X-ray inspection apparatus and method for adjusting the same

Abstract

To provide: an X-ray inspection device capable of accurately inspecting articles even when article inspection conditions and the like are changed; and a method for adjusting the X-ray inspection device.SOLUTION: The X-ray inspection device comprises: a conveyance unit that conveys an article; an X-ray source that irradiates the article with an X-ray; an X-ray detection unit which is capable of detecting the X-ray using a photon counting scheme, and which separates photon energy of the X-ray into two or more energy regions on the basis of a discretionary threshold; a threshold setting unit that sets the discretionary threshold; an X-ray image generation unit that generates two or more X-ray transmission images that correspond to the two or more energy regions, on the basis of the X-ray detection results from the X-ray detection unit; and an inspection unit that inspects the article on the basis of the X-ray that has passed through the article and is detected by the X-ray detection unit. The threshold setting unit sets the discretionary threshold on the basis of gradations of two or more X-ray transmission images.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to an X-ray inspection apparatus and an adjustment method thereof.

Background Art

[0002] As a conventional X-ray inspection apparatus, for example, the apparatus described in Patent Document 1 is known. The X-ray inspection apparatus described in Patent Document 1 discriminates and detects each photon of X-rays transmitted through the object to be measured into two or more energy regions by comparing the energy of the photon with a predetermined number of energy thresholds, and X-ray detection means for detecting, storage means for storing, for each of a plurality of types of objects to be measured, the object to be measured and the energy threshold directly or indirectly associated with each other, reference to the storage means, and the threshold value corresponding to the object to be measured whose type is specified by the input information, threshold setting means for holding so that the X-ray detection means can refer to it as a predetermined threshold value, and based on the number of photons detected by the X-ray detection means for each of one or more predetermined energy regions or the amount corresponding to the number of photons, inspection means for inspecting the object to be measured.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the X-ray inspection apparatus as described above, an energy threshold corresponding to the physical properties of an article as an object to be measured can be used by being stored in advance by the storage means. However, depending on the inspection conditions of the article (for example, the conveyance speed of the object to be measured, etc.), variations in the performance of the X-ray inspection apparatus itself, the state of the X-ray inspection apparatus (for example, changes in the energy distribution due to deterioration of the X-ray source), etc., the pre-stored energy threshold may not be optimal. For this reason, depending on the above inspection conditions, etc., the inspection accuracy of the object to be measured may decrease.

[0005] One aspect of the present invention is to provide an X-ray inspection device and a method for adjusting it that can accurately inspect articles even if the inspection conditions of the articles are changed. [Means for solving the problem]

[0006] An X-ray inspection apparatus according to one aspect of the present invention comprises a transport unit for transporting articles, an X-ray source for irradiating articles with X-rays, an X-ray detection unit capable of detecting X-rays using a photon counting method and discriminating the photon energy of the detected X-rays into two or more energy regions based on an arbitrary threshold, a threshold setting unit for setting an arbitrary threshold, an X-ray image generation unit that generates two or more X-ray transmission images corresponding to two or more energy regions based on the X-ray detection result by the X-ray detection unit, and an inspection unit that performs inspection of articles based on the X-rays transmitted through the articles detected by the X-ray detection unit, wherein the threshold setting unit sets an arbitrary threshold based on the density of the two or more X-ray transmission images.

[0007] An X-ray inspection apparatus according to another aspect of the present invention comprises a transport unit for transporting articles, an X-ray source for irradiating articles with X-rays, an X-ray detection unit capable of detecting X-rays using a photon counting method, and a control unit that receives the detection results from the X-ray detection unit. The control unit includes a discrimination unit that discriminates the photon energy of X-rays detected by the X-ray detection unit into two or more energy regions based on an arbitrary threshold, a threshold setting unit that sets an arbitrary threshold, an X-ray image generation unit that generates two or more X-ray transmission images corresponding to two or more energy regions based on the X-ray detection results from the X-ray detection unit, and an inspection unit that inspects articles based on the X-rays that have passed through the articles detected by the X-ray detection unit, wherein the threshold setting unit sets an arbitrary threshold based on the density of the two or more X-ray transmission images.

[0008] In these X-ray inspection devices, the threshold setting unit sets an arbitrary threshold based on the density of two or more X-ray transmission images. Therefore, the arbitrary threshold may change, for example, when the inspection conditions for an item are changed. In other words, the threshold setting unit can set an appropriate threshold that corresponds to changes in inspection conditions, etc. This allows for accurate inspection of items even if the inspection conditions for the item are changed.

[0009] The X-ray detection unit or discrimination unit may discriminate the photon energy into a first energy region, a second energy region, and a third energy region lower than the first and second energy regions. In this case, for example, the inspection accuracy of the item can be improved by excluding the noisiest energy region among the first to third energy regions.

[0010] An arbitrary threshold may be determined based on a threshold where the difference in density between two or more X-ray transmission images falls within a predetermined range. In this case, it becomes easier to detect the presence or absence of foreign objects contained in the item.

[0011] The arbitrary threshold value may also be the threshold value plus a correction value. In this case, the accuracy of the inspection of items can be improved.

[0012] If the difference in density between two or more X-ray transmission images is outside a predetermined range, the threshold setting unit may change an arbitrary threshold, and then the X-ray image generation unit may generate two or more other X-ray transmission images corresponding to two or more other energy regions that are discriminated based on the changed threshold, and the threshold setting unit may determine whether or not the difference in density between the two or more other X-ray transmission images is within a predetermined range. In this case, the threshold setting unit can accurately set an arbitrary threshold such that the difference in density between two or more X-ray transmission images is within a predetermined range.

[0013] The X-ray image generation unit generates two or more additional X-ray transmission images corresponding to two or more different energy regions that are discriminated based on a threshold different from an arbitrary threshold, and the threshold setting unit may compare the difference in density of the two or more X-ray transmission images with the difference in density of the other two or more X-ray transmission images. In this case, the threshold setting unit can easily determine the appropriateness of an arbitrary threshold by comparing the above differences.

[0014] A method for adjusting an X-ray inspection apparatus according to another aspect of the present invention comprises: an X-ray irradiation step of irradiating an inspection chamber provided in the housing with X-rays; an X-ray detection step of detecting X-rays using a photon counting method; a discrimination step of discriminating the photon energy of the detected X-rays into two or more energy regions by an arbitrary threshold; an image generation step of generating two or more X-ray transmission images corresponding to the two or more energy regions using the photon energy; and a threshold setting step of setting an arbitrary threshold based on the density of the two or more X-ray transmission images.

[0015] According to this adjustment method, in the threshold setting step, an arbitrary threshold is set based on the density of two or more X-ray transmission images. Therefore, the arbitrary threshold may be changed, for example, when the inspection conditions of an item are changed. In other words, the arbitrary threshold can be changed to an appropriate threshold that corresponds to changes in inspection conditions, etc. With an X-ray inspection device that implements this adjustment method, items can be inspected accurately even if the inspection conditions of the items are changed.

[0016] If the difference in density between two or more X-ray transmission images is outside a predetermined range during the threshold setting step, the threshold change, discrimination step, image generation step, and threshold setting step may be repeated until the difference falls within the predetermined range. In this case, an arbitrary threshold can be accurately set such that the difference in density between two or more X-ray transmission images falls within a predetermined range.

[0017] In the discrimination step, the photon energy is discriminated into two or more different energy regions based on a different threshold value from any threshold value. In the image generation step, two or more X-ray transmission images corresponding to two or more different energy regions are generated. In the threshold setting step, the difference in density between two or more X-ray transmission images and the difference in density between two or more other X-ray transmission images may be compared. In this case, the suitability of any threshold value can be easily determined by comparing the above differences.

Advantages of the Invention

[0018] According to one aspect of the present invention, an X-ray inspection apparatus capable of accurately inspecting an article and an adjustment method thereof can be provided even when inspection conditions of the article or the like are changed.

Brief Description of the Drawings

[0019] [Figure 1] FIG. 1 is a configuration diagram of an X-ray inspection apparatus according to an embodiment. [Figure 2] FIG. 2 is a configuration diagram of the inside of the shield box shown in FIG. 1. [Figure 3] FIG. 3 is a functional configuration diagram of the control unit. [Figure 4] FIG. 4(a) is a diagram showing a first transmission image, and FIG. 4(b) is a diagram showing a second transmission image. [Figure 5] FIG. 5 is a diagram showing a difference image. [Figure 6] FIG. 6 is a flowchart for explaining an adjustment method of the X-ray inspection apparatus. [Figure 7] FIG. 7 is a flowchart for explaining an adjustment method of the X-ray inspection apparatus. [Figure 8] FIG. 8 is a functional configuration diagram of the control unit according to a modification.

Embodiments for Carrying Out the Invention

[0020] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the description of the drawings, the same or corresponding elements are denoted by the same reference numerals, and duplicate descriptions are omitted.

[0021] As shown in Figure 1, the X-ray inspection apparatus 1 comprises a main body 2, support legs 3, a shield box 4, a transport unit 5, an X-ray irradiation unit 6, an X-ray detection unit 7, a display operation unit 8, and a control unit 10. The X-ray inspection apparatus 1 transports the article G while generating an X-ray transmission image of the article G, and performs inspection of the article G (for example, checking the number of items stored, checking for foreign objects, checking for missing items, checking for cracks and chips, etc.) based on the X-ray transmission image. The article G before inspection is brought into the X-ray inspection apparatus 1 by an input conveyor 51. The article G after inspection is discharged from the X-ray inspection apparatus 1 by an output conveyor 52. Article G determined to be defective by the X-ray inspection apparatus 1 is sorted out of the production line by a sorting device (not shown) located downstream of the output conveyor 52. Article G determined to be good by the X-ray inspection apparatus 1 passes through the sorting device as is. In this embodiment, the article G is cereal flakes.

[0022] The main body 2 of the device houses the control unit 10, etc. Support legs 3 support the main body 2 of the device. The shield box 4 is provided on the main body 2 of the device. The shield box 4 is an enclosure that prevents X-rays (electromagnetic waves) from leaking to the outside. Inside the shield box 4 is an inspection room R in which X-ray inspection of items G is performed. The shield box 4 has an entrance 4a and an exit 4b. Items G before inspection are brought into the inspection room R from the entrance conveyor 51 via the entrance 4a. After inspection, items G are brought out from the inspection room R via the exit 4b to the exit conveyor 52. X-ray shielding curtains (not shown) are provided at each of the entrance 4a and exit 4b to prevent X-ray leakage.

[0023] The transport section 5 is a component that transports the article G and is positioned to penetrate the center of the shield box 4. The transport section 5 transports the article G along the transport direction A from the entrance 4a through the inspection chamber R to the exit 4b. The transport section 5 is, for example, a belt conveyor stretched between the entrance 4a and the exit 4b. The transport section 5, being a belt conveyor, may protrude outward from the entrance 4a and the exit 4b.

[0024] As shown in Figures 1 and 2, the X-ray irradiation unit 6 is an electromagnetic wave irradiation unit (X-ray source) located inside the shield box 4. The X-ray irradiation unit 6 includes, for example, an X-ray tube that emits X-rays and an aperture unit that spreads the X-rays emitted from the X-ray tube in a fan shape in a plane perpendicular to the transport direction A. The X-rays irradiated from the X-ray irradiation unit 6 include X-rays in various energy ranges from low energy (long wavelength) to high energy (short wavelength). Therefore, the X-ray irradiation unit 6 irradiates the article G transported by the transport unit 5 with X-rays in multiple energy ranges. Note that the "low" and "high" in the low energy and high energy ranges mentioned above refer to relatively "low" and "high" within the multiple energy ranges irradiated from the X-ray irradiation unit 6, and do not indicate a specific range.

[0025] The X-ray detection unit 7 is a sensor element that detects electromagnetic waves. The X-ray detection unit 7 is located inside the shield box 4 and is positioned opposite the X-ray irradiation unit 6 in the vertical direction. The X-ray detection unit 7 may be capable of detecting X-rays in a specific energy range, or it may be capable of detecting X-rays using a photon counting method. The X-ray detection unit 7 may be a direct conversion type detection unit or an indirect conversion type detection unit. In this embodiment, the X-ray detection unit 7 is a direct conversion type detection unit capable of detecting X-rays using a photon counting method, and includes, for example, a sensor (multi-energy sensor) that detects each of the X-rays in multiple energy ranges that penetrate the article G. The sensor is arranged, for example, in a direction (width direction) perpendicular to the transport direction and vertical direction of the transport unit 5. The element may be arranged not only in the width direction but also in the transport direction. That is, the X-ray detection unit 7 may include line sensors or a group of sensors arranged two-dimensionally. The sensor is, for example, a photon detection type sensor such as a CdTe semiconductor detector.

[0026] In the element included in the X-ray detection unit 7, for example, electron-hole pairs are generated when X-ray photons arrive. Photon counting is performed based on the energy (photon energy) obtained at this time.

[0027] The X-ray detection unit 7 discriminates the detected X-ray photon energy into two or more energy regions based on an arbitrary threshold. This enables the X-ray detection unit 7 to perform photon counting for each energy region. The X-ray detection unit 7 outputs a signal corresponding to the X-ray detection result and the discriminated signal (detection result signal) to the control unit 10. In this embodiment, the X-ray detection unit 7 discriminates the detected X-ray photon energy into at least a first energy region and a second energy region higher than the first energy region, using an arbitrary threshold. The arbitrary threshold is, for example, one or more values ​​(unit: keV) set by the control unit 10. Therefore, the first energy region and the second energy region may be separated by one threshold, or they may be separated by different thresholds (for example, a first threshold and a second threshold different from the first threshold). In the latter case, there may be one or more energy regions between the first energy region and the second energy region. For example, the X-ray detection unit 7 may discriminate the photon energy into a first energy region, a second energy region, and a third energy region lower than the first and second energy regions. The arbitrary thresholds and their number can be checked as appropriate via the display operation unit 8 in accordance with changes in the type of item G, changes in inspection conditions, etc. The method for setting arbitrary thresholds will be described later.

[0028] As shown in Figure 1, the display operation unit 8 is a component (display unit) provided on the main body 2 of the device. The display operation unit 8 displays various information and accepts input operations for various conditions from the outside. The display operation unit 8 is, for example, a liquid crystal display and displays an operation screen as a touch panel. In this case, the operator can input various conditions via the display operation unit 8. As an input operation, for example, the operator can select an image (details will be described later) used for inspecting the item G by the inspection unit 23 (see Figure 3) included in the control unit 10. This makes it possible to obtain the desired inspection results in a favorable manner.

[0029] The control unit 10 is the component that receives the detection results from the X-ray detection unit 7 and is located within the main body 2 of the device. The control unit 10 controls the operation of each part of the X-ray inspection device 1 (in this embodiment, the transport unit 5, the X-ray irradiation unit 6, the X-ray detection unit 7, and the display operation unit 8, as well as a sorting device (not shown) located downstream of the X-ray inspection device 1). The sorting device is a device that removes items (articles) that have been determined to be defective by the image inspection by the X-ray inspection device 1 from the transport path. The control unit 10 includes a processor such as a CPU (Central Processing Unit), memory such as ROM (Read Only Memory) and RAM (Random Access Memory), and storage such as an SSD (Solid State Drive). The ROM contains a program for controlling the X-ray inspection device 1.

[0030] Figure 3 is a functional configuration diagram of the control unit. As shown in Figure 3, the control unit 10 includes an X-ray image generation unit 21, a threshold setting unit 22, an inspection unit 23, a determination unit 24, an output unit 25, and a storage unit 26.

[0031] The X-ray image generation unit 21 is a component that unfolds the signal output from the X-ray detection unit 7 (for example, the detection result signal) into a two-dimensional image in memory. The X-ray image generation unit 21 is mainly composed of a GPU (Graphics Processing Unit), for example. The memory into which the two-dimensional image is unfolded is, for example, the memory included in the GPU, but is not limited to this. The X-ray image generation unit 21 generates two or more X-ray transmission images corresponding to two or more energy regions, for example, based on the X-ray detection result by the X-ray detection unit 7. Each X-ray transmission image may be an image used for inspecting the item G (hereinafter sometimes simply referred to as an "inspection image"), or an image for setting the arbitrary threshold (hereinafter sometimes simply referred to as a "threshold setting image"). The inspection image is generated during the inspection of the item G by the X-ray inspection device 1. The threshold setting image is generated, for example, during the setup or adjustment of the X-ray inspection device 1 (for example, during the calibration of the X-ray inspection device 1). The X-ray image generation unit 21 may, for example, generate an overall transmission image as an X-ray transmission image, corresponding to all X-rays in the multiple energy ranges, based on the detection results.

[0032] In this embodiment, the X-ray image generation unit 21 generates, as inspection images, a first inspection image P1 (see Figure 4(a)) corresponding to the X-rays in the first energy region, a second inspection image P2 (see Figure 4(b)) corresponding to the X-rays in the second energy region, and a difference image P3 (see Figure 5) obtained by subtraction processing between the first inspection image P1 and the second inspection image P2. The X-ray image generation unit 21 can also generate, as threshold setting images, a first setting image corresponding to the X-rays in the first energy region and a second setting image corresponding to the X-rays in the second energy region.

[0033] The first inspection image P1 is generated, for example, based on a portion of the information contained in the detection result signal. The second inspection image P2 is generated, for example, based on another portion of the information contained in the detection result signal. The X-ray image generation unit 21 may generate the first inspection image P1 based on the overall transmission image and the second inspection image P2. In this case, the first inspection image P1 is generated, for example, based on the difference data between the data used to generate the overall transmission image and the data used to generate the second inspection image P2. Alternatively, the X-ray image generation unit 21 may generate the second inspection image P2 based on the overall transmission image and the first inspection image P1. In this case, the second inspection image P2 is generated, for example, based on the difference data between the data used to generate the overall transmission image and the data used to generate the first inspection image P1. The first inspection image P1 and the second inspection image P2 each show the object G and the background other than the object G. As shown in the example in Figure 4(a), the first inspection image P1 is generally darker than the second inspection image P2. On the other hand, as shown in the example in Figure 4(b), the second inspection image P2 is generally brighter than the first inspection image P1. In this embodiment, the comparison of brightness between the first inspection image P1 and the second inspection image P2 corresponds to the comparison of the brightness of the item G displayed in the first inspection image P1 and the brightness of the item G displayed in the second inspection image P2.

[0034] The difference image P3 is an image (energy analysis image) generated by performing image processing on at least one of the first inspection image P1 and the second inspection image P2, for example, using an image processing algorithm. An image processing algorithm is a type that indicates the processing procedure for image processing applied to at least one of the first inspection image P1 and the second inspection image P2. An image processing algorithm consists of one image processing filter or a combination of multiple image processing filters. Multiple image processing algorithms can be acquired externally via a network such as the Internet. Alternatively, multiple image processing algorithms can be acquired from an external storage medium such as a USB memory or removable hard disk. At least one of the multiple image processing algorithms employs a genetic algorithm (GA = Genetic Algorithms), a method that applies the mechanisms of heredity and evolution in the biological world, and can be automatically generated from multiple image processing filters based on the specifications of the X-ray inspection device 1 or inspection conditions. At least some of the multiple image processing algorithms can also be set as appropriate by the operator via the display operation unit 8. The image processing algorithm used for the first inspection image P1 and the image processing algorithm used for the second inspection image P2 may be different from each other. For example, in order to match the brightness of the first inspection image P1 with the brightness of the second inspection image P2, a process to change the brightness of either the first inspection image P1 or the second inspection image P2 may be performed. As such a process, for example, a process that utilizes the luminance distribution as described in Japanese Patent Application No. 2021-195926 may be performed.

[0035] The X-ray image generation unit 21 may use a program that is automatically set by machine learning instead of using the image processing algorithm described above. Such a program is a predictive model (trained model) generated by machine learning, and is an inference program that incorporates parameters (trained parameters) obtained as a result of machine learning. Examples of machine learning used in the trained model include neural networks, support vector machines, and genetic algorithms. The trained model may include a convolutional neural network or a neural network with multiple layers (for example, 8 or more layers). In other words, the trained model corresponding to the above program may be generated by deep learning.

[0036] The threshold setting unit 22 is the part that sets an arbitrary threshold based on the density of two or more X-ray transmission images. The threshold setting unit 22 sets the arbitrary threshold based on a threshold that makes the difference in density between the first setting image and the second setting image within a predetermined range. First, the threshold setting unit 22 sets a threshold (provisional threshold) that makes the difference (luminance difference) between the background luminance of the first setting image (first background luminance = B1) and the background luminance of the second setting image (second background luminance = B2) within a predetermined range. The background luminance of a predetermined X-ray transmission image corresponds, for example, to the value obtained by dividing the sum of the luminances of each pixel included in the image by the number of pixels. In this embodiment, the luminance difference corresponds to the value obtained by dividing the absolute value of the difference between the first background luminance and the second background luminance (|B2-B1|) by the sum of the first background luminance and the second background luminance (B1+B2) (|B2-B1| / (B1+B2)). In this embodiment, if the luminance difference is 0.05 or less, it is determined that the luminance difference is within a predetermined range, but this is not limited to this. Subsequently, the threshold setting unit 22 sets an arbitrary threshold by adding a correction value (unit: keV) to the obtained provisional threshold. The correction value is an arbitrary value determined by the operator, for example, via the display operation unit 8. The correction value is, for example, -10 keV or more and 10 keV or less. Note that the correction value may also be 0. In other words, the arbitrary threshold may be the provisional threshold described above.

[0037] Until an arbitrary threshold value is set (i.e., when the difference in the grayscale of two or more X-ray transmission images is outside a predetermined range), the threshold setting unit 22 changes the threshold value. When the first background luminance is greater than the second background luminance (B1 > B2), the threshold setting unit 22 performs correction to decrease the threshold value used immediately before. When the first background luminance is less than the second background luminance (B1 < B2), the threshold setting unit 22 performs correction to increase the threshold value used immediately before. The decrease value and increase value of the threshold value are not particularly limited. Subsequently, the X-ray image generation unit 21 generates another two or more X-ray transmission images (another first setting image and another second setting image) corresponding to another two or more energy regions discriminated based on the changed threshold value. The another first setting image and the another second setting image are generated after the above-mentioned first setting image and the above-mentioned second setting image. Therefore, hereinafter, each of the above-mentioned first setting image and the above-mentioned second setting image may be referred to as the previous setting image.

[0038] When another two or more X-ray transmission images are generated, the threshold setting unit 22 determines whether the difference in the grayscale of the another two or more X-ray transmission images is within a predetermined range. In the present embodiment, the threshold setting unit 22 determines whether the difference (another luminance difference) between the background luminance of the another first setting image and the background luminance of the another second setting image is within a predetermined range. The X-ray image generation unit 21 and the threshold setting unit 22 repeat the determination of whether the difference in the grayscale between the newly generated first setting image and the second setting image is within a predetermined range until an arbitrary threshold value is set. Thereby, the threshold setting unit 22 searches for an arbitrary threshold value. In the search for an arbitrary threshold value, the threshold value (initial threshold value) used first is determined according to, for example, the tube voltage of the X-ray detection unit 7, but is not limited thereto. The initial threshold value may be a value stored in advance in the storage unit 26 or the like.

[0039] The threshold setting unit 22 compares the difference in density between two or more X-ray transmission images with the difference in density between two or more other X-ray transmission images. In this embodiment, if another first background brightness is greater than another second background brightness, and the first background brightness is less than the second background brightness, an arbitrary threshold is set based on the modified threshold (i.e., the threshold search is terminated). In addition, if another first background brightness is less than another second background brightness, and the first background brightness is greater than the second background brightness, an arbitrary threshold is also set based on a value obtained by applying a correction to increase the modified threshold (i.e., the threshold search is terminated).

[0040] The inspection unit 23 inspects the item G based on the X-rays that have passed through the item G detected by the X-ray detection unit 7. The inspection unit 23 inspects the item G based on at least a portion of a plurality of images generated by the X-ray image generation unit 21. For example, the inspection unit 23 inspects the item G using a difference image P3. The inspection unit 23 may also inspect the item G based on two or more images from the plurality of images generated by the X-ray image generation unit 21. The inspection unit 23 inspects the item G for foreign objects, cracks, chips, etc., but is not limited to these. If the item G is wrapped in a sheet-like packaging material, the inspection unit 23 may also inspect for tears in the packaging material, sealing defects (seal jamming), etc. If the item G is contained in a package, the inspection unit 23 may perform inspections for foreign objects inside the package, missing items, number of items, cavities, etc. The inspection unit 23 transmits the inspection results of the item G to the determination unit 24 and the storage unit 26.

[0041] The determination unit 24 determines whether item G is a good product or not based on the inspection results received from the inspection unit 23. For example, the determination unit 24 determines whether there are any foreign objects in item G, whether there are any cracks or chips in item G, etc. The determination unit 24 transmits the determination result to the output unit 25 and the storage unit 26.

[0042] The output unit 25 outputs the determination result of the determination unit 24 to at least one of the parts of the X-ray inspection apparatus 1 other than the control unit 10, and to at least one of the devices other than the X-ray inspection apparatus 1. As a result, at least one of the X-ray inspection apparatus 1 and the device other than the X-ray inspection apparatus 1 (for example, a sorting device located downstream of the X-ray inspection apparatus 1) can perform the operation when the item G is a defective product. Other examples of the device other than the X-ray inspection apparatus 1 include, for example, an input conveyor 51, an output conveyor 52, and a notification device.

[0043] The storage unit 26 records signals, data, etc., generated by the control unit 10. For example, the storage unit 26 records the detection result signal transmitted from the X-ray detection unit 7, the image data transmitted from the X-ray image generation unit 21, the data related to an arbitrary threshold set by the threshold setting unit 22, the data related to the inspection result transmitted from the inspection unit 23, and the data related to the judgment result transmitted from the judgment unit 24.

[0044] Next, a method for adjusting the X-ray inspection apparatus 1 according to this embodiment will be described with reference to Figures 6 and 7. The adjustment method for the X-ray inspection apparatus 1 is performed to maintain or improve the inspection accuracy of the X-ray inspection apparatus 1, and is performed, for example, during the calibration of the X-ray inspection apparatus 1. In the adjustment method for the X-ray inspection apparatus 1 described below, an arbitrary threshold is set which is used to discriminate the photon energy of the detected X-rays. Figures 6 and 7 are flowcharts illustrating the adjustment method for the X-ray inspection apparatus.

[0045] As shown in Figure 6, first, X-rays are irradiated into the examination room R (Step S1, X-ray irradiation step). In Step S1, the X-ray irradiation unit 6 located inside the shield box 4 is activated. Next, the X-rays are detected using a photon counting method (Step S2, X-ray detection step). In Step S2, the X-ray detection unit 7 detects the X-rays using a photon counting method. Next, the photon energy of the detected X-rays is discriminated into two or more energy regions using an arbitrary threshold (Step S3, discrimination step). In Step S3, the X-ray detection unit 7 discriminates the photon energy into a first energy region and a second energy region using a predetermined initial threshold.

[0046] Next, using the photon energy, two or more X-ray transmission images corresponding to two or more energy regions are generated (step S4, image generation step). In step S4, a first setting image is generated from the X-ray detection results corresponding to the first energy region, and a second setting image is generated from the X-ray detection results corresponding to the second energy region.

[0047] Next, an arbitrary threshold is set based on the density of two or more X-ray transmission images (step S5, threshold setting step). In step S5, a threshold (provisional threshold) is set such that the difference (luminance difference) between the background luminance of the first setting image and the background luminance of the first setting image is within a predetermined range. Then, an arbitrary threshold is set by adding a correction value to the obtained provisional threshold. If the difference in density of the two or more X-ray transmission images is outside the predetermined range in step S5, the threshold change, discrimination step, image generation step, and threshold setting step are repeated until the difference is within the predetermined range (i.e., steps S1 to S5 are repeated). In this case, in step S3, the photon energy is discriminated into two or more other energy regions based on a different threshold than the arbitrary threshold, in step S4, two or more other X-ray transmission images corresponding to the two or more other energy regions are generated, and in step S5, the difference in density of the two or more X-ray transmission images may be compared with the difference in density of the two or more other X-ray transmission images.

[0048] Here, we will explain in detail how to set an arbitrary threshold with reference to Figure 7. As shown in Figure 6, it is determined whether the brightness difference is below a predetermined range (step S11). If the brightness difference is below the predetermined range (step S11: YES), the threshold is corrected (step S12). This sets an arbitrary threshold. The corrected threshold corresponds to the threshold used in the most recent step S3 (for example, the initial threshold).

[0049] On the other hand, if the above brightness difference is outside the predetermined range (step S11: NO), it is determined whether the first background brightness is greater than the second background brightness (step S13). If the first background brightness is greater than the second background brightness (step S13: YES), it is determined whether the first background brightness of the previous first setting image (hereinafter simply referred to as "previous first background brightness") is less than the second background brightness of the previous second setting image (hereinafter simply referred to as "previous second background brightness") (step S14). If the previous first background brightness is less than the previous second background brightness (step S14: YES), step S12 is performed. On the other hand, if the previous first background brightness is greater than the previous second background brightness (step S14: NO), a correction is performed to lower the threshold (step S15). In step S15, the initial threshold is lowered by a predetermined value to create a different threshold. Then, the process is restarted from step S1 with the different threshold. If the previous first background brightness and the previous second background brightness do not exist, step S15 is performed without performing step S14.

[0050] If the first background brightness is lower than the second background brightness (step S13: NO), a correction is performed to raise the threshold (step S16). In step S16, the initial threshold is raised by a predetermined value to create yet another threshold. Next, it is determined whether the previous first background brightness is higher than the previous second background brightness (step S17). If the previous first background brightness is higher than the previous second background brightness (step S17: YES), step S12 is performed. On the other hand, if the previous first background brightness is lower than the previous second background brightness (step S17: NO), the process is restarted from step S1 with yet another threshold. If there is no previous first background brightness or previous second background brightness, step S1 is performed without performing step S17.

[0051] According to the X-ray inspection apparatus 1 and its adjustment method as described above, the threshold setting unit 22 sets an arbitrary threshold based on the difference in density between the first setting image and the second setting image. Therefore, the arbitrary threshold may be changed, for example, when the inspection conditions for item G are changed. In other words, the threshold setting unit 22 can set an appropriate threshold corresponding to changes in inspection conditions, etc. As a result, even if the inspection conditions for item G are changed, item G can be inspected with high accuracy.

[0052] In this embodiment, the X-ray detection unit 7 may discriminate the photon energy into a first energy region, a second energy region, and a third energy region lower than the first and second energy regions. In this case, for example, the inspection accuracy of the item G can be improved by excluding the energy region containing the most noise among the first to third energy regions.

[0053] In this embodiment, an arbitrary threshold is determined based on a provisional threshold in which the difference in intensity between the first setting image and the second setting image falls within a predetermined range. This makes it easier to detect the presence or absence of foreign objects contained in item G.

[0054] In this embodiment, the arbitrary threshold value is the provisional threshold value plus a correction value. In this case, the inspection accuracy of item G can be improved.

[0055] In this embodiment, if the difference in grayscale between the first setting image and the second setting image is outside a predetermined range, the threshold setting unit 22 may change an arbitrary threshold, and then the X-ray image generation unit 21 may generate another first setting image and another second setting image corresponding to two or more other energy regions that are discriminated based on the changed threshold, and the threshold setting unit 22 may determine whether or not the difference in grayscale between the other first setting image and the other second setting image is within a predetermined range. In this case, the threshold setting unit 22 can accurately set an arbitrary threshold such that the difference in grayscale between the first setting image and the second setting image is within a predetermined range.

[0056] The X-ray image generation unit 21 generates a separate first setting image and a separate second setting image corresponding to two or more other energy regions that are discriminated based on a threshold different from an arbitrary threshold, and the threshold setting unit may compare the difference in density between the first setting image and the second setting image with the difference in density between another first setting image and another second setting image. In this case, the threshold setting unit 22 can easily determine the appropriateness of an arbitrary threshold by comparing the above differences.

[0057] While embodiments of the present invention have been described above, the present invention is not necessarily limited to the embodiments described above, and various modifications are possible without departing from the spirit of the invention.

[0058] In the above embodiment, the X-ray detection unit discriminates the detected X-ray photon energy into two or more energy regions based on an arbitrary threshold, but is not limited to this. Figure 8 is a functional configuration diagram of a modified control unit. As shown in Figure 8, the control unit 10A has an X-ray image generation unit 21, a threshold setting unit 22, an inspection unit 23, a determination unit 24, an output unit 25, a storage unit 26, and a discrimination unit 27. The discrimination unit 27 is the part that discriminates the detected X-ray photon energy into two or more energy regions based on an arbitrary threshold. The discrimination unit 27 can, for example, discriminate the photon energy into a first energy region, a second energy region, and a third energy region. By using such a control unit 10A, the X-ray detection unit does not need to perform photon counting for each energy region. In other words, the X-ray detection unit only needs to output the X-ray detection result to the control unit 10A. This simplifies the configuration of the X-ray detection unit.

[0059] In the above embodiment, the X-ray inspection apparatus has a control unit that performs image processing, but is not limited to this. For example, functions such as performing image processing in the control unit, determining the presence or absence of foreign matter in an item based on differential images, and displaying X-ray inspection results do not have to be included in the X-ray inspection apparatus. Instead, they may be implemented in a wired communication or wired communication-capable control device to the X-ray inspection apparatus. In this case, an X-ray inspection system can be realized that includes an X-ray inspection apparatus and the control device to which the inspection results of the X-ray inspection apparatus are input. Such an X-ray inspection system also provides the same effects as the above embodiment. In addition, the configuration of the control unit of the X-ray inspection apparatus can be simplified. Furthermore, the user can check the inspection results even when away from the X-ray inspection apparatus. The control device is not particularly limited, but could be, for example, a laptop PC or a tablet. Also, the control device does not have to include a function to determine the presence or absence of foreign matter. [Explanation of symbols]

[0060] 1...X-ray inspection device, 3...Support legs, 4...Shield box, 4a...Inlet, 4b...Outlet, 5...Transportation unit, 6...X-ray irradiation unit, 7...X-ray detection unit, 8...Display operation unit, 21...X-ray image generation unit, 22...Threshold setting unit, 23...Inspection unit, 24...Determination unit, 25...Output unit, 26...Storage unit, 27...Discrimination unit, A...Transportation direction, G...Item, P1...First inspection image, P2...Second inspection image, P3...Difference image.

Claims

1. A conveying unit for transporting goods, An X-ray source for irradiating the aforementioned article with X-rays, An X-ray detection unit capable of detecting the aforementioned X-rays using a photon counting method, and discriminating the photon energy of the detected X-rays into two or more energy regions based on an arbitrary threshold, A threshold setting unit for setting the arbitrary threshold, An X-ray image generation unit generates two or more X-ray transmission images corresponding to two or more energy regions based on the X-ray detection results by the X-ray detection unit, An inspection unit that performs an inspection of the article based on the X-rays that have passed through the article detected by the X-ray detection unit, Equipped with, The threshold setting unit sets the arbitrary threshold based on the difference in background brightness between the two or more X-ray transmission images. X-ray inspection equipment.

2. The X-ray inspection apparatus according to claim 1, wherein the X-ray detection unit discriminates the photon energy into a first energy region, a second energy region, and a third energy region lower than the first and second energy regions.

3. A conveying unit for transporting goods, An X-ray source for irradiating the aforementioned article with X-rays, An X-ray detection unit capable of detecting the aforementioned X-rays using a photon counting method, A control unit to which the detection result of the X-ray detection unit is input, Equipped with, The control unit, A discrimination unit that discriminates the photon energy of the X-rays detected by the X-ray detection unit into two or more energy regions based on an arbitrary threshold, A threshold setting unit for setting the arbitrary threshold, An X-ray image generation unit generates two or more X-ray transmission images corresponding to two or more energy regions based on the X-ray detection results by the X-ray detection unit, The system includes an inspection unit that inspects the article based on the X-rays that have passed through the article detected by the X-ray detection unit, The threshold setting unit sets the arbitrary threshold based on the difference in background brightness between the two or more X-ray transmission images. X-ray inspection equipment.

4. The X-ray inspection apparatus according to claim 3, wherein the discrimination unit discriminates the photon energy into a first energy region, a second energy region, and a third energy region lower than the first and second energy regions.

5. The X-ray inspection apparatus according to any one of claims 1 to 4, wherein the arbitrary threshold is determined based on a threshold such that the difference in background brightness of each of the two or more X-ray transmitted images falls within a predetermined range.

6. The X-ray inspection apparatus according to claim 5, wherein the arbitrary threshold is the value obtained by adding a correction value to the threshold.

7. If the difference in background brightness between the two or more X-ray transmission images is outside a predetermined range, the threshold setting unit changes the arbitrary threshold, The X-ray image generation unit generates two or more additional X-ray transmission images corresponding to two or more other energy regions that are discriminated based on the modified threshold, The X-ray inspection apparatus according to any one of claims 1 to 6, wherein the threshold setting unit determines whether the difference in background brightness of each of the two or more other X-ray transmission images is within a predetermined range.

8. The X-ray image generation unit generates two or more X-ray transmission images corresponding to two or more other energy regions that are discriminated based on a threshold different from the arbitrary threshold, The X-ray inspection apparatus according to any one of claims 1 to 6, wherein the threshold setting unit compares the difference in background brightness of each of the two or more X-ray transmitted images with the difference in background brightness of each of the other two or more X-ray transmitted images.

9. An X-ray irradiation step in which X-rays are irradiated into the examination chamber provided in the housing, An X-ray detection step in which the aforementioned X-rays are detected using a photon counting method, A discrimination step of classifying the detected X-ray photon energy into two or more energy regions by an arbitrary threshold, An image generation step of generating two or more X-ray transmission images corresponding to two or more energy regions using the aforementioned photon energy, A threshold setting step in which an arbitrary threshold is set based on the difference in background brightness of each of the two or more X-ray transmission images, A method for adjusting an X-ray inspection device, comprising the following features.

10. The adjustment method according to claim 9, wherein, in the threshold setting step, if the difference in background brightness of each of the two or more X-ray transmission images is outside a predetermined range, the arbitrary threshold change, the discrimination step, the image generation step, and the threshold setting step are performed until the difference is within a predetermined range.

11. In the discrimination step, the photon energy is discriminated into two or more other energy regions based on a threshold different from the arbitrary threshold. In the image generation step, two or more X-ray transmission images corresponding to two or more other energy regions are generated. The adjustment method according to claim 9, wherein in the threshold setting step, the difference in background brightness of each of the two or more X-ray transmission images is compared with the difference in background brightness of each of the other two or more X-ray transmission images.

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