Semiconductor device and method for manufacturing a semiconductor device

Abstract

To provide a semiconductor device capable of reducing on-resistance.SOLUTION: A semiconductor device of an embodiment has a first electrode, a second electrode, a semiconductor layer provided between the first electrode and the second electrode and having a first surface and a second surface and including silicon, an n-type first semiconductor region, a p-type second semiconductor region between the first semiconductor region and the first surface, an n-type third semiconductor region between the second semiconductor region and the first surface, a gate electrode opposite the second semiconductor region, a gate insulating layer between the second semiconductor region and the gate electrode, a metal silicide layer between the first electrode and the second semiconductor region, and between the first electrode and the third semiconductor region and including the top surface, a first bottom surface in contact with the third semiconductor region and a first side surface in contact with the third semiconductor region, and gold or platinum group element, and n-type impurity concentration in the third semiconductor region monotonically decreases from a position in contact with the first bottom surface of the third semiconductor region toward the second electrode.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] Embodiments of the present invention relate to a semiconductor device and a method for manufacturing the semiconductor device.

Background Art

[0002] In a Metal Oxide Semiconductor Field Effect Transistor (MOSFET), it is desirable to reduce the contact resistance between an electrode and a semiconductor region. By reducing the contact resistance between the electrode and the semiconductor region, the on-resistance of the MOSFET is reduced.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The problem to be solved by the present invention is to provide a semiconductor device capable of reducing the on-resistance.

Means for Solving the Problems

[0005] The semiconductor device of the embodiment includes a semiconductor layer containing silicon (Si) having a first electrode, a second electrode, a first surface facing the first electrode and a second surface facing the second electrode, an n-type first semiconductor region provided in the semiconductor layer, a p-type second semiconductor region provided in the semiconductor layer and located between the first semiconductor region and the first surface, an n-type third semiconductor region provided in the semiconductor layer and located between the second semiconductor region and the first surface, a gate electrode provided on the side of the first surface relative to the semiconductor layer and facing the second semiconductor region, and a gate insulating layer provided between the second semiconductor region and the gate electrode. The invention provides a metal silicide layer between the first electrode and the second semiconductor region, and between the first electrode and the third semiconductor region, which includes an upper surface in contact with the first electrode, a first bottom surface in contact with the third semiconductor region, and a first side surface in contact with the third semiconductor region, and which contains at least one metal element selected from the group consisting of gold (Au), ruthenium (Ru), rhodium (Rh), palladium (Pd), osmium (Os), iridium (Ir), and platinum (Pt), wherein in a first direction from the first electrode toward the second electrode, the n-type impurity concentration of the third semiconductor region decreases monotonically from the first bottom surface toward the second electrode, and the first semiconductor region contains the at least one metal element. Furthermore, the semiconductor layer is single-crystal silicon. . [Brief explanation of the drawing]

[0006] [Figure 1] A schematic cross-sectional view of the semiconductor device according to the first embodiment. [Figure 2] An enlarged schematic cross-sectional view of a part of the semiconductor device of the first embodiment. [Figure 3] A diagram showing the distribution of n-type impurity concentrations in the semiconductor device of the first embodiment. [Figure 4] Equivalent circuit diagram of the semiconductor device of the first embodiment. [Figure 5] A schematic cross-sectional view of a semiconductor device of the first embodiment during the manufacturing process. [Figure 6]A schematic cross-sectional view of a semiconductor device of the first embodiment during the manufacturing process. [Figure 7] A schematic cross-sectional view of a semiconductor device of the first embodiment during the manufacturing process. [Figure 8] A schematic cross-sectional view of a semiconductor device of the first embodiment during the manufacturing process. [Figure 9] A schematic cross-sectional view of a semiconductor device of the first embodiment during the manufacturing process. [Figure 10] A schematic cross-sectional view of a semiconductor device of the first embodiment during the manufacturing process. [Figure 11] A schematic cross-sectional view of a semiconductor device of the first embodiment during the manufacturing process. [Figure 12] A schematic cross-sectional view of a semiconductor device of the first embodiment during the manufacturing process. [Figure 13] A schematic cross-sectional view of a semiconductor device of the first embodiment during the manufacturing process. [Figure 14] Enlarged schematic cross-sectional view of a portion of the semiconductor device used in the comparative example. [Figure 15] A diagram showing the distribution of n-type impurity concentrations in the comparative semiconductor device. [Figure 16] An enlarged schematic cross-sectional view of a part of the semiconductor device of the second embodiment. [Figure 17] A schematic cross-sectional view of a semiconductor device in the manufacturing process of the second embodiment. [Figure 18] A schematic cross-sectional view of a semiconductor device in the manufacturing process of the second embodiment. [Figure 19] A schematic cross-sectional view of a semiconductor device in the manufacturing process of the second embodiment. [Figure 20] A schematic cross-sectional view of a semiconductor device in the manufacturing process of the second embodiment. [Figure 21] A schematic cross-sectional view of a semiconductor device in the manufacturing process of the second embodiment. [Figure 22] A schematic cross-sectional view of a semiconductor device in the manufacturing process of the second embodiment. [Figure 23] A schematic cross-sectional view of a semiconductor device in the manufacturing process of the second embodiment. [Figure 24] A schematic cross-sectional view of a semiconductor device in the manufacturing process of the second embodiment. [Figure 25] A schematic cross-sectional view of a semiconductor device in the manufacturing process of the second embodiment. [Figure 26] Enlarged schematic cross-sectional view of a part of a semiconductor device according to a modification of the second embodiment. [Figure 27] Schematic cross-sectional view of a semiconductor device according to the third embodiment. [Figure 28] Schematic cross-sectional view of a semiconductor device according to the fourth embodiment. **Embodiments for Carrying Out the Invention**

[0007] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, the same or similar members are denoted by the same reference numerals, and the description of the members once described will be omitted as appropriate.

[0008] Also, in the following description, when notations of n + , n, n - and p + , p, p - are used, these notations represent the relative levels of impurity concentrations in each conductivity type. That is, n + indicates that the impurity concentration of the n-type is relatively higher than that of n, and n - indicates that the impurity concentration of the n-type is relatively lower than that of n. Also, p + indicates that the impurity concentration of the p-type is relatively higher than that of p, and p - indicates that the impurity concentration of the p-type is relatively lower than that of p. Note that the n + type and the n-type may be simply referred to as the n-type, and the p + type and the p - type may be simply referred to as the p-type.

[0009] The impurity concentration of a semiconductor device can be measured, for example, by Secondary Ion Mass Spectrometry (SIMS). Also, the relative level of the impurity concentration of a semiconductor device can be determined, for example, from the level of the carrier concentration obtained by Scanning Capacitance Microscopy (SCM). Also, distances such as the width and depth of the impurity region of a semiconductor device can be obtained, for example, by SIMS. Also, distances such as the width and depth of the impurity region of a semiconductor device can be obtained, for example, from the SCM image.

[0010] The depth of the conductive layer and the thickness of the insulating layer of a semiconductor device can be measured, for example, using images from SIMS or a Transmission Electron Microscope (TEM).

[0011] Material identification can be performed, for example, using Energy Dispersive X-ray Spectroscopy (EDX). Shape identification can also be performed, for example, using TEM images.

[0012] (First Embodiment) The semiconductor device of the first embodiment includes a semiconductor layer containing silicon (Si) having a first electrode, a second electrode, a first surface facing the first electrode and a second surface facing the second electrode, an n-type first semiconductor region provided in the semiconductor layer, a p-type second semiconductor region provided in the semiconductor layer and located between the first semiconductor region and the first surface, an n-type third semiconductor region provided in the semiconductor layer and located between the second semiconductor region and the first surface, a gate electrode provided on the side of the first surface relative to the semiconductor layer and facing the second semiconductor region, a gate insulating layer provided between the second semiconductor region and the gate electrode, and a first The present invention provides a metal silicide layer between the electrode and the second semiconductor region, and between the first electrode and the third semiconductor region, which includes an upper surface in contact with the first electrode, a first bottom surface in contact with the third semiconductor region, and a first side surface in contact with the third semiconductor region, and which contains at least one metal element selected from the group consisting of gold (Au), ruthenium (Ru), rhodium (Rh), palladium (Pd), osmium (Os), iridium (Ir), and platinum (Pt), wherein when the direction from the first electrode toward the second electrode is defined as the first direction, the n-type impurity concentration in the third semiconductor region in the first direction decreases monotonically from the position in contact with the first bottom surface of the third semiconductor region toward the second electrode.

[0013] The semiconductor device of the first embodiment is a vertical transistor. The semiconductor device of the first embodiment is a vertical power MOSFET. The semiconductor device of the first embodiment is MOSFET100. MOSFET100 is an n-channel MOSFET with electrons as carriers.

[0014] Figure 1 is a schematic cross-sectional view of a semiconductor device according to the first embodiment. Figure 2 is an enlarged schematic cross-sectional view of a part of the semiconductor device according to the first embodiment. Figure 2 is a diagram showing the contact structure of MOSFET 100.

[0015] The MOSFET 100 of the first embodiment comprises a semiconductor layer 10, a source electrode 12, a drain electrode 14, a gate electrode 16, a gate insulating layer 18, a metal silicide layer 20, and an interlayer insulating layer 22.

[0016] The source electrode 12 is an example of a first electrode. The drain electrode 14 is an example of a second electrode.

[0017] The semiconductor layer 10 is n + A drain region 30 of type n, a drift region 32 of type n, a body region 34 of type p, and n + It includes a source region 36 of type p. The body region 34 is a low-concentration region 34a of type p + It includes a high-concentration region 34b of the type.

[0018] The drift region 32 is an example of the first semiconductor region. The body region 34 is an example of the second semiconductor region. The source region 36 is an example of the third semiconductor region.

[0019] The semiconductor layer 10 is provided between the source electrode 12 and the drain electrode 14.

[0020] The semiconductor layer 10 comprises a first surface ("F1" in Figure 1) and a second surface ("F2" in Figure 1). The second surface F2 faces the first surface F1. The second surface F2 is parallel to the first surface F1. The first surface F1 is the front surface of the semiconductor layer 10, and the second surface F2 is the back surface of the semiconductor layer 10.

[0021] The first surface F1 faces the source electrode 12. The second surface F2 faces the drain electrode 14.

[0022] The direction from the source electrode 12 toward the drain electrode 14 is defined as the first direction. The first direction is perpendicular to the first plane F1 and the second plane F2.

[0023] The direction perpendicular to the first direction is defined as the second direction. The second direction is parallel to the first face F1 and the second face F2.

[0024] Hereafter, "depth" refers to the depth relative to the first surface F1. In other words, "depth" refers to the distance in the first direction relative to the first surface F1.

[0025] The semiconductor layer 10 contains silicon (Si). The semiconductor layer 10 is, for example, silicon (Si). The semiconductor layer 10 is, for example, single-crystal silicon (Si).

[0026] The surface of the semiconductor layer 10 is, for example, a surface tilted at an angle of 0 to 8 degrees with respect to the (100) plane of silicon. The first surface F1 is, for example, a surface tilted at an angle of 0 to 8 degrees with respect to the (100) plane of silicon.

[0027] n + The drain region 30 is provided within the semiconductor layer 10. The drain region 30 contains n-type impurities. The n-type impurities are, for example, phosphorus (P) or arsenic (As). The concentration of n-type impurities in the drain region 30 is, for example, 1 × 10⁻⁶. 18 atoms / cm 3 The above 1 x 10 21 atoms / cm 3 The following applies:

[0028] The n-type drift region 32 is provided within the semiconductor layer 10. The drift region 32 is located between the drain region 30 and the first surface F1. The drift region 32 is provided on the drain region 30.

[0029] The drift region 32 contains n-type impurities. These n-type impurities are, for example, phosphorus (P) or arsenic (As). The concentration of n-type impurities in the drift region 32 is, for example, 1 × 10⁻⁶. 14 atoms / cm 3 The above 1 x 10 18 atoms / cm 3 The following applies:

[0030] The drift region 32 contains at least one metallic element selected from the group consisting of gold (Au), ruthenium (Ru), rhodium (Rh), palladium (Pd), osmium (Os), iridium (Ir), and platinum (Pt).

[0031] The p-shaped body region 34 is provided within the semiconductor layer 10. The body region 34 is provided between the drift region 32 and the first surface F1. When the MOSFET 100 is ON, a channel is formed in the region where the gate insulating layer 18 and the body region 34 are in contact.

[0032] As shown in Figure 2, the body region 34 consists of a p-type low-concentration region 34a and p + It includes a high-concentration region 34b. The high-concentration region 34b is located between the low-concentration region 34a and the source electrode 12. The high-concentration region 34b is located between the low-concentration region 34a and the metal silicide layer 20.

[0033] The body region 34 is in contact with the metal silicide layer 20. The high-concentration region 34b is in contact with the metal silicide layer 20.

[0034] Body region 34 contains p-type impurities. The p-type impurities are, for example, boron (B). The concentration of p-type impurities in body region 34 is, for example, 1 × 10⁻⁶. 16 atoms / cm 3 The above 1 x 10 21 atoms / cm 3 The following applies:

[0035] The p-type impurity concentration in the low-concentration region 34a is, for example, 1 × 10⁻⁶. 16 atoms / cm 3 The above 1 x 1018 atoms / cm 3 It is less than 1 × 10⁻⁶. The p-type impurity concentration in the high-concentration region 34b is, for example, 1 × 10⁻⁶. 18 atoms / cm 3 The above 1 x 10 21 atoms / cm 3 The following applies:

[0036] n + The source region 36 of the mold is provided within the semiconductor layer 10. The source region 36 is located between the body region 34 and the first surface F1.

[0037] The source region 36 is located between the body region 34 and the metal silicide layer 20. The source region 36 is in contact with the metal silicide layer 20.

[0038] Source region 36 contains n-type impurities. These n-type impurities are, for example, phosphorus (P) or arsenic (As). The concentration of n-type impurities in source region 36 is, for example, 1 × 10⁻⁶. 19 atoms / cm 3 The above 1 x 10 21 atoms / cm 3 The following applies:

[0039] The gate electrode 16 is provided on the semiconductor layer 10. The gate electrode 16 is provided on the side of the first surface F1 relative to the semiconductor layer 10. The gate electrode 16 is provided on the first surface F1.

[0040] The gate electrode 16 extends, for example, in a third direction that is perpendicular to the first direction and perpendicular to the second direction. The gate electrode 16 is repeatedly arranged, for example, in the second direction.

[0041] The gate electrode 16 faces the body region 34. The gate electrode 16 faces the drift region 32. The gate electrode 16 faces the source region 36.

[0042] The gate electrode 16 is a conductor. The gate electrode 16 is, for example, polycrystalline silicon containing n-type or p-type impurities.

[0043] The gate insulating layer 18 is provided between the gate electrode 16 and the semiconductor layer 10. The gate insulating layer 18 is provided between the gate electrode 16 and the body region 34. The gate insulating layer 18 is provided between the gate electrode 16 and the drift region 32. The gate insulating layer 18 is provided between the gate electrode 16 and the source region 36.

[0044] The gate insulating layer 18 is an insulator. For example, the gate insulating layer 18 is silicon oxide.

[0045] The interlayer insulating layer 22 is provided between the gate electrode 16 and the source electrode 12. The interlayer insulating layer 22 has the function of electrically isolating the gate electrode 16 and the source electrode 12.

[0046] The interlayer insulating layer 22 is an insulator. The interlayer insulating layer 22 is, for example, silicon oxide.

[0047] The source electrode 12 is provided on the side of the first surface F1 of the semiconductor layer 10.

[0048] The source electrode 12 is electrically connected to the source region 36. The source electrode 12 is electrically connected to the body region 34.

[0049] The source electrode 12 is made of metal. For example, the source electrode 12 has a layered structure of titanium nitride (TiN) and aluminum (Al).

[0050] The drain electrode 14 is provided on the side of the second surface F2 of the semiconductor layer 10. The drain electrode 14 is provided on the second surface F2 of the semiconductor layer 10. The drain electrode 14 is electrically connected to the drain region 30. The drain electrode 14 is in contact with the drain region 30.

[0051] The drain electrode 14 is made of metal. The drain electrode 14 has a layered structure of materials selected from, for example, titanium (Ti), aluminum (Al), nickel (Ni), copper (Cu), silver (Ag), and gold (Au).

[0052] The metal silicide layer 20 is provided between the source electrode 12 and the semiconductor layer 10.

[0053] The metal silicide layer 20 is provided between the source electrode 12 and the source region 36. The metal silicide layer 20 is in contact with the source electrode 12. The metal silicide layer 20 is in contact with the source region 36.

[0054] The metal silicide layer 20 is provided between the source electrode 12 and the body region 34. The metal silicide layer 20 is in contact with the body region 34. The metal silicide layer 20 is in contact with the high-concentration region 34b.

[0055] The metal silicide layer 20 includes an upper surface TS, a first bottom surface BS1, a second bottom surface BS2, and a first side surface SS1. The upper surface TS of the metal silicide layer 20 is in contact with the source electrode 12. The first bottom surface BS1, the second bottom surface BS2, and the first side surface SS1 of the metal silicide layer 20 are in contact with the semiconductor layer 10.

[0056] The first bottom surface BS1 of the metal silicide layer 20 is in contact with the source region 36. The second bottom surface BS2 of the metal silicide layer 20 is in contact with the high-concentration region 34b. The first side surface SS1 of the metal silicide layer 20 is in contact with the source region 36.

[0057] The position of the first bottom surface BS1 in the first direction is on the side of the second surface F2 than the position of the first surface F1 in the first direction. The position of the first bottom surface BS1 in the first direction is on the side of the second surface F2 than the position of the interface between the gate insulating layer 18 and the source region 36 in the first direction. The position of the first bottom surface BS1 in the first direction is on the side of the second surface F2 than the position of the interface between the interlayer insulating layer 22 and the source region 36 in the first direction.

[0058] The distance from the second surface F2 to the first bottom surface BS1 is smaller than the distance from the second surface F2 to the first surface F1. The distance from the second surface F2 to the metal silicide layer 20 is smaller than the distance from the second surface F2 to the gate insulating layer 18.

[0059] The distance in the first direction between the first surface F1 and the first bottom surface BS1 (d1 in Figure 2) is, for example, between 10 nm and 100 nm.

[0060] The position of the first base BS1 in a first direction and the position of the second base BS2 in a first direction are, for example, the same. The first base BS1 and the second base BS2 are, for example, in the same plane.

[0061] The first side surface SS1 may have a tapered shape.

[0062] The metal silicide layer 20 contains at least one metallic element selected from the group consisting of gold (Au), ruthenium (Ru), rhodium (Rh), palladium (Pd), osmium (Os), iridium (Ir), and platinum (Pt). The metal silicide layer 20 contains gold or platinum group element silicides.

[0063] The metal silicide layer 20 includes, for example, platinum silicide.

[0064] Figure 3 shows the distribution of n-type impurity concentration in the semiconductor device of the first embodiment. Figure 3 shows the distribution of n-type impurity concentration in the depth direction of the source region 36 of MOSFET 100. Figure 3 shows the distribution of n-type impurity concentration in the first direction of the source region 36 of MOSFET 100.

[0065] Figure 3 shows the distribution of n-type impurity concentrations along the dotted line AA' in Figure 2. Figure 3 shows an example where the n-type impurity contained in the source region 36 is phosphorus (P).

[0066] The horizontal axis in Figure 3 shows the position of the first surface F1 and the position of the first base surface BS1.

[0067] As shown in Figure 3, the phosphorus concentration in the depth direction of the source region 36 decreases monotonically from the position where the source region 36 contacts the first bottom surface BS1 of the metal silicide layer 20 toward the drain electrode 14. The phosphorus concentration in the depth direction of the source region 36 is maximum at the position where the source region 36 contacts the first bottom surface BS1.

[0068] The n-type impurity concentration in the source region 36 at the position in contact with the first bottom surface BS1 is, for example, 2 × 10 19 atoms / cm 3 That's all.

[0069] The thickness of the metal silicide layer 20 in the first direction is, for example, 10 nm to 50 nm.

[0070] The metal silicide layer 20 acts as a diffusion source for metal elements during the manufacturing of the MOSFET 100. The metal elements diffused from the metal silicide layer 20 into the drift region 32 function as lifetime killers.

[0071] Figure 4 is an equivalent circuit diagram of the semiconductor device according to the first embodiment. A pn ​​diode is connected in parallel with the transistor as a body diode between the source electrode 12 and the drain electrode 14. The source electrode 12 functions as the anode electrode of the pn junction diode, and the drain electrode 14 functions as the cathode electrode of the pn junction diode.

[0072] For example, consider the case where MOSFET 100 is used as a switching element connected to an inductive load. When MOSFET 100 is off, a load current caused by the inductive load may apply a positive voltage to the source electrode 12 relative to the drain electrode 14. In this case, a forward current flows through the pn junction diode. In other words, the pn junction diode turns on.

[0073] During the operation of switching a pn junction diode from the ON state to the OFF state, i.e., the reverse recovery operation, a reverse recovery current flows through the pn junction diode. If the carrier lifetime of the drift region 32 is long, the carriers injected into the drift region 32 are discharged to the source electrode 12 and drain electrode 14, so a large reverse recovery current flows during the reverse recovery operation, resulting in large switching losses.

[0074] In MOSFET 100, a lifetime-killer metal element is introduced into the drift region 32 using thermal diffusion from the metal silicide layer 20. Consequently, the carrier lifetime in the drift region 32 is shortened, and carriers injected into the drift region 32 are recombined or trapped in energy levels within the drift region 32 and are not discharged to the source electrode 12 and drain electrode 14, thus reducing the reverse recovery current. Therefore, switching losses during reverse recovery operation can be reduced.

[0075] Next, an example of a method for manufacturing the semiconductor device according to the first embodiment will be described.

[0076] The first embodiment of the semiconductor device manufacturing method involves ion implanting n-type or p-type impurities into a silicon (Si) semiconductor layer to form impurity regions, depositing a first metal film containing at least one metal element selected from the group consisting of gold (Au), ruthenium (Ru), rhodium (Rh), palladium (Pd), osmium (Os), iridium (Ir), and platinum (Pt) on the impurity regions, performing a first heat treatment at a temperature of 100°C to 550°C to react the first metal film with the impurity regions to form a metal silicide layer, removing the unreacted first metal film using a solution containing aqua regia, etching the impurity regions beneath the metal silicide layer using a solution containing hydrofluoric acid, and depositing a second metal film on the silicide layer.

[0077] Figures 5, 6, 7, 8, 9, 10, 11, 12, and 13 are schematic cross-sectional views of a semiconductor device of the first embodiment during the manufacturing process. Figures 5 to 13 show the cross-section corresponding to Figure 2 of the first embodiment.

[0078] The following explanation will use the example where the first metal film is a platinum film and the second metal film is a laminated film of titanium nitride and aluminum. Furthermore, the explanation will also use the example where the deposition of the first metal film and the first heat treatment are performed using the same process.

[0079] First, n + A semiconductor layer 10 including a drain region 30 of type n and a drift region 32 of type n is subjected to a known process technique to create a low-concentration region 34a of type p, n + The source region 36, gate insulating layer 18, gate electrode 16, and interlayer insulating layer 22 of the mold are formed (Figure 5). The semiconductor layer 10 is, for example, single-crystal silicon.

[0080] The low-concentration region 34a of the p-type impurity is formed, for example, by ion implanting boron (B), which is a p-type impurity, into the semiconductor layer 10. + The source region 36 of this type is formed, for example, by ion implanting phosphorus (P), an n-type impurity, into the semiconductor layer 10. The source region 36 is an example of an impurity region.

[0081] Next, an opening 40 is formed in the interlayer insulating layer 22 above the source region 36 (Figure 6). The opening 40 is formed, for example, using photolithography and reactive ion etching (RIE).

[0082] Next, using the interlayer insulating layer 22 as a mask material, p-type impurities, specifically boron (B), are ion-implanted into the semiconductor layer 10 through the opening 40 (Figure 7). By ion-implanting boron (B) into the semiconductor layer 10, p + This forms a high-concentration region 34b of the type. The high-concentration region 34b is an example of an impurity region.

[0083] Next, a portion of the interlayer insulating layer 22 is removed by etching (Figure 8). For etching the interlayer insulating layer 22, for example, a wet etching method is used. For etching the interlayer insulating layer 22, for example, a solution containing hydrofluoric acid is used.

[0084] By etching a portion of the interlayer insulating layer 22, the width of the opening 40 in the second direction is increased. By etching a portion of the interlayer insulating layer 22, the source region 36 is exposed at the bottom of the opening 40.

[0085] Next, a platinum film 42 is deposited on the semiconductor layer 10 (Figure 9). The platinum film 42 is an example of the first metal film. The platinum film 42 is formed, for example, by sputtering.

[0086] The platinum film 42 is deposited at a temperature of, for example, 100°C to 550°C. For example, when the platinum film 42 is deposited by sputtering, the platinum film 42 is deposited when the temperature of the semiconductor layer 10 is between 100°C and 550°C.

[0087] The deposition of the platinum film 42 is an example of the first heat treatment. The first heat treatment causes the platinum film 42 to react with the semiconductor layer 10, forming a platinum silicide layer 43 (Figure 10). The platinum film 42 reacts with the source region 36 and the high-concentration region 34b to form the platinum silicide layer 43. The platinum silicide layer 43 is an example of a metal silicide layer.

[0088] The deposition of the platinum film 42 and the first heat treatment may be performed as different processes. If the deposition of the platinum film 42 and the first heat treatment are performed as different processes, for example, the temperature at which the platinum film 42 is deposited may be lower than the temperature at which the first heat treatment is performed.

[0089] Next, the unreacted platinum film 42 is removed (Figure 11). The unreacted platinum film 42 is removed using a solution containing aqua regia as the etching solution.

[0090] Next, the semiconductor layer 10 beneath the platinum silicide layer 43 is etched (Figure 12). The etching solution for the semiconductor layer 10 is a solution containing hydrofluoric acid. The etching solution is, for example, dilute hydrofluoric acid. The etching solution may also contain an oxidizing agent, such as hydrogen peroxide.

[0091] The semiconductor layer 10 is etched using a so-called metal-assisted chemical etching method (MacEtch method). The platinum silicide layer 43 acts as a catalyst, selectively etching the semiconductor layer 10 beneath the platinum silicide layer 43. The source region 36 and the high-concentration region 34b beneath the platinum silicide layer 43 are selectively etched. As the semiconductor layer 10 is etched, the bottom surface of the platinum silicide layer 43 moves to the side of the second surface F2, as shown in Figure 12.

[0092] When etching the semiconductor layer 10 beneath the platinum silicide layer 43, the bottom surface of the platinum silicide layer 43 is etched to a depth exceeding the peak position of the depth-direction distribution of n-type impurity concentration in the source region 36. The amount of etching of the semiconductor layer 10 can be controlled, for example, by controlling the etching time.

[0093] Next, a second heat treatment is performed at a higher temperature than the first heat treatment. The second heat treatment diffuses the platinum (Pt) contained in the platinum silicide layer 43 into the semiconductor layer 10. The second heat treatment diffuses the platinum (Pt) into the drift region 32.

[0094] The temperature of the second heat treatment is, for example, between 700°C and 1000°C. The second heat treatment is carried out, for example, in a non-oxidizing atmosphere. The second heat treatment is carried out, for example, in a nitrogen atmosphere or an argon atmosphere.

[0095] Next, a laminated film 44 of titanium nitride and aluminum is deposited on the platinum silicide layer 43 (Figure 13). The laminated film 44 is an example of a second metal film. The laminated film 44 ultimately becomes the source electrode 12.

[0096] Subsequently, a drain electrode 14 is formed on the second surface F2 side of the semiconductor layer 10 using a known process technique.

[0097] By the manufacturing method described above, the MOSFET 100 of the first embodiment shown in Figures 1 and 2 is manufactured.

[0098] Next, the operation and effects of the semiconductor device and the method for manufacturing the semiconductor device according to the first embodiment will be described.

[0099] In the first embodiment of the MOSFET 100, the drift region 32 contains at least one metallic element selected from the group consisting of gold (Au), ruthenium (Ru), rhodium (Rh), palladium (Pd), osmium (Os), iridium (Ir), and platinum (Pt). The drift region 32 of the MOSFET 100 in the first embodiment contains gold or a platinum group element. The gold or platinum group element in the drift region 32 is a metallic element diffused from the metal silicide layer 20 containing gold or a platinum group element during the manufacturing process of the MOSFET 100.

[0100] Gold or platinum group elements contained in the drift region 32 function as lifetime killers. This shortens the carrier lifetime of the drift region 32. Consequently, the reverse recovery current of the pn junction diode included as a body diode in the MOSFET 100 decreases. Therefore, the switching loss of the MOSFET 100 is reduced.

[0101] Gold or platinum group element silicides tend to have a high Schottky barrier, particularly between them and n-type semiconductors containing silicon (Si). Therefore, in MOSFETs containing a metal silicide layer containing gold or platinum group elements, the metal silicide layer and n-type semiconductors tend to have a high Schottky barrier. + The contact resistance between the metal silicide layer and the source region may increase. + A high contact resistance between the source region and the MOSFET is problematic because it increases the on-resistance of the MOSFET.

[0102] Figure 14 is an enlarged schematic cross-sectional view of a part of the semiconductor device of the comparative example. Figure 14 corresponds to Figure 2 of the first embodiment.

[0103] The comparative example MOSFET 900 differs from the MOSFET 100 of the first embodiment in that the position of the first bottom surface BS1 in the first direction and the position of the first surface F1 in the first direction are approximately the same. In other words, the comparative example MOSFET 900 differs from the MOSFET 100 of the first embodiment in that the first bottom surface BS1 and the first surface F1 are approximately in the same plane.

[0104] The comparative example MOSFET 900 can be manufactured, for example, by omitting the step of etching the semiconductor layer 10 beneath the metal silicide layer 20 from the manufacturing process of the MOSFET 100 of the first embodiment. Since the semiconductor layer 10 beneath the metal silicide layer 20 is not etched after the formation of the metal silicide layer 20, the position of the first bottom surface BS1 in the first direction and the position of the first surface F1 in the first direction can be made to coincide approximately.

[0105] Figure 15 shows the distribution of n-type impurity concentration in a comparative example semiconductor device. Figure 15 shows the distribution of n-type impurity concentration in the depth direction of the source region 36 of MOSFET 900. Figure 15 shows the distribution of n-type impurity concentration in the first direction of the source region 36 of MOSFET 900. Figure 15 corresponds to Figure 3 of the first embodiment.

[0106] Figure 15 shows the distribution of n-type impurity concentrations along the dotted line BB' in Figure 14. Figure 15 shows an example where the n-type impurity contained in the source region 36 is phosphorus (P).

[0107] The horizontal axis of Figure 15 shows the position of the first surface F1 and the position of the first base surface BS1.

[0108] As shown in Figure 15, the phosphorus concentration in the depth direction of the source region 36 initially increases towards the drain electrode 14 from the position where the source region 36 contacts the first bottom surface BS1 of the metal silicide layer 20, and then begins to decrease. The phosphorus concentration in the depth direction of the source region 36 is not maximum at the position where the source region 36 contacts the first bottom surface BS1.

[0109] The source region 36 is formed by ion implanting phosphorus (P) into the semiconductor layer 10 from the first surface F1. Therefore, the phosphorus concentration in the depth direction of the source region 36 forms a distribution with a peak at a position deeper than the first surface F1. Consequently, in the comparative example MOSFET 900, where the position of the first surface F1 and the position of the first bottom surface BS1 are approximately coincidental, the phosphorus concentration in the depth direction of the source region 36 is not maximum at the position where the source region 36 is in contact with the first bottom surface BS1.

[0110] The contact resistance between a metal silicide and an n-type semiconductor decreases as the concentration of n-type impurities in the n-type semiconductor increases. This is because, as the concentration of n-type impurities in the n-type semiconductor increases, the Schottky barrier width between the metal silicide and the n-type semiconductor in contact decreases, making it easier for carriers to tunnel through the Schottky barrier.

[0111] In the case of the comparative example MOSFET900, the phosphorus concentration of the source region 36 is low at the point where the source region 36 contacts the metal silicide layer 20, which may lead to a high contact resistance between the metal silicide layer 20 and the source region 36.

[0112] In the MOSFET 100 of the first embodiment, the phosphorus concentration in the depth direction of the source region 36 decreases monotonically from the position where the source region 36 contacts the first bottom surface BS1 of the metal silicide layer 20 toward the drain electrode 14. In other words, the phosphorus concentration in the depth direction of the source region 36 is maximum at the position where the source region 36 contacts the first bottom surface BS1.

[0113] Therefore, compared to the comparative example MOSFET 900, the contact resistance between the metal silicide layer 20 and the source region 36 is reduced. Consequently, the on-resistance of MOSFET 100 is reduced.

[0114] From the viewpoint of reducing the contact resistance between the metal silicide layer 20 and the source region 36, the n-type impurity concentration of the source region 36 at the position in contact with the first bottom surface BS1 is 2 × 10⁻⁶. 19 atoms / cm 3It is preferable that the above is true, 3 × 10 19 atoms / cm 3 More preferably, 5 × 10 19 atoms / cm 3 It is even more preferable that the above conditions are met.

[0115] From the viewpoint of reducing the contact resistance between the metal silicide layer 20 and the source region 36, the distance in the first direction between the first surface F1 and the first bottom surface BS1 (d1 in Figure 2) is preferably 10 nm or more, more preferably 15 nm or more, and even more preferably 20 nm or more.

[0116] The thickness of the metal silicide layer 20 in the first direction is preferably 10 nm to 50 nm, and more preferably 20 nm to 40 nm. If the thickness exceeds the lower limit, the diffusion of metal elements that act as lifetime killers increases, making it easier to reduce switching losses. Also, if the thickness exceeds the lower limit, the catalytic effect of the metal silicide layer 20 increases when etching the semiconductor layer 10 beneath the metal silicide layer 20, making it easier to etch the semiconductor layer 10. If the thickness falls below the upper limit, the amount of etching solution supplied through the metal silicide layer 20 increases when etching the semiconductor layer 10 beneath the metal silicide layer 20, making it easier to etch the semiconductor layer 10.

[0117] In the first embodiment of the semiconductor device manufacturing method, after forming a metal silicide layer 20 containing gold or a platinum group element, a second heat treatment is performed to diffuse the gold or platinum group element into the semiconductor layer 10. The gold or platinum group element functions as a lifetime killer. Therefore, a MOSFET 100 with reduced switching loss can be manufactured.

[0118] The first embodiment of the semiconductor device manufacturing method involves etching the source region 36 beneath the metal silicide layer 20 containing gold or a platinum group element using a solution containing hydrofluoric acid. By etching the portion of the surface of the source region 36 where the n-type impurity concentration is low, the phosphorus concentration in the depth direction of the source region 36 can be maximized at the position where the source region 36 contacts the first bottom surface BS1. Therefore, the contact resistance between the metal silicide layer 20 and the source region 36 can be reduced.

[0119] In the first embodiment of the semiconductor device manufacturing method, the first heat treatment for forming the metal silicide layer 20 is performed at a temperature of 100°C or higher. Performing the first heat treatment at 100°C or higher prevents the metal silicide layer 20 from becoming too thin, which would suppress the etching of the semiconductor layer 10 beneath the metal silicide layer 20. If the metal silicide layer 20 becomes too thin, the catalytic effect of the metal silicide layer 20 is reduced, and the etching of the semiconductor layer 10 is suppressed.

[0120] In the first embodiment of the semiconductor device manufacturing method, the first heat treatment for forming the metal silicide layer 20 is performed at a temperature of 550°C or lower. Performing the first heat treatment at 550°C or lower prevents the metal silicide layer 20 from becoming too thick, which would suppress the etching of the semiconductor layer 10 beneath the metal silicide layer 20. If the metal silicide layer 20 becomes too thick, the amount of etching solution passing through the metal silicide layer 20 decreases, suppressing the etching of the semiconductor layer 10.

[0121] In the first embodiment of the semiconductor device manufacturing method, the etching progress of the semiconductor layer 10 beneath the metal silicide layer 20 can be appropriately controlled by performing the first heat treatment for forming the metal silicide layer 20 at a temperature of 100°C to 550°C. From the viewpoint of appropriately controlling the etching progress of the semiconductor layer 10 beneath the metal silicide layer 20, the first heat treatment for forming the metal silicide layer 20 is preferably performed at a temperature of 200°C to 400°C, and more preferably at a temperature of 200°C to 300°C.

[0122] From the viewpoint of reducing the manufacturing process and lowering the manufacturing cost of semiconductor devices, it is preferable that the deposition of the first metal film and the first heat treatment be performed in the same process.

[0123] From the viewpoint of sufficiently diffusing gold or platinum group elements into the semiconductor layer 10, the temperature of the second heat treatment is preferably 700°C or higher, and more preferably 800°C or higher.

[0124] As described above, the first embodiment provides a MOSFET and a method for manufacturing a MOSFET that can reduce switching losses and on-resistance.

[0125] (Second embodiment) The semiconductor device of the second embodiment differs from the semiconductor device of the first embodiment in that the position of the second bottom surface of the metal silicide layer in the first direction is on the side of the second surface than the position of the first bottom surface in the first direction. Hereafter, some descriptions that overlap with the first embodiment may be omitted.

[0126] The semiconductor device of the second embodiment is a vertical transistor. The semiconductor device of the second embodiment is a vertical power MOSFET. The semiconductor device of the second embodiment is a MOSFET200. The MOSFET200 is an n-channel MOSFET with electrons as carriers.

[0127] Figure 16 is an enlarged schematic cross-sectional view of a part of the semiconductor device of the second embodiment. Figure 16 corresponds to Figure 2 of the first embodiment.

[0128] The MOSFET 200 of the second embodiment comprises a semiconductor layer 10, a source electrode 12, a drain electrode 14, a gate electrode 16, a gate insulating layer 18, a metal silicide layer 20, and an interlayer insulating layer 22.

[0129] The source electrode 12 is an example of a first electrode. The drain electrode 14 is an example of a second electrode.

[0130] The semiconductor layer 10 is n +A drain region 30 of type n, a drift region 32 of type n, a body region 34 of type p, and n + It includes a source region 36 of type p. The body region 34 is a low-concentration region 34a of type p + It includes a high-concentration region 34b of the type.

[0131] The drift region 32 is an example of the first semiconductor region. The body region 34 is an example of the second semiconductor region. The source region 36 is an example of the third semiconductor region.

[0132] The metal silicide layer 20 is provided between the source electrode 12 and the semiconductor layer 10.

[0133] The metal silicide layer 20 is provided between the source electrode 12 and the source region 36. The metal silicide layer 20 is in contact with the source electrode 12. The metal silicide layer 20 is in contact with the source region 36.

[0134] The metal silicide layer 20 is provided between the source electrode 12 and the body region 34. The metal silicide layer 20 is provided between the source electrode 12 and the high-concentration region 34b. The metal silicide layer 20 is in contact with the high-concentration region 34b.

[0135] The metal silicide layer 20 includes a top surface TS, a first bottom surface BS1, a second bottom surface BS2, a first side surface SS1, and a second side surface SS2. The top surface TS of the metal silicide layer 20 is in contact with the source electrode 12. The first bottom surface BS1, the second bottom surface BS2, the first side surface SS1, and the second side surface SS2 of the metal silicide layer 20 are in contact with the semiconductor layer 10.

[0136] The second side surface SS2 is provided between the first bottom surface BS1 and the second bottom surface BS2.

[0137] The first bottom surface BS1 of the metal silicide layer 20 is in contact with the source region 36. The second bottom surface BS2 of the metal silicide layer 20 is in contact with the high-concentration region 34b. The first side surface SS1 of the metal silicide layer 20 is in contact with the source region 36.

[0138] At least a portion of the second side surface SS2 of the metal silicide layer 20 is in contact with the source region 36. For example, the entire second side surface SS2 of the metal silicide layer 20 is in contact with the source region 36.

[0139] The position of the first bottom surface BS1 in the first direction is on the side of the second surface F2 than the position of the first surface F1 in the first direction. The position of the first bottom surface BS1 in the first direction is on the side of the second surface F2 than the position of the interface between the gate insulating layer 18 and the source region 36 in the first direction. The position of the first bottom surface BS1 in the first direction is on the side of the second surface F2 than the position of the interface between the interlayer insulating layer 22 and the source region 36 in the first direction.

[0140] The distance from the second surface F2 to the first bottom surface BS1 is smaller than the distance from the second surface F2 to the first surface F1. The distance from the second surface F2 to the metal silicide layer 20 is smaller than the distance from the second surface F2 to the gate insulating layer 18.

[0141] The distance in the first direction between the first surface F1 and the first bottom surface BS1 (d1 in Figure 16) is, for example, between 10 nm and 100 nm.

[0142] The position of the second base BS2 in the first direction is closer to the second face F2 than the position of the first base BS1 in the first direction. The distance from the second face F2 to the second base BS2 is less than the distance from the second face F2 to the first base BS1.

[0143] The distance in the first direction between the first base surface BS1 and the second base surface BS2 (d2 in Figure 16) is, for example, between 30 nm and 300 nm.

[0144] The distance d2 in the first direction between the first base surface BS1 and the second base surface BS2 is, for example, greater than the distance d1 in the first direction between the first surface F1 and the first base surface BS1. The distance d2 in the first direction between the first base surface BS1 and the second base surface BS2 is, for example, 1.5 times or more the distance d1 in the first direction between the first surface F1 and the first base surface BS1.

[0145] The first side surface SS1 or the second side surface SS2 may have a tapered shape.

[0146] The metal silicide layer 20 contains at least one metallic element selected from the group consisting of gold (Au), ruthenium (Ru), rhodium (Rh), palladium (Pd), osmium (Os), iridium (Ir), and platinum (Pt). The metal silicide layer 20 contains gold or platinum group element silicides.

[0147] The metal silicide layer 20 includes, for example, platinum silicide.

[0148] Next, an example of a method for manufacturing a semiconductor device according to the second embodiment will be described.

[0149] The method for manufacturing a semiconductor device according to the second embodiment is p + This differs from the semiconductor device manufacturing method of the first embodiment in that the semiconductor layer 10 is etched before forming the high-concentration region 34b of the mold.

[0150] Figures 17, 18, 19, 20, 21, 22, 23, 24, and 25 are schematic cross-sectional views of a semiconductor device in the manufacturing process of the second embodiment. Figures 17 to 25 show the cross-section corresponding to Figure 16 of the second embodiment.

[0151] The following explanation will use the example where the first metal film is a platinum film and the second metal film is a laminated film of titanium nitride and aluminum. Furthermore, the explanation will also use the example where the deposition of the first metal film and the first heat treatment are performed using the same process.

[0152] The manufacturing method for the semiconductor device is the same as in the first embodiment up to the point where an opening 40 is formed in the interlayer insulating layer 22 above the source region 36 (Figure 17). The opening 40 is formed, for example, using photolithography and RIE.

[0153] Next, the semiconductor layer 10 is etched using the interlayer insulating layer 22 as a mask material (Figure 18). The surface of the source region 36 is etched using the interlayer insulating layer 22 as a mask material. By etching the surface of the source region 36, areas with high phosphorus concentration on the surface of the source region 36 are removed.

[0154] For etching the semiconductor layer 10, for example, anisotropic etching or isotropic etching may be used. For etching the semiconductor layer 10, for example, the RIE method or the chemical dry etching method (CDE method) may be used.

[0155] Next, using the interlayer insulating layer 22 as a mask material, p-type impurities, such as boron (B), are ion-implanted into the semiconductor layer 10 through the opening 40 (Figure 19). By ion-implanting boron (B) into the semiconductor layer 10, p + This forms a high-concentration region 34b of the type. The high-concentration region 34b is an example of an impurity region.

[0156] Next, a portion of the interlayer insulating layer 22 is removed by etching (Figure 20). For etching the interlayer insulating layer 22, for example, a wet etching method is used. For etching the interlayer insulating layer 22, for example, a solution containing hydrofluoric acid is used.

[0157] By etching a portion of the interlayer insulating layer 22, the width of the opening 40 in the second direction is increased. By etching a portion of the interlayer insulating layer 22, the source region 36 is exposed at the bottom of the opening 40.

[0158] Next, a platinum film 42 is deposited on the semiconductor layer 10 (Figure 21). The platinum film 42 is an example of the first metal film. The platinum film 42 is formed, for example, by sputtering.

[0159] The platinum film 42 is deposited at a temperature between 100°C and 550°C. For example, when the platinum film 42 is deposited by sputtering, the platinum film 42 is deposited while the temperature of the semiconductor layer 10 is between 100°C and 550°C.

[0160] The deposition of the platinum film 42 is an example of the first heat treatment. The first heat treatment causes the platinum film 42 to react with the semiconductor layer 10, forming a platinum silicide layer 43 (Figure 22). The platinum film 42 reacts with the source region 36 and the high-concentration region 34b to form the platinum silicide layer 43. The platinum silicide layer 43 is an example of a metal silicide layer.

[0161] The deposition of the platinum film 42 and the first heat treatment may be performed as different processes. If the deposition of the platinum film 42 and the first heat treatment are performed as different processes, for example, the temperature at which the platinum film 42 is deposited may be lower than the temperature at which the first heat treatment is performed.

[0162] Next, the unreacted platinum film 42 is removed (Figure 23). The unreacted platinum film 42 is removed using a solution containing aqua regia as the etching solution.

[0163] Next, the semiconductor layer 10 beneath the platinum silicide layer 43 is etched (Figure 24). The etching solution for the semiconductor layer 10 is a solution containing hydrofluoric acid. For example, the etching of the semiconductor layer 10 is carried out using dilute hydrofluoric acid. The etching of the semiconductor layer 10 is carried out using the so-called Metal-Assisted Chemical Etching method (MacEtch method).

[0164] The platinum silicide layer 43 acts as a catalyst, selectively etching the semiconductor layer 10 beneath it. The source region 36 and the high-concentration region 34b beneath the platinum silicide layer 43 are selectively etched. As the semiconductor layer 10 is etched, the bottom surface of the platinum silicide layer 43 moves towards the second surface F2, as shown in Figure 24.

[0165] When etching the semiconductor layer 10 beneath the platinum silicide layer 43, the bottom surface of the platinum silicide layer 43 is etched to a depth exceeding the peak position of the n-type impurity concentration distribution in the source region 36. The amount of etching of the semiconductor layer 10 can be controlled, for example, by controlling the etching time.

[0166] Next, a second heat treatment is performed at a higher temperature than the first heat treatment. The second heat treatment diffuses the platinum (Pt) contained in the platinum silicide layer 43 into the semiconductor layer 10.

[0167] The temperature of the second heat treatment is, for example, between 700°C and 900°C. The second heat treatment is carried out, for example, in a non-oxidizing atmosphere. The second heat treatment is carried out, for example, in a nitrogen atmosphere or an argon atmosphere.

[0168] Next, a laminated film 44 of titanium nitride and aluminum is deposited on the platinum silicide layer 43 (Figure 25). The laminated film 44 is an example of a second metal film. The laminated film 44 ultimately becomes the source electrode 12.

[0169] Subsequently, a drain electrode 14 is formed on the second surface F2 side of the semiconductor layer 10 using a known process technique.

[0170] By the manufacturing method described above, the MOSFET200 of the second embodiment shown in Figure 16 is manufactured.

[0171] The MOSFET 200 of the second embodiment reduces switching losses, similar to the MOSFET 100 of the first embodiment, by including gold or a platinum group element in the semiconductor layer 10.

[0172] Furthermore, the MOSFET 200 of the second embodiment includes a second side surface SS2, which increases the contact area between the metal silicide layer 20 and the source region 36. Therefore, the contact resistance between the metal silicide layer 20 and the source region 36 can be further reduced. Thus, the on-resistance of the MOSFET 200 is further reduced.

[0173] Furthermore, in the MOSFET 200 of the second embodiment, the second bottom surface BS2 is located deeper than the first bottom surface BS1, which allows the concentration of p-type impurities at the position where the high-concentration region 34b contacts the second bottom surface BS2 to be higher than in the MOSFET 100 of the first embodiment. As a result, the contact resistance between the metal silicide layer 20 and the high-concentration region 34b can be reduced.

[0174] Therefore, for example, if avalanche breakdown occurs in MOSFET 200, the extraction of holes from the high-concentration region 34b to the source electrode 12 is promoted. Thus, the avalanche withstand capability of MOSFET 200 is improved.

[0175] (modified version) In the modified semiconductor device of the second embodiment, at least a portion of the second side surface SS2 is p + It differs from the semiconductor device of the second embodiment in that it is in contact with the high-concentration region 34b of the type.

[0176] Figure 26 is an enlarged schematic cross-sectional view of a part of a semiconductor device of a modified example of the second embodiment. Figure 26 corresponds to Figure 16 of the second embodiment.

[0177] In the modified MOSFET201 of the second embodiment, at least a portion of the second side surface SS2 is p + It is in contact with the high-concentration region 34b of the type. For example, the entire second side surface SS2 is in contact with the high-concentration region 34b.

[0178] In the modified MOSFET 201 of the second embodiment, at least a portion of the second side surface SS2 is in contact with the high-concentration region 34b, thereby increasing the contact area between the metal silicide layer 20 and the high-concentration region 34b. Therefore, the contact resistance between the metal silicide layer 20 and the high-concentration region 34b can be further reduced. Thus, the modified MOSFET 201 of the second embodiment has improved avalanche withstand capability compared to, for example, the MOSFET 200 of the second embodiment.

[0179] As described above, the second embodiment and its modifications provide a MOSFET and a method for manufacturing a MOSFET that can reduce switching losses and on-resistance.

[0180] (Third embodiment) The semiconductor device of the third embodiment differs from the semiconductor device of the first embodiment in that a p-shaped pillar region located between the p-shaped body region and the second surface is further provided within the semiconductor layer. Hereafter, some descriptions that overlap with the first embodiment may be omitted.

[0181] The semiconductor device of the third embodiment is a vertical transistor. The semiconductor device of the third embodiment is a vertical power MOSFET. The semiconductor device of the third embodiment is a MOSFET300. The MOSFET300 is an n-channel MOSFET with electrons as carriers. The MOSFET300 is a MOSFET with a so-called superjunction structure. The MOSFET300 has a contact structure similar to that of the MOSFET100 of the first embodiment.

[0182] Figure 27 is a schematic cross-sectional view of a semiconductor device according to the third embodiment. Figure 27 corresponds to Figure 1 of the first embodiment.

[0183] The MOSFET 300 of the third embodiment comprises a semiconductor layer 10, a source electrode 12, a drain electrode 14, a gate electrode 16, a gate insulating layer 18, a metal silicide layer 20, and an interlayer insulating layer 22.

[0184] The source electrode 12 is an example of a first electrode. The drain electrode 14 is an example of a second electrode.

[0185] The semiconductor layer 10 is n + Type 30 drain region, n-type drift region 32, p-type body region 34, n + It includes a source region 36 of type p and a pillar region 38 of type p.

[0186] The drift region 32 is an example of the first semiconductor region. The body region 34 is an example of the second semiconductor region. The source region 36 is an example of the third semiconductor region.

[0187] The p-shaped pillar region 38 is provided between the body region 34 and the second surface F2. The pillar region 38 is in contact with the body region 34. The pillar region 38 is provided between the body region 34 and the drain region 30.

[0188] The pillar regions 38 are repeatedly arranged in a second direction. A drift region 32 is sandwiched between two adjacent pillar regions 38. The MOSFET 300 has a structure in which p-type impurity regions and n-type impurity regions are repeatedly arranged in a second direction, a so-called superjunction structure.

[0189] Pillar region 38 contains p-type impurities. The p-type impurities are, for example, boron (B). The concentration of p-type impurities in pillar region 38 is, for example, 1 × 10⁻⁶. 16 atoms / cm 3 The above 1 x 10 18 atoms / cm 3 The following applies:

[0190] The MOSFET 300 of the third embodiment reduces switching losses, similar to the MOSFET 100 of the first embodiment, by including gold or a platinum group element in the semiconductor layer 10.

[0191] Furthermore, the MOSFET 300 of the third embodiment, like the MOSFET 100 of the first embodiment, has reduced contact resistance between the metal silicide layer 20 and the source region 36. Therefore, the on-resistance of the MOSFET 300 is reduced.

[0192] Furthermore, the MOSFET300 of the third embodiment features a superjunction structure, which improves the dielectric breakdown voltage and further reduces the on-resistance.

[0193] As described above, the third embodiment provides a MOSFET and a method for manufacturing a MOSFET that can reduce switching losses and on-resistance.

[0194] (Fourth embodiment) The semiconductor device of the fourth embodiment differs from the semiconductor device of the first embodiment in that the gate electrode is located in a trench provided in the semiconductor layer. Hereafter, some descriptions that overlap with the first embodiment may be omitted.

[0195] The semiconductor device of the fourth embodiment is a vertical transistor. The semiconductor device of the fourth embodiment is a vertical power MOSFET. The semiconductor device of the fourth embodiment is a MOSFET 400. The MOSFET 400 is an n-channel MOSFET with electrons as carriers. The MOSFET 400 is a MOSFET with a trench gate structure in which the gate electrode is located in a trench. The MOSFET 400 has a contact structure similar to that of the MOSFET 100 of the first embodiment.

[0196] Figure 28 is a schematic cross-sectional view of a semiconductor device according to the fourth embodiment. Figure 28 corresponds to Figure 1 of the first embodiment.

[0197] The MOSFET 400 of the fourth embodiment comprises a semiconductor layer 10, a source electrode 12, a drain electrode 14, a gate electrode 16, a gate insulating layer 18, a metal silicide layer 20, and an interlayer insulating layer 22.

[0198] The source electrode 12 is an example of a first electrode. The drain electrode 14 is an example of a second electrode.

[0199] The semiconductor layer 10 has trenches 11, n + A drain region 30 of type n, a drift region 32 of type n, a body region 34 of type p, and n + Includes source area 36 of type.

[0200] The drift region 32 is an example of the first semiconductor region. The body region 34 is an example of the second semiconductor region. The source region 36 is an example of the third semiconductor region.

[0201] The trench 11 is provided on the side of the first surface F1 of the semiconductor layer 10. The trench 11 is a groove formed in the semiconductor layer 10.

[0202] The gate electrode 16 is located inside the trench 11. The gate electrode 16 faces the body region 34. The gate electrode 16 faces the drift region 32. The gate electrode 16 faces the source region 36.

[0203] The gate electrode 16 is a conductor. The gate electrode 16 is, for example, polycrystalline silicon containing n-type or p-type impurities.

[0204] The gate insulating layer 18 is provided in the trench 11. The gate insulating layer 18 is provided between the gate electrode 16 and the semiconductor layer 10. The gate insulating layer 18 is provided between the gate electrode 16 and the body region 34. The gate insulating layer 18 is provided between the gate electrode 16 and the drift region 32. The gate insulating layer 18 is provided between the gate electrode 16 and the source region 36.

[0205] The gate insulating layer 18 is an insulator. For example, the gate insulating layer 18 is silicon oxide.

[0206] The MOSFET 400 of the fourth embodiment reduces switching losses, similar to the MOSFET 100 of the first embodiment, by including gold or a platinum group element in the semiconductor layer 10.

[0207] Furthermore, the MOSFET 400 of the fourth embodiment, like the MOSFET 100 of the first embodiment, has reduced contact resistance between the metal silicide layer 20 and the source region 36. Therefore, the on-resistance of the MOSFET 400 is reduced.

[0208] Furthermore, the MOSFET 400 of the fourth embodiment has a gate trench structure, which reduces the on-resistance per unit area. Therefore, the MOSFET 400 of the fourth embodiment has an even lower on-resistance.

[0209] As described above, the fourth embodiment provides a MOSFET and a method for manufacturing a MOSFET that can reduce switching losses and on-resistance.

[0210] In the first to fourth embodiments described above, the semiconductor layer was explained using silicon as an example, but the semiconductor layer may be, for example, silicon carbide (SiC).

[0211] Furthermore, although the first to fourth embodiments were described using the case where the metal element contained in the metal silicide layer is platinum (Pt) as an example, the same effects as in the first to fourth embodiments can be achieved if the metal element is at least one metal element selected from the group consisting of gold (Au), ruthenium (Ru), rhodium (Rh), palladium (Pd), osmium (Os), iridium (Ir), and platinum (Pt).

[0212] While several embodiments of the present invention have been described, these embodiments are presented as examples only and are not intended to limit the scope of the invention. These novel embodiments can be carried out in a variety of other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. For example, components of one embodiment may be replaced or modified with components of another embodiment. These embodiments and their variations are included in the scope and spirit of the invention, as well as in the claims of the invention and its equivalents. [Explanation of symbols]

[0213] 10 Semiconductor layer 12 Source electrode (first electrode) 14. Drain electrode (second electrode) 16 Shuttle gates 18 Gate insulating layer 20 Metal silicide layer 32. Drift region (first semiconductor region) 34. Body region (second semiconductor region) 34b High concentration region (impurity region) 36. Source region (third semiconductor region, impurity region) 42 Platinum film (first metal film) 43. Platinum silicide layer (metallic silicide layer) 44. Multilayer film (second metal film) 100 MOSFETs (Semiconductor Devices) 200 MOSFETs (Semiconductor Equipment) 300 MOSFETs (semiconductor equipment) 400 MOSFETs (Semiconductor Devices) BS1 First bottom BS2 Second bottom F1 First Side F2 Second side SS1 First side SS2 Second side TS top surface

Claims

1. The first electrode and The second electrode and A semiconductor layer containing silicon (Si) is provided between the first electrode and the second electrode, having a first surface facing the first electrode and a second surface facing the second electrode. An n-type first semiconductor region provided within the semiconductor layer, A p-shaped second semiconductor region is provided within the semiconductor layer and is located between the first semiconductor region and the first surface, A third n-shaped semiconductor region is provided within the semiconductor layer and located between the second semiconductor region and the first surface, A gate electrode is provided on the first surface side of the semiconductor layer and facing the second semiconductor region, A gate insulating layer is provided between the second semiconductor region and the gate electrode, A metal silicide layer is provided between the first electrode and the second semiconductor region, and between the first electrode and the third semiconductor region, and includes an upper surface in contact with the first electrode, a first bottom surface in contact with the third semiconductor region, and a first side surface in contact with the third semiconductor region, and contains at least one metal element selected from the group consisting of gold (Au), ruthenium (Ru), rhodium (Rh), palladium (Pd), osmium (Os), iridium (Ir), and platinum (Pt). Equipped with, In the first direction from the first electrode toward the second electrode, the n-type impurity concentration in the third semiconductor region decreases monotonically from the first bottom surface toward the second electrode. The first semiconductor region includes the at least one metal element, The semiconductor device is characterized by a semiconductor layer made of single-crystal silicon.

2. The semiconductor device according to claim 1, wherein the position of the first bottom surface in the first direction is on the side of the second surface than the position of the first surface in the first direction.

3. The semiconductor device according to claim 2, wherein the distance in the first direction between the first surface and the first bottom surface is 10 nm or more.

4. The semiconductor device according to claim 2 or 3, wherein the metal silicide layer further includes a second bottom surface in contact with the second semiconductor region, and the position of the second bottom surface in the first direction is on the side of the second surface than the position of the first bottom surface in the first direction.

5. The semiconductor device according to claim 4, wherein the distance in the first direction between the first bottom surface and the second bottom surface is greater than the distance in the first direction between the first surface and the first bottom surface.

6. The semiconductor device according to claim 4, wherein the metal silicide layer further includes a second surface located between the first bottom surface and the second bottom surface, and at least a portion of which is in contact with the third semiconductor region.

7. The semiconductor device according to claim 4, wherein the metal silicide layer further includes a second surface located between the first bottom surface and the second bottom surface, at least a portion of which is in contact with the second semiconductor region.

8. The n-type impurity concentration in the third semiconductor region at the position in contact with the first bottom surface is 2 × 10⁻⁶ １９ atoms / cm ３ The semiconductor device according to claim 1.

9. An impurity region is formed by ion implanting n-type or p-type impurities into a semiconductor layer containing silicon (Si). A first metal film containing at least one metallic element selected from the group consisting of gold (Au), ruthenium (Ru), rhodium (Rh), palladium (Pd), osmium (Os), iridium (Ir), and platinum (Pt) is deposited on the impurity region. A first heat treatment is performed at a temperature of 100°C to 550°C to react the first metal film with the impurity region to form a metal silicide layer. Using a solution containing aqua regia, remove the unreacted first metal film. Using a solution containing hydrofluoric acid, the impurity region beneath the metal silicide layer is etched. A second heat treatment is performed at a higher temperature than the first heat treatment. A method for manufacturing a semiconductor device, comprising depositing a second metal film on the aforementioned metal silicide layer.

10. The method for manufacturing a semiconductor device according to claim 9, wherein the deposition of the first metal film and the first heat treatment are performed in the same process.

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