Solar slit and x-ray analysis device

Abstract

This solar slit includes: a plurality of slit pieces; a plurality of spacer pairs including a first spacer and a second spacer; and a frame body. The frame body includes a base part, a first slit piece restricting part, a second slit piece restricting part, and a first spacer restricting part for restricting movement of the first spacer inward in a width direction. The first spacer includes a first engagement part that engages with the first spacer restricting part.

Description

Solar slit and X-ray analyzer

[0001] The present invention relates to a solar slit and an X-ray analyzer.

[0002] An X-ray analyzer is provided with a solar slit for restricting the divergence of X-rays. The solar slit is formed by stacking a plurality of thin slit pieces such as metal foils. Two adjacent slit pieces are separated from each other by a certain distance by sandwiching a member called a spacer between these slit pieces. The spacers are provided at both ends of each slit piece. By pressing the alternately stacked slit pieces and spacers from above using screws, springs, etc., these slit pieces and spacers are fixed.

[0003] In the above-described conventional solar slit, it is difficult to suppress the displacement of the spacer while avoiding the deformation of the slit piece. That is, in the conventional solar slit, the spacer is not adhered to the slit piece, nor is it fixed to the frame of the solar slit. Therefore, if the force for pressing the slit piece and the spacer is weak, the spacer is not sufficiently fixed, and when an impact is applied to the solar slit, the position of the spacer is likely to shift. A displaced spacer may block the optical path of X-rays and prevent accurate measurement. On the other hand, if the slit piece and the spacer are strongly pressed to prevent the spacer from shifting, deformation such as bending may occur in the slit piece.

[0004] The present invention has been made in view of the above problems, and one of its objects is to provide a solar slit capable of suppressing the displacement of the spacer while avoiding the deformation of the slit piece.

[0005] A solar slit according to an embodiment of the present invention comprises: a plurality of slit pieces each having a first side edge and a second side edge facing each other in the width direction of the X-ray optical path; a plurality of spacer pairs each having a first spacer provided between adjacent slit pieces along the first side edge and a second spacer provided between adjacent slit pieces along the second side edge; and a frame body that houses the slit portion including the plurality of slit pieces and the plurality of spacer pairs, wherein the frame body comprises the slit portion The first spacer includes a base on which the first spacer is placed, a first slit piece restricting portion positioned on the outside of the first side edge in the width direction and fixed to the base, which restricts the movement of the slit piece in the width direction, a second slit piece restricting portion positioned on the outside of the second side edge in the width direction and fixed to the base, which restricts the movement of the slit piece in the width direction, and a first spacer restricting portion that restricts the inward movement of the first spacer in the width direction, wherein the first spacer includes a first engaging portion that engages with the first spacer restricting portion.

[0006] This figure shows an example of the overall configuration of an X-ray analyzer according to an embodiment of the present invention. This is a perspective view of the solar slit. This is a plan view of the slit piece. This is a perspective view of the frame. This is a cross-sectional view of the solar slit. This is a magnified view of the area around the right slit piece regulating part of Figure 5. This is a diagram illustrating the X-ray divergence angle in a solar slit according to a comparative example. This is a diagram illustrating the X-ray divergence angle in a solar slit according to an embodiment of the present invention. This is a diagram showing a spacer regulating part and spacer engagement part according to a modified example. This is a diagram showing a spacer regulating part and spacer engagement part according to a modified example. This is a diagram showing a spacer regulating part and spacer engagement part according to a modified example.

[0007] Embodiments of the present invention will be described in detail below with reference to the drawings.

[0008] Figure 1 shows an example of the overall configuration of an X-ray analyzer 10 according to an embodiment of the present invention. As shown in Figure 1, the X-ray analyzer 10 includes a light source 1, a first solar slit 2, a sample stage 3, a sample 4, a spectroscopic element 5, a second solar slit 6, a detector 7, and an information processing device 8. In this embodiment, the case in which the X-ray analyzer 10 is a fluorescent X-ray analyzer is illustrated.

[0009] Light source 1 generates X-rays that are irradiated onto sample 4. Primary X-rays XR1 emitted from light source 1 are incident on sample 4, which is placed on sample stage 3.

[0010] The secondary X-rays (fluorescent X-rays) XR2 emitted from the sample 4 pass through the first solar slit 2 and are spectrally separated into specific wavelength components by the spectroscopic element 5. The first solar slit 2 limits the divergence of the secondary X-rays XR2 by allowing them to pass through as a parallel beam. The spectrally separated secondary X-rays XR3 pass through the second solar slit 6 (photo-receiving solar slit) and are incident on the detector 7. Here, the second solar slit 6 limits the divergence of the secondary X-rays XR3 by allowing them to pass through as a parallel beam. The size of the second solar slit 6 in the direction of the X-ray optical path is smaller than the size of the first solar slit 2 in the direction of the X-ray optical path. This allows the optical path length to be reduced, thereby suppressing the attenuation of the intensity of the secondary X-rays XR2 and XR3, and also allows the device to be made smaller.

[0011] The detector 7 measures the intensity of the spectrally separated secondary X-rays XR3. The data measured by the detector 7 is output to the information processing device 8 and used for various subsequent analyses. The information processing device 8 is, for example, a personal computer and is used not only for analyzing the measurement data but also for controlling the position and orientation of each element of the X-ray analyzer 10.

[0012] The configuration of the second solar slit 6 will be described in detail below with reference to Figures 2 to 6. In this embodiment, the specific configuration of the first solar slit 2 is the same as that of the second solar slit 6, so its description will be omitted. Hereafter, the second solar slit 6 may simply be referred to as solar slit 6. Figure 2 is a perspective view of the solar slit 6. Figure 3 is a plan view of the slit piece 60. Figure 4 is a perspective view of the frame 62. Figure 5 is a cross-sectional view of the solar slit 6. Figure 6 is an enlarged view of the area around the right slit piece restricting portion 622a in Figure 5.

[0013] As shown in Figure 2, the solar slit 6 has a slit portion S, a frame 62, a mounting portion 63, a protective plate 64, a retaining spring 65, and a cover 66.

[0014] The slit section S includes a plurality of slit pieces 60 and a plurality of spacer pairs 61, and is housed in the frame 62.

[0015] The slit piece 60 is a thin metal foil that suppresses the divergence of X-rays XR3 passing through the solar slit 6. The slit piece may be made of a material other than metal (for example, glass or ceramics). As shown in Figure 3, each slit piece 60 includes an incident edge 60i into which the X-rays are incident, an exit edge 60e into which the X-rays are emitted, and a right edge 60a and a left edge 60b that face each other in the width direction Dx of the X-ray optical path.

[0016] The spacer pairs 61 are provided to separate two adjacent slit pieces 60 by a certain distance, and each includes a plate-shaped member, a right spacer 61a and a left spacer 61b. As shown in Figure 2, the right spacer 61a is provided along the right edge 60a between adjacent slit pieces 60. The left spacer 61b is provided along the left edge 60b between adjacent slit pieces 60. In other words, the slit section S is made up of alternating stacks of slit pieces 60 and spacer pairs 61.

[0017] A retaining spring 65 and a cover 66 are provided above the slit portion S via a protective plate 64 to suppress deformation (bending, etc.) of the slit piece 60. The retaining spring 65 and cover 66 restrict the movement of the slit portion S in the height direction Dz. The mounting portion 63 is a member for attaching the solar slit 6 to the detector 7.

[0018] As shown in Figure 4, the frame 62 includes a base portion 620 on which the slit portion S is placed, a right slit piece restrictor 622a, a left slit piece restrictor 622b, a right spacer restrictor 624a, and a left spacer restrictor 624b. The right slit piece restrictor 622a is positioned on the outside of the right edge 60a in the width direction Dx (Figure 5). The right slit piece restrictor 622a is fixed to the base portion 620 and restricts the movement of the slit piece 60 in the width direction Dx (Figures 4 and 5). The left slit piece restrictor 622b is positioned on the outside of the left edge 60b in the width direction Dx (Figure 5). The left slit piece restrictor 622b is fixed to the base portion 620 and restricts the movement of the slit piece 60 in the width direction Dx (Figures 4 and 5). Specifically, the distance 622d between the right slit piece restrictor 622a and the left slit piece restrictor 622b is equal to the distance 60d between the right edge 60a and the left edge 60b of the slit piece 60 (Figures 3 and 4), thereby restricting the movement of the slit piece 60 in the width direction Dx.

[0019] The right spacer restrictor 624a restricts the movement of the right spacer 61a inward in the width direction Dx (Figures 5 and 6). The right spacer restrictor 624a includes a first pin 624a-1 and a second pin 624a-2 fixed to the base portion 620. The left spacer restrictor 624b restricts the movement of the left spacer 61b inward in the width direction Dx (Figures 5 and 6). The left spacer restrictor 624b includes a first pin 624b-1 and a second pin 624b-2 fixed to the base portion 620.

[0020] Here, as shown in Figures 5 and 6, the right spacer 61a has a right engaging portion 610a that engages with the right spacer restricting portion 624a. The right engaging portion 610a has a shape that protrudes in the width direction Dx and has a first notch 6100a-1 and a second notch 6100a-2. The movement of the right spacer 61a inward in the width direction Dx is restricted when the first pin 624a-1 engages with the first notch 6100a-1 and the second pin 624a-2 engages with the second notch 6100a-2.

[0021] Furthermore, as shown in Figure 5, the left spacer 61b has a left engaging portion 610b that engages with the left spacer restricting portion 624b. The left engaging portion 610b, like the right engaging portion 610a, has a shape that protrudes in the width direction Dx and has a first notch 6100b-1 and a second notch 6100b-2. The movement of the left spacer 61b inward in the width direction Dx is restricted when the first pin 624b-1 engages with the first notch 6100b-1 and the second pin 624b-2 engages with the second notch 6100b-2.

[0022] In other words, according to this embodiment, the right engaging portion 610a of the right spacer 61a engages with the right spacer restricting portion 624a, and the right spacer restricting portion 624a restricts the movement of the right spacer 61a inward in the width direction Dx. Also, the left engaging portion 610b of the left spacer 61b engages with the left spacer restricting portion 624b, and the left spacer restricting portion 624b restricts the movement of the left spacer 61b inward in the width direction Dx. As a result, displacement of the spacer pair 61 can be suppressed without pressing down on the slit piece 60 and the spacer pair 61. Consequently, displacement of the spacer pair 61 can be suppressed while avoiding deformation of the slit piece 60.

[0023] Furthermore, assembling conventional solar slits requires precise assembly techniques to prevent spacer misalignment, making it difficult for inexperienced individuals to assemble them. In contrast, in this embodiment, the spacer pair can be placed without misalignment simply by engaging the right engaging portion 610a of the right spacer 61a with the right spacer restricting portion 624a and engaging the left engaging portion 610b of the left spacer 61b with the left spacer restricting portion 624b. In other words, assembling the solar slit 6 according to this embodiment does not require the skilled technique of applying delicate force to prevent spacer misalignment, so even inexperienced individuals can easily assemble the solar slit 6 according to this embodiment.

[0024] Here, as shown in Figure 6, the length 624r (diameter) of pins 624a-1, 624a-2, 624b-1, and 624b-2 in the width direction Dx is equal to the length 610h of notches 6100a-1, 6100a-2, 6100b-1, and 6100b-2 in the width direction Dx. This ensures that the movement of spacers 61a and 61b inward in the width direction Dx is reliably restricted.

[0025] In this embodiment, the right spacer restricting portion 624a also restricts the movement of the right spacer 61a in the optical path direction Dy. Specifically, in the optical path direction Dy, the movement of the right spacer 61a in the optical path direction Dy is restricted by the arrangement of the first pin 624a-1 and the second pin 624a-2 sandwiching the right engagement portion 610a (Figures 5 and 6). Similarly, the left spacer restricting portion 624b also restricts the movement of the left spacer 61b in the optical path direction Dy. Specifically, in the optical path direction Dy, the movement of the left spacer 61b in the optical path direction Dy is restricted by the arrangement of the first pin 624b-1 and the second pin 624b-2 sandwiching the left engagement portion 610b (Figures 5 and 6).

[0026] Here, as shown in Figure 6, the distance 624d between the end of the first pin 624a-1 and the end of the second pin 624a-2 opposite to it is equal to the length 610l in the optical path direction Dy of the portion of the right engaging portion 610a sandwiched between the first pin 624a-1 and the second pin 624a-2. This ensures that the movement of the right spacer 61a in the optical path direction Dy is reliably restricted. The same applies to the left spacer 61b (not shown).

[0027] Furthermore, in this embodiment, as shown in Figure 3 and the like, the slit piece 60 has a right slit piece engaging portion 600a that engages with the right spacer restricting portion 624a and a left slit piece engaging portion 600b that engages with the left spacer restricting portion 624b. The right spacer restricting portion 624a and the left spacer restricting portion 624b also restrict the movement of the slit piece 60 in the optical path direction Dy. Specifically, in the optical path direction Dy, the first pin 624a-1 and the second pin 624a-2 are provided so as to sandwich the right slit piece engaging portion 600a, and in the optical path direction Dy, the first pin 624a-1 and the second pin 624a-2 are provided so as to sandwich the right slit piece engaging portion 600a, thereby restricting the movement of the slit piece 60 in the optical path direction Dy.

[0028] Here, as shown in Figure 6, the distance 624d between the end of the first pin 624a-1 and the end of the second pin 624a-2 opposite to it is equal to the length 600l of the right slit piece engaging portion 600a in the optical path direction Dy. This ensures that the movement of the slit piece 60 in the optical path direction Dy is reliably restricted. The same applies to the left slit piece engaging portion 600b.

[0029] Now, the configuration of the solar slit 6 according to this embodiment will be described in more detail below. As shown in Figure 5, the slit piece 60 includes a slit region 602. The slit region 602 is a rectangular region defined by an incident side 602i located on the incident edge 60i, an exit side 602e located on the exit edge 60e, a right side 602a extending from the right end of the incident side 602i to the right end of the exit side 602e, and a left side 602b extending from the left end of the incident side 602i to the left end of the exit side 602e. The right side 602a includes the portion of the right side 60a other than the portion related to the right slit piece engagement portion 600a (Figures 3 and 5). The left side 602b includes the portion of the left side 60b other than the portion related to the left slit piece engagement portion 600b (Figures 3 and 5).

[0030] As shown in Figure 5, the right spacer restricting portion 624a and the right engaging portion 610a are located on the outside of the right side 602a of the slit region 602 in the width direction Dx, in the right outer region OAa, sandwiched between the incident side 602i and the exit side 602e. The left spacer restricting portion 624b and the left engaging portion 610b are located on the outside of the left side 602b of the slit region 602 in the width direction Dx, in the left outer region OAb, sandwiched between the incident side 602i and the exit side 602e.

[0031] The effects achieved by the above configuration will be explained below with reference to Figures 7 and 8.

[0032] Figure 7 is a diagram illustrating the X-ray divergence angle in a solar slit according to a comparative example. As a solar slit structure that can suppress the displacement of the spacers while avoiding deformation of the slit piece, in addition to the one shown in this embodiment, it is also conceivable to have a structure like the comparative example shown in Figure 7, in which notches are provided at both ends of the spacers 61a' and 61b', and these notches are used to hook and fix the spacers 61a' and 61b' onto pins 624a'-1, 624a'-2, 624b'-1, and 624b'-2 provided at both ends of the frame.

[0033] However, in the comparative example, it is difficult to avoid increasing the size of the solar slit in the X-ray optical path direction Dy and to suppress the increase in the X-ray divergence angle. In the comparative example, as shown in the upper part of Figure 7, pins 624a'-1, 624a'-2, 624b'-1, and 624b'-2 are provided in region AA (the region shown by the diagonal lines in Figure 7) where it would normally be possible to provide the slit piece 60' in the frame 62'. As a result, a dead space (a region where the slit piece 60' does not exist and the diffusion of X-rays XR3 cannot be suppressed) is created between the end of the slit piece 60' and the end of the frame 62' on the same side as that end. Consequently, the divergence angle θ' of the X-rays XR3 in the comparative example's solar slit, as shown in the lower part of Figure 7, is larger than the divergence angle of the X-rays in the conventional solar slit. On the other hand, in order to make the X-ray divergence angle θ' in the comparative example solar slit the same as or less than the X-ray divergence angle in the conventional solar slit, it becomes necessary to increase the size of the solar slit in the optical path direction Dy of the X-ray XR3.

[0034] Figure 8 illustrates the X-ray divergence angle in a solar slit 6 according to an embodiment of the present invention. In this embodiment, as described above and also shown in the upper part of Figure 8, the right spacer restricting portion 624a and the right engaging portion 610a are located outside the right side 602a of the slit region 602 in the width direction Dx, and are provided in the right outer region OAa, sandwiched between the incident side 602i and the exit side 602e. This prevents the occurrence of dead space as seen in the comparative example. As a result, as shown in the lower part of Figure 8, the X-ray divergence angle θ in the solar slit 6 according to this embodiment is smaller than the X-ray divergence angle θ' of the X-ray XR3 in the comparative example solar slit, and is comparable to the X-ray divergence angle of the conventional solar slit. Therefore, according to this embodiment, it is possible to avoid increasing the size of the solar slit 6 in the optical path direction Dy, and to suppress an increase in the X-ray divergence angle θ.

[0035] Here, as shown in Figures 4 to 6, the right slit piece restricting portion 622a is a wall-like member having a recessed portion 6220a in the right outer region OAa that is recessed outward in the width direction Dx. The left slit piece restricting portion 622b is a wall-like member having a recessed portion 6220b in the left outer region OAb that is recessed outward in the width direction Dx. With this configuration, the slit piece 60 is securely fixed by the wall-like members, and an increase in the size of the solar slit 6 in the optical path direction Dy and an increase in the X-ray divergence angle θ can be avoided.

[0036] The present invention is not limited to the above embodiments, and various modifications are possible.

[0037] For example, in this embodiment, the spacer is shown as a strip-shaped member, but the shape of the spacer is not limited to this, and may be elliptical, for example. Also, each spacer may consist of multiple short plate-shaped members arranged along each side edge of the slit piece.

[0038] Furthermore, in this embodiment, the slit piece restricting portion is exemplified as a wall-like member having a recessed portion, but the shape of the slit piece restricting portion is not limited to this. For example, the slit piece restricting portion may be one or more columnar members provided on the outside in the width direction of each side edge of the slit piece.

[0039] Furthermore, although this embodiment illustrates a case where the base portion is a single plate-shaped member, the base portion may be one or more beam-shaped members.

[0040] Furthermore, in this embodiment, the spacer restricting portion is exemplified as two pins fixed to the base portion, but the number of pins may be one or three or more. Alternatively, as shown in Figures 9A to 9C, for example, the shape of the slit piece restricting portions 9622A, 9622B, and 9622C may be shaped to engage with the engaging portions 9610A, 9610B, and 9610C of the spacers 961A, 961B, and 961C.

[0041] Furthermore, although this embodiment illustrates a case where the engaging portion of the spacer is a projection with two notches, the number of notches may be one or three or more. Also, the engaging portion may have holes instead of notches. The shape of the engaging portion is not limited to these examples, and may be any shape that can engage with the spacer restricting portion, depending on the shape of the spacer restricting portion, as shown in Figures 9A to 9C, for example.

[0042] The present invention can also be implemented with the following configuration. (1) A solar slit comprising: a plurality of slit pieces each having a first side edge and a second side edge facing each other in the width direction of the X-ray optical path; a plurality of spacer pairs each having a first spacer provided between adjacent slit pieces along the first side edge and a second spacer provided between adjacent slit pieces along the second side edge; and a frame body that houses the slit portion including the plurality of slit pieces and the plurality of spacer pairs, wherein the frame body comprises: a base portion on which the slit portion is placed; a first slit piece restricting portion disposed on the outside of the first side edge in the width direction and fixed to the base portion, which restricts the movement of the slit piece in the width direction; a second slit piece restricting portion disposed on the outside of the second side edge in the width direction and fixed to the base portion, which restricts the movement of the slit piece in the width direction; and a first spacer restricting portion that restricts the movement of the first spacer inward in the width direction. (1) The solar slit according to (1), wherein the first spacer includes a first engaging portion that engages with the first spacer restricting portion. (2) The solar slit according to (1), wherein the frame further includes a second spacer restricting portion that restricts the movement of the second spacer inward in the width direction, and the second spacer includes a second engaging portion that engages with the second spacer restricting portion. (3) The solar slit according to (1) or (2), wherein each slit piece further includes an incident edge into which X-rays are incident and an exit edge into which X-rays are emitted, and each slit piece comprises a rectangular slit region defined by an incident edge located on the incident edge, an exit edge located on the exit edge, a first side edge including at least a portion of the first side edge and extending from one end of the incident edge to one end of the exit edge, and a second side edge including at least a portion of the second side edge and extending from the other end of the incident edge to the other end of the exit edge, and the first spacer restricting portion and the first engaging portion are provided in a first outer region sandwiched between the incident edge and the exit edge, on the outside in the width direction of the first side edge of the slit region.(4) The solar slit according to (3), wherein the first slit piece restricting portion is a wall-like member having a recess in its outer region that is recessed toward the outside in the width direction, and the first spacer restricting portion and the first engaging portion are provided to fit into the recess. (5) The solar slit according to any one of (1) to (4), wherein the first spacer restricting portion includes a first rod-shaped body and a second rod-shaped body fixed to the base portion. (6) The solar slit according to (5), wherein the first engaging portion has a shape that protrudes in the width direction and has a first opening and a second opening, and the movement of the first spacer toward the inside in the width direction is restricted by the engagement of the first rod-shaped body with the first opening and the engagement of the second rod-shaped body with the second opening. (7) The solar slit according to (6), wherein the length of the first rod-shaped body in the width direction is equal to the length of the first opening in the width direction. (8) The solar slit according to any one of (5) to (7), wherein the first spacer restricting portion further restricts the movement of the first spacer in the optical path direction of the X-rays. (9) The solar slit according to (8), wherein the movement of the first spacer in the optical path direction of the X-rays is restricted by the first rod-shaped body and the second rod-shaped body being arranged so as to sandwich the first engaging portion in the optical path direction of the X-rays. (10) The solar slit according to claim (9), wherein the distance between the end of the first rod-shaped body and the end of the second rod-shaped body facing the first end is equal to the length in the optical path direction of the portion of the first engaging portion sandwiched between the first rod-shaped body and the second rod-shaped body. (11) The solar slit according to any one of (5) to (10), wherein the slit piece further has a first slit piece engaging portion that engages with the first spacer restricting portion, and the first spacer restricting portion further restricts the movement of the slit piece in the optical path direction of the X-rays. (12) The solar slit according to (11), wherein the movement of the slit piece in the optical path direction of the X-rays is restricted by the first rod-shaped body and the second rod-shaped body being arranged so as to sandwich the first slit piece engaging portion in the optical path direction of the X-rays.(13) The solar slit according to (12), wherein the distance between the end of the first rod-shaped body and the end of the second rod-shaped body opposite to the first end is equal to the length of the first slit piece engaging portion in the optical path direction. (14) An X-ray analyzer having the solar slit according to any one of (1) to (13).

[0043] 1 Light source 2 First solar slit 3 Sample stage 4 Sample 5 Spectroscopic element 6 Second solar slit 7 Detector 8 Information processing device 10 X-ray analyzer 60 Slit piece 60a Right edge 60b Left edge 60e Exit edge 60i Incident edge 61 Spacer pair 61a Right spacer 61b Left spacer 62 Frame 63 Mounting part 64 Protective plate 65 Retaining spring 66 Cover 600a Right slit piece engagement part 600b Left slit piece engagement part 602 Slit region 602a Right side 602b Left side 602e Exit side 602i Incident side 610a Right engagement part 610b Left engagement part 620 Base part 622a Right slit piece regulating part 622b Left slit regulating section 624a Right spacer regulating section 624b Left spacer regulating sections 624a-1, 624b-1 First pins 624a-2, 624b-2 Second pins 6100a-1, 6100b-1 First notches 6100a-2, 6100b-2 Second notches 6220a, 6220b Recessed section Dx Width direction Dy Optical path direction Dz Height direction OAa Right outer region OAb Left outer region S Slit section XR1 Primary X-ray XR2, XR3 Secondary X-ray θ Divergence angle

Claims

1. A solar slit comprising: a plurality of slit pieces each having a first side edge and a second side edge facing each other in the width direction of the X-ray optical path; a plurality of spacer pairs each having a first spacer provided between adjacent slit pieces so as to be along the first side edge and a second spacer provided between adjacent slit pieces so as to be along the second side edge; and a frame body that houses the slit portion including the plurality of slit pieces and the plurality of spacer pairs, wherein the frame body includes: a base portion on which the slit portion is placed; a first slit piece restricting portion disposed on the outside of the first side edge in the width direction and fixed to the base portion, which restricts the movement of the slit piece in the width direction; a second slit piece restricting portion disposed on the outside of the second side edge in the width direction and fixed to the base portion, which restricts the movement of the slit piece in the width direction; and a first spacer restricting portion that restricts the inward movement of the first spacer in the width direction. The first spacer includes a solar slit with a first engagement portion that engages with the first spacer restricting portion.

2. The solar slit according to claim 1, wherein the frame further includes a second spacer restricting portion that restricts the movement of the second spacer inward in the width direction, and the second spacer includes a second engaging portion that engages with the second spacer restricting portion.

3. Each slit piece further includes an incident edge into which X-rays are incident and an exit edge into which X-rays are emitted, and each slit piece comprises a rectangular slit region defined by an incident edge located on the incident edge, an exit edge located on the exit edge, a first side edge including at least a portion of the first side edge and extending from one end of the incident edge to one end of the exit edge, and a second side edge including at least a portion of the second side edge and extending from the other end of the incident edge to the other end of the exit edge, and the first spacer restricting portion and the first engaging portion are provided in a first outer region sandwiched between the incident edge and the exit edge, on the outside in the width direction of the first side edge of the slit region.

4. The solar slit according to claim 3, wherein the first slit piece restricting portion is a wall-like member having a recessed portion in the outer region that is recessed outward in the width direction, and the first spacer restricting portion and the first engaging portion are provided to fit into the recessed portion.

5. The solar slit according to claim 1 or 2, wherein the first spacer restricting portion includes a first rod-shaped body and a second rod-shaped body fixed to the base portion.

6. The solar slit according to claim 5, wherein the first engaging portion has a shape that protrudes in the width direction and has a first opening and a second opening, and the movement of the first spacer toward the inside in the width direction is restricted when the first rod-shaped body engages with the first opening and the second rod-shaped body engages with the second opening.

7. The length of the first rod-shaped body in the width direction is equal to the length of the first opening in the width direction, as described in claim 6.

8. The solar slit according to claim 5, wherein the first spacer restricting portion further restricts the movement of the first spacer in the optical path direction of the X-rays.

9. The solar slit according to claim 8, wherein the movement of the first spacer in the direction of the X-ray optical path is restricted by the first rod-shaped body and the second rod-shaped body being arranged so as to sandwich the first engaging portion in the direction of the X-ray optical path.

10. The distance between the end of the first rod-shaped body and the end of the second rod-shaped body opposite to the first end is equal to the length in the optical path direction of the portion of the first engaging portion sandwiched between the first rod-shaped body and the second rod-shaped body, according to claim 9.

11. The solar slit according to claim 5, wherein the slit piece further has a first slit piece engaging portion that engages with the first spacer restricting portion, and the first spacer restricting portion further restricts the movement of the slit piece in the optical path direction of the X-rays.

12. The solar slit according to claim 11, wherein the movement of the slit piece in the direction of the X-ray optical path is restricted by the first rod-shaped body and the second rod-shaped body being arranged so as to sandwich the first slit piece engaging portion in the direction of the X-ray optical path.

13. The distance between the end of the first rod-shaped body and the end of the second rod-shaped body opposite to the first end is equal to the length of the first slit piece engaging portion in the optical path direction, as described in claim 12.

14. An X-ray analyzer having a solar slit according to claim 1 or 2.

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