Detector base and X-ray diffractometer

Abstract

To make it easier to change arrangement of two-dimensional detectors than conventional arts.SOLUTION: A detector base of an X-ray detector comprises: a first arrangement part that arranges the X-ray detector in a first arrangement; a second arrangement part that arranges the X-ray detector in a second arrangement; and a mounting part to which the X-ray detector can be fixed. In the detector base, the X-ray detector is selectively mountable to the first arrangement part or the second arrangement part via the mounting part. An arrangement angle of the X-ray detector fixed to the mounting part differs between the first arrangement and the second arrangement.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a detector pedestal and an X-ray diffractometer.

Background Art

[0002] As an X-ray detector, a two-dimensional detector with an aspect ratio of the detection range not equal to 1 is known (for example, Non-Patent Document 1). With such a detector, profiles of different ranges can be obtained depending on the arrangement of the detector. For example, when the detector is arranged such that the detection surface is horizontally long, a relatively wide range in the in-plane azimuthal direction (β direction) can be measured. On the other hand, when the detector is arranged such that the detection surface is vertically long, a relatively wide range in the out-of-plane direction (2θ direction) can be measured.

Prior Art Documents

Non-Patent Documents

[0003]

Non-Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] By the way, when performing measurement with a detector as described above, a measurer or the like may attach the detector to a goniometer using a pedestal. When attaching the detector to the goniometer using a separate pedestal corresponding to each arrangement, it is necessary to attach the detector to a different pedestal every time the arrangement is switched, and it may take time to switch the arrangement.

[0005] The present invention provides a technique for more easily switching the arrangement of a two-dimensional detector than in the prior art.

Means for Solving the Problems

[0006] The present invention includes the following aspects.

[0007] [Aspect 1] A detector base for an X-ray detector, A first arrangement section for arranging the X-ray detector in a first arrangement, A second arrangement section for arranging the X-ray detector in a second arrangement, A mounting portion on which the X-ray detector can be fixed, Equipped with, The detector base allows the X-ray detector to be selectively mounted to the first or second mounting section via the mounting section. The arrangement angle of the X-ray detector fixed to the mounting portion is different between the first arrangement and the second arrangement. Detector base.

[0008] [Aspect 2] The first arrangement is a horizontal arrangement in which the width direction of the X-ray detector extends laterally, In the second configuration, the X-ray detector is vertically positioned so that its width extends in the vertical direction. A detector base as described in Embodiment 1.

[0009] [Aspect 3] The system further includes an adjustment unit capable of performing positional adjustment of the three axes of the X-ray detector in the first configuration and positional adjustment of the three axes of the X-ray detector in the second configuration. A detector base as described in embodiment 2.

[0010] [Aspect 4] A first adjustment unit includes a first Y-axis adjustment mechanism that allows adjustment of the position of the X-ray detector in the Y-axis direction perpendicular to the X-axis direction, which is the detection direction of the X-ray detector in the first arrangement, and a first Z-axis adjustment mechanism that allows adjustment of the position of the X-ray detector in the Z-axis direction perpendicular to the X-axis and Y-axis directions in the first arrangement. A second adjustment unit includes a second Y-axis adjustment mechanism that allows adjustment of the position of the X-ray detector in the Y direction in the second configuration, and a second Z-axis adjustment mechanism that allows adjustment of the position of the X-ray detector in the Z direction in the second configuration. further comprising the detector pedestal according to Aspect 2.

[0011] [Aspect 5] further comprising an X-axis rotation adjustment mechanism for adjusting the angle of the X-ray detector around the axis extending in the X direction, in the first arrangement and the second arrangement, the arrangement angles of the X-ray detector fixed to the attachment portion are orthogonal, the detector pedestal according to Aspect 4.

[0012] [Aspect 6] the first adjustment portion includes a first X-axis rotation adjustment mechanism for adjusting the angle of the X-ray detector around the axis extending in the X direction in the first arrangement, the second adjustment portion includes a second X-axis rotation adjustment mechanism for adjusting the angle of the X-ray detector around the axis extending in the X direction in the second arrangement, the detector pedestal according to Aspect 4.

[0013] [Aspect 7] the first adjustment mechanism is provided on the attachment portion, the detector pedestal according to Aspect 5.

[0014] [Aspect 8] further comprising a connecting portion connected to a goniometer so as to be able to adjust the distance between the X-ray detector and the detection object, the detector pedestal according to Aspect 7.

[0015] [Aspect 9] the connecting portion is provided below the first adjustment portion, the detector pedestal according to Aspect 8.

[0016] [Aspect 10] each of the first arrangement portion and the second arrangement portion a regulating portion that regulates the relative position between the attachment portion and each arrangement portion, a fixing portion that fixes the position of the attachment portion in a state where the relative position is regulated by the regulating portion, including the detector pedestal according to Aspect 1.

[0017] [Aspect 11] The aforementioned fixing part is A contact portion that contacts the aforementioned mounting portion, A moving mechanism that allows the contact portion to move back and forth relative to the mounting portion, A handle for operating the aforementioned moving mechanism, including, A detector base according to embodiment 10.

[0018] [Aspect 12] X-ray detector, The detector base described in Embodiment 1, Equipped with, X-ray diffraction apparatus.

[0019] [Aspect 13] The aspect ratio of the detection range of the X-ray detector is 2 or more. The X-ray diffraction apparatus according to embodiment 12. [Effects of the Invention]

[0020] According to the present invention, the arrangement of the two-dimensional detector can be switched more easily than in the conventional method. [Brief explanation of the drawing]

[0021] [Figure 1] A perspective view showing an overview of an X-ray diffractometer according to one embodiment. [Figure 2] Front view of a detector base according to one embodiment. [Figure 3] Side view of a detector base according to one embodiment. [Figure 4] Plan view of a detector base according to one embodiment. [Figure 5] (a) to (c) are explanatory diagrams regarding the mounting operation of the mounting part. [Figure 6] (a) and (b) are diagrams illustrating the difference in placement angles between horizontal and vertical orientations. [Figure 7] (a) is a diagram showing the detection area in a horizontal orientation, and (b) is a diagram showing the detection area in a vertical orientation. [Figure 8](a) to (d) are diagrams illustrating the effect of X-ray detector misalignment on measurement results. [Figure 9] (a) and (b) are diagrams illustrating the adjustment of the tilt angle. [Figure 10] A diagram illustrating the difference in measurement results between horizontal and vertical orientations for one-dimensional measurement. [Modes for carrying out the invention]

[0022] <Overview of the detector base> Figure 1 is a perspective view showing an overview of the detector base 1. Figure 1 shows the X-ray detector 100 installed on the detector base 1. The X-ray detector 100 is a pixel detector capable of two-dimensional measurement. In this embodiment, the X-ray detector 100 is a detector whose aspect ratio of its detection area (here, this refers to the ratio of width to height) is not 1. That is, the X-ray detector 100 includes a detection surface 110 that defines the detection area for detecting X-rays. The detection surface 110 has a rectangular shape with different length and width. The aspect ratio of the detection area may be, for example, 1.1 or more, 1.2 or more, 1.5 or more, 2 or more, 3 or more, 4 or more, or 5 or more. The X-ray detector 100 may also be capable of zero-dimensional or one-dimensional measurement.

[0023] Figure 2 is a front view of the detector base 1, Figure 3 is a side view of the detector base 1, and Figure 4 is a top view of the detector base 1.

[0024] The detector base 1 supports the X-ray detector 100. The detector base 1 includes a horizontal mounting section 10, a vertical mounting section 20, a mounting section 30, and an adjustment section 40. These will be described later. The detector base 1 also includes a connecting section 60 that connects to a goniometer so that the distance between the X-ray detector 100 and the object to be detected can be adjusted.

[0025] <Base part> Next, we will describe the two arrangement sections (horizontal arrangement section 10 and vertical arrangement section 20) provided on the detector base 1.

[0026] The horizontal mounting section 10 supports the X-ray detector 100 in a horizontal position. Specifically, the mounting section 30, to which the X-ray detector 100 is fixed, is attached to the horizontal mounting section 10, thereby allowing the horizontal mounting section 10 to support the X-ray detector 100 in a horizontal position. Hereinafter, the arrangement in which the mounting section 30 is attached to the horizontal mounting section 10, that is, the arrangement in which the X-ray detector 100 is supported by the horizontal mounting section 10 via the mounting section 30, will be referred to as the horizontal arrangement. In the horizontal arrangement, the width direction of the X-ray detector 100 extends in the horizontal direction. In this embodiment, the width direction of the X-ray detector 100 is the longitudinal direction of the detection surface 110. The horizontal mounting section 10 includes a mounting surface 11, an XZ direction restricting section 12, a holding section 13, and a Y direction restricting section 15.

[0027] The mounting portion 30 is positioned on the placement surface 11. In this embodiment, the placement surface 11 is a surface extending in the horizontal plane (XY plane). Note that the placement surface 11 does not have to be a plane. The XZ direction restricting portion 12 restricts the relative position between the mounting portion 30 and the horizontal placement portion 10. Here, the XZ direction restricting portion 12 restricts the relative position between the mounting portion 30 and the horizontal placement portion 10 in the X and Z directions. The XZ direction restricting portion 12 is a wall portion that extends at least upward from the placement surface 11. In addition, the Y direction restricting portion 15 restricts the relative position between the mounting portion 30 and the horizontal placement portion 10 in the Y direction. In this embodiment, the Y direction restricting portion 15 is a plate-shaped member positioned so as to come into contact with the mounting member 31 when the mounting portion 30 is positioned on the horizontal placement portion 10. However, the shape of the Y direction restricting portion 15 can be changed as appropriate. In this example, the wall portion, the XZ direction restricting portion 12, restricts the relative position of the mounting portion 30 and the horizontally positioned portion 10 in the X and Z directions. However, the restriction of the relative position in the X direction and the restriction of the relative position in the Z direction may be performed by separate members. Alternatively, the XZ direction restricting portion 12 and the Y direction restricting portion 15 may be formed from the same member, or the restriction of the relative position in either the X or Z direction and the restriction of the relative position in the Y direction may be performed by the same member.

[0028] The holding portion 13 maintains the position of the mounting portion 30 while the relative position between the mounting portion 30 and the horizontally positioned portion 10 is restricted by the XZ direction restricting portion 12. The holding portion 13 includes a contact portion 13a, a moving mechanism 13b, and a handle 13c. The contact portion 13a contacts the mounting portion 30. The moving mechanism 13b moves the contact portion 13a so as to be able to move forward and backward relative to the mounting portion 30. The handle 13c is for operating the moving mechanism 13b. The provision of the handle 13c allows the operator to switch the position of the X-ray detector 100 without using tools. In this embodiment, the mounting portion 30 is mounted in the space partitioned by the positioning surface 11, the XZ direction restricting portion 12, and the contact portion 13a.

[0029] The vertical mounting section 20 supports the X-ray detector 100 in a vertical position. Specifically, the mounting section 30, to which the X-ray detector 100 is fixed, is attached to the vertical mounting section 20, thereby supporting the X-ray detector 100 in a vertical position. Hereinafter, the arrangement in which the mounting section 30 is attached to the vertical mounting section 20, that is, the arrangement in which the X-ray detector 100 is supported by the vertical mounting section 20 via the mounting section 30, will be referred to as the vertical arrangement. In the vertical arrangement, the width direction of the X-ray detector 100 extends in the vertical direction (vertical direction). The vertical mounting section 20 may have the same structure as the horizontal mounting section 10. That is, the mounting surface 21, the XY direction restricting section 22, and the holding section 23 may have the same structure as the mounting surface 11, the XZ direction restricting section 12, and the holding section 13, respectively. In this embodiment, the XZ direction restricting section 12 and the XY direction restricting section 22 have similar structures, but due to the difference in their arrangement angles, they restrict the relative position with respect to the mounting section 30 in different directions. Furthermore, the contact section 23a, the moving mechanism 23b, and the handle 23c, which are components of the holding section 23, may have the same structure as the contact section 13a, the moving mechanism 13b, and the handle 13c, which are components of the holding section 13. Therefore, the components of the vertically mounted section 20 will not be described.

[0030] In this embodiment, the vertically mounted section 20 includes a Z-direction restricting section 25, corresponding to the Y-direction restricting section 15 of the horizontally mounted section 10. In the vertically mounted section 20, the XY-direction restricting section 22 restricts the relative positions of the mounting section 30 and the vertically mounted section 20 in the X and Y directions, while the Z-direction restricting section 25 restricts the positions of both in the Z direction. The Z-direction restricting section 25 is a block-shaped member provided on the lower side of the mounting surface 21. The shape of the Z-direction restricting section 25 can be changed as appropriate.

[0031] <Mounting part> The mounting portion 30 can fix the X-ray detector 100. The detector base 1 can selectively attach the X-ray detector 100 to the horizontal mounting portion 10 or the vertical mounting portion 20 via the mounting portion 30. The mounting portion 30 includes a mounting member 31 that can be detachably attached to the horizontal mounting portion 10 and the vertical mounting portion 20, and a fixing portion 32 to which the X-ray detector 100 is fixed.

[0032] The mounting member 31 is a member that can slide relative to the horizontal mounting section 10 and the vertical mounting section 20. For example, the mounting member 31 has a shape that is complementary to the space formed in the horizontal mounting section 10 and the vertical mounting section 20. As a result, the mounting member 31 can move in the Y direction relative to the horizontal mounting section 10, while movement in the ZX direction is restricted. Also, the mounting member 31 can move in the Z direction relative to the vertical mounting section 20, while movement in the XY direction is restricted.

[0033] The fixing portion 32 has, for example, a plurality of bolt holes 32a provided at positions corresponding to a plurality of bolt holes (not shown) provided on the bottom surface of the X-ray detector 100. The fixing portion 32 can then fix the X-ray detector 100 to the mounting member 31 by bolt fastening.

[0034] Figures 5(a) to 5(c) are explanatory diagrams for the installation operation of the mounting part 30. While this explanation describes the case where the mounting part 30 is attached to the horizontally positioned section 10, the same procedure applies when the mounting part 30 is attached to the vertically positioned section 20. Therefore, the explanation of the vertically positioned section 20 is omitted. Also, some components have been omitted for clarity.

[0035] Figure 5(a) shows the state of the horizontally positioned unit 10 before the mounting part 30 is attached. Figure 5(b) shows the state in which the mounting part 30 is being attached to the horizontally positioned unit 10. At this time, the mounting part 30 slides in the -Y direction relative to the horizontally positioned unit 10. Figure 5(c) shows the state after the mounting part 30 has been attached and is held by the holding part 13. The operator operates the handle 13c to bring the contact part 13a into contact with the mounting part 30. This fixes the mounting part 30 to the horizontally positioned unit 10.

[0036] Furthermore, at this time, the position of the mounting portion 30 in the X and Z directions is restricted by contact with the XZ direction restricting portion 12 (see Figure 3). Also, the position of the mounting portion 30 in the Y direction is restricted by contact with the Y direction restricting portion 15. Therefore, even when, for example, the mounting portion 30 is moved from the horizontal mounting portion 10 to the vertical mounting portion 20 and then reattached to the horizontal mounting portion 10, the position of the mounting portion 30 is reproduced with high accuracy by the XZ direction restricting portion 12 and the Y direction restricting portion 15. As a result, if the position of the mounting portion 30 relative to the horizontal mounting portion 10 is adjusted by the adjustment portion 40 described later, position adjustment becomes unnecessary after switching the arrangement of the X-ray detector 100. Thus, switching the arrangement of the X-ray detector 100 can be performed more efficiently than in the conventional method.

[0037] In the case of a vertical orientation, the position of the mounting portion 30 in the X and Z directions is restricted by the contact between the mounting member 31 and the XY direction restricting portion 22, and the position of the mounting portion 30 in the Z direction is restricted by the contact between the mounting member 31 and the Z direction restricting portion 25.

[0038] Figures 6(a) and 6(b) show the difference in placement angle when the mounting part 30 is attached to the horizontal placement section 10 and when the mounting part 30 is attached to the vertical placement section 20. In this embodiment, the placement angle of the X-ray detector 100 fixed to the mounting part 30 differs between the horizontal placement (Figure 6(a)) where the mounting part 30 is attached to the horizontal placement section 10 and the vertical placement (Figure 6(b)) where the mounting part 30 is attached to the vertical placement section 20. Furthermore, in this embodiment, the placement angle (tilt angle) of the X-ray detector 100 fixed to the mounting part 30 around the X-axis differs by 90 degrees between the vertical and horizontal placement. Therefore, different ranges of profiles can be obtained when the X-ray detector 100 is in a horizontal placement and when it is in a vertical placement.

[0039] Furthermore, in this embodiment, since the detector base 1 includes a horizontal placement section 10 and a vertical placement section 20, the X-ray detector 100 can be positioned horizontally and vertically using only one detector base 1. In contrast, if separate bases are provided for horizontal and vertical placement, the base must be removed from the goniometer each time the placement is switched, which may increase the time required for switching. Also, removing the base from the goniometer may necessitate high-precision positioning. In this embodiment, however, the detector base 1 itself can be switched between horizontal and vertical placement while connected to the goniometer, making the switching of placement easier compared to conventional methods.

[0040] In this embodiment, the position angle (tilt angle) of the X-ray detector 100 fixed to the mounting part 30 differs by 90 degrees between the horizontal and vertical configurations. However, the difference in position angle is not limited to 90 degrees and may be within a predetermined range including 90 degrees. The predetermined range may be, for example, 89-91 degrees, 88-92 degrees, 85-95 degrees, or 80-100 degrees.

[0041] Figure 7(a) shows the detection area in a horizontal configuration, and Figure 7(b) shows the detection area in a vertical configuration. In the horizontal configuration, a wide range can be measured in the in-plane azimuthal direction (β direction). In this case, the X-ray detector 100 can measure a diffraction pattern called Debye ring over a longer range in the circumferential direction. Measurements that are effective when performed in a horizontal configuration include, for example, rocking curve measurements and measurements for evaluating orientation.

[0042] On the other hand, with a vertical orientation, a wide range can be measured in the out-of-plane direction (2θ direction). In this case, diffraction patterns that cannot be detected with a horizontal orientation can be detected. Measurements in which a vertical orientation is effective include in-situ measurements (charge / discharge measurements, high-temperature measurements) and mapping measurements of minute areas that require short measurement times.

[0043] Thus, by selecting whether to measure in a horizontal or vertical orientation depending on the purpose of the measurement, the operator can obtain more appropriate measurement results. Furthermore, as described above, in this embodiment, switching between horizontal and vertical orientations can be performed more efficiently than in conventional methods, allowing the operator to obtain more appropriate measurement results more efficiently.

[0044] <Adjustment part> Figures 8(a) to 8(d) illustrate the effect of misalignment of the X-ray detector 100 on the measurement results. Figure 8(a) shows the measurement results when the X-ray detector 100 is correctly adjusted. Here, an arc-shaped diffraction pattern is shown, and the center of the circumferential direction of the diffraction pattern is located in the center of the detection area. On the other hand, if the measurement is performed with a lateral misalignment, the diffraction pattern will be shifted laterally (Figure 8(b)). Also, if the measurement is performed with a vertical misalignment, the diffraction pattern will be shifted vertically (downward in this case) (Figure 8(c)). Furthermore, if the measurement is performed with a tilt misalignment, the left and right edges of the detection surface will have different 2θ angles (Figure 8(d)).

[0045] As described above, if the X-ray detector 100 is misaligned during measurement, there is a risk that the desired measurement results may not be obtained. Therefore, in this embodiment, the adjustment unit 40 performs position adjustments for both the horizontal and vertical configurations.

[0046] Refer again to Figures 1-4. The adjustment unit 40 is capable of adjusting the three-axis position of the X-ray detector 100 in a horizontal configuration and in a vertical configuration. In this embodiment, the adjustment unit 40 includes a horizontal adjustment unit 41 and a vertical adjustment unit 42.

[0047] The horizontal adjustment unit 41 adjusts the position of the X-ray detector 100 in a horizontal configuration. The horizontal adjustment unit 41 includes a Y-axis adjustment mechanism 41a, a Z-axis adjustment mechanism 41b, and an X-axis rotation adjustment mechanism 41c. These allow the horizontal adjustment unit 41 to adjust the three axes of the X-ray detector 100 in a horizontal configuration.

[0048] The Y-axis adjustment mechanism 41a is a mechanism for adjusting the horizontal position (Y-direction) of the X-ray detector 100. Here, the Y-direction is perpendicular to the detection direction (X-direction) of the X-ray detector 100. The Z-axis adjustment mechanism 41b is a mechanism for adjusting the vertical position (Z-direction) of the X-ray detector 100. Here, the Z-direction is perpendicular to both the detection direction (X-direction) and the width direction (Y-direction) of the X-ray detector 100.

[0049] Known structures can be used as appropriate for the specific structures of the Y-axis adjustment mechanism 41a and the Z-axis adjustment mechanism 41b. For example, the Y-axis adjustment mechanism 41a includes an immovable fixed part, a movable part that can move in the Y direction relative to the fixed part, and an adjustment part such as a screw for adjusting the amount of movement of the movable part. The Z-axis adjustment mechanism 41b also includes an immovable fixed part, a movable part that can move in the Z direction relative to the fixed part, and an adjustment part such as a screw for adjusting the amount of movement of the movable part. Specifically, position adjustment mechanisms such as rack and pinion type, ball screw type, push screw type can be used for the Y-axis adjustment mechanism 41a and the Z-axis adjustment mechanism 41b.

[0050] Furthermore, the relationship between the axis adjustable by the Y-axis adjustment mechanism 41a and the axis adjustable by the Z-axis adjustment mechanism 41b is not limited to orthogonal relationships. That is, it is sufficient that the X-ray detector 100 can be positioned at a desired location on the YZ plane by the Y-axis adjustment mechanism 41a and the Z-axis adjustment mechanism 41b, and the angle between the two axes may be within a predetermined range. The predetermined range may be, for example, 89-91 degrees, 88-92 degrees, 85-95 degrees, or 80-100 degrees.

[0051] The X-axis rotation adjustment mechanism 41c is a mechanism for adjusting the angle around the axis extending in the detection direction (X direction) of the X-ray detector 100. This angle around the axis extending in the X direction is sometimes called the tilt angle. Known technologies can be appropriately used for the specific structure of the X-axis rotation adjustment mechanism 41c. For example, X-axis rotation adjustment mechanism 41c It includes an immovable fixed part, a rotating part that can rotate around the X-axis relative to the fixed part, and an adjustment part such as a screw for adjusting the amount of rotation of the rotating part. 。

[0052] The vertical adjustment unit 42 adjusts the position of the X-ray detector 100 in a vertical configuration. The vertical adjustment unit 42 includes a Y-axis adjustment mechanism 42a and a Z-axis adjustment mechanism 42 b This includes,

[0053] The Y-axis adjustment mechanism 42a is a mechanism for adjusting the horizontal (Y-direction) position of the X-ray detector 100. Also, the Z-axis adjustment mechanism 42 b This is a mechanism for adjusting the vertical (Z-direction) position of the X-ray detector 100. For example, the Y-axis adjustment mechanism 42a includes a fixed part that cannot be moved, a movable part that can move in the Y-direction relative to the fixed part, and an adjustment part such as a screw for adjusting the amount of movement of the movable part. Also, the Z-axis adjustment mechanism 42 b It includes an immovable fixed part, a movable part that can move in the Z direction relative to the fixed part, and an adjustment part such as a screw for adjusting the amount of movement of the movable part. Specifically, the Y-axis adjustment mechanism 42a and the Z-axis adjustment mechanism 42 b Position adjustment mechanisms such as rack and pinion type, ball screw type, push screw type, etc. can be used.

[0054] Note that the Y-axis adjustment mechanism 42a is adjustable for the axis and the Z-axis adjustment mechanism 42 b The relationship between the adjustable axes is not limited to orthogonal relationships. That is, the Y-axis adjustment mechanism 42a and the Z-axis adjustment mechanism 42 b The X-ray detector 100 can be positioned at a desired location on the YZ plane, and the angle between the two axes may be within a predetermined range. The predetermined range may be, for example, 89-91 degrees, 88-92 degrees, 85-95 degrees, or 80-100 degrees.

[0055] The arrangement positions of each mechanism included in the adjustment section 40 can be designed as appropriate. In this embodiment, of the mechanisms in the horizontal adjustment section 41, the Y-axis adjustment mechanism 41a is provided on the horizontal arrangement section 10 side, and the Z-axis adjustment mechanism 41b and X-axis rotation adjustment mechanism 41c are provided on the mounting section 30 side. Also, the Y-axis adjustment mechanism 42a and Z-axis adjustment mechanism 42 of the vertical adjustment section 42 b It is located on the side of the vertically positioned section 20.

[0056] In this embodiment, a connecting portion 60 is provided below the horizontally positioned portion 10. Therefore, by providing part of the mechanism of the horizontal adjustment portion 41 on the mounting portion 30 side, interference with the goniometer, which is the mounting destination of the detector base 1, can be suppressed.

[0057] On the other hand, given the configuration in which the X-ray detector 100 is fixed to the mounting portion 30 and its position is adjusted, the surfaces on which a tool can access the mounting portion 30 during adjustment are limited. Therefore, in this embodiment, at least a portion of the adjustment mechanism of the horizontal adjustment portion 41 is provided on the horizontal mounting portion 10 side, and at least a portion of the adjustment mechanism of the vertical adjustment portion 42 is provided on the vertical mounting portion 20 side. This suppresses a decrease in tool accessibility to the adjustment mechanisms.

[0058] Alternatively, all adjustment mechanisms of the horizontal adjustment section 41 may be provided on the horizontal mounting section 10 side, and all adjustment mechanisms of the vertical adjustment section 42 may be provided on the vertical mounting section 20 side. In this case, the structure of the mounting section 30 can be simplified. In this case, the vertical adjustment section 42 may also be provided with a mechanism for adjusting the tilt angle.

[0059] Alternatively, all adjustment mechanisms of one of the horizontal adjustment section 41 and the vertical adjustment section 42 may be provided on the mounting section 30 side, and all adjustment mechanisms of the other may be provided on the horizontal arrangement section 10 or the vertical arrangement section 20 side.

[0060] Furthermore, in this embodiment, the vertical adjustment unit 42 is not provided with a mechanism for adjusting the tilt angle. The adjustment of the tilt angle in the vertical configuration will be described below. Figures 9(a) and 9(b) are explanatory diagrams for adjusting the tilt angle in the horizontal and vertical configurations, respectively.

[0061] As shown in Figure 9(a), if the placement surface 11 of the horizontal placement section 10 is installed at an angle to the horizontal, the operator adjusts the X-axis rotation adjustment mechanism 41c so that the longitudinal direction of the detection surface 110 of the X-ray detector 100 becomes horizontal. In this embodiment, the X-axis rotation adjustment mechanism 41c is provided on the mounting section 30 side. Therefore, even if the X-ray detector 100 is switched from a horizontal to a vertical placement, the adjustment angle by the X-axis rotation adjustment mechanism 41c (the angle of the fixing section 32 with respect to the placement surfaces 11 and 21) is maintained. Also, in this embodiment, the placement surface 11 and the placement surface 21 are provided so as to be perpendicular to each other. As a result, if the tilt angle is adjusted so that the longitudinal direction of the detection surface 110 is horizontal in the horizontal placement, the longitudinal direction of the detection surface 110 will be aligned with the vertical direction in the vertical placement (Figure 9(b)). In other words, adjusting the tilt angle in the horizontal placement also serves as adjusting the tilt angle in the vertical placement. Furthermore, if the tilt angle is adjusted in the vertical orientation first, that adjustment will also serve as the adjustment for the tilt angle in the horizontal orientation.

[0062] Thus, by providing the X-axis rotation adjustment mechanism 41c of the horizontal adjustment unit 41 on the mounting unit 30 side, and by arranging the placement surface 11 and placement surface 21 so as to be orthogonal to each other, the tilt angle adjustment mechanism of the vertical adjustment unit 42 can be omitted. Here, the horizontal adjustment unit 41 has been described as including the X-axis rotation adjustment mechanism 41c, but it can also be said that the X-axis rotation adjustment mechanism 41c serves as both the tilt angle adjustment mechanism of the horizontal adjustment unit 41 and the tilt angle adjustment mechanism of the vertical adjustment unit 42. In other words, the horizontal adjustment unit 41 and the vertical adjustment unit 42 are each capable of adjusting three axes, and two axes (translation in the YZ direction) can be adjusted using independent mechanisms, while a common mechanism can be used for tilt angle adjustment. Here, the horizontal adjustment unit 41 has been described as including the X-axis rotation adjustment mechanism 41c, but it can also be said that a tilt angle adjustment mechanism for the X-ray detector 100 is provided separately from the horizontal adjustment unit 41 and the vertical adjustment unit 42 which perform translational direction adjustments.

[0063] Furthermore, in this embodiment, the Y-axis adjustment mechanism 41a and Z-axis adjustment mechanism 41b of the horizontal adjustment unit 41 are provided on the horizontal arrangement unit 10 side, and the Y-axis adjustment mechanism 42a and Z-axis adjustment mechanism 42 of the vertical adjustment unit 42 b This is provided on the vertical mounting section 20 side. This makes it possible to independently maintain the adjusted position in the XZ direction in both the vertical and horizontal mounting configurations. In detail, since the Z-axis adjustment mechanism 41b is provided on the mounting section 30 side, it is structurally possible to use the Z-axis adjustment mechanism 41b to adjust the position in the vertical mounting configuration. However, when adjusting the position in the vertical mounting configuration, the Z-axis adjustment mechanism 42 on the vertical mounting section 20 side b By performing adjustments in this manner, the adjusted positions in the XZ direction in both vertical and horizontal orientations can be maintained independently. Furthermore, not limited to the embodiments of this model, at least one of the Y-axis adjustment mechanism 41a and Y-axis adjustment mechanism 42a, and the Z-axis adjustment mechanism 41b and Z-axis adjustment mechanism 42 b By providing at least one of these on the side of the horizontally positioned section 10 or the vertically positioned section 20, the adjusted positions in the XZ direction in the vertical and horizontal configurations can be maintained independently.

[0064] On the other hand, by providing the X-axis rotation adjustment mechanism 41c on the mounting portion 30 side and positioning surfaces 11 and 21 perpendicular to each other, the tilt angle can be maintained at a desired angle in both horizontal and vertical configurations. As a result, even if the configuration is switched, the adjusted positions for both horizontal and vertical configurations can be maintained. In this embodiment, the X-axis rotation adjustment mechanism 41c is provided on the mounting portion 30, but a tilt angle adjustment mechanism that allows simultaneous rotation of the positioning surface 11 and 21 around the X axis may also be provided. That is, a tilt angle adjustment mechanism that allows adjustment of the horizontal configuration portion 10 (positioning surface 11) and the vertical configuration portion 20 (positioning surface 21) from the state shown in Figure 9(a) to the state shown in Figure 6(a) can also be employed.

[0065] Furthermore, a configuration can be adopted in which a tilt angle adjustment mechanism (X-axis rotation adjustment mechanism) for horizontal placement and a tilt angle adjustment mechanism (X-axis rotation adjustment mechanism) for vertical placement are provided separately. In this case, it is not necessary to provide the placement surface 11 and placement surface 21 with a predetermined orthogonal accuracy. Therefore, the tolerances that can be allowed during manufacturing can be increased compared to the case in which the tilt angle adjustment mechanism is shared for both horizontal and vertical placement. In addition, by providing at least one of the tilt angle adjustment mechanism for horizontal placement or the tilt angle adjustment mechanism for vertical placement on the horizontal placement section 10 or the vertical placement section 20 side, the adjusted tilt angles for both horizontal and vertical placement can be maintained.

[0066] The adjustment unit 40 may have a common position adjustment mechanism for both vertical and horizontal configurations, instead of the horizontal adjustment unit 41 and the vertical adjustment unit 42. In this case, fine adjustment of the configuration by the adjustment unit 40 is required each time the configuration is switched. However, as mentioned above, it is not necessary to remove the base from the goniometer each time the configuration is switched, so even in this case, the configuration can be switched more easily than in the conventional method.

[0067] <Other Embodiments> FIG. 10(a) and FIG. 10(b) are diagrams for explaining the difference in measurement results between the horizontal arrangement and the vertical arrangement in one-dimensional measurement. When performing one-dimensional measurement, in the horizontal arrangement, measurement emphasizing angular resolution can be performed, and in the vertical arrangement, measurement emphasizing diffraction intensity can be performed.

[0068] <X-ray diffractometer> Referring to FIG. 1 again, according to one aspect of the present invention, an X-ray diffractometer 200 including the detector pedestal 1 according to the above embodiment and an X-ray detector 100 can be provided. The X-ray diffractometer 200 is a device for performing X-ray diffraction measurement. The X-ray diffractometer 200 may include a goniometer (not shown) and an X-ray generator. For example, the goniometer is provided with a sample stage that supports and rotates the sample. Also, the goniometer can be connected to the detector pedestal 1 such that the distance between the sample on the sample stage and the X-ray detector 100 supported by the detector pedestal 1 can be adjusted. By controlling the rotation angle of the sample stage, the X-ray generated by the X-ray generator is irradiated onto the sample at a predetermined angle. When a predetermined X-ray diffraction condition is satisfied between the X-ray irradiated onto the sample and the crystal lattice plane in the sample, the X-ray diffracts in the sample. The X-ray detector 100 detects the X-ray diffracted by the sample. For example, when the X-ray is incident on the crystal lattice plane of the sample at an angle θ, the diffraction angle of the X-ray is 2θ.

[0069] The above embodiments can be further modified and changed as long as they do not depart from the spirit or scope of the present invention. Also, the features described in connection with one embodiment of the present invention can be used in combination with other embodiments even if not explicitly described above.

Description of reference numerals

[0070] 1: Detector pedestal, 10: Horizontally arranged portion, 20: Vertically arranged portion, 30: Mounting portion

Claims

1. A detector base for an X-ray detector, A first arrangement section for arranging the X-ray detector in a first arrangement, A second arrangement section for arranging the X-ray detector in a second arrangement, A mounting portion capable of fixing the aforementioned X-ray detector, Equipped with, The detector base allows the X-ray detector to be selectively mounted to the first or second mounting section via the mounting section. The arrangement angle of the X-ray detector fixed to the mounting portion is different between the first arrangement and the second arrangement. Detector base.

2. The first arrangement is a horizontal arrangement in which the width direction of the X-ray detector extends laterally, In the second configuration, the X-ray detector is vertically positioned so that its width extends in the vertical direction. The detector base according to claim 1.

3. The system further includes an adjustment unit capable of performing positional adjustment of the three axes of the X-ray detector in the first configuration and positional adjustment of the three axes of the X-ray detector in the second configuration. The detector base according to claim 2.

4. A first adjustment unit includes a first Y-axis adjustment mechanism that allows adjustment of the position of the X-ray detector in the Y-direction perpendicular to the X-direction, which is the detection direction of the X-ray detector in the first arrangement, and a first Z-axis adjustment mechanism that allows adjustment of the position of the X-ray detector in the Z-direction perpendicular to both the X-direction and the Y-direction in the first arrangement. A second adjustment unit includes a second Y-axis adjustment mechanism that allows adjustment of the position of the X-ray detector in the Y direction in the second configuration, and a second Z-axis adjustment mechanism that allows adjustment of the position of the X-ray detector in the Z direction in the second configuration. Furthermore, The detector base according to claim 2.

5. The X-axis rotation adjustment mechanism further comprises adjusting the angle of the X-ray detector around the axis extending in the X direction, In the first and second configurations, the arrangement angles of the X-ray detectors fixed to the mounting portion are orthogonal. The detector base according to claim 4.

6. The first adjustment unit includes a first X-axis rotation adjustment mechanism that adjusts the angle of the X-ray detector around the axis extending in the X direction in the first arrangement. The second adjustment unit includes a second X-axis rotation adjustment mechanism for adjusting the angle of the X-ray detector around the axis extending in the X direction in the second arrangement. The detector base according to claim 4.

7. The first adjustment unit is provided on the mounting unit. The detector base according to claim 5.

8. The X-ray detector is further provided with a connecting part that connects to the goniometer, allowing the distance between the X-ray detector and the object to be detected to be adjusted. The detector base according to claim 7.

9. The detector base according to claim 8, wherein the connecting portion is provided below the first adjustment portion.

10. The first arrangement section and the second arrangement section are, A restricting part that restricts the relative position between the mounting part and each arrangement part, A holding part that holds the position of the mounting part while the relative position is restricted by the restricting part, including, The detector base according to claim 1.

11. The aforementioned retaining part is A contact portion that contacts the aforementioned mounting portion, A moving mechanism that allows the contact portion to move back and forth relative to the mounting portion, A handle for operating the aforementioned moving mechanism, including, The detector base according to claim 10.

12. X-ray detector and The detector base according to claim 1, Equipped with, X-ray diffractometer.

13. The aspect ratio of the detection range of the X-ray detector is 2 or more. The X-ray diffraction apparatus according to claim 12.

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