X-ray diffraction measuring device and program

Abstract

To easily perform measurement without relying on knowledge or experience, etc., of a measurement operator, and to prevent X-ray diffraction intensity obtained as measurement results from being variable.SOLUTION: An apparatus comprises: a measurement device 10 for measuring X-ray diffraction intensity diffracted by an object to be measured; an automatic stage 12 for moving at least one of the object to be measured and the measurement device 10; and a computer 14 for controlling the measurement device 10 and the automatic stage 12 so as to measure the X-ray diffraction intensity while moving at least one of the object to be measured and the measurement device 10. The computer 14 is configured to: integrate the X-ray diffraction intensity measured by the measurement device 10; determine whether or not the integrated X-ray diffraction intensity is equal to or greater than a threshold; and if the integrated X-ray diffraction intensity is determined to be equal to or greater than the threshold, stop the automatic stage 12 of moving the object to be measured and the measurement device 10, and terminate the measurement by obtaining the integrated X-ray diffraction intensity as a measurement result.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to an X-ray diffraction measuring apparatus and a program.

Background Art

[0002] Conventionally, there is known an X-ray diffraction measuring apparatus including a measuring unit that irradiates an object to be measured with X-rays and measures the diffraction intensity of the X-rays diffracted by the object to be measured, and measures the residual stress or the like of the object to be measured based on the diffraction intensity of the X-rays measured by the measuring unit.

[0003] In such an X-ray diffraction measuring apparatus, for example, when the crystal grains of the object to be measured are large with respect to the X-ray irradiation region, the number of crystal grains involved in diffraction decreases, and the measurement accuracy deteriorates. On the other hand, there is a method of increasing the number of crystal grains involved in diffraction by expanding the X-ray irradiation region by a rocking method of moving the object to be measured or the measuring unit while irradiating X-rays. For example, Patent Document 1 discloses that an X-ray imaging device that receives transmitted X-rays transmitted through an object to be measured is rocked at a certain angle.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, conventionally, since the rocking range is determined by the measurement operator, there is a problem that the rocking range varies depending on the knowledge or experience of the measurement operator, resulting in different measurement results. Further, in order to perform measurement within an appropriate rocking range, it is necessary to repeatedly determine and measure the rocking range, or to determine the rocking range by grasping the crystal state through metal structure observation or the like, which requires a lot of time and labor.

[0006] Therefore, the present invention aims to provide an X-ray diffraction measuring device and program that can easily perform measurements regardless of the knowledge or experience of the measurement operator, and that can suppress variations in the X-ray diffraction intensity obtained as a measurement result. [Means for solving the problem]

[0007] An X-ray diffraction measuring apparatus according to a first aspect of the present invention comprises: a measuring unit that irradiates an object to be measured with X-rays and measures the diffraction intensity of the X-rays diffracted by the object to be measured; a moving mechanism that moves at least one of the object to be measured and the measuring unit; and a control unit that controls the measuring unit and the moving mechanism so that the measuring unit measures the diffraction intensity while the moving mechanism moves at least one of the object to be measured and the measuring unit. The control unit integrates the diffraction intensity measured by the measuring unit, determines whether the integrated diffraction intensity is equal to or greater than a threshold, and if it determines that the integrated diffraction intensity is equal to or greater than a threshold, stops the movement of the object to be measured and the measuring unit by the moving mechanism, obtains the integrated diffraction intensity as the measurement result, and terminates the measurement by the measuring unit.

[0008] In the X-ray diffraction measuring apparatus according to a second aspect of the present invention, the measuring unit has a detection sensor that includes a sensor unit for detecting X-rays diffracted by an object to be measured, and a circuit unit for converting the detected X-rays into an electrical signal.

[0009] In the X-ray diffraction measuring apparatus according to the third aspect of the present invention, the control unit controls the measuring unit and the moving mechanism so that the measuring unit measures the diffraction intensity at multiple measurement points of the object to be measured.

[0010] In the X-ray diffraction measuring apparatus according to the fourth aspect of the present invention, the control unit controls the measuring unit and the moving mechanism so that a plurality of measurement points include a predetermined point and points surrounding the predetermined point.

[0011] In the X-ray diffraction measuring apparatus according to the fifth aspect of the present invention, the control unit controls the measuring unit and the moving mechanism so that the plurality of measurement points are located on a path that gradually expands from a predetermined point toward the vicinity of the predetermined point.

[0012] In the X-ray diffraction measuring apparatus according to the sixth aspect of the present invention, the control unit controls the measuring unit and the moving mechanism so that the multiple measurement points are positioned in a spiral pattern.

[0013] A program according to a seventh aspect of the present invention includes a measuring unit that irradiates an object to be measured with X-rays and measures the diffraction intensity diffracted by the object, a moving mechanism that moves at least one of the object to be measured and the measuring unit, and a computer that can communicate with each other. The program functions as a control means for controlling the measuring unit and the moving mechanism so that the measuring unit measures the diffraction intensity while the moving mechanism moves at least one of the object to be measured and the measuring unit moves. The control means integrates the diffraction intensity measured by the measuring unit, determines whether the integrated diffraction intensity is above a threshold, and if it is determined that the integrated diffraction intensity is above a threshold, stops the movement of the object to be measured and the measuring unit by the moving mechanism, obtains the integrated diffraction intensity as the measurement result, and terminates the measurement by the measuring unit. [Effects of the Invention]

[0014] According to the present invention, measurements can be easily performed regardless of the knowledge or experience of the measurement operator, and variations in the X-ray diffraction intensity obtained as a measurement result can be suppressed. [Brief explanation of the drawing]

[0015] [Figure 1] This figure shows an example of the overall configuration of an X-ray diffraction measuring device. [Figure 2] This figure shows an example of a partial configuration of a measuring device. [Figure 3] This figure shows an example of the movement path of the X-ray irradiation point or the variation path of the X-ray irradiation angle. [Figure 4] This flowchart shows an example of a computer-controlled flow. [Figure 5] This figure shows an example of the movement path of the X-ray irradiation point. [Figure 6] This figure shows the overall configuration of the X-ray diffraction measuring device according to a modified example.

Best Mode for Carrying Out the Invention

[0016] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. For ease of understanding of the description, the same reference numerals are attached to the same elements or elements having the same function in each drawing as much as possible, and redundant descriptions are omitted.

[0017] <Overall Configuration> The X-ray diffraction measurement apparatus according to the present embodiment is an apparatus that measures the diffraction intensity of X-rays diffracted by a measurement object irradiated with X-rays. FIG. 1 is a diagram showing an example of the overall configuration of the X-ray diffraction measurement apparatus.

[0018] As shown in FIG. 1, the X-ray diffraction measurement apparatus 1 includes, for example, a measurement device 10 as a measurement unit, an automatic stage 12 as a moving mechanism, and a computer 14 as a control unit. In FIG. 1, the illustration of the measurement device 10 is simplified. The detailed configuration of the measurement device 10 will be described later with reference to FIG. 2.

[0019] The measurement device 10 is attached to the automatic stage 12, and its position or orientation can be controlled by the automatic stage 12. The measurement device 10 irradiates X-rays toward a measurement object such as a gear or a shaft, and measures the diffraction intensity of the X-rays diffracted by the measurement object. Hereinafter, the diffraction intensity of X-rays is also simply referred to as "X-ray diffraction intensity". The measurement device 10 acquires, for example, a diffraction ring image showing the two-dimensional intensity distribution of the diffracted X-rays as a measurement value of the X-ray diffraction intensity. The measurement device 10 acquires a diffraction ring image at an arbitrary exposure time (about several mms to 100 mms) per sheet, for example.

[0020] The measurement device 10 is fixed to the automatic stage 12 via, for example, a fixing portion 5 or the like. The measurement device 10 measures the X-ray diffraction intensity in accordance with the movement of at least one of the measurement object and the device itself by the automatic stage 12.

[0021] For example, if at least one of the object to be measured and the measuring device 10 moves, the irradiation point of the X-rays irradiating the measurement surface (the surface to which the X-rays are irradiated) of the object to be measured moves. That is, X-rays are irradiated at multiple different positions on the measurement surface. In response to this movement of the irradiation point, the measuring device 10 measures multiple X-ray diffraction intensities. Hereinafter, the irradiation point of the X-rays irradiating the measurement surface of the object to be measured will also simply be referred to as the "X-ray irradiation point".

[0022] Furthermore, if at least one of the object to be measured and the measuring device 10 moves, causing the X-ray irradiation angle to change relative to the measurement surface of the object to be measured, the X-rays will be irradiated to the measurement surface at different angles. In response to this change in irradiation angle, the measuring device 10 measures multiple X-ray diffraction intensities. Hereinafter, the X-ray irradiation angle to the measurement surface of the object to be measured will also be simply referred to as the "X-ray irradiation angle."

[0023] The automatic stage 12 is a device that performs positioning adjustment to any desired position. The automatic stage 12 is controlled by a computer 14 and moves at least one of the object to be measured and the measuring device 10. The automatic stage 12 includes, for example, an XY stage 15 for adjusting movement in the XY direction, a camera length stage 16 for adjusting the camera length, and an irradiation angle stage 17 for adjusting the X-ray irradiation angle.

[0024] The XY stage 15 adjusts the position of the object to be measured or the measuring device 10 within a plane (hereinafter also simply referred to as the "XY plane") along the measuring surface of the object to be measured. The camera length stage 16 adjusts the distance from the object to be measured to the detection sensor 28 (see Figure 2), which will be described later. The irradiation angle stage 17 adjusts the irradiation angle of X-rays with respect to the measuring surface of the object to be measured.

[0025] When the automatic stage 12 moves at least one of the object to be measured and the measuring device 10, the X-ray irradiation point moves or the X-ray irradiation angle changes. Details of the path showing the movement of the X-ray irradiation point or the change in the X-ray irradiation angle will be described later with reference to Figure 3.

[0026] Computer 14 is connected to the measuring device 10 and the automatic stage 12, and controls the measuring device 10 and the automatic stage 12. Connection means that communication is possible, whether wired or wireless. Computer 14 executes a program stored in a storage means (not shown) to control the measuring device 10 and the automatic stage 12, thereby moving at least one of the object to be measured and the measuring device 10 while irradiating the object with X-rays.

[0027] The computer 14 controls the measuring device 10 and the automatic stage 12 so that the measuring device 10 measures the X-ray diffraction intensity while moving at least one of the object to be measured and the measuring device 10 using the automatic stage 12. More specifically, the computer 14 controls the movement of the X-ray irradiation point or the variation of the X-ray irradiation angle so that the X-ray diffraction intensity is measured at predetermined timings (for example, any exposure time per image).

[0028] The computer 14 moves, for example, the object to be measured and at least one of the measuring device 10 within a plane (XY plane) along the measuring surface of the object, while continuing to irradiate the object with X-rays. This moves the X-ray irradiation point within the XY plane. Moving the object to be measured or the measuring device 10 in this way will hereafter be simply referred to as "plane oscillation." Plane oscillation expands the X-ray irradiation area of ​​the object to be measured compared to when the X-ray irradiation point is not moved. In other words, the X-ray irradiation area of ​​the object to be measured can be expanded in the XY plane without adjustment by the collimator 22 (see Figure 2), which will be described later.

[0029] Furthermore, the computer 14 changes the X-ray irradiation angle by, for example, moving at least one of the object to be measured and the measuring device 10 while continuing to irradiate the object with X-rays. Moving the object to be measured or the measuring device 10 in this manner will hereafter be simply referred to as "angular oscillation." Angular oscillation expands the X-ray irradiation area on the object to be measured compared to when the X-ray irradiation angle is not changed. In other words, even without adjustment by the collimator 22 (see Figure 2), the X-ray irradiation area on the object to be measured can be expanded in the direction of the X-ray irradiation depth on the object to be measured. Hereafter, planar oscillation and angular oscillation will be collectively referred to simply as "oscillation."

[0030] Here, with reference to Figure 3, examples of planar oscillation and angular oscillation will be described in detail. Figure 3 is a diagram showing an example of the movement path of the X-ray irradiation point or the variation path of the X-ray irradiation angle. Figure 3(a) shows an example of the movement path of the X-ray irradiation point in the case of planar oscillation. Figure 3(b) shows an example of the variation path of the X-ray irradiation angle in the case of angular oscillation.

[0031] As shown in Figure 3(a), the X-ray irradiation point moves on the measurement surface 52 of the object to be measured by planar oscillation, for example, having a movement path 50. The movement path 50 is a path that indicates the movement of the X-ray irradiation point, and for example, when viewed in a direction intersecting the measurement surface 52, it is a spiral shape that spreads outward from the irradiation start point 54. A spiral shape means a curved shape in which a vortex is formed outward from a predetermined point, the irradiation start point 54, as it rotates. Note that the movement path 50 is not limited to the spiral shape shown in Figure 3(a), and may exhibit various shapes that spread outward from the irradiation start point 54.

[0032] As shown in Figure 3(a), the measuring device 10 measures the X-ray diffraction intensity at multiple measurement points on the object to be measured in response to the movement of the X-ray irradiation point. In other words, the computer 14 controls the measuring device 10 and the automatic stage 12 so that the measuring device 10 measures the X-ray diffraction intensity at multiple measurement points on the object to be measured. A measurement point is a portion of the measurement surface 52 of the object to be measured that is irradiated with X-rays and whose X-ray diffraction intensity is measured by the measuring device 10.

[0033] More specifically, the computer 14 controls the measuring device 10 and the automatic stage 12 so that, when viewed in a direction intersecting the measuring surface 52, the multiple measuring points are located on a moving path 50 that gradually expands from a predetermined point (e.g., irradiation start point 54) outwards from the vicinity of that predetermined point. Through this control by the computer 14, the multiple measuring points include, when viewed in a direction intersecting the measuring surface 52, the predetermined point (e.g., the irradiation start point 54) and points around that predetermined point (e.g., points on the moving path 50 other than the irradiation start point 54). Furthermore, when viewed in a direction intersecting the measuring surface 52, the multiple measuring points are positioned in a spiral pattern.

[0034] Furthermore, the computer 14 controls the measuring device 10 and the automatic stage 12 so that the irradiation start point 54, which is the measurement point, is located, for example, in the center of the desired measurement area 56 to be measured on the measuring surface 52 of the object to be measured. The center of the measurement area 56 is the area excluding the edges of the measurement area 56 when viewed in a direction intersecting the measuring surface 52, and is located in a predetermined area that includes the center of the measurement area 56. The center of the measurement area 56 may be the center of the measuring surface 52 itself, or it may be any point in the predetermined area that includes the center. Moreover, the center of the measurement area 56 is not limited to a single point in the predetermined area that includes the center, but may have a predetermined area within that area.

[0035] Furthermore, as shown in Figure 3(b), the X-ray irradiation angle fluctuates with respect to the measurement surface 52 of the object being measured due to angular fluctuation, for example, having a fluctuating path 60. The fluctuating path 60 is a path that shows the fluctuation of the X-ray irradiation angle, and fluctuates, for example, with the irradiation X-ray 66 as the irradiation start position.

[0036] In response to the variation in the X-ray irradiation angle as shown in Figure 3(b), the measuring device 10 measures multiple X-ray diffraction intensities with different irradiation depth directions onto the object to be measured. That is, the computer 14 controls the measuring device 10 and the automatic stage 12 so that the measuring device 10 measures multiple X-ray diffraction intensities with different irradiation depth directions onto the object to be measured.

[0037] Returning to Figure 1, the computer 14 receives the X-ray diffraction intensity measured by the measuring device 10 and integrates the received X-ray diffraction intensity. The computer 14 also acquires information about the object being measured based on the integrated X-ray diffraction intensity. This information about the object being measured includes, for example, the structure and characteristics of the object, and in this embodiment, it is the residual stress of the object. Acquiring information about the object being measured includes measuring, calculating, or analyzing this information.

[0038] The computer 14 determines whether the integrated X-ray diffraction intensity and profile peak position are above a threshold. Here, the threshold is a value used to determine whether the variation in the integrated X-ray diffraction intensity and profile peak position is suppressed. For example, the threshold is set such that, within 100,000 pixels (200 × 500 pixels) in the center of the sensor chip of the detection sensor 28, the variation in the integrated X-ray diffraction intensity and profile peak position is approximately 80% or less and the variation in the profile peak position is approximately 50% or less compared to the same items that have not been integrated. Alternatively, the computer 14 may determine whether the variation in either the integrated X-ray diffraction intensity or the profile peak position is suppressed (whether it is above a threshold). Furthermore, the threshold may be a value sufficient for the computer 14 to appropriately acquire information about the object being measured based on the X-ray diffraction intensity obtained as a measurement result. The threshold may be set to a value such that the approximation error rate of the a1-cosα diagram or a2-sinα diagram, which is calculated to obtain residual stress based on the integrated X-ray diffraction intensity, is 0.005% or less.

[0039] For example, each time the X-ray diffraction intensity is measured by the measuring device 10, the computer 14 integrates the X-ray diffraction intensity and uses the integrated X-ray diffraction intensity to make the above determination. More specifically, each time a diffraction ring image is acquired by the measuring device 10, the computer 14 integrates the diffraction ring images to amplify the X-ray diffraction intensity. Then, the computer 14 reads the amplified X-ray diffraction intensity from the integrated diffraction ring image and makes the above determination.

[0040] If the computer 14 determines that the accumulated X-ray diffraction intensity is not above a threshold, it continues to move at least one of the object to be measured and the measuring device 10 using the automatic stage 12. If the accumulated X-ray diffraction intensity is not above a threshold, it means that the variation in the X-ray diffraction intensity is not sufficiently suppressed. For this reason, the computer 14 continues to measure the X-ray diffraction intensity while gradually widening the oscillation range until the variation in the accumulated X-ray diffraction intensity is sufficiently suppressed.

[0041] If the computer 14 determines that the accumulated X-ray diffraction intensity is above a threshold, it stops the movement of the object to be measured and the measuring device 10 by the automatic stage 12. If the accumulated X-ray diffraction intensity is above a threshold, it means that the variation in the X-ray diffraction intensity has been sufficiently suppressed. Therefore, the computer 14 stops the oscillation at this time, acquires the accumulated diffraction intensity as the measurement result, and ends the measurement by the measuring device 10. Details of the control flow by the computer 14 will be described later with reference to Figure 4.

[0042] The computer 14 may also have a display unit for displaying information or an input unit for receiving input from the measurement operator. In this case, the computer 14 may create an image or the like based on the X-ray diffraction intensity received from the measurement device 10 and display it on the display unit. The computer 14 may also perform various controls based on the input from the measurement operator received at the input unit.

[0043] <Configuration of measuring device 10> Figure 2 shows an example of a partial configuration of the measuring device 10. As shown in Figure 2, the measuring device 10 includes, for example, a light tube 20, a collimator 22, a substrate 24, and a detection sensor 28.

[0044] The X-ray tube 20 functions as an X-ray irradiator, generating X-rays and directing the generated X-rays toward the object to be measured. The X-ray tube 20 is mounted on the substrate 24 via a cooling element or the like.

[0045] The collimator 22 has the function of adjusting the irradiation range of the X-rays emitted by the X-ray tube 20. The collimator 22 is located below the X-ray tube 20 (on the substrate 24 side) and extends toward the substrate 24. The tip of the collimator 22 protrudes downward from the substrate 24.

[0046] A detection sensor 28 is provided on one side of the circuit board 24 (the side opposite to the light tube 20). Also on the same side of the circuit board 24 are connectors and other devices for transmitting the electrical signals converted by the detection sensor 28 to the computer 14.

[0047] The detection sensor 28 includes a sensor unit that detects X-rays diffracted by the object to be measured, and a circuit unit that converts the detected X-rays into an electrical signal. The detection sensor 28 is, for example, an integrated unit of the sensor unit and the circuit unit, and in this embodiment, it is an SOI (Silicon on Insulator) sensor.

[0048] The detection sensor 28 measures multiple X-ray diffraction intensities in response to oscillations. For example, the detection sensor 28 measures multiple X-ray diffraction intensities corresponding to the X-ray irradiation point that has moved in response to planar oscillations. In addition, the detection sensor 28 measures multiple X-ray diffraction intensities corresponding to the X-ray irradiation angle that has changed in response to angular oscillations.

[0049] <Control flow by computer 14> Next, the control flow by the computer 14 will be explained with reference to Figure 4. Figure 4 is a flowchart showing an example of the control flow by the computer 14. Note that the order of the following steps can be changed as appropriate. The following process starts after the measurement by the measuring device 10 has started and the first X-ray diffraction intensity has been acquired, that is, after the first diffraction ring image has been acquired.

[0050] (Step SP10) The computer 14 controls the measuring device 10 and the automatic stage 12. Specifically, it controls the automatic stage 12 and the measuring device 10 so that the measuring device 10 performs measurements while moving at least one of the object to be measured and the measuring device 10. In this case, the computer 14 may perform measurements with the measuring device 10 while continuously moving the object to be measured or the measuring device 10, or it may control the automatic stage 12 to stop the movement of the object to be measured or the measuring device 10 as appropriate to match the timing of the measurement by the measuring device 10. The computer 14 may also control the timing of the measurement by the measuring device 10 in accordance with the timing of the movement of the object to be measured or the measuring device 10. After the control in step SP10 begins, the process moves on to the process in step SP12.

[0051] (Step SP12) The computer 14 acquires the X-ray diffraction intensity measured by the measuring device 10. Specifically, upon receiving a diffraction ring image from the measuring device 10, it reads out the X-ray diffraction intensity from the diffraction ring image. Then, the process proceeds to step SP14.

[0052] (Step SP14) Computer 14 integrates the X-ray diffraction intensities acquired in step SP12. For example, computer 14 integrates the X-ray diffraction intensity acquired in step SP12 with the X-ray diffraction intensity measured in the first measurement. Then, the process moves on to step SP16.

[0053] (Step SP16) Computer 14 determines whether the X-ray diffraction intensity accumulated in step SP12 is equal to or greater than a threshold. If the X-ray diffraction intensity is equal to or greater than the threshold, the process proceeds to step SP18; otherwise, the process returns to step SP10.

[0054] If the determination in step SP16 leads back to step SP10, the computer 14 continues to control the measuring device 10 and the automatic stage 12. Subsequently, when the system proceeds back to steps SP12 and SP14, the computer 14 again adds the X-ray diffraction intensity acquired in step SP12 to the previously accumulated value. In other words, each time an X-ray diffraction intensity is acquired in step SP12, the computer 14 adds the acquired X-ray diffraction intensity to calculate the cumulative value of the X-ray diffraction intensity.

[0055] (Step SP18) The computer 14 stops controlling the movement of the automatic stage 12. That is, it stops the movement of the object to be measured and the measuring device 10 by the automatic stage 12. Next, the computer 14 obtains the X-ray diffraction intensity accumulated in step SP14 as the measurement result and ends the measurement by the measuring device 10. Then, the process moves on to the process of step SP20.

[0056] (Step SP20) The computer 14 acquires information about the object being measured based on the integrated X-ray diffraction intensity obtained in step SP18. Specifically, the computer 14 acquires information about the object being measured, such as residual stress, based on the X-ray diffraction intensity accumulated from the start of measurement until the oscillation is stopped. Then, the control by the computer 14 ends.

[0057] <Effects> As described above, the X-ray diffraction measuring apparatus 1 according to this embodiment includes a measuring device 10 that irradiates an object to be measured with X-rays and measures the X-ray diffraction intensity diffracted by the object to be measured, an automatic stage 12 that moves at least one of the object to be measured and the measuring device 10, and a computer 14 that controls the measuring device 10 and the automatic stage 12 so that the measuring device 10 measures the X-ray diffraction intensity while the automatic stage 12 moves at least one of the object to be measured and the measuring device 10. The computer 14 integrates the X-ray diffraction intensity measured by the measuring device 10, determines whether the integrated X-ray diffraction intensity is above a threshold, and if it determines that the integrated X-ray diffraction intensity is above a threshold, it stops the movement of the object to be measured and the measuring device 10 by the automatic stage 12, obtains the integrated X-ray diffraction intensity as the measurement result, and ends the measurement by the measuring device 10. With this configuration, the X-ray diffraction intensity measured while moving at least one of the object to be measured and the measuring device 10 is integrated, and when the integrated X-ray diffraction intensity exceeds a threshold, the movement of the object to be measured and the measuring device 10 by the automatic stage 12 is stopped. Therefore, the oscillation range can be easily determined regardless of the knowledge or experience of the measurement operator. In addition, by integrating the X-ray diffraction intensity measured while moving at least one of the object to be measured and the measuring device 10, the X-ray irradiation area for the object to be measured is widened compared to when it is not moved. This makes it possible to suppress the variation in the integrated X-ray diffraction intensity. When the integrated X-ray diffraction intensity exceeds a threshold, the integrated X-ray diffraction intensity is obtained as the measurement result, and the measurement by the measuring device 10 is terminated. Therefore, an X-ray diffraction intensity with suppressed variation can be obtained as the measurement result. In summary, it is possible to easily perform measurements regardless of the knowledge or experience of the measurement operator, and the variation in the X-ray diffraction intensity obtained as a measurement result can be suppressed. In this embodiment, the computer 14 acquires information about the object being measured based on the X-ray diffraction intensity obtained as a measurement result. This configuration allows for the appropriate acquisition of information about the object being measured based on X-ray diffraction intensity with suppressed variability.

[0058] Furthermore, in this embodiment, the measuring device 10 has a detection sensor 28 which includes a sensor unit for detecting X-rays diffracted by the object to be measured, and a circuit unit for converting the detected X-rays into an electrical signal. With this configuration, diffraction ring images can be transmitted from the measuring device 10 to the computer 14 in real time. Therefore, it becomes possible to appropriately monitor the X-ray diffraction intensity in real time and to perform the above determination by accumulating the X-ray diffraction intensity each time a measurement is taken without stopping the measurement.

[0059] In this embodiment, the computer 14 controls the measuring device 10 and the automatic stage 12 so that the measuring device 10 measures the X-ray diffraction intensity at multiple measurement points of the object to be measured. With this configuration, the X-ray diffraction intensities measured at multiple measurement points are integrated, which effectively suppresses variations in the integrated X-ray diffraction intensities.

[0060] In this embodiment, the computer 14 controls the measuring device 10 and the automatic stage 12 so that multiple measurement points include a predetermined point and points surrounding the predetermined point. With this configuration, the X-ray diffraction intensity is measured at multiple measurement points, including a predetermined point and points surrounding that predetermined point. Since the X-ray diffraction intensities measured at these different locations are integrated, the variation in the integrated X-ray diffraction intensity can be effectively suppressed.

[0061] In this embodiment, the computer 14 controls the measuring device 10 and the automatic stage 12 so that the measurement point is located on a moving path 50 that gradually expands from a predetermined point toward the area surrounding that predetermined point. With this configuration, the X-ray diffraction intensity is measured at multiple measurement points located on a moving path 50 that gradually expands from a predetermined point toward the surrounding area. Therefore, the X-ray diffraction intensity can be measured while suppressing the bias of the X-ray irradiation area. Since the X-ray diffraction intensities measured in this way are integrated, the variation in the integrated X-ray diffraction intensity can be effectively suppressed.

[0062] In this embodiment, the computer 14 controls the measuring device 10 and the automatic stage 12 so that the multiple measurement points are positioned in a spiral pattern. This configuration allows for the measurement of X-ray diffraction intensities at multiple measurement points arranged in a spiral pattern. Therefore, X-ray diffraction intensities can be measured while suppressing bias in the X-ray irradiation area. Since the measured X-ray diffraction intensities are integrated, variations in the integrated X-ray diffraction intensities can be effectively suppressed.

[0063] Referring to Figure 5, the effects of the computer 14 controlling the measuring device 10 and the automatic stage 12 so that the measurement point is located on the movement path 50 will be explained in detail. Figure 5 is a diagram showing an example of the movement path of the X-ray irradiation point. Figure 5(a) shows an example of the movement path of the X-ray irradiation point when the X-ray irradiation point is moved in a direction along the X or Y direction from the irradiation start point 72. Figure 5(b) shows an example of the movement path of the X-ray irradiation point when the X-ray irradiation point is moved so as to spread outward from the irradiation start point 54.

[0064] As shown in Figure 5(a), when the X-ray irradiation point is moved from the irradiation start point 72 in a direction along the X or Y direction, the movement path 70 of the X-ray irradiation point may be biased toward the edge of the desired measurement area 56, depending on the timing of the oscillation stopping, etc. In other words, the X-ray irradiation area may be biased within the measurement area 56.

[0065] In contrast, as shown in Figure 5(b), when the X-ray irradiation point is moved so as to gradually spread outward from the irradiation start point 54, the movement path 50 of the X-ray irradiation point is formed to spread across the entire measurement area 56, centered on the irradiation start point 54. This makes it possible to measure the X-ray diffraction intensity while suppressing the bias of the X-ray irradiation area within the measurement area 56. By integrating the X-ray diffraction intensities measured in this way, the variation in the integrated X-ray diffraction intensity can be more effectively suppressed.

[0066] In this embodiment, the computer 14 controls the measuring device 10 and the automatic stage 12 so that the irradiation start point 54, which is the measurement point, is located in the center of the measurement area 56. With this configuration, since the irradiation start point 54 passes through the center of the measurement area 56, the X-ray diffraction intensity in the center of the measurement area 56, which is the most important part to measure, can always be measured regardless of when the movement of the object to be measured and the measuring device 10 is stopped.

[0067] <Variation> The present invention is not limited to the embodiments described above. That is, any design modifications made to the above embodiments by those skilled in the art are also included within the scope of the present invention, as long as they retain the features of the present invention. Furthermore, the elements of the above embodiments and the modifications described later can be combined to the extent that it is technically possible, and any combination thereof is also included within the scope of the present invention, as long as it retains the features of the present invention.

[0068] For example, although the above describes an X-ray diffraction measuring device 1, the present invention may also be a program that causes a computer to perform the measurement of X-ray diffraction intensity. This computer may be, for example, computer 14. That is, the present invention may also be a program that causes computer 14 to function as a control means to control the measuring device 10 and the automatic stage 12 so that the measuring device 10 measures the X-ray diffraction intensity while moving at least one of the object to be measured and the measuring device 10 using the automatic stage 12. The control means integrates the X-ray diffraction intensity measured by the measuring device 10, determines whether the integrated X-ray diffraction intensity is above a threshold, and if it is determined that the integrated X-ray diffraction intensity is above a threshold, stops the movement of the object to be measured and the measuring device 10 by the automatic stage 12, obtains the integrated X-ray diffraction intensity as the measurement result, and terminates the measurement by the measuring device 10. This program also produces the same effects as the above embodiment.

[0069] Furthermore, the computer that executes the above program is not limited to computer 14, but may also be an information processing device such as a server connected to the measuring device 10 and the automatic stage 12, respectively.

[0070] Furthermore, the program described above, which causes the computer to perform the measurement of X-ray diffraction intensity, may be stored in a storage means located inside the computer 14, or it may be stored in a storage means connected to the measuring device 10 and the automatic stage 12 via a network.

[0071] Furthermore, the above program may be provided on a computer-readable recording medium such as a CD-ROM, DVD, or semiconductor memory. Alternatively, the program may be provided in a format that allows installation via a network such as the Internet.

[0072] Furthermore, in the above embodiment, the computer 14 integrates the X-ray diffraction intensity and makes the above determination based on the integrated X-ray diffraction intensity. However, instead of or in addition to the X-ray diffraction intensity, the above determination may also be made based on the signal-to-noise ratio (peak / background ratio) of the X-ray diffraction intensity. In other words, the X-ray diffraction intensity in the present invention includes not only the X-ray diffraction intensity itself, but also the signal-to-noise ratio (peak / background ratio) of the X-ray diffraction intensity.

[0073] Furthermore, in the above embodiment, at least one of the object to be measured and the measuring device 10 is moved by the automatic stage 12, but the moving mechanism is not limited to the automatic stage 12, and may be moved by a goniometer or a robot, etc.

[0074] Figure 6 shows the overall configuration of an X-ray diffraction measuring apparatus according to a modified example. As shown in Figure 6, the modified X-ray diffraction measuring apparatus 1A comprises a measuring device 10, an articulated robot 80, and a computer 14. That is, the X-ray diffraction measuring apparatus 1A includes an articulated robot 80 instead of the automatic stage 12 according to the above embodiment. In the X-ray diffraction measuring apparatus 1A according to this embodiment, the articulated robot 80 is controlled by the computer 14 in the same way as in the above embodiment, thereby achieving the same effects as in the above embodiment.

[0075] Furthermore, although the above embodiment describes an example in which the measurement points of the X-ray diffraction intensity by the measuring device 10 are located on a spiral moving path 50, the system is not limited to this, and may be any position on the measurement surface 52 where the X-rays are irradiated. For example, the computer 14 may control the measuring device 10 and the automatic stage 12 so that, when viewed in a direction intersecting the measurement surface 52, multiple measurement points are located on a path extending radially from the irradiation start point 54. Also, the irradiation start point 54 does not have to be included as a measurement point. In addition, as shown in Figure 5(a), multiple measurement points may be located on a moving path that moves the X-ray irradiation point in a direction along the X or Y direction from the irradiation start point 72. Even in this case, by automatically determining the oscillation range, measurements can be easily performed without relying on the knowledge or experience of the measurement operator, and at least the variation in the X-ray diffraction intensity obtained as a measurement result can be suppressed compared to the case where oscillation is not performed.

[0076] Furthermore, although the above embodiment describes an example in which the irradiation start point 54, which serves as the measurement point, passes through the center of the measurement area 56, the embodiment is not limited to this, and the irradiation start point 54, which serves as the measurement point, may be offset from the center.

[0077] Furthermore, in the above embodiment, the computer 14 acquires information about the object to be measured based on the accumulated X-ray diffraction intensity, but this is not limited to this. For example, another information processing device provided in the X-ray diffraction measuring device 1 may acquire the information, or an information processing device such as a server located outside the X-ray diffraction measuring device 1 and capable of communicating with the X-ray diffraction measuring device 1 may acquire the information.

[0078] Furthermore, although the above embodiment describes an example where the detection sensor 28 is an SOI sensor, the detection sensor 28 may be any other sensor. [Explanation of Symbols]

[0079] 1...X-ray diffraction measuring device, 10...Measuring device (measuring unit), 12...Automatic stage (moving mechanism), 14...Computer (control unit), 28...Detection sensor

Claims

1. A measuring unit that irradiates an object to be measured with X-rays and measures the diffraction intensity of the X-rays diffracted by the object, A moving mechanism for moving at least one of the object to be measured and the measuring unit, A control unit controls the measuring unit and the moving mechanism so that the measuring unit measures the diffraction intensity while moving at least one of the object to be measured and the measuring unit using the moving mechanism, Equipped with, The X-ray diffraction measuring apparatus is characterized in that the control unit continues to oscillate at least one of the object to be measured and the measuring unit by the moving mechanism in order to expand the X-ray irradiation area for the object to be measured, while accumulating the diffraction intensity measured by the measuring unit, determining whether the accumulated diffraction intensity is equal to or greater than a threshold, and if it is determined that the accumulated diffraction intensity is equal to or greater than a threshold, stopping the oscillation by the moving mechanism, obtaining the accumulated diffraction intensity as a measurement result, and ending the measurement by the measuring unit.

2. The X-ray diffraction measuring apparatus according to Claim 1, characterized in that the threshold value is a value for determining whether or not the variation in at least one of the integrated diffraction intensity and the profile peak position of the diffraction intensity is suppressed.

3. The X-ray diffraction measuring apparatus according to claim 1 or 2, characterized in that the control unit controls the measuring unit and the moving mechanism so that the measuring unit measures the diffraction intensity at a plurality of measurement points of the object to be measured.

4. The X-ray diffraction measuring apparatus according to claim 3, characterized in that the control unit controls the measuring unit and the moving mechanism so that the plurality of measurement points include a predetermined point and points surrounding the predetermined point.

5. The X-ray diffraction measuring apparatus according to claim 3, characterized in that the control unit controls the measuring unit and the moving mechanism so that the plurality of measurement points are located on a path that gradually expands from a predetermined point toward the vicinity of the predetermined point.

6. The X-ray diffraction measuring apparatus according to any one of claims 3 to 5, characterized in that the control unit controls the measuring unit and the moving mechanism so that the plurality of measuring points are positioned in a spiral pattern.

7. A measuring unit that irradiates an object to be measured with X-rays and measures the diffraction intensity diffracted by the object, a moving mechanism that moves at least one of the object to be measured and the measuring unit, and a computer capable of communicating with each of them, The moving mechanism moves at least one of the object to be measured and the measuring unit, while the measuring unit measures the diffraction intensity. This is done by controlling the measuring unit and the moving mechanism as control means. The control means is a program characterized by continuing to oscillate at least one of the object to be measured and the measuring unit by the moving mechanism in order to expand the X-ray irradiation area for the object to be measured, accumulating the diffraction intensity measured by the measuring unit, determining whether the accumulated diffraction intensity is equal to or greater than a threshold, and if it is determined that the accumulated diffraction intensity is equal to or greater than a threshold, stopping the oscillation by the moving mechanism, obtaining the accumulated diffraction intensity as a measurement result, and ending the measurement by the measuring unit.

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