Ceramic copper circuit board, semiconductor device, method for manufacturing a ceramic copper circuit board, and method for manufacturing a semiconductor device

Abstract

To provide a ceramic copper circuit board, a manufacturing method thereof, a semiconductor device, and a manufacturing method thereof that realize a finer circuit pattern and increase the reliability of a ceramic circuit board.SOLUTION: A ceramic copper circuit board includes a ceramic board, a copper circuit part provided thereupon, and a first junction layer provided between the ceramic board and the copper circuit part and including an active metal brazing filler. In a cross section of the copper circuit part parallel to a first direction heading from the ceramic board toward the copper circuit part, an arbitrary line 7 drawn along the first direction D1 intersects a plurality of copper crystal grains 10. The average of a plurality of distances 12 in a second direction D2 perpendicular to the first direction between the line of the copper crystal grains and the respective farthest ends in the second direction is 50 μm or more and 300 μm or less. The outer edge of each copper crystal gain includes a first end 10a and a second end 10b intersecting the line and the maximum value of length 13 in the first direction between the first end and the second end is 301 μm or more.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] Embodiments generally relate to a ceramic copper circuit board, a semiconductor device, a method for manufacturing a ceramic copper circuit board, and a method for manufacturing a semiconductor device.

Background Art

[0002] Ceramic copper circuit boards are used in semiconductor devices such as power elements. The ceramic substrate and the copper circuit portion are joined to each other via a joining layer. A silver (Ag) brazing material containing an active metal such as titanium (Ti) is used for the joining layer. This improves the joining strength and heat cycle characteristics. With the improvement of reliability, ceramic copper circuit boards are used in automobiles (including electric vehicles), electric railway vehicles, solar power generation facilities, inverters of industrial machines, etc. In semiconductor devices such as power modules, semiconductor elements are mounted on the copper circuit portion. Also, wire bonding or metal terminals may be joined for the conduction of semiconductor elements. In the manufacture of semiconductor devices, semiconductor elements, wire bonding, metal terminals, etc. are joined to the copper circuit portion. As the miniaturization, weight reduction, and high-density mounting of power modules progress, the copper circuit portion has become thicker for low thermal resistance and low inductance. A thick ceramic copper circuit board of the copper circuit portion is described in International Publication No. WO2018-180965 (Patent Document 1). Patent Document 1 improves the assemblability of the ceramic copper circuit board by optimizing the number of grain boundaries on the surface of the copper circuit board. According to the ceramic copper circuit board of Patent Document 1, the joining property and alignment accuracy of semiconductor elements are improved.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

[0004] On the other hand, in addition to the bonding properties and alignment accuracy mentioned above, problems arising from the increased thickness of the copper circuit have become apparent. For example, to improve product reliability, it is desirable to achieve finer patterning of the copper circuit portion and stress reduction of the entire circuit board. Patent Document 1 focuses on controlling the particle size on the surface of the copper circuit portion, but it has been found that as the copper circuit becomes thicker, a difference in particle size occurs between the surface and the interior. In other words, while it is possible to improve the bonding properties and alignment accuracy of the copper plate surface by controlling the surface of the copper circuit, it has been found that controlling the interior of the copper circuit is necessary to improve other characteristics such as finer patterning. In recent years, power semiconductor modules have become smaller, lighter, and have higher density mounting. Consequently, there is a need to increase the thickness of the metal circuit section to reduce its thermal resistance and inductance. Furthermore, to increase mounting density, there is a need for finer patterning of the metal circuit section. Furthermore, as the junction temperature (Tj) of power semiconductor chips rises, there is a growing need to improve the reliability of ceramic circuit boards. The embodiment relates to a ceramic copper circuit board that can solve such problems and enable finer circuits while improving the reliability of the ceramic circuit board. [Means for solving the problem]

[0005] The ceramic copper circuit board according to this embodiment includes a ceramic substrate, a copper circuit portion provided on the ceramic substrate, and a first bonding layer provided between the ceramic substrate and the copper circuit portion, the bonding layer containing an active metal brazing material component. In a cross-section of the copper circuit portion parallel to a first direction from the ceramic substrate toward the copper circuit portion, any line drawn along the first direction intersects with a plurality of copper crystal grains. The average value of a plurality of distances in the second direction between the line and the end of each copper crystal grain furthest from the line in a second direction perpendicular to the first direction is 50 μm or more and 300 μm or less. The outer edge of each of the plurality of copper crystal grains includes a first end and a second end that intersect with the line. The maximum length in the first direction between the first end and the second end of each of the plurality of copper crystal grains is 301 μm or more. [Brief explanation of the drawing]

[0006] [Figure 1] A diagram showing an example of a ceramic copper circuit board according to an embodiment. [Figure 2] A diagram showing an example of a cross-section of a copper circuit. [Figure 3] A diagram showing an example of a cross-section of a copper circuit. [Figure 4] A diagram showing an example of pattern dimensions and inter-pattern dimensions for a copper circuit. [Figure 5] A diagram showing an example of a semiconductor device according to an embodiment. [Modes for carrying out the invention]

[0007] The ceramic copper circuit board according to this embodiment includes a ceramic substrate, a copper circuit portion provided on the ceramic substrate, and a first bonding layer provided between the ceramic substrate and the copper circuit portion, the bonding layer containing an active metal brazing material component. In a cross-section of the copper circuit portion parallel to a first direction from the ceramic substrate toward the copper circuit portion, any line drawn along the first direction intersects with a plurality of copper crystal grains. The average value of a plurality of distances in the second direction between the line and the end of each copper crystal grain furthest from the line in a second direction perpendicular to the first direction is 50 μm or more and 300 μm or less. The outer edge of each of the plurality of copper crystal grains includes a first end and a second end that intersect with the line. The maximum length in the first direction between the first end and the second end of each of the plurality of copper crystal grains is 301 μm or more. Figure 1 shows an example of a ceramic copper circuit board. In Figure 1, 1 is the ceramic copper circuit board. 2 is the ceramic substrate. 3 is the copper circuit section. 4 is the bonding layer containing brazing material. 5 is the back copper plate. The ceramic substrate 2 has a surface 2a (first surface) and a back surface 2b. The copper circuit section 3 is bonded to the surface 2a of the ceramic substrate 2 via a bonding layer 4 (an example of the first bonding layer). In the example of Figure 1, multiple copper circuit sections 3 are each bonded to the surface 2a via multiple bonding layers 4. The embodiment is not limited to the illustrated form. One copper circuit section 3 or three or more copper circuit sections 3 may be bonded to the surface 2a. Also, in the example of Figure 1, the back copper plate 5 is bonded to the back surface 2b. The back copper plate 5 functions as a heat sink rather than a circuit. The back copper plate 5 is provided as needed. Instead of the back copper plate 5, a patterned copper circuit section may be provided on the back surface 2b.

[0008] The ceramic substrate 2 is preferably one of the following: an aluminum oxide substrate, an aluminum nitride substrate, and a silicon nitride substrate. Alternatively, an algil substrate may also be used. Algil is a sintered body in which 20-80% is aluminum oxide and the remainder is zirconium oxide. The three-point bending strength of aluminum nitride substrates or aluminum oxide substrates is approximately 300-450 MPa. The strength of argil substrates is also around 550 MPa. The three-point bending strength of the silicon nitride substrate can be increased to 600 MPa or more, and even to 700 MPa or more. Furthermore, the thermal conductivity of the silicon nitride substrate can be increased to 50 W / (m·K) or more, and even to 80 W / (m·K) or more. In particular, in recent years, silicon nitride substrates possessing both high strength and high thermal conductivity have become available. The thickness of the silicon nitride substrate is preferably 0.635 mm or less, and more preferably 0.3 mm or less. Because silicon nitride substrates have high strength, they can be made thinner, further improving heat dissipation. While there is no specific lower limit for thickness, it is preferably 0.1 mm or more. This is to ensure the electrical insulation of the silicon nitride substrate. Here, thickness refers to the dimension in the direction connecting the ceramic substrate 2 and the copper circuit section 3. The ceramic copper circuit board according to this embodiment may comprise one ceramic substrate or two or more ceramic substrates. For example, multiple ceramic substrates and multiple copper circuit sections may be alternately stacked in a first direction.

[0009] Figure 2 shows an example of a cross-section of the copper circuit section. Figure 2 is an enlarged cross-sectional view of section A in Figure 1. In Figure 2, 7 indicates a hypothetical arbitrary line. This line is parallel to the first direction from the ceramic substrate 2 toward the copper circuit section 3. In Figure 2, D1 indicates the first direction. This line is perpendicular to the surface 2a and the back surface 2b. 8 indicates the side etching amount. The side etching amount is the distance in one direction perpendicular to the first direction between the outer periphery of the surface 3a of the copper circuit section and the outer periphery of the back surface 3b of the copper circuit section. The copper circuit portion is made of polycrystalline copper. The method for drawing line 7 is as follows: First, the ceramic copper circuit substrate is cut parallel to the first direction D1. An enlarged photograph of the cross-section is taken. At this time, the enlarged photograph should be taken at a magnification sufficient to show the ceramic substrate and to allow confirmation of grain boundaries. Next, line 7 is obtained by drawing an arbitrary straight line perpendicular to surface 2a in the enlarged photograph. Alternatively, if the state of surface 2a of the ceramic substrate is ambiguous and the back surface 3b of the copper circuit portion 3 can be considered a surface parallel to surface 2a, then an arbitrary straight line perpendicular to back surface 3b may be treated as line 7. Figure 3 shows an example of a cross-sectional view of the inside of a copper circuit. Figure 3 is an enlarged view of the cross-section of part B in Figure 2. 10 is a copper crystal grain, and 11 is a grain boundary between copper crystal grains. In the cross-section of the copper circuit, an arbitrary line 7 is drawn perpendicular to the ceramic substrate surface (in the thickness direction of the substrate). In Figure 3, 12 indicates the distance LH in the second direction D2 from the copper crystal grain 10 that intersects the line 7 to the outer edge (grain boundary 11) of the copper crystal grain 10 furthest from the arbitrary line 7. 13 indicates the length LV between the first end 10a and the second end 10b, which are the intersection points of line 7 and the outer edge of the copper crystal grain 10. The second direction is perpendicular to the first direction and parallel to the cross-section. In the ceramic copper circuit board according to the embodiment, the average distance LH is 300 μm or less. The average length LV is preferably 300 μm or less. In ceramic copper circuit boards, which consist of a ceramic substrate and a copper circuit board bonded to the ceramic substrate, the circuit is often formed by bonding a copper plate to the entire surface or part of the ceramic substrate, and then etching the copper plate portion. In the dissolution of the copper plate by etching, the dissolution proceeds along the grain boundaries of the copper plate. Therefore, the shape of the copper crystal grains greatly affects the etching. That is, if the grain size is large, the dissolution tends to proceed not only in the thickness direction in which the etching solution penetrates, but also in the plane direction. The plane direction is the direction perpendicular to the first direction. The second direction is a single direction parallel to the plane direction. For multiple copper crystal grains intersecting a line parallel to the first direction, an average distance LH of 300 μm or less indicates that relatively small copper crystal grains in the second direction are aligned in the thickness direction. This suppresses the progression of etching in the plane direction, reducing the amount of side etching. As a result, the formation of fine pattern circuits becomes easier. In this context, a fine pattern circuit refers to a circuit board where the inter-pattern dimensions are approximately 60-80% of those of a normal circuit. Furthermore, a fine pattern circuit is defined as one in which at least a portion of the circuit satisfies this range of inter-pattern dimensions. Figure 4 shows the pattern dimensions 14 and inter-pattern dimensions 15 of a ceramic copper circuit board 1. The pattern dimension 14 indicates the width of the electrically conductive portion, including the bonding layer 4. The inter-pattern dimension 15 indicates the dimensional distance between bonding layers 4 formed on the ceramic surface. In the example in Figure 4, multiple copper plates 3 are bonded to the surface 2a of the ceramic substrate 2. The multiple copper plates 3 are aligned with each other in the second direction D2 and are each bonded to the ceramic substrate 2 via multiple bonding layers 4. The distance in the second direction D2 between adjacent bonding layers 4 corresponds to the inter-pattern dimension 15. The width of the pattern (pattern dimension) is required to be greater than or equal to a predetermined value for purposes such as electrical conductivity, bonding of semiconductor elements and metal terminals, and wire bonding. For example, when the copper plate thickness is 0.1 mm or more and less than 0.5 mm, the pattern dimension is preferably 0.5 mm or more. When the copper plate thickness is 0.5 mm or more and less than 0.7 mm, the pattern dimension is preferably 0.7 mm or more. When the copper plate thickness is 0.7 mm or more and less than 0.8 mm, the pattern dimension is preferably 1.0 mm or more. Here, when the copper plate thickness is 0.1 mm or more and less than 0.5 mm, the pattern spacing on a normal copper circuit board is 0.6 mm or more. In contrast, on a fine pattern circuit, the pattern spacing is 0.4 mm or more. Similarly, when the copper plate thickness is 0.5 mm or more and less than 0.7 mm, the pattern spacing on a normal copper circuit board is 1.0 mm or more. In contrast, on a fine pattern circuit, the pattern spacing is 0.6 mm or more. When the copper plate thickness is 0.7 mm or more and less than 0.8 mm, the pattern spacing on a normal copper circuit board is 1.8 mm or more. In contrast, on a fine pattern circuit, the pattern spacing is 1.1 mm or more. Furthermore, by setting the average length LV of the copper circuit section to 300 μm or less, the copper plate becomes more easily plastically deformed. This reduces the stress generated in the ceramic copper circuit board, which is the bonded body, improving the bonding strength, substrate bending strength, and thermal cycle resistance, resulting in a highly reliable ceramic circuit board. Furthermore, in ceramic copper circuit boards, the particle size of the copper plate increases due to heat treatment during bonding. While it is possible to control particle coarsening by adding additives or processing to the copper, and by adjusting bonding conditions, this control may increase manufacturing costs. For example, by setting the distance LH and length LV to 50 μm or more, a cost-effective ceramic copper circuit board can be obtained. However, it is possible to manufacture with shorter distances LH and LV, and no lower limit is specified. The copper circuit section 3 is to which semiconductor elements and the like are bonded. To reduce thermal resistance and inductance, the thickness of the copper circuit section is preferably 0.5 mm or more, and more preferably 0.8 mm or more. In this case, if the average distance LH inside the copper circuit section is small, the amount of side etching is suppressed. This makes it possible to form a fine pattern. In addition, by relaxing the stress of the bonded body, the bonding strength, substrate bending strength, and thermal cycle resistance are improved. If the average distance LH within the copper circuit is greater than 300 μm, the copper crystal grains within the copper circuit become larger laterally, resulting in increased side etching. This reduces the dimensional accuracy of the circuit pattern. If the average length LV within the copper circuit is greater than 300 μm, the plastic deformation of the copper circuit becomes smaller. As a result, the stress in the joint increases, and properties such as joint strength tend to decrease. Furthermore, adjusting each distance LH and each length LV to be less than 50 μm increases manufacturing costs due to the load on the process control. Furthermore, even when the average distance LH is 300 μm or less, if there are many copper crystal grains with a distance LH greater than 400 μm, variations will occur in the amount of side etching. It is preferable that the distance LH be 400 μm or less. Similarly, even when the average length LV is 300 μm or less, if there are many copper crystal grains with a length LV greater than 400 μm, variations will occur in the bonding strength. It is preferable that the length LV be 400 μm or less. As described above, it is preferable that at least one of the average distance LH and average length LV of the copper crystal grains inside the copper circuit is 300 μm or less. More preferably, it is preferable that both the average distance LH and the average length LV are 300 μm or less. Furthermore, it is preferable that each distance LH and each length LV are 400 μm or less. In this case, it is preferable that each distance LH is 50 μm or more. It is preferable that each length LV is 50 μm or more. More preferably, each distance LH is 50 μm or more and each length LV is 50 μm or more. Furthermore, each distance LH is preferably 300 μm or less. Each length LV is preferably 300 μm or less. More preferably, each distance LH is 300 μm or less and each length LV is 300 μm or less. In this case, each distance LH is preferably 70 μm or more. Each length LV is preferably 70 μm or more. More preferably, each distance LH is 70 μm or more and each length LV is 70 μm or more. In the ceramic copper circuit board according to the embodiment, when an arbitrary straight line along the first direction is drawn on the cross-section of the copper circuit portion 3, for a plurality of copper crystal grains intersecting with the straight line, the distance LH and the length LV are within the ranges described above. That is, in the cross-section of the copper circuit portion 3, no matter which part the straight line is drawn on, the distance LH and the length LV are within the ranges described above. By forming a circuit on the ceramic substrate with this copper circuit portion 3, excellent reliability can be obtained.

[0010] When the copper circuit portion is formed by processing a copper plate, in the rolling process of adjusting the thickness of the copper plate, the crystal size may be adjusted to adjust the distance LH and the length LV. Also, it is possible to adjust the crystal size by adding trace elements into the copper plate. At this time, it is also possible to add a small amount of elements for controlling grain growth, such as tin (Sn) or zirconium (Zr), into the copper plate in advance. In the process such as bonding when manufacturing the ceramic copper circuit board, it is also possible to diffuse the elements for suppressing grain growth in the copper plate into the copper plate. Furthermore, the heat treatment process during the manufacturing process of the ceramic copper circuit board may be utilized. The recrystallization temperature of copper is about 220°C. As described later, the copper plate is actively metal-bonded to the ceramic substrate. In the active metal bonding method, the ceramic substrate and the copper plate are heated at 700 to 900°C. In this process, the copper plate is recrystallized. When recrystallized, the copper crystal grains grow. By controlling this phenomenon, the size of the copper crystal grains can also be adjusted.

[0011] Also, the thickness of the copper circuit portion in the first direction is preferably 0.5 mm or more, more preferably 0.8 mm or more. By setting the thickness of the copper circuit portion to the above value, the effect of fine patterning during etching can be obtained more greatly. That is, even when the thickness of the copper circuit portion is thinner than the above value, the effect of the present invention can be obtained. However, since the difference from the products manufactured by the conventional manufacturing method is not large, it is difficult to obtain the effect of the present invention. The thickness of the ceramic substrate is not particularly limited. By thinning the ceramic circuit board and thickening the copper circuit portion, the heat dissipation performance can be improved. The upper limit of the thickness of the copper circuit portion is not particularly limited, but it is preferably 5 mm or less. If the thickness of the copper circuit portion exceeds 5 mm, the warpage becomes large when joined by the active metal bonding method. As a result, it may become difficult to thin the ceramic substrate.

[0012] Also, the ceramic substrate 2 and the copper circuit portion 3 are preferably joined via a joining layer 4. When a back copper plate 5 is provided, the back copper plate 5 is preferably joined to the ceramic substrate 2 via a joining layer. Further, it is preferable to provide a joining layer containing Ag (silver) and Ti (titanium) between the ceramic substrate and the copper circuit portion. The joining layer containing Ag and Ti is formed using an active metal brazing material. Ti is an active metal. In addition to Ti, Zr (zirconium) can be mentioned as an active metal. Examples of the active metal brazing material include a mixture of Ti, Ag, and Cu (copper). For example, the content of Ti is 0.1 to 10 wt%, the content of Cu is 10 to 60 wt%, and the balance is Ag. When controlling the particle size in the copper circuit portion by the diffusion of the brazing material during joining, one or more selected from the group consisting of In (indium), Sn (tin), Al (aluminum), Si (silicon), C (carbon), and Mg (magnesium) may be added in an amount of 1 to 15 wt% as needed. In the active metal bonding method using an active metal brazing material, an active metal brazing material paste is applied to the surface of the ceramic substrate, and a copper plate is placed thereon. This is heated and joined at 700 to 900°C. According to the active metal bonding method, the bonding strength between the ceramic substrate and the copper circuit portion can be made 16 kN / m or more.

[0013] Also, a metal thin film having as a main component one selected from the group consisting of Ni (nickel), Ag (silver), and Au (gold) may be provided on the surface of the copper circuit. Examples of these metal thin films include plating films and sputtering films. By providing the metal thin film, corrosion resistance, solder wetting properties, etc. can be improved.

[0014] Such ceramic copper circuit boards are suitable for semiconductor devices in which semiconductor elements are mounted on the copper circuit portion via a bonding layer. Figure 5 shows an example of a semiconductor device. In Figure 5, 1 is a ceramic copper circuit board. 16 is a semiconductor device. 17 is a semiconductor element. 18 is a bonding layer (an example of a second bonding layer). 19 is wire bonding. 20 is a metal terminal. In Figure 5, a semiconductor element 17 is bonded to the copper circuit portion of the ceramic copper circuit board 1 via a bonding layer 18. Similarly, a metal terminal 20 is bonded via a bonding layer 18. The semiconductor elements and copper circuit portions of adjacent copper circuit portions are electrically connected by wire bonding 19. The semiconductor device according to this embodiment is not limited to this structure. For example, either wire bonding 19 or metal terminal 20 may be provided. Also, multiple semiconductor elements 17, wire bonding 19, and metal terminal 20 may be provided in the copper circuit portion 3. Furthermore, semiconductor elements, wire bonding, or metal terminal 20 may be bonded to the back copper plate 5 as needed. Furthermore, the metal terminal 20 can be made into various shapes, such as a lead frame shape or a convex shape. Furthermore, solder, brazing material, etc., are used in the bonding layer 18 that joins the semiconductor element 17 and the metal terminal 20. Lead-free solder is preferred. Solder refers to materials with a melting point of 450°C or lower. Brazing material refers to materials with a melting point exceeding 450°C. Materials with a melting point of 500°C or higher are called high-temperature brazing materials. Examples of high-temperature brazing materials include those with silver as the main component.

[0015] The ceramic copper circuit board according to this embodiment has an average distance LH of 300 μm or less, resulting in excellent etching characteristics during circuit formation. In particular, as the thickness of the copper circuit board increases to 0.8 mm or more, the side etching characteristics are suppressed, making it possible to achieve the effect of fine pattern formation. When the copper plate is thick and fine pattern formation is difficult, pattern defects may occur due to etching residue. In addition, measures such as slowing down the etching speed are necessary to prevent side etching. From this point of view, this embodiment can improve the reliability of the ceramic copper circuit board and enhance cost performance.

[0016] The ceramic copper circuit board according to this embodiment has an average length LV of 300 μm or less, which allows for stress relief. Residual stress occurs in the ceramic copper circuit board due to the bonding between the copper plate and the ceramic. Furthermore, when semiconductor elements are typically mounted on the copper circuit, stress is generated due to the difference in thermal expansion between the ceramic substrate and the copper circuit caused by heat generated from the semiconductor elements. As the particle size in the copper circuit decreases in the direction perpendicular to the bonding surface with the ceramic substrate, the stress generated in the copper circuit decreases. When the stress is reduced, it is possible to suppress the occurrence of cracks and other damage caused by the stress difference between the ceramic substrate and the copper circuit, even when the thickness of the copper circuit is 0.5 mm or more. From this perspective, this embodiment makes it possible to improve the reliability of the ceramic copper circuit board.

[0017] Furthermore, while semiconductor elements are becoming smaller, the amount of heat generated from the chips is increasing. Therefore, improving heat dissipation is crucial for ceramic copper circuit boards on which semiconductor elements are mounted. Also, to improve the performance of semiconductor devices (semiconductor modules), multiple semiconductor elements may be mounted on a ceramic copper circuit board. If even one semiconductor element exceeds its intrinsic temperature, its resistance changes to a negative temperature coefficient. This leads to thermal runaway, where power flows in a concentrated manner, causing the semiconductor device to instantly break down. Therefore, improving the reliability of the junction between the semiconductor element and the copper circuit is extremely effective. The semiconductor device according to this embodiment can also be used in PCUs, IGBTs, and IPM modules used in automobiles (including electric vehicles), railway vehicles, industrial machinery, and inverters for air conditioners, etc. Regarding automobiles, the adoption of electric vehicles is progressing. Improving the reliability of semiconductor devices enhances the safety of automobiles. The same applies to railway vehicles, industrial equipment, etc.

[0018] Next, a method for manufacturing a ceramic copper circuit board according to the embodiment will be described. The manufacturing method of the ceramic copper circuit board is not particularly limited as long as it has the above-described configuration. Here, we will give an example of a method for obtaining a ceramic copper circuit board with good yield. First, prepare a ceramic substrate and a copper plate. The copper plate should be at least 0.5 mm thick. Furthermore, the ceramic substrate is preferably one selected from aluminum oxide substrates, aluminum nitride substrates, and silicon nitride substrates. In particular, considering the heat dissipation of the entire circuit board, the ceramic substrate is preferably a silicon nitride substrate with a thermal conductivity of 50 W / (m·K) or higher and a three-point bending strength of 600 MPa or higher. Furthermore, when connecting a copper circuit portion provided on the surface of a ceramic substrate with a back copper plate provided on the back surface via through holes, a ceramic substrate having through holes is prepared. When providing through holes in a ceramic substrate, the through holes may be provided in advance at the molding stage. Alternatively, the through holes may be provided in the ceramic substrate (ceramic sintered body). Through holes are provided by laser processing, cutting, etc. Cutting processes include drilling.

[0019] When the copper plate is heated under the bonding conditions for ceramics, it is preferable to prepare a copper plate in which the average distance LH of the internal copper crystal grains is 300 μm or less. Furthermore, it is preferable to prepare a copper plate in which each distance LH is 400 μm or less. Each distance LH is preferably 50 μm or more, and more preferably 70 μm or more. Furthermore, it is preferable to prepare copper plates in which the average length LV of the internal copper crystal grains is 300 μm or less when heated under the bonding conditions for ceramics. Moreover, it is preferable to prepare copper plates in which each grain length LV is 400 μm or less. Each grain length LV is preferably 50 μm or more, and more preferably 70 μm or more. When a ceramic substrate and a copper plate are joined using the activated metal bonding method, the bonding temperature is approximately 700 to 900°C. When the copper plate is exposed to this temperature, the copper recrystallizes, causing the crystal grains to become larger. To ensure that the distance LH and length LV of the copper crystal grains are within the range described above, it is preferable to use a copper plate containing copper crystal grains with a shorter distance LH and a shorter length LV than those described above.

[0020] Furthermore, it is preferable that the ceramic substrate and the copper plate be joined by an activated metal bonding method. In the activated metal bonding method, an activated metal brazing material is used, which is a mixture of an activated metal such as Ti and Ag. Examples of activated metal brazing materials include mixtures of Ti, Ag, and Cu. In the activated metal brazing material, the Ti content is 0.1 to 10 wt%, the Cu content is 10 to 60 wt%, and the remainder is Ag. In addition, if necessary, one or more elements selected from the group consisting of In, Sn, Al, Si, C, and Mg may be added in a range of 1 to 15 wt%. The activated metal brazing material is made into a paste. The paste is a mixture of brazing material components and organic matter. In the paste, it is preferable that the brazing material components are uniformly mixed. This is because if the brazing material components are not distributed uniformly, the brazing will not be stable and it will cause a poor joint. There are various methods for uniformly dispersing brazing materials. Generally, powder mixing methods can be used, such as dry and wet milling, mixing with a stirrer, or pre-forming an alloy and then grinding it. During brazing, the copper crystal grains enlarge as the brazing material diffuses into the copper plate. Therefore, it is preferable to adjust the brazing material during manufacturing to prevent diffusion into the copper plate. Among the aforementioned brazing material components, a combination of Ag and at least one selected from the group consisting of In and Sn is a component that suppresses diffusion. Therefore, the elements contained in this combination are mixed uniformly in the paste. The brazing material components may be mixed for a sufficient amount of time to ensure uniformity, or an additional step may be added to pre-mix the above combination.

[0021] The activated metal brazing paste produced in this manner is applied to a ceramic substrate. A copper plate is placed on top of the paste. Next, the ceramic substrate with the copper plate is heated to 700-900°C to bond the materials. The heating process is carried out in a vacuum or a non-oxidizing atmosphere as needed. If carried out in a vacuum, 1 × 10 -2 It is preferable that the pressure be below Pa. Examples of non-oxidizing atmospheres include nitrogen and argon atmospheres. By using a vacuum or a non-oxidizing atmosphere, oxidation of the bonding layer can be suppressed. This improves the bonding strength. Furthermore, the diffusion of the brazing material into the copper plate can be controlled by adjusting the bonding temperature and time. To control the diffusion of brazing material components into the copper plate, it is preferable to perform a degreasing step of the activated metal brazing paste during the heat bonding process. In the heat bonding process, the bonding temperature is maintained within the range of 700 to 900°C. By degreasing the organic matter in the paste before the temperature reaches this range, the amount of diffusion of brazing material components into the copper plate can be controlled. This is because degreasing the organic matter in the brazing paste before bonding allows for homogenization of the brazing material in contact with the copper plate. In the degreasing process of the brazing paste, the temperature is maintained within a range of, for example, 250 to 500°C. The holding time is within a range of 5 to 60 minutes. Alternatively, it is also effective to raise the heating rate towards the bonding temperature to 10°C / minute or less.

[0022] Furthermore, the copper plates to be joined may be pre-processed into a pattern shape or they may be solid plates. If solid plates are used, etching is performed after joining to create the pattern shape. This process enables the manufacture of a ceramic copper circuit board. Next, a process is carried out to bond semiconductor elements and other components to the ceramic copper circuit board. A bonding layer is provided at the location where the semiconductor elements are to be bonded. The bonding layer preferably contains solder or brazing material. After providing the bonding layer, the semiconductor elements are placed on top of it. In addition, metal terminals are bonded via the bonding layer as needed. In addition, wire bonding is provided as needed. The required number of semiconductor elements, metal terminals, and wire bonding components are provided.

[0023] (Examples) (Examples 1-22, Comparative Examples 1-9) As ceramic substrates, silicon nitride substrates, aluminum nitride substrates, and aluminum oxide (alumina) substrates were prepared. The thermal conductivity of the silicon nitride substrate was 90 W / (m·K), and its three-point bending strength was 650 MPa. The thermal conductivity of the aluminum nitride substrate was 170 W / (m·K), and its three-point bending strength was 300 MPa. The thermal conductivity of the aluminum oxide substrate was 20 W / (m·K), and its three-point bending strength was 350 MPa. The size of the ceramic substrate was 50 mm (length) x 40 mm (width). The thickness of the silicon nitride substrate was 0.32 mm. The thickness of the aluminum nitride substrate and the alumina substrate was 0.635 mm.

[0024] Next, copper plates as shown in Table 1 were prepared. A copper plate measuring 40 mm vertically x 30 mm horizontally was cut from the base material to serve as a test copper plate for measuring the horizontal and vertical grain boundary distances after heating. The test plate was heated in a nitrogen atmosphere at 600°C for 1 hour, and then cut horizontally to a length of 30 mm. The area near the center of the cut test plate (approximately 15 mm from the edge) was observed with a scanning electron microscope (SEM) at 20x magnification, and a photograph was taken. For the measurement position in the thickness direction, copper plates 1-9 with a thickness of 0.5 mm were measured over the entire surface from the back to the front. Copper plates 10-18 with a thickness of 0.8 mm were measured near the edges in the thickness direction (up to approximately 150 μm from the top and bottom surfaces). The distance LH and length LV of copper crystal grains on a copper plate were calculated using the following procedure. First, an arbitrary straight line parallel to the first direction was drawn in the observed region. Next, five copper crystal grains intersecting this line were selected. The five copper crystal grains were selected randomly, except for crystal grains that were cut off at the edge of the observation region. For each of the five copper crystal grains, the distance LH in the second direction between the arbitrary line and the outer edge of the copper crystal grain was measured, and the average value of this distance LH is shown in Table 1. In addition, for each of the five copper crystal grains, the length LV in the first direction between the intersection points of the arbitrary line and the outer edge of the copper crystal grain was measured, and the average value of this length LV is shown in Table 1. [Table 1]

[0025] Next, the ceramic substrate and the copper plate were joined using the activated metal bonding method. The copper plate used was the same size as the measurement test copper plate, which was cut from the base material to 40 mm in length and 30 mm in width. The activated metal brazing material used in the activated metal bonding method contained 2 wt% Ti, 10 wt% Sn, 30 wt% Cu, and the remainder was Ag. The activated metal paste was prepared by first mixing the materials to be used simultaneously (normal mixing) and by first mixing Sn and Ag before adding other activated metal brazing material components (pre-mixing), and then mixing organic components into each to form a paste. An activated metal paste was applied to both sides of a ceramic substrate, and copper plates were placed on each side before a heat bonding process was carried out. The bonding temperature was set to 790-850°C and the bonding time to 5-20 minutes, and the bonding was performed in a vacuum (1 × 10⁻⁶). -2 The bonding was performed at a temperature of Pa or less. By varying the bonding temperature and bonding time, the grain growth of copper crystals inside the copper plate was controlled. Furthermore, the surface copper plate (front copper plate) was etched to create circuit shapes. The front copper plate was processed into one of two to four circuit shapes, and the back copper plate (back copper plate) was also etched into circuit shapes. For the fine pattern formation on the front copper plate, the pattern dimension was set to 0.5 mm. For the 0.5 mm thick front copper plate, etching was performed with the pattern spacing set to 0.8 mm, assuming zero side etching and zero brazing material overflow. For the 0.8 mm thick front copper plate, etching was performed with the pattern spacing set to 1.1 mm, assuming zero side etching and zero brazing material overflow. The 0.5 mm thick and 0.8 mm thick front copper plates were etched under the same conditions.

[0026] Under these manufacturing conditions, pre-mixed paste exhibits more uniform dispersion than normally mixed paste, thereby suppressing the growth of copper crystal grains. However, pre-mixing adds an extra step to the normal mixing process. Therefore, pre-mixing is less cost-effective than normal mixing. Furthermore, regarding bonding temperatures between 790 and 850°C, lower bonding temperatures can suppress the growth of copper crystal grains. However, approaching the lower limit of the bonding temperature may increase the likelihood of delamination or decrease the bonding strength. Furthermore, regarding bonding times of 5 to 20 minutes, shorter bonding times can suppress copper grain growth. However, the shorter the bonding time, the higher the possibility that the brazing material has not reacted sufficiently, which may lead to a decrease in bonding strength.

[0027] Therefore, in Examples 1 to 22, based on the distance LH and length LV measured in Table 1, normal manufacturing conditions (normal mixed paste, bonding temperature 830°C, bonding time 10 minutes) were used for samples with small distance LH and length LV. For samples with large distance LH and length LV, manufacturing conditions that suppress grain growth of copper crystal grains (pre-mixed paste, bonding temperature 790°C, bonding time 5 minutes) were used. In contrast, for Comparative Examples 1-3, the normal manufacturing conditions (normal mixed paste, bonding temperature 830°C, bonding time 10 minutes) were used for samples with large distance LH and length LV as measured in Table 1. For Comparative Examples 4-5, manufacturing conditions that suppress grain growth of copper crystal grains (pre-mixed paste, bonding temperature 790°C, bonding time 5 minutes) were used for samples with even larger distance LH and length LV as measured in Table 1. For Comparative Examples 6-9, manufacturing conditions that further promote copper crystal grain growth (bonding temperature 850°C, bonding time 20 minutes) were used. The resulting ceramic copper circuit boards are shown in Table 2.

[0028] [Table 2]

[0029] Next, the cross-sectional tissue of the obtained sample was observed using SEM, and the distance LH and length LV were measured. Based on the measured distance LH and length LV, distances LH1 to LH4 and lengths LV1 to LV4 were determined. Distance LH1 is the maximum value of multiple distance LH values. Distance LH2 is the average value of multiple distance LH values. Distance LH3 is the minimum value of multiple distance LH values. Distance LH4 is the difference between the maximum value (LH1) and the minimum value (LH3). Length LV1 is the maximum value of multiple length LV values. Length LV2 is the average value of multiple length LV values. Length LV3 is the minimum value of multiple length LV values. Length LV4 is the difference between the maximum value (LV1) and the minimum value (LV3). The results are shown in Table 3.

[0030] [Table 3]

[0031] As can be seen from the table, the distance LH1 and length LV1 of the ceramic copper circuit board in the example were within the range of the preferred embodiment. On the other hand, in the comparative example, the distance LH1 and length LV1 were larger than those in the example. Next, the amount of side etching was investigated for the ceramic copper circuit boards according to the examples and comparative examples. The horizontal distance between the front and back surfaces of the copper circuit area was measured using an optical microscope, and the distance that was furthest apart was defined as the amount of side etching. Furthermore, the inter-pattern dimensions were measured using a projector. The inter-pattern dimensions were measured by the distance between the location where the aforementioned side etching amount was measured in the bonding layer and another bonding layer adjacent to that location. Furthermore, peel strength was measured as the bonding strength between the copper circuit section and the ceramic substrate. Peel strength was measured by peeling off the copper circuit section, which had been pre-formed to a width of 3 mm, along a first direction at a rate of 50 mm / min. The bonding strength of the ceramic circuit substrate was measured by pressing the ceramic circuit substrate from above and below using a three-point bending jig. Next, the reliability of the ceramic copper circuit boards according to the examples and comparative examples was evaluated. Reliability was assessed by evaluating the bonding properties of the semiconductor elements. In this evaluation, we used samples prepared under the same conditions as the examples and comparative examples, specifically for reliability evaluation, rather than samples that had been cut for copper grain size measurement or samples that had been measured for bonding strength or three-point bending strength. The semiconductor element bonding was performed by joining the semiconductor element and metal terminals using lead-free solder. Wire bonding was then added to establish electrical conductivity between the semiconductor element and the metal terminals. This completed the fabrication of the semiconductor device. Next, a temperature cycle test (TCT) was performed on the semiconductor device to investigate the incidence of conductivity failures. In the TCT, one cycle consisted of -40°C for 30 minutes → room temperature for 10 minutes → 150°C for 30 minutes → room temperature for 10 minutes. After 300 cycles, the area of ​​delamination due to cracks was calculated using ultrasonic testing (SAT: Scanning Acoustic Tomography). The percentage of undelaminated area η was then evaluated. The percentage of undelaminated area η was defined as η = 100% when no cracks occurred during TCT, and η = 0% when cracks occurred across the entire bonding area of ​​the ceramic copper circuit board during TCT. The results of each measurement are shown in Table 4.

[0032] [Table 4]

[0033] In the ceramic copper circuit boards according to the examples, for those satisfying both distance LH2 and length LV2 being 300 μm or less, the side etching amount was less than 0.10 mm when the copper plate thickness was 0.5 mm. When the copper plate thickness was 0.8 mm, it was less than 0.20 mm. As the side etching amount decreased, the inter-pattern dimensions increased. In other words, with the ceramic copper circuit boards according to the examples, even under the same etching conditions as the comparative example, the inter-pattern dimensions can be reduced, and fine patterns can be formed. Furthermore, due to the stress relaxation effect of the copper circuit portion, the bonding strength was 24 kN / m or more. For the silicon nitride substrate, the three-point bending strength was 600 MPa. For the aluminum nitride substrate, the three-point bending strength was 250 MPa. For the alumina substrate, the three-point bending strength was 300 MPa or more. Thus, according to the examples, highly reliable ceramic copper circuit boards were obtained. Furthermore, among the ceramic copper circuit boards according to the examples, those in which either the distance LH2 or the length LV2 was 300 μm or less yielded ceramic copper circuit boards with good side etching amount, or ceramic copper circuit boards with good bonding strength and three-point bending strength due to stress relaxation. For both distance LH1 and length LV1, good results were obtained when both were 300 μm or less. For both distance LH3 and length LV3, samples that met the criteria of 200 μm or less yielded good results. For both distance LH4 and length LV4, samples that met the criteria of 220 μm or less yielded good results. In contrast, the comparative example showed a large amount of side etching, resulting in a state where no pattern was formed between the patterns (short circuit), and also exhibited low joint strength and three-point bending strength. From these results, it can be seen that the distance LH and length LV affect the amount of side etching, joint strength, and three-point bending strength. Furthermore, a difference in the unpeeled area ratio η was observed between the example and the comparative example. This is because, in the example, controlling the distance LH1 and length LV1 inside the copper circuit improved the amount of side etching, bonding strength, and three-point bending strength. In contrast, in the comparative example, there were cases where the unpeeled area ratio η worsened. This was because, in the copper circuit area, the distance LH2 and length LV2 of the copper crystal grains were large, resulting in a large amount of side etching. Furthermore, the bonding strength and three-point bending strength decreased, and the thermal stress inside the ceramic copper circuit board increased, leading to a greater load on the bonding area.

[0034] Although several embodiments of the present invention have been illustrated above, these embodiments are presented as examples only and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their variations are included in the scope and spirit of the invention, as well as in the claims of the invention and its equivalents. Furthermore, the embodiments described above can be implemented in combination with each other. [Explanation of Symbols]

[0035] 1…Ceramic copper circuit board 2…Ceramic substrate 3...Copper circuit section (front copper plate) 4…Bonding layer (brazing material) 5...Copper circuit section (back copper plate) 7 ...A line drawn arbitrarily perpendicular to the thickness direction of the substrate. 8... Side etching amount 9…Internal cross-sectional view of the copper plate (enlarged view of section B) 10…Copper crystal grains 11…Grain boundaries of copper crystal grains 12…Distance (LH) 13...Length (LV) 14…Pattern dimensions 15…Dimensions between patterns 16… Semiconductor Equipment 17… Semiconductor devices 18...Joining layer 19…Wire bonding 20…Metal terminal

Claims

1. Ceramic substrate and A copper circuit section provided on the ceramic substrate, A first bonding layer containing an active metal brazing material component is provided between the ceramic substrate and the copper circuit portion, Equipped with, In a cross-section of the copper circuit portion parallel to the first direction from the ceramic substrate toward the copper circuit portion, any line drawn along the first direction intersects with a plurality of copper crystal grains. The average value of multiple distances in the second direction between the aforementioned line and the end of each copper crystal grain furthest from the aforementioned line in the second direction perpendicular to the first direction is 50 μm or more and 300 μm or less. Each of the plurality of copper crystal grains has an outer edge that includes a first end and a second end that intersect the line, A ceramic copper circuit board characterized in that the maximum length in the first direction between the first end and the second end of each of the plurality of copper crystal grains is 301 μm or more.

2. The ceramic copper circuit board according to claim 1, characterized in that the maximum value of the plurality of distances is 400 μm or less.

3. The ceramic copper circuit board according to any one of claims 1 to 2, characterized in that the minimum value of the plurality of distances is 200 μm or less.

4. The ceramic copper circuit board according to any one of claims 1 to 3, characterized in that the difference between the maximum value of the plurality of distances and the minimum value of the plurality of distances is 220 μm or less.

5. The ceramic copper circuit board according to any one of claims 1 to 4, characterized in that the average length in the first direction between the first end and the second end of each of the plurality of copper crystal grains is 300 μm or less.

6. The ceramic copper circuit board according to claim 5, characterized in that the maximum value of the multiple lengths is 512 μm or less.

7. The ceramic copper circuit board according to any one of claims 5 to 6, characterized in that the minimum value of the plurality of lengths is 200 μm or less.

8. The ceramic copper circuit board according to any one of claims 5 to 7, characterized in that the difference between the maximum value of the plurality of lengths and the minimum value of the plurality of lengths is 220 μm or less.

9. The ceramic copper circuit board according to any one of claims 1 to 8, characterized in that the ceramic substrate is one of an aluminum oxide substrate, an aluminum nitride substrate, and a silicon nitride substrate.

10. The ceramic copper circuit board according to any one of claims 1 to 9, characterized in that the thickness of the ceramic substrate in the first direction is 0.7 mm or less.

11. The ceramic copper circuit substrate according to any one of claims 1 to 10, characterized in that the first bonding layer comprises at least one of Ti or Zr and at least one selected from the group consisting of Ag, Cu, Sn, In, Al, Si, C, and Mg.

12. Multiple copper circuit sections, A plurality of first bonding layers are provided between the ceramic substrate and the plurality of copper circuit portions, Equipped with, The ceramic copper circuit substrate according to any one of claims 1 to 11, characterized in that the minimum distance between adjacent first bonding layers is less than 1.0 mm.

13. The ceramic copper circuit board according to any one of claims 1 to 12, characterized in that the thickness of the copper circuit portion in the first direction is 0.5 mm or more.

14. A ceramic copper circuit board according to any one of claims 1 to 13, A semiconductor element mounted on the copper circuit portion via a second junction layer, A semiconductor device characterized by having the following features.

15. An activated metal brazing paste is applied to a ceramic substrate. A copper plate is placed on the activated metal brazing paste, The ceramic substrate and the copper plate are bonded together by maintaining a bonding temperature in the range of 700 to 900°C for a period of 5 to 60 minutes. A method for manufacturing a ceramic copper circuit board, wherein a copper circuit portion is formed by etching the copper plate, In the manufactured ceramic copper circuit board, in the cross-section of the copper circuit portion parallel to the first direction from the ceramic substrate toward the copper circuit portion, any line drawn along the first direction intersects with a plurality of copper crystal grains. A method for manufacturing a ceramic copper circuit board, characterized in that the average of a plurality of distances in the second direction between the line and the end of each copper crystal grain furthest from the line in the second direction perpendicular to the first direction is 50 μm or more and 300 μm or less.

16. The method for manufacturing a ceramic copper circuit board described in claim 15 is carried out. A method for manufacturing a semiconductor device, characterized by mounting a semiconductor element on the copper circuit portion via a second junction layer.

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