropriate identification device or sensing unit to promptly identify relevant information on the pods, such as RFID and two-dimensional codes, when the reticle pod 10 and the reticle storage pod 100 are opened.

[0120] Figures 19A, 19B, and 19C show a reticle clamping mechanism 1900 used in a reticle loading system according to a specific embodiment. The reticle clamping mechanism 1900 is located within the reticle transfer environment 206 shown in Figure 14 and comprises a rail 1902 and a clamping assembly 1904. The rail 1902 is fixed inside the reticle loading system 200 and is controlled so that the clamping assembly 1904 can move horizontally on the rail 1902, as shown in Figure 20. The clamping assembly 1904 comprises a pair of clamping arms 1906 and a pair of contact plates 1908. The pair of contact plates 1908 can be driven to move closer to each other and are coupled to the periphery of the reticle R via an engagement portion 1910 to achieve the purpose of clamping the reticle R. Since the reticle clamping mechanism 1900 does not have the ability to move vertically, the reticle R can be separated from the base by lowering the lifting platform.

[0121] Figure 20 is a side view showing the cooperation of the reticle clamping mechanism 1900 and the lifting platform 2000. As shown in the right-hand diagram in Figure 20, the lifting platform 2000, on which the outer base portion 40 of the outer pod 12, the base portion 20 of the inner pod 11, and the reticle (not shown) are placed, descends below the reticle clamping mechanism 1900. Next, the clamping assembly 1904 moves horizontally to above the reticle R placed on the lifting platform 2000. As shown in the left-hand diagram in Figure 20, the lifting platform 2000 rises to a height where the reticle can be clamped. After the clamping assembly 1904 has clamped the reticle, the lifting platform 2000 descends. The clamping assembly 1904g moves horizontally onto another lifting platform (not shown). Similarly, another lifting platform rises to a height where the base portion of the inner pod can place the reticle. The clamping assembly 1904 releases the reticle and completes the transfer. While the reticle clamping mechanism 1900 is not operating, the clamping assembly 1904 can be moved between the two lifting means to prevent interference of movement. The dashed line in Figure 20 shows that the clamping assembly 1904 is kept at the same height during the movement process.

[0122] Figure 21 shows the abnormal handling flow of the reticle loading system, more specifically, the loading abnormal handling flow of the reticle pod 10 by the lifting platform of the first lifting means A or the second lifting means B in Figure 14.

[0123] If the reticle pod 10 stops operating due to a loading error, the reticle loading system 200 can display the abnormal state and detect whether the initialization key is enabled. When the initialization key is enabled, the entire reticle loading system 200 is initialized. The lifting platform returns the reticle pod 10 to height A0.

[0124] If the reticle storage pod 100 stops operating due to a loading error, the reticle loading system 200 can display the abnormal condition and detect whether the initialization key is activated. When the initialization key is activated, the entire reticle loading system 200 is initialized. The lifting platform returns the reticle storage pod 100 to height B0.

[0125] If the lifting platforms of the first lifting means A and the second lifting means B, located at heights A2 and B2, stop operating due to a transfer malfunction, the reticle loading system 200 can display the abnormal state and detect whether the initialization key is enabled. When the initialization key is enabled, the entire reticle loading system 200 is initialized. The reticle clamping mechanism 1900 places the reticle into the inner pod of the reticle pod 10 or the inner pod of the reticle storage pod 100. The lifting platforms of the first lifting means A and the second lifting means B are returned to heights A0 and B0, respectively.

[0126] Figure 22 shows another abnormality handling flow of the reticle loading system 200, which further includes checking the pellicle status. The reticle loading system 200 can detect whether the eject key is enabled and various actions are being performed to return the reticle to the reticle pod 10 or the reticle storage pod 100, or to return the reticle storage pod 100 to a designated storage shelf.

[0127] Figure 23 shows the abnormal handling flow of the reticle gripping mechanism. Depending on whether the reticle is from the inner pod of the reticle pod 10 or the inner pod of the reticle storage pod 100, the reticle gripping mechanism 1900 can return the reticle to the inner pod of the reticle pod 10 or the inner pod of the reticle storage pod 100, and then return the reticle pod 10 or the reticle storage pod 100 to the position specified in the initialization flow.

[0128] Figure 24 is a block diagram of the reticle loading system and reticle stocker system of the present invention. The reticle stocker system 600 includes one or more storage units 602. The storage unit 602 includes a plurality of vertically stacked storage shelves 604. The storage unit 602 is roughly divided into an upper area and a lower area. A reticle storage pod 100 can be placed in each storage shelf 604 of the storage unit 602, and the reticle storage pod 100 consists of a dedicated outer pod and a dedicated inner pod, the dedicated outer pod being suitable for housing and securing the dedicated inner pod, and the dedicated inner pod being suitable for housing and securing the reticle. The dedicated inner pod and dedicated outer pod can correspond to the dedicated inner pod 101 and dedicated outer pod 102 shown in Figure 5A.

[0129] Some of the storage shelves 604 in the storage unit 602 may be configured as a buffer zone (606). The buffer zone 606 is used to store cleaned reticle storage pods 100 or used reticle storage pods 100. Cleaned reticle storage pods 100 are empty pods that are provided to the reticle loading system 200 and await receiving reticles awaiting storage. Used reticle storage pods 100 are empty pods that have been returned from the reticle loading system 200 and are at risk of contamination because they are exposed to a low-cleanliness environment during the reticle transfer process.

[0130] The reticle stocker system 600 includes control means 608 configured to manage reticle information stored primarily in the storage chamber 602 and to monitor the ambient temperature and humidity inside the storage chamber 602. For example, an oxygen detection unit detects the oxygen concentration of the chamber environment. Preferably, the environment inside the storage chamber 602 meets Class 10 cleanliness and the filling gas meets Class 1 cleanliness. The reticle stocker system 600 further includes control means 610 for controlling a robotic arm 609 to transport reticle storage pods to storage shelves 604 in a designated general storage area or buffer area 606. The reticle stocker system 600 further includes flow control means 612 used to control various flow rates in the storage chamber 602, and in particular connected to the non-reactive gas in each storage shelf 604. For example, a mass flow controller controls the flow rate of one or more nitrogen gas main lines. The flow rate control means 612 further includes a fan-filter unit (FFU) located at the top of the reticle stocker system 600 and a ventilation module located at the bottom of the reticle stocker system 600.

[0131] The reticle stocker system 600 further includes a washing device 614 for providing clean reticle storage pods 100 to the storage unit 602, which is close to the buffer area 606, and for receiving used reticle storage pods 100 from the storage unit 602.

[0132] Figure 25 is a top view of the reticle stocker system 600 of the present invention, showing the specific arrangement inside the reticle stocker system. The storage compartments 602 are mainly arranged along the inner walls of the reticle stocker system 600, and a robotic arm 609 is located in the center of the reticle stocker system 600, allowing it to access each of the storage shelves 604 in these storage compartments 602.

[0133] Figure 26A is a three-dimensional view of a storage shelf 604 according to a specific embodiment of the present invention. Figure 26B is a diagram showing the bottom arrangement of the storage shelf 604.

[0134] Each storage shelf 604 is a flat shelf having a front end 2600 and a rear end 2602. The shelf has an upward-facing mounting surface and a downward-facing bottom surface. A notch is formed in the front end 2600 of the shelf, which provides space necessary for the operation of the robot arm 609, allowing the robot arm 609 to smoothly place the reticle storage pod 100 on the storage shelf 604 or pick up the reticle storage pod 100 from the storage shelf 604. The rear end 2602 of the shelf has an upstream end connected to a nitrogen gas source and a downstream end connected to a pair of nozzles 2606 on the flat shelf, and a nitrogen gas filling pipeline 2604 for supplying nitrogen gas is also provided.

[0135] Each storage shelf 604 is provided with three kinematic coupling pins 2608 on its mounting surface to support the bottom of the reticle storage pod 100. Two of the kinematic coupling pins 2608 are located near the front end 2600, on either side of the notch, and the third kinematic coupling pin 2608 is located at the rear end 2602 of the shelf. The storage shelf 604 primarily supports and positions the reticle storage pod 100 via these three kinematic coupling pins 2608. Specifically, these three kinematic coupling pins 2608 correspond to the positioning grooves 163 of the outer base shown in Figure 5C or the positioning grooves 132 of the base 130 shown in Figure 5I, and are determined by whether the storage shelf 604 supports the outer pod or the inner pod of the dedicated pod.

[0136] A stopper 2610 is provided on the mounting surface of the storage shelf 604 to restrict the reticle storage pod 100. Preferably, identification information for the robot arm 609 is displayed on the stopper 2610. The information can also be displayed on the front end 2600 of the storage shelf 604. As shown in the figure, side walls are formed on both sides of the shelf body to restrict the reticle storage pod 100. Both sides of the storage shelf 604 are fixed to a wall surface or a vertical branch of a frame by a pair of connecting arms 2612 to construct a vertical stack of multiple storage shelves 604. The kinematic coupling pin 2608, stopper 2610 and side walls can be made of PEEK plastic material to reduce particles generated by friction.

[0137] Figure 27A shows the storage shelf 604 with the reticle storage pod 100. Figure 27B is a view from the bottom of the storage shelf 604 with the reticle storage pod 604. Figure 27C is a view of the storage shelf 604 from a different perspective with the reticle storage pod 100.

[0138] As shown in Figure 5A, the reticle storage pod 100 includes a dedicated inner pod 101 and a dedicated outer pod 102, the dedicated outer pod 102 comprising an outer lid 150 and an outer base portion 160. A latch mechanism 2700 for locking or unlocking the outer lid 150 and the outer base portion 160 is located at the bottom of the outer base portion 160. When the reticle storage pod 100 is loaded onto the lifting platform of the reticle loading system 200 shown in Figure 14, an operating mechanism provided on the second lifting means B cooperates with the latch mechanism 2700 of the outer base portion 160 to lock or unlock the dedicated outer pod 102.

[0139] When the reticle storage pod 100 is placed on the designated storage shelf 604, the kinematic coupling pin 2608 of the storage shelf 604 engages with the corresponding positioning groove 163 at the bottom of the reticle storage pod 100, positioning the reticle storage pod 100 on the storage shelf 604. Specifically, the kinematic coupling pin 2608 of the storage shelf 604 is located at the outer end of the corresponding positioning groove 163, i.e., the end away from the latch mechanism 2700, and the inner end of each positioning groove 163 closer to the latch mechanism 2700 is exposed through a notch, so that when the robot arm 609 approaches the bottom of the reticle storage pod 100, the positioning pin 2804 of the robot arm 609 can engage with the near end of the corresponding positioning groove 163.

[0140] Figure 28A is a top view of a storage shelf 604 and a robot arm 609 according to a specific embodiment. The robot arm 609 is positioned below the reticle storage pod 100, and the positioning groove 163 at the bottom of the reticle storage pod 100 on the storage shelf 604 is shown by a dashed line. Figure 28B is a side view when the robot arm 609 moves under the storage shelf 604 and lifts the reticle storage pod 100. Figure 28C is a side view when the robot arm 609 removes the reticle storage pod 100 from the storage shelf 604.

[0141] The robot arm 609 has a front end 2800 and a rear end 2802. The front end 2800 is basically an arrow-shaped flat plate with three positioning pins 2804 on its upward mounting surface. These three positioning pins 2804 correspond to the inner ends of a positioning groove 163 at the bottom of the reticle storage pod 100, and the kinematic coupling pins 2608 of the storage shelf 604 engage with the outer ends of the positioning groove 163. In other words, the positioning groove 163 at the bottom of the reticle storage pod 100 of the present invention extends at least from the flat shelf body of the storage shelf 604 to the notch, but the present invention is not limited thereto. The rear end 2802 is connected to a transmission mechanism, so that the robot arm 609 can move at least in the lateral and longitudinal directions.

[0142] As shown in Figures 28A and 28B, as the robot arm 609 approaches the reticle storage pod 100, the front end 2800 of the robot arm 609 first extends below the notch in the target storage shelf 604, and the positioning pin 2804 of the robot arm 609 aligns with the corresponding positioning groove 163 at the bottom of the reticle storage pod 100.

[0143] The robot arm 609 rises to engage the positioning pin 2804 with the positioning groove 163 at the bottom of the reticle storage pod 100. As shown in Figure 28C, the robot arm 609 continues to rise, lifting the reticle storage pod 100 from the storage shelf 604 at least above the height of the front end 2600 of the storage shelf, allowing the robot arm 609 to retract from the storage shelf 604.

[0144] Once the minimum space required for the robotic arm 609 to access each reticle storage pod 100 is determined, maximum storage efficiency is achieved by minimizing the height between the upper and lower storage shelves 604.

[0145] Figure 29 shows the upstream air supply line 2900 and flow rate control means of the storage rack. The downstream of the air supply line 2900 is connected to the gas filling line 2604 shown in Figure 26A. Thus, nitrogen gas can be supplied into the pod via the nozzle 2606 of the storage rack 604 and the two corresponding gas valves 162 of the reticle storage pod 100 shown in Figure 5C. Two other unconnected gas valves 162 of the reticle storage pod 100 have convection gas in the reticle storage space of the reticle storage pod 100 on the storage rack 604 to discharge gas from inside the pod. The flow control means upstream of each air supply line 2900 may include, but is not limited to, a ball valve 2901, a flow display 2902, a restrictor valve 2903, a filter 2904, a thermometer / hygrometer 2905, a mechanical pressure gauge 2906, an electronic pressure gauge 2907, a pressure regulating valve 2908, and a main line 2909 having a pressure gauge 2910 and an air valve 2911.

[0146] Figure 30 shows the upstream air supply pipeline connected to the storage rack 604 according to two specific embodiments. In the configuration with a flow controller 3000, one or more sensors provided on the storage rack 604 transmit detection signals to the flow controller 3000 based on the presence or absence of a reticle storage pod 100 on the storage rack 604, allowing the flow controller 3000 to control the gas flow rate entering the storage rack 604 based on this. For example, when there is a dedicated pod on the storage rack 604, nitrogen gas is supplied, and when there is no dedicated pod on the storage rack 604, the nitrogen gas supply is turned off. In the configuration with a needle valve 3002, the gas flow rate supplied to the storage rack 604 can be manually adjusted and can also be maintained in a continuous air supply state. Regardless of the gas used, the filter 3001 ensures a reduction in impurities in the gas.

[0147] Figure 31 shows the abnormality handling flow of the robot arm 609 of the reticle stocker system 600, which includes inspecting the pellicle condition and, depending on the pellicle condition, selectively causing the reticle pod (non-dedicated pod) or reticle storage pod (dedicated pod) to perform specific actions to return it to a designated position.

[0148] Figure 32 is a schematic diagram of a reticle loading device 200' and a reticle stocker system 600' according to another embodiment of the present invention. In this embodiment, each storage shelf 604 of the storage unit 602 supplies only the dedicated outer pod 102 of the reticle storage pod 100 shown in Figure 5A, and does not provide the dedicated inner pod 101 of the reticle storage pod 100. However, the dedicated outer pod 102 can accommodate the inner pod obtained from the reticle loading system 200', i.e., the inner pod 11 of the non-dedicated reticle pod 10 shown in Figure 1. Therefore, the purpose of the reticle loading system 200' in this embodiment is to transfer the inner pod containing the reticle. The remaining configuration is substantially the same as the embodiment in Figure 24, and related explanations are omitted. Details of the reticle loading system 200' and the reticle stocker system 600' will be described later.

[0149] The reason why the reticle stocker system 600' of this embodiment does not supply a dedicated inner pod is that the dedicated outer pod 102 of the reticle storage pod 100 of the present invention is equipped with the hold-down mechanism shown in Figure 8A and is compatible with non-dedicated inner pods. As shown in Figures 8A and 11B, when the dedicated outer pod 102 of the storage unit 602 accommodates a non-dedicated inner pod 11, the horseshoe-shaped hold-down ribs 153 of the dedicated outer pod 102 surround and restrict the cap 34, and the hold-down columns 154 abut against the hold-down pins 32 on the lid 30 of the inner pod 11, thereby enabling the storage of the non-dedicated inner pod 11 and the reticle. This has the advantage of reducing the risk of particle contamination because the reticle is not exposed to the environment outside the pod during the transfer process.

[0150] Figure 33 is a reticle load flowchart according to the embodiment of Figure 32, where the left half is executed by the first lifting means A and the right half is executed by the second lifting means B.

[0151] Step 3300A: The reticle pod 10, including the inner pod 11 and outer pod 12 containing the reticle, is loaded into the reticle loading system 200' from the first port 202, either by the overhead crane system or manually. The loaded reticle pod 10 is received at height A0 by the lifting platform of the first lifting means A.

[0152] Step 3300B: The dedicated outer pod 102 of the dedicated pod is loaded from the reticle stocker system 600' to the reticle loading system 200' via the second port 204. The dedicated outer pod 102 loaded here is an empty pod that does not contain an inner pod. Specifically, the robotic arm 609 of the reticle stocker system 600' places the dedicated outer pod 102 on the lifting platform of the second lifting means B, i.e., at height B0.

[0153] Step 3302: Detect the reticle pod 10 and the dedicated outer pod 102 (for example, information to be displayed on or inside the pod body and the state of the reticle pellicle). Lower the lifting platforms of the first lifting means A and the second lifting means B to heights A2 and B2, respectively. During the lowering process, the non-dedicated outer pod 12 and the dedicated outer pod 102 are opened by similar mechanisms. The lifting platform of the first lifting means A, at heights A2 and B2, supports only the outer base portion 40 and the inner pod 11, while the lifting platform of the second lifting means B supports only the outer base portion 160 of the dedicated pod, and both are in the reticle transfer environment 206. In this embodiment, since it is not necessary to open the inner pod 11, the reticle transfer environment 206 only needs to satisfy the cleanliness requirement of the inner pod to be transferred. Furthermore, since this embodiment does not require opening the inner pod 11 to transfer the reticle, the first lifting means A and the second lifting means B can omit the target-related operations of heights A1 and B1 compared to the embodiment in Figure 14.

[0154] Step 3304: The clamping mechanism of the reticle loading system 200' picks up the inner pod 11 and transfers the inner pod 11 to the outer base portion 160 of the dedicated pod. The clamping mechanism can be similar to the configuration in Figure 19A, but is suitable for the inner pod 11. The operation of the clamping mechanism is similar to the description in Figure 20.

[0155] Step 3306: After the transfer of the inner pod 11 is complete, as the lifting platforms of the first lifting means A and the second lifting means B rise to heights A0 and B0, the non-dedicated outer pod 12 is closed and the dedicated outer pod 102 is closed to house the inner pod 11.

[0156] Step 3308: The dedicated outer pod 102 containing the inner pod 11 is stored in the designated storage shelf 604 of the storage unit 602. The reticle stocker system 600' can designate the target storage shelf 604 according to the shortest movable path of the robot arm 609.

[0157] Step 3310: The storage rack 604 fills the dedicated outer pod 102 with nitrogen gas. Similarly, the dedicated outer pod 102 and the storage rack 604 of this embodiment may be configured as in the embodiments of Figures 27A and 27B to achieve gas filling.

[0158] Figure 34 is a reticle unload flowchart according to the embodiment of Figure 32, where the left half is performed by the first lifting means A and the right half is performed by the second lifting means B.

[0159] Step 3400A: Load an empty outer pod 12 of the non-dedicated reticle pod 10 from the first port 202. The loaded outer pod 12 has no inner pod inside and is placed on the lifting platform of the first lifting means A at a height A0.

[0160] Step 3400B: A dedicated outer pod 102 is loaded from the reticle stocker system 600' via the second port 204, and the loaded dedicated outer pod 102 houses the inner pod 11 containing the reticle. The loaded dedicated outer pod 102 and inner pod 11 are placed at a height B0 by the lifting platform of the second means B.

[0161] Step 3402: Similarly, the first lifting means A and the second lifting means B detect the non-dedicated outer pod 12, the dedicated outer pod 102, and the inner pod 11. The outer pod 12 and the dedicated outer pod 102 are opened, and the outer base portion 40 of the outer pod 12 and the outer base portion 160 of the dedicated outer pod 102 are lowered to heights A2 and B2, respectively, to position the inner pod 11 in the reticle transfer environment 206.

[0162] Step 3404: The inner pod 11 is picked up and transferred onto the outer base portion 40 of the outer pod 12. This transfer is performed in the reticle transfer environment 206 or another environment with a cleanliness suitable for inner pod transfer.

[0163] Step 3406: As the lifting platforms of the first lifting means A and the second lifting means B rise from heights A2 and B2 to heights A0 and B0, the non-dedicated outer pod 12 is closed to house the inner pod 11, and the dedicated outer pod 102 is closed. At this time, the closed dedicated outer pod 102 is an empty pod, and the non-dedicated inner pod 11 and outer pod 12 constitute the reticle pod 10.

[0164] Step 3408: The first lifting means A removes the reticle pod 10 from the reticle loading system 200' via the first port 202 and transports it to various processing environments.

[0165] Figure 35 is a flowchart of the inner pod 11 transfer according to the embodiment of Figure 32, where the left half is performed by the first lifting means A and the right half is performed by the second lifting means B.

[0166] Steps 3500A and 3500B: The first lifting means A receives the outer pod 12 of the non-dedicated reticle pod 10 loaded at height A0, and the second lifting means B receives the dedicated outer pod 102 of the reticle storage pod 100 loaded at height B0. Either the non-dedicated outer pod 12 or the dedicated outer pod 102 houses an inner pod 11 containing a reticle, and the inner pod 11 is structurally compatible with the non-dedicated outer pod 12 and the dedicated outer pod 102.

[0167] Steps 3502A and 3502B: The first lifting means A and the second lifting means B operate to unlock the non-dedicated outer pod 12 and the dedicated outer pod 102, respectively. After unlocking, the first lifting means A and the second lifting means B grasp the outer lids of the non-dedicated outer pod 12 and the dedicated outer pod 102, respectively, and lower the lifting platform from heights A0 and B0 to heights A2 and B2, causing the non-dedicated outer pod 12 and the dedicated outer pod 102 to open during the lowering process.

[0168] Steps 3504A and 3504B: The first lifting means A and the second lifting means B operate to identify information displayed on the non-dedicated outer pod 12, the dedicated outer pod 102, the accommodating inner pod 11, and / or the reticle, such as a two-dimensional code or reticle pellicle status, during the descent, respectively. If the identification result does not match the expected target, the reticle loading system 200' can execute the relevant target anomaly handling flow.

[0169] Step 3506: The inner pod 11 is transferred between the non-dedicated outer base 40 and the dedicated outer base 160 using a reticle clamping mechanism 1900 similar to that in Figure 19A. For example, the clamping arm 1906 and contact plate 1908 of the reticle clamping mechanism 1900 in Figure 19A are modified to conform to the dimensions and structure of the inner pod 11 to achieve the transfer of the inner pod 11.

[0170] Steps 3508A and 3508B: In the process of the first lifting means A and the second lifting means B operating to raise the lifting platform from heights A2 and B2 to heights A0 and B0, respectively, the non-dedicated outer pod 12 and the dedicated outer pod 102 are closed and locked, respectively.

[0171] Steps 3510A and 3510B: The reticle pod 10 with an empty non-dedicated outer pod 12 or an inner pod 11 can be removed from the reticle loading system 200' via the first port 202, and the dedicated outer pod 102 containing an empty dedicated outer pod 102 or a non-dedicated inner pod 11 can be returned to the reticle stocker system 600' via the second port 204.

[0172] Figure 36 is a schematic diagram of the transfer flow of the inner pod 11. During this time, the operation of the first lifting means A and the second lifting means B is performed in the reticle transfer environment 206 or another environment that meets the cleanliness requirements.

[0173] As shown in the figure, the lifting platform descends evenly below the inner pod clamping mechanism 1900'. The clamping mechanism 1900' moves horizontally above the inner pod 11. When the inner pod clamping mechanism 1900' does not move up or down, the lifting platform of the first lifting means A is raised to a height where the inner pod 11 can be picked up. After the inner pod 11 is picked up, the lifting platform is lowered to complete the separation. The inner pod 11 is moved horizontally onto the lifting platform of the second lifting means B. The lifting platform of the second lifting means B rises to receive the inner pod 11, and the reticle clamping mechanism 1900' is released to transfer the inner pod 11.

[0174] Figure 37 is a schematic diagram of a reticle loading device 200 and a reticle stocker system 600" according to another embodiment of the present invention, where the reticle stocker system 600" is substantially the same configuration as the embodiment described above, but the main difference is that the storage chamber 602 is provided with multiple storage compartments 604'. Each storage compartment 604' can house a dedicated dual pod, for example, the reticle storage pod 100 shown in Figure 5A. Alternatively, each storage compartment 604' can house a single pod 3700, which mainly consists of a lid and a base and is used to house reticles obtained from the reticle pod 10.

[0175] Figure 38A shows a storage chamber 604' according to a specific embodiment. Figure 38B shows the arrangement of the upward mounting surfaces inside the storage chamber 604'. Figure 38C shows a single pod 3700 located in the storage chamber 604'. Figure 38D shows the mounting surface mechanism of the storage chamber 604' that supports the bottom of the single pod.

[0176] These storage chambers 604' can be fixed to the support of the storage unit 602 by similar means to establish a vertical stacking configuration. Each storage chamber 604' is essentially a pod body with an opening, providing storage space capable of housing a single pod 3700. The opening allows a robotic arm 609 to access the single pod 3700. Two connectors 3800 are provided on the rear of the storage chamber 604', their upstream ends connected to a nitrogen gas source, thereby allowing nitrogen gas to be filled into the storage chamber 604'. Three kinematic coupling pins 3802 and two auxiliary guide pins 3804 are provided on the upward mounting surface inside the storage chamber 604' for positioning and securing the single pod 3700. In another embodiment, a gate can be provided at the opening of the storage chamber 604' to prevent the single pod 3700 from falling and to maintain the nitrogen state inside the storage chamber 604'.

[0177] Figure 39A is a reticle load flow diagram relating to Figure 37. Figure 39B is a reticle unload flow diagram relating to Figure 37.

[0178] Step 3900A: A dual pod, such as the reticle pod 10, which includes, for example, an inner pod for housing a reticle and an outer pod for housing the inner pod, is loaded from the first port 202 onto the lifting platform of the first lifting means A of the reticle loading system 200.

[0179] Step 3900B: Load one empty single pod 3700 from the reticle stocker system 600" onto the lifting platform of the second lifting means B via the second port 204.

[0180] In step 3902, the reticle housed in the inner pod of the reticle pod 10 is removed and transferred to an empty single pod. Similar to the embodiment in Figure 24, as the lifting platform of the first lifting means A descends from height A0 to height A2, the outer and inner pods open to expose the reticle, and as the lifting platform of the second lifting means B descends from height B0 to height B22, the single pod 3700 opens to expose its inner base. Next, the reticle clamping mechanism transfers the reticle from the inner pod base of the reticle pod 10 to the base of the single pod 3700. Finally, as the lifting platform of the second lifting means B rises from height B2 to height B0, the reticle is housed in the single pod 3700.

[0181] Step 3904: The single pod 3700 containing the reticle is transported from the reticle loading system 200 to the reticle stocker system 600" and moved to a designated storage chamber 604' in the storage unit 602. Preferably, the designated storage chamber 604' is determined by the shortest travel path of the robot arm 609.

[0182] Step 3906: The robotic arm 609 opens the gate of the storage chamber 604', places the single pod 3700 into the storage chamber 604', closes the gate, and then fills the storage chamber 604' with nitrogen gas to complete reticle storage. In a gateless embodiment, the robotic arm 609 does not need to open the gate. The gate can be replaced by continuous nitrogen gas filling.

[0183] Step 3908A: Load an empty dual pod (such as the reticle pod 10) or an empty single pod 3700 onto the lifting platform of the first lifting means A of the reticle loading system 200.

[0184] Step 3908B: The robotic arm 609 retrieves the single pod 3700 with the designated reticle from the designated storage chamber 604' and loads it onto the lifting platform of the second lifting means B of the reticle loading system 200.

[0185] Step 3910: The first lifting means A and the second lifting means B lower the inner pod base portion of the reticle pod 10 and the reticle of the single pod 3700 into the reticle transfer environment 206, respectively, and transfer the reticle of the single pod to the reticle pod 10.

[0186] Step 3912: The reticle pod 10 containing the reticle is removed by the overhead crane system via the first port 204 and transported to the target station.

[0187] Figure 40 is a specific reticle transfer flow diagram according to the embodiment of Figure 37, where the left half is a step performed by the first lifting means A and the right half is a step performed by the second lifting means B. Step 4000A: Load the dual pod (such as the reticle pod 10) from the first port 202 onto the lifting platform of the first lifting means A. Step 4000B: Load the single pod 3700 from the reticle stocker system 600" onto the lifting platform of the second lifting means B. Step 4002A: Grasp the lid of the outer pod and unlock the outer pod, then lower the lifting platform of the first lifting means A from height A0 to height A1. Step 4002B: Grasp the lid of the single pod 3700 at height B0 or ​​height B1, and lower the lifting platform on which the base of the single pod 3700 is placed from height B0 to height B1. Step 4004A: Lower the lifting platform on which the base of the inner pod is placed from height A1 to height A2. Step 4004B: Lower the lifting platform on which the base of the single pod 3700 is placed from height B1 to height B2. Step 4006 The reticle clamping mechanism transfers the reticle between the base of the inner pod and the base of the single pod 3700. Step 4008A: Close the inner pod while raising the platform from height A2 to height A1. Step 4008B: Close the single pod 3700 while raising the platform from height B2 to height B1. Step 4010A: Close and lock the outer pod while raising the platform from height A1 to height A0. Step 4010B: Raise the platform from height B1 to height B0. Step 4012A: Remove the dual pod using the overhead crane system. Step 4012B: Return the single pod 3700 to the reticle stocker system 600.

[0188] Regardless of whether the reticle is ultimately stored in a single or dual pod, the storage environment is crucial for reticle storage. A storage chamber with a gate is beneficial for maintaining the condition of the storage environment. The choice of gate operation is also limited by the internal arrangement of the stocker system. An example of a gate operation mechanism for a storage chamber in the stocker system of the present invention is shown below.

[0189] Figure 41A shows the interaction flow between the robot arms 4100 and 4102 of the stocker system and the storage chamber 4104 (placing pod P into the storage chamber 4104). Figure 41B shows the interaction flow between the robot arms 4100 and 4102 of the stocker system and the storage chamber 4104 (removing pod P from the storage chamber 4104). The shown storage chamber 4104 may be equipped with a gate and configured so that the front end 4102 of the robot arm interacts with the gate of the storage chamber 4104. For example, the invention may have a specific mechanism to extend the front end 4102 of the robot arm to a bottom notch of the gate and flip open the gate to expose the space of the storage chamber 4104, but the invention is not limited thereto. More specifically, the robot arm may consist of at least two parts, one of which is a gripping mechanism 4100 and the other is an interaction mechanism 4102 for the gate, and the two mechanisms may be operated independently. As shown in Figure 41A, one part of the robot arm first flips open the gate, and then the other part performs the placement of pod P. After the placement is complete, the gate is returned to the closed position. The flow in Figure 41B is the reverse.

[0190] Figure 42A shows another interaction embodiment between the robot arm of the stocker system and the storage chamber, and is a flowchart for placing a pod into the storage chamber. Figure 42B shows another interaction embodiment between the robot arm of the stocker system and the storage chamber, and is a flowchart for removing a pod from the storage chamber. The robot arm of this embodiment includes two independent parts, namely a gripping section 4200 and a pushing section 4202. The gripping section 4200 is used to place or hold the pod P and to access the space of the storage chamber 4204. The storage chamber 4204 is equipped with a pivotable gate 4206. The pushing section 4202 extends forward relative to the gripping section 4200 and pushes a plate 4208 on the gate 4206, thereby opening the gate 4206 in a lever manner. The gripping section can feed the pod P into the storage chamber 4204. After completion, the pushing section 4208 retracts to return the gate 4206 to the closed position.

[0191] Figure 43 is a schematic diagram of a reticle stocker pipeline gas filling system according to an embodiment of the present invention. At least one main pipeline 4300 is connected upstream to a nitrogen gas source 4302 and downstream to a plurality of branch pipelines 4304. Each branch pipeline 4304 is connected to a corresponding storage chamber 604' in a storage unit 602. At least one flow controller 4306 is connected to the main pipeline 4300. When a reticle pod is placed in a designated storage chamber 604' in the storage unit 602, the flow controller 4306 determines the opening and closing of a specific air valve to fill the designated storage chamber 604' with nitrogen gas. For example, the flow controller 4306 can be configured to monitor the gas flow rate in the main pipeline 4306 and control the opening and closing of a control valve 4308 on each branch pipeline 4304. The control valve 4308 is used to adjust the gas flow velocity in each branch pipeline 4304. As shown in the figure, the upstream side of the main pipeline 4300 may include a particle filter 4310, a pressure gauge 4312, a pressure sensor 4314, a regulator 4316, and a ball valve 4318, but the present invention is not limited thereto.

[0192] Figure 44 is a schematic diagram of a reticle loading device and a reticle stocker system according to another embodiment of the present invention. Compared with the previously described embodiment, it can be seen that the reticle loading system 200" of this embodiment achieves reticle transfer using only a single lifting means A. Similarly, the reticle pod 10 opens during the process of descending from height A0 to height A1, finally exposing the inner pod 11. The inner pod 11 at height A1 can be picked up through interaction with the robot arm 609, thus shortening the reticle transfer path and reducing the risk of reticle shaking.

[0193] Figure 45A is a reticle load flow diagram according to the embodiment of Figure 44. Figure 45B is a reticle unload flow diagram according to the embodiment of Figure 44. Step 4500: Load a dual pod (such as a reticle pod 10) including an inner pod 11 containing the reticle and an outer pod containing the inner pod 11 onto the lifting platform. Step 4502: Expose the inner pod 11 of the dual pod to height A1, which is the reticle transfer environment. Step 4504: Transport the inner pod 11 to a designated storage chamber 604' of the storage facility 602. Step 4506: Open the gate of the designated storage chamber 604' to put in the inner pod 11. After closing the gate, fill the storage chamber 604' with nitrogen gas to complete the storage. Step 4508: Load the outer pod of the dual pod (such as the outer pod 12 in Figure 1), including the lid and base, onto the lifting platform. Step 4510: As the lifting platform is lowered, the outer pod opens and the base is placed at height A1. Step 4512: The inner pod 11 containing the reticle is taken out of the designated storage chamber 604' of the storage unit 602, the inner pod is unloaded and placed on the base at height A1. Step 4514: As the lifting platform is raised, the dual pod is closed and locked. Step 4516: The dual pod is removed.

[0194] Figure 46A is another reticle load flow diagram according to an embodiment of Figure 44. Figure 46B is another reticle unload flow diagram according to an embodiment of Figure 44. Step 4600: Load the dual pod, including the inner pod 11 and the outer pod housing the inner pod, onto the lifting platform from the port. Step 4602: Grasp the lid of the outer pod and open the outer pod as the lifting platform, on which the inner pod 11 and the outer pod base are placed, is lowered from height A0 to height A1. Step 4604: While the lifting platform is lowering from height A0 to height A1, read the two-dimensional code on the inner pod 11 through the identification means to detect the pellicle state. Step 4606: The robotic arm of the stocker system 600” picks up the inner pod 11 placed on the outer pod base, leaving only the outer pod of the dual pod in the reticle loading system 200”. Step 4608: As the lifting platform rises from height A1 to height A0, the outer pod of the dual pod is closed and locked. Step 4610: The outer pod of the dual pod is removed from the port. Step 4612: The outer pod of the dual pod is loaded onto the lifting platform from the port and the inner pod 11 in the reticle stocker system 600” is received. Step 4614: The outer pod opens as the lifting platform, on which the outer pod base is placed, is lowered from height A0 to height A1 while the outer pod lid is grasped. Step 4616: The robotic arm of the reticle stocker system 600” places the designated inner pod 11 on the outer pod base of the lifting platform. Step 4618: While the lifting platform rises from height A1 to height A0, the two-dimensional code on the inner pod 11 is read through the identification means to detect the pellicle state. Step 4620: As the platform is raised from height A1 to height A0, the dual pod closes and locks. Step 4622: Remove the dual pod from the port. [Explanation of symbols]

[0195] 100 reticle storage pods 101 Dedicated inner pod 102 Dedicated outer pod 10 Reticle Pods 11 Inner Pod 110 Lid 111 Handle 112 Filter Membrane Cover 114 groove 12 outer pods 120 Reticulum Retainer 121 Main Unit 122 Elastic Arm 123 Restriction section 124 Slope 125 Pressing part 130 Base section 131 Pellicle groove 132 Positioning groove 134 Support 135 Slope 136 Restricted Blocks 1500-1510 steps 150 Outer lid 151 Handle 152 Flat top surface 153 Horseshoe-shaped hold-down ribs 154 Hold-down column 1600-1608 steps 160 Outer base part 161 Positioning pins 162 Gas Valve 163 Positioning groove 1700-1712 steps 1800A Outer pod lid support surface 1802A Lifting platform 1900 Reticle clamping mechanism 1900' Reticle clamping mechanism 1902 Rail 1904 Clamping assembly 1906 Clamping Arm 1908 Contact plate 1910 Engaging part 2000 Lifting platform 200 Reticle Loading System 200' Reticle Loading System 200” Reticle Loading System 202 Port 1 204 Port 2 206 Reticle Transfer Environment 20 Base section 2600 front end 2602 Rear end 2604 Gas-filled pipeline 2606 Nozzle 2608 Kinematic Coupling Pin 2610 Stopper 2612 Connecting Arm 2700 Latch mechanism 2800 front end 2802 Rear end 2804 Positioning pin 2900 Air supply line 2901 Ball Valve 2902 Flow rate display 2903 Restrictor valve 2904 filter 2905 Thermohygrometer 2906 Mechanical pressure gauge 2907 Electronic pressure gauge 2908 Pressure regulating valve 2909 Main pipeline 2910 Pressure Gauge 2911 Air Valve 3000 Flow Controller 3001 filter 3002 Needle Valve 300 Flow Controller 30 Lid 32 Hold-down pins 3300-3310 steps 3400-3408 steps 34 caps 3500-3510 steps 3700 Single Pod 3900-3912 steps 3800 connector 3802 Kinematic Coupling Pin 3804 Guide pin 4000~4012 steps 400 Reticle Stocker Gas-Filled Conduit System 40 Outer base section 4100 Gripping mechanism of robot arm 4102 Front end of robot arm (interaction mechanism) 4104 Storage Room 4200 Grip 4202 Push part 4204 Storage Room 4206 Gate 4208 board 4300 Main pipeline 4302 Nitrogen gas source 4304 Branch pipeline 4306 Flow Controller 4308 Adjustable valve 4310 Particle Filter 4312 Pressure Gauge 4314 Pressure Sensor 4316 Regulator 4318 Ball Valve 4500~4516 steps 4600~4622 steps 500 Reticle Stocker Management System 50 Outer lid 52 handle 600 Reticle Stocker System 600' Reticle Stocker System 600” Reticle Stocker System 602 Storage 604 Storage shelves 604' Storage Room 606 buffer area 608 Management measures 609 Robot Arm 610 Control means 612 Flow rate control means 614 Washing device A. First lifting means A0~A2 Height B. Second lifting means B0~B2 Height H Vertical step P Pod R Reticle W window

Claims

1. It is a reticle stocker system, A storage facility including multiple storage shelves, each of which is configured to hold a dedicated reticle storage pod, The system includes a robotic arm configured to move the dedicated reticle storage pod in cooperation with the storage unit, The aforementioned dedicated reticle storage pod is for storage and transport within the storage facility, The storage unit includes a buffer area configured to hold one or more dedicated reticle storage pods that have been cleaned or used. Each of the plurality of storage shelves is a flat plate shelf having a front end and a rear end, the front end of the storage shelf has a notch configured to cooperate with the front end of the robot arm, and the rear end of the storage shelf has a stopper configured to restrict one side of the dedicated reticle storage pod. The stopper has identifiable information configured to be read during the interaction between the front end of the robot arm and the storage shelf, in a reticle stocker system.

2. The reticle stocker system according to claim 1, further comprising a port configured to connect to a reticle loading system.

3. Furthermore, the reticle stocker system according to claim 1 further comprises a cleaning device configured to be adjacent to the buffer region.

4. Furthermore, the reticle stocker system according to claim 1, further comprising a management means configured to manage reticle information and detect the temperature and humidity of the storage chamber.

5. The reticle stocker system according to claim 1, further comprising a gas control means configured to control the supply of non-reactive gas to the storage shelf.

6. A reticle stocker system that stores one or more dedicated reticle storage pods, It is configured to accommodate a dedicated reticle storage pod and includes a storage shelf which is a flat plate-shaped shelf having a front end and a rear end. The front end of the storage shelf has a notch configured to cooperate with the front end of the robot arm. The rear end of the storage shelf has a stopper configured to restrict one side of the dedicated reticle storage pod, The stopper has identifiable information configured to be read during the interaction between the front end of the robot arm and the storage shelf, in a reticle stocker system.

7. The reticle stocker system according to claim 6, wherein the upper surface of the storage shelf has a plurality of coupling pins that are coupled to the bottom of the dedicated reticle storage pods so as to position the dedicated reticle storage pods on the storage shelf.

8. The reticle stocker system according to claim 6, wherein the upper surface of the storage shelf has a plurality of nozzles connected to the bottom of the dedicated reticle storage pod to supply a non-reactive gas to the dedicated reticle storage pod.

9. The reticle stocker system according to claim 7, wherein the storage shelf has a pair of connecting arms, and the storage shelf is positioned in space via the pair of connecting arms.

10. A reticle loading method, A reticle stocker system comprising the steps of: arranging a storage facility for storing one or more dedicated reticle storage pods, wherein the dedicated reticle storage pods are dedicated to storage and movement within the storage facility; The steps include: using a robotic arm to retrieve an empty dedicated reticle storage pod from the storage chamber; and removing the empty dedicated reticle storage pod from the reticle stocker system so that the empty dedicated reticle storage pod outside the system can receive reticles. The step of using the robotic arm to receive the dedicated reticle storage pod containing the reticle and storing it in an empty space in the storage room, The storage unit includes a plurality of storage shelves, each storage shelf being a flat plate shelf having a front end and a rear end, the front end of the storage shelf having a notch that cooperates with the front end of the robot arm, and the rear end of the storage shelf having a stopper that restricts one side of the dedicated reticle storage pod when the dedicated reticle storage pod is placed on the storage shelf. A reticle loading method wherein the stopper has identifiable information configured to be read during the interaction between the front end of the robot arm and the storage shelf.

11. The reticle loading method according to claim 10, comprising the step of supplying a non-reactive gas to the storage rack when the reticle is stored in the dedicated reticle storage pod in the storage rack.

12. The reticle loading method according to claim 10, comprising the step of transferring the dedicated reticle storage pod containing the reticle to an empty storage shelf using the front end of the robot arm.

13. A reticle unloading method, The steps include: arranging a reticle stocker system having a storage compartment for storing one or more dedicated reticle storage pods; The steps include: using a robotic arm to retrieve a dedicated reticle storage pod containing reticles from the storage chamber; and removing the dedicated reticle storage pod containing the reticles from the reticle stocker system so that the reticles contained in the dedicated reticle storage pod are unloaded outside the system. The step of using the robotic arm to receive the dedicated reticle storage pod, which does not contain the reticle, and storing it in an empty space in the storage facility, The storage unit includes a plurality of storage shelves, each storage shelf being a flat plate shelf having a front end and a rear end, the front end of the storage shelf having a notch that cooperates with the front end of the robot arm, and the rear end of the storage shelf having a stopper that restricts one side of the dedicated reticle storage pod when the dedicated reticle storage pod is placed on the storage shelf. A reticle unloading method wherein the stopper has identifiable information configured to be read during the interaction between the front end of the robot arm and the storage shelf.

14. The reticle unloading method according to claim 13, comprising the step of transferring the dedicated reticle storage pod, which does not contain the reticle, to an empty storage shelf using the front end of the robot arm.

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