X-ray analyzer, X-ray analysis method, and X-ray analysis program

Abstract

To identify an irradiated area of primary x-ray and to know where secondary x-ray is generated, even if a surface of a sample is non-planar.SOLUTION: An x-ray analyzer includes: an x-ray irradiation part 2 that irradiates a sample W with primary x-ray XR1; an x-ray detection part 3 that detects secondary x-ray XR2 generated from the sample W; a three-dimensional shape information acquisition part 4, which acquires three-dimensional shape information of the sample W; and an irradiated area identification part 5 that identifies an irradiated area IA of the primary x-ray XR1 using the three-dimensional shape information.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to an X-ray analyzer, an X-ray analysis method, and an X-ray analysis program.

Background Art

[0002] This type of X-ray analyzer irradiates a sample with primary X-rays, detects secondary X-rays (fluorescent X-rays) generated from the sample, and analyzes the sample based on the detected secondary X-rays, as shown in, for example, Patent Document 1.

[0003] In this X-ray analyzer, the primary X-rays emitted from the X-ray source are radiated in a conical shape. Therefore, when the surface of the sample is flat, the irradiation area of the primary X-rays can be expressed as an elliptical shape, and the irradiation area can be specified if the relative position between the surface of the sample and the X-ray source is known. As a result, the location where the secondary X-rays are generated can be known.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, when the surface of the sample is non-flat, the irradiation area cannot be expressed as an elliptical shape, and it is not known where the primary X-rays hit the surface of the sample. Therefore, it is impossible to know from where the detected secondary X-rays are generated.

[0006] Therefore, the present invention has been made in view of the above problems, and its main problem is to specify the irradiation area of the primary X-rays and know the location where the secondary X-rays are generated even when the surface of the sample is non-flat.

Means for Solving the Problems

[0007] In other words, the X-ray analyzer according to the present invention is characterized by comprising: an X-ray irradiation unit that irradiates a sample with primary X-rays; an X-ray detection unit that detects secondary X-rays generated from the sample; a three-dimensional shape information acquisition unit that acquires three-dimensional shape information of the sample; and an irradiation area identification unit that identifies the irradiation area of ​​the primary X-rays using the three-dimensional shape information.

[0008] This X-ray analyzer uses the three-dimensional shape information of the sample to identify the irradiation area of ​​the primary X-ray, so even if the surface of the sample is not planar, the location of secondary X-ray generation can be determined.

[0009] In terms of specific implementation, it is desirable that the three-dimensional shape acquisition unit comprises a pattern light irradiation unit that irradiates the sample with pattern light, an imaging unit that images the sample irradiated with the pattern light, and a calculation unit that calculates three-dimensional shape information of the sample based on the image captured by the imaging unit.

[0010] In terms of specific implementation, it is desirable that the irradiation area identification unit identifies the irradiation area using the three-dimensional shape information, the emission angle of the X-ray irradiation unit, and the geometric arrangement of the X-ray irradiation unit with respect to the sample.

[0011] In order to allow the user to visually confirm the irradiation area, it is desirable to further include a display control unit that superimposes the irradiation area onto the captured image and displays it on a display.

[0012] In order to enable the user to visually observe the secondary X-ray spectrum or the analysis results using said spectrum, and the irradiated area which is its source, it is desirable that the display control unit displays the secondary X-ray spectrum or the analysis results using said spectrum on the display together with the captured image on which the irradiated area is superimposed.

[0013] It is desirable that the display control unit displays on the display either an undetectable area in the irradiation area where the secondary X-rays cannot be detected by the X-ray detection unit, or a detectable area where the secondary X-rays can be detected. By displaying the undetectable area as well, users can more accurately determine the region that is the source of the detected secondary X-rays. Similarly, by displaying the detectable area as well, users can more accurately determine the region that is the source of the detected secondary X-rays.

[0014] It is preferable that the display control unit superimposes a virtual irradiation area onto the captured image and displays it on the display before the primary X-rays are irradiated by the X-ray irradiation unit. With this configuration, the user can view the virtual irradiation area and decide whether or not to actually irradiate with primary X-rays.

[0015] Furthermore, the X-ray analysis method according to the present invention is an X-ray analysis method that irradiates a sample with primary X-rays and detects secondary X-rays generated from the sample, characterized in that it acquires three-dimensional shape information of the sample and identifies the irradiation area of ​​the primary X-rays using the three-dimensional shape information.

[0016] Furthermore, the X-ray analysis program according to the present invention is an X-ray analysis program used in an X-ray analyzer comprising an X-ray irradiation unit that irradiates a sample with primary X-rays and an X-ray detection unit that detects secondary X-rays generated from the sample, characterized in that it causes a computer to perform functions as a three-dimensional shape information acquisition unit that acquires three-dimensional shape information of the sample and an irradiation area identification unit that identifies the irradiation area of ​​the primary X-rays using the three-dimensional shape information. [Effects of the Invention]

[0017] According to the present invention described above, even if the surface of the sample is not planar, the irradiation area of ​​the primary X-ray can be identified and the location of secondary X-ray generation can be determined. [Brief explanation of the drawing]

[0018] [Figure 1] This is an overall schematic diagram of an X-ray analyzer according to an embodiment of the present invention. [Figure 2] This is a functional block diagram of the X-ray analyzer of the embodiment. [Figure 3] This is a schematic diagram showing an irradiation area on the sample surface of the embodiment. [Figure 4] This is a diagram showing an image in which the irradiation area is superimposed on the captured image of the embodiment. [Figure 5] This is a diagram showing an image in which the irradiation area and the non-detectable area are superimposed on the captured image of the embodiment.

Embodiment for Carrying Out the Invention

[0019] The X-ray analyzer according to an embodiment of the present invention will be described with reference to the drawings. Note that, for the sake of clarity, all the drawings shown below are schematically drawn with appropriate omissions or exaggerations.

[0020] <Device Configuration> The X-ray analyzer 100 of the present embodiment is a fluorescence X-ray analyzer that irradiates a sample W with primary X-rays XR1 and detects secondary X-rays (fluorescent X-rays) XR2 generated from the sample W, thereby quantitatively or qualitatively analyzing the elements contained in the sample W.

[0021] Specifically, as shown in FIG. 1, the X-ray analyzer 100 includes an X-ray irradiation unit 2 that irradiates the sample W with primary X-rays XR1, and an X-ray detection unit 3 that detects fluorescent X-rays XR2 generated from the sample W. The X-ray irradiation unit 2 and the X-ray detection unit 3 of the present embodiment are mounted on a sensor head 20 connected to an information processing device 10 by a communication cable K1. In addition, the sensor head 20 is connected to a power supply unit 30 via a power supply cable K2.

[0022] The X-ray irradiation unit 2 comprises an X-ray generator 21 and a collimator 22. The X-ray generator 21 includes an X-ray tube and generates primary X-rays XR1 by exciting the target metal with thermionic electrons generated from the X-ray tube. The collimator 22 has a passage window that allows the primary X-rays XR1 generated by the X-ray generator 21 to pass through, and the primary X-rays XR1 are focused by this passage window.

[0023] The X-ray detection unit 3 comprises an X-ray detector 31 and an output unit 32 that outputs signals from the X-ray detector 31 to the information processing device 10. The X-ray detector 31 is configured using an X-ray detection element such as a Si element (for example, a silicon drift detector (SDD)). The output unit 32 is a digital pulse processor (DPP) or the like that detects a charge corresponding to the magnitude of the energy generated when fluorescent X-rays XR2 generated from the sample W are incident on the X-ray detector 31, and converts the detected charge into a trapezoidal wave signal with a height corresponding to the magnitude of the charge.

[0024] As shown in Figure 2, the information processing device 10 includes a spectrum generation unit 11 that generates a fluorescence X-ray XR2 spectrum based on the output of the X-ray detection unit 3, and an analysis unit 12 that performs qualitative or quantitative analysis of the elements contained in the sample W based on the fluorescence X-ray XR2 spectrum. In addition, the information processing device 10 also controls the X-ray irradiation unit 2.

[0025] The information processing device 10 consists of a computer main unit 10a comprising a CPU, memory, A / D converter, D / A converter, communication port, etc., and input means 10b such as a keyboard and mouse, and a display 10c connected to the computer main unit 10a. By installing a predetermined program in the memory, the information processing device 10 performs functions such as a spectrum generation unit 11 and an analysis unit 12, as shown in Figure 2.

[0026] Furthermore, the X-ray analyzer 100 of this embodiment is configured to identify the irradiation area IA of the primary X-ray XR1 on the surface of the sample W.

[0027] Specifically, as shown in Figures 1 and 2, the X-ray analyzer 100 includes a three-dimensional shape information acquisition unit 4 that acquires three-dimensional shape information of the sample W, and an irradiation area identification unit 5 that identifies the irradiation area IA of the primary X-ray XR1 using the three-dimensional shape information.

[0028] The three-dimensional shape acquisition unit 4 optically acquires three-dimensional shape information of the surface of the sample W. As shown in Figures 1 and 2, it comprises a pattern light irradiation unit 41 that irradiates the sample W with pattern light, an imaging unit 42 that images the sample W irradiated with pattern light, and a three-dimensional shape calculation unit 43 that calculates the three-dimensional shape information of the sample W based on the image captured by the imaging unit 42. Here, the pattern light irradiation unit 41 and the imaging unit 42 are mounted on a sensor head 20 connected to the information processing device 10 by a communication cable K1. The calculation unit 43 is also performed by the information processing device 10.

[0029] As shown in Figure 3, the pattern light irradiation unit 41 includes a light source 411 and a pattern conversion element 412 that converts the light from the light source 411 into pattern light and projects it onto the sample W. Here, the pattern light can be any type of light that changes the pattern image on the three-dimensional shape (concave and convex shape) of the surface of the sample W, such as a lattice pattern, grid pattern, concentric circle pattern, or linear pattern.

[0030] If the surface of the sample W is non-planar, a distorted pattern image is formed on the surface of the sample W. This distorted pattern image is captured by the imaging unit 42. The calculation unit 43 then obtains three-dimensional shape information of the surface of the sample W from the position of the pattern light irradiation unit 41 (light source 411) relative to the surface of the sample W, the position of the imaging unit 42 relative to the surface of the sample W, and the distorted pattern image in the captured image.

[0031] The irradiation area identification unit 5 identifies the irradiation area IA of the primary X-ray XR1 using the three-dimensional shape information acquired by the three-dimensional shape acquisition unit 4, the irradiation characteristics such as the emission angle of the X-ray irradiation unit 2, and the geometric arrangement of the X-ray irradiation unit 2 relative to the sample W (see Figure 3). In this embodiment, the geometric arrangement of the X-ray irradiation unit 2 relative to the sample W can be calculated using the pattern image acquired by the imaging unit 42. In other words, in this embodiment, the three-dimensional shape information of the surface of the sample W and the geometric arrangement of the X-ray irradiation unit 2 relative to the sample W can be acquired simultaneously.

[0032] As shown in Figure 4, the X-ray analyzer 100 of this embodiment further includes a display control unit 6 that superimposes the irradiation area IA onto the captured image IMG and displays it on the display 10c. The display control unit 6 is operated by the information processing device 10.

[0033] The display control unit 6 displays the fluorescent X-ray spectrum SP corresponding to the irradiation region IA, or the analysis result AR using that spectrum, on the display 10c, along with the captured image IMG on which the irradiation region IA is superimposed. Here, the analysis result AR is the qualitative or quantitative analysis result of the elements contained in the irradiation region IA of the sample W.

[0034] Furthermore, as shown in Figure 5, the display control unit 6 displays the undetectable region UDA on the display 10c in the irradiation region IA where the X-ray detection unit 3 cannot detect fluorescent X-rays XR2. Here, the undetectable region UDA is identified using the three-dimensional shape information acquired by the three-dimensional shape acquisition unit 4, the detection characteristics of the X-ray detection unit 3 such as the detection angle, and the geometric arrangement of the X-ray detection unit 3 with respect to the sample W. This undetectable region UDA is a region where the fluorescent X-rays XR2 generated from the sample W are blocked by the surface shape of the sample W (for example, a protrusion in the irradiation region of the primary X-ray XR1) and do not reach the X-ray detection unit 3.

[0035] In Figure 5, an example is shown in which the undetectable region UDA is displayed on the display 10c. However, the detectable region (the part other than the undetectable region) in the irradiation region IA, where the X-ray detection unit 3 can detect fluorescent X-rays XR2, may also be displayed on the display 10c.

[0036] In addition, the display control unit 6 can also superimpose a virtual irradiation area (not shown) on the captured image, which would appear if the primary X-ray XR1 were irradiated by the primary X-ray XR1, before the primary X-ray XR1 is irradiated by the X-ray irradiation unit 2, and display it on the display 10c.

[0037] <Effects of this embodiment> According to the X-ray analyzer 100 of this embodiment configured in this way, the irradiation area IA of the primary X-ray XR1 is identified using the three-dimensional shape information of the sample W. Therefore, even if the surface of the sample W is not planar, the location of the emission of fluorescent X-ray XR2 can be determined.

[0038] <Other Embodiments> For example, in the above embodiment, the sensor head 20 is equipped not only with an X-ray irradiation unit 21 and an X-ray detection unit 22, but also with a pattern light irradiation unit 41 and an imaging unit 42. However, the pattern light irradiation unit 41 and the imaging unit 42 may be provided separately from the sensor head 20.

[0039] Furthermore, in the above embodiment, the sample W was irradiated with pattern light to take an image, and at the same time, the sample W was irradiated with primary X-rays XR1 to detect fluorescent X-rays XR2, that is, the acquisition of three-dimensional shape information and fluorescent X-ray analysis were performed simultaneously. However, the three-dimensional shape information may be acquired in advance before the fluorescent X-ray analysis.

[0040] Furthermore, although the above embodiment was a portable X-ray analyzer that could be moved to a sample W placed outside, it may also be a stationary X-ray analyzer in which the sample W is placed on a stage inside the housing for analysis.

[0041] In addition, the three-dimensional shape acquisition unit may acquire three-dimensional shape information obtained from an external three-dimensional shape measuring device.

[0042] Furthermore, various modifications and combinations of the embodiments are permitted, as long as they do not contradict the spirit of the present invention. [Explanation of Symbols]

[0043] 100...X-ray analyzer 2...X-ray irradiation section 3. X-ray detection unit 4...Three-dimensional shape information acquisition unit 41 ···Pattern light irradiation section 42 ···Imaging Unit 43...Arithmetic section 5...Irradiation area identification part 6. Display Control Unit 10c... Display

Claims

1. An X-ray irradiation unit that irradiates the sample with primary X-rays, An X-ray detection unit for detecting secondary X-rays generated from the sample, A three-dimensional shape information acquisition unit acquires three-dimensional shape information of the aforementioned sample, An X-ray analyzer comprising an irradiation area identification unit that identifies the irradiation area of ​​the primary X-ray using the three-dimensional shape information, the emission angle of the X-ray irradiation unit, and the geometric arrangement of the X-ray irradiation unit with respect to the sample.

2. An X-ray irradiation unit for irradiating a sample with primary X-rays, An X-ray detection unit for detecting secondary X-rays generated from the sample, A three-dimensional shape information acquisition unit acquires three-dimensional shape information of the aforementioned sample, The system includes an irradiation area identification unit that identifies the irradiation area of ​​the primary X-ray using the three-dimensional shape information, An X-ray analyzer characterized in that the X-ray detection unit identifies an undetectable region in the irradiation region where the secondary X-rays cannot be detected or a detectable region where the secondary X-rays can be detected.

3. The three-dimensional shape information acquisition unit is, A pattern light irradiation unit that irradiates the sample with pattern light, An imaging unit for imaging the sample irradiated with the pattern light, The X-ray analyzer according to claim 1 or 2, further comprising a calculation unit that determines three-dimensional shape information of the sample based on the image captured by the imaging unit.

4. The X-ray analyzer according to claim 3, further comprising a display control unit that superimposes the irradiation area onto the captured image and displays it on a display.

5. The X-ray analyzer according to claim 4, wherein the display control unit displays the spectrum of the secondary X-rays or the analysis results using the spectrum on the display together with the captured image on which the irradiation area is superimposed.

6. The X-ray analyzer according to claim 4 or 5, wherein the display control unit displays on the display an undetectable area in the irradiation area where the secondary X-rays cannot be detected by the X-ray detection unit, or a detectable area where the secondary X-rays can be detected.

7. The X-ray analyzer according to any one of claims 4 to 6, wherein the display control unit superimposes a virtual irradiation area on the captured image and displays it on the display before the primary X-ray is irradiated by the X-ray irradiation unit.

8. An X-ray analysis method for detecting secondary X-rays generated from a sample by irradiating the sample with primary X-rays, The three-dimensional shape information of the aforementioned sample is acquired, An X-ray analysis method for identifying the irradiation area of ​​the primary X-rays using the three-dimensional shape information, the emission angle of the primary X-rays, and the geometric arrangement of the emission positions of the primary X-rays relative to the sample.

9. An X-ray analysis program used in an X-ray analyzer comprising an X-ray irradiation unit for irradiating a sample with primary X-rays and an X-ray detection unit for detecting secondary X-rays generated from the sample, A three-dimensional shape information acquisition unit that acquires three-dimensional shape information of the sample, and An X-ray analysis program characterized by causing a computer to perform the function of an irradiation area identification unit that identifies the irradiation area of ​​the primary X-ray using the three-dimensional shape information, the emission angle of the primary X-ray, and the geometric arrangement of the X-ray irradiation unit relative to the sample.

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