Method for installing protective sheets, and apparatus for installing protective sheets

Abstract

To arrange a protective sheet in a plate-like object without causing twisting or wrinkles in the sheet.SOLUTION: The present invention relates to a protective sheet arrangement method for separating a separation sheet from a protective sheet on which the separation sheet is arranged and arranging the protective sheet in a plate-like object. The method also includes: forming a cut groove by cutting the separation sheet arranged in the protective sheet; separating the separation sheet from the protective sheet in the inside of the cut groove, thereby partially exposing an adhesive layer; and bringing the partially exposed adhesive layer in contact with a surface of the plate-like object, and sticking the protective sheet while being pressed against the plate-like object so as to arrange the protective sheet in the plate-like object. In this time, the protective sheet with the separation sheet being arranged in the outside of the cut groove is arranged in the plate-like object. After that, the protective sheet is cut off in a position where the protective sheet does not overlap with the separation sheet so that the plate-like object with the protective sheet arranged therein is obtained.SELECTED DRAWING: Figure 9

Description

Technical Field

[0005]

[0001] The present invention relates to a method for disposing a protective sheet in which a release sheet is disposed on a plate-like object by peeling the release sheet from the protective sheet on which the release sheet is disposed, and a protective sheet disposing apparatus.

Background Art

[0002] In the manufacturing process of device chips used in electronic devices such as mobile phones and personal computers, first, a plurality of division planned lines (streets) intersecting each other are set on the surface of a wafer made of a material such as a semiconductor. Then, devices such as ICs (Integrated Circuits) and LSIs (Large-scale Integration) are formed in each region partitioned by the division planned lines. Thereafter, when the wafer is thinned by grinding from the back side and divided along the division planned lines, individual device chips are formed.

[0003] Grinding of the wafer is performed by a grinding apparatus (see Patent Document 1) including a holding table and a grinding unit to which a grinding wheel is attached. Before a plate-like object such as a wafer is carried into the grinding apparatus, an adhesive tape is attached as a protective member to the surface opposite to the grinding surface of the plate-like object. The adhesive tape is composed of a base material layer and an adhesive layer disposed on the base material layer.

[0004] A release sheet is disposed on the adhesive tape so that foreign matters or the like do not adhere to the adhesive layer before the adhesive tape is attached to the plate-like object. In a state where the release sheet is disposed on the adhesive tape and integrated, the adhesive tape is reinforced by the release sheet, so that it is difficult for the adhesive tape to be twisted or wrinkled. When the release sheet is peeled off, it is easy for the adhesive tape to be twisted or the like, so the release sheet is peeled off from the adhesive tape immediately before the adhesive tape is attached to the plate-like object.

[0005] In a tape application device for attaching adhesive tape to a plate-like object (see Patent Document 2), the release sheet is peeled off from the adhesive tape, exposing the adhesive layer, and the exposed adhesive layer is brought into contact with the plate-like object. More specifically, in the tape application device, the release sheet is peeled off at one end of the adhesive tape and attached to the plate-like object, and the release sheet is pulled to peel it off further, expanding the exposed area of ​​the adhesive layer, while the plate-like object is pressed with a pressure roller, thereby attaching the adhesive tape from one end of the plate-like object. As a result, the adhesive tape, which functions as a protective member, is attached to the plate-like object. [Prior art documents] [Patent Documents]

[0006] [Patent Document 1] Japanese Patent Publication No. 2000-288881 [Patent Document 2] Japanese Patent Publication No. 2018-206833 [Overview of the Initiative] [Problems that the invention aims to solve]

[0007] However, when adhesive tape is applied to a plate-like object while simultaneously peeling off the release sheet, the adhesive tape is applied to the plate-like object under stress caused by the peeling of the release sheet. Since this stress is not constant, the adhesive tape is not applied uniformly to the protected surface of the plate-like object.

[0008] Furthermore, because the rigidity of the adhesive tape decreases in the area where the release liner has been peeled off, twisting and wrinkling are likely to occur in that area of ​​the adhesive tape due to the stress caused by the peeling of the release liner between the time a region of the adhesive layer is exposed and when that region is attached to a plate-like object. When adhesive tape with twists and wrinkles is attached to a plate-like object, a problem arises in which air bubbles get trapped between the adhesive tape and the plate-like object.

[0009] This invention has been made in view of the above problems, and its objective is to provide a sheet arrangement method and sheet arrangement apparatus for arranging protective sheets such as adhesive tape on a plate-shaped object without twisting or wrinkling. [Means for solving the problem]

[0010] According to one aspect of the present invention, a protective sheet placement method is provided for a protective sheet comprising a base layer and an adhesive layer disposed on the base layer, wherein the release sheet is disposed on the adhesive layer, and the protective sheet is disposed on a plate-shaped object, comprising: a protective sheet preparation step of preparing the protective sheet having a size and shape that can cover the entire surface of the plate-shaped object; a release sheet cutting step of cutting the release sheet disposed on the protective sheet in a shape that follows the outer edge of the surface of the plate-shaped object to form a cutting groove; and a peeling step after the release sheet cutting step of leaving the release sheet on the protective sheet outside the cutting groove and peeling the release sheet from the protective sheet inside the cutting groove to partially expose the adhesive layer. The protective sheet, in which the adhesive layer is exposed inside the cut groove, is held in the area where the release liner of the protective sheet remains. A protective sheet placement method is provided, comprising: a facing step of positioning the protective sheet so that the adhesive layer partially exposed in the peeling step faces the surface of the plate-shaped object, which is held by a holding table and has its surface exposed; a placement step of placing the protective sheet on the plate-shaped object by bringing the partially exposed adhesive layer into contact with the surface of the plate-shaped object and pressing the protective sheet onto the plate-shaped object after the facing step; and a protective sheet cutting step of cutting the protective sheet at a position that does not overlap with the release sheet to obtain the plate-shaped object on which the protective sheet is placed, wherein in the placement step the protective sheet is placed on the plate-shaped object with the release sheet placed outside the cutting groove.

[0011] According to another aspect of the present invention, a protective sheet placement method is provided for a protective sheet that does not have an adhesive layer and includes a thermoplastic resin layer formed of a thermoplastic resin, wherein the release sheet is disposed on the thermoplastic resin layer, and the protective sheet is disposed on a plate-like object, comprising: a protective sheet preparation step of preparing the protective sheet having a size and shape that can cover the entire surface of the plate-like object; a release sheet cutting step of cutting the release sheet disposed on the protective sheet in a shape that follows the outer edge of the surface of the plate-like object to form a cutting groove; and a peeling step after the release sheet cutting step of leaving the release sheet on the protective sheet outside the cutting groove and peeling the release sheet from the protective sheet inside the cutting groove to partially expose the thermoplastic resin layer. The protective sheet, in which the thermoplastic resin layer is exposed inside the cut groove, is held in the area where the release sheet of the protective sheet remains. A protective sheet placement method is provided, comprising: a facing step of positioning the protective sheet so that the thermoplastic resin layer partially exposed in the peeling step faces the surface of the plate-shaped object, which is held by a holding table and has its surface exposed; an placement step of placing the protective sheet on the plate-shaped object by bringing the partially exposed thermoplastic resin layer into contact with the surface of the plate-shaped object and pressing the protective sheet onto the plate-shaped object while heating it, and heat-pressing the protective sheet; and a protective sheet cutting step of obtaining the plate-shaped object on which the protective sheet is placed by cutting the protective sheet at a position that does not overlap with the peeling sheet, either after or simultaneously with the placement step, wherein in the placement step, the protective sheet is placed on the plate-shaped object with the peeling sheet placed outside the cutting groove.

[0012] Preferably, the installation step is carried out in a reduced-pressure atmosphere.

[0013] According to yet another aspect of the present invention, a protective sheet dispensing apparatus for dispensing a release sheet from a protective sheet having a release sheet disposed on the adhesive layer, which includes a base layer and an adhesive layer disposed on the base layer, and dispensing the protective sheet onto a plate-like object, comprising: a dispensing unit for dispensing the protective sheet having the release sheet disposed on it from a roll of raw material formed by winding the protective sheet having the release sheet disposed on it; a release sheet cutting unit for cutting the release sheet disposed on the protective sheet in a shape that follows the outer edge of the plate-like object to form a cutting groove; and a peeling unit for peeling the portion of the release sheet cut by the release sheet cutting unit that is inside the cutting groove from the protective sheet to partially expose the adhesive layer, A transport unit comprising a suction unit disposed in a holding portion corresponding to the area of ​​the protective sheet where the release liner remains, and which holds and transports the protective sheet in the area where the release liner remains, with the adhesive layer exposed inside the cut groove, using the suction unit. A protective sheet placement device is provided, comprising: a holding table for holding the plate-shaped object on a holding surface; a placement unit for pressing the protective sheet onto the plate-shaped object held by the holding table so that the partially exposed adhesive layer faces and contacts the plate-shaped object; and a protective sheet cutting unit for cutting the protective sheet placed on the plate-shaped object by the placement unit at a position that does not overlap with the release sheet to form the plate-shaped object on which the protective sheet is placed.

[0014] According to yet another aspect of the present invention, a protective sheet dispensing device for dispensing a release sheet from a protective sheet having a thermoplastic resin layer formed of a thermoplastic resin and having no adhesive layer, and dispensing the protective sheet onto a plate-like object, comprising: a dispensing unit for dispensing the protective sheet having the release sheet from a raw material roll formed by winding the protective sheet having the release sheet; a release sheet cutting unit for cutting the release sheet disposed on the protective sheet in a shape along the outer edge of the plate-like object to form a cutting groove; and a peeling unit for peeling the portion of the release sheet cut by the release sheet cutting unit that is inside the cutting groove from the protective sheet to partially expose the thermoplastic resin layer, A transport unit comprising a suction unit disposed in a holding portion corresponding to the area of ​​the protective sheet where the release liner remains, and which holds and transports the protective sheet in the area where the release liner remains, with the thermoplastic resin layer exposed inside the cut groove, using the suction unit,A protective sheet placement device is provided, comprising: a holding table for holding the plate-shaped object on a holding surface; a heating unit for heating one or both of the plate-shaped object and the protective sheet held by the holding table, wherein the protective sheet is placed on the plate-shaped object by pressing the protective sheet against it while heating one or both of the plate-shaped object and the protective sheet with the heating unit, with the thermoplastic resin layer partially exposed on the plate-shaped object held by the holding table facing and in contact with it; and a protective sheet cutting unit for cutting the protective sheet placed on the plate-shaped object by the placement unit at a position that does not overlap with the release sheet, thereby forming the plate-shaped object on which the protective sheet is placed.

[0015] Preferably, the system includes a depressurized chamber capable of housing the holding table and the mounting unit.

[0016] Preferably, the system further includes a sheet outline cutting unit that cuts the protective sheet unfed by the dispensing unit into an outline larger than that of the plate-like object. [Effects of the Invention]

[0017] In a protective sheet placement method and protective sheet placement apparatus according to one aspect of the present invention, a release sheet placed on the protective sheet is pre-cut to form a cutting groove along the outer edge of the surface of a plate-like object, and the release sheet is peeled off from the protective sheet inside the cutting groove. In this state, the protective sheet is placed on the surface of the plate-like object with the portion exposed from the release sheet. After that, the unnecessary portion of the protective sheet, along with the remaining release sheet, is cut off.

[0018] In this case, since the release liner is partially peeled from the protective sheet beforehand, the stress caused by the peeling of the release liner is not applied to the adhesive tape when the protective sheet is placed on the plate-like object. Furthermore, when the protective sheet is placed on the plate-like object, the release liner remaining around the cut groove of the release liner functions as a reinforcing material for the protective sheet, suppressing the occurrence of twisting and wrinkling of the protective sheet. As a result, the problem of air bubbles getting trapped between the plate-like object and the protective sheet becomes less likely to occur.

[0019] Therefore, according to one aspect of the present invention, a sheet arrangement method and a sheet arrangement device are provided that can arrange a protective sheet such as an adhesive tape on a plate-like object without kinking or wrinkling.

Brief Description of the Drawings

[0020] [Figure 1] It is a perspective view schematically showing a protective sheet arrangement device. [Figure 2] FIG. 2(A) is a perspective view schematically showing a feeding unit, and FIG. 2(B) is a perspective view schematically showing a cutting stage. [Figure 3] FIG. 3(A) is a perspective view schematically showing a peeling unit, and FIG. 3(B) is a perspective view schematically showing a conveying unit. [Figure 4] It is a perspective view schematically showing a protective sheet arrangement unit. [Figure 5] FIG. 5(A) is a cross-sectional view schematically showing a protective sheet preparation step, FIG. 5(B) is an enlarged cross-sectional view schematically showing the protective sheet to be cut, and FIG. 5(C) is a cross-sectional view schematically showing the peeling sheet to be cut. [Figure 6] FIG. 6(A) is a cross-sectional view schematically showing a cutting stage holding a protective sheet, and FIG. 6(B) is a cross-sectional view schematically showing the cutting stage turned upside down. [Figure 7] [[ID=DB]] FIG. 7(A) is a cross-sectional view schematically showing a peeling step, and FIG. 7(B) is a cross-sectional view schematically showing the protective sheet conveyed by a conveying unit. [Figure 8] FIG. 8(A) is a cross-sectional view schematically showing the protective sheet in the first stage of conveyance, and FIG. 8(B) is a cross-sectional view schematically showing the protective sheet in the second stage of conveyance. [Figure 9] It is a cross-sectional view schematically showing a state where a protective sheet is arranged on a plate-like object. <O000106> [Figure 10]Figure 10(A) is a schematic perspective view showing a protective sheet and a release sheet with a cut groove formed therein; Figure 10(B) is a schematic perspective view showing a protective sheet with the release sheet peeled off inside the cut groove; and Figure 10(C) is a schematic perspective view showing a plate-like object on which the protective sheet is installed. [Figure 11] Figure 11(A) is a schematic cross-sectional view showing a plate-like object on which a protective sheet containing an adhesive layer is provided; Figure 11(B) is a schematic cross-sectional view showing a protective sheet containing a thermoplastic resin layer, a release sheet, and a plate-like object; and Figure 11(C) is a schematic cross-sectional view showing a plate-like object on which a protective sheet containing a thermoplastic resin layer is provided. [Figure 12] This is a flowchart showing the steps involved in the installation of the protective sheet. [Modes for carrying out the invention]

[0021] Embodiments of the present invention will be described with reference to the attached drawings. In the protective sheet placement method and protective sheet placement apparatus according to this embodiment, a protective sheet is placed on a plate-shaped object such as a semiconductor wafer on which a plurality of semiconductor devices are formed on its surface.

[0022] First, let's describe the plate-like object on which the protective sheet is placed. Figure 1 includes a perspective view of the plate-like object 11, and Figure 10(C) shows the plate-like object 11 with the protective sheet 13 placed on it. The plate-like object 11 is, for example, a roughly disc-shaped substrate made of a semiconductor material such as Si (silicon), SiC (silicon carbide), GaN (gallium nitride), GaAs (gallium arsenide), or other materials. However, the plate-like object 11 is not limited to these. The plate-like object 11 may also be rectangular in shape.

[0023] The surface 11a of the plate-like material 11 is divided by multiple intersecting division lines (not shown). Devices such as ICs and LSIs (not shown) are formed in each region of the surface 11a of the plate-like material 11 that is divided by the division lines. By thinning the plate-like material 11 and dividing it along the division lines, individual device chips, each containing a device, can be manufactured.

[0024] The thinning of the plate-like object 11 is carried out by grinding the plate-like object 11 from the back surface 11b side using a grinding device. The grinding of the plate-like object 11 is carried out using a grinding device that comprises a holding table and a grinding unit equipped with a grinding wheel. Before the plate-like object 11 is brought into the grinding device, a protective sheet 13 is attached to the front surface 11a, which is the surface of the plate-like object 11 opposite to the back surface 11b that will be ground.

[0025] Figure 5(A) includes a schematic cross-sectional view of the protective sheet 13, and Figure 10(C) shows a perspective view of a plate-like object 11 on which the protective sheet 13 is placed. The protective sheet 13 is, for example, an adhesive tape including a film-like base layer 15 and an adhesive layer (glue layer) 17 disposed on the base layer 15.

[0026] The base layer 15 is made of a resin such as polyolefin, polyvinyl chloride, or polyethylene terephthalate. The adhesive layer 17 is made of an epoxy, acrylic, or rubber-based adhesive. The adhesive layer 17 may also be made of an ultraviolet-curing resin that hardens upon irradiation with ultraviolet light.

[0027] Furthermore, the protective sheet 13 does not necessarily have an adhesive layer 17, and may be composed of a base layer 15 made of a thermoplastic resin such as polyolefin or polyester, i.e., a thermoplastic resin layer. Conversely, the protective sheet 13 may further include layers other than the base layer 15 and the adhesive layer 17. The following explanation will describe an example in which a protective sheet 13 comprising a base layer 15 and an adhesive layer 17 is disposed on a plate-like object 11.

[0028] A release sheet 19 is provided on the adhesive layer 17 of the protective sheet 13 to prevent foreign matter from adhering to the adhesive layer 17 before the protective sheet 13 is attached to the plate-like object 11. When the protective sheet 13 is integrated with the release sheet 19, the protective sheet 13 is reinforced by the release sheet 19, making it less likely for the protective sheet 13 to twist or wrinkle.

[0029] For example, the thickness of the base layer 15 of the protective sheet 13 is approximately 100 μm, and the thickness of the adhesive layer 17 is approximately 30 μm. The thickness of the release sheet 19 is approximately 100 μm. However, the thicknesses of the base layer 15, adhesive layer 17, and release sheet 19 of the protective sheet 13 are not limited to these.

[0030] In conventional tape application devices and methods for attaching a protective sheet 13, which is made of adhesive tape, to a plate-shaped object 11, the release sheet 19 is peeled off over the entire surface of the protective sheet 13, exposing the adhesive layer 17, and the exposed adhesive layer 17 is brought into contact with the plate-shaped object 11.

[0031] More specifically, in the tape application device, the release sheet 19 is first peeled off at one end of the protective sheet 13 and attached to the plate-like object 11. Then, the release sheet 19 is pulled and peeled further to widen the exposed area of ​​the adhesive layer 17, and the plate-like object 11 is pressed from above with a pressure roller, thereby attaching the protective sheet 13 to one end of the plate-like object 11. As a result, the protective sheet 13, which is made of adhesive tape, is attached to the plate-like object 11.

[0032] However, when the protective sheet 13 is attached to the plate-like object 11 while the release sheet 19 is being peeled off, the protective sheet 13 is attached to the plate-like object 11 under stress caused by the peeling of the release sheet 19. Since this stress is not constant at all times, the protective sheet 13 is not attached uniformly to the surface 11a of the plate-like object 11, which is the surface to be protected.

[0033] Furthermore, the rigidity of the protective sheet 13 decreases in the area where the release sheet 19 has been peeled off. As a result, from the time one area of ​​the adhesive layer 17 is exposed until that area is attached to the plate-like object 11, the stress associated with the peeling off of the release sheet 19 makes it easy for twisting, wrinkling, etc., to occur in that area of ​​the protective sheet 13. When a protective sheet 13 with twisting or wrinkling occurs is attached to the plate-like object 11, a problem arises in which air bubbles get trapped between the protective sheet 13 and the plate-like object 11.

[0034] Therefore, the protective sheet placement device and protective sheet placement method according to this embodiment are configured to allow the protective sheet 13, such as adhesive tape, to be placed on the plate-shaped object 11 without twisting or wrinkling. First, the protective sheet placement device according to this embodiment will be described below. Figure 1 is a schematic perspective view showing the protective sheet placement device 2 according to this embodiment.

[0035] Figure 2(A) is a schematic perspective view showing the raw material roll 4, the protective sheet 13, the release sheet 19 disposed on the protective sheet 13, the feeding unit 6, the release sheet cutting unit 8, the sheet outer shape cutting unit 10, and the roller 12. As shown in Figure 2(A), the protective sheet dispensing device 2 has a raw material roll 4 on which a long length of protective sheet 13 with the release sheet 19 disposed on it is wound, and a roller 12 that forms the path for the protective sheet 13 fed out from the raw material roll 4.

[0036] Furthermore, the protective sheet distribution device 2 includes a dispensing unit 6 that dispenses the protective sheet 13 from the raw material roll 4. The dispensing unit 6 has a movable body 16 that can move in a direction perpendicular to the axial direction (horizontal direction, X-axis direction) of the raw material roll 4, and a gripping part 18 incorporated into the movable body 16. A rail (not shown) is slidably connected to the movable body 16 along a direction perpendicular to the axial direction (horizontal direction, Y-axis direction) of the raw material roll 4, and a drive source (not shown) such as a motor that moves the movable body 16 along the rail is also connected.

[0037] For example, the mobile body 16 incorporates a pair of gripping parts 18 so that it can grip the protective sheet 13 from both sides. Each gripping part 18 has a pair of gripping bodies that can approach each other along the vertical direction (Z-axis direction), and the protective sheet 13 can be gripped by bringing the two gripping bodies closer together so that the protective sheet 13 is between them. To release the grip on the protective sheet 13, the two gripping bodies are moved away from each other.

[0038] When the dispensing unit 6 dispenses the protective sheet 13 from the raw material roll 4, the mobile body 16 moves in a direction perpendicular to the axial direction of the raw material roll 4 (Y-axis direction) to pick up the protective sheet 13 that has been fed out from the raw material roll 4 and guided by the roller 12. Then, the gripping parts 18 grip the area near the leading edge of the protective sheet 13 and move the mobile body 16 in the opposite direction along the Y-axis direction. This dispenses the protective sheet 13 from the raw material roll 4.

[0039] The protective sheet distribution device 2 further includes a release sheet cutting unit 8 for cutting the release sheet 19 distributed on the protective sheet 13, and a sheet outline cutting unit 10 for separating the protective sheet 13 from the raw material roll 4. Furthermore, the protective sheet distribution device 2 includes a cutting stage 14 (see Figure 2(B)) for supporting the protective sheet 13 unwound from the raw material roll 4.

[0040] The release sheet cutting unit 8 cuts the release sheet 19, which is placed on the protective sheet 13, in a shape that follows the outer edge of the plate-like object 11 on which the protective sheet 13 is to be placed. This forms a cutting groove in the protective sheet 13. The release sheet cutting unit 8 has a rotating shaft portion 22 that is oriented in the vertical direction (Z-axis direction), an arm portion 24 that extends horizontally from the lower end of the rotating shaft portion 22, and a cutter (cutting tool) 26 that is positioned below the tip of the arm portion 24. The mounting position of the cutter 26 relative to the arm portion 24 may be adjustable.

[0041] When the release sheet 19 is cut by the release sheet cutting unit 8, the protective sheet 13 on which the release sheet 19 to be cut is placed is held by the cutting stage 14, which will be described in detail later. The rotating shaft portion 22 of the release sheet cutting unit 8 is positioned directly above the center of the upper surface of the cutting stage 14.

[0042] The base end of the arm portion 24 is connected to the lower end of the rotating shaft portion 22, and a cutter 26 protruding downward is connected to the tip end of the arm portion 24. The length of the arm portion 24 is approximately the same as the radius of the surface 11a of the plate-like object 11 on which the protective sheet 13 is placed. Alternatively, the mounting position of the cutter 26 on the arm portion 24 is approximately the same as the radius of the surface 11a of the plate-like object 11 from the rotating shaft portion 22. The release sheet cutting unit 8 has a rotation drive source 20 such as a motor that rotates the rotating shaft portion 22, and by operating this rotation drive source 20, the cutter 26 is moved on an annular trajectory with the arm portion 24 as its diameter.

[0043] The protective sheet distribution device 2 further includes a sheet outline cutting unit 10 that cuts the protective sheet 13, which has been unfurled from the raw material roll 4 by the unfurling unit 6, into an outline larger than that of the plate-like object 11. The sheet outline cutting unit 10 includes a cutter 28 that protrudes downward and a moving mechanism (not shown) that moves the cutter 28 along the direction (X-axis direction) of the raw material roll 4. The sheet outline cutting unit 10 can move the cutter 28 in the X-axis direction by operating the moving mechanism.

[0044] The release sheet cutting unit 8 and the sheet outline cutting unit 10 are each capable of moving up and down in the vertical direction (Z-axis direction). In particular, the release sheet cutting unit 8 can be lowered so that the lower end of the cutter 26 reaches a height below the lower surface of the release sheet 19 placed on the protective sheet 13 that has been fed out by the feeding unit 6. Similarly, the sheet outline cutting unit 10 can be lowered so that the lower end of the cutter 28 reaches a height below the lower surface of the protective sheet 13.

[0045] Figure 2(B) is a schematic perspective view of the cutting stage 14. The cutting stage 14 includes a holding plate 30 that holds the protective sheet 13 unfurled by the unfurling unit 6, and a reversal shaft portion 34 that serves as the axis of rotation when the orientation of the holding plate 30 is reversed. The cutting stage 14 can be raised to a height position where the holding plate 30 contacts the protective sheet 13 unfurled from the raw material roll 4.

[0046] The retaining plate 30 has a flat upper surface, a retaining surface 30a, and applies a retaining force to the protective sheet 13 placed on the retaining surface 30a to hold the protective sheet 13 in place. For example, the retaining plate 30 has a suction passage (not shown) at one end that leads to the retaining surface 30a, and a suction source such as a pump is connected to the other end of this suction passage. When this suction source is activated while the protective sheet 13 is placed on the retaining surface 30a, negative pressure is applied to the protective sheet 13 from the retaining surface 30a side, and the protective sheet 13 is held in place by the retaining plate 30 through suction.

[0047] The holding plate 30 may hold the protective sheet 13 by a method other than suction. For example, the holding plate 30 may have electrodes connected to a power source inside, and apply an electrostatic force to the protective sheet 13 placed on the holding surface 30a. In other words, the holding plate 30 may electrostatically chuck the protective sheet 13.

[0048] The retaining plate 30 is provided with a relief groove 32 that runs along the movement path of the cutter 28 of the sheet outer shape cutting unit 10, i.e., along the X-axis direction. When the cutter 28 cuts the protective sheet 13 held by the retaining plate 30, the cutter 28 enters the relief groove 32, thereby avoiding contact between the cutter 28 and the retaining plate 30.

[0049] The reversing shaft portion 34 is, for example, arranged along the X-axis direction, and a rotational drive source such as a motor (not shown) is connected to one end. The reversing shaft portion 34 is connected to the lower surface of the holding plate 30. The cutting stage 14 can switch between a state in which the holding surface 30a of the holding plate 30 faces upward and a state in which the holding surface 30a faces downward by controlling the rotational drive source connected to the reversing shaft portion 34 to rotate the reversing shaft portion 34.

[0050] As shown in Figure 5(B), on the holding plate 30 of the cutting stage 14, the protective sheet 13 held by the holding plate 30 is cut by the cutter 28 of the sheet outer shape cutting unit 10. At this time, the lower end of the cutter 28 reaches a position lower than the protective sheet 13. However, since the holding plate 30 has a relief groove 32, the cutter 28 does not come into contact with the holding plate 30.

[0051] Furthermore, on the holding plate 30 of the cutting stage 14, as shown in Figure 5(C), the release sheet 19 placed on the protective sheet 13 is cut by the release sheet cutting unit 8. Here, the lower end of the cutter 26 reaches a position lower than the release sheet 19, and the height of the cutter 26 is adjusted so as not to penetrate the protective sheet 13.

[0052] Figure 6(A) schematically shows a release sheet 19 that has been cut by a cutter 26 and has a cut groove 21 formed on it. Figure 10(A) is a schematic perspective view showing the release sheet 19 that has been placed on the protective sheet 13 and cut to form a cut groove 21 on it, and the protective sheet 13. Next, in the protective sheet placement device 2, the portion of the release sheet 19 cut by the release sheet cutting unit 8 that is inside the cut groove 21 is peeled from the protective sheet 13 to partially expose the adhesive layer 17.

[0053] As shown in Figure 1, the protective sheet installation device 2 includes a peeling unit 36 ​​that partially peels the release sheet 19 from the protective sheet 13. The peeling unit 36 ​​is located below the cutting stage 14. When the peeling unit 36 ​​partially peels the release sheet 19, the holding plate 30 of the cutting stage 14 rotates around the reversing shaft 34 while holding the protective sheet 13, and the holding surface 30a is directed downward, as shown in Figure 6(B).

[0054] Next, the peeling unit 36 ​​provided in the protective sheet placement device 2 will be described. Figure 3(A) is a schematic perspective view showing the peeling unit 36, and Figure 7(A) includes a schematic side view showing the peeling unit 36.

[0055] The release unit 36 ​​includes a release tape supply unit 38 on which a release tape 42, composed of a base material and an adhesive layer formed on one side of the base material, is mounted in a roll-like state and can be pulled out, and a winding unit 54 for winding up and collecting the release tape 42. Furthermore, the release unit 36 ​​has a plurality of rollers 44 that guide the release tape 42 pulled out from the release tape supply unit 38 and form a path for the release tape 42 to move.

[0056] The release tape supply unit 38 includes a feed roller 40 on which a roll of unused release tape 42 is mounted, and a rotational drive source (not shown) for rotating the feed roller 40. The winding unit 54 includes a winding roller 56 on which used release tape 42 is wound up to form a roll, and a rotational drive source (not shown) for rotating the winding roller 56.

[0057] The peeling unit 36 ​​also includes a movable body 46 on which some of the multiple rollers 44 that form the path of the peeling tape 42 are arranged, and a drive unit 52 that moves the movable body 46. The drive unit 52 has a rail 48 along the Y-axis. The movable body 46 is mounted on the rail 48 so as to be slidable along the X-axis, and the drive unit 52 has a drive source (not shown) that moves the movable body 46 along the rail 48.

[0058] The release tape 42 supplied to the mobile body 46 from the outside is guided by the roller 44 and moves along the path, eventually reaching the outside of the mobile body 46. When the mobile body 46 is moved, the feed roller 40 and the take-up roller 56 are rotated appropriately to prevent slack in the release tape 42 and to prevent excessive tension from being applied to the release tape 42. This adjusts the length of the release tape 42 as it moves along the path.

[0059] Furthermore, the peeling unit 36 ​​has a pressing section 50 on the movable body 46 that pushes up the peeling tape 42 as it moves along the path. The pressing section 50 is movable along the Y-axis with the movable body 46 and is also movable up and down along the Z-axis relative to the movable body 46. When the pressing section 50 is raised along the Z-axis, the peeling tape 42 is pressed against the peeling sheet 19 disposed on the protective sheet 13 held by the holding plate 30 of the cutting stage 14, and the peeling tape 42 adheres to the peeling sheet 19.

[0060] Next, the peeling process of the peeling sheet 19 by the peeling unit 36 ​​will be described. First, the movable body 46 is moved below the holding plate 30. At this time, the position of the movable body 46 is adjusted so that the pressing part 50 is positioned slightly inside the portion of the cutting groove 21 formed in the peeling sheet 19. Figure 7(A) is a schematic cross-sectional view (side view) showing the cutting stage 14, protective sheet 13, and peeling unit 36 ​​in this state.

[0061] Next, the pressing unit 50 is raised, and the release tape 42 is pressed and adhered to the release sheet 19. Then, the drive unit 52 moves the movable body 46, moving the release tape 42 and pulling the release sheet 19 with the release tape 42. At this time, the feed roller 40 and the winding roller 56 are rotated or stopped as appropriate. As a result, the release sheet 19 that was placed on the protective sheet 13 is peeled off inside the cutting groove 21.

[0062] Then, the winding roller 56 winds up the release tape 42 while the moving body 46 is moved further to advance the peeling of the release sheet 19 from the protective sheet 13, and finally the release sheet 19 is completely peeled off from the protective sheet 13 inside the cutting groove 21. When the winding roller 56 is rotated further, the release tape 42a to which the release sheet 19 is attached is wound up and collected by the winding section 54.

[0063] Figure 7(B) includes a schematic cross-sectional view showing the protective sheet 13 after the release sheet 19 has been peeled off inside the cutting groove 21. Figure 10(B) is a schematic perspective view showing the protective sheet 13 after the release sheet 19 has been partially peeled off. When the release sheet 19 is partially peeled off inside the cutting groove 21, the adhesive layer 17 is partially exposed. This exposed surface of the adhesive layer 17 becomes the adhesive surface 17a when the protective sheet 13 is placed (attached) to the surface 11a of the plate-like object 11.

[0064] Here, even when the release sheet 19 is partially removed, the release sheet 19 remains attached to the protective sheet 13 on the outside of the adhesive surface 17a. Therefore, the protective sheet 13 is reinforced by the release sheet 19, maintaining a state where it is less likely to twist or wrinkle. Conversely, if the release sheet 19 is peeled off from the entire surface of the protective sheet 13, the protective sheet 13 will no longer be supported by the release sheet 19, making it more susceptible to twisting and wrinkling.

[0065] The protective sheet 13, from which the release sheet 19 has been partially peeled off, is transported toward the plate-shaped object 11 to be placed. Figure 3(B) is a schematic perspective view of the transport unit 58. Next, the transport unit 58 that transports the protective sheet 13 will be described.

[0066] The transport unit 58 includes a first transport mechanism 62a that receives the protective sheet 13 held on the holding plate 30 and transports the protective sheet 13, and a second transport mechanism 62b that receives the protective sheet from the first transport mechanism 62a and transports it to the plate-shaped object 11. The first transport mechanism 62a supports the protective sheet 13 from below, and the second transport mechanism 62b supports the protective sheet 13 from above.

[0067] The transport unit 58 includes a rail 60 aligned with the Y-axis direction, to which a first transport mechanism 62a and a second transport mechanism 62b are slidably connected. The first transport mechanism 62a has an arm 64a that is aligned horizontally and has one end connected to the rail 60, a holding portion 66a disposed at the other end. The second transport mechanism 62b has an arm 64b that is aligned horizontally and has one end connected to the rail 60, a holding portion 66b disposed at the other end.

[0068] The arm portion 64a of the first transport mechanism 62a and the arm portion 64b of the second transport mechanism 62b are each movable up and down by a lifting mechanism (not shown). Furthermore, the arm portion 64a of the first transport mechanism 62a and the arm portion 64b of the second transport mechanism 62b can be positioned at different heights so as not to interfere with each other's movement.

[0069] The holding portion 66a of the first transport mechanism 62a and the holding portion 66b of the second transport mechanism 62b may be, for example, plate-shaped members formed to the same shape and size as the protective sheet 13 to be transported. Multiple suction portions 68a, each connected to a suction source (not shown), are provided on the upper surface of the holding portion 66a of the first transport mechanism 62a. Multiple suction portions 68b, each connected to a suction source (not shown), are provided on the lower surface of the holding portion 66b of the second transport mechanism 62b.

[0070] Each suction unit 68a of the first transport mechanism 62a is positioned on the holding unit 66a so as to correspond to the area on the protective sheet 13 where the release sheet 19 remains. In other words, the arrangement of each suction unit 68a is determined so that all of the suction units 68a can contact the release sheet 19 remaining on the protective sheet 13 when the first transport mechanism 62a transports the protective sheet 13.

[0071] Similarly, each suction unit 68b of the second transport mechanism 62b is positioned on the holding unit 66b so as to correspond to the area of ​​the protective sheet 13 where the release liner 19 remains. In other words, the arrangement of each suction unit 68b is determined so that all of the suction units 68b contact the area of ​​the protective sheet 13 where the release liner 19 remains when the second transport mechanism 62b transports the protective sheet 13.

[0072] The procedure for transporting the protective sheet 13 held on the holding plate 30 of the cutting stage 14 using the transport unit 58 will be described. Figure 7(B) includes a schematic cross-sectional view showing the protective sheet 13 from which the release sheet 19 has been partially peeled off by the peeling unit 36. When transporting the protective sheet 13, as shown in Figure 7(B), the peeling unit 36 ​​is moved away from below the holding plate 30, and the holding portion 66a of the first transport mechanism 62a of the transport unit 58 is moved below the holding plate 30.

[0073] Subsequently, the cutting stage 14 is lowered, or the holding portion 66a of the first transport mechanism 62a is raised, and each suction portion 68a of the first transport mechanism 62a is brought into contact with the lower surface of the release sheet 19 disposed on the protective sheet 13. Then, the suction sources connected to each suction portion 68a are activated to start the suction holding of the protective sheet 13 and the release sheet 19 by the first transport mechanism 62a. Next, the holding plate 30 releases the holding of the protective sheet 13, etc. Then, the first transport mechanism 62a is slid on the rail 60 and moved along the Y-axis.

[0074] In the transport unit 58, the protective sheet 13 is then transferred from the first transport mechanism 62a to the second transport mechanism 62b. Figure 8(A) is a schematic cross-sectional view showing the transport unit 58 when transferring the protective sheet 13, which was transported by the first transport mechanism 62a, to the second transport mechanism 62b.

[0075] When transferring the protective sheet 13 from the first transport mechanism 62a to the second transport mechanism 62b, the holding parts 66a and 66b of the first transport mechanism 62a and the holding part 66b of the second transport mechanism 62b are moved relative to each other so that they overlap. Then, the holding part 66a is raised or the holding part 66b is lowered so that the lower end of the suction part 68b of the second transport mechanism 62b comes into contact with the upper surface (base material layer 15 side) of the protective sheet 13.

[0076] Next, the suction source connected to the suction section 68b of the second transport mechanism 62b is activated to begin the suction holding of the protective sheet 13 and the release sheet 19 by the second transport mechanism 62b. Then, the suction source connected to the suction section 68a of the first transport mechanism 62a is stopped to release the holding of the protective sheet 13, etc. by the first transport mechanism 62a. Finally, the holding sections 66a and 66b are separated.

[0077] Subsequently, the second transport mechanism 62b is slid along the rail 60 and moved along the Y-axis. Figure 8(B) is a schematic cross-sectional view showing the protective sheet 13 being transported by the second transport mechanism 62b. Through the above procedure, the transport unit 58 transports the protective sheet 13 and positions it above the plate-like object 11.

[0078] Next, a configuration will be described that supports the plate-shaped object 11 on which the protective sheet 13 is transported and that performs the placement of the protective sheet 13 onto the plate-shaped object 11. Figure 1 includes a schematic perspective view showing a holding table 74 that supports the plate-shaped object 11 with a holding surface 76a, a protective sheet cutting unit 82 that cuts the protective sheet 13, and a pressing roller 92 that presses the protective sheet 13 onto the plate-shaped object 11.

[0079] As simply shown in Figure 1, the holding table 74, the protective sheet cutting unit 82, and the pressing roller 92 may be housed in the vacuum chamber 70, and the placement of the protective sheet 13 onto the plate-shaped object 11 may be carried out in a vacuum atmosphere (reduced pressure atmosphere). A suction source 71, such as a pump, is connected to the vacuum chamber 70 to reduce the pressure inside the vacuum chamber 70. In addition, an openable and closable entrance 72 is provided on one side of the vacuum chamber 70, which serves as a transport path for the protective sheet 13.

[0080] Figure 4 is a schematic perspective view showing the holding table 74, the protective sheet cutting unit 82, and the pressing roller 92. Figure 9 is a schematic cross-sectional view showing the plate-shaped object 11 held by the holding table 74.

[0081] The holding table 74 is composed of, for example, a plate-shaped object support table 76 that mainly supports the plate-shaped object 11, and a sheet support table 78 that mainly supports the protective sheet 13 and the release sheet 19. The upper surface of the plate-shaped object support table 76 is a holding surface 76a, and the plate-shaped object 11 is held in place by applying an attractive force or electrostatic force to the plate-shaped object 11 placed on the holding surface 76a. In other words, the plate-shaped object support table 76 can hold the plate-shaped object 11 by suction or electrostatic chuck.

[0082] Furthermore, the sheet support table 78 may have clamps for gripping the placed protective sheet 13 and release sheet 19, and the protective sheet 13 and release sheet 19 may be fixed with the clamps. Alternatively, the sheet support table 78 may be able to fix the protective sheet 13 and release sheet 19 by applying electrostatic force.

[0083] The holding table 74 is equipped with a lifting mechanism (not shown) that raises and lowers the plate-shaped object support table 76 and the sheet support table 78, respectively. There are no particular restrictions on the lifting mechanism, but a ball screw type lifting mechanism or a lifting mechanism equipped with an air cylinder can be applied. The plate-shaped object support table 76 and the sheet support table 78 can each be raised and lowered independently along the Z-axis.

[0084] The pressing roller 92 functions as a placement unit that presses the protective sheet 13 onto the plate-shaped object 11 held by the plate-shaped object support table 76 of the holding table 74, with the partially exposed adhesive layer 17 facing the object. The pressing roller 92 rolls on the protective sheet 13 while pressing the protective sheet 13 toward the plate-shaped object 11 from above.

[0085] The pressing roller 92 extends along the Y-axis, is movable along the X-axis while rolling, and is also movable up and down along the Z-axis. Preferably, the length of the pressing roller 92 is greater than or equal to the diameter of the surface 11a of the plate-like object 11 on which the protective sheet 13 is placed. The positions of the pressing roller 92 and the holding table 74 are set so that the pressing roller 92 passes over the entire surface 11a when the pressing roller 92 moves along the X-axis.

[0086] The protective sheet cutting unit 82 cuts the protective sheet 13, which is placed on the plate-like object 11, inside the cutting groove 21 using an attachment unit such as a pressure roller 92. In other words, the protective sheet 13 placed on the plate-like object 11 is cut along the outer edge of the plate-like object 11 at a position that does not overlap with the remaining release sheet 19. This forms a plate-like object 11 on which the protective sheet 13 is placed.

[0087] The protective sheet cutting unit 82 has a rotating shaft portion 86 aligned in the vertical direction (Z-axis direction), an arm portion 88 extending horizontally from the lower end of the rotating shaft portion 86, and a cutter (cutting tool) 90 positioned below the tip of the arm portion 88. The mounting position of the cutter 90 relative to the arm portion 88 may be adjustable. The rotating shaft portion 86 is positioned directly above the center of the holding surface 76a of the plate-shaped object support table 76 of the holding table 74.

[0088] The arm portion 88 is shorter than the radius of the adhesive surface 17a of the adhesive layer 17 of the protective sheet 13 that is exposed from the release sheet 19. Alternatively, the mounting position of the cutter 90 on the arm portion 88 is set at a distance from the rotating shaft portion 86 that is shorter than the radius of the adhesive surface 17a. The base end of the arm portion 88 is connected to the lower end of the rotating shaft portion 86, and the cutter 90, which protrudes downward, is connected to the tip end of the arm portion 88. The protective sheet cutting unit 82 has a rotational drive source 84 such as a motor that rotates the rotating shaft portion 86, and by operating this rotational drive source 84, the cutter 90 is moved on an annular trajectory with the arm portion 88 as its diameter.

[0089] When cutting the protective sheet 13, the cutter 90 may be made to cut the protective sheet 13 slightly outside the plate-like object 11, so that the lower end of the cutter 90 reaches a height lower than the plate-like object 11. In this case, the cutter 90 enters the gap 80 between the plate-like object support table 76 and the sheet support table 78 of the holding table 74, thus avoiding contact between the cutter 90 and the holding table 74.

[0090] The procedure for placing the protective sheet 13 on the plate-shaped object 11 will now be described. First, the plate-shaped object 11 is placed on the holding surface 76a of the plate-shaped object support table 76 of the holding table 74. At this time, the back surface 11b of the plate-shaped object 11 is positioned facing the holding surface 76a so that the surface 11a to which the protective sheet 13 will be placed is exposed upwards. Then, the position of the plate-shaped object 11 is adjusted so that the center of the holding surface 76a and the center of the surface 11a of the plate-shaped object 11 coincide, and the plate-shaped object 11 is held by the holding table 74 by applying a holding force to the plate-shaped object 11 from the plate-shaped object support table 76.

[0091] Next, the protective sheet 13 is transported by the transport unit 58 and placed on the sheet support table 78. If the protective sheet placement device 2 has a vacuum chamber 70, the holding part 66b of the second transport mechanism 62b that transports the protective sheet 13 is moved into the vacuum chamber 70 from the entrance 72 and reaches above the holding table 74. At this time, the adhesive surface 17a of the adhesive layer 17 exposed from the release sheet 19 faces the surface 11a of the plate-like object 11, and the position of the protective sheet 13 is adjusted so that the center of the adhesive surface 17a and the center of the surface 11a of the plate-like object 11 overlap.

[0092] Subsequently, the sheet support table 78 is raised so that its upper surface contacts the release sheet 19 placed on the protective sheet 13. At this time, the protective sheet 13 and the release sheet 19 are fixed to the sheet support table 78 by clamps or electrostatic force. Also at this time, the plate-like object support table 76 is raised so that the surface 11a of the plate-like object 11 does not come into contact with the adhesive surface 17a of the adhesive layer 17, that is, a small gap remains between them.

[0093] Next, the suction holding of the protective sheet 13 by the suction section 68b of the second transport mechanism 62b of the transport unit 58 is released, and the suction section 68b is moved away from above the holding table 74. If the protective sheet placement device 2 has a vacuum chamber 70 and the holding table 74 etc. are housed in the vacuum chamber 70, the holding section 66b of the second transport mechanism 62b is moved from the entrance 72 to the outside of the vacuum chamber 70. Then, the entrance 72 is closed and the suction source 71 is activated to reduce the pressure inside the vacuum chamber 70, and the subsequent processes may be carried out in a vacuum atmosphere (reduced pressure atmosphere).

[0094] Next, as shown in Figure 9, the pressure roller 92 is lowered to one end of the protective sheet 13, and the pressure roller 92 is moved along the X-axis direction so as to roll over the protective sheet 13 while pressing down on it from above. As a result, the surface 11a of the plate-like object 11 is gradually adhered to the adhesive surface 17a of the adhesive layer 17 from the edge, and finally the protective sheet 13 is adhered to the entire surface 11a of the plate-like object 11.

[0095] Subsequently, the protective sheet cutting unit 82 is lowered, and the cutter 90 is used to cut into the protective sheet 13, removing the excess portion of the protective sheet 13. This results in a plate-like object 11 with the protective sheet 13 attached, as shown in Figure 10(C).

[0096] At this time, it is preferable to make a cut in the protective sheet 13 with the cutter 90 at a position that does not overlap with the release sheet 19 remaining on the protective sheet 13. In other words, it is preferable that the cutter 90 does not cut into the release sheet 19. However, this embodiment is not limited to this, and the cutter 90 may also cut into the release sheet 19. In this case, the release sheet 19 remains on the outer periphery of the protective sheet 13 arranged on the plate-like object 11. Therefore, it is preferable that the release sheet 19 remaining on the protective sheet 13 be peeled off.

[0097] The cutter 90 may also cut the protective sheet 13 slightly inside the outer edge of the plate-like object 11. In this case, the protective sheet 13 can be reliably cut by bringing the lower end of the cutter 90 to the plate-like object 11. However, if the protective sheet 13 is cut significantly inside the outer edge of the plate-like object 11, the cutter 90 will come into contact with structures such as devices formed on the surface 11a of the plate-like object 11, causing damage to the structures. Therefore, it is preferable for the cutter 90 to cut into the area of ​​the surface 11a of the plate-like object 11 where no devices are formed, i.e., the outer peripheral excess area.

[0098] Alternatively, the cutter 90 may cut the protective sheet 13 slightly outside the outer edge of the plate-like object 11. In this case, the lower end of the cutter 90 can reach a height lower than the bottom surface of the plate-like object 11, thereby ensuring that the protective sheet 13 is cut completely. However, if the cutter 90 cuts the protective sheet 13 significantly outside the outer edge of the plate-like object 11, a large portion of the protective sheet 13 will remain floating outside the plate-like object 11, which poses a problem.

[0099] In the protective sheet placement device 2 described above, when the protective sheet 13 is placed on the plate-like object 11, no force is applied to the protective sheet 13 to peel off the release sheet 19. Also, when the protective sheet 13 is transported to the plate-like object 11, a portion of the release sheet 19 remains on the protective sheet 13, and this release sheet 19 reinforces the protective sheet 13. As a result, the occurrence of twisting and wrinkling of the protective sheet 13 placed on the plate-like object 11 is suppressed, and the problem of air bubbles getting trapped between the plate-like object 11 and the protective sheet 13 is less likely to occur.

[0100] Furthermore, the protective sheet placement device 2 according to this embodiment may also have a heating section (heater) composed of an electric heating element or the like that heats one or both of the plate-shaped object 11 and the protective sheet 13 held by the holding table 74.

[0101] The heating unit may be incorporated, for example, inside the plate-shaped object support table 76 of the holding table 74, or inside the pressing roller 92. In other words, the holding table 74 may be capable of heating the plate-shaped object 11, or it may be capable of heating the protective sheet 13 via the plate-shaped object 11. The pressing roller 92 may also be capable of heating the protective sheet 13 while pressing it. However, the heating unit may be incorporated into the protective sheet placement device 2 in other ways.

[0102] For example, a heat gun capable of blowing hot air may be incorporated inside the vacuum chamber 70 shown in Figure 1 as a heating element. In this case, the protective sheet 13, which is placed on a plate-shaped object 11 on the holding table 74, can be heated by blowing hot air from the heat gun onto it. Alternatively, for example, an infrared lamp capable of emitting infrared rays may be incorporated inside the vacuum chamber 70 as a heating element. In this case, the protective sheet 13 can be heated by irradiating it with infrared rays from the infrared lamp.

[0103] For example, when the protective sheet 13 is placed on the plate-like object 11, heating the protective sheet 13 in the heating section may allow adjustment of the adhesion strength of the adhesive layer 17 of the protective sheet 13 to the plate-like object 11. When the protective sheet 13 softens due to heating, the adhesive layer 17 deforms to conform to the uneven shape of the surface 11a of the plate-like object 11, increasing the contact area between the adhesive layer 17 and the surface 11a of the plate-like object 11. As a result, the protective sheet 13 is more firmly attached to the plate-like object 11.

[0104] Furthermore, as described later, when a protective sheet containing a thermoplastic resin layer, without an adhesive layer 17, is placed on the plate-shaped object 11, the protective sheet can be heat-pressed onto the plate-shaped object 11 by heating it to a predetermined temperature in the heating section and applying pressure with the pressing roller 92.

[0105] Next, the protective sheet placement method according to this embodiment using the protective sheet placement device 2 will be described, and the method of using the protective sheet placement device 2 will be summarized. In the following description of the protective sheet placement method, you can refer to the previous description of the protective sheet placement device 2 as appropriate. Figure 12 is a flowchart showing the flow of each step of the protective sheet placement method.

[0106] The protective sheet placement method described below involves peeling off the release sheet 19 from a protective sheet 13 which includes a base layer 15 and an adhesive layer 17 disposed on the base layer 15, and then placing the protective sheet 13 on a plate-like object 11. This forms a plate-like object 11 on which the protective sheet 13 is placed.

[0107] First, a protective sheet preparation step S10 is performed to prepare a protective sheet 13 having a size and shape that can cover the entire surface 11a of the plate-like object 11. The protective sheet preparation step S10 is performed, for example, using the raw material roll 4, the feeding unit 6, the cutting stage 14, and the sheet outer shape cutting unit 10 of the protective sheet distribution device 2.

[0108] As shown in Figure 5(A), in the protective sheet preparation step S10, the protective sheet 13 on which the release sheet 19 is placed is pulled out from the raw material roll 4 by the dispensing unit 6, and the protective sheet 13 is held by the holding plate 30 of the cutting stage 14. Then, the cutter 28 of the sheet outer shape cutting unit 10 is made to cut the protective sheet 13, and a protective sheet 13 having a size and shape that can cover the entire surface 11a of the plate-like object 11 is obtained.

[0109] In addition, in the protective sheet preparation step S10, protective sheets 13 that have been cut to a predetermined size in advance may be prepared. Furthermore, the protective sheet distribution device 2 does not necessarily have to include a raw material roll 4, a feeding unit 6, and a sheet outer shape cutting unit 10, and protective sheets 13 that have been cut to a predetermined size may be fed into the cutting stage 14.

[0110] Following the protective sheet preparation step S10, a release sheet cutting step S20 is performed in which the release sheet 19, which is placed on the protective sheet 13, is cut in a shape that follows the outer edge of the surface 11a of the plate-like object 11 to form a cutting groove 21. The release sheet cutting step S20 is performed using, for example, a cutting stage 14 and a release sheet cutting unit 8.

[0111] First, the rotary drive source 20 is activated to rotate the rotary shaft 22, moving the cutter 26 with the arm 24 as the radius. In this state, the release sheet cutting unit 8 and the cutting stage 14 are brought relatively closer together, causing the cutter 26 to cut into the release sheet 19. Figure 5(C) schematically shows how the cutter 26 of the release sheet cutting unit 8 cuts into the release sheet 19 in the release sheet cutting step S20.

[0112] In the release sheet cutting step S20, the lower end of the cutter 26 reaches a height lower than the lower end of the release sheet 19, thereby cutting the release sheet 19 in a circular shape while not cutting the protective sheet 13. Figure 6(A) includes a schematic cross-sectional view showing the release sheet 19 after it has been cut and the cutting groove 21 has been formed. Figure 10(A) is a schematic perspective view showing the protective sheet 13 and the release sheet 19 after it has been cut and the cutting groove 21 has been formed. A circular cutting groove 21 is formed in the cut release sheet 19.

[0113] Here, the shape of the cutting groove 21 at the formation position corresponds to the shape of the plate-like object 11 on which the protective sheet 13 is placed. For example, when the protective sheet 13 is placed on a rectangular plate-like object 11, the shape of the cutting groove 21 is also a rectangle. Furthermore, it is preferable that the size of the cutting groove 21 at the formation position, which corresponds to the size of the area on which the release sheet 19 is peeled off in the peeling step S30 described later, is slightly larger than the surface of the plate-like object 11 on which the protective sheet 13 is placed.

[0114] In particular, the size of the cutting groove 21 is set to be necessary and sufficient for the adhesive surface 17a of the adhesive layer 17 of the protective sheet 13 to adhere to the surface 11a of the plate-like object 11 later. If the cutting groove 21 is formed too large, the release sheet 19 will not remain sufficiently on the protective sheet 13 after the peeling step S30, and the release sheet 19 will not be able to adequately reinforce the protective sheet 13 when the protective sheet 13 is transported. On the other hand, if the cutting groove 21 is formed too small, it will be difficult to bring the adhesive surface 17a of the adhesive layer 17 into contact with the surface 11a of the plate-like object 11.

[0115] More specifically, if the plate-like object 11 is a circular silicon wafer with a diameter of 300.0 mm, the formation location of the cutting groove 21 should preferably be a circle with a diameter of 300.5 mm or more and 302.0 mm or less. However, the size of the formation location of the cutting groove 21 is not limited to this.

[0116] After the release sheet cutting step S20, a peeling step S30 is performed in which the release sheet 19 is left attached to the protective sheet 13 outside the cutting groove 21, and the release sheet 19 is peeled from the protective sheet 13 inside the cutting groove 21 to partially expose the adhesive layer 17. The peeling step S30 is performed using the cutting stage 14 and the peeling unit 36 ​​of the protective sheet placement device 2.

[0117] When the peeling step S30 is performed immediately after the release sheet cutting step S20, the reversing shaft portion 34 of the cutting stage 14 is rotated as shown in Figure 6(B) so that the holding surface 30a side of the holding plate 30 faces downward. Then, as shown in Figure 7(A), the movable body 46 of the peeling unit 36 ​​is moved so that the pressing portion 50 is positioned below one end in the area inside the cutting groove 21. After that, the pressing portion 50 is raised to push up the release tape 42 and attach the release tape 42 to the release sheet 19.

[0118] Next, the movable body 46 is moved to peel the release sheet 19 from the protective sheet 13 inside the cutting groove 21, while the release tape 42 is wound up to collect the peeled release sheet 19. Finally, when the release sheet 19 is peeled from the entire area inside the cutting groove 21, the peeling step S30 is completed. Figure 7(B) shows a schematic cross-sectional view of the protective sheet 13 with the adhesive surface 17a of the adhesive layer 17 exposed. Figure 10(B) is a perspective view of the protective sheet 13 with the adhesive surface 17a of the adhesive layer 17 exposed.

[0119] Next, a facing step S40 is performed in which the protective sheet 13 is positioned and oriented so that the adhesive layer 17 partially exposed in the peeling step S30 faces the surface 11a of the plate-like object 11 which will be the surface to be installed. That is, in the facing step S40, the surface 11a of the plate-like object 11 and the adhesive surface 17a of the adhesive layer 17 are brought into contact. A holding table 74 and a transport unit 58 may be used in the facing step S40.

[0120] First, the plate-shaped object 11 is held by the plate-shaped object support table 76 of the holding table 74. At this time, the surface 11a of the protective sheet 13 that will be placed on is exposed upwards. In the facing step S40, the protective sheet 13 is received from the holding plate 30 of the cutting stage 14 by the transport unit 58 and transported to the top of the holding table 74. If the holding table 74 and the like are located inside the vacuum chamber 70 (see Figure 1), the transport unit 58 carries the protective sheet 13 into the vacuum chamber 70.

[0121] Then, the sheet support table 78 is raised so that its upper surface contacts the release sheet 19 placed on the protective sheet 13. At this time, the protective sheet 13 and the release sheet 19 are fixed to the sheet support table 78 by clamps or by electrostatic force. At the same time, the plate-shaped object support table 76 is also raised so that the surface 11a of the plate-shaped object 11 does not come into contact with the adhesive surface 17a of the adhesive layer 17, that is, so that a small gap remains between them, and the two are brought facing each other.

[0122] Then, the protective sheet 13 is released from the transport unit 58's hold, and the transport unit 58 is moved out of the vacuum chamber 70. If the holding table 74 or the like is housed inside the vacuum chamber 70, the entrance 72 may then be closed and the suction source 71 activated to reduce the pressure inside the vacuum chamber 70. Subsequent processes may then be carried out in a reduced-pressure atmosphere.

[0123] After the facing step S40, the placement step S50 is performed in which the protective sheet 13 is placed on the plate-like object 11 by bringing the partially exposed adhesive layer 17 into contact with the surface 11a of the plate-like object 11 and pressing the protective sheet 13 onto the plate-like object 11. In the placement step S50, a holding table 74 and a pressing roller 92 are used.

[0124] In the placement step S50, the protective sheet 13 is pressed against the plate-like object 11 with the pressure roller 92. Figure 9 is a schematic cross-sectional view showing how the protective sheet 13 is pressed by the pressure roller 92. First, the pressure roller 92 is lowered to one end of the protective sheet 13 on the base material layer 15 side. Then, while pressing the protective sheet 13 with the pressure roller 92, the roller 92 is rolled to the other end of the protective sheet 13 on the base material layer 15 side. As a result, the adhesive layer 17 is attached to the surface 11a of the plate-like object 11, and the protective sheet 13 is placed on the plate-like object 11.

[0125] After the placement step S50, a protective sheet cutting step S60 is performed to obtain a plate-like object 11 on which the protective sheet 13 is placed by cutting the protective sheet 13 at a position that does not overlap with the release sheet 19. The protective sheet cutting step S60 is performed by a protective sheet cutting unit 82 as shown in Figure 9, etc.

[0126] In the protective sheet cutting step S60, first, the rotary drive source 84 is activated to rotate the rotary shaft 86, and the cutter 90 is moved with the arm 88 as the radius. In this state, the protective sheet cutting unit 82 and the holding table 74 are brought relatively closer together, and the cutter 90 is made to cut into the protective sheet 13.

[0127] At this time, it is preferable to make an incision with the cutter 90 in an area where the release sheet 19 of the protective sheet 13 has already been peeled off. That is, it is preferable to make an incision with the cutter 90 at a position that overlaps with the adhesive surface 17a of the adhesive layer 17 of the protective sheet 13. Then, by bringing the lower end of the cutter 90 to a height lower than the lower end of the protective sheet 13, the protective sheet 13 is cut in a circular shape. As described above, the cutter 90 may also contact the excess area on the outer periphery of the surface 11a of the plate-like object 11, or it may cut the protective sheet 13 outside the outer edge of the plate-like object 11.

[0128] By removing the unnecessary portion of the protective sheet 13 in this manner, a plate-like object 11 with the protective sheet 13 attached is obtained. Figure 10(C) is a schematic perspective view showing the plate-like object 11 with the protective sheet 13 attached, and Figure 11(A) is a schematic cross-sectional view showing the plate-like object 11 with the protective sheet 13 attached.

[0129] The pressing of the protective sheet 13 onto the plate-like object 11 by the pressing roller 92 may be performed after the protective sheet 13 is cut by the protective sheet cutting unit 82. In this case, the protective sheet cutting step S60 is performed during the placement step S50. That is, the placement step S50 and the protective sheet cutting step S60 are performed simultaneously.

[0130] In the protective sheet placement method described above, in placement step S50, the protective sheet 13, with the release sheet 19 already attached to the outside of the cutting groove 21, is placed on the plate-like object 11. In this case, the release sheet 19 remaining on the protective sheet 13 reinforces the protective sheet 13 during transport, making it less likely for the protective sheet 13 to twist or wrinkle. Furthermore, the protective sheet 13 reinforced with the release sheet 19 is easy to handle.

[0131] Furthermore, since the release sheet 19 is peeled off in a predetermined area beforehand on the protective sheet 13 placed on the plate-like object 11, no force is applied to the protective sheet 13 to peel the release sheet 19 off during the process of placing the plate-like object 11 on the protective sheet 13. Therefore, wrinkles and other damage are less likely to occur on the protective sheet 13 during the process of placing the protective sheet 13 on the plate-like object 11.

[0132] It should be noted that the present invention is not limited to the embodiments described above and can be implemented with various modifications. For example, the above embodiments described a case in which the protective sheet placement device 2 includes a transport unit 58. Furthermore, the case in which the transport unit 58 is used in the face step S40 of the protective sheet placement method was described. However, the present invention is not limited to these embodiments.

[0133] In other words, the protective sheet placement device 2 does not need to be equipped with a transport unit 58, and the transport unit 58 does not need to be used in the facing step S40. In this case, it is preferable that the holding table 74 is movable along the Y-axis, and preferably that it can be moved below the holding plate 30 of the cutting stage 14. In this case, it is preferable to move the holding table 74 that holds the plate-like object 11 below the holding plate 30 so that the adhesive surface 17a of the adhesive layer 17 of the protective sheet 13 faces the surface 11a of the plate-like object 11.

[0134] If the protective sheet placement device 2 does not include a transport unit 58, the configuration of the protective sheet placement device 2 is simplified, reducing the operating and manufacturing costs of the protective sheet placement device 2. In addition, the face-to-face step S40 can be performed relatively easily.

[0135] Furthermore, although the above embodiment mainly described the protective sheet placement device 2 and protective sheet placement method when a protective sheet 13 comprising a base layer 15 and an adhesive layer 17 is placed on a plate-shaped object 11, the present invention is not limited thereto. In the protective sheet placement device 2 and protective sheet placement method according to one embodiment of the present invention, a protective sheet without an adhesive layer 17 may be placed on the plate-shaped object 11.

[0136] Here, a protective sheet without an adhesive layer 17 will be described. Figure 11(B) includes a schematic cross-sectional view of a protective sheet 23 without an adhesive layer 17. The protective sheet 23 consists only of a thermoplastic resin layer formed of, for example, a thermoplastic resin. Similar to the protective sheet 13 with an adhesive layer 17, a release sheet 19 is pre-disposed on the protective sheet 23 including the thermoplastic resin layer.

[0137] The protective sheet 23 is, for example, a polyolefin-based sheet or a polyester-based sheet. More specifically, the protective sheet 23 is, for example, a polyethylene sheet, a polypropylene sheet, a polystyrene sheet, a polyethylene terephthalate sheet, a polyethylene naphthalate sheet, etc.

[0138] In other words, thermoplastic resins are, for example, polyolefins or polyesters. More specifically, thermoplastic resins include, for example, polyethylene, polypropylene, polystyrene, polyethylene terephthalate, polyethylene naphthalate, etc. However, thermoplastic resins are not limited to these.

[0139] The following describes a protective sheet placement device 2 and protective sheet placement method according to one aspect of the present invention, in which a protective sheet 23 containing a thermoplastic resin layer without an adhesive layer 17 is placed on a plate-shaped object 11. However, in order to avoid repetition of the explanation, the explanation will focus on matters that differ from the case in which a protective sheet 13 with an adhesive layer 17 is placed on a plate-shaped object 11. That is, the following explanation may refer to the description of the above embodiment as appropriate.

[0140] The release sheet 19, which is placed on the protective sheet 23 containing the thermoplastic resin layer, is also cut by the release sheet cutting unit 8 to a size corresponding to the shape and size of the surface 11a of the plate-like object 11, and a cutting groove 21 is formed (release sheet cutting step S20). Then, inside the cutting groove 21, the release unit 36 ​​peels the release sheet 19 from the protective sheet 23, partially exposing the thermoplastic resin layer (peeling step S30). At this time, the release sheet 19 remains on the protective sheet 23 outside the cutting groove 21, so the protective sheet 23 is reinforced by the release sheet 19.

[0141] Subsequently, the plate-shaped object 11 is held by the holding table 74 to expose its surface 11a, and the protective sheet 23 is positioned and oriented so that the partially exposed thermoplastic resin layer faces the surface 11a of the plate-shaped object 11 (facing step S40).

[0142] Subsequently, the partially exposed thermoplastic resin layer is brought into contact with the surface 11a of the plate-like object 11, and the protective sheet 23 is heated and pressed against the plate-like object 11 to heat-compress it, thereby placing the protective sheet 23 on the plate-like object 11 (placement step S50). Figure 11(B) is a schematic cross-sectional view showing the protective sheet 23 reinforced by the release sheet 19 with a portion of the release sheet 19 remaining, and the plate-like object 11 on which the protective sheet 23 is placed. The heating unit described above may be used to heat the protective sheet 23.

[0143] When performing heat-sealing, the thermoplastic resin layer of the protective sheet 23 is preferably heated to a temperature below the melting point of the thermoplastic resin. This is because if the heating temperature exceeds the melting point, the thermoplastic resin layer may melt and lose its shape. Furthermore, the protective sheet 23 is preferably heated to a temperature above the softening point of the thermoplastic resin. This is because if the heating temperature does not reach the softening point, it is difficult to perform heat-sealing properly. In other words, it is preferable that the protective sheet 23 be heated to a temperature above the softening point of the thermoplastic resin and below its melting point.

[0144] Furthermore, some thermoplastic resins may not have a clear softening point. Therefore, when performing heat-pressing, the protective sheet 23 is preferably heated to a temperature at least 20°C lower than the melting point of the thermoplastic resin layer, and at or below that melting point. However, the protective sheet 23 may be heated to an even lower temperature before heat-pressing. The present invention is not limited to this embodiment.

[0145] Furthermore, for example, the heating temperature of the protective sheet 23 is preferably 120°C to 140°C if it is a polyethylene sheet, 160°C to 180°C if it is a polypropylene sheet, and 220°C to 240°C if it is a polystyrene sheet. Also, it is preferably 250°C to 270°C if it is a polyethylene terephthalate sheet, and 160°C to 180°C if it is a polyethylene naphthalate sheet.

[0146] After the protective sheet 23 is heat-pressed onto the plate-like object 11, the protective sheet 23 is cut at a position that does not overlap with the release sheet 19 to obtain the plate-like object 11 on which the protective sheet 23 is attached (protective sheet cutting step S60). Figure 11(C) is a schematic cross-sectional view showing the plate-like object 11 on which the protective sheet 23 without the adhesive layer 17 is attached.

[0147] As described above, according to one aspect of the present invention, a protective sheet 23 without an adhesive layer 17 can be placed on a plate-like object 11. When the protective sheet 23 does not have an adhesive layer 17, when the plate-like object 11 is processed and the protective sheet 23 is peeled off from the plate-like object 11, the adhesive layer 17 will not remain partially on the plate-like object 11.

[0148] Furthermore, the structures, methods, etc., according to the above embodiments can be modified as appropriate without departing from the scope of the objectives of the present invention. [Explanation of Symbols]

[0149] 11. Plate-like object 11a surface 11b Back side 13 Protective Sheets 15 Base material layer 17 Adhesive layer 17a Adhesive side 19. Release sheet 21 Cutting groove 23 Protective Sheets 2. Protective sheet placement device 4. Roll of raw material 6. Feed Unit 8. Release sheet cutting unit 10 Sheet Outline Cutting Unit 12 rollers 14 Cut Stage 16 Mobile Unit 18 Gripping part 20 Rotary drive source 22 Rotating shaft section 24 Arm 26,28 Cutter 30 Retaining plate 30a Holding surface 32 Escape groove 34 Reversing shaft section 36 Peeling Unit 38 Release Tape Supply Unit 40 Feed rollers 42,42a Release tape 44 rollers 46 Mobile Unit 48 rails 50 Pressing part 52 Drive unit 54 Winding section 56. Winding roller 58 Conveyor Unit 60 rails 62a, 62b Conveying mechanism 64a,64b Arms 66a,66b Holding part 68a,68b Suction part 70 Vacuum Chamber 71 Suction source 72 Loading entrance 74 Holding Table 76. Support table for flat objects 76a Holding surface 78-seat support table 80 gap 82 Protective Sheet Cutting Unit 84 Rotary drive source 86 Rotating shaft section 88 Arm 90 Cutter 92 Pressure rollers

Claims

1. A method for distributing a protective sheet, comprising a base layer and an adhesive layer disposed on the base layer, wherein the release sheet is disposed on the adhesive layer of the protective sheet, the release sheet is peeled off, and the protective sheet is distributed on a plate-like object, A protective sheet preparation step involves preparing a protective sheet having a size and shape that can cover the entire surface of the plate-like object, A release sheet cutting step involves cutting the release sheet, which is disposed on the protective sheet, in a shape that follows the outer edge of the surface of the plate-like object to form a cutting groove, After the release sheet cutting step, a peeling step is performed in which the release sheet is left attached to the protective sheet outside the cut groove, and the release sheet is peeled from the protective sheet inside the cut groove to partially expose the adhesive layer. The protective sheet, in which the adhesive layer is exposed inside the cut groove, is held in the area where the release liner of the protective sheet remains. A facing step in which the protective sheet is positioned and oriented so that the adhesive layer partially exposed in the peeling step faces the surface of the plate-like object which is held by the holding table and has its surface exposed, After the facing step, the protective sheet is placed on the plate-shaped object by bringing the partially exposed adhesive layer into contact with the surface of the plate-shaped object and pressing the protective sheet onto the plate-shaped object to adhere it, The method includes a protective sheet cutting step, which, after or simultaneously with the placement step, involves cutting the protective sheet at a position that does not overlap with the release sheet to obtain the plate-like object on which the protective sheet is placed, A method for arranging a protective sheet, characterized in that the arrangement step involves arranging the protective sheet, with the release sheet already arranged on the outside of the cut groove, onto the plate-like object.

2. A method for distributing a protective sheet, comprising a protective sheet having a thermoplastic resin layer formed of a thermoplastic resin without an adhesive layer, the release sheet being peeled off from the protective sheet having a release sheet disposed on the thermoplastic resin layer, and distributing the protective sheet onto a plate-like object, A protective sheet preparation step involves preparing a protective sheet having a size and shape that can cover the entire surface of the plate-like object, A release sheet cutting step involves cutting the release sheet, which is disposed on the protective sheet, in a shape that follows the outer edge of the surface of the plate-like object to form a cutting groove, After the release sheet cutting step, a peeling step is performed in which the release sheet is left attached to the protective sheet outside the cutting groove, and the release sheet is peeled from the protective sheet inside the cutting groove to partially expose the thermoplastic resin layer. The protective sheet, in which the thermoplastic resin layer is exposed inside the cut groove, is held in the area where the release sheet of the protective sheet remains. A facing step in which the protective sheet is positioned and oriented so that the thermoplastic resin layer partially exposed in the peeling step faces the surface of the plate-like object which is held by a holding table and has its surface exposed, Following the facing step, the protective sheet is disposed on the plate-shaped object by bringing the partially exposed thermoplastic resin layer into contact with the surface of the plate-shaped object and pressing the protective sheet onto the plate-shaped object while heating it, thereby heat-pressing it into place. The method includes a protective sheet cutting step, which, after or simultaneously with the placement step, involves cutting the protective sheet at a position that does not overlap with the release sheet to obtain the plate-like object on which the protective sheet is placed, A method for arranging a protective sheet, characterized in that the arrangement step involves arranging the protective sheet, with the release sheet already arranged on the outside of the cut groove, onto the plate-like object.

3. The method for arranging a protective sheet according to claim 1 or 2, characterized in that the arrangement step is performed in a reduced-pressure atmosphere.

4. A protective sheet placement device comprising a base layer and an adhesive layer disposed on the base layer, wherein a release sheet is disposed on the adhesive layer of the protective sheet, the device peels off the release sheet, and places the protective sheet on a plate-like object, A dispensing unit that dispenses the protective sheet on which the release sheet is disposed from a roll of raw material formed by winding the protective sheet on which the release sheet is disposed, A release sheet cutting unit cuts the release sheet, which is disposed on the protective sheet, in a shape that follows the outer edge of the plate-like object to form a cutting groove, A release unit that peels the portion of the release sheet cut by the release sheet cutting unit that is inside the cutting groove from the protective sheet, thereby partially exposing the adhesive layer, A transport unit comprising a suction unit disposed in a holding portion corresponding to the area of ​​the protective sheet where the release liner remains, and which holds and transports the protective sheet in the area where the release liner remains, with the adhesive layer exposed inside the cut groove, using the suction unit. A holding table that holds the plate-shaped object on its holding surface, A mounting unit that presses a protective sheet onto a plate-shaped object held by a holding table, such that the partially exposed adhesive layer faces and contacts the plate-shaped object, A protective sheet placement device comprising: a protective sheet cutting unit, which cuts the protective sheet placed on the plate-shaped object by the placement unit at a position that does not overlap with the release sheet, thereby forming the plate-shaped object on which the protective sheet is placed.

5. A protective sheet placement device that includes a thermoplastic resin layer formed of a thermoplastic resin and has no adhesive layer, peels off a release sheet from a protective sheet on which a release sheet is disposed, and places the protective sheet on a plate-like object, A dispensing unit that dispenses the protective sheet on which the release sheet is disposed from a roll of raw material formed by winding the protective sheet on which the release sheet is disposed, A release sheet cutting unit cuts the release sheet, which is disposed on the protective sheet, in a shape that follows the outer edge of the plate-like object to form a cutting groove, A release unit that peels the portion of the release sheet cut by the release sheet cutting unit that is inside the cutting groove from the protective sheet, thereby partially exposing the thermoplastic resin layer, A transport unit comprising a suction unit disposed in a holding portion corresponding to the area of ​​the protective sheet where the release liner remains, and which holds and transports the protective sheet in the area where the release liner remains, with the thermoplastic resin layer exposed inside the cut groove, using the suction unit, A holding table that holds the plate-shaped object on its holding surface, A mounting unit having a heating section for heating one or both of the plate-shaped object and the protective sheet held by the holding table, wherein the protective sheet is placed on the plate-shaped object by pressing the protective sheet against it while heating one or both of the plate-shaped object and the protective sheet with the heating section, with the thermoplastic resin layer partially exposed on the plate-shaped object facing and in contact with it, and then heat-pressing the protective sheet onto the plate-shaped object. A protective sheet cutting unit cuts the protective sheet, which has been placed on the plate-shaped object by the placement unit, at a position where it does not overlap with the release sheet, thereby forming the plate-shaped object on which the protective sheet is placed. A protective sheet placement device equipped with the following features.

6. Equipped with a depressurized chamber, The protective sheet placement device according to claim 4 or 5, characterized in that the chamber is capable of accommodating the holding table and the placement unit.

7. The protective sheet placement device according to claim 4 or 5, further comprising a sheet outer shape cutting unit for cutting the protective sheet unfed by the unfed unit into an outer shape larger than the plate-like object.

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