Dryers and battery processing equipment

Abstract

The present application discloses a dryer and a battery processing equipment, the dryer is used for drying and crystallizing a material, the dryer includes a vacuum chamber, a crystallization chamber and a heating device, the vacuum chamber forms a first cavity for vacuum drying the material, a second chamber is formed in the crystallization chamber, the first cavity and the second cavity respectively have an input end and an output end, the output end of the first cavity communicates with the input end of the second cavity, such that the first cavity communicates with the second cavity to form a continuous material passage, and a heating device is provided in the crystallization chamber for heating and crystallizing the material in the second cavity.

Description

Technical Field

[0001] This application relates to the field of solar cell processing, and specifically to dryers and battery processing equipment.

Background Art

[0002] In the process of processing materials, it is always necessary to dry the materials. Generally, the materials are directly put into the interior of a heating device. Since the materials contain volatile solvents, the requirements for the process window during the drying process are strict, the reproducibility and stability of the process are low, and the problem that the uniformity of the products decreases easily occurs, which is disadvantageous for mass production.

Summary of the Invention

[0003] The main object of this application is to provide a dryer, aiming to solve the problem of the decrease in product uniformity caused by the small process window existing in the conventional dryer.

[0004] In order to achieve the above object, the dryer provided in this application is used to dry and crystallize materials, and the dryer includes a vacuum chamber forming a first cavity for vacuum drying the materials, a crystal chamber forming a second cavity, wherein the first cavity and the second cavity each have an input end and an output end, and the output end of the first cavity communicates with the input end of the second cavity so that the first cavity communicates with the second cavity to form a continuous material passage, and a heating device provided in the crystal chamber for heating and crystallizing the materials in the second cavity.

[0005] By installing a first cavity and a second cavity to form a material passage, the material is first vacuum-dried in the first cavity, and the volatile solvents in the material are evaporated, forming the material into a relatively stable intermediate state. Because a continuous material passage is used, no external foreign matter is introduced during the vacuum drying and heat crystallization processes, which helps to improve product quality.

[0006] In some examples, the dryer is The system further includes a gas discharge device having an inlet end communicating with the first cavity for discharging gas from the first cavity.

[0007] When the material is vacuum-dried in the first cavity, volatile solvents in the material evaporate, and the volatile solvents are discharged by a gas exhaust device to maintain the first cavity in a preset dry state, thus preventing the volatile solvents from adversely affecting the material.

[0008] In some examples, the gas exhaust device further has an outlet end that communicates with the second cavity. By employing a gas exhaust device to draw the volatile solvent in the first cavity into the second cavity, it is possible to control the atmosphere in the second cavity, thereby making the crystallization effect relatively controllable.

[0009] In some examples, the gas discharge device further has an outlet end, and the dryer is The present invention further includes a temporary storage device having an inlet end, wherein the outlet end of the gas discharge device communicates with the inlet end of the temporary storage device.

[0010] By temporarily storing the volatile solvent discharged from the first cavity in a temporary storage device, the volatile solvent can be easily collected and reused, thereby improving the utilization rate of the raw materials.

[0011] In some examples, the temporary storage device further has an outlet end that communicates with the second cavity.

[0012] When performing a heating crystallization process by secondarily transferring the gas from the temporary storage device to a second cavity, the atmosphere in the second cavity can be adjusted to maintain a consistent atmosphere during material drying and crystallization, thereby improving product quality.

[0013] In some examples, the first cavity and / or the second cavity are closable cavities. By employing closable cavities, control over process parameters can be easily achieved, thereby making the reaction process of the material more controllable.

[0014] In some examples, the dryer is The system further includes a first transition chamber that forms a first transition cavity having an input terminal and an output terminal, The output terminal of the first cavity communicates with the input terminal of the first transition cavity, and the output terminal of the first transition cavity communicates with the input terminal of the second cavity, and the first cavity, the first transition cavity, and the second cavity form the material passage.

[0015] By providing a first transition chamber, it works in cooperation with the vacuum chamber to lower the air pressure between the vacuum chamber and the crystal chamber, allowing for easy transport of material into the crystal chamber.

[0016] In some examples, the first transition cavity is a closable cavity. By forming a closable cavity, process parameters can be controlled and adjusted. By using the first transition cavity to seal the space between the first cavity and the second cavity, process parameter control of the first cavity and the second cavity can be easily achieved.

[0017] In some examples, the first transition cavity comprises a plurality of sequentially interconnected first transition subcavities, where a first transition subcavity adjacent to the first cavity communicates with the output terminal of the first cavity, and a first transition subcavity adjacent to the second cavity communicates with the input terminal of the second cavity.

[0018] By providing multiple first transition subcavities, parameters such as air pressure and / or temperature of each first transition subcavity can be set as needed. This allows the first transition chamber to exert a transition effect between the vacuum chamber and the crystallization chamber, facilitating material transport and improving the material's drying effect as it transitions between the two processes.

[0019] In some examples, the dryer is The system further includes a vacuum pump having an inlet end that communicates with the first cavity.

[0020] By equipping the dryer with a vacuum device, the gas in the first cavity can be easily discharged as needed, thereby creating the necessary negative pressure state within the first cavity.

[0021] In some examples, the inlet end of the vacuum device also communicates with the first transition cavity.

[0022] The vacuum device is used to evacuate the first transition cavity so that a certain degree of negative pressure is present within the first transition cavity, thereby bringing the pressure in the first transition cavity and the pressure inside the first cavity closer together, and allowing the sealing member between the first transition chamber and the vacuum chamber to open easily.

[0023] In some examples, the inlet end of the vacuum pumping device communicates with the first transition sub-cavity adjacent to the first cavity so that the air pressure in the first transition sub-cavity adjacent to the first cavity can approach the air pressure in the first cavity, thereby realizing the air pressure transition from the first cavity to the second cavity.

[0024] In some examples, the dryer further includes a second transition chamber in which a second transition cavity for vacuum drying the material is formed. The second transition cavity has an input end and an output end. The output end of the second transition cavity communicates with the input end of the first cavity. The second transition cavity, the first cavity, the first transition cavity and the second cavity form the material passage.

[0025] By providing the second transition chamber, a transition can be formed at the input end of the first cavity, thereby easily controlling the process parameters of the first cavity. [[ID=There]]

[0026] In some examples, the dryer [[ID=There]] further includes a vacuum pumping device having an inlet end communicating with the second transition cavity.

[0027] By discharging the gas in the second transition cavity by the vacuum pumping device, the second transition cavity serves as a transition cavity between the input end of the first cavity and the outside, thereby easily opening the first cavity.

[0028] In some examples, the heating device includes a first heater provided in the crystallization chamber for heating and crystallizing the material in the second cavity.

[0029] By providing and heating the first heater, the characteristics of rapid heating by the first heater can be utilized to realize the rapid heating of the material and the rapid heating crystallization of the material.

[0030] In some examples, the dryer is The present invention further includes a conveying device provided in the material passage, the conveying device having a conveying table for placing materials, the first heater being a light heater, and the first heater having a light-emitting side provided toward the conveying table.

[0031] By positioning the first heater toward the transport table, heating efficiency can be effectively improved, and the light utilization rate of the first heater can be increased.

[0032] In some examples, there are multiple first heaters, and these multiple first heaters are distributed at intervals.

[0033] By providing multiple first heaters, rapid temperature rise in the second cavity can be achieved, thereby improving heating efficiency.

[0034] In some examples, the heating device is The crystal chamber further includes a second heater, the second heater being a circulating heater for heating the material in the second cavity.

[0035] A second heater is used to improve the heating efficiency of the second cavity so that the material can be heated rapidly, and rapid heating and crystallization of the material can be achieved as needed. By utilizing the second heater provided in the second cavity, temperature uniformity control can be achieved within the second cavity, thereby improving the uniformity of heating.

[0036] In some examples, the second heater is made of a light-transmitting material.

[0037] By employing a light-transmitting material, the position of the second heater can be easily determined as needed, allowing for rapid heating of the material, while also ensuring that its placement does not affect the normal operation of the first heater.

[0038] In some examples, the second heater is provided at least partially between the first heater and the material.

[0039] By heating the material from the same side using the first and second heaters, the material can be rapidly heated and crystallized.

[0040] In some examples, the second heater is located on the side where the material is separated from the first heater.

[0041] By heating the material from different directions using the first and second heaters, the heating efficiency of the material can be improved, allowing the material to be rapidly heated and crystallized.

[0042] In some examples, the heating device is The system further includes a temperature equalization device provided in the crystal chamber to reflect the heat released by the first heater back towards the material.

[0043] The light generated by the first heater is reflected towards the material via a temperature equalization device, thereby making full use of the energy generated by the first heater, improving energy utilization efficiency, and increasing the heating efficiency of the material.

[0044] In some examples, there are multiple crystal chambers, each of which is provided with the second cavity, and each of the crystal chambers is provided with the heating device. The multiple crystal chambers are connected in sequence.

[0045] By providing multiple crystallization chambers, the annealing and crystallization efficiency of the material can be improved through their collaborative operation. By adjusting the temperature of each crystallization chamber, the temperatures of the multiple chambers can be matched to the annealing and crystallization temperature of the material, thereby effectively improving product quality.

[0046] In some examples, the dryer is The system further includes sealing members provided along the passages of the material to seal corresponding locations within the passages of the material.

[0047] By dividing the dryer into multiple functional cavities and using sealing members to open and close the corresponding areas, the vacuum drying process and the heating crystallization process can be provided in relatively independent cavities, allowing the dryer and crystallization chamber to operate independently. This improves the processing efficiency of the material and facilitates the control of process parameters for each of the two processes.

[0048] In some cases, the dryer is used to dry and crystallize perovskite battery material.

[0049] Based on the above examples of dryers, this application further provides examples of battery processing equipment including any one of the above examples of dryers.

[0050] By using the above-mentioned dryer to vacuum-dry the material, followed by heat annealing crystallization, the material has a longer process window, improving the reproducibility and stability of the material processing process, contributing to improved material quality, and further enhancing the quality of solar cell products. [Brief explanation of the drawing]

[0051] To more clearly illustrate the embodiments of this application or the technical solutions in the prior art, the drawings necessary for describing the embodiments or the prior art will be briefly described below. Clearly, the drawings in the following description are only a few embodiments of this application, and those skilled in the art can obtain further drawings based on these drawings without any creative work. [Figure 1] This is a schematic diagram of the structure of an example of a dryer according to this application. [Figure 2] This is a schematic diagram of the structure of another example of a dryer according to this application. [Figure 3] This is a cross-sectional view taken along line 2a-2a in Figure 1. [Figure 4] This is a schematic diagram of the internal structure of another example of a dryer according to this application.

[0052] The realization of the objectives of this application, its functional features, and advantages will be further explained in conjunction with the examples and drawings. [Modes for carrying out the invention]

[0053] The technical concepts described herein will be clearly and completely explained below with reference to the drawings of the embodiments of this application. It is obvious that the embodiments described are only a selection of embodiments of this application, not all of them. All other embodiments derived from the embodiments of this application, without the creative effort of a person skilled in the art, are all within the scope of protection of this application.

[0054] It should be explained that in the embodiments of this disclosure, when there are directional indicators (e.g., up, down, left, right, front, back, etc.), these directional indicators are merely for interpreting the relative positional relationships and motion conditions between each component in a specific orientation (as shown in the figure), and if this specific orientation changes, these directional indicators also change accordingly.

[0055] Where there are descriptions of "first," "second," etc., in the embodiments of this application, these descriptions of "first," "second," etc., are used solely for explanatory purposes and should not be understood as indicating or implying relative importance or implicitly indicating the number of specified technical features. Therefore, features designated as "first," "second," etc., may explicitly or implicitly include at least one such feature. Furthermore, while the technical solutions between each embodiment can be combined with each other, this should be based on the premise that they are feasible to a person skilled in the art. When the combination of technical solutions is contradictory or unfeasible, such a combination of technical solutions should be considered nonexistent and not included in the scope of protection claimed by this application.

[0056] Perovskite materials possess characteristics such as a high light absorption coefficient, high charge carrier mobility, a large charge carrier diffusion length, and an adjustable band gap, making them applicable to the manufacture of semiconductor materials, particularly solar cells. Currently, methods for manufacturing perovskite cells mainly include vacuum deposition, plate coating, printing, and spin coating. In these manufacturing methods, high-quality perovskite thin films are typically produced using solution methods, and high-quality calcium-titanium thin films are formed to create solar cells with superior performance.

[0057] When processing perovskite materials, in order to give the material better crystal quality and relatively good grain size, the perovskite material is usually placed in an annealing apparatus, and the annealing process changes the saturation of the solution, thereby causing the perovskite to crystallize.

[0058] Because volatile solvents are dissolved in the solution, in the manufacturing process of perovskite materials, in some cases, when the perovskite is heated in an annealing furnace, the volatilization process of the volatile solvent occurs in sync with the crystallization of the perovskite. This results in a very short process window for the crystallization process, a very small fault tolerance capacity for the product, and ultimately affects the quality of the battery product.

[0059] This application proposes a dryer 10 that can be used for crystallizing perovskite materials to solve the problem of poor product uniformity in the drying equipment, which in some cases leads to problems of reduced process reproducibility and stability caused by a narrow process window in manufacturing equipment.

[0060] Referring to Figures 1, 2, and 3, in some examples a dryer 10 for drying and crystallizing a material is disclosed, the dryer 10 comprising a vacuum chamber 11, a crystallization chamber 20, and a heating device 22, wherein the vacuum chamber 11 forms a first cavity 111 for vacuum drying the material, and the crystallization chamber 20 forms a second cavity 21, the first cavity 111 and the second cavity 21 each having an input end and an output end, the output end of the first cavity 111 communicating with the input end of the second cavity 21 to form a continuous material passage communicating between the first cavity 111 and the second cavity 21, and the heating device 22 is provided in the crystallization chamber 20 and is used to heat and crystallize the material in the second cavity 21.

[0061] The first cavity 111 within the vacuum chamber 11 can form a negative pressure device as needed to vacuum dry the material. When material enters the first cavity 111, a certain degree of negative pressure is created inside the first cavity 111 to vacuum dry the material placed inside the first cavity 111. The input and output terminals of the first cavity 111 are opened in the vacuum chamber 11, respectively, so that material enters the first cavity 111 through the input terminal of the first cavity 111, and after the material has been vacuum dried inside the first cavity 111, it is output through the output terminal of the first cavity 111.

[0062] A second cavity 21 is formed in the crystallization chamber 20, and a heating device 22 is attached to the crystallization chamber 20 for heating the material in the second cavity 21 in order to heat the material and crystallize it. The input and output terminals of the second cavity 21 are opened in the crystallization chamber 20, and the input terminal of the second cavity 21 communicates with the output terminal of the first cavity 111, so that the material vacuum-dried in the first cavity 111 enters the second cavity 21, anneals and crystallizes in the second cavity 21, and is then output through the output terminal of the second cavity 21.

[0063] The formation of a continuous material passage between the first cavity 111 and the second cavity 21 means that after the material undergoes the vacuum drying process in the first cavity 111, it can be continuously transported directly into the second cavity 21 for annealing and crystallization without going through any other processes. A material passage for placing material is formed inside the dryer 10, and the material passage can be opened or closed. When the material passage is open, it may be used for inputting and outputting material. When the material passage is closed, an independent space is formed within the material passage so that the material can be isolated from the outside of the dryer 10.

[0064] After the material is placed in the first cavity 111, the first cavity 111 is closed so that the material is isolated from the outside. By using the vacuum pump 15 to suck out the gas inside the first cavity 111, the air pressure inside the first cavity 111 is reduced, and the material inside the first cavity 111 is vacuum dried. In order to create a vacuum negative pressure state inside the first cavity 111, vacuum drying is performed inside the first cavity 111 after the material has entered the first cavity 111. As the degree of vacuum increases, both the dissolution point and boiling point of the water inside the material decrease under negative pressure, and the water and other solutions inside the material gain sufficient kinetic energy to detach from the material surface.

[0065] By creating a negative pressure drying environment, volatile solvents in the material are evaporated, bringing the material into an intermediate state. Less volatile solvents in the material can form complexes with the material, thereby creating an intermediate state with a stable structure. This maintains the stability of the intermediate state by keeping the material passages closed. By forming a relatively more stable intermediate state, the time window required for intermediate state annealing is widened. Even if the intermediate state is left for a long time before annealing, secondary phase formation does not occur, and the quality of the final product is not affected. This extends the annealing window, which helps to improve the fault tolerance capacity of the dryer 10, improves production efficiency, and allows the product to be maintained at a preset quality. The time window required for intermediate state annealing refers to the time the material has been left before intermediate state annealing.

[0066] During the annealing process, a stable intermediate state can make the surface of the annealed material rougher, forming an uneven surface. This rough surface creates a suede-like surface, which can act as light trapping by reflecting backlight through the suede. This increases the material's light absorption efficiency, eliminating the need to provide additional backlight-reflective suede and further simplifying the manufacturing process.

[0067] In this example, first, the volatile solvent is removed by a vacuum drying process, and then the material is heated using a heating device 22 to anneal and crystallize it. Since the volatilization process of the volatile solvent and the annealing crystallization process are performed independently, they do not interfere with each other. As a result, the process windows for the volatilization process and the annealing crystallization process are relatively widened, effectively improving the reproducibility of the product processing process. Furthermore, because the two processes do not influence each other, the stability of the two processes is relatively high, effectively reducing product defects and improving product quality.

[0068] In some examples, the first cavity 111 and / or the second cavity 21 are closable cavities. The first cavity 111 and the second cavity 21 can be closed, and when vacuum drying and heating crystallization are performed, the material passages can both be closed, so that the material can be isolated from the external environment, preventing the material from absorbing gases and impurities from the external environment, and avoiding the interaction between external impurities and the material during the vacuum drying or annealing crystallization process which affects the quality of the material. When the heating device 22 is heating, the material is placed using the closed second cavity 21, and the heating device 22 can rapidly heat the inside of the second cavity 21, thereby easily achieving a rapid temperature rise in the first cavity 111. When the temperature rise reaches a preset temperature, the first cavity 111 can be kept closed, making it easy to maintain the temperature inside the first cavity 111 and allowing the material to be sufficiently annealed and crystallized. When used to dry materials of different components, the closed first cavity 111 allows for easy control of the environment within the first cavity 111, including air pressure, temperature, humidity, and atmosphere. This allows the dryer 10 to be better adapted for drying and crystallizing different materials, thereby ensuring material quality and improving the adaptability of the dryer 10.

[0069] The first cavity 111 is a closable cavity, and in some examples, a structure such as a gate is provided in the vacuum chamber 11 as a sealing member 16 to close the first cavity 111, which is part of the material passage, when vacuum drying is performed. The second cavity 21 is a closable structure, and when the inside of the second cavity 21 is heated by the heating device 22, the second cavity 21, which is part of the material passage, is kept closed, thereby allowing the inside of the second cavity 21 to be rapidly heated, and the first cavity 111 and the second cavity 21 are installed independently of each other and do not interfere with each other. In some examples, the crystallization chamber 20 is provided with a structure such as a gate as a sealing member 16 to close the second cavity 21 when heating crystallization is performed. The above sealing member 16 may be of other structures and is not limited thereto. The fact that the first cavity 111 can communicate with the second cavity 21 means that when the sealing member 16 at the connection point between the first cavity 111 and the second cavity 21 is open, the first cavity 111 and the second cavity 21 communicate with each other, and when the sealing member 16 at the connection point between the first cavity 111 and the second cavity 21 is closed, the first cavity 111 and the second cavity 21 are isolated from each other.

[0070] In this example, the vacuum chamber 11 and the crystallization chamber 20 work together to form an overall structure, allowing the vacuum-dried material to easily enter the crystallization chamber 20 through the vacuum chamber 11. This allows for easy control of the time the vacuum-dried material is left in the chamber, making it easy to control when the material enters the crystallization chamber 20 within the annealing process window for annealing and crystallization. This results in higher consistency in product processing, easier control of the process, and effective control of the processing quality of the material.

[0071] To make it clear, the vacuum chamber 11 in this example can create a vacuum negative pressure environment within the first cavity 111 to perform a vacuum drying operation on the material. The vacuum chamber 11 may further include other functional components for controlling the vacuum drying process. In this example, the heating device 22 is used to create a high-temperature environment within the second cavity 21 so that the material anneals and crystallizes within the second cavity 21, and the heating device 22 only needs to be able to achieve the heating annealing and crystallization of the corresponding material.

[0072] In some examples, a vacuum device 15 is provided outside the dryer 10, and the vacuum device 15 may be part of the dryer 10, or the vacuum device 15 and the dryer 10 may be detachably connected. The vacuum device 15 is used to evacuate the gas from the first cavity 111 in order to maintain a negative pressure state inside the first cavity 111. The vacuum device 15 has an inlet end and an outlet end, and the gas from the first cavity 111 can be evacuated by having the inlet end of the vacuum device 15 communicate with the first cavity 111 and the outlet end of the vacuum device 15 communicate with any space outside the dryer 10.

[0073] The heating device 22 is used to heat and crystallize the material in the second cavity 21. The heating device 22 can be in direct contact with the material to achieve heating by contact, or it can heat the air in the material passage to achieve indirect heating by heating the material with heated air.

[0074] In some examples, the heating device 22 is mounted at any position within the first cavity 111 and is used to heat-anneal and crystallize the material after vacuum drying of the material is complete. In some examples, the material is placed in a tray 60, and the heating device 22 can be positioned adjacent to the tray 60 so that the heating device 22 can directly heat the material in the tray 60. In some examples, the heating device 22 and the tray 60 are in contact with each other, transferring heat to the material through the tray 60 and achieving heat-anneal and crystallization of the material.

[0075] In some examples, the dryer 10 has a conveying device 30 for transporting the material, and the material moves along a trajectory formed by the conveying device 30. A heating device 22 can be suspended outside the conveying device 30, and the heating device 22 heats the gas around the material to achieve indirect heating of the material, or the heating device 22 can be mounted directly on the conveying device 30 to directly heat the material.

[0076] In some examples, the conveying device 30 drives the material to transport it continuously along the material passage, and the residence time of the material in the first cavity 111 and / or the second cavity 21 can be controlled by controlling the operating speed of the conveying device 30. The conveying device 30 can also drive the material to transport it intermittently along the material passage, so that the material is held in the first cavity 111 for a first preset time, then after a second preset time within the process window of the annealing crystallization process of the material, it enters the second cavity 21, is held in the second cavity 21 for a third preset time, and the annealing crystallization operation is completed.

[0077] In some examples, the crystal chamber 20 is provided with a pneumatic valve 80 communicating with a second cavity 21 to control the air pressure in the crystal chamber 20 via the pneumatic valve 80. In some examples, the output end of the second cavity 21 is provided with a valve 70 for closing the output end of the second cavity 21 to control the temperature of the second cavity 21. When the material has completed annealing crystallization in the second cavity 21, the valve 70 is opened to remove the material from the second cavity 21.

[0078] Continuing to refer to Figure 1, in some examples the dryer 10 further includes a gas discharge device 14 having an inlet end, the inlet end of which communicates with the first cavity 111 to discharge gas from the first cavity 111.

[0079] When performing a vacuum drying process, volatile solvents in the material are volatilized and discharged via the gas discharge device 14, allowing the material to form a stable intermediate state during the vacuum drying process. This relatively widens the process window for annealing and crystallization, allowing for easy adjustment of process parameters within the dryer 10 within the process window, ensuring product quality, and effectively improving the controllability and reproducibility of the drying process. Because volatile solvents are discharged, it is possible to prevent them from affecting the stability of the intermediate state by secondary bonding with the material within the process window of heating and crystallization.

[0080] The inlet end of the gas discharge device 14 is in communication with the first cavity 111, and the gas discharge device 14 may further have an outlet end, which may be in communication with the outside of the dryer 10 or with another container in order to recover the volatile solvent.

[0081] The vacuum chamber 11 has through holes that communicate with the first cavity 111, and the gas exhaust device 14 has an inlet end and an outlet end. The inlet end of the gas exhaust device 14 communicates with the through holes of the vacuum chamber 11 via a pipeline so that the solvent volatilized from the first cavity 111 can be discharged when the gas exhaust device 14 is operating. In this example, the vacuum chamber 11 is provided with a plurality of through holes that communicate with the first cavity 111, and the inlet end of the gas exhaust device 14 communicates with a plurality of through holes so that the volatilized solvent can be drawn in from different positions. Furthermore, the plurality of through holes are spaced apart along the direction of the material passage so as to sufficiently discharge the volatile solvent in the first cavity 111.

[0082] Since the volatile solvent in the first cavity 111 can be discharged, the material in the first cavity 111 can form a relatively stable intermediate state. By utilizing the negative pressure environment in the first cavity 111, the stability of the intermediate state is improved, thereby relatively extending the process window before the material enters the crystallization chamber 20. Furthermore, the parameters of the annealing process can be adjusted as needed, resulting in greater controllability and reproducibility of the annealing crystallization process. The resulting product is also relatively more stable, effectively improving the quality of the product.

[0083] Furthermore, in some examples, the outlet end of the gas exhaust device 14 communicates with the second cavity 21. By drawing the volatile solvent from the first cavity 111 into the second cavity 21 and replenishing it, the volatile solvent can be replenished to the material undergoing the annealing crystallization process in the second cavity 21, thereby effectively ensuring the crystallization quality of the material and enabling the recovery and reuse of the volatile solvent.

[0084] Furthermore, in some examples, the dryer 10 further includes a temporary storage device 90 having an inlet end, the outlet end of the gas discharge device 14 communicating with the inlet end of the temporary storage device 90. The temporary storage device 90 is used to store volatile solvents discharged from the first cavity 111 to prevent air pollution. If necessary, the volatile solvents in the temporary storage device 90 can be reused.

[0085] The temporary storage device 90 may be a gas tank or another closable container. The inlet end of the temporary storage device 90 may be an opening formed in the temporary storage device 90, or it may be a pipeline connected to the temporary storage device 90. The temporary storage device 90 has a containment cavity for containing a volatile solvent, and the volatile solvent enters the temporary storage device 90 through its inlet end and is stored inside the temporary storage device 90.

[0086] Furthermore, in some examples, the temporary storage device 90 has an outlet end that communicates with a second cavity 21. When performing a vacuum drying process, the gas discharge device 14 discharges the volatile solvent that has evaporated from the first cavity 111, and the volatile solvent is temporarily stored in the temporary storage device 90. When performing an annealing crystallization process, the volatile solvent in the temporary storage device 90 can be replenished into the second cavity 21, thereby maintaining a preset atmosphere in the second cavity 21, enabling atmospheric control during the material drying process, and allowing for greater control over the material quality. In some examples, the crystallization chamber 20 has a through-hole that communicates with the second cavity 21, and the outlet end of the temporary storage device 90 communicates with the through-hole in the crystallization chamber 20 so that the volatile solvent discharged from the first cavity 111 can enter the second cavity 21. Furthermore, the crystal chamber 20 is provided with a plurality of through holes spaced apart along the direction of the material passage to uniformly transport the volatile solvent to the material in the second cavity 21.

[0087] In some examples, the dryer 10 further includes a first transition chamber 13 that forms a first transition cavity 131 having an input end and an output end, the output end of the first cavity 111 communicating with the input end of the first transition cavity 131, the output end of the first transition cavity 131 communicating with the input end of a second cavity 21, and the first cavity 111, the first transition cavity 131 and the second cavity 21 forming a material passage.

[0088] A first transition cavity 131 is provided in the first transition chamber 13 as an intermediate transition region between the first cavity 111 and the second cavity 21. The first transition cavity 131 has an input end communicating with the output end of the first cavity 111 and an output end communicating with the second cavity 21, such that the second transition cavity 121, the first cavity 111, and the second cavity 21 form a continuous material passage.

[0089] In some examples, the first transition cavity 131 is a closable cavity. The first transition cavity 131 seals the input end of the first cavity or the input end of the second cavity. In some examples, by providing a sealing member 16 at the input end of the first transition cavity 131, the sealing member 16 of the first transition cavity 131 has the effect of sealing the corresponding position in the material passage, allowing the first cavity 111 to maintain a good vacuum state. Furthermore, optionally, a sealing member 16 is provided at the output end of the first transition cavity 131 so as to maintain a preset sealed state both within the first transition cavity 131 and the first cavity 111.

[0090] Referring to Figure 4, in some examples, the first transition cavity 131 includes a plurality of sequentially connected first transition subcavities 131a, where a first transition subcavity 131a adjacent to the first cavity 111 communicates with the output terminal of the first cavity 111, and a first transition subcavity 131a adjacent to the second cavity 21 communicates with the input terminal of the second cavity 21. By forming a plurality of first transition subcavities 131a, a transition can be easily made between the first cavity 111 and the second cavity 21. The transition includes atmospheric pressure and / or temperature. Because the process window of the material before the second cavity 21 is extended, the residence time of the material between the plurality of first transition subcavities 131a is extended, making it easy to control and adjust process parameters and to easily realize the movement and transition of material between the first cavity 111 and the second cavity 21.

[0091] In some examples, the plurality of first transition subcavities 131a are a series of independent subcavities provided within the first transition cavity 131. In some examples, the plurality of first transition subcavities 131a form a series of intermediate transition regions between the first cavity 111 and the second cavity 21, and the pressure of the plurality of first transition subcavities 131a can be gradually decreased toward the crystal chamber 20 from the vacuum chamber 11 to achieve a gradual pressure transition to easily open the sealing member 16. The temperature of the plurality of first transition subcavities 131a can be gradually increased toward the crystal chamber 20 from the vacuum chamber 11 to gradually heat the material.

[0092] In some examples, the dryer 10 further includes a vacuum device 15 having an inlet end, the inlet end of which communicates with a first cavity 111. The first transition cavity 131 is used to vacuum dry the material. The material enters the first cavity 111 for vacuum drying, and then is transported to the first transition cavity 131 for secondary vacuum drying, which allows the volatile solvent in the material to evaporate sufficiently. When the material enters the crystallization chamber 20, the less volatile solvent in the material forms a stable intermediate state with the material, improving the quality of the product. The first transition cavity 131 can be the transition cavity at the output end of the first cavity 111, allowing the material to be vacuum dried gradually and further allowing the volatile solvent in the material to evaporate sufficiently, thus avoiding affecting the annealing crystallization process.

[0093] The air pressure in the first transition cavity 131 may be greater than the air pressure in the first cavity 111, so that the first transition cavity 131 becomes a transition region between the first cavity 111 and the second cavity 21, thereby preventing the sealing member 16 from opening properly due to an excessively large pressure difference between the first cavity 111 and the second cavity 21.

[0094] In some examples, there are multiple first transition subcavities 131a, and a heating device 22 is provided within the first transition subcavities 131a. The first transition subcavities 131a are used to preheat the material. Furthermore, the dryer 10 includes multiple first transition chambers 13 as described in any one of the above examples, and the temperature within the first transition subcavities 131a gradually increases from the vacuum chamber 11 toward the crystal chamber 20.

[0095] In some examples, there are multiple first transition subcavities 131a, and the inlet end of the vacuum device 15 also communicates with the first transition subcavities 131a, and the vacuum device 15 reduces the pressure in the corresponding first transition subcavity 131a by discharging the gas in the first transition subcavity 131a that it communicates with. In some examples, the inlet end of the vacuum device 15 communicates with the first transition subcavity adjacent to the first cavity 111.

[0096] In some examples, the atmospheric pressure of the first transition subcavity 131a adjacent to the vacuum chamber 11 is lower than that of the first transition subcavity 131a adjacent to the crystal chamber 20. Furthermore, in some examples, the atmospheric pressure of multiple first transition subcavities 131a gradually increases from the vacuum chamber 11 toward the crystal chamber 20, and this gradually increasing pressure allows for gradual adjustment of the atmospheric pressure between the vacuum chamber 11 and the crystal chamber 20, facilitating the opening of the sealing members 16 between adjacent cavities and facilitating the continuous transport of material along the material passage.

[0097] In some examples, the vacuum device 15 is a vacuum pump. In some examples, a one-way valve is provided at the inlet end of the vacuum device 15, and by controlling the opening degree of the one-way valve, the flow rate at the corresponding inlet end can be controlled, thereby enabling pressure control of different cavities with a single vacuum pump, and thus multiple cavities exhibiting different pressure states.

[0098] In some examples, there are multiple first transition subcavities 131a, and the inlet end of the gas exhaust device 14 also communicates with the first transition subcavities 131a. The gas exhaust device 14 is used to exhaust the gas in the first transition subcavities 131a connected to it so that the volatile solvent is discharged outside the corresponding cavity.

[0099] In some examples, the dryer 10 further includes a second transition chamber 12 in which a second transition cavity 121 for vacuum drying the material is formed, the second transition cavity 121 having an input end and an output end, the output end of the second transition cavity 121 communicating with the input end of the first cavity 111, and the second transition cavity 121, the first cavity 111, the first transition cavity 131 and the second cavity 21 form a material passage.

[0100] A first cavity 111, as described in any one of the above examples, is formed inside the vacuum chamber 11 for vacuum drying the material. The vacuum chamber 11 has an input terminal and an output terminal that communicate with the first cavity 111, and the output terminal of the first cavity 111 communicates with the input terminal of the second cavity 21, as described in any one of the above examples, so that the vacuum-dried material can be transported into the second cavity 21.

[0101] The second transition chamber 12 is located at the input end of the first cavity 111. The second transition chamber 12 has an input end that serves as the input position for the material to the dryer 10 and an output end that communicates with the input end of the first cavity 111. After the material is vacuum-dried in the second transition chamber 12, it enters the first cavity 111 for secondary vacuum drying.

[0102] In some examples, a sealing member 16 is provided at the input end of the second transition cavity 121 to maintain a better vacuum state within the material passage, thereby facilitating vacuum drying of the material. Furthermore, in this example, the input and output ends of the second transition cavity 121 are optionally provided with sealing members 16 so that both the second transition cavity 121 and the first cavity 111 are pre-set and sealed, thereby facilitating vacuum drying of the second transition cavity 121.

[0103] The second transition cavity 121, the first cavity 111, the first transition cavity 131, and the second cavity 21 form the material passages, allowing the material to be pre-vacuum dried in the second transition cavity 121, then vacuum dried again after entering the first cavity 111, thereby improving the vacuum drying efficiency. By vacuum drying the material in the second transition cavity 121, some of the volatile solvent in the material is evaporated, and by performing secondary vacuum drying in the first cavity 111 after the material enters the first cavity 111, the volatile solvent in the material is further reduced, and the less volatile solvent can form a stable intermediate state with the material. As a result, after the material enters the annealing furnace, the solvent evaporation and material crystallization occur in sync, avoiding defects such as holes in the material and improving product quality.

[0104] The air pressure in the second transition cavity 121 may be equal to the air pressure in the first cavity 111, and the air pressure in the second transition cavity 121 may also be less than the air pressure in the first cavity 111. The second transition chamber 12 can form a cavity for transition to the input end of the vacuum chamber 11 so as to avoid the problem that the sealing member 16 of the first cavity 111 does not open due to too large a pressure difference between the first cavity 111 and the outside.

[0105] In some examples, there are multiple second transition chambers 12, each having a second transition cavity 121. The multiple second transition chambers 12 are connected in sequence to form multiple transition cavities at the input end of the first cavity 111. The pressure in the second transition cavities 121 formed by the multiple second transition chambers 12 gradually increases so that the pressure in the second transition cavity 121 adjacent to the first cavity 111 approaches the pressure in the first cavity 111, i.e., in the material transport direction, allowing the sealing member 16 of the first cavity 111 to open easily.

[0106] The dryer 10 is provided with a gas discharge device 14 as described in any one of the above examples, and the inlet end of the gas discharge device 14 is in communication with the second transition cavity 121 in order to discharge the volatile solvent in the second transition cavity 121.

[0107] In this example, the second transition chamber 12 may be provided with a through-hole for connecting the inlet end of the gas discharge device 14, thereby enabling the gas discharge device 14 to communicate with the second transition cavity 121 via a pipeline. Here, the second transition chamber 12 may be provided with multiple through-holes so that the inlet end of the gas discharge device 14 can communicate with the second transition cavity 121 from multiple positions. Furthermore, the multiple through-holes are provided at intervals in the second transition chamber 12 along the extending direction of the material passage. The extending direction of the material passage described in this example coincides with the material transport direction in the drying crystallization process.

[0108] In some examples, the dryer 10 includes a vacuum device 15 having an inlet end that communicates with a second transition cavity 121. The vacuum device 15 has an inlet end and an outlet end, and through the vacuum device 15, a negative pressure vacuum environment is created in the dryer 10. Through holes are provided at the locations of the dryer 10 corresponding to the first cavity 111, the second transition cavity 121, and the first transition cavity 131, for connecting the vacuum device 15, so that the inlet end of the vacuum device 15 can communicate with the first cavity 111, the second transition cavity 121, and the first transition cavity 131, respectively. To facilitate the control of the pressure in the second transition cavity 121, the first cavity 111, and the first transition cavity 131, in some examples, throttle valves are provided in the pipelines of the vacuum pump 15 connecting the second transition cavity 121, the first cavity 111, and the first transition cavity 131, thereby controlling the flow rate of the corresponding pipelines to achieve pressure control in the second transition cavity 121, the first cavity 111, and the first transition cavity 131.

[0109] In some examples, at the locations of the dryer 10 corresponding to the second transition cavity 121, the first cavity 111, and the first transition cavity 131, multiple sets of through-holes are provided so that the vacuum device 15 communicates with multiple locations of the second transition cavity 121, the first cavity 111, and the first transition cavity 131, thereby achieving rapid depressurization of the second transition cavity 121, the first cavity 111, and the first transition cavity 131. Multiple through-holes for connecting the inlet end of the vacuum device 15 can be spaced along the extending direction of the material passage.

[0110] In some examples, the dryer 10 includes the conveying device 30 described in any one of the above examples. In some examples, the dryer 10 further includes a material supply table 40 provided at the input end of the dryer 10 and a material discharge table 50 provided at the output end of the crystallization chamber 20, where the material can be placed in a tray 60, and by placing the tray 60 on the material supply table 40, the material enters the input end of the dryer 10 and is conveyed along the material passage by the conveying device 30. The material is annealed and crystallized through a second cavity 21 in the crystallization chamber 20, and then the material is discharged from the material discharge table 50.

[0111] In some examples, the dryer 10 includes a conveying device 30 as described in any one of the above examples. The conveying device 30 can convey the material continuously and adjust the material conveying speed and the residence time of the material in the corresponding cavity by controlling the movement speed of the conveying device 30. The conveying device 30 can also convey the material intermittently, thereby allowing the material to remain in each cavity for a predetermined time and enabling the material to perform the corresponding process operation in the corresponding cavity.

[0112] The heating device 22 is used to raise the temperature in the annealing cavity, thereby performing the annealing crystallization operation on the material. In some examples, the heating device 22 is a first heater 221 provided in the crystallization chamber 20 to heat the material in the second cavity 21.

[0113] In some examples, the first heater 221 may be a photoheater that conducts heat by infrared radiation. Taking heating using infrared light as an example, when infrared radiation is irradiated onto a material, some of the radiation is reflected back and some is transmitted. When the emitted far-infrared wavelength matches the absorption wavelength of the material, the material absorbs the far-infrared radiation. At this time, resonance occurs between the molecules and atoms inside the object, generating strong vibrations and rotations in the material molecules. These vibrations and rotations increase the temperature of the material, achieving the purpose of heating. By employing the infrared heating device 22, it is possible to heat the material rapidly and uniformly, achieve a rapid temperature increase, and improve the annealing crystallization efficiency.

[0114] Since the material first undergoes a vacuum drying process, it forms a stable intermediate state. When a heating annealing process is performed, the rough surface forms a suede-like surface, and by performing backlight reflection through the suede, it can further act as a light trapping surface. This allows for more efficient use of the energy generated by the first heater 221, thereby improving the annealing efficiency of the material.

[0115] Furthermore, in some examples, the first heater 221 is positioned above the material so that it can emit infrared rays from top to bottom and act on the surface of the material. This avoids shielding of infrared rays by trays 60, conveying devices 30, etc., and improves heating efficiency.

[0116] In some examples, the dryer 10 further includes a conveying device 30 provided in the material passage, the conveying device 30 is located in the material passage, the first heater 221 is a light heater, the conveying device 30 has a conveying platform for placing material, and the first heater 221 has a light-emitting side provided toward the conveying platform.

[0117] The transport platform is used to place the material, and as the transport device 30 operates, the material can move relative to it within the material passage. The transport platform may be a platform parallel to the horizontal plane so as to transport the material horizontally. The transport platform may also be a platform that forms an angle with the horizontal plane, so that during the material transport process within the material passage, the transport trajectory of the material undergoes a change in the vertical direction, and the material can be transported as needed.

[0118] Since the light-emitting side of the first heater 221 faces the transport platform, the light radiation generated by the first heater 221 acts directly on the material, avoiding shielding by the material. If the transport platform is a platform parallel to the horizontal plane, the first heater 221 is positioned above the transport platform to achieve heating by infrared radiation, emitting infrared light onto the material from top to bottom. If the transport platform is positioned at an angle to the horizontal plane, the light-emitting side of the first heater 221 faces the transport platform so that the infrared radiation generated by the first heater 221 can act directly on the material on the transport platform.

[0119] Furthermore, in some examples, there are multiple first heaters 221, and the multiple first heaters 221 are distributed at intervals. When installed, multiple first heaters 221 can be provided along the extending direction of the material passage, and in some examples, the longitudinal direction of the material passage is its extending direction, and multiple first heaters 221 are provided along the width direction of the material passage. By providing multiple first heaters 221, rapid heating of the material passage can be easily achieved, and at the same time, the annealing temperature in the material passage can be controlled by maintaining a preset temperature after heating, improving the efficiency of material annealing crystallization, and by controlling the annealing crystallization temperature, a relatively stable and uniform state can be formed after material annealing crystallization, thereby improving product quality.

[0120] In some examples, the first heater 221 can be distributed in multiple sets, each set containing multiple first heaters 221, and the multiple first heaters 221 in each set are spaced apart along the extending direction of the material passage, and the multiple sets of first heaters 221 can also be arranged according to other rules to increase the infrared radiation area.

[0121] Furthermore, when the material is transported along the conveyor table, multiple first heaters 221 can be distributed at intervals along the extending direction of the conveyor table.

[0122] In some examples, the heating device 22 further includes a second heater 222. The second heater 222 is located in the crystal chamber 20 and is a circulating heater for heating the material in the second cavity 21.

[0123] The second heater 222 may be a device having a heating function by electric heating or other heating methods. Furthermore, in some examples, the second heater 222 has a passage for containing a fluid medium, and when the fluid medium flows along the second heater 222, the second heater 222 directly or indirectly exchanges heat with the material, thereby heating the material in the material passage. In some examples, the second heater 222 can absorb some of the heat generated by the first heater 221, and after absorbing and storing some heat, the second heater 222 can act on the material by heat radiation, making full use of the energy of the first heater 221 to maintain the temperature of the material in the second cavity 21 and equalize the temperature.

[0124] In some examples, there are multiple second heaters 222, which are spaced apart. The second heaters 222 are used to heat the material from different locations, and by providing multiple second heaters 222, they are used to raise the temperature of the material passage from different positions, thereby allowing the material passage to rapidly reach the annealing temperature. By having the multiple second heaters 222 work together with the first heater 221, the heating rate of the material passage can be further increased, allowing the material passage to rapidly reach the crystallization temperature of the material. By providing multiple second heaters 222 to heat different locations of the material, the heating of the material becomes relatively uniform, thereby improving the crystallization quality of the material.

[0125] In some examples, the second heater 222 is made of a light-transmitting material. This means that the second heater 222 is allowed to transmit light of at least certain frequencies. In this example, the second heater 222 is allowed to transmit at least infrared light so as not to obstruct the first heater 221. Because a light-transmitting material is used, the second heater 222 does not affect the first heater 221, allowing for the selection of different mounting positions as needed, bringing the second heater 222 closer to the material on the conveyor table, and enabling more efficient utilization of the heat generated by the second heater 222.

[0126] Furthermore, in some examples, the second heater 222 is made of a light-transmitting material and is placed between the first heater 221 and the material. The second heater 222 and the first heater 221 can heat the material simultaneously, allowing heat to act rapidly on the material and achieving a rapid temperature rise. When the material passage reaches a preset temperature, the material can be kept warm through the second heater 222 so that the material maintains its crystallization temperature, thereby enabling annealing crystallization of the material.

[0127] In some examples, the second heater 222 is located on one side of the material away from the first heater 221, such that the first heater 221 and the second heater 222 each heat both sides of the conveying platform, while the second heater 222 does not shut off the first heater 221 in order to sufficiently improve the energy utilization rate of the first heater 221. In some examples, the material is placed on the conveying platform described in any one of the above examples, and the material is rapidly heated by the first heater 221 and the second heater 222 located on both sides of the conveying platform. Once the material reaches the annealing crystallization temperature, the material can be kept warm via the second heater 222, thereby allowing the material to crystallize sufficiently. Since both sides of the material conveying platform can be affected by the heat, the heat of the material becomes relatively more uniform, which helps to improve the quality of the product.

[0128] In some examples, the first heater 221 and the second heater 222 are located on the same side of the material transport platform, and their projections on the horizontal plane are offset from each other to prevent interference, thereby improving energy utilization.

[0129] To improve the utilization rate of infrared radiation from the first heater 221, in some examples, the heating device 22 further includes a temperature equalization device 223 provided in the crystal chamber 20 to reflect the heat emitted by the first heater 221 toward the material. The temperature equalization device 223 may be a reflector and has a reflective surface, and the infrared radiation generated by the first heater 221 diffuses toward the inner wall surface of the second cavity 21, and the temperature equalization device 223 is used to reflect the infrared radiation toward the material and improve the energy utilization rate. The infrared radiation generated by the first heater 221 can act more concentratedly on the material, thereby effectively improving the heating rate of the material. In this example, the temperature equalization device 223 has a reflective surface that can reflect infrared radiation, and the reflective surface may be a plane, an arcuate surface, or a combination of a plane and an arcuate surface.

[0130] Furthermore, in this example, a second heater 222 is provided within the second cavity 21, and the temperature equalization device 223 and the second heater 222 are each provided on the inner wall surface of the second cavity 21, and the temperature equalization device 223 and the second heater 222 are offset from each other so that the second heater 222 can be used to rapidly heat the material, and the temperature equalization device 223 can be used to reflect the infrared radiation generated by the first heater 221 onto the material, and a uniform temperature in the material passage is achieved through the cooperation of multiple types of components.

[0131] In some examples, there are multiple crystal chambers 20, each crystal chamber 20 having a second cavity 21, each crystal chamber 20 being equipped with a heating device 22, and the multiple crystal chambers 20 are connected in sequence.

[0132] Each of the multiple crystallization chambers 20 has a second cavity 21, and each of the multiple second cavities 21 can be used to anneal and crystallize the material. Since the crystallization chambers 20 are used to anneal and crystallize the material that has been vacuum-dried in the vacuum chamber 11, by providing multiple crystallization chambers 20 that are in communication with each other, multiple second cavities 21 for annealing and crystallization are formed, thereby improving the annealing efficiency of the material. Each crystallization chamber 20 is provided with a heating device 22, so that the multiple crystallization chambers 20 work together to provide a heat retention effect, bringing the material to the annealing and crystallization temperature, thereby enabling sufficient crystallization of the material, avoiding the problem of material non-uniformity caused by temperature non-uniformity, and further helping to maintain product quality.

[0133] When used for annealing crystallization of different materials, the temperature in multiple second cavities 21 can be set to meet the annealing requirements of different materials, thereby allowing control over the quality of annealing crystallization of the materials as needed.

[0134] In some examples, the dryer 10 has a gas discharge device 14 as described in any one of the above examples, and the gas discharged by the gas discharge device 14 is sent to a plurality of second cavities 21, and the amount of gas input into each second cavity 21 may be equal or unequal. By inputting the gas discharged by the gas discharge device 14 into the second cavities 21, it is easy to control the atmosphere in the plurality of second cavities 21.

[0135] Based on any one of the above examples, the dryer 10 further includes a sealing member 16 provided along the material passage to seal corresponding locations in the material passage. The sealing member 16 may be any other structure capable of achieving sealing of a gate or corresponding port portion. In some examples, the input and output ends of each cavity in any one of the above examples are each provided with a sealing member 16. In some examples, the sealing member 16 is provided at the input end for introducing material into the cavity of the dryer 10 (e.g., the input end of a second transition cavity 121 far from the vacuum chamber 11), the sealing member 16 is provided at the output end for introducing material into a cavity outside the dryer 10 (e.g., the output end of a second cavity 21 far from the vacuum chamber 11), and one sealing member 16 is provided between adjacent cavities.

[0136] Referring to Figures 1, 2, and 3, in some examples, the dryer 10 includes a vacuum chamber 11, a crystallization chamber 20, and a sealing member 16 as described in any one of the above examples, wherein the vacuum chamber 11 has a first cavity 111 for vacuum drying the material, the inlet end of the vacuum pump 15 is in communication with the first cavity 111, the crystallization chamber 20 has a second cavity 21, and the heating device 22 is provided in the second cavity 21 and the first cavity The first cavity 111 and the second cavity 21 each have an input terminal and an output terminal, and the output terminal of the first cavity 111 is in communication with the input terminal of the second cavity 21 such that the first cavity 111 and the second cavity 21 form a material passage, and a sealing member 16 is provided between the vacuum chamber 11 and the crystal chamber 20 and the vacuum chamber 11 and the crystal chamber 20 for opening and closing the material passage corresponding to the first cavity 111 or the second cavity 21.

[0137] The vacuum chamber 11 has a first cavity 111, and a sealing member 16 provided in the vacuum chamber 11 is used to close the first cavity 111 so that the first cavity 111 can be closed. The inlet end of the vacuum pump 15 communicates with the first cavity 111, so that the vacuum pump 15 can discharge the gas inside the first cavity 111 and create a certain degree of negative pressure inside the first cavity 111.

[0138] Since both the vacuum chamber 11 and the crystallization chamber 20 are provided with corresponding sealing members 16, when the first cavity 111 and the second cavity 21 perform their corresponding processes, both can remain closed, and the first cavity 111 and the second cavity 21 do not interfere with each other. This allows the material to first have its volatile solvents removed by the vacuum drying process, thereby effectively extending the process window for the material to undergo the annealing crystallization process. The first cavity 111 and the second cavity 21, which are provided independently of each other, can be operated sequentially or the two cavities can be operated simultaneously, thereby improving the processing efficiency of the material.

[0139] Since the first cavity 111 and the second cavity 21 form a material passage, the material can be directly transported to the second cavity 21 after being vacuum-dried in the first cavity 111, preventing the material from coming into contact with the outside space, thereby avoiding contact with external impurities and effectively improving the processing quality of the material.

[0140] The vacuum chamber 11 is provided with sealing members 16 for opening and closing the input and output ends of the first cavity 111. By closing the first cavity 111 as needed, the volatile solvent in the material can be evaporated by vacuum drying after the material has entered the first cavity 111. After the material is vacuum dried, the sealing member 16 at the output end of the first cavity 111 opens, allowing the material to enter the second cavity 21 along the material passage. In some examples, sealing members 16 are provided between the vacuum chamber 11 and the crystal chamber 20 to close the output end of the first cavity 111 and the input end of the second cavity 21, so that the first cavity 111 and the second cavity 21 are relatively independent of each other.

[0141] In some cases, the dryer described in any one of the above examples is used to dry and crystallize perovskite battery material. Perovskite battery material may be used in devices such as solar cells.

[0142] Based on the above-described dryer, this application further provides examples of battery processing equipment including the dryer described in any one of the above examples.

[0143] It should be noted that the example of battery processing equipment in this application is based on the above-mentioned dryer, and therefore the example of battery processing equipment in this application includes all technical solutions for all embodiments of the above-mentioned dryer, and the technical effects achieved are exactly the same, so a detailed explanation is omitted here.

[0144] Referring to Figures 1 to 4, in one example of this application, the dryer 10 includes a material passage for vacuum drying the material, and the material passage may further be used for heat annealing crystallization of the material after vacuum drying is complete. The material passage is a closable passage that, after vacuum drying the material, volatilizes the volatile solvent in the material, forming the material into a stable intermediate state, extending the process window for the material to undergo annealing crystallization, thereby determining and adjusting the process parameters of annealing crystallization as needed, increasing the reproducibility of the process, relatively increasing the stability of the process, and easily achieving product quality control.

[0145] The dryer 10 includes a second transition chamber 12, a vacuum chamber 11, a first transition chamber 13, and at least two crystal chambers 20, which are connected in order, with the second transition chamber 12, the vacuum chamber 11, and the first transition chamber 13 forming part of the dryer 10. A second transition cavity 121 is formed in the second transition chamber 12, a first cavity 111 is formed in the vacuum chamber 11, a first transition cavity 131 is formed in the first transition chamber 13, and a second cavity 21 is formed in each crystal chamber 20. The input and output ends of the second transition cavity 121 are provided with sealing members 16 to seal the material inlet of the dryer 10 as needed, and the input and / or output ends of the first transition cavity 131 are provided with sealing members 16 to seal the material outlet of the dryer 10 as needed. The dryer 10 further includes a vacuum device 15 for removing gas from the second transition cavity 121, the first cavity 111, and the first transition cavity 131 so that the corresponding cavities form a negative pressure state. The material on the material feed table 40 is conveyed via the conveying device 30 into the second transition cavity 121, where it undergoes preliminary vacuum drying. After that, the material is conveyed to the first cavity 111, where it undergoes vacuum drying. Then, the material is conveyed to the first transition cavity 131 to vacuum dry the material again. During the vacuum drying process, the volatile solvent in the material is evaporated, and the less volatile solvent in the material and the material form a stable intermediate state, thereby improving the stability of the material and extending the process window before the material enters the crystallization chamber 20, thereby improving the reproducibility of the material processing process and increasing the stability of the product. The vacuum-dried material enters the second cavity 21 for annealing and crystallization. A first heater 221 and a second heater 222 are provided in the second cavity 21 to raise the temperature of the second cavity 21 so that the material rapidly reaches its crystallization temperature. A temperature equalization device 223 may also be provided in the second cavity 21 to reflect the infrared radiation generated by the first heater 221 towards the material to improve the energy utilization rate.In this example, there are at least two crystallization chambers 20, and the crystallization chambers 20 are arranged with their ends connected in series. As the material passes through the multiple second cavities 21 formed by the crystallization chambers 20, the crystallization temperature is maintained, thereby improving the uniformity of the product and increasing the quality of the product.

[0146] The foregoing description is merely a preferred embodiment of the present application and does not limit the scope of the claims of this application. Any modifications or direct / indirect applications in other related technical fields made based on the specification and drawings of this application, under the novel concept of this application, are all within the scope of protection of this application. [Explanation of symbols]

[0147] 10...Dryer, 11...Vacuum chamber, 111...First cavity, 12...Second transition chamber, 121...Second transition cavity, 13...First transition chamber, 131...First transition cavity, 131a...First transition subcavity, 14...Gas discharge device, 15...Vacuuming device, 16...Sealing member, 20...Crystal chamber, 21...Second cavity, 22...Heating device, 221...First heater, 222...Second heater, 223...Temperature uniformizing device, 30...Conveying device, 40...Material supply stand, 50...Material discharge stand, 60...Tray, 70...Valve, 80...Pneumatic valve, 90...Temporary storage device.

Claims

1. A drying machine for drying and crystallizing materials, wherein the drying machine is A vacuum chamber forming a first cavity for vacuum drying the material, A crystal chamber forming a second cavity, wherein the first cavity and the second cavity each have an input terminal and an output terminal, and the output terminal of the first cavity is connected to the input terminal of the second cavity such that the first cavity communicates with the second cavity to form a continuous material passage, The system includes a heating device provided in the crystallization chamber for heating and crystallizing the material in the second cavity, The aforementioned dryer, The system further includes a first transition chamber that forms a first transition cavity having an input terminal and an output terminal, The output terminal of the first cavity communicates with the input terminal of the first transition cavity, the output terminal of the first transition cavity communicates with the input terminal of the second cavity, and the first cavity, the first transition cavity, and the second cavity form the material passage. The first transition cavity includes a plurality of sequentially interconnected first transition subcavities, wherein a first transition subcavity adjacent to the first cavity communicates with the output terminal of the first cavity, and a first transition subcavity adjacent to the second cavity communicates with the input terminal of the second cavity. A dryer in which the heating device is provided in the first transition subcavity, and the air pressure in the plurality of first transition subcavities gradually increases toward the crystal chamber from the vacuum chamber, and the temperature in the plurality of first transition subcavities gradually increases.

2. The aforementioned dryer, The dryer according to claim 1, further comprising a gas discharge device having an inlet end communicating with the first cavity for discharging gas from the first cavity.

3. The dryer according to claim 2, wherein the gas discharge device further has an outlet end that communicates with the second cavity.

4. The gas discharge device further has an outlet end, and the dryer is The dryer according to claim 2, further comprising a temporary storage device having an inlet end, wherein the outlet end of the gas discharge device communicates with the inlet end of the temporary storage device.

5. The dryer according to claim 4, wherein the temporary storage device further has an outlet end that communicates with the second cavity.

6. The dryer according to any one of claims 1 to 5, wherein the first cavity and / or the second cavity are closable cavities.

7. The dryer according to any one of claims 1 to 5, wherein the first transition cavity is a closable cavity.

8. The aforementioned dryer, The dryer according to any one of claims 1 to 5, further comprising a vacuum device having an inlet end communicating with the first cavity.

9. The dryer according to claim 8, wherein the inlet end of the vacuum device is also in communication with the first transition cavity.

10. The dryer according to claim 9, wherein the inlet end of the vacuum device communicates with the first transition subcavity adjacent to the first cavity.

11. The aforementioned dryer, The dryer according to any one of claims 1 to 5, further comprising a second transition chamber in which a second transition cavity for vacuum drying a material is formed, the second transition cavity having an input end and an output end, the output end of the second transition cavity communicating with the input end of the first cavity, and the second transition cavity, the first cavity, the first transition cavity and the second cavity forming the material passage.

12. The aforementioned dryer, The dryer according to claim 11, further comprising a vacuum device having an inlet end communicating with the second transition cavity.

13. The heating device is A dryer according to any one of claims 1 to 5, comprising a first heater provided in the crystallization chamber for heating and crystallizing the material in the second cavity.

14. The aforementioned dryer, The dryer according to claim 13, further comprising a conveying device provided in the material passage, wherein the conveying device has a conveying table for placing materials, the first heater is a light heater, and the first heater has a light-emitting side provided toward the conveying table.

15. The dryer according to claim 13, wherein there are multiple first heaters, and the multiple first heaters are distributed at intervals.

16. The heating device is The dryer according to claim 13, further comprising a second heater provided in the crystal chamber, wherein the second heater is a circulating heater for heating the material in the second cavity.

17. The dryer according to claim 16, wherein the second heater is made of a light-transmitting material.

18. The dryer according to claim 17, wherein the second heater is provided at least partially between the first heater and the material.

19. The dryer according to claim 16, wherein the second heater is located on the side away from the first heater where the material is located.

20. The heating device is The dryer according to claim 13, further comprising a temperature equalization device provided in the crystal chamber for reflecting the heat released by the first heater toward the material.

21. There are multiple crystal chambers, The dryer according to any one of claims 1 to 5, wherein the plurality of crystal chambers are connected in sequence.

22. The aforementioned dryer, The dryer according to any one of claims 1 to 5, further comprising a sealing member provided along the passage of the material to seal corresponding positions in the passage of the material.

23. The dryer according to any one of claims 1 to 5, wherein the dryer is used to dry and crystallize a perovskite battery material.

24. Battery processing equipment, wherein the battery processing equipment includes a dryer as described in any one of claims 1 to 5.

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