Plasma processing equipment

Abstract

To provide a plasma processing apparatus that is compact and can perform plasma processing with respect to a film that is continuously supplied.SOLUTION: A plasma processing apparatus (1) includes a processing chamber (2) for performing predetermined plasma processing with respect to a substrate to be processed (H1). The processing chamber (2) includes: a drum (6) for guiding the substrate to be processed (H1) that is continuously supplied into the processing chamber (2); and an antenna (8) for generating an inductive coupling plasma in the processing chamber (2). The antenna (8) is disposed inside the drum (6) and plasma processing is performed with respect to the substrate to be processed (H1) on the drum (6).SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present disclosure relates to a plasma processing apparatus.

Background Art

[0002] In order to perform plasma processing on a film (a long flexible substrate to be processed) continuously supplied to a processing chamber, a plasma processing apparatus is known that uses rollers to convey the film while performing plasma processing on the film being conveyed supported on the circumferential surface of a drum.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, in the above conventional plasma processing apparatus, the antenna was provided so as to face the circumferential surface of the drum. For this reason, it has been difficult to configure the conventional plasma processing apparatus compactly.

[0005] The present disclosure has been made in view of the above problems, and an object thereof is to provide a compact plasma processing apparatus capable of performing plasma processing on a continuously supplied film.

Means for Solving the Problems

[0006] To solve the above problems, a plasma processing apparatus according to one aspect of the present disclosure is a plasma processing apparatus that includes a processing chamber and performs plasma processing on a film continuously supplied to the processing chamber, wherein the processing chamber includes a drum that guides the film continuously supplied to the processing chamber, and an antenna for generating inductively coupled plasma inside the processing chamber, the antenna being located inside the drum, and the plasma processing being performed on the film on the drum. [Effects of the Invention]

[0007] According to one aspect of this disclosure, a compact plasma processing apparatus capable of performing plasma processing on a continuously supplied film can be provided. [Brief explanation of the drawing]

[0008] [Figure 1] This figure illustrates the configuration of a plasma processing apparatus according to Embodiment 1 of this disclosure. [Figure 2] Figure 1 illustrates the relationship between the drum and the antenna. [Figure 3] This diagram illustrates a specific example of the antenna configuration described above. [Figure 4] This figure illustrates a specific example of the internal electrode configuration shown in Figure 1. [Figure 5] This diagram illustrates the function of the internal electrodes mentioned above. [Figure 6] This figure illustrates the main components of a modified example of the plasma processing apparatus described above. [Figure 7] This figure illustrates the configuration of a plasma processing apparatus according to Embodiment 2 of this disclosure. [Figure 8] This figure illustrates a specific example of the antenna configuration shown in Figure 7. [Modes for carrying out the invention]

[0009] [Embodiment 1] Hereinafter, Embodiment 1 of the present disclosure will be described in detail with reference to Figures 1 to 4. Figure 1 is a diagram illustrating the configuration of the plasma processing apparatus 1 according to Embodiment 1 of the present disclosure. Figure 2 is a diagram illustrating the relationship between the drum 6 and the antenna 8 shown in Figure 1. Figure 3 is a diagram illustrating a specific example of the configuration of the antenna 8. Figure 4 is a diagram illustrating a specific example of the configuration of the internal electrode 10 shown in Figure 1.

[0010] In the following description, a plasma apparatus that performs a film deposition process on a substrate H1 using inductively coupled plasma CVD (Chemical Vapor Deposition) will be used as an example of a predetermined plasma treatment. However, the plasma processing apparatus 1 of this disclosure can also be applied to a plasma processing apparatus that performs, for example, a sputtering process to form a predetermined object on the substrate H1 using a target, or an etching or ashing process to remove a predetermined object from the substrate H1, as a predetermined plasma treatment. In the plasma processing apparatus that performs sputtering, the target is, for example, placed in the plasma generation region described later.

[0011] <Plasma Processing Device 1> As shown in Figure 1, the plasma processing apparatus 1 of this embodiment 1 is equipped with a processing chamber 2 for performing a predetermined plasma processing on a substrate H1 to be processed. The plasma processing apparatus 1 is configured to perform plasma processing continuously on a long substrate H1, and the substrate H1 is sequentially transported to a plasma generation region PA formed inside the processing chamber 2. The plasma processing apparatus 1 is configured so that the plasma processing on the substrate H1 is performed in the plasma generation region PA. The long substrate H1 referred to here is an example of a flexible film that is continuously supplied to the processing chamber 2.

[0012] Specifically, the plasma processing apparatus 1 includes a first load lock chamber 3 for loading the substrate H1 to be processed before plasma processing, which is wound around a support 3A, from the outside. The plasma processing apparatus 1 also includes a second load lock chamber 4 for unloading the substrate H1 to be processed after plasma processing, which is wound around a support 4A, to the outside. These first load lock chamber 3 and second load lock chamber 4 are hermetically connected to the processing chamber 2.

[0013] Furthermore, a drive mechanism (not shown) is connected to at least one of the support 3A and support 4A. In the plasma processing apparatus 1, the drive mechanism rotates the corresponding support 3A or support 4A, thereby sequentially transferring the substrate H1 to the first load lock chamber 3, the processing chamber 2, and the second load lock chamber 4.

[0014] Furthermore, the processing chamber 2 is equipped with a first internal roller 5, which serves as a delivery unit for delivering the substrate H1 to be processed from the first load lock chamber 3 to the support. The processing chamber 2 is also equipped with a drum 6, which serves as the support, and a second internal roller 7, which serves as a delivery unit for transporting the substrate H1 from the drum 6 to the second load lock chamber 4. In the plasma processing apparatus 1, as shown in Figure 1, the substrate H1 to be processed is sequentially transported from the support 3A along the first internal roller 5 and the outer circumferential surface of the drum 6. In other words, in the plasma processing apparatus 1, the substrate H1 to be processed is continuously supplied to the processing chamber 2 for plasma processing.

[0015] Furthermore, in the plasma processing apparatus 1, a portion of the outer surface of the drum 6 is positioned in the plasma generation region PA, which is separated by a mask 9 located inside the processing chamber 2, as shown in Figure 1. Then, in the plasma processing apparatus 1, a predetermined plasma treatment is performed on the portion of the substrate H1 to be processed on the drum 6 that has been transported to the plasma generation region PA by the drum 6, and a predetermined substance (film) is formed on the surface of that portion.

[0016] In the plasma processing apparatus 1, as shown in FIG. 1, a processed substrate H1 having a predetermined film formed thereon is transported from the drum 6 to the second load lock chamber 4 via the second internal roller 7 and wound around the support 4A.

[0017] The processed substrate H1 can be, for example, various films used for a liquid crystal panel display, an organic EL (Electro Luminescence) panel display, etc., or a synthetic resin substrate (flexible substrate). The plasma processing apparatus 1 forms a barrier (moisture-proof) film or the like as the predetermined film on the processed substrate H1 by the above-described predetermined plasma processing. Further, the processed substrate H1 wound around the support 4A is appropriately cut into a desired size and used according to the application or the like.

[0018] The plasma processing apparatus 1 also includes a control unit (not shown) that controls each part of the plasma processing apparatus 1. This control unit includes, for example, a CPU (Central Processing Unit), a RAM (Random Access Memory), a ROM (Read Only Memory), etc., and is a functional block that controls each component according to information processing.

[0019] <Processing chamber 2> The processing chamber 2 is configured using a grounded vacuum vessel. In a state where the inside of the vacuum vessel is maintained at a predetermined degree of vacuum, a predetermined plasma processing is performed on the processed substrate H1 under the control of the above-described control unit.

[0020] The processing chamber 2 is provided with a processing gas supply unit (not shown) that introduces a processing gas containing the gas for forming the film of the above-described film corresponding to the above-described predetermined plasma processing into the inside of the processing chamber 2, and the plasma processing is performed by atomizing the processing gas. The processing gas is, for example, argon, hydrogen, nitrogen, silane, or oxygen. Further, the gas supply port of the above-described processing gas supply unit is provided on the wall surface of the processing chamber 2 below the mask 9 corresponding to the plasma generation region PA (not shown). Further, an exhaust port (not shown) for exhausting the processing gas to the outside is appropriately provided.

[0021] Furthermore, in the processing chamber 2, a predetermined preheating treatment may be performed on the substrate H1 before the plasma treatment in the plasma generation region PA is carried out. For example, the first internal roller 5 is provided with a heating section HA for preheating the substrate H1. The heating section HA is controlled by a heating control unit HAC located outside the processing chamber 2, thereby ensuring that the preheating treatment of the substrate H1 is properly carried out. By properly performing this preheating treatment on the substrate H1, it is possible to improve the film quality of the film deposited on the substrate H1 by the plasma CVD method, thereby enabling high-quality plasma treatment of the substrate H1.

[0022] <Drum 6> The drum 6 is, for example, a cylindrical body and is rotatably supported in the processing chamber 2. As shown in Figure 2, both ends of the drum 6 are rotatably connected to the mounting structure T via bearings B. The mounting structure T is airtightly attached to the wall surface of the processing chamber 2 via a packing P2. The drum 6 is also made of a dielectric material such as alumina (aluminum oxide), aluminum oxide, quartz, or silicon nitride. The drum 6 is configured to rotate in the direction indicated by R in Figure 1 due to the frictional force from the substrate H1 in contact with the outer surface of the drum 6 when the substrate H1 to be processed is transported by the drive mechanism described above.

[0023] Furthermore, since the drum 6 is rotatably supported in the processing chamber 2, the drum 6 can guide the substrate H1 to be processed and transport it smoothly. As a result, the plasma processing apparatus 1 of this embodiment 1 can perform plasma processing on the substrate H1 to be processed more appropriately.

[0024] In addition to the above explanation, the drum 6 may also be connected to an operating mechanism such as a motor to rotate the drum 6 and drive the substrate H1 to be processed. Alternatively, the drum 6 may be fixed to the wall of the processing chamber 2, so that the drum 6 does not rotate and the substrate H1 to be processed slides on the outer surface of the drum 6.

[0025] In other words, the drum 6 in this embodiment is a cylindrical body through which the antenna 8 can be inserted, and which can guide the substrate H1 to be processed into the plasma generation region (plasma generation region PA) generated inside the processing chamber 2.

[0026] However, as described above, it is preferable that the drum 6 is rotatably mounted in the processing chamber 2, as this allows for smoother transport of the substrate H1 to be processed and enables more appropriate plasma processing of the substrate H1. Furthermore, the rotating part of the drum 6, particularly the area near the bearing B, may generate particles due to friction with adjacent fixed parts such as flanges included in the mounting structure T. For this reason, when the drum 6 is rotatably mounted, it is preferable to provide a cover that covers the end of the drum 6 near the end of the drum 6. This significantly reduces the amount of particles adhering to the substrate H1 to be processed.

[0027] <Antenna 8> Furthermore, as shown in Figure 2, an antenna 8 is provided inside the drum 6 to generate inductively coupled plasma inside the processing chamber 2. Specifically, the antenna 8 is a linear antenna, positioned coaxially with the drum 6, and both ends are hermetically attached to the mounting structure T via packings P1. In other words, the plasma processing apparatus 1 of this disclosure generates an inductively coupled plasma by passing a high-frequency current through the antenna 8 to generate a high-frequency induced electric field near the antenna 8.

[0028] Furthermore, both ends of the antenna 8 are extended to the outside of the processing chamber 2. In addition, impedance adjustment units 12 and 14 are provided at one end and the other end of the antenna 8, respectively, as shown in Figure 3.

[0029] The impedance adjustment unit 12 includes a matching circuit, and one end of the antenna 8 is connected to the power supply 13 via the impedance adjustment unit 12. The impedance adjustment unit 14 also includes a variable capacitor. The other end of the antenna 8 is grounded via the impedance adjustment unit 14.

[0030] The power supply 13 supplies, for example, 13.56 MHz high-frequency power to one end of the antenna 8 via the impedance adjustment unit 12. The control unit controls the supply of high-frequency power to the antenna 8 inside the processing chamber 2 by changing the capacitance of the variable capacitor in the impedance adjustment unit 14. Since the antenna 8 is positioned coaxially with the drum 6, it is possible to generate plasma uniformly in the circumferential direction toward the outer surface of the drum 6. As a result, the plasma processing apparatus 1 of this embodiment can improve the uniformity of film deposition on the substrate H1 to be processed.

[0031] Furthermore, as described above, since the antenna 8 is coaxially positioned inside the drum 6, if a distribution of the film deposition rate, etc., is observed in the plasma processing apparatus 1 during the prototype stage before mass production due to variations in materials, the position of the antenna 8 can be adjusted in a direction that compensates for that distribution. For example, if the film deposition rate is low near one end of the antenna 8 in the longitudinal direction, the end can be adjusted to move closer to the direction of the plasma generation region PA (downward in Figure 1), thereby eliminating the aforementioned distribution.

[0032] In addition to the above explanation, the antenna 8 may be configured to be rotatable relative to the processing chamber 2. However, it is preferable to fix the antenna 8 in place, as this simplifies the configuration of the plasma processing apparatus 1.

[0033] <Internal electrode 10> Inside the processing chamber 2, an internal electrode 10 is provided outside the drum 6 within the plasma generation region PA. Specifically, the internal electrode 10 has a cross-sectional shape that is approximately arc-shaped, so as to follow the outer surface of the drum 6. The internal electrode 10 is fixed to the mask 9 via an insulating spacer 11, and is positioned within the plasma generation region PA facing the outer surface of the drum 6 and the substrate H1 to be processed on that outer surface.

[0034] The internal electrode 10 is constructed using, for example, a carbon plate or a metal plate. The internal electrode 10 is a control electrode that controls charged particles contained in the plasma inside the processing chamber 2. Specifically, the internal electrode 10 includes a power supply connected to the internal electrode 10, and an electrode potential control unit 10E (Figure 5) is connected to the internal electrode 10, which controls the potential of the internal electrode 10 by controlling the power supply. The electrode potential control unit 10E controls the potential of the internal electrode 10 to a predetermined potential by variably adjusting the applied voltage applied to the internal electrode 10 from the electrode power supply according to instructions from the control unit.

[0035] Furthermore, when the internal electrode 10 is constructed using a carbon plate, the carbon plate has higher strength despite having a lower density than a metal plate, making it less prone to bending or other deformations in the internal electrode 10. Therefore, even when the internal electrode 10 is enlarged, it is possible to reduce the likelihood of in-plane non-uniformity of the plasma caused by bending or other deformations.

[0036] Furthermore, it is preferable to use a metal material with low density and high electrical conductivity for the metal plate, and specifically, aluminum or an aluminum alloy is preferable. When the internal electrode 10 is constructed using a metal plate of such a metal material, it is possible to construct an internal electrode 10 that is more resistant to mechanical shock than an internal electrode 10 made of a carbon plate, thereby improving the impact resistance of the plasma processing apparatus 1. As a result, for example, when vibrations caused by the opening and closing of a valve (not shown) are transmitted to the plasma processing apparatus 1, it is preferable to construct the internal electrode 10 using the above-mentioned metal plate.

[0037] As shown in Figure 4, the internal electrode 10 is composed of, for example, a grid electrode in the shape of perforated metal, each having a plurality of circularly formed openings 10a. The internal electrode 10 selectively imparts kinetic energy to the charged particles or reduces the amount of charged particles reaching the substrate H1 to be processed, depending on the polarity of the charged particles (details will be described later).

[0038] In addition to the above explanation, a configuration in which, for example, a mesh-like grid electrode is used as the internal electrode 10 is also possible.

[0039] In addition to the above explanation, a flat internal electrode 10 without an opening 10a can also be used. In this case, the plasma generation region PA tends to be limited to the area between the drum 6 and the internal electrode 10. This makes it possible to generate a high-density plasma, improve the film deposition rate and etching rate, and shorten the cycle time. However, it is preferable to adjust the ejection position and ejection angle of the processing gas so that the processing gas is efficiently supplied to the plasma generation region PA.

[0040] On the other hand, when the opening 10a is provided, the processing gas introduced into the processing chamber 2 through the opening 10a can be smoothly supplied to the area on the drum 6, regardless of the ejection position or angle of the processing gas. Therefore, when the opening 10a is provided, the decrease in processing efficiency of the plasma processing due to the placement of the internal electrode 10 inside the processing chamber 2 can be suppressed.

[0041] <Example of operation> The operation of the plasma processing apparatus 1 of this embodiment 1 will be specifically explained using Figure 5. Figure 5 is a diagram illustrating the function of the internal electrode 10. In the following explanation, the operation of the internal electrode 10 will be mainly described. Also, in Figure 5, the substrate to be processed H1, drum 6, and antenna 8 are not shown.

[0042] As shown in Figure 5, when the antenna 8 (Figure 1) operates and plasma is generated inside the processing chamber 2, the charged particles k contained in the plasma, unlike the neutral particles n, move in accordance with the voltage applied to the internal electrode 10. In other words, inside the processing chamber 2, as shown in Figure 5, the processing chamber 2 is grounded, so the charged particles k, consisting of positive ions p and electrons or negative ions e, move in accordance with the voltage applied to the internal electrode 10. In other words, inside the processing chamber 2, the charged particles k can be selectively given kinetic energy from the internal electrode 10 or have the amount reaching the substrate H1 to be processed reduced, depending on their polarity.

[0043] Specifically, as indicated by arrow E in Figure 5, the electrode potential control unit 10E applies a negative voltage to the internal electrode 10, for example, so that the potential of the internal electrode 10 is lower than the plasma potential. In this case, the kinetic energy of the positive ions p is increased in the direction toward the substrate H1 to be processed, as shown by the arrow in Figure 5. As a result, the reaction of positive ions p on the surface of the substrate H1 to be processed can be promoted, and a high-quality film can be formed on that surface.

[0044] On the other hand, as shown by the arrows in Figure 5, the kinetic energy of electrons or negative ions e is increased in the direction away from the substrate H1 being treated. This reduces the amount of electrons or negative ions e that reach the substrate H1 being treated. As a result, in cases where electrons or negative ions e would degrade the quality of the film formed on the surface of the substrate H1 being treated by plasma treatment, the degradation of the film quality can be suppressed.

[0045] The plasma processing apparatus 1 of this embodiment 1, configured as described above, includes a processing chamber 2 for performing a predetermined plasma processing on a substrate (film) H1 to be processed. Inside the processing chamber 2, there is a drum 6 that guides the substrate H1 to be processed, which is continuously supplied to the processing chamber 2, and an antenna 8 for generating inductively coupled plasma inside the processing chamber 2. The antenna 8 is located inside the drum 6, and the plasma processing is performed on the substrate H1 to be processed on the drum 6. As a result, in this embodiment 1, a compact plasma processing apparatus 1 can be configured that can perform high-quality plasma processing even when continuously performing plasma processing on a long substrate H1 to be processed that is continuously supplied to the processing chamber 2.

[0046] In other words, the plasma processing apparatus 1 of this embodiment 1 uses a cylindrical drum 6 that guides a long substrate H1 to be processed, so it can perform plasma processing on a long substrate H1. Furthermore, the plasma processing apparatus 1 of this embodiment 1 has an antenna 8 installed inside the drum 6 so that it is coaxial with the drum 6. As a result, the plasma processing apparatus 1 of this embodiment 1 can efficiently generate plasma near the outer circumference of the drum 6 inside the processing chamber 2. Moreover, unlike the conventional example described above, the plasma processing apparatus 1 of this embodiment 1 does not require a dedicated installation space for the antenna 8 inside the processing chamber 2. Therefore, unlike the conventional example described above, the plasma processing apparatus 1 of this embodiment 1 can avoid increasing the size and complexity of its structure, and a compact plasma processing apparatus 1 can be constructed.

[0047] In other words, in the conventional example described above, the antenna was positioned facing the circumferential surface of the drum. Therefore, in the conventional example, it was difficult to create a compact configuration that would prevent the structure from becoming large and complex. Furthermore, in the conventional example, it was necessary to precisely position the antenna relative to the circumferential surface of the drum. Consequently, in the conventional example, it was difficult to easily ensure the uniformity of the plasma in the circumferential direction of the drum, and thus it was difficult to improve the uniformity of film deposition. In particular, in the conventional example, when film deposition was performed over a wide area along the circumferential direction on the outer circumference of the drum, it was necessary to arrange the antennas in the circumferential direction. For this reason, the configuration became complex in the conventional example, and it became necessary to provide various antenna mounting structures along the walls of the processing chamber.

[0048] On the other hand, in the plasma processing apparatus 1 of this embodiment 1, high-quality plasma processing can be performed even on long substrates H1 without providing a dedicated installation space for the antenna 8 inside the processing chamber 2. Therefore, in this embodiment 1, a compact plasma processing apparatus 1 can be configured that can perform film deposition over a wide area along the circumferential direction on the outer circumference of the drum 6.

[0049] Furthermore, in the plasma processing apparatus 1 of this embodiment 1, by adjusting the position of the antenna 8 inside the drum 6, it is possible to control the plasma generated from the outer surface of the drum 6 toward the plasma generation region PA. As a result, the plasma processing apparatus 1 of this embodiment 1 can uniformly generate plasma from the antenna 8 toward the outer surface of the drum 6. Consequently, the plasma processing apparatus 1 of this embodiment 1 can improve the uniformity of film formation on the substrate H1 to be processed. Therefore, the plasma processing apparatus 1 of this embodiment 1 can perform high-quality plasma processing even when plasma processing is performed continuously on a long substrate H1 to be processed.

[0050] Furthermore, in the plasma processing apparatus 1 of this embodiment 1, since the internal electrode 10 is located inside the processing chamber 2, the movement and amount of charged plasma particles reaching the substrate H1 on the drum 6 can be directly controlled. In addition, in the plasma processing apparatus 1 of this embodiment 1, a large potential gradient can be formed between the internal electrode 10 and the substrate H1 being processed during plasma processing.

[0051] As a result, in the plasma processing apparatus 1 of this embodiment 1, as illustrated in Figure 5, kinetic energy can be selectively transferred to the charged particles k depending on the polarity of the charged particles k contained in the plasma. Therefore, in the plasma processing apparatus 1 of this embodiment 1, the amount of charged particles k reaching the substrate H1 to be processed can be increased or decreased. Accordingly, in the plasma processing apparatus 1 of this embodiment 1, the operation of the charged particles k can be appropriately controlled, and high-precision plasma processing of the substrate H1 to be processed can be easily performed.

[0052] Furthermore, in the plasma processing apparatus 1 of this embodiment 1, the internal electrode 10 is positioned to sandwich the substrate H1 to be processed between it and the antenna 8. Therefore, the internal electrode 10 can apply an electric field to the plasma that performs plasma processing on the substrate H1 on the drum 6. Thus, in the plasma processing apparatus 1 of this embodiment 1, the motion and amount of charged plasma particles reaching the substrate H1 can be efficiently controlled. As a result, in the plasma processing apparatus 1 of this embodiment 1, high-precision plasma processing on the substrate H1 can be performed more easily.

[0053] Furthermore, in the plasma processing apparatus 1 of this embodiment 1, a chemical vapor deposition method using plasma is performed on the substrate H1 to be processed as the plasma processing. As a result, the plasma processing apparatus 1 of this embodiment 1 can deposit a high-quality film on the substrate H1 to be processed.

[0054] [Variation] Modifications of the present disclosure will be specifically described with reference to Figure 6. Figure 6 is a diagram illustrating the main components of a modified plasma processing apparatus 1. For the sake of clarity, components having the same function as those described in Embodiment 1 will be denoted by the same reference numerals, and their descriptions will not be repeated.

[0055] The main difference between this modified example and Embodiment 1 described above is that one end 8a and the other end 8b of the antenna 8 are provided in the processing chamber 2 so as to be movable in the radial direction of the drum 6, and a position control unit 80 is provided to control the positions of the one end 8a and the other end 8b.

[0056] In this modified plasma processing apparatus 1, as shown in Figure 6, an elongated hole 2a opening radially to the drum 6 (Figure 1) is formed in the wall surface of the processing chamber 2. The antenna 8 is attached to the wall surface of the processing chamber 2 such that one end 8a and the other end 8b each pass through the elongated hole 2a, and both ends 8a and 8b are movable within the elongated hole 2a in the radial direction. In other words, the linear antenna 8 is positioned approximately parallel to the axis of the drum 6 and is supported in the processing chamber 2 in such a way that the angular deviation from the direction parallel to the axis of the drum 6 can be adjusted.

[0057] Furthermore, in this modified plasma processing apparatus 1, the position control unit 80 is connected, for example, to one end 8a of the antenna 8. This position control unit 80 is equipped with a movable mechanism (not shown), such as a motor, for moving the one end 8a of the antenna 8 in the radial direction. The position control unit 80 controls the positions of the one end 8a and the other end 8b by operating the movable mechanism according to instructions from the control unit. This makes it possible to position the antenna 8 in a state tilted longitudinally with respect to the drum 6. In other words, in this modified apparatus, the antenna 8 can be positioned from a state in which it is coaxially positioned with respect to the drum 6 inside the drum 6 to a state in which the central axis of the antenna 8 is tilted longitudinally with respect to the central axis of the drum 6.

[0058] As described above, in the plasma processing apparatus 1 of this modified example, the position control unit 80 can adjust the tilt of the antenna 8 in the longitudinal direction. Therefore, in the plasma processing apparatus 1 of this modified example, the distance between the antenna 8 and the substrate H1 on the outer surface of the drum 6 in the longitudinal direction can be set to different values ​​at one end 8a and the other end 8b of the antenna 8. Accordingly, in the plasma processing apparatus 1 of this modified example, if there is an unevenness in the film deposition distribution on the substrate H1, the unevenness can be adjusted by making the above adjustment to the mounting of the antenna 8, and uniformity can be easily ensured. As a result, the plasma processing apparatus 1 of this modified example can reliably perform high-precision plasma processing on the substrate H1.

[0059] [Embodiment 2] Embodiment 2 of this disclosure will be described in detail with reference to Figures 7 and 8. Figure 7 is a diagram illustrating the configuration of the plasma processing apparatus 1 according to Embodiment 2 of this disclosure. Figure 8 is a diagram illustrating specific configuration examples of the antennas 18a, 18b, and 18c shown in Figure 7. For the sake of convenience of explanation, components having the same function as those described in Embodiment 1 above will be denoted by the same reference numerals, and their descriptions will not be repeated.

[0060] The main difference between this second embodiment and the first embodiment is that multiple antennas 18a, 18b, and 18c are arranged inside the drum 6 so as to follow the inner surface of the drum 6.

[0061] In the plasma processing apparatus 1 of this second embodiment, as shown in Figure 7, a plurality of antennas, for example, three antennas 18a, 18b, and 18c are provided inside the drum 6. These antennas 18a, 18b, and 18c are arranged in a line along the inner circumferential surface of the drum 6. Furthermore, these antennas 18a, 18b, and 18c are arranged such that, for example, the distance between them from the inner circumferential surface is the same. In addition, antenna 18b is attached to the processing chamber 2 at a position lower than antennas 18a and 18c in the vertical direction of Figure 7, and such that the distance between antenna 18b and antenna 18c is the same.

[0062] As shown in Figure 8, an impedance adjustment unit 12 and a power supply 13 are sequentially connected to one end of antenna 18a. An impedance adjustment unit 14a is connected to the other end of antenna 18a and the other end of antenna 18b. An impedance adjustment unit 14b is connected to one end of antenna 18b and one end of antenna 18c. An impedance adjustment unit 14c is connected to the other end of antenna 18c.

[0063] The impedance adjustment units 14a, 14b, and 14c each have a variable capacitor. The antennas 18a, 18b, and 18c are connected in series via the impedance adjustment units 14a and 14b and are grounded via the impedance adjustment unit 14c. In the plasma processing apparatus 1 of this second embodiment, the control unit controls the supply of high-frequency power to the antennas 18a, 18b, and 18c by changing the capacitance of the variable capacitors in the impedance adjustment units 14a, 14b, and 14c.

[0064] With the above configuration, the plasma processing apparatus 1 of this second embodiment achieves the same effects as that of the first embodiment. Furthermore, in the plasma processing apparatus 1 of this second embodiment, antennas 18a, 18b, and 18c are uniformly arranged along the inner circumferential surface of the drum 6 inside the drum 6. As a result, in the plasma processing apparatus 1 of this second embodiment, antennas 18a, 18b, and 18c can generate plasma in the plasma generation region PA such that the plasma generated on the outer circumferential surface of the drum 6 is uniform. Therefore, in the plasma processing apparatus 1 of this second embodiment, plasma can be uniformly applied to the substrate H1 to be processed during plasma processing on the outer circumferential surface of the drum 6.

[0065] As a result, the plasma processing apparatus 1 of this second embodiment can more reliably ensure the uniformity of the plasma on the substrate H1 to be processed, compared to the one of the first embodiment, and can more reliably perform high-precision plasma processing on the substrate H1 to be processed.

[0066] 〔summary〕 To solve the above problems, a plasma processing apparatus according to one aspect of the present disclosure is a plasma processing apparatus that includes a processing chamber and performs plasma processing on a film continuously supplied to the processing chamber, wherein the processing chamber includes a drum that guides the film continuously supplied to the processing chamber, and an antenna for generating inductively coupled plasma inside the processing chamber, the antenna being located inside the drum, and the plasma processing being performed on the film on the drum.

[0067] According to the above configuration, the plasma processing apparatus has a drum inside the processing chamber that guides the film continuously supplied to the processing chamber, allowing plasma processing to be performed on the film. Furthermore, since an antenna is located inside the drum, plasma for plasma processing on the film on the drum can be efficiently generated. In addition, a compact plasma processing apparatus that can perform high-quality plasma processing can be provided while suppressing the increase in size and complexity of the processing chamber.

[0068] In the plasma processing apparatus relating to the above-described aspect, the processing chamber may further be provided with an internal electrode to which a predetermined potential is applied.

[0069] With the above configuration, since the plasma processing apparatus has internal electrodes to which a predetermined potential is applied inside the processing chamber, the movement and amount of charged plasma particles reaching the film on the drum can be directly controlled. As a result, high-precision plasma processing of the film can be easily performed.

[0070] In the plasma processing apparatus relating to the above-described aspect, the internal electrodes may be located outside the drum.

[0071] According to the above configuration, the internal electrodes are positioned so that a film is sandwiched between them and the antenna. Therefore, the electric field applied between the internal electrodes and the film can be applied to the plasma that performs plasma processing on the film on the drum. Thus, the motion and amount of charged plasma particles reaching the film can be controlled. As a result, high-precision plasma processing of the film can be easily performed.

[0072] In the plasma processing apparatus relating to the above-described aspect, the internal electrode may be made of a carbon plate or a metal plate having a plurality of openings.

[0073] According to the above configuration, the processing gas introduced into the processing chamber through the opening can be smoothly moved to the area on the drum, and the decrease in processing efficiency of the plasma processing due to the placement of the internal electrodes inside the processing chamber can be suppressed.

[0074] In the plasma processing apparatus relating to the above-described aspect, the antenna may be a linear antenna, positioned substantially parallel to the axis of the drum, and supported in the processing chamber such that the angular deviation from the direction parallel to the axis of the drum can be adjusted.

[0075] With the above configuration, a linear antenna can be easily positioned inside the drum. Furthermore, since the angle of the antenna from the direction parallel to the drum axis can be adjusted, uniformity of the plasma on the film can be more easily ensured. As a result, high-precision plasma processing of the film can be reliably performed.

[0076] In the plasma processing apparatus relating to the above-described aspect, a plurality of the antennas may be arranged in a line inside the drum so as to follow the inner surface of the drum.

[0077] With the above configuration, each of the multiple antennas generates plasma toward the outer surface of the drum, so that the plasma can be uniformly applied to the film on the outer surface of the drum during plasma processing. As a result, high-precision plasma processing of the film can be performed more reliably.

[0078] In the plasma processing apparatus relating to the above-described aspect, a heating unit may be provided upstream of the drum for preheating the film that is continuously supplied to the processing chamber.

[0079] According to the above configuration, high-quality plasma treatment can be applied to the film.

[0080] In the plasma processing apparatus relating to the above-described aspect, the drum may be rotatably supported in the processing chamber.

[0081] With the above configuration, the drum guides and transports the film, allowing for smoother film transport. As a result, plasma treatment can be applied to the film more effectively.

[0082] In the plasma processing apparatus relating to the above aspect, the plasma processing may be a film deposition process using the plasma by a chemical vapor deposition method.

[0083] According to the above configuration, a high-quality film can be formed on the workpiece.

[0084] This disclosure is not limited to the embodiments described above, and various modifications are possible within the scope of the claims. Embodiments obtained by appropriately combining the technical means disclosed in different embodiments are also included in the technical scope of this disclosure. [Explanation of Symbols]

[0085] 1. Plasma processing equipment 2 Processing Room 5. First internal roller (feed-out section) 6 drums 8, 18a, 18b, 18c antennas 8a One end 8b Other end 10 Internal electrode 10a opening 80 Position control unit H1 Substrate to be processed (film) PA plasma generation region HA heating section HAC Heating Control Unit k-charged particle p positive ion e Electrons or negative ions

Claims

1. A plasma processing apparatus comprising a processing chamber, which performs plasma processing on a film continuously supplied to the processing chamber, Inside the aforementioned processing chamber, A drum made of a dielectric material guides the film that is continuously supplied to the processing chamber, The processing chamber is equipped with an antenna for generating inductively coupled plasma, The antenna is located inside the drum. The plasma treatment is performed on the film on the drum in the plasma treatment apparatus.

2. Inside the aforementioned processing chamber, The plasma processing apparatus according to claim 1, further comprising an internal electrode to which a predetermined potential is applied.

3. The plasma processing apparatus according to claim 2, wherein the internal electrode is located outside the drum.

4. The plasma processing apparatus according to claim 2 or 3, wherein the internal electrode is made of a carbon plate or metal plate having a plurality of openings.

5. The aforementioned antenna is a linear antenna, The plasma processing apparatus according to any one of claims 1 to 4, wherein it is positioned substantially parallel to the axis of the drum and is supported in the processing chamber such that the angular deviation from the direction parallel to the axis of the drum can be adjusted.

6. The plasma processing apparatus according to any one of claims 1 to 5, wherein a plurality of the antennas are arranged in a line inside the drum so as to be along the inner surface of the drum.

7. The plasma processing apparatus according to any one of claims 1 to 6, wherein a heating unit is provided upstream of the drum for preheating the film that is continuously supplied to the processing chamber.

8. The plasma processing apparatus according to any one of claims 1 to 7, wherein the drum is rotatably supported in the processing chamber.

9. The plasma processing apparatus according to any one of claims 1 to 8, wherein the plasma processing is a film deposition process using the plasma by chemical vapor deposition.

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