System and method for depositing high-density, high-tensile-stress films

Abstract

An exemplary method for semiconductor processing can include flowing a silicon-containing precursor, a nitrogen-containing precursor, and diatomic hydrogen into a processing region of a semiconductor processing chamber. A substrate can be contained within the processing region of the semiconductor processing chamber. The method can also include forming a plasma of the silicon-containing precursor, the nitrogen-containing precursor, and diatomic hydrogen. The plasma can be formed at a frequency greater than 15 MHz. The method can also include depositing a silicon nitride material on the substrate.

Description

[Technical Field]

[0001] Cross-reference of related applications This application claims the benefit and priority of U.S. Patent Application No. 17 / 009,002, filed September 1, 2020, entitled "SYSTEMS AND METHODS FOR DEPOSITING HIGH DENSITY AND HIGH TENSILE STRESS FILMS," which is incorporated herein by reference in its entirety.

[0002] Technical field This technology relates to a deposition process and chamber. More specifically, it relates to a method for producing high-density, high-tensile-stress films at low temperatures. [Background technology]

[0003] Integrated circuits are made possible by processes that fabricate intricately patterned material layers on a substrate surface. Fabricating patterned materials on a substrate requires controlled methods for depositing and removing the material. Plasma-enhanced deposition allows for the fabrication of films with specific properties that can affect device performance. These film properties can be tuned or enhanced by modifying deposition conditions such as the plasma's chemical properties and frequency.

[0004] Therefore, there is a need for improved systems and methods that can be used to manufacture high-quality devices and structures. This technology addresses these and other needs. [Overview of the project]

[0005] An exemplary method of semiconductor processing may include flowing a silicon-containing precursor, a nitrogen-containing precursor, and diatomic hydrogen through a processing area of ​​a semiconductor processing chamber. A substrate can be housed within the processing area of ​​the semiconductor processing chamber. The method may also include forming a plasma of the silicon-containing precursor, the nitrogen-containing precursor, and diatomic hydrogen. The plasma can be formed at a frequency exceeding 15 MHz. The method may also include depositing a silicon nitride material onto the substrate.

[0006] In some embodiments, the silicon nitride material is approximately 2.85 g / cm³. 3 The silicon nitride material can be characterized by the above densities. It can be characterized by a stress of approximately 400 MPa or higher. It can be characterized by a refractive index of approximately 1.75 or higher. It can contain approximately 10% or less of hydrogen.

[0007] Diatomic hydrogen atoms of approximately 100 sccm or more can be flowed into the processing area of ​​the semiconductor processing chamber. Diatomic hydrogen atoms of approximately 5000 sccm or less can be flowed into the processing area of ​​the semiconductor processing chamber.

[0008] Plasma can be formed at temperatures below approximately 550°C. The frequency can be above approximately 27 MHz.

[0009] Some embodiments may include a method comprising flowing a silicon-containing precursor, a nitrogen-containing precursor, and diatomic hydrogen through a processing area of ​​a semiconductor processing chamber. A substrate can be housed within the processing area of ​​the semiconductor processing chamber. The method may also include forming a plasma of the silicon-containing precursor, the nitrogen-containing precursor, and diatomic hydrogen, wherein the plasma does not contain any material having nitrogen-hydrogen bonds. Furthermore, the method may include depositing a silicon nitride material onto the substrate. The silicon nitride material is approximately 2.85 g / cm³ 3 The silicon nitride material can be characterized by a density of the above, and can be characterized by a stress of approximately 400 MPa or more.

[0010] In some embodiments, the silicon nitride material may be characterized by a refractive index of about 1.75 or higher. The silicon nitride material may contain less than 10% hydrogen.

[0011] Diatomic hydrogen atoms of approximately 100 sccm or more can be flowed into the processing area of ​​the semiconductor processing chamber. Diatomic hydrogen atoms of approximately 5000 sccm or less can be flowed into the processing area of ​​the semiconductor processing chamber.

[0012] Plasma can be formed at temperatures below approximately 550°C. Plasma can be formed at frequencies above 15 MHz. The frequency can be approximately 27 MHz or higher.

[0013] Some embodiments of this technology may include a method of flowing a silicon-containing precursor, a nitrogen-containing precursor, and diatomic hydrogen into a processing area of ​​a semiconductor processing chamber. A substrate can be housed within the processing area of ​​the semiconductor processing chamber. The method may also include forming a plasma of the silicon-containing precursor, the nitrogen-containing precursor, and diatomic hydrogen. Furthermore, the method may include depositing a silicon nitride material onto the substrate. Diatomic hydrogen can be flowed into the processing area of ​​the semiconductor processing chamber at concentrations of approximately 100 sccm or more, and diatomic hydrogen can be flowed into the processing area of ​​the semiconductor processing chamber at concentrations of approximately 5000 sccm or less.

[0014] In some embodiments, the silicon nitride material is approximately 2.85 g / cm³. 3 The above densities can be characterized. Silicon nitride materials can be characterized by stresses of approximately 400 MPa or higher.

[0015] Such a technique can offer many advantages compared to conventional systems and techniques. For example, by including diatomic hydrogen along with a silicon-containing precursor and a nitrogen precursor during high-frequency plasma deposition, a silicon nitride film with improved properties can be provided. For example, both the density and stress of the silicon nitride film can be increased. Furthermore, the incorporation of hydrogen into the silicon nitride film can be reduced. In addition, the silicon nitride film can be formed at low temperatures, thereby reducing the heat budget and preventing damage to other layers. These and other embodiments will be described in more detail in conjunction with the following description and the accompanying drawings, along with their many advantages and features.

[0016] By referring to the remainder of the specification and the drawings, a further understanding of the nature and advantages of the disclosed technology can be achieved.

Brief Description of the Drawings

[0017] [Figure 1] Top view of an exemplary processing system according to some embodiments of the present technology [Figure 2] Schematic cross-sectional view of an exemplary plasma system according to some embodiments of the present technology [Figure 3] Diagram showing the operation of an exemplary method of semiconductor processing according to some embodiments of the present technology [Figure 4A-4D] Diagram showing an example of a growth mechanism in some deposition processes [Figure 4E-4G] Diagram showing an example of a growth mechanism according to some embodiments of the present technology [Figures 5A-5F] Graph showing various deposition and film parameters as a function of diatomic hydrogen flow rate according to some embodiments of the present technology

Modes for Carrying Out the Invention

[0018] Several figures are included as schematic diagrams. It should be understood that the drawings are for illustrative purposes and that scale should not be considered unless specifically stated. Further, as schematic diagrams, the drawings are provided to assist understanding and may not include all aspects or information compared to a realistic representation, and may include exaggerated material for illustrative purposes.

[0019] In the accompanying drawings, similar components and / or features may have the same reference numerals. Further, various components of the same type can be distinguished according to the reference numerals by letters that distinguish between similar components. When only the first reference numeral is used in this specification, the description is applicable to any of the similar components having the same first reference numeral, regardless of the letter.

[0020] The plasma deposition process can excite one or more component precursors to promote film formation on a substrate. Any number of material films can be fabricated to develop semiconductor structures including conductive and dielectric films as well as films that facilitate material transfer and removal. For example, in memory development such as DRAM, film deposition can be performed to fabricate cell structures. To reduce the heat budget and prevent damage to the already deposited material, it is desirable to use a low-temperature deposition process. For example, the temperature during film deposition may be about 550 °C or less, about 450 °C or less, or even lower.

[0021] Silicon nitride films can be used as hard masks, and in this case, their high density, high tensile stress, and high quality can improve the processing of certain structures being manufactured. High-density films are more resistant to a wider range of etching chemicals and can have higher etching selectivity for materials above or below the film to form various patterns. Since silicon nitride films are often formed on wafers characterized by compressive stress due to the structural features and the materials used for formation, silicon nitride films characterized by tensile stress can generate more neutral stress or flat curvature, thereby preventing breakage, delamination, or the effects of other processing. However, many conventional low-temperature deposition processes have a trade-off between silicon nitride film density and stress, and cannot achieve both high density and high tensile stress. For example, the low-temperature physical vapor deposition (PVD) process has a density of 3 g / cm³. 3 While density can be achieved, the resulting stress can be more compressible due to the strong ion bombardment generated by the sputtering process. Adjusting the PVD process to increase stress, such as by changing the precursor distribution or power, can lead to a decrease in density. Furthermore, conventional low-temperature plasma-chemical vapor deposition (PECVD) processes using SiH4 and NH3 as reactive precursors and typically employing a plasma frequency of 13.56 MHz cannot produce silicon nitride films characterized by both high density and high stress. This is because, at least in part, these films have a high intra-film hydrogen content exceeding 10%, which can degrade film quality due to the formation of voids that may result from subsequent gas release. Hydrogen uptake can also reduce film stress by reducing the number of tetrahedral networks that form compared to when hydrogen uptake is reduced. Dissociated ammonia may contain nitrogen-hydrogen bonded radicals, which are more likely to be incorporated into the film, potentially further increasing hydrogen uptake. Furthermore, NH bonds within the deposited film can detrimentally reduce both density and film stress.

[0022] This technology can overcome these problems by implementing a deposition process that utilizes a high-frequency plasma formed by a gas mixture of SiH4, N2, and H2. Several conventional PECVD processes use N2 instead of NH3 as the nitrogen source to form silicon nitride films. Since N2 has a high electron shock dissociation of 24.3 eV, the dissociation of N2 in the plasma is weak, and N2 may not dissociate completely in a 13.56 MHz plasma. Therefore, the resulting silicon nitride film tends to have a high hydrogen content because it is difficult to break the bond between two nitrogen atoms and form silicon-nitrogen bonds. At higher plasma frequencies, the N2 dissociation process can become more efficient. However, since it is not possible to completely remove the silicon-hydrogen bonds of SiH4, the film still has a high hydrogen content. Therefore, this technology can increase the frequency at which N2 dissociates and can also include H2 gas as a plasma precursor, thereby beneficially creating a chemical annealing atmosphere that promotes the desorption of nitrogen-hydrogen bonds. As will be explained in more detail below, the goal may be to reduce hydrogen uptake into the membrane, but counterintuitively, by incorporating H2 gas into the deposition precursor, it is possible to reduce the number of nitrogen-hydrogen bonds formed in the silicon nitride film, increase the film density, and increase the film stress compared to conventional low-temperature deposition techniques. Incorporating H2 gas can also reduce the hydrogen content in the film and improve film quality. When nitrogen-hydrogen bonds in the film are reduced by incorporating hydrogen into the plasma precursor, more volatile hydrogen residues can be drawn from the film during deposition and discharged from the processing chamber.

[0023] While the remaining disclosure routinely identifies specific deposition processes that utilize the technology of this disclosure, it will be readily apparent that the systems and methods are equally applicable to other deposition and washing chambers, as well as processes that may be carried out within the described chambers. Therefore, the technology should not be considered limited to use in these specific deposition processes or chambers alone. Before describing additional details according to embodiments of the technology, this disclosure discusses one possible system and chamber that can be used to carry out a deposition process according to embodiments of the technology.

[0024] Figure 1 shows a top view of one embodiment of a deposition, etching, baking, and curing chamber processing system 100 according to an embodiment. In this figure, substrates of various sizes are supplied by a pair of forward-opening unified pods 102, which are received by a robotic arm 104 and placed in a low-pressure holding area 106, and then placed in one of the substrate processing chambers 108a-f located in tandem sections 109a-c. A second robotic arm 110 can be used to transport substrate wafers from the holding area 106 to and from the substrate processing chambers 108a-f. Each substrate processing chamber 108a-f can be mounted to perform a plurality of substrate processing operations, including the formation of stacks of semiconductor materials as described herein, in addition to other substrate processes, including plasma chemical vapor deposition, atomic layer deposition, physical vapor deposition, etching, pre-cleaning, degassing, orientation, and other substrate processes such as annealing and ashing.

[0025] The substrate processing chambers 108a-f may include one or more system components for depositing, annealing, curing, and / or etching dielectric films or other films on a substrate. In one configuration, two pairs of processing chambers, e.g., 108c-d and 108e-f, can be used to deposit dielectric material on a substrate, and a third pair of processing chambers, e.g., 108a-b, can be used to etch the deposited dielectric. In another configuration, all three pairs of chambers, e.g., 108a-f, can be configured to deposit alternating stacks of dielectric films on a substrate. One or more of the described processes may be performed in chambers separated from the manufacturing system shown in different embodiments. It will be recognized that additional configurations of deposition, etching, annealing, and curing chambers for dielectric films are intended by system 100.

[0026] Figure 2 shows a schematic cross-sectional view of an exemplary plasma system 200 according to several embodiments of the present technology. The plasma system 200 may represent a pair of processing chambers 108, which may be further described below, and which can be attached to one or more of the tandem sections 109 described above and may include lid stack components according to embodiments of the present technology. The plasma system 200 may generally include a chamber body 202 having side walls 212, a bottom wall 216, and internal side walls 201 defining a pair of processing regions 220A and 220B. Each of the processing regions 220A-220B may be similarly configured and may include the same components.

[0027] For example, the processing area 220B (whose components may also be included in the processing area 220A) may include a pedestal 228 positioned within the processing area through a passage 222 formed in the bottom wall 216 of the plasma system 200. The pedestal 228 can provide a heater adapted to support a substrate 229 on an exposed surface of the pedestal, such as a main body portion. The pedestal 228 may include a heating element 232, such as a resistive heating element, capable of heating and controlling the substrate temperature to a desired processing temperature. The pedestal 228 may also be heated by a remote heating element, such as a lamp assembly, or any other heating device.

[0028] The body of the pedestal 228 may be coupled to the stem 226 by a flange 233. The stem 226 can electrically couple the pedestal 228 to a power output or power box 203. The power box 203 may include a drive system that controls the raising and moving of the pedestal 228 within the processing area 220B. The stem 226 may also include a power interface for supplying power to the pedestal 228. The power box 203 may also include interfaces for power and temperature indicators, such as a thermocouple interface. The stem 226 may include a base assembly 238 adapted to be detachably coupled to the power box 203. A circumferential ring 235 is shown above the power box 203. In some embodiments, the circumferential ring 235 may be a shoulder adapted as a mechanical stopper or land configured to provide a mechanical interface between the base assembly 238 and the top surface of the power box 203.

[0029] The rod 230 may be included through a passage 224 formed in the bottom wall 216 of the processing area 220B and can be used to position substrate lift pins 261 positioned through the body of the pedestal 228. The substrate lift pins 261 can selectively separate the substrate 229 from the pedestal, facilitating the replacement of the substrate 229 by a robot used to transport the substrate 229 in and out of the processing area 220B via the substrate transfer port 260.

[0030] The chamber lid 204 can be coupled to the upper part of the chamber body 202. The lid 204 can house one or more precursor distribution systems 208 coupled to it. The precursor distribution system 208 may include a precursor inlet passage 240 that can supply reactants and washing precursors to the processing area 220B through a dual-channel showerhead 218. The dual-channel showerhead 218 may include an annular base plate 248 having a blocker plate 244 positioned between it and a faceplate 246. A radio frequency ("RF") source 265 can be coupled to the dual-channel showerhead 218 and can power the dual-channel showerhead 218 to facilitate the generation of a plasma region between the faceplate 246 and the pedestal 228 of the dual-channel showerhead 218. In some embodiments, the RF source may be coupled to other parts of the chamber body 202, such as the pedestal 228, to facilitate plasma generation. A dielectric isolator 258 may be placed between the lid 204 and the dual-channel showerhead 218 to prevent the conduction of RF power to the lid 204. A shadow ring 206 that engages with the pedestal 228 may be placed around the pedestal 228. The dual-channel showerhead 218 may have a spacing of about 200 mils or more, about 300 mils or more, about 400 mils or more, about 500 mils or more, about 600 mils or more, or greater. Alternatively or additionally, the dual-channel showerhead 218 may have a spacing of about 1200 mils or less, about 1100 mils or less, about 1000 mils or less, about 900 mils or less, about 800 mils or less, about 700 mils or less, or less.

[0031] To cool the annular base plate 248 during operation, optional cooling channels 247 may be formed in the annular base plate 248 of the precursor distribution system 208. A heat transfer fluid such as water, ethylene glycol, or gas can be circulated through the cooling channels 247 to maintain the base plate 248 at a predetermined temperature. The liner assembly 227 may be positioned in the processing region 220B, very close to the side walls 201, 212 of the chamber body 202, to prevent the side walls 201, 212 from being exposed to the processing environment within the processing region 220B. The liner assembly 227 may include a circumferential pumping cavity 225, which may be coupled to a pumping system 264 configured to discharge gases and by-products from the processing region 220B and to control the pressure within the processing region 220B. Multiple exhaust ports 231 may be formed in the liner assembly 227. The exhaust port 231 may be configured to allow gas flow from the processing area 220B to the circumferential pumping cavity 225 in a manner that facilitates processing within the system 200.

[0032] Figure 3 shows the operation of an exemplary method 300 for semiconductor processing according to several embodiments of the present technology. The method can be carried out in various processing chambers, including the processing system 200 described above, as well as any other chambers in which plasma deposition can be performed. Method 300 may include several optional operations, which may or may not be specifically associated with some embodiments of the method according to the present technology. Method 300 can be used to deposit a silicon nitride film on a substrate such as a substrate 229.

[0033] Method 300 may include a processing method that includes an operation for forming a material film at high frequency or other deposition operation, such as an operation to produce a DRAM memory or other material, which can be formed to have a higher density and / or higher stress compared to a conventional process. The method may include optional operations before the start of Method 300, or the method may include additional operations. For example, Method 300 may include operations performed before the start of the method, including additional deposition, removal, or processing operations. In some embodiments, Method 300 may include, in operation 305, flowing a plurality of precursors into a processing chamber, thereby supplying the precursors to a processing area of ​​the chamber capable of accommodating a substrate, such as area 220. The precursors may be supplied with diatomic hydrogen gas. Furthermore, the precursors may be supplied using a carrier gas such as argon and / or helium.

[0034] In some embodiments, the precursor may include silicon-containing precursors such as silane and nitrogen-containing precursors such as diatomic nitrogen. While any silicon-containing precursor can be used in embodiments of this technology, the use of silane allows for better control of the amount of hydrogen in the processing area and reduces hydrogen uptake in the deposited film. The precursor may or may not include additional precursors such as a carrier gas and / or one or more oxygen-containing precursors for depositing the oxide layer. The precursor may also include hydrogen gas. As will be discussed in more detail below, including diatomic hydrogen gas with the precursor can reduce the number of nitrogen-hydrogen bonds formed in the silicon nitride film, increase film density, and increase film stress compared to conventional low-temperature deposition techniques. In addition, in some embodiments, the processing precursor can explicitly exclude any precursor containing nitrogen-hydrogen bonds that may affect film properties as described above. As a result, in some embodiments, the gas phase material may not contain nitrogen-hydrogen bonds.

[0035] In operation 310, plasma can be generated from the precursor and diatomic hydrogen within the processing area 220 by supplying RF power to the faceplate to generate plasma within the processing area 220, but any other processing chamber capable of generating plasma can be used in the same way. The plasma can be generated at any of the aforementioned frequencies, and can be generated at frequencies of approximately 15 MHz or higher, approximately 20 MHz or higher, approximately 27 MHz or higher, approximately 40 MHz or higher, or higher. Alternatively or additionally, the plasma can be generated at frequencies of approximately 100 MHz or lower, approximately 80 MHz or lower, approximately 60 MHz or lower, or lower. By utilizing higher frequency plasma, the dissociation of nitrogen can be increased, and throughput can be increased by increasing the deposition rate.

[0036] The material formed in the plasma can be deposited on the substrate in operation 315, producing silicon and nitrogen-containing materials such as silicon nitride. Deposition can be carried out at substrate or pedestal temperatures of approximately 550°C or lower, approximately 500°C or lower, approximately 450°C or lower, approximately 400°C or lower. By using lower temperatures, it is possible to avoid exceeding the thermal balance of the DRAM memory and prevent damage to materials already deposited on the substrate. Furthermore, deposition can be carried out at power levels of approximately 25W or higher, approximately 250W or higher, approximately 500W or higher, approximately 750W or higher, approximately 1000W or higher, approximately 1250W or higher, or higher. By using higher power, the deposition rate can be increased, suggesting that nitrogen dissociation may become a process limiting factor. However, as plasma power increases, nitrogen dissociation increases further, and additional nitrogen radicals may be incorporated into the film, which may reduce the formation of silicon-nitrogen networks as described below. Therefore, in some embodiments, the plasma power may be maintained at approximately 3000W or less, approximately 2500W or less, approximately 2000W or less, approximately 1500W or less, approximately 1250W or less, approximately 1000W or less, approximately 900W or less, or less. In addition, the pressure may be maintained at approximately 2 Torr or more, approximately 3 Torr or more, approximately 4 Torr or more, approximately 5 Torr or more, or greater pressure. Alternatively or additionally, the pressure may be maintained at approximately 10 Torr or less, approximately 9 Torr or less, approximately 8 Torr or less, approximately 7 Torr or less, approximately 6 Torr or less, or less pressure.

[0037] Figures 4A-4D show examples of growth mechanisms in several deposition processes. In these examples, low-temperature PECVD is used for the deposition of silicon nitride films using silane and diatomic nitrogen precursors. As shown in Figure 4A, no gas-phase reaction occurs between silane and diatomic nitrogen. Instead, SiN x H y The deposition of SiH on the growth substrate mThe process begins with the chemisorption of radicals. As shown in Figure 4B, upon reaching the reaction surface of the growth substrate, nitrogen radicals bond with silicon atoms and release hydrogen atoms. Due to the low energy of silicon-hydrogen bonds, this occurs at almost all silicon-hydrogen bonding sites. However, as shown in Figure 4C, as soon as the silicon-nitrogen bond is formed, the released hydrogen radical recombines with the unpaired electrons of nitrogen, thereby limiting or preventing the formation of stretched silicon-nitrogen bonds, which would result in increased stress within the film. Numerous nitrogen-hydrogen and silicon-hydrogen bonds remain in the film, which also reduces its density. As shown in Figure 4D, the nitrogen atoms increase their vapor pressure and reach the surface with silicon-nitrogen bonds. m This saturates the radicals. Because silicon-nitrogen bonds have low bond energy, nitrogen bonds can increase at each site, eventually leading to a nitrogen-rich membrane that may further restrict network formation.

[0038] Figures 4E-4G show examples of growth mechanisms according to several embodiments of the technology, each containing nitrogen and hydrogen precursors separately. In these examples, low-temperature PECVD is used to deposit silicon nitride films by adding diatomic hydrogen to silane and diatomic nitrogen precursors. The addition of diatomic hydrogen creates a chemical annealing atmosphere that promotes the desorption of nitrogen-hydrogen bonds. As shown in Figure 4E, upon addition of diatomic hydrogen gas, the removal of nitrogen-hydrogen bonds is catalyzed by the presence of free H radicals. This is energetically preferable to the silicon-hydrogen bond removal process. As shown in Figure 4F, one or more unpaired electrons on the nitrogen promote the bridging of silicon-nitrogen bonds, thereby increasing tensile stress. As shown in Figure 4G, the film density is higher due to fewer nitrogen-hydrogen voids. In this denser film, it becomes more difficult for nitrogen atoms to reach the silicon-hydrogen sites, resulting in a film with more silicon-hydrogen bonds and richer silicon.

[0039] Figures 5A-5F show various deposition and film parameters as a function of diatomic hydrogen flow rate in several embodiments of the present technology. In these examples, a 27 MHz plasma is formed in a PECVD chamber at a temperature of 450°C. The diatomic hydrogen flow rate can be approximately 100 sccm or more, approximately 1000 sccm or more, approximately 2000 sccm or more, approximately 3000 sccm or more, approximately 4000 sccm or more, or greater. However, as described below, as the hydrogen flow continues to increase, nitrogen-hydrogen bonding may be restricted, thereby potentially stabilizing the density, but the increase in available hydrogen may affect the formation, potentially increasing the development of silicon-silicon bonding within the film, thereby potentially reducing film stress. Therefore, in some embodiments, the diatomic hydrogen flow rate can be approximately 5000 sccm or less and can be maintained at approximately 4000 sccm or less, approximately 3000 sccm or less, approximately 2000 sccm or less, or less, depending on the target internal stress within the film. As will be discussed in more detail below, by adjusting the flow rate of diatomic hydrogen, various deposition and film properties can be achieved.

[0040] As shown in Figure 5A, the film deposition rate increases as a function of the diatomic hydrogen flow rate. Furthermore, for each flow rate, the first deposition rate 505 for films deposited at a higher power of 1250 W is greater than the second deposition rate 510 for films deposited at a lower power of 750 W. In this example, the deposition rates can be approximately 1200 Å / min or more, approximately 1300 Å / min or more, approximately 1400 Å / min or more, approximately 1500 Å / min or more, approximately 1600 Å / min or more, approximately 1700 Å / min or more, approximately 1800 Å / min or more, or higher.

[0041] As shown in FIG. 5B, the stress of the film has peaks that vary according to the power. For example, the first stress 515 of the film deposited at a higher power of 1250 W has a peak at a flow rate greater than the second stress 520 of the film deposited at a lower power of 750 W. This is because the higher the power, the more N radicals are generated and incorporated into the film during the deposition process. Furthermore, the peak of the first stress 515 of the film deposited at a higher power can be lower than the peak of the second stress 520 of the film deposited at a lower power. In this example, the stress can be about 300 MPa or more, about 400 MPa or more, about 500 MPa or more, about 600 MPa or more, about 700 MPa or more, about 800 MPa or more, about 900 MPa or more, or greater than that.

[0042] As shown in FIG. 5C, the density of the film has a profile that varies according to the power. For example, the first density 525 of the film deposited at a higher power of 1250 W increases as a function of the flow rate before leveling off. On the other hand, the second density 530 of the film deposited at a lower power of 750 W increases more rapidly as a function of the flow rate, reaches a peak, and then gradually decreases. In this example, the density can be about 2.50 g / cm 3 or more, about 2.55 g / cm 3 or more, about 2.60 g / cm 3 or more, about 2.65 g / cm 3 or more, about 2.70 g / cm 3 or more, about 2.75 g / cm 3 or more, about 2.80 g / cm 3 or more, about 2.85 g / cm 3 or more, about 2.90 g / cm 3 or more, or greater than that.

[0043] As shown in Figure 5D, the refractive index of the film increases as a function of the diatomic hydrogen flow rate. This suggests that lower nitrogen-hydrogen bond densities may result in Si-rich films, which can increase the refractive index. Furthermore, for each flow rate, the first refractive index of 605 for films deposited at a higher power of 1250 W is lower than the second refractive index of 610 for films deposited at a lower power of 750 W. In this example, the refractive index can be approximately 1.75 or higher, approximately 1.80 or higher, approximately 1.85 or higher, approximately 1.90 or higher, approximately 1.95 or higher, approximately 2.00 or higher, approximately 2.05 or higher, approximately 2.10 or higher, approximately 2.15 or higher, approximately 2.20 or higher, or above.

[0044] As shown in Figure 5E, the ratio of silicon-hydrogen bond density to silicon-nitrogen bond density increases as a function of diatomic hydrogen flow rate. Furthermore, for each flow rate, the first ratio of silicon-hydrogen bond density to silicon-nitrogen bond density of 535 for films deposited at a higher power of 1250 W is lower than the second ratio of silicon-hydrogen bond density to silicon-nitrogen bond density of 540 for films deposited at a lower power of 750 W. In this example, the ratio of silicon-hydrogen bond density to silicon-nitrogen bond density can be approximately 0.0% or higher, approximately 0.4% or higher, approximately 0.8% or higher, approximately 1.2% or higher, or greater.

[0045] As shown in Figure 5F, the ratio of nitrogen-hydrogen bond density to silicon-nitrogen bond density decreases as a function of diatomic hydrogen flow rate. Furthermore, for each flow rate, the first ratio of nitrogen-hydrogen bond density to silicon-nitrogen bond density (555) for membranes deposited at a higher power of 1250 W is lower than the second ratio of nitrogen-hydrogen bond density to silicon-nitrogen bond density (560) for membranes deposited at a lower power of 750 W. In this example, the ratio of nitrogen-hydrogen bond density to silicon-nitrogen bond density can be approximately 25% or less, approximately 20% or less, approximately 15% or less, approximately 10% or less, approximately 5% or less, or lower.

[0046] As shown in Figures 5E and 5F, the addition of a small amount of diatomic hydrogen dramatically reduces the nitrogen-hydrogen bond density, while moderately increasing the silicon-hydrogen bond density. This increases both the density and stress of the film. As indicated by the corresponding increase in refractive index shown in Figure 5D, a lower nitrogen-hydrogen bond density results in a more Si-rich film. Furthermore, as shown in Figures 5B and 5C, both the first density 525 and the second density 530 generally reach saturation levels above a certain flow rate level, corresponding to a sufficient decrease in nitrogen-hydrogen bond density as shown in Figure 5F, while the first stress 515 and the second stress become more compressive above this flow rate level. In this region, the silicon-silicon bonds effectively release tensile stress.

[0047] As described above, SiH4 can be used as a silicon precursor. The silane flow rate can be approximately 10 sccm or more, approximately 100 sccm or more, approximately 200 sccm or more, approximately 300 sccm or more, approximately 400 sccm or more, or greater. Alternatively or additionally, the silane flow rate can be approximately 1000 sccm or less, approximately 900 sccm or less, approximately 800 sccm or less, approximately 700 sccm or less, or less. Furthermore, as described above, N2 can be used as a nitrogen precursor. The N2 flow rate can be approximately 1000 sccm or more, approximately 2000 sccm or more, approximately 3000 sccm or more, approximately 4000 sccm or more, approximately 5000 sccm or more, or greater. Alternatively or additionally, the N2 flow rate may be approximately 10,000 sccm or less, approximately 9,000 sccm or less, approximately 8,000 sccm or less, approximately 7,000 sccm or less, or less.

[0048] Some of the methods described above allow the deposition process to be carried out without using NH3 as a precursor and do not explicitly require the inclusion of ammonia. In other examples, NH3 can be used as a nitrogen precursor. The flow rate of NH3 can be approximately 1000 sccm or more, approximately 2000 sccm or more, approximately 3000 sccm or more, approximately 4000 sccm or more, approximately 5000 sccm or more, or greater. Alternatively or additionally, the flow rate of NH3 can be approximately 10,000 sccm or less, approximately 9000 sccm or less, approximately 8000 sccm or less, approximately 7000 sccm or less, or less.

[0049] Furthermore, as described above, the precursor can be supplied using a carrier gas such as argon and / or helium. The argon flow rate can be about 0 sccm or more, about 1000 sccm or more, about 2000 sccm or more, about 3000 sccm or more, about 4000 sccm or more, or greater. Alternatively or additionally, the argon flow rate can be about 10,000 sccm or less, about 9000 sccm or less, about 8000 sccm or less, about 7000 sccm or less, or less. Similarly, the helium flow rate can be about 0 sccm or more, about 1000 sccm or more, about 2000 sccm or more, about 3000 sccm or more, about 4000 sccm or more, or greater. Alternatively or additionally, the helium flow rate may be less than or equal to approximately 10,000 sccm, 9,000 sccm, 8,000 sccm, 7,000 sccm, or less.

[0050] The method described above can also be used to reduce the amount of hydrogen formed in silicon nitride films. Typically, conventional low-temperature PECVD processes produce films that incorporate more than 10% hydrogen, which can degrade film quality due to subsequent void formation. In contrast, the method described above can incorporate diatomic hydrogen along with silicon-containing and nitrogen-containing precursors, which, counterintuitively, can reduce the amount of hydrogen in the film to approximately 10% or less, approximately 9% or less, approximately 8% or less, approximately 7% or less, or even lower. This improves film quality and facilitates subsequent removal using nitride-specific etchants.

[0051] In the preceding description, many details have been given for illustrative purposes to facilitate understanding of the various embodiments of this technology. However, it will be apparent to those skilled in the art that certain embodiments can be carried out without some of these details, or with further details.

[0052] While several embodiments have been disclosed, it will be apparent to those skilled in the art that various modifications, alternative configurations, and equivalents can be used without departing from the spirit of the embodiments. Furthermore, to avoid unnecessarily obscuring the Art, several well-known processes and elements have not been described. Therefore, the above description should not be construed as limiting the scope of the Art.

[0053] Where a range of values ​​is presented, it is understood that each intervention value up to the smallest unit of the lower limit between the upper and lower limits of that range is also specifically disclosed, unless the context explicitly indicates otherwise. Any narrow range between any listed value or unlisted intervention value within a listed range and any other listed value or intervention value within that listed range is also included. The upper and lower limits of these smaller ranges may be independently included in or excluded from the range, and each range that includes one, neither, or both of the limit values ​​is also included in this technical scope and is subject to any specifically excluded limit values ​​within the specified range. Where one or both limit values ​​are included in the specified range, ranges that exclude one or both of those included limit values ​​are also included.

[0054] As used herein and in the appended claims, the singular forms “a,” “an,” and “the” include multiple referents unless otherwise specified in the context. Thus, for example, “a material” includes multiple such materials, and “its precursor” includes one or more precursors and their equivalents known to those skilled in the art, and so on.

[0055] Furthermore, the terms “comprise(s),” “comprising,” “contain(s),” “containing,” “include(s),” and “including,” as used in this specification and the appended claims, are intended to identify the presence of a described feature, integer, component, or process, but do not exclude the presence or addition of one or more other features, integers, components, processes, operations, or groups.

Claims

1. In the method, A silicon-containing precursor, a nitrogen-containing precursor, and a plurality of precursors containing diatomic hydrogen are flowed into a processing area of ​​a semiconductor processing chamber, wherein a substrate is housed within the processing area of ​​the semiconductor processing chamber. Forming a plasma of the silicon-containing precursor, the nitrogen-containing precursor, and the diatomic hydrogen, wherein the plasma is formed at a frequency exceeding 15 MHz, and Depositing silicon nitride material onto the aforementioned substrate Includes, A method characterized in that the silicon nitride material has a tensile stress of 300 MPa or more.

2. The silicon nitride material is 2.85 g / cm³ ３ The method according to claim 1, characterized by the above density.

3. The method according to claim 1, wherein the silicon nitride material is characterized by a tensile stress of 400 MPa or more.

4. The method according to claim 1, wherein the silicon nitride material is characterized by having a refractive index of 1.75 or higher.

5. The method according to claim 1, wherein the silicon nitride material contains 10% or less hydrogen.

6. The method according to claim 1, wherein 100 sccm or more of diatomic hydrogen is flowed into the processing area of ​​the semiconductor processing chamber.

7. The method according to claim 6, wherein 5000 sccm or less of diatomic hydrogen is flowed into the processing area of ​​the semiconductor processing chamber.

8. The method according to claim 1, wherein the plasma is formed at a temperature of 550°C or lower.

9. The method according to claim 1, wherein the frequency is 27 MHz or higher.

10. In the method, A silicon-containing precursor, a nitrogen-containing precursor, and a plurality of precursors containing diatomic hydrogen are flowed into a processing area of ​​a semiconductor processing chamber, wherein a substrate is housed within the processing area of ​​the semiconductor processing chamber. Forming a plasma of the silicon-containing precursor, the nitrogen-containing precursor, and the diatomic hydrogen, wherein the plasma does not contain any material having nitrogen-hydrogen bonds, and Depositing silicon nitride material onto the aforementioned substrate Includes, The silicon nitride material is 2.85 g / cm³ ３ The above densities are characterized, and The silicon nitride material is characterized by a tensile stress of 400 MPa or more. method.

11. The method according to claim 10, wherein the silicon nitride material is characterized by having a refractive index of 1.75 or higher.

12. The method according to claim 10, wherein the silicon nitride material contains 10% or less hydrogen.

13. The method according to claim 10, wherein 100 sccm or more of diatomic hydrogen is flowed into the processing area of ​​the semiconductor processing chamber.

14. The method according to claim 13, wherein diatomic hydrogen of 5000 sccm or less is flowed into the processing area of ​​the semiconductor processing chamber.

15. The method according to claim 10, wherein the plasma is formed at a temperature of 550°C or lower.

16. The method according to claim 10, wherein the plasma is formed at a frequency exceeding 15 MHz.

17. The method according to claim 16, wherein the frequency is 27 MHz or higher.

18. In the method, A silicon-containing precursor, a nitrogen-containing precursor, and a plurality of precursors containing diatomic hydrogen are flowed into a processing area of ​​a semiconductor processing chamber, wherein a substrate is housed within the processing area of ​​the semiconductor processing chamber. Forming a plasma of the silicon-containing precursor, the nitrogen-containing precursor, and the diatomic hydrogen, and Depositing silicon nitride material onto the aforementioned substrate Includes, A diatomic hydrogen atom of 100 sccm or more is flowed into the processing area of ​​the semiconductor processing chamber, and The diatomic hydrogen atoms of 5000 sccm or less are flowed into the processing area of ​​the semiconductor processing chamber. A method characterized in that the silicon nitride material has a tensile stress of 300 MPa or more.

19. The silicon nitride material is 2.85 g / cm³ ３ The method according to claim 18, characterized by the above density.

20. The method according to claim 18, wherein the silicon nitride material is characterized by a tensile stress of 400 MPa or more.

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