Soft magnetic alloy powder and its manufacturing method, as well as a coil component made from soft magnetic alloy powder and a circuit board on which it is mounted.

Abstract

To provide soft magnetic metal powder that can achieve a higher filling rate.SOLUTION: Soft magnetic alloy powder contains Fe, Si, and at least one of Cr and Al, as constituent elements. On the surface of each grain constituting the alloy powder, an oxide film is provided which is such that: it contains Si, as well as at least one of Cr and Al, as constituent elements; these elements are contained at higher percentages by mass than those in an alloy part; and the content of Si, expressed in percentage by mass, is higher than the total content of Cr and Al.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] This invention relates to soft magnetic alloy powder, a method for producing the same, and a coil component made from soft magnetic alloy powder and a circuit board on which the same is mounted. [Background technology]

[0002] In recent years, coil components used in applications involving large currents have required not only miniaturization but also increased current capacity. To achieve this increased current, it is necessary to construct the core using magnetic materials that are less susceptible to magnetic saturation under current. As a result, iron-based metallic magnetic materials are increasingly being used instead of ferrite-based magnetic materials.

[0003] In particular, atomized powder is often used to form small coil components because it is necessary to increase the packing density of the powdered soft magnetic metal material. This is because atomized powder is obtained by blowing a fluid such as water or an inert gas onto a small stream of molten metal, causing it to scatter and solidify, resulting in particles that are relatively close to spherical in shape and have a small particle size.

[0004] Incidentally, powdered soft magnetic metal materials often have low insulation resistance in the individual particles that make up the powder. Therefore, to impart insulation properties, the surface of each particle is often covered with an insulating film before use.

[0005] One known method for forming an insulating film on the surface of each particle constituting soft magnetic metal powder is to attach a coating material to the particle surface. For example, Patent Document 1 reports that soft magnetic metal powder is coated with a treatment solution containing titanium alkoxides and silicon alkoxides to form a coating made of polymers of these compounds.

[0006] Another known method for forming an insulating film on the surface of each particle constituting the soft magnetic metal powder is to apply an oxidation treatment to the powder surface (Patent Document 2). As a specific method of such oxidation treatment, Fe-1%Si atomized alloy particles prepared to have an average particle size of 100 μm are subjected to an oxidation reaction at 450°C for 2 hours in an atmosphere with a very low oxygen concentration of 100% relative humidity (room temperature) by mixing water vapor into nitrogen gas, and as a result, a SiO2 oxide film with a film thickness of 5 nm is formed on the particle surface (Patent Document 3).

Prior Art Documents

Patent Documents

[0007]

Patent Document 1

Patent Document 2

Patent Document 3

Summary of the Invention

Problems to be Solved by the Invention

[0008] In recent years, since the frequency at which coil components are used tends to increase, the powdering of the powdery soft magnetic metal materials constituting them has advanced. For this reason, the use of fine powders with an average particle size of 5 μm or less has also increased. Even in soft magnetic metal powders composed of such fine particles, it is necessary to have a high packing ratio and to prevent a decrease in insulation due to an increase in the packing ratio.

[0009] However, conventional soft magnetic metal powders, even if they are the above-described atomized powders, tend to aggregate when pulverized, and for this reason, it has been difficult to obtain a high packing ratio with ordinary processing. To compensate for this, for example, special processing such as applying a high pressure during molding is required, and there has been a problem that the production of magnetic bodies is laborious. Furthermore, when a high pressure is applied during molding, there has also been a problem that the insulating film formed on the surface is broken due to the deformation of the soft magnetic metal particles, and the insulation may decrease.

[0010] Therefore, the present invention aims to solve the aforementioned problems and provide a soft magnetic metal powder that can achieve a high packing rate. [Means for solving the problem]

[0011] The inventors of the present invention conducted various studies to solve the aforementioned problems and found that the problems could be solved by specifying the composition of the soft magnetic metal powder and forming an oxide film having a specific composition on the surface of each particle constituting the metal powder, thereby completing the present invention.

[0012] In other words, the first embodiment of the present invention for solving the above problems is a soft magnetic alloy powder comprising Fe and Si, and at least one of Cr or Al as constituent elements, characterized in that each particle constituting the alloy powder has an oxide film on its surface comprising at least one of Cr or Al in addition to Si as a constituent element, the mass ratio of these elements contained is higher than that of the alloy portion within the grain, and the Si content expressed by mass ratio is greater than the sum of the Cr and Al.

[0013] Furthermore, a second embodiment of the present invention is a method for producing soft magnetic alloy powder, characterized by heat-treating a raw material powder of a soft magnetic alloy containing Fe and Si, and at least one of Cr or Al as constituent elements, wherein the Si content expressed by mass percentage is greater than the sum of Cr and Al, in an atmosphere with an oxygen concentration of 5 ppm to 500 ppm at a temperature of 600°C or higher.

[0014] Furthermore, a third embodiment of the present invention is a coil component comprising a coil portion made of a metal conductor and a magnetic substrate containing soft magnetic alloy particles, wherein the soft magnetic alloy particles are soft magnetic alloy particles constituting the soft magnetic alloy powder according to the first embodiment.

[0015] Furthermore, a fourth embodiment of the present invention is a circuit board on which a coil component according to the third embodiment is mounted. [Effects of the Invention]

[0016] According to the present invention, it is possible to provide a soft magnetic alloy powder that can achieve a high packing density. [Brief explanation of the drawing]

[0017] [Figure 1] Diagram illustrating an example of particle shape in a soft magnetic alloy powder according to an embodiment of the present invention. [Figure 2] Explanatory diagram of a structural example of a composite coil component according to an embodiment of the present invention. [Figure 3] Diagram illustrating an example of the structure of a winding coil component according to an embodiment of the present invention ((a): overall perspective view, (b): cross-sectional view AA in (a)) [Figure 4] Diagram illustrating an example of the structure of a laminated coil component according to an embodiment of the present invention ((a): overall perspective view, (b): cross-sectional view of BB in (a)) [Figure 5] Explanatory diagram of a structural example of a thin-film coil component according to an embodiment of the present invention. [Figure 6] Measurement results of the concentration distribution of each element in soft magnetic alloy powder according to an embodiment of the present invention (Example 1) and soft magnetic alloy powder that does not satisfy the requirements of the present invention (Comparative Example 1) (Solid line: Example 1, Dotted line: Comparative Example 1) [Figure 7] Calculation results of the Si / Cr mass ratio distribution in soft magnetic alloy powder according to an embodiment of the present invention (Example 1) and soft magnetic alloy powder that does not satisfy the requirements of the present invention (Comparative Example 1) (Solid line: Example 1, Dotted line: Comparative Example 1) [Figure 8] The graph shows the relationship between the common logarithm of the specific surface area S (m² / g) and the common logarithm of the average particle size D50 (μm) for soft magnetic alloy powders according to embodiments of the present invention (Examples 1-6) and soft magnetic alloy powders that do not satisfy the requirements of the present invention (Comparative Examples 1-6). (Black circles - solid lines: Examples 1-6, white triangles - dotted lines: Comparative Examples 1-6) [Figure 9] Calculation results of the Si / Al mass ratio distribution in soft magnetic alloy powder according to an embodiment of the present invention (Example 7) (solid line: Comparative Example 7, dotted line: raw material powder) [Modes for carrying out the invention]

[0018] The structure and effects of the present invention will be explained below, along with technical concepts, with reference to the drawings. However, the mechanism of action is based on assumptions, and its accuracy does not limit the present invention. Furthermore, among the components in the following embodiments, those components not described in the independent claim representing the highest-level concept will be described as optional components. Note that the numerical range description (two numbers connected by "~") includes the numerical values ​​described as the lower and upper limits.

[0019] [Soft magnetic alloy powder] The soft magnetic alloy powder according to the first embodiment of the present invention (hereinafter sometimes simply referred to as "first embodiment") contains Fe and Si, and at least one of Cr or Al as constituent elements. The surface of each particle constituting the alloy powder has an oxide film that contains at least one of Cr or Al in addition to Si as constituent elements, the mass proportion of these elements is higher than that of the alloy portion within the particle, and the mass proportion of Si is greater than the sum of the Cr and Al. An example of the particle shape in the soft magnetic alloy powder according to the first embodiment is schematically shown in Figure 1.

[0020] Through the inventors' research, it was discovered that in conventional soft magnetic metal powders, the surface of each particle constituting the powder may have fine irregularities due to the formation of an insulating layer or natural oxidation. Therefore, even if the particle shape is spherical, the large friction between particles caused by these irregularities results in insufficient fluidity, making it difficult to obtain a high packing density. In contrast, in the aforementioned first embodiment, the oxide film on the particle surface is rich in Si, resulting in a smooth surface with a glass-like microstructure and excellent fluidity. Moreover, because the mass ratio of Cr or Al in the oxide film is higher than that of the alloy portion, spontaneous oxidation is suppressed and the structure of the oxide film is maintained, so this surface state can be maintained even with environmental changes. In addition, in the first embodiment, it is believed that the suppression of static electricity on the particle surface by the oxide film having the aforementioned characteristics, which makes it less likely for particles to aggregate, also contributes to fluidity.

[0021] The first embodiment includes Fe and Si, and at least one of Cr or Al as constituent elements. The composition of the alloy portion in soft magnetic alloy powder is not particularly limited as long as it satisfies the aforementioned requirements. For example, it may contain 1% to 10% by mass of Si, 0.5% to 5% by mass of Cr if present, 0.2% to 3% by mass of Al if present, and the remainder being Fe and unavoidable impurities. In order to suppress segregation of Cr or Al in the alloy portion and obtain particularly excellent magnetic properties, it is preferable that the total amount of Cr or Al be 4% by mass or less, and more preferably 2% by mass or less. Furthermore, if the alloy portion contains Al, it is particularly preferable that its content be 1% by mass or less, since Al is more easily oxidized on the particle surface than Cr. Needless to say, the alloy portion may also contain elements other than those mentioned above.

[0022] The particle size of the soft magnetic alloy powder is not particularly limited; for example, the average particle size (median diameter (D)) can be calculated from the particle size distribution measured on a volume basis. 50 The particle size can be 0.5 μm to 30 μm. The average particle size is preferably 1 μm to 10 μm. This average particle size can be measured, for example, using a particle size distribution analyzer that utilizes laser diffraction / scattering.

[0023] The first embodiment provides an oxide film on the surface of each particle constituting the alloy powder, which contains at least one of Cr or Al in addition to Si as a constituent element, and in which the mass ratio of these elements is higher than that of the alloy portion within the particle. By having more Si in the oxide film than in the alloy portion, the insulating properties of the film itself can be increased. In addition, because the smoothness of the oxide film surface is increased, a decrease in insulating properties due to fine depressions is less likely to occur, sufficient insulating properties can be obtained with a thin thickness, and the fluidity of the soft magnetic alloy powder is improved. Furthermore, by having more Cr or Al in the oxide film than in the alloy portion, further oxidation of the alloy portion due to oxygen reaching the alloy portion is suppressed, and the stability of the film is improved. The presence of such an oxide film makes it possible to improve the insulation of the magnetic material (core), wound component, and laminated component using the first embodiment.

[0024] Here, the mass ratio of each element in the alloy portion and oxide film is measured by the following method. Using an X-ray photoelectron spectroscopy analyzer (PHI Quantera II, manufactured by ULVAC-PHI, Inc.), the distribution of each element in the depth direction (radial direction) of the particle is obtained by repeatedly measuring the content ratio (atomic %) of iron (Fe), silicon (Si), oxygen (O), chromium (Cr), and aluminum (Al) on the particle surface constituting the soft magnetic alloy powder and sputtering the particle surface. The content ratio of each element is measured using monochromatic AlKα rays as the X-ray source, with a detection area of ​​100 μmφ, and measurements are performed at depths of 5 nm. The sputtering conditions are as follows: argon (Ar) is used as the sputtering gas, the applied voltage is 2.0 kV, and the sputtering rate is approximately 5 nm / min (converted to SiO2). In the Fe concentration distribution (atomic %) obtained by measurement, the boundary between the alloy portion and the oxide film is defined as the point where the concentration difference between measurement points first becomes less than 1 atomic %, when viewed from the surface side of the particle. Then, the mass percentage of each element is calculated for the oxide film, which is the region shallower than the boundary, and the alloy portion, which is the region deeper than the boundary. If the composition of the soft magnetic alloy powder is known, the mass percentage of each element calculated based on that known composition may be used as the mass percentage of each element in the alloy portion.

[0025] In the first embodiment, the Si content, expressed as a mass percentage in the oxide film, is greater than the sum of Cr and Al. The Si-rich oxide film results in a smooth surface with a glass-like microstructure, and the soft magnetic alloy powder composed of particles having this surface exhibits excellent fluidity. The proportion of Si present in the oxide film can be increased by increasing the Si composition ratio of the soft magnetic alloy powder or by lowering the heat treatment temperature.

[0026] The aforementioned oxide film preferably has a ratio of Si mass to the total mass of Cr and Al at the outermost surface (Si / (Cr+Al)) of 1 to 10. When the ratio is 1 or greater, the film has a smoother surface with fewer fine irregularities. On the other hand, when the ratio is 10 or less, excessive oxidation is suppressed, and the stability of the film is further improved even if the oxide film is thin. The ratio is preferably 8 or less, and more preferably 6 or less. This allows the surface condition to be maintained even if heat treatment is applied.

[0027] Here, the ratio of the mass of Si to the total mass of Cr and Al at the outermost surface of the oxide film (Si / (Cr+Al)) is calculated from the data measured before sputtering (the first time) in the measurement of the mass ratio of each element in the alloy portion and oxide film as described above.

[0028] In the first embodiment, it is preferable that the relationship between the specific surface area S (m2 / g) and the average particle size D50 (μm) satisfies the following formula (1).

[0029]

number

[0030] This formula shows the specific surface area S(m²). 2 Common logarithm of ( / g) and average particle size D 50 This was derived based on the empirical rule that there is a linear relationship between the common logarithm of (μm) and the specific surface area of ​​a powder. The specific surface area of ​​a powder is affected not only by the surface irregularities of the particles that make it up, but also by the particle size. Therefore, a powder with a small specific surface area does not necessarily mean that it is composed of smooth particles with few surface irregularities. In the first embodiment, the influence of the surface state of the oxide film of the particles on the specific surface area and the influence of the particle size are separated using the above formula (1), and a soft magnetic alloy powder with a small specific surface area due to the influence of the former is made to have a smooth surface with few irregularities. S and D 50 When the relationship satisfies equation (1) above, the powder becomes more fluid. Specific surface area S(m 2(g) can be made smaller by increasing the proportion of Si present in the oxide film on the particle surface and reducing the surface roughness of the oxide film. An oxide film with less surface roughness is preferable because insulation can be maintained with a thin film thickness. As described above, the proportion of Si present in the oxide film on the particle surface can be increased by increasing the Si composition ratio of the soft magnetic alloy powder or reducing the heat treatment temperature. Specifically, the specific surface area S (m 2 / g) and the average particle size D 50 (μm) preferably satisfy the following formula (2), and more preferably satisfy the following formula (3).

[0031] [Number]

[0032] [Number]

[0033] Here, the specific surface area S is measured and calculated by the nitrogen gas adsorption method using a fully automatic specific surface area measuring device (Macsorb manufactured by Mountech Co., Ltd.). First, after degassing the measurement sample in a heater, the amount of adsorbed nitrogen is measured by adsorbing and desorbing nitrogen gas to the measurement sample. Next, the monolayer adsorption amount is calculated from the obtained amount of adsorbed nitrogen using the BET one-point method, and the surface area of the sample is derived from this value using the area occupied by one nitrogen molecule and the value of Avogadro's number. Finally, the specific surface area S of the powder is obtained by dividing the obtained surface area of the sample by the mass of the sample.

[0034] Also, the average particle size D[[ID=(29)]] 50 is measured and calculated by a particle size distribution measuring device (LA-950 manufactured by Horiba, Ltd.) using the laser diffraction / scattering method. First, water as a dispersion medium is placed in a wet flow cell, and the powder that has been sufficiently pulverized in advance is introduced into the cell at a concentration that can obtain an appropriate detection signal to measure the particle size distribution. Next, the median diameter in the obtained particle size distribution is calculated, and this value is taken as the average particle size D 50 .

[0035] In the first embodiment, it is preferable that the mass ratio of Si on the outermost surface of the oxide film is five times or more that of the alloy portion, and the mass ratio of Cr or Al on the outermost surface of the oxide film is three times or more that of the alloy portion. By using such mass ratios, better fluidity can be obtained.

[0036] Furthermore, in the first embodiment, it is preferable that all elements among Si, Cr, and Al contained in the alloy portion are contained throughout the oxide film. The presence of these elements throughout the oxide film indicates that the oxide film was formed by the diffusion of components from the alloy portion. In soft magnetic alloy powder in which an oxide film has been formed through this process, the distribution of each element within the constituent particles is continuous from the inside of the particle to the outer surface of the particle, thus reducing the stress generated inside the particle. This suppresses a decrease in the magnetic permeability of the particle itself.

[0037] Here, the fact that all elements of Si, Cr, and Al contained in the alloy portion are present throughout the oxide film can be confirmed by the detection of all of these elements at all measurement points located in the region designated as the oxide film, as shown in the distribution of each element in the depth direction (radial direction) obtained by measuring the mass ratio of each element in the alloy portion and the oxide film as described above.

[0038] To obtain soft magnetic alloy particles in which all elements of the alloy portion, including Si, Cr, and Al, are contained throughout the oxide film, it is effective to heat-treat the raw material powder of the soft magnetic alloy in a low-oxygen atmosphere (generally 5 ppm to 500 ppm or less), as described later. By creating such an oxidizing atmosphere, rapid oxidation reactions are suppressed. This allows for the selective oxidation of elements that oxidize more easily than Fe. In particular, the oxidation of Si, which oxidizes more easily than Fe, can be promoted. Furthermore, if the oxygen atmosphere is lower than this, although similar oxidation reactions can be obtained, the heat treatment time will be longer, and the range of oxygen supply will tend to be limited, leading to variations in the oxidation reaction depending on whether or not the particles are in contact with each other. For this reason, it is preferable to use the low-oxygen atmosphere described above.

[0039] Furthermore, in the first embodiment, the thickness of the oxide film is preferably 10 nm to 50 nm. By making the oxide film thickness 10 nm or more, it is possible to cover the fine irregularities of the alloy portion and form a smooth surface. In addition, high insulation properties can be obtained. It is more preferable that the thickness of the oxide film be 20 nm or more. By doing so, the ratio of Si on the oxide film surface can be further increased. In addition, even if defects in the oxide film occur during compression molding, which applies pressure when forming the magnetic material, the insulation properties can be maintained. On the other hand, by making the thickness of the oxide film 50 nm or less, the decrease in the smoothness of the particle surface due to non-uniformity of the film thickness can be suppressed. In addition, high magnetic permeability can be obtained when forming the magnetic material. It is more preferable that the thickness of the oxide film be 40 nm or less.

[0040] Here, the thickness of the oxide film is calculated by observing the cross-section of the magnetic particles constituting the soft magnetic alloy powder using a scanning transmission electron microscope (STEM) (JEM-2100F, manufactured by JEOL Ltd.), and measuring the thickness of the oxide film, which is recognized by the difference in contrast (brightness) between the alloy portion inside the particle and the surface, at 10 different locations on the particle at a magnification of 500,000x, and then calculating the average value.

[0041] [Method for manufacturing soft magnetic alloy powder] A method for producing soft magnetic alloy powder according to a second embodiment of the present invention (hereinafter sometimes simply referred to as "second embodiment") is characterized by heat-treating a raw material powder of a soft magnetic alloy containing Fe and Si, and at least one of Cr or Al as constituent elements, wherein the Si content expressed by mass percentage is greater than the sum of Cr and Al, at a temperature of 600°C or higher in an atmosphere with an oxygen concentration of 5 ppm to 500 ppm.

[0042] The raw material powder used in the second embodiment contains Fe and Si, and at least one of Cr or Al as constituent elements, with the Si content, expressed by mass percentage, being greater than the sum of Cr and Al. By including at least one of Cr or Al in the raw material powder, the excessive formation of an oxide film can be suppressed during the heat treatment described later. This makes it possible to stabilize the thickness of the oxide film. Furthermore, by having a higher Si content than the combined total of Cr and Al in the raw material powder, the oxide film formed on the surface of each particle constituting the alloy powder by the heat treatment described later can have a high mass ratio of Si content to the combined total of Cr and Al, thus ensuring insulation even with a thin oxide film. In addition, the oxidation of Cr and Al during the heat treatment described later can be suppressed, allowing for a thinner oxide film. Moreover, the oxide film can be made with fewer fine irregularities, resulting in a powder with excellent fluidity. The relationship between the total mass of Cr and Al and the mass of Si is preferable when the ratio (Si / (Cr+Al)) is greater than 2, as this suppresses the oxidation of Cr, Al, or Fe. This allows for the formation of an oxide film with a very low proportion of Fe and a high proportion of Si.

[0043] The composition of the raw material powder used is not particularly limited as long as it satisfies the requirements described above. For example, it may contain 1% to 10% by mass of Si, 0.5% to 5% by mass of Cr if Cr is included, 0.2% to 3% by mass of Al if Al is included, and the remainder being Fe and unavoidable impurities. In order to make the oxide film formed on the particle surface have a high mass ratio of Si content to the total of Cr and Al, it is preferable that the total amount of Cr or Al be 4% by mass or less. This also makes the surface smoother with fewer irregularities. In addition, in order to obtain particularly excellent magnetic properties by relatively suppressing the reaction of Cr or Al with oxygen compared to the reaction of Si with oxygen in the alloy portion, it is more preferable that the total amount of Cr or Al be 2% by mass or less. Furthermore, if the alloy portion contains Al, it is particularly preferable that its content be 1% by mass or less, since Al diffuses more easily to the particle surface than Cr. Needless to say, the alloy portion may also contain elements other than those described above.

[0044] The particle size of the raw material powder is not particularly limited; for example, the average particle size (median diameter (D)) can be calculated from the particle size distribution measured by volume. 50 The particle size can be 0.5 μm to 30 μm. The average particle size is preferably 1 μm to 10 μm. This average particle size can be measured, for example, using a particle size distribution analyzer that utilizes laser diffraction / scattering.

[0045] In the second embodiment, the raw material powder is heat-treated in an atmosphere with an oxygen concentration of 5 ppm to 500 ppm. By setting the oxygen concentration in the heat treatment atmosphere to 5 ppm or higher, the surfaces of the individual particles constituting the raw material powder are oxidized, and an oxide film with a smooth surface is formed with sufficient thickness. On the other hand, by setting the oxygen concentration in the heat treatment atmosphere to 500 ppm or lower, excessive oxidation of Cr and Al is suppressed, and a smooth oxide film rich in Si is formed on the surface of the individual particles constituting the raw material powder, resulting in a soft magnetic alloy powder with excellent fluidity, and a magnetic material produced from this alloy powder having excellent magnetic properties. The oxygen concentration in the heat treatment atmosphere is preferably 400 ppm or lower, and more preferably 300 ppm or lower. Furthermore, if the raw material powder contains Al, since Al oxidizes more easily than Cr, it is even more preferable to set the oxygen concentration in the heat treatment atmosphere to 50 ppm or lower.

[0046] The heat treatment temperature should be 600°C or higher. By setting the heat treatment temperature to 600°C or higher, the elements Si, Cr, and Al can be sufficiently diffused onto the surface of each particle constituting the raw material powder, forming a smooth and highly stable oxide film. The heat treatment temperature is preferably 700°C or higher, and more preferably 750°C or higher. There is no particular upper limit to the heat treatment temperature, but in order to suppress the oxidation of Fe and excessive oxidation of Cr and Al and obtain a magnetic material with excellent magnetic properties, it is preferably 900°C or lower, more preferably 850°C or lower, and even more preferably 800°C or lower. In particular, a temperature higher than 700°C and lower than 850°C is preferred in order to promote the oxidation of Si while suppressing the oxidation of Fe. In this case, the oxide film can be made as thin as possible while ensuring insulating properties.

[0047] While there are no particular limitations on the holding time at the heat treatment temperature, it is preferable to hold it for 30 minutes or more, and more preferably for 1 hour or more, from the viewpoint of achieving a sufficient oxide film thickness. On the other hand, from the viewpoint of improving productivity by completing the heat treatment in a short time, it is preferable to set the heat treatment time to 5 hours or less, and more preferably to 3 hours or less.

[0048] According to the second embodiment, the concentrations of Si, Cr, and Al at the outermost surface of each particle constituting the soft magnetic alloy powder increase compared to before heat treatment. In this case, if the concentrations of Si, Cr, and Al at the outermost surface of each particle constituting the soft magnetic alloy raw material powder, expressed in mass%, are [Si raw material powder], [Cr raw material powder], and [Al raw material powder], respectively, and the concentrations of Si, Cr, and Al at the outermost surface of each particle constituting the soft magnetic alloy powder, expressed in mass%, are [Si alloy powder], [Cr alloy powder], and [Al alloy powder], respectively, it is preferable to perform the heat treatment such that {([Cr alloy powder] + [Al alloy powder]) / [Cr raw material powder] + [Al raw material powder])} > ([Si alloy powder] / [Si raw material powder]), that is, the rate of increase in the combined amount of Cr and Al at the outermost surface of the particles due to heat treatment is greater than the rate of increase in Si. By performing heat treatment in this manner, a soft magnetic alloy powder with a more stable oxide film can be obtained.

[0049] Here, the concentrations of each element at the outermost surface of the particles constituting the raw material powder and the soft magnetic alloy powder are determined by the analysis results of the outermost surface of the particles using the X-ray photoelectron spectroscopy analyzer described above.

[0050] The heat treatment in the second embodiment may be a batch process or a flow process. An example of a flow process is a method in which multiple heat-resistant containers containing the raw material powder of a soft magnetic alloy are intermittently or continuously introduced into a tunnel furnace and passed through a region maintained at a predetermined atmosphere and temperature for a predetermined time.

[0051] In the second embodiment, prior to the heat treatment, a Si-containing compound may be attached to the surface of the particles constituting the raw material powder of the soft magnetic alloy. The attachment of the Si-containing compound forms a thick Si-rich oxide film when heat-treated, which improves the insulation between adjacent soft magnetic alloy particles when a magnetic material is formed, thereby reducing core loss. The type of Si-containing compound used and the method of attachment are not particularly limited, but a method in which a solution containing tetraethoxysilane (TEOS) is mixed and stirred into a dispersion of raw material powder, followed by solid-liquid separation and drying, is preferred because it allows for uniform attachment of the Si-containing compound and yields particles with a smooth surface through heat treatment.

[0052] According to the first and second embodiments described above, a soft magnetic alloy powder with excellent fluidity and a particle shape as illustrated in Figure 1 can be obtained. In addition to its excellent handling properties, the soft magnetic alloy powder has a high bulk density, which allows for an increased packing rate when it is molded to produce a magnetic material. Furthermore, because the soft magnetic alloy powder has a small surface area, the viscosity of the mixture when mixed with a binder such as resin can be kept low, resulting in a mixture with excellent moldability. Moreover, the small surface area of ​​the soft magnetic alloy powder contributes to excellent pressure transmission during press molding, allowing for lower press pressure, which is particularly effective in preventing damage to conductors in coil components having internal conductors. Among coil components manufactured from soft magnetic metal powder, so-called composite coil components, that is, components having a coil portion and a core portion in which the coil portion is embedded, and in which the core portion contains soft magnetic metal powder and resin, have the aforementioned advantages of the first and second embodiments, resulting in components with excellent magnetic properties, durability and reliability, and enabling miniaturization of the components. Furthermore, it is possible to improve the performance and miniaturize circuit boards on which such coil components are mounted. Therefore, preferred embodiments of the coil component and circuit board of the present invention will be described below as the third and fourth embodiments, respectively.

[0053] [Coil parts] A coil component according to the third embodiment of the present invention (hereinafter sometimes simply referred to as "third embodiment") is a coil component comprising a coil portion made of a metal conductor and a magnetic substrate containing soft magnetic alloy particles, characterized in that the soft magnetic alloy particles are soft magnetic alloy particles constituting the soft magnetic alloy powder according to the first embodiment.

[0054] The coil portion may be embedded in the magnetic substrate, or it may be wound around the magnetic substrate.

[0055] The magnetic substrate contains soft magnetic alloy particles that constitute the soft magnetic alloy powder according to the first embodiment. These soft magnetic alloy particles have a shape as illustrated in Figure 1 and, as described above, can be present in the magnetic substrate with a high packing density. The structure of the magnetic substrate may include a resin in addition to the soft magnetic alloy particles, and the shape may be maintained by the action of the resin. Alternatively, the shape may be maintained by bonding between the soft magnetic alloy particles via the oxide film.

[0056] Examples of the third embodiment include composite coil components as shown in Figure 2, wound coil components as shown in Figure 3, laminated coil components as shown in Figure 4, and thin-film coil components as shown in Figure 5.

[0057] In the manufacturing method of the third embodiment, for example, in the case of composite coil parts, a mixture is typically prepared by mixing soft magnetic alloy powder and resin, the mixture is poured into a mold such as a mold in which an air-core coil has been placed in advance, press-molded, and then the resin is cured to obtain the product. The soft magnetic alloy powder used has been described above, so its explanation will be omitted here. The type of resin used is not limited as long as it can bond the particles of soft magnetic metal powder together, allowing for molding and shape retention. Various resins such as epoxy resins and silicone resins can be used. The amount of resin used is also not limited; for example, it can be 1 to 10 parts by mass per 100 parts by mass of soft magnetic alloy powder. In the third embodiment, by using soft magnetic alloy powder with excellent fluidity, the amount of resin used can be reduced and the proportion of soft magnetic alloy powder can be increased. Therefore, it is preferable that the amount of resin used be 3 parts by mass or less per 100 parts by mass of soft magnetic alloy powder.

[0058] There are no restrictions on the method of mixing the soft magnetic alloy powder and the resin, or on the method of introducing the mixture into the mold. In addition to introducing a fluid mixture obtained by kneading both into the mold, methods such as introducing granulated soft magnetic alloy powder coated with resin into the mold can also be employed. Furthermore, as a method that combines introducing the mixture into the mold with press molding as described later, a method in which the mixture formed into a sheet is introduced into the mold by pressing may be employed.

[0059] There are no restrictions on the temperature and pressure of the press molding process; they can be appropriately determined according to the material and shape of the air-core coil placed in the mold, the fluidity of the soft magnetic metal powder introduced, and the type and amount of resin introduced. The curing temperature of the resin should also be determined appropriately depending on the resin being used.

[0060] The magnetic substrate according to the third embodiment may be formed by press-molding a mixture of soft magnetic alloy powder and resin, and then heat-treating the resulting molded body at a temperature higher than the curing temperature of the resin. In this case, the resin decomposes due to the heat treatment, and an oxide film grows on the surface of the soft magnetic alloy particles, causing the soft magnetic alloy particles to bond together. Although the resin components are almost completely decomposed by the heat treatment, some carbon may remain.

[0061] By winding a wire onto the magnetic substrate obtained in this way, a wound coil component can be obtained. The wound coil component is also one example of a coil component according to the third embodiment.

[0062] Furthermore, if the coil component is a laminated coil component, it can be manufactured using the sheet method. The procedure for the sheet method is as follows: First, a mixture is prepared by mixing soft magnetic alloy powder and resin. This mixture is then coated into a sheet using a doctor blade method or the like. After cutting the sheet, via holes are created at predetermined positions using a laser or the like, and an internal pattern is printed at predetermined positions. Next, these sheets are laminated in a predetermined order and heat-pressed to obtain a laminate. Then, if necessary, the laminate is cut to the size of individual components using a cutting machine such as a dicing machine or a laser cutting machine. Finally, the laminate is heat-treated to obtain a laminated coil component. A laminated coil component is also one example of a coil component according to the third embodiment.

[0063] Furthermore, if the coil component is a thin-film coil component, photolithography can be employed. A thin-film coil component is also an example of the third embodiment.

[0064] In addition to the manufacturing methods exemplified above, it goes without saying that known manufacturing methods can be employed depending on the shape of the coil components, etc.

[0065] The composite coil component, an example of the third embodiment described above, uses a soft magnetic metal powder with excellent fluidity, thereby increasing the filling density of the soft magnetic metal and obtaining a core with high magnetic permeability. This reduces the element volume required to obtain the same inductance, thus enabling miniaturization of the coil component. Furthermore, since the composite coil component, an example of the third embodiment, can be molded with low press pressure during manufacturing, the air-core coil embedded inside is less likely to be damaged, improving durability and reliability.

[0066] [Circuit board] A circuit board according to the fourth embodiment of the present invention (hereinafter sometimes simply referred to as "the fourth embodiment") is a circuit board on which a coil component according to the third embodiment is mounted. The structure of the circuit board is not limited; any design suitable for the purpose should be adopted. The fourth embodiment allows for improved performance and miniaturization by using the coil component according to the third embodiment. [Examples]

[0067] The present invention will be described in more detail below with reference to examples, but the present invention is not limited to these examples.

[0068] [Example 1] (Manufacturing of soft magnetic alloy powder) First, a raw material powder of a soft magnetic alloy with an average particle size of 4.0 μm and a composition of Fe-3.5Si-1.5Cr (the values ​​indicate mass percentages) was placed in a zirconia container and then placed in a vacuum heat treatment furnace. Next, the furnace was evacuated to an oxygen concentration of 100 ppm, the temperature was raised to 700°C at a heating rate of 5°C / min, and the temperature was held for 1 hour to perform heat treatment. The furnace was then cooled to room temperature to obtain the soft magnetic alloy powder according to Example 1.

[0069] (Measurement of elemental distribution in soft magnetic alloy powder) The mass ratios of each element in the alloy portion and oxide film of the obtained soft magnetic alloy powder were measured using the method described above. The concentration distribution shown by the solid line in Figure 6 was obtained, confirming that the surface of each particle constituting the alloy powder had an oxide film with a higher mass ratio of Si and Cr compared to the alloy portion. Furthermore, the distribution of the Si / Cr mass ratio was calculated from the obtained concentration distribution, and the result shown by the solid line in Figure 7 was obtained. The Si / Cr mass ratio at the outermost surface of the particles was 3.62. As can be seen from the solid line in Figure 6, the oxide film shows a continuous increase in Cr content from the inside of the particles (alloy side) outwards, along with an increase in O content. Similarly, the Si content begins to increase continuously from the region where the Cr content starts to increase. Thus, the presence of Cr suppresses excessive oxidation of the alloy portion, resulting in a thinner oxide film. Furthermore, a higher Si content than Cr enables high insulation. This is because Si oxide has higher insulation resistance than Cr oxide. Here, the Si content is higher than Cr throughout the entire oxide film. Both Cr and Si are present throughout the oxide film. Additionally, the Fe content in this oxide film continuously decreases from the alloy portion outwards. This also contributes to the high insulation properties of the oxide film and the small surface irregularities. Furthermore, the continuous distribution of Cr, Si, and Fe indicates that this oxide film has high adhesion to the alloy portion, thus preventing damage that is easily caused by pressure and other factors.

[0070] (Measurement of specific surface area and average particle size of soft magnetic alloy powder) The specific surface area S and average particle size D of the obtained soft magnetic alloy powder were determined using the method described above. 50 When measured, S = 0.45m 2 / g and D 50 The result was 4.0 μm.

[0071] (Evaluation of the fluidity of soft magnetic alloy powder) The fluidity of the obtained soft magnetic alloy powder is determined by the tap density d T The tap density was evaluated as follows: A predetermined mass of soft magnetic alloy powder was placed in a graduated glass cylinder, and the bulk density was calculated by repeatedly tapping and reading the filling height (volume) of the powder. The value at which the change in bulk density per 10 taps was 5% or less was defined as the tap density. The obtained tap density was 4.5 g / cm³. 3 That was the case.

[0072] (Evaluation of magnetic material properties) The properties of the obtained soft magnetic alloy powder when used as a magnetic material were evaluated by the relative permeability of the toroidal coil, and the volume resistivity and dielectric breakdown voltage of the disc-shaped sample.

[0073] The toroidal coil for evaluation was fabricated using the following procedure. First, soft magnetic alloy powder was stirred and mixed with 1.2 mass% acrylic binder to prepare the molding material. Next, this molding material was placed into a mold having a molding space corresponding to a toroidal coil with an outer diameter of 8 mm and an inner diameter of 4 mm, and the material was applied at 8 t / cm². 2 A molded body with a thickness of 1.3 mm was obtained by uniaxial compression molding under pressure. Next, the obtained molded body was placed in a constant temperature bath at 150°C for 1 hour to harden the binder, and then heated to 300°C in a superheated steam furnace to remove the binder by thermal decomposition. Next, a toroidal core was obtained by heat treatment in a quartz furnace at 800°C for 1 hour in an atmosphere with an oxygen concentration of 800 ppm. Finally, a coil made of urethane-coated copper wire with a diameter of 0.3 mm was wound around the obtained toroidal core 20 times to prepare an evaluation sample.

[0074] The relative permeability of the obtained evaluation sample was measured at a frequency of 10 MHz using an L-chromometer (Agilent Technologies 4285A). The obtained relative permeability was 25.

[0075] The disc-shaped samples for evaluation were prepared using the following procedure. First, soft magnetic alloy powder was stirred and mixed with 1.2% by mass of acrylic binder to prepare the molding material. Next, this molding material was placed into a mold having a disc-shaped molding space with an inner diameter of 7 mm, and filled at 8 t / cm². 2 A molded body with a thickness of 0.5 mm to 0.8 mm was obtained by uniaxial compression molding under pressure. Next, the obtained molded body was placed in a constant temperature bath at 150°C for 1 hour to harden the binder, and then heated to 300°C in a superheated steam furnace to remove the binder by thermal decomposition. Next, a heat treatment was performed in a quartz furnace at 800°C for 1 hour in an atmosphere of oxygen concentration of 800 ppm to obtain a disc-shaped sample. Finally, an Au film was formed on both sides of the obtained disc-shaped sample by sputtering to create an evaluation sample.

[0076] The volume resistivity of the obtained evaluation sample was measured in accordance with JIS-K6911. The Au films formed on both sides of the sample were used as electrodes, and a voltage was applied between the electrodes to achieve an electric field strength of 60 V / cm. The resistance value was measured, and the volume resistivity was calculated from this resistance value. The volume resistivity of the evaluation sample was 103 MΩ·cm.

[0077] Furthermore, the dielectric breakdown voltage of the obtained evaluation sample was determined by using the Au films formed on both sides of the sample as electrodes, applying a voltage between the electrodes, and measuring the current value. The applied voltage was gradually increased and the current value was measured, and the current density calculated from this current value was 0.01 A / cm². 2 The electric field strength calculated from the resulting voltage was defined as the breakdown voltage. The dielectric breakdown voltage of the evaluation sample was 0.0047 MV / cm.

[0078] [Comparative Example 1] The soft magnetic alloy raw material powder used in Example 1 was used as the soft magnetic alloy powder for Comparative Example 1.

[0079] The mass proportions of each element in the alloy portion and oxide film of the soft magnetic alloy powder were measured using the same method as in Example 1, and the concentration distribution shown by the dotted line in Figure 6 was obtained. In the oxide film, the mass proportion of Si was higher than in the alloy portion, but the mass proportion of Cr was about the same as in the alloy portion. Furthermore, when the Si / Cr mass ratio distribution was calculated from the obtained concentration distribution, the result shown by the dotted line in Figure 7 was obtained. The Si / Cr mass ratio at the outermost surface of the particles was 10.40. From the comparison between Example 1 (solid line) and Comparative Example 1 (dotted line) in Figure 7, it can be seen that the Si / Cr mass ratio at the particle surface was brought into a favorable range by the heat treatment.

[0080] Furthermore, the specific surface area S and average particle size D of this soft magnetic alloy powder were determined using the same method as in Example 1. 50 and tap density d T When measured, S = 0.58m 2 / g, D 50 = 4.0 μm and d T = 3.7 g / cm³ 3That's what happened. Furthermore, when the properties of this soft magnetic alloy powder as a magnetic material were evaluated using the same method as in Example 1, the relative permeability was 22, the volume resistivity was 0.2 MΩ·cm, and the dielectric breakdown voltage was 0.0018 MV / cm.

[0081] [Example 2] A soft magnetic alloy powder according to Example 2 was obtained in the same manner as in Example 1, except that a raw material powder with an average particle size of 2.2 μm was used and the oxygen concentration of the heat treatment atmosphere was set to 5 ppm. The obtained soft magnetic alloy powder was subjected to the same method as in Example 1, and the mass ratios of each element in the alloy portion and oxide film were measured. The concentration distribution was similar to that of Example 1. Furthermore, the obtained soft magnetic alloy powder was subjected to the same method as in Example 1 to determine the specific surface area S and average particle size D. 50 and tap density d T When measured, S = 0.80m 2 / g, D 50 =2.2μm and d T = 3.9 g / cm³ 3 That's what happened. Furthermore, when the obtained soft magnetic alloy powder was used as a magnetic material, its relative permeability and volume resistivity were evaluated using the same method as in Example 1. The results showed a relative permeability of 22 and a volume resistivity of 100 MΩ·cm.

[0082] (Measurement of oxide thickness) In this example, the thickness of the oxide film on the obtained soft magnetic alloy powder was measured using the method described above. The thickness of the obtained oxide film was 30 nm.

[0083] (Evaluation of packing properties in magnetic materials) In this embodiment, in addition to the evaluation described above, the packing ability of the obtained soft magnetic alloy powder in the magnetic material was evaluated by the packing rate of the disc-shaped sample and the density ratio of the flange portion to the shaft portion of the drum core-shaped sample.

[0084] The disc-shaped sample was prepared using the same method as the disc-shaped sample in Example 1. The outer diameter and thickness of the obtained disc-shaped sample were measured to calculate its volume (actual volume). Furthermore, the true density of the soft magnetic alloy powder used to prepare the disc-shaped sample was measured using a pycnometer. By dividing the mass of the disc-shaped sample by this true density, the volume (ideal volume) of a magnetic material formed by the soft magnetic alloy powder in the disc-shaped sample with a packing density of 100% by volume was calculated. The packing density was then calculated by dividing this ideal volume by the actual volume. The resulting packing density was 80.5% by volume.

[0085] The drum core-shaped sample was prepared using the same procedure as the disc-shaped sample, except that the mold used for molding was changed to one having a space for molding the shaft portion and a space for molding the flange portion. A drum core-shaped sample with a shaft portion size of 1.6 mm × 1.0 mm × 1.0 mm and a flange portion thickness of 0.25 mm was obtained.

[0086] The density ratio of the flange portion to the shaft portion of the obtained drum core-shaped sample was calculated by taking samples from both the shaft and flange portions of the sample, measuring the volume of each sample using the constant volume expansion method, measuring the mass of each sample, and then calculating the density of each portion from these measurements and taking the ratio. In this sample, since the flange portion and the shaft portion are made of the same material, the density ratio corresponds to the ratio of the packing density. The obtained density ratio was 0.93.

[0087] [Comparative Example 2] The soft magnetic alloy raw material powder used in Example 2 was replaced with the soft magnetic alloy powder used in Comparative Example 2. When the mass ratio of each element in the alloy portion and oxide film of the soft magnetic alloy powder was measured using the same method as in Example 1, it showed a concentration distribution similar to that of Comparative Example 1. Furthermore, the specific surface area S and average particle size D of this soft magnetic alloy powder were determined using the same method as in Example 1. 50 and tap density d T When measured, S = 1.01m 2 / g, D 50 = 2.2 μm and d T = 3.2 g / cm³ 3 That's what happened. Furthermore, when this soft magnetic alloy powder was used as a magnetic material, its relative permeability and volume resistivity were evaluated using the same method as in Example 1. The results showed a relative permeability of 16 and a volume resistivity of 0.5 MΩ·cm.

[0088] The thickness of the oxide film in the soft magnetic alloy powder in this comparative example was measured using the same method as in Example 2, and was found to be 2 nm. Furthermore, when the packing capacity of the soft magnetic alloy powder in the magnetic material was evaluated using the same method as in Example 2, the packing capacity was 78.8% by volume and the density ratio was 0.90.

[0089] [Examples 3-6] Soft magnetic alloy powders according to Examples 3 to 6 were obtained in the same manner as in Example 1, except that raw material powders with different particle sizes were used. The obtained soft magnetic alloy powders were measured for the mass ratio of each element in the alloy portion and oxide film using the same method as in Example 1. All examples showed the same concentration distribution as in Example 1. Furthermore, the obtained soft magnetic alloy powder was subjected to the same method as in Example 1 to determine the specific surface area S and average particle size D. 50 The tap density dT was also measured. The results are summarized in Table 1.

[0090] [Comparative Examples 3-6] Soft magnetic alloy powders similar to those in Comparative Example 1 were prepared, except for differences in particle size, and these were used as the soft magnetic alloy powders for Comparative Examples 3 to 6. For each of the soft magnetic alloy powders, the mass ratio of each element in the alloy portion and oxide film was measured using the same method as in Example 1. In all examples, the concentration distribution was the same as in Comparative Example 1. Furthermore, for these soft magnetic alloy powders, the specific surface area S and average particle size D were determined using the same method as in Example 1. 50 The tap density was also measured. The results are summarized in Table 1.

[0091] Specific surface area S and average particle size D of soft magnetic alloy powders in Examples 1-6 and Comparative Examples 1-6 50 and tap density d TThe measurement results are summarized in Table 1. Furthermore, for these examples and comparative examples, the logarithm of the specific surface area S is plotted on the vertical axis, and the average particle size D is plotted on the vertical axis. 50 Figure 8 shows a graph with the common logarithm of the formula on the horizontal axis. In Figure 8, the black circles and solid lines represent the examples, and the white triangles and dotted lines represent the comparative examples.

[0092] [Table 1]

[0093] Table 1 shows that the soft magnetic alloy powders in the examples have the same average particle size D 50 The specific surface area S is smaller than that of the comparative example, and the tap density d T It can be seen that the size has increased. From these results, it is thought that the soft magnetic alloy powders in each example have an oxide film on the surface of each particle in which the mass ratio of Si, Cr, and Al is higher than that of the alloy portion, and the mass ratio of Si is greater than the sum of the Cr and Al, resulting in a smooth particle surface with fewer irregularities, and thus exhibiting superior fluidity compared to soft magnetic alloy powders of the same particle size that do not have the oxide film. Specific surface area S and average particle size D 50 In Figure 8, which summarizes the relationship, each example (black circle) and comparative example (white triangle) lie on the same straight line, and the equation of the straight line (solid line) relating to the example is log(S) = -0.98{log(D 50 )}+0.2455, the equation of the line (dotted line) related to the comparative example is log(S)=-0.9812{log(D 50The result was +0.3491. From this result, it can be said that the measurement results of soft magnetic alloy powders that have undergone similar processing and have similar surface conditions lie on the same straight line. Furthermore, since each of the aforementioned straight lines has a slope of -0.98, and the straight line for the example is located below that of the comparative example, the smoothness of the particle surface is represented by the intercept of the graph, and the smaller the intercept, the smoother the surface and the better the flowability of the powder. From these points, it can be said that in order to obtain a soft magnetic alloy powder with better flowability, when the common logarithm of the specific surface area S and the common logarithm of the average particle size D50 are plotted, the powder should lie on the straight line with a slope of -0.98 and a smaller intercept.

[0094] [Comparative Example 7] The soft magnetic alloy powder according to Comparative Example 2 was heat-treated at 750°C for 1 hour in air to obtain the soft magnetic alloy powder according to Comparative Example 7. The obtained soft magnetic alloy powder was analyzed using the same method as in Example 1 to measure the mass ratio of each element in the alloy portion and the oxide film. It was confirmed that Cr was the most abundant element in the oxide film. When this soft magnetic alloy powder was used as a magnetic material, its relative permeability and volume resistivity were evaluated using the same method as in Example 1. The results showed a relative permeability of 11 and a volume resistivity of 2 MΩ·cm. Furthermore, when the thickness of the oxide film on the obtained soft magnetic alloy powder was measured using the same method as in Example 2, it was found to be 100 nm. Furthermore, when the packing capacity of the soft magnetic alloy powder in the magnetic material was evaluated using the same method as in Example 2, the packing capacity was 77.1 volume%, and the density ratio was 0.88.

[0095] Table 2 summarizes the measurement results for the relative permeability, volume resistivity, and dielectric breakdown voltage of the magnetic materials prepared from soft magnetic alloy powder for Examples 1 and 2 and Comparative Examples 1, 2, and 7. Table 3 summarizes the measurement results for Example 2 and Comparative Examples 2 and 7, including the thickness of the oxide film on the particle surface constituting the soft magnetic alloy powder, the packing density of the soft magnetic alloy powder in the plate-shaped sample, and the density ratio between the shaft and flange in the drum-core-shaped sample.

[0096] [Table 2]

[0097] [Table 3]

[0098] Table 2 shows that the magnetic materials of the examples, made from soft magnetic alloy powder with excellent fluidity, exhibit superior magnetic properties and insulation compared to those of the comparative examples. In particular, a comparison of Example 2 and Comparative Example 7, including Table 3, shows that the oxide film formed on the particle surface in the examples exhibits excellent insulation properties with a small thickness. Furthermore, Table 3 shows that the soft magnetic alloy powder of the example, which exhibits excellent fluidity, can produce a magnetic material in which soft magnetic alloy particles are uniformly and densely packed compared to the comparative example. From this, it can be said that when the soft magnetic alloy powder of the present invention is used to create a composite coil component in which the coil portion is embedded in the core portion, the soft magnetic alloy particles are uniformly and densely packed, resulting in a coil component with excellent magnetic properties.

[0099] [Example 7] A soft magnetic alloy powder according to Example 7 was obtained in the same manner as in Example 1, except that a powder with the composition Fe-3.5Si-0.5Al (the numerical value indicates the mass percentage) and an average particle size of 5.0 μm was used as the raw material powder for the soft magnetic alloy powder, and the oxygen concentration of the heat treatment atmosphere was set to 50 ppm.

[0100] The mass ratios of each element in the alloy portion and oxide film of the obtained soft magnetic alloy powder were measured using the same method as in Example 1. A concentration distribution similar to that of Example 1 was obtained, confirming that the surface of each particle constituting the alloy powder had an oxide film with a higher mass ratio of Si and Al compared to the alloy portion. Furthermore, when the Si / Al mass ratio distribution was calculated from the obtained concentration distribution, the result shown by the solid line in Figure 9 was obtained. For comparison, the Si / Al mass ratio distribution of the raw material powder before heat treatment is also shown by the dotted line in the figure. From this result, it can be seen that the Si / Al mass ratio on the particle surface came to a favorable range after heat treatment. The Si / Al mass ratio at the outermost surface of the particles after heat treatment was 3.13.

[0101] Furthermore, the specific surface area S and average particle size D of this soft magnetic alloy powder were determined using the same method as in Example 1. 50 and tap density d T When measured, S = 0.49m 2 / g, D 50 = 5.0 μm and d T = 4.6 g / cm³ 3 That's what happened. Specific surface area S and average particle size D 50 Since the relationship satisfies equation (1) above, it can be said that the soft magnetic alloy powder according to this embodiment is composed of particles having a smooth surface with few irregularities. Furthermore, the tap density d T However, those that were not heat-treated (d T = 4.0 g / cm³ 3 ) Because it is larger than [another component], the soft magnetic alloy powder according to this embodiment can be said to have excellent fluidity. [Industrial applicability]

[0102] The present invention provides a soft magnetic alloy powder with excellent fluidity. This soft magnetic alloy powder is easy to transport and fill into molds during the manufacturing process of magnetic materials, and it also has good compatibility with resins, making the present invention useful in terms of ease of handling. Furthermore, according to a preferred embodiment of the present invention, coil components containing soft magnetic alloy powder at a high filling rate can be formed at a low molding pressure, thus providing coil components with high magnetic properties, durability, and reliability. The present invention is also useful in that it enables miniaturization of coil components and circuit boards on which they are mounted.

Claims

1. A coil component comprising a coil portion made of a metal conductor and a magnetic substrate containing soft magnetic alloy particles, The soft magnetic alloy particles are It contains Fe, Si, and at least one of Cr or Al as constituent elements. The Si content, expressed as a mass percentage, is greater than the sum of Cr and Al. On its surface, It contains Si as a constituent element, The mass proportion of Si contained is higher than that of the alloy portion within the grain. The Si content, expressed as a mass percentage, is greater than the sum of Cr and Al. The Si content of the soft magnetic alloy particles increases continuously from the inside outwards. The Fe content of the soft magnetic alloy particles decreases continuously from the inside outward at a rate of 1 atomic percent or more every 5 nm. and The elemental concentration of Si, expressed as mass percent at the outermost surface, is the same as that of Fe, Si, Cr, and Al. The most common Equipped with an oxide film, The oxide film is defined as a region shallower than the boundary between the alloy portion and the oxide film, obtained by repeatedly measuring the iron (Fe) content (atomic %) on the surface of the soft magnetic alloy particles using an X-ray photoelectron spectroscopy analyzer and sputtering the particle surface, at intervals of 5 nm in Fe concentration distribution (atomic %), where the concentration difference between measurement points first falls below 1 atomic % when viewed from the surface side of the particle. The composition of the alloy portion is such that it contains 1 to 10% by mass of Si, 0.5 to 5% by mass of Cr if Cr is present, 0.2 to 3% by mass of Al if Al is present, and the remainder is Fe and unavoidable impurities. A coil component characterized by the following features.

2. The coil component according to claim 1, wherein the oxide film comprises at least one of Cr or Al in addition to Si as a constituent element.

3. The coil component according to claim 1, wherein the oxide film contains Cr in addition to Si as a constituent element.

4. The coil component according to claim 1, wherein the oxide film contains Al in addition to Si as a constituent element.

5. The coil component according to claim 1, wherein the oxide film comprises Cr and Al as constituent elements in addition to Si.

6. The magnetic substrate further comprises a resin or carbon, The coil portion is embedded within the magnetic substrate, A coil component according to any one of claims 1 to 5.

7. The magnetic substrate further comprises a resin or carbon, The coil portion is wound around the magnetic substrate, A coil component according to any one of claims 1 to 5.

8. The magnetic substrate is formed by bonding of the soft magnetic alloy particles with each other via the oxide film. The coil portion is embedded within the magnetic substrate, A coil component according to any one of claims 1 to 5.

9. The magnetic substrate is formed by bonding of the soft magnetic alloy particles with each other via the oxide film. The coil portion is wound around the magnetic substrate, A coil component according to any one of claims 1 to 5.

10. A circuit board on which a coil component according to any one of claims 1 to 9 is mounted.

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