Electronic devices and methods for manufacturing electronic devices

Abstract

Electronic device and method for manufacturing the same According to one embodiment, an electronic device (100) comprises a sensor element (1) for measuring a physical quantity in the electronic device and a contact element (2) configured to be mechanically biased. The electronic device further comprises a measurement surface (30, 60, 90) on which the physical quantity is measured with the help of the sensor element. The sensor element is disposed on the measurement surface. The contact element is electrically connected to the sensor element. At least one of the connections between the sensor element and the contact element and the connection between the sensor element and the measurement surface is a dry connection. The contact element is mechanically biased to prevent loosening of at least one dry connection.

Description

Technical Field

[0001] The present disclosure relates to an electronic device and a method for manufacturing an electronic device.

Summary of the Invention

Problems to be Solved by the Invention

[0002] An object is to provide an improved electronic device, for example, an electronic device that can be easily manufactured and / or has a compact design. Another object is to provide an improved method for manufacturing such an electronic device.

Means for Solving the Problems

[0003] Embodiments of the present disclosure relate to an improved electronic device and an improved method for manufacturing an electronic device.

[0004] First, an electronic device is identified. The electronic device described herein can be, for example, a power semiconductor module or an assembly including a power semiconductor module.

[0005] According to one embodiment, the electronic device includes a sensor element for measuring a physical quantity within the electronic device and a contact element configured to be mechanically biased. Further, the electronic device includes a measurement surface on which the physical quantity is measured with the help of the sensor element. The sensor element is disposed on the measurement surface. The contact element is electrically connected to the sensor element. At least one of the connection between the sensor element and the contact element and the connection between the sensor element and the measurement surface is a dry connection. The contact element is mechanically biased to prevent loosening of at least one dry connection.

[0006] The described electronic devices can, on the one hand, improve the quality of determining physical quantities during the operation of the electronic device. On the other hand, they can enable the implementation of sensor elements with relatively minor modifications to the electronic device, even in electronic devices where sensor elements were not originally intended. This is due to the use of biasable contact elements. For example, biased contact elements press two elements of an electronic device, between which a dry contact is formed, against each other, so that a dry contact is reliably maintained. Thus, at least one connection can be achieved without soldering, bonding, sintering, welding, or other joining methods.

[0007] A sensor element is, for example, a transducer (a metering transducer) and is therefore part of a measuring device that directly responds to a metering quantity. Thus, a sensor element may be the first element of a measuring chain. A sensor element is configured to detect physical quantities such as temperature, humidity, pressure, and acceleration, and in response generates or manipulates an electrical signal that can be read out via a contact element.

[0008] The contact element is at least partially conductive. The contact element comprises a contact region, which is away from the sensor element, particularly on the opposite side of the sensor element, and to which the contact element can be electrically connected. The contact element provides a conductive path from the sensor element to the contact region. In this way, it may be possible to read the sensor element with the help of the contact element, in particular to receive an electrical signal from the sensor element via the contact element, and / or to supply an electrical signal to the sensor element via the contact element. Thus, the contact element may also be used to supply voltage and / or current to the sensor element.

[0009] The contact element may be formed as a single unit or consist of several parts. For example, the contact element may be made of metal or contain metal. The configuration of a contact element to be mechanically biased means that at least a portion / section of the contact element is elastic and deformable in order to move the contact element from a relaxed state to a biased state. In the biased state, the contact element tends to automatically return to a relaxed state. At least one elastic portion of the contact element is, for example, reversibly deformable. The contact element may comprise one or more deformable elastic portions / sections, such as a spring. When moving the contact element from a relaxed state to a biased state, at least one elastic or deformable portion is, for example, compressed and / or bent and / or deflected. Mechanically biased and mechanically stressed are used as synonyms.

[0010] The sensor elements are arranged, for example, between the measuring surface and the contact elements or at least a portion of the contact elements, particularly in the vertical direction. In this specification, the vertical direction means the direction perpendicular to the main extension plane of the electronic device or measuring surface. The transverse direction is the direction parallel to the electronic device or measuring surface.

[0011] The sensor element and the contact element may be adjacent to each other. Also, the sensor element and the measuring surface may be adjacent to each other.

[0012] The sensor element is mechanically connected to the measuring surface and the contact element. A thermal contact may also be established between the sensor element and the measuring surface. At least one of the (mechanical) connections of the sensor element to the contact element and the measuring surface is a dry connection. A dry connection is a non-material lock connection, i.e., no material lock connection (bond) is formed between the two connected elements / partners. A dry connection is, for example, a pure press-fit and / or shape-fit connection. A dry connection can be loosened nondestructively.

[0013] The connection between the sensor element and the contact element is also an electrical connection. Similarly, the connection between the sensor element and the measuring surface can be an electrical connection. An electrical contact between two elements established without a material locking connection, i.e., by a dry connection, is referred to herein as a "dry electrical contact".

[0014] The contact element is mechanically biased, i.e., in a biased state. In particular, the contact element is fixed within the electronic device to prevent it from transitioning to a relaxed state. However, since a biased contact element tends to automatically switch to a relaxed state, it generates a force within the electronic device. This force can be transmitted to further components of the electronic device, such as a sensor element.

[0015] Mechanically biased contact elements are arranged to prevent loosening of at least one dry connection. This means that the force generated by the biased contact elements may press the two elements / partners forming the dry connection against each other. In this way, the dry connection is maintained.

[0016] For example, the force generated by a biased contact element in an electronic device is at least 0.01 N or at least 0.1 N.

[0017] According to further embodiments, the sensor element is a temperature sensor. For example, the sensor element is a temperature-sensitive resistor, also called a "thermistor." The sensor element may be a platinum resistor such as an NTC, PTC, PT100, or PT1000, or a thermocouple. Alternatively, the sensor element may be a humidity sensor, an acceleration sensor, or a pressure sensor.

[0018] In fact, for example, there is a high level of customer interest in temperature monitoring of power semiconductor devices (hereinafter also referred to herein as “power semiconductor chips” or simply “chips”) or power semiconductor modules in operation. Temperature monitoring is typically used, for example, to protect the chip from overheating in overcurrent conditions, or to monitor the degradation state of power semiconductor modules, for example, regarding the aging of junction connections, which affects thermal resistance and, consequently, chip temperature.

[0019] According to at least one embodiment, the contact element comprises a spring contact element or a compression pin, or one of these. The spring contact element has, for example, a meandering region and / or a V-shaped region and / or a U-shaped region and / or a spring washer region and / or a spring region that can be compressed to bias the contact element. Additionally or alternatively, the spring contact element may have a cantilevered portion that can be bent to bias the spring contact element. The spring contact element may be formed integrally or from several parts.

[0020] A pressure contact pin comprises, for example, a body such as a barrel or tubular body / sleeve, a tip element such as a plunger, and one or more springs such as a spiral spring that can be compressed to bias the contact element. The tip element is movably mounted relative to the body and can be moved further toward or into the body by compressing the spring. The pressure contact pin is, for example, an elongated element. The tip element of the pressure contact pin may be connected to or in contact with a sensor element.

[0021] In a further embodiment, one of the connections between the sensor element and the contact element, and the connection between the sensor element and the measuring surface, is implemented as a material-locked connection. The material-locked connection may be a soldering, sintering, bonding, or welding connection, or may be implemented by any other applicable joining method.

[0022] In a further embodiment, the sensor element is connected to the measuring surface by a material-locking connection. The material-locking connection may be of the same nature as those specified in the last paragraph. Furthermore, the electrical connection between the sensor element and the contact element may be provided by a material-locking connection, for example, exclusively by a material-locking connection. Thus, the connection between the sensor element and the contact element is a dry connection, and the electrical contact between them may be a dry contact.

[0023] According to a further embodiment, the sensor element is electrically connectable from the outside via a contact element. For example, the electronic device has a terminal region which is exposed and / or freely accessible and electrically connected to a contact element and therefore to the sensor element. The terminal region may be the region of the contact element, for example, the contact region described above. Alternatively, the terminal region may be the region of an auxiliary terminal structure to which the contact element is electrically connected.

[0024] In a further embodiment, a terminal region for electrically connecting the sensor element from the outside via a contact element overlaps the sensor element in at least one lateral direction. The terminal region and the sensor element may overlap in two vertical lateral directions. In other words, in a top view of the electronic device, i.e., when viewed along the vertical direction, the terminal region covers the sensor element at least partially. In this case, the terminal region is, for example, part of the contact element. In this case, the terminal region is offset from the sensor element in the vertical direction. As used herein, “offset” means that there is no overlap and there is a gap between the two elements.

[0025] In a further embodiment, the terminal region for electrically connecting the sensor element from the outside via a contact element is offset from the sensor element in at least one lateral direction, for example, two vertical lateral directions. In a top view of the electronic device, the terminal region is offset from the sensor element. In the vertical direction, the terminal region may also be offset from the sensor element or may overlap with it.

[0026] According to a further embodiment, the sensor element comprises an upper electrode on the upper surface of the sensor element. Further, the sensor element may comprise a lower electrode on the lower surface of the sensor element, the lower surface being opposite to the upper surface.

[0027] The upper electrode and the lower electrode are, for example, metal regions of the sensor element. They can be configured to electrically connect the sensor element for reading out and / or to supply current and / or voltage to the sensor element.

[0028] According to a further embodiment, the contact element is connected to the upper electrode of the sensor element. The contact element and the upper electrode may be in direct contact, i.e., adjacent to each other. The electrical contact can be realized by a connection between the upper electrode and the contact element. For example, a dry connection is formed between the contact element and the upper electrode. Thus, the electrical contact between the sensor element and the contact element may be a dry electrical contact. Alternatively, a material lock connection may be formed between the sensor element and the contact element.

[0029] According to a further embodiment, the measurement surface is connected to the lower electrode of the sensor element. The measurement surface and the lower electrode may be in direct contact, i.e., adjacent to each other. An electrical contact can be established between the lower electrode and the measurement surface. A material lock connection may be formed between the measurement surface and the lower electrode. Alternatively, a dry connection may be formed between them.

[0030] According to a further embodiment, the electronic device comprises a power semiconductor device. As an example, the power semiconductor device is a switching device. The power semiconductor device may be an IGBT or a MOSFET or a HEMT or a diode or a thyristor. In this case, the electronic device is, for example, a power semiconductor module having one or more power semiconductor devices or comprises such a module.

[0031] The power semiconductor module may comprise a substrate having an upper metallization and optionally a lower metallization. At least one power semiconductor device may be mounted on the upper surface of the substrate on which the upper metallization is located, for example, on top of the upper metallization. The substrate may be, for example, a direct-bonded copper (DBC) substrate, a direct-bonded aluminum (DBA) substrate, an active metal bracing (AMB) substrate with an insulating ceramic layer, or an isolated metal substrate (IMS) with an insulating resin layer.

[0032] Furthermore, the power semiconductor module may be provided with terminals for external electrical connections (main terminals and optionally auxiliary terminals). The terminals may be implemented, for example, by a sheet-like and / or metal and / or integrally formed terminal structure. Other terminal shapes are also possible, such as a hollow cylinder with threads like a nut. The terminal region of the terminal structure is exposed to allow electrical contact with the outside. The terminal structure may be coupled to or implemented by a top metallization. The terminals can directly connect to chips, or they can control electronic devices.

[0033] The power semiconductor module may further include a housing body. The housing body may be formed of an electrically insulating material such as resin and / or gel. The power semiconductor device may be embedded in the housing body. The terminal structure may be at least partially embedded in the housing body. The terminal area of ​​the terminal structure may protrude from the housing body, for example, to the side of the housing body. The housing body may include a housing frame surrounding a cavity. The cavity may be filled with gel.

[0034] Furthermore, the power semiconductor module may include a base plate. The base plate may serve, for example, a cooling purpose. The substrate may be mounted to the base plate such that, for example, the lower metallization faces the base plate. The base plate may be made of a metal such as Cu or Al, or an alloy thereof, or a composite material such as aluminum silicon carbide or magnesium silicon carbide. The base plate may have cooling structures such as pin fins or ribs on the side facing outward from the substrate.

[0035] In this specification, the transverse direction refers to, for example, the direction parallel to the main extending surface of the substrate. The vertical direction refers to the direction perpendicular to the main extending surface of the substrate.

[0036] In a further embodiment, the sensor element is arranged on a power semiconductor device. According to a further embodiment, the sensor element is located in a region adjacent to the power semiconductor device. For example, the sensor element is located on the upper metallization of the substrate adjacent to the power semiconductor device and / or between two adjacent power semiconductor devices. The upper metallization can then form a measuring surface.

[0037] Placing sensor elements on power semiconductor devices offers several advantages compared to placing them on a substrate adjacent to the power semiconductor device, or on a separate substrate of an electronic device adjacent to the substrate on which the power semiconductor device is mounted. For example, the quality of determining the chip temperature improves as the distance between the chip and the temperature sensor decreases. In fact, in this case, the true temperature of the chip can be more accurately derived from the sensor reading using a thermal model. Furthermore, when the sensor element is placed directly on the chip, the temperature changes and corresponding measurement time delays caused by long distances can be significantly reduced.

[0038] A further advantage of placing the sensor element on a power semiconductor device is that, when two or more heat-generating chips are mounted on the substrate, the sensor reading will primarily refer to one chip, not the average of the chips. If the sensor element is located between chips on the substrate, the measured temperature may not refer to the temperature of the most thermally disadvantaged or most degraded chip. In the worst case, severe degradation of a junction under one chip or the chip itself may not be detected.

[0039] Furthermore, if the sensor element is located on a chip, it is possible to avoid the failure to detect excessively high temperatures on the chip because degraded die bonds do not conduct heat.

[0040] Furthermore, placing sensor elements on top of the metallization adjacent to power semiconductor devices consumes space on the substrate surface, reducing the available space for the chip. This can also negatively impact thermal resistance and therefore the rated cost per ampere.

[0041] Furthermore, many products were originally developed without incorporating sensor elements. As a result, there may be no available space on the substrate for placing sensor elements. However, on the other hand, there is a strong trend among customers to require the implementation of thermal sensors.

[0042] An electronic device may comprise several of the aforementioned specific pairs of sensor elements and contact elements. For example, each of several power semiconductor devices may be assigned such a pair, and its sensor element may be mounted on each power semiconductor device. It is also possible that one or more sensor elements of one or more such pairs are mounted on the upper metallization of one or more substrates adjacent to or between power semiconductor devices, and that one or more sensor elements of one or more such pairs are mounted on one or more power semiconductor devices. For example, there may be one such pair per substrate.

[0043] According to a further embodiment, the measuring surface is formed by the upper electrode of the power semiconductor device. The upper electrode of the power semiconductor device may be, for example, a source / emitter electrode or a drain / collector electrode. The upper electrode may be made of a metal such as Cu or Al, or a corresponding alloy.

[0044] The sensor reading of the sensor element is, for example, between the contact element and the output terminal of the electronic device (e.g., the AC terminal). Alternatively, the sensor reading may be between the contact element and the input terminal of the electronic device (e.g., the DC+ or DC- terminal).

[0045] In further embodiments, contact elements are electrically and mechanically connected to auxiliary terminals of an electronic device, and are particularly fixed. Auxiliary terminals are formed, for example, by an auxiliary terminal structure of the electronic device. The auxiliary terminal structure is, for example, a sheet-like metal element, or a nut, or a hollow (metal) cylinder. Auxiliary terminals are distinct from the main terminals or power terminals of the electronic device. Main terminals may be AC, DC-, and DC+ terminals. In particular, auxiliary terminals are configured to carry less current than the main terminals. Auxiliary terminals may be partially embedded in the housing body of the electronic device. Auxiliary terminals may be terminals for controlling power semiconductor devices, such as for measurement / detection. They may be terminals connecting auxiliary emitter or auxiliary collector terminals, or gate terminals, or sensors.

[0046] In further embodiments, the contact element is electrically and mechanically connected to the auxiliary terminal by screw connections. Alternatively, other connections such as soldering, welding, crimping, or bonding are also possible. The contact element may also be formed integrally with the auxiliary terminal.

[0047] Auxiliary terminals are, for example, terminals of an electronic device that can be electrically connected from the outside. That is, the terminal area of ​​the auxiliary terminal is exposed and freely accessible. For example, the terminal area of ​​the auxiliary terminal is exposed and / or protrudes from the housing body on its side. Alternatively, the auxiliary terminal may be exposed and / or protrudes vertically from the top surface of the housing body, for example, if the auxiliary terminal is a nut, a vertical pin, or a hollow sleeve.

[0048] In addition to connecting the contact elements to auxiliary terminals, other methods can be considered for fixing the contact elements within the electronic device.

[0049] In further embodiments, the contact element is fixed to an electrical insulating element of the electronic device, such as the housing body and / or a resin body. This means, in particular, that there is a direct connection between the contact element and the electrical insulating element. Fixation to the electrical insulating element can maintain the contact element in a mechanically biased state. For example, the contact element may be assembled to the housing body and thereby morphologically fitted and enclosed. Alternatively, a nut (e.g., metal) may be embedded in the housing body and the contact element may be screwed into the nut.

[0050] In a further embodiment, a portion of the contact element is exposed, for example, on the upper surface of an electronic device. The exposed portion may constitute a terminal area of ​​the contact element for external electrical connection of the contact element. The sensor element may be electrically supplied and / or read out through the exposed portion.

[0051] In a further embodiment, a thermally conductive material is arranged between the measuring surface and the sensor element. The thermally conductive material may be a paste filled with fine particles, such as conductive particles. The thermally conductive material may be conductive or electrically insulating. The paste may be liquid and / or viscous. Alternatively, the thermally conductive material may be a thermally conductive sheet (e.g., an elastic sheet).

[0052] According to a further embodiment, the electronic device comprises at least one, i.e., one or more power semiconductor modules and a cooler for the power semiconductor modules. The cooler may be a carrier for the power semiconductor modules. The cooler is configured, for example, to guide a coolant through it. The cooler may have cooling channels for the coolant. The cooler may be made of a metal such as copper or aluminum or a corresponding alloy. The power semiconductor modules may be mounted on the cooler such that the lower metallization and / or base plate faces the cooler.

[0053] In a further embodiment, the measuring surface is formed by the cooler, for example, by its upper surface. The temperature of the cooler may then be measured using a sensor element.

[0054] In a further embodiment, the measuring surface is formed by the surface of the base plate. The sensor element may then be positioned next to the substrate or between two adjacent substrates mounted on the base plate.

[0055] According to a further embodiment, at least one of the surfaces of two elements forming a dry contact is roughened in particular to increase the contact surface. The roughened surface may be imprinted on the adjacent surface, thus increasing the contact surface. Furthermore, in this way, a shape-fit connection can be established. Moreover, in this method, undesirable oxide layers can be destroyed and impurities / contaminants on the adjacent surface can be penetrated.

[0056] According to a further embodiment, the roughened surface has an average roughness of at least 1 μm, or at least 1.6 μm, or at least 2 μm.

[0057] Next, a method for manufacturing an electronic device is specified. An electronic device according to any of the embodiments described herein can be manufactured with the help of this method. Therefore, all features disclosed for an electronic device are also disclosed for this method, and vice versa.

[0058] According to one embodiment, a method for manufacturing an electronic device includes providing a sensor element, providing a contact element configured to be mechanically biased, and providing a member for an electronic device having a measuring surface on which a physical quantity of the electronic device is measured with the help of the sensor element. In a further step, the sensor element is placed on the measuring surface and the contact element is electrically connected to the sensor element. At least one of the connection between the contact element and the sensor element, and the connection between the sensor element and the measuring surface, is a dry connection. In a further step, the contact element is mechanically biased, and at least a portion of the mechanically biased contact element is fixed to the member so that the contact element remains mechanically biased in order to prevent loosening of at least one dry connection.

[0059] The method steps may be performed in a specified order. That is, after providing the different elements, the sensor element may first be placed on the measuring surface. Then, the contact element may be electrically connected to the sensor element. The connection between the sensor element and the measuring surface is, for example, a dry connection. Then, the contact element may be biased and fixed in this biased state. The contact element may also be fixed to the member and then biased.

[0060] However, alternatively, the sensor element and contact element can be electrically connected first, for example, by a material lock connection, and then this composite, also called a sensor unit, can be attached to the member by positioning the sensor element on the measuring surface, then biasing the contact element, and then fixing the contact element to maintain the biased state.

[0061] The component may be, for example, a power semiconductor device, a substrate or the upper metallization of the substrate, a base plate, or a cooler. Therefore, the measurement surface may be the upper electrode of the power semiconductor device, the upper metallization of the substrate, the surface of the base plate, or the surface of the cooler.

[0062] In a further embodiment, a material-locking connection is formed between the contact element and the sensor element. This material-locking connection may also provide an electrical connection between the sensor element and the contact element.

[0063] In a further embodiment, a material lock connection is formed between the sensor element and the measuring surface. This material lock connection may also provide an electrical connection between the sensor element and the measuring surface.

[0064] In a further embodiment, a portion of the contact element is fixed to the member by a screw connection.

[0065] The electronic devices and methods for manufacturing them will be described in more detail below, based on exemplary embodiments with reference to the drawings. The accompanying drawings are included to provide further understanding. In the drawings, elements of the same structure and / or function may be referred to by the same reference numeral. It should be understood that the embodiments shown in the drawings are illustrative representations and are not necessarily drawn to a fixed scale. To the extent that elements or components correspond to each other in terms of their function in different drawings, the description will not be repeated for each of the following drawings. For clarity, elements may not be shown with corresponding reference numerals in all drawings. [Brief explanation of the drawing]

[0066] [Figure 1] This figure shows an exemplary embodiment of a method for manufacturing an electronic device and different locations in an exemplary embodiment of an electronic device. [Figure 2] This figure shows an exemplary embodiment of a method for manufacturing an electronic device and different locations in an exemplary embodiment of an electronic device. [Figure 3] This figure shows an exemplary embodiment of a method for manufacturing an electronic device and different locations in an exemplary embodiment of an electronic device. [Figure 4] This figure shows an exemplary embodiment of a method for manufacturing an electronic device and different locations in an exemplary embodiment of an electronic device. [Figure 5]This figure shows different locations in further exemplary embodiments of the method for manufacturing electronic devices. [Figure 6] This figure shows different locations in further exemplary embodiments of the method for manufacturing electronic devices. [Figure 7] This figure shows different locations in further exemplary embodiments of the method for manufacturing electronic devices. [Figure 8] This figure shows a further exemplary embodiment of the method and a different location in a further exemplary embodiment of an electronic device. [Figure 9] This figure shows a further exemplary embodiment of the method and a different location in a further exemplary embodiment of an electronic device. [Figure 10] This figure shows a further exemplary embodiment of the method and a different location in a further exemplary embodiment of an electronic device. [Figure 11] This figure shows a further exemplary embodiment of the method and a different location in a further exemplary embodiment of an electronic device. [Figure 12] This figure shows a further exemplary embodiment of the method and a different location in a further exemplary embodiment of an electronic device. [Figure 13] This figure shows a further exemplary embodiment of the method and a different location in a further exemplary embodiment of an electronic device. [Figure 14] This figure shows a further exemplary embodiment of the method and a different location in a further exemplary embodiment of an electronic device. [Figure 15] This figure shows a further exemplary embodiment of the method and a different location in a further exemplary embodiment of an electronic device. [Figure 16] This figure shows a further exemplary embodiment of an electronic device. [Figure 17] This figure shows a further exemplary embodiment of an electronic device. [Figure 18]This figure shows a further exemplary embodiment of the method and a different location in a further exemplary embodiment of an electronic device. [Figure 19] This figure shows a further exemplary embodiment of the method and a different location in a further exemplary embodiment of an electronic device. [Figure 20] This figure shows a further exemplary embodiment of the method and a different location in a further exemplary embodiment of an electronic device. [Figure 21] This figure shows a further exemplary embodiment of an electronic device. [Figure 22] This figure shows a further exemplary embodiment of an electronic device. [Modes for carrying out the invention]

[0067] Figure 1 shows the location where an exemplary embodiment of a sensor unit 10 for an electronic device 100 is provided. The sensor unit 10 comprises a contact element 2 and a sensor element 1. The contact element 2 is a spring contact element that can be mechanically biased by compressing or bending it. The contact element 2 is formed of a metal such as Cu, Al, or steel, for example.

[0068] The sensor element 1 is, for example, a temperature sensor such as a thermistor. The sensor element may be an NTC, PTC, or platinum resistor (e.g., PT100 or PT1000) or a thermocouple. The sensor element 1 comprises an upper electrode 1a and a lower electrode 1b. Both electrodes 1a and 1b may be conductive, particularly metallic. The electrodes 1a and 1b are arranged to read the sensor element 1, but may also serve to supply current and / or voltage to the sensor element 1.

[0069] The contact element 2 is fixed to and electrically connected to the sensor element 1, i.e., its upper electrode 1a. The mechanical and electrical connection between the contact element 2 and the sensor element 1 is achieved, for example, by material locking connections, such as soldering, sintering, welding, or adhesive connections. Since the contact element 2 is conductive, the sensor element 1 can be read with the help of the contact element 2.

[0070] Figure 2 shows further locations where assemblies of different components 3 and 6 for the electronic device are provided. One component is a substrate 6 having an upper metallization 6a. The substrate 6 is, for example, a DBC substrate. The further component is a power semiconductor device 3, also called a power semiconductor chip, which is mounted on the top surface of the substrate 6 and electrically connected to it via wire bonds. The power semiconductor device 3 has an upper electrode 3a, which constitutes a measuring surface 30, where a physical quantity is measured with the help of the sensor element 1 in Figure 1. As an example, the power semiconductor device 3 is an IGBT or a power MOSFET, and the upper electrode 3a is the source electrode or emitter electrode, respectively.

[0071] Figure 3 shows the position where the sensor unit 10 of Figure 1, which has a composite of a sensor element 1 and a contact element 2, is positioned on the power semiconductor device 3 such that the sensor element 1 is adjacent to the measuring surface 30. No additional connecting material is used to form a material lock connection between the sensor element 1 and the measuring surface 30. Therefore, a dry connection exists between the sensor element 1 and the measuring surface 30.

[0072] Figure 4 shows an exemplary embodiment of the electronic device 100, which is a power semiconductor module 100. To obtain this power semiconductor module 100 from the arrangement in Figure 3, the contact element 2 is compressed or bent and therefore biased. In this biased state, the contact element 2 exerts a force on the sensor element 1 in the direction toward the measuring surface 30, thereby pressing the sensor element 1 against the measuring surface 30. In this way, the sensor element 1 is firmly held on and connected to the measuring surface 30 due to the increased frictional force (dry contact) and the secure and reliable electrical connection (dry electrical contact) between the measuring surface 30 and the sensor element 1.

[0073] The device in Figure 4 may be manufactured as follows: With the contact element 2 in a biased state, resin 61 is applied to the substrate 6, enclosing a portion of the contact element 2. After drying the resin 61, the contact element 2 is fixed in its biased state so that the force exerted by the biased contact element 2 on the sensor element 1 acts against loosening of the dry connection / dry contact. The resulting resin body 61 forms the housing frame 61 of the power semiconductor module 100. The cavity surrounded by the housing frame may be filled with, for example, gel.

[0074] Alternatively, the device in Figure 4 may be manufactured as follows: a pre-fabricated housing frame 61 can be attached to the substrate 6, and the contact element 2 can then be clamped to the housing frame 61 to maintain a biased state. Alternatively, the contact element may be at least partially embedded in the housing frame as an integral part.

[0075] The portion of the contact element 2 on the upper surface of the power semiconductor module 100 is not covered by the resin body 61 and is exposed. This portion constitutes the terminal area of ​​the contact element 2 for external electrical connection. Therefore, the sensor element 1 can be read, for example, via the contact element 2 and the DC- or AC terminal of the power semiconductor module 100.

[0076] A power semiconductor module 100 similar to that described in relation to Figure 4 can be obtained in another exemplary embodiment of the present method, which will be described in relation to Figures 5 to 7.

[0077] At the location shown in Figure 5, the contact element 2, which was described in relation to Figure 1, is provided. In contrast to Figure 1, the contact element 2 is not yet connected to the sensor element 1.

[0078] In the position shown in Figure 6, for example, the same sensor element 1 described in relation to Figure 1 is positioned on a measuring surface 30 realized by a power semiconductor device 3 that has been remounted on the substrate 6. The sensor element 1 is electrically connected and fixed to the power semiconductor device 3 by a material locking connection such as soldering, welding, bonding, or sintering.

[0079] At the position shown in Figure 7, the contact element 2 shown in Figure 5 is positioned on the upper electrode 1a of the sensor element 1, and a dry electrical contact is formed between the contact element 2 and the sensor element 1.

[0080] Here, the contact element 2 can be biased by compression or bending, and the contact element 2 can be partially sealed with resin 61 to fix it in its biased state (see the explanation related to Figure 4). The resulting power semiconductor module differs from that in Figure 4 in that a dry connection is formed between the contact element 2 and the sensor element 1, and no dry connection is formed between the sensor element 1 and the measuring surface 30. However, here again, the biased contact element generates a force in the power semiconductor module 100 that acts against loosening of the dry connection.

[0081] Figure 8 shows a location where a contact element 2 is provided, different from that of the previous exemplary embodiment. In this case, the contact element 2 is formed by a pressure contact pin. The pressure contact pin includes a spring 22 for pressing the tip element or plunger of the pressure contact pin away from the barrel or hollow sleeve of the pressure contact pin, respectively.

[0082] The contact element 2 further comprises means 21 for screw connection, namely an external screw thread 21. Figure 9 shows the location where an assembly of different components for an electronic device is provided. This assembly also comprises a substrate 6 and a power semiconductor device 3 mounted thereon. Furthermore, the assembly includes a resin body 61 in which an auxiliary terminal (structure) 4 is partially embedded. The auxiliary terminal structure 4 protrudes from the right side of the resin body 61, and this protruding portion constitutes a terminal area for external electrical connection of the auxiliary terminal 4.

[0083] Further exposed portions of the auxiliary terminal structure 4 are provided with means 41 for screw connection, i.e., through holes having female threads. The through holes are located vertically above the measuring surface 30 of the power semiconductor device 3.

[0084] Below the through-hole, a sensor element 1 is positioned on the measuring surface 1. The sensor element 1 is then fixed to the measuring surface 30, for example, by a material locking connection and electrically connected.

[0085] Figure 10 shows a further exemplary embodiment of the electronic device 100, which is a power semiconductor module 100. This power semiconductor module 100 is obtained by screwing the contact element 2 of Figure 8 into the through hole of the auxiliary terminal structure 7 of Figure 9. As a result, the tip element of the contact element 2 is in mechanical and electrical contact with the sensor element 1, i.e., its upper electrode, forming a dry contact.

[0086] The screw fastening also compresses the spring 22 of the contact element 2 so that the contact element 2 is biased. As a result, the tip element of the contact element 2 is pressed against the measuring surface 30 by the biased contact element 2, and in this way a secure dry connection and secure dry electrical contact are formed between the contact element 2 and the sensor element 1.

[0087] The contact element 2 is fixed in place and in its biased state by a screw connection between the auxiliary terminal structure 4 and the contact element 2. Subsequently, a casting material 7, for example in the form of a gel, is applied. The casting material 7 and the resin body 61 constitute the housing body of the power semiconductor module 100. The sensor element 1 can be read, for example, with the help of the contact element 2 and the auxiliary terminal 4, as well as with the help of further terminals (for example, the main terminal electrically connected to the measuring surface of the chip).

[0088] At the position shown in Figure 11, two contact elements 2 are provided, each implemented as a pressure contact pin.

[0089] Figure 12 shows the locations where assemblies of several components 3, 6, 61, and 62 are provided. Here, one component 62 is a circuit board, such as a PCB, attached to the resin body 61 and overlapping laterally with the power semiconductor device 3. Component 62 may also be a control board and may include a control device. The sensor element 1 is placed on the power semiconductor device 3 and, for example, is fixedly connected.

[0090] In Figure 13, the two contact elements 2 in Figure 11 are attached by screwing them through screw holes in the circuit board 62 so that they make electrical contact with the sensor element 1. By screwing them in, the contact elements 2 are mechanically fixed to the circuit board 62 and at the same time mechanically biased so that the tip elements of the contact elements 2 are pressed against the sensor element 1, forming a reliable dry electrical contact.

[0091] In Figure 13, one contact element 2 is in dry electrical contact with the upper electrode 1a of the sensor element 1, and the other contact element 2 is in dry electrical contact with the lower electrode 1b. Therefore, the sensor element 1 can be read with the help of both contact elements 2.

[0092] As shown in Figure 13, the lower electrode 1b protrudes laterally beyond the upper electrode 1a in order to allow both the upper electrode 1a and the lower electrode 1b to contact the contact element 2 from above.

[0093] Alternatively, the sensor element 1 may have two electrodes 1a and 1b on its upper surface, and as a result, in this case as well, the sensor element 1 can be brought into contact with the two contact elements 2 from above.

[0094] Figure 13 shows a further exemplary embodiment of the electronic device 100 in the form of a power semiconductor module 100. In this case, both contact elements 2 of the sensor unit 10 protrude vertically from the circuit board, and the terminal regions of both contact elements 2 are exposed on the upper surface of the power semiconductor module 100. These terminal regions of the two contact elements 2 can be electrically connected for reading the sensor element 1.

[0095] Figure 14 shows the location where the assembly of the substrate 6, power semiconductor device 3, and resin body 61 is provided. A hole is formed in the resin body 61 above the upper metallization 6a. In this case, the upper metallization 6a forms a measuring surface 60 on which a physical quantity, such as temperature, is measured. The sensor element 1 is positioned on this upper surface within the area of ​​the hole in the resin body 61.

[0096] At the position shown in Figure 15, the contact element 2 shown in Figure 8 is attached by screwing it into the hole in the resin body 61, so that the contact element 2 comes into contact with the sensor element 1. To enable screwing, the hole in the resin body 61 may have a female thread. Alternatively, a female threaded nut may be embedded in the resin body (not shown).

[0097] Figure 16 shows an exemplary embodiment of an electronic device 100, which is a power semiconductor module 100. In this case, a thermally conductive material 5 in the form of a paste filled with electrically and / or thermally conductive particles, such as metal particles, or a flexible material sheet, is arranged between the sensor element 1 and the measuring surface 30. Dry electrical contacts can be formed between the material 5 and the sensor element 1, and between the material 5 and the measuring surface 30. The sensor element 1 may be fixed to the contact element 2 by a material locking connection.

[0098] In the case of Figure 16, the thermally conductive material 5 is also conductive to establish electrical contact between the upper electrode 3a and the sensor element 1. When such a thermally conductive material 5 is used in the exemplary embodiment of Figure 13, the material 5 can, for example, be electrically insulating.

[0099] In an exemplary embodiment of the electronic device 100 shown in Figure 17, the tip element of the contact element 2 is provided with a roughened surface having a plurality of protrusions and recesses. The average roughness of this roughened surface is, for example, 1.6 μm or more. When the biased contact element 2 presses the contact element 2 against the upper electrode of the sensor element 1, the protrusions imprint on the upper electrode, thereby improving the dry connection by, for example, penetrating and / or locally destroying the resulting oxide layer. For this purpose, the upper electrode may be relatively softer compared to the material of the roughened surface.

[0100] Figure 18 shows a location where a further exemplary embodiment of the contact element 2 for an electronic device is provided. In this case, the contact element 2 comprises a pressure contact pin as described above, and further a terminal structure 24 mechanically and electrically connected to the pressure contact pin. This connection can be established by various methods, such as screwing, soldering, bonding, sintering, and welding. The terminal structure 24 is a sheet-like element and may be formed from a metal, such as Cu or a Cu alloy.

[0101] In the position shown in Figure 19, an assembly of different components for the electronic device 100 is again provided, comprising a substrate 6, a power semiconductor device 3, and a resin body 61. The sensor element 1 is positioned and fixed on the measuring surface 30 formed by the upper electrode 3a of the power semiconductor device 3.

[0102] Figure 20 shows an exemplary embodiment of an electronic device 100 in the form of a power semiconductor module 100, manufactured by, in particular, attaching the contact element 2 of Figure 18 to the assembly of Figure 19. The auxiliary terminal structure 24 is bonded to the resin body 61, for example, so that the pressure contact pin is maintained in its biased state. In Figure 20, the power semiconductor device 3 and a portion of the contact element 2 are embedded in the casting 7, for example, in the form of a gel. The terminal structure 24 constitutes the auxiliary terminal of the power semiconductor module 100.

[0103] Figure 21 shows an exemplary embodiment of the electronic device 100 in a top view on the measuring surface 30. As can be seen here, the sensor element 1 is positioned laterally on the measuring surface 30 between two adjacent bond wires, which are electrically and mechanically connected to the upper electrode 3a of the power semiconductor device 3.

[0104] Figure 22 shows an exemplary embodiment of the electronic device 100 in the form of an assembly of two power semiconductor modules 8 mounted on a cooler 9. The cooler 9 is configured to cool the power semiconductor modules 8. For example, the cooler 9 has channels for guiding a coolant through the cooler 9. The cooler 9 is formed of a metal such as Cu or Al. The exposed surface of the cooler 9 is used as a measuring surface 90. A nut 91 having a female thread is attached to the measuring surface 90. The sensor element 1 is positioned on the measuring surface 90 within the area of ​​the hole in the nut 91. The contact element 2 in Figure 8 is screwed into the nut 91, forming a dry electrical contact between the sensor element 1 and the contact element 2. The contact element 2 is fixed to the nut 91 in its biased state by the screw connection.

[0105] Instead of the cooler 9 that forms the measurement surface, the base plate of the power semiconductor module may form the measurement surface.

[0106] The embodiments shown in Figures 1 to 22 above represent exemplary embodiments. Therefore, they do not constitute a complete list of all embodiments of improved electronic devices and improved methods. Actual electronic devices and methods may differ from the embodiments shown, for example, with respect to arrangement, devices, and elements. [Explanation of Symbols]

[0107] Reference sign 1. Sensor element 1a Upper electrode 1b Lower electrode 2 Contact elements 3 Power semiconductor devices 3a Upper electrode 4 Auxiliary terminal (structure) 5. Thermally conductive materials 6 circuit boards 6a Upper metallization 7. Castings / Gels 8 Power Semiconductor Modules 9 Cooler 10 Sensor units for electronic devices 21 Screw connection means 22 springs 24 Auxiliary terminal structure 30 measuring surface 41 Screw connection means 60 measuring surface 61 Resin / Resin Body / Housing Frame 62 Circuit boards 90 measuring surface 91 Nut 100 Electronic Devices

Claims

1. An electronic device (100), A sensor element (1) for measuring a physical quantity within the aforementioned electronic device (100), A contact element (2) configured to be mechanically biased, With the help of the sensor element (1), the measuring surface (30, 60, 90) on which the physical quantity is measured and Equipped with, The sensor element (1) is placed on the measuring surface (30), The contact element (2) is electrically connected to the sensor element (1), The connection between the sensor element (1) and the contact element (2) is a non-material lock connection. The contact element (2) is mechanically biased to prevent loosening of the non-material lock connection. The sensor element (1) is connected to the measuring surfaces (30, 60, 90) by a material lock connection. An electronic device (100) in which a non-material locked electrical contact is formed between the contact element (2) and the sensor element (1).

2. The sensor element (1) is a temperature sensor. The electronic device (100) according to claim 1.

3. The contact element (2) comprises a spring contact or a pressure contact pin. The electronic device (100) according to claim 1 or 2.

4. The terminal region for electrically connecting the sensor element (1) from the outside via the contact element (2) overlaps with the sensor element (1) in at least one lateral direction. The electronic device (100) according to claim 1 or 2.

5. The terminal region for electrically connecting the sensor element (1) from the outside via the contact element (2) is offset from the sensor element (1) in at least one lateral direction. The electronic device (100) according to claim 1 or 2.

6. The sensor element (1) is provided with an upper electrode (1a) on its upper surface and a lower electrode (1b) on its lower surface opposite to the upper surface. The contact element (2) is connected to the upper electrode (1a) of the sensor element (1). The measuring surfaces (30, 60, 90) are connected to the lower electrode (1b) of the sensor element (1). The electronic device (100) according to claim 1 or 2.

7. Further comprising a power semiconductor device (3), The sensor element (1) is arranged on the power semiconductor device (3). The electronic device (100) according to claim 1 or 2.

8. The measuring surface (30) is formed by the upper electrode (3a) of the power semiconductor device (3). The electronic device (100) according to claim 7.

9. The contact element (2) is electrically and mechanically connected to the auxiliary terminal (4) of the electronic device (100) by screw connection. The auxiliary terminal (4) is electrically connectable from the outside. The electronic device (100) according to claim 1 or 2.

10. A method for manufacturing an electronic device (100), The sensor element (1) is provided, A contact element (2) configured to be mechanically biased is provided, The electronic device (100) is provided with members (3, 6, 9), wherein the electronic device (100) has measuring surfaces (30, 60, 90) on which physical quantities of the electronic device (100) are measured with the help of the sensor element (1), and the electronic device (100) is provided with members (3, 6, 9), The sensor element (1) is placed on the measuring surface (30, 60, 90), The contact element (2) and the sensor element (1) are electrically connected, The connection between the contact element (2) and the sensor element (1) is a non-material lock connection, Mechanically biasing the contact element (2), In order to prevent loosening of the non-material lock connection, at least a portion of the mechanically biased contact element (2) is fixed to the member (3, 6, 9) so that the contact element (2) remains in a mechanically biased state. Includes, The sensor element (1) is connected to the measuring surfaces (30, 60, 90) by a material lock connection. A method for forming a non-material lock electrical contact between the contact element (2) and the sensor element (1).

11. A portion of the contact element (2) is fixed to the members (3, 6, 9) by screw connection. The method according to claim 10.

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