Multi-gas exhaust integrated module and wafer drying system usable in wafer drying systems

Abstract

The purpose of this study is to address the issue of exhaust treatment in wafer drying processes using Marangoni drying technology, particularly the need for efficient exhaust and treatment of a wide variety of gases. [Solution] A multi-gas exhaust integrated module is provided, comprising: a tank body exhaust port connected to a drying tank body via a pipeline and having an exhaust air shut-off damper therein; a main body exhaust port arranged openly within the body and having a main body pressure regulating damper therein; a foamer exhaust port connected to the isopropyl alcohol foamer via a pipeline; an outer shell having the tank body exhaust port, main body exhaust port, and foamer exhaust port respectively, and having an internal cylinder connected to the exhaust air shut-off damper; an upstream connecting pipe having one end connected to the exhaust port of the outer shell and the other end connected to an intermediate air adjusting pipe and having an internal main circuit pressure regulating damper; an intermediate air adjusting pipe having an intake end connected to the intermediate connecting pipe and an exhaust end connected to an exhaust pipe, and having a rotary cylinder module at its upper part, the rotary cylinder module being connected to a total circuit shut-off damper in the intermediate air adjusting pipe; and an exhaust pipe having an exhaust end extending outside the wafer drying system and connected to an exhaust transport pipe on the factory side.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor devices, and more particularly to a multi-gas exhaust integration module that can be used in a wafer drying system and the wafer drying system.

Background Art

[0002] In the drying process of wafers using semiconductor processing equipment, isopropyl alcohol (IPA) is used. Specifically, IPA displacement drying technology and Marangoni drying technology are mainly adopted. In these drying processes, a large amount or an appropriate amount of vaporized gas of IPA and nitrogen gas are used, and these gases are discharged by an exhaust system after use.

[0003] However, other gases discharged not only affect environmental safety but may also have an adverse impact on drying efficiency and quality.

[0004] Therefore, an exhaust control method and system that can integrally apply multiple drying processes are required, and it is necessary to improve the IPA replacement process in cooperation with the operation of an actual drying module and solve the exhaust problems in the wafer drying process based on Marangoni drying technology.

Summary of the Invention

Problems to be Solved by the Invention

[0005] An object of the present invention is to overcome the problems in the prior art as described above, and an object is to provide a multi-gas exhaust integration module that can be used in a wafer drying system.

[0006] The integration module of the present invention effectively solves the exhaust problem during the wafer drying process by adopting an integrated exhaust control method.

Means for Solving the Problems

[0007] To solve the above-mentioned problems, the present invention provides the following technical configuration. That is, the multi-gas emission integrated module usable in the wafer drying system according to the present invention includes a main body, a drying tank, and an isopropyl alcohol (IPA) foamer provided in the wafer drying system, and the multi-gas emission integrated module is installed within the wafer drying system and has the following structure.

[0008] In other words, this module is equipped with a tank exhaust port connected to the drying tank body, and this exhaust port is fitted with a damper (shutoff plate) for blocking the flow of exhaust air. Furthermore, the wafer drying system is equipped with an open exhaust port located inside the main body, and a pressure regulating damper for the main body is provided at this exhaust port. Furthermore, it is equipped with an IPA foaming device and a foaming device exhaust port connected by a pipeline.

[0009] All of these exhaust vents are located on the outer shell (housing), and a cylinder is provided inside the outer shell, which is connected to the exhaust airflow damper.

[0010] The integrated module of the present invention is further provided with a pre-connection conduit, one end of which is connected to the exhaust port of the outer shell, and the other end of which is connected to an intermediate air regulating conduit. A pressure regulating damper for the main circuit is provided within the pre-connection conduit.

[0011] The aforementioned intermediate air control pipe is connected to a pre-connecting pipe at its inlet side and to a discharge pipe at its outlet side. A rotary cylinder module is provided on this intermediate air control pipe, and this module is connected to a main circuit interruption damper provided within the intermediate air control pipe.

[0012] The exhaust end of the aforementioned discharge pipeline protrudes outside the wafer drying system and is connected to the exhaust transport pipeline on the factory equipment side.

[0013] Furthermore, in a preferred embodiment of the present invention, at least one ring-shaped gasket made of fluorocarbon rubber is provided between the exhaust pipe and the intermediate air conditioning pipe.

[0014] Furthermore, the rotary cylinder module includes a rotary cylinder, a damper connecting rod, and an outer shell for the rotary cylinder. The output end of the rotary cylinder is connected to the damper connecting rod, which extends into the internal air conditioning duct and is connected to a main circuit shut-off damper. The outer shell for the rotary cylinder covers the entire rotary cylinder.

[0015] Furthermore, a rotary damper connecting rod is connected to the main circuit pressure regulating damper in the aforementioned pre-connecting pipeline, with one end of the rod protruding outside the pre-connecting pipeline and connected to the rotary damper on / off valve.

[0016] Furthermore, at least one ring-shaped gasket made of fluorocarbon rubber is provided between the aforementioned pre-connecting conduit and the exhaust port of the outer shell.

[0017] Furthermore, a shut-off microcylinder module is provided inside the outer shell. This module consists of a main outer shell, a cylinder, a shut-off plate, a mounting plate, a module outer shell, and a circular support plate. The main outer shell is fixed to the inner wall of the outer shell via the mounting plate, and a thin cylinder is provided inside. This thin cylinder is surrounded by a main body shell and a module shell, and its output end protrudes outside the module shell and is connected to a circular support plate. The circular support plate is tightly connected to a shut-off plate, and together they form an exhaust air flow damper that can open, close, and seal the exhaust port of the drying tank.

[0018] In the multi-gas discharge integrated module for wafer drying systems according to the present invention, a further configuration is provided in the main body exhaust port, a main body pressure regulating damper is provided in the main body pressure regulating damper, a rotary damper connecting rod is connected to the main body pressure regulating damper, one end of the rod protrudes outside the pre-connecting pipeline and is connected to a rotary damper opening / closing valve.

[0019] In addition, an openable upper cover is provided on the upper part of the outer shell, and a bubbler exhaust port and a main body exhaust port are provided on the upper cover. Further, a tank body exhaust port is provided on the side wall of the outer shell.

[0020] Also, a support plate member is provided at the bottom of the outer shell, and the outer shell can be fixed to the main body through the support plate member.

[0021] Furthermore, an interface for installing an exhaust on-off sensor is provided at the tank body exhaust port, and an interface for installing a factory exhaust pressure sensor is provided in the discharge pipeline.

[0022] The operating states of the integrated module according to the present invention include a standby state, a tank body operating state, a main body positive pressure state, and a stop state.

[0023] After the wafer drying system enters the standby state, the main body exhaust port is always open, the bubbler exhaust port is in a semi-open state for exhausting air from the IPA bubbler, and the tank body exhaust port is closed to achieve continuous exhaust of the IPA bubbler and the main body. In the standby state, the main body exhaust port is always open, the bubbler exhaust port is in a semi-open state for exhausting air from the IPA bubbler, and the tank body exhaust port is closed to achieve continuous exhaust of the IPA bubbler and the main body.

[0024] In the tank body operating state, the main body exhaust port is always open, the bubbler exhaust port is semi-open, the tank body exhaust port is open, the main circuit pressure regulating damper is semi-open, the total circuit on-off damper is open, and the exhaust of the tank body, IPA bubbler, and main body all operate.

[0025] In the main body positive pressure state, the main body exhaust port is always open, the bubbler exhaust port is closed, the tank body exhaust port is open, the main circuit pressure regulating damper is semi-open, the total circuit on-off damper is open, and the exhaust of the tank body and the main body operates.

[0026] In the stop state, the main body exhaust port, the bubbler exhaust port, and the tank body exhaust port are all closed, the main circuit pressure regulating damper and the total circuit on-off damper are also closed, the exhaust completely stops, and the inflow of gas from the outside is prevented.

[0027] The present invention also relates to a wafer drying system having a multi-gas discharge integrated module with the above-described structure.

Advantages of the Invention

[0028] The integrated module of the present invention can communicate three gas discharge sources in the wafer drying system (the mixed gas of IPA and N2 from the drying tank body, the fine particle high-temperature gas from the IPA atomization system, and the externally supplied N2), and can integrally control the exhaust gas at each drying stage.

[0029] By realizing the switching of each gas source within the module, a complex exhaust process can be handled by a single module, and the necessary exhaust control for each process can be flexibly performed.

[0030] In addition, it is equipped with a shut-off device to prevent pressure drop, backflow, particle contamination, etc. caused by the simultaneous inflow of different gas sources, ensuring high safety while enabling the control of multiple gases with a single module.

[0031] Furthermore, without passing through an external pipeline, negative pressure control is performed by a manual valve provided at the upper part, and the intake air and flow field formation of the FFU (Fan Filter Unit) can be efficiently realized. Also, the exhaust gas flow rate and velocity can be precisely controlled by a rotating cylinder, enabling optimal exhaust according to each process stage.

[0032] Thereby, general defects such as water marks and particle residues in the wafer drying process can be effectively suppressed and improved.

Brief Description of the Drawings

[0033] [Figure 1] is a schematic diagram showing the installation position of the multi-gas discharge integrated module for the wafer drying system according to the present invention. [Figure 2] is a three-dimensional partial cross-sectional view of the integrated module of the present invention. [Figure 3] is an explosion diagram showing the configuration of the integrated module of the present invention. [Figure 4] is a system configuration principle diagram of the integrated module of the present invention. [Figure 5]This is a diagram showing the exhaust state in standby mode. [Figure 6] This is a diagram showing the exhaust state when the tank is in operation. [Figure 7] This diagram shows the exhaust state when the main unit is under positive pressure. [Figure 8] This is a diagram showing the exhaust state when the vehicle is stopped. [Modes for carrying out the invention]

[0034] The multi-gas exhaust integrated module for wafer drying systems according to the present invention will be described in detail below based on the attached drawings and specific embodiments. However, the scope of protection of the present invention is not limited to these embodiments.

[0035] The integrated module of the present invention is designed to integrally discharge gases from multiple exhaust sources in a wafer drying system, and efficiently performs the gas discharge control required at each stage of the drying process.

[0036] This configuration centrally controls complex exhaust processes within a single module, and, in conjunction with various drying processes, contributes to solving exhaust challenges in wafer drying.

[0037] As shown in Figure 1, conventional wafer drying systems include a main body A that functions as a frame, an IPA foamer B, and a drying tank C. The multi-gas discharge integrated module according to the present invention is installed within a wafer drying system having these components.

[0038] As shown in Figures 2 and 3, the configuration of the integrated module of the present invention includes the following elements.

[0039] The exhaust port E of the tank is connected to the drying tank C via a hose D, and an exhaust air flow damper consisting of a circular support plate 18 is provided inside.

[0040] The main unit exhaust port G is provided in an open state inside the main unit A, and a main unit pressure regulating damper 22 is provided inside it.

[0041] The foaming device exhaust port F is connected to the IPA foaming device B via hose D.

[0042] The outer shell 19 is provided with a tank exhaust port E, a main body exhaust port G, and a foaming device exhaust port F, and a thin cylinder 14 is positioned inside. The cylinder 14 is connected to a circular support plate 18, and the opening and closing of the tank exhaust port E is controlled by operating this support plate.

[0043] The pre-connecting conduit 7 has one end connected to the exhaust port of the outer shell 19 and the other end connected to the internal air conditioning conduit 3, and a main circuit pressure regulating damper 10 is provided inside it.

[0044] The intermediate air control pipe 3 connects the outlet end of the pre-connecting pipe 7 to the inlet end of the discharge pipe 1, and a rotary cylinder module for driving the total circuit blockage damper 6 is attached to the pipe 3.

[0045] The outlet end of discharge pipeline 1 extends outside the wafer drying system and is connected to the exhaust transport pipe on the factory equipment side.

[0046] Furthermore, a top cover 20 that can be opened and closed is provided on the upper part of the outer shell 19, and a foaming device exhaust port F and a main body exhaust port G are located on the top cover 20. A tank exhaust port E is provided on the side wall of the outer shell 19.

[0047] A support plate member 23 is attached to the bottom of the outer shell 19, thereby fixing the outer shell 19 to the main body A. The support plate member 23 functions as a structural support for the integrated module and requires a rigid structure; therefore, it is preferably made of stainless steel (SS304). In this embodiment, two support plate members 23 are attached to the bottom mounting holes of the outer shell 19.

[0048] A microcylinder module for blocking gas is provided inside the outer shell 19. The module includes a main outer shell 13, a thin cylinder 14, a blocking plate 15, a mounting plate 16, a module outer shell 17, and a circular support plate 18, and the main outer shell 13 is fixed to the inner wall of the outer shell 19 via the mounting plate 16.

[0049] The thin cylinder 14 is protected by the main body shell 13 and the module shell 17, and the output end of the cylinder 14 protrudes to the outside of the main body shell 13 and is connected to a circular support plate 18. This support plate 18 is tightly connected to a shut-off plate 15, and together they form an exhaust air flow damper for opening, closing and sealing the exhaust port E of the tank body.

[0050] Furthermore, the microcylinder module, which consists of the main body shell 13, thin cylinder 14, shut-off plate 15, mounting plate 16, module shell 17, and circular support plate 18, shuts off the gas and enables switching and particle retention functions for the entire system. The main body shell 13 is provided on the mounting plate 16 and is responsible for housing and fixing the shut-off module.

[0051] In selecting materials, aluminum alloy (AL6061) is chosen as the suitable material, taking into consideration rigidity, strength, durability, and lightness. The thin cylinder 14 within the microcylinder module provides a movable path, and the inflow of gas from the tank exhaust port E is temporarily blocked by a blocking circular unit consisting of a blocking plate 15 and a circular support plate 18.

[0052] The shielding plate 15 consists of a circular member made of polyurethane rubber, and has excellent airtightness and resistance to organic gases. To maintain good sealing and chemical resistance when shielding, a gasket is provided at the joint and it is fixed to the circular support plate 18 with bolts.

[0053] The thin cylinder 14 is fixed to one side of the mounting plate 16, the mounting plate 16 is located inside the outer shell 19, and the cylinder 14 is positioned inside the outer shell 19. The outer shell 19 is provided with a square hole that allows for the attachment and detachment of the cylinder 14, and a sealed connection between the outer shell 19 and the mounting plate 16 is required. Stainless steel (SS304) is preferably selected as the material for these components.

[0054] A sealing gasket is installed at the joint between the mounting plate 16 and the outer shell 19 to ensure sealing performance. The outer shell 19 and the main outer shell 13 together form an outer shell unit, housing the microcylinder 14 inside.

[0055] The circular support plate 18 is connected to the thin cylinder 14, forming a circular plate-shaped support structure. Considering its strength, rigidity, and chemical resistance, stainless steel (SS304) is preferred as the material for this support plate.

[0056] Furthermore, a curved pipe is positioned at the front end of the outer shell 19 as a tank exhaust port E for introducing process gas (IPA and N2 mixed gas) from the drying tank C. The aforementioned microcylinder module can be accommodated in the hollow space of the outer shell 19.

[0057] An upper cover 20 is provided on the top of the outer shell 19, and this upper cover is equipped with two gas inlet pipes. One is a gas input pipe for the atmospheric environment of the drying module, which is connected to the main body exhaust port G, and the other is an input pipe that works in conjunction with the IPA atomization system, which introduces a high-temperature particulate IPA and N2 mixed gas.

[0058] Furthermore, a main body pressure regulating damper 22 is provided at the main body exhaust port G, and this damper is controlled to open and close via a rotating connecting rod 21. One end of the rod 21 protrudes to the outside and is connected to an on / off valve 9, allowing for manual adjustment of the opening degree.

[0059] During the switching of the drying module to atmospheric gas, the rotary damper 22 needs to be opened and closed, which is controlled via the rotary connecting rod 21 and the manual valve 9. The opening degree is set by the on / off valve 9 to create a stable negative pressure environment without external piping.

[0060] Stainless steel (SS304) is considered the optimal material to meet the required rigidity, chemical resistance, and durability for these components.

[0061] Furthermore, the tank's exhaust port E is provided with an interface for attaching an exhaust air flow control sensor, and the discharge pipeline 1 is provided with an interface for attaching a factory exhaust air pressure sensor. This allows for precise control of exhaust by detecting the pressure inside the tank's exhaust port E with the exhaust air flow control sensor and detecting the air pressure inside the discharge pipeline 1 with the factory exhaust air pressure sensor.

[0062] A main circuit pressure regulating damper 10 is provided inside the pre-connecting conduit 7, to which a rotary damper connecting rod 8 is connected. One end of the connecting rod 8 protrudes outside the pre-connecting conduit 7 and is connected to a rotary damper on / off valve 9 for manual opening and closing operation.

[0063] The operator rotates the on / off valve 9, which in turn rotates the main circuit pressure regulating damper 10, controlling the opening and closing of the pre-connecting pipeline 7. The main circuit pressure regulating damper 10 is incorporated into a tubular structure and must maintain airtightness and low dust generation during rotation. Therefore, the damper 10 is provided with special ventilation holes to prevent gas leakage to the outside even during rotation.

[0064] In material selection, since rigidity, strength, and durability are required, stainless steel (SS304) is selected as the optimal material for the damper 10 and the on / off valve 9.

[0065] Furthermore, at least one ring-shaped gasket 2 is placed between the pre-connecting conduit 7 and the exhaust port of the outer shell 19. The gasket 2 is made of fluororubber (FKM) to ensure complete airtightness and prevent air leakage.

[0066] The intermediate air regulating pipe 3 is also an annular exhaust pipe that can be connected to the exhaust pipe 1, and a ring-shaped gasket 2 made of fluororubber is similarly provided between it and the pre-connecting pipe 7. The gasket 2 is bolted at the connection point to maintain structural airtightness. Stainless steel (SS304) is preferred for these components from the viewpoint of rigidity, heat resistance, and corrosion resistance.

[0067] The exhaust pipeline 1 is configured as an annular cylindrical exhaust pipe and is connected to the exhaust transport pipe on the factory side. A fluororubber ring-shaped gasket 2 is also placed between it and the intermediate air control pipeline 3, and an airtight connection is achieved by bolt fastening.

[0068] Gasket 2 is crucial for preventing gas volatilization and leakage. The fluororubber (FKM) used is a polymer elastomer with carbon-fluorine bonds, and it has superior physical properties compared to other rubber materials, particularly tensile strength, structural strength, and heat resistance. In static sealing applications, it can be used for extended periods in environments up to 230°C, and can withstand temporary high temperatures of up to 250°C.

[0069] Furthermore, it exhibits excellent chemical resistance, possessing superior corrosion resistance to organic solvents, inorganic acids, strong oxidizing agents, and oils and fats, making it extremely useful in the exhaust path of wafer drying systems.

[0070] Furthermore, the rotary cylinder module includes a rotary cylinder 12, a damper connecting rod 5, and a rotary cylinder casing 11, with the output end of the rotary cylinder 12 connected to the damper connecting rod 5. The damper connecting rod 5 is inserted into the internal air control pipe 3 and connected to a total circuit shut-off damper 6, thereby enabling opening and closing control of the total circuit.

[0071] The rotating cylinder casing 11 is positioned outside the rotating cylinder 12 and serves to protect it. Furthermore, four rotating cylinder support columns 4 are provided in the internal air conditioning pipe 3 and are used for the installation and fixing of the rotating cylinder 12. The bottom surface of the rotating cylinder 12 has four mounting holes, which ensure secure fixing.

[0072] The damper connecting rod 5 transmits the driving force from the rotating cylinder 12 to the total circuit blocking damper 6, and rotates the damper to control the blocking of the total circuit. In terms of design, it is necessary to maintain airtightness and low dust generation even during the rotation process, so the total circuit blocking damper 6 is provided with special ventilation holes to prevent gas leakage to the outside.

[0073] In selecting materials, stainless steel SS304 is used for the damper 6 and damper connecting rod 5 to ensure durability and rigidity. For the rotating cylinder outer shell 11, aluminum alloy AL6061 is selected to achieve both lightness and durability.

[0074] The rotating cylinder 12 is attached to the central air control pipe 3 and controls the opening and closing angle in conjunction with the damper connecting rod 5 and the total circuit blockage damper 6 to adjust the exhaust flow rate and velocity. By changing the airflow cross section according to the opening and closing angle, it becomes possible to precisely control the flow rate and velocity of the exhaust gas.

[0075] Furthermore, when the integrated module is operating, the mixed gas of IPA and N2 from the drying tank is discharged in sync with the gas injection. When stopped, the gas flow is shut off to avoid the suction of particles due to negative pressure and to achieve isolation. This shutoff is performed by driving the circular support plate 18.

[0076] The high-temperature, particulate mixed gas of IPA and N2 supplied from the IPA atomization system is always open, and leakage is normally prevented by the negative pressure inside the IPA container. When switching from the IPA & N2 mixed gas to N2, it is connected to this module to release residual pressure.

[0077] The multi-gas discharge integrated module according to the present invention operates in conjunction with the operating status of the wafer drying system, and switches according to the operating modes of standby, tank operation, main unit positive pressure, and stopped state.

[0078] As shown in Figure 4, the system configuration diagram of this integrated module shows the connections to each exhaust port and valve. The foamer exhaust port F is used as a normal opening for IPA foamer exhaust, and the tank exhaust port E functions as DUMP4 controlled by the microcylinder module.

[0079] The main unit's exhaust port G is equipped with a rotary damper 22, a rotary connecting rod 21, and an on / off valve 9, which function as DUMP3 to regulate the pressure of the main unit. The main circuit pressure regulating damper 10 and on / off valve 9 in the pre-connecting pipeline 7 function as DUMP2 to regulate the pressure of the main circuit.

[0080] In the central air conditioning duct 3, a DUMP 1, consisting of a rotating cylinder module and a total circuit flow-disconnecting damper 6, is installed to control the flow of the total circuit.

[0081] In this way, the foam generator exhaust port F, the tank exhaust port E, and the main body exhaust port G are each positioned on the outer shell 19, and the exhaust paths are integrated as needed, and the air is discharged together through the main circuit. The main body is provided with individually controllable valves, ensuring reliable control of pressure and open / closed states.

[0082] As shown in Figure 5, in the standby state, valve DUMP3, located at the main body exhaust port G, is half-open to allow ventilation, while the foaming device exhaust port F is normally open to allow exhaust from the IPA foaming device. The tank exhaust port E is closed by valve DUMP4, and the drying tank is in a standby state. The main circuit pressure regulating damper 10 of the pre-connecting pipeline 7 causes valve DUMP2 to be half-open to control ventilation, and the total circuit flow-stopping damper 6 opens valve DUMP1, allowing continuous exhaust from the IPA foaming device and the main body.

[0083] As shown in Figure 6, when the drying tank is in operation, valve DUMP3 of the main body exhaust port G remains half-open, and the foamer exhaust port F is normally open to exhaust air from the IPA foamer. Valve DUMP4 of the tank exhaust port E is opened to exhaust air from the drying tank. The main circuit pressure regulating damper 10 in the pre-connecting pipeline 7 causes valve DUMP2 to be half-open, and then valve DUMP1 is opened by the total circuit blockage damper 6, allowing all exhaust air from the drying tank, IPA foamer, and main body to enter an operational state.

[0084] As shown in Figure 7, under positive pressure conditions, valve DUMP3 of the main body exhaust port G is closed, and the IPA foamer exhaust port F functions as a normal open port. Valve DUMP4 of the tank exhaust port E is open to exhaust air from the drying tank. Valve DUMP2 is partially opened by the main circuit pressure regulating damper 10 of the pre-connecting pipeline 7, and valve DUMP1 is opened by the total circuit flow interruption damper 6, enabling exhaust from the IPA foamer and the drying tank.

[0085] As shown in Figure 8, in the stopped state, valve DUMP3 of the main body exhaust port G is closed, and the IPA foamer exhaust port F is also closed. Valve DUMP4 of the tank exhaust port E is closed, the main circuit pressure regulating damper 10 of the pre-connecting pipeline 7 is closed, and valve DUMP1 is also closed by the total circuit flow-stopping damper 6. As a result, all exhaust from the drying tank, IPA foamer, and main body is stopped, and the intrusion of gas from the outside is also prevented.

[0086] As described above, the multi-gas discharge integrated module of the present invention can achieve highly accurate exhaust control according to various operating modes in a wafer drying system.

[0087] The description of the configuration and operating state of the multi-gas discharge integrated module of the present invention is merely an example, and other modifications and substitutions that are easily conceivable to those skilled in the art are possible without departing from the spirit of the present invention. Accordingly, the technical scope of the present invention shall be defined by the matters described in the claims. [Explanation of symbols]

[0088] A-Main Unit B-IPA frother C-Drying tank body D-Hose E-tank body exhaust port F-Frother outlet G-Body exhaust port 1-Discharge pipe 2-ring gasket 3-Intermediate airway 4-Rotating Cylinder Support Column 5-Damper connecting rod 6. Total circuit interruption damper 7. Pre-connecting conduit 8-Rotation Damper Connecting Rod 9. On / Off Valve 10-Main circuit pressure regulating damper 11. Rotating Cylinder Outer Shell 12-Rotating Cylinder 13-Main body shell 14-Thin Cylinder 15- Barrier Plate 16-Mounting Plate 17-Module Outer Shell 18-Circular support plate 19- Outer shell 20-Top lid 21-Rotating connecting rod 22-Rotation Damper 23-Support plate member

Claims

1. A multi-gas discharge integrated module usable in wafer drying systems, The wafer drying system comprises a main unit, a drying tank, and an isopropyl alcohol foamer. The multi-gas discharge integrated module is provided within the wafer drying system, The aforementioned multi-gas emission integrated module is A tank exhaust port connected to the drying tank body via a pipeline and equipped with an exhaust air blockage damper inside, An open exhaust port is provided inside the main body, and is equipped with a main body pressure regulating damper inside. A foaming outlet connected to the isopropyl alcohol foaming device via a pipe, The tank body exhaust port, the main body exhaust port, and the foaming device exhaust port are each provided, and the outer shell has a cylinder inside, the cylinder is connected to the exhaust air blockage damper, A pre-connecting conduit, one end of which is connected to the exhaust port of the outer shell, and the other end of which is connected to the internal air conditioning conduit, and which has a main circuit pressure regulating damper inside, An intermediate air conditioning pipe having an intake end connected to the pre-connecting pipe and an exhaust end connected to the discharge pipe, with a rotating cylinder module at the top, the rotating cylinder module being connected to a total circuit shut-off damper in the intermediate air conditioning pipe, A multi-gas discharge integrated module characterized by comprising a discharge pipeline whose exhaust end extends outside the wafer drying system and is connected to an exhaust transport pipeline on the factory side.

2. The multi-gas discharge integrated module according to claim 1, characterized in that at least one annular gasket is provided between the discharge pipeline and the intermediate air control pipeline, and the annular gasket is made of fluororubber.

3. The multi-gas discharge integrated module according to claim 1, wherein the rotary cylinder module comprises a rotary cylinder, a damper connecting rod, and a rotary cylinder shell, the output end of the rotary cylinder being connected to the damper connecting rod, the damper connecting rod extending into an internal air control pipe and connected to a total circuit shut-off damper, and the rotary cylinder shell covering the outside of the rotary cylinder.

4. The multi-gas discharge integrated module according to claim 1, characterized in that the main circuit pressure regulating damper in the pre-connecting pipeline is connected to a rotary damper connecting rod, and one end of the rotary damper connecting rod protrudes outside the pre-connecting pipeline and is connected to a rotary damper on / off valve.

5. The multi-gas discharge integrated module according to claim 1, characterized in that at least one annular gasket is provided between the pre-connecting pipeline and the exhaust port of the outer shell, and the annular gasket is made of fluororubber.

6. The multi-gas discharge integrated module according to claim 1, wherein a microcylinder module for blocking gas is provided within the outer shell, the microcylinder module comprises a main outer shell, a cylinder, a shut-off plate, a mounting plate, a module outer shell, and a circular support plate, the main outer shell is fixed to the inner wall of the outer shell via the mounting plate, a cylinder is provided within the main outer shell, the cylinder is a thin cylinder, surrounded by the main outer shell and the module outer shell, the output end of the thin cylinder extends to the outside of the module outer shell and is connected to the circular support plate, the circular support plate is tightly connected to the shut-off plate, and the circular support plate and the shut-off plate constitute an exhaust air flow blocking damper that can be opened and closed to close the exhaust port of the tank body.

7. The multi-gas discharge integrated module according to claim 1, characterized in that a main body pressure regulating damper is provided at the main body exhaust port, the main body pressure regulating damper is connected to a rotary damper connecting rod, and one end of the rotary damper connecting rod protrudes outside the pre-connecting pipeline and is connected to a rotary damper on / off valve.

8. The multi-gas discharge integrated module according to claim 1, characterized in that an openable and closable upper shell is provided on the upper part of the outer shell, the foam generator exhaust port and the main body exhaust port are provided on the upper shell, and a tank body exhaust port is provided on the side wall of the outer shell.

9. The multi-gas discharge integrated module according to claim 1, characterized in that a support plate is provided at the bottom of the outer shell, and the outer shell is fixed to the main body via the support plate.

10. The multi-gas discharge integrated module according to claim 1, characterized in that an interface for attaching an exhaust air flow interruption sensor is provided at the exhaust port of the tank body, and an interface for attaching a factory exhaust air pressure sensor is provided at the discharge pipeline.

11. The operating states of the multi-gas discharge integrated module include standby, tank operation, main unit positive pressure, and stopped states. In standby mode, the main unit's exhaust port functions as a constantly open vent, the foamer's exhaust port is half-open to exhaust air from the isopropyl alcohol foamer, and the tank's exhaust port is closed to ensure continuous exhaust from the isopropyl alcohol foamer and the main unit. When the tank is operating, the main unit exhaust port functions as a constantly open vent, the foaming device exhaust port is half-open to exhaust air from the isopropyl alcohol foaming device, the tank exhaust port is open, the main circuit pressure regulating damper is half-open, the total circuit flow-out damper is open, and the exhaust of the tank, isopropyl alcohol foaming device, and main unit is activated. In a positive pressure state, the main unit exhaust port functions as a normally open vent, the foam generator exhaust port is closed, the tank exhaust port is open, the main circuit pressure regulating damper is half-open, the total circuit flow-out damper is open, and exhaust from the tank and main unit is activated. The multi-gas discharge integrated module according to claim 1, characterized in that, in the stopped state, the main body exhaust port is sealed, the foaming device exhaust port is closed, the tank exhaust port is closed, the main circuit pressure regulating damper is closed, the total circuit pass-through damper is closed, and exhaust from the tank, isopropyl alcohol foaming device and main body is all stopped, preventing gas from entering from the outside.

12. A wafer drying system characterized by comprising a multi-gas discharge integrated module according to any one of claims 1 to 11.

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